Vapor chamber, electronic equipment, and main body seat for vapor chamber

Abstract

To provide a vapor chamber, electronic equipment, and a main body seat for vapor chamber that can improve heat dissipation efficiency even in a bent state.SOLUTION: A plurality of first grooves located at a land part 33 of a vapor chamber according to the present disclosure include a plurality of main stream grooves 61 extending in a first direction and a plurality of communication grooves 65 extending in a direction different from the first direction. A communication groove row 63 includes a plurality of communication grooves 65 arrayed in the first direction. A plurality of communication groove rows located at the land part include adjacent communication groove rows 63c consisting of communication grooves linking a space part to main stream grooves adjoining the space part. The adjacent communication groove rows include low-density regions 66, 67 and a high density region 68 having a larger unit communication groove number than the low density regions. High density regions of the adjacent communication groove rows are located in a bent region and overlap with a bent line.SELECTED DRAWING: Figure 32

Description

[Technical field]

[0001] The present disclosure relates to a vapor chamber, an electronic device, and a main body sheet for a vapor chamber. [Background technology]

[0002] Electronic devices such as mobile terminals use electronic devices that generate heat. Examples of such electronic devices include central processing units (CPUs), light-emitting diodes (LEDs), and power semiconductors. Examples of mobile terminals include mobile terminals and tablet terminals.

[0003] Such electronic devices are cooled by heat dissipation devices such as heat pipes. In recent years, there has been a demand for thinner heat dissipation devices in order to make electronic devices thinner. Vapor chambers, which are thinner than heat pipes, have been developed as heat dissipation devices. Vapor chambers efficiently cool electronic devices by absorbing heat from the electronic device and diffusing it inside the sealed working fluid.

[0004] More specifically, the working fluid in the vapor chamber receives heat from the electronic device at a portion (evaporation portion) close to the electronic device. The working fluid that receives the heat evaporates to become working vapor. The working vapor diffuses in a direction away from the evaporation portion in a vapor flow path portion formed in the vapor chamber. The diffused working vapor is cooled and condensed to become working fluid. A liquid flow path portion having a capillary structure (wick) is provided in the vapor chamber. The working fluid flows through the liquid flow path portion and is transported toward the evaporation portion. The working fluid transported to the evaporation portion receives heat again in the evaporation portion and evaporates. In this way, the working fluid circulates through the vapor chamber while repeating phase changes, that is, evaporation and condensation, and diffuses the heat of the electronic device. As a result, the heat dissipation efficiency of the vapor chamber is improved.

[0005] The vapor chamber may be bent depending on the internal structure of the electronic device in which it is installed. In this case, the vapor flow path is bent and tends to collapse. This increases the flow path resistance, which causes a problem of obstructing the flow of working vapor in the vapor flow path. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Patent No. 6877513 [Patent Document 2] JP 2018-204841 A Summary of the Invention [Problem to be solved by the invention]

[0007] The present disclosure aims to provide a vapor chamber, an electronic device, and a main body sheet for a vapor chamber that can improve heat dissipation efficiency even when bent. [Means for solving the problem]

[0008] [1] This disclosure: A vapor chamber in which a working fluid is sealed, a main body sheet including a first main body surface and a second main body surface located on the opposite side to the first main body surface; a first sheet located on the first main body surface of the main body sheet; a second sheet located on the second main body surface of the main body sheet; a space provided in the main body sheet, the space being covered by the first sheet and the second sheet; A plurality of first grooves communicating with the space; Equipped with the main body sheet includes a land portion located within the space portion and extending in a first direction, the first groove is located in the first body surface of the land portion, The first grooves include a plurality of main grooves extending in a first direction and a plurality of communication grooves communicating with the main grooves and extending in a direction different from the first direction, a plurality of interconnecting groove rows are formed in the land portion, each row including a plurality of the interconnecting grooves arranged in the first direction and partitioned by the main groove; the plurality of communication groove rows located in the land portion include an adjacent communication groove row constituted by the communication groove that communicates the space portion and the main groove adjacent to the space portion, the number of the communication grooves per unit length in the first direction is defined as a unit communication groove number, the adjacent connecting groove array includes a low-density region and a high-density region in which the number of unit connecting grooves is greater than that of the low-density region, The vapor chamber includes a bent region bent along a bend line extending in a direction intersecting the first direction in a plan view, the high-density region of the adjacent connecting groove array is located in the bent region and overlaps with the bent line; It may be a vapor chamber.

[0009] [2] This disclosure: The low density regions are located on both sides of the high density region in the first direction. The vapor chamber may be as described in [1].

[0010] [3] This disclosure: the plurality of communication groove rows include an intermediate communication groove row constituted by the communication grooves communicating with two adjacent main grooves, the intermediate connecting groove row includes the low-density region and the high-density region, the high-density region of the intermediate connecting groove row is located in the bending region and overlaps with the bending line; The vapor chamber may be as described in [1] or [2].

[0011] [4] This disclosure: the plurality of communication groove rows include an intermediate communication groove row constituted by the communication grooves communicating with two adjacent main grooves, the intermediate connecting groove array includes the low-density region, the low-density region of the intermediate connecting groove row is located in the bending region and overlaps with the bending line; The vapor chamber may be as described in [1] or [2].

[0012] [5] This disclosure: When two adjacent ones of the plurality of connecting groove rows are defined as a first connecting groove row and a second connecting groove row, In the high density region, the connecting grooves of the first connecting groove array are located on an extension line of the connecting grooves of the second connecting groove array, In the low-density region, the communication grooves of the first communication groove array are positioned at positions shifted from an extension line of the communication grooves of the second communication groove array. The vapor chamber may be any one of the vapor chambers described in [1] to [4].

[0013] [6] This disclosure: In the low-density region, the communication groove extends in a direction perpendicular to the first direction, In the high-density region, the connection groove extends in a direction inclined with respect to the first direction. The vapor chamber may be any one of the vapor chambers described in [1] to [5].

[0014] [7] This disclosure: The bent line extends in a direction perpendicular to the first direction. The vapor chamber may be any one of the vapor chambers described in [1] to [6].

[0015] [8] This disclosure: The bent line extends in a direction inclined toward the first direction. The vapor chamber may be any one of the vapor chambers described in [1] to [6].

[0016] [9] The present disclosure provides a vapor chamber in which a working fluid is sealed, a main body sheet including a first main body surface and a second main body surface located on the opposite side to the first main body surface; a first sheet located on the first main body surface of the main body sheet; a second sheet located on the second main body surface of the main body sheet; a space provided in the main body sheet, the space being covered by the first sheet and the second sheet; A plurality of first grooves communicating with the space; Equipped with the main body sheet includes a land portion located within the space portion and extending in a first direction, the first groove is located in the first body surface of the land portion, The first grooves include a plurality of main grooves extending in a first direction and a plurality of communication grooves communicating with the main grooves and extending in a direction different from the first direction, A plurality of interconnecting groove rows are formed in the land portion, each row including a plurality of interconnecting grooves arranged in the first direction and partitioned by the main groove, the plurality of communication groove rows located in the land portion include an adjacent communication groove row constituted by the communication groove that communicates the space portion and the main groove adjacent to the space portion, the number of the communication grooves per unit length in the first direction is defined as a unit communication groove number, the adjacent connecting groove array includes a low-density region and a high-density region in which the number of unit connecting grooves is greater than that of the low-density region, The high-density regions of the adjacent connecting groove row are aligned along a direction intersecting the first direction. It may be a vapor chamber.

[0017]

[10] This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; a space portion extending from the first body surface to the second body surface; a land portion located within the space portion and extending in a first direction; a plurality of first grooves located on the first body surface of the land portion and communicating with the space portion; Equipped with The first grooves include a plurality of main grooves extending in a first direction and a communication groove communicating with the main grooves and extending in a direction different from the first direction, a plurality of interconnecting groove rows are formed in the land portion, each row including a plurality of the interconnecting grooves arranged in the first direction and partitioned by the main groove; the plurality of communication groove rows located in the land portion include an adjacent communication groove row constituted by the communication groove that communicates the space portion and the main groove adjacent to the space portion, the number of the communication grooves per unit length in the first direction is defined as a unit communication groove number, the adjacent connecting groove array includes a low-density region and a high-density region in which the number of unit connecting grooves is greater than that of the low-density region, The high-density regions of the adjacent connecting groove row are aligned along a direction intersecting the first direction. It may also be a main body sheet for a vapor chamber.

[0018]

[11] This disclosure relates to: A vapor chamber in which a working fluid is sealed, A main body sheet including a first main body surface, a second main body surface provided on the opposite side to the first main body surface, and a first main body recess provided on the first main body surface; A first sheet laminated on the first main body surface; a bent portion where the main body sheet and the first sheet are bent; Equipped with the first main body recess includes a first opening that opens into the first main body surface, and an inner portion that is provided at a position closer to the second main body surface than the first opening, The first main body recess is provided at least in the bent portion, In a cross-sectional view of the bent portion, the first main body recess is formed so that its width increases from the first opening toward the inner portion. It may be a vapor chamber.

[0019]

[12] This disclosure relates to: In cross section, the first body recess includes a first boundary edge extending from the first opening to the medial portion; The first boundary edge is curved toward the outside of the first main body recess at the bent portion.

[11] The vapor chamber may be as described above.

[0020]

[13] This disclosure relates to: A second sheet is laminated to the second body surface, the main body sheet includes a second main body recess provided on the second main body surface, the second body recess includes a second opening that opens into the second body surface, The first body recess and the second body recess are connected at the inner portion and communicate with each other. The vapor chamber may be as described in

[11] or

[12] .

[0021]

[14] This disclosure relates to: In a cross-sectional view of the bent portion, the second main body recess is formed so that its width increases from the second opening toward the inner portion.

[13] The vapor chamber may be as described above.

[0022]

[15] This disclosure relates to: When viewed in cross section at the bent portion, the second main body recess includes a second boundary edge extending from the second opening to the inner portion; The second boundary edge is curved toward the outside of the second main body recess at the bent portion.

[14] The vapor chamber may be as described above.

[0023]

[16] This disclosure relates to: The first main body recess is also provided at a position different from the bent portion, In a cross-sectional view at a position different from the bent portion, the first main body recess is formed so as to have a larger width from the first opening toward the inner portion, and the second main body recess is formed so as to have a smaller width from the second opening toward the inner portion. The vapor chamber may be as described in

[14] or

[15] .

[0024]

[17] This disclosure relates to: The first main body recess is also provided at a position different from the bent portion, In a cross-sectional view at a position different from the bent portion, the first main body recess is formed so that its width decreases from the first opening toward the inner portion, and the second main body recess is formed so that its width decreases from the second opening toward the inner portion. The vapor chamber may be as described in

[14] or

[15] .

[0025]

[18] This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface provided on the opposite side to the first body surface; a first main body recess provided on the first main body surface; a second body recess provided on the second body surface; Equipped with the first main body recess includes a first opening that opens into the first main body surface, and an inner portion that is provided at a position closer to the second main body surface than the first opening, the second body recess includes a second opening that opens into the second body surface, the first body recess and the second body recess are connected at the inner portion and communicate with each other, and in a cross-sectional view, the first body recess is formed so as to have a larger width from the first opening toward the inner portion, and the second body recess is formed so as to have a smaller width from the second opening toward the inner portion. It may also be a main body sheet for a vapor chamber.

[0026]

[19] This disclosure relates to: In cross section, the first body recess includes a first boundary edge extending from the first opening to the medial portion; The first boundary edge is curved toward the outside of the first body recess. It may be a main body sheet for a vapor chamber as described in

[18] .

[0027]

[20] This disclosure relates to: In cross section, the second body recess includes a second boundary edge extending from the second opening to the medial portion; The second boundary edge is curved toward the outside of the second body recess. It may be a main body sheet for a vapor chamber as described in

[18] or

[19] .

[0028]

[21] This disclosure relates to: A main body sheet for a vapor chamber according to any one of

[18] to

[20] , A first sheet laminated on the first main body surface; A second sheet laminated to the second main body surface; Equipped with It may be a vapor chamber.

[0029]

[22] This disclosure relates to: The main body sheet, the first sheet, and the second sheet have a bent portion, The first main body recess and the second main body recess are provided at least in the bent portion, In a cross-sectional view of the bent portion, the first main body recess is formed so that its width increases from the first opening toward the inner portion, and the second main body recess is formed so that its width decreases from the second opening toward the inner portion.

[21] The vapor chamber may be as described above.

[0030]

[23] This disclosure relates to: The first main body recess and the second main body recess are also provided at positions different from the bent portion, In a cross-sectional view at a position different from the bent portion, the first main body recess is formed so that its width decreases from the first opening toward the inner portion, and the second main body recess is formed so that its width decreases from the second opening toward the inner portion.

[22] The vapor chamber may be as described above.

[0031]

[24] This disclosure relates to: A vapor chamber containing a working fluid, a main body sheet including a first main body surface and a second main body surface located on the opposite side to the first main body surface; a first sheet located on the first main body surface of the main body sheet; a second sheet located on the second main body surface of the main body sheet; a space provided in the main body sheet, the space being covered by the first sheet and the second sheet; Equipped with the main body sheet includes a plurality of land portions located within the space portion and extending in a first direction; the space portion includes a plurality of working fluid passages formed between two adjacent ones of the land portions, A reinforcing portion is provided in each of the working fluid passages, the reinforcing portion extending in a thickness direction of the main body sheet from the first sheet to the second sheet, The vapor chamber includes a bent region bent along a bend line extending in a direction intersecting the first direction in a plan view, The reinforcing portion is located in the bending region and aligned along the bending line. It may be a vapor chamber.

[0032]

[25] This disclosure relates to: The reinforcing portion includes a protrusion protruding from one of the two land portions forming the working fluid passage in a width direction of the land portion.

[24] The vapor chamber may be as described above.

[0033]

[26] This disclosure relates to: The reinforcing portion includes a protrusion protruding from each of the two land portions forming the working fluid passage in a width direction of the land portion.

[24] The vapor chamber may be as described above.

[0034]

[27] This disclosure relates to: The reinforcing portion includes a plurality of the protruding portions spaced apart in the first direction. The vapor chamber may be as described in

[25] or

[26] .

[0035]

[28] This disclosure relates to: a plurality of first grooves located on the first body surface of the land portion and communicating with the space portion; the protrusion is defined by the first body surface and the second body surface to form the body sheet; A plurality of second grooves communicating with the space and the first groove are located on the first body surface of the protrusion. The vapor chamber may be any one of the vapor chambers described in

[25] to

[27] .

[0036]

[29] This disclosure relates to: The reinforcing portion includes a reinforcing land portion spaced apart from the land portion.

[24] The vapor chamber may be as described above.

[0037]

[30] This disclosure relates to: The reinforcing portion includes a plurality of the reinforcing land portions.

[29] The vapor chamber may be as described above.

[0038]

[31] This disclosure relates to: The bent line extends in a direction perpendicular to the first direction. The vapor chamber may be any one of the vapor chambers described in

[24] to

[30] .

[0039]

[32] This disclosure relates to: The bent line extends in a direction inclined toward the first direction. The vapor chamber may be any one of the vapor chambers described in

[24] to

[30] .

[0040]

[33] This disclosure relates to: A vapor chamber containing a working fluid, a main body sheet including a first main body surface and a second main body surface located on the opposite side to the first main body surface; a first sheet located on the first main body surface of the main body sheet; a second sheet located on the second main body surface of the main body sheet; a space provided in the main body sheet, the space being covered by the first sheet and the second sheet; Equipped with The vapor chamber is divided into a first region, a second region, and a reinforced region located between the first region and the second region; the main body sheet includes a plurality of land portions located within the space portion, the land portions extending in a first direction from the first region through the reinforcing region to the second region, the space portion includes a plurality of working fluid passages formed between two adjacent ones of the land portions, A reinforcing portion is provided in each of the working fluid passages, the reinforcing portion extending in a thickness direction of the main body sheet from the first sheet to the second sheet, The reinforcing portions are located in the reinforcing region and are arranged along a direction intersecting the first direction. It may be a vapor chamber.

[0041]

[34] This disclosure relates to: The vapor chamber is divided into a first region, a second region, and a reinforced region located between the first region and the second region; The reinforcing portion is located in a reinforcing region.

[33] The vapor chamber may be as described in the above.

[0042]

[35] This disclosure relates to: The reinforcement region at least partially overlaps with a bent region bent along a bend line extending in a direction intersecting the first direction in a plan view of the vapor chamber.

[34] The vapor chamber may be as described above.

[0043]

[36] This disclosure relates to: A main body sheet for a vapor chamber in which a working fluid is sealed, A first body surface; a second body surface located opposite the first body surface; a space portion extending from the first body surface to the second body surface; A plurality of land portions located within the space portion and extending in a first direction; Equipped with the space portion includes a plurality of working fluid passages formed between two adjacent ones of the land portions, A reinforcing portion is provided in each of the working fluid passages, the reinforcing portion extending in a thickness direction of the main body sheet from the first main body surface to the second main body surface, The reinforcing portions are arranged along a direction intersecting the first direction. It may also be a main body sheet for a vapor chamber.

[0044]

[37] This disclosure relates to: Housing and a device contained within the housing; and A vapor chamber according to any one of [1] to [9],

[11] to

[17] , and

[21] to

[35] , which is in thermal contact with the device; The electronic device may be provided with: Effect of the Invention

[0045] According to the present disclosure, the heat dissipation efficiency can be improved even when the connector is bent. [Brief description of the drawings]

[0046] [Figure 1]FIG. 1 is a schematic perspective view illustrating an electronic device according to a first embodiment of the present disclosure. [Diagram 2] FIG. 2 is a schematic diagram showing an example of the vapor chamber according to the present embodiment mounted on the electronic device shown in FIG. [Diagram 3] FIG. 3 is a schematic diagram showing another example of the vapor chamber according to the present embodiment mounted on the electronic device shown in FIG. [Figure 4] FIG. 4 is an external perspective view showing the vapor chamber according to the first embodiment of the present disclosure. [Diagram 5] FIG. 5 is a plan view of the vapor chamber shown in FIG. 2 before bending. [Figure 6] FIG. 6 is a cross-sectional view taken along line AA in FIG. [Figure 7] FIG. 7 is a plan view showing the inner surface of the first sheet shown in FIG. [Figure 8] FIG. 8 is a plan view showing the inner surface of the second sheet shown in FIG. [Figure 9] FIG. 9 is a plan view showing the first main body surface of the wick sheet shown in FIG. [Figure 10] FIG. 10 is a plan view showing the second main body surface of the wick sheet shown in FIG. [Figure 11] FIG. 11 is a partially enlarged cross-sectional view of FIG. 6, taken along line BB in FIG. 13A, which will be described later. [Figure 12] FIG. 12 is a partial enlarged view of the liquid flow path portion shown in FIG. [Figure 13A] 13A is an enlarged plan view showing a reinforcing portion of the vapor chamber shown in FIG. [Figure 13B] FIG. 13B is an enlarged plan view showing a modification of the reinforcing portion shown in FIG. 13A. [Figure 13C] FIG. 13C is an enlarged plan view showing another modified example of the reinforcing portion shown in FIG. 13A. [Figure 14] FIG. 14 is a cross-sectional view taken along line CC in FIG. 13A. [Figure 15] FIG. 15 is a schematic cross-sectional view showing a bending region of the vapor chamber shown in FIG. [Figure 16A] FIG. 16A is an enlarged plan view showing another modified example of the reinforcing portion shown in FIG. 13A. [Figure 16B] FIG. 16B is an enlarged plan view showing another modified example of the reinforcing portion shown in FIG. 13A. [Figure 16C] FIG. 16C is an enlarged plan view showing another modified example of the reinforcing portion shown in FIG. 13A. [Figure 16D] FIG. 16D is an enlarged plan view showing another modified example of the reinforcing portion shown in FIG. 13A. [Figure 17A] FIG. 17A is a cross-sectional view showing a modification of FIG. [Figure 17B] FIG. 17B is a cross-sectional view showing another modified example of FIG. [Figure 17C] FIG. 17C is an enlarged plan view showing the bridge portion of FIG. 17B. [Figure 18] FIG. 18 is an exterior perspective view showing a vapor chamber according to the second embodiment of the present disclosure. [Figure 19] FIG. 19 is a plan view of the vapor chamber shown in FIG. 18 before bending. [Figure 20] FIG. 20 is an enlarged plan view showing the reinforcing portion of the vapor chamber shown in FIG. [Figure 21] FIG. 21 is an enlarged plan view showing a reinforcing portion of a vapor chamber according to the third embodiment of the present disclosure. [Figure 22] FIG. 22 is a cross-sectional view taken along line DD in FIG. [Figure 23] FIG. 23 is a cross-sectional view taken along line EE in FIG. [Figure 24A] 24A is an enlarged plan view showing a modification of the reinforcing portion shown in FIG. 21. FIG. [Figure 24B] 24B is an enlarged plan view showing another modified example of the reinforcing portion shown in FIG. [Figure 25A] 25A is an enlarged plan view showing another modified example of the reinforcing portion shown in FIG. 21. FIG. [Figure 25B] 25B is an enlarged plan view showing another modified example of the reinforcing portion shown in FIG. 21. FIG. [Figure 25C]25C is an enlarged plan view showing another modified example of the reinforcing portion shown in FIG. 21. FIG. [Figure 26] FIG. 26 is a cross-sectional view showing a modification of FIG. [Figure 27A] FIG. 27A is a cross-sectional view showing another modified example of FIG. [Figure 27B] FIG. 27B is a cross-sectional view showing another modified example of FIG. [Figure 28] FIG. 28 is an exterior perspective view showing a vapor chamber according to the fourth embodiment of the present disclosure. [Figure 29] FIG. 29 is a plan view of the vapor chamber shown in FIG. 28 before bending. [Diagram 30] 30 is a plan view showing the first main body surface of the wick sheet of the vapor chamber shown in FIG. [Diagram 31] 31 is a plan view showing the second main body surface of the wick sheet of the vapor chamber shown in FIG. [Diagram 32] FIG. 32 is a partial enlarged view of the liquid flow path portion shown in FIG. [Diagram 33] FIG. 33 is a schematic cross-sectional view showing a bending region of the vapor chamber shown in FIG. [Figure 34A] FIG. 34A is a partial enlarged view showing a modification of the liquid flow path portion shown in FIG. [Figure 34B] FIG. 34B is a cross-sectional view taken along line FF in FIG. 34A. [Figure 34C] FIG. 34C is a cross-sectional view taken along line GG in FIG. 34A. [Diagram 35] FIG. 35 is a partial enlarged view showing another modified example of the liquid flow path portion shown in FIG. [Figure 36A] FIG. 36A is a partial enlarged view showing another modified example of the liquid flow path portion shown in FIG. [Figure 36B] FIG. 36B is a partial enlarged view showing another modified example of the liquid flow path portion shown in FIG. [Figure 37A] FIG. 37A is a partial enlarged view showing another modified example of the liquid flow path portion shown in FIG. [Figure 37B]FIG. 37B is a partial enlarged view showing another modified example of the liquid flow path portion shown in FIG. [Figure 38] FIG. 38 is an exterior perspective view showing a vapor chamber according to the fifth embodiment of the present disclosure. [Figure 39] FIG. 39 is a plan view of the vapor chamber shown in FIG. 38 before bending. [Diagram 40] FIG. 40 is a plan view showing the first main body surface of the wick sheet shown in FIG. [Diagram 41] FIG. 41 is a partial enlarged view of the liquid flow path portion shown in FIG. [Diagram 42] FIG. 42 is a partial enlarged view showing a modification of the liquid flow path portion shown in FIG. [Diagram 43] FIG. 43 is a plan view showing a modified example of the vapor chamber shown in FIG. 39 before bending. [Diagram 44] FIG. 44 is a top view showing a vapor chamber according to the sixth embodiment of the present disclosure. [Diagram 45] FIG. 45 is a cross-sectional view taken along line HH in FIG. [Figure 46] FIG. 46 is a top view of the lower sheet of FIG. [Figure 47] FIG. 47 is a bottom view of the upper sheet of FIG. [Figure 48] FIG. 48 is a top view of the main body sheet of FIG. [Figure 49] FIG. 49 is a partially enlarged cross-sectional view of FIG. [Figure 50] 50 is a partially enlarged top view of the liquid flow path portion shown in FIG. [Figure 51] FIG. 51 is a view for explaining a material sheet preparing step in the manufacturing method for a vapor chamber according to the sixth embodiment of the present disclosure. [Figure 52] FIG. 52 is a view for explaining a resist pattern forming step in the method for manufacturing a vapor chamber according to the sixth embodiment of the present disclosure. [Diagram 53] FIG. 53 is a view for explaining an etching step in the method for manufacturing a vapor chamber according to the sixth embodiment of the present disclosure. [Figure 54] FIG. 54 is a view for explaining a resist pattern removing step in the method for manufacturing a vapor chamber according to the sixth embodiment of the present disclosure. [Figure 55] FIG. 55 is a view for explaining a bonding step in the manufacturing method for a vapor chamber according to the sixth embodiment of the present disclosure. [Figure 56A] 56A is a partially enlarged cross-sectional view showing a modification of the steam flow path portion of FIG. [Figure 56B] 56B is a partially enlarged cross-sectional view showing another modified example of the steam flow path portion of FIG. [Figure 56C] 56C is a partially enlarged cross-sectional view showing another modified example of the steam flow path portion of FIG. [Figure 56D] FIG. 56D is a cross-sectional view showing a modification of the steam flow path portion of FIG. [Figure 56E] FIG. 56E is a cross-sectional view showing another modified example of the steam flow path portion of FIG. [Figure 57] FIG. 57 is a cross-sectional view showing another modified example of the steam flow path portion of FIG. [Figure 58] FIG. 58 is a partially enlarged cross-sectional view of FIG. [Figure 59] FIG. 59 is a top view showing a modification of the vapor chamber of FIG. [Figure 60] FIG. 60 is a perspective view showing the vapor chamber bent along the bend line of FIG. [Figure 61] FIG. 61 is a cross-sectional view showing an example of a cross section at a position different from the bent portion of the vapor chamber in FIG. [Figure 62] FIG. 62 is a partially enlarged cross-sectional view of FIG. [Figure 63A] FIG. 63A is a diagram for explaining an example of a vapor flow path recess of the vapor chamber shown in FIG. [Figure 63B] FIG. 63B is a diagram for explaining another example of the vapor flow path recessed portion of the vapor chamber shown in FIG. [Figure 64] FIG. 64 is a cross-sectional view showing a modification of the steam flow path portion of FIG. [Figure 65] FIG. 65 is a partially enlarged cross-sectional view of FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0047] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the drawings attached to this specification, the scale and aspect ratios are appropriately changed and exaggerated from those of the actual objects for the convenience of illustration and understanding.

[0048] The geometric conditions, physical characteristics, terms specifying the degree of the geometric conditions or physical characteristics, and numerical values ​​indicating the geometric conditions or physical characteristics used in this specification may be interpreted without being bound by strict meaning. These geometric conditions, physical characteristics, terms, and numerical values ​​may be interpreted including the range of the degree to which similar functions can be expected. Examples of terms specifying geometric conditions include "length", "angle", "shape", and "arrangement". Examples of terms specifying geometric conditions include "parallel", "orthogonal", and "same". Furthermore, in order to clarify the drawings, the shapes of multiple parts that can be expected to have similar functions are regularly described. However, without being bound by strict meaning, the shapes of the parts may be different from each other within the range in which the functions can be expected. In the drawings, the boundary lines indicating the joint surfaces between members are shown as simple straight lines for convenience, but they are not limited to being strictly straight lines, and the shape of the boundary line is arbitrary within the range in which the desired joint performance can be expected.

[0049] (First embodiment) A vapor chamber, an electronic device, and a main body sheet for a vapor chamber according to a first embodiment of the present disclosure will be described with reference to Figs. 1 to 17C. A vapor chamber 1 according to this embodiment is accommodated in a housing H of an electronic device E together with an electronic device D that generates heat, and is a device for cooling the electronic device D. Examples of the electronic device E include mobile terminals such as portable terminals and tablet terminals. Examples of the electronic device D include a central processing unit (CPU), a light-emitting diode (LED), and a power semiconductor. The electronic device D may also be referred to as a cooled device.

[0050] Here, first, an electronic device E equipped with the vapor chamber 1 according to the present embodiment will be described by taking a tablet terminal as an example. As shown in FIG. 1, the electronic device E may include a housing H, an electronic device D housed in the housing H, and a vapor chamber 1. In the electronic device E shown in FIG. 1, a touch panel display TD is provided on the front surface of the housing H. The vapor chamber 1 is housed in the housing H and arranged so as to be in thermal contact with the electronic device D. The vapor chamber 1 receives heat generated by the electronic device D when the electronic device E is used. The heat received by the vapor chamber 1 is released to the outside of the vapor chamber 1 via the working fluids 2a and 2b described later, and the electronic device D is effectively cooled. When the electronic device E is a tablet terminal, the electronic device D corresponds to a central processing unit or the like.

[0051] Next, the vapor chamber 1 according to the present embodiment will be described. The vapor chamber 1 according to the present embodiment is bent as shown in Figs. 2 and 3. The vapor chamber 1 is bent according to the internal structure of the electronic device E. The vapor chamber 1 may be bent depending on the positional relationship between the electronic device E that generates heat and the housing member Ha that releases the heat. The housing member Ha is a member that constitutes the housing H.

[0052] As an example, the electronic device D and the housing member Ha are arranged as shown in FIG. 2. In this case, the vapor chamber 1 is bent at a right angle so as to contact the electronic device D and the housing member Ha. More specifically, a bent region 7a described later is formed in a 1 / 4 arc shape. The electronic device D is mounted on a substrate S. As another example, the electronic device D and the housing member Ha are arranged as shown in FIG. 3. In this case, the vapor chamber 1 is bent 180° so as to contact the electronic device D and the housing member Ha. More specifically, a bent region 7a described later is formed in a 1 / 2 arc shape. Although FIGS. 2 and 3 show an example of the vapor chamber 1 bent at one bend line 8 (see FIGS. 4 and 5), the present invention is not limited to this. The vapor chamber 1 may be bent at different positions at two or more bend lines 8.

[0053] In this embodiment, as shown in FIG. 4, a vapor chamber 1 bent at a right angle at one bending line 8 will be described as an example. The vapor chamber 1 shown in FIG. 4 is divided into a first region 5, a second region 6, and a reinforced region 7 located between the first region 5 and the second region 6. The reinforced region 7 according to this embodiment may include a bending region 7a. In the bending region 7a, the vapor chamber 1 is bent at a right angle. The first region 5 and the second region 6 are formed substantially flat. The electronic device D may be in contact with the first region 5, and the housing member Ha (see FIG. 2) may be in contact with the second region 6. A detailed description of each region will be given later.

[0054] Here, the configuration of the vapor chamber 1 will be described with reference to Fig. 5 to Fig. 11, which show the vapor chamber 1 before bending. The vapor chamber 1 shown in Fig. 4 is obtained by bending the flat vapor chamber 1 shown in Fig. 5.

[0055] 5 and 6, the vapor chamber 1 includes a sealed space 3 in which working fluids 2a and 2b are sealed. The working fluids 2a and 2b in the sealed space 3 repeatedly undergo phase changes, thereby cooling the above-mentioned electronic device D. Examples of the working fluids 2a and 2b include pure water, ethanol, methanol, acetone, etc., and mixtures thereof.

[0056] As shown in FIG. 5 and FIG. 6, the vapor chamber 1 includes a first sheet 10, a second sheet 20, a wick sheet 30 for the vapor chamber, a vapor flow path section 50, and a first liquid flow path section 60. The second sheet 20 is provided on the opposite side of the wick sheet 30 from the first sheet 10. The wick sheet 30 for the vapor chamber is an example of a main body sheet, and is interposed between the first sheet 10 and the second sheet 20. The wick sheet 30 for the vapor chamber is hereinafter simply referred to as the wick sheet 30. In the vapor chamber 1 according to this embodiment, the first sheet 10, the wick sheet 30, and the second sheet 20 are stacked in this order. In this embodiment, an example in which the wick sheet 30 is composed of one sheet is shown, but the wick sheet 30 may be composed of two or more sheets, and the number of sheets of the wick sheet 30 is arbitrary.

[0057] The vapor chamber 1 shown in FIG. 5 is generally formed in a thin flat plate shape. The planar shape of the vapor chamber 1 before bending is arbitrary, but may be a rectangular shape as shown in FIG. 5. The planar shape of the vapor chamber 1 may be, for example, a rectangle with one side being 1 cm and the other side being 3 cm, or a square with one side being 15 cm. The planar dimensions of the vapor chamber 1 before bending are arbitrary. In this embodiment, an example in which the planar shape of the vapor chamber 1 before bending is a rectangular shape with the X direction described later as the longitudinal direction will be described. In this case, as shown in FIGS. 7 to 10, the first sheet 10, the second sheet 20, and the wick sheet 30 may have the same planar shape as the vapor chamber 1. The planar shape of the vapor chamber 1 before bending is not limited to a rectangular shape, and may be any shape such as a circular shape, an elliptical shape, an L-shape, or a T-shape.

[0058] 4 and 5, the vapor chamber 1 includes an evaporation region SR where the working fluid 2b evaporates and a condensation region CR where the working vapor 2a condenses. The working vapor 2a is a working fluid in a gaseous state, and the working fluid 2b is a working fluid in a liquid state.

[0059] The evaporation region SR is a region that overlaps with the electronic device D in a plan view and is in contact with the electronic device D. The evaporation region SR is located within the first region 5, but the position of the evaporation region SR is arbitrary. In this embodiment, the evaporation region SR is formed on one side in the X direction of the vapor chamber 1. In FIG. 5, the evaporation region SR is located on the left side of the vapor chamber 1. Heat from the electronic device D is transferred to the evaporation region SR, and the working liquid 2b is evaporated by this heat, and the working vapor 2a is generated. The heat from the electronic device D can be transferred not only to the region that overlaps with the electronic device D in a plan view, but also to the periphery of the region that overlaps with the electronic device D. For this reason, the evaporation region SR may include the region that overlaps with the electronic device D and the periphery thereof in a plan view.

[0060] The condensation region CR is a region that does not overlap with the electronic device D in a plan view, and is a region where the working vapor 2a mainly releases heat and condenses. The condensation region CR may be located within the second region 6. The condensation region CR may be a region surrounding the evaporation region SR including the second region 6. Heat is released from the working vapor 2a in the condensation region CR. The working vapor 2a is cooled and condensed, and a working liquid 2b is generated.

[0061] Here, the plan view is a state in which the vapor chamber 1 is viewed from a direction perpendicular to the surface that receives heat from the electronic device D and the surface that releases the received heat. The surface that receives heat corresponds to the second sheet outer surface 20b of the second sheet 20, which will be described later. The surface that releases heat corresponds to the first sheet outer surface 10a of the first sheet 10, which will be described later. For example, as shown in FIG. 4, in the first region 5 of the bent vapor chamber 1, the state viewed in the direction indicated by the arrow V1 corresponds to the plan view. In the second region 6, the state viewed in the direction indicated by the arrow V2 corresponds to the plan view. As shown in FIG. 5, in the vapor chamber 1 before bending, the state viewed from above or below corresponds to the plan view.

[0062] As shown in FIG. 6, the first sheet 10 includes a first sheet outer surface 10a located on the opposite side to the wick sheet 30, and a first sheet inner surface 10b facing the wick sheet 30. In the second region 6 described above, the first sheet outer surface 10a may be in contact with the housing member Ha described above. A first main body surface 30a of the wick sheet 30 described below is in contact with the first sheet inner surface 10b. As shown in FIG. 6 and FIG. 7, the first sheet 10 may be formed in a substantially flat shape. The first sheet 10 may have a substantially constant thickness.

[0063] As shown in Fig. 7, alignment holes 12 may be formed at the four corners of the first sheet 10. Fig. 7 shows an example in which the planar shape of the alignment holes 12 is circular, but this is not limited to this. The alignment holes 12 may penetrate the first sheet 10.

[0064] As shown in FIG. 6, the second sheet 20 includes a second sheet inner surface 20a facing the wick sheet 30 and a second sheet outer surface 20b located on the opposite side to the wick sheet 30. In the first region 5 described above, the electronic device D may be in contact with the second sheet outer surface 20b. A second main body surface 30b of the wick sheet 30 described below is in contact with the second sheet inner surface 20a. As shown in FIG. 6 and FIG. 8, the second sheet 20 may be formed in a substantially flat shape. The second sheet 20 may have a substantially constant thickness.

[0065] As shown in Fig. 8, alignment holes 22 may be formed at the four corners of the second sheet 20. Fig. 8 shows an example in which the planar shape of the alignment holes 22 is circular, but this is not limited to this. The alignment holes 22 may penetrate the second sheet 20.

[0066] 5, the wick sheet 30 includes a first body surface 30a and a second body surface 30b located on the opposite side to the first body surface 30a. A first sheet inner surface 10b of the first sheet 10 contacts the first body surface 30a. A second sheet inner surface 20a of the second sheet 20 contacts the second body surface 30b.

[0067] The first sheet inner surface 10b of the first sheet 10 and the first body surface 30a of the wick sheet 30 may be diffusion bonded. The first sheet inner surface 10b and the first body surface 30a may be permanently bonded to each other.

[0068] Similarly, the second sheet inner surface 20a of the second sheet 20 and the second body surface 30b of the wick sheet 30 may be diffusion bonded. The second sheet inner surface 20a and the second body surface 30b may be permanently bonded to each other.

[0069] The term "permanently joined" is not limited to a strict meaning, but is used to mean that the joining is sufficient to maintain the sealing of the sealed space 3 when the vapor chamber 1 is in operation.

[0070] As shown in FIG. 5, FIG. 9, and FIG. 10, the wick sheet 30 according to the present embodiment includes a frame body portion 32 and a plurality of land portions 33. The frame body portion 32 defines a steam flow passage portion 50, and is formed in a rectangular frame shape along the X direction and the Y direction in a plan view. The land portion 33 is located within the steam flow passage portion 50, and is located inside the frame body portion 32 in a plan view. The frame body portion 32 and the land portion 33 are portions where the material of the wick sheet 30 remains without being etched in an etching process described later. A first steam passage 51, which will be described later, through which the working steam 2a flows, is formed between the frame body portion 32 and the adjacent land portion 33. A second steam passage 52, which will be described later, through which the working steam 2a flows, is formed between the adjacent land portions 33.

[0071] The land portion 33 may extend in an elongated shape with the X direction as the longitudinal direction in a plan view. The planar shape of the land portion 33 may be an elongated rectangular shape. The X direction is an example of a first direction, and corresponds to the left-right direction in Figs. 9 and 10. The land portions 33 may be disposed at equal intervals in the Y direction. The Y direction is an example of a second direction, and is a direction perpendicular to the X direction in a plan view. The Y direction is a width direction of the land portion 33, and corresponds to the up-down direction in Figs. 9 and 10. The land portions 33 may be located parallel to each other. The direction perpendicular to each of the X direction and the Y direction is defined as the Z direction. The Z direction corresponds to the up-down direction in Figs. 6 and 11, and corresponds to the thickness direction.

[0072] 11, the width w1 of the land portion 33 may be, for example, 100 μm to 1500 μm. Here, the width w1 of the land portion 33 is the dimension of the land portion 33 in the Y direction. The width w1 refers to the dimension of the wick sheet 30 in the Z direction at a position where a through portion 34, which will be described later, exists. The width w1 refers to the dimension of the land portion 33 from one overhanging portion 42, which will be described later, to the other overhanging portion 42.

[0073] Here, the X direction in the first region 5 and the second region 6 of the vapor chamber 1 shown in FIG. 4 corresponds to the direction along the longitudinal direction of the land portion 33. The X direction in the first region 5 corresponds to the up-down direction in FIG. 4. The Y direction in the first region 5 and the second region 6 of the vapor chamber 1 shown in FIG. 4 corresponds to the direction in which the land portions 33 are arranged. The Z direction in the first region 5 and the second region 6 of the vapor chamber 1 shown in FIG. 4 corresponds to the direction perpendicular to the vapor chamber 1. The Z direction in the second region 6 corresponds to the up-down direction in FIG. 4.

[0074] The frame portion 32 and each land portion 33 are diffusion bonded to the first sheet 10 and also to the second sheet 20. This improves the mechanical strength of the vapor chamber 1. A wall surface 53a of the first vapor flow path recess 53 and a wall surface 54a of the second vapor flow path recess 54 described below form the side walls of the land portion 33. The first main body surface 30a and the second main body surface 30b of the wick sheet 30 may be formed flat across the frame portion 32 and each land portion 33.

[0075] As shown in Figures 9 and 10, alignment holes 35 may be formed at the four corners of the wick sheet 30. Figures 9 and 10 show an example in which the planar shape of the alignment holes 35 is circular, but this is not limited thereto. The alignment holes 35 may penetrate the wick sheet 30.

[0076] As shown in FIG. 6, the vapor flow path section 50 may be provided on the first main body surface 30a of the wick sheet 30. The vapor flow path section 50 is an example of a space section. The vapor flow path section 50 may be a flow path through which the working vapor 2a mainly passes. The working liquid 2b may also pass through the vapor flow path section 50. In this embodiment, the vapor flow path section 50 may extend from the first main body surface 30a to the second main body surface 30b, or may penetrate the wick sheet 30. The vapor flow path section 50 may be covered by the first sheet 10 on the first main body surface 30a, and may be covered by the second sheet 20 on the second main body surface 30b.

[0077] As shown in FIG. 9 and FIG. 10, the steam flow passage section 50 according to the present embodiment may include a first steam passage 51 and a plurality of second steam passages 52. The first steam passage 51 and the second steam passage 52 are each an example of a working fluid passage. The first steam passage 51 is formed between the frame body section 32 and the land section 33. The first steam passage 51 is formed inside the frame body section 32 and continuously outside the land section 33. The planar shape of the first steam passage 51 may be a rectangular frame shape along the X direction and the Y direction. The first steam passage 51 may include a portion extending in the X direction and a portion extending in the Y direction. The second steam passage 52 is formed between the land sections 33 adjacent to each other. The planar shape of the second steam passage 52 may be an elongated rectangular shape. The second steam passage 52 may extend in the X direction. The steam flow passage section 50 is divided into the first steam passage 51 and a plurality of second steam passages 52 by the plurality of land sections 33.

[0078] 6, the first steam passage 51 and the second steam passage 52 may extend from the first body surface 30a to the second body surface 30b of the wick sheet 30. In this case, the first steam passage 51 and the second steam passage 52 penetrate the wick sheet 30. The first steam passage 51 and the second steam passage 52 include a first steam flow path recess 53 provided in the first body surface 30a and a second steam flow path recess 54 provided in the second body surface 30b. The first steam flow path recess 53 and the second steam flow path recess 54 are in communication with each other. The first steam flow path recess 53 and the second steam flow path recess 54 may extend in the X direction.

[0079] The first vapor flow path recess 53 may be formed by etching the first main body surface 30a of the wick sheet 30 in an etching step described later. The first vapor flow path recess 53 is formed in a concave shape in the first main body surface 30a. The first vapor flow path recess 53 may include a wall surface 53a formed in a curved shape as shown in FIG. 11. FIG. 11 shows a cross section perpendicular to the X direction. This wall surface 53a defines the first vapor flow path recess 53, and may be curved so as to approach the opposing wall surface 53a as it approaches the second main body surface 30b. The first vapor flow path recess 53 constitutes a portion of the first vapor path 51 that is relatively close to the first sheet 10 and a portion of the second vapor path 52 that is relatively close to the first sheet 10.

[0080] The width w2 of the first steam flow path recess 53 in the first region 5 and the second region 6 may be, for example, 100 μm to 5000 μm. The width w2 of the first steam flow path recess 53 is the dimension in the Y direction, and is the dimension of the first steam flow path recess 53 on the first main body surface 30a. The width w2 corresponds to the dimension in the Y direction of the portion of the first steam passage 51 extending in the X direction and the dimension in the Y direction of the second steam passage 52. The width w2 also corresponds to the dimension in the X direction of the portion of the first steam passage 51 extending in the Y direction.

[0081] The second vapor flow path recess 54 may be formed by etching the second main body surface 30b of the wick sheet 30 in an etching step described later. The second vapor flow path recess 54 is formed in a concave shape on the second main body surface 30b. The second vapor flow path recess 54 may include a wall surface 54a formed in a curved shape as shown in FIG. 11. This wall surface 54a defines the second vapor flow path recess 54 and may be curved so as to approach the opposing wall surface 54a as it approaches the first main body surface 30a. The second vapor flow path recess 54 constitutes a portion of the first vapor path 51 relatively close to the second sheet 20 and a portion of the second vapor path 52 relatively close to the second sheet 20.

[0082] The width w3 of the second steam flow path recess 54 in the first region 5 and the second region 6 may be, for example, 100 μm to 5000 μm, similar to the width w2 of the first steam flow path recess 53 described above. The width w3 of the second steam flow path recess 54 is a dimension in the Y direction, and is the dimension of the second steam flow path recess 54 on the second main body surface 30b. The width w3 corresponds to the dimension in the Y direction of the portion of the first steam path 51 extending in the X direction and the dimension in the Y direction of the second steam path 52. The width w3 also corresponds to the dimension in the X direction of the portion of the first steam path 51 extending in the Y direction. The width w3 of the second steam flow path recess 54 may be equal to the width w2 of the first steam flow path recess 53, or may be different.

[0083] As shown in FIG. 11, the wall surface 53a of the first steam flow path recess 53 and the wall surface 54a of the second steam flow path recess 54 may be connected to form the through-portion 34. In this embodiment, the planar shape of the through-portion 34 in the first steam path 51 may be a rectangular frame shape. The planar shape of the through-portion 34 in the second steam path 52 may be an elongated rectangular shape. The through-portion 34 may be defined by the overhanging portion 42. The land portion 33 may include the overhanging portion 42. The overhanging portion 42 may be defined by a ridge line formed by joining the wall surface 53a of the first steam flow path recess 53 and the wall surface 54a of the second steam flow path recess 54. As shown in FIG. 11, the overhanging portion 42 may be formed to overhang inwardly of the steam paths 51 and 52. The planar area of ​​the first steam path 51 in this through-portion 34 may be minimized, and the planar area of ​​the second steam path 52 in the through-portion 34 may be minimized. The width w4 of the through portion 34 of each of the steam passages 51, 52 may be, for example, 400 μm to 5000 μm. Here, the width w4 of the through portion 34 is the width of the through portion 34 in the first region 5 and the second region 6, and corresponds to the gap between the land portions 33 adjacent to each other in the Y direction. The width w4 may be the gap between the two overhanging portions 42 of the land portion 33 that overhang most inwardly of the steam passages 51, 52, as shown in FIG.

[0084] The position of the through-hole 34 in the Z direction may be an intermediate position between the first main body surface 30a and the second main body surface 30b. Alternatively, the position of the through-hole 34 may be a position closer to the first sheet 10 than the intermediate position, or a position closer to the second sheet 20 than the intermediate position. The position of the through-hole 34 in the Z direction is arbitrary. The position of the through-hole 34 in the Z direction may be equal to the position of the protruding portion 42 in the Z direction.

[0085] In the present embodiment, as described above, the cross-sectional shapes of the first steam passage 51 and the second steam passage 52 are formed to include the through-hole 34 defined by the protruding portion 42 formed to protrude inward, but are not limited to this. For example, the cross-sectional shapes of the first steam passage 51 and the second steam passage 52 may be trapezoidal or parallelogrammatic, or may be barrel-shaped.

[0086] The steam flow path portion 50 including the first steam passage 51 and the second steam passage 52 configured in this manner constitutes a part of the above-mentioned sealed space 3. Each of the steam passages 51, 52 has a relatively large flow path cross-sectional area so that the working steam 2a can pass through.

[0087] Here, in order to clarify the drawings, Fig. 11 shows an enlarged view of the first steam passage 51 and the second steam passage 52. In Figs. 6 and 11, in order to clarify the drawings, the number of second steam passages 52 and land portions 33 are made different from those in the embodiment shown in Fig. 5. Similarly, the number of main grooves 61, which will be described later, is also made different from that in Fig. 6 in the example shown in Fig. 11. In the other drawings, the numbers of second steam passages 52, land portions 33, and main grooves 61 are also appropriately made different in order to clarify the drawings.

[0088] Although not shown, a plurality of support parts for supporting the land part 33 on the frame part 32 may be provided in each of the steam passages 51 and 52. Support parts for supporting two adjacent land parts 33 may be provided. These support parts may be provided on both sides of the land part 33 in the X direction, or on both sides of the land part 33 in the Y direction. The support parts may be formed so as not to impede the flow of the working steam 2a diffusing through the steam passage part 50. For example, the support parts may be located near one of the first main body surface 30a and the second main body surface 30b of the wick sheet 30, and a space forming the steam passage part 50 may be formed near the other. This allows the thickness of the support parts to be thinner than the thickness of the wick sheet 30, and prevents the first steam passage 51 and the second steam passage 52 from being divided in the X direction and the Y direction.

[0089] As shown in FIG. 5, the vapor chamber 1 may include an injection section 4 that injects the working fluid 2b into the sealed space 3. The injection section 4 includes an injection passage 36 that communicates with the first vapor passage 51. The position of the injection section 4 is arbitrary. As shown in FIG. 9 and FIG. 10, the injection passage 36 may be formed in a concave shape in the second main body surface 30b. Alternatively, the injection passage 36 may be formed in a concave shape in the first main body surface 30a. Depending on the configuration of the first liquid flow passage section 60, the injection passage 36 may be in communication with the first liquid flow passage section 60.

[0090] As shown in FIG. 6, FIG. 9, and FIG. 11, the first liquid flow path portion 60 may be formed between the first sheet 10 and the wick sheet 30. In this embodiment, the first liquid flow path portion 60 is formed on the first main body surface 30a of the land portion 33. The first liquid flow path portion 60 may be a flow path through which the working fluid 2b mainly passes. The above-mentioned working steam 2a may pass through the first liquid flow path portion 60. The first liquid flow path portion 60 constitutes a part of the above-mentioned sealed space 3 and communicates with the steam flow path portion 50. The first liquid flow path portion 60 is configured as a capillary structure for transporting the working fluid 2b to the evaporation region SR. The first liquid flow path portion 60 may also be referred to as a wick. The first liquid flow path portion 60 may be formed over the entire first main body surface 30a of each land portion 33. Although not shown in FIG. 9 and the like, the first liquid flow path portion 60 may be formed in the inner part of the first main body surface 30a of the frame portion 32. In this embodiment, the second main body surface 30b of the land portion 33 and the second main body surface 30b of the frame portion 32 are not formed with a liquid flow path portion.

[0091] As shown in Fig. 12, the first liquid flow path section 60 is an example of a first groove assembly including a plurality of grooves. More specifically, the first liquid flow path section 60 includes a plurality of mainstream grooves 61 and a plurality of communication grooves 65. The mainstream grooves 61 and the communication grooves 65 of the first liquid flow path section 60 are an example of a first groove. The mainstream grooves 61 and the communication grooves 65 are grooves through which the working fluid 2b passes. The communication grooves 65 are in communication with the mainstream grooves 61.

[0092] As shown in FIG. 12, each of the main grooves 61 extends in the X direction. The main grooves 61 have a small flow passage cross-sectional area so that the working fluid 2b flows mainly by capillary action. The flow passage cross-sectional area of ​​the main grooves 61 is smaller than the flow passage cross-sectional area of ​​the vapor passages 51, 52. The main grooves 61 are configured to transport the working fluid 2b condensed from the working vapor 2a to the evaporation region SR. The main grooves 61 may be equally spaced apart along the Y direction perpendicular to the X direction. The main grooves 61 may be parallel to each other.

[0093] The main groove 61 is formed by etching the first main body surface 30a of the wick sheet 30 in an etching step described below. As a result, the main groove 61 may include a wall surface 62 formed in a curved shape, as shown in Fig. 11. The wall surface 62 defines the main groove 61 and may be curved in a shape that bulges toward the second main body surface 30b.

[0094] As shown in Figs. 11 and 12, the width w5 of the mainstream groove 61 may be smaller than the width w2 of the first vapor flow path recess 53. The width w5 of the mainstream groove 61 may be smaller than the width w1 of the land portion 33. The width w5 of the mainstream groove 61 may be, for example, 5 µm to 400 µm. The width w5 refers to the dimension of the mainstream groove 61 at the first main body surface 30a. In Figs. 11 and 12, the width w5 corresponds to the Y-direction dimension of the mainstream groove 61. The depth h1 of the mainstream groove 61 may be, for example, 3 µm to 300 µm. The depth h1 corresponds to the Z-direction dimension of the mainstream groove 61.

[0095] As shown in FIG. 12, each communication groove 65 extends in a direction different from the X direction. In this embodiment, each communication groove 65 extends in the Y direction and is formed perpendicular to the mainstream groove 61. Some communication grooves 65 communicate with two adjacent mainstream grooves 61. Other communication grooves 65 communicate with the first steam passage 51 or the second steam passage 52 and the mainstream groove 61. The communication groove 65 may extend from the side edge 33e of the land portion 33 in the Y direction to the mainstream groove 61 adjacent to the side edge 33e. In this way, the first steam passage 51 communicates with the mainstream groove 61, and the second steam passage 52 communicates with the mainstream groove 61.

[0096] The communication groove 65 has a small flow passage cross-sectional area so that the working fluid 2b flows mainly by capillary action. The flow passage cross-sectional area of ​​the communication groove 65 is smaller than the flow passage cross-sectional area of ​​the steam passages 51, 52. The communication grooves 65 may be spaced apart at a predetermined interval or at equal intervals along the X direction. The communication grooves 65 may be positioned parallel to each other.

[0097] The communication groove 65 is also formed by etching, as described below, in the same manner as the mainstream groove 61. As a result, the communication groove 65 may include a wall surface (not shown) formed in a curved shape similar to that of the mainstream groove 61. The width w6 of the communication groove 65 may be smaller than the width w2 of the first steam flow path recess 53. The width w6 of the communication groove 65 may be smaller than the width w1 of the land portion 33. As shown in FIG. 12, the width w6 of the communication groove 65 may be equal to the width w5 of the mainstream groove 61. However, the width w6 may be larger or smaller than the width w5. The width w6 refers to the dimension of the communication groove 65 at the first main body surface 30a. In FIG. 12, the width w6 corresponds to the X-direction dimension of the communication groove 65. The depth of the communication groove 65 may be equal to the depth h1 of the mainstream groove 61. However, the depth of the communication groove 65 may be deeper or shallower than the depth h1.

[0098] As shown in FIG. 12, the first liquid flow path section 60 includes a convex portion row 64A. The convex portion row 64A is provided on the first main body surface 30a of the wick sheet 30. The convex portion row 64A is provided between adjacent main flow grooves 61. Each convex portion row 64A includes a plurality of convex portions 64 arranged in the X direction. The convex portions 64 abut against the first sheet 10. As shown in FIG. 12, each convex portion 64 is formed in a rectangular shape in a plan view such that the X direction is the longitudinal direction. A main flow groove 61 is interposed between the convex portions 64 adjacent to each other in the Y direction. A communication groove 65 is interposed between the convex portions 64 adjacent to each other in the X direction.

[0099] The protrusions 64 are portions that are not etched in the etching process described below, and the material of the wick sheet 30 remains. In this embodiment, the planar shape of the protrusions 64 is rectangular, as shown in Fig. 12. More specifically, the planar shape of the protrusions 64 corresponds to the planar shape at the position of the first main body surface 30a.

[0100] In this embodiment, the convex portions 64 are positioned in a staggered manner. More specifically, the convex portions 64 of the convex portion row 64A adjacent to each other in the Y direction are positioned at positions shifted from each other in the X direction. This shift amount may be half the arrangement pitch of the convex portions 64 in the X direction. The width w7 of the convex portion 64 may be, for example, 5 μm to 500 μm. The width w7 means the dimension of the convex portion 64 on the first main body surface 30a. In FIG. 12, the width w7 corresponds to the Y direction dimension of the convex portion 64. The positions of the convex portions 64 are not limited to being staggered, and may be arranged in parallel. In this case, the convex portions 64 of the convex portion row 64A adjacent to each other in the Y direction are positioned at the same position in the X direction.

[0101] Incidentally, the materials constituting the first sheet 10, the second sheet 20 and the wick sheet 30 are not particularly limited as long as they have a good thermal conductivity to the extent that the heat dissipation efficiency of the vapor chamber 1 can be ensured. For example, each of the sheets 10, 20, 30 may be made of a metal material. For example, each of the sheets 10, 20, 30 may contain copper or a copper alloy. Copper and copper alloys have good thermal conductivity and corrosion resistance when pure water is used as the working fluid. Examples of copper include pure copper and oxygen-free copper (C1020). Examples of copper alloys include copper alloys containing tin, copper alloys containing titanium (C1990, etc.), and Corson copper alloys (C7025, etc.), which are copper alloys containing nickel, silicon and magnesium. An example of a copper alloy containing tin is phosphor bronze (C5210, etc.).

[0102] The thickness t1 of the vapor chamber 1 shown in FIG. 6 may be, for example, 100 μm to 500 μm. By making the thickness t1 of the vapor chamber 1 100 μm or more, the vapor channel portion 50 can be properly secured. Therefore, the vapor chamber 1 can function properly. On the other hand, by making the thickness t1 500 μm or less, the thickness t1 of the vapor chamber 1 can be prevented from becoming thick. Therefore, the vapor chamber 1 can be made thin.

[0103] The thickness of the wick sheet 30 may be greater than the thickness of the first sheet 10. Similarly, the thickness of the wick sheet 30 may be greater than the thickness of the second sheet 20. In the present embodiment, an example is shown in which the thickness of the first sheet 10 and the thickness of the second sheet 20 are equal. However, the present disclosure is not limited to this, and the thickness of the first sheet 10 and the thickness of the second sheet 20 may be different.

[0104] The thickness t2 of the first sheet 10 may be, for example, 6 μm to 100 μm. By setting the thickness t2 of the first sheet 10 to 6 μm or more, the mechanical strength and long-term reliability of the first sheet 10 can be ensured. On the other hand, by setting the thickness t2 of the first sheet 10 to 100 μm or less, the thickness t1 of the vapor chamber 1 can be prevented from becoming thick. The thickness t3 of the second sheet 20 may be set to be the same as the thickness t2 of the first sheet 10.

[0105] The thickness t4 of the wick sheet 30 may be, for example, 50 μm to 400 μm. By making the thickness t4 of the wick sheet 30 50 μm or more, the vapor flow path portion 50 can be properly secured. Therefore, the vapor chamber 1 can function properly. On the other hand, by making the thickness t4 400 μm or less, the thickness t1 of the vapor chamber 1 can be prevented from becoming thick. Therefore, the vapor chamber 1 can be made thin. The thickness t4 of the wick sheet 30 may be the distance between the first main body surface 30a and the second main body surface 30b.

[0106] As shown in Fig. 5, the vapor chamber 1 according to this embodiment is divided into a first region 5, a second region 6, and a reinforcement region 7. Similarly, the wick sheet 30 is divided into a first region 5, a second region 6, and a reinforcement region 7. As shown in Figs. 5, 9, and 10, each of the land portions 33 of the wick sheet 30 described above extends in the X direction from the first region 5 through the reinforcement region 7 to the second region 6. Each of the land portions 33 is formed from the first region 5 to the second region 6, and passes through the reinforcement region 7.

[0107] As shown in FIG. 9 and FIG. 10, a reinforcing portion 37 is provided in each second steam passage 52. The reinforcing portion 37 is located in the reinforcing region 7 including the bent region 7a. The reinforcing portion 37 may not be located in the first region 5, and may not be located in the second region 6. One reinforcing portion 37 may be formed in each second steam passage 52. For convenience, the reinforcing portion 37 formed in the second steam passage 52 will be described below, but the reinforcing portion 37 may also be formed in the first steam passage 51. For example, one reinforcing portion 37 may also be formed in each of two portions of the first steam passage 51 located in the reinforcing region 7. The portion of the first steam passage 51 located in the reinforcing region 7 is a portion extending in the X direction of the first steam passage 51.

[0108] The reinforcement region 7 may be a region having an X-direction range in which the reinforcement portion 37 exists. For example, as shown in FIG. 13A, the reinforcement region 7 may be a region having an X-direction range in which a protrusion 38, which will be described later, exists. The reinforcement region 7 may be a region extending along the Y direction. The first region 5 means a region on one side of the reinforcement region 7 in the X direction, and the second region 6 means a region on the other side of the reinforcement region 7. In FIG. 13A, the first region 5 is located on the left side of the reinforcement region 7, and the second region 6 is located on the right side of the reinforcement region 7. The first region 5, the second region 6, and the reinforcement region 7 may be divided by a boundary line along the bending line 8. In the example shown in FIG. 13A, the bending line 8 extends linearly in the Y direction. However, the present disclosure is not limited to this. The reinforcement region 7 does not have to extend along the Y direction as long as the reinforcement portion 37 exists in the region, and the boundary line between each of the regions 5, 6, and 7 may be nonlinear and of any shape.

[0109] As shown in FIG. 13A, the reinforcing portion 37 according to the present embodiment includes two protruding portions 38. The protruding portions 38 protrude from each of the two land portions 33 that form the second steam passage 52. The protruding portions 38 may protrude in the Y direction from the land portions 33. The protruding portions 38 are located in the reinforcing region 7. The protruding portions 38 may constitute the wick sheet 30. The protruding portions 38 may be formed by etching. More specifically, the protruding portions 38 may be a portion that is not etched in the etching process described below and in which the material of the wick sheet 30 remains. The protruding portions 38 may be formed continuously and integrally with the corresponding land portions 33. In the first steam passage 51, one of the protruding portions 38 may be formed integrally with the land portions 33, and the other protruding portion 38 may be formed integrally with the frame portion 32. The side wall of the protrusion 38 may be configured with a wall surface similar to the wall surface 53a of the first steam flow path recess 53 and the wall surface 54a of the second steam flow path recess 54. In Fig. 13A, the reference numerals of the second steam passages are indicated by 52a and 52b. In the description of this embodiment, the suffixes a and b are added to the reference numerals of the second steam passages only when they are to be distinguished from one another, and are omitted in other cases. The same applies to the suffixes a to c of the reference numerals of the land portion. The same applies to the suffixes a and b of the reference numerals of the reinforcing portion. The same applies to the suffixes a to d of the reference numerals of the protrusions.

[0110] The reinforcing portions 37 located in each second steam passage 52 may be aligned along a predetermined direction intersecting the X direction. In the present embodiment, the reinforcing portions 37 are aligned along the Y direction. The Y direction is a direction perpendicular to the X direction in a plan view. The reinforcing portions 37 are positioned at the same position in the X direction. The reinforcing portions 37 may be aligned along the bending line 8.

[0111] A space through which the working steam 2a passes is formed in the reinforcing portion 37. More specifically, the space of the second steam passage 52 is secured between two protruding portions 38 located in one second steam passage 52. The two protruding portions 38 located in one second steam passage 52 may be spaced apart in the Y direction, or may face each other in the Y direction. The two protruding portions 38 may be located at the same position in the X direction, and may have the same dimension in the X direction.

[0112] 13A shows two second steam passages 52 adjacent to each other in the Y direction. The two second steam passages 52 are a second steam passage 52a and a second steam passage 52b. The second steam passage 52a is formed between the land portion 33a and the land portion 33b. The second steam passage 52b is formed between the land portion 33b and the land portion 33c. The reinforcing portion 37a is located in the second steam passage 52a, and the reinforcing portion 37b is located in the second steam passage 52b.

[0113] The reinforcing portion 37a includes a first protruding portion 38a and a second protruding portion 38b. The first protruding portion 38a protrudes from the land portion 33a, and the second protruding portion 38b protrudes from the land portion 33b. The protruding portions 38a and 38b are spaced apart from each other and face each other. The reinforcing portion 37b includes a third protruding portion 38c and a fourth protruding portion 38d. The third protruding portion 38c protrudes from the land portion 33b, and the fourth protruding portion 38d protrudes from the land portion 33c. The protruding portions 38c and 38d are spaced apart from each other and face each other. The third protruding portion 38c protrudes from the land portion 33b on the opposite side to the second protruding portion 38b. The dimensions of each of the protruding portions 38a to 38d in the X direction may be equal.

[0114] The protrusions 38a to 38d are located at the same position in the X direction. The first protrusion 38a and the second protrusion 38b constituting one reinforcing portion 37a are located at the same position in the X direction. The second protrusion 38b and the third protrusion 38c protruding from one land portion 33b are located at the same position in the X direction. The third protrusion 38c and the fourth protrusion 38d constituting one reinforcing portion 37b are located at the same position in the X direction.

[0115] 13A, the protrusion 38 may have sides along the X direction and the Y direction in a plan view. The protrusion 38 may be formed over the entire area of ​​the reinforcement region 7 in the X direction.

[0116] The planar shape of the protrusion 38 is not limited to a rectangle. The planar shape of the protrusion 38 may be any shape, such as a semicircle, a semi-ellipse, a triangle, or a trapezoid. For example, as shown in FIG. 13B, the planar shape of the protrusion 38 may be a semi-ellipse. In this case, the flow path resistance of the second steam passages 52a, 52b can be reduced, and the flow of the working steam 2a can be prevented from being obstructed. Alternatively, for example, as shown in FIG. 13C, the planar shape of the protrusion 38 may be a triangle. In this case, the flow path resistance of the second steam passages 52a, 52b can also be reduced.

[0117] 14, the reinforcing portion 37 extends in the thickness direction of the wick sheet 30 from the first sheet 10 to the second sheet 20. In this embodiment, the reinforcing portion 37 constitutes the wick sheet 30 and extends from the first main body surface 30a to the second main body surface 30b. The protruding portion 38 is defined in the Z direction by the first main body surface 30a and the second main body surface 30b of the wick sheet 30. The protruding portion 38 is diffusion bonded to the first sheet inner surface 10b of the first sheet 10 and is diffusion bonded to the second sheet inner surface 20a of the second sheet 20.

[0118] 13A and 14, the width of the second steam passage 52 in the reinforced region 7 is reduced by the protrusion 38. The first steam passage recess 53, the second steam passage recess 54, and the through-hole 34 are reduced in the Y direction by the protrusion 38. The mechanical strength of the second steam passage 52 in the reinforced region 7 is improved.

[0119] As shown in FIG. 14, the width of the first steam flow path recess 53 in the reinforcement region 7 is w8. w8 is the dimension in the Y direction, which is the dimension of the first steam flow path recess 53 in the first main body surface 30a. The width w8 corresponds to the width dimension of the second steam path 52 in the reinforcement region 7. The width w8 is smaller than the width w2 of the first steam flow path recess 53 in the first region 5 and the second region 6 described above. The width w8 of the first steam flow path recess 53 in the reinforcement region 7 may be, for example, 500 μm to 1500 μm. By setting the width w8 to 500 μm or more, it is possible to prevent the flow of the working steam 2a from being obstructed. By setting the width w8 to 1500 μm or less, it is possible to effectively prevent the first sheet 10 from deforming so as to enter the second steam path 52.

[0120] Similarly, the width of the second steam flow path recess 54 in the reinforcement region 7 is defined as w9. w9 is the dimension in the Y direction, and is the dimension of the second steam flow path recess 54 in the second main body surface 30b. The width w9 corresponds to the width dimension of the second steam passage 52 in the reinforcement region 7. The width w9 is smaller than the width w3 of the second steam flow path recess 54 in the first region 5 and the second region 6 described above. The width w9 of the second steam flow path recess 54 in the reinforcement region 7 may be, for example, 500 μm to 1500 μm. By setting the width w9 to 500 μm or more, it is possible to prevent the flow of the working steam 2a from being obstructed. By setting the width w9 to 1500 μm or less, it is possible to effectively prevent the second sheet 20 from deforming so as to enter the second steam passage 52.

[0121] The width w10 of the through portion 34 in the reinforcement region 7 is smaller than the width w4 of the through portion 34 in the above-described first region 5 and second region 6. The width w10 of the through portion 34 in the reinforcement region 7 may be, for example, 300 μm to 1300 μm.

[0122] As shown in FIG. 13A and FIG. 14, the second liquid flow path section 70 may be formed on the first main body surface 30a of the protruding portion 38. The second liquid flow path section 70 is an example of a second groove assembly. The second liquid flow path section 70 may be connected to the vapor flow path section 50 and the first liquid flow path section 60. The second liquid flow path section 70 may be configured similarly to the first liquid flow path section 60, and may include a mainstream groove 71 and a communication groove 75. The mainstream groove 71 and the communication groove 75 of the second liquid flow path section 70 are an example of a second groove. The mainstream groove 71 may be configured similarly to the mainstream groove 61, and the communication groove 75 may be configured similarly to the communication groove 65. This allows the working fluid 2b in the second vapor passage 52 to enter the second liquid flow path section 70. The working fluid 2b in the second liquid flow path section 70 can be transported to the evaporation region SR by the capillary action of the second liquid flow path section 70 and the first liquid flow path section 60.

[0123] As shown in Figs. 11 and 14, a part of the first sheet 10 may extend into the steam flow path portion 50. More specifically, a region of the first sheet outer surface 10a overlapping with the steam flow path portion 50 may be formed in a concave shape recessed inward toward the steam flow path portion 50. The first sheet 10 may include a first sheet recess 15 overlapping with the steam passages 51, 52 in a plan view. The first sheet recess 15 extends into the first steam flow path recess 53. The first sheet recess 15 is formed in each of the first region 5, the second region 6, and the reinforcing region 7. The first sheet recess 15 may extend from the first region 5 through the reinforcing region 7 to the second region 6.

[0124] As described later, the first sheet 10 may be thinner than the wick sheet 30. In this case, a distortion can be left by applying stress to the portion of the first sheet 10 that overlaps the steam flow path portion 50. Such distortion can form the first sheet recess 15 in a concave shape in the first region 5, the second region 6, and the reinforcing region 7. For example, the first sheet 10 is more likely to be distorted by applying stress while it is being heated and softened, or is more likely to be distorted by applying stress after it is heated and softened. This allows the first sheet recess 15 to be formed in a concave shape. However, the first sheet 10 may be formed flat so as not to include the first sheet recess 15 in at least one region of the first region 5, the second region 6, and the reinforcing region 7.

[0125] 11 and 14, a flow path corner 55 constituting a part of the steam flow path cross section is defined by the first sheet inner surface 10b of the first sheet recess 15 and a wall surface 53a of the first steam flow path recess 53. The flow path corner 55 may be formed in a wedge shape. The flow path corner 55 may have a capillary action.

[0126] 11 and 14, the recess dimension d2 of the first sheet outer surface 10a in the reinforced region 7 is smaller than the recess dimension d1 of the first sheet outer surface 10a in the first region 5 and the second region 6. This is because the width w8 of the first steam flow path recess 53 in the reinforced region 7 is smaller than the width w2 of the first steam flow path recess 53 in the first region 5 and the second region 6.

[0127] As shown in Figs. 11 and 14, a part of the second sheet 20 may extend into the steam flow path portion 50. More specifically, a region of the second sheet outer surface 20b overlapping with the steam flow path portion 50 may be formed in a concave shape recessed inward toward the steam flow path portion 50. The second sheet 20 may include a second sheet recess 25 overlapping with the steam passages 51, 52 in a plan view. The second sheet recess 25 extends into the second steam flow path recess 54. The second sheet recess 25 is formed in each of the first region 5, the second region 6, and the reinforcing region 7. The second sheet recess 25 may extend from the first region 5 through the reinforcing region 7 to the second region 6.

[0128] As described later, the second sheet 20 may be thinner than the wick sheet 30. In this case, a distortion can be left by applying stress to the portion of the second sheet 20 that overlaps with the steam flow path portion 50. Such distortion can form the second sheet recess 25 in a concave shape in the first region 5, the second region 6, and the reinforcement region 7. For example, the second sheet 20 is more likely to be distorted by applying stress while it is being heated and softened, or is more likely to be distorted by applying stress after it is heated and softened. This allows the second sheet recess 25 to be formed in a concave shape. However, the second sheet 20 may be formed flat so as not to include the second sheet recess 25 in at least one region of the first region 5, the second region 6, and the reinforcement region 7.

[0129] 11 and 14, a flow path corner 56 that constitutes a part of the steam flow path cross section is defined by the second sheet inner surface 20a of the second sheet recess 25 and a wall surface 54a of the second steam flow path recess 54. The flow path corner 56 may be formed in a wedge shape. The flow path corner 56 may have a capillary action.

[0130] 11 and 14, the recess dimension d4 of the second sheet outer surface 20b in the reinforced region 7 is smaller than the recess dimension d3 of the second sheet outer surface 20b in the first region 5 and the second region 6. This is because the width w9 of the second steam flow path recess 54 in the reinforced region 7 is smaller than the width w3 of the second steam flow path recess 54 in the first region 5 and the second region 6.

[0131] The reinforcement region 7 may at least partially overlap with the curved region 7a. In this embodiment, the entire curved region 7a may overlap with the reinforcement region 7. As shown in FIG. 5 etc., in this embodiment, the dimension in the X direction of the curved region 7a may be smaller than the dimension in the X direction of the reinforcement region 7. The reinforcement region 7 may have a dimension in the X direction such that it extends to both sides of the curved region 7a in the X direction.

[0132] The reinforcing region 7 according to the present embodiment includes a bent region 7a. In the bent region 7a, the vapor chamber 1 is bent along a bent line 8 extending in a direction intersecting the X direction in a plan view. As shown in FIG. 4 and FIG. 5, the bent line 8 according to the present embodiment extends in the Y direction in a plan view. The Y direction is a direction perpendicular to the X direction in a plan view. The bent line 8 crosses the frame body portion 32, the land portion 33, the first steam passage 51, and the second steam passage 52. This can suppress deformation of the first sheet 10 into each of the steam passages 51 and 52, and can suppress deformation of the second sheet 20 into each of the steam passages 51 and 52. The flow path cross-sectional area of ​​the first steam passage 51 and the second steam passage 52 can be secured.

[0133] The vapor chamber 1 is bent as shown in FIG. 15. In the example shown in FIG. 15, the bent region 7a forms a 1 / 4 arc, which is the same as the vapor chamber 1 shown in FIG. 2, but may form a 1 / 2 arc like the vapor chamber 1 shown in FIG. 3, and the bent shape of the bent region 7a is arbitrary. As shown in FIG. 15, the vapor chamber 1 may be bent so that the second sheet 20 is located inside the wick sheet 30. In the bent region 7a, the first sheet 10 is located outside the wick sheet 30 with respect to the center O of the bend. The second sheet 20 is located inside the wick sheet 30 with respect to the center O of the bend.

[0134] The reinforcement region 7 may include a first adjacent region 7b located between the first region 5 and the bending region 7a, and a second adjacent region 7c located between the second region 6 and the bending region 7a. The first adjacent region 7b and the second adjacent region 7c are regions of the reinforcement region 7 other than the bending region 7a, and may be formed substantially flat. The bending region 7a may be located at the center of the reinforcement region 7 in the X direction. The reinforcement portion 37 may extend from the first adjacent region 7b through the bending region 7a to the second adjacent region 7c. The bending line 8 overlaps the reinforcement portion 37, and the vapor chamber 1 is bent at the position where the reinforcement portion 37 exists. The bending region 7a, the first adjacent region 7b, and the second adjacent region 7c may be divided by a boundary line along the bending line 8. In the example shown in FIG. 13A, the bending region 7a may be divided by a boundary line extending in the Y direction in a plan view.

[0135] Next, a method for manufacturing the vapor chamber 1 of this embodiment having such a configuration will be described.

[0136] First, in a preparation step, the first sheet 10, the second sheet 20, and the wick sheet 30 are prepared. The preparation step may include an etching step of forming the wick sheet 30 by etching. In the etching step, the wick sheet 30 may be formed by etching using a patterned resist film (not shown) formed by photolithography technology.

[0137] In the temporary fixing process, the first sheet 10, the wick sheet 30, and the second sheet 20 are temporarily fixed. For example, the sheets 10, 20, and 30 may be temporarily fixed by spot welding or laser welding. At this time, the sheets 10, 20, and 30 may be aligned using the alignment holes 12, 22, and 35 described above.

[0138] Next, in a bonding step, the first sheet 10, the wick sheet 30, and the second sheet 20 are permanently bonded together. The sheets 10, 20, and 30 may be bonded together by diffusion bonding.

[0139] After the joining step, as an injection step, the sealed space 3 is evacuated and the working fluid 2b is injected into the sealed space 3 from the injection part 4 (see FIG. 5).

[0140] After the injection step, the above-mentioned injection flow path 36 is sealed as a sealing step. This blocks communication between the sealed space 3 and the outside, and seals the sealed space 3. The sealed space 3 is filled with the working fluid 2b, and the working fluid 2b in the sealed space 3 is prevented from leaking to the outside.

[0141] After the sealing step, the first sheet 10, the second sheet 20, and the wick sheet 30 may be bent as a bending step. For example, the sheets 10, 20, and 30 are bent along a bending line 8 extending in the Y direction as shown in FIG. 5. At this time, a jig (not shown) is abutted against the second sheet outer surface 20b of the second sheet 20, which is the inner side of the bending. Both ends in the X direction of each sheet 10, 20, and 30 in the X direction are gripped, and each sheet 10, 20, and 30 is bent at a desired angle. As a result, the bent vapor chamber 1 shown in FIG. 4 is obtained, and a bent region 7a is formed in the reinforcement region 7 of the vapor chamber 1. The bending step may be performed between the joining step and the injection step.

[0142] When bending, a force is applied to the first sheet 10 and the second sheet 20 in the bending region 7a to crush the steam flow path portion 50. However, in the present embodiment, as described above, the protrusions 38 are formed as the reinforcing portions 37 in the steam paths 51, 52 in the reinforcement region 7 including the bending region 7a. The protrusions 38 extend from the first sheet 10 to the second sheet 20. This prevents the first sheet 10 and the second sheet 20 from entering the steam paths 51, 52, respectively.

[0143] In this manner, the vapor chamber 1 according to the present embodiment is obtained.

[0144] Next, a method for operating the vapor chamber 1, that is, a method for cooling the electronic device D, will be described.

[0145] The vapor chamber 1 obtained as described above is installed in a housing H of a mobile terminal or the like. In the second region 6, the first sheet outer surface 10a of the first sheet 10 contacts the housing member Ha. In the first region 5, the second sheet outer surface 20b of the second sheet 20 contacts the electronic device D. The working liquid 2b in the sealed space 3 adheres to the wall surface of the sealed space 3 due to its surface tension. More specifically, the working liquid 2b adheres to the wall surface 53a of the first vapor flow path recess 53, the wall surface 54a of the second vapor flow path recess 54, the wall surface 62 of the main flow path groove 61 of the first liquid flow path section 60, and the wall surface of the communication groove 65. The working liquid 2b may also adhere to the portion of the first sheet inner surface 10b of the first sheet 10 exposed to the first vapor flow path recess 53, the main flow path groove 61, and the communication groove 65. Furthermore, the working fluid 2b may also adhere to a portion of the second sheet inner surface 20a of the second sheet 20 that is exposed to the second vapor flow path recess .

[0146] In this state, when the electronic device D generates heat, the working fluid 2b present in the evaporation region SR receives heat from the electronic device D. The received heat is absorbed as latent heat, and the working fluid 2b evaporates, generating working steam 2a. The generated working steam 2a diffuses in the first steam passage 51 and the second steam passage 52 constituting the sealed space 3, as shown by solid arrows in FIG. 9. More specifically, in the portion of the first steam passage 51 of the steam flow path portion 50 extending in the X direction and in the second steam passage 52, the working steam 2a diffuses mainly in the X direction. In this case, a part of the working steam 2a diffuses smoothly from the first region 5 through the reinforcement region 7 including the bent region 7a to the second region 6. In the reinforcement region 7, the working steam 2a passes through the space between the two protrusions 38 constituting the reinforcement portion 37. As described above, in the bent region 7a, the first sheet 10 and the second sheet 20 are suppressed from entering the steam passages 51 and 52, respectively. As a result, the flow path cross-sectional area of ​​the working steam 2a is ensured even in the curved region 7a, and obstruction of the flow of the working steam 2a is suppressed. When the curved region 7a is formed in an arc shape as shown in Fig. 15, obstruction of the flow of the working steam 2a in the curved region 7a can be suppressed. The working steam 2a is smoothly diffused through each steam passage 51, 52 toward the second region 6. On the other hand, in the portion of the first steam passage 51 extending in the Y direction, the working steam 2a mainly diffuses in the Y direction.

[0147] Then, the working steam 2a in each of the steam passages 51, 52 leaves the evaporation region SR and is transported to the condensation region CR, which has a relatively low temperature. In the condensation region CR, the working steam 2a is cooled by dissipating heat mainly to the first sheet 10. The heat received by the first sheet 10 from the working steam 2a is transferred to the outside air via the housing member Ha (see FIG. 6).

[0148] The working vapor 2a loses the latent heat absorbed in the evaporation region SR by dissipating heat to the first sheet 10 in the condensation region CR. As a result, the working vapor 2a condenses to generate the working liquid 2b. The generated working liquid 2b adheres to the wall surfaces 53a, 54a of the vapor flow path recesses 53, 54, the first sheet inner surface 10b of the first sheet 10, and the second sheet inner surface 20a of the second sheet 20. Here, the working liquid 2b continues to evaporate in the evaporation region SR. Therefore, the working liquid 2b in the condensation region CR of the first liquid flow path section 60 is transported toward the evaporation region SR by the capillary action of each mainstream groove 61, as shown by the dashed arrows in FIG. 9. As a result, the working liquid 2b adhered to the wall surfaces 53a, 54a, the first sheet inner surface 10b, and the second sheet inner surface 20a moves to the first liquid flow path section 60 and enters the mainstream groove 61 through the communication groove 65. The working fluid 2b condensed in each of the vapor passages 51, 52 in the reinforced region 7 moves to the first liquid flow path section 60 through the mainstream grooves 71 and the communication grooves 75 of the second liquid flow path section 70. In this manner, each of the mainstream grooves 61 and each of the communication grooves 65 are filled with the working fluid 2b. The filled working fluid 2b obtains a driving force toward the evaporation region SR due to the capillary action of each of the mainstream grooves 61, and is smoothly transported toward the evaporation region SR. As shown in FIG. 4, even if the evaporation region SR is located at the upper part of the vapor chamber 1, the working fluid 2b is transported by the capillary action.

[0149] In the first liquid flow path section 60, each mainstream groove 61 communicates with the adjacent other mainstream groove 61 via the corresponding communication groove 65. This allows the working fluid 2b to flow between two adjacent mainstream grooves 61, suppressing the occurrence of dryout in the mainstream grooves 61. As a result, a capillary action is imparted to the working fluid 2b in each mainstream groove 61, and the working fluid 2b is smoothly transported toward the evaporation region SR.

[0150] The working fluid 2b that has reached the evaporation region SR is again heated by the electronic device D and evaporates. The working vapor 2a that has evaporated from the working fluid 2b passes through the communication groove 65 in the evaporation region SR and moves to the first vapor flow path recess 53 and the second vapor flow path recess 54, which have a large flow path cross-sectional area. The working vapor 2a then diffuses in each of the vapor flow path recesses 53 and 54, and a part of the working vapor 2a can diffuse smoothly from the first region 5 to the second region 6 through the reinforcement region 7 including the bent region 7a. In this way, the working fluids 2a and 2b circulate in the sealed space 3 while repeatedly changing phases, that is, evaporating and condensing. This causes the heat of the electronic device D to be diffused and released. As a result, the electronic device D is cooled.

[0151] Thus, according to this embodiment, a plurality of land portions 33 extend in the X direction from the first region 5 to the second region 6 via the reinforcing region 7. The reinforcing portions 37 extending from the first sheet 10 to the second sheet 20 are provided in each of the second vapor passages 52 formed between the adjacent land portions 33. The reinforcing portions 37 are located in the bending region 7a where the vapor chamber 1 is bent, and are arranged along the bending line 8. This makes it possible to suppress the first sheet 10 and the second sheet 20 from deforming so as to enter the second vapor passage 52 in the bending region 7a, and to reinforce the second vapor passage 52 in the bending region 7a. This makes it possible to suppress the second vapor passage 52 from being crushed, and to reduce the flow resistance of the second vapor passage 52. As a result, even when the second vapor passage 52 is bent, it is possible to suppress the flow of the working vapor 2a from being obstructed, and the heat dissipation efficiency of the vapor chamber 1 can be improved. In addition, the reinforcing portions 37 are provided in the second vapor passage 52, and thus the capillary action from the second vapor passage 52 to the first liquid flow passage portion 60 can be enhanced. This makes it possible to prevent the working fluid 2b from accumulating in the second vapor passage 52 in the bending region 7a, and to prevent the flow of the working vapor 2a from being blocked. As a result, it is possible to improve the heat dissipation efficiency of the vapor chamber 1. In addition, in the bending process, the bending line 8 can be positioned using the reinforcing portion 37 as a marker, and the bending work efficiency can be improved.

[0152] Furthermore, according to the present embodiment, the reinforcing portion 37 includes two protruding portions 38 that protrude in the Y direction from each of the two land portions 33 that form the second vapor passage 52. This makes it possible to reduce the width of the second vapor passage 52 in the reinforcing region 7, and to reinforce the second vapor passage 52. Therefore, even if the vapor chamber 1 is bent in the reinforcing region 7, it is possible to prevent the second vapor passage 52 from collapsing, and the flow path resistance of the second vapor passage 52 can be reduced.

[0153] Further, according to this embodiment, the first liquid flow path section 60 including the main groove 61 and the communication groove 65 is formed on the first main body surface 30a of the land portion 33. The protruding portion 38 is defined by the first main body surface 30a and the second main body surface 30b to form the wick sheet 30. The second liquid flow path section 70 including the main groove 71 and the communication groove 75 is located on the first main body surface 30a of the protruding portion 38. The second liquid flow path section 70 communicates with the vapor flow path section 50 and the first liquid flow path section 60. This allows the working fluid 2b condensed in the second vapor passage 52 in the reinforcement region 7 to move to the second liquid flow path section 70. Therefore, the working fluid 2b can be smoothly transported toward the evaporation region SR. As a result, the working fluid 2b can be prevented from accumulating in the second vapor passage 52 in the bent region 7a, and the flow of the working vapor 2a can be prevented from being obstructed.

[0154] Furthermore, according to this embodiment, the bending line 8 is along the Y direction perpendicular to the X direction. As a result, even if the vapor chamber 1 is bent along the bending line 8 extending in the Y direction, the steam passages 51, 52 can be reinforced by the reinforcing portion 37. Even in this case, the steam passages 51, 52 can be prevented from collapsing.

[0155] According to the present embodiment, a plurality of land portions 33 extend in the X direction from the first region 5 to the second region 6 via the reinforcing region 7. Reinforcing portions 37 extending from the first sheet 10 to the second sheet 20 are provided in each of the second steam passages 52 formed between the adjacent land portions 33. The reinforcing portions 37 are located in the reinforcing region 7 and are aligned along a direction intersecting the X direction. This makes it possible to suppress deformation of the first sheet 10 and the second sheet 20 in the reinforcing region 7 so as to enter the second steam passage 52, and to reinforce the second steam passage 52 in the reinforcing region 7. Therefore, even if the vapor chamber 1 is bent along the bending line 8 extending in a direction intersecting the X direction in the reinforcing region 7, it is possible to suppress the collapse of the second steam passage 52, and the flow path resistance of the second steam passage 52 can be reduced. As a result, even if the vapor chamber 1 is bent, it is possible to suppress the flow of the working steam 2a from being obstructed, and the heat dissipation efficiency of the vapor chamber 1 can be improved.

[0156] In the above-described embodiment, an example has been described in which the reinforcing portion 37 includes two protruding portions 38 protruding from each of the two land portions 33 forming the second vapor passage 52. However, the present disclosure is not limited to this. For example, the reinforcing portion 37 may include a protruding portion 38 protruding from one of the two land portions 33 forming the second vapor passage 52. In this case, the protruding portion 38 protruding from the other land portion 33 may not be formed. Even in this case, the second vapor passage 52 in the reinforcing region 7 can be reinforced. Therefore, even if the vapor chamber 1 is bent in the reinforcing region 7, the second vapor passage 52 can be prevented from being crushed, and the flow path resistance of the second vapor passage 52 can be reduced.

[0157] In the above-described embodiment, the protrusion 38 is formed over the entire area of ​​the reinforcement region 7 in the X direction. However, the present disclosure is not limited to this. For example, as shown in FIG. 16A, a plurality of protrusions 38 spaced apart in the X direction may be formed in the reinforcement region 7. This can prevent the second vapor passage 52 from collapsing even when the vapor chamber 1 is bent in the reinforcement region 7. In the example shown in FIG. 16A, the protrusion 38 is located in the bent region 7a, but it does not have to be located in the bent region 7a. Even in this case, the second vapor passage 52 can be reinforced by the protrusion 38 being located in the vicinity of the bent region 7a. The plurality of protrusions 38 being spaced apart in the X direction can facilitate bending of the vapor chamber 1. In FIG. 16A, each protrusion 38 is formed in a semicircular shape in a plan view, but the planar shape of the protrusion 38 is not limited to this and may be any shape.

[0158] Unlike the example shown in FIG. 16A, the multiple protrusions 38 may not be spaced apart in the X direction. For example, as shown in FIG. 16B, two protrusions 38 adjacent to each other in the X direction may be connected without being spaced apart. In this case, the reinforcement region 7 can be further reinforced, and the second steam passage 52 can be prevented from being crushed. In the example shown in FIG. 16B, the planar shape of each protrusion 38 may be semicircular. When the planar shape of the protrusion 38 is semicircular, the flow path resistance of the second steam passage 52 can be reduced. The planar shape of each protrusion 38 is arbitrary. For example, as shown in FIG. 16C, the planar shape of each protrusion 38 may be triangular. Even in this case, the flow path resistance of the second steam passage 52 can be reduced. Alternatively, as shown in FIG. 16D, the planar shape of each protrusion 38 may be curved, and the planar shape of the multiple protrusions 38 may be corrugated. Even in this case, the flow path resistance of the second steam passage 52 can be reduced.

[0159] In the above-described embodiment, an example in which the liquid flow path portion is not formed on the second main body surface 30b of the land portion 33 and the second main body surface 30b of the frame portion 32 has been described. However, the present disclosure is not limited to this. For example, a liquid flow path portion (not shown) may be formed on the second main body surface 30b of the land portion 33. The liquid flow path portion may include a main groove 61 and a communication groove 65, similar to the above-described first liquid flow path portion 60. The flow path cross-sectional area of ​​the groove of the liquid flow path portion formed on the second main body surface 30b may be equal to the flow path cross-sectional area of ​​the groove of the first liquid flow path portion 60, or may be larger than the flow path cross-sectional area of ​​the groove of the first liquid flow path portion 60. When the liquid flow path portion is formed on the second main body surface 30b, the first liquid flow path portion 60 may not be formed on the first main body surface 30a.

[0160] In the above-described embodiment, an example has been described in which the vapor chamber 1 is bent so that the second sheet 20 is positioned more inward than the wick sheet 30. However, the present disclosure is not limited to this. For example, the vapor chamber 1 may be bent so that the first sheet 10 is positioned more inward than the wick sheet 30. Even in this case, a liquid flow path portion similar to the above-described first liquid flow path portion 60 may be formed on the first main body surface 30a or the second main body surface 30b of the wick sheet 30, or may be formed on both the first main body surface 30a and the second main body surface 30b.

[0161] In the above-described embodiment, an example has been described in which the electronic device D is in contact with the second sheet outer surface 20b, and the housing member Ha is in contact with the first sheet outer surface 10a. However, this is not limited to this. The electronic device D may be in contact with the first sheet outer surface 10a, and the housing member Ha may be in contact with the second sheet outer surface 20b. In this case, a liquid flow path portion similar to the above-described first liquid flow path portion 60 may be formed on the first main body surface 30a or the second main body surface 30b of the wick sheet 30, or may be formed on both the first main body surface 30a and the second main body surface 30b. The vapor chamber 1 may be bent so that the second sheet 20 is located inside the wick sheet 30, or the first sheet 10 may be bent so that the first sheet 10 is located inside the wick sheet 30.

[0162] In the above-described embodiment, an example has been described in which the two protrusions 38 located in one second steam passage 52 are spaced apart in the Y direction. However, the present disclosure is not limited to this. For example, as shown in FIG. 17A, the two protrusions 38 may be connected by a bridge portion 41. In this case, the second steam passage 52 in the bent region 7a can be further reinforced. Therefore, even when the second steam passage 52 is bent, it is possible to further prevent the second steam passage 52 from collapsing, and the flow path resistance of the second steam passage 52 can be further reduced.

[0163] The bridge portion 41 may be formed so as not to impede the flow of the working vapor 2a diffusing through the second vapor passage 52. FIG. 17A shows an example in which the first liquid flow passage portion 60 and the second liquid flow passage portion 70 are formed on the second main body surface 30b, not on the first main body surface 30a, of the wick sheet 30. In this case, the bridge portion 41 may be formed on the second main body surface 30b, and the second vapor flow passage recess 54 may not be formed. The first main body surface 30a is formed with the first vapor flow passage recess 53. This allows the thickness t5 of the bridge portion 41 to be thinner than the thickness t4 of the wick sheet 30 (see FIG. 6), and prevents the second vapor passage 52 from being divided. The bridge portion 41 shown in FIG. 17A may be formed, for example, by not etching the position where the bridge portion 41 is to be formed when etching the second main body surface 30b of the wick sheet 30.

[0164] 17A, the first liquid flow path portion 60 and the second liquid flow path portion 70 may be formed on the first main body surface 30a, not on the second main body surface 30b of the wick sheet 30. In this case, the bridge portion 41 may be formed on the first main body surface 30a, and the first vapor flow path recess 53 may not be formed. The second vapor flow path recess 54 may be formed on the second main body surface 30b.

[0165] When the first liquid flow path portion 60 and the second liquid flow path portion 70 are formed on both the first body surface 30a and the second body surface 30b, the bridge portion 41 may be formed on either the first body surface 30a or the second body surface 30b.

[0166] In the example shown in FIG. 17A, no grooves constituting the flow path of the working fluid 2b are formed on the second main body surface 30b of the bridge portion 41, but as shown in FIG. 17B, such grooves may be formed. In the example shown in FIG. 17B, a mainstream groove 71 constituting the second liquid flow path portion 70 is formed on the second main body surface 30b of the bridge portion 41. The mainstream groove 71 may extend in the X direction. The adjacent mainstream grooves 71 may communicate with each other through a communication groove 75 (see FIG. 13). According to the example shown in FIG. 17B, the first liquid flow path portion 60 formed on two adjacent land portions 33 can be communicated with each other through the second liquid flow path portion 70 formed on the bridge portion 41. Therefore, the working fluid 2b can move between the two adjacent first liquid flow path portions 60, and the transport capacity of the working fluid 2b to the evaporation region SR can be improved.

[0167] 17C, the X-direction dimension of the bridge portion 41 may be equal to the X-direction dimension of the protrusion 38, or the bridge portion 41 may be formed so as to extend continuously from the protrusion 38 in a plan view. However, the X-direction dimension of the bridge portion 41 is not limited to this. For example, the X-direction dimension of the bridge portion 41 may be smaller than the X-direction dimension of the protrusion 38, or may be larger than the X-direction dimension of the protrusion 38.

[0168] In the above-described embodiment, the entire bent region 7a overlaps the reinforced region 7, and the reinforced region 7 has an X-direction dimension that extends to both sides of the bent region 7a in the X-direction. However, the present disclosure is not limited to this. For example, only a part of the bent region 7a may overlap the reinforced region 7, and the bent region 7a may include a part that does not overlap the reinforced region 7. The X-direction dimension of the bent region 7a may be larger than the X-direction dimension of the reinforced region 7. Even in this case, the reinforced region 7 is formed in a part of the bent region 7a, so that the second steam passage 52 in the bent region 7a can be reinforced. The bent region 7a may have an X-direction dimension that extends to both sides of the reinforced region 7 in the X-direction. Alternatively, the X-direction dimension of the bent region 7a may be equal to the X-direction dimension of the reinforced region 7, and in this case, the entire X-direction of the bent region 7a may overlap the entire reinforced region 7.

[0169] (Second embodiment) Next, a vapor chamber, an electronic device, and a main body sheet for a vapor chamber according to a second embodiment of the present disclosure will be described with reference to FIGS.

[0170] The second embodiment shown in Figures 18 to 20 differs mainly in that the reinforcing parts are arranged in a direction inclined toward the first direction. The other configurations are substantially the same as those of the first embodiment shown in Figures 1 to 17C. In Figures 18 to 20, the same parts as those of the first embodiment shown in Figures 1 to 17C are denoted by the same reference numerals and detailed description thereof will be omitted.

[0171] In this embodiment, as shown in Fig. 18 and Fig. 19, the reinforcing portions 37 located in each steam passage 51, 52 are aligned along a direction inclined in the X direction. The reinforcing portions 37 are aligned along a bending line 8 described later. The reinforcing portions 37 may be positioned at positions shifted in the X direction. Of the two reinforcing portions 37 adjacent to each other in the Y direction in Fig. 19, the upper reinforcing portion 37 is shifted to the right from the lower reinforcing portion 37.

[0172] 20, the reinforcing portion 37 includes two protrusions 38 protruding from each of the two lands 33 that form the second steam passage 52. The two protrusions 38 located in one second steam passage 52 may be positioned at positions shifted in the X direction. The dimensions of each of the protrusions 38 in the X direction may be equal.

[0173] As shown in Fig. 20, the protrusions 38a to 38d are positioned at positions offset from one another in the X direction. The first protrusion 38a and the second protrusion 38b constituting one reinforcing portion 37a are positioned at positions offset from one another in the X direction. The second protrusion 38b and the third protrusion 38c protruding from one land portion 33b are positioned at positions offset from one another in the X direction. The third protrusion 38c and the fourth protrusion 38d constituting one reinforcing portion 37b are positioned at positions offset from one another in the X direction.

[0174] As described above, the protrusions 38 are positioned at positions that are gradually shifted in the X direction. Therefore, the multiple reinforcing portions 37 are lined up along a direction that is inclined toward the X direction.

[0175] As shown in FIG. 18, the vapor chamber 1 according to the present embodiment is bent along a bending line 8 inclined in the X direction in plan view. The bending line 8 shown in FIG. 18 extends in a direction inclined in the X direction and in a direction inclined in the Y direction. The bending line 8 shown in FIG. 18 also extends in a direction intersecting the X direction in plan view. A plurality of reinforcing parts 37 are arranged along the bending line 8. The reinforcement region 7 shown in FIG. 20 may be defined as a range in the X direction in which the protrusion 38 is formed. As shown in FIG. 20, the reinforcement region 7 may be defined as a region extending along a direction inclined in the X direction. In this case, the bending region 7a may be a region extending along the bending line 8 in a direction inclined in the X direction. In the example shown in FIG. 20, the bending region 7a may be divided by a boundary line extending in a direction inclined in the X direction in plan view.

[0176] Thus, according to the present embodiment, the bend line 8 extends in a direction inclined toward the X direction. The reinforcing portions 37 are arranged along the bend line 8. As a result, even if the vapor chamber 1 is bent along the bend line 8 extending in a direction inclined toward the X direction, the reinforcing portions 37 can reinforce the vapor passages 51, 52. Even in this case, the vapor passages 51, 52 can be prevented from collapsing.

[0177] (Third embodiment) Next, a vapor chamber, an electronic device, and a main body sheet for a vapor chamber according to a third embodiment of the present disclosure will be described with reference to Figs. 21 to 27B.

[0178] The third embodiment shown in Figures 21 to 27B differs mainly in that the reinforcing portion includes a reinforcing land portion spaced apart from the land portion. The other configurations are substantially the same as those of the first embodiment shown in Figures 1 to 17C. In Figures 21 to 27B, the same parts as those of the first embodiment shown in Figures 1 to 17C are denoted by the same reference numerals and detailed description thereof will be omitted.

[0179] In this embodiment, as shown in FIG. 21 and FIG. 22, the reinforcing portion 37 includes a reinforcing land portion 39 spaced from the land portion 33. The reinforcing land portion 39 is located in the reinforcing region 7 and may be formed in a columnar shape. One reinforcing land portion 39 is located in each of the steam passages 51, 52. The reinforcing land portion 39 may constitute the wick sheet 30. The reinforcing land portion 39 may be formed as a constituent part of the wick sheet 30 by etching. More specifically, the reinforcing land portion 39 may be a portion that is not etched in the etching process described later and where the material of the wick sheet 30 remains. The side wall of the reinforcing land portion 39 may be constituted by a wall surface similar to the wall surface 53a of the first steam flow path recess 53 and the wall surface 54a of the second steam flow path recess 54.

[0180] The reinforcing portions 37 located in each of the steam passages 51, 52 may be aligned along a predetermined direction intersecting the X direction. In this embodiment, the reinforcing portions 37 are aligned along the Y direction. The Y direction is a direction perpendicular to the X direction in a plan view. Each of the reinforcing lands 39 is located at the same position in the X direction. The dimensions of each of the reinforcing lands 39 in the X direction may be equal.

[0181] 21, the reinforcing land 39 may have sides along the X and Y directions in a plan view. The reinforcing land 39 may be formed over the entire area of ​​the reinforcing region 7 in the X direction. In other words, the range in the X direction in which the reinforcing land 39 exists may be defined as the reinforcing region 7. As shown in FIG. 21, the reinforcing region 7 may be defined as an area extending along the Y direction.

[0182] The reinforcing land portion 39 is defined in the Z direction by the first body surface 30a and the second body surface 30b of the wick sheet 30. The reinforcing land portion 39 extends in the Z direction from the first body surface 30a to the second body surface 30b. The reinforcing land portion 39 is diffusion bonded to the first sheet inner surface 10b of the first sheet 10, and is diffusion bonded to the second sheet inner surface 20a of the second sheet 20.

[0183] 22, the reinforcing land portion 39 improves the mechanical strength of the second vapor passage 52 in the reinforced region 7. The second liquid flow passage portion 70 does not have to be formed on the first main body surface 30a of the reinforcing land portion 39. The first main body surface 30a and the second main body surface 30b of the reinforcing land portion 39 may be formed flat.

[0184] As shown in FIG. 22, the reinforcing land 39 may include a protruding portion 43. More specifically, a wall surface 53a that defines the first steam flow path recess 53 is formed in the reinforcing land 39 in the same manner as the land 33. A wall surface 54a that defines the second steam flow path recess 54 is formed in the reinforcing land 39 in the same manner as the land 33. In the reinforcing land 39, a protruding portion 43 is formed that is defined by a ridge where the wall surface 53a and the wall surface 54a join together. As shown in FIG. 22, the protruding portion 43 may be formed to protrude toward the opposing protruding portion 42. The position of the protruding portion 43 in the Z direction may be equal to the position of the protruding portion 42 of the land 33 in the Z direction. As shown in FIG. 22, the position of the protruding portion 43 in the Z direction may be an intermediate position between the first main body surface 30a and the second main body surface 30b.

[0185] As shown in Figs. 21 and 22, the width of the reinforcing land portion 39 in the reinforcing region 7 is w11. w11 is the dimension of the reinforcing land portion 39 in the Y direction. The width w11 refers to the dimension at the position where the above-mentioned through portion 34 exists in the Z direction of the wick sheet 30. The width w11 refers to the dimension from one overhang portion 43 to the other overhang portion 43. The width w11 is smaller than the width w4 of the through portion 34 in the first region 5 and the second region 6 described above. The width w11 may be, for example, 30 µm to 500 µm.

[0186] 21, the width w12 of the reinforcing land 39 on the first body surface 30a may be equal to the width w13 on the second body surface 30b. The width w12 is the dimension of the reinforcing land 39 in the Y direction on the first body surface 30a. The width w13 is the dimension of the reinforcing land 39 in the Y direction on the second body surface 30b.

[0187] As shown in FIG. 21 and FIG. 23, the reinforcing land portion 39 may be supported on the land portion 33 by the reinforcing support portion 40. FIG. 21 shows an example in which one reinforcing land portion 39 is supported by four reinforcing support portions 40, but the number of reinforcing support portions 40 is arbitrary. The reinforcing support portion 40 may be formed so as not to impede the flow of the working steam 2a diffusing through the second steam passage 52. For example, the reinforcing support portion 40 may be located near one of the first main body surface 30a and the second main body surface 30b of the wick sheet 30, and a space constituting the second steam passage 52 may be formed near the other. FIG. 23 shows an example in which the reinforcing support portion 40 is formed on the first main body surface 30a and the first steam passage recess 53 is not formed. The second main body surface 30b has a second steam passage recess 54 formed thereon. This allows the thickness t6 of the reinforcing support portion 40 to be thinner than the thickness t4 of the wick sheet 30 (see FIG. 6), and prevents the second steam passage 52 from being divided. The reinforcing support portion 40 shown in FIG. 23 may be formed, for example, by not etching the position where the reinforcing support portion 40 is to be formed when etching the first main body surface 30a of the wick sheet 30.

[0188] As shown in FIG. 22, the first sheet 10 may include a first sheet recess 15 that overlaps with the steam passages 51, 52 in a plan view. The portion of the first sheet recess 15 that is joined to the reinforcing land 39 may not enter the first steam passage recess 53. The first sheet recess 15 in the reinforcing region 7 is formed around the reinforcing land 39 in a plan view. The recess dimension d2 of the first sheet outer surface 10a in the reinforcing region 7 may be smaller than the recess dimension d2 shown in FIG. 14. Similarly, the second sheet 20 may include a second sheet recess 25 that overlaps with the steam passages 51, 52 in a plan view. The portion of the second sheet recess 25 that is joined to the reinforcing land 39 may not enter the second steam passage recess 54. The second sheet recess 25 in the reinforcing region 7 is formed around the reinforcing land 39 in a plan view. The recess dimension d4 of the second sheet outer surface 20b in the reinforcing region 7 may be smaller than the recess dimension d4 shown in FIG.

[0189] Thus, according to this embodiment, the reinforcing portion 37 includes the reinforcing land portion 39 spaced apart from the land portion 33. This allows the second vapor passage 52 to be reinforced in the reinforcing region 7. Therefore, even if the vapor chamber 1 is bent in the reinforcing region 7, the second vapor passage 52 can be prevented from collapsing, and the flow resistance of the second vapor passage 52 can be reduced. Furthermore, since the reinforcing portion 37 is provided in the second vapor passage 52, the capillary action from the second vapor passage 52 to the first liquid flow passage portion 60 can be enhanced. Therefore, the working fluid 2b can be prevented from accumulating in the second vapor passage 52 in the bending region 7a, and the flow of the working fluid 2a can be prevented from being obstructed. As a result, the heat dissipation efficiency of the vapor chamber 1 can be improved. Furthermore, in the bending process, the bending line 8 can be positioned using the reinforcing portion 37 as a marker, and the bending work efficiency can be improved.

[0190] In the above-described embodiment, the reinforcing land portion 39 has sides along the X-direction and the Y-direction in a plan view. However, the present disclosure is not limited to this. For example, as shown in FIG. 24A, the reinforcing land portion 39 may be formed in a diamond shape along the X-direction and the Y-direction in a plan view. In this case, the flow path resistance can be reduced, and the flow of the working steam 2a can be prevented from being obstructed. The planar shape of the reinforcing land portion 39 may be a circle, an ellipse, or a combination of these shapes, and is arbitrary. Alternatively, as shown in FIG. 24B, the reinforcing land portion 39 may be formed in a parallelogram shape along the X-direction in a plan view. Two opposing sides of the parallelogram may be along the X-direction. According to the example shown in FIG. 24B, the flow path resistance can be reduced, and the flow of the working steam 2a can be prevented from being obstructed.

[0191] In the above-described embodiment, an example in which one reinforcing land portion 39 is located in each of the steam passages 51 and 52 has been described. However, the present disclosure is not limited to this. For example, as shown in FIG. 25A, a plurality of reinforcing land portions 39 may be located in each of the steam passages 51 and 52. In this case, each of the reinforcing portions 37 includes a plurality of reinforcing land portions 39. The reinforcing land portions 39 are spaced apart from each other. Even in this case, the second steam passage 52 can be easily reinforced in the reinforcing region 7. In the example shown in FIG. 25A, the reinforcing land portion 39 is not located in the bending region 7a, but since the reinforcing land portion 39 is located in the vicinity of the bending region 7a, the second steam passage 52 can be reinforced. The reinforcing land portion 39 may be located in the bending region 7a. The reinforcing region 7 shown in FIG. 25A may be defined as a range in the X direction in which the reinforcing land portion 39 exists.

[0192] In the above-described embodiment, the reinforcing land portions 39 are arranged along the Y direction. However, the present disclosure is not limited to this. For example, the reinforcing land portions 39 may be arranged along a direction inclined toward the X direction as shown in FIG. 20 and the like. Alternatively, as shown in FIG. 25B, the reinforcing land portions 39 may be arranged along the X direction. In this case, the reinforcing land portions 39 can be positioned in the bending region 7a, so that the second steam passage 52 can be further reinforced. The planar shape of the reinforcing land portion 39 may be circular as shown in FIG. 25B, or rectangular as shown in FIG. 25C. When the planar shape of the reinforcing land portion 39 is rectangular, the working fluid 2b can be drawn into the space between two reinforcing land portions 39 adjacent to each other in the X direction by capillary action. Therefore, the working fluid 2b can be prevented from accumulating in the space between the reinforcing land portion 39 and the land portion 33. In this case, the flow path cross-sectional area of ​​the working steam 2a can be secured, and the flow of the working steam 2a can be prevented from being obstructed. 25C, the gap g1 may be smaller than the gap g2. The gap g1 is the dimension in the X direction between two adjacent reinforcing lands 39 in the X direction. The gap g2 is the dimension in the Y direction between the reinforcing land 39 and the land 33. In this case, the capillary action in the space between the two adjacent reinforcing lands 39 can be enhanced.

[0193] In the above-described embodiment, the reinforcing land portion 39 constitutes the wick sheet 30 and is formed by etching. However, the present disclosure is not limited to this. The reinforcing portion 37 may be formed on the first sheet 10 or the second sheet 20. For example, the reinforcing portion 37 may be formed on the first sheet inner surface 10b of the first sheet 10 by plating so as to protrude from the first sheet inner surface 10b. In this case, the surface of the reinforcing portion 37 facing the second sheet 20 may be diffusion bonded to the second sheet 20. Alternatively, the reinforcing portion 37 may be formed on the second sheet inner surface 20a of the second sheet 20 by plating so as to protrude from the second sheet inner surface 20a. Alternatively, the reinforcing portion 37 may include a first reinforcing division portion (not shown) formed on the first sheet 10 and a second reinforcing division portion (not shown) formed on the second sheet 20. In this case, the first reinforcing division portion may be formed by plating so as to protrude from the first sheet inner surface 10b of the first sheet 10. The second reinforcing divided portion may be formed by plating so as to protrude from the second sheet inner surface 20a of the second sheet 20. The reinforcing portion 37 may be configured by diffusion bonding the first reinforcing divided portion and the second reinforcing divided portion.

[0194] In the above-described embodiment, the positions of the overhanging portion 42 and the overhanging portion 43 in the Z direction are at the intermediate position between the first main body surface 30a and the second main body surface 30b. However, the present disclosure is not limited to this. For example, as shown in FIG. 26, the positions of the overhanging portion 42 and the overhanging portion 43 in the Z direction may be closer to the first sheet 10 than the intermediate position. In this case, the capillary action of the first vapor flow path recess 53 located between the overhanging portions 42, 43 and the first sheet 10 can be enhanced. This allows the working fluid 2b condensed in the second vapor flow path 52 in the bending region 7a to move from the second vapor flow path 52 to the first liquid flow path portion 60. This improves the transport capacity of the working fluid 2b to the evaporation region SR. In addition, when the overhanging portions 42, 43 are located closer to the first sheet 10 than the intermediate position, the flow path cross-sectional area of ​​the second vapor flow path recess 54 can be increased, and the flow path resistance of the working vapor 2a in the second vapor flow path recess 54 can be reduced.

[0195] In the above-described embodiment, the width w12 of the reinforcing land portion 39 on the first main body surface 30a is equal to the width w13 on the second main body surface 30b. However, the present disclosure is not limited to this. For example, as shown in FIG. 27A, the width w13 may be smaller than the width w12. In this case, the area of ​​the second steam flow path recess 54 occupied by the reinforcing land portion 39 can be relatively reduced, and the second sheet recess 25 can be easily formed. Therefore, the recess dimension d4 of the second sheet outer surface 20b can be increased. When the second sheet 20 is located on the inside of the bend, the capillary action of the flow path corner portion 56 of the second steam flow path recess 54 can be enhanced. Therefore, the working liquid 2b can be prevented from stagnation in the second steam passage 52 in the bent region 7a, and the flow of the working steam 2a can be prevented from being obstructed. When the first liquid flow path portion 60 is formed on the second main body surface 30b of the wick sheet 30, the working liquid 2b can be moved quickly to the first liquid flow path portion 60.

[0196] As shown in FIG. 27A, when the width w13 is smaller than the width w12, the width w12 can be made larger than the width w13. This allows the area of ​​the first vapor flow path recess 53 occupied by the reinforcing land portion 39 to be relatively increased, and the second vapor passage 52 can be further reinforced. Therefore, even if the vapor chamber 1 is bent in the reinforced region 7, the first vapor flow path recess 53 can be prevented from collapsing, and the flow path resistance of the working vapor 2a in the first vapor flow path recess 53 can be reduced. When the first liquid flow path portion 60 is formed on the first main body surface 30a of the wick sheet 30, the working vapor 2a evaporated in the first liquid flow path portion 60 can be smoothly diffused in the first vapor flow path recess 53.

[0197] Unlike the example shown in FIG. 27A, as shown in FIG. 27B, the width w13 may be larger than the width w12. In this case, the area of ​​the second vapor flow path recess 54 occupied by the reinforcing land portion 39 can be relatively increased, and the second vapor passage 52 can be further reinforced. Therefore, even if the vapor chamber 1 is bent in the reinforced region 7, the second vapor flow path recess 54 can be prevented from collapsing, and the flow path resistance of the working vapor 2a in the second vapor flow path recess 54 can be reduced. When the first liquid flow path portion 60 is formed on the second main body surface 30b of the wick sheet 30, the working vapor 2a evaporated in the first liquid flow path portion 60 can be smoothly diffused in the second vapor flow path recess 54.

[0198] As shown in FIG. 27B, when the width w13 is larger than the width w12, the width w12 can be made smaller than the width w13. This allows the area of ​​the first vapor flow path recess 53 occupied by the reinforcing land portion 39 to be relatively reduced, making it easier to form the first sheet recess 15. Therefore, the recess dimension d2 of the first sheet outer surface 10a can be made larger. When the first sheet 10 is located on the outside of the bend, the capillary action of the flow path corner portion 55 of the first vapor flow path recess 53 can be enhanced. Therefore, the working liquid 2b can be prevented from accumulating in the second vapor passage 52 in the bent region 7a, and the flow of the working vapor 2a can be prevented from being obstructed. When the first liquid flow path portion 60 is formed on the first main body surface 30a of the wick sheet 30, the working liquid 2b can be moved quickly to the first liquid flow path portion 60.

[0199] (Fourth embodiment) Next, a vapor chamber, an electronic device, and a main body sheet for a vapor chamber according to a fourth embodiment of the present disclosure will be described with reference to Figs. 28 to 37B.

[0200] The fourth embodiment shown in Figures 28 to 37B differs mainly in that the first liquid flow path portion includes a low-density region with a small number of communication grooves and a high-density region with a large number of communication grooves, and the high-density region is located in a bent region and overlaps with a bent line. The other configurations are substantially the same as those of the first embodiment shown in Figures 1 to 17C. In Figures 28 to 37B, the same parts as those of the first embodiment shown in Figures 1 to 17C are denoted by the same reference numerals and detailed description thereof will be omitted.

[0201] In this embodiment, the vapor chamber 1 shown in FIG. 28 and FIG. 29 is divided into a first region 5, a second region 6, and a curved region 7a located between the first region 5 and the second region 6. In this embodiment, the reinforcing region 7 (see FIG. 5, etc.) is not provided between the first region 5 and the second region 6. In the curved region 7a, the vapor chamber 1 is curved at a right angle. As shown in FIG. 28 and FIG. 29, in this embodiment, the reinforcing portion 37 (see FIG. 5, etc.) is not provided in each of the first steam passage 51 and the second steam passage 52. Therefore, in this embodiment, as shown in FIG. 28 to FIG. 31, the second steam passage 52 and the land portion 33 extending in a straight line are shown. As shown in FIG. 30, each land portion 33 is provided with a high-density region 68 described later.

[0202] 32, each of the communication grooves 65 according to the present embodiment extends in the Y direction in low-density regions 66, 67 and a high-density region 68 described later, and is formed perpendicular to the main groove 61. In the present embodiment, the communication grooves 65 located in the low-density regions 66, 67 and a high-density region 68 described later extend in the Y direction.

[0203] 32, a plurality of communication groove rows 63 are formed in each land portion 33. In other words, the first liquid flow path portion 60 includes a plurality of communication groove rows 63. Each communication groove row 63 includes a plurality of communication grooves 65 arranged in the X direction. The communication groove rows 63 are formed in the first main body surface 30a of each land portion 33. Each communication groove row 63 is defined by a main flow groove 61.

[0204] The first liquid flow path section 60 includes a plurality of protrusions 64 provided on the first main body surface 30a of the wick sheet 30. The protrusions 64 are formed between adjacent communication grooves 65 in the X direction, and are arranged in the X direction to correspond to each communication groove row 63. In this embodiment, as shown in Fig. 12, the planar shape of the protrusions 64 may be rectangular with the X direction as the longitudinal direction.

[0205] In this embodiment, the protrusions 64 are positioned in a staggered manner. More specifically, of two connecting groove rows 63 adjacent to each other in the Y direction, the protrusion 64 corresponding to a first connecting groove row 63a (described later) and the protrusion 64 corresponding to a second connecting groove row 63b are positioned at positions shifted from each other in the X direction.

[0206] As shown in FIG. 32, a plurality of communication groove rows 63 are formed in each land portion 33. The communication grooves 65 of two communication groove rows 63 adjacent to each other in the Y direction are positioned at positions offset from each other in the X direction. Among the plurality of communication groove rows 63, two communication groove rows 63 adjacent to each other in the Y direction are referred to as a first communication groove row 63a and a second communication groove row 63b. The communication grooves 65 of the first communication groove row 63a are positioned at positions offset from an extension line of the communication grooves 65 of the second communication groove row 63b. The extension line of the communication grooves 65 refers to a virtual line extending the communication grooves 65 in the Y direction. Therefore, the communication grooves 65 of the first communication groove row 63a and the communication grooves 65 of the second communication groove row 63b are not arranged in a straight line. In this embodiment, the communication grooves 65 of the first communication groove row 63a located in each of a first low-density region 66, a second low-density region 67, and a high-density region 68 described below are positioned at positions shifted from the extension lines of the communication grooves 65 of the second communication groove row 63b. The first communication groove row 63a and the second communication groove row 63b may be formed alternately. In the description of this embodiment, the suffixes a and b are added to the symbols of the communication groove rows only when they are to be distinguished from one another, and are omitted in other cases.

[0207] As shown in Fig. 32, each communication groove row 63 according to the present embodiment includes low-density regions 66, 67 and a high-density region 68. The high-density region 68 is a region in which the number of unit communication grooves of the communication grooves 65 is higher than that of the low-density regions 66, 67. The low-density regions 66, 67 are located on both sides of the high-density region 68 in the X direction. In the example shown in Fig. 32, a first low-density region 66 is located above the high-density region 68, and a second low-density region 67 is located below the high-density region 68.

[0208] In this embodiment, the width of each main groove 61 formed in the land portion 33 may be constant. The width of each main groove 61 may be constant in each of the low-density regions 66, 67 and the high-density region 68. The width of each protrusion 64 formed in the land portion 33 may be constant. The width of each protrusion 64 may be constant in each of the low-density regions 66, 67 and the high-density region 68.

[0209] The unit number of communication grooves means the number of communication grooves 65 per unit length in the X direction. The unit number of communication grooves in the high density region 68 is larger than the unit number of communication grooves in the low density regions 66 and 67. For example, as shown in FIG. 32, the unit number of communication grooves in the high density region 68 may be calculated by dividing the number of communication grooves 65 located in the high density region 68 by the X direction dimension of the high density region 68. For example, the total number of communication grooves 65 located in the high density region 68 may be divided by the X direction dimension of the high density region 68. In this case, the X direction dimension of the high density region 68 is the dimension indicated by the double arrow indicated by the symbol 68a or 68b in FIG. 32. Similarly, the unit number of communication grooves in the low density regions 66 and 67 may be calculated by dividing the number of communication grooves 65 located in the low density regions 66 and 67 by the X direction dimension of the low density regions 66 and 67. In this case, the X-direction dimensions of the low-density regions 66, 67 are the dimensions indicated by the arrows denoted by symbols 66a, 66b, 67a, and 67b in FIG.

[0210] The high density region 68 may be a region where the arrangement pitch of the communication grooves 65 in the X direction is small. The low density regions 66, 67 may be regions where the arrangement pitch of the communication grooves 65 in the X direction is large. In FIG. 32, the arrangement pitch p2 of the communication grooves 65 located in the high density region 68 in the X direction is constant, and the arrangement pitch p1 of the communication grooves 65 located in the low density regions 66, 67 in the X direction is constant. The arrangement pitch p2 is smaller than the arrangement pitch p1. As shown in FIG. 32, the high density region 68 may be a region occupied by the communication grooves 65 arranged at the arrangement pitch p2 in the X direction. The low density regions 66, 67 may be a region occupied by the communication grooves 65 arranged at the arrangement pitch p1 in the X direction.

[0211] An intermediate region 69 may be located between the high-density region 68 and the low-density regions 66 and 67. Some of the multiple communication groove rows 63 may include the intermediate region 69, and the other communication groove rows 63 may not include the intermediate region 69. In the example shown in FIG. 32, the first communication groove row 63a does not include the intermediate region 69, but the second communication groove row 63b includes the intermediate region 69. This intermediate region 69 does not include the communication groove 65. The intermediate region 69 may include the communication groove 65. In this case, the number of unit communication grooves in the intermediate region 69 may be smaller than the number of unit communication grooves in the high-density region 68 and larger than the number of unit communication grooves in the low-density regions 66 and 67. The X-direction pitch of the communication grooves 65 in the intermediate region 69 may be larger than the X-direction pitch in the high-density region 68 and smaller than the X-direction pitch in the low-density regions 66 and 67. In this case, the arrangement pitch p2 of the communication grooves 65 located in the high-density region 68 may be the smallest pitch among the communication grooves 65 in one communication groove row 63. The arrangement pitch p1 of the communication grooves 65 located in the low-density regions 66, 67 may be the largest pitch among the communication grooves 65 in one communication groove row 63.

[0212] As shown in FIG. 32, the first communication groove row 63a includes a first low-density region 66a, a second low-density region 67a, and a high-density region 68a. The second communication groove row 63b includes a first low-density region 66b, a second low-density region 67b, and a high-density region 68b. The high-density region 68a of the first communication groove row 63a and the high-density region 68b of the second communication groove row 63b may be aligned in a direction intersecting the X direction. In the example shown in FIG. 32, the high-density region 68a and the high-density region 68b are aligned in the Y direction. The X-direction dimension of the high-density region 68a may be equal to the X-direction dimension of the high-density region 68b, but may be different as shown in FIG. 32. In the description of this embodiment, the subscripts a and b are added to the symbols of the low-density region and the high-density region only when they are to be described separately, and are omitted in other cases.

[0213] As shown in Fig. 30, the high density regions 68 located in each land portion 33 may be aligned in a direction intersecting the X direction. In the example shown in Fig. 30, the high density regions 68 of each land portion 33 are aligned in the Y direction. As shown in Figs. 30 and 31, in this embodiment, the reinforcing portion 37 shown in Figs. 9 and 10 is not formed in the second steam passage 52.

[0214] 32, the multiple communication groove rows 63 located in each land portion 33 may include an adjacent communication groove row 63c and an intermediate communication groove row 63d. Two adjacent communication groove rows 63c may be formed in one land portion 33. When the wick sheet 30 includes multiple land portions 33, each land portion 33 may have two adjacent communication groove rows 63c formed therein.

[0215] The adjacent communication groove array 63c is composed of communication grooves 65 that communicate between the steam flow path section 50 and the main grooves 61 adjacent to the steam flow path section 50. The adjacent communication groove array 63c is adjacent to the side edges 33e located on both side edges in the Y direction of the land portion 33. The adjacent communication groove array 63c is adjacent to the first steam passage 51 or the second steam passage 52 of the steam flow path section 50. In the example shown in FIG. 32, an example is shown in which two adjacent communication groove arrays 63c are adjacent to the corresponding second steam passages 52.

[0216] The intermediate communication groove row 63d is composed of communication grooves 65 that communicate with two adjacent main grooves 61. The multiple communication groove rows 63 located in each land portion 33 may include multiple intermediate communication groove rows 63d. The intermediate communication groove row 63d is located in the middle of the land portion 33 in the Y direction. The intermediate communication groove row 63d is located between two adjacent communication groove rows 63c. The intermediate communication groove row 63d is not adjacent to the first steam passage 51 and is not adjacent to the second steam passage 52.

[0217] The adjacent communication groove row 63c and the intermediate communication groove row 63d may be the first communication groove row 63a or the second communication groove row 63b described above. In the example shown in FIG. 32, both of the two adjacent communication groove rows 63c are the second communication groove rows 63b. The multiple intermediate communication groove rows 63d are composed of the first communication groove row 63a and the second communication groove row 63b arranged alternately in the Y direction. One of the adjacent communication groove row 63c and the intermediate communication groove row 63d adjacent to each other may be composed of the first communication groove row 63a, and the other may be composed of the second communication groove row 63b. In the example shown in FIG. 32, the adjacent communication groove row 63c is composed of the second communication groove row 63b, and the intermediate communication groove row 63d adjacent to this adjacent communication groove row 63c is composed of the first communication groove row 63a.

[0218] In this embodiment, each adjacent connecting groove row 63c includes low-density regions 66, 67 and a high-density region 68. Each intermediate connecting groove row 63d includes low-density regions 66, 67 and a high-density region 68. In each land portion 33 according to this embodiment, the high-density region 68 of the adjacent connecting groove row 63c and the high-density region 68 of the intermediate connecting groove row 63d are aligned in the Y direction.

[0219] As shown in FIG. 29, the vapor chamber 1 according to the present embodiment includes a bending region 7a. In the bending region 7a, the vapor chamber 1 is bent along a bending line 8 extending in a direction intersecting the X direction in a plan view. As shown in FIGS. 28 and 29, the bending line 8 according to the present embodiment extends in the Y direction in a plan view. The Y direction is a direction perpendicular to the X direction in a plan view. The bending line 8 crosses the frame body portion 32, the land portion 33, the first steam passage 51, and the second steam passage 52. This can suppress deformation of the first sheet 10 into each of the steam passages 51 and 52, and can suppress deformation of the second sheet 20 into each of the steam passages 51 and 52. The flow path cross-sectional area of ​​the first steam passage 51 and the second steam passage 52 can be secured. The first region 5, the second region 6, and the bending region 7a may be divided by a boundary line along the bending line 8. In the examples shown in FIGS. 28 and 29, each of the regions 5, 6, and 7 may be divided by a boundary line extending in the Y direction in a plan view.

[0220] As shown in FIG. 30, the high density region 68 is located in the bent region 7a. More specifically, the high density region 68 located in each land portion 33 is located in the bent region 7a. The high density region 68 may extend from the bent region 7a in the X direction. The high density region 68 located in each land portion 33 overlaps the bent line 8 when the bent region 7a is viewed from the inside or outside of the bend. The high density region 68 may be arranged along the Y direction. In FIG. 30, the high density region 68 is roughly divided by a linear boundary line extending in the Y direction in a plan view, but the present disclosure is not limited to this. As shown in FIG. 32, the high density region 68 does not have to be divided by a linear boundary line as shown in FIG. 30, as long as it is divided for each connecting groove row 63.

[0221] The vapor chamber 1 is bent as shown in Fig. 33. In the bent region 7a, the first sheet 10 is located outside the wick sheet 30 with respect to the center O of the bend. The second sheet 20 is located inside the wick sheet 30 with respect to the center O of the bend.

[0222] Each of the steam passages 51, 52 may include a passage bend 57 located in the bend region 7a as shown in Fig. 33. An example of the passage bend 57 is shown in Fig. 33. In Fig. 33, the shape of the passage bend 57 when viewed along the Y direction forms a quarter arc, but is not limited to this. The passage bend 57 may include the first steam passage recess 53 and the second steam passage recess 54 described above.

[0223] When the vapor chamber 1 is in operation, a part of the working vapor 2a passing through the first vapor passage 51 and the second vapor passage 52 passes through a passage bend 57 (see FIG. 33) located in the bending region 7a. When passing through the passage bend 57, the working vapor 2a is likely to condense.

[0224] Outside the passage bend portion 57, the working steam 2a is likely to collide with the first sheet inner surface 10b. The colliding working steam 2a is condensed to become working fluid 2b, and adheres to the first sheet inner surface 10b. A high density region 68 of the adjacent communication groove row 63c and the intermediate communication groove row 63d is formed on the first main body surface 30a of the land portion 33 in the bent region 7a. In the high density region 68, the number of unit communication grooves is increased, and the capillary action for drawing the working fluid 2b in the Y direction is enhanced. The working fluid 2b condensed in the passage bend portion 57 is drawn from the passage bend portion 57 into the high density region 68 of the adjacent communication groove row 63c. Then, the working fluid 2b is drawn into the main stream groove 61 adjacent to the passage bend portion 57, and into the high density region 68 of the intermediate communication groove row 63d. In this way, the working fluid 2b is smoothly drawn into each main stream groove 61 of the first liquid flow path portion 60. The working fluid 2b drawn into each of the main grooves 61 is transported toward the evaporation region SR by the capillary action of the main grooves 61. In this manner, the working fluid 2b adhering to the first sheet inner surface 10b in the curved region 7a is prevented from stagnation.

[0225] Inside the passage bend 57, the flow of the working steam 2a may separate from the second sheet inner surface 20a. More specifically, a vortex is formed near the exit of the passage bend 57, and the working steam 2a condenses and adheres to the second sheet inner surface 20a. The exit of the passage bend 57 corresponds to a portion of the passage bend 57 that is relatively close to the second region 6. A high-density region 68 having a large number of unit connection grooves is formed on the first main body surface 30a of the land portion 33 in the bending region 7a. The capillary action for drawing the working fluid 2b in the Y direction is enhanced, and the working fluid 2b is smoothly drawn into the mainstream grooves 61. The working fluid 2b drawn into the mainstream grooves 61 is transported toward the evaporation region SR by the capillary action of each mainstream groove 61. In this way, the working fluid 2b attached to the second sheet inner surface 20a in the bending region 7a is prevented from stagnation.

[0226] Thus, according to this embodiment, the multiple communication grooves 65 of the first liquid flow path section 60 form multiple communication groove rows 63, and the multiple communication groove rows 63 include an adjacent communication groove row 63c formed of communication grooves 65 that communicate the vapor flow path section 50 and the mainstream groove 61 adjacent to the vapor flow path section 50. The adjacent communication groove row 63c includes low-density regions 66, 67 and a high-density region 68 having a larger number of unit communication grooves than the low-density regions 66, 67. The vapor chamber 1 is bent in the bending region 7a along a bending line 8 extending in the Y direction in a plan view. The high-density region 68 of the adjacent communication groove row 63c is located in the bending region 7a and overlaps with the bending line 8. This can increase the density of the communication grooves 65 that communicate the vapor flow path section 50 and the mainstream groove 61 in the bending region 7a, and can increase the capillary action for drawing the working fluid 2b from the vapor flow path section 50 to the first liquid flow path section 60. Therefore, the working fluid 2b condensed in the bent region 7a can be smoothly drawn into the first liquid flow path section 60, and the working fluid 2b can be prevented from accumulating in the vapor passages 51, 52 in the bent region 7a. As a result, even when the vapor chamber 1 is bent, the heat dissipation efficiency can be improved.

[0227] Furthermore, according to this embodiment, the low-density regions 66, 67 are located on both sides of the high-density region 68 in the X direction. This allows the low-density regions 66, 67, in which the density of the communication grooves 65 is low, to be formed on both sides of the curved region 7a. This allows the capillary action in the X direction by the main grooves 61 to be enhanced on both sides of the curved region 7a, and the working fluid 2b can be transported toward the evaporation region SR.

[0228] According to the present embodiment, the plurality of communication groove rows 63 include an intermediate communication groove row 63d composed of communication grooves 65 communicating with two adjacent main grooves 61, and the intermediate communication groove row 63d includes low-density regions 66, 67 and a high-density region 68. The high-density region 68 of the intermediate communication groove row 63d is located in the bending region 7a and overlaps the bending line 8. This makes it possible to increase the density of the communication grooves 65 communicating the main grooves 61 in the bending region 7a. Therefore, the working fluid 2b drawn into the high-density region 68 of the adjacent communication groove row 63c can be smoothly drawn into the high-density region 68 of the intermediate communication groove row 63d, and the working fluid 2b can be drawn into the first liquid flow path section 60 more smoothly. The working fluid 2b can be further prevented from stagnation in each vapor passage 51, 52 in the bending region 7a. As a result, even when the vapor chamber 1 is bent, the heat dissipation efficiency of the vapor chamber 1 can be further improved.

[0229] Furthermore, according to this embodiment, in the low-density regions 66, 67 and the high-density region 68, the communication grooves 65 of the first communication groove row 63a are positioned at positions offset from the extension lines of the communication grooves 65 of the second communication groove row 63b. This makes it possible to prevent the communication grooves 65 of the first communication groove row 63a and the communication grooves 65 of the second communication groove row 63b from being arranged in a straight line. This makes it possible to prevent the two communication grooves 65 from crossing the mainstream groove 61, thereby ensuring the capillary action of the mainstream groove 61.

[0230] According to this embodiment, in the low-density regions 66, 67 and the high-density region 68, the communication grooves 65 extend in the Y direction perpendicular to the X direction. This allows the length of the communication grooves 65 to be shortened, and the working fluid 2b can be smoothly drawn from the steam passage portion 50 to the main grooves 61. This further prevents the working fluid 2b from accumulating in the steam passages 51, 52 in the bent region 7a. The working fluid 2b can be smoothly transported between the adjacent main grooves 61, and the occurrence of dryout in the main grooves 61 can be prevented. This allows the working fluid 2b in each main groove 61 to have a capillary action, and the working fluid 2b can be smoothly transported toward the evaporation region SR.

[0231] Moreover, according to this embodiment, the bending line 8 extends in the Y direction perpendicular to the X direction. This allows the vapor chamber 1 to be bent along a direction perpendicular to the X direction along which the land portion 33 extends. This makes it possible to suppress deformation of the first sheet 10 entering each of the steam passages 51, 52 in the bending region 7a, and also suppress deformation of the second sheet 20 entering each of the steam passages 51, 52. This makes it possible to ensure the flow path cross-sectional areas of the first steam passage 51 and the second steam passage 52, and to suppress obstruction of the flow of the working steam 2a in the bending region 7a.

[0232] In the above-described embodiment, an example has been described in which each of the intermediate connecting groove rows 63d includes low-density regions 66, 67 and a high-density region 68. However, the present disclosure is not limited to this. For example, as shown in FIG. 34A, at least one of the multiple intermediate connecting groove rows 63d does not need to include a high-density region 68.

[0233] In the example shown in FIG. 34A, some of the intermediate communication groove rows 63d do not include a high-density region 68. The intermediate communication groove row 63d that does not include a high-density region 68 may be formed entirely of low-density regions 66, 67. The intermediate communication groove row 63d adjacent to the adjacent communication groove row 63c includes a high-density region 68. Even in this case, the density of the communication groove 65 that communicates the vapor channel section 50 and the mainstream groove 61 can be increased in the bending region 7a, and the capillary action for drawing the working fluid 2b from the vapor channel section 50 to the first liquid channel section 60 can be enhanced. Therefore, the working fluid 2b condensed in the bending region 7a can be smoothly drawn into the first liquid channel section 60, and the working fluid 2b can be prevented from accumulating in each of the vapor channels 51, 52 in the bending region 7a. In the intermediate communication groove row 63d that does not include a high-density region 68, the mainstream groove 61 can increase the capillary action in the X direction. As a result, the working fluid 2b drawn into the high density region 68 of the adjacent connecting groove row 63c can be smoothly moved to the main groove 61, thereby preventing the working fluid 2b from accumulating in the high density region 68 of the adjacent connecting groove row 63c.

[0234] 34A, all of the intermediate communication groove rows 63d do not have to include high-density regions 68. Even in this case, since the adjacent communication groove rows 63c include high-density regions 68, the working fluid 2b condensed in the bent region 7a can be smoothly drawn into the first liquid flow path section 60.

[0235] As shown in FIG. 34B and FIG. 34C, a part of the first sheet 10 may be recessed into the communication groove 65. More specifically, a region of the first sheet outer surface 10a overlapping with the communication groove 65 may be formed in a concave shape recessed inward toward the communication groove 65. The first sheet 10 may include a first sheet communication groove recess 16 overlapping with the communication groove 65 in a plan view. The first sheet communication groove recess 16 is recessed into the communication groove 65. The first sheet communication groove recess 16 may be formed in each of the first region 5, the second region 6, and the bending region 7a. Although not shown, the first sheet 10 may include a first sheet main groove recess overlapping with the main groove 61 in a plan view. The first sheet main groove recess may be recessed into the main groove 61. The first sheet main groove recess may be formed in each of the first region 5, the second region 6, and the bending region 7a, or may be formed continuously from the first region 5 to the second region 6. The first sheet connecting groove recess 16 may be formed continuous with the first sheet main groove recess.

[0236] A flow path corner (not shown) that constitutes a part of the liquid flow path cross section is defined by the first sheet inner surface 10b of the first sheet communication groove recess 16 and the wall surface of the communication groove 65. The flow path corner may be formed in a wedge shape extending in the Y direction. The flow path corner can enhance capillary action.

[0237] FIG. 34B shows the first sheet communication groove recess 16 in the low-density regions 66, 67. Since the number of unit communication grooves in the low-density regions 66, 67 is low, the interval between the communication grooves 65 is relatively large. As a result, the stress generated in the first sheet 10 when bent is difficult to disperse, and tends to concentrate in the portion of the first sheet 10 that overlaps with the communication groove 65. Therefore, the recess amount of the first sheet communication groove recess 16 is large in the low-density regions 66, 67. In FIG. 34B, the recess dimension of the first sheet outer surface 10a where the first sheet communication groove recess 16 is located in the low-density regions 66, 67 is indicated by the symbol d5.

[0238] FIG. 34C shows the first sheet communication groove recess 16 in the high density region 68. Since the number of unit communication grooves in the high density region 68 is high, the interval between the communication grooves 65 is relatively small. This makes it easier to disperse the stress generated in the first sheet 10 when bending, and prevents the stress from concentrating in the portion of the first sheet 10 that overlaps the communication groove 65. Therefore, in the high density region 68, the recess amount of the first sheet communication groove recess 16 is small. In FIG. 34C, the recess dimension of the first sheet outer surface 10a where the first sheet communication groove recess 16 is located in the high density region 68 is indicated by the symbol d6.

[0239] The recess dimension d5 shown in Fig. 34B is larger than the recess dimension d6 shown in Fig. 34C. This can enhance the capillary action in the Y direction of the communication grooves 65 located in the low-density regions 66, 67. Therefore, in the bending region 7a, the capillary action in the Y direction of the communication grooves 65 of the intermediate communication groove row 63d that does not include a high-density region 68 can be enhanced. In this case, the working fluid 2b drawn into the high-density region 68 of the adjacent communication groove row 63c can be smoothly moved to the main groove 61 of the intermediate communication groove row 63d that does not include a high-density region 68, and the working fluid 2b can be prevented from accumulating in the high-density region 68 of the adjacent communication groove row 63c.

[0240] In the above-described embodiment, the example has been described in which the communication grooves 65 of the first communication groove row 63a located in the high-density region 68 are positioned at positions shifted from the extension line of the communication grooves 65 of the second communication groove row 63b. In other words, the example has been described in which the convex portions 64 are positioned in a staggered manner. However, the present disclosure is not limited to this. For example, as shown in FIG. 35, in the high-density region 68, the communication grooves 65 of the first communication groove row 63a may be positioned on the extension line of the communication grooves 65 of the second communication groove row 63b. In this case, the convex portions 64 are arranged in parallel, and the main grooves 61 and the communication grooves 65 are arranged in a lattice pattern. In the example shown in FIG. 35, the communication grooves 65 are aligned along the Y direction. This can enhance the capillary action in the Y direction of the first liquid flow path portion 60 in the bent region 7a, and the condensed working fluid 2b can be smoothly drawn into the first liquid flow path portion 60. In addition, since the communication grooves 65 are aligned along the Y direction, the vapor chamber 1 can be easily bent along the bending line 8 extending in the Y direction. In the example shown in Fig. 35, the high density regions 68 located in each land portion 33 overlap the bending line 8. The high density regions 68 are lined up along the Y direction. The X direction dimensions of each high density region 68 are equal.

[0241] In the above-described embodiment, the width of each of the main grooves 61 located in the high-density region 68 is constant. However, the present disclosure is not limited to this. For example, the widths of the main grooves 61 located in the high-density region 68 may be different.

[0242] For example, as shown in FIG. 36A, the plurality of main grooves 61 formed in the land portion 33 may include a plurality of first main grooves 61a and a plurality of second main grooves 61b.

[0243] The first mainstream groove 61a may be located at the center of the land portion 33 in the width direction. The second mainstream groove 61b may be located on both sides of the first mainstream groove 61a in the width direction. The second mainstream groove 61b is located near the side edge 33e of the land portion 33 and near the second steam passage 52. One or more second mainstream grooves 61b may be formed on both sides of the first mainstream groove 61a in the width direction. Although FIG. 36A shows an example in which two first mainstream grooves 61a are formed, the number of the first mainstream grooves 61a is arbitrary. Although FIG. 36A shows an example in which two second mainstream grooves 61b are formed on both sides of the first mainstream groove 61a in the width direction, the number of the second mainstream grooves 61b is arbitrary.

[0244] The width of the first mainstream groove 61a and the width of the second mainstream groove 61b in the low-density regions 66, 67 may be the same width or may be w5 (see FIG. 32). The first mainstream groove 61a and the second mainstream groove 61b in the high-density region 68 may have different widths. As shown in FIG. 36A, the first mainstream groove 61a in the high-density region 68 has a width w14, and the second mainstream groove 61b has a width w15. The width w15 of the second mainstream groove 61b may be larger than the width w14 of the first mainstream groove 61a. The width w14 may be smaller than the width w5. The width w15 may be larger than the width w5. The convex portion 64 located in the high-density region 68 may be shifted in the width direction with respect to the corresponding convex portion 64 located in the low-density regions 66, 67 so that the width w15 is larger than the width w14. More specifically, in the convex portion row 64A located between two adjacent second mainstream grooves 61b, the convex portions 64 located in the high density regions 68 may be shifted closer to the widthwise center than the convex portions 64 located in the low density regions 66, 67. In the convex portion row 64A located between the adjacent first mainstream groove 61a and second mainstream groove 61b, the convex portions 64 located in the high density regions 68 may be shifted closer to the widthwise center than the convex portions 64 located in the low density regions 66, 67.

[0245] According to the example shown in FIG. 36A, the width w15 of the second mainstream groove 61b can be increased, and the flow path resistance of the working fluid 2b in the second mainstream groove 61b close to the second vapor passage 52 can be reduced. This allows the working fluid 2b to be smoothly drawn from the second vapor passage 52 to the second mainstream groove 61b. The width w14 of the first mainstream groove 61a can be reduced, and the capillary action of the first mainstream groove 61a located at the center in the width direction can be enhanced. This allows the working fluid 2b drawn into the second mainstream groove 61b to move smoothly to the first mainstream groove 61a, and the movement of the working fluid 2b from the second vapor passage 52 to the first liquid flow path section 60 can be promoted. In addition, the capillary action of the first mainstream groove 61a allows the working fluid 2b to be smoothly transported from the first mainstream groove 61a in the high-density region 68 to the evaporation region SR, and the working fluid 2b can be prevented from accumulating in the high-density region 68.

[0246] Alternatively, as shown in FIG. 36B, the width w15 of the second mainstream groove 61b may be smaller than the width w14 of the first mainstream groove 61a. The width w14 may be larger than the width w5. The width w15 may be smaller than the width w5. The convex portions 64 located in the high density region 68 may be shifted in the width direction with respect to the corresponding convex portions 64 located in the low density regions 66, 67 so that the width w15 is smaller than the width w14. More specifically, in the convex portion row 64A located between two adjacent second mainstream grooves 61b, the convex portions 64 located in the high density region 68 may be shifted closer to the side edge 33e than the convex portions 64 located in the low density regions 66, 67. In the convex portion row 64A located between the adjacent first mainstream groove 61a and second mainstream groove 61b, the convex portions 64 located in the high density region 68 may be shifted closer to the side edge 33e than the convex portions 64 located in the low density regions 66, 67.

[0247] According to the example shown in FIG. 36B, the width w15 of the second mainstream groove 61b can be reduced, and the capillary action of the second mainstream groove 61b close to the second vapor passage 52 can be enhanced. This allows the working fluid 2b to be smoothly drawn from the second vapor passage 52 to the second mainstream groove 61b. The width of the first mainstream groove 61a can be increased, and the flow path resistance of the working fluid 2b in the first mainstream groove 61a located at the center in the width direction can be reduced. This allows the working fluid 2b drawn into the second mainstream groove 61b to move smoothly to the first mainstream groove 61a, and the supply amount of the working fluid 2b from the first mainstream groove 61a in the high-density region 68 toward the evaporation region SR can be increased. In addition, the reduction in the flow path resistance of the first mainstream groove 61a allows the working fluid 2b to be smoothly transported to the evaporation region SR, and the working fluid 2b can be prevented from accumulating in the high-density region 68.

[0248] In the above-described embodiment, the width of each of the protrusions 64 located in the high-density region 68 is constant. However, the present disclosure is not limited to this. For example, the widths of the protrusions 64 located in the high-density region 68 may be different.

[0249] For example, as shown in FIG. 37A, the multiple convex rows 64A formed on the land portion 33 may include multiple first convex rows 64Aa and multiple second convex rows 64Ab.

[0250] The first convex row 64Aa may be located at the center of the land portion 33 in the width direction. The second convex row 64Ab may be located on both sides of the first convex row 64Aa in the width direction. The second convex row 64Ab is located near the side edge 33e of the land portion 33 and near the second steam passage 52. One or more second convex rows 64Ab may be formed on both sides of the first convex row 64Aa in the width direction. Although an example in which five first convex rows 64Aa are formed is shown in FIG. 37A, the number of the first convex rows 64Aa is arbitrary. Although an example in which one second convex row 64Ab is formed on both sides of the first convex row 64Aa in the width direction is shown in FIG. 37A, the number of the second convex rows 64Ab is arbitrary.

[0251] The width of the convex portion 64 of the first convex portion row 64Aa and the width of the convex portion 64 of the second convex portion row 64Ab in the low-density regions 66, 67 may be the same width or may be w7 (see FIG. 32). The convex portion 64 of the first convex portion row 64Aa and the convex portion 64 of the second convex portion row 64Ab in the high-density region 68 may have different widths. As shown in FIG. 37A, the convex portion 64 of the first convex portion row 64Aa in the high-density region 68 has a width w16, and the convex portion 64 of the second convex portion row 64Ab has a width w17. The width w17 of the convex portion 64 of the second convex portion row 64Ab may be larger than the width w16 of the convex portion 64 of the first convex portion row 64Aa. The width w16 may be equal to the width w7. The width w17 may be larger than the width w7.

[0252] According to the example shown in FIG. 37A, the width w17 of the convex portion 64 of the second convex portion row 64Ab can be increased, and the mechanical strength of the convex portion 64 of the second convex portion row 64Ab close to the second steam passage 52 can be improved. This makes it possible to prevent the communication groove 65 located between these convex portions 64 from being crushed by bending. Therefore, it is possible to prevent the flow path of the communication groove 65 from being crushed, and the working fluid 2b can be smoothly drawn from the second steam passage 52 to the main flow groove 61. When the working fluid 2b evaporates in the first liquid flow path portion 160 located at the bend portion BP, the evaporated working vapor 2a can be smoothly diffused to the steam passages 151 and 152. In addition, by increasing the width w17 of the convex portion 64, the dimension in the Y direction of the communication groove 65 located between these convex portions 64 can be increased, and the capillary action of the communication groove 65 corresponding to the second convex portion row 64Ab can be enhanced. This makes it possible to smoothly draw the working fluid 2b from the second steam passage 52 to the first liquid flow path portion 60. Furthermore, the width w16 of the protrusions 64 in the first protrusion row 64Aa can be made small, and the high density region 68 can be prevented from interfering with the flow of the hydraulic fluid 2b in the X direction.

[0253] Alternatively, as shown in FIG. 37B, the width w16 of the convex portion 64 of the first convex portion row 64Aa may be greater than the width w17 of the convex portion 64 of the second convex portion row 64Ab. The width w16 may be greater than the width w7. The width w17 may be equal to the width w7. FIG. 37B shows an example in which three first convex portion rows 64Aa are formed, but the number of first convex portion rows 64Aa is arbitrary. FIG. 37B shows an example in which two second convex portion rows 64Ab are formed on each of both sides in the width direction of the first convex portion row 64Aa, but the number of second convex portion rows 64Ab is arbitrary.

[0254] According to the example shown in FIG. 37B, the width w16 of the convex portion 64 of the first convex portion row 64Aa can be increased, and the mechanical strength of the convex portion 64 of the first convex portion row 64Aa located at the center in the width direction can be improved. This can prevent the communication groove 65 located between these convex portions 64 from being crushed by bending. Therefore, even if bubbles are generated in the main stream groove 61, the generated bubbles can be drawn into the communication groove 65, and the working fluid 2b can be prevented from stagnation in the main stream groove 61. In addition, by increasing the width w16 of the convex portion 64, the dimension in the Y direction of the communication groove 65 located between these convex portions 64 can be increased, and the capillary action of the communication groove 65 corresponding to the first convex portion row 64Aa can be enhanced. This allows the working fluid 2b drawn into the first liquid flow path portion 60 to move smoothly to the center in the width direction, and the movement of the working fluid 2b from the second vapor passage 52 to the first liquid flow path portion 60 can be promoted. Moreover, by increasing the width w16 of the convex portions 64 of the first convex portion row 64Aa, the width of the mainstream grooves 61 located between two adjacent first convex portion rows 64Aa can be reduced, and the capillary action can be enhanced. This allows the working fluid 2b to be smoothly transported from the mainstream grooves 61 in the high-density region 68 to the evaporation region SR, and prevents the working fluid 2b from accumulating in the high-density region 68. Moreover, the width w17 of the convex portions 64 of the second convex portion row 64Ab can be reduced, and prevents the high-density region 68 from interfering with the flow of the working fluid 2b in the X direction.

[0255] In the above-described embodiment, an example in which the liquid flow path portion is not formed on the second main body surface 30b of the land portion 33 and the second main body surface 30b of the frame portion 32 has been described. However, the present disclosure is not limited to this. For example, a liquid flow path portion (not shown) may be formed on the second main body surface 30b of the land portion 33. The liquid flow path portion may include a main groove 61 and a communication groove 65, similar to the above-described first liquid flow path portion 60. The flow path cross-sectional area of ​​the groove of the liquid flow path portion formed on the second main body surface 30b may be equal to the flow path cross-sectional area of ​​the groove of the first liquid flow path portion 60, or may be larger than the flow path cross-sectional area of ​​the groove of the first liquid flow path portion 60. When the liquid flow path portion is formed on the second main body surface 30b, the first liquid flow path portion 60 may not be formed on the first main body surface 30a.

[0256] In the above-described embodiment, an example has been described in which the reinforcing region 7 (see FIG. 5, etc.) is not provided between the first region 5 and the second region 6, and the reinforcing portion 37 is not provided in each of the steam passages 51, 52. However, the present disclosure is not limited to this. For example, the reinforcing region 7 may be provided between the first region 5 and the second region 6. The reinforcing portion 37 may be provided in each of the steam passages 51, 52.

[0257] (Fifth embodiment) Next, a vapor chamber, an electronic device, and a main body sheet for a vapor chamber according to a fifth embodiment of the present disclosure will be described with reference to FIGS.

[0258] The fifth embodiment shown in Figures 38 to 43 is different in that the bent lines extend in a direction inclined toward the first direction. The other configurations are substantially the same as those of the fourth embodiment shown in Figures 28 to 37B. In Figures 38 to 43, the same parts as those of the fourth embodiment shown in Figures 28 to 37B are denoted by the same reference numerals and detailed description thereof will be omitted.

[0259] The vapor chamber 1 according to the present embodiment is bent along a bending line 8 that is inclined in the X direction in plan view, as shown in Fig. 38 and Fig. 39. The bending line 8 shown in Fig. 38 and Fig. 39 extends in a direction inclined in the X direction and also in a direction inclined in the Y direction. The bending line 8 according to the present embodiment also extends in a direction intersecting the X direction in plan view.

[0260] As shown in Figs. 40 and 41, the high-density regions 68 located in each land portion 33 overlap the bending line 8. The high-density regions 68 may be arranged along a direction inclined with respect to the X direction. In Fig. 40, the high-density regions 68 are roughly divided by linear boundaries extending in a direction inclined with respect to the X direction in a plan view, but the present disclosure is not limited to this. As shown in Fig. 41, the high-density regions 68 do not have to be divided by linear boundaries as shown in Fig. 40, as long as they are divided for each connecting groove row 63. Even in the example shown in Fig. 41, the high-density regions 68 overlap the bending line 8, and therefore are arranged along a direction inclined with respect to the X direction in a plan view.

[0261] In this embodiment, as shown in Fig. 41, the communication grooves 65 of the first communication groove row 63a located in the first low-density region 66 and the second low-density region 67 are positioned at positions shifted from the extension line of the communication grooves 65 of the second communication groove row 63b. In the high-density region 68, the communication grooves 65 of the first communication groove row 63a may be positioned on the extension line of the communication grooves 65 of the second communication groove row 63b. In this case, the convex portions 64 are arranged in parallel, and the main grooves 61 and the communication grooves 65 are arranged in a lattice pattern. The communication grooves 65 extend in the Y direction in the low-density regions 66, 67 and the high-density region 68, and are aligned along the Y direction.

[0262] Thus, according to this embodiment, the bent line 8 extends in a direction inclined toward the X direction. The high-density region 68 of the adjacent communication groove row 63c is located in the bent region 7a and overlaps with the bent line 8. As a result, even if the vapor chamber 1 is bent along the bent line 8 extending in a direction inclined toward the X direction, the capillary action in the Y direction of the first liquid flow path portion 60 can be enhanced in the bent region 7a. Therefore, it is possible to suppress the working liquid 2b from accumulating in each of the vapor passages 51, 52 in the bent region 7a. As a result, even if the vapor chamber 1 is bent, the heat dissipation efficiency of the vapor chamber 1 can be improved.

[0263] Furthermore, according to this embodiment, in the high density region 68, the communication grooves 65 of the first communication groove row 63a are located on the extension lines of the communication grooves 65 of the second communication groove row 63b. This makes it possible to enhance the capillary action in the Y direction of the first liquid flow path section 60 in the bent region 7a, and to smoothly draw the condensed working fluid 2b into the first liquid flow path section 60.

[0264] In the above-described embodiment, the communication groove 65 of the first liquid flow path portion 60 located in the high-density region 68 extends in the Y direction. However, the present disclosure is not limited to this. In the high-density region 68, the communication groove 65 may extend in a direction different from the X direction, and may extend in a direction inclined to the X direction, as shown in FIG. 42. Even in this case, the communication groove 65 of the first communication groove row 63a is located on an extension line of the communication groove 65 of the second communication groove row 63b. The communication groove 65 is aligned along a direction inclined to the X direction. This allows the vapor chamber 1 to be easily bent along the bending line 8 extending in a direction inclined to the X direction. In addition, in the bending region 7a, the capillary action of the first liquid flow path portion 60 in the direction inclined to the X direction can be enhanced, and the condensed working liquid 2b can be smoothly drawn into the first liquid flow path portion 60.

[0265] In the above-described embodiment, the frame body 32 is formed in a rectangular frame shape along the X direction and the Y direction. However, the present disclosure is not limited to this. For example, as shown in FIG. 43, the frame body 32 may be inclined with respect to the land portion 33 extending in the X direction. The frame body 32 is formed in a rectangular frame shape inclined in the X direction and inclined in the Y direction. The bending line 8 is along the frame body 32. The bending line 8 extends in the horizontal direction of FIG. 43. In this case, the bending line 8 also extends in a direction intersecting the X direction in a plan view. In the example shown in FIG. 43, as in the examples shown in FIGS. 38 to 41, the capillary action in the Y direction of the first liquid flow path portion 60 can be enhanced in the bending region 7a, and the working liquid 2b can be suppressed from stagnation in each vapor passage 51, 52 in the bending region 7a. As a result, even when the vapor chamber 1 is bent, the heat dissipation efficiency of the vapor chamber 1 can be improved.

[0266] (Sixth embodiment) Next, a vapor chamber, an electronic device, and a main body sheet for a vapor chamber according to a sixth embodiment of the present disclosure will be described with reference to FIGS.

[0267] The sixth embodiment shown in Figures 44 to 65 is different from the first embodiment in that the upper steam flow path recess is formed so that the width increases from the first opening toward the inner part. The other configurations are substantially the same as those of the first embodiment shown in Figures 1 to 17C. In Figures 44 to 65, the same parts as those of the first embodiment shown in Figures 1 to 17C are denoted by the same reference numerals and detailed description thereof will be omitted.

[0268] The vapor chamber is thin and may be deformed by external forces. This may cause a part of the vapor passage in the vapor chamber to collapse, reducing the cross-sectional area of ​​the passage. In this case, the vapor chamber's ability to transport the working vapor may decrease, and the performance of the vapor chamber may decrease.

[0269] The present embodiment has been made taking these points into consideration, and aims to provide a main body sheet for a vapor chamber, a vapor chamber, and an electronic device that can suppress deterioration in the performance of the vapor chamber.

[0270] As shown in FIG. 44 and FIG. 45, the vapor chamber 1 according to this embodiment includes a lower sheet 110, an upper sheet 120, and a main body sheet 130 for the vapor chamber. The lower sheet 110 is an example of a second sheet, and the upper sheet 120 is an example of a first sheet. The main body sheet 130 is also called a wick sheet. The main body sheet 130 is interposed between the lower sheet 110 and the upper sheet 120. The vapor chamber 1 according to this embodiment is composed of the lower sheet 110, the upper sheet 120, and the main body sheet 130. The lower sheet 110, the main body sheet 130, and the upper sheet 120 are laminated in this order.

[0271] The vapor chamber 1 is generally formed in a thin flat plate shape. The planar shape of the vapor chamber 1 is arbitrary, but may be a rectangular shape as shown in FIG. 44. The planar shape of the vapor chamber 1 may be, for example, a rectangle with one side of 10 mm to 200 mm and the other side of 50 mm to 600 mm, or a square with one side of 40 mm to 300 mm. The planar dimensions of the vapor chamber 1 are arbitrary. In this embodiment, as an example, an example in which the planar shape of the vapor chamber 1 is a rectangular shape with the X direction as the longitudinal direction and the Y direction perpendicular to the X direction as the transverse direction will be described. In this case, as shown in FIGS. 46 to 48, the lower sheet 110, the upper sheet 120, and the main body sheet 130 may also have the same planar shape as the vapor chamber 1. The planar shape of the vapor chamber 1 is not limited to a rectangular shape, and may be any shape such as a circular shape, an elliptical shape, an L-shape, a T-shape, or a U-shape.

[0272] As shown in FIG. 44, the vapor chamber 1 includes an evaporation region SR where the working fluids 2a and 2b evaporate, and a condensation region CR where the working fluids 2a and 2b condense.

[0273] The evaporation region SR is a region that overlaps with the electronic device D in a plan view, and is a region where the electronic device D is attached. The evaporation region SR can be disposed at any position on the vapor chamber 1. In the illustrated example, the evaporation region SR is formed on the negative side of the X direction of the vapor chamber 1. The negative side of the X direction corresponds to the left side in FIG. 44. Heat from the electronic device D can be transmitted not only to the region that overlaps with the electronic device D in a plan view, but also to the periphery of the region. Therefore, the evaporation region SR includes the region that overlaps with the electronic device D in a plan view and the periphery of the region. Here, the plan view is a state in which the vapor chamber 1 is viewed from a direction perpendicular to the surface that receives heat from the electronic device D and the surface that releases the received heat. The surface that receives heat corresponds to a first upper sheet surface 120a of the upper sheet 120, which will be described later. The surface that releases heat corresponds to a first lower sheet surface 110a of the lower sheet 110, which will be described later. For example, as shown in FIG. 44, it corresponds to a state in which the vapor chamber 1 is viewed from above or below.

[0274] The condensation region CR is a region that does not overlap with the electronic device D in a plan view, and is a region where the working vapor 2a mainly releases heat and condenses. The condensation region CR can also be said to be a region surrounding the evaporation region SR. In the illustrated example, the condensation region CR is formed on the positive side of the X direction of the vapor chamber 1. The positive side of the X direction corresponds to the right side in FIG. 44. In the condensation region CR, heat is released from the working vapor 2a to the lower sheet 110, and the working vapor 2a is cooled and condensed in the condensation region CR.

[0275] When the vapor chamber 1 is installed inside a mobile terminal, the up-down relationship may be lost depending on the attitude of the mobile terminal. However, in this embodiment, for convenience, the sheet that receives heat from the electronic device D is referred to as the above-mentioned upper sheet 120, and the sheet that dissipates the received heat is referred to as the above-mentioned lower sheet 110. For this reason, the following description will be given with the lower sheet 110 disposed on the lower side and the upper sheet 120 disposed on the upper side.

[0276] As shown in FIG. 45, the lower sheet 110 includes a first lower sheet surface 110a provided on the opposite side to the main body sheet 130, and a second lower sheet surface 110b provided on the opposite side to the first lower sheet surface 110a. The second lower sheet surface 110b faces the main body sheet 130. The lower sheet 110 may be formed in a generally flat shape, or may have a constant thickness overall. A housing member Ha constituting a part of a housing H of a mobile terminal or the like is attached to the first lower sheet surface 110a. A part of the first lower sheet surface 110a may be covered by the housing member Ha. As shown in FIG. 46, an alignment hole 112 may be provided at each of the four corners of the lower sheet 110.

[0277] As shown in Fig. 45, the upper sheet 120 includes a first upper sheet surface 120a facing the main body sheet 130, and a second upper sheet surface 120b provided on the opposite side to the first upper sheet surface 120a. The upper sheet 120 may be formed to be generally flat, or may have a uniform thickness overall. The above-mentioned electronic device D is attached to this second upper sheet surface 120b. As shown in Fig. 47, alignment holes 122 may be provided at the four corners of the upper sheet 120.

[0278] 45, the main body sheet 130 includes a sheet body 131 and a steam flow path portion 150 provided in the sheet body 131. The sheet body 131 includes a first main body surface 131a and a second main body surface 131b provided on the opposite side to the first main body surface 131a. The first main body surface 131a faces the upper sheet 120, and the second main body surface 131b faces the lower sheet 110.

[0279] The first upper sheet surface 120a of the upper sheet 120 and the first main body surface 131a of the sheet main body 131 may be permanently joined to each other by thermocompression bonding. Similarly, the second lower sheet surface 110b of the lower sheet 110 and the second main body surface 131b of the sheet main body 131 may be permanently joined to each other by thermocompression bonding. An example of joining by thermocompression bonding is diffusion bonding. However, the lower sheet 110, the upper sheet 120, and the main body sheet 130 may be joined by other methods such as brazing, instead of diffusion bonding, as long as they can be permanently joined.

[0280] 44 and 48, the sheet main body 131 includes a frame portion 132 formed in a rectangular frame shape in a plan view, and a plurality of land portions 133 provided in the frame portion 132. The frame portion 132 and the land portions 133 are portions that are not etched in the etching step described below, and the material of the main body sheet 130 remains.

[0281] In the illustrated example, the frame portion 132 is formed in a rectangular frame shape in a plan view. A steam flow path portion 150 is provided inside the frame portion 132. The steam flow path portion 150 accommodates the working fluids 2a and 2b. Each land portion 133 is provided within the steam flow path portion 150, and the working steam 2a flows around each land portion 133. The steam flow path portion 150 includes the above-mentioned multiple land portions 133 and steam passages 151 and 152, which will be described later. The steam passages 151 and 152 are passages provided around each land portion 133 and through which the working steam 2a flows.

[0282] In the illustrated example, the land portion 133 extends in the X direction in a plan view, and the planar shape of the land portion 133 is an elongated rectangular shape. The X direction corresponds to the left-right direction in FIG. 48. The land portions 133 are spaced apart from each other in the Y direction perpendicular to the X direction and arranged parallel to each other. The Y direction corresponds to the up-down direction in FIG. 48. The width w21 of the land portion 133 (see FIG. 49) may be, for example, 100 μm to 3000 μm. Here, the width w21 of the land portion 133 is the dimension of the land portion 133 in the Y direction, and means the dimension at a position in the Z direction where an inner portion 157 described later exists. The Z direction corresponds to the thickness direction of the main body sheet 130.

[0283] The frame portion 132 and each land portion 133 are joined to the lower sheet 110 and also to the upper sheet 120. A wall surface 155 of an upper steam flow path recess 153 (described later) and a wall surface 156 of a lower steam flow path recess 154 (described later) form side walls of the land portion 133. The first main body surface 131a and the second main body surface 131b of the sheet main body 131 may be formed flat across the frame portion 132 and each land portion 133.

[0284] The steam flow passage portion 150 is a flow passage through which the working steam 2a mainly passes. The working fluid 2b may also pass through the steam flow passage portion 150. As shown in FIG. 45 and FIG. 49, the steam flow passage portion 150 may extend from the first main body surface 131a to the second main body surface 131b of the sheet main body 131, or may penetrate the sheet main body 131. The steam flow passage portion 150 may be covered by the upper sheet 120 on the first main body surface 131a, or may be covered by the lower sheet 110 on the second main body surface 131b. A first opening 153a of an upper steam flow passage recess 153 described later is covered by the upper sheet 120, and a second opening 154a of a lower steam flow passage recess 154 described later is covered by the lower sheet 110.

[0285] As shown in FIG. 48, the steam flow path section 150 may include a first steam passage 151 and a plurality of second steam passages 152. The steam flow path section 150 is divided into the first steam passage 151 and a plurality of second steam passages 152 by a plurality of land portions 133. The first steam passage 151 is formed between the frame body portion 132 and the land portion 133. The first steam passage 151 is formed continuously inside the frame body portion 132 and outside the land portion 133. The planar shape of the first steam passage 151 is a rectangular frame shape. The first steam passage 151 may include a portion extending in the X direction and a portion extending in the Y direction. The second steam passage 152 is formed between the land portions 133 adjacent to each other. The second steam passage 152 extends in the X direction in a plan view, and the planar shape of the second steam passage 152 is an elongated rectangular shape.

[0286] As shown in FIG. 45, the first steam passage 151 and the second steam passage 152 may extend from the first main body surface 131a to the second main body surface 131b of the sheet main body 131, or may penetrate the sheet main body 131. The first steam passage 151 and the second steam passage 152 are each formed by an upper steam passage recess 153 provided on the first main body surface 131a and a lower steam passage recess 154 provided on the second main body surface 131b. The upper steam passage recess 153 is an example of a first main body recess, and the lower steam passage recess 154 is an example of a second main body recess. The upper steam passage recess 153 and the lower steam passage recess 154 may extend in the X direction. The upper steam passage recess 153 and the lower steam passage recess 154 are connected to each other to form the first steam passage 151 and the second steam passage 152.

[0287] The upper steam flow path recess 153 is formed in a concave shape on the first main body surface 131a by etching the first main body surface 131a of the main body sheet 130 in an etching step described below. Here, being formed in a concave shape on the first main body surface 131a means being formed so as to be recessed from the first main body surface 131a. As a result, the upper steam flow path recess 153 includes a wall surface 155 formed in a curved shape, as shown in FIG.

[0288] As shown in FIG. 49, the upper steam flow path recess 153 includes a first opening 153a and an inner portion 157 provided at a position closer to the second main body surface 131b than the first opening 153a. The first opening 153a opens to the first main body surface 131a. The inner portion 157 is located inside the thickness direction of the sheet main body 131 and is located lower in FIG. 49 than the first opening 153a. In the cross-sectional view shown in FIG. 49, the inner portion 157 is a portion of the upper steam flow path recess 153 that has the largest width. The inner portion 157 is located at the lower end of the upper steam flow path recess 153. Here, the cross-sectional view corresponds to a state seen in a cross section perpendicular to the X direction along which the upper steam flow path recess 153 and the lower steam flow path recess 154 extend. FIG. 49 shows, as an example of a cross-sectional view, the vapor chamber 1 viewed in a YZ cross section along the Y direction and the Z direction, in which the vapor chamber 1 is viewed in an X direction perpendicular to the Z direction.

[0289] As shown in FIG. 49, in a cross-sectional view, the upper steam flow path recess 153 is formed so that the width increases from the first opening 153a toward the inner portion 157. As a result, an upper sheet support portion 135 is formed in the sheet body 131 of the main body sheet 130. The upper sheet support portion 135 is formed in a position of the sheet body 131 close to the upper sheet 120. The upper sheet support portion 135 is formed so as to protrude from the frame portion 132 and the land portion 133 toward the inside of the upper steam flow path recess 153. The upper sheet support portion 135 abuts against the first upper sheet surface 120a to support the upper sheet 120. As a result, the upper sheet 120 can resist bending stress generated in the upper sheet 120 by a force received from the outside, and deformation of the upper sheet 120 so as to enter the upper steam flow path recess 153 can be suppressed. Therefore, it is possible to prevent a part of the upper steam flow passage recess 153 from collapsing, and it is possible to prevent the flow passage cross-sectional area of ​​the upper steam flow passage recess 153 from becoming smaller.

[0290] 49, in a cross-sectional view, the wall surface 155 of the upper steam flow path recess 153 includes a first boundary edge 155a extending from the first opening 153a to the inner portion 157. The first boundary edge 155a is formed in a curved shape. The first boundary edge 155a is curved toward the outside of the upper steam flow path recess 153.

[0291] Such an upper steam flow passage recess 153 constitutes a part of the first steam passage 151 and a part of the second steam passage 152. The upper steam flow passage recess 153 constitutes the upper half of the first steam passage 151 and the upper half of the second steam passage 152.

[0292] The lower steam flow path recess 154 is formed in a concave shape on the second main body surface 131b by etching the second main body surface 131b of the main body sheet 130 in an etching step described below. Here, being formed in a concave shape on the second main body surface 131b means being formed so as to be recessed from the second main body surface 131b. As a result, the lower steam flow path recess 154 includes a wall surface 156 formed in a curved shape, as shown in FIG.

[0293] As shown in FIG. 49, the lower steam flow path recess 154 includes a second opening 154a. The second opening 154a opens to the second main body surface 131b. The above-mentioned inner portion 157 is located at the upper end of the lower steam flow path recess 154. It can also be said that the lower steam flow path recess 154 includes the inner portion 157 common to the upper steam flow path recess 153. The upper steam flow path recess 153 and the lower steam flow path recess 154 are connected to each other by the inner portion 157 and communicate with each other. The width w26 of the first opening 153a of the upper steam flow path recess 153 may be equal to the width w27 of the second opening 154a of the lower steam flow path recess 154.

[0294] As shown in FIG. 49, in a cross-sectional view, the lower steam flow path recess 154 is formed so that the width increases from the second opening 154a toward the inner portion 157. As a result, a lower sheet support portion 136 is formed in the sheet body 131 of the main body sheet 130. The lower sheet support portion 136 is formed in a position of the sheet body 131 close to the lower sheet 110. The lower sheet support portion 136 is formed so as to protrude from the frame portion 132 and the land portion 133 toward the inside of the lower steam flow path recess 154. The lower sheet support portion 136 abuts against the second lower sheet surface 110b to support the lower sheet 110. As a result, the lower sheet 110 can resist bending stress generated in the lower sheet 110 by a force received from the outside, and deformation of the lower sheet 110 so as to enter the lower steam flow path recess 154 can be suppressed. Therefore, it is possible to prevent a part of the lower steam flow passage recess 154 from collapsing, and it is possible to prevent the flow passage cross-sectional area of ​​the lower steam flow passage recess 154 from becoming smaller.

[0295] 49, in cross-sectional view, the wall surface 156 of the lower steam flow path recess 154 includes a second boundary edge 156a extending from the second opening 154a to the inner portion 157. The second boundary edge 156a is formed in a curved shape. The second boundary edge 156a is curved toward the outside of the lower steam flow path recess 154.

[0296] Such a lower steam flow passage recess 154 constitutes a part of the first steam passage 151 and a part of the second steam passage 152. The lower steam flow passage recess 154 constitutes the lower half of the first steam passage 151 and the lower half of the second steam passage 152.

[0297] The first boundary edge 155a and the second boundary edge 156a may each curve toward the inner portion 157 and be smoothly connected to each other at the inner portion 157 without any seams.

[0298] The planar shape of the first steam passage 151 is defined by the first opening 153a or the second opening 154a. The planar shape of the second steam passage 152 is defined by the first opening 153a or the second opening 154a.

[0299] In a cross-sectional view as shown in FIG. 49, the width of the upper steam flow passage recess 153 and the width of the lower steam flow passage recess 154 are maximum at the inner portion 157. The widths w22, w22' of the upper steam flow passage recess 153 and the lower steam flow passage recess 154 at the inner portion 157 may be, for example, 400 μm to 1600 μm. Here, the width w22 refers to the dimension of the second steam passage 152 in the Y direction, and refers to the dimension at the position where the inner portion 157 exists in the Z direction. The width w22' of the first steam passage 151 refers to the dimension of the first steam passage 151 in the X direction or the Y direction, and refers to the dimension at the position where the inner portion 157 exists in the Z direction. The width w22' may be, for example, 400 μm to 1600 μm, similar to the width w22 described above.

[0300] The position of the inner portion 157 in the Z direction may be an intermediate position between the first main body surface 131a and the second main body surface 131b, or may be a position shifted downward or upward from the intermediate position. The position of the inner portion 157 is arbitrary as long as the upper steam flow path recess 153 and the lower steam flow path recess 154 communicate with each other.

[0301] In the illustrated example, the first boundary edge 155a and the second boundary edge 156a extend in a curved manner toward the outside of the steam flow path section 150, but this is not limited to this. For example, the first boundary edge 155a and the second boundary edge 156a may extend linearly from the openings 153a, 154a toward the inner portion 157, or may extend in a convex curve toward the inside of the steam flow path section 150.

[0302] The steam flow path section 150 configured in this manner constitutes a part of the above-mentioned sealed space 3. As shown in Fig. 45, the first steam passage 151 and the second steam passage 152 of the steam flow path section 150 are defined mainly by the lower sheet 110, the upper sheet 120, and the frame portion 132 and the land portion 133 of the above-mentioned sheet main body 131. The first steam passage 151 and the second steam passage 152 have a relatively large flow path cross-sectional area so that the working steam 2a can pass through.

[0303] Here, in order to clarify the drawing, Figure 45 shows the first steam passage 151 and the second steam passage 152, etc. in an enlarged manner, and the number and arrangement of these steam passages 151, 152, etc. differ from those in Figures 44 and 48.

[0304] Although not shown, a plurality of support parts for supporting the land part 133 on the frame part 132 may be provided in the steam flow path part 150. Support parts for supporting adjacent land parts 133 may be provided. These support parts may be provided on both sides of the land part 133 in the X direction, or on both sides of the land part 133 in the Y direction. The support parts may be formed so as not to impede the flow of the working steam 2a diffusing in the steam flow path part 150. For example, the support parts may be disposed at a position close to one of the first main body surface 131a and the second main body surface 131b of the sheet main body 131, and a space forming a steam flow path recess may be formed at a position close to the other. This allows the thickness of the support parts to be thinner than the thickness of the sheet main body 131, and prevents the first steam path 151 and the second steam path 152 from being divided in the X direction and the Y direction.

[0305] As shown in FIG. 45, FIG. 48 and FIG. 49, a first liquid flow path section 160 through which mainly the working fluid 2b passes may be provided on the first main body surface 131a of the sheet main body 131. More specifically, the first liquid flow path section 160 may be provided on the first main body surface 131a in each land portion 133 of the sheet main body 131. The working steam 2a may also pass through the first liquid flow path section 160. This first liquid flow path section 160 constitutes a part of the above-mentioned sealed space 3 and communicates with the steam flow path section 150. The first liquid flow path section 160 is configured as a capillary structure (wick) for transporting the working fluid 2b to the evaporation region SR. The first liquid flow path section 160 may be formed over the entire first main body surface 131a in each land portion 133 of the sheet main body 131. In the illustrated example, the first liquid flow path portion 160 is not provided on the second main body surface 131b in each land portion 133 of the sheet main body 131, but the first liquid flow path portion 160 may be provided on the second main body surface 131b in the land portion 133 of the sheet main body 131.

[0306] 50, the first liquid flow path section 160 may be composed of a plurality of grooves provided in the first main body surface 131a. More specifically, the first liquid flow path section 160 may include a plurality of main flow grooves 161 through which the working fluid 2b passes, and a plurality of communication grooves 165 communicating with the main flow grooves 161.

[0307] Each mainstream groove 161 is formed to extend in the X direction as shown in Fig. 50. The mainstream groove 161 has a flow passage cross-sectional area smaller than the first steam passage 151 or the second steam passage 152 of the steam flow passage section 150 so that the working fluid 2b flows mainly by capillary action. As a result, the mainstream groove 161 is configured to transport the working fluid 2b condensed from the working steam 2a to the evaporation region SR. The respective mainstream grooves 161 may be arranged to be spaced apart in the Y direction.

[0308] The main groove 161 is formed by etching the first main body surface 131a of the sheet main body 131 in an etching step described below. As a result, the main groove 161 includes a wall surface 162 formed in a curved shape, as shown in Fig. 49. This wall surface 162 defines the main groove 161, and is curved concavely toward the second main body surface 131b.

[0309] The width w23 of the main groove 161 shown in Figures 49 and 50 may be, for example, 5 µm to 150 µm. The width w23 of the main groove 161 means the dimension at the first main body surface 131a and corresponds to the dimension in the Y direction. The depth h21 of the main groove 161 shown in Figure 49 may be, for example, 3 µm to 150 µm. The depth h21 corresponds to the dimension in the Z direction.

[0310] As shown in FIG. 50, each communication groove 165 extends in a direction different from the X direction. In the illustrated example, each communication groove 165 is formed to extend in the Y direction and perpendicular to the mainstream groove 161. Some communication grooves 165 are arranged to communicate two adjacent mainstream grooves 161. Other communication grooves 165 are arranged to communicate the steam passages 151, 152 and the mainstream groove 161. The communication groove 165 extends from the edge of the land portion 133 in the Y direction to the mainstream groove 161 adjacent to the edge. In this way, the steam passages 151, 152 and the mainstream groove 161 communicate with each other.

[0311] The communication groove 165 has a flow passage cross-sectional area smaller than the vapor passages 151, 152 so that the working fluid 2b flows mainly by capillary action. The communication grooves 165 may be disposed to be spaced apart from each other in the X direction.

[0312] Like the mainstream groove 161, the communication groove 165 is also formed by etching, and includes a wall surface (not shown) formed in a curved shape like the mainstream groove 161. The width w24 of the communication groove 165 shown in FIG. 50 may be equal to the width w23 of the mainstream groove 161, or may be greater than or smaller than the width w23. The width w24 corresponds to the dimension in the X direction. The depth of the communication groove 165 may be equal to the depth h21 of the mainstream groove 161, or may be greater than or smaller than the depth h21.

[0313] As shown in FIG. 50, the first liquid flow path section 160 may include a convex portion row 163 provided on the first main body surface 131a of the sheet main body 131. The convex portion row 163 is provided between two adjacent main stream grooves 161. Each convex portion row 163 includes a plurality of convex portions 164 arranged in the X direction. The convex portions 164 are provided in the first liquid flow path section 160 and abut against the first upper sheet surface 120a of the upper sheet 120. Each convex portion 164 is formed in a rectangular shape such that the X direction is the longitudinal direction in a plan view. A main stream groove 161 is interposed between two convex portions 164 adjacent to each other in the Y direction, and a communication groove 165 is interposed between two convex portions 164 adjacent to each other in the X direction. The communication groove 165 is formed to extend in the Y direction and communicates the two main stream grooves 161 adjacent to each other in the Y direction. This allows the hydraulic fluid 2 b to move between these main grooves 161 .

[0314] The protrusions 164 are not etched in the etching step described below, and the material of the main body sheet 130 remains. As shown in Fig. 50, the planar shape of the protrusions 164 may be rectangular. The planar shape of the protrusions 164 may be the shape at the position of the first main body surface 131a.

[0315] As shown in FIG. 50, the convex portions 164 may be arranged in a staggered manner. More specifically, the convex portions 164 of two convex portion rows 163 adjacent to each other in the Y direction may be arranged to be shifted from each other in the X direction. This shift amount may be half the arrangement pitch of the convex portions 164 in the X direction. The width w25 of the convex portions 164 may be, for example, 5 μm to 500 μm. The width w25 corresponds to the dimension in the Y direction. The width w25 of the convex portions 164 means the dimension on the first main body surface 131a. The arrangement of the convex portions 164 is not limited to a staggered arrangement, and may be arranged in parallel. In this case, the convex portions 164 of two convex portion rows 163 adjacent to each other in the Y direction are also aligned in the X direction.

[0316] The main groove 161 includes an intersection 166 that communicates with the communication groove 165. At the intersection 166, the main groove 161 and the communication groove 165 communicate with each other in a T-shape. This makes it possible to prevent the intersections 166 located on both sides of the communication groove 165 from communicating with the main groove 161 at the intersection 166. This makes it possible to prevent the wall surface 162 of the main groove 161 from being cut out on both sides in the Y direction at the intersection 166, and to leave the part of the wall surface 162 opposite to the main groove 161. Therefore, even at the intersection 166, the working fluid in the main groove 161 can be given a capillary action, and the driving force of the working fluid 2b toward the evaporation region SR can be suppressed from decreasing at the intersection 166. Both sides in the Y direction correspond to the upper and lower sides in FIG. 8.

[0317] As shown in Fig. 48, alignment holes 134 may be provided at the four corners of a sheet body 131 of a main body sheet 130. In the example shown in Fig. 48, the planar shape of the alignment holes 134 is circular, but this is not limited to this. The alignment holes 134 may penetrate the sheet body 131.

[0318] As shown in Fig. 44, the vapor chamber 1 may include an injection part 4 for injecting the working liquid 2b into the sealed space 3. In the example shown in Fig. 44, the injection part 4 may be provided at the edge on the negative side in the X direction, or may be disposed in a position close to the evaporation region SR. The negative side in the X direction corresponds to the left side in Fig. 2. The injection part 4 may include an injection flow path 137 formed in the main body sheet 130. After the working liquid 2b is injected, the injection flow path 137 may be sealed.

[0319] Incidentally, the materials constituting the lower sheet 110, the upper sheet 120 and the main body sheet 130 are not particularly limited as long as they have good thermal conductivity, but the lower sheet 110, the upper sheet 120 and the main body sheet 130 may contain, for example, copper or a copper alloy. In this case, the thermal conductivity of each sheet 110, 120, 130 can be increased, and the heat dissipation efficiency of the vapor chamber 1 can be improved. When pure water is used as the working fluids 2a and 2b, corrosion can be prevented. Note that, as long as the desired heat dissipation efficiency can be obtained and corrosion can be prevented, other metal materials such as aluminum and titanium, or other metal alloy materials such as stainless steel can also be used for these sheets 110, 120 and 130. The materials constituting the lower sheet 110, the upper sheet 120 and the main body sheet 130 may be the same as the materials constituting the first sheet 10, the second sheet 20 and the wick sheet 30 described above.

[0320] 45 may be, for example, 100 μm to 1000 μm. By making the thickness t21 of the vapor chamber 1 100 μm or more, the vapor channel section 150 can be appropriately secured, and the vapor chamber 1 can be appropriately functioned. On the other hand, by making the thickness t21 1000 μm or less, the thickness t21 of the vapor chamber 1 can be prevented from becoming too thick.

[0321] The thickness t22 of the lower sheet 110 shown in FIG. 45 may be, for example, 6 μm to 100 μm. By setting the thickness t22 of the lower sheet 110 to 6 μm or more, the mechanical strength of the lower sheet 110 can be ensured. On the other hand, by setting the thickness t22 of the lower sheet 110 to 100 μm or less, the thickness t21 of the vapor chamber 1 can be prevented from becoming thick. Similarly, the thickness t23 of the upper sheet 120 shown in FIG. 45 may be set to be the same as the thickness t22 of the lower sheet 110. The thickness t23 of the upper sheet 120 and the thickness t22 of the lower sheet 110 may be different from each other.

[0322] 45 may be, for example, 50 μm to 400 μm. By making the thickness t24 of the main body sheet 130 50 μm or more, the vapor channel portion 150 can be properly secured, and the vapor chamber 1 can properly function. On the other hand, by making the thickness t24 400 μm or less, the thickness t21 of the vapor chamber 1 can be prevented from becoming too thick.

[0323] Next, a method for manufacturing the vapor chamber 1 having such a configuration will be described with reference to FIGS.

[0324] Here, we first explain the sheet preparation process for preparing the sheets 110, 120, and 130. This sheet preparation process includes a lower sheet preparation process for preparing the lower sheet 110, an upper sheet preparation process for preparing the upper sheet 120, and a main sheet preparation process for preparing the main sheet 130.

[0325] In the lower sheet preparation step, first, a lower sheet base material having a desired thickness is prepared. The lower sheet base material may be a rolled material. Then, the lower sheet base material is etched to form the lower sheet 110 having a desired planar shape. Alternatively, the lower sheet base material may be pressed to form the lower sheet 110 having a desired planar shape. In this manner, the lower sheet 110 having an outer contour shape as shown in FIG. 46 can be prepared.

[0326] In the upper sheet preparation step, as in the lower sheet preparation step, first, an upper sheet base material having a desired thickness is prepared. The upper sheet base material may be a rolled material. Then, the upper sheet base material is etched to form the upper sheet 120 having a desired planar shape. Alternatively, the upper sheet base material may be pressed to form the upper sheet 120 having a desired planar shape. In this manner, the upper sheet 120 having an outer contour shape as shown in FIG. 47 can be prepared.

[0327] The main body sheet preparation process includes a material sheet preparation process, a resist pattern formation process, an etching process, and a resist pattern removal process. The material sheet preparation process is a process of preparing a metal material sheet M. The resist pattern formation process is a process of forming a resist pattern on the metal material sheet M. The etching process is a process of etching the metal material sheet M. The resist pattern removal process is a process of removing the resist pattern.

[0328] First, in a material sheet preparation step, a flat metal material sheet M including a first material surface Ma and a second material surface Mb is prepared as shown in Fig. 51. The metal material sheet M may be a rolled material having a desired thickness.

[0329] Next, in the resist pattern forming process, first, a resist film is formed on the first material surface Ma and the second material surface Mb of the metal material sheet M. The resist film contains a photosensitive resist material. By exposing and developing this resist film, the above-mentioned patterns of the vapor flow path portion 150 and the first liquid flow path portion 160 are formed in the resist film. Then, this resist film is exposed and developed. As a result, as shown in FIG. 52, a first resist pattern Ra can be formed on the first material surface Ma of the metal material sheet M, and a second resist pattern Rb can be formed on the second material surface Mb of the metal material sheet M.

[0330] Subsequently, in the etching step, the metal material sheet M is etched to form the vapor flow path portion 150 and the first liquid flow path portion 160, as shown in Fig. 53. More specifically, the first material surface Ma and the second material surface Mb of the metal material sheet M are etched through the openings of the resist patterns Ra, Rb. As a result, the first material surface Ma and the second material surface Mb of the metal material sheet M are etched in a pattern, and the vapor flow path portion 150 and the first liquid flow path portion 160 are formed, as shown in Fig. 53.

[0331] In the etching step, the etching solution may be supplied to the portion where the vapor flow path section 150 is to be formed at a higher pressure than to other portions such as the portion where the first liquid flow path section 160 is to be formed. This makes it possible to form the upper vapor flow path recess 153 and the lower vapor flow path recess 154 whose widths increase from the openings 153a, 154a toward the inner portion 157. For example, the etching solution may be an iron chloride-based etching solution such as a ferric chloride aqueous solution, or a copper chloride-based etching solution such as a copper chloride aqueous solution. For example, the etching process for forming the vapor flow path section 150 may be performed as a separate process from the etching process for forming the first liquid flow path section 160.

[0332] In the etching step, the first material surface Ma and the second material surface Mb of the metal material sheet M may be etched simultaneously. However, the present disclosure is not limited to this, and the etching of the first material surface Ma and the second material surface Mb may be performed as separate steps.

[0333] In the etching step, the first material surface Ma and the second material surface Mb of the metal material sheet M can be etched to obtain a predetermined outer contour shape as shown in Fig. 48. A main body sheet 130 having an outer periphery as shown in Fig. 48 can be obtained.

[0334] Thereafter, in a resist pattern removing step, the resist patterns Ra and Rb are removed from the main body sheet 130 as shown in FIG. 54 by using, for example, an alkaline remover.

[0335] In this manner, a main body sheet 130 as shown in FIG. 48 can be prepared.

[0336] After the preparation step, a joining step is performed in which the lower sheet 110, the upper sheet 120 and the main body sheet 130 are joined together as shown in FIG.

[0337] More specifically, first, the lower sheet 110, the main body sheet 130, and the upper sheet 120 are laminated in this order. In this case, the second main body surface 131b of the main body sheet 130 is laid over the second lower sheet surface 110b of the lower sheet 110, and the first upper sheet surface 120a of the upper sheet 120 is laid over the first main body surface 131a of the main body sheet 130. The sheets 110, 120, and 130 may be aligned using the alignment hole 112 of the lower sheet 110, the alignment hole 134 of the main body sheet 130, and the alignment hole 122 of the upper sheet 120.

[0338] Next, the lower sheet 110, the main body sheet 130, and the upper sheet 120 are temporarily joined together. For example, these sheets 110, 120, and 130 may be temporarily joined together by spot resistance welding, or by laser welding.

[0339] Next, the lower sheet 110, the main body sheet 130, and the upper sheet 120 are permanently bonded together by thermocompression bonding. For example, these sheets 110, 120, and 130 may be permanently bonded together by diffusion bonding. As a result, a sealed space 3 having a vapor flow path portion 150 and a first liquid flow path portion 160 is formed between the lower sheet 110 and the upper sheet 120. At this stage, the sealed space 3 is in communication with the outside via the injection flow path 137, as the injection flow path 137 described above is not sealed.

[0340] After the joining step, the hydraulic fluid 2b is injected into the sealed space 3 from the injection flow path 137 of the injection section 4 as an injection step.

[0341] After the injection step, the injection flow path 137 is sealed as a sealing step. This blocks communication between the sealed space 3 and the outside, and seals the sealed space 3. This makes it possible to obtain the sealed space 3 filled with the working fluid 2b, and prevents the working fluid 2b in the sealed space 3 from leaking to the outside.

[0342] In this manner, the vapor chamber 1 according to the present embodiment can be obtained.

[0343] Next, a method for operating the vapor chamber 1, that is, a method for cooling the electronic device D, will be described.

[0344] The vapor chamber 1 obtained as described above is installed in a housing H of a mobile terminal or the like, and an electronic device D, such as a CPU, which is a device to be cooled, is attached to the second upper sheet surface 120b of the upper sheet 120. Alternatively, the vapor chamber 1 is attached to the electronic device D. The working liquid 2b in the sealed space 3 adheres to the wall surface of the sealed space 3 due to its surface tension. More specifically, it adheres to the wall surface 155 of the upper vapor flow path recess 153, the wall surface 156 of the lower vapor flow path recess 154, the wall surface 162 of the main flow path groove 161 of the first liquid flow path section 160, and the wall surface of the communication groove 165. The working liquid 2b may also adhere to a portion of the second lower sheet surface 110b of the lower sheet 110 exposed to the lower vapor flow path recess 154. The working fluid 2 b may also adhere to the portions of the first upper sheet surface 120 a of the upper sheet 120 that are exposed to the upper steam flow passage recess 153 , the main flow groove 161 , and the connecting groove 165 .

[0345] In this state, when the electronic device D generates heat, the working fluid 2b present in the evaporation region SR (see FIG. 48) receives heat from the electronic device D. The received heat is absorbed as latent heat, and the working fluid 2b evaporates, generating working vapor 2a. Most of the generated working vapor 2a diffuses in the upper vapor passage recess 153 and the lower vapor passage recess 154 constituting the sealed space 3, as shown by the solid arrows in FIG. 48. The working vapor 2a in each of the vapor passage recesses 153 and 154 leaves the evaporation region SR, and most of the working vapor 2a is transported to the condensation region CR, which corresponds to the right side portion in FIG. 48 and has a relatively low temperature. In the condensation region CR, the working vapor 2a is cooled by mainly dissipating heat to the lower sheet 110. The heat received by the lower sheet 110 from the working vapor 2a is transferred to the outside air via the housing member Ha (see FIG. 45).

[0346] The working steam 2a radiates heat to the lower sheet 110 in the condensation region CR, and condenses in the evaporation region SR, losing the absorbed latent heat, to generate the working fluid 2b. The generated working fluid 2b adheres to the wall surfaces 155, 156 of the vapor flow path recesses 153, 154, the second lower sheet surface 110b of the lower sheet 110, and the first upper sheet surface 120a of the upper sheet 120. Since the working fluid 2b continues to evaporate in the evaporation region SR, the working fluid 2b in the condensation region CR of the first liquid flow path section 160 is transported toward the evaporation region SR by the capillary action of each mainstream groove 161, as shown by the dashed arrow in FIG. 48. As a result, the working fluid 2b adhered to the wall surfaces 155, 156, the second lower sheet surface 110b, and the first upper sheet surface 120a moves to the first liquid flow path section 160, passes through the communication groove 165, and enters the mainstream groove 161. In this manner, the working fluid 2b is filled into each of the main grooves 161 and each of the communication grooves 165. Therefore, the filled working fluid 2b obtains a propulsive force toward the evaporation region SR due to the capillary action of each of the main grooves 161, and is smoothly transported toward the evaporation region SR.

[0347] In the first liquid flow path section 160, each mainstream groove 161 communicates with the adjacent other mainstream grooves 161 via the corresponding communication grooves 165. This allows the working fluid 2b to flow between the adjacent mainstream grooves 161, suppressing the occurrence of dryout in the mainstream grooves 161. As a result, a capillary action is imparted to the working fluid 2b in each mainstream groove 161, and the working fluid 2b is smoothly transported toward the evaporation region SR.

[0348] The working fluid 2b that has reached the evaporation region SR is evaporated by receiving heat again from the electronic device D. The working vapor 2a that has evaporated from the working fluid 2b passes through the communication groove 165 in the evaporation region SR, moves to the upper vapor flow path recess 153 and the lower vapor flow path recess 154, which have a large flow path cross-sectional area, and diffuses in each of the vapor flow path recesses 153, 154. In this way, the working fluids 2a, 2b circulate within the sealed space 3 while repeatedly changing phases, i.e., evaporating and condensing, to transport and release the heat of the electronic device D. As a result, the electronic device D is cooled.

[0349] Here, since the vapor chamber 1 is thinned, it may be deformed by an external force. If the vapor chamber 1 is deformed, it is considered that a part of the upper vapor passage recess 153 and the lower vapor passage recess 154 in the vapor chamber 1 will be crushed, and the flow passage cross-sectional area of ​​the upper vapor passage recess 153 and the lower vapor passage recess 154 will be reduced. In this case, the transport capacity of the working vapor 2a of the vapor chamber 1 may decrease, and the performance of the vapor chamber 1 may be deteriorated.

[0350] In contrast, according to the present embodiment, the upper steam flow passage recess 153 is formed so that the width increases from the first opening 153a toward the inner portion 157 in a cross-sectional view. In this case, the upper sheet support portion 135 that supports the upper sheet 120 is formed in the sheet body 131 of the main body sheet 130. This allows the upper sheet 120 to resist bending stress generated in the upper sheet 120 due to a force received from the outside, and the upper sheet 120 can be prevented from being deformed so as to enter the upper steam flow passage recess 153. Therefore, it is possible to prevent a part of the upper steam flow passage recess 153 from being crushed, and the flow passage cross-sectional area of ​​the upper steam flow passage recess 153 from being reduced. As a result, it is possible to prevent a decrease in the transport capacity of the working steam 2a of the vapor chamber 1, and a decrease in the performance of the vapor chamber 1 can be prevented.

[0351] Furthermore, according to this embodiment, the first boundary edge 155a of the upper vapor flow passage recess 153 is curved toward the outside of the upper vapor flow passage recess 153. This makes it possible to increase the flow passage cross-sectional area of ​​the upper vapor flow passage recess 153. This makes it possible to suppress a decrease in the transport capacity of the working vapor 2a of the vapor chamber 1, and further suppress a decrease in the performance of the vapor chamber 1.

[0352] Further, according to the present embodiment, the lower steam flow passage recess 154 is formed so that the width increases from the second opening 154a toward the inner portion 157 in a cross-sectional view. In this case, the lower sheet support portion 136 that supports the lower sheet 110 is formed in the sheet body 131 of the main body sheet 130. This allows the lower sheet 110 to resist bending stress generated in the lower sheet 110 by a force received from the outside, and the lower sheet 110 can be prevented from being deformed so as to enter the lower steam flow passage recess 154. This prevents a part of the lower steam flow passage recess 154 from being crushed, and the flow passage cross-sectional area of ​​the lower steam flow passage recess 154 from being reduced. As a result, the decrease in the transport capacity of the working steam 2a of the vapor chamber 1 can be further suppressed, and the decrease in performance of the vapor chamber 1 can be further suppressed.

[0353] Furthermore, according to this embodiment, the second boundary edge 156a of the lower steam flow passage recess 154 is curved toward the outside of the lower steam flow passage recess 154. This allows the flow passage cross-sectional area of ​​the lower steam flow passage recess 154 to be increased. This makes it possible to further suppress the decrease in the transport capacity of the working steam 2a of the vapor chamber 1, and further suppress the decrease in performance of the vapor chamber 1.

[0354] Further, according to this embodiment, the first boundary edge 155a of the upper steam flow passage recess 153 is curved toward the outside of the upper steam flow passage recess 153, and the second boundary edge 156a of the lower steam flow passage recess 154 is curved toward the outside of the lower steam flow passage recess 154. This makes it possible to avoid providing protrusions protruding toward the inside of the steam flow passage section 150 on the first boundary edge 155a and the second boundary edge 156a. Therefore, it is possible to avoid the flow of the working steam 2a being hindered by such protrusions in the steam flow passage section 150, and the working steam 2a can be transported smoothly. As a result, the decrease in the transport capacity of the working steam 2a of the vapor chamber 1 can be further suppressed, and the decrease in performance of the vapor chamber 1 can be further suppressed.

[0355] (First Modification) In the above-described embodiment, as shown in FIG. 49, an example has been described in which the width w26 of the first opening 153a of the upper vapor flow path recess 153 is equal to the width w27 of the second opening 154a of the lower vapor flow path recess 154. However, the present disclosure is not limited to this. For example, as shown in FIG. 56A, the width w27 of the second opening 154a may be larger than the width w26 of the first opening 153a. In this case, the flow path cross-sectional area of ​​the lower vapor flow path recess 154 can be increased. Therefore, the transport capacity of the working vapor 2a of the vapor chamber 1 can be improved. In addition, the width w26 of the first opening 153a can be made smaller than the width w27 of the second opening 154a, and more first liquid flow path portions 160 can be provided on the first main body surface 131a of the sheet main body 131. The transport capacity of the working liquid 2b of the vapor chamber 1 can be improved. In this way, according to this modified example, the heat transport efficiency of the vapor chamber 1 can be increased.

[0356] Alternatively, as shown in FIG. 56B, the width w27 of the second opening 154a may be smaller than the width w26 of the first opening 153a. In this case, the flow path cross-sectional area of ​​the lower steam flow path recess 154 can be reduced. This improves the mechanical strength of the sheet main body 131. In addition, the lower sheet support portion 136 can be extended to the inside of the lower steam flow path recess 154. This allows the lower sheet 110 to resist bending stress generated in the lower sheet 110 due to an external force, and prevents the lower sheet 110 from deforming so as to enter the lower steam flow path recess 154.

[0357] (Second Modification) In the above-described embodiment, as shown in FIG. 49, an example has been described in which the first opening 153a of the upper steam passage recess 153 overlaps with the second opening 154a of the lower steam passage recess 154 in a plan view. In this case, the first opening 153a and the second opening 154a are not shifted in the Y direction. However, the present disclosure is not limited to this. For example, as shown in FIG. 56C, the first opening 153a and the second opening 154a may be shifted from each other in the Y direction. As shown in FIG. 56C, the first opening 153a is shifted to one side with respect to the second opening 154a. In the example shown in FIG. 56C, the first opening 153a of the first steam passage 151 is shifted to the right from the second opening 154a of the first steam passage 151. The first opening 153a of the second steam passage 152 adjacent to the first steam passage 151 is shifted to the right from the second opening 154a of the second steam passage 152. The amount of deviation between first opening 153a and second opening 154a is indicated by dimension 6. In the example shown in Fig. 56C, width w26 of first opening 153a may be equal to width w27 of second opening 154a.

[0358] According to this modification, the first opening 153a and the second opening 154a can be arranged with a shift, thereby improving the mechanical strength of the sheet body 131. More specifically, the overlapping portion of the first opening 153a and the second opening 154a in a plan view can be made smaller, and the range in the Y direction where the material constituting the sheet body 131 is not present can be reduced. Therefore, it is possible to suppress a decrease in mechanical strength caused by forming the upper steam flow path recess 153 and the lower steam flow path recess 154, and the mechanical strength of the sheet body 131 can be improved.

[0359] The misalignment direction of the first opening 153a relative to the second opening 154a may be the same for each steam passage 151, 152, or may be different. For example, as shown in FIG. 56D, the misalignment direction in the first steam passage 151 is the right side of FIG. 56D. The misalignment direction in the second steam passage 152 adjacent to the first steam passage 151 is the left side of FIG. 56D. As shown in FIG. 56D, the second steam passage 152 misaligned to the right and the second steam passage 152 misaligned to the left may be mixed. In this case, it is possible to suppress the appearance of directivity in the mechanical strength, and the mechanical strength of the sheet body 131 can be improved. Alternatively, as shown in FIG. 56E, there may be steam passages 151, 152 in which the first opening 153a and the second opening 154a are not misaligned in the Y direction. In this case, it is possible to suppress the appearance of directivity in the mechanical strength, and the mechanical strength of the sheet body 131 can be improved.

[0360] (Third Modification) In the above-described embodiment, an example has been described in which both the upper steam flow path recess 153 and the lower steam flow path recess 154 are formed so that their widths increase from the openings 153a, 154a toward the inner portion 157 in a cross-sectional view, as shown in FIG. 49. However, the present disclosure is not limited to this. For example, one of the upper steam flow path recess 153 and the lower steam flow path recess 154 may be formed so that its width increases from the openings 153a, 154a toward the inner portion 157 in a cross-sectional view. The other of the upper steam flow path recess 153 and the lower steam flow path recess 154 may be formed so that its width decreases from the openings 153a, 154a toward the inner portion 157.

[0361] 57 and 58, the upper steam flow path recess 153 is formed so that its width increases from the first opening 153a toward the inner portion 157 in a cross-sectional view. On the other hand, the lower steam flow path recess 154 is formed so that its width decreases from the second opening 154a toward the inner portion 157. For this reason, the width of the steam flow path portion 150 is greatest at the second opening 154a. The width w27 of the second opening 154a is greater than the width w26 of the first opening 153a.

[0362] In the example shown in FIGS. 57 and 58, a first boundary edge 155a of the upper steam flow path recess 153 is formed in a curved shape. The first boundary edge 155a is curved toward the outside of the upper steam flow path recess 153. A second boundary edge 156a of the lower steam flow path recess 154 is also formed in a curved shape. The second boundary edge 156a is curved toward the outside of the upper steam flow path recess 153. The first boundary edge 155a and the second boundary edge 156a are connected at an inner portion 157.

[0363] In this modified example, the upper steam flow passage recess 153 is also formed so that its width increases from the first opening 153a toward the inner portion 157 in a cross-sectional view. As a result, an upper sheet support portion 135 that supports the upper sheet 120 is formed in the sheet body 131 of the main body sheet 130. This prevents a portion of the upper steam flow passage recess 153 from collapsing and the flow passage cross-sectional area of ​​the upper steam flow passage recess 153 from becoming smaller. As a result, a decrease in the transport capacity of the working steam 2a of the vapor chamber 1 is suppressed, and a decrease in the performance of the vapor chamber 1 is suppressed.

[0364] Moreover, according to this modification, the flow path cross-sectional area of ​​the lower vapor flow path recess 154 can be increased. This improves the transport capacity of the working vapor 2a of the vapor chamber 1. On the other hand, the flow path cross-sectional area of ​​the upper vapor flow path recess 153 can be reduced, so that more first liquid flow path sections 160 can be provided on the first main body surface 131a of the sheet main body 131. This improves the transport capacity of the working liquid 2b of the vapor chamber 1. In this way, according to this modification, the heat transport efficiency of the vapor chamber 1 can be increased.

[0365] (Fourth Modification) In the above-described embodiment, the vapor chamber 1 may be curved. The vapor chamber 1 may include a curved portion BP where the lower sheet 110, the upper sheet 120, and the main body sheet 130 are curved.

[0366] For example, the bent portion BP may be formed by bending the vapor chamber 1 along a bent line BL shown in FIG. 59. The bent line BL may extend in a direction intersecting the X direction in a plan view, or may extend in a Y direction perpendicular to the X direction. In the example shown in FIG. 59, the bent line BL is provided so as to extend in the Y direction at the center of the vapor chamber 1 in the X direction. By bending the vapor chamber 1 along the bent line BL, it is possible to obtain a vapor chamber 1 having a bent portion BP in which the lower sheet 110, the upper sheet 120, and the main body sheet 130 are bent, as shown in FIG. 60. The bent line BL may extend in a direction inclined toward the X direction in a plan view, as shown in FIG. 18 and FIG. 19.

[0367] In the example shown in FIG. 60, the vapor chamber 1 is bent so that the upper sheet 120 is located on the inside of the bend and the lower sheet 110 is located on the outside of the bend. Here, the bent portion BP is an area having a certain width in the X direction, including the bend line BL. The bending angle at the bent portion BP is arbitrary. In the example shown in FIG. 60, the bending angle is 90 degrees, which is a right angle. Therefore, the vapor chamber 1 is bent in a substantially L-shape. However, the present disclosure is not limited to this. For example, the vapor chamber 1 may be bent so that the cross-sectional shape of the vapor chamber 1 is U-shaped. For example, the vapor chamber 1 may be bent multiple times so that the cross-sectional shape of the vapor chamber 1 is an angular U-shaped shape or the like. By bending the vapor chamber 1 in this way, the degree of freedom of arrangement of the vapor chamber 1 within the housing H can be improved.

[0368] The vapor chamber 1 having such a bent portion BP may be produced by performing a bending process after a sealing process in the manufacturing process of the vapor chamber 1. For example, in the bending process, the lower sheet 110, the upper sheet 120, and the main body sheet 130 may be bent along the bending line BL.

[0369] In such a vapor chamber 1, the above-mentioned upper steam flow passage recess 153 and the above-mentioned lower steam flow passage recess 154 are provided at least at the bent portion BP. The upper steam flow passage recess 153 and the lower steam flow passage recess 154 may be provided so as to intersect the bent portion BP. In the illustrated example, the bent portion BP extends in the Y direction, and the upper steam flow passage recess 153 and the lower steam flow passage recess 154 extend in the X direction with the bent portion BP in between. As with the vapor chamber 1 shown in FIG. 4, in the regions on both sides of the bent portion BP in the X direction of the bent vapor chamber 1 shown in FIG. 60, the state as seen in the directions indicated by the arrows V1 and V2 corresponds to the plan view. In addition, in the cross-sectional view at the bent portion BP, the upper steam flow passage recess 153 may be formed so as to increase in width from the first opening 153a toward the inner portion 157, as shown in FIG. 45 and FIG. 49. The lower steam flow passage recess 154 may be formed so that its width increases from the second opening 154a toward the inner portion 157.

[0370] When the vapor chamber 1 is bent, the upper sheet 120 located on the inside of the bend may receive compressive stress at the bend part BP and deform so as to enter the upper vapor flow path recess 153. The lower sheet 110 located on the outside of the bend may receive tensile stress at the bend part BP and deform so as to enter the lower vapor flow path recess 154. In this case, it is considered that a part of the upper vapor flow path recess 153 and the lower vapor flow path recess 154 will be crushed, and the flow path cross-sectional area of ​​the upper vapor flow path recess 153 and the lower vapor flow path recess 154 will be reduced.

[0371] In contrast, according to this modification, the upper steam flow passage recess 153 is formed so that the width increases from the first opening 153a toward the inner portion 157 in a cross-sectional view at the bent portion BP. In this case, the upper sheet support portion 135 that supports the upper sheet 120 is formed in the sheet body 131 of the main body sheet 130. This makes it possible to resist the stress generated in the upper sheet 120 when the upper sheet 120 is bent, and to suppress the upper sheet 120 from deforming so as to enter the upper steam flow passage recess 153. Therefore, it is possible to suppress the crushing of a part of the upper steam flow passage recess 153, and to suppress the reduction in the flow passage cross-sectional area of ​​the upper steam flow passage recess 153. As a result, the decrease in the transport capacity of the working steam 2a of the vapor chamber 1 is suppressed, and the decrease in performance of the vapor chamber 1 is suppressed.

[0372] Further, according to this modification, in a cross-sectional view at the bent portion BP, the lower steam flow passage recess 154 is formed so that the width increases from the second opening 154a toward the inner portion 157. In this case, the lower sheet support portion 136 that supports the lower sheet 110 is formed in the sheet body 131 of the main body sheet 130. This makes it possible to resist the stress generated in the lower sheet 110 when the lower sheet 110 is bent, and to suppress the lower sheet 110 from deforming so as to enter the lower steam flow passage recess 154. Therefore, it is possible to suppress the crushing of a part of the lower steam flow passage recess 154, and to suppress the reduction in the flow passage cross-sectional area of ​​the lower steam flow passage recess 154. As a result, the decrease in the transport capacity of the working steam 2a of the vapor chamber 1 can be further suppressed, and the decrease in the performance of the vapor chamber 1 can be further suppressed.

[0373] At a position other than the bend BP, the upper steam flow path recess 153 and the lower steam flow path recess 154 may have any shape. For example, also in a cross-sectional view at a position other than the bend BP, the upper steam flow path recess 153 may be formed so that its width increases from the first opening 153a toward the inner portion 157, as shown in Figures 45 and 49. The lower steam flow path recess 154 may be formed so that its width increases from the second opening 154a toward the inner portion 157.

[0374] Alternatively, for example, in a cross-sectional view at a position different from the bend portion BP, as shown in Figures 57 and 58, the upper steam flow path recess 153 may be formed so that its width increases from the first opening 153a toward the inner portion 157. The lower steam flow path recess 154 may be formed so that its width decreases from the second opening 154a toward the inner portion 157.

[0375] Even in this case, it is possible to prevent the parts of the upper vapor passage recess 153 and the lower vapor passage recess 154 located at the bent portion BP from collapsing. This prevents the flow passage cross-sectional areas of the upper vapor passage recess 153 and the lower vapor passage recess 154 from becoming smaller. Meanwhile, at positions other than the bent portion BP, it is possible to improve the transport capacity of the working vapor 2a and the working liquid 2b of the vapor chamber 1. In this way, it is possible to increase the heat transport efficiency of the vapor chamber 1 while preventing a decrease in performance of the vapor chamber 1 due to bending of the vapor chamber 1.

[0376] Alternatively, for example, in a cross-sectional view at a position different from the bend portion BP, as shown in Figures 61 and 62, the upper steam flow path recess 153 may be formed so that its width decreases from the first opening 153a toward the inner portion 157. The lower steam flow path recess 154 may be formed so that its width decreases from the second opening 154a toward the inner portion 157.

[0377] In the example shown in FIG. 61 and FIG. 62, the first boundary edge 155a of the upper steam flow path recess 153 is formed in a curved shape. The first boundary edge 155a is curved toward the outside of the upper steam flow path recess 153. The second boundary edge 156a of the lower steam flow path recess 154 is also formed in a curved shape. The second boundary edge 156a is curved toward the outside of the upper steam flow path recess 153. The first boundary edge 155a and the second boundary edge 156a are connected at an inner portion 157. The inner portion 157 is formed so as to protrude toward the inside of the steam flow path portion 150 by connecting the first boundary edge 155a and the second boundary edge 156a. In the example shown in FIG. 61 and FIG. 62, the width of the steam passages 151, 152 is smallest at the inner portion 157.

[0378] Even in this case, it is possible to prevent the upper steam flow passage recess 153 and the lower steam flow passage recess 154 located at the bent portion BP from being crushed. Therefore, it is possible to prevent the flow passage cross-sectional area of ​​the upper steam flow passage recess 153 and the lower steam flow passage recess 154 from being reduced. On the other hand, at a position other than the bent portion BP, it is possible to enhance the capillary action of the flow passage corner portion similar to the flow passage corner portion 56 shown in FIG. 11 of the upper steam flow passage recess 153. More specifically, it is possible to make the angle between the first boundary edge 155a and the first upper sheet surface 120a smaller than 90 degrees, and to make the flow passage corner an acute angle. The angle between the first boundary edge 155a and the first upper sheet surface 120a may be the angle between a tangent to the first boundary edge 155a passing through an intersection point between the first boundary edge 155a and the first upper sheet surface 120a and a tangent to the first upper sheet surface 120a passing through the intersection point. Similarly, the capillary action of the flow passage corner portion of the lower vapor flow passage recess 154 similar to the flow passage corner portion 55 shown in FIG. 11 can be enhanced. More specifically, the angle between the second boundary edge 156a and the second lower sheet surface 110b can be made smaller than 90 degrees and can be made an acute angle. This can enhance the capillary action of the working fluid 2b adhering to the wall surfaces 155, 156 of each vapor flow passage recess 153, 154, and the working fluid 2b adhering to the wall surfaces 155, 156 can be smoothly moved to the main groove 161 of the first liquid flow passage portion 160. Therefore, the transport capacity of the working fluid 2b of the vapor chamber 1 can be improved. In this way, the heat transport efficiency of the vapor chamber 1 can be enhanced while suppressing the performance degradation of the vapor chamber 1 caused by the bending of the vapor chamber 1.

[0379] Alternatively, in a cross-sectional view at the bend BP, as shown in Fig. 57 and Fig. 58, the upper steam flow path recess 153 may be formed so that its width increases from the first opening 153a toward the inner side portion 157. The lower steam flow path recess 154 may be formed so that its width decreases from the second opening 154a toward the inner side portion 157. As described above, the upper sheet 120 may be located on the inner side of the bend. However, the lower sheet 110 may be located on the inner side of the bend.

[0380] Even in this case, the upper sheet support portion 135 that supports the upper sheet 120 is formed on the sheet main body 131 located at the bent portion BP. This makes it possible to resist the stress generated in the upper sheet 120 when the upper sheet 120 is bent, and makes it possible to suppress the upper sheet 120 from deforming so as to enter the upper steam flow passage recess 153. Therefore, it is possible to suppress the upper steam flow passage recess 153 from being partially crushed, and to suppress the flow passage cross-sectional area of ​​the upper steam flow passage recess 153 from being reduced. In addition, the flow passage cross-sectional area of ​​the lower steam flow passage recess 154 can be increased at the bent portion BP. Therefore, it is possible to improve the transport capacity of the working steam 2a of the vapor chamber 1. In this way, it is possible to increase the heat transport efficiency of the vapor chamber 1 while suppressing the performance degradation of the vapor chamber 1 caused by the bending of the vapor chamber 1. In addition, since it is possible to suppress the deformation of the upper sheet 120 from entering the upper steam flow passage recess 153, it is possible to suppress the opening of the communication groove 165 in the steam passages 151 and 152 from being blocked by the upper sheet 120. Therefore, when the working fluid 2b evaporates in the first liquid flow path portion 160 located at the bent portion BP, the evaporated working vapor 2a can be diffused into the vapor passages 151, 152 smoothly.

[0381] The width w27 of the second opening 154a can be made larger than the width w26 of the first opening 153a. This allows the portion of the lower sheet 110 that overlaps with the lower steam flow path recess 154 to deform so as to enter the lower steam flow path recess 154. In this case, the capillary action of the flow path corner portion of the lower steam flow path recess 154 similar to the flow path corner portion 55 shown in FIG. 11 can be enhanced. This makes it possible to prevent the working fluid 2b from accumulating in the lower steam flow path recess 154, and to prevent the flow of the working fluid 2a from being obstructed. When the first liquid flow path portion 160 is formed on the second main body surface 131b of the sheet main body 131, the working fluid 2b can be moved quickly to the first liquid flow path portion 160.

[0382] When the steam flow path recesses 153, 154 in a cross-sectional view at the bend portion BP are formed as shown in Figures 57 and 58, the steam flow path recesses 153, 154 may be formed as shown in Figures 57 and 58 in a cross-sectional view at a position different from the bend portion BP. Alternatively, the steam flow path recesses 153, 154 may be formed as shown in Figures 61 and 62 in a cross-sectional view at a position different from the bend portion BP. The upper steam flow path recess 153 may be formed so that its width decreases from the first opening 153a toward the inner portion 157. The lower steam flow path recess 154 may be formed so that its width decreases from the second opening 154a toward the inner portion 157.

[0383] In this case, at a position other than the bent portion BP, the angle between the first boundary edge 155a and the first upper sheet surface 120a and the angle between the second boundary edge 156a and the second lower sheet surface 110b can be made smaller than 90 degrees and can be made an acute angle. This can enhance the capillary action of the working fluid 2b adhering to the wall surfaces 155, 156 of each vapor flow path recess 153, 154. This can smoothly move the working fluid 2b adhering to the wall surfaces 155, 156 to the main groove 161 of the first liquid flow path portion 160. This can improve the transport capacity of the working fluid 2b in the vapor chamber 1.

[0384] Furthermore, as described above, the bent portion BP is a region having a certain width in the X direction. For example, as shown in FIG. 63A and FIG. 63B, the bent portion BP may be formed in an arc shape. In this case, it is possible to suppress the flow of the working steam 2a at the bent portion BP from being obstructed. The bent portion BP may be formed in a 1 / 4 arc shape similar to the vapor chamber 1 shown in FIG. 2 and FIG. 15, or may be formed in a 1 / 2 arc shape similar to the vapor chamber 1 shown in FIG. 3. The angle of the arc of the bent portion BP is arbitrary. As shown in FIG. 63A and FIG. 63B, the vapor chamber 1 may be formed in a flat shape in the regions located on both sides of the bent portion BP in the X direction. The flat region corresponds to the region R2 shown in FIG. 63A, which will be described later.

[0385] As described above, the cross-sectional shape of the steam flow path recesses 153, 154 at the bend BP may be different from the cross-sectional shape of the steam flow path recesses 153, 154 at a position other than the bend BP. In Figures 63A and 63B, the region where the cross-sectional shape of the steam flow path recesses 153, 154 is formed in the cross-sectional shape shown in Figures 45 and 49 is indicated by R1, and the region where the cross-sectional shape is formed in the cross-sectional shape shown in Figures 57 and 58 is indicated by R2.

[0386] 63A, the region R1 may be formed over the entire bend BP. In this case, it is possible to suppress deformation of the upper sheet 120 so as to enter the upper steam flow path recess 153, and to suppress deformation of the lower sheet 110 so as to enter the lower steam flow path recess 154, over the entire bend BP.

[0387] Alternatively, as shown in Fig. 63B, region R1 may be formed in a part of bent portion BP, and region R2 may be formed in the remainder of bent portion BP. Even in this case, deformation of upper sheet 120 into upper steam flow path recess 153 can be suppressed at the bent portion, and deformation of lower sheet 110 into lower steam flow path recess 154 can be suppressed. For example, region R1 may be formed at the center of bent portion BP, and regions R2 may be formed on both sides of region R1 in the X direction. In this case, deformation of upper sheet 120 into upper steam flow path recess 153 can be suppressed at the center of bent portion BP where bending stress is likely to concentrate, and deformation of lower sheet 110 into lower steam flow path recess 154 can be suppressed.

[0388] At the boundary between region R1 and region R2, a step may be formed on the wall surfaces 155, 156 of the vapor flow path recesses 153, 154. In this case, the step may be one step or may be two or more steps, and is optional. Alternatively, the wall surfaces 155, 156 may be formed so that such a step is not formed. For example, the wall surfaces 155, 156 of the vapor flow path recesses 153, 154 in region R1 and the wall surfaces 155, 156 of the vapor flow path recesses 153, 154 in region R2 may be smoothly connected so that the cross-sectional shape gradually changes.

[0389] (Fifth Modification) In the above-described embodiment, an example has been described in which the vapor chamber 1 is composed of the lower sheet 110, the upper sheet 120, and the main body sheet 130, as shown in Fig. 45. However, the present disclosure is not limited to this. For example, as shown in Figs. 64 and 65, the vapor chamber 1 may be composed of the upper sheet 120 and the main body sheet 130.

[0390] 64 and 65, the vapor chamber 1 includes the upper sheet 120 and the main body sheet 130, but does not include the lower sheet 110. In this case, the housing member Ha may be attached to the second main body surface 131b of the main body sheet 130. The heat of the working steam 2a is transferred from the main body sheet 130 to the housing member Ha.

[0391] 64 and 65, the steam flow path section 150 is provided on the first main body surface 131a but does not extend to the second main body surface 131b. The steam flow path section 150 does not penetrate the sheet main body 131 of the main body sheet 130. The first steam passage 151 and the second steam passage 152 of the steam flow path section 150 are formed by an upper steam flow path recess 153, and a lower steam flow path recess 154 is not provided in the main body sheet 130.

[0392] In the example shown in FIG. 64 and FIG. 65, the upper steam flow path recess 153 includes a first opening 153a, an inner portion 157 provided at a position closer to the second main body surface 131b than the first opening 153a, and a bottom portion 153b. In FIG. 65, the inner portion 157 is located lower than the first opening 153a. The bottom portion 153b is provided at a position closer to the second main body surface 131b than the inner portion 157. In FIG. 65, the bottom portion 153b is located lower than the inner portion 157. The first opening 153a opens to the first main body surface 131a. The inner portion 157 is a portion of the upper steam flow path recess 153 where the width of the upper steam flow path recess 153 is the largest in the cross-sectional view shown in FIG. 65. The bottom portion 153b is located at the lower end of the upper steam flow path recess 153.

[0393] 64 and 65, in a cross-sectional view, the upper steam flow path recess 153 is formed so that its width increases from the first opening 153a toward the inner portion 157. As a result, an upper sheet support portion 135 is formed in the sheet main body 131 of the main body sheet 130. In a cross-sectional view, the upper steam flow path recess 153 is formed so that its width decreases from the inner portion 157 toward the bottom portion 153b.

[0394] In the example shown in FIG. 64 and FIG. 65, in a cross-sectional view, the wall surface 155 of the upper steam flow path recess 153 includes a first boundary edge 155a extending from the first opening 153a to the inner portion 157, and a second boundary edge 155b extending from the inner portion 157 to the bottom portion 153b. The first boundary edge 155a is formed in a curved shape. The first boundary edge 155a is curved toward the outside of the upper steam flow path recess 153. The second boundary edge 155b is also formed in a curved shape. The second boundary edge 155b is curved toward the outside of the upper steam flow path recess 153. The first boundary edge 155a and the second boundary edge 155b may be connected smoothly and seamlessly at the inner portion 157. The two second boundary edges 155b facing each other may also be connected smoothly and seamlessly at the bottom portion 153b.

[0395] Although not shown, a steam flow path section 150 may be provided on the first upper sheet surface 120a of the upper sheet 120. In this case, the steam flow path section 150 of the upper sheet 120 may be provided at a position facing the steam flow path section 150 of the main body sheet 130. A first liquid flow path section 160 may be provided on the first upper sheet surface 120a of the upper sheet 120. In this case, the first liquid flow path section 160 of the upper sheet 120 may be provided at a position facing the first liquid flow path section 160 of the main body sheet 130.

[0396] The thickness t25 of the vapor chamber 1 shown in Fig. 64 may be, for example, 100 µm to 1000 µm. The thickness t26 of the upper sheet 120 shown in Fig. 64 may be, for example, 6 µm to 200 µm. The thickness t27 of the main body sheet 130 shown in Fig. 64 may be, for example, 50 µm to 800 µm.

[0397] In this modification as well, the upper steam flow passage recess 153 is formed so that its width increases from the first opening 153a toward the inner portion 157 in a cross-sectional view. As a result, an upper sheet support portion 135 that supports the upper sheet 120 is formed in the sheet body 131 of the main body sheet 130. This makes it possible to prevent a portion of the upper steam flow passage recess 153 from collapsing, and to prevent the flow passage cross-sectional area of ​​the upper steam flow passage recess 153 from becoming smaller. As a result, a decrease in the transport capacity of the working steam 2a of the vapor chamber 1 is suppressed, and a decrease in the performance of the vapor chamber 1 is suppressed.

[0398] Moreover, according to this modification, the vapor chamber 1 is composed of the upper sheet 120 and the main body sheet 130. This allows the vapor chamber 1 to be made even thinner.

[0399] (Sixth Modification) In the above-described fifth modified example, similarly to the above-described fourth modified example, the vapor chamber 1 may be curved. The vapor chamber 1 may include a curved portion BP where the upper sheet 120 and the main body sheet 130 are curved.

[0400] In such a vapor chamber 1, the upper vapor passage recess 153 and the lower vapor passage recess 154 shown in Figures 64 and 65 may be provided at least at the bent portion BP. For example, the upper vapor passage recess 153 and the lower vapor passage recess 154 may be provided so as to intersect the bent portion BP.

[0401] In this modification, the upper steam flow passage recess 153 is formed so that the width increases from the first opening 153a toward the inner portion 157 in a cross-sectional view at the bent portion BP. In this case, the upper sheet support portion 135 that supports the upper sheet 120 is formed in the sheet body 131 of the main body sheet 130. This makes it possible to resist the stress generated in the upper sheet 120 when the upper sheet 120 is bent, and to suppress the upper sheet 120 from deforming so as to enter the upper steam flow passage recess 153. Therefore, it is possible to suppress the crushing of a part of the upper steam flow passage recess 153, and to suppress the reduction in the flow passage cross-sectional area of ​​the upper steam flow passage recess 153. As a result, the decrease in the transport capacity of the working steam 2a of the vapor chamber 1 is suppressed, and the decrease in the performance of the vapor chamber 1 is suppressed.

[0402] As in the fourth modified example described above, the upper steam flow path recess 153 may have any shape at a position other than the bend BP. For example, in a cross-sectional view at a position other than the bend BP, the upper steam flow path recess 153 may be formed so that its width increases from the first opening 153a toward the inner portion 157, as shown in Fig. 53 and Fig. 65. Alternatively, for example, although not shown, in a cross-sectional view at a position other than the bend BP, the upper steam flow path recess 153 may be formed so that its width decreases from the first opening 153a toward the inner portion 157.

[0403] The present disclosure is not limited to the above-mentioned embodiments and modifications, and the components can be modified without departing from the gist of the present disclosure. Various inventions can be formed by appropriately combining the multiple components disclosed in the above-mentioned embodiments and modifications. Some components may be deleted from all the components shown in each embodiment and modification.

Claims

1. A vapor chamber in which a working fluid is sealed, a main body sheet including a first main body surface and a second main body surface located opposite to the first main body surface; a first sheet positioned on the first main body surface of the main body sheet; a second sheet positioned on the second main body surface of the main body sheet; a space provided in the main body sheet, the space being covered by the first sheet and the second sheet; a plurality of first grooves communicating with the space; Equipped with the main body sheet includes a land portion located within the space portion and extending in a first direction, the first groove is located in the first body surface of the land portion, the plurality of first grooves include a plurality of main grooves extending in a first direction, and a plurality of communication grooves communicating with the main grooves and extending in a direction different from the first direction, a plurality of interconnecting groove rows are formed in the land portion, each row including a plurality of the interconnecting grooves arranged in the first direction and partitioned by the main groove; the plurality of communication groove arrays located in the land portion include an adjacent communication groove array constituted by the communication grooves that communicate the space portion with the mainstream groove adjacent to the space portion, the number of the communication grooves per unit length in the first direction is defined as a unit communication groove number, the adjacent communication groove array includes a low-density region and a high-density region in which the number of unit communication grooves is greater than that of the low-density region, the vapor chamber includes a bent region bent along a bend line extending in a direction intersecting the first direction in a plan view, the high-density region of the adjacent connecting groove array is located in the bending region and overlaps the bending line; the plurality of communication groove rows include an intermediate communication groove row constituted by the communication grooves communicating with two adjacent main grooves, the intermediate connecting groove array includes the low-density region, the low-density region of the intermediate connecting groove array is located in the bending region and overlaps the bending line; Vapor chamber.

2. A vapor chamber in which a working fluid is sealed, a main body sheet including a first main body surface and a second main body surface located opposite to the first main body surface; a first sheet positioned on the first main body surface of the main body sheet; a second sheet positioned on the second main body surface of the main body sheet; a space provided in the main body sheet, the space being covered by the first sheet and the second sheet; a plurality of first grooves communicating with the space; Equipped with the main body sheet includes a land portion located within the space portion and extending in a first direction, the first groove is located in the first body surface of the land portion, the plurality of first grooves include a plurality of main grooves extending in a first direction, and a plurality of communication grooves communicating with the main grooves and extending in a direction different from the first direction, a plurality of interconnecting groove rows are formed in the land portion, each row including a plurality of the interconnecting grooves arranged in the first direction and partitioned by the main groove; the plurality of communication groove arrays located in the land portion include an adjacent communication groove array constituted by the communication grooves that communicate the space portion with the mainstream groove adjacent to the space portion, the number of the communication grooves per unit length in the first direction is defined as a unit communication groove number, the adjacent communication groove array includes a low-density region and a high-density region in which the number of unit communication grooves is greater than that of the low-density region, the vapor chamber includes a bent region bent along a bend line extending in a direction intersecting the first direction in a plan view, the high-density region of the adjacent connecting groove array is located in the bending region and overlaps the bending line; When two adjacent communication groove rows among the plurality of communication groove rows are defined as a first communication groove row and a second communication groove row, In the high-density region, the communication grooves of the first communication groove array are located on an extension line of the communication grooves of the second communication groove array, In the low-density region, the communication grooves of the first communication groove array are positioned at positions shifted from an extension line of the communication grooves of the second communication groove array. Vapor chamber.

3. A vapor chamber in which a working fluid is sealed, a main body sheet including a first main body surface and a second main body surface located opposite to the first main body surface; a first sheet positioned on the first main body surface of the main body sheet; a second sheet positioned on the second main body surface of the main body sheet; a space provided in the main body sheet, the space being covered by the first sheet and the second sheet; a plurality of first grooves communicating with the space; Equipped with the main body sheet includes a land portion located within the space portion and extending in a first direction, the first groove is located in the first body surface of the land portion, the plurality of first grooves include a plurality of main grooves extending in a first direction, and a plurality of communication grooves communicating with the main grooves and extending in a direction different from the first direction, a plurality of interconnecting groove rows are formed in the land portion, each row including a plurality of the interconnecting grooves arranged in the first direction and partitioned by the main groove; the plurality of communication groove arrays located in the land portion include an adjacent communication groove array constituted by the communication grooves that communicate the space portion with the mainstream groove adjacent to the space portion, the number of the communication grooves per unit length in the first direction is defined as a unit communication groove number, the adjacent communication groove array includes a low-density region and a high-density region in which the number of unit communication grooves is greater than that of the low-density region, the vapor chamber includes a bent region bent along a bend line extending in a direction intersecting the first direction in a plan view, the high-density region of the adjacent connecting groove array is located in the bending region and overlaps the bending line; In the low-density region, the communication groove extends in a direction perpendicular to the first direction, In the high-density region, the communication groove extends in a direction inclined with respect to the first direction. Vapor chamber.

4. The low-density regions are located on both sides of the high-density region in the first direction. The vapor chamber according to any one of claims 1 to 3.

5. The plurality of connecting groove rows includes an intermediate connecting groove row composed of connecting grooves communicating with two adjacent main grooves, the intermediate connecting groove array includes the low-density region and the high-density region, the high-density region of the intermediate connecting groove array is located in the bending region and overlaps the bending line; The vapor chamber according to claim 2 or 3.

6. The bending line extends in a direction perpendicular to the first direction. The vapor chamber according to any one of claims 1 to 3.

7. The bending line extends in a direction inclined toward the first direction. The vapor chamber according to any one of claims 1 to 3.

8. A housing, a device contained within the housing; and A vapor chamber according to any one of claims 1 to 3 in thermal contact with the device; An electronic device equipped with

9. A main body sheet for a vapor chamber, comprising: a first body surface; a second body surface located opposite to the first body surface; a space portion extending from the first body surface to the second body surface; a plurality of first grooves communicating with the space; a land portion located within the space portion and extending in a first direction; Equipped with the first groove is located in the first body surface of the land portion, the plurality of first grooves include a plurality of main grooves extending in a first direction, and a plurality of communication grooves communicating with the main grooves and extending in a direction different from the first direction, a plurality of interconnecting groove rows are formed in the land portion, each row including a plurality of the interconnecting grooves arranged in the first direction and partitioned by the main groove; the plurality of communication groove arrays located in the land portion include an adjacent communication groove array constituted by the communication grooves that communicate the space portion with the mainstream groove adjacent to the space portion, the number of the communication grooves per unit length in the first direction is defined as a unit communication groove number, the adjacent communication groove array includes a low-density region and a high-density region in which the number of unit communication grooves is greater than that of the low-density region, the plurality of communication groove rows include an intermediate communication groove row constituted by the communication grooves communicating with two adjacent main grooves, the intermediate connecting groove array includes the low-density region, the high-density region of the adjacent connecting groove array and the low-density region of the intermediate connecting groove array are arranged at positions that overlap in a second direction that is perpendicular to the first direction in a plan view. Main body sheet for vapor chamber.

10. A main body sheet for a vapor chamber, comprising: a first body surface; a second body surface located opposite to the first body surface; a space portion extending from the first body surface to the second body surface; a plurality of first grooves communicating with the space; a land portion located within the space portion and extending in a first direction; Equipped with the first groove is located in the first body surface of the land portion, the plurality of first grooves include a plurality of main grooves extending in a first direction, and a plurality of communication grooves communicating with the main grooves and extending in a direction different from the first direction, a plurality of interconnecting groove rows are formed in the land portion, each row including a plurality of the interconnecting grooves arranged in the first direction and partitioned by the main groove; the plurality of communication groove arrays located in the land portion include an adjacent communication groove array constituted by the communication grooves that communicate the space portion with the mainstream groove adjacent to the space portion, the number of the communication grooves per unit length in the first direction is defined as a unit communication groove number, the adjacent communication groove array includes a low-density region and a high-density region in which the number of unit communication grooves is greater than that of the low-density region, When two adjacent communication groove rows among the plurality of communication groove rows are defined as a first communication groove row and a second communication groove row, In the high-density region, the communication grooves of the first communication groove array are located on an extension line of the communication grooves of the second communication groove array, In the low-density region, the communication grooves of the first communication groove array are positioned at positions shifted from an extension line of the communication grooves of the second communication groove array. Main body sheet for vapor chamber.

11. A main body sheet for a vapor chamber, comprising: a first body surface; a second body surface located opposite to the first body surface; a space portion extending from the first body surface to the second body surface; a plurality of first grooves communicating with the space; a land portion located within the space portion and extending in a first direction; Equipped with the first groove is located in the first body surface of the land portion, the plurality of first grooves include a plurality of main grooves extending in a first direction, and a plurality of communication grooves communicating with the main grooves and extending in a direction different from the first direction, a plurality of interconnecting groove rows are formed in the land portion, each row including a plurality of the interconnecting grooves arranged in the first direction and partitioned by the main groove; the plurality of communication groove arrays located in the land portion include an adjacent communication groove array constituted by the communication grooves that communicate the space portion with the mainstream groove adjacent to the space portion, the number of the communication grooves per unit length in the first direction is defined as a unit communication groove number, the adjacent communication groove array includes a low-density region and a high-density region in which the number of unit communication grooves is greater than that of the low-density region, In the low-density region, the communication groove extends in a direction perpendicular to the first direction, In the high-density region, the communication groove extends in a direction inclined with respect to the first direction. Main body sheet for vapor chamber.

Images