Valve seat member, fluid control valve, fluid control device and method for manufacturing valve seat member

Abstract

To increase a flow rate for a fluid control valve without increasing a size of a valve seat member and an actuator.SOLUTION: A valve seat member has: a valve seat surface 31s on which a seating surface 32s of a valve body 32 sits; an inflow groove 31x recessed from the valve seat surface 31s and having an inflow port 31i opening at its bottom surface; and an outflow groove 31y recessed from the valve seat surface 31s and having an outflow port 31o opening at its bottom surface. The valve seat surface 31s between the inflow groove 31x and the outflow groove 31y is formed at a pitch L narrower than a diameter of the inflow port 31i or the outflow port 31o without overlapping with the inflow port 31i and the outflow port 31o in a plan view.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a valve seat member, a fluid control valve, a fluid control device, and a method for manufacturing a valve seat member. [Background technology]

[0002] Conventionally, there has been a demand for a larger flow rate in a fluid control valve, and as shown in Patent Document 1, for example, improvements have been made to the structure of a valve seat member having a valve seat surface.

[0003] Specifically, in this fluid control valve, a plurality of inlets and a plurality of outlets are formed in the valve seat member, and recessed grooves with inlets formed therein and recessed grooves with outlets formed therein are alternately formed, thereby reducing the pressure loss from the plurality of inlets to the plurality of outlets and allowing a large flow rate of fluid to flow. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2010-230159 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, there is a limit to how much larger the flow rate can be achieved by forming multiple annular grooves on a valve seat surface of limited size and forming multiple inlets and multiple outlets in the grooves. Therefore, in order to increase the flow rate using a conventional valve seat member, it is necessary to increase the size of the valve seat member itself or to increase the size of the actuator in order to increase the stroke amount of the valve body.

[0006] In this context, the inventors of the present application noticed that there is a correlation between the length of the interface separating a groove having an inlet and a groove having an outlet and the flow rate, such that the longer the interface, the greater the flow rate of fluid that can be passed through it.

[0007] The present invention has been made with attention to the above correlation, and has as its main object to increase the flow rate of a fluid control valve without increasing the size of the valve seat member or actuator. [Means for solving the problem]

[0008] In other words, the valve seat member of the present invention has a valve seat surface on which the seating surface of a valve body sits, an inlet groove recessed from the valve seat surface and having an inlet opening at its bottom surface, and an outlet groove recessed from the valve seat surface and having an outlet opening at its bottom surface, and is characterized in that the valve seat surface between the inlet groove and the outlet groove does not overlap the inlet or the outlet in a plan view and is formed at a pitch narrower than the diameter of the inlet or the outlet.

[0009] With the valve seat member configured in this manner, the valve seat surface between the inlet and outlet grooves is formed at a pitch narrower than the diameter of the inlet or outlet while avoiding the inlet and outlet, so that the total length of the valve seat surface can be made longer than before. As a result, the flow rate of the fluid control valve can be increased without increasing the size of the valve seat member or actuator.

[0010] It is preferable that the inflow groove has a first pocket portion overlapping the inlet, and a first narrow portion communicating with the first pocket portion and having a groove width narrower than a diameter of the inlet. In this case, it is possible to avoid blocking of the inlet by forming the first pocket portion, while at the same time, it is possible to ensure the length of the valve seat surface by forming the first narrow portion.

[0011] It is preferable that the outflow groove has a second pocket portion overlapping the outflow port, and a second narrow portion communicating with the second pocket portion and having a groove width narrower than a diameter of the outflow port. In this case, by forming the second pocket portion, it is possible to reduce pressure loss by avoiding blocking of the outlet, while by forming the second narrow portion, it is possible to ensure the length of the valve seat surface.

[0012] It is preferable that the valve seat surface between the inlet groove and the outlet groove is a boundary surface separating the inlet groove and the outlet groove in a plan view, and that the boundary surface has a labyrinth shape with a pitch narrower than a diameter of the inlet or the outlet. By forming the boundary surface in a labyrinth shape in this way, it is possible to make the boundary surface long and have a complex shape.

[0013] It is preferable that the boundary surface forms multiple concentric rings formed so as to avoid the inlet and the outlet. This allows the interface to be made longer within a limited size.

[0014] It is preferable that a bridge be provided between the boundary surface and the valve seat surface on the outer side of the boundary surface to hold the boundary surface. In this way, by holding the boundary surface with the bridge, it is possible to ensure workability in the boundary surface formation process.

[0015] It is preferable that the one or more inlet ports and the one or more outlet ports are formed on the same circumference. This allows the fluid that has flowed into the inlet to flow out smoothly from the outlet, achieving an even larger flow rate.

[0016] It is preferable that the inflow ports and the outflow ports are alternately formed along the circumferential direction on the same circumference. In this case, the inlet groove side and the outlet groove side become the boundaries, and the boundary surface separating the inlet and the outlet has a complex shape, so that the length of the boundary surface can be made longer.

[0017] It is preferable that a plurality of the inlets or a plurality of the outlets are formed along a radial direction. In this case, the number of inlets and outlets can be increased, and a larger flow rate can be achieved.

[0018] It is preferable that the plurality of inlets or the plurality of outlets formed at different positions along the radial direction have different diameters from each other. This allows the inlet or outlet to be sized appropriately depending on the radial position.

[0019] It is preferable that the diameter of the inlet or the outlet located on the radially outer side is larger than the diameter of the inlet or the outlet located on the radially inner side. This allows the inlet or outlet to be made larger depending on the radial position, thereby achieving a larger flow rate.

[0020] It is preferable to include a block body in which the inlet and the outlet are formed, and a plate attached to the block body and forming the inlet groove and the outlet groove together with the block body. In this case, by forming the plate, for example, by removing part of a thin plate by etching, the inlet and outlet grooves can be formed in the part remaining after the etching, making it possible to form a narrow boundary surface into a complex shape.

[0021] A fluid control valve according to the present invention is characterized by comprising the above-mentioned valve seat member and a valve body which moves toward and away from the valve seat member.

[0022] In addition, a fluid control device according to the present invention is characterized in that it comprises the above-mentioned fluid control valve, a flow sensor that measures the flow rate of a flow path in which the fluid control valve is provided, and a control unit that controls the fluid control valve based on the measurement value of the flow sensor.

[0023] Furthermore, a manufacturing method of a valve seat member according to the present invention is a method for manufacturing a valve seat member having a valve seat surface on which the seating surface of the valve body sits, an inflow groove recessed from the valve seat surface and having an inflow port opening at its bottom surface, and an outflow groove recessed from the valve seat surface and having an outflow port opening at its bottom surface, characterized in that the valve seat surface between the inflow groove and the outflow groove is formed at a pitch narrower than the diameter of the inflow port or the outflow port without overlapping the inflow port or the outflow port in a plan view.

[0024] According to the above-described fluid control valve, fluid control device, and method for manufacturing a valve seat member, it is possible to achieve the same effects as those of the above-described valve seat member.

[0025] The valve seat surface is preferably formed by etching. This allows the narrow valve seat surface to be formed into various complex shapes, and makes it possible to form a valve seat surface that is longer than before.

[0026] A more specific example of the manufacturing method is a method in which a block body in which the inlet and the outlet are formed is diffusion-bonded to a plate which, together with the block body, forms the inlet groove and the outlet groove. Effect of the Invention

[0027] According to the present invention thus configured, it is possible to increase the flow rate of the fluid control valve without increasing the size of the valve seat member or actuator. [Brief description of the drawings]

[0028] [Figure 1] 1 is a schematic diagram of a fluid control device according to an embodiment of the present invention; [Diagram 2] FIG. 4 is a partially enlarged cross-sectional view showing a valve seat member and a valve body of the embodiment. [Diagram 3] FIG. [Figure 4] FIG. [Diagram 5] FIG. [Figure 6] FIG. [Figure 7] FIG. 4 is an enlarged plan view showing a portion of the valve seat member of the embodiment. [Figure 8] FIG. 4 is a plan view showing a boundary surface of the valve seat member of the embodiment. [Figure 9] 5A to 5C are schematic diagrams illustrating a method of manufacturing the valve seat member according to the embodiment. [Figure 10] 5A to 5C are schematic diagrams illustrating a method of manufacturing the valve seat member according to the embodiment. [Figure 11] 5A to 5C are schematic diagrams illustrating a method of manufacturing the valve seat member according to the embodiment. [Figure 12] 5A to 5C are schematic diagrams illustrating a method of manufacturing the valve seat member according to the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0029] Hereinafter, a valve seat member according to an embodiment of the present invention will be described with reference to the drawings. In addition, in all of the drawings shown below, in order to make it easier to understand, some parts are omitted or exaggerated as appropriate and schematic drawings are shown. The same components are given the same reference numerals and the description thereof is omitted as appropriate.

[0030] The valve seat member of this embodiment constitutes a fluid control valve, and this fluid control valve constitutes a fluid control device, so first, the overall configuration of the fluid control device will be briefly described.

[0031] <Device configuration> The fluid control device 100 of this embodiment is a so-called mass flow controller, and is used to control the flow rate of a gas supplied to a chamber in which a semiconductor manufacturing process is performed, for example. Note that the fluid control device 100 may control not only a gas but also a liquid.

[0032] Specifically, as shown in FIG. 1, the fluid control device 100 includes a flow path block 2 having a flow path R formed therein, a fluid control valve 3 for controlling the gas in the flow path R, a flow sensor 4 for measuring the flow rate of the flow path R, and a control unit 5 for controlling the fluid control valve 3 based on the measured value measured by the flow sensor 4.

[0033] 1 and 2, the flow path block 2 is formed with an accommodating recess 21 in which the fluid control valve 3 is attached. The accommodating recess 21 is formed on one surface (the upper surface in FIG. 1) of the flow path block 2. An upstream flow path R1 is connected to a bottom surface of the accommodating recess 21, and a downstream flow path R2 is connected to an inner peripheral surface of the accommodating recess 21. In other words, the flow path R formed in the flow path block 2 is divided by the accommodating recess 21 into the upstream flow path R1 and the downstream flow path R2.

[0034] A gas inlet port (not shown) is provided at the upstream end of the upstream flow passage R1, and a gas outlet port (not shown) is provided at the downstream end of the downstream flow passage R2.

[0035] The fluid control valve 3 is a so-called normally open valve that is fully open when no voltage is applied, and the opening degree is controlled by the applied voltage. Note that the fluid control valve 3 may be a so-called normally closed valve that is fully closed when no voltage is applied.

[0036] Specifically, as shown in Figures 1 and 2, the fluid control valve 3 includes a valve seat member 31 having a valve seat surface 31s, a valve body 32 having a seating surface 32s that moves toward and away from the valve seat surface 31s, and a drive unit 33 that drives the valve body 32.

[0037] The valve seat member 31 is accommodated in the accommodating recess 21. Here, the valve seat member 31 is formed with a valve seat surface 31s with which the valve body 32 comes into contact, and is accommodated in the accommodating recess 21 such that the valve seat surface 31s faces the upper opening side of the accommodating recess 21.

[0038] As shown in FIG. 2, in this valve seat member 31, an inlet 31i and an outlet 31o are formed in the bottom surface of a groove formed by recessing the valve seat surface 31s, and a first internal flow path 311 communicating with the inlet 31i and a second internal flow path 312 communicating with the outlet 31o are also formed.

[0039] When the valve seat member 31 is accommodated in the accommodating recess 21, the first internal flow path 311 is provided to surround the bottom opening of the accommodating recess 21, and the lower surface of the valve seat member 31 is liquid-tightly provided on the bottom surface of the accommodating recess 21 via a seal member (not shown) such as a metal O-ring. In other words, all of the fluid flowing through the upstream flow path R1 flows into the first internal flow path 311 of the valve seat member 31. Other details of the valve seat member 31 will be described later.

[0040] The valve body 32 is formed integrally with a diaphragm member 34 provided to close the opening of the accommodating recess 21 of the flow path block 2. The side peripheral edge of the diaphragm member 34 is fixed liquid-tightly to the peripheral edge of the upper opening of the accommodating recess 21 via a sealing member (not shown) such as a metal O-ring.

[0041] 2, the central portion of the diaphragm member 34 (ie, the lower surface of the valve body 32) has a seating surface 32s which moves toward and away from the valve seat member 31 by the drive portion 33 and comes into contact with and separates from the valve seat surface 31s of the valve seat member 31.

[0042] The driving unit 33 includes a piezoelectric actuator 331 formed by stacking a plurality of piezoelectric elements that expand and deform when a voltage is applied. The piezoelectric actuator 331 is housed in a casing 332, and an intermediate member 333 such as a sphere is provided at the tip of the piezoelectric actuator 331. The intermediate member 333 presses the upper surface of the valve body 32.

[0043] When a predetermined voltage is applied to the piezo actuator 331, the piezo actuator 331 expands, urging the valve element 32 in the valve closing direction, causing the seating surface 32s to approach the valve seating surface 31s by a distance corresponding to the applied voltage, resulting in a predetermined opening degree, and when the seating surface 32s comes into contact with the valve seating surface 31s, the valve element 32 is in a fully closed state. On the other hand, when no voltage is applied to the piezo actuator 331, the valve element 32 is in a fully open state due to the elastic restoring force of the diaphragm member 34.

[0044] 1, the flow sensor 4 is, for example, a thermal type, and includes a flow dividing element (fluid resistance) 41 provided in the flow path R, a thin tube 42 that branches off from the upstream side of the flow dividing element 41 and joins the downstream side of the flow dividing element 41, two electric heating coils 43 that are wound around the thin tube 42 and to which voltages are applied so as to keep each at a constant temperature, and a flow rate calculation unit 44 that detects the voltage difference applied to the electric heating coils 43 to calculate the flow rate of the gas flowing through the flow path R. This flow rate sensor 4 is provided on the upstream side or downstream side of the fluid control valve 3 in the flow path R.

[0045] The control unit 5 controls the fluid control valve 3 based on the measured value (measured flow rate) measured by the flow sensor 4. The control unit 5 is a computer equipped with a CPU, memory, A / D converter, D / A converter, and various input / output means, and controls the fluid control valve 3 by executing a fluid control program stored in the memory and cooperating with the CPU and peripheral devices.

[0046] The control unit 5 controls the opening of the fluid control valve 3 based on a command flow rate input from outside and a measured flow rate measured by the flow sensor 4. Specifically, the control unit 5 controls the opening of the fluid control valve 3 so as to reduce the deviation between the command flow rate and the measured flow rate. The control unit 5 of this embodiment performs a PID calculation on the deviation between the command flow rate and the measured flow rate, and outputs a command voltage according to the result to the drive circuit of the drive unit 33. The drive circuit applies a voltage corresponding to the input command voltage to the piezoelectric actuator 331.

[0047] <Specific Configuration of the Valve Seat Member 31> As shown in Figures 3 to 7, the valve seat member 31 is roughly disk-shaped and has a valve seat surface 31s formed on its upper surface, an inflow groove 31x that is recessed from the valve seat surface 31s and has the above-mentioned inflow port 31i opening into its bottom surface, and an outflow groove 31y that is recessed from the valve seat surface 31s and has the above-mentioned outflow port 31o opening into its bottom surface.

[0048] More specifically, as shown in Figures 3 to 5, the valve seat member 31 here comprises a block body 313 in which the above-mentioned inlet 31i and outlet 31o are formed, and a plate 314 that is attached to the block body 313 and forms the inlet groove 31x and the outlet groove 31y together with the block body 313.

[0049] First, the block body 313 will be described. As shown in FIGS. 4 and 5, the block body 313 has a roughly cylindrical shape and is fitted with a plate 314 (described later). Specifically, a joining surface 3141 of the plate 314 facing the block body 313 is joined to a joining surface 3131 (here, the upper surface, hereinafter also referred to as the upper surface 3131) facing the plate 314.

[0050] As shown in FIG. 4, this block body 313 is formed with a first internal flow path 311 that opens to an upper surface 3131, which is the surface to be joined, and a bottom surface 3130 behind the upper surface 3131, and as shown in FIG. 5, a second internal flow path 312 that opens to the upper surface 3131 and an outer peripheral surface 3132 between the upper surface 3131 and the bottom surface is formed.

[0051] As shown in FIG. 4, the first internal flow path 311 is connected to multiple inlets 31i and has a main flow path 311a that opens to the bottom surface, and multiple branch flow paths 311b that branch off from the main flow path 311a and open to the upper surface 3131.

[0052] The main flow passage 311a is a flow passage into which the fluid flows from the upstream flow passage R1 that opens into the bottom surface of the accommodation recess 21, and here has a circular cross section.

[0053] Each of the branch flow paths 311b is connected to each of the inlets 31i formed in the upper surface 3131, and branches the fluid from the main flow path 311a and guides it to each inlet 31i. Specifically, these branch flow paths 311b are formed by penetrating the upper surface 3131 to the main flow path 311a. The opening shape of each branch flow path 311b is substantially the same as the opening shape of the inlet 31i with which it is connected, and here has a circular cross section.

[0054] As shown in FIG. 5, the second internal flow path 312 is connected to a plurality of outlets 31o, and has a plurality of outlet paths 312a opening into the upper surface 3131, and a confluence flow path 312b where these outlet paths 312a join together and open onto the outer peripheral surface.

[0055] Each of the plurality of outflow paths 312a is connected to each of the plurality of outflow ports 31o opening on the upper surface 3131, and guides the fluid that has flowed into the outflow ports 31o to a merging flow path 312b described later. Specifically, these outflow paths 312a are formed by penetrating the upper surface 3131 to the merging flow path 312b described later. The opening shape of each of the outflow paths 312a is substantially the same as the opening shape of the outflow port 31o with which it is connected, and here has a circular cross section.

[0056] The junction flow passage 312b is a flow passage into which the fluid flows from the multiple outlet passages 312a and which discharges the fluid to the downstream flow passage R2 that opens on the inner circumferential surface of the accommodating recess 21, and here has a circular cross section.

[0057] In the above-mentioned configuration, as shown in Fig. 3 and Fig. 6, one or more inlets 31i and one or more outlets 31o are formed on the same circumference on the upper surface 3131 of the block body 313. Note that, "on the same circumference" here means that, focusing on one inlet 31i and one outlet 31o, at least a part of the inlet 31i and at least a part of the outlet 31o are located on the same circumference. In other words, the center of the inlet 31i and the center of the outlet 31o are not necessarily located on the same circumference, and the entire inlet 31i and the entire outlet 31o are not necessarily located on the same circumference. Also, the inlet 31i and the outlet 31o are not necessarily located on the same circumference, and only the inlet 31i may be located on the same circumference, or only the outlet 31o may be located on the same circumference.

[0058] In this embodiment, as shown in Fig. 3 and Fig. 6, the multiple inlets 31i and the multiple outlets 31o are located on the same circumference. More specifically, the inlets 31i and the outlets 31o are alternately formed along the circumferential direction on the same circumference. However, the inlets 31i and the outlets 31o may each be formed in a plurality of continuous pieces, or the multiple inlets 31i may be formed close together on one half of the circumference, and the multiple outlets 31o may be formed close together on the remaining half of the circumference.

[0059] More specifically, the valve seat member 31 here has a circular shape in a plan view, and an inlet 31i is formed at its center. A plurality of (four) inlets 31i and a plurality of (four) outlets 31o are alternately formed along the circumferential direction on the same circumference radially outward from the inlet 31i located at the center, and a plurality of (four) inlets 31i and a plurality of (four) outlets 31o are alternately formed along the circumferential direction on the same circumference radially outward from those, and a plurality of (four) outlets 31o are alternately formed along the circumferential direction on the same circumference radially outward from those. However, the number and arrangement of the inlets 31i and the outlets 31o are not limited to this and may be changed as appropriate.

[0060] In this embodiment, a plurality of inlets 31i are formed along the radial direction as shown in Fig. 6. In other words, the inlets 31i are formed at a plurality of locations along the radial direction on the upper surface 3131 of the block body 313, and here, the plurality of inlets 31i are formed on a pair of first virtual lines Z1 that pass through the center of the upper surface 3131 and intersect with each other (here, they are perpendicular, but may be other than perpendicular).

[0061] In such a configuration, the multiple inlets 31i formed at different positions along the radial direction have different diameters from each other, and specifically, the diameter of the inlet 31i located on the radially outer side is larger than the diameter of the inlet 31i located on the radially inner side.

[0062] 6, a plurality of outlets 31o are formed along the radial direction. In other words, the outlets 31o are formed at a plurality of locations along the radial direction on the upper surface 3131 of the block body 313, and the plurality of outlets 31o are formed on a pair of second virtual lines Z2 that pass through the center of the upper surface 3131 and intersect with each other (here, they are perpendicular, but may be other than perpendicular). The pair of second virtual lines Z2 intersect with the first virtual line Z1.

[0063] In such a configuration, the multiple outlets 31o formed at different positions along the radial direction have different diameters from each other, and specifically, the diameter of the outlets 31o located on the radially outer side is larger than the diameter of the outlets 31o located on the radially inner side.

[0064] Next, the plate 314 will be described. As shown in FIGS. 3 to 5, the plate 314 is generally disk-shaped, with one of the front and back surfaces serving as the valve seat surface 31s and the other serving as a joining surface 3141 to be joined to the joined surface 3131 of the block body 313.

[0065] As shown in FIG. 3, this plate 314 is formed, for example, by removing a portion of a thin plate by etching. Specifically, the plate 314 is formed so that the remaining portion left after etching avoids the inlet 31i and outlet 31o described above, in other words, so as not to overlap the inlet 31i and outlet 31o.

[0066] Then, by joining the joining surface 3141 of this plate 314 to the block body 313, a part of the upper surface 3131 of the block body 313 facing the plate 314 is exposed as shown in FIG. 3, and an inlet groove 31x and an outlet groove 31y are formed by the exposed part of the upper surface 3131 and the inner peripheral surface of the remaining part of the plate 314.

[0067] 6, the valve seat surface 31s between the inlet groove 31x and the outlet groove 31y is formed at a pitch L narrower than the diameter of the inlet 31i or the outlet 31o while avoiding the inlet 31i and the outlet 31o in a plan view. The pitch L here is a radial distance of the valve seat surface 31s in a plan view. More specifically, the pitch L of the valve seat surface 31s is a radial distance between a circumferentially extending portion of the valve seat surface 31s and a circumferentially extending portion located radially outside or inside the portion, in other words, a distance between opposing surfaces of the circumferentially extending portions.

[0068] 7, the inflow groove 31x of this embodiment has a first pocket portion P1 overlapping the inlet 31i, and a first narrow portion Q1 communicating with the first pocket portion P1 and having a groove width narrower than the diameter of the inlet 31i. The groove width is a dimension along a width direction perpendicular to the groove depth direction and the groove extension direction (hereinafter the same), and the groove width of the first narrow portion Q1 here is consistent with the pitch L of the valve seat surface 31s described above. In other words, the inflow groove 31x consisting of the first pocket portion P1 and the first narrow portion Q1 is formed as a closed region surrounding the inlet 31i in a plan view, and at least a part of the closed region is narrower than the diameter of the inlet 31i.

[0069] The first pocket portion P1 overlaps the entire inlet 31i and is provided corresponding to each of the multiple inlets 31i. The multiple first narrow portions Q1 communicate with each first pocket portion P1, in other words, the multiple first narrow portions Q1 communicate with each other via the first pocket portion P1.

[0070] The first narrow width portion Q1 extends in the circumferential direction from the first pocket portion P1, specifically, extends in the circumferential direction from one or more points of the first pocket portion P1. In this embodiment, as shown in Fig. 7, the first narrow width portion Q1 extending clockwise from the first pocket portion P1 and the first narrow width portion Q1 extending counterclockwise are formed on the same circumference, and the first narrow width portion Q1 extends in the circumferential direction from different points along the radial direction of the first pocket portion P1.

[0071] In addition, the outflow groove 31y (see FIG. 6 and the like) of this embodiment has a second pocket portion P2 overlapping the outflow port 31o, and a second narrow portion Q2 communicating with the second pocket portion P2 and having a groove width narrower than the diameter of the outflow port 31o. The groove width of the second narrow portion Q2 is the pitch L of the valve seat surface 31s described above. In other words, the outflow groove 31y consisting of the second pocket portion P2 and the second narrow portion Q2 is formed as a closed area surrounding the outflow port 31o in a plan view, and at least a part of the closed area is narrower than the diameter of the outflow groove 31y.

[0072] The second pocket portion P2 overlaps the entire outlet 31o and is provided corresponding to each of the multiple outlets 31o. The multiple second narrow portions Q2 communicate with each second pocket portion P2, in other words, the multiple second narrow portions Q2 communicate with each other via the second pocket portion P2.

[0073] The second narrow width portion Q2 extends from the second pocket portion P2 in the circumferential direction, specifically, extends from one or more points of the second pocket portion P2 in the circumferential direction. In this embodiment, as shown in Fig. 7, the second narrow width portion Q2 extending clockwise from the second pocket portion P2 and the second narrow width portion Q2 extending counterclockwise are formed on the same circumference, and the second narrow width portion Q2 extends in the circumferential direction from different points in the radial direction of the second pocket portion P2.

[0074] In the above-mentioned configuration, as shown by the shaded area in Fig. 8, the valve seat surface 31s between the inlet groove 31x and the outlet groove 31y becomes the boundary surface M that separates the inlet groove 31x and the outlet groove 31y in a plan view, and forms a labyrinth shape with a pitch L narrower than the diameter of the inlet 31i or the outlet 31o. Note that the "labyrinth shape" refers to a shape that is bent or curved at one or more points, and is, so to speak, a winding maze-like shape.

[0075] Specifically, in a plan view, this boundary surface M separates a first pocket portion P1, a first narrow portion Q1, a second pocket portion P2, and a second narrow portion Q2, and in this embodiment forms multiple concentric rings (multiple rings) formed to avoid the inlet 31i and the outlet 31o.

[0076] As shown in FIG. 6, the valve seat member 31 of this embodiment has a bridge B that spans between the boundary surface M and the valve seat surface 31s that is located outside the boundary surface M and holds the boundary surface M.

[0077] This bridge B is interposed between the radially outermost boundary surface M and a valve seat surface 31s formed on the outer edge of the valve seat member 31, and extends, for example, along the radial direction.

[0078] Here, a plurality of (four) outlets 31o are formed on the outermost radial side, and the same number of bridges B as these outlets 31o are formed to separate adjacent outlets 31o. Note that these outlets 31o, like the other outlets 31o, are formed in the block body 313. The number of bridges B is not limited to the embodiment shown in FIG. 6, and may be one to three, or may be five or more.

[0079] Next, a manufacturing method of the valve seat member 31 will be described with reference to FIGS. This manufacturing method is a method for manufacturing a valve seat member having a valve seat surface on which the seating surface of the valve disc sits, an inflow groove that is recessed from the valve seat surface and has an inflow port opening at its bottom surface, and an outflow groove that is recessed from the valve seat surface and has an outflow port opening at its bottom surface, and the basic method involves joining a block body in which the inflow port and outflow port are formed, and a plate which, together with the block body, forms the inflow groove and outflow groove. Although a plurality of valve seat members 31 are manufactured at once here, a single valve seat member 31 may be manufactured.

[0080] First, as shown in FIG. 9, a previously prepared thin plate is subjected to surface processing such as etching to remove the portions corresponding to the inlet groove 31x and the outlet groove 31y, and the remaining surface portions become the valve seat surface 31s to form a plate 314 (here, a plurality of plates 314 are connected together).

[0081] At this time, by forming the above-mentioned bridge B, surface processing such as etching can be performed while the inside of this bridge B is held. This allows the boundary surface M, which is the valve seat surface 31s separating the inlet groove 31x and the outlet groove 31y, to be formed into a fine shape such as a labyrinth shape.

[0082] The thickness of this thin plate (that is, the thickness of the plate 314) is equivalent to the pitch L of the valve seat surface 31s having a labyrinth shape, and is about a few tenths of a millimeter.

[0083] On the other hand, in the block body (here, a plurality of block bodies 313 connected together), the bottom surface is cut to form the above-mentioned main flow path 311a (not shown), and the side surface is cut to form the merging flow path 312b.

[0084] 10, the plate 314 is bonded to the upper surface 3131 of the block body 313 by, for example, diffusion bonding to be integrated with the block body 313. As a result, the inlet groove 31x and the outlet groove 31y are formed by the exposed portion of the upper surface 3131 of the block body 313 and the inner circumferential surface of the remaining portion of the plate 314.

[0085] Next, as shown in FIG. 11, a branch flow path 311b and an inlet 31i communicating with the main flow path 311a are formed by cutting a plurality of predetermined locations on the upper surface 3131 of the block body 313, and an outlet 312a and an outlet 31o communicating with the junction flow path 312b are formed.

[0086] Finally, in this embodiment, as shown in FIG. 12, the manufacturing process for the plurality of valve seat members 31 is completed in one go by separating the plurality of valve seat members 31.

[0087] According to the valve seat member 31 configured in this manner, the valve seat surface 31s between the inlet groove 31x and the outlet groove 31y is formed at a pitch L narrower than the diameter of the inlet 31i or the outlet 31o while avoiding the inlet 31i and the outlet 31o. Therefore, the total length of the valve seat surface 31s can be made longer than before. As a result, the flow rate of the fluid control valve 3 can be increased without increasing the size of the valve seat member 31 or the actuator.

[0088] Furthermore, the inlet groove 31x has a first pocket portion P1 that overlaps with the inlet 31i, and a first narrow portion Q1 that communicates with the first pocket portion P1 and has a groove width narrower than the diameter of the inlet 31i. Therefore, the inlet 31i is prevented from being blocked by the first pocket portion P1, thereby reducing pressure loss, while the first narrow portion Q1 ensures the length of the valve seat surface 31s.

[0089] Similarly, the outflow groove 31y has a second pocket portion P2 that overlaps with the outflow port 31o, and a second narrow portion Q2 that communicates with the second pocket portion P2 and has a groove width narrower than the diameter of the outflow port 31o. Therefore, the outflow port 31o is prevented from being blocked by the second pocket portion P2, while the length of the valve seat surface 31s is ensured by the second narrow portion Q2.

[0090] The valve seat surface 31s between the inlet groove 31x and the outlet groove 31y is a boundary surface M that separates the inlet groove 31x and the outlet groove 31y in a planar view, and since the boundary surface M has a labyrinth shape with a pitch L narrower than the diameter of the inlet 31i or the outlet 31o, the boundary surface M can be made long and have a complex shape.

[0091] Furthermore, since the boundary surface M forms multiple concentric rings formed so as to avoid the inlet 31i and the outlet 31o, the boundary surface M can be made longer within a limited size.

[0092] Furthermore, since a bridge B is provided between the boundary surface M and the valve seat surface 31s located outside the boundary surface M to hold the boundary surface M, workability in the process of forming the boundary surface M can be ensured.

[0093] Since one or more inlets 31i and one or more outlets 31o are formed on the same circumference, the fluid flowing into the inlet 31i can be discharged from the outlet 31o with little pressure loss, thereby achieving an even greater flow rate.

[0094] Since the inlet 31i and the outlet 31o are alternately formed along the circumferential direction on the same circumference, the boundary surface M separating the inlet 31i and the outlet 31o has a complex shape, and the length of the boundary surface M can be made longer.

[0095] Since a plurality of inlets 31i or a plurality of outlets 31o are formed along the radial direction, the number of inlets 31i and outlets 31o can be increased, thereby achieving a further increase in flow rate.

[0096] Since the multiple inlets 31i or the multiple outlets 31o formed at different positions along the radial direction have different diameters from each other, the inlets 31i or the outlets 31o can be made to an appropriate size according to their radial positions.

[0097] Specifically, since the diameter of the inlet 31i or the outlet 31o located radially outward is larger than the diameter of the inlet 31i or the outlet 31o located radially inward, the inlet 31i or the outlet 31o can be made larger depending on the radial position, thereby achieving a large flow rate.

[0098] In addition, the plate 314 is, for example, a thin plate with part of it removed by etching, and the inlet groove 31x and the outlet groove 31y are formed between the valve seat surface 31s, which is the remaining part after etching, so that the narrow boundary surface M can be formed into a complex shape.

[0099] The present invention is not limited to the above-described embodiment.

[0100] For example, the number, size, shape, and arrangement of the inlets 31i and the outlets 31o are not limited to those described in the above embodiment, and may be changed as appropriate. Specifically, the number of the inlets 31i or the outlets 31o may be more or less than that shown in the above embodiment. Also, the inlets 31i or the outlets 31o may have the same diameter as each other and may have a shape other than a circle.

[0101] In addition, in the above embodiment, the valve seat member 31 is formed by joining one plate 314 to the block body 313, but it may be formed by joining a plurality of plates 314 to the block body 313, or may be formed from a single member.

[0102] Furthermore, the method of attaching the plate 314 to the block body 313 is not necessarily limited to diffusion bonding, but may be, for example, bonding using a solvent or ultrasonic welding or heat welding.

[0103] Moreover, the boundary surface M does not necessarily have to have a labyrinth shape, but may have, for example, a shape obtained by machine learning or a shape that meanders regularly or irregularly.

[0104] Furthermore, the present invention is not limited to the above-described embodiment, and it goes without saying that various modifications are possible without departing from the spirit and scope of the present invention. [Explanation of symbols]

[0105] 100... Fluid control device 2. Flow passage block 21 .....Housing recess R1...Upstream flow path R2...downstream flow path 3. Fluid control valve 31 Valve seat member 31s...Valve seat surface 32 Valve body 32s...Seating surface 31i...Inlet 31o... Outlet 311...First internal passage 311a Main flow path 311b Branch channel 312...Second internal passage 312a...Outflow channel 312b...Confluence channel 31x...Inflow groove 31y...Outflow groove 313... Block letter 3131... Surface to be joined (top surface) 314···Plate 3141...joint surface L Pitch P1: First pocket Q1...1st narrow part P2: Second pocket Q2...2nd narrow part M...Boundary surface B Bridge

Claims

1. The valve seat surface on which the seating surface of the valve body sits, An inlet groove is recessed from the valve seat surface and has an inlet opening at its bottom, It has an outlet groove that is recessed from the valve seat surface and has an outlet opening at its bottom surface, A valve seat member wherein the valve seat surface between the inlet groove and the outlet groove is formed in a plan view without overlapping the inlet and outlet, and with a pitch narrower than the diameter of the inlet or outlet.

2. The valve seat member according to claim 1, wherein the inlet groove has a first pocket portion that overlaps the inlet portion and a first narrow portion that communicates with the first pocket portion and has a groove width narrower than the diameter of the inlet portion.

3. The valve seat member according to claim 1, wherein the outflow groove has a second pocket portion that overlaps the outlet portion and a second narrow portion that communicates with the second pocket portion and has a groove width narrower than the diameter of the outlet portion.

4. The valve seat member according to claim 1, wherein the valve seat surface between the inlet groove and the outlet groove is, in a plan view, an interface separating the inlet groove and the outlet groove, and the interface has a labyrinth shape with a pitch narrower than the diameter of the inlet or outlet.

5. The valve seat member according to claim 4, wherein the interface forms a concentric multiple annular shape that avoids the inlet and outlet.

6. The valve seat member according to claim 4, having a bridge that spans between the interface and the valve seat surface outside the interface and holds the interface.

7. The valve seat member according to claim 1, wherein one or more inlets and one or more outlets are formed on the same circumference.

8. The valve seat member according to claim 7, wherein the inlet and outlet are formed alternately along the circumferential direction on the same circumference.

9. The valve seat member according to claim 1, wherein a plurality of the inlets or a plurality of the outlets are formed along the radial direction.

10. The valve seat member according to claim 9, wherein the plurality of inlets or outlets formed at different positions along the radial direction have different diameters from each other.

11. The valve seat member according to claim 10, wherein the diameter of the inlet or outlet located radially outward is greater than the diameter of the inlet or outlet located radially inward.

12. A block body having the inlet and outlet formed therein, The valve seat member according to claim 1, comprising a plate attached to the block body and forming the inlet groove and the outlet groove together with the block body.

13. A valve seat member according to any one of claims 1 to 12, A fluid control valve comprising a valve body that moves toward and away from the valve seat member.

14. A fluid control valve according to claim 13, A flow sensor that measures the flow rate of the flow path in which the fluid control valve is provided, A fluid control device comprising: a control unit that controls the fluid control valve based on the measurement value of the flow sensor.

15. A method for manufacturing a valve seat member having a valve seat surface on which the seating surface of a valve body is seated, an inlet groove recessed from the valve seat surface with an inlet opening at its bottom, and an outlet groove recessed from the valve seat surface with an outlet opening at its bottom, A method for manufacturing a valve seat member, wherein the valve seat surface between the inlet groove and the outlet groove is formed in a plan view without overlapping with the inlet and outlet, and with a pitch narrower than the diameter of the inlet or outlet.

16. The method for manufacturing a valve seat member according to claim 15, wherein the valve seat surface is formed by etching.

17. A method for manufacturing a valve seat member according to claim 15 or 16, comprising diffusing bonding a block body on which the inlet and outlet are formed and a plate together with the block body that forms the inlet groove and the outlet groove.

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