Substrate processing system and article manufacturing method

Abstract

To provide a technique advantageous for simplifying a configuration of a substrate processing system that processes two or more substrates in parallel.SOLUTION: A substrate processing system comprises: a plurality of operation modules each performing operations to bring a curable composition on a substrate and a mold into contact with each other, and separating a cured product of the curable composition and the mold from each other; and one or more processing modules respectively inserted into or withdrawn from the plurality of operation modules through rotation operations. The one or more processing modules respectively perform processing of molding the curable composition on the substrate by using the mold on the plurality of operation modules, and the processing includes at least one of chemical processing and measurement processing.SELECTED DRAWING: Figure 5

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