Seal material and seal structure

Abstract

To provide a seal material capable of suppressing gas permeation while maintaining sealability, and to provide a seal structure.SOLUTION: A seal material A100 includes: an elastic member 1; and a contact member 2 for covering at least part of the elastic member 1. The material of the elastic member 1 is higher in elastic deformation than the material of the contact member 2, and the material of the contact member 2 is lower in gas permeation than the material of the elastic member 1. The contact member 2 includes: a first part 21 positioned on a z1 side in a z direction; and a second part 22 positioned on a z2 side on the side opposite to the z1 side in the z direction. In the case where a first object 3 approaches from the z1 side in the z direction, and a second object 4 approaches from the z2 side in the z direction, at least in a state where the elastic member 1 has elastically deformed, the first part 21 comes into contact with the first object 3, and the second part 22 comes into contact with the second object 4.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a sealing material and a sealing structure. [Background technology]

[0002] Sealing materials and sealing structures using the sealing materials are widely used as members and structures that block the flow of fluids such as gas. Patent Document 1 discloses an example of a conventional sealing material. The sealing material disclosed in the document has a convex portion on the upper side. This convex portion is made of a relatively soft resin or the like and has flexibility. When an object is pressed against the sealing material from above, the convex portion selectively deforms and comes into contact with the object. This improves the sealing performance. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2022-61342 A Summary of the Invention [Problem to be solved by the invention]

[0004] The protrusions, which are the portions that come into contact with the object, have an acute corner shape and a small dimension in the direction in which the gas passes, which raises concerns that the gas may permeate the material of the sealing material at the protrusions.

[0005] The present invention has been devised in light of the above circumstances, and an object of the present invention is to provide a sealing material and a seal structure that are capable of suppressing gas permeation while maintaining sealing properties. [Means for solving the problem]

[0006] A sealing material provided by a first aspect of the present invention comprises an elastic member and an abutment member covering at least a portion of the elastic member, wherein the material of the elastic member is more elastically deformable than the material of the abutment member and the material of the abutment member is less permeable to gas than the material of the elastic member, the abutment member has a first portion located on a first side in a first direction and a second portion located on a second side opposite the first side in the first direction, wherein when a first object approaches from the first side in the first direction and a second object approaches from the second side in the first direction, at least in a state in which the elastic member is elastically deformed, the first portion abuts against the first object and the second portion abuts against the second object.

[0007] In a preferred embodiment of the present invention, the elastic member has a first apex located on the first side in the first direction, and the first portion covers the first apex from the first side in the first direction.

[0008] In a preferred embodiment of the present invention, the elastic member has a first apex located on the first side in the first direction, and the first apex is located on the first side in the first direction than the first portion.

[0009] In a preferred embodiment of the present invention, the elastic member has a second apex located on the second side of the first direction, and the second portion covers the second apex from the first side in a second direction perpendicular to the first direction.

[0010] In a preferred embodiment of the present invention, the elastic member has a third apex located on a second side opposite the first side to the second apex in the second direction, and the abutment member has a third portion covering the third apex from the second side in the second direction.

[0011] In a preferred embodiment of the present invention, the second portion has a folded-back portion that is shaped to be positioned closer to the first side in the first direction as it approaches the first side in the second direction.

[0012] In a preferred embodiment of the present invention, the abutment member has a bent portion located between the first portion and the second portion.

[0013] A sealing structure provided by a second aspect of the present invention comprises the sealing material provided by the first aspect of the present invention, a first object having a top surface facing the second side in the first direction, and a second object having a bottom surface facing the first side in the first direction and a pair of side surfaces extending from both ends of the bottom surface to the first side in the first direction, wherein the first object and the second object are sealed by the first part abutting the top surface and the second part abutting at least one of the bottom surface and the side surfaces. Effect of the Invention

[0014] According to the present invention, gas permeation can be suppressed while maintaining the sealing performance.

[0015] Other features and advantages of the present invention will become more apparent from the following detailed description taken in conjunction with the accompanying drawings. [Brief description of the drawings]

[0016] [Figure 1] 1(a) to 1(c) are plan views showing examples of the overall shape of the sealing material according to the first embodiment of the present invention. [Diagram 2] 1(a), in which (a) shows the sealing material before compression, and (b) shows the seal structure including the compressed sealing material. FIG. [Diagram 3] 1A shows the sealing material before it is compressed, and FIG. 1B shows a modified example of the seal structure. [Figure 4] 5(a) to 5(d) are cross-sectional views showing modified examples of the cross-sectional configuration of the sealing material according to the first embodiment of the present invention. [Diagram 5] 5(a) to 5(c) are cross-sectional views showing examples of cross-sectional configurations of a sealing material according to a second embodiment of the present invention. [Figure 6]10(a) to 10(c) are cross-sectional views showing examples of cross-sectional configurations of a sealing material according to a third embodiment of the present invention. [Figure 7] 10(a) and (b) are cross-sectional views showing an example of the cross-sectional configuration of a sealing material according to a fourth embodiment of the present invention, and (c) is a cross-sectional view showing a seal structure according to the fourth embodiment of the present invention. [Figure 8] 13(a) and 13(b) are plan views showing modified examples of the overall shape of the sealing material according to the fourth embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

[0018] The terms "first", "second", "third", etc. in the present invention are used merely for identification purposes and are not intended to impose any order on their objects.

[0019] First Embodiment 1 and 2 show a sealing material and a seal structure according to a first embodiment of the present invention. The sealing material A100 of this embodiment includes an elastic member 1 and a contact member 2.

[0020] In these figures, the first direction of the present invention is defined as the z direction. The first side of the z direction is called the z1 side, and the second side opposite the first side of the z direction is called the z2 side. The second direction of the present invention perpendicular to the z direction is defined as the x direction. The first side of the x direction is called the x1 side, and the second side opposite the x1 side is called the x2 side. The direction perpendicular to the z direction and the x direction is defined as the y direction.

[0021] There is no limitation on the specific configuration or use of the seal material A100 and the seal structure B100. Examples of uses of the seal material A100 and the seal structure B100 include use for ensuring airtightness of a predetermined chamber in a semiconductor manufacturing process such as a film formation process, an etching process, or a heat treatment process.

[0022] The shape and size of the seal material A100 in plan view (z direction view) are not limited at all. In the example shown in FIG. 1(a), the seal material A100 is annular in plan view. In the example shown in FIG. 1(b), the seal material A100 is rectangular in plan view. In addition, the seal material A100 may be triangular, pentagonal or more polygonal in plan view. In the example shown in FIG. 1(c), the seal material A100 is linear in plan view. The seal material A100 may be curved, bent, or the like, depending on the shape of the part to be sealed. In the following description, the case of annular in plan view will be described. In FIG. 2, the x direction is the radial direction of the seal material A100, the x1 side is the center side, and the x2 side is the outside, and the same is true in other figures.

[0023] The elastic member 1 is a member for ensuring the sealing performance of the first object 3 and the second object 4 by generating sufficient elastic deformation when the seal material A100 is sandwiched and pressed between the first object 3 and the second object 4 in the z direction. The material of the elastic member 1 is selected to be more elastically deformable than the material of the abutting member 2. "More elastically deformable" means, for example, that the Young's modulus of elasticity is smaller than that of the material of the abutting member 2 and that deforms more when pressed under the same conditions. Examples of the material of the elastic member 1 include FFKM (perfluoroelastomer), FKM (fluororubber), FVMQ (fluorosilicone rubber), silicone rubber (VMQ), nitrile rubber (NBR), acrylic rubber (ACM), and ethylene propylene rubber (EPDM). The cross-sectional size of the elastic member 1 is not limited in any way. For example, when the outer diameter of the sealing material A100 in FIG. 1(a) is approximately 3 mm to 1000 mm, the cross-sectional size of the elastic member 1 in the z direction is approximately 1 mm to 10 mm, and the size in the x direction is approximately 1 mm to 10 mm.

[0024] The elastic member 1 of this embodiment has a first apex 11, a second apex 12 and a third apex 13.

[0025] The first apex 11 is a portion of the elastic member 1 that is located closest to the z1 side in the z direction. There are no limitations on the specific shape of the first apex 11, and in the illustrated example, the first apex 11 is an acute-angled corner protruding toward the z1 side in the z direction, or a shaped portion having a slight curved surface at the tip of the corner.

[0026] The second apex 12 is located on the z2 side of the elastic member 1 in the z direction, and in the illustrated example, it is located closest to the z2 side. The second apex 12 is also located closest to the x1 side in the x direction. The specific shape of the second apex 12 is not limited in any way, and in the illustrated example, the second apex 12 is an acute-angled corner protruding toward the x1 side in the x direction, or a shaped portion having a slight curve at the tip of the corner. In the illustrated example, the angle of the second apex 12 is larger than the angle of the first apex 11.

[0027] The third apex 13 is located on the z2 side of the elastic member 1 in the z direction, and in the illustrated example, it is located closest to the z2 side together with the second apex 12. The third apex 13 is also located closest to the x2 side in the x direction. The specific shape of the third apex 13 is not limited in any way, and in the illustrated example, the third apex 13 is an acute-angled corner protruding toward the x2 side in the x direction, or a shaped portion having a slight curved surface at the tip of the corner. In the illustrated example, the angle of the third apex 13 is larger than the angle of the first apex 11 and is equal to the angle of the second apex 12.

[0028] The cross-sectional shape of the elastic member 1 having these first vertex 11, second vertex 12 and third vertex 13 is not limited in any way, and in the example shown, it is triangular, for example, an isosceles triangle with the first vertex 11 as the vertex angle.

[0029] The contact member 2 is a member for suppressing gas permeation by contacting the first object 3 and the second object 4 when the seal material A100 is sandwiched and pressed by the first object 3 and the second object 4 in the z direction. The material of the contact member 2 is selected to be less permeable to gas than the material of the elastic member 1. When the seal material A100 is used, for example, in the above-mentioned film forming process, the gases to be suppressed from permeating are, for example, air, nitrogen (N2), hydrogen (H2), oxygen (O2), ammonia gas (NH3), etc. In addition, the material of the contact member 2 is preferably one that is inferior in elastic deformation to the material of the elastic member 1, but generates significant elastic deformation in the usage state described below. Examples of the material of the contact member 2 include metals, resins, etc. Examples of metals include aluminum, copper, iron, nickel, molybdenum, chromium, etc., or alloys of any of these, such as stainless steel, Inconel (registered trademark), Hastelloy (registered trademark), etc. Examples of the resin include fluororesins such as polytetrafluoroethylene (PTFE), polyetheretherketone (PEEK), liquid crystal polymer (LCP), polyimide (PI), polyamideimide (PAI), etc. In this example, the case where the material of the contact member 2 is metal will be described. The thickness of the contact member 2 is not limited in any way and is, for example, about 0.05 mm to 0.5 mm.

[0030] There is no limitation on the relationship between the elastic member 1 and the abutting member 2. The elastic member 1 and the abutting member 2 may simply be in detachable contact with each other, or the elastic member 1 may be fitted into the abutting member 2 in a compressed state, or may be joined with an adhesive or the like, or the elastic member 1 may be formed on the inner surface of the abutting member 2 by a method such as coating.

[0031] The contact member 2 of the present embodiment has a first portion 21, a second portion 22 and a third portion .

[0032] The first portion 21 is a portion of the contact member 2 that is located closest to the z1 side in the z direction. In the illustrated example, the first portion 21 is located on the z1 side of the first apex 11 in the z direction, and covers the first apex 11 from the z1 side in the z direction. The specific shape of the first portion 21 is not limited in any way, and in the illustrated example, it is an acute-angled bent portion that corresponds to the shape of the first apex 11.

[0033] The second part 22 is located on the z2 side of the abutting member 2 in the z direction, and in the illustrated example, it is located closest to the z2 side. The second part 22 is also the part of the abutting member 2 located closest to the x1 side in the x direction. In the illustrated example, the second part 22 covers the second apex 12 from the x1 side in the x direction. The specific shape of the second part 22 is not limited in any way, and in the illustrated example, it is the end of an inclined part along the surface of the second apex 12 on the x1 side in the x direction. The position of the second part 22 in the z direction is the same as the position of the second apex 12 in the z direction.

[0034] The third part 23 is located on the z2 side of the abutting member 2 in the z direction, and in the illustrated example, it is located closest to the z2 side together with the second part 22. The second part 22 is the part of the abutting member 2 located closest to the x2 side in the x direction. In the illustrated example, the third part 23 covers the third apex 13 from the x2 side in the x direction. The specific shape of the third part 23 is not limited in any way, and in the illustrated example, it is an end of an inclined part along the surface of the third apex 13 on the x2 side in the x direction. The position of the third part 23 in the z direction is the same as the position of the third apex 13 in the z direction, and is the same as the position of the second part 22 in the z direction.

[0035] There is no limitation on the cross-sectional shape of the contact member 2 having the first portion 21, the second portion 22, and the third portion 23. In the illustrated example, the contact member 2 has an inclined portion connecting the first portion 21 and the second portion 22, and an inclined portion connecting the first portion 21 and the third portion 23, and has a triangular mountain shape that follows the elastic member 1 as a whole.

[0036] Next, the configuration of a seal structure B100 using the seal material A100 will be described with reference to FIGS.

[0037] First, as shown in FIG. 2(a), the sealing material A100 is loaded into the second object 4. The specific configuration of the second object 4 is not limited in any way, and in this embodiment, the second object 4 has a bottom surface 41 and a pair of side surfaces 42. The bottom surface 41 is located on the z2 side in the z direction and faces the z1 side in the z direction. The pair of side surfaces 42 extend from both ends of the bottom surface 41 in the x direction to the z1 side in the z direction and are parallel to the z direction. When the sealing material A100 has the overall shape shown in FIG. 1(a), the bottom surface 41 and the pair of side surfaces 42 form a circular groove portion in a plan view, and the cross-sectional shape is a so-called groove. The sealing material A100 is loaded so as to be in contact with the bottom surface 41 between the pair of side surfaces 42. In the illustrated example, the distance between the pair of side surfaces 42 is greater than the size of the sealing material A100 in the x direction, for example, the distance between the pair of side surfaces 42 is greater than the size of the sealing material A100 in the x direction. It is about 1.01 to 2.0 times.

[0038] Next, as shown in FIG. 2(b), the first object 3 approaches relatively from the z1 side in the z direction, and the second object 4 approaches relatively from the z2 side in the z direction, sandwiching the seal material A100. The specific shape of the first object 3 is not limited in any way, and in this embodiment, it has a top surface 31. The top surface 31 is a surface facing the z2 side in the z direction, and in the illustrated example, it is a flat surface. When the first object 3 and the second object 4 approach each other, the first part 21 abuts against the top surface 31. When the first object 3 and the second object 4 are further brought closer to each other, a pressing force is applied that compresses the seal material A100 in the z direction. As a result, the elastic member 1 and the abutting member 2 of the seal material A100 are elastically deformed, for example, into the shape illustrated in the figure. The seal material A100 as a whole is reduced in size in the z direction and expanded in size in the x direction. As a result, a first contact portion Cp1, a second contact portion Cp2, and a third contact portion Cp3 are formed as contact portions between the sealing material A100 and the first object 3 and the second object 4.

[0039] The first contact portion Cp1 is a portion where the first portion 21 contacts the top surface 31. The second contact portion Cp2 is a portion where the second portion 22 contacts the second object 4, and the second portion 22 contacts at least one of the bottom surface 41 and the side surface 42. The third contact portion Cp3 is a portion where the third portion 23 contacts the second object 4, and the third portion 23 contacts at least one of the bottom surface 41 and the side surface 42.

[0040] Next, the functions of the seal material A100 and the seal structure B100 will be described.

[0041] 2, when the seal material A100 is compressed in the z direction from the state shown in FIG. 2(a) to the state shown in FIG. 2(b), a first contact portion Cp1 and a second contact portion Cp2 are formed on both sides in the z direction. At the first contact portion Cp1 and the second contact portion Cp2, the contact member 2 and the first object 3 or the second object 4 are in contact. The material of the contact member 2 is less permeable to gas than the material of the elastic member 1. Therefore, gas permeation can be suppressed while maintaining the sealing performance.

[0042] The seal material A100 further includes a third portion 23. As a result, as shown in FIG. 2(b), a second contact portion Cp2 and a third contact portion Cp3 are formed on both sides in the x direction. This can further promote the maintenance of the sealing properties and the suppression of gas permeation.

[0043] A first contact portion Cp1 is formed by the abutment between the top surface 31 of the first object 3 and the first portion 21. The first portion 21 constitutes the tip of the abutting member 2 on the z1 side in the z direction, and is an acute-angled bent portion in this embodiment. This causes the pressing force applied when the abutting member 2 abuts against the top surface 31 to be concentrated on the first portion 21, making it possible to more reliably achieve the elastic deformation of the abutting member 2 as shown in FIG. 2(b).

[0044] The second object 4 has a bottom surface 41 and a pair of side surfaces 42. This allows the second contact portion Cp2 and the third contact portion Cp3 to contact in at least one of the x direction and the z direction, and is expected to contact in both the x direction and the z direction. This further enhances the maintenance of the sealing property and the suppression of gas permeation.

[0045] The contact member 2 is made of metal, which makes it possible to more reliably suppress gas permeation. The contact member 2 can be formed by bending a relatively thin metal plate material, etc. This allows the contact member 2 to be designed and manufactured to be elastically deformable and not to undergo unintended plastic deformation when in use with an expected amount of deformation.

[0046] Since the cross-sectional shape of the contact member 2 is a triangular mountain shape that follows the elastic member 1, when it is compressed in the z direction, elastic deformation easily occurs such that the second portion 22 and the third portion 23 move away from each other in the x direction and the first portion 21 and the second portion 22 and the third portion 23 move closer to each other in the z direction. This makes it possible to elastically deform the contact member 2 and, in turn, the sealing material A100 with less pressing force, which is preferable for suppressing gas permeation while maintaining sealing properties.

[0047] 3 to 8 show modified examples and other embodiments of the present invention. In these figures, elements that are the same as or similar to those in the above-mentioned embodiment are given the same reference numerals as those in the above-mentioned embodiment. Furthermore, the configurations of the various parts in each modified example and each embodiment can be appropriately combined with each other as long as no technical contradiction occurs.

[0048] <Modification of seal structure of first embodiment> FIG. 3 shows a modified example of the seal structure B100. In this modified example, the configuration of the second object 4 shown in FIG. 3(a) is different from the above-mentioned example. In this example, the pair of side surfaces 42 are inclined with respect to the z direction. The distance in the x direction between the pair of side surfaces 42 becomes smaller from the z2 side toward the z1 side in the z direction. In addition, in the illustrated example, the distance in the x direction between the pair of side surfaces 42 on the z1 side in the z direction may be smaller than the size in the x direction of the seal material A100 on the z2 side in the z direction. In such a case, in order to load the seal material A100 into the second object 4, for example, the seal material A100 may be inserted between the pair of side surfaces 42 while being compressed in the x direction.

[0049] 3(b), the first object 3 and the second object 4 approach each other in the z direction. This applies a pressing force that compresses the seal material A100 in the z direction. This causes the seal material A100 to come into contact with the first object 3 and the second object 4, forming a first contact portion Cp1, a second contact portion Cp2, and a third contact portion Cp3.

[0050] This example also makes it possible to suppress gas permeation while maintaining the sealing performance. Moreover, this example makes it possible to suppress the separation of the seal material A100 from the second object 4 after the loading of the seal material A100 into the second object 4 shown in FIG.

[0051] <Modification of sealing material of first embodiment> FIG. 4 shows a modified example of the seal material A100. In the seal material A101 shown in FIG. 4(a), the material of the contact member 2 is resin. In the seal material A102 shown in FIG. 4(b), the material of the first part 21, the second part 22, and the third part 23 of the contact member 2 is metal, and the material of the inclined part connecting the first part 21 and the second part 22 and the inclined part connecting the first part 21 and the third part 23 is resin. Even in this example, the resin part of the contact member 2 is less permeable to gas than the elastic member 1, so that the permeation of gas can be suppressed. In addition, since the contact member 2 contains resin, larger elastic deformation is possible and unintended plastic deformation can be suppressed.

[0052] In the sealing material A103 shown in Fig. 4(c), the contact member 2 has a coating layer 29. The coating layer 29 is provided on the outer surface of the main body of the contact member 2 made of, for example, metal. The material of the coating layer 29 is not particularly limited, and examples of the material include a configuration that suppresses chemical changes such as oxidation of the contact member 2, or a configuration that more reliably suppresses the occurrence of unintended gaps between the contact member 2 and the first object 3 and between the contact member 2 and the second object 4. Examples of the material of the coating layer 29 include various materials such as resins such as fluororesin and polyimide (PI), and elastomers such as FFKM (perfluoroelastomer) and FKM (fluororubber).

[0053] In the sealing material A104 shown in FIG. 4(d), the elastic member 1 has a recess 15. The recess 15 is a portion recessed from the surface on the z2 side in the z direction of the elastic member 1 toward the z1 side in the z direction, and is, for example, a triangular groove shape. According to this example, when the sealing material A104 is compressed in the z direction, the elastic member 1 shrinks in the z direction and can be elastically deformed to a greater extent so as to expand in the x direction. As can be seen from this example, the cross-sectional shape of the elastic member 1 is not limited to a so-called solid shape, and may be a shape having a void portion including the recess 15.

[0054] <Second embodiment> Fig. 5 shows a sealing material according to a second embodiment of the present invention. The sealing material A200 shown in Fig. 5(a) differs from the above-mentioned examples in the configuration of the second portion 22 and the third portion 23 of the contact member 2. In this example, the second portion 22 has a folded portion 221. The folded portion 221 is a shaped portion that is positioned on the z1 side in the z direction as it approaches the x1 side in the x direction. In the illustrated example, the folded portion 221 has a cross-sectional shape of an arc.

[0055] Further, the third portion 23 has a third portion 231. The third portion 231 is a shape portion that is located on the z1 side in the z direction as it approaches the x2 side in the x direction. In the illustrated example, the third portion 231 has a cross-sectional shape of an arc.

[0056] When the sealing material A200 is loaded into the second object 4 shown in FIG. 2 or FIG. 3 to form a seal structure, the folded portion 221 (second portion 22) is likely to come into contact with both the bottom surface 41 and the side surface 42. This allows the second contact portion Cp2 to be configured to include two contact points. Also, the third portion 231 (third portion 23) is likely to come into contact with both the bottom surface 41 and the side surface 42. This allows the third contact portion Cp3 to be configured to include two contact points. Therefore, gas permeation can be more reliably suppressed.

[0057] In the sealing material A201 shown in FIG. 5(b), the abutting member 2 has two bent portions 25. The two bent portions 25 are provided between the first portion 21 and the second portion 22, and between the first portion 21 and the third portion 23, respectively. The bent portions 25 are bent to have a convex shape on the side opposite the elastic member 1 in the x direction. When the sealing material A201 is compressed in the z direction, the abutting member 2 is likely to be elastically deformed so as to bend at the bent portions 25. This makes it possible to prevent unintended plastic deformation from occurring due to distorted deformation of unintended portions of the abutting member 2.

[0058] The sealing material A202 shown in Fig. 5(c) differs from the above-mentioned example in the configuration of the folded portion 221 and the third portion 231. In this example, the folded portion 221 and the third portion 231 have a relatively sharp folded shape and a flat shape inclined with respect to the z direction. With this configuration, for example, in the second object 4 shown in Fig. 2 or 3, when the distance in the x direction between a pair of side surfaces 42 is smaller than the size of the sealing material A202 in the x direction, the folded portion 221 and the third portion 231 having flat and inclined shaped portions function as a so-called wedge, so that the sealing material A202 can be inserted between the pair of side surfaces 42 more smoothly.

[0059] <Third embodiment> Fig. 6 shows a sealing material according to a third embodiment of the present invention. The sealing material A300 shown in Fig. 6(a) differs from the above-mentioned examples in the configuration of the contact member 2. In this example, the contact member 2 has a first portion 21, a second portion 22, and a third portion 23 that are separated from each other. In other words, slits are formed between the first portion 21 and the second portion 22 and the third portion 23.

[0060] In this example, when the seal material A300 is loaded on the first object 3 and the second object 4 to form a seal structure, the first contact portion Cp1, the second contact portion Cp2, and the third contact portion Cp3 are formed, and the gas permeation can be suppressed. In addition, since the first portion 21 is separated from the second portion 22 and the third portion 23, when the seal material A300 is compressed in the z direction, the elastic member 1 can be elastically deformed more greatly even if the abutting member 2 does not exhibit significant elastic deformation in the z direction. For example, elastic deformation such that the elastic member 1 bulges outward is allowed from the slits between the first portion 21 and the second portion 22 and the third portion 23. In addition, the size of the elastic member 1 in the x direction between the first portion 21 and the second portion 22 and the third portion 23 is significantly larger than the size of the first top portion 11 in the x direction, for example. This maintains the effect of suppressing the gas permeation.

[0061] In the sealing material A301 shown in FIG. 6(b), the first portion 21 is separated from the second portion 22 and the third portion 23, similar to the sealing material A300. Meanwhile, the second portion 22 and the third portion 23 are connected on the z2 side in the z direction. The elastic member 1 is entirely covered on the z2 side in the z direction by the contact member 2. In this example, when the sealing material A301 is compressed in the z direction, the elastic member 1 can be sufficiently elastically deformed even if the contact member 2 does not elastically deform so that the second portion 22 and the third portion 23 are separated in the x direction. In addition, in this example, the second contact portion Cp2 and the third contact portion Cp3 can be formed to include the entire area between the second portion 22 and the third portion 23 of the contact member 2.

[0062] In the seal material A302 shown in FIG. 6(c), the abutting member 2 has the first portion 21 and the second portion 22, but does not have the above-mentioned third portion 23. The abutting member 2 has a portion on the x2 side in the x direction that is shorter than a portion on the x1 side in the x direction across the first portion 21, and does not reach the third apex 13. In this example, when the seal material A302 is compressed in the z direction, the above-mentioned first contact portion Cp1 and second contact portion Cp2 are formed. This makes it possible to suppress gas permeation on the z1 side and z2 side in the z direction. In addition, since the x2 side portion in the x direction of the abutting member 2 is significantly shorter, when the seal material A302 is compressed in the z direction, elastic deformation is induced such that the entire abutting member 2 falls toward the x2 side in the x direction when the seal material A302 is compressed in the z direction. In addition, the elastic member 1 is allowed to be elastically deformed so as to protrude from the abutting member 2 toward the x1 side in the x direction. Therefore, the entire seal material A302 can be elastically deformed to a greater extent.

[0063] <Fourth embodiment> Fig. 7 shows a seal member and a seal structure according to a fourth embodiment of the present invention. In the seal material A400 shown in Fig. 7(a), the first apex 11 is located on the z1 side in the z direction relative to the first portion 21. The contact member 2 has an opening 211. The opening 211 is provided on the z1 side of the contact member 2 in the z direction, and is a slit penetrating in the z direction. The first apex 11 protrudes from the opening 211 to the z1 side in the z direction. In this example, the first portion 21 is divided into the x1 side and the x2 side in the x direction.

[0064] 7(b), the elastic member 1 further has a protrusion 16. The protrusion 16 is a portion that bulges out toward the z2 side in the z direction, and protrudes further toward the z2 side in the z direction than the second portion 22 and the third portion 23.

[0065] FIG. 7(c) shows a seal structure B400 using the seal material A400 or the seal material A401. When the seal material A400 or the seal material A401 is loaded into the second object 4 and the first object 3 and the second object 4 are brought close to each other, the top surface 31 first comes into contact with the first apex 11. When the seal material A401 is used, the bottom surface 41 first comes into contact with the convex portion 16. When the first object 3 and the second object 4 are brought close to each other, the first apex 11 is crushed due to the elastic deformation of the elastic member 1, and the top surface 31 comes into contact with the first portion 21. When the seal material A401 is used, the convex portion 16 is crushed, and the second portion 22 and the third portion 23 come into contact with the bottom surface 41.

[0066] This embodiment also makes it possible to suppress gas permeation while maintaining the sealing performance. Moreover, the first part 21 only needs to be configured to abut against the top surface 31 with at least the elastic member 1 in an elastically deformed state when the first object 3 approaches. Similarly, the second part 22 and the third part 23 only need to be configured to abut against the bottom surface 41 with at least the elastic member 1 in an elastically deformed state when the second object 4 approaches.

[0067] Fig. 8 shows a modification of the planar shape of the sealing materials A400 and A401 of the fourth embodiment. In the sealing material A410 of this modification shown in Fig. 8(a), the abutting member 2 is divided into a plurality of individual regions 2a. The plurality of individual regions 2a are arranged along the circumferential direction of the sealing material A410. A predetermined gap is provided between adjacent individual regions 2a.

[0068] Since the contact member 2 is composed of a plurality of individual regions 2a, when the sealing material A410 is compressed by the first object 3 and the second object 4, the unevenness of the contact between the contact member 2 and the first object 3 and the second object 4 in the circumferential direction can be further reduced. Also, in the sealing materials A400 and A401, the first apex 11 protrudes toward the z1 side in the z direction more than the first portion 21. As a result, in the gap between adjacent individual regions 2a, the contact member 2 does not contact the top surface 31 of the first object 3, but the first apex 11 does contact the top surface 31. As a result, the sealing performance can be maintained even in the gap between adjacent individual regions 2a.

[0069] In the seal material A411 of the modification shown in FIG. 8(b), the contact member 2 is divided into a plurality of individual regions 2a and a plurality of individual regions 2b. The individual region 2a is, for example, a portion on the x2 side of the contact member 2 in the x direction in FIG. 7(a). The individual region 2b is, for example, a portion on the x1 side of the contact member 2 in the x direction in FIG. 7(a). As in the seal material A410, the plurality of individual regions 2a are arranged along the circumferential direction, and a predetermined gap is provided between adjacent individual regions 2a. Similarly, the plurality of individual regions 2b are arranged along the circumferential direction, and a predetermined gap is provided between adjacent individual regions 2b. In this modification, the gaps between the plurality of individual regions 2a and the gaps between the plurality of individual regions 2b are arranged at positions shifted from each other in the circumferential direction.

[0070] According to this modification, at the contact portion between the seal material 411 and the above-mentioned top surface 31, at least one of the first portion 21 of the individual region 2a and the first portion 21 of the individual region 2b contacts the top surface 31 over the entire circumference in the circumferential direction. This makes it possible to more reliably suppress gas permeation compared to the seal material A410.

[0071] The sealing material and the seal structure according to the present invention are not limited to the above-mentioned embodiment. The specific configurations of the components of the sealing material and the seal structure according to the present invention can be freely designed in various ways. [Explanation of symbols]

[0072] A100, A101, A102, A103, A104, A200, A201, A202, A300, A301, A302, A400, A401, A410, A411: Sealing material B100, B400: Seal structure 1: Elastic material 2: Contact member 2a, 2b: Individual piece area 3: First object 4: Second object 11: 1st top 12:Second top 13:Third top 15: Recess 16: Convex 21: Part 1 22: Part 2 23: Part 3 25: Bend 29: Covering layer 31: Top 41: Bottom 42: Side 211: Opening 221: Folded part 231: Part 3 Cp1: 1st contact part Cp2: 2nd contact part Cp3: 3rd contact part

Claims

1. An elastic member; a contact member covering at least a portion of the elastic member, The material of the elastic member is more elastically deformable than the material of the contact member, the material of the contact member is less permeable to gas than the material of the elastic member, the contact member has a first portion located on a first side in a first direction and a second portion located on a second side opposite to the first side in the first direction, A sealing material, wherein when a first object approaches from the first side in the first direction and a second object approaches from the second side in the first direction, the first portion abuts against the first object and the second portion abuts against the second object, at least when the elastic member is in an elastically deformed state.

2. the elastic member has a first apex located on the first side in the first direction, The sealing material according to claim 1 , wherein the first portion covers the first apex from the first side in the first direction.

3. the elastic member has a first apex located on the first side in the first direction, The sealing material according to claim 1 , wherein the first apex is located on the first side in the first direction relative to the first portion.

4. the elastic member has a second apex located on the second side in the first direction, The sealing material according to claim 1 , wherein the second portion covers the second apex from a first side in a second direction perpendicular to the first direction.

5. the elastic member has a third apex located on a second side opposite to the first side with respect to the second apex in the second direction, The sealing material according to claim 4 , wherein the contact member has a third portion covering the third apex from the second side in the second direction.

6. The sealing material according to claim 4 , wherein the second portion has a folded-back portion that is shaped to be positioned closer to the first side in the first direction as it approaches the first side in the second direction.

7. The sealing material according to claim 4 , wherein the abutting member has a bent portion located between the first portion and the second portion.

8. A sealing material according to any one of claims 1 to 7, The first object has a top surface facing the second side in the first direction; the second object having a bottom surface facing the first side in the first direction and a pair of side surfaces extending from both ends of the bottom surface toward the first side in the first direction, The first portion abuts against the top surface, and A seal structure, wherein the second portion abuts against at least one of the bottom surface and the side surface, thereby sealing between the first object and the second object.

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