Reducing the size of LIDAR system control assemblies

Abstract

The LIDAR system includes one or more optical splitters and a plurality of optical combiners. The LIDAR system also includes a plurality of optical paths through which an optical signal passes. The optical paths include delay paths each extending from one of the one or more splitters to one of the optical combiners. The optical paths include expedited paths each extending from one of the splitters to one of the optical combiners. Each optical combiner includes one of the delay paths and one of the expedited paths extending to the optical combiner. The delay paths and expedited paths are configured such that the delay paths to each optical combiner are longer than the expedited paths to the same optical combiner. Each delay path includes a common portion and an isolated portion. The common portion of each delay path is shared by the delay paths. In contrast, the isolated portions of the delay paths are not shared with other delay paths.

Description

Related Applications

[0001] This application is a continuation of U.S. Patent Application No. 17 / 244,869, entitled “REDUCING SIZE OF LIDAR SYSTEM CONTROL ASSEMBLY,” filed April 29, 2021, and is incorporated in its entirety.

[0002] The present invention relates to optical devices, and in particular to LIDAR assemblies.

[0003] There is an increasing commercial demand for LIDAR systems that can be used in applications such as ADAS (Advanced Driver Assistance Systems) and AR (Augmented Reality). A LIDAR (Light Detection and Ranging) system typically provides a system output signal that is reflected by objects outside the LIDAR system. At least a portion of the reflected optical signal returns to the LIDAR system. The LIDAR system directs the received optical signal to a light sensor that converts the optical signal into an electrical signal. Electronics can use the output of the light sensor to quantify LIDAR data indicative of line-of-sight velocity and / or distance between the object and the LIDAR system.

[0004] Many LIDA systems adjust the frequency of the system output signal versus time, linearly or to other well-defined waveforms to enable accurate measurement of the LIDAR data. In such cases, the LIDAR system may monitor the frequency of the system output signal and adjust the frequency in response to the monitored frequency to achieve a desired waveform shape. Systems used to monitor the frequency of the system output signal may require one or more waveguides that are undesirably long to achieve the desired results. Because of the length of the waveguides, these systems often occupy a large portion of the available space on the LIDAR chip. As a result, there is a need for an improved system for monitoring the frequency of a LIDAR system output signal. Overview

[0005] The LIDAR system includes one or more optical splitters and a plurality of optical combiners. The LIDAR system also includes a plurality of optical paths through which an optical signal passes. The optical paths include delay paths each extending from one of the one or more splitters to one of the optical combiners. The optical paths also include expedited paths each extending from one of the splitters to one of the optical combiners. Each optical combiner includes one of the delay paths and one of the expedited paths extending to the optical combiner. The delay paths and expedited paths are configured such that the delay paths to each optical combiner are longer than the expedited paths to the same optical combiner. Each delay path includes a common portion and an isolated portion. The common portion of each delay path is shared by the delay paths. In contrast, the isolated portions of the delay paths are not shared with other delay paths.

[0006] Another embodiment of a LIDAR system includes an optical splitter and an optical combiner. The LIDAR system also includes a plurality of optical paths through which an optical signal passes during operation of the LIDAR system. The optical paths include a delay path extending from the splitter to the optical combiner. The optical paths also include a prompt path extending from the splitter to the optical combiner. The delay path and the prompt path are configured such that the delay path is longer than the prompt path. The delay path includes a feedback element configured to receive a delay path optical signal traveling in a first direction along the delay path and to feed the delay path optical signal back to the delay path traveling in a second direction opposite the first direction. In some cases, the delay path includes a spiral waveguide. [Brief description of the drawings]

[0007] FIG. 1A is a top view of the LIDAR chip.

[0008] FIG. 1B shows a light source that includes multiple laser sources.

[0009] FIG. 2 is a top view of the LIDAR chip.

[0010] FIG. 3 is a top view of the LIDAR chip.

[0011] FIG. 4 is a top view of the LIDAR chip.

[0012] FIG. 5 is a top view of a LIDAR adapter in optical communication with the LIDAR chip.

[0013] FIG. 6 is a top view of a LIDAR system including the LIDAR chip and electronics of FIG. 1A and the LIDAR adapter of FIG. 5 on a common support.

[0014] FIG. 7A shows an example of a processing element applied to a LIDAR system.

[0015] FIG. 7B provides a schematic diagram of the electronics applied to a processing element constructed according to FIG. 7A.

[0016] FIG. 7C is a graph of frequency versus time with triangular frequency tuning of the system output signal.

[0017] FIG. 7D shows another example of a processing element applied to a LIDAR system.

[0018] FIG. 7E provides a schematic diagram of the electronics applied to a processing element constructed according to FIG. 7D.

[0019] Figures 8A and 8B show examples of control elements adapted in whole or in part to the control elements disclosed in connection with Figures 1A to 4. Figure 8A shows an interface between optical components and a light sensor that may be located on a LIDAR chip.

[0020] FIG. 8B is a schematic diagram of the relationship between the electronics and light sensors included in the LIDAR chip.

[0021] FIG. 8C is a graph showing the amplitude of the in-phase and quadrature components of the signal on the same time axis as the frequency of the system output signal.

[0022] FIG. 8D shows an example of a process variable discrimination element applied to the electronics of a LIDAR system.

[0023] FIG. 8E illustrates another example of a process variable discrimination element applied to the electronics of a LIDAR system.

[0024] FIG. 9 is a top view of a portion of a waveguide that includes a helical waveguide.

[0025] Figure 10A is a cross-sectional view of a portion of a LIDAR chip containing a waveguide on a silicon-on-insulator platform.

[0026] Figures 10B to 10D show an example of a feedback device built on a silicon-on-insulator platform and applied on a LIDAR chip built according to Figures 2 and 4. Figure 10B is a top view of a portion of the LIDAR chip equipped with a feedback device.

[0027] FIG. 10C is a cross-sectional view of feedback device 82 taken along the line labeled C in FIG. 10B.

[0028] FIG 10D is a cross-sectional view of feedback device 82 taken along the line labeled C in FIG 10B.

[0029] The LIDAR system is configured to output a plurality of different system output signals, each carrying a different channel, and has a plurality of control mechanisms each configured to control the frequency versus time pattern of at least one of the system output signals.

[0030] The LIDAR system also includes one or more optical splitters, a plurality of optical combiners, and a plurality of optical paths through which the optical signal passes. The optical paths include delay paths, each of which extends from one of the one or more splitters to one of the optical combiners. The optical paths also include promotion paths, each of which extends from one of the splitters to one of the optical combiners. One of the delay paths and one of the promotion paths extend to each optical combiner.

[0031] During operation of the LIDAR system, the delay path signal may pass through the delay path and the facilitate path signal may pass through the facilitate path. The different delay path signals may each carry a different one of the channels. The different facilitate path signals may each carry a different one of the channels. The delay path and the facilitate path may be configured such that an optical combiner receives each of the delay path signals and the facilitate path signals carrying the same channel.

[0032] The delay path to each optical combiner is longer than the forward path to the same optical combiner, and the increase in the length of the delay path is sufficient to cause a delay between the time the delay path signal is received at each optical combiner and the time the forward path signal is received at that optical combiner.

[0033] Each delay path has a common portion and an isolated portion. The common portion of each delay path is shared by multiple delay paths. As a result, the delay path signals can be combined at the common portion of the delay path. In contrast, the isolated portion of the delay path is not shared with other delay paths.

[0034] The common portion of the delay paths can be a first indication of the length difference between the delay paths and the forward path. As a result, the common portion of the delay paths can be a first indication of the desired delay between the delay path signals and the forward path signals received at each optical combiner. The delay path signals can be combined at the common portion of the delay paths so that the common portion of the delay paths can provide the desired delay for each of the delay path signals. As a result, a path common to multiple signals, each carrying a different channel, can provide the desired delay for each signal. Because the common path can be used to provide this delay for multiple different signals, the amount of space that the delay paths require to create the desired delay in the LIDAR system is reduced.

[0035] One or more optical combiners may be included in each control mechanism. The control mechanism may utilize delays between the delay path signals and the expedited path signals in the optical combiners to control at least one frequency versus time pattern of the system output signal. Reducing the space required for the delay paths reduces the space required for the control mechanisms. Because the system output signals controlled by each control mechanism may carry different channels, reducing the required size of the control mechanisms associated with each different channel allows for an increased number of system output signals to be output from the LIDAR system without unrealistically increasing the required space of the control mechanisms required to control the additional system output signals.

[0036] The LIDAR system includes a control mechanism configured to control a process variable of a system output signal. In some cases, the control mechanism is a control loop, such as a feedback control loop. The system output signal is an optical signal output by the LIDAR system that is reflected by an object external to the LIDAR system and then returns to the LIDAR system. The LIDAR system can use the reflected light to generate LIDAR data of the object. Examples of process variables that can be controlled by the control mechanism include the frequency and / or phase of the system output signal.

[0037] The control mechanism generates a control signal that carries data indicative of a value of the process variable. The control signal is generated from a process variable signal that includes an in-phase component and a quadrature component. The process variable signal pulsates as a result of contributions from signals of different frequencies. The use of the quadrature component allows the frequency of the control signal to be increased compared to the frequency of the control signal that would result if the process variable signal included only an in-phase component. Increasing the frequency of the control signal reduces the pulsation frequency of the process variable signal required to measure the value of the process variable. In conventional systems, the pulsation frequency is increased by increasing the length of one of the waveguides in the Mach-Zehnder interferometer. The quadrature component reduces the required pulsation frequency, and therefore also reduces the required length of one of the waveguides in the Mach-Zehnder interferometer. Thus, the quadrature component can reduce the amount of space on the LIDAR chip that is occupied by the control mechanism.

[0038] FIG. 1A is a top view of a LIDAR chip including an optical integrated circuit. The optical circuit can include a light source 10 that outputs an outgoing LIDAR signal. The outgoing LIDAR signal includes one or more different channels, each of different wavelengths. The wavelengths of the channels can be periodically spaced in that the increase in wavelength from one channel to the next (channel spacing) is constant or substantially constant. In some cases, the channel spacing is constant and is greater than 0.5 nm, 1 nm, 3 nm, or 5 nm, and / or less than 10 nm, 15 nm, or 20 nm. In some cases, the number of channels N is greater than 2, 4, or 8, and / or less than 16, 32, or 64. Suitable light sources 10 for generating multiple channels with periodically spaced wavelengths include, but are not limited to, comb lasers, one or more single wavelength lasers, and / or one or more multi-wavelength lasers with outputs multiplexed into the outgoing LIDAR signal.

[0039] The LIDAR chip also includes a utility waveguide 12 that receives the outgoing LIDAR signal from the light source 10. The utility waveguide 12 terminates at a facet 14 and carries the outgoing LIDAR signal to the facet 14. The facet 14 can be positioned such that the outgoing LIDAR signal passing through the facet 14 exits the chip to serve as a LIDAR output signal. For example, the facet 14 can be positioned at the end of the chip such that the outgoing LIDAR signal passing through the facet 14 exits the chip to serve as a LIDAR output signal.

[0040] The LIDAR output signal travels away from the chip and may be reflected by an object in the path of the LIDAR output signal. The reflected signal travels away from the object. When the LIDAR output signal is reflected, at least a portion of the light from the reflected signal is fed back to an input waveguide 16 on the LIDAR chip as a LIDAR input signal. The input waveguide 16 includes facets 18 through which the LIDAR input signal can enter the input waveguide 16. The portion of the LIDAR input signal that enters the input waveguide 16 can be considered the incident LIDAR signal. The input waveguide 16 carries the incident LIDAR signal to a comparison splitter 30. If the incident LIDAR signal includes multiple channels, the comparison splitter 30 splits the incident LIDAR signal into different comparison signals, each carrying a different channel. The comparison splitter 30 outputs the comparison signals on different comparison waveguides 32. Each of the comparison waveguides 32 carries one of the comparison signals to a different processing element 34.

[0041] The LIDAR chip includes a splitter 36 that moves a portion of the outgoing LIDAR signal from the utility waveguide 12 onto a reference waveguide 37 as a reference signal. Suitable splitters 36 include, but are not limited to, optical couplers, y-junctions, and MMIs.

[0042] The reference waveguide 37 carries the reference optical signal to a reference splitter 38. If the reference optical signal includes multiple channels, the reference splitter 38 splits the reference optical signal into different reference signals, each having a different wavelength. The reference splitter 38 outputs the reference signals on different reference waveguides 40. Each of the reference waveguides 40 carries one of the reference signals to a different one of the processing elements 34.

[0043] The comparison waveguide 32 and the reference waveguide 40 are configured such that a comparison signal and a corresponding reference signal are received at the same processing element 34. For example, the comparison waveguide 32 and the reference waveguide 40 are configured such that a comparison signal and a reference signal carrying the same wavelength and / or the same channel are received at the same processing element 34.

[0044] As described in more detail below, each processing element 34 combines the comparison signal with a corresponding reference signal to form a composite signal carrying LIDAR data for the sample area on the field of view. The composite signal can then be processed to extract LIDAR data for the sample area (such as radial velocity and / or distance between the LIDAR system and objects external to the LIDAR system).

[0045] The LIDAR chip may include a control assembly for controlling the operation of the light source 10 and / or one or more characteristics of the system output signal. The control assembly includes a splitter 50 that moves a portion of the outgoing LIDAR signal from the utility waveguide 12 to a control waveguide 52. The combined portion of the outgoing LIDAR signal serves as the tap signal. The splitter 50 may be a wavelength independent splitter such as a directional coupler, an optical coupler, a y-junction, a tapered coupler, and a multimode interference (MMI) device.

[0046] The control waveguide 52 carries the tap signal to a differential delay mechanism 54 that may provide a first indication of the delay between the delay path signal and the expedited path signal. The delay mechanism 54 includes a splitter 60 that receives the tap signal and splits the tap signal into a delay signal and an expedited signal. The splitter 60 may be a wavelength independent splitter. For example, the second splitter 60 may be configured such that the delay signal and the expedited signal carry the same or substantially the same wavelength selection. Thus, the delay signal and the expedited signal may each carry multiple channels. In some cases, the delay signal and the expedited signal carry respective channels. Suitable second splitters 68 include, but are not limited to, directional couplers, optical couplers, y-junctions, tapered couplers, and multimode interference (MMI) devices.

[0047] The delay waveguide 62 carries the delayed signal to a first divider 64. The forward waveguide 66 carries the forward signal to a second divider 68. The delay waveguide 62 may include a delay section 70 that may be used to increase the length of the delay waveguide beyond the length of the forward waveguide 66. For example, the delay section 70 shown in FIG. 1A may represent a helical arrangement of the delay waveguide 62. The longer length of the delay waveguide 62 creates a delay between the delayed signal and the forward signal.

[0048] The first splitter 64 splits the delayed signal into delayed channel signals, each of which is carried on a different delay channel waveguide 72. The first splitter 64 may be a wavelength-dependent splitter. For example, the first splitter 64 may be configured such that each of the delayed channel signals carries a different wavelength selection. As an example, the first splitter 64 may be configured such that each of the delayed channel signals carries a different channel. Each of the delay channel waveguides 72 carries one of the delayed channel signals to a different control element 74. As a result, each of the control elements 74 receives a delayed channel signal carrying a different channel. Thus, each of the control elements 74 may be associated with a different channel. Suitable first splitters 64 include, but are not limited to, splitters such as arrayed waveguide gratings, echelle gratings, and ring resonator-based devices.

[0049] The second splitter 68 splits the prompt signal into prompt sub-signals each carried on a different prompt sub-waveguide 76. The second splitter 68 can be a wavelength-dependent splitter. For example, the second splitter 68 can be configured such that each of the prompt sub-signals carries the same or substantially the same wavelength selection. Thus, each of the prompt sub-signals can carry multiple channels. In some cases, each of the prompt sub-signals carries each channel. Each of the prompt sub-waveguides 76 carries one of the prompt sub-signals to a different one of the control elements 74. As a result, each of the control elements 74 can receive a prompt sub-signal that carries the channel associated with that control element 74 and also carries one or more other channels. Thus, each of the control elements 74 can receive a prompt sub-signal and a delayed channel signal carrying the same channel. Suitable second splitters 68 include, but are not limited to, directional couplers, optical couplers, y-junctions, tapered couplers, and multi-mode interference (MMI) devices.

[0050] In some examples, the second splitter 68 is a wavelength-dependent splitter. The wavelength-dependent splitter functioning as the second splitter 68 may be configured such that the prompt sub-signals each carry a different channel. Additionally, the prompt sub-waveguides 76 may be configured such that the prompt sub-signal received by each control element 74 carries a channel associated with that control element 74. As a result, each control element 74 may receive a prompt sub-signal carrying the same channel as the delayed channel signal received by the control element 74.

[0051] As is evident from the above description, light from the tap signal passes through one of several different delay paths from the splitter 60 to one coupler of the control element 74. Each of the delay paths is defined primarily by the delay waveguide 62, the first splitter 64, and one of the delay channel waveguides 72. A delay path signal passes through each delay path, which is a combination of the delay signal and one of the delay channel signals. Light from the tap signal also passes through one of several different facilitate paths from the splitter 60 to the control element 74. Each of the facilitate paths is defined primarily by one of the facilitate sub-waveguides 76, the second splitter 68, and one of the facilitate sub-waveguides 76. A facilitate path signal passes through each facilitate path, which is a combination of the facilitate signal and one of the facilitate sub-signals.

[0052] Each delay path has a common portion and an isolated portion. The common portion of each delay path is shared by multiple delay paths. In contrast, the isolated portions of a delay path are not shared with other delay paths. Optical signals passing through the common portion may carry multiple different channels. Optical signals passing through the isolated portions may each carry a different channel. For example, delay waveguide 62 is common to each delay path and functions as a common portion. In contrast, delay channel waveguide 72 is each isolated from the other delay channel waveguides 72 and functions as an isolated portion.

[0053] Each facilitate path has a common portion and a separation portion. The common portion of each facilitate path is shared by multiple facilitate paths. In contrast, the separation portions of the facilitate path are not shared with other facilitate paths. Optical signals passing through the common portion may carry multiple different channels. Optical signals passing through the separation portions may each carry a different channel. For example, facilitate waveguide 66 is common to each delay path and functions as the common portion. In contrast, facilitate sub-waveguides 76 may each be separated from the other facilitate sub-waveguides 76 and function as separation portions.

[0054] The expedited and delayed paths are configured such that each control element 74 receives delay and expedited path signals that carry the same channel (common channel). The expedited and delayed paths may be configured such that each different control element 74 receives delay and expedited path signals that carry different common channels. The delay and expedited paths may also be configured such that the delay and / or expedited path signals received at each control element 74 carry only one of the channels or essentially only one of the channels.

[0055] The components defining the delay path and the expedited path are configured such that expedited path signals and delayed path signals arriving at the same control element 74 are delayed in arrival at the control element 74 relative to the arrival of the delayed path signal at the control element 74.

[0056] Since the delay path signal and the expediting path signal include different portions of the tap signal, each control element 74 also receives an expediting portion of the tap signal that is delayed relative to the tap portion that receives the delayed section of the tap signal. The components defining the delay path and the expediting path can be configured to provide a delay between the tap portion and the expediting portion arriving at the control element 74. For example, the waveguides defining the delay path and the waveguides defining the expediting path can be configured such that the delay path is longer than the expediting path by a length that provides the desired delay at each control element 84. The length of the delay section 70 can be a primary indicator of the difference in length between the delay path and the expediting path leading to the same control element 74. As is evident from FIG. 1A, delayed signals carrying different channels pass through the same delay section 70. As a result, the same delay section 70 is common to each delay path and each channel.

[0057] Although the light source 10 is shown as being located on the LIDAR chip, all or a portion of the light source 10 may be located remotely from the LIDAR chip. FIG. 1B shows an example of a light source 10 including multiple laser sources 68. The light source in FIG. 1B may be located remotely from the LIDAR chip, located on the LIDAR chip, or integrated on the LIDAR chip. In some cases, each of the laser sources 68 outputs a channel signal on a light source waveguide 70. Each channel signal may carry one or more channels. Each of the light source waveguides 70 carries the channel signal to a laser combiner 72. The laser combiner 72 combines the channel signals to form an optical signal that is received on the channel or utility waveguide 12. Suitable laser combiners 72 include, but are not limited to, arrayed waveguide grating (AWG) combiners, echelle grating combiners, and star couplers. The electronics may operate the laser sources 68 such that the laser sources 68 output each channel simultaneously. The electronics can operate the laser source 68 such that the laser source 68 outputs each channel simultaneously.

[0058] In some cases, each of the laser sources 68 outputs one of the channels on the light source waveguide 70. The total number of laser sources 68 included in the light source 10 can be greater than or equal to the number of LIDAR output signals simultaneously directed to the sample region. In some cases, the total number of laser sources 68 included in the light source 10 is equal to the number of LIDAR output signals simultaneously directed to the sample region. As a result, each laser source 68 can be the source of a different LIDAR output signal simultaneously directed to the sample region.

[0059] The electronics 62 can independently operate the laser sources 68. For example, the electronics can operate the laser sources 68 to provide a particular LIDAR output signal having a particular frequency versus time waveform. Because the electronics can independently operate the laser sources 68 and each laser source 68 can be a source of a different LIDAR output signal, the electronics can operate the laser sources 68 such that the different LIDAR output signals have different frequency versus time waveforms.

[0060] 2 shows the LIDAR chip of FIGS. 1A and 1B modified to reduce the length of the delay section 70. A splitter 60 receives the tap signal from the control waveguide 52 and splits the tap signal into a prompt signal and a first delayed signal. The prompt signal is received on a prompt waveguide 66 as disclosed in the context of FIG. 1. Suitable splitters 60 include, but are not limited to, a 2×2 (multimode interference (MMI) coupler) and a 2×2 directional coupler.

[0061] The first delay waveguide 80 receives the first delayed signal from the splitter 60. The first delay waveguide 80 conveys the first delayed signal to a feedback device 82. The feedback device 82 is configured to feed the first delayed signal back to the first delay waveguide 80 such that the first delayed signal passes from the feedback device 82 through the first delay waveguide 80 back to the splitter 60. As a result, the first delayed signal passes through the first delay waveguide 80 twice. For example, the first delayed signal passes through the first delay waveguide 80 once in each direction as shown by the arrows labeled A in FIG. 2. Suitable feedback devices 82 include, but are not limited to, mirrors and reflective surfaces.

[0062] The splitter 60 receives a first delayed signal from the first delay waveguide 80 and outputs the first delayed signal to the delay waveguide 62. The portion of the first delayed signal received on the delay waveguide 62 functions as a second delayed signal carried on the delay waveguide 62. The delay waveguide 62 carries the second delayed signal to the first splitter 64. Thus, light from the tap signal passes from the splitter 60 through the first delay waveguide 80 twice and through the delay waveguide 62 once before being received at the first splitter 64. As a result, both the first delayed signal and the second delayed signal effectively function as the delayed signals disclosed in the context of FIG. 1A.

[0063] The first delay waveguide 80 includes a delay section 70. Passing the light twice through the first delay waveguide 80 increases the effective path length that the delayed signal travels between the splitter 60 and the first splitter 64. This increase in effective path length allows the length of the delay section 70 to be shortened to provide the desired delay between the delayed signal and the forward signal.

[0064] As is evident from the above description of FIG. 2, light from the tap signal passes through one of several different delay paths from the splitter 60 to one of the control elements 74. Each of the delay paths is defined primarily by one of the first delay waveguide 80, the splitter 60, the delay waveguide 62, the first splitter 64, and the delay channel waveguide 72. Each of the delay paths is passed by a delay path signal that is a combination of the first delay signal, the second delay signal, and one of the delay channel signals. Light from the tap signal also passes through one of several different facilitate paths from the splitter 60 to the control element 74. Each of the facilitate paths is defined primarily by one of the facilitate waveguide 66, the second splitter 68, and the facilitate sub-waveguide 76.

[0065] Each delay path has a common portion and an isolated portion. The common portion of each delay path is shared by multiple delay paths. In contrast, the isolated portions of a delay path are not shared with other delay paths. Optical signals passing through the common portion may carry multiple different channels. Optical signals passing through the isolated portions may each carry a different channel. For example, the first delay waveguide 80 and the delay waveguide 62 are common to each delay path and function as a common portion. In contrast, the delay channel waveguide 72 is isolated from the other delay channel waveguides 72 and functions as an isolated portion.

[0066] Each of the facilitate paths has a common portion and a separation portion. The common portion of each facilitate path is shared by the facilitate paths. In contrast, the separation portions of the facilitate paths are not shared with other facilitate paths. Optical signals passing through the common portion may carry multiple different channels. Optical signals passing through the separation portions may each carry a different channel. For example, facilitate waveguide 66 is common to each of the delay paths and functions as a common portion. In contrast, each facilitate sub-waveguide 76 may be separated from the other facilitate sub-waveguides 76 and function as a separation portion.

[0067] Each expedited path has an expedited path signal passing therethrough that is a combination of the expedited signal and one of the expedited sub-signals. The expedited and delay paths are configured such that each control element 74 receives delay path and expedited path signals that carry the same channel (common channel). The expedited and delay paths can be configured such that each different control element 74 receives delay path and expedited path signals that carry different common channels. Also, the delay and expedited paths can be configured such that the delay path and / or expedited path signals received at each control element 74 carry only one of the channels or essentially only one of the channels.

[0068] The components defining the delay path and the expedited path are configured such that expedited path signals and delayed path signals arriving at the same control element 74 are delayed in arrival at the control element 74 compared to the arrival of the delayed path signal at the control element 74.

[0069] Since the delay path signal and the expedited path signal represent different portions of the tap signal, each control element 74 also receives an expedited portion of the tap signal that is delayed relative to the tap portion at which the delayed portion of the tap signal is received. The components defining the delay path and the expedited path can be configured to provide a delay between the tap portion and the expedited portion arriving at the control element 74. For example, the waveguides defining the delay path and the waveguides defining the expedited path can be configured such that the delay path is longer than the expedited path by a length that provides the desired delay at each control element 84. The length of the delay section 70 can be a primary indicator of the difference in length between the delay path and the expedited path leading to the same control element 74. As is evident from FIG. 2, first delayed signals carrying different channels pass through the same delay section 70. As a result, the same delay section 70 is common to each delay path.

[0070] As mentioned above, in some cases, the second splitter 68 can be a wavelength-dependent splitter configured so that the facilitating sub-signals each carry a different channel. Although FIGS. 1A and 2 show these facilitating sub-signals separated from a common signal (the facilitating signal), the facilitating sub-signals, each carrying a different channel, can be tapped from the light source waveguides 70. For example, FIG. 3 shows the LIDAR system of FIG. 1A modified to include a light source 10 constructed according to FIG. 1B. Each of the light source waveguides 70 includes a splitter 60 configured to move a portion of the channel signal from the light source waveguide 70 to one of the facilitating sub-waveguides 76. The portion of the channel signal received by the facilitating sub-waveguide 76 serves as one of the facilitating sub-signals. Each of the facilitating sub-signals carries a different channel. As mentioned above, each of the facilitating sub-waveguides 76 carries one of the facilitating sub-signals to one of the control elements 74. Because the forward sub-signal is not separated from the tap signal, the delay waveguide 62 may receive a delayed signal from the splitter 50, as shown in Figure 3. For example, the delay waveguide 62 may receive a portion of the outgoing LIDAR signal from the splitter 50. The portion of the outgoing LIDAR signal received by the delay waveguide 62 may function as the delayed signal. Suitable splitters 60 include, but are not limited to, directional couplers, optical couplers, y-junctions, tapered couplers, and wavelength independent splitters such as multimode interference (MMI) devices.

[0071] The forward sub-signals and delayed channel signals received by the same control element 74 each contain light from the same light source waveguide 70, and thus the same channel signal. The light from each channel signal passes through one of several different delay paths from the splitter 60 on the light source waveguide 70 to one of the control elements 74. Each of the delay paths is primarily defined by the portion of the light source waveguide 70 after the splitter 60, the laser combiner 72, the portion of the utility waveguide 12 between the laser combiner 72 and the splitter 50, the splitter 50, the delay waveguide 62, the first splitter 64, and one of the delay channel waveguides 72.

[0072] Each delay path has a common portion and multiple separate portions. The common portion of each delay path is shared by multiple delay paths. In contrast, the separate portions of a delay path are not shared with other delay paths. Optical signals passing through the common portion may carry multiple different channels. Optical signals passing through the separate portions may each carry a different channel. For example, the portion of the utility waveguide 12 between the laser multiplexer 72 and the splitter 50 and the delay waveguide 62 are common to each delay path and function as the common portion. In contrast, the portion of the light source waveguide 70 after the splitter 60 and the delay channel waveguide 72 are separate from the other delay channel waveguides 72 and function as the separate portions.

[0073] In the LIDAR system of Figure 3, each delay path has a delay path signal that is a combination of one of the channel signals, the outgoing LIDAR signal, the delay signal, and the delayed channel signal. Also, light from each channel signal passes through a different facilitate path from the splitter 60 on the light source waveguide 70 to one of the control elements 74. The facilitate paths have no common portions. Each of the facilitate paths is primarily defined by the facilitate sub-waveguide 76. Each of the facilitate sub-signals functions as a facilitate path signal that passes through one of the facilitate paths.

[0074] The expedited and delayed paths are configured such that each control element 74 receives delay and expedited path signals that carry the same channel (common channel). The expedited and delayed paths may be configured such that each different control element 74 receives delay and expedited path signals that carry different common channels. The delay and expedited paths may also be configured such that the delay and / or expedited path signals received at each control element 74 carry only one of the channels or essentially only one of the channels.

[0075] The components defining the delay path and the expedited path are configured such that expedited path signals and delayed path signals arriving at the same control element 74 are delayed in arrival at the control element 74 compared to the arrival of the delayed path signal at the control element 74.

[0076] Since the delay path signal and the expedited path signal contain different portions of the common signal (channel signal), each control element 74 receives a delayed portion of the common signal and also receives an expedited portion of the common signal delayed with respect to the tap portion. The components defining the delay path and the expedited path can be configured to provide a delay between the tap portion and the expedited portion arriving at the control element 74. For example, the waveguides defining the delay path and the waveguides defining the expedited path can be configured such that the delay path is longer than the expedited path by a length that provides the desired delay at each control element 84. The length of the delay section 70 can be a primary indicator of the difference in length between the delay path and the expedited path leading to the same control element 74. As is evident from FIG. 3, the delayed signals carrying different channels pass through the same delay section 70. As a result, the same delay section 70 is common to each delay path and each channel.

[0077] FIG. 3 illustrates a LIDAR system in which the light in the forward signal is not separated from a common signal carrying multiple channels, but the light in the delayed signal is separated from the common signal. However, the LIDAR system can be configured such that the light in the forward signal is not separated from the common signal, and the light in the delayed signal is not separated from the common signal. For example, FIG. 4 illustrates the LIDAR system of FIG. 3 modified such that the light in the forward and delayed signals is not separated from the common signal. Each of the light source waveguides 70 includes a splitter 50 and a differential delay mechanism 54 as disclosed in connection with FIG. 2. As a result, each splitter 50 is configured to move a portion of the channel signal from the light source waveguide 70 to the control waveguide 52. The portion of the channel signal received by the control waveguide 52 can function as a tap signal. Since each channel signal carries a different channel, the light in each tap signal carries a different channel.

[0078] Each of the tap signals is received at a different one of the optical couplers 78. The optical couplers 78 split the tap signal into a forward signal and a first delayed signal. Each of the forward signals is received on the forward waveguide 66. Suitable optical couplers 78 include, but are not limited to, a 2×2 multimode interference (MMI) coupler and a 2×2 directional coupler.

[0079] Each of the first delay waveguides 80 receives a first delayed signal from the splitter 60. The first delay waveguides 80 convey the first delayed signal to a feedback device 82. The feedback device 82 is configured to feed the first delayed signal back to the first delay waveguide 80, such that the first delayed signal travels from the feedback device 82 through the first delay waveguide 80 back to the splitter 60. As a result, the first delayed signal passes through the first delay waveguide 80 twice. Each of the optical couplers 78 receives the first delayed signal from the first delay waveguide 80 and outputs the first delayed signal on the delay waveguide 62. The portion of the first delayed signal received on the delay waveguide 62 functions as a second delayed signal conveyed on the delay waveguide 62. The first delayed signal and the associated second delayed signal can effectively function together as a delay signal.

[0080] When the channel signals each carry a single channel, the resulting first and second delayed signals also carry a single channel. As a result, the second delayed signal is not a common signal and the first divider 64 disclosed in the context of Figures 1A-3 is not required. Moreover, because the second delayed signals carry a single channel, each effectively functions as one of the delayed channel signals disclosed in the context of Figures 1A-3. As a result, each of the delay waveguides 62 can function as the delayed channel waveguide 72 of Figures 1A-3 by carrying the second delayed signal, which functions as a delayed channel signal, to one of the control elements 74.

[0081] If the channel signals each carry a single channel, the resulting facilitate signal also carries a single channel. As a result, each of the resulting facilitate signals is not a common signal, and the second splitter 68 disclosed in the context of Figures 1A-3 is not required. Moreover, because each of the facilitate signals carries a single channel, each can effectively function as one of the facilitate sub-signals disclosed in the context of Figures 1A-3. As a result, each of the facilitate waveguides 66 can function as a facilitate sub-waveguide 76 by carrying a facilitate signal that functions as a facilitate sub-signal to one of the control elements 74.

[0082] The forward sub-signals and delayed channel signals received by the same control element 74 each contain light from the same light source waveguide 70, and therefore from the same channel signal. Light from each channel signal passes through one of several different delay paths from the splitter 50 on the light source waveguide 70 to one of the control elements 74. Each delay path is primarily defined by the control waveguide 52, the splitter 60, the first delay waveguide 80, and the delay waveguide 62. Each forward path and each delay path is disjoint.

[0083] In the LIDAR system of FIG. 4 , each of the delay paths is traversed by a delay path signal that is a combination of a control signal, a first delay signal, and a second delay signal. Additionally, light from each channel signal traverses a different expedited path from splitter 50 on light source waveguide 70 to one of the control elements 74. Each expedited path is defined primarily by control waveguide 52, splitter 60, and expedited waveguide 66. Each of the expedited paths is traversed by an expedited path signal that is a combination of a control signal, splitter 60, and expedited sub-signal. The expedited and delay paths are configured such that each control element 74 receives a delay path signal and an expedited path signal carrying the same channel. The components defining the delay and expedited paths are configured such that expedited and delayed path signals arriving at the same control element 74 are delayed in arrival at the delay path signal to the control element 74 compared to the expedited path signal's arrival at the control element 74.

[0084] Since the delay path signal and the expedited path signal contain different portions of the common signal (one of the channel signals), each control element 74 receives a delayed portion of the common signal and also an expedited portion of the common signal delayed with respect to the tap portion. The components defining the delay path and the expedited path can be configured to provide a delay between the tap portion and the expedited portion arriving at the control element 74. For example, the waveguides defining the delay path and the waveguides defining the expedited path can be configured such that the delay path is longer than the expedited path by a length that provides the desired delay at each control element 84. The length of the delay section 70 can be a primary indicator of the difference in length between the delay path and the expedited path leading to the same control element 74. As is evident from FIG. 4, the first delayed signals carrying different channels pass through different delay sections 70.

[0085] In some cases, a LIDAR chip constructed according to Figures 1A-4 is used in conjunction with a LIDAR adapter. In some cases, the LIDAR adapter can be physically and optically disposed between the LIDAR chip and one or more reflective objects and / or the field of view, and the optical path along which the first LIDAR input signal and / or the LIDAR output signal travel from the LIDAR chip to the field of view passes through the LIDAR adapter. The LIDAR adapter can also be configured to operate with the LIDAR input signal and the LIDAR output signal, such that the LIDAR input signal and the LIDAR output signal travel different optical paths between the LIDAR adapter and the LIDAR chip, but travel the same optical path between the LIDAR adapter and the reflective objects in the field of view.

[0086] An example of a LIDAR adapter applied to the LIDAR chip of FIGS. 1A to 4 is shown in FIG. 5. The LIDAR adapter includes multiple components disposed on a base. For example, the LIDAR adapter includes a circulator 100 disposed on a base 102. The illustrated optical circulator 100 includes three ports, configured such that light entering one port exits the next port. For example, the illustrated optical circulator includes a first port 104, a second port 106, and a third port 108. The LIDAR output signal enters the first port 104 from the utility waveguide 12 of the LIDAR chip and exits from the second port 106.

[0087] The LIDAR adapter can be configured such that the output of the LIDAR output signal from the second port 106 can also function as an output of the LIDAR output signal from the LIDAR adapter, and thus from the LIDAR system. As a result, the LIDAR output signal can be output from the LIDAR adapter such that the LIDAR output signal passes toward a sample area in the field of view. Thus, in some cases, the portion of the LIDAR output signal that exits the LIDAR adapter can also be considered a system output signal. As an example, if the exit of the LIDAR output signal from the LIDAR adapter is also the exit of the LIDAR output signal from the LIDAR system, the LIDAR output signal can also be considered a system output signal.

[0088] The LIDAR output signal output from the LIDAR adapter includes, consists of, or consists essentially of light from the LIDAR output signal received from the LIDAR chip. Thus, the system output signal output from the LIDAR adapter may be the same or substantially the same as the LIDAR output signal received from the LIDAR chip. However, there may be differences between the LIDAR output signal output from the LIDAR adapter and the LIDAR output signal received from the LIDAR chip. For example, the LIDAR output signal may experience light loss as it passes through the LIDAR adapter, and / or the LIDAR adapter may optionally include an amplifier configured to amplify the LIDAR output signal as it passes through the LIDAR adapter.

[0089] When one or more objects within the sample volume reflect the LIDAR output signal, at least a portion of the reflected light returns to the circulator 100 as a system return signal. The system return signal enters the circulator 100 through a second port 106. Figure 5 shows the LIDAR output signal and the system return signal passing along the same optical path between the LIDAR adapter and the sample volume.

[0090] The system return signal exits the circulator 100 through a third port 108 and is directed to a comparison waveguide 18 on the LIDAR chip. Thus, all or a portion of the system return signal can function as the first LIDAR input signal, which includes or consists of light from the system return signal. Thus, the LIDAR output signal and the first LIDAR input signal pass along different optical paths between the LIDAR adapter and the LIDAR chip.

[0091] As is evident from Figure 5, the LIDAR adapter may include optical components in addition to the circulator 100. For example, the LIDAR adapter may include components for directing and controlling the optical paths of the LIDAR output signal and the system return signal. As an example, the adapter of Figure 5 includes an optional amplifier 110 positioned to receive and amplify the LIDAR output signal before it is incident on the circulator 100. The amplifier 110 may be operated by the electronics 62, allowing the electronics 62 to control the power of the LIDAR output signal.

[0092] FIG. 5 also illustrates a LIDAR adapter including an optional first lens 112 and an optional second lens 114. The first lens 112 can be configured to couple the LIDAR output signal to a desired location. In some cases, the first lens 112 is configured to focus or collimate the LIDAR output signal to a desired location. In one example, the first lens 112 is configured to couple the LIDAR output signal to the first port 104 when the LIDAR adapter does not include an amplifier 110. As another example, the first lens 112 can be configured to couple the LIDAR output signal on the input port to the amplifier 110 when the LIDAR adapter includes an amplifier 110. The second lens 114 can be configured to couple the LIDAR output signal at a desired location. In some cases, the second lens 114 is configured to focus or collimate the LIDAR output signal to a desired location. For example, the second lens 114 can be configured to couple the LIDAR output signal to the facet 35 of the comparison waveguide 18.

[0093] The LIDAR adapter may also include one or more redirecting elements, such as mirrors. Figure 5 shows a LIDAR adapter including a mirror as a redirecting element 116 that redirects the system return signal from the circulator 100 to the facet 20 of the comparison waveguide 18.

[0094] The LIDAR chip includes one or more waveguides that restrict the optical path of one or more optical signals. Although the LIDAR adapter can include waveguides, the optical paths along which the system return signals and the LIDAR output signals travel between components on the LIDAR adapter and / or between the LIDAR chip and components on the LIDAR adapter can be free space. For example, the system return signals and / or the LIDAR output signals can travel through the air in which the LIDAR chip, the LIDAR adapter, and / or the base 102 are disposed as they travel between different components on the LIDAR adapter and / or between components on the LIDAR adapter and the LIDAR chip. As a result, optical components such as lenses and redirecting elements can be utilized to control the characteristics of the optical paths along which the system return signals and the LIDAR output signals pass to and from the LIDAR adapter.

[0095] Suitable bases 102 for LIDAR adapters include, but are not limited to, substrates, platforms, and plates. Suitable substrates include, but are not limited to, glass, silicon, and ceramic. The components may be individual components that are attached to a substrate. Suitable techniques for attaching individual parts to the base 102 include, but are not limited to, epoxy, solder, and mechanical clamps. In one example, one or more components are integrated elements and the remaining components are individual elements. In another example, the LIDAR adapter includes one or more integrated amplifiers and the remaining components are individual elements.

[0096] The LIDAR chip, electronics, and LIDAR adapter can be disposed on a common mount. Suitable common mounts include, but are not limited to, glass, metal, silicon, and ceramic plates. As an example, FIG. 6 is a top view of a LIDAR assembly including the LIDAR chip and electronics 62 of FIG. 1A and the LIDAR adapter on the common support 122 of FIG. 3. Although the electronics 62 is shown disposed on the common support, all or a portion of the electronics may be disposed off the common support. Suitable techniques for mounting the LIDAR chip, electronics, and / or LIDAR adapter on the common support include, but are not limited to, epoxy, solder, and mechanical clamps.

[0097] A LIDAR system may include a LIDAR assembly 130 utilized in conjunction with one or more additional optical components. For example, a LIDAR system may include a LIDAR assembly 130 utilized in conjunction with a directional element 132, as shown in FIG.

[0098] In Figure 6, directional element 132 receives the LIDAR output signal output from the adapter. If the LIDAR output signal carries multiple channels, directional element 132 separates the channels carried by the LIDAR output signal into system output signals, each carrying a different channel. In Figure 6, the system output signal carrying channel i is iwhere i represents a channel index and the channels are associated with channel indices i=1 to i=N, respectively. The directional element 132 may also be configured to direct each system output signal to a number of different sample areas within the field of view. Light from the system output signals may be reflected by one or more objects located at the sample area illuminated by the system output signal. The light is returned to the LIDAR system as a system return signal. Different system return signals each carry a different channel. The directional element may be configured to combine the system return signals into a return signal that is output from the directional element and received by the LIDAR assembly and / or adapter.

[0099] The directional element 132 can be controlled by electronics, which can then direct the system output signal to different sample regions within the field of view. Although the directional element 132 is shown disposed away from the common support 122, the directional element 132 can be disposed on the common support 122 and / or on the base 102. Suitable directional elements 132 include, but are not limited to, steerable optical gratings, which can be reflective or transmissive, optical phased arrays (OPAs), and focal plane arrays (FPAs). Examples of suitable directional elements 132 are disclosed in U.S. Patent Application No. 17 / 002,756, filed August 25, 2020, entitled "Reduction of Electrical Elements in LIDAR Systems," which is incorporated herein in its entirety.

[0100] 7A-7C show an example of a processing element that may be applied to all or part of the processing element 34. The processing element 34 receives a comparison signal from one of the comparison waveguides 32 and a reference signal from one of the reference waveguides 40. The processing element includes a second splitter 200 that splits the comparison signal carried on the comparison waveguide 32 into a first comparison waveguide 204 and a second comparison waveguide 206. The first comparison waveguide 204 carries a first portion of the comparison signal to an optical coupling element 211. The second comparison waveguide 208 carries a second portion of the comparison signal to a second optical coupling element 212.

[0101] The processing element includes a first splitter 202 that splits a reference signal carried on the reference waveguide 40 into a first reference waveguide 204 and a second reference waveguide 206. The first reference waveguide 204 carries a first portion of the reference signal to an optical combining element 211. The second reference waveguide 208 carries a second portion of the reference signal to a second optical combining element 212.

[0102] The second optical combining element 212 combines the second portion of the comparison signal and the second portion of the reference signal into a second composite signal, where the second composite signal pulsates between the second portion of the comparison signal and the second portion of the reference signal due to the difference in frequency between the second portion of the comparison signal and the second portion of the reference signal.

[0103] The second optical combining element 212 also splits the resulting second composite signal into a first auxiliary detector waveguide 214 and a second auxiliary detector waveguide 216. The first auxiliary detector waveguide 214 conveys a first portion of the second composite signal to a first auxiliary optical sensor 218, which converts the first portion of the second composite signal into a first auxiliary electrical signal. The second auxiliary detector waveguide 216 conveys a second portion of the second composite signal to a second auxiliary optical sensor 220, which converts the second portion of the second composite signal into a second auxiliary electrical signal. Examples of suitable optical sensors include germanium photodiodes (PDs) and avalanche photodiodes (APDs).

[0104] In some cases, the second optical combining element 212 splits the second composite signal such that a portion of the comparison signal (i.e., a portion of the second portion of the comparison signal) included in the first portion of the second composite signal is phase shifted by 180 degrees relative to a portion of the comparison signal (i.e., a portion of the second portion of the comparison signal) in the second portion of the second composite signal, but a portion of the reference signal (i.e., a portion of the second portion of the reference signal) in the second portion of the second composite signal is not phase shifted relative to a portion of the reference signal (i.e., a portion of the second portion of the reference signal) in the first portion of the second composite signal. Alternatively, the second optical combining element 212 splits the second composite signal such that a portion of the reference signal (i.e., a portion of the second portion of the reference signal) in the first portion of the second composite signal is phase shifted by 180° with respect to a portion of the reference signal (i.e., a portion of the second portion of the reference signal) in the second portion of the second composite signal, but a portion of the comparison signal (i.e., a portion of the second portion of the comparison signal) in the first portion of the second composite signal is not phase shifted with respect to a portion of the comparison signal (i.e., a portion of the second portion of the comparison signal) in the second portion of the second composite signal. Examples of suitable optical sensors include germanium photodiodes (PDs) and avalanche photodiodes (APDs).

[0105] The first optical combining element 211 combines the first portion of the comparison signal with the first portion of the reference signal to generate a first composite signal. Due to the difference in frequency between the first portion of the comparison signal and the first portion of the reference signal, the first composite signal pulsates between the first portion of the comparison signal and the first portion of the reference signal.

[0106] The first optical combining element 211 also splits the first composite signal into a first detector waveguide 221 and a second detector waveguide 222. The first detector waveguide 221 conveys a first portion of the first composite signal to a first optical sensor 223 that converts the first portion of the second composite signal into a first electrical signal. The second detector waveguide 222 conveys a second portion of the second composite signal to a second optical sensor 224 that converts the second portion of the second composite signal into a second electrical signal. Examples of suitable optical sensors include germanium photodiodes (PDs) and avalanche photodiodes (APDs).

[0107] In some cases, the optical combining element 211 splits the first composite signal such that a portion of the comparison signal (i.e., a portion of the first portion of the comparison signal) included in the first portion of the composite signal is phase shifted 180° with respect to a portion of the comparison signal (i.e., a portion of the first portion of the comparison signal) in the second portion of the composite signal, but a portion of the reference signal (i.e., a portion of the first portion of the reference signal) in the first portion of the composite signal is not phase shifted with respect to a portion of the reference signal (i.e., a portion of the first portion of the reference signal) in the second portion of the composite signal. Alternatively, the optical combining element 211 splits the composite signal such that a portion of the reference signal (i.e., a portion of the first portion of the reference signal) in the first portion of the composite signal is phase shifted 180° with respect to a portion of the reference signal (i.e., a portion of the first portion of the reference signal) in the second portion of the composite signal, but a portion of the comparison signal (i.e., a portion of the first portion of the comparison signal) in the first portion of the composite signal is not phase shifted with respect to a portion of the comparison signal (i.e., a portion of the first portion of the comparison signal) in the second portion of the composite signal.

[0108] When the second optical combining element 212 splits the second composite signal such that a portion of the comparison signal in the first portion of the second composite signal is phase shifted 180° relative to a portion of the comparison signal in the second portion of the second composite signal, the optical combining element 211 also splits the composite signal such that a portion of the comparison signal in the first portion of the composite signal is phase shifted 180° relative to a portion of the comparison signal in the second portion of the composite signal. When the second optical combining element 212 splits the second composite signal such that a portion of the reference signal in the first portion of the second composite signal is phase shifted 180° relative to a portion of the reference signal in the second portion of the second composite signal, the optical combining element 211 also splits the composite signal such that a portion of the reference signal in the first portion of the composite signal is phase shifted 180° relative to a portion of the reference signal in the second portion of the composite signal.

[0109] Suitable optical coupling elements 211 and second optical coupling elements 212 include, but are not limited to, a 2×2 multimode interference (MMI) coupler and a 2×2 directional coupler.

[0110] The first reference waveguide 210 and the second reference waveguide 208 are constructed to provide a phase shift between the first portion of the reference signal and the second portion of the reference signal. For example, the first reference waveguide 210 and the second reference waveguide 208 can be constructed to provide a 90 degree phase shift between the first portion of the reference signal and the second portion of the reference signal. As an example, one reference signal portion can be an in-phase component and the other reference signal portion can be a quadrature component. Thus, one of the reference signal portions can be a sine function and the other reference signal portion can be a cosine function. In one example, the first reference waveguide 210 and the second reference waveguide 208 are constructed such that the first reference signal portion is a cosine function and the second reference signal portion is a sine function. Thus, the portion of the reference signal in the second composite signal is phase shifted relative to the portion of the reference signal in the first composite signal, but the portion of the comparison signal in the first composite signal is not phase shifted relative to the portion of the comparison signal in the second composite signal.

[0111] The first light sensor 223 and the second light sensor 224 can be connected as a balanced detector, and the first auxiliary light sensor 218 and the second auxiliary light sensor 220 can also be connected as a balanced detector. For example, FIG. 7B provides a schematic diagram of the relationship between the electronics, the first light sensor 223, the second light sensor 224, the first auxiliary light sensor 218, and the second auxiliary light sensor 220. Although a photodiode symbol is used to represent the first light sensor 223, the second light sensor 224, the first auxiliary light sensor 218, and the second auxiliary light sensor 220, one or more of these sensors can have other structures. In some cases, all of the components shown in the schematic diagram of FIG. 7B can be included in the LIDAR chip. In some cases, the components shown in the schematic diagram of FIG. 7B are distributed between the LIDAR chip and electronics located outside the LIDAR chip.

[0112] The electronics 62 connects the first photosensor 223 and the second photosensor 224 as a first balanced detector 225, and connects the first auxiliary photosensor 218 and the second auxiliary photosensor 220 as a second balanced detector 226. In particular, the first photosensor 223 and the second photosensor 224 are connected in series. Also, the first auxiliary photosensor 218 and the second auxiliary photosensor 220 are connected in series. The series connection in the first balanced detector communicates with a first data line 228 that carries the output from the first balanced detector as a first data signal. The series connection in the second balanced detector communicates with a second data line 232 that carries the output from the second balanced detector as a second data signal. The first data signal is an electrical representation of the first composite signal, and the second data signal is an electrical representation of the second composite signal. Thus, the first data signal includes contributions from the first waveform and the second waveform, and the second data signal is a composite of the first and second waveforms. A portion of a first waveform in the first data signal is phase shifted relative to a portion of the first waveform in the first data signal, while a portion of a second waveform in the first data signal is in phase with a portion of the second waveform in the first data signal. For example, the second data signal includes a portion of a reference signal that is phase shifted relative to a different portion of the reference signal included in the first data signal. Also, the second data signal includes a portion of a comparison signal that is in phase with a different portion of a comparison signal included in the first data signal. The first and second data signals are pulsating as a result of the pulsation between the comparison signal and the reference signal, i.e., the pulsation in the first and second composite signals.

[0113] The electronics 62 includes a transform mechanism 238 configured to perform a mathematical transformation on the first and second data signals. For example, the mathematical transformation can be a complex Fourier transform using the first and second data signals as inputs. The first data signal is an in-phase component and the second data signal is a quadrature component, such that the first and second data signals together function as a complex data signal, in which the first data signal is the real component of the input and the second data signal is its imaginary component.

[0114] The conversion mechanism 238 includes a first analog-to-digital converter (ADC) 264 that receives the first data signal from the first data line 228. The first analog-to-digital converter (ADC) 264 converts the first data signal from analog to digital format and outputs a first digital data signal. The conversion mechanism 238 includes a second analog-to-digital converter (ADC) 266 that receives the second data signal from the second data line 232. The second analog-to-digital converter (ADC) 266 converts the second data signal from analog to digital format and outputs a second digital data signal. The first digital data signal is a digital representation of the first data signal and the second digital data signal is a digital representation of the second data signal. Thus, the first digital data signal and the second digital data signal together act as a composite signal, in which the first digital data signal acts as a real component of the composite signal and the second digital data signal acts as an imaginary component of the composite data signal.

[0115] The conversion mechanism 238 includes a conversion element 268 that receives the composite data signal. For example, the conversion element 268 receives as input a first digital data signal from a first analog-to-digital converter (ADC) 264 and a second digital data signal from a second analog-to-digital converter (ADC) 266. The conversion element 268 can be configured to perform a mathematical transformation on the composite signal to convert it from the time domain to the frequency domain. The mathematical transformation can be a complex transformation, such as a complex Fast Fourier Transform (FFT). A complex transformation, such as a complex Fast Fourier Transform (FFT), provides an explicit solution to the shift in frequency of the LIDAR input signal relative to the LIDAR output signal caused by the line-of-sight velocity between the reflecting object and the LIDAR chip. The electronics use one or more frequency peaks output from the conversion element 268 for further processing to generate LIDAR data (distance and / or line-of-sight velocity between the reflecting object and the LIDAR chip or LIDAR system). The conversion element 268 can use firmware, hardware, software, or a combination thereof to perform the attribution function.

[0116] FIG. 7C shows an example of the relationship between frequency, time, cycle, and data period of a system output signal. Frequency versus time patterns are shown for two system output signals carrying different channels. The system output signal carrying channel i has a period λ i where i represents the channel index. The base frequency of the system output signal (f 0 ) may be the lowest frequency of the system output signal during a cycle.

[0117] The frequency vs. time pattern is a cycle j and cycle j+1 7C. In some cases, the frequency versus time pattern is repeated with each cycle, as shown in FIG. 7C. The illustrated cycles do not include a relocation period and / or no relocation period is located between the cycles. As a result, FIG. 7C shows the result of a continuous scan of the system output signal.

[0118] Each cycle is associated with a period index k, and the DP k In the example of FIG. 7C, each cycle includes K data periods, denoted as DP k 7C. In some cases, the frequency versus time pattern is the same for data periods that correspond to each other in different cycles, as shown in FIG. 7C. Corresponding data periods are data periods that have the same period index. As a result, each data period DP 1 can be considered to be the corresponding data period, and the associated frequency versus time pattern is the same in Figure 7C. At the end of the cycle, the electronics resets the frequency to the same frequency level as at the beginning of the previous cycle.

[0119] Data Period DP 1 and data period DP 2 During this time, the electronics operates such that the frequency of the system output signal increases at a linear rate α i The channel λ i(where i represents the channel index). 1 The direction of frequency change in the data period DP 2 The direction of the frequency change is opposite to that in

[0120] During each cycle, the system output signal carrying channel i is SR k,i (where k represents the sample area index and i represents the channel index). For example, during the cycle represented as j in FIG. 7C, the sample area SR k,i is the channel λ i The sample area SR is illuminated by the system output signal carrying k,i+1 is the channel λ i+1 The sample area index k can be assigned with respect to time. For example, the sample areas can be illuminated by the system output signal in the order indicated by the index k. As a result, the sample area SR 10,1 is the sample area SR 9,1 After SR 11,1 The radiation can be irradiated before the irradiation.

[0121] As is evident from the above discussion, each processing element 34 receives a comparison signal and a reference signal carrying the same channel. As a result, the frequency output from the complex Fourier transform associated with a processing element 34 represents the pulsating frequency of a composite signal including the comparison signal pulsating relative to the reference signal, where the comparison signal and the reference signal carry the same channel. The pulsating frequencies from the same processing element 34 and from two or more different data periods can be combined to generate LIDAR data for one of the sample regions. For example, pulsating frequencies from the same processing element 34 and from two or more different data periods can be combined to generate LIDAR data for one of the sample regions. i The processing element 34 receives the comparison signal and the reference signal carrying the DP 1 The generated pulsation frequency and DP at cycle j 2 The generated pulsation frequencies are combined to form a sample region SR k,iAs an example, the following equation can be used to generate LIDAR data for the data period DP 1 During the data period, the electronic device increases the frequency of the emitted LIDAR signal, such as occurs at: ub =-f d +α i *τ, where f ub is the frequency provided by the transducer 268, and f d is the Doppler shift (f d =2vf c / c), where f c is the base frequency (f 0 ), c represents the speed of light, v is the line of sight velocity between the reflecting object and the LIDAR system, assuming that the direction from the reflecting object toward the LIDAR system is the positive direction, c is the speed of light, and τ represents the time it takes for the system output signal to leave the LIDAR system, be reflected by an object outside the LIDAR system, and return to the LIDAR system as a system return signal (round trip time). The following equation is used to calculate the data period DP 2 Electronics are applied during the data period to reduce the frequency of the outgoing LIDAR signal, such as occurs in: db =-f d -α i *τ, where f db is the frequency provided by the transducer element 268. In these two equations, f d and τ are unknowns. The electronics solves two equations for these two unknowns. i The radial velocity of the sample area illuminated by the system output signal carrying the Doppler shift (v=c*f d / (2f c )) and / or the separation distance of the sample regions can be determined from c*τ / 2.

[0122] In some cases, there may be multiple objects in the sample volume. In some cases where there are multiple objects in the sample volume, the transform may output multiple frequencies, where each frequency is associated with a different object. Frequencies resulting from the same object in different data periods of the same cycle may be considered corresponding frequency pairs. LIDAR data may be generated for each corresponding frequency pair output by the transform. As a result, separate LIDAR data may be generated for each object in the sample volume.

[0123] 7A-7B show an optical combining element combining a portion of the reference signal and a portion of the comparison signal, the processing element may include a single optical combining element combining the reference signal and the comparison signal to form a composite signal. As a result, at least a portion of the reference signal and at least a portion of the comparison signal may be combined to form the composite signal. The combined portion of the reference signal may be the entire reference signal or a portion of the reference signal, and the combined portion of the comparison signal may be the entire comparison signal or a portion of the comparison signal.

[0124] As an example of a processing element that combines a reference signal and a comparison signal to form a composite signal, Figures 7D-7E show the processing element of Figures 7A-7B modified to include a single optical combining element. The comparison waveguide 196 carries the comparison signal directly to the first optical combining element 211, and the reference waveguide 198 carries the reference signal directly to the first optical combining element 211.

[0125] The first optical combining element 211 combines the comparison signal and the reference signal into a composite signal. Due to the difference in frequency between the comparison signal and the reference signal, the first composite signal pulsates between the comparison signal and the reference signal. The first optical combining element 211 also splits the composite signal into a first detector waveguide 221 and a second detector waveguide 222. The first detector waveguide 221 carries a first portion of the composite signal to a first optical sensor 223 that converts the first portion of the second composite signal into a first electrical signal. The second detector waveguide 222 carries a second portion of the composite signal to a second optical sensor 224 that converts the second portion of the second composite signal into a second electrical signal.

[0126] 7E provides a schematic diagram of the relationship between the electronics, the first light sensor 223, and the second light sensor 224. Although a photodiode symbol is used to represent the first light sensor 223 and the second light sensor 224, one or more of these sensors may have other configurations. In some cases, all of the components shown in the schematic diagram of FIG. 7E are included on the LIDAR chip. In some cases, the components shown in the schematic diagram of FIG. 7E are distributed between the LIDAR chip and electronics located external to the LIDAR chip.

[0127] The electronics connect the first photosensor 223 and the second photosensor 224 as a first balanced detector 225. In particular, the first photosensor 223 and the second photosensor 224 are connected in series. The series connection in the first balanced detector communicates with a first data line 228 that carries the output from the first balanced detector as a first data signal. The first data signal is an electrical representation of the composite signal.

[0128] The electronics 62 include a transform mechanism 238 configured to perform a mathematical transform on the first data signal. The mathematical transform may be a real Fourier transform with the first data signal as an input. The electronics can use the frequency output from the transform to extract the LIDAR data as described above.

[0129] Each of the balanced detectors disclosed in connection with Figures 7A through 7E can be replaced with a single photosensor, such that the processing element can include one or more photosensors each receiving at least a portion of the composite signal, where the portion of the composite signal received can be all or a portion of the composite signal.

[0130] As discussed in connection with Figure 7C, the electronics 62 adjust the frequency of the system output signal. One way to generate this frequency chirp is to modulate the current applied by the electronics to the light source. In semiconductor lasers that can be used as light sources in LIDAR systems, current modulation produces frequency modulation via strong nonlinear carrier / photon coupling.

[0131] 8A and 8B show an example of a control element that may be implemented in whole or in part as the control elements 74 disclosed in connection with FIGS. 1A-4. As described above, each of the control elements 74 receives a delay path signal from a delay channel waveguide 72, a delay path signal from the delay channel waveguide 72, and an expedited path signal from an expedited sub-waveguide 76. The delay path signals and expedited path signals received at the control elements 74 have a frequency band of λ i , and carry the same channel denoted as .

[0132] The delay channel waveguide 72 carries the delayed path signal to a first splitter 274. The forward sub-waveguide 76 carries the forward path signal to a second splitter 278. Splitters suitable for use as the first splitter 274 and the second splitter 278 include, but are not limited to, directional couplers, optical couplers, y-junctions, tapered couplers, and wavelength independent splitters such as multi-mode interference (MMI) devices.

[0133] The first splitter 274 splits the delay path signal into a first portion of the delayed signal and a second portion of the delayed signal. The first delay waveguide 280 conveys the first portion of the delayed signal to a first optical combining element 282. The second delay waveguide 284 conveys the second portion of the delayed signal to a second optical combining element 286.

[0134] The second splitter 278 splits the encouragement signal into a first portion of the encouragement signal and a second portion of the encouragement signal. The first encouragement waveguide 290 conveys the first portion of the encouragement signal to the first optical combining element 282. The second encouragement waveguide 292 conveys the second portion of the encouragement signal to the second optical combining element 286.

[0135] The first optical combining element 282 combines a first portion of the prompt signal and a first portion of the delayed signal into the first pulsatile signal, and the second optical combining element 286 combines a second portion of the prompt signal and a second portion of the delayed signal into the second pulsatile signal, such that each of the delay paths extends from the splitter to an optical combiner that combines light from one of the delayed path signals with light from one of the prompt path signals.

[0136] As discussed above, the length of the delay path exceeds the length of the prompt path. As a result, the second portion of the delayed signal is delayed relative to the second portion of the prompt signal. Because the electronics can adjust the frequency of the outgoing LIDAR signal, this delay causes the second portion of the delayed signal to have a different frequency than the second portion of the prompt signal. Due to the difference in frequency between the second portion of the prompt signal and the second portion of the delayed signal, the second pulsating signal pulsates between the second portion of the prompt signal and the second portion of the delayed signal.

[0137] The second optical coupling element 286 also splits the second pulsatile signal into a first auxiliary detector waveguide 294 and a second auxiliary detector waveguide 296. The first auxiliary detector waveguide 294 conveys a first portion of the second pulsatile signal to a first auxiliary optical sensor 298, which converts the first portion of the second pulsatile signal into a first auxiliary electrical signal. The second auxiliary detector waveguide 296 conveys a second portion of the second pulsatile signal to a second auxiliary optical sensor 300, which converts the second portion of the second pulsatile signal into a second auxiliary electrical signal. Examples of suitable optical sensors include germanium photodiodes (PDs) and avalanche photodiodes (APDs).

[0138] In some cases, the second optical coupling element 286 splits the second pulsating signal such that a portion of the promotion signal (i.e., a portion of the second portion of the promotion signal) included in the first portion of the second pulsating signal is phase-shifted by 180 degrees relative to a portion of the promotion signal (i.e., a portion of the second portion of the promotion signal) in the second portion of the second pulsating signal, but a portion of the delayed signal (i.e., a portion of the second portion of the delayed signal) in the second portion of the second pulsating signal is not phase-shifted relative to a portion of the delayed signal (i.e., a portion of the second portion of the delayed signal) in the first portion of the second pulsating signal.

[0139] As described above, the length of the delay path exceeds the length of the promotion path. As a result, the first portion of the delayed signal is delayed relative to the first portion of the promotion signal. This delay causes the first portion of the delayed signal to have a different frequency than the first portion of the promotion signal. Due to the difference in frequency between the first portion of the promotion signal and the first portion of the delayed signal, the first pulsating signal pulsates between the second portion of the promotion signal and the second portion of the delayed signal.

[0140] The first optical coupling element 282 also splits the first pulsatile signal into a first detector waveguide 302 and a second detector waveguide 304. The first detector waveguide 302 conveys a first portion of the first pulsatile signal to a first optical sensor 306, which converts the first portion of the second pulsatile signal into a first electrical signal. The second detector waveguide 304 conveys a second portion of the second pulsatile signal to a second optical sensor 308, which converts the second portion of the second pulsatile signal into a second electrical signal. Examples of suitable optical sensors include germanium photodiodes (PDs) and avalanche photodiodes (APDs).

[0141] In some cases, the first optical coupling element 282 splits the first pulsating signal such that a portion of the promotion signal (i.e., a portion of the first portion of the promotion signal) included in the first portion of the pulsating signal is phase-shifted by 180 degrees relative to a portion of the promotion signal (i.e., a portion of the first portion of the promotion signal) in the second portion of the pulsating signal, but a portion of the delayed signal (i.e., a portion of the first portion of the delayed signal) in the first portion of the pulsating signal is not phase-shifted relative to a portion of the delayed signal (i.e., a portion of the first portion of the delayed signal) in the second portion of the pulsating signal.

[0142] When the second optical combining element 286 splits the second pulsating signal such that the portion of the promotion signal in the first portion of the second pulsating signal is phase shifted 180° relative to the portion of the promotion signal in the second portion of the second pulsating signal, the first optical combining element 282 also splits the pulsating signal such that the portion of the promotion signal in the first portion of the pulsating signal is phase shifted 180° relative to the portion of the promotion signal in the second portion of the pulsating signal.

[0143] The first delay waveguide 280, the second delay waveguide 284, the first facilitate waveguide 80, and the second facilitate waveguide 292 can be configured such that the first pulsating signal and the second pulsating signal together function as an in-phase component and a quadrature component of the optical process variable signal, where the first pulsating signal is the in-phase component of the optical process variable signal and the second pulsating signal is the quadrature component of the optical process variable signal. Or, the second pulsating signal is the in-phase component of the optical process variable signal and the first pulsating signal is the quadrature component of the optical process variable signal. For example, the first delay waveguide 280 and the second delay waveguide 284 can be constructed to provide a phase shift between the first portion of the delayed signal and the second portion of the delayed signal, while the first facilitate waveguide 80 and the second facilitate waveguide 292 are constructed such that the first portion of the facilitate signal and the second portion of the facilitate signal are in phase. As an example, the first delay waveguide 280 and the second delay waveguide 284 can be constructed to provide a 90° phase shift between the first portion of the delayed signal and the second portion of the delayed signal. Thus, one of the delayed signal portions can be a sine function and the other delayed signal portion can be a cosine function operated with the same arguments as the sine function. In one example, the first delay waveguide 280 and the second delay waveguide 284 are constructed such that the first portion of the delayed signal is a cosine function and the second portion of the delayed signal is a sine function. In this example, the portion of the delayed signal in the second pulsating signal is phase shifted relative to the portion of the delayed signal in the first pulsating signal, but the portion of the prompt signal in the first pulsating signal is not phase shifted relative to the portion of the prompt signal in the second pulsating signal.

[0144] In another example, the first and second delay waveguides 280 and 284 are constructed such that the first and second portions of the delayed signal are in phase, while the first and second facilitate waveguides 80 and 292 are constructed to provide a phase shift between the first and second portions of the facilitate signal. As an example, the first and second facilitate waveguides 80 and 292 can be constructed to provide a 90° phase shift between the first and second portions of the facilitate signal. Thus, one of the facilitate signal portions can be a sine function and the other facilitate signal portion can be a cosine function operated with the same arguments as the sine function. In one example, the first and second facilitate waveguides 80 and 292 are constructed such that the first and second portions of the facilitate signal are a cosine function and the second portion of the facilitate signal is a sine function operated with the same arguments as the cosine function. In this example, the portion of the promotion signal in the second pulsating signal is phase shifted relative to the portion of the promotion signal in the first pulsating signal, but the portion of the delayed signal in the first pulsating signal is not phase shifted relative to the portion of the delayed signal in the second pulsating signal.

[0145] The first light sensor 306 and the second light sensor 308 can be connected as a balanced detector, and the first auxiliary light sensor 298 and the second auxiliary light sensor 300 can also be connected as a balanced detector. For example, FIG. 8B provides a schematic diagram of the relationship between the electronics 62, the first light sensor 306, the second light sensor 308, the first auxiliary light sensor 298, and the second auxiliary light sensor 300. Although a photodiode symbol is used to represent the first light sensor 306, the second light sensor 308, the first auxiliary light sensor 298, and the second auxiliary light sensor 300, one or more of these sensors can have other configurations. In some cases, all of the components shown in the schematic diagram of FIG. 8B are included in the LIDAR chip. In some cases, the components shown in the schematic diagram of FIG. 8B are distributed between the LIDAR chip and electronics located outside the LIDAR chip.

[0146] The electronics 62 connects the first photosensor 306 and the second photosensor 308 as a first balanced detector 312 and connects the first auxiliary photosensor 298 and the second auxiliary photosensor 300 as a second balanced detector 314. In particular, the first photosensor 306 and the second photosensor 308 are connected in series. Also, the first auxiliary photosensor 298 and the second auxiliary photosensor 300 are connected in series. The series connection of the first balanced detector is in communication with a first data line 316 that carries the output from the first balanced detector as a first process variable signal. The series connection of the second balanced detector is in communication with a second data line 318 that carries the output from the second balanced detector as a second process variable signal.

[0147] The first process variable signal is an electrical representation of the first pulsating signal, and the second process variable signal is an electrical representation of the second pulsating signal. Thus, the first process variable signal is pulsating and the second process variable signal is pulsating. Also, the first process variable signal and the second process variable signal can each carry a different one of components selected from the group consisting of an in-phase component of the process variable signal and a quadrature component of the process variable signal. For example, the first process variable signal can include contributions from a first waveform and a second waveform, and the second process variable signal can include contributions from the first waveform and the second waveform. A portion of the first waveform in the first process variable signal is phase shifted relative to a portion of the first waveform in the second process variable signal, while a portion of the second waveform in the first process variable signal is in phase with a portion of the second waveform in the second process variable signal. For example, the second process variable signal can include a portion of a delayed signal that is phase shifted relative to a different portion of the delayed signal included in the first process variable signal. Also, the second process variable signal can include a portion of an expedited signal that is in phase with a different portion of an expedited signal included in the first process variable signal. The first process variable signal and the second process variable signal are pulsating as a result of the pulsations between the prompt and delayed signals, i.e., the pulsations in the first pulsatile signal and the second pulsatile signal, respectively.

[0148] The electronics 62 includes a process variable identification element 320 that receives the process variable signal. The process variable identification element 320 uses the process variable signal to output an indicative signal. The indicative signal is a channel signal (f CS ) and can be used to measure its frequency. In some cases, the indicator signal is a function of and / or a function of the frequency of the channel signal (f CS ) is an analog signal having one or more characteristics related to the frequency of the channel signal (f CS ) is a digital signal that quantifies the frequency of the channel signal (f CS ) or the frequency of the channel signal (f CS ) can be used to quantify the frequency of the channel λ i The system output signal carrying the channel λ i Since the frequency of the channel signal is a part of the channel LIDAR signal carrying the outgoing LIDAR signal and / or the channel λ i can represent the value of the frequency of the system output signal carrying

[0149] The electronics may include an optical control element 322 that receives the instruction signal. The optical control element 322 may control the laser source 68 (FIG. 1B) that is the source of the channel received by the control element 74 in response to the instruction signal. For example, the laser source 68 may be controlled with a control construct in which the frequency of the channel signal output by the laser source 68 serves as the controlled process variable. When the controlled process variable is the frequency of the channel signal, the desired frequency of the system output signal serves as the reference variable. Since the frequency of the system output signal is modulated, the desired frequency of the system output signal varies as a function of time. In the case of triangular modulation, FIG. 7C may represent an example of a desired waveform. FIG. 7C illustrates the desired frequency of the channel signal and the resulting system output signal accordingly as a linear function of time. Thus, the control element 74, the process variable identification element 320, and the channel λ iλ , the optical control element 322 that receives the laser source 68 controls the frequency of the channel signal λ , so that the frequency of the channel signal output from the laser source 68 substantially maintains the desired waveform. i The control mechanism may be part of a control mechanism that controls a laser source 68, which is a source of the light. Suitable control mechanisms include, but are not limited to, control constructs that utilize feedback control and / or feedforward control. Thus, the control mechanism may be a feedback control loop and / or may include a control loop.

[0150] The optical control element 322 may control characteristics of the channel signal and / or the system output signal in response to a value of an error signal measured from a value of the controlled process variable at a particular time and a value of a reference variable at the same time. For example, the optical control element 322 may control the characteristics of the channel signal to reduce the value of the error signal. As an example, the optical control element 322 may control the characteristics of the channel signal such that the value of the controlled process variable approaches the value of the reference variable. In some cases, the control mechanism is a control loop, such as a feedback control loop. If the control mechanism is a feedback control loop, the error signal of the control mechanism may be equal to the difference between the value of the controlled process variable and the value of the reference variable at a particular time.

[0151] If the process variable is a frequency of the channel signal, the optical control element 322 can send an optical control signal to adjust the frequency of the channel signal. For example, the optical control element 322 can adjust the frequency of the channel signal by sending an optical control signal that changes a level of current through a laser source that outputs the channel signal. Other optical control signals are possible. For example, if the laser source is an electrostatic MEMS tunable laser, the optical control element 322 can adjust the frequency of the channel signal by sending an optical control signal that changes a voltage level that drives a MEMS facet of the MEMS tunable laser.

[0152] In some cases, the light control element 322 and / or the process variable identification element 320 may be configured to control the frequency (f CS) of the channel signal, but such quantification is not required. For example, CS ), the channel signal frequency (f CS The optical control signal can be derived directly from the instruction signal without actually quantifying the instantaneous frequency. For example, the control signal can be a one-to-one function of the instruction signal and / or the conversion signal described below. As an example, the control signal can be a one-to-one function of the instantaneous frequency.

[0153] FIGURE 8C illustrates the amplitude of the in-phase and quadrature components of the process variable signal over the same time axis as the frequency of the optical process variable signal and / or system output signal. For example, FIGURE 8C can compare the frequency of the system output signal during the first two data periods shown in FIGURE 7C with the variations in the in-phase and quadrature components of the optical process variable signal and / or process variable signal. Although FIGURE 8C illustrates the optical process variable signal and / or process variable signal having only one period per data period, the optical process variable signal and / or process variable signal can have more than one period per data period.

[0154] Various process variable identification elements 320 can be used to measure the value of the process variable index. Figure 8D illustrates an example of a process variable identification element 320 applied when the process variable is the frequency of the channel signal and / or the system output signal. The illustrated process variable identification element 320 includes a local oscillator 324 that outputs local signals including a first local signal and a second local signal. The first local signal and the second local signal each carry a different one of components selected from the group consisting of an in-phase component of the local signal and a quadrature component of the local signal.

[0155] The process variable identification element 320 also includes a first multiplier 326 that receives the first process variable signal and the first local signal. The first multiplier 326 multiplies the first process variable signal with the first local signal. If the first process variable signal carries an in-phase component of the process variable signal, the first local signal carries a quadrature component of the local signal. If the first process variable signal carries a quadrature component of the process variable signal, the first local signal carries an in-phase component of the local signal. The first multiplier 326 outputs the first multiplied signal.

[0156] The process variable identification element 320 also includes a second multiplier 328 that receives the second process variable signal and the second local signal. The second multiplier 328 multiplies the second process variable signal with the second local signal. If the second process variable signal carries an in-phase component of the process variable signal, the second local signal carries a quadrature component of the local signal. If the second process variable signal carries a quadrature component of the process variable signal, the second local signal carries an in-phase component of the local signal. The second multiplier 326 outputs the second multiplied signal.

[0157] The process variable identification element 320 includes a summer 330 that receives the first multiplied signal and the second multiplied signal. The summer 330 sums the first multiplied signal and the second multiplied signal to output a control signal.

[0158] The control signal is received by a process variable estimator 334. The process variable estimator 334 uses the control signal to adjust the frequency (f CS ) of the channel signal. For example, the process variable estimator 334 may output an indicative signal having one or more characteristics related to the frequency (f CS ) of the channel signal. In some cases, the time-to-digital converter (TDC) may be a time-to-digital converter (TDC) that outputs an indicator signal having a voltage related to the frequency (f CS ) which can be received by the light control element 322 for use in controlling the frequency of the laser source.

[0159] Another example of a suitable process variable estimator 334 is a frequency counter that outputs an indicator signal indicative of the time between baseline crossings (dn) of the control signal. CS ) can be related to the time between baseline crossings (dn) by Equation 1: TS =f LO -1 / (2*dn), where f LO represents the frequency of the local oscillator. The process variable estimator 334 estimates the channel signal (f CS ) can output an instruction signal carrying data indicative of the value of the measured frequency for the laser source. The instruction signal can be received by the optical control element 322 for use in controlling the frequency of the laser source.

[0160] The local signal is selected such that the frequency of the control signal is higher than the frequency of the process variable signal. Increasing the frequency of the control signal increases the frequency at which the process variable can be accurately sampled. Increasing this sampling frequency results in more accurate control of the process variable by the control mechanism. As a result, increasing the frequency of the control signal enhances the control of the process variable by the control mechanism. Suitable sampling frequencies include, but are not limited to, sampling frequencies greater than 100 times the modulation frequency, where the modulation frequency is 1 / (period of a cycle). In some cases, all or a portion of the data period in each cycle has a sampling frequency greater than 30 or 100 times the duration of the data period. In some cases, the local signal is selected such that the frequency of the control signal is greater than 100 times, but less than 10,000 times, the frequency of the process variable signal.

[0161] 8E illustrates another example of a suitable process variable identification element 320 for use when the process variable is the frequency of the channel signal and / or the system output signal. The process variable identification element 320 includes an analog-to-digital converter (ADC) 340 that receives the control signal from the summer 330. The analog-to-digital converter (ADC) 340 converts the first process variable signal from an analog form to a digital form and outputs a digital data signal. The digital data signal is a digital representation of the control signal.

[0162] The process variable identification element 320 includes a conversion element 342 that receives the digital data signal. The conversion element 342 performs a mathematical transformation on the digital data signal. The mathematical transformation is selected such that the conversion element 342 outputs a transformed signal that is related to, includes, or is indicative of the frequency of the LIDAR output signal. A suitable first mathematical transformation includes, but is not limited to, a Hilbert transform. The Hilbert transform outputs a transformed signal that is indicative of the instantaneous phase, i.e., frequency, of the control signal.

[0163] The transformed signal is received by a frequency estimator 344. The frequency estimator may be configured to output an indicator signal related to, including, and / or indicative of the frequency of the LIDAR output signal. For example, the frequency estimator may calculate the instantaneous frequency relative to the frequency of the channel signal (f CS ) can be converted to:f CS =(finst-f LO )*(T / τ'), where f LO is the frequency of the local oscillator, finst is the instantaneous frequency extracted from the Hilbert transform, T is the duration of a data period in the triangular modulation scheme, and τ' is the delay resulting from the difference in length between the delay waveguide 62 and the forward waveguide 66. Thus, the instruction signal is a frequency signal having a frequency (f CS ) The instruction signal can be received by the light control element 322 for use in controlling the frequency of the laser source.

[0164] Although the indicator signal has been described in the context of a signal carrying data regarding the frequency of a channel signal, the indicator signal may carry data that is indirectly related to the frequency of the channel signal. For example, the indicator signal may carry data that can be used to measure the frequency of the channel signal. As an example, TS ) can be measured from the rate of phase change of the channel signal. Thus, the indicator signal can carry data indicative of the rate of phase change of the channel signal.

[0165] The process variable discriminating element 320, by combining information from the in-phase and quadrature components at any one time, reduces the amount of delay that needs to be generated by the delay waveguide 62 to increase the sensitivity of the indicator signal to the frequency of the channel signal. Prior systems have attempted to increase this sensitivity by increasing the length of the delay path. Because the process variable discriminating element 320 increases the sensitivity of the indicator signal, the length of the delay path can exceed the length of the facilitate path by an amount less than that achievable in prior systems. For example, the time delay in the path to the control element 74 can exceed the time delay in the facilitate path to the control element 74 by an amount greater than or equal to 50 ps and less than or equal to 100 ns. In one example, the length of the delay path exceeds the length of the facilitate path by an amount less than 1000 cm, less than 500 cm, or less than 100 cm, and greater than 0.0 cm or 0.4 cm. In one example, the delay path and the facilitate path to the same control element 74 guide light through silicon, and the length of the delay path exceeds the length of the facilitate path by an amount less than 1000 cm and greater than 0.0 cm or 0.4 cm.

[0166] 8A-8E show an example of a control element suitable for use as all or part of the control element 74 disclosed in connection with FIGS. 1A-4. As discussed above, each of the control elements 74 receives a delay path signal and an expedited path signal carrying the same channel. In some cases, the laser sources 68 are constructed such that different channel signals each carry a different channel and are output from different laser sources 68. For example, FIG. 1B shows a possible light source 10 configuration in which different channel signals each are output from different laser sources 68. In these examples, each of the different control elements 74 can be used to control the source of the channel signal carrying the channel received by the control element. For example, each of the different control elements 74 can be included in a feedback control loop that controls the frequency of the channel signal carrying the channel received by the control element and operates the laser source accordingly to control the system output signal carrying the same channel. The electronics can operate the feedback control loops independently and independently operate the laser sources in those feedback control loops accordingly.

[0167] The LIDAR system described above shows a single system output signal carrying each channel. As a result, each control mechanism can control the frequency versus time pattern of a different one of the single system output signals. However, the LIDAR system can be constructed such that multiple different system output signals carry the same channel. For example, the LIDAR output signal can be split into multiple different signals, each of which can be used as a source of a system output signal. In this case, one or more control mechanisms can each control the frequency versus time pattern of multiple different system output signals carrying the same channel.

[0168] 8A-8E operate on an in-phase component of the process variable signal and a quadrature component of the process variable signal. However, the control element can be configured to operate on the in-phase component of the process variable signal and exclude the quadrature component of the process variable signal. As a result, the control element can exclude the second optical coupling element 286. Thus, the control element can include one optical coupler and the delay and expedited paths to the control element can extend to only one optical coupler within the control element.

[0169] Although the LIDAR system is disclosed as having multiple control mechanisms, each including one of the control elements 74, the LIDAR system may include as few as one control mechanism. For example, the laser sources 68 may be configured to adjust the frequency of one of the laser sources 68 to a rate α i , the other laser source 68 can be configured to be adjusted at the same rate, in such a way that controlling one of the laser sources 68 as disclosed above provides the desired adjustment to each laser source, and accordingly provides the desired frequency versus time pattern in each system output signal.

[0170] As mentioned above, a delay waveguide such as the delay waveguide 62 and / or the first delay waveguide 80 can include a delay section 70 that can be used to increase the length of the delay waveguide beyond the length of the promotion waveguide 66. The delay section 70 can represent a helical arrangement of the delay waveguide 62. The helical arrangement is selected to reduce the amount of space that the longer waveguide takes up. FIG. 9 shows a portion of the delay waveguide 62 or the first delay waveguide 80 having a helical arrangement. Near the center of the helical arrangement, the waveguide turns around and returns to its original position. The helical arrangement is selected such that the portion of the waveguide with the smallest radius of curvature (denoted Rmin) has a radius of curvature that exceeds a curvature threshold. Suitable curvature thresholds include, but are not limited to, curvature thresholds of 0.025 mm, 0.1 mm, and 0.3 mm or greater. Although the helical arrangement is shown with a geometric shape that approximates a circle, the helical arrangement may be other geometric shapes such as a shape that approximates an ellipse, a rectangle, or a triangle. As a result, the helical arrangement may include straight and / or substantially straight waveguide segments.

[0171] Suitable platforms for LIDAR chips include, but are not limited to, silica, indium phosphide, and silicon-on-insulator wafers. FIG. 10A is a cross-sectional view of a portion of a chip constructed from a silicon-on-insulator wafer. A silicon-on-insulator (SOI) wafer includes a buried layer 350 between a substrate 352 and an optically transmissive medium 354. In a silicon-on-insulator wafer, the buried layer 350 is silica, and the substrate 352 and optically transmissive medium 354 are silicon. The substrate 352 of an optical platform such as a SOI wafer can serve as the base for the entire LIDAR chip. For example, the optical components shown on the LIDAR chips of FIGS. 1A-4 can be located on or on the top and / or sides of the substrate 352.

[0172] 10A is a cross-sectional view of a portion of a LIDAR chip including a waveguide structure applied to a LIDAR chip constructed from a silicon-on-insulator wafer. A ridge 356 of optically transmissive medium extends away from a planar region 358 of optically transmissive medium. The optical signal is confined between the top of the ridge 356 and a buried oxide layer 350.

[0173] The dimensions of the ridge waveguide are shown in FIG. 10A. For example, the ridge has a width, denoted w, and a height, denoted h. The thickness of the plate region is denoted T. For LIDAR applications, these dimensions may be more important than others because of the need to use higher levels of optical power than are used in other applications. The ridge width (denoted w) is greater than 1 μm and less than 4 μm, the ridge height (denoted h) is greater than 1 μm and less than 4 μm, and the thickness of the plate region is greater than 0.5 μm and less than 3 μm. These dimensions may apply to straight or substantially straight portions of the waveguide, curved portions of the waveguide, and tapered portions of the waveguide. These portions of the waveguide are thus single mode. However, in some cases, these dimensions apply to straight or substantially straight portions of the waveguide. Additionally or alternatively, the plate thickness of the curved portions of the waveguide may be reduced to reduce optical loss in the curved portions of the waveguide. For example, the curved portion of the waveguide may have a ridge extending away from the plate region having a thickness of 0.0 μm or more and less than 0.5 μm. The above dimensions generally provide a single mode structure for the straight or substantially straight portions of the waveguide, but the tapered and / or curved portions may result in multimode. Coupling between multimode and single mode geometries can be achieved using tapers that do not substantially excite higher order modes. Thus, the waveguide can be constructed such that the signal carried in the waveguide is carried in a single mode even when carried in a waveguide section having multimode dimensions. The waveguide construction disclosed in the context of FIG. 10A is suitable for all or part of the waveguide on a LIDAR chip constructed according to FIGS. 1A to 4.

[0174] 10B-10D show an example of a feedback device 82 built on a silicon-on-insulator platform and applied on a LIDAR chip built according to FIG. 2 and FIG. 4. FIG. 10B is a top view of a portion of a LIDAR chip having a feedback device 82. FIG. 10C is a cross-sectional view of the feedback device 82 taken along the line labeled C in FIG. 10B. FIG. 10D is a cross-sectional view of the feedback device 82 taken along the line labeled C in FIG. 10B.

[0175] The illustrated feedback device 82 includes a recess 360 that extends partially or completely through the optically transmissive medium 354. Although the illustrated recess 360 does not extend into the buried layer 350, the illustrated recess 360 can extend into or through the buried layer 350. A surface of the recess 360 serves as a return surface 362. The return surface 362 is configured such that at least a portion of the optical signal incident on the return surface 362 from the optical transport medium 354 is returned to the optical transport medium 354. The mechanism by which the feedback occurs can be reflection at or by the return surface 362. For example, the recess medium 366 can be disposed within the recess 360 and in contact with the return surface 362. The recess medium 366 can fill the recess 360 or can be a layer of material in contact with the return surface 362. The recess medium 366 can be a fluid or a solid. 10C, the recess medium 366 can be a solid that also functions as a cladding 368 for the output element. In some cases, the recess medium 366 has a lower index of refraction than the optically transmitting medium 354, causing reflection at the return surface 362. Suitable recess media having a lower index of refraction than the optically transmitting medium 354 include, but are not limited to, air, epoxy, silicon dioxide, and silicon nitride. Suitable recess media having a lower index of refraction than the optically transmitting medium 354 that also function as a cladding include, but are not limited to, silicon dioxide and silicon nitride.

[0176] In some cases, the recessed medium 366 is a medium that reflects the outgoing LIDAR signal or the incoming signal off the return surface 352. For example, the recessed medium 366 may be a reflective material 370 in contact with the return surface 352. FIG. 10D shows a layer of reflective material 370 in contact with the return surface 352. Although FIG. 10D shows the cladding positioned such that it is on the recessed medium 366 and extends into the recess 360, the cladding is optional. Suitable reflective materials 370 include, but are not limited to, multilayer dielectric films including silicon dioxide, hafnium oxide, and aluminum oxide, and metals such as aluminum, nickel, and gold. Suitable claddings include, but are not limited to, silicon dioxide, silicon nitride, and aluminum oxide.

[0177] The light sensor interfering with the waveguide on the LIDAR chip may be a component separate from the chip and subsequently attached to the chip. For example, the light sensor may be a photodiode or an avalanche photodiode. Examples of suitable light sensor elements include, but are not limited to, InGAs PIN photodiodes manufactured by Hamamatsu Corporation, Hamamatsu, Japan, or InGAs APD (Avalanche Photodiode) manufactured by Hamamatsu Corporation, Hamamatsu, Japan. These light sensors may be located in the center of the LIDAR chip. Alternatively, all or a portion of the waveguide terminating in the light sensor may terminate in a facet located at the edge of the chip, and the light sensor may be attached to the edge of the chip on the facet to receive light passing through the facet. The use of a light sensor that is a separate component from the chip is suitable for all or a portion of the light sensors selected from the group consisting of the first auxiliary light sensor 218, the second auxiliary light sensor 220, the first light sensor 223, and the second light sensor 224.

[0178] As an alternative to a light sensor that is a separate component, all or a portion of the light sensor can be integrated with the chip. For example, examples of light sensors interfering with ridge waveguides on chips constructed from silicon-on-insulator wafers can be found in Optics Express Vol. 15, No. 21, pp. 13965-13971 (2007); U.S. Patent No. 8,093,080 issued Jan. 10, 2012; U.S. Patent No. 8,242,432 issued Aug. 14, 2012; and U.S. Patent No. 6,108,8472 issued Aug. 22, 2000, each of which is incorporated herein in its entirety. The use of a light sensor integrated with the chip is suitable for all or a portion of the light sensors selected from the group consisting of the auxiliary light sensor 218, the second auxiliary light sensor 220, the first light sensor 223, and the second light sensor 224.

[0179] A suitable laser source 68 may be a laser chip that is separate from the LIDAR chip and then attached to the LIDAR chip. For example, the laser source 68 may be a laser chip that is attached to the chip using a flip-chip arrangement. Use of a flip-chip arrangement is suitable when the laser source 68 is interfaced with a ridge waveguide on a chip constructed from a silicon-on-insulator wafer. Alternatively, the utility waveguide 12 may include an optical grating (not shown), such as a Bragg grating, that serves as a reflector for an external cavity laser. In these examples, the laser source 68 may include a gain element that is separate from the LIDAR chip and then attached to the LIDAR chip in a flip-chip arrangement. Examples of suitable interfaces between flip-chip gain elements and ridge waveguides on chips constructed from silicon-on-insulator wafers may be found in U.S. Pat. No. 9,705,278, issued July 11, 2017, and U.S. Pat. No. 5,991,484, issued November 23, 1999. If the laser source 68 is a gain element or laser chip, the electronics 62 can change the frequency of the channel signal by changing the level of current applied through the gain element or laser cavity.

[0180] Suitable electronics 62 include, but are not limited to, electronic controllers that include or consist of analog electrical circuitry, digital electrical circuitry, processors, microprocessors, digital signal processors (DSPs), field programmable gate arrays (FPGAs), computers, microcomputers, or combinations thereof suitable for performing the operation, control, and control functions described above. In some cases, the electronic controller accesses a memory that contains instructions that are executed by the electronic controller in performing the operation, control, and monitoring functions. Although the electronics is shown as a single component in a single location, the electronics can include multiple different components that are separate from one another and / or located in different locations. Also, as noted above, all or a portion of the disclosed electronics can be included on a chip, including electronics integrated with the chip.

[0181] The LIDAR system described above includes multiple optical components, such as a LIDAR chip, a LIDAR adapter, a light source, a light sensor, a waveguide, an amplifier, etc. In some cases, the LIDAR system includes one or more passive optical components in addition to or as an alternative to the optical components shown. The passive optical components may be solid components with no moving parts. Suitable passive optical components include, but are not limited to, lenses, mirrors, optical gratings, reflective surfaces, splitters, demultiplexers, combiners, polarizers, polarization splitters, and polarization rotators. In some cases, the LIDAR system includes one or more active optical components in addition to or as an alternative to the optical components shown. Suitable active optical components include, but are not limited to, optical switches, phase tuners, attenuators, steerable mirrors, steerable lenses, tunable demultiplexers, tunable combiners.

[0182] Other embodiments, combinations, and modifications of this invention will occur to those of ordinary skill in the art in light of these teachings. Accordingly, this invention is to be limited only by the claims, which include all such embodiments and modifications, when viewed in conjunction with the above specification and accompanying drawings.

Claims

1. 1. A LIDAR system comprising one or more optical splitters and a plurality of optical combiners, The LIDAR system has a plurality of optical paths through which an optical signal can pass, the optical paths including a plurality of delay paths each extending from a first one of the one or more splitters to a different one of the optical combiners; and the optical paths include promotion paths each extending from a first one of the one or more splitters to a different one of the optical combiners; the promotion path being separated from the delay path by a first divider of one or more dividers; each optical combiner having one of the delay paths and one of the promotion paths extending thereto; the delay paths and the expediting paths are configured such that the delay path to each optical combiner is longer than the expediting path to the same optical combiner; and each delay path has a common portion and an isolated portion, the common portion of the delay paths being shared by each of the delay paths and the isolated portion of each delay path being isolated from the other delay paths; LIDAR system.

2. The system of claim 1 , wherein the common portion comprises a helical waveguide.

3. The system of claim 1 , wherein each of the delay waveguides includes a plurality of discrete sections.

4. The system of claim 1 , wherein the optical signal passing through the common portion carries multiple channels and the optical signal passing through the separate portion carries a single channel.

5. The system of claim 1 , wherein each of the delay paths extends from the same one of the one or more dividers.

6. The system of claim 1 , wherein each of the facilitated paths extends from a different splitter.

7. The system of claim 1 , wherein each of the facilitated paths extends from the same divider.

8. The system of claim 1 , wherein each of the delay paths and each of the expedited paths extend from a same one of the one or more splitters.

9. The system of claim 1 , wherein each of the one or more splitters is a wavelength dependent splitter.

10. The system of claim 1 , wherein the delay path and the promotion path are configured to extend to the same optical combiner such that the delay path and the promotion path extend from the same one of the one or more splitters.

11. the LIDAR system is configured to output a system output signal that can travel away from the LIDAR system and be reflected by objects located outside the LIDAR system; and electronics configured to control a frequency of each of the system output signals, the electronics controlling the frequency using an electrical process variable signal, the process variable signal including an in-phase component and a quadrature component, the process variable being generated from an optical signal received from one of the delay paths and one of the promotion paths; The system of claim 1 .

12. 10. The system of claim 1, wherein the delay path and the expedited path are included in an optical integrated circuit on a LIDAR chip.

13. 10. The system of claim 1, wherein the LIDAR chip has a silicon-on-insulator platform.

14. 1. A LIDAR (light detection and ranging) system including an optical splitter and an optical combiner, The LIDAR system is configured to output a system output signal, the LIDAR system having a plurality of optical paths through which an optical signal may pass, the optical paths including a delay path each extending from the splitter to the optical combiner; and the optical paths include promotion paths each extending from the splitter to the optical combiner; the delay path and the expedited path are configured such that the delay path is longer than the expedited path; and 1. A LIDAR system comprising: a delay path having a feedback element configured to receive a delay path optical signal traveling along the delay path in a first direction and to feed the delay path optical signal back to the delay path traveling in a second direction opposite the first direction.

15. The system of claim 14 , wherein the feedback element is a mirror.

16. The system of claim 14 , wherein the delay path comprises a helical waveguide.

17. the LIDAR system is configured to output a system output signal that can travel away from the LIDAR system and be reflected by objects located outside the LIDAR system; and electronics configured to control a frequency of the system output signal, the electronics controlling the frequency using an electrical process variable signal, the process variable signal including an in-phase component and a quadrature component, the process variable being generated from optical signals received from the delay path and the promotion path; The system of claim 14.

18. 15. The system of claim 14, wherein the delay path and the expedited path are included in an optical integrated circuit on a LIDAR chip.

19. The system of claim 16 , wherein the splitter is a wavelength dependent splitter.

20. The system of claim 1, wherein the optical paths are configured such that the optical signals on the delay paths and the expedited paths to each coupler transmit the same channel, but the optical signals on the delay paths and the expedited paths to different couplers transmit different channels.

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