Compact optical microscope, measuring device equipped with said optical microscope, and wafer position measuring apparatus equipped with said measuring device

JP2024516945A5Pending Publication Date: 2026-06-18ニアフィールド インスツルメンツ ビーブイ
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
ニアフィールド インスツルメンツ ビーブイ
Filing Date
2022-04-12
Publication Date
2026-06-18

AI Technical Summary

Technical Problem

Existing optical microscopes struggle to provide qualitatively acceptable wide-field images with a short total path through the system, particularly in applications requiring a field of view of at least 1 mm x 1 mm, and suffer from issues of image quality and distortion.

Method used

An optical microscope design comprising a series of lenses with semi-reflective coatings, arranged to maintain an angle of incidence of light rays within 2.6 degrees of the surface normal, ensuring diffraction-limited performance and low distortion over a wide field of view.

Benefits of technology

The design achieves diffraction-limited performance, low distortion, and low field curvature over an extended field of view, with spot sizes well below 20 microns and distortion less than 0.5% across a 1 mm radius, using a compact configuration.

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Abstract

Provided herein is an optical microscope (1) configured to provide an image in an image plane (3) of an object in an object plane (5). The optical microscope comprises, in order along an optical axis (6) from the object plane to the image plane, a first lens (7), a second lens (11) and a third lens (14). The first lens (7) has a first lens surface (8) on the side of the object plane and a second lens surface (9) on the side of the image plane, where the first lens surface (8) has a first semi-reflective coating (10). The second lens (11) has a third lens surface (12) on the side of the object plane and a fourth lens surface (13) on the side of the image plane. The third lens (14) has a fifth lens surface (15) on the side of the object plane and a sixth lens surface (16) on the side of the image plane, where the sixth lens surface (16) has a second semi-reflective coating (17). The optical microscope is compact and provides diffraction-limited performance (MTF) over the entire field of view, along with low distortion and low curvature of field.
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