System and method for measuring inner wall of deep arrowhead workpiece

Abstract

The present invention relates to a method for measuring the overall surface shape of the inner wall of a deep arrow workpiece, specifically to a measuring system for measuring the overall surface shape of the inner wall of a deep arrow workpiece by using two sensors to measure different areas of the inner wall and then combining the surface shapes, a horizontal mounting surface is provided on which an XY positioning base is installed. The XY positioning base includes an X-direction moving base moving in the X direction and a Y-direction moving base moving in the Y direction, a rotation base is installed on the XY positioning base and used to rotate in the Z direction, a workpiece holder is installed on the rotation base and used to place a deep arrow workpiece, a vertical holder is installed on which a Z-direction moving base moving in the Z direction is installed, a side measuring instrument is installed on the Z-direction moving base and used to measure the side wall of the inner wall of the deep arrow workpiece, and an axial measuring instrument is installed on the Z-direction moving base and used to measure the bottom wall of the inner wall of the deep arrow workpiece. This patent uses the side measuring instrument and the axial measuring instrument together to measure the wall shape of the inner wall of the deep arrow workpiece. The measurement structure and method are not affected by light, and can achieve the purpose of measuring all kinds of deep and high workpieces with different dimensions.

Description

[Technical field]

[0001] The present invention relates to a method for measuring the overall surface profile of the inner wall of a deep-arrow workpiece, in particular to a method and measuring system for measuring the overall surface profile of the inner wall of a deep-arrow workpiece by using two sensors to measure different areas of the inner wall separately and then joining the surface profiles together. [Background technology]

[0002] Deep Yataka workpieces are widely used in precision equipment in the fields of aeronautics, aerospace, nuclear physics, etc. Due to their unique geometric shape and specific performance, they play a role that cannot be replaced by other single or assembled parts. At the same time, due to their critical position, when they are installed in these ultra-precise equipment, the errors in their geometry and contour will cause larger installation errors, which will reduce the precision and reliability of the equipment. Therefore, as the requirements for the performance of these ultra-precise equipment become increasingly strict, the requirements for deep Yataka workpieces are also becoming higher. In particular, the requirements for the accuracy of the geometric dimensions of their inner walls and the quality of their inner contours are also becoming higher.

[0003] At present, these deep-arrow workpieces are mainly machined by high-precision lathes. For example, in the machining of high-speed cutting servo (FTS), due to the complex control process, machining process and strict environmental requirements, it is easy to be affected by abnormal factors such as environment and materials during machining, which will further cause defects in the deep-arrow workpiece and reduce the machining quality of the deep-arrow workpiece. Therefore, in order to ensure the accuracy of the geometric dimensions and the consistency of the contour quality of the deep-arrow workpiece, it is necessary to further improve the quality of the workpiece by secondary machining, and accurately evaluate the geometric dimensions of the inner wall and the quality of the inner wall contour of the deep-arrow workpiece.

[0004] However, the current measurement methods are mainly related to the measurement of the outer wall of deep-arrow-height workpieces, and the current measurement schemes, such as CMMs, cannot measure the bottom of the inner wall because the probe is too large, and the measurement efficiency is low, and the optical measurement means cannot meet the requirements for measuring the overall surface shape of the inner wall due to optical path interference or too large measurement angle, etc. Therefore, a measurement scheme for measuring the overall surface shape of the inner wall of deep-arrow-height workpieces is needed. Summary of the Invention [Problem to be solved by the invention]

[0005] The objective of the present invention is to provide a method and a system for measuring the entire surface profile of the inner wall of a deep-arrow workpiece, which is based on the need to completely measure the inner wall of a deep-arrow workpiece, which cannot be achieved with the current measurement method, by using two designed sensors to measure different areas of the inner wall separately and then stitching together the surface profiles. [Means for solving the problem]

[0006] In order to achieve the above object, the present invention provides The inner wall measurement system for deep workpieces includes:

[0007] An XY positioning base is installed on a horizontal mounting surface. The XY positioning base has an X direction moving base that moves in the X direction and a Y direction moving base that moves in the Y direction.

[0008] The rotation base is mounted on the XY positioning base and is used to rotate around the Z direction.

[0009] A workpiece holder is mounted on the rotating base and is used to place a deep workpiece.

[0010] A vertical holder is mounted on top of which is a Z-direction moving base that moves in the Z direction.

[0011] The side measurement gauge is mounted on the Z-direction moving base and is used to measure the side wall of the inner wall of the deep workpiece.

[0012] The inner wall measurement system is characterized in that the axial measurement gauge is installed on the Z-direction moving base and is used to measure the bottom wall of the inner wall of a deep workpiece.

[0013] Further, a first spatial posture adjusting device is installed between the rotating base and the workpiece holder, and is used to drive the workpiece holder to rotate in the X direction and / or the Y direction.

[0014] Further, the first spatial posture adjusting device includes two first angle tables which rotate around the X direction and the Y direction, respectively.

[0015] Further, two second spatial posture adjustment devices are included, which are installed on the Z-direction moving base. The side-direction measuring gauges and the axial-direction measuring gauges are installed on the corresponding second spatial posture adjustment devices, respectively. The second spatial posture adjustment devices are used to drive the side-direction measuring gauges and the axial-direction measuring gauges to rotate in the X-direction and / or the Z-direction.

[0016] Further, the second spatial posture adjusting device includes two second angle tables which rotate around the X direction and the Z direction, respectively.

[0017] In addition, the side gauge and the axial gauge all include a measuring bar and a measuring ball installed at the end of the measuring bar.

[0018] The method for measuring the inner wall of a deep-arrow-height workpiece is used in the system for measuring the inner wall of a deep-arrow-height workpiece, and includes the following steps:

[0019] Step (1) Calibrate the side measurement gauge so that it is perpendicular to the axial measurement gauge.

[0020] Step (2) calibrating the workpiece holder so that the deep workpiece is in a horizontal position.

[0021] Step (3) measure the surface shape of the side wall of the inner wall of the deep arrow high workpiece by moving the side measurement gauge along the generator of the deep arrow high workpiece against the inner wall of the deep arrow high workpiece, and measure the surface shape of the bottom wall of the inner wall of the deep arrow high workpiece by moving the axial measurement gauge along the generator holder of the deep arrow high workpiece to the bottom wall of the inner wall of the deep arrow high workpiece axis.

[0022] Step (4) The surface shape of the side wall of the inner wall and the surface shape of the bottom wall of the inner wall are joined together to obtain a complete surface shape of the deep arrow height workpiece.

[0023] JPEG2024545914000002.jpg52170JPEG2024545914000003.jpg51170

[0024] JPEG2024545914000004.jpg89170JPEG2024545914000005.jpg21170

[0025] Furthermore, in the step (1), the spatial inclination angle of the side measurement gauge or the axial measurement gauge is calibrated based on the standard ball, and this step (1) includes the following steps:

[0026] Step (1.1) Place a standard ball on the workpiece holder.

[0027] Step (1.2) A first reference plane is found, the first reference plane is the center plane of the standard ball, and the first reference plane is made parallel to a certain plane of the three-dimensional coordinate system.

[0028] Step (1.3): Drive the side gauge or axial gauge to abut against the outer contour of the first reference surface, and move linearly along the outer contour of the first reference surface. Record the smallest measured value and a second position a certain distance away from the first position during the movement of the side gauge or axial gauge, and record the smallest measured value and the measured value, respectively.

[0029] JPEG2024545914000006.jpg34170

[0030] JPEG2024545914000007.jpg32170

[0031] In addition, the calculation method of step (1.4) includes the following:

[0032] JPEG2024545914000008.jpg58170

[0033] JPEG2024545914000009.jpg44170

[0034] JPEG2024545914000010.jpg37170

[0035] JPEG2024545914000011.jpg25170JPEG2024545914000012.jpg57170

[0036] Furthermore, the step (1) also includes measuring the roundness of the ball in a standard ball measurement side-direction measuring device or shaft-direction measuring device, and the step (1) includes the following steps:

[0037] Step (1.6) Place a standard ball on the workpiece holder.

[0038] Step (1.7) find a second reference plane, the second reference plane being the center plane of the standard ball, and the second reference plane being parallel to a certain plane of the three-dimensional coordinate system.

[0039] Step (1.8) drive the side gauge or axial gauge to abut against the outer contour of the second reference surface, and move linearly along the outer contour of the reference surface. Record the smallest measured value and a second position a certain distance away from the first position during the movement of the side gauge or axial gauge, and record the smallest measured value and the measured value, respectively.

[0040] JPEG2024545914000013.jpg34170

[0041] In addition, the calculation method in step (1.9) includes the following:

[0042] JPEG2024545914000014.jpg59170

[0043] JPEG2024545914000015.jpg25170JPEG2024545914000016.jpg64170

[0044] Furthermore, the step (2) includes calibrating the workpiece holder spatial tilt angle in the side measurement gauge or the axial measurement gauge after the calibration, and the step (2) includes the following:

[0045] Step (2.1) Place a deep workpiece on the workpiece holder.

[0046] JPEG2024545914000017.jpg75170

[0047] JPEG2024545914000018.jpg70170

[0048] JPEG2024545914000019.jpg25170JPEG2024545914000020.jpg40170

[0049] Furthermore, the step (4) includes: according to the coordinate relationship between the side wall surface shape of the inner wall and the bottom wall surface shape of the inner wall, determine the transformation matrix of the overlapping area between the two surfaces to the coordinates of the two surfaces, and then perform coordinate transformation on the entire measurement surface shape to obtain the entire surface shape of the deep workpiece inner wall.

[0050] Compared with the prior art, the present invention has the following outstanding technical advantages:

[0051] This patent uses a side gauge and an axial gauge together to measure the inner wall shape of a deep workpiece. The measurement structure and method are not affected by light, and can achieve the purpose of measuring all kinds of deep workpieces with different dimensions. In addition, this patent drives a 6-DOF platform to calibrate the workpiece holder, the side gauge and the front step of the axial gauge, effectively increasing the accuracy of deep workpiece measurement. [Brief description of the drawings]

[0052] [Figure 1] Figure 1 is a structural image of the inner wall measurement system. [Figure 2A] FIG. 2A is an image diagram of calibrating the spatial tilt angle of a side-facing measurement gauge. [Figure 2B] FIG. 2B is an image diagram of calibrating the spatial tilt angle of an axial measurement gauge. [Figure 3A] FIG. 3A is an image diagram of measuring the roundness of a measurement ball with a side-facing measuring gauge. [Figure 3B] FIG. 3B is an image diagram of measuring the ball roundness of an axial measurement gauge. [Figure 4] FIG. 4 is an image of the measurement results of the ball roundness. [Figure 5A] FIG. 5A is a top view of the side measurement gauge calibrating the spatial tilt angle of the workpiece holder. [Figure 5B] FIG. 5B is a stereoscopic image diagram of the side measurement gauge calibrating the spatial tilt angle of the workpiece holder. [Figure 6] Figure 6 is an image diagram of the process of measuring the inner wall of a deep arrowhead workpiece. [Figure 7A] FIG. 7A is an image diagram of a side-facing gauge inspecting the inner wall surface of a deep workpiece. [Figure 7B] FIG. 7B is an image diagram of an axial measuring instrument inspecting the inner wall surface of a deep workpiece. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0053] The present invention will be described in detail in the following embodiments of the invention.

[0054] The present invention relates to a method and a system for measuring the overall surface profile of the inner wall of a deep workpiece, which uses two sensors to measure different areas of the inner wall separately and then stitches together the surface profile. It is applicable to fields such as information and electronics, aeronautics, new energy, and biomedicine, where ultra-precise processing and measurement products are used as key components.

[0055] In this embodiment, the inner wall system in the deep arrow high workpiece includes:

[0056] A workpiece holder (108) is used to place a deep workpiece (109).

[0057] The side gauge (111) is used to measure the sidewall of the inner wall of the deep workpiece (109).

[0058] The axial gauge (112) is used to measure the bottom wall of the inner wall of the deep workpiece (109).

[0059] The 6-DOF platform has the workpiece holder (108), the side measurement gauge (111) and the axial measurement gauge (112) mounted thereon, and drives the workpiece holder (108) to move in 6-DOF relative to the side measurement gauge (111) or the axial measurement gauge (112).

[0060] In this patent, the 6-DOF platform includes a horizontal mounting surface (103) and a vertical holder (101). The horizontal mounting surface (103) is used to mount a workpiece holder (108). The vertical holder (101) is used to mount a side gauge (111) and an axial gauge (112).

[0061] Specifically, as shown in Fig. 1, there is a horizontal board on the horizontal placement surface (103), and the board is mounted with the X-direction moving base (105), the Y-direction moving base (104), the rotating base (106), the first spatial posture adjusting device (107) and the workpiece holder (108) in order from bottom to top. Specifically, the X-direction moving base (105) is a sliding device in the X direction, the Y-direction moving base (104) is a sliding device in the Y direction, and the rotating base (106) is installed on the Y-type sliding device, and drives the workpiece holder (108) to move in the X direction, move in the Y direction, and rotate around the Z direction. The first spatial posture adjusting device (107) is divided into two first angle tables that are installed overlapping each other. The workpiece holder (108) is installed on the corresponding first angle table. The two first angle tables are used to rotate the workpiece holder (108) around the X and Y directions, respectively.

[0062] The vertical holder (101) is placed beside the horizontal support surface (103) and includes a horizontal board and a vertical board that is vertically installed. The vertical board is provided with a Z-direction moving base (102) and two second spatial posture adjustment devices (110). The two second spatial posture adjustment devices (110) are respectively provided with the side measuring device (111) and the axial measuring device (112). The Z-direction moving base (102) is specifically a Z-direction sliding device, and the two second space posture adjustment devices (110) are installed on the Z-direction sliding device, so that when the Z-direction sliding device operates, the side gauge (111) and the axial gauge (112) are raised and lowered, and by changing the height of the side gauge (111) and the axial gauge (112), the relative position of the workpiece holder (108) to the side gauge (111) or the axial gauge (112) can be changed relatively, thereby realizing the Z-direction adjustment of the workpiece holder (108). Two second space posture adjustment devices (110) are installed. The two second spatial posture adjustment devices (110) respectively drive the side gauge (111) and the axial gauge (112) to rotate in the Z direction and the X direction, and rotate the side gauge (111) or the axial gauge (112) in the Z direction to rotate the workpiece relatively. The second spatial posture adjustment device (110) specifically includes two second angle tables which rotate in the X direction and the Z direction, respectively. The vertical holder (101), the horizontal support surface (103) and the vertical holder (101) are aligned with the part on the horizontal support surface (103) to realize 6-DOF adjustment to the workpiece holder (108).

[0063] In this patent, the side measuring gauge (111) obtains data by hitting the side wall of the inner wall of the deep arrow workpiece (109). At its end, there is a hitting bar that contacts the inner wall of the deep arrow workpiece (109), and the bar shakes or expands with the shape change of the side wall of the inner wall of the deep arrow workpiece (109). The side measuring gauge (111) obtains data after the hitting bar shakes or expands in different situations, thereby representing the shape of the side wall of the inner wall of the deep arrow workpiece (109). Similarly, in this patent, the axial measuring gauge (112) obtains data by hitting the deep arrow workpiece (109). At its end, there is a hitting bar that contacts the inner wall of the deep arrow workpiece (109), and the bar expands or contracts with the shape change of the bottom wall of the inner wall of the deep arrow workpiece (109). The side gauge (111) collects data after the abutting bar expands and contracts under different conditions, thereby representing the shape of the bottom wall of the inner wall of the deep arrow workpiece (109). In addition, a measuring ball (202) is installed at the end of every abutting bar, and the measuring ball (202) ensures that the side gauge (111) and the inner wall of the deep arrow workpiece (109) abut smoothly. For this reason, by installing the measuring ball (202), the data read by the side gauge (111) and the axial gauge (112) are the data from the center of the measuring ball (202) to the other side of the abutting bar.

[0064] In this patent, before measuring the deep workpiece (109), the 6-DOF platform needs to be calibrated to ensure accuracy. The workpiece holder (108), the side gauge (111) and the axial gauge (112) are all in a vertical and horizontal state. After all the calibrations are completed, the measurement of the inner wall of the deep workpiece (109) begins. The method includes the following: Measure the surface shape of the side wall of the inner wall of the deep workpiece (109) by moving the side gauge (111) along the generatrix of the deep workpiece (109) against the side wall of the inner wall of the deep workpiece (109); Measure the surface shape of the bottom wall of the inner wall of the deep workpiece (109) by moving the axial gauge (112) along the generatrix holder of the deep workpiece (109) to the bottom wall of the inner wall of the deep workpiece (109). The surface profile of the side wall of the inner wall and the surface profile of the bottom wall of the inner wall are concatenated to obtain the complete surface profile of the deep arrow height workpiece (109). The concatenation method can be to concatenate the two measured surface profiles using a point cloud division algorithm (Concatenate).

[0065] Therefore, this patent also includes a method for calibrating the inner wall measurement in a deep workpiece 109. The calibration method includes the following steps:

[0066] Step (1) Calibrate the side measuring gauge (111) and the axial measuring gauge (112) so that they are perpendicular to each other.

[0067] Step (2) The workpiece holder (108) is calibrated so that the deep workpiece (109) is in a horizontal position.

[0068] Here, the step (1) also includes the calibration of the spatial inclination angle of the side-directed measuring gauge (111) or the axis-directed measuring gauge (112) on the standard ball (201), and this step (1) includes the following steps.

[0069] Step (1.1) Place a standard ball (201) on the workpiece holder (108).

[0070] Step (1.2) find a first reference plane, the first reference plane being the center plane of the standard ball (201), and making the first reference plane parallel to a certain plane of the three-dimensional coordinate system.

[0071] JPEG2024545914000021.jpg39170

[0072] JPEG2024545914000022.jpg29170

[0073] JPEG2024545914000023.jpg30170

[0074] JPEG2024545914000024.jpg70170

[0075] JPEG2024545914000025.jpg51170JPEG2024545914000026.jpg20170

[0076] JPEG2024545914000027.jpg40170

[0077] JPEG2024545914000028.jpg40170

[0078] JPEG2024545914000029.jpg29170JPEG2024545914000030.jpg57170

[0079] JPEG2024545914000031.jpg39170

[0080] JPEG2024545914000032.jpg83170

[0081] JPEG2024545914000033.jpg38170

[0082] JPEG2024545914000034.jpg42170JPEG2024545914000035.jpg50170JPEG2024545914000036.jpg42170

[0083] In this embodiment, the spatial tilt angle between the side gauge (111) and the axial gauge (112) can be adjusted to a relatively small threshold value, for example 0.1 degrees, by repeated calculations. At this time, the spatial tilt angle between the side gauge (111) and the axial gauge (112) is adjusted.

[0084] Furthermore, the step (1) includes the following steps: measuring the roundness of the measuring ball (202) in the side measuring gauge (111) or the axis measuring gauge (112) of the standard ball (201).

[0085] (1.6) Place a standard ball (201) in the workpiece holder (108).

[0086] (1.7) A second reference plane is found, the second reference plane being the central plane of the standard ball (201), and the second reference plane is made parallel to a certain plane of the three-dimensional coordinate system.

[0087] JPEG2024545914000037.jpg61170

[0088] JPEG2024545914000038.jpg29170

[0089] JPEG2024545914000039.jpg44170

[0090] JPEG2024545914000040.jpg49170

[0091] JPEG2024545914000041.jpg29170JPEG2024545914000042.jpg41170JPEG2024545914000043.jpg64170

[0092] In this patent, a measuring ball (202) is installed on the side measuring gauge (111), so when the side measuring gauge (111) measures the deep arrow workpiece (109), the measured contour is the circular locus of the measuring ball (202), not the contour of the deep arrow workpiece (109), so the circularity contour of the measuring ball (202) needs to be inspected when the side measuring gauge (111) is used to measure the deep arrow workpiece (109). The inner wall contour of the deep arrow workpiece (109) is obtained by mapping the circularity contour of the measuring ball (202). As shown in Figure 4, under normal circumstances, the side measuring gauge (111) uses a measuring surface with only about 120 angles during measurement, so when inspecting the circularity contour of the measuring ball (202), it is necessary to determine the surface contour of the measuring ball (202) with about 120 angles to meet the needs of the work.

[0093] JPEG2024545914000044.jpg61170JPEG2024545914000045.jpg41170JPEG2024545914000046.jpg74170

[0094] Further, the step (2) includes calibrating the spatial tilt angle of the workpiece holder (108) with the calibrated side measurement gauge (111) or axial measurement gauge (112), which step (2) includes the following:

[0095] Step (2.1) Place the deep arrow height workpiece (109) on the workpiece holder (108), and place the deep arrow height workpiece (109) directly on the workpiece holder (108).

[0096] JPEG2024545914000047.jpg51170

[0097] JPEG2024545914000048.jpg51170

[0098] JPEG2024545914000049.jpg17170JPEG2024545914000050.jpg39170

[0099] JPEG2024545914000051.jpg50170JPEG2024545914000052.jpg29170

[0100] After all calibrations are completed, the inner wall of the deep arrow workpiece (109) is measured.

[0101] JPEG2024545914000053.jpg51170

[0102] JPEG2024545914000054.jpg39170JPEG2024545914000055.jpg62170JPEG2024545914000056.jpg30170

[0103] Similarly, while the axial measuring gauge (112) is measuring the bottom wall of the inner wall, there is a trajectory of the measuring ball. Moreover, the trajectory of the measuring ball has point coordinates JPEG2024545914000057.jpg73170JPEG2024545914000058.jpg29170

[0104] After obtaining the generatrix locus of the continuous inner wall side wall and the continuous inner wall bottom wall, the workpiece holder (108) is rotated to continue the measurement, and the surface shapes of the continuous inner wall side wall and the surface shapes of the inner wall bottom wall are obtained, and are stitched together based on the surface shapes of the inner wall side wall and the surface shapes of the inner wall bottom wall.

[0105] JPEG2024545914000059.jpg8170 There is always an overlapping area on the bottom wall of the wall. Specifically, the overlapping area of ​​the two surfaces is determined according to the coordinate axes of the measured surface shapes, and the overlapping area is connected by matching the point cloud. That is, a matrix transformation is performed according to the coordinates of the two surfaces, and after the coordinates are confirmed and the overlapping area is duplicated, a coordinate transformation is performed on the entire surface shape of the deep arrow workpiece (109), and the complete surface shape of the inner wall of the deep arrow workpiece (109) is obtained.

[0106] This patent uses a side gauge (111) and an axial gauge (112) together to measure the inner wall shape of a deep workpiece (109). The measurement structure and method are not affected by light, and can measure all kinds of deep workpieces (109) with different sizes. In addition, this patent uses a 6-DOF platform to drive the workpiece holder (108), the side gauge (111) and the axial gauge (112) to perform pre-step calibration, effectively increasing the inspection accuracy of the deep workpiece (109).

[0107] The above embodiment is a comparatively good embodiment of the present invention, and does not limit the scope of the claims of the present invention. Therefore, all modifications of the same effect made according to the structure, shape, and principle of the present invention should be included in the claims of the present invention. [Explanation of symbols]

[0108] 101 Vertical Holder 102 Z-direction moving base 103 Horizontal mounting surface 104 Y-direction moving base 105 X-direction moving base 106 Rotating Base 107 First spatial attitude adjustment device 108 Workpiece Holder 109 Fukaya Taka Workpiece 110 Second spatial attitude adjustment device 111 Side Measuring Instrument 112 Axis Measuring Instrument 201 Standard Ball 202 Measuring Ball

Claims

1. A system for measuring an inner wall of a workpiece, comprising: A horizontal mounting surface is provided. An XY positioning base is installed on the horizontal mounting surface. The XY positioning base includes an X-direction moving base that moves in the X direction and a Y-direction moving base that moves in the Y direction. A rotation base is installed on the XY positioning base, and the circuit base is used to rotate around the Z direction; A workpiece holder is installed on the rotating base, and the workpiece holder is used to place a deep workpiece; A vertical holder is provided on the vertical holder, and a Z-direction moving base that moves in the Z direction is provided on the vertical holder. A side measuring gauge is installed on the Z-direction moving base, and the side measuring gauge is used to measure the side wall of the inner wall of the deep arrow height workpiece; An inner wall measurement system, characterized in that an axial measuring instrument is installed on the Z-direction moving base, and the axial measuring instrument is used to measure the bottom wall of the inner wall of a deep arrow height workpiece.

2. A first spatial posture adjustment device is disposed between the rotating base and the workpiece holder, and the first spatial posture adjustment device rotates the workpiece holder in the X direction and / or in the Y direction; Two second spatial posture adjustment devices are installed on the Z-direction moving base; The side measuring gauge and the axial measuring gauge are respectively installed on the second spatial posture adjustment device; The inner wall measuring system for deep workpieces as claimed in claim 1, characterized in that the second spatial posture adjustment device is used to drive the side measuring device and the axial measuring device to rotate around the X direction and / or around the Z direction.

3. A method for measuring an inner wall of a deep arrow high workpiece, which is used in the inner wall measurement system of the deep arrow high workpiece according to claim 1 or 2, comprising: A step (1) of calibrating a side measurement gauge so that the side measurement gauge is perpendicular to an axial measurement gauge; (2) calibrating a workpiece holder so that it is level with the deep workpiece; (3) measuring the surface shape of the side wall of the deep arrow high workpiece inner wall by moving the side measuring instrument along the generator of the deep arrow high workpiece against the inner wall of the deep arrow high workpiece, and measuring the surface shape of the bottom wall of the deep arrow high workpiece inner wall by moving the axial measuring instrument along the generator holder of the deep arrow high workpiece to the bottom wall of the inner wall of the deep arrow high workpiece axis; (4) connecting the side wall surface profile of the inner wall with the bottom wall surface profile of the inner wall to obtain a complete deep arrow height workpiece surface profile; A method for measuring an inner wall of a deep workpiece, comprising:

4. A method for measuring the inner wall of a deep arrow high workpiece as described in claim 3.

5. Calibrating the spatial inclination angle of the side or axial measuring instrument based on the standard ball in step (1) includes: (1.1) placing a standard ball on a workpiece holder; A step (1.2) of finding a first reference plane, the first reference plane being the center plane of the standard ball, and making the first reference plane parallel to a certain plane of a three-dimensional coordinate system. (1.3) driving a side gauge or an axial gauge to contact the outer contour of the first reference surface, and moving linearly along the outer contour of the first reference surface, and recording the smallest measured value and a second position a certain distance away from the first position during the movement of the side gauge or the axial gauge, respectively; The method for measuring an inner wall of a deep workpiece according to claim 3, further comprising:

6. In the calculation method of step (1.4), The method for measuring an inner wall of a deep workpiece according to claim 5.

7. The step (1) includes measuring the roundness of the ball in the standard ball measuring side or shaft measuring device. A step (1.6) of placing a standard ball on a workpiece holder; (1.7) finding a second reference plane, the second reference plane being the center plane of the standard ball, and making the second reference plane parallel to a plane of a three-dimensional coordinate system; (1.8) drive the side or axial gauge to abut against the outer contour of the second reference surface and move linearly along the outer contour of the reference surface, record the smallest measured value and a second position a certain distance away from the first position while the side or axial gauge moves, and record the smallest measured value and the measured value respectively; The method for measuring an inner wall of a deep workpiece according to claim 3, further comprising:

8. In the calculation method in step (1.9), The method for measuring an inner wall of a deep workpiece according to claim 7.

9. The calibration of the spatial inclination angle of the workpiece holder in the side direction measuring device or the axial direction measuring device after the calibration in step (2) is as follows: The method for measuring an inner wall of a deep workpiece according to claim 3, further comprising:

10. In the step (4), According to the coordinate relationship between the side wall surface shape of the inner wall and the bottom wall surface shape of the inner wall, the overlapping area between the two surfaces is determined to determine the transformation matrix to the coordinates of the two surfaces, and the coordinate transformation is carried out for the entire measurement surface shape, so as to obtain the entire surface shape of the inner wall of the deep arrow height workpiece; The method for measuring an inner wall of a deep workpiece according to claim 3.

Images