Jig for alignment and alignment method

Abstract

To provide a jig for aligning a chuck table which can simply align a position of a chuck table and a position of a support base.SOLUTION: A jig for alignment includes a plate-like body part having a first surface facing an upper surface of a chuck table during use, a mounting part which is provided outside the outer periphery of the body part and has a plurality of through holes at positions corresponding to two or more fastening holes, and a projection part which is provided to project from the first surface of the body part, where the side face arranged on a central side of the body part is inclined toward the outer periphery side of the body part as being separated from the first surface, wherein in a state where the first surface faces the chuck table, when a fastening tool for alignment is fastened to the fastening hole through the through hole and a fastening tool insertion hole, the side face of the projection part is pushed against the chuck table, and the position of the chuck table with respect to the support base is adjusted.SELECTED DRAWING: Figure 10

Description

[Technical field]

[0001] The present invention relates to an alignment jig and an alignment method for aligning a chuck table and a support base. [Background technology]

[0002] In the manufacturing process of semiconductor devices, a number of streets are set in a grid pattern on the surface of a wafer, and devices such as ICs (Integrated Circuits) are formed in each of a number of regions partitioned by the number of streets. The back side of the wafer is ground by a grinding device or the like to thin the wafer to a predetermined thickness, and then the wafer is cut by a cutting device or the like along the streets to separate the wafer into individual regions. This produces a number of semiconductor device chips, each of which has a device.

[0003] In the above-mentioned grinding and cutting, the wafer is processed while being held on a chuck table. For example, one disclosed in Patent Document 1 is known as an example of a chuck table. Patent Document 1 describes a chuck table fixed to the upper surface of a support base. This support base is connected to a rotating shaft, and the chuck table rotates together with the support base around the axis (center line) of the rotating shaft by driving the rotating shaft to rotate with a motor connected to the rotating shaft.

[0004] The wafer is held by a holding surface (suction surface) provided on the upper surface side of the chuck table. Suction paths are provided inside the chuck table and the support base, and these suction paths connect the holding surface of the chuck table to a suction source such as a vacuum pump. Negative pressure generated by the suction source is transmitted to the holding surface via the suction path, and the wafer placed on the holding surface is sucked and held there. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Patent Publication No. 2023-58925 Summary of the Invention [Problem to be solved by the invention]

[0006] However, if the position of the center (center of gravity) of the chuck table is not on the extension of the axis of the rotation shaft that passes through the center (center of gravity) of the support base, for example, the processing device may vibrate when the chuck table and the support base are rotated, and the wafer may not be processed properly. In this case, in wafer grinding that requires rotating the chuck table, the amount of wafer removed by grinding in the direction along the wafer surface to be ground (grinding volume) deviates from the target amount of removal, resulting in variations in the thickness of the wafer in the direction along the wafer surface to be ground.

[0007] Furthermore, in this case, the wafer may be placed at a position that is misaligned from the holding surface of the chuck table. As a result, negative pressure from the suction source leaks from the gap between the wafer and the holding surface of the chuck table, causing poor suction of the wafer. If the wafer is not sufficiently suctioned in this way, the wafer may partially float up from the chuck table, which may cause chipping or cracking of the wafer when it is ground, for example.

[0008] In order to solve the above-mentioned problems, for example, when the chuck table is fixed to the support base, an operation (centering) is performed to align the position of the center (center of gravity) of the chuck table with the axis of the rotation axis passing through the center (center of gravity) of the support base. However, since this operation is performed manually based on the experience of the operator, it takes a long time to complete the operation, which results in a problem that the operating time of the processing device is not necessarily maximized.

[0009] SUMMARY OF THE PRESENT EMBODIMENT An object of the present invention is to provide a jig for aligning a chuck table, which can easily align the position of the chuck table with the position of a support base. [Means for solving the problem]

[0010] According to one aspect of the present invention, there is provided an alignment jig for aligning the position of a chuck table having a plurality of fastener insertion holes, into which fasteners are inserted, at positions corresponding to the plurality of fastening holes, relative to a support base having a plurality of fastening holes on an upper surface thereof, each of which is adapted to fasten a fastener, the alignment jig comprising: a plate-shaped main body portion having a first surface that faces the upper surface of the chuck table in use; a mounting portion that is provided outside the outer periphery of the main body portion and has through holes at positions corresponding to two or more of the plurality of fastening holes; and a protrusion portion that is provided to protrude from the first surface of the main body portion and has a side surface that is located toward the center of the main body portion and that inclines toward the outer periphery of the main body portion as it moves away from the first surface; and when alignment fasteners are fastened to the fastening holes through the through holes and the fastener insertion holes with the first surface facing the chuck table, the side surface of the protrusion portion is pressed against the chuck table, thereby adjusting the position of the chuck table relative to the support base.

[0011] Preferably, the first surface has a plurality of protrusions provided at equal distances from a reference point.

[0012] Preferably, the projection is annular and provided along a circumference having a reference point on the first surface as its center.

[0013] According to another aspect of the present invention, there is provided an alignment method for aligning the position of the chuck table relative to the support base using the above-mentioned alignment jig, the alignment method including: an arrangement step of placing the chuck table on the upper surface side of the support base and arranging the alignment jig on the upper surface side of the chuck table; an insertion step of inserting an alignment fastener into the fastener insertion hole through the through hole; and an alignment step of fastening the alignment fastener inserted into the fastener insertion hole through the through hole to the fastening hole, thereby pressing the side of the protrusion against the chuck table and adjusting the position of the chuck table relative to the support base.

[0014] Preferably, after the aligning step, the method further includes a first fastening step of fastening a fixing fastener into the fastening hole through the fastener insertion hole into which the aligning fastener has not been inserted.

[0015] Preferably, after the aligning step, the method further includes a removal step of removing the alignment fasteners from the fastening holes and removing the alignment jig from the upper surface of the chuck table.

[0016] Preferably, after the removing step, the method further includes a second fastening step of fastening a fixing fastener into the fastening hole through the fastener insertion hole into which the alignment fastener was inserted. Effect of the Invention

[0017] An alignment jig according to one aspect of the present invention comprises a plate-shaped main body having a first surface that faces the upper surface of a chuck table during use, an attachment portion that is located outside the outer periphery of the main body and has a plurality of through holes, and a protrusion portion that is arranged to protrude from the first surface of the main body and has a side surface located toward the center of the main body that slopes toward the outer periphery of the main body as it moves away from the first surface.

[0018] Therefore, when the alignment fastener is fastened to the fastening hole of the support base through the through hole and the fastener insertion hole of the chuck table with the first surface of the main body facing the chuck table, the side surface of the protrusion is pressed against the chuck table, adjusting the position of the chuck table relative to the support base. This makes it easy to align the position of the chuck table with the position of the support base. [Brief description of the drawings]

[0019] [Figure 1] FIG. 1 is a perspective view of a grinding device according to an embodiment. [Diagram 2] FIG. 2 is a perspective view of the chuck table and the support base. [Diagram 3]FIG. 3 is a perspective view showing a surface of a main body of a first example of the alignment jig, etc. FIG. [Figure 4] FIG. 4 is a perspective view showing the back surface and the like of the main body of the first example of the alignment jig. [Diagram 5] FIG. 5 is a perspective view showing the back surface and the like of a main body of a second example of the alignment jig. [Figure 6] FIG. 6 is a side view of a third example of the alignment jig. [Figure 7] FIG. 7 is a flow chart showing a first example of the alignment method according to the embodiment. [Figure 8] FIG. 8 is a perspective view of the alignment jig, the chuck table, and the support base in the arrangement step. [Figure 9] FIG. 9 is a cross-sectional view showing a portion of the alignment jig, the chuck table, and the support base in the arrangement step. [Figure 10] FIG. 10 is a cross-sectional view showing a portion of the alignment jig, the chuck table, the support base, and the alignment fastener in the alignment step. [Figure 11] FIG. 11 is a perspective view of the alignment jig, the chuck table, the support base, and the fixing fastener in the first fastening step. [Figure 12] FIG. 12 is a flow diagram showing a second example of the alignment method according to the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. First, a grinding device including a chuck table and a support base that are aligned by an alignment jig of this embodiment will be described. FIG. 1 is a perspective view of a grinding device 2 of the embodiment. Note that in FIG. 1, some of the elements that configure the grinding device 2 are expressed by functional blocks. Also, the X-axis (first axis), Y-axis (second axis), and Z-axis (third axis) used in the following description are perpendicular to each other.

[0021] 1, the grinding device 2 includes a base 4 that supports various elements that constitute the grinding device 2. An opening 4a that is long in a direction (front-rear direction) generally parallel to the X-axis is formed on the top surface of the base 4. A ball screw type X-axis moving mechanism 6 is disposed within the opening 4a. The X-axis moving mechanism 6 includes a motor and the like (not shown) that is connected to the ball screw, and a moving table (not shown), and moves the moving table back and forth along the X-axis.

[0022] The upper part of the moving table is covered by a table cover 8. In addition, accordion-shaped dustproof and drip-proof covers 10 that can expand and contract in accordance with the movement of the moving table (table cover 8) are attached to the front and rear of the table cover 8. A chuck table 12 configured to hold a workpiece 11 to be processed and a support base 64 (see FIG. 2) that supports this chuck table 12 are arranged on the upper part of the moving table in a manner that they are partially exposed from the table cover 8.

[0023] The workpiece 11 is, for example, a disk-shaped wafer made of a semiconductor material such as silicon. That is, the workpiece 11 has a substantially circular front surface (top surface) 11a and a substantially circular back surface (bottom surface) 11b opposite the front surface 11a. The back surface 11b side of the workpiece 11 is partitioned into a plurality of regions by a plurality of intersecting streets (planned division lines), and a device 29 such as an IC is formed in each region. The workpiece 11 is, for example, a single crystal silicon substrate having a diameter (width) of 100 mm or more and 450 mm or less and a thickness of 0.1 mm or more and 0.8 mm or less.

[0024] The shape, diameter (or width), thickness, and material of the workpiece 11 are not limited to this embodiment. For example, a substrate or the like made of other materials such as semiconductors, ceramics, resins, and metals may be used as the workpiece 11. Similarly, the type, number, shape, structure, size, arrangement, and the like of the devices 29 are not limited. The devices 29 do not have to be formed on the workpiece 11.

[0025] 2 is a perspective view of the chuck table 12 and the support base 64. As shown in Fig. 2, the support base 64 is configured in a substantially disk shape, and a plurality of fastening holes 66 into which fixing fasteners 27 such as screws and bolts are fastened are provided at substantially equal intervals along the outer periphery of the support base 64. Inside the fastening holes 66, thread grooves corresponding to the threads of the positioning fasteners 25 (see Fig. 10) and the fixing fasteners 27 are provided. Note that, although twelve fastening holes 66 are provided in the support base 64 in this embodiment, the number of fastening holes 66 provided in the support base 64 is not limited to this.

[0026] A plurality of annular grooves 68 of different diameters are provided on the circular surface (upper surface) 64a of the support base 64, with the center of the surface 64a as a common center. That is, the upper ends of the plurality of annular grooves 68 arranged concentrically are open on the surface 64a of the support base 64. Also, one end of a flow path 70 provided inside the support base 64 opens at the bottom of the groove 68. The other end of the flow path 70 is connected to a suction source (not shown) such as an ejector capable of generating negative pressure.

[0027] The chuck table 12 includes a frame 60 that is substantially disk-shaped and has the same diameter as the support base 64. A step is provided around the entire outer periphery of the frame 60. That is, the frame 60 includes a lower stage 60a with a large diameter and an upper stage 60b with a small diameter. A circular recess is provided on the upper surface of the upper stage 60b, and the disk-shaped porous body 58 is fitted into this recess.

[0028] One end of a through hole (not shown) penetrating the frame 60 in the thickness direction is open at the bottom of the recess in which the porous body 58 is fitted. The other end of the through hole is open at the lower surface of the lower stage 60a. In other words, this through hole penetrates both the upper stage 60b and the lower stage 60a in the thickness direction. In addition, this through hole is positioned so that it can overlap with the groove 68 when the chuck table 12 is placed on the support base 64.

[0029] A plurality of fastener insertion holes 62, into which fixing fasteners 27 such as screws or bolts are inserted, are provided at approximately equal intervals on the outer periphery of the lower portion 60a along the outer periphery of the chuck table 12. The plurality of fastener insertion holes 62 are arranged at positions that can overlap with fastening holes 66 when the chuck table 12 is placed on the support base 64, and the fixing fasteners 27 are fastened to the corresponding fastening holes 66 through each fastener insertion hole 62.

[0030] The width of each fastener insertion hole 62 is greater than the thickness (diameter) of the shaft of the fixing fastener 27 by a range of 1 mm to 2 mm. For example, when the thickness of the shaft of the fixing fastener 27 is 5 mm, the width of the fastener insertion hole 62 is greater than or equal to 6 mm and less than or equal to 7 mm. Since the width of the fastener insertion hole 62 is greater than the width of the fixing fastener 27, the position of the chuck table 12 relative to the support base 64 may be shifted.

[0031] The upper surface 12a of the chuck table 12 is formed by the upper surface of the upper stage portion 60b of the frame 60 and the surface (upper surface) of the porous body 58. Of the upper surface 12a of the chuck table 12, the surface of the porous body 58 serves as a holding surface that holds the back surface 11b side of the workpiece 11. In other words, the chuck table 12 has a holding surface on the upper part that holds the workpiece 11. For example, the diameter (width) of the holding surface of the chuck table 12 is slightly smaller (for example, up to about 15 mm) than the diameter (width) of the workpiece 11.

[0032] When the chuck table 12 is properly attached to the support base 64, the through-hole provided in the frame 60 of the chuck table 12 is connected to the groove 68 of the support base 64. As a result, the negative pressure generated by the suction source acts on the porous body 58 fitted in the recess through the flow path 70, the groove 68, the through-hole of the frame 60, etc.

[0033] That is, the negative pressure of the suction source also acts on the holding surface which is the surface of the porous body 58. The back surface 11b of the workpiece 11 carried onto the chuck table 12 is sucked in by the negative pressure of the suction source acting on this holding surface. In this manner, the chuck table 12 sucks the back surface 11b of the workpiece 11 with the holding surface, thereby holding the workpiece 11 so that the front surface 11a of the workpiece 11 is exposed.

[0034] The through holes formed in the frame 60 of the chuck table 12, the grooves 68 formed in the support base 64, the flow paths 70, etc. are also used when supplying liquid such as water or gas such as air to the upper surface 12a of the chuck table 12. That is, in addition to the suction source, a liquid supply source or a gas supply source is selectively connected to the other end of the flow path 70. The liquid is used, for example, to clean the upper surface 12a of the chuck table 12, and the gas is used, for example, to float the workpiece 11 from the upper surface 12a of the chuck table 12.

[0035] The support base 64 is connected to a rotary drive source (not shown) such as a motor, and rotates about a rotation axis parallel to the Z axis or a rotation axis slightly tilted with respect to the Z axis. As the support base 64 rotates, the chuck table 12 and the workpiece 11 held on the upper surface 12a of the chuck table 12 also rotate.

[0036] It is desirable that a protective member (not shown), typically a tape made of resin or the like, is attached to the back surface 11b of the workpiece 11 held by the chuck table 12. In this case, the protective member absorbs the impact applied to the back surface 11b when the workpiece 11 is ground from the front surface 11a side, thereby protecting the device 29 and the like. However, in cases where the device 29 is not formed on the workpiece 11, for example, the protective member does not necessarily have to be attached to the workpiece 11.

[0037] When the moving table is moved back and forth along the X-axis by the above-mentioned X-axis moving mechanism 6, the chuck table 12 (and the support base 64) also moves back and forth along the X-axis. More specifically, the X-axis moving mechanism 6 moves the chuck table 12, for example, between a load-in / load-out area in front where the workpiece 11 is loaded onto the chuck table 12, and a grinding area behind the load-in / load-out area.

[0038] A height gauge (height measuring device) 44 for measuring the thickness of the workpiece 11 held by the chuck table 12 is provided near the chuck table 12. For example, the height gauge 44 includes a first height gauge (first height measuring device) 46 for measuring the height of the upper surface 12a of the chuck table 12, and a second height gauge (second height measuring device) 48 for measuring the height of the upper surface of the workpiece 11 held by the chuck table 12.

[0039] A columnar support structure 14 is provided behind the base 4 (i.e., behind the X-axis movement mechanism 6). A Z-axis movement mechanism 16 is disposed on the front side of the support structure 14. The Z-axis movement mechanism 16 includes a pair of guide rails 18 that are long in a direction (up-down direction) generally parallel to the Z axis, and a moving plate 20 is attached to the pair of guide rails 18 in a slidable manner.

[0040] A nut portion (not shown) constituting a ball screw is provided on the rear side of the moving plate 20, and a screw shaft 22 that is roughly parallel to the Z axis is rotatably connected to this nut portion. A motor 24 or the like is connected to one end of the screw shaft 22. By rotating the screw shaft 22 by the motor 24 or the like, the moving plate 20 moves up and down along the guide rail 18.

[0041] A support 26 is provided on the front surface of the moving plate 20. A grinding unit 28 capable of grinding the surface 11a of the workpiece 11 held by the chuck table 12 is supported on this support 26. The grinding unit 28 includes a spindle housing 30 fixed to the support 26. A spindle 32 having a rotation axis parallel to the Z axis or a rotation axis slightly inclined with respect to the Z axis is accommodated in the spindle housing 30 in a manner that the spindle 32 can rotate about its axis.

[0042] The lower end of the spindle 32 is exposed from the lower end surface of the spindle housing 30, and a disk-shaped mount 34 is fixed to the lower end of the spindle 32. For example, the outer edge of the mount 34 is provided with a plurality of holes (not shown) that penetrate the mount 34 in the thickness direction, and fasteners 36 such as screws and bolts are inserted into each hole.

[0043] The grinding wheel 38 is fixed to the lower surface of the mount 34 by the above-mentioned fastener 36. That is, the grinding wheel 38 is attached to the spindle 32 via the mount 34, etc. The spindle housing 30 also contains a motor (not shown) etc. that is connected to the upper end side of the spindle 32. The grinding wheel 38 rotates together with the spindle 32 by the power of the motor etc.

[0044] The grinding wheel 38 has, for example, a wheel base 40 configured in an annular shape with approximately the same outer diameter (diameter) as the mount 34. An annular groove (not shown) is opened on the lower surface of the wheel base 40, and a plurality of grinding stones 42, each made of abrasive grains such as diamond dispersed in a binder such as vitrified or resinoid, are arranged in the circumferential direction of the wheel base 40 in this groove.

[0045] That is, the grinding wheels 42 are arranged on the lower surface side of the wheel base 40. Each grinding wheel 42 is fixed to the wheel base 40 by an adhesive or the like. The size of the abrasive grains, the type of binder, and the like are appropriately set according to the quality required of the workpiece 11 obtained by grinding, and the like.

[0046] A controller (control unit) 50 is connected to each element of the grinding device 2. This controller 50 is configured by a computer including, for example, a processing device 52 and a storage device 54, and controls the operation of each element of the grinding device 2 described above so that the workpiece 11 is appropriately ground.

[0047] The processing device 52 is typically a CPU (Central Processing Unit) and performs various processes required to control the above-mentioned elements. The storage device 54 includes, for example, a main storage device such as a DRAM (Dynamic Random Access Memory) and an auxiliary storage device such as a hard disk drive or a flash memory. The functions of the controller 50 are realized, for example, by the processing device 52 operating in accordance with a program stored in the storage device 54.

[0048] An input device 56 is connected to the controller 50. The input device 56 is, for example, a touch screen, and is used to input commands from an operator to the controller 50. This touch screen also serves as a display device that displays information output from the controller 50. Note that a keyboard, a mouse, or the like may also be used as the input device 56.

[0049] A part of the storage device 54, which includes a non-transitory recording medium readable by a computer or the like, stores a program for causing the processing device 52 to execute a series of procedures required for grinding the workpiece 11. The processing device 52 executes various procedures required for grinding the workpiece 11 in accordance with this program.

[0050] Next, an alignment jig used for aligning the position of the chuck table 12 with respect to the above-mentioned support base 64 will be described. Fig. 3 is a perspective view showing a front surface (second surface) 15a and the like of a first example of the alignment jig 13, and Fig. 4 is a perspective view showing a back surface (first surface) 15b and the like of the first example of the alignment jig 13. As shown in Figs. 3 and 4, the alignment jig 13 includes a disk-shaped main body 15 having a substantially circular front surface 15a and a substantially circular back surface 15b opposite to the front surface 15a.

[0051] The diameter (width) of the back surface 15b of the main body 15 is larger than the diameter (width) of the upper surface 12a of the chuck table 12, i.e., the diameter (width) of the upper surface of the upper stage 60b of the frame 60, by 20 mm to 35 mm. For example, when the diameter of the upper surface of the upper stage 60b of the frame 60 is 230 mm, the diameter (width) of the main body 15 is 250 mm to 265 mm, typically 255 mm. Examples of the material of the main body 15 include polyacetal resin and monomer cast nylon. However, the size (width) and material of the main body 15 are not limited to these.

[0052] As shown in Fig. 4, the back surface 15b of the main body 15 is provided with protrusions 17 protruding from the back surface 15b of the main body 15. In a first example of the alignment jig 13 shown in Figs. 3 and 4, three protrusions 17 are arranged at equal intervals along the outer periphery of the main body 15. For example, assuming that the center of the back surface 15b of the main body 15 is a reference point, the three protrusions 17 are each provided at positions approximately equal distances from this reference point. However, the main body 15 may be provided with four or more protrusions.

[0053] Each protrusion 17 has a first side surface 17a disposed on the central side of the main body 15 and a second side surface 17b disposed on the outer periphery side of the main body 15. The first side surface 17a is inclined toward the outer periphery side of the main body 15 as it moves away from the back surface 15b. On the other hand, the second side surface 17b is generally perpendicular to the back surface 15b. In other words, the protrusion 17 is configured to gradually become thinner toward the tip. In this embodiment, each protrusion 17 is configured integrally with the main body 15. However, the second side surface 17b may be inclined with respect to the back surface 15b.

[0054] Furthermore, each protrusion 17 is configured so that the distance from the center of the back surface 15b of the main body 15 to the end of the first side surface 17a on the back surface 15b side is the same as or slightly smaller than the radius of the top surface 12a of the chuck table 12, i.e., the radius of the top surface of the upper step portion 60b of the frame 60. This makes it possible to adjust the position of the chuck table 12 by pressing the first side surface 17a of the protrusion 17 against the upper step portion 60b of the frame 60 to move the chuck table 12.

[0055] The height of the protrusion 17 (the length from the back surface 15b of the main body 15 to the tip of the protrusion 17) is at least smaller than the thickness of the upper stage 60b of the frame 60, and is, for example, 10 mm to 15 mm, typically 12 mm. The width of the protrusion 17 (the maximum distance between the first side surface 17a and the second side surface 17b of the protrusion 17) is, for example, 4 mm to 6 mm, typically 5 mm.

[0056] By realizing the protrusion 17 with such a width, even if the maximum expected positional misalignment occurs between the support base 64 and the chuck table 12, it becomes possible to adjust the chuck table 12 and the support base 64 to a correct positional relationship. In this case, the angle that the first side surface 17a of the protrusion 17 makes with the back surface 15b of the main body 15 is, for example, 65° or more and 75° or less, typically 70°. The material of the protrusion 17 may be the same as the material of the main body 15. However, the size (height, width) and material of the protrusion 17 are not limited to these.

[0057] 3 and 4, an attachment portion 19 is provided outside the outer periphery of the main body portion 15. The attachment portion 19 is composed of, for example, two fastener receiving portions 21 arranged at positions sandwiching the main body portion 15. However, the arrangement of the fastener receiving portions 21 is not limited thereto, and each fastener receiving portion 21 may be arranged at a position where it can overlap with a fastener insertion hole 62 and a fastening hole 66 when the main body portion 15 is placed on the chuck table 12 on the support base 64.

[0058] Each fastener receiving portion 21 is configured in a plate shape having a substantially rectangular front surface 21a and a substantially rectangular back surface 21b opposite to the front surface 21a. Each fastener receiving portion 21 is provided with a through hole 23 penetrating the fastener receiving portion 21 from the front surface 19a to the back surface 19b. An alignment fastener 25 (see FIG. 10) is inserted into this through hole 23. In other words, this through hole 23 is formed with a width (diameter) that allows the alignment fastener 25 to be inserted.

[0059] Specifically, the width (diameter) of through hole 23 is slightly larger than the thickness (diameter) of the shaft portion of alignment fastener 25. However, if the width (diameter) of through hole 23 is too large compared to the thickness (diameter) of the shaft portion of alignment fastener 25, it is difficult to obtain a sufficient alignment effect by alignment jig 13. Therefore, it is desirable that the width (diameter) of through hole 23 is larger than the thickness (diameter) of the shaft portion of alignment fastener 25 by a range of 10 μm to 50 μm.

[0060] In this embodiment, each fastener receiving portion 21 is integrally formed with the main body portion 15, and the thickness of each fastener receiving portion 21 is also approximately the same as the thickness of the main body portion 15. Meanwhile, the length of the fastener receiving portion 21 along the diameter of the front surface 15a (or rear surface 15b) of the main body portion 15 is set so that, for example, the distance from the center of the front surface 15a (or rear surface 15b) of the main body portion 15 to the tip of the fastener receiving portion 21 is larger than the radius of the upper surface 12a of the chuck table 12.

[0061] The material of the fastener receiving portions 21 constituting the mounting portion 19 may be the same as the material of the main body portion 15. However, the number, shape, size, and material of the fastener receiving portions 21 constituting the mounting portion 19 are not limited to these. In addition, the mounting portion 19 may be fixed to the main body portion 15 by joining the fastener receiving portions 21 prepared separately from the main body portion 15 to the main body portion 15.

[0062] Fig. 5 is a perspective view showing the bottom surface etc. of a second example of the alignment jig. As shown in Fig. 5, in the second example, a ring-shaped protrusion 17 is provided on the back surface 15b of the main body 15 along the entire outer circumference of the main body 15. If the center of the back surface 15b of the main body 15 is taken as a reference point, the protrusion 17 is provided along a circumference with this reference point as the center of the circle.

[0063] As in the first example, the protrusion 17 is configured so that the distance from the center of the back surface 15b of the main body 15 to the end of the first side surface 17a on the back surface 15b side is the same as or slightly smaller than the radius of the top surface 12a of the chuck table 12, that is, the radius of the top surface of the upper step portion 60b of the frame 60. This makes it possible to press the first side surface 17a of the protrusion 17 against the upper step portion 60b of the frame 60, thereby moving the chuck table 12 and adjusting the position of the chuck table 12.

[0064] The height of protrusion 17 (the length from back surface 15b of main body 15 to the tip of protrusion 17) is also smaller than the thickness of upper stage 60b of frame 60, similarly to the first example, and is, for example, 10 mm to 15 mm, typically 12 mm. Also, the width of protrusion 17 (the maximum distance between first side surface 17a and second side surface 17b of protrusion 17) is, for example, 4 mm to 6 mm, typically 5 mm.

[0065] By realizing the protrusion 17 with such a width, even if the maximum expected amount of misalignment occurs between the support base 64 and the chuck table 12, it becomes possible to adjust the chuck table 12 and the support base 64 to a correct positional relationship. In this case, the angle that the first side surface 17a of the protrusion 17 makes with the back surface 15b of the main body 15 in a cross section perpendicular to the back surface 15b of the alignment jig 13 is, for example, 65° or more and 75° or less, typically 70°. The material of the protrusion 17 may be the same as the material of the main body 15. However, the size (height, width) and material of the protrusion 17 are not limited to these.

[0066] Fig. 6 is a side view of a third example of the alignment jig. Fig. 6 illustrates the main body 15 and the attachment portion 19 (fastener receiving portion 21) of the alignment jig 13, and does not illustrate the protrusion 17. As shown in Fig. 6, in the third example, the fastener receiving portion 21 is provided at a position different from that of the first and second examples. Specifically, the fastener receiving portion 21 of the third example is provided at a position away from the main body 15 along the direction from the front surface 15a to the back surface 15b of the main body 15.

[0067] By using the alignment jig 13 shown in Figure 6, the distance between the fastener receiving portion 21 of the alignment jig 13 and the lower portion 60a of the chuck table 12 is reduced, so that a fixing fastener 27 that is shorter than the alignment fastener 25 can also be used as the alignment fastener 25.

[0068] The material of the fastener receiving portion 21 constituting the mounting portion 19 may be the same as the material of the main body portion 15. However, the number, shape, size, and material of the fastener receiving portions 21 constituting the mounting portion 19 are not limited to these. Also, the mounting portion 19 may be fixed to the main body portion 15 by joining the fastener receiving portion 21 prepared separately from the main body portion 15 to the main body portion 15. Although omitted in FIG. 6, a protrusion is provided on the back surface 15b side of the main body portion 15 as in the other examples.

[0069] Next, an alignment method using the alignment jig of this embodiment will be described. Fig. 7 is a flow diagram showing a first example of the alignment method of this embodiment. As shown in Fig. 7, the first example of the alignment method of this embodiment includes a placement step S1, an insertion step S2, an alignment step S3, a first fastening step S4, a removal step S5, and a second fastening step S6.

[0070] 8 is a perspective view of the alignment jig 13, the chuck table 12, and the support base 64 in the arrangement step S1. In the arrangement step S1, the chuck table 12 is arranged on the front surface 64a side of the support base 64. In addition, the alignment jig 13 is arranged on the top surface 12a side of the chuck table 12 so that the back surface 15b of the main body 15 of the alignment jig 13 faces the top surface 12a of the chuck table 12.

[0071] The chuck table 12 is disposed on the surface 64a side of the support base 64 so that the position of the center (center of gravity) of the chuck table 12 is located approximately on an extension of the axis of a rotation axis that passes through the center (center of gravity) of the support base 64. Specifically, the chuck table 12 is disposed on the surface 64a side of the support base 64 so that the fastener insertion hole 62 of the chuck table 12 is located approximately directly above the fastening hole 66 of the support base 64.

[0072] The alignment jig 13 is disposed on the upper surface 12a side of the chuck table 12 so that the two through holes 23 of the alignment jig 13 are positioned approximately directly above the two fastener insertion holes 62 of the chuck table 12 and the two fastening holes 66 of the support base 64. As a result, two fastener insertion holes 62 selected from the twelve fastener insertion holes 62 and two fastening holes 66 selected from the twelve fastening holes 66 are positioned approximately directly below the two through holes 23.

[0073] As described above, the main body 15 of the alignment jig 13 in this embodiment is configured in a disk shape (plate shape), and no hole is provided that penetrates the main body 15. Therefore, when the alignment jig 13 is placed on the chuck table 12 in the above-mentioned manner, the upper surface 12a of the chuck table 12 is covered by the main body 15. This makes it possible to prevent foreign matter from adhering to the upper surface 12a of the chuck table 12 during alignment.

[0074] Fig. 9 is a cross-sectional view showing a part of the alignment jig 13, the chuck table 12, and the support base 64 in the arrangement step S1. Fig. 9 shows a case where the chuck table 12 is slightly misaligned with respect to the support base 64. As described above, the width (diameter) of the fastener insertion hole 62 is larger than the thickness (diameter) of the shaft portion of the fixing fastener 27. Therefore, if the fixing fastener 27 is fastened to the fastening hole 66 through the fastener insertion hole 62 in this state, the chuck table 12 will be fixed in a misaligned state with respect to the support base 64.

[0075] Therefore, next, an insertion step S2 is performed. In the insertion step S2, the alignment fastener 25 is inserted into the fastener insertion hole 62 of the chuck table 12 through the through hole 23 provided in the fastener receiving portion 21 of the alignment jig 13. Next, the alignment fastener 25 is fastened to the fastening hole 66 in a state in which the alignment fastener 25 is inserted into the fastener insertion hole 62 through the through hole 23.

[0076] 10 is a cross-sectional view showing a part of the alignment jig 13, the chuck table 12, the support base 64, and the alignment fastener 25 in the alignment step S3. As shown in Fig. 10, when the alignment fastener 25 is fastened to the fastening hole 66 of the support base 64, the first side surface 17a of the protrusion 17 of the alignment jig 13 is pressed against one point on the periphery of the upper surface 12a of the chuck table 12 from above.

[0077] As described above, the protrusions 17 are provided at positions that are approximately equal distances from the reference point on the back surface 15b. The first side surface 17a is inclined toward the outer periphery of the main body portion 15 as it moves away from the back surface 15b. In other words, the first side surface 17a is inclined toward the center of the main body portion 15 as it moves closer to the back surface 15b.

[0078] Therefore, when the first side surface 17a of the protrusion 17 is pressed against the end of the upper surface 12a of the chuck table 12 from above, a lateral force is applied from the first side surface 17a to the chuck table 12. Specifically, the chuck table 12 moves laterally until the first side surface 17a of the protrusion 17 comes into contact with multiple points on the periphery of the upper surface 12a.

[0079] As a result, the position of the chuck table 12 is adjusted so that the position of the center (center of gravity) of the chuck table 12 is located on an extension of the axis of the rotation axis that passes through the center (center of gravity) of the support base 64. In Fig. 10, the chuck table 12 is moved in the direction of the arrow by the positioning jig 13.

[0080] During this alignment step S3, a gas such as air or a liquid such as water may be supplied from the flow path 70 of the support base 64 to the groove 68. This causes an upward force of the gas or liquid to act on the chuck table 12 from the support base 64, making it easier for the chuck table 12 to move laterally. The amount of gas supplied at this time is, for example, 1 L / min to 3 L / min, typically 1 L / min. The amount of liquid supplied is, for example, 9 L / min to 11 L / min, typically 10 L / min.

[0081] Next, in a first fastening step S4, the fixing fasteners 27 are fastened to the fastening holes 66 through the fastener insertion holes 62 into which the alignment fasteners 25 have not been inserted. Fig. 11 is a perspective view of the alignment jig 13, the chuck table 12, the support base 64, and the fixing fasteners 27 in the first fastening step S4. As shown in Fig. 11, ten fixing fasteners 27 are fastened to the fastening holes 66, and the chuck table 12 is fixed to the support base 64.

[0082] Next, in a removal step S5, the alignment fasteners 25 are removed from the fastening holes 66, and the alignment jig 13 is removed from the upper surface 12a of the chuck table 12. After the removal step S5, a second fastening step S6 is performed. In the second fastening step S6, the fixing fasteners 27 are fastened to the fastening holes 66 through the remaining two fastener insertion holes 62 into which the fixing fasteners 27 were not inserted in the first fastening step S4.

[0083] Fig. 12 is a flow diagram showing a second example of the alignment method of the embodiment. As shown in Fig. 12, the second example of the alignment method includes a placement step S11, an insertion step S12, an alignment step S13, a removal step S14, a first fastening step S15, and a second fastening step S16.

[0084] That is, the alignment method of this second example differs from the first example only in that the removal step S14 is performed after the alignment step S13 and before the first fastening step S15 and the second fastening step S16. In this case, the second fastening step S16 may be performed before the first fastening step S15.

[0085] In addition, the structures, methods, and the like according to the above-described embodiments and modifications may be implemented without departing from the scope of the present invention. [Explanation of symbols]

[0086] 11: Workpiece 11a: Surface 11b: Back side 13: Alignment jig 15: Main body 15a: Surface (second side) 15b: Back side (first side) 17:Protrusion 17a: 1st side 17b: 2nd side 19: Mounting part 21: Fastener receiving part 21a: Surface 21b: Back side 23:Through hole 25: Alignment fastener 27:Fixing fasteners 29: Device 2: Grinding equipment 4: Base 4a: Opening 6:X-axis movement mechanism 8: Table cover 10: Dust-proof and water-resistant cover 12: Chuck table 12a:Top surface (holding surface) 14:Support structure 16:Z-axis movement mechanism 18: Guide rail 20: Moving plate 22: Screw shaft 24: Motor 26: Support 28: Grinding unit 30: Spindle housing 32: Spindle 34: Mount 36: Fasteners 38: Grinding wheel 40: Wheel base 42: Grinding wheel 44: Height gauge 46: First height gauge 48: Second height gauge 50: Controller (control unit) 52: Processing equipment 54: Storage device 56: Input device 58: Porous material 60: Frame 60a: Lower section 60b: Upper section 62: Fastener insertion hole 64: Support base 64a: surface 64b: Back 66: Fastening hole 68: Groove 70: Flow path

Claims

1. A positioning jig for aligning a chuck table having a plurality of fastener insertion holes into which fasteners are inserted at positions corresponding to a plurality of fastening holes, with respect to a support base having a top surface thereof with a plurality of fastening holes into which fasteners are fastened, a plate-shaped main body having a first surface that faces an upper surface of the chuck table during use; an attachment portion provided outside an outer periphery of the main body portion and having through holes at positions corresponding to any two or more of the plurality of fastening holes; a protrusion portion provided so as to protrude from the first surface of the main body portion, the side surface of which is disposed on the central side of the main body portion being inclined so as to approach the outer periphery side of the main body portion as it moves away from the first surface, When the first surface is placed facing the chuck table and an alignment fastener is fastened to the fastening hole through the through hole and the fastener insertion hole, the side of the protrusion is pressed against the chuck table, adjusting the position of the chuck table relative to the support base.

2. 2. The alignment jig according to claim 1, further comprising a plurality of said projections provided at equal distances from a reference point on said first surface.

3. 2. The alignment jig according to claim 1, further comprising an annular protrusion provided along a circumference having a center at a reference point on the first surface.

4. 4. A method for aligning a position of the chuck table with respect to the support base by using the alignment jig according to claim 1, comprising the steps of: a positioning step of positioning the chuck table on the upper surface side of the support base and positioning the alignment jig on the upper surface side of the chuck table; an insertion step of inserting an alignment fastener into the fastener insertion hole through the through hole; and an alignment step of fastening the alignment fastener, inserted into the fastener insertion hole through the through hole, to the fastening hole, thereby pressing the side of the protrusion against the chuck table and adjusting the position of the chuck table relative to the support base.

5. 5. The method of claim 4, further comprising a first fastening step, after the aligning step, of fastening a fixing fastener into the fastener hole through the fastener insertion hole into which the alignment fastener is not inserted.

6. 6. The method of claim 5, further comprising, after the aligning step, a removing step of removing the alignment fasteners from the fastening holes and removing the alignment fixture from the top surface of the chuck table.

7. 7. The method of claim 6, further comprising a second fastening step after the removing step of fastening a fixing fastener into the fastener insertion hole through which the alignment fastener was inserted.

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