Electro-optical device and electronic apparatus

Abstract

To provide an electro-optical device that suppresses deterioration in display quality and an electronic apparatus.SOLUTION: An electro-optical device comprises a first substrate, a second substrate, an electro-optical layer, and a sealing member, and has a display area, a sealing area, and an intermediate area. The first substrate includes a first electrode provided for each pixel included in the display area, a first coupling electrode, a first contact that electrically couples the first electrode to the first coupling electrode, a second electrode provided in the intermediate area and located in the same layer as the first electrode, a second coupling electrode, and a second contact that electrically couples the second electrode to the second coupling electrode. The first contact has a plug shape and is disposed in a first through hole provided in an insulating layer, the second contact has a plug shape and is disposed in a second through hole provided in the insulating layer, and the second electrode is divided into a plurality of electrode portions directed from an outer edge of the first substrate to the display area.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present invention relates to an electro-optical device and an electronic device. [Background technology]

[0002] 2. Description of the Related Art Electronic devices such as projectors use electro-optical devices such as liquid crystal display devices that can change optical characteristics for each pixel. One known example of such electro-optical devices is the electro-optical device described in Patent Document 1.

[0003] The electro-optical device described in Patent Document 1 includes an element substrate, an opposing substrate, a liquid crystal layer disposed between these substrates, and a sealing member disposed between these substrates to seal the liquid crystal layer. The electro-optical device also has a display region and a peripheral region surrounding the display region in a planar view. A sealing member is disposed in the peripheral region. A driving circuit is disposed in the peripheral region of the element substrate. The display region of the element substrate also includes pixel electrodes and an alignment film disposed on the pixel electrodes. The pixel electrodes are electrically connected to relay electrodes located below the pixel electrodes via contact portions that are columnar plugs penetrating an insulating layer. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2021-33073 A Summary of the Invention [Problem to be solved by the invention]

[0005] Since the contact portion is a columnar plug, the flatness of the pixel electrode can be improved, which prevents the adhesion of the alignment film provided on the pixel electrode from decreasing, and therefore prevents the transmittance from decreasing.

[0006] Also, consider the case where, for example, an electrode connecting a driving circuit and a pixel electrode is disposed in the same layer as the pixel electrode in the region between the display region and the sealing member. In this case, when a columnar plug is connected to the electrode, the flatness of the electrode is improved, as is the case with the pixel electrode. However, when the flatness of the electrode is improved, impurities generated from the sealing member may easily infiltrate into the display region. As a result, the impurities may infiltrate into the display region, causing display stains and degrading the display quality. [Means for solving the problem]

[0007] One aspect of the electro-optical device of the present invention is an electro-optical device comprising a first substrate, a second substrate, an electro-optical layer disposed between the first substrate and the second substrate, the electro-optical layer having optical properties that change in response to an electric field, and a sealing member disposed between the first substrate and the second substrate and outside the electro-optical layer in a planar view, the electro-optical device having a display region for displaying an image, a sealing region located outside the display region in a planar view and in which the sealing member is provided, and an intermediate region located between the display region and the sealing region in a planar view, the first substrate having first electrodes provided for each pixel of the display region, a first connection electrode provided in the display region and farther from the electro-optical layer than the first electrode in a first direction in which the first substrate and the second substrate overlap, and The pixel electrode includes an insulating layer provided between a first electrode and the first connection electrode, a first contact provided in the insulating layer and electrically connecting the first electrode and the first connection electrode, a second electrode provided in the intermediate region and located in the same layer as the first electrode, a second connection electrode provided in the intermediate region and farther from the electro-optical layer in the first direction than the second electrode, and a second contact provided in the insulating layer and electrically connecting the second electrode and the second connection electrode, wherein the first contact is plug-shaped and arranged in a first through hole provided in the insulating layer, the second contact is plug-shaped and arranged in a second through hole provided in the insulating layer, and the second electrode is divided into a plurality of electrode portions extending from an outer edge of the first substrate toward the display region. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a plan view of an electro-optical device according to a first embodiment. [Diagram 2] 2 is a cross-sectional view taken along the line AA of the electro-optical device shown in FIG. [Diagram 3] 2 is an equivalent circuit diagram showing an electrical configuration of the first substrate in FIG. 1. [Figure 4] FIG. 3 is a plan view of the peripheral electrode of FIG. [Diagram 5] 3 is a plan view of a portion of the first substrate in FIG. 2. [Figure 6] 3 is a cross-sectional view of a portion of the electro-optical device of FIG. 2. [Figure 7] 11 is a diagram for explaining a path of impurity penetration into a peripheral electrode of a comparative example. FIG. [Figure 8] 5A and 5B are diagrams for explaining the infiltration paths of impurities in the peripheral electrode of the present embodiment. [Figure 9] FIG. 11 is a cross-sectional view showing a part of an electro-optical device according to a second embodiment. [Figure 10] 10 is a cross-sectional view showing a part of the first substrate in FIG. 9. [Figure 11] FIG. 10 is an enlarged view of the recess shown in FIG. [Figure 12] FIG. 11 is a cross-sectional view showing a part of an electro-optical device according to a third embodiment. [Figure 13] FIG. 13 is a plan view of the counter electrode shown in FIG. [Figure 14] FIG. 13 is a cross-sectional view showing a part of an electro-optical device according to a fourth embodiment. [Figure 15] FIG. 1 is a perspective view showing a personal computer as an example of an electronic device. [Figure 16] FIG. 1 is a plan view showing a smartphone as an example of an electronic device. [Figure 17] FIG. 1 is a schematic diagram illustrating a projector as an example of an electronic device. [Figure 18] FIG. 13 is a plan view of a peripheral electrode according to a modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. Note that the dimensions or scale of each part in the drawings may differ from the actual dimensions, and some parts are shown diagrammatically to facilitate understanding. Furthermore, the scope of the present invention is not limited to these embodiments unless otherwise specified in the following description to the effect that the present invention is limited thereto.

[0010] 1. Electro-optical device A. First embodiment A-1.Basic configuration FIG. 1 is a plan view of an electro-optical device 100 according to an embodiment. FIG. 2 is a cross-sectional view of the electro-optical device 100 shown in FIG. 1 along line AA. In the following, for convenience of explanation, the mutually orthogonal X-axis, Y-axis, and Z-axis are appropriately used. Moreover, one direction along the X-axis is denoted as the X1 direction, and the direction opposite to the X1 direction is denoted as the X2 direction. Similarly, one direction along the Y-axis is denoted as the Y1 direction, and the direction opposite to the Y1 direction is denoted as the Y2 direction. One direction along the Z-axis is denoted as the Z1 direction, and the direction opposite to the Z1 direction is denoted as the Z2 direction.

[0011] In addition, the "electrical connection" between the elements α and β includes a configuration in which the elements α and β are electrically connected by direct bonding, as well as a configuration in which the elements α and β are indirectly electrically connected via another conductor. Furthermore, "substantially equal" includes cases in which the elements are strictly equal, as well as cases in which there is a difference on the order of a manufacturing error.

[0012] The electro-optical device 100 shown in FIG. 1 and FIG. 2 is a transmissive electro-optical device of an active matrix driving system. As shown in FIG. 2, the electro-optical device 100 has a first substrate 2, a second substrate 3, a seal member 4, and a liquid crystal layer 5. Also, as shown in FIG. 2, the first substrate 2, the liquid crystal layer 5, and the second substrate 3 are arranged in this order in the Z1 direction. Therefore, the first direction in which the first substrate 2 and the second substrate 3 overlap is the Z1 direction or the Z2 direction. Note that a "planar view" refers to a view from the Z1 direction or the Z2 direction in which the first substrate 2, the liquid crystal layer 5, and the second substrate 3 overlap. Also, the planar shape of the electro-optical device 100 shown in FIG. 1 is a rectangle, but it may be a polygon other than a rectangle or a circle.

[0013] The electro-optical device 100 shown in Fig. 2 is a transmissive type, and the first substrate 2 and the second substrate 3 are translucent. An image is displayed by modulating incident light LL while it is being emitted from the first substrate 2 after it is incident on the second substrate 3. An image may also be displayed by modulating the light incident on the first substrate 2 while it is being emitted from the second substrate 3. Moreover, "translucency" refers to transparency to visible light, and preferably refers to a visible light transmittance of 50% or more.

[0014] The first substrate 2 has a first base 21, a laminate 20, a plurality of pixel electrodes 25, a plurality of dummy pixel electrodes 25d, a peripheral electrode 26, and an alignment film 29. The pixel electrode 25 corresponds to a "first electrode." The peripheral electrode 26 corresponds to a "second electrode." The first base 21, the laminate 20, the plurality of pixel electrodes 25, and the alignment film 29 are laminated in this order in the Z1 direction. The plurality of pixel electrodes 25, the plurality of dummy pixel electrodes 25d, and the peripheral electrode 26 are arranged in the same layer.

[0015] The first base 21 is a flat plate having translucency and insulation, and is composed of, for example, a glass substrate or a quartz substrate. The laminate 20 includes a plurality of insulating films having translucency and insulation, which are not shown in detail. Each insulating film includes an inorganic silicon material. The inorganic silicon material is, for example, an inorganic compound containing silicon, such as silicon oxide and silicon oxynitride. The laminate 20 is also provided with a transistor 240 and various wirings, which will be described later and are shown in FIG. 3.

[0016] The pixel electrodes 25, the dummy pixel electrodes 25d, and the peripheral electrode 26 in FIG. 2 are disposed on the laminate 20. The pixel electrodes 25 apply an electric field to the liquid crystal layer 5. Although the dummy pixel electrodes 25d do not contribute to display, they have the same configuration as the pixel electrodes 25 and are driven and controlled in the same manner as the pixel electrodes 25. For example, the dummy pixel electrodes 25d are used for noise reduction of image signals written to the pixel electrodes 25. The peripheral electrode 26 is an ion trap electrode that traps ionic impurities in the liquid crystal layer 5. The peripheral electrode 26 has a plurality of electrode portions 260. Each of the pixel electrodes 25, the dummy pixel electrodes 25d, and the peripheral electrode 26 includes a transparent conductive material such as ITO (Indium Tin Oxide), IZO (Indium Zinc Oxide), and FTO (Fluorine-doped tin oxide). The pixel electrodes 25, the dummy pixel electrodes 25d, and the peripheral electrode 26 are formed collectively, for example, by etching a conductive film containing the transparent conductive material.

[0017] The alignment film 29 has light-transmitting properties and insulating properties. The alignment film 29 is in contact with the liquid crystal layer 5, and aligns the liquid crystal molecules in the liquid crystal layer 5. The alignment film 29 covers the pixel electrodes 25, the dummy pixel electrodes 25d, and the peripheral electrode 26. The alignment film 29 is made of a material such as silicon oxide. The alignment film 29 is formed by oblique deposition, for example.

[0018] 1, a drive circuit 10 and a plurality of external terminals 13 are arranged on the first substrate 2. The drive circuit 10 includes a scanning line drive circuit 11 and a signal line drive circuit 12. Some of the plurality of external terminals 13 are connected to wiring (not shown) that is routed from the scanning line drive circuit 11 or the signal line drive circuit 12. The plurality of external terminals 13 also includes a terminal to which a constant potential Vcom is applied.

[0019] 2, the second substrate 3 is spaced apart from the first substrate 2 and faces the first substrate 2. The second substrate 3 has a second base portion 31, a laminate 30, a counter electrode 32, an alignment film 39, and a parting portion 33. The second base portion 31, the laminate 30, the counter electrode 32, and the alignment film 39 are laminated in this order in the Z2 direction.

[0020] The second base 31 shown in FIG. 2 is a flat plate having translucency and insulation, and is composed of, for example, a glass substrate or a quartz substrate. The laminate 30 has translucency and insulation properties and contains an inorganic silicon material. The laminate 30 is also provided with a parting portion 33. The parting portion 33 is a light-shielding portion that surrounds the plurality of pixel electrodes 25 in a plan view. The parting portion 33 overlaps, for example, the plurality of dummy pixel electrodes 25d and the peripheral electrode 36 in a plan view. Note that the "light-shielding property" means a light-shielding property against visible light, and preferably means that the transmittance of visible light is less than 50%, and more preferably means that the transmittance is 10% or less. Examples of materials for the parting portion 33 include metals such as tungsten (W), titanium (Ti), chromium (Cr), iron (Fe), and aluminum (Al), metal alloys, metal silicides which are alloys of metal and silicon, and metal compounds such as metal nitrides. Although not shown, the laminate 30 may have, for example, a plurality of microlenses.

[0021] The counter electrode 32 applies an electric field to the liquid crystal layer 5. The counter electrode 32 is translucent and conductive. The counter electrode 32 includes a transparent conductive material such as ITO, IZO, and FTO. The alignment film 39 is translucent and insulating. The alignment film 39 is in contact with the liquid crystal layer 5 and aligns the liquid crystal molecules in the liquid crystal layer 5. The alignment film 39 is disposed on the counter electrode 32. The material of the alignment film 39 is, for example, silicon oxide. The alignment film 39 is formed by, for example, oblique deposition.

[0022] 1, a plurality of inter-substrate conductive materials 6 are provided between the first substrate 2 and the second substrate 3. The plurality of inter-substrate conductive materials 6 are conductive materials for electrically connecting the first substrate 2 and the second substrate 3. The inter-substrate conductive materials 6 are connected to a terminal of the plurality of external terminals 13 to which a constant potential Vcom is applied, via a lead wiring (not shown) arranged on the first substrate 2. Thus, a constant potential Vcom is applied to the counter electrode 32.

[0023] The sealing member 4 is disposed between the first substrate 2 and the second substrate 3, and seals the liquid crystal layer 5. In FIG. 1, the sealing member 4 is marked with dots to make the arrangement of the sealing member 4 easier to understand. The sealing member 4 contains a UV-curable material such as an epoxy resin. UV is an abbreviation for ultraviolet, and particularly refers to light with a wavelength of 100 nm or more and 400 nm or less. The sealing member 4 may also contain a gap material made of an inorganic material such as glass. As shown in FIG. 1, the sealing member 4 is disposed outside the liquid crystal layer 5.

[0024] As shown in FIG. 2, the liquid crystal layer 5 is disposed between the first substrate 2 and the second substrate 3. Specifically, the liquid crystal layer 5 is disposed within a region surrounded by the first substrate 2, the second substrate 3, and the seal member 4. The liquid crystal layer 5 is an electro-optical layer whose optical properties change in response to an electric field. The liquid crystal layer 5 contains liquid crystal molecules having positive or negative dielectric anisotropy. The orientation of the liquid crystal molecules changes in response to a voltage applied to the liquid crystal layer 5.

[0025] As shown in FIG. 1, the electro-optical device 100 has a display area A10 and a peripheral area A20. The display area A10 is an area where an image is displayed. A plurality of pixels P arranged in a matrix are provided in the display area A10. The above-mentioned pixel electrode 25 is provided for each pixel P. Thus, a plurality of pixel electrodes 25 are provided in the display area A10. The above-mentioned counter electrode 32 is provided in common to the plurality of pixels P.

[0026] The peripheral region A20 is provided outside the display region A10 in a plan view, and is provided along the outer edge of the display region A10 in a plan view. The peripheral region A20 is a frame-like shape surrounding the display region A10 in a plan view. The peripheral region A20 includes a dummy pixel region A21, an intermediate region A22, and a seal region A23. Each of these regions is provided along the outer edge of the display region A10 in a plan view. In the illustrated example, each of these regions has a planar shape of a rectangular frame. The dummy pixel region A21 is located between the display region A10 and the intermediate region A22. A plurality of dummy pixels Pd are provided in the dummy pixel region A21. A dummy pixel electrode 25d is provided for each dummy pixel Pd. Therefore, a plurality of dummy pixel electrodes 25d are provided in the dummy pixel region A21. The intermediate region A22 is a region located between the display region A10 and the seal region A23. In the intermediate region A22, a peripheral electrode 26 is disposed. In the sealing region A23, a sealing member 4 is disposed. In addition, in the peripheral region A20, a driving circuit 10 and a plurality of external terminals 13 are disposed. Note that a part of the driving circuit 10 may be provided in the intermediate region A22.

[0027] The electro-optical device 100 is applied to a display device that performs color display, such as a personal computer and a smartphone, which will be described later. When applied to such a display device, a color filter is appropriately used for the electro-optical device 100. Furthermore, the electro-optical device 100 is applied to, for example, a projection-type projector, which will be described later. In this case, the electro-optical device 100 functions as a light valve. In this case, the color filter is omitted for the electro-optical device 100.

[0028] A-2. Electrical configuration of the first board 2 Fig. 3 is an equivalent circuit diagram showing the electrical configuration of the first substrate 2 in Fig. 1. As shown in Fig. 3, the first substrate 2 has a plurality of transistors 240, n scanning lines 241, m signal lines 242, and n constant potential lines 243. These are arranged in the laminate 20 in Fig. 2. n and m are each an integer of 2 or more. In addition, the transistors 240 are arranged corresponding to each intersection of the n scanning lines 241 and the m signal lines 242. Each transistor 240 is, for example, a TFT (Thin Film Transistor) that functions as a switching element. Each transistor 240 includes a gate, a source, and a drain.

[0029] Each of the n scanning lines 241 extends in the X1 direction, and the n scanning lines 241 are arranged at equal intervals in the Y1 direction. Each of the n scanning lines 241 is electrically connected to the gates of the corresponding transistors 240. The n scanning lines 241 are electrically connected to the scanning line driving circuit 11 shown in Fig. 1. Scanning signals G1, G2, ..., and Gn are supplied line-sequentially to the 1st to nth scanning lines 241 from the scanning line driving circuit 11.

[0030] Each of the m signal lines 242 shown in Fig. 3 extends in the Y1 direction, and the m signal lines 242 are arranged at equal intervals in the X1 direction. Each of the m signal lines 242 is electrically connected to the sources of the corresponding transistors 240. The m signal lines 242 are electrically connected to the signal line drive circuit 12 shown in Fig. 1. Image signals S1, S2, ..., and Sm are supplied in parallel to the 1 to m signal lines 242 from the signal line drive circuit 12.

[0031] 3 are electrically insulated from each other and arranged in a lattice pattern in plan view. An area surrounded by two adjacent scanning lines 241 and two adjacent signal lines 242 corresponds to a pixel P. A transistor 240, a pixel electrode 25, and a storage capacitor 24 are provided for each pixel P. The pixel electrodes 25 are provided in a one-to-one correspondence with the transistors 240. Each pixel electrode 25 is electrically connected to the drain of the corresponding transistor 240.

[0032] Each of the n constant potential lines 243 extends in the X1 direction, and the n constant potential lines 243 are arranged at equal intervals in the Y1 direction. The n constant potential lines 243 are electrically insulated from the n scanning lines 241 and the m signal lines 242, and are arranged at intervals from these. A constant potential Vcom is applied to each of the constant potential lines 243. Each of the n constant potential lines 243 is electrically connected to one of the two electrodes of the corresponding storage capacitor 24. Each storage capacitor 24 is a storage capacitor for holding the potential of the pixel electrode 25. The storage capacitor 24 is provided in a one-to-one relationship with the transistor 240. The other of the two electrodes of each storage capacitor 24 is electrically connected to the corresponding pixel electrode 25. Therefore, a constant potential Vcom is applied to one electrode of the storage capacitor 24, and the other electrode is electrically connected to the drain of the transistor 240.

[0033] When the scanning signals G1, G2, ..., and Gn are successively activated and n scanning lines 241 are successively selected, the transistor 240 connected to the selected scanning line 241 is turned on. Then, a potential according to the image signals S1, S2, ..., and Sm having a magnitude according to the gradation to be displayed is applied to the pixel electrode 25 of the pixel P corresponding to the selected scanning line 241 via m signal lines 242. As a result, a voltage according to the gradation to be displayed is applied to the liquid crystal capacitance formed between the pixel electrode 25 and the counter electrode 32, and the orientation of the liquid crystal molecules changes according to the applied voltage. In addition, the applied voltage is held by the storage capacitance 24. Such a change in the orientation of the liquid crystal molecules modulates light, enabling gradation display.

[0034] A-3. Peripheral area A20

[0035] FIG. 4 is a plan view of the peripheral electrode 26 of FIG. 2. As shown in FIG. 4, the peripheral electrode 26 is disposed outside the display area A10. The peripheral electrode 26 includes a plurality of electrode sections 260 spaced apart from one another. Each electrode section 260 is in the shape of a frame surrounding the display area A10. The shape of each electrode section 260 in plan view is a substantially rectangular frame. The number of the plurality of electrode sections 260 is not particularly limited and is arbitrary as long as it is two or more. The distances between the plurality of electrode sections 260 may be equal to one another or may be different from one another.

[0036] Fig. 5 is a plan view of a portion of the first substrate 2 in Fig. 2. As shown in Fig. 5, the multiple pixel electrodes 25 are arranged in a matrix. The multiple dummy pixel electrodes 25d are arranged outside the multiple pixel electrodes 25 in a plan view. The multiple dummy pixel electrodes 25d are arranged between the multiple pixel electrodes 25 and the peripheral electrode 26. The multiple dummy pixel electrodes 25d are arranged in a matrix together with the multiple pixel electrodes 25.

[0037] Fig. 6 is a cross-sectional view of a portion of the electro-optical device 100 of Fig. 2. As shown in Fig. 6, the laminate 20 includes a first insulating layer 22 and a second insulating layer 23. The first insulating layer 22 is an example of an "insulating layer". The first insulating layer 22 is the uppermost layer of the laminate 20 that is closest to the liquid crystal layer 5 among the multiple insulating films that the laminate 20 has. A plurality of pixel electrodes 25, a plurality of dummy pixel electrodes 25d, and a peripheral electrode 26 are arranged on the first insulating layer 22.

[0038] The second insulating layer 23 is a layer below the first insulating layer 22 and is in contact with the first insulating layer 22. On the second insulating layer 23, a plurality of first connection electrodes 252, a plurality of third connection electrodes 252d, and a plurality of second connection electrodes 262 are provided.

[0039] The first connection electrodes 252 are arranged in a one-to-one relationship with the pixel electrodes 25, and overlap the pixel electrodes 25 in a planar view. Each of the first connection electrodes 252 is provided at a position farther from the liquid crystal layer 5 than the pixel electrodes 25 in a direction along the Z axis, which is the first direction. The third connection electrodes 252d are arranged in a one-to-one relationship with the dummy pixel electrodes 25d, and overlap the dummy pixel electrodes 25d in a planar view. Each of the third connection electrodes 252d is provided at a position farther from the liquid crystal layer 5 than the dummy pixel electrodes 25d in a direction along the Z axis, which is the first direction. The second connection electrodes 262 are arranged in a one-to-one relationship with the electrode portions 260, and overlap the electrode portions 260 in a planar view. Each of the second connection electrodes 262 is provided at a position farther from the liquid crystal layer 5 than the peripheral electrodes 26 in a direction along the Z axis, which is the first direction.

[0040] Each pixel electrode 25 is connected to the first connection electrode 252 via a first contact 251. The first contact 251 is a contact plug disposed in a first through hole H1 provided in the first insulating layer 22. The first contact 251 is in the form of a columnar plug filling the first through hole H1. Since the first contact 251 is in the form of a plug, the flatness of the upper surface of the pixel electrode 25 can be improved. This prevents a decrease in the adhesion between the pixel electrode 25 and the alignment film 29. This prevents a decrease in the transmittance.

[0041] Each dummy pixel electrode 25d is connected to the third connection electrode 252d via a third contact 251d. The third contact 251d is a contact plug disposed in a third through hole H3 provided in the first insulating layer 22. The third contact 251d is a columnar plug filling the third through hole H3. Since the third contact 251d is plug-shaped like the first contact 251, the first contact 251 and the third contact 251d can be formed in the same process, facilitating manufacturing.

[0042] Each electrode portion 260 is connected to the second connection electrode 262 via a second contact 261. The second contact 261 is a contact plug disposed in a second through hole H2 provided in the first insulating layer 22. The second contact 261 is in the form of a columnar plug filling the second through hole H2. Since the second contact 261 is in the form of a plug like the first contact 251, the first contact 251 and the second contact 261 can be formed in the same process, making manufacturing easy. As shown in FIG. 5, the second contact 261 is disposed near a corner of the electrode 263. The second contact 261 is electrically connected to the drive circuit 10 described above via a plurality of second connection electrodes 262 and an electrode 263. The plurality of second connection electrodes 262 and an electrode 263 may be integrated. For example, as shown in FIG. 18, the plurality of electrode portions 260 may have portions connected to each other. In this case, for example, any one of the plurality of electrode units 260 is connected to the electrode 263, whereby the plurality of electrode units 260 are electrically connected to the above-described drive circuit 10 via the electrode 263. In this case, the plurality of electrode units 260 may be connected to one second contact 261 and one second connection electrode 262.

[0043] As described above, the pixel electrode 25, the dummy pixel electrode 25d, and the electrode section 260 may each be made of a transparent conductive material such as ITO, IZO, or FTO. The pixel electrode 25, the dummy pixel electrode 25d, and the electrode section 260 may each be made of a single-layer structure or a multi-layer structure. The first connection electrode 252, the second connection electrode 262, and the third connection electrode 252d may each be made of a metal such as aluminum (Al) or titanium (Ti), an alloy containing the metal, or a transparent conductive material. The first connection electrode 252, the second connection electrode 262, and the third connection electrode 252d may each be made of a single-layer structure or a multi-layer structure.

[0044] Examples of materials for the first contact 251, the second contact 261, and the third contact 251d include metals such as tungsten, metal silicides which are alloys of the metals and silicon, and metal compounds such as metal nitrides. The first contact 251, the second contact 261, and the third contact 251d may each have a single-layer structure or a multilayer structure. In particular, the materials for the first contact 251, the second contact 261, and the third contact 251d preferably contain tungsten. Tungsten has excellent heat resistance, and the use of tungsten allows through holes with a high aspect ratio to be suitably filled.

[0045] A-4. Peripheral electrode 26 As described above, the peripheral electrode 26 includes a plurality of electrode sections 260 spaced apart from each other. That is, the peripheral electrode 26 is divided into a plurality of electrode sections 260 spaced apart from each other. As shown in FIG. 4, the plurality of electrode sections 260 are arranged from the outer edge of the first substrate 2 toward the display area A10. In particular, the plurality of electrode sections 260 are arranged from the outer edge of the first substrate 2 toward the display area A10. By providing such a peripheral electrode 26, it is possible to lengthen the path from the seal member 4 to the display area A10 via the liquid crystal layer 5 and the first substrate 2. This makes it possible to suppress display defects such as the occurrence of display stains caused by impurities entering the display area A10. This makes it possible to suppress a decrease in display quality.

[0046] Fig. 7 is a diagram for explaining the infiltration path of impurities in the peripheral electrode 26x of the comparative example, and Fig. 8 is a diagram for explaining the infiltration path of impurities in the peripheral electrode 26 of the present embodiment.

[0047] In the comparative example shown in Fig. 7, the peripheral electrode 26x is not divided into multiple parts. Therefore, the upper surface of the peripheral electrode 26x is flat. Therefore, the upper surface of the alignment film 29 on the peripheral electrode 26x is also flat. Therefore, as shown by the arrow Ax, there is a risk that impurities generated from the seal member 4 will enter straight into the display area A10 through the gap between the first substrate 2 and the liquid crystal layer 5.

[0048] In the present embodiment shown in FIG. 8, the peripheral electrode 26 is divided into a plurality of electrode portions 260 spaced apart from each other, and the plurality of electrode portions 260 are arranged from the outer edge of the first substrate 2 toward the display area A10. For this reason, the peripheral electrode 26 has a plurality of projections and recesses. Therefore, the upper surface of the alignment film 29 has a plurality of projections and recesses. Therefore, as shown by the arrow A0, impurities do not pass straight from the seal member 4 to the display area A10. Since the peripheral electrode 26 has a plurality of projections and recesses, the infiltration path of impurities into the display area A10 in the present embodiment can be made longer than in the comparative example.

[0049] 7 and 8, in this embodiment, the peripheral electrode 26 is divided into a plurality of electrode portions 260, so that the path through which impurities can penetrate from the seal member 4 to the display area A10 can be lengthened, thereby making it possible to suppress deterioration of display quality.

[0050] 4, each of the electrode units 260 is disposed along the outer edge of the display area A10 in a plan view. From another perspective, each of the electrode units 260 extends in a direction intersecting the shortest path between the display area A10 and the sealing area A23 in a plan view. Since each electrode unit 260 is disposed along the outer edge of the display area A10 in a plan view, the peripheral electrode 26 has multiple projections and recesses in the direction from the sealing area A23 toward the display area A10. This makes it possible to lengthen the path through which impurities can enter from the sealing member 4 into the display area A10.

[0051] In particular, each of the multiple electrode units 260 surrounds the display area A10 in a planar view. Therefore, the path through which impurities can enter the display area A10 from the seal member 4 can be lengthened over the entire range outside the display area A10. This enhances the effect of making it difficult for impurities to enter the display area A10. Note that each electrode unit 260 does not surround the display area A10 in a planar view, and some parts may be missing.

[0052] Further, the multiple dummy pixel electrodes 25d are disposed between the intermediate region A22 and the display region A10. Therefore, the peripheral electrode 26 is disposed outside the multiple dummy pixel electrodes 25d in a plan view. By providing the peripheral electrode 26 outside the multiple dummy pixel electrodes 25d, it is possible to more effectively prevent impurities from entering the display region A10. The presence of the dummy pixel electrode 25d makes it possible to increase the distance from the seal member 4 to the display region A10 compared to the case where the dummy pixel electrode 25d is not present. Therefore, it is possible to more effectively prevent impurities from entering the display region A10. Note that the multiple dummy pixel electrodes 25d may be omitted.

[0053] 5 and 6, the width W1 of each of the plurality of electrode portions 260 is smaller than the width W0 of the pixel electrode 25. By making the width W1 smaller than the width W0, the intrusion path of impurities into the display area A10 can be made longer than when the width W1 is equal to or larger than the width W0. In other words, by dividing the peripheral electrode 26 into the plurality of electrode portions 260 so that the width W1 is smaller than the width W0, the intrusion path can be made longer. Note that the width W1 may be equal to or larger than the width W0.

[0054] The distance between the electrode portions 260 is not particularly limited and may be equal to or greater than the width W1 or less than the width W1. However, by making the distance less than the width W1, it is possible to effectively prevent impurities from penetrating into the display region A10 without excessively increasing the planar area of ​​the first substrate 2. The height of the electrode portions 260, i.e., the length in the Z1 direction, is approximately equal to the height of the pixel electrodes 25, but may be different.

[0055] B. Second embodiment A second embodiment will be described. In the following examples, elements having the same functions as those in the first embodiment will be designated by the same reference numerals as those in the first embodiment, and detailed descriptions thereof will be omitted as appropriate.

[0056] Fig. 9 is a cross-sectional view showing a portion of an electro-optical device 100A according to the second embodiment. The electro-optical device 100A shown in Fig. 9 has a first substrate 2A instead of the first substrate 2 of the first embodiment. The first substrate 2A differs from the first substrate 2 of the first embodiment in that it has a first insulating layer 22A instead of the first insulating layer 22.

[0057] Fig. 10 is a cross-sectional view showing a portion of the first substrate 2A of Fig. 9. As shown in Fig. 9 and Fig. 10, the first insulating layer 22A has a plurality of recesses 230 spaced apart from one another. Each recess 230 is a depression formed in the first insulating layer 22A.

[0058] The multiple recesses 230 are provided in the intermediate region A22. The multiple recesses 230 do not overlap with the peripheral electrode 26 in a plan view. Therefore, the multiple recesses 230 do not overlap with the multiple electrode units 260 and are provided at positions different from the multiple electrode units 260. By providing the multiple recesses 230, the unevenness on the upper surface of the peripheral electrode 26 can be made larger than when the multiple recesses 230 are not provided. Therefore, the unevenness on the alignment film 29 can be made larger. Therefore, the intrusion path of impurities into the display region A10 via the first substrate 2A and the liquid crystal layer 5 can be made longer. Therefore, by providing the multiple recesses 230, display defects such as the occurrence of display stains caused by impurities entering the display region A10 can be more effectively suppressed than when the multiple recesses 230 are not provided.

[0059] Moreover, the multiple recesses 230 are arranged along the outer edge of the display region A10 in a plan view. From another perspective, the multiple recesses 230 are linear and extend in a direction intersecting the shortest path between the display region A10 and the sealing region A23 in a plan view. Since each recess 230 is arranged along the outer edge of the display region A10 in a plan view, the upper surface of the alignment film 29 has multiple projections and recesses in the direction from the sealing region A23 toward the display region A10. This makes it possible to lengthen the path through which impurities can enter from the sealing member 4 into the display region A10.

[0060] In particular, each of the multiple recesses 230 surrounds the display region A10 in a planar view. Therefore, the path through which impurities can enter the display region A10 from the seal member 4 can be lengthened over the entire range outside the display region A10. This enhances the effect of making it difficult for impurities to enter the display region A10. Note that each recess 230 does not have to surround the display region A10 in a planar view. The recesses 230 may be scattered so as to surround the liquid crystal layer 5.

[0061] Furthermore, the plurality of electrode units 260 and the plurality of recesses 230 are alternately arranged in a plan view. Therefore, a large recess is formed by the electrode unit 260 protruding from the first insulating layer 22 and the recess 230 which is a recess formed in the first insulating layer 22. This makes it possible to lengthen the path through which impurities enter the display area A10 from the seal member 4. Note that, although one recess 230 is provided between two adjacent electrode units 260 in this embodiment, two or more recesses may be provided between two adjacent electrode units 260.

[0062] Moreover, each recess 230 does not overlap with the multiple electrode portions 260 in a planar view. Therefore, each recess 230 does not overlap with the second contact 261 in a planar view, and is provided at a position different from the second contact 261 in a planar view. Therefore, in order to provide the recess 230, it is not necessary to change the arrangement of the second contact 261.

[0063] Fig. 11 is an enlarged view of the recess 230 shown in Fig. 9. As shown in Fig. 11, in this embodiment, the depth D0 of the recess 230 is shallower than the depth D2 of the second through hole H2. Note that the depth D0 may be greater than or equal to the depth D2.

[0064] Furthermore, the width W1 of the electrode portion 260 is approximately equal to the width W2 of the recess 230, but the width W1 may be greater or smaller than the width W2. Furthermore, the distance W3 from the electrode portion 260 to the recess 230 is smaller than the width W2 of the recess 230. By making the distance W3 smaller than the width W2, an excessive increase in the plane area of ​​the intermediate region A22 is suppressed compared to when the distance W3 is greater than or equal to the width W2. Note that the width W3 may be greater than or equal to the width W2. The width W1 is, for example, 0.1 μm or more and 1.5 μm or less. The width W2 is, for example, 0.1 μm or more and 1.5 μm or less. The width W3 is, for example, 0.1 μm or more and 1.0 μm or less.

[0065] C. Third embodiment A third embodiment will be described. In the following examples, the elements having the same functions as those in the second embodiment will be designated by the same reference numerals as those in the second embodiment, and detailed descriptions thereof will be omitted as appropriate.

[0066] Fig. 12 is a cross-sectional view showing a portion of an electro-optical device 100B of a third embodiment. Fig. 13 is a plan view of the counter electrode shown in Fig. 12. The electro-optical device 100B shown in Fig. 12 has a laminate 30B and a counter electrode 32B instead of the laminate 30 and the counter electrode 32 of the second embodiment.

[0067] As shown in Fig. 12, the laminate 30B is provided with a plurality of second recesses 320. The plurality of second recesses 320 have the same configuration as the plurality of recesses 230, except that they are provided in the laminate 30B. As shown in Fig. 13, the plurality of second recesses 320 are provided in the intermediate region A22. Therefore, the plurality of second recesses 320 are located outside the plurality of pixel electrodes 25 in a plan view. The plurality of second recesses 320 are aligned from the outer edge of the second substrate 3B toward the display region A10.

[0068] By providing the plurality of second recesses 320, the counter electrode 32B has unevenness in the intermediate region A22. Therefore, unevenness is formed on the surface of the alignment film 39. Therefore, it is possible to suppress the risk that impurities of the seal member 4 will infiltrate into the display region A10 through the gap between the second substrate 3B and the liquid crystal layer 5. Therefore, according to the present embodiment, it is possible to suppress the infiltration of impurities into the display region A10 through the gap between the first substrate 2A and the liquid crystal layer 5 and the gap between the second substrate 3B and the liquid crystal layer 5. Therefore, it is possible to more effectively suppress display defects such as the occurrence of display stains.

[0069] Furthermore, each of the second recesses 320 extends in a direction intersecting the shortest path between the display region A10 and the sealing region A23 in a planar view. In particular, each of the second recesses 320 surrounds the liquid crystal layer 5 in a planar view. Therefore, in the second substrate 3B as well, similarly to the first substrate 2A, the path through which impurities can enter the display region A10 can be made longer over the entire range outside the display region A10.

[0070] D. Fourth embodiment A fourth embodiment will be described. In the following examples, the elements having the same functions as those in the first embodiment will be designated by the reference numerals used in the description of the first embodiment, and detailed descriptions thereof will be omitted as appropriate.

[0071] Fig. 14 is a cross-sectional view showing a portion of an electro-optical device 100C according to a fourth embodiment. The electro-optical device 100C shown in Fig. 14 has a first insulating layer 22C and a second insulating layer 23C instead of the first insulating layer 22 and the second insulating layer 23 of the first embodiment. The first insulating layer 22C and the second insulating layer 23C correspond to the "insulating layer".

[0072] The second insulating layer 23C has a plurality of lenses 220. Each lens 220 has a convex lens surface that protrudes toward the liquid crystal layer 5. The plurality of lenses 220 are provided corresponding to the plurality of pixel electrodes 25, the plurality of dummy pixel electrodes 25d, and the plurality of electrode portions 260. One lens 220 corresponds to one pixel electrode 25, and one pixel electrode 25 overlaps one lens 220 in a planar view. One lens 220 corresponds to one dummy pixel electrode 25d, and one dummy pixel electrode 25d overlaps one lens 220 in a planar view. One lens 220 corresponds to one electrode portion 260, and one electrode portion 260 overlaps one lens 220 in a planar view.

[0073] The first insulating layer 22C has a plurality of concave surfaces in contact with the lens surfaces of the plurality of lenses 220. Furthermore, the refractive index of the first insulating layer 22C and the refractive index of the second insulating layer 23C are different from each other.

[0074] The first contact 251, the second contact 261, and the third contact 251d are contact plugs that penetrate the first insulating layer 22C and the second insulating layer 23C. The aspect ratio of the contact plug is easier to increase than that of a so-called trench-type electrode. For this reason, by using the contact plug for the second insulating layer 23C including the lens 220, the reduction in the plane area of ​​the lens 220 is suppressed. In addition, since the first contact 251 is a contact plug and the second contact 261 and the third contact 251d are contact plugs, the lens 220 can be formed corresponding to the dummy pixel electrode 25d and the electrode portion 260 without forming the lens 220 corresponding only to the pixel electrode 25. That is, the lens 220 can be provided in almost the entire area of ​​the second insulating layer 23C. Since the lens 220 is provided in almost the entire area of ​​the second insulating layer 23C, patterning for forming the lens 220 only in the display area A10 of the second insulating layer 23C is not required. This makes the manufacturing process easy. The lens 220 may also be provided in the seal area A23.

[0075] Moreover, each lens 220 may protrude in the direction opposite to the liquid crystal layer 5. Moreover, the first insulating layer 22C may have a convex lens protruding in the direction opposite to the liquid crystal layer 5, and the second insulating layer 23C may have a concave surface in contact with the convex lens.

[0076] E. Variations The above-described embodiment may be modified in various ways. Specific modified aspects that may be applied to the above-described embodiment are illustrated below. Two or more aspects selected from the following examples may be combined as appropriate to the extent that they are not mutually contradictory.

[0077] In each of the above-described embodiments, the electro-optical device 100 is an active matrix type, but the driving method of the electro-optical device 100 is not limited to this, and may be, for example, a passive matrix type or the like.

[0078] The driving method of the "electro-optical device" is not limited to the vertical electric field method, but may be a horizontal electric field method. The horizontal electric field method may be, for example, an IPS (In Plane Switching) mode. The vertical electric field method may be, for example, a TN (Twisted Nematic) mode, a VA (Vertical Alignment), a PVA mode, or an OCB (Optically Compensated Bend) mode.

[0079] In addition, in the above description, a liquid crystal display device has been described as an example of an "electro-optical device", but the "electro-optical device" is not limited to this. For example, the "electro-optical device" can also be applied to an image sensor, etc.

[0080] 2.Electronic equipment The electro-optical device 100 can be used in various electronic devices.

[0081] 15 is a perspective view showing a personal computer 2000, which is an example of an electronic device. The personal computer 2000 has an electro-optical device 100 that displays various images, a main body 2010 on which a power switch 2001 and a keyboard 2002 are installed, and a control unit 2003. The control unit 2003 includes, for example, a processor and a memory, and controls the operation of the electro-optical device 100.

[0082] 16 is a plan view showing a smartphone 3000 as an example of an electronic device. The smartphone 3000 has an operation button 3001, an electro-optical device 100 that displays various images, and a control unit 3002. The screen content displayed on the electro-optical device 100 changes in response to an operation of the operation button 3001. The control unit 3002 includes, for example, a processor and a memory, and controls the operation of the electro-optical device 100.

[0083] 17 is a schematic diagram showing a projector, which is an example of an electronic device. The projection display device 4000 is, for example, a three-plate projector. The electro-optical device 1r is an electro-optical device 100 corresponding to a red display color, the electro-optical device 1g is an electro-optical device 100 corresponding to a green display color, and the electro-optical device 1b is an electro-optical device 100 corresponding to a blue display color. That is, the projection display device 4000 has three electro-optical devices 1r, 1g, and 1b corresponding to red, green, and blue display colors, respectively. The control unit 4005 includes, for example, a processor and a memory, and controls the operation of the electro-optical device 100.

[0084] The illumination optical system 4001 supplies a red component r of light emitted from an illumination device 4002, which is a light source, to an electro-optical device 1r, a green component g to an electro-optical device 1g, and a blue component b to an electro-optical device 1b. Each of the electro-optical devices 1r, 1g, and 1b functions as an optical modulator such as a light valve that modulates each monochromatic light supplied from the illumination optical system 4001 according to a display image. The projection optical system 4003 combines the light emitted from each of the electro-optical devices 1r, 1g, and 1b and projects the combined light onto a projection surface 4004.

[0085] The above electronic devices include the electro-optical device 100 described above and the control unit 2003, 3002, or 4005. The electro-optical device 100 described above prevents degradation of display quality. Therefore, by including the electro-optical device 100, it is possible to prevent degradation of display quality in the personal computer 2000, the smartphone 3000, or the projection display device 4000. Note that the same effect can be obtained when the electro-optical device 100A, 100B, or 100C is applied instead of the electro-optical device 100.

[0086] Note that electronic devices to which the electro-optical device of the present invention can be applied are not limited to the exemplified devices, and examples thereof include PDAs (Personal Digital Assistants), digital still cameras, televisions, video cameras, car navigation devices, in-vehicle displays, electronic organizers, electronic paper, calculators, word processors, workstations, videophones, and POS (Point of Sale) terminals, etc. Furthermore, examples of electronic devices to which the present invention can be applied include printers, scanners, copiers, video players, and devices equipped with touch panels, etc.

[0087] Although the present invention has been described based on the preferred embodiment, the present invention is not limited to the above-mentioned embodiment. Furthermore, the configuration of each part of the present invention can be replaced with any configuration that exhibits the same function as the above-mentioned embodiment, and any configuration can be added. [Explanation of symbols]

[0088] Reference Signs List 2...first substrate, 2A...first substrate, 3...second substrate, 4...sealing member, 5...liquid crystal layer, 6...inter-substrate conductive material, 10...driving circuit, 11...scanning line driving circuit, 12...signal line driving circuit, 13...external terminal, 20...laminated body, 21...first base portion, 22...first insulating layer, 22A...first insulating layer, 22C...first insulating layer, 23...second insulating layer, 23C...second insulating layer, 24...storage capacitance, 25...pixel electrode, 25d...dummy pixel electrode, 26...peripheral electrode, 26x...peripheral electrode , 29...alignment film, 30...laminated body, 30B...laminated body, 31...second base portion, 32...counter electrode, 32B...counter electrode, 33...partition portion, 36...peripheral electrode, 39...alignment film, 100...electro-optical device, 100A...electro-optical device, 100B...electro-optical device, 100C...electro-optical device, 1b...electro-optical device, 1g...electro-optical device, 1r...electro-optical device, 220...lens, 230...recess, 240...transistor, 241...scanning line, 242...signal line , 243... constant potential line, 251... first contact, 251d... third contact, 252... first connection electrode, 252d... third connection electrode, 260... electrode portion, 261... second contact, 262... second connection electrode, 263... electrode, 320... second recess, 2000... personal computer, 2001... power switch, 2002... keyboard, 2003... control unit, 2010... main body unit, 3000... smartphone, 3001... operation button, 30 02...control unit, 4000...projection type display device, 4001...illumination optical system, 4002...illumination device, 4003...projection optical system, 4004...projection surface, 4005...control unit, A10...display area, A20...peripheral area, A21...dummy pixel area, A22...middle area, A23...sealing area, D0...depth, D2...depth, H1...first through hole, H2...second through hole, H3...third through hole, LL...incident light, P...pixel, W0...width, W1...width, W2...width, W3...distance.

Claims

1. An electro-optical device comprising a first substrate, a second substrate, an electro-optical layer disposed between the first substrate and the second substrate and whose optical properties change in response to an electric field, and a sealing member disposed outside the electro-optical layer between the first substrate and the second substrate in a plan view, It has a display area for displaying an image, a sealing area located outside the display area in a plan view and where the sealing member is provided, and an intermediate area located between the display area and the sealing area in a plan view. The first substrate is, A first electrode is provided for each pixel in the aforementioned display area, A first connecting electrode is provided in the display area, and in the first direction in which the first substrate and the second substrate overlap, the first connecting electrode is further from the electro-optic layer than the first electrode, An insulating layer provided between the first electrode and the first connecting electrode, A first contact is provided in the insulating layer and electrically connects the first electrode and the first connecting electrode, A second electrode is provided in the intermediate region and is located in the same layer as the first electrode, A second connecting electrode is provided in the intermediate region and is further from the electro-optic layer than the second electrode in the first direction, The insulating layer includes a second contact that electrically connects the second electrode and the second connecting electrode, The first contact is plug-shaped and is positioned in a first through-hole provided in the insulating layer. The second contact is plug-shaped and is positioned in a second through-hole provided in the insulating layer. The second electrode is divided into a plurality of electrode portions extending from the outer edge of the first substrate toward the display area. The insulating layer has recesses in the intermediate region that are located at positions different from the plurality of electrode portions in a plan view. An electro-optical apparatus characterized by the following features.

2. Each of the aforementioned plurality of electrode portions is arranged along the outer edge of the display area in a plan view. The electro-optical apparatus according to claim 1.

3. Each of the aforementioned plurality of electrode portions surrounds the display area in a plan view. The electro-optical apparatus according to claim 2.

4. The recess is arranged along the outer edge of the display area in a plan view. The electro-optical apparatus according to claim 1.

5. The recess surrounds the display area in a plan view. The electro-optical apparatus according to claim 4.

6. The insulating layer is provided with a plurality of recesses, including the recesses mentioned above. The plurality of electrode portions and the plurality of recesses are arranged alternately in a plan view. The electro-optical apparatus according to claim 4.

7. The recess is provided at a position different from the second contact in a plan view. The electro-optical apparatus according to claim 4.

8. The depth of the recess is shallower than the depth of the second through hole. The electro-optical apparatus according to claim 4.

9. The first electrode is a pixel electrode, It includes a dummy pixel electrode positioned outside the display area in a plan view, The second electrode is positioned outside the dummy pixel electrode in a plan view. The electro-optical apparatus according to claim 1.

10. Each of the plurality of electrode portions has a width smaller than the width of the first electrode. The electro-optical apparatus according to claim 1.

11. The second substrate is provided in the display area and includes a counter electrode facing the first electrode, The counter electrode has a plurality of irregularities in the intermediate region. The electro-optical apparatus according to claim 1.

12. An electro-optical apparatus according to any one of claims 1 to 11, An electronic device characterized by having a control unit that controls the operation of the electro-optical device.

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