Error acquisition device, error acquisition method, and error acquisition program

Abstract

To provide an error acquisition device, an error acquisition method, and an error acquisition program which can acquire a difference in thickness of every member as an error.SOLUTION: The error acquisition device includes: a first acquisition unit for acquiring each information of an error of a thickness of a first material member with a normal size when the thickness of the first material member varies, a luminance absorption coefficient of an X-ray of the first material member, and a luminance absorption coefficient of an X-ray of a second material member out of a laminated body formed by laminating the first material member and the second material member made of a material different from that of the first material member; and a second acquisition unit for acquiring a variation width of the thickness of the second material member according to the error of the thickness of the first material member on the basis of each information acquired by the first acquisition unit.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to an error acquisition device, an error acquisition method, and an error acquisition program. [Background technology]

[0002] There is a device that uses energy subtraction technology. The device irradiates a subject with radiation and captures the image, thereby acquiring a plurality of radiation images corresponding to a plurality of different radiation energies, and generates a plurality of attenuation rate images based on the plurality of radiation images. In this case, the device corrects the radiation images or the attenuation rate images so as to reduce an error in the attenuation rate that occurs depending on at least one of the radiation dose, the thickness of the subject, and the radiation energy. The device also generates a material property image based on the corrected attenuation rate image. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2020 / 250900 Summary of the Invention [Problem to be solved by the invention]

[0004] Incidentally, the applicant has proposed that when determining the thickness of one material member in a laminate in which multiple material members are laminated, the thickness can be determined by using the brightness of a transmitted X-ray image of X-rays passing through the laminate and a predetermined calculation formula. However, there may be errors in the thickness of the material member, and these errors may affect the thickness of the material member for which the thickness is to be determined. Such effects must be estimated in advance before the product is produced. The device described in Patent Document 1 is not intended to determine the thickness of one material member among a plurality of laminates that make up a laminate.

[0005] The present disclosure provides an error acquisition device, an error acquisition method, and an error acquisition program capable of acquiring an error that affects when obtaining the thickness of a material component. [Means for solving the problem]

[0006] An error acquisition device of one embodiment includes a first acquisition unit that acquires information on an error in thickness of a first material member from a normal dimension when the thickness of the first material member varies, a luminance absorption coefficient of the first material member for X-rays, and a luminance absorption coefficient of the second material member for X-rays, in a stacked body obtained by stacking a first material member and a second material member made of a different material from the first material member, and a second acquisition unit that acquires a fluctuation range of the thickness of the second material member corresponding to the error in the thickness of the first material member, based on the information acquired by the first acquisition unit. Effect of the Invention

[0007] The error acquisition device, the error acquisition method, and the error acquisition program disclosed herein can acquire errors that affect the determination of the thickness of a material component. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a diagram for explaining an error acquisition device according to an embodiment. [Diagram 2] FIG. 1 is a block diagram illustrating an error acquisition device according to an embodiment. [Diagram 3] 1A and 1B are diagrams for explaining an example of the thickness and brightness of a first material member and a second material member, where (A) shows a case where the thickness of the second material member varies, and (B) shows a case where the thickness of the first material member varies. [Figure 4] FIG. 13 is a diagram for explaining a modified example in which three or more material members are used. [Diagram 5] 1 is a flowchart illustrating an error acquisition method according to an embodiment. [Figure 6] FIG. 11 is a diagram for explaining an example of an experimental result. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] An embodiment will be described below.

[0010] [Outline of error acquisition device 100] First, an overview of an error acquisition device 100 according to an embodiment will be described. FIG. 1 is a diagram illustrating an error acquisition device 100 according to an embodiment.

[0011] The error acquisition device 100 may be a computer (information processing device) such as a server, a desktop, a laptop, a tablet, or a smartphone.

[0012] When an error Δ1 occurs in the thickness t1 of a part of the material members (first material member 201) constituting the laminated body 200, it affects the calculation of the thickness t2 of the other material member (second material member 202) using the calculation formula shown in Fig. 1. In the calculation formula shown in Fig. 1, the luminance of the X-ray emitted from the X-ray source 141 is C0, the luminance of the transmitted X-ray transmitted through the laminated body 200 is C, and the luminance absorption coefficients of the first material member 201 and the second material member 202 are μ A1 ,μ A2 Let us assume that. The error acquiring device 100 acquires the variation width of the thickness of the second material member 202 corresponding to the error in the thickness of the first material member 201 (see formula (1) described later).

[0013] In this embodiment, the laminate 200 includes a first material member 201 and a second material member 202. The first material member 201 and the second material member 202 may be members made of different materials. The laminate 200 is not limited to a laminate of two material members, but may be a laminate of three or more material members. The first material member 201 may be a member produced by pressing, for example, or a member produced by a processing method other than pressing. The second material member 202 may be an adhesive, a metal (including, for example, steel, etc.), a resin, etc.

[0014] As an example, press working is a suitable processing method for producing a plurality of identical members (first material members 201). However, in a series of press working processes for producing a plurality of first material members 201, a difference in thickness may occur between the first material members 201 produced in the initial stage of the series of press working processes and the first material members 201 produced in the subsequent stages. Therefore, when a difference (error) occurs in the thickness of the first material member 201, the error acquisition device 100 acquires a fluctuation range indicating how much the calculation result of the thickness of the second material member 202 fluctuates depending on the difference (error) in the thickness of the first material member 201 when calculating the thickness of the second material member 202 using a calculation formula (see formula (2) described later).

[0015] The error acquisition device 100 acquires information on the error between the thickness of the first material member 201 and the normal dimension, and the radiance absorption coefficients of the first material member 201 and the second material member 202 with respect to X-rays (radiation and electromagnetic waves).

[0016] For example, since the first material member 201 has a standard thickness dimension, the error acquisition device 100 may acquire the error between the standard thickness dimension and the thickness of each of the multiple first material members 201, for example.

[0017] The radiance absorption coefficient is an absorption coefficient that changes depending on, for example, the thickness of a material member. The value of the radiance absorption coefficient differs for each material. The radiance absorption coefficient becomes larger as the thickness of the material member becomes relatively thicker, and becomes smaller as the thickness of the material member becomes relatively thinner. As an example, when X-rays are irradiated onto a material member by the X-ray source 141 and the detection unit 142 detects the transmitted X-rays that have passed through the material member to generate an image (transmitted X-ray image), if the value of the radiance absorption coefficient is relatively large, the luminance of the transmitted X-ray image becomes relatively low, and if the value of the radiance absorption coefficient is relatively small, the luminance of the transmitted X-ray image becomes relatively high. The radiance absorption coefficient may be obtained by performing a measurement in advance. The error acquisition device 100 acquires the radiance absorption coefficients of the first material member 201 and the second material member 202, respectively.

[0018] Here, the error acquisition device 100 may acquire the error between the thickness of the first material member 201 and the standard dimension, and the luminance absorption coefficients of the first material member 201 and the second material member 202, by a user of the error acquisition device 100 operating an input unit 131 (input device) such as a keyboard and a mouse (performing an input operation). Furthermore, when the error between the thickness of the first material member 201 and the standard dimension and the luminance absorption coefficients of the first material member 201 and the second material member 202 are stored in the memory unit 122 and a server (not shown), the error acquisition device 100 may acquire each piece of information from the memory unit 122 and a server (not shown), for example.

[0019] Based on the above-mentioned information, the error acquisition device 100 acquires the variation range of the thickness of the second material member 202 corresponding to the error in the thickness of the first material member 201. In other words, the error acquisition device 100 acquires the variation range of how much the calculation result of the thickness of the second material member 202 varies according to the difference (error) in the thickness of the first material member 201.

[0020] [Details of the error acquisition device 100] Next, the error acquisition device 100 according to an embodiment will be described in detail. FIG. 2 is a block diagram illustrating an error acquisition device 100 according to an embodiment. Fig. 3 is a diagram for explaining an example of the thickness and brightness of each of the first material member 201 and the second material member 202. Fig. 3(A) shows a case where the thickness of the second material member 202 varies, and Fig. 3(B) shows a case where the thickness of the first material member 201 varies.

[0021] 2, the error acquisition device 100 includes, for example, a communication unit 121, a storage unit 122, a display unit 123, an input unit 131, and a control unit 110. The communication unit 121, the storage unit 122, and the display unit 123 may be an embodiment of an output unit. The control unit 110 includes, for example, a first acquisition unit 111, a second acquisition unit 112, an estimation unit 113, a third acquisition unit 114, a fourth acquisition unit 115, a determination unit 116, and an output control unit 117. The control unit 110 may be configured by, for example, an arithmetic processing device of the error acquisition device 100. The control unit 110 (e.g., a calculation processing device, etc.) may realize the functions of each unit (first acquisition unit 111, second acquisition unit 112, estimation unit 113, third acquisition unit 114, fourth acquisition unit 115, judgment unit 116, output control unit 117, etc.) by, for example, appropriately reading and executing various programs, etc. stored in the memory unit 122, etc.

[0022] The communication unit 121 is, for example, a communication interface capable of transmitting and receiving various information to and from a device (external device) (not shown) outside the error acquisition device 100. The external device may be, for example, a server, a user terminal, etc. The user terminal may be, for example, a desktop, a laptop, a tablet, a smartphone, etc.

[0023] The storage unit 122 may store, for example, various information and programs. Examples of the storage unit 122 may be a memory, a solid state drive, a hard disk drive, etc. Note that the storage unit 122 may be, for example, a storage area and a server on a cloud.

[0024] The display unit 123 is, for example, a display capable of displaying various characters, symbols, images, and the like.

[0025] The first acquisition unit 111 acquires information on the error between the thickness of the first material member 201 and the normal dimension when the thickness of the first material member 201 varies, the radiance absorption coefficient of the first material member 201 for X-rays, and the radiance absorption coefficient of the second material member 202 for X-rays, of the stacked body 200 in which a first material member 201 and a second material member 202 made of a different material from the first material member 201 are stacked. That is, the stacked body 200 is, for example, a stacked body of the first material member 201 and the second material member 202. Note that the stacked body 200 may be, for example, a stacked body of three or more members (material members) made of different materials.

[0026] Here, as an example, the first material member 201 may be a member produced by press working, or may be a member produced by other processing methods. For example, when produced by press working, in the initial stage of a series of processing steps in which press working is performed sequentially on each of a plurality of members, the thickness of the first material member 201 is relatively thick. Furthermore, for example, if heat is generated by performing the press working sequentially thereafter (including, for example, die wear and thermal expansion, etc.), the pressure during pressing may become higher than in the initial stage, so that in the middle to later stages of the series of processing steps, the thickness of the first material member 201 may become thinner than in the initial stage. Therefore, in the laminate 200 using such a first material member 201, there may be a difference (error) in the thickness of the first material member 201 for each laminate 200.

[0027] The first acquisition unit 111 acquires the error between the normal dimension and the thickness of the first material member 201. As an example, the first acquisition unit 111 acquires the thicknesses of the multiple first material members 201 (for example, a value expected in advance and an actual measurement value, etc.). For example, since the first material member 201 has a normal dimension for thickness, the first acquisition unit 111 acquires the error between the normal dimension and the thickness of the first material member 201 by taking the difference between the normal dimension and each of the thicknesses of the multiple first material members 201. The normal dimension may be, for example, a dimension specified in a design (for example, a design drawing, etc.) and a dimension required by the design. The normal dimension may be called a "correct dimension" in some cases.

[0028] The radiance absorption coefficient is an absorption coefficient that changes depending on, for example, the thickness of a material member. The value of the radiance absorption coefficient differs for each material. The radiance absorption coefficient becomes larger as the thickness of the material member becomes relatively thicker, and becomes smaller as the thickness of the material member becomes relatively thinner. As an example, when X-rays are irradiated onto a material member by the X-ray source 141 and the detection unit 142 detects the transmitted X-rays that have passed through the material member to generate an image (transmitted X-ray image), if the value of the radiance absorption coefficient is relatively large, the luminance of the transmitted X-ray image becomes relatively low, and if the value of the radiance absorption coefficient is relatively small, the luminance of the transmitted X-ray image becomes relatively high. The radiance absorption coefficient may be obtained by performing a measurement in advance. The first acquisition unit 111 acquires the radiance absorption coefficients of the first material member 201 and the second material member 202, respectively.

[0029] Here, the first acquisition unit 111 may acquire the error between the thickness of the first material member 201 and the standard dimension, and the luminance absorption coefficients of the first material member 201 and the second material member 202, by, for example, operating the input unit 131 such as a keyboard and a mouse by a user of the error acquisition device 100 (performing an input operation). Furthermore, for example, when the error between the thickness of the first material member 201 and the standard dimension and the radiance absorption coefficients of the first material member 201 and the second material member 202 are stored in the memory unit 122, a server, etc., the first acquisition unit 111 may acquire each piece of information from the memory unit 122, a server, etc.

[0030] The second acquisition unit 112 acquires a variation width of the thickness of the second material member 202 corresponding to an error in the thickness of the first material member 201 based on each piece of information acquired by the first acquisition unit 111. As an example, the second acquisition unit 112 acquires an error in the thickness of the first material member 201 from the normal dimension as Δ1, an intensity absorption coefficient of the first material member 201 for X-rays as μ A1 The luminance absorption coefficient of the second material member 202 for X-rays is μ A2 A variation width Δ2 of the thickness of the second material member 202 corresponding to an error in the thickness of the first material member 201 may be obtained by the following formula (1).

[0031]

number

[0032] Here, the error acquisition device 100 defines the luminance recorded in the X-ray image (luminance of the X-ray emitted from the X-ray source 141) (background luminance) as C0, the luminance recorded in the transmitted X-ray image (luminance of the laminate 200 (object)) as C, the thickness of the first material member 201 as t1, and the luminance absorption coefficient of the first material member 201 as μ A1 , the luminance absorption coefficient of the second material member 202 is μ A2 Then, the thickness t2 of the second material member 202 can be obtained by the following formula (2).

[0033]

number

[0034] Next, consider a case where the thickness t1 of the first material member 201 varies, and the thickness t2 of the second material member 202 varies accordingly. The error acquisition device 100 calculates the variation width (error) of the thickness t2 of the second material member 202 calculated by the above formula (2) as Δ2 in the same manner as in formula (1), and calculates the amount of change in brightness when the brightness C of the transmitted X-ray image changes in accordance with the variation (variation from the normal dimension) of the thickness t1 of the first material member 201 as Δ C Then (see FIG. 3(A)), the following equation (3) is obtained based on the above equation (2).

[0035]

number

[0036] In addition, if the thickness variation (error from the normal dimension of the thickness) of the first material member 201 is taken as Δ1 as in equation (1) (see FIG. 3(B)), and the thickness t2 of the second material member 202 can be appropriately calculated by taking this variation into account, the following equation (4) can be obtained from the above equation (2).

[0037]

number

[0038] From the above equation (3), we obtain the following equation (5).

[0039]

number

[0040] Substituting the above equation (5) into the above equation (4), we obtain the following equation (6).

[0041]

number

[0042] From the above equation (6), we obtain the following equation (7).

[0043]

number

[0044] From the above equation (7), the above equation (1) is obtained. When calculating the thickness t2 of the second material member 202 constituting the laminate 200 using the above formula (2), the influence of the error Δ1 of the thickness t1 of the first material member 201 inputted into the above formula (2) on the thickness t2 of the second material member 202 is calculated by the luminance absorption coefficient μ A1 and the luminance absorption coefficient μ A2It is thought that this is determined by the ratio of

[0045] The estimation unit 113 estimates the accuracy of the thickness t2 of the second material member 202 based on the fluctuation range Δ2 acquired by the second acquisition unit 112 and the accuracy (required accuracy) required for the thickness t2 of the second material member 202. That is, the estimation unit 113 estimates up to what error Δ1 in the thickness t1 of the first material member 201 is required for the thickness t2 of the second material member 202 to satisfy the required accuracy based on the fluctuation range Δ2 of the thickness of the second material member 202 that changes according to the thickness error Δ1 of the first material member 201 and the product accuracy (required accuracy) required for the thickness t2 of the second material member 202. The required accuracy of the thickness t2 of the second material member 202 may be stored in the storage unit 122 or may be input via the input unit 131. The estimation unit 113 inputs various values ​​into the thickness error Δ1 of the first material component 201 in formula (1), and obtains the corresponding variation in the thickness of the second material component 202 (variation range Δ2). The estimation unit 113 compares the obtained variation range Δ2 with the required accuracy of the thickness of the second material component 202, and estimates up to what value V1 of the variation range Δ2 the required accuracy can be satisfied. The estimation unit 113 may also obtain a value V2 of the thickness error of the first material component 201 corresponding to the value V1 that satisfies the required accuracy.

[0046] In the above-described embodiment, an example has been described in which, in the laminate 200 including the first material member 201 and the second material member 202, the fluctuation range of the thickness of the second material member 202 corresponding to the error in the thickness of the first material member 201 is obtained as in the above formula (1). The number of material members constituting the laminate 200 is not limited to two as described above, but may be three or more.

[0047] FIG. 4 is a diagram for explaining a modified example in which there are three or more material members.

[0048] 4, in this modified example, when the laminate 300 is composed of multiple material members such as a first material member 301, a second material member 302, a third material member 303, a fourth material member 304, a fifth material member 305, and a sixth material member 306, the thickness variation range Δ1 of one material member (first material member 301) according to the error of the normal dimension of the thickness of each of the multiple material members (the material members 302-306 other than the first material member 301) is expressed by the following formula (8). For convenience, formula (8) shows a formula for calculating the thickness variation range Δ1 of the first material member 301, unlike the above formula (1).

[0049]

number

[0050] Here, the luminance absorption coefficients of the first to sixth material members 301 to 306 are μ A1 ~μ A6 The errors in thickness of the first to sixth material members 301 to 306 from the standard dimensions are indicated by Δ1 to Δ6. The above equation (8) can be expressed as the following equation (9).

[0051]

number

[0052] Next, the error acquisition device 100 determines whether the fluctuation range estimated by the above formula (1) is appropriate using the laminate 200 to be confirmed, and if the fluctuation range is appropriate, calculates the thickness of the second material component 202 of the laminate 200 that will become the product using the above formula (2), the transmitted X-ray image, the luminance absorption coefficient, etc. The following describes the function of determining whether the error estimated by the above formula (1) is appropriate.

[0053] The third acquisition unit 114 irradiates X-rays onto the laminate 200 to be confirmed, which is a laminate of a first material member 201 and a second material member 202, and acquires a transmitted X-ray image (transmitted X-ray image information) that has passed through the laminate 200 to be confirmed. The laminate 200 to be confirmed is intended to confirm whether the thickness of the second material member 202 constituting the laminate 200 falls within the error of variation acquired by the second acquisition unit 112 before or when the laminate 200 is actually produced as a product.

[0054] The third acquisition unit 114 may acquire a transmitted X-ray image (transmitted X-ray image information) of the confirmation target from the detection unit 142 that detects transmitted X-rays transmitted through the laminate 200 of the confirmation target via, for example, the communication unit 121. Alternatively, the third acquisition unit 114 may acquire a transmitted X-ray image (transmitted X-ray image information) of the confirmation target stored in a server via, for example, the communication unit 121. Alternatively, when an external memory (not shown) in which the transmitted X-ray image (transmitted X-ray image information) of the confirmation target is stored is connected to an interface (not shown) of the error acquisition device 100, the third acquisition unit 114 may acquire the transmitted X-ray image (transmitted X-ray image information) of the confirmation target from the external memory.

[0055] Furthermore, the third acquisition unit 114 may acquire information (X-ray image information) of X-rays (X-ray image) detected by the detection unit 142 when X-rays are irradiated from the X-ray source 141 without disposing the laminate 200. The third acquisition unit 114 may acquire an X-ray image in the same manner as the above-mentioned transmitted X-ray image.

[0056] The fourth acquisition unit 115 acquires the thickness of the second material member 202 to be confirmed based on the luminance recorded in the transmitted X-ray image (which may include, for example, an X-ray image) acquired by the third acquisition unit 114, the thickness of the first material member 201 to be confirmed, the luminance absorption coefficient for X-rays of the first material member 201 to be confirmed, and the luminance absorption coefficient for X-rays of the second material member 202 to be confirmed.

[0057] The transmitted X-ray image (transmitted X-ray image information) and the X-ray image (X-ray image information) may have luminance information for each pixel constituting each of the images. The fourth acquisition unit 115 may acquire the luminance information from the transmitted X-ray image and the X-ray image, for example. The thickness of the first material member 201 to be checked may be, for example, an actual measured value or a standard dimension. The radiance absorption coefficients of the first material member 201 and the second material member 202 may be, for example, values ​​corresponding to the radiance absorption coefficients of the first material member 201 and the second material member 202 acquired by the first acquisition unit 111 (the same value).

[0058] The fourth acquisition unit 115 may acquire the thickness of the first material member 201 to be confirmed and the luminance absorption coefficients of the first material member 201 and the second material member 202, for example, by a user of the error acquisition device 100 operating an input unit 131 such as a keyboard and a mouse (performing an input operation). Furthermore, for example, when the thickness of the first material member 201 and the radiance absorption coefficients of the first material member 201 and the second material member 202 are stored in the memory unit 122, a server, etc., the fourth acquisition unit 115 may acquire each piece of information from the memory unit 122, a server, etc.

[0059] Here, the fourth acquisition unit 115 defines the luminance recorded in the X-ray image (luminance of the X-ray emitted from the X-ray source 141) (background luminance) as C0, the luminance recorded in the transmitted X-ray image (luminance of the laminated body 200 (object)) as C, the thickness of the first material member 201 as t1, and the luminance absorption coefficient of the first material member 201 as μ A1 , the luminance absorption coefficient of the second material member 202 is μ A2 Then, the thickness t2 of the second material member 202 to be confirmed can be obtained by the above formula (2).

[0060] The determining unit 116 determines whether the thickness of the second material member 202 to be confirmed acquired by the fourth acquiring unit 115 satisfies the accuracy of the thickness of the second material member 202 estimated by the estimating unit 113 . As an example, the determination unit 116 may determine whether the thickness (calculated value) of the second material member 202 to be confirmed, calculated using the above formula (2), satisfies the accuracy (required accuracy) required for the thickness of the second material member 202. In other words, the determination unit 116 may determine whether the thickness (calculated value) of the second material member 202 falls within the range of the required accuracy for the thickness of the second material member 202. As another example, the determination unit 116 may estimate how much the thickness (calculated value) of the second material member 202 to be confirmed deviates from the actual measured value of the thickness of the second material member 202.

[0061] The output control unit 117 controls the output unit to output at least one piece of information among the fluctuation range acquired by the second acquisition unit 112, the accuracy of the thickness of the second material member 202 estimated by the estimation unit 113, and the result of the judgment (judgment result) by the judgment unit 116. The output unit may be, for example, a communication unit 121, a storage unit 122, a display unit 123, etc. That is, the output control unit 117 may control the communication unit 121 to transmit at least one of the above-mentioned information to an external device (not shown), for example. The external device may be, for example, a server, a user terminal, or the like. The output control unit 117 may, for example, control the storage unit 122 to store at least one piece of information described above. The output control unit 117 may, for example, control the display unit 123 to display at least one of the contents described above.

[0062] [Error acquisition method] Next, an error acquisition method according to an embodiment will be described. FIG. 5 is a flowchart illustrating an error acquiring method according to an embodiment.

[0063] In step ST101, the first acquisition unit 111 acquires an error Δ1 between the thickness t1 of the first material member 201 of the stack 200 and a normal dimension when the thickness of the first material member 201 varies, and an X-ray luminance absorption coefficient μ A1 and the luminance absorption coefficient μA2 The laminate 200 is, for example, a laminate of a first material member 201 and a second material member 202 made of a different material from the first material member 201.

[0064] In step ST102, the second obtaining section 112 obtains a variation width of the thickness of the second material member 202 corresponding to an error in the thickness of the first material member 201 based on each piece of information obtained in step ST101. As an example, the second obtaining section 112 obtains an error in the thickness of the first material member 201 from the normal dimension as Δ1, an intensity absorption coefficient of the first material member 201 for X-rays as μ A1 , the luminance absorption coefficient of the second material member 202 for X-rays is μ A2 The variation width Δ2 of the thickness of the second material member 202 corresponding to the error in the thickness of the first material member 201 may be obtained by using the above formula (1).

[0065] In step ST103, the estimation unit 113 estimates the accuracy of the thickness t2 of the second material member 202 based on the fluctuation range Δ2 of the above equation (1) acquired in step ST102 and the accuracy required for the thickness t2 of the second material member 202 (required accuracy).

[0066] In step ST104, the control unit 110 obtains the thickness t2 of the second material member 202 of the laminate 200 to be confirmed, using the above formula (2). That is, first, the third acquisition unit 114 irradiates X-rays onto the laminate 200 to be confirmed, which is formed by stacking a first material component 201 and a second material component 202, and acquires a transmitted X-ray image (transmitted X-ray image information) that has passed through the laminate 200 to be confirmed. Next, the fourth acquisition unit 115 acquires the luminance C0,C recorded in the transmitted X-ray image (which may include, for example, an X-ray image) acquired by the third acquisition unit 114, the thickness t1 of the first material member 201 to be confirmed, and the luminance absorption coefficient μ A1 and the luminance absorption coefficient μ A2 The thickness t2 of the second material member 202 to be confirmed is obtained by substituting the values ​​of and into the above formula (2).

[0067] In step ST105, the determination unit 116 determines whether the thickness t2 of the second material member 202 to be confirmed acquired in step ST104 satisfies the accuracy. As an example, the determination unit 116 may determine whether the thickness t2 of the second material member 202 to be confirmed satisfies the accuracy of the thickness t2 of the second material member 202 estimated in step ST103.

[0068] [Experimental Results] Using the error acquisition device 100 described above, an experiment was conducted to compare the fluctuation range (estimated value) of the thickness of the second material member 202 corresponding to the error in the thickness of the first material member 201 acquired using formula (1) with the results (actual values) of actually measuring the thicknesses of the first material member 201 and the second material member 202. As an example, the experimental results of a laminate of aluminum and iron are shown. FIG. 6 is a diagram for explaining an example of an experimental result.

[0069] In Fig. 6, the horizontal axis indicates the deviation of the thickness of the first material member 201 from the standard dimension, and the vertical axis indicates the deviation of the thickness of the second material member 202 from the standard dimension. In Fig. 6, the dashed line indicates estimated values ​​estimated using formula (1), and the dots indicate actual measured values. The slope of the dashed line is based on the luminance absorption coefficients (coefficient values ​​of formula (1)) of the first material member 201 and the second material member 202, respectively. As can be seen from Fig. 6, the actual measured values, indicated by dots, are on the estimated values, indicated by the dashed line, and it was confirmed that the estimated values ​​match (or approximately match, etc.) the actual measured values. In other words, it was confirmed that the theoretical estimated values ​​obtained from Equation (1) match (for example, there is a correlation by the least squares method, etc.) and are correct.

[0070] [Functions and circuits] Next, the functions and circuits of the error acquisition device 100 will be described. Each unit of the error acquisition device 100 may be realized as a function of a processing unit of a computer or the like. That is, the first acquisition unit 111, the second acquisition unit 112, the estimation unit 113, the third acquisition unit 114, the fourth acquisition unit 115, the determination unit 116, and the output control unit 117 (control unit 110) of the error acquisition device 100 may be realized as a first acquisition function, a second acquisition function, an estimation function, a third acquisition function, a fourth acquisition function, a determination function, and an output control function (control function) by a processing unit of a computer or the like. The error acquisition program can cause a computer to realize each of the above-mentioned functions. The error acquisition program may be recorded in a non-transitory computer-readable recording medium, such as a memory, a solid-state drive, a hard disk drive, or an optical disk. The recording medium may be referred to as a non-transitory computer-readable medium, for example. As described above, each part of the error acquisition device 100 may be realized by a processing unit of a computer. The processing unit may be configured by, for example, an integrated circuit. Therefore, each part of the error acquisition device 100 may be realized as a circuit constituting the processing unit. That is, the first acquisition unit 111, the second acquisition unit 112, the estimation unit 113, the third acquisition unit 114, the fourth acquisition unit 115, the determination unit 116, and the output control unit 117 (control unit 110) of the error acquisition device 100 may be realized as a first acquisition circuit, a second acquisition circuit, an estimation circuit, a third acquisition circuit, a fourth acquisition circuit, a determination circuit, and an output control circuit (control circuit) constituting the processing unit of a computer. The communication unit 121, the storage unit 122, and the display unit 123 (output unit) of the error acquisition device 100, and the input unit 131 may be realized as, for example, a communication function, a storage function, and a display function (output function) including the functions of an arithmetic processing device, and an input function. The communication unit 121, the storage unit 122, and the display unit 123 (output unit), and the input unit 131 of the error acquisition device 100 may be realized as a communication circuit, a storage circuit, and a display circuit (output circuit), and an input circuit by being configured, for example, by an integrated circuit, etc. The communication unit 121, the storage unit 122, and the display unit 123 (output unit), and the input unit 131 of the error acquisition device 100 may be realized as, for example, a communication device, a storage device, and a display device (output device), and an input device by being configured, for example, by being configured by a plurality of devices.

[0071] The error acquisition device 100 can be configured by combining one or any two or more of the above-mentioned units. In this disclosure, the term "information" is used, but the term "information" can be replaced with "data" and the term "data" can be replaced with "information."

[0072] [Variations] In the above-described embodiment, the device using X-rays has been described. However, the error acquisition device 100 of the present disclosure may use not only X-rays but also light and radiation (electromagnetic waves) of various wavelengths (wavelength ranges). In this case, the error acquisition device 100 may irradiate light such as infrared light, visible light, and ultraviolet light, as well as radiation (electromagnetic waves) from an irradiation source and detect the electromagnetic waves with a detection unit. Therefore, the luminance absorption coefficient may be the luminance absorption coefficient of electromagnetic waves. Note that an example of the multiple material members constituting the laminate may be a member made of various materials including metals (including, for example, steel), semiconductors, and adhesives.

[0073] [Aspects and Effects of the Present Embodiment] Next, one aspect of this embodiment and the effects of each aspect will be described. Note that each aspect described below is an example at the time of filing, and this embodiment is not limited to the aspects described below. In other words, this embodiment is not limited to each aspect described below, and may be realized by appropriately combining each of the above-mentioned parts. In addition, a lower aspect may be able to cite any of the higher aspects. The effects described below are merely examples, and the effects of each aspect are not limited to those described below. Each aspect may, for example, have at least one of the effects described below.

[0074] (Aspect 1) An error acquisition device of one embodiment includes a first acquisition unit that acquires information on an error in thickness of a first material member from a normal dimension when the thickness of the first material member varies, a luminance absorption coefficient of the first material member for X-rays, and a luminance absorption coefficient of the second material member for X-rays, in a stacked body obtained by stacking a first material member and a second material member made of a different material from the first material member, and a second acquisition unit that acquires a fluctuation range of the thickness of the second material member corresponding to the error in the thickness of the first material member, based on the information acquired by the first acquisition unit. This allows the error acquisition device to acquire the error that affects the acquisition of the thickness of the material component. That is, prior to calculating the thickness of the second material member constituting the laminate according to the above formula (2) using, for example, a transmitted X-ray image and a brightness absorption coefficient or the like, the error acquisition device can acquire the relationship with the error in the thickness of the first material member that affects the thickness of the second material member, i.e., the fluctuation range of the thickness of the second material member depending on the error in the thickness of the first material member. Furthermore, even when the error acquisition device calculates the thickness of the second material member based on the above formula (2), it is possible to estimate in advance the error that will occur in the calculation result of the thickness of the second material member based on the range of variation in the thickness of the second material member corresponding to the error in the thickness of the first material member (the relationship between the error in the thickness of the first material member and the range of variation in the thickness of the second material member).

[0075] (Aspect 2) In one aspect of the error acquisition device, the second acquisition unit acquires an error between the thickness of the first material member and a normal dimension as Δ1, and an intensity absorption coefficient of the first material member with respect to X-rays as μ A1 , the luminance absorption coefficient of the second material member for X-rays is μ A2 The variation width Δ2 of the thickness of the second material member corresponding to the error in the thickness of the first material member may be obtained by using the above formula (1). As a result, the error acquisition device acquires the thickness error Δ1 of the first material member, and the luminance absorption coefficients μ A1 ,μ A2 By substituting into equation (1), the fluctuation width Δ2 of the thickness of the second material member can be obtained. In addition, the error acquisition device previously acquires the necessary values ​​(error Δ1 and radiance absorption coefficient μ A1 ,μ A2 ), the variation width Δ2 of the thickness of the second material member can be easily obtained by computer calculation using formula (1).

[0076] (Aspect 3) The error acquisition device of one embodiment may include an estimation unit that estimates the accuracy of the thickness of the second material member based on the fluctuation range acquired by the second acquisition unit and the accuracy required for the thickness of the second material member. In other words, the error acquisition device can estimate the maximum error in the thickness of the first material component that the thickness of the second material component can tolerate while still satisfying the required accuracy, based on the range of variation in the thickness of the second material component that changes in response to the error in the thickness of the first material component and the product accuracy required for the thickness of the second material component. As another example, the error acquisition device may acquire an error in the thickness of a first material component that can satisfy the required accuracy of the thickness of a second material component, and produce the first material component within the range of that error.

[0077] (Aspect 4) An error acquisition device of one embodiment may include a third acquisition unit that irradiates X-rays onto a stacked body of a first material member and a second material member to be confirmed and acquires a transmitted X-ray image of the X-rays transmitted through the stacked body of the target to be confirmed, a fourth acquisition unit that acquires a thickness of the second material member to be confirmed based on luminance recorded in the transmitted X-ray image acquired by the third acquisition unit, the thickness of the first material member to be confirmed, the luminance absorption coefficient for X-rays of the first material member to be confirmed, and the luminance absorption coefficient for X-rays of the second material member to be confirmed, and a determination unit that determines whether the thickness of the second material member to be confirmed acquired by the fourth acquisition unit satisfies the accuracy of the thickness of the second material member estimated by the estimation unit. That is, when the error acquisition device calculates the thickness of the second material member to be confirmed based on the luminance recorded in the transmitted X-ray image of the laminate to be confirmed and the above formula (2), etc., it can determine whether the thickness satisfies the required accuracy for the thickness of the second material member. If the thickness of the second material member satisfies the required accuracy, the error acquisition device can actually calculate (for example, use in the manufacturing process) the thickness of the second material member in the laminate to be the product using the calculation formula (2) above, the transmitted X-ray image, the luminance absorption coefficient, etc. Furthermore, if the thickness of the second material member does not satisfy the required accuracy, the error acquisition device does not need to be used in the manufacturing process.

[0078] (Aspect 5) In one aspect, the error acquisition method includes a first acquisition step in which a computer acquires information on an error in thickness of a first material member from a normal dimension when the thickness of the first material member fluctuates, a luminance absorption coefficient of the first material member for X-rays, and a luminance absorption coefficient of the second material member for X-rays, in a stacked body obtained by stacking a first material member and a second material member made of a different material from the first material member, and a second acquisition step in which a fluctuation range in the thickness of the second material member corresponding to the error in the thickness of the first material member is acquired based on the information acquired in the first acquisition step. As a result, the error acquisition method can achieve the same effects as the error acquisition device of the above-described aspect.

[0079] (Aspect 6) An error acquisition program in one embodiment causes a computer to realize a first acquisition function that acquires information on the error in thickness of a first material member from a normal dimension when the thickness of the first material member fluctuates, the luminance absorption coefficient of the first material member for X-rays, and the luminance absorption coefficient of the second material member for X-rays, in a stacked body obtained by stacking a first material member and a second material member made of a different material from the first material member, and a second acquisition function that acquires a fluctuation range of the thickness of the second material member corresponding to the error in the thickness of the first material member, based on the information acquired by the first acquisition function. As a result, the error acquisition program can achieve the same effect as the error acquisition device of the above-described aspect. [Explanation of symbols]

[0080] 100 Error acquisition device 110 Control section 111 First acquisition part 112 Second acquisition part 113 Estimation Department 114 Third Acquisition Department 115 4th acquisition part 116 Judgment section 117 Output control section 121 Communications Department 122 Storage section 123 Display section 131 Input section 141 X-ray source 142 Detection unit 200 Laminate 201 First material member 202 Second material member

Claims

1. a first acquisition unit that acquires information on an error between a thickness of a first material member and a normal dimension when the thickness of the first material member varies in a stacked body obtained by stacking a first material member and a second material member made of a material different from the first material member, a luminance absorption coefficient of the first material member for X-rays, and a luminance absorption coefficient of the second material member for X-rays; a second acquisition unit that acquires a variation range of the thickness of the second material member corresponding to an error in the thickness of the first material member based on each piece of information acquired by the first acquisition unit; An error acquisition device comprising:

2. The second acquisition unit calculates an error between the thickness of the first material member and a normal dimension as Δ １ , the brightness absorption coefficient of the first material member with respect to X-rays is μ Ａ１ , the luminance absorption coefficient of the second material member with respect to X-rays is μ Ａ２ The variation width Δ of the thickness of the second material member according to the error in the thickness of the first material member is calculated by the following formula (1): ２ Get [0010] The error acquisition device according to claim 1 .

3. and an estimation unit that estimates the accuracy of the thickness of the second material member based on the fluctuation range acquired by the second acquisition unit and the accuracy required for the thickness of the second material member. The error acquisition device according to claim 1 .

4. a third acquisition unit that irradiates an X-ray onto a stacked body, which is an object to be confirmed and is made up of a first material member and a second material member, to acquire a transmitted X-ray image of the X-ray transmitted through the stacked body to be confirmed; a fourth acquisition unit that acquires a thickness of the second material member to be confirmed based on a luminance recorded in the transmitted X-ray image acquired by the third acquisition unit, a thickness of the first material member to be confirmed, a luminance absorption coefficient of the first material member to be confirmed for X-rays, and a luminance absorption coefficient of the second material member to be confirmed for X-rays; a determination unit that determines whether the thickness of the second material member to be confirmed acquired by the fourth acquisition unit satisfies the accuracy of the thickness of the second material member estimated by the estimation unit; The error acquisition device according to claim 3 .

5. The computer a first acquisition step of acquiring information on an error between a thickness of a first material member and a normal dimension of the first material member when the thickness of the first material member varies, a luminance absorption coefficient of the first material member for X-rays, and a luminance absorption coefficient of the second material member for X-rays, in a laminate obtained by laminating a first material member and a second material member made of a material different from the first material member; a second acquisition step of acquiring a variation range of the thickness of the second material member corresponding to an error in the thickness of the first material member based on each piece of information acquired in the first acquisition step; Perform the error acquisition method.

6. On the computer, a first acquisition function for acquiring information on an error between a thickness of a first material member and a normal dimension of the first material member when the thickness of the first material member varies, a luminance absorption coefficient of the first material member for X-rays, and a luminance absorption coefficient of the second material member for X-rays, in a laminate obtained by stacking a first material member and a second material member made of a material different from the first material member; a second acquisition function that acquires a variation range of the thickness of the second material member according to an error in the thickness of the first material member based on each piece of information acquired by the first acquisition function; An error acquisition program that achieves this.

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