Heat exchanger member, and method for manufacturing heat exchanger member

Abstract

To provide a heat exchanger member capable of improving heat exchange efficiency in a heat exchanger member, and a method for manufacturing a heat exchanger member.SOLUTION: A heat exchanger member includes a plate member 10 having a plurality of groove parts 10G. The plate member 10 is formed from a clad material 10C composed of a first layer 11 and a second layer 12 formed from a material different from the first layer 11. In the groove parts 10G, a cross section perpendicular to a first direction D1 in which the groove parts 10G extend has a rectangular shape, and the rectangular cross sections are connected along the first direction D1. The groove parts 10G are defined by a bottom surface 10GB included in a first surface 12S1 of the second layer 12 that contacts the first layer 11, and a pair of side surfaces 10GS included in the first layer 11.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a heat exchanger component and a method for manufacturing a heat exchanger component. [Background technology]

[0002] An example of a heat exchanger member includes a first metal member having a groove and a second metal member bonded to the first metal member. When manufacturing the heat exchanger member, first, the groove is formed in the first metal member by wet etching. Next, a metal layer having a lower melting point than the first metal member and the second metal member is sandwiched between the first metal member and the second metal member. Thereafter, the first metal member, the second metal member, and the metal layer are heated at a temperature equal to or higher than the melting point of the metal layer and lower than the melting point of the first metal member and the melting point of the second metal member, thereby bonding the first metal member to the second metal member (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 61-115666 Summary of the Invention [Problem to be solved by the invention]

[0004] Heat exchanger members are used in heat exchangers provided in various electronic devices. With the increase in heat generation due to the higher performance of electronic devices and the increase in heat generation density due to the smaller size of electronic devices, it is desired that the heat exchanger members have higher heat exchange efficiency. [Means for solving the problem]

[0005] A heat exchanger member for solving the above problem is a heat exchanger member comprising a plate member having a plurality of grooves, the plate member being formed from a clad material consisting of a first layer and a second layer formed from a material different from the first layer, the grooves having a rectangular cross section perpendicular to a first direction in which the grooves extend, the rectangular cross sections continuing along the first direction, and the grooves being defined by a bottom surface included in a surface of the second layer that contacts the first layer and a pair of side surfaces included in the first layer.

[0006] A method for manufacturing a heat exchanger member for solving the above problem includes preparing a clad material composed of a first layer and a second layer formed of a material different from the first layer, forming a resist pattern on a surface of the first layer opposite to a surface in contact with the second layer, and wet-etching the first layer using the resist pattern to form a groove portion defined by a bottom surface included in a surface of the second layer in contact with the first layer and a pair of side surfaces included in the first layer, wherein a cross section perpendicular to a first direction in which the groove portion extends has a rectangular shape, and the cross section having the rectangular shape is continuous along the first direction. According to the heat exchanger member, since the cross section perpendicular to the first direction has a rectangular shape, it is possible to increase the efficiency of heat exchange in the heat exchanger member.

[0007] In the above heat exchanger member, the first layer may be formed from any one selected from a first group consisting of silver, copper, aluminum, titanium, and iron, or from an alloy containing two or more of the metals included in the first group.

[0008] In the above heat exchanger member, the second layer may be made of carbon graphite. According to the above heat exchanger member, the selectivity of the second layer to the first layer formed from a metal included in the first group or an alloy containing two or more of the metals included in the first group can be increased, and the heat exchanger member including the second layer can have high thermal conductivity.

[0009] In the above heat exchanger member, an interior angle formed between the bottom surface and the side surface in the cross section may be equal to or greater than 80° and equal to or less than 110°. In the heat exchanger member, since the interior angle is 80° or more, the flow velocity loss of the heat medium flowing in the groove is suppressed from increasing, and since the interior angle is 110° or less, the gap between the adjacent grooves is suppressed from increasing. Effect of the Invention

[0010] According to the heat exchanger member and the manufacturing method for the heat exchanger member of the present disclosure, it is possible to improve the efficiency of heat exchange in the heat exchanger member. [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 is a cross-sectional view showing the structure of a plate member included in a heat exchanger member in one embodiment. [Diagram 2] FIG. 2 is a perspective view showing the structure of a heat exchanger member in the embodiment. [Diagram 3] FIG. 3 is a process diagram illustrating an etching process included in the method for producing a heat exchanger member in the embodiment. [Figure 4] FIG. 4 is a process diagram illustrating an etching process included in the method for producing a heat exchanger member in the embodiment. [Diagram 5] FIG. 5 is a process diagram illustrating an etching process included in the method for producing a heat exchanger member in the embodiment. [Figure 6] FIG. 6 is a process diagram illustrating an etching process included in the method for producing a heat exchanger member in the embodiment. [Figure 7] FIG. 7 is a process diagram illustrating an etching process included in the method for producing a heat exchanger member in the embodiment. [Figure 8] FIG. 8 is a SEM image of the cross-sectional structure of the test piece in Example 1. [Figure 9]FIG. 9 is an SEM image of the cross-sectional structure of the test piece in Comparative Example 1. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] A heat exchanger member and a method for manufacturing the heat exchanger member will be described with reference to Figs. [Heat exchanger components] The heat exchanger member will be described with reference to Figures 1 and 2. The heat exchanger member described below is a heat exchanger member applied to a microchannel type heat exchanger, which is one example of a heat exchanger. Figure 1 shows the cross-sectional structure of one plate member included in the heat exchanger member.

[0013] 1, a plate member 10 included in a heat exchanger member has a plurality of grooves 10G. The plate member 10 is made of a clad material 10C. The clad material 10C is composed of a first layer 11 and a second layer 12. The second layer 12 is made of a material different from that of the first layer 11.

[0014] In the groove 10G, a cross section perpendicular to the first direction D1 in which the groove 10G extends has a rectangular shape, and the rectangular cross sections are continuous along the first direction D1. That is, the groove 10G is a rectangular groove. The second layer 12 has a first surface 12S1 that contacts the first layer 11. The groove 10G is defined by a bottom surface 10GB included in the first surface 12S1 of the second layer 12 and a pair of side surfaces 10GS included in the first layer 11. According to the heat exchanger member of the present disclosure, in the groove 10G included in the plate member 10, a cross section perpendicular to the first direction D1 has a rectangular shape, so that it is possible to increase the efficiency of heat exchange in the heat exchanger member including the plate member 10.

[0015] The thickness of the first layer 11 may be the same as or different from the thickness of the second layer 12. When the thickness of the first layer 11 is different from the thickness of the second layer 12, the thickness of the first layer 11 may be thinner or thicker than the thickness of the second layer 12. From the viewpoint of increasing the mechanical strength of the plate member 10, it is preferable that the thickness of the second layer 12 is thicker than the thickness of the first layer 11.

[0016] In the first layer 11, a plurality of ribs 11R extending along the first direction D1 are arranged at equal intervals along the second direction D2. The second direction D2 is a direction perpendicular to the first direction D1. The groove portion 10G is located between two adjacent ribs 11R in the second direction D2.

[0017] The first layer 11 may be formed of any one selected from a first group consisting of silver, copper, aluminum, titanium, and iron, or an alloy containing two or more of the metals included in the first group. The etching rate of the second layer 12 by the etching solution for forming the grooves 10G in the first layer 11 is lower than the etching rate of the first layer 11. It is preferable that the second layer 12 is not etched by the etching solution for forming the grooves 10G in the first layer 11.

[0018] From the viewpoint of increasing the thermal conductivity of the plate member 10, it is preferable that the thermal conductivity of the second layer 12 is higher than that of the first layer 11. From the viewpoint of increasing the thermal conductivity of the plate member 10, it is preferable that in the clad material 10C, one of the first layer 11 and the second layer 12 is made of copper and the other is made of aluminum. In this case, from the viewpoint of increasing the selectivity of the second layer 12 relative to the first layer 11, it is preferable that the first layer 11 is made of copper and the second layer 12 is made of aluminum.

[0019] The second layer 12 may be made of carbon graphite. Because the second layer 12 is made of carbon graphite, it is possible to increase the selectivity of the second layer 12 to the first layer 11 made of a metal included in the first group or an alloy containing two or more of the metals included in the first group. In addition, because the second layer 12 is made of carbon graphite, the heat exchanger member including the second layer 12 can have high thermal conductivity.

[0020] In the above-mentioned cross section, the interior angle θ formed by the bottom surface 10GB and the side surface 10GS may be 80° or more and 110° or less. Since the interior angle θ is 80° or more, the flow rate loss of the heat medium flowing in the groove portion 10G is suppressed from increasing. Also, since the interior angle θ is 110° or less, the gap between the adjacent groove portions 10G is suppressed from increasing. As a result, in order to satisfy that the shortest distance between the groove portions 10G is a predetermined distance or more, the number of the groove portions 10G per unit length is suppressed from decreasing. From the viewpoint of suppressing the flow rate loss of the heat medium, the interior angle θ is preferably 85° or more. From the viewpoint of suppressing the gap between the groove portions 10G, the interior angle θ is preferably 100° or less, and more preferably 95° or less.

[0021] FIG. 2 shows a perspective structure of a heat exchanger member. As shown in Fig. 2, the heat exchanger member 100 includes a plurality of plate members 10. In the example shown in Fig. 2, the heat exchanger member 100 includes a first plate member 100A, a second plate member 100B, and a third plate member 100C.

[0022] The normal direction of the plane determined by the first direction D1 and the second direction D2 is the third direction D3. In the third direction D3, the second plate member 100B is stacked on the first plate member 100A, and the third plate member 100C is stacked on the second plate member 100B. The grooves 10G of the first plate member 100A and the grooves 10G of the third plate member 100C both extend along the first direction D1. In contrast, the grooves 10G of the second plate member 100B extend along the second direction D2. The grooves 10G of the second plate member 100B have a shape rotated 90° from the grooves 10G of the first plate member 100A with respect to the first direction D1 in the plane determined by the first direction D1 and the second direction D2.

[0023] In the heat exchanger member 100, the three plate members 10 are stacked such that the grooves 10G of the second plate member 100B are perpendicular to the grooves 10G of the first plate member 100A and the grooves 10G of the third plate member 100C in the first direction D1. Therefore, deformation of the heat exchanger member 100 due to heating of the heat exchanger member 100 is suppressed compared to the case where the grooves 10G of the second plate member 100B extend along the same direction as the grooves 10G of the first plate member 100A and the grooves 10G of the third plate member 100C.

[0024] The number of grooves 10G provided in the first plate member 100A and the third plate member 100C may be the same as the number of grooves 10G provided in the second plate member 100B as shown in Fig. 2. Alternatively, the number of grooves 10G provided in the first plate member 100A and the third plate member 100C may be different from the number of grooves 10G provided in the second plate member 100B.

[0025] 2, the heat exchanger member 100 includes a lid 100D. The lid 100D is laminated on a third plate member 100C. This blocks an opening of a groove 10G included in the third plate member 100C, the opening being located on the surface of the first layer 11 opposite to the surface in contact with the second layer 12.

[0026] [Method of manufacturing heat exchanger components] A method for manufacturing the heat exchanger member 100 will be described with reference to FIGS. The manufacturing method of the heat exchanger member 100 includes preparing a clad material 10C, forming a resist pattern, and forming a groove 10G. In preparing the clad material 10C, a clad material 10C composed of a first layer 11 and a second layer 12 formed of a material different from that of the first layer 11 is prepared. In forming the resist pattern, a resist pattern is formed on the surface of the first layer 11 opposite to the surface in contact with the second layer 12. In forming the groove 10G, the groove 10G is formed by wet etching the first layer 11 using the resist pattern. In forming the groove 10G, the groove 10G is formed by a bottom surface 10GB included in a first surface 12S1 that is in contact with the first layer 11 of the second layer 12 and a pair of side surfaces 10GS included in the first layer 11. Furthermore, forming the groove portion 10G means that a cross section perpendicular to the first direction D1 in which the groove portion 10G extends has a rectangular shape, and the groove portion 10G is formed so that the rectangular cross sections are continuous along the first direction D1.

[0027] Hereinafter, the method for manufacturing the heat exchanger member 100 will be described in more detail with reference to the drawings. In the method for manufacturing the heat exchanger member 100, the step of forming the groove portion 10G provided in the plate member 10 will be described in detail below.

[0028] 3, a clad material 10C composed of a first layer 11 and a second layer 12 is prepared. Next, a resist pattern RP is formed on the surface of the first layer 11 opposite to the surface in contact with the second layer 12. The resist pattern RP has through holes RPA for forming the grooves 10G. The resist pattern RP may be formed of a negative resist or a positive resist.

[0029] As shown in Fig. 4, the clad material 10C is etched by wet etching using the resist pattern RP. When the first layer 11 is made of copper and the second layer 12 is made of aluminum, for example, an aqueous solution of ferric chloride can be used as an etching solution. In the initial stage of the wet etching, only the portions of the first layer 11 located below the through holes RPA in the resist pattern RP are etched. The wet etching proceeds approximately in a direction perpendicular to the plane in which the first layer 11 extends.

[0030] Since wet etching is isotropic etching, as shown in FIG. 5, in addition to the portion of the first layer 11 located below the through hole RPA, the portion below the resist pattern RP that is connected to the through hole RPA is also etched as the wet etching progresses. At this time, the etching solution contains a main flow M and a reflux flow R. The main flow M flows along the direction from the through hole RPA toward the first surface 12S1 of the second layer 12, and then circulates so as to flow along the direction from the first surface 12S1 toward the through hole RPA. The reflux flow R rotates in the space formed below the resist pattern RP. As a result, a recess 11A is formed in the first layer 11. In a cross section perpendicular to the plane in which the first layer 11 spreads, the recess 11A has a circular arc shape tapered along the direction from the first layer 11 toward the second layer 12. That is, in a cross section perpendicular to the plane in which the first layer 11 spreads, the recess 11A has a forward tapered shape. The recess 11A does not reach the first surface 12S1 which is the boundary between the first layer 11 and the second layer 12.

[0031] Among the etching solutions, the etching solution contained in the mainstream M circulates between the inside and outside of the first layer 11 through the through holes RPA. Therefore, the etching solution contained in the mainstream M is constantly replaced. In contrast, although the etching solution contained in the reflux R is in contact with the mainstream M, mixing or replacement of the etching solution between the mainstream M and the reflux R is difficult. Therefore, the etching solution contained in the reflux R gradually deteriorates. As a result, the etching rate of the portion of the first layer 11 in contact with the reflux R, i.e., the first portion located directly below the resist pattern RP, becomes lower than the etching rate of the second portion that is closer to the second layer 12 than the first portion in the thickness direction of the first layer 11.

[0032] 6, etching of the second portion of the first layer 11 proceeds faster than etching of the first portion, so that groove 10G can be formed which penetrates the first layer 11 and has a rectangular cross section perpendicular to the plane in which the first layer 11 extends. The cross-sectional shape of groove 10G can be adjusted by, for example, the material forming first layer 11, the thickness of resist pattern RP, the opening diameter of through hole RPA, the type of etching solution, the temperature of the etching solution, the duration of etching, etc. When the etching method is spray etching, the cross-sectional shape of groove 10G can also be adjusted by the spray pressure.

[0033] As shown in Fig. 7, even if the groove 10G reaching the first surface 12S1 of the second layer 12 is formed, the second layer 12 is not easily etched. Therefore, in a cross section perpendicular to the plane in which the first layer 11 extends, the etching of the first layer 11 proceeds in a direction along the first surface 12S1, which is the boundary between the first layer 11 and the second layer 12. As a result, the etching of the second portion of the first layer 11 proceeds faster than the first portion, so that in a cross section perpendicular to the plane in which the first layer 11 extends, the groove 10G has a trapezoidal shape tapering from the second layer 12 toward the first layer 11. That is, in a cross section perpendicular to the plane in which the first layer 11 extends, the groove 10G has an inverse tapered shape.

[0034] On the other hand, when the plate member is composed of one layer, the isotropic etching of the layer proceeds throughout the thickness direction of the plate member, so that only grooves having an arc-shaped cross section are formed in the plate member. Therefore, according to the heat exchanger member 100 of the present disclosure, it is possible to expand the surface area of ​​the grooves 10G and the cross-sectional area of ​​the grooves 10G even if the width of the grooves 10G is the same, compared to a heat exchanger member having a groove with an arc-shaped cross section. According to the heat exchanger member 100 of the present disclosure, it is possible to increase the efficiency of heat exchange in the heat medium flowing through the grooves 10G by expanding the surface area of ​​the grooves 10G. Also, according to the heat exchanger member 100 of the present disclosure, it is possible to increase the flow rate of the heat medium flowing through the grooves 10G by expanding the cross-sectional area of ​​the grooves 10G, thereby increasing the efficiency of heat exchange.

[0035] [Example] An example and a comparative example will be described with reference to FIG. 8 and FIG. [Example 1] A clad material was prepared, which was composed of a first layer of copper-based metal foil (C2100 (copper-zinc-based)) with a thickness of 50 μm and a second layer of stainless steel foil (SUS304) with a thickness of 100 μm. Next, a pair of opposing surfaces of the clad material were degreased, polished, and washed. Next, a negative dry film resist with a thickness of 15 μm was laminated on the surface of the first layer opposite the surface in contact with the second layer.

[0036] Next, the dry film resist was exposed using an exposure mask. At this time, an exposure mask was used in which a light-shielding portion having a width of 20 μm, a light-shielding portion having a width of 30 μm, a light-shielding portion having a width of 50 μm, and a light-shielding portion having a width of 100 μm were arranged in the second direction so that the gap between the light-shielding portions was 100 μm. After that, the developed film resist was developed using a 1% sodium carbonate solution at 35° C., thereby obtaining a resist pattern.

[0037] Next, the first layer was etched using a ferric chloride aqueous solution at 50°C to form grooves in the clad material. In this case, the etching time was set to 120 seconds, and the spray pressure was set to 0.5 MPa. Then, the clad material was immersed in a 3% sodium hydroxide aqueous solution at 40°C to peel off the resist pattern from the first layer. In this way, a test piece S1 of Example 1 was obtained. As shown in FIG. 8, it was found that the test piece S1 had a first layer S11, a second layer S12, and four grooves S1G.

[0038] [Comparative Example 1] A test piece S2 of Comparative Example 1 was obtained in the same manner as in Example 1, except that the clad material in Example 1 was changed to a copper-based metal foil (C2100 (copper-zinc based)) having a thickness of 150 μm. As shown in FIG. 9, the test piece S2 was found to have a first layer S21 and four groove portions S2G.

[0039] [Groove shape] The shape of the grooves S1G in the test piece S1 of Example 1 was as shown in Fig. 8. On the other hand, the shape of the grooves S2G in the test piece S2 of Comparative Example 1 was as shown in Fig. 9.

[0040] That is, it was confirmed that the groove portion S1G of the test piece S1 of Example 1 has a shape in which a rectangular cross section along a plane perpendicular to the first direction D1 is connected along the first direction D1. That is, it was confirmed that the groove portion S1G of the test piece S1 is a rectangular groove. In contrast, it was confirmed that the groove portion S2G ​​of the test piece S2 of Comparative Example 1 has a shape in which a circular arc-shaped cross section along a plane perpendicular to the first direction D1 is connected along the first direction D1. That is, it was confirmed that the groove portion S2G ​​of the test piece S2 is an arc-shaped groove.

[0041] As described above, according to one embodiment of the heat exchanger member and the manufacturing method for the heat exchanger member, the following effects can be obtained. (1) Since the cross section perpendicular to the first direction D1 has a rectangular shape, the efficiency of heat exchange in the heat exchanger member 100 can be improved.

[0042] (2) By forming the second layer 12 from carbon graphite, it is possible to increase the selectivity of the second layer 12 to the first layer 11 formed from a metal included in the first group or an alloy containing two or more of the metals included in the first group. In addition, the heat exchanger member 100 including the second layer 12 can have high thermal conductivity.

[0043] (3) Since the interior angle θ is 80° or more, the flow velocity loss of the heat transfer medium flowing in the groove portion 10G is prevented from increasing. Also, since the interior angle θ is 110° or less, the gap between the adjacent groove portions 10G is prevented from increasing.

[0044] The above-described embodiment can be modified as follows. [Method of manufacturing heat exchanger components] The first layer 11 may be etched by dry etching. Dry etching is anisotropic etching, and therefore, compared to the case where the first layer 11 is etched by wet etching, it is easier to form the groove 10G having a rectangular cross section in the first direction D1. [Explanation of symbols]

[0045] 10...Plate member 10C...Clad material 10G…Groove 11…1st layer 12…Second layer 100...Heat exchanger components

Claims

1. A heat exchanger member including a plate member having a plurality of grooves, The plate member is formed from a clad material including a first layer and a second layer formed from a material different from that of the first layer, In the groove portion, a cross section perpendicular to a first direction in which the groove portion extends has a rectangular shape, and the rectangular cross section is continuous along the first direction, The groove portion is defined by a bottom surface included in a surface of the second layer that contacts the first layer and a pair of side surfaces included in the first layer. Heat exchanger components.

2. The first layer is formed from any one selected from a first group consisting of silver, copper, aluminum, titanium, and iron, or an alloy containing two or more of the metals included in the first group. The heat exchanger member according to claim 1 .

3. The second layer is formed from carbon graphite. The heat exchanger member according to claim 2 .

4. In the cross section, an interior angle formed between the bottom surface and the side surface is 80° or more and 110° or less. The heat exchanger member according to any one of claims 1 to 3.

5. Providing a clad material comprising a first layer and a second layer formed of a material different from that of the first layer; forming a resist pattern on a surface of the first layer opposite to a surface in contact with the second layer; and forming a groove portion defined by a bottom surface included in a surface of the second layer that contacts the first layer and a pair of side surfaces included in the first layer, the groove portion having a rectangular cross section perpendicular to a first direction in which the groove portion extends, the cross section having the rectangular shape continuing along the first direction, by wet etching the first layer using the resist pattern. A method for manufacturing a heat exchanger component.

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