Semiconductor device

Abstract

To provide a semiconductor device having a plurality of semiconductor elements connected in parallel which suppresses oscillation.SOLUTION: A semiconductor device 21 includes a substrate 40 having wiring, a plurality of semiconductor elements 30 in which drain electrodes 31 are joined to common wiring and are connected in parallel to each other, and a metal plate material 100. The metal plate material 100 short-circuits source electrodes 32 of the plurality of semiconductor elements 30 connected in parallel. Because the source electrodes 32 are short-circuited by the metal plate material 100, parasitic inductance between the source electrodes 32 is small. Therefore, occurrence of oscillation between the semiconductor elements 30, namely, in a parallel circuit can be suppressed.SELECTED DRAWING: Figure 67

Description

[Technical field]

[0001] The disclosure herein relates to semiconductor devices. [Background technology]

[0002] Patent Document 1 discloses a semiconductor device. The contents of the prior art documents are incorporated by reference as explanations of technical elements in this specification. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2002-153079 A Summary of the Invention [Problem to be solved by the invention]

[0004] In Patent Document 1, multiple IGBTs (semiconductor elements) are mounted on a substrate. Collector electrodes (first main electrodes) of the multiple semiconductor elements are joined to a common wiring. Emitter electrodes (second main electrodes) are connected to each other via conductor wires (bonding wires) and relay wiring. In multiple semiconductor elements connected in parallel, parasitic inductance between the emitter electrodes is large. There is a risk of oscillation occurring between the multiple semiconductor elements. In the above-mentioned respects, or in other respects not mentioned, further improvements are required in semiconductor devices.

[0005] One disclosed object is to suppress oscillations in a semiconductor device including a plurality of semiconductor elements connected in parallel. [Means for solving the problem]

[0006] One aspect of the disclosure is a semiconductor device, comprising: A substrate (40) having wiring (42); a plurality of semiconductor elements (30) each having a first main electrode (31), a second main electrode (32) provided on a surface opposite to the first main electrode, and a pad (33) provided on the same surface as the second main electrode, the first main electrodes being joined to a common wiring; a metal member (80, 100, 101) for short-circuiting second main electrodes of a plurality of semiconductor elements; Equipped with.

[0007] According to the disclosed semiconductor device, the second main electrodes of the semiconductor elements are short-circuited by the metal member. In other words, the parasitic inductance between the second main electrodes is small. Therefore, it is possible to suppress the occurrence of oscillation between the semiconductor elements.

[0008] Another aspect of the disclosure is a semiconductor device, comprising: A substrate (40) having wiring (42); a plurality of semiconductor elements (30) each having a first main electrode (31), a second main electrode (32) provided on a surface opposite to the first main electrode, and a gate pad (33G) provided on the same surface as the second main electrode, the first main electrodes being joined to a common wiring; a passive component (103) including a ferrite bead or a balance resistor, the passive component (103) being provided on a gate wiring electrically connected to the gate pad; Equipped with The semiconductor elements are grouped together according to their similar layout and divided into groups (301H, 301L, 302H, 302L) that are smaller than the number of semiconductor elements. Each group is provided with passive components.

[0009] According to the disclosed semiconductor device, the impedance of the gate wiring is large because the gate wiring is provided with a passive component such as a ferrite bead or a balance resistor. This makes it possible to suppress oscillation between multiple semiconductor elements. The multiple semiconductor elements are grouped together based on their close arrangement, and a passive component is provided for each group, making it possible to reduce the number of passive components.

[0010] Another aspect of the disclosure is a semiconductor device, comprising: an insulating substrate (40) having wiring (42); a plurality of semiconductor elements (30) each having a first main electrode (31), a second main electrode (32) provided on a surface opposite to the first main electrode, and a gate pad (33G) provided on the same surface as the second main electrode, the first main electrodes being joined to a common wiring; Gate terminal (62G), a printed circuit board (104) that provides gate wiring that electrically connects the gate pad and the gate terminal; and a passive component (103) including a ferrite bead or a balancing resistor, which is mounted on the printed circuit board and adjusts the impedance of the gate wiring.

[0011] According to the disclosed semiconductor device, the impedance of the gate wiring can be increased by providing a ferrite bead or a balance resistor, which is a passive component. This makes it possible to suppress oscillation between a plurality of semiconductor elements. A printed circuit board allows finer wiring than an insulating board. Since the gate wiring is provided on a printed circuit board instead of an insulating board, the size of the device can be reduced.

[0012] The various aspects disclosed in this specification adopt different technical means to achieve their respective objectives. The claims and the parenthetical symbols described in this section are merely illustrative of the corresponding relationship with the embodiments described below, and are not intended to limit the technical scope. The objectives, features, and effects disclosed in this specification will become clearer with reference to the following detailed description and the accompanying drawings. [Brief description of the drawings]

[0013] [Figure 1] 1 is a diagram showing a circuit configuration of a power conversion device to which a semiconductor device according to a first embodiment is applied; [Diagram 2] FIG. 1 is a perspective view showing an example of a semiconductor module. [Diagram 3]FIG. 2 is a plan view of a semiconductor module. [Figure 4] FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. [Diagram 5] FIG. 1 is a plan view illustrating an example of a semiconductor device. [Figure 6] FIG. 2 is a plan view showing a wiring pattern of a substrate. [Figure 7] FIG. 7 is a cross-sectional view taken along line VII-VII in FIG. 5. [Figure 8] 11 is a cross-sectional view showing another example of a connection structure between a capacitor and a substrate. [Figure 9] 11 is a cross-sectional view showing another example of a connection structure between a capacitor and a substrate. [Figure 10] 11 is a cross-sectional view showing another example of a connection structure between a capacitor and a substrate. [Figure 11] FIG. 2 is a circuit diagram showing a verification model. [Figure 12] FIG. 13 is a diagram showing a verification result. [Figure 13] FIG. [Figure 14] FIG. 2 is a diagram showing the arrangement of current paths through a snubber circuit. [Figure 15] FIG. [Figure 16] FIG. [Figure 17] FIG. [Figure 18] FIG. 11 is a plan view showing a semiconductor element in a semiconductor device according to a second embodiment. [Figure 19] 19 is a cross-sectional view taken along line XIX-XIX in FIG. 18. [Figure 20] 1 is a partial cross-sectional view of a semiconductor device and a semiconductor module; [Figure 21] 1 is a plan view showing an example of a connection structure between a clip and a semiconductor element. FIG. [Figure 22] 22 is a cross-sectional view taken along line XXII-XXII in FIG. 21. [Diagram 23] 13 is a plan view showing another example of a connection structure between a clip and a semiconductor element. FIG. [Figure 24]FIG. [Diagram 25] FIG. 11 is a plan view showing another example of the clip. [Figure 26] FIG. 11 is a plan view showing another example of the clip. [Figure 27] FIG. 11 is a cross-sectional view showing another example of a clip. [Figure 28] FIG. 11 is a plan view showing another example of the clip. [Figure 29] 13 is a plan view showing another example of a connection structure between a clip and a semiconductor element. FIG. [Diagram 30] 30 is a cross-sectional view taken along line XXX-XXX in FIG. 29. [Diagram 31] FIG. 11 is a plan view showing another example of the clip. [Diagram 32] FIG. 11 is a plan view showing another example of the clip. [Diagram 33] FIG. 11 is a plan view showing another example of the clip. [Diagram 34] FIG. 11 is a plan view showing another example of the clip. [Diagram 35] FIG. 11 is a plan view showing another example of the clip. [Diagram 36] FIG. 11 is a plan view showing another example of the clip. [Figure 37] FIG. 11 is a plan view showing another example of the clip. [Figure 38] FIG. 11 is a plan view showing another example of the clip. [Figure 39] FIG. 11 is a plan view showing another example of the clip. [Diagram 40] FIG. 11 is a plan view showing another example of the clip. [Diagram 41] FIG. 11 is a plan view illustrating an example of a semiconductor device according to a third embodiment. [Diagram 42] FIG. [Diagram 43] 4A and 4B are diagrams illustrating the positional relationship between an output terminal and a branch terminal. [Diagram 44] 4A and 4B are diagrams illustrating the positional relationship between an output terminal and a branch terminal. [Diagram 45] 4A and 4B are diagrams illustrating the positional relationship between an output terminal and a branch terminal. [Figure 46]4A and 4B are diagrams illustrating the positional relationship between an output terminal and a branch terminal. [Figure 47] FIG. 13 is a diagram showing another example of a semiconductor device. [Figure 48] FIG. 13 is a diagram showing another example of a semiconductor device. [Figure 49] FIG. 13 is a plan view illustrating an example of a semiconductor device according to a fourth embodiment. [Figure 50] FIG. 4 is a diagram showing a current path on the upper arm side. [Figure 51] FIG. 2 is a plan view illustrating an example of a substrate. [Figure 52] FIG. 13 is a diagram showing another example of a substrate. [Diagram 53] FIG. 13 is a plan view illustrating an example of a semiconductor module according to a fifth embodiment. [Figure 54] FIG. 2 is a plan view showing a semiconductor module with a housing removed; [Figure 55] FIG. 54 is a cross-sectional view taken along the line LV-LV in FIG. 53. [Figure 56] FIG. [Figure 57] FIG. 11 is a diagram showing the relationship between the thickness of a sealing material and thermal resistance. [Figure 58] 1 is a cross-sectional view showing a reference example of a semiconductor module. [Figure 59] FIG. 54 is a cross-sectional view taken along line LIX-LIX in FIG. 53. [Figure 60] FIG. 11 is a cross-sectional view showing another example of a semiconductor module. [Figure 61] 13 is a cross-sectional view showing an example of a semiconductor module according to a sixth embodiment. FIG. [Figure 62] FIG. 1 is a plan view illustrating an example of a semiconductor device. [Figure 63] 63 is a cross-sectional view taken along line LXIII-LXIII in FIG. 62. [Figure 64] 1 is a cross-sectional view showing warpage of a substrate in a semiconductor module. [Figure 65] FIG. 11 is a plan view showing another example of a semiconductor module. [Figure 66] FIG. 1 is a diagram for explaining oscillation in a parallel circuit. [Figure 67] FIG. 13 is a plan view illustrating an example of a semiconductor device according to a seventh embodiment. [Figure 68] FIG. 2 is a diagram showing an equivalent circuit diagram of upper and lower arm circuits provided by the semiconductor device. [Figure 69] FIG. 11 is a plan view showing another example of a semiconductor device. [Figure 70] FIG. 11 is a plan view showing another example of a semiconductor device. [Figure 71] FIG. 11 is a plan view showing another example of a semiconductor device. [Figure 72] 72 is a cross-sectional view taken along line LXXII-LXXII in FIG. 71. [Figure 73] FIG. 73 is an enlarged view of area LXXIII shown in FIG. 72. [Figure 74] FIG. 11 is a plan view showing another example of a semiconductor device. [Figure 75] FIG. 11 is a plan view showing another example of a semiconductor device. [Figure 76] FIG. 11 is a plan view showing another example of a semiconductor device. [Figure 77] FIG. 11 is a plan view showing another example of a semiconductor device. [Figure 78] FIG. 11 is a plan view showing another example of a semiconductor device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] Hereinafter, a number of embodiments will be described based on the drawings. In each embodiment, the same reference numerals are used to designate corresponding components, and duplicated descriptions may be omitted. When only a part of the configuration is described in each embodiment, the configuration of the other embodiment described above can be applied to the other parts of the configuration. In addition to the combination of configurations explicitly stated in the description of each embodiment, configurations of multiple embodiments can be partially combined together even if not explicitly stated, as long as there is no particular problem with the combination. Note that the description of A and / or B means at least one of A and B. In other words, it may include only A, only B, or both A and B.

[0015] The semiconductor device of the present embodiment and the semiconductor module including the semiconductor device are applied to, for example, a power conversion device of a mobile body using a rotating electric machine as a drive source. The mobile body is, for example, an electric vehicle such as a battery electric vehicle (BEV), a hybrid electric vehicle (HEV), a plug-in hybrid electric vehicle (PHEV), an aircraft such as an electric vertical take-off and landing aircraft or a drone, a ship, a construction machine, an agricultural machine, etc. An example of application to a vehicle will be described below.

[0016] (First embodiment) First, a schematic configuration of a drive system of a vehicle will be described with reference to FIG.

[0017] <Vehicle drive system> As shown in FIG. 1, a vehicle drive system 1 includes a DC power supply 2, a motor generator 3, and a power conversion device 4.

[0018] The DC power supply 2 is a DC voltage source composed of a chargeable and dischargeable secondary battery. The secondary battery is, for example, a lithium-ion battery or a nickel-metal hydride battery. The motor generator 3 is a three-phase AC rotating electric machine. The motor generator 3 functions as a drive source for the vehicle, that is, an electric motor. The motor generator 3 functions as a generator during regeneration. The power conversion device 4 performs power conversion between the DC power supply 2 and the motor generator 3.

[0019] <Power conversion device> Next, a circuit configuration of the power conversion device 4 will be described with reference to Fig. 1. The power conversion device 4 includes a power conversion circuit. The power conversion device 4 of this embodiment includes a smoothing capacitor 5 and an inverter 6 which is the power conversion circuit.

[0020] The smoothing capacitor 5 mainly smoothes the DC voltage supplied from the DC power supply 2. The smoothing capacitor 5 is connected to a P line 7 which is a power supply line on the high potential side and an N line 8 which is a power supply line on the low potential side. The P line 7 is connected to the positive electrode of the DC power supply 2, and the N line 8 is connected to the negative electrode of the DC power supply 2. The positive electrode of the smoothing capacitor 5 is connected to the P line 7 between the DC power supply 2 and the inverter 6. The negative electrode of the smoothing capacitor 5 is connected to the N line 8 between the DC power supply 2 and the inverter 6. The smoothing capacitor 5 is connected in parallel to the DC power supply 2.

[0021] The inverter 6 is a DC-AC conversion circuit. The inverter 6 converts a DC voltage into a three-phase AC voltage in accordance with switching control by a control circuit (not shown) and outputs the voltage to the motor generator 3. This drives the motor generator 3 to generate a predetermined torque. During regenerative braking of the vehicle, the inverter 6 converts the three-phase AC voltage generated by the motor generator 3 upon receiving rotational force from the wheels into a DC voltage in accordance with switching control by the control circuit and outputs the DC voltage to the P line 7. In this way, the inverter 6 performs bidirectional power conversion between the DC power source 2 and the motor generator 3.

[0022] The inverter 6 is configured to include upper and lower arm circuits 9 for three phases. The upper and lower arm circuits 9 are sometimes referred to as legs. The upper and lower arm circuits 9 each have an upper arm 9H and a lower arm 9L. The upper arm 9H and the lower arm 9L are connected in series between the P line 7 and the N line 8, with the upper arm 9H on the P line 7 side.

[0023] A connection point between the upper arm 9H and the lower arm 9L is connected to the winding 3a of the corresponding phase in the motor generator 3 via an output line 10. Of the upper and lower arm circuits 9, the U-phase upper and lower arm circuit 9U is connected to the U-phase winding 3a via a corresponding output line 10. The V-phase upper and lower arm circuit 9V is connected to the V-phase winding 3a via a corresponding output line 10. The W-phase upper and lower arm circuit 9W is connected to the W-phase winding 3a via a corresponding output line 10. At least a portion of each of the P line 7, the N line 8, and the output line 10 is formed of a conductive member such as a bus bar.

[0024] The inverter 6 has six arms. Each arm is configured to include a switching element. The number of switching elements constituting each arm is not particularly limited. There may be one or more. When there are more than one switching elements, the multiple switching elements connected in parallel to each other are turned on and off at the same timing by a common gate drive signal (drive voltage).

[0025] In this embodiment, an n-channel MOSFET 11 is used as a switching element constituting each arm. MOSFET is an abbreviation for Metal Oxide Semiconductor Field Effect Transistor. In the upper arm 9H, the drain of the MOSFET 11 is connected to the P line 7. In the lower arm 9L, the source of the MOSFET 11 is connected to the N line 8. The source of the MOSFET 11 in the upper arm 9H and the drain of the MOSFET 11 in the lower arm 9L are connected to each other.

[0026] A freewheeling diode 12 is connected in anti-parallel to each of the MOSFETs 11. The diode 12 may be a parasitic diode (body diode) of the MOSFET 11, or may be provided separately from the parasitic diode. The anode of the diode 12 is connected to the source of the corresponding MOSFET 11, and the cathode is connected to the drain.

[0027] The switching element is not limited to the MOSFET 11. For example, an IGBT may be used. IGBT is an abbreviation for Insulated Gate Bipolar Transistor. In the case of an IGBT, a freewheeling diode is also connected in inverse parallel.

[0028] The inverter 6 includes a snubber circuit 13 in addition to the upper and lower arm circuits 9 described above. The snubber circuit 13 absorbs a transient high voltage that occurs during switching, a so-called switching surge. This enables high-speed switching. The snubber circuit 13 may be provided individually for the upper and lower arm circuits 9 and connected in parallel to the corresponding upper and lower arm circuits 9. The snubber circuit 13 may be provided individually for each arm 9H, 9L and connected in parallel to the corresponding arms 9H, 9L. As an example, the snubber circuit 13 in this embodiment is connected in parallel to the upper and lower arm circuits 9.

[0029] The snubber circuit 13 has at least a capacitor 131. The snubber circuit 13 may be, for example, a C snubber circuit having the capacitor 131, or an RC snubber circuit having the capacitor 131 and a resistor 132 as shown in Fig. 1. The snubber circuit 13 may also be an RCD snubber circuit having the capacitor 131, the resistor 132, and a diode.

[0030] The power conversion device 4 may further include a converter as a power conversion circuit. The converter is a DC-DC conversion circuit that converts a DC voltage, for example, into a DC voltage of a different value. The converter is provided between the DC power source 2 and the smoothing capacitor 5. The converter is configured to include, for example, a reactor and the above-mentioned upper and lower arm circuits 9. With this configuration, voltage can be increased and decreased. The power conversion device 4 may include a filter capacitor that removes power supply noise from the DC power source 2. The filter capacitor is provided between the DC power source 2 and the converter.

[0031] The power conversion device 4 may include a drive circuit for a switching element constituting the inverter 6 or the like. The drive circuit supplies a drive voltage to the gate of the MOSFET 11 of the corresponding arm based on a drive command from the control circuit. The drive circuit drives the corresponding MOSFET 11, i.e., turns it on and off, by applying the drive voltage. The drive circuit is sometimes referred to as a driver.

[0032] The power conversion device 4 may include a control circuit for the switching element. The control circuit generates a drive command for operating the MOSFET 11 and outputs it to the drive circuit. The control circuit generates the drive command based on, for example, a torque request input from a higher-level ECU (not shown) and signals detected by various sensors. ECU is an abbreviation for Electronic Control Unit.

[0033] The various sensors include, for example, a current sensor, a rotation angle sensor, and a voltage sensor. The current sensor detects the phase current flowing through the winding 3a of each phase. The rotation angle sensor detects the rotation angle of the rotor of the motor generator 3. The voltage sensor detects the voltage across the smoothing capacitor 5. The control circuit outputs, for example, a PWM signal as a drive command. The control circuit is configured to include, for example, a processor and a memory. PWM is an abbreviation for Pulse Width Modulation.

[0034] <Semiconductor module> Fig. 2 is a perspective view showing an example of a semiconductor module. Fig. 3 is a top plan view of the semiconductor module shown in Fig. 2. Fig. 4 is a cross-sectional view taken along line IV-IV in Fig. 3. Fig. 4 shows a simplified structure of the semiconductor module. A housing is omitted in Fig. 4.

[0035] In the following, the thickness direction of the substrate is defined as the Z direction, and the direction perpendicular to the Z direction is defined as the Y direction. The direction perpendicular to both the Z direction and the Y direction is defined as the X direction. Unless otherwise specified, the shape viewed from the Z direction, in other words, the shape along the XY plane defined by the X and Y directions, is defined as the planar shape. The planar view from the Z direction may also be simply referred to as the planar view.

[0036] 2, 3, and 4, the semiconductor module 20 may include a semiconductor device 21, a housing 22, and a cooler 23. The semiconductor module 20 constitutes the power conversion device 4 together with a capacitor device providing a smoothing capacitor 5, an input terminal block, an output terminal block, and the like. The semiconductor module 20 may be housed in a case of the power conversion device 4 together with other elements such as the capacitor device.

[0037] The semiconductor device 21 is disposed on one surface of the cooler 23 in the Z direction. The semiconductor device 21 provides at least one arm of the inverter 6, which is a power conversion circuit. Each of the semiconductor devices 21 illustrated in FIG. 2 provides the upper and lower arm circuits 9 for one phase. The semiconductor module 20 includes three semiconductor devices 21 to provide the inverter 6. The three semiconductor devices 21 are disposed on the same surface of the cooler 23 and are aligned in the X direction. Each of the semiconductor devices 21 is fixed to the cooler 23.

[0038] The semiconductor device 21U, which is one of the semiconductor devices 21, provides a U-phase upper and lower arm circuit 9U. The semiconductor device 21V, which is another of the semiconductor devices 21, provides a V-phase upper and lower arm circuit 9V. The semiconductor device 21W, which is another of the semiconductor devices 21, provides a W-phase upper and lower arm circuit 9W. In other words, the semiconductor module 20 provides the inverter 6. The details of the semiconductor device 21 will be described later.

[0039] The housing 22 is formed using an electrically insulating material such as resin. The housing 22 may be, for example, a resin molded body. The housing 22 may hold some of the components of the semiconductor device 21. Some of the components of the semiconductor device 21 may be integrally molded with the housing 22 as an insert part. The housing 22 may be fixed to the cooler 23. The housing 22 may be fixed to the case of the power conversion device 4 together with the cooler 23. The housing 22 may provide an accommodation space for the semiconductor device 21 together with the cooler 23 while being disposed on one side of the cooler 23. A sealant that seals the semiconductor element 30 and the like may be disposed in the accommodation space formed by the housing 22 and the cooler 23. The sealant is, for example, a gel or a potting resin.

[0040] 2 and 3, the housing 22 may include a frame body 221 and a partition wall 222. The frame body 221 has a predetermined height in the Z direction and is annular so as to surround the semiconductor device 21 in a plan view in the Z direction. The frame body 221 may be referred to as an annular wall portion. The frame body 221 may be substantially rectangular in shape. The rectangular annular frame body 221 has four walls 221a, 221b, 221c, and 221d.

[0041] The walls 221a and 221b extend in the X direction. The walls 221a and 221b are disposed opposite each other with a predetermined distance in the Y direction. The wall 221a is disposed on one end side of the semiconductor device 21 in the Y direction, and the wall 221b is disposed on the other end side of the semiconductor device 21. The walls 221a and 221b include a wall that defines an area and an extension portion that extends from the wall to the outside in the Y direction. The walls 221c and 221d extend in the Y direction. The wall 221c is continuous with the walls 221a and 221b at one end side in the X direction. The wall 221d is continuous with the walls 221a and 221b at the other end side in the X direction.

[0042] The partition wall 222 has a predetermined height in the Z direction and is connected to the frame body 221. The partition wall 222 divides the area defined by the frame body 221 into a plurality of areas. The partition wall 222 may divide the area into areas according to the number of the semiconductor devices 21, for example. The partition wall 222 may be referred to as a partition wall. The partition wall 222 may extend in a predetermined direction and both ends may be connected to the frame body 221. As illustrated in FIG. 2 and FIG. 3, the housing 22 may have two partition walls 222a and 222b as the partition wall 222. The partition walls 222a and 222b extend in the Y direction, similar to the walls 221c and 221d. One end of each of the partition walls 222a and 222b is connected to the wall portion 221a, and the other end is connected to the wall portion 221b. The partition walls 222a and 222b and the walls 221c and 221d are arranged in the X direction at a predetermined interval. The partition walls 222 divide the opposing area of ​​the frame body 221 into three areas. A semiconductor device 21 is housed in each of the three divided areas.

[0043] The cooler 23 cools the semiconductor device 21. The cooler 23 is formed using a metal material such as aluminum or copper. As illustrated in Fig. 4, the cooler 23 having a flow path 231 therein may be used. The flow path 231 is provided so as to overlap at least a portion of the semiconductor device 21 in a plan view so as to effectively cool the semiconductor device 21. The flow path 231 may be provided so as to include most of each semiconductor device 21 in a plan view.

[0044] A refrigerant 232 is supplied to the flow path 231 through an inlet pipe (not shown). The refrigerant 232 that has flowed through the flow path 231 is discharged to the outside of the cooler 23 through a discharge pipe (not shown). As the refrigerant 232, a refrigerant that changes phase, such as water or ammonia, or a refrigerant that does not change phase, such as an ethylene glycol-based refrigerant, can be used.

[0045] The cooler 23 is not limited to the configuration having the flow path 231 described above. A heat dissipation member such as a heat sink may be used as the cooler 23. The heat sink may be called a cooling plate. The heat dissipation member may include heat dissipation fins. When insulation is not required, a bonding material may be disposed between the semiconductor device 21 and the cooler 23. In the example shown in FIG. 4, a bonding material 24 is interposed between the semiconductor device 21 and the cooler 23. Solder, sintered Ag, or the like may be used as the bonding material 24. The semiconductor module 20 includes a bonding material 24 disposed between the semiconductor device 21 and the cooler 23. The semiconductor device 21 is fixed to the cooler 23 by bonding. When insulation is required, an electrically insulating member may be disposed between the semiconductor device 21 and the cooler 23. For example, a ceramic plate or a resin sheet may be used as the insulating member. A TIM such as a silicone gel may be used to increase thermal conductivity. TIM is an abbreviation for Thermal Interface Material.

[0046] The semiconductor module 20 may include a circuit board (not shown). The above-mentioned drive circuit is formed on the circuit board. The circuit board is disposed above the semiconductor device 21 in the Z direction. The semiconductor module 20 may include a cover that provides a case together with the housing 22 and the cooler 23. The cover is disposed on the opposite side of the semiconductor device 21 to the cooler 23. The cover may be disposed so as to cover the three semiconductor devices 21 as a whole.

[0047] <Semiconductor device> Fig. 5 is a top plan view showing an example of a semiconductor device. Fig. 5 is an enlarged view of one semiconductor device of Fig. 3. Fig. 5 also shows a part of a housing. Fig. 6 is a plan view showing a wiring pattern of a substrate in the semiconductor device shown in Fig. 5.

[0048] As described above, the semiconductor device 21 may provide one phase of upper and lower arm circuits 9. As illustrated in FIG. 5, the semiconductor device 21 may include a semiconductor element 30, a substrate 40, a clip 50, an external connection terminal 60, and a snubber circuit 70.

[0049] The semiconductor element 30 is formed by forming a vertical element on a semiconductor substrate made of silicon (Si) or a wide band gap semiconductor having a wider band gap than silicon. Examples of wide band gap semiconductors include silicon carbide (SiC), gallium nitride (GaN), gallium oxide (Ga2O3), and diamond. The semiconductor element 30 may be called a power element, a semiconductor chip, or the like.

[0050] The vertical element is configured to pass a main current in the thickness direction of the semiconductor element 30 (semiconductor substrate). The semiconductor element 30 is arranged so that the thickness direction is approximately parallel to the Z direction. The semiconductor element 30 has main electrodes on both sides in the thickness direction. The semiconductor element 30 of this embodiment is formed by forming an n-channel MOSFET 11 as a vertical element on a semiconductor substrate made of SiC. As shown in FIG. 4 and FIG. 5, the semiconductor element 30 has a drain electrode 31 on the lower surface facing the substrate 40 as a main electrode, and a source electrode 32 on the upper surface opposite to the lower surface.

[0051] When the MOSFET 11 is turned on, a current (main current) flows between the main electrodes, that is, between the drain electrode 31 and the source electrode 32. When the diode 12 is a parasitic diode, the source electrode 32 also serves as an anode electrode, and the drain electrode 31 also serves as a cathode electrode. The diode 12 may be formed on a chip separate from the MOSFET 11. The drain electrode 31 is a main electrode on the high potential side, and the source electrode 32 is a main electrode on the low potential side. The drain electrode 31 is formed on almost the entire lower surface. The source electrode 32 is formed on a part of the upper surface.

[0052] The semiconductor element 30 has a generally rectangular shape in plan view. The semiconductor element 30 has a pad 33, which is an electrode for signals, on the upper surface. The pad 33 is formed at a position on the upper surface different from the source electrode 32. The pad 33 includes at least a gate pad.

[0053] The multiple semiconductor elements 30 include a semiconductor element 30H constituting an upper arm 9H and a semiconductor element 30L constituting a lower arm 9L. The semiconductor element 30H may be referred to as an upper arm element. The semiconductor element 30L may be referred to as a lower arm element. For example, the semiconductor elements 30H and 30L may have a common configuration. In this embodiment, the semiconductor element 30H corresponds to a first element, and the semiconductor element 30L corresponds to a second element.

[0054] The semiconductor elements 30H and 30L are aligned in the Y direction. The pad 33 of the semiconductor element 30H is provided near the end on the P terminal 611 and N terminal 612 side in the Y direction. The pad 33 of the semiconductor element 30L is provided near the end on the O terminal 613 side in the Y direction. The pads 33 are provided near the outer ends, not the inner ends facing each other. The semiconductor elements 30H and 30L are arranged at approximately the same position as each other in the Z direction. The semiconductor elements 30H and 30L are arranged in the same direction as each other, with the drain electrodes 31 facing the substrate 40.

[0055] The number of each of the semiconductor elements 30H, 30L is not particularly limited. There may be one of each, or there may be more than one of each. In the example shown in Figs. 2, 3, and 5, the semiconductor element 30 includes four each of the semiconductor elements 30H, 30L. The four semiconductor elements 30H are connected in parallel to provide the MOSFET 11 of the upper arm 9H of one phase. The four semiconductor elements 30L are connected in parallel to provide the MOSFET 11 of the lower arm 9L of one phase. The four semiconductor elements 30H are aligned in the X direction. The four semiconductor elements 30L are aligned in the X direction.

[0056] The substrate 40 contains all of the semiconductor elements 30 (30H, 30L) in a plan view. The substrate 40 is disposed on the drain electrode 31 side of the semiconductor elements 30. As described below, the substrate 40 is electrically connected to the drain electrode 31 and provides a wiring function. The substrate 40 may be called a wiring board, a printed circuit board, or the like.

[0057] The substrate 40 has an insulating base material 41 and a conductor disposed on the insulating base material 41. The insulating base material 41 is formed using an electrically insulating material such as ceramic or resin. As shown in Fig. 4, the insulating base material 41 has one surface 41a which is a surface facing the semiconductor element 30, and a back surface 41b which is a surface opposite to the one surface 41a in the Z direction. The substrate 40 may be divided into units of the semiconductor device 21, or may be integrated into units of the semiconductor module 20.

[0058] The conductor is formed of a metal such as Cu or Al having good electrical and thermal conductivity. The conductor may have a plating film of Ni or Au on its surface. The conductor may be disposed only on one side 41a of the insulating base material 41, or may be disposed on both the one side 41a and the back side 41b. The conductor may be disposed inside the insulating base material 41. In other words, the substrate 40 may be a single-sided substrate, a double-sided substrate, or a multilayer substrate having three or more layers of conductors. The conductor may include a via conductor. The via conductor is formed by disposing a conductor such as a plating in a through hole (via) formed in an insulating layer constituting the insulating base material 41. The via conductor electrically connects conductors disposed on different layers.

[0059] The substrate 40 has a conductor 42 arranged on one surface 41a. The conductor 42 is patterned. The patterned conductor 42 provides wiring, that is, a circuit. The conductor 42 includes a P wiring 421, an N wiring 422, an O wiring 423, a relay wiring 424, and signal wirings 425 and 426. Each wiring is electrically separated by a predetermined interval (gap). The substrate 40 has a conductor 43 arranged on the back surface 41b.

[0060] The P wiring 421 is connected to the drain electrode 31 of the semiconductor element 30H. The P wiring 421 is connected to a P terminal 611, which will be described later. The P wiring 421 electrically connects the drain electrode 31 of the semiconductor element 30H and the P terminal 611. The P wiring 421 may be referred to as a positive wiring, a high potential power supply wiring, or the like. In this embodiment, the P wiring 421 corresponds to the first wiring.

[0061] The P wiring 421 has a base 421a and an extension 421b. The base 421a extends in the direction in which the semiconductor elements 30H are arranged, that is, in the X direction. The semiconductor element 30H is disposed on the base 421a. The base 421a and the drain electrode 31 of the semiconductor element 30H are connected via a bonding material.

[0062] The extension portion 421b is connected to the base portion 421a and extends from the base portion 421a in the Y direction. The extension portion 421b is connected to the vicinity of the center of the longitudinal direction of the base portion 421a. The extension portion 421b extends in a direction away from the semiconductor element 30H. The P wiring 421 is substantially T-shaped in plan view. The P wiring 421 is disposed substantially symmetrically with respect to the center line CL of the substrate 40 shown by the two-dot chain line in FIG. 6. The center line CL is an imaginary straight line that divides the substrate 40 in the X direction. The extension portion 421b of the substrate 40 has a terminal connection portion 421c at an end opposite to the connection end with the base portion 421a. The P terminal 611 is connected to the terminal connection portion 421c. A capacitor 71 of a snubber circuit 70 is connected to the extension portion 421b between the coupling end with the base portion 421a and the terminal connection portion 421c.

[0063] The N wiring 422 is connected to the N terminal 612. The source electrode 32 of the semiconductor element 30L is electrically connected to the N wiring 422 via the clip 50L. The N wiring 422 electrically connects the source electrode 32 of the semiconductor element 30L and the N terminal 612. The N wiring 422 may be referred to as a negative electrode wiring, a low potential power supply wiring, etc. The N wiring 422 corresponds to the second wiring.

[0064] The N wiring 422 has a base 422a and an extension 422b. The base 422a extends in the X direction. The base 422a is disposed next to the base 421a of the P wiring 421 in the Y direction. The base 421a is disposed between the base 421a of the P wiring 421 and the base 423a of the O wiring 423. The base 422a extends from near one end of the substrate 40 to near the other end in the X direction. The clip 50L is connected to the base 422a.

[0065] The extension portion 422b is connected to the base portion 422a and extends from the base portion 422a generally in the Y direction. The extension portion 422b extends in a direction away from the semiconductor element 30L. The N wiring 422 has two extension portions 422b. The extension portions 422b are connected to both ends of the base portion 422a in the X direction. The vicinity of each tip of the extension portions 422b extends toward the terminal connection portion 421c of the P wiring 421. The N wiring 422 is generally C-shaped in plan view. The N wiring 422 is disposed generally symmetrically with respect to the center line CL of the substrate 40.

[0066] Each of the extension portions 422b has a terminal connection portion 422c at an end opposite to the connection end with the base portion 422a. The two terminal connection portions 422c are arranged next to the terminal connection portion 421c. The two terminal connection portions 422c and one terminal connection portion 421c are aligned in the X direction. The two terminal connection portions 422c sandwich the terminal connection portion 421c. The N terminal 612 is connected to the terminal connection portion 422c. A resistor 72 of a snubber circuit 70 is connected to a portion of the extension portion 422b between the connection end with the base portion 422a and the terminal connection portion 422c. The resistor 72 is connected to a portion of the extension portion 422b extending in the Y direction.

[0067] The O wiring 423 is connected to the drain electrode 31 of the semiconductor element 30L. The O wiring 423 is connected to an O terminal 613, which will be described later. The source electrode 32 of the semiconductor element 30H is electrically connected to the O wiring 423 via a clip 50H. The O wiring 423 electrically connects the source electrode 32 of the semiconductor element 30H, the drain electrode 31 of the semiconductor element 30L, and the O terminal 613. The O wiring 423 may be referred to as an output wiring, etc.

[0068] The O wiring 423 has a base 423a and an extension 423b. The base 423a extends in the X direction. The base 423a is disposed next to the base 422a of the N wiring 422 in the Y direction. The base 423a extends from near one end of the substrate 40 to near the other end in the Y direction. The semiconductor element 30L is disposed on the base 423a. The base 423a and the drain electrode 31 of the semiconductor element 30L are connected via a bonding material. A clip 50H is connected to the base 423a.

[0069] The extension portion 423b is connected to the base portion 423a and extends from the base portion 423a in the Y direction. The extension portion 423b is connected to the vicinity of the center of the longitudinal direction of the base portion 423a. The extension portion 423b extends in a direction away from the semiconductor elements 30H, 30L. The O wiring 423 is substantially T-shaped in plan view. The O wiring 423 is arranged symmetrically with respect to the center line CL of the substrate 40. The extension portion 422b has a terminal connection portion 423c. The O terminal 613 is connected to the terminal connection portion 423c. In the Y direction, the length of the extension portion 423b is shorter than the length of the extension portion 421b. As an example, the entire area of ​​the extension portion 422b forms the terminal connection portion 423c.

[0070] The relay wiring 424, together with electronic components described below, provides the snubber circuit 70. The relay wiring 424, together with electronic components of the snubber circuit 70, electrically bridges the P wiring 421 and the N wiring 422. One or more relay wirings 424 may be provided in one current path of the snubber circuit 70. The relay wiring 424 illustrated in FIG. 5 and FIG. 6 has two relay wirings 424a and 424b in one current path. The relay wirings 424a and 424b are arranged between the two extension parts 422b and the extension part 421b. The substrate 40 has two sets of relay wirings 424a and 424b.

[0071] The relay wirings 424a and 424b are arranged in the X direction between the extension portion 421b of the P wiring 421 and the extension portion 422b of the N wiring 422. The relay wirings 424a and 424b are both substantially rectangular in plan view. The relay wiring 424a is disposed next to the extension portion 421b, and the relay wiring 424b is disposed next to the extension portion 422b. The relay wirings 424 are disposed symmetrically with respect to the center line CL of the substrate 40. The lengths of the relay wirings 424a and 424b in the Y direction are substantially equal to each other. The length of the relay wiring 424a in the X direction is longer than that of the relay wiring 424b. A capacitor 71 and a resistor 72 are connected to the relay wiring 424a. A resistor 72 is connected to the relay wiring 424b.

[0072] The signal wiring 425 electrically relays the pad 33 of the semiconductor element 30H and the corresponding signal terminal 62. The signal wiring 425 is connected to the pad 33 via a bonding wire 80. The signal wiring 425 is connected to the signal terminal 62 via a bonding wire 80. The signal wiring 425 extends in the X direction. The signal wiring 425 is disposed between the base 421a of the P wiring 421 and the relay wiring 424 in the Y direction. That is, the signal wiring 425 is disposed between the semiconductor element 30H and the snubber circuit 70. The signal wiring 425 is disposed between the extension portion 421b of the P wiring 421 and the extension portion 422b of the N wiring 422 in the X direction.

[0073] The signal wiring 425 is disposed between each of the two extension parts 422b and the extension part 421b. The signal wiring 425 is disposed on both sides of the extension part 421b in the X direction. The signal wiring 425 disposed on one side of the extension part 421b is connected to the pads 33 of the two semiconductor elements 30H. The signal wiring 425 disposed on the other side of the extension part 421b is connected to the pads 33 of the remaining two semiconductor elements 30H. The signal wiring 425 separated by the extension part 421b may be electrically connected via a bonding wire. When the substrate 40 is a printed circuit board, the signal wiring 425 separated by the extension part 421b may be electrically connected to the corresponding wiring by wiring inside the substrate (not shown). The number of the signal wiring 425 is not particularly limited. The substrate 40 has the number of signal wirings 425 according to the type of signal and the division structure. The signal wirings 425 are arranged symmetrically with respect to the center line CL of the substrate 40.

[0074] The signal wiring 426 electrically connects the pad 33 of the semiconductor element 30L to the corresponding signal terminal 62. The signal wiring 426 is connected to the pad 33 via a bonding wire 80. The signal wiring 426 is connected to the signal terminal 62 via a bonding wire 80. The signal wiring 426 extends in the X direction. The signal wiring 426 is disposed between the end of the substrate 40 and the base 423a of the O wiring 423 in the Y direction. The signal wiring 426 is disposed between the end of the substrate 40 and the extension portion 423b of the O wiring 423 in the X direction. The signal wiring 426 is disposed on both sides of the extension portion 423b in the X direction.

[0075] The signal wiring 426 arranged on one side of the extension portion 423b is connected to the pads 33 of the two semiconductor elements 30L. The signal wiring 426 arranged on the other side of the extension portion 423b is connected to the pads 33 of the remaining two semiconductor elements 30L. The signal wiring 426 divided by the extension portion 423b may be electrically connected via a bonding wire. The signal wiring 426 divided by the extension portion 423b may be electrically connected to each other by wiring inside the substrate (not shown). The signal terminals 62 corresponding to the divided signal wiring 426 may be integrally connected to each other. The number of signal wirings 426 is not particularly limited. The substrate 40 has the number of signal wirings 426 according to the type of signal and the division structure.

[0076] The clip 50 may be referred to as a bridging member, a relay member, a metal bridge, or the like. The clip 50 is a metal plate material whose base material is a metal with good conductivity, such as Cu or a Cu alloy. The clip 50 may be formed by punching a metal plate of a predetermined thickness and pressing it. The clip 50 may be formed by using a deformed material having a thickness that varies in parts. The clip 50 may be one in which a film is applied to the surface of the base material by surface treatment. The clip 50 may have a plating film of Ni, Au, or the like on the surface. The clip 50 may have a Ni plating film containing P formed on the base material. The NiP film is formed by an electroless plating method. Instead of Cu, Ag, Au, Al, Mg, or the like may be used as the base material. Instead of Ni or Au, Sn, Ag, or the like may be used as the film added to the base material.

[0077] The clips 50 include a clip 50H connected to the semiconductor element 30H and a clip 50L connected to the semiconductor element 30L. The clip 50H electrically connects the source electrode 32 of the semiconductor element 30H to the base 423a of the O wiring 423. The clips 50H extend in the Y direction. The clips 50H may be provided individually for the semiconductor element 30H, or may be provided collectively for a plurality of semiconductor elements 30H. As shown in FIG. 5 and other figures, one clip 50H may be provided for two semiconductor elements 30H. The semiconductor device 21 includes two clips 50H. Each of the clips 50H has a substantially Y-shape in plan view.

[0078] The clip 50L electrically connects the source electrode 32 of the semiconductor element 30L and the base 422a of the N wiring 422. The clip 50L extends in the Y direction. The clip 50L may be provided individually for the semiconductor element 30L, or may be provided collectively for a plurality of semiconductor elements 30L. In the example shown in FIG. 5 etc., the clip 50L is provided individually for the semiconductor element 30L. The semiconductor device 21 includes four clips 50L.

[0079] The external connection terminal 60 is a terminal for electrically connecting the semiconductor device 21 to an external device. The external connection terminal 60 is formed using a metal material with good conductivity such as copper. The external connection terminal 60 is, for example, a plate material. The external connection terminal 60 includes a main terminal 61 and a signal terminal 62. The main terminal 61 is a terminal electrically connected to a main electrode of the semiconductor element 30. The signal terminal 62 is a terminal electrically connected to a pad 33 of the semiconductor element 30. The main terminal 61 includes a P terminal 611 and an N terminal 612 which are power supply terminals, and an O terminal 613.

[0080] The P terminal 611 is an external connection terminal 60 electrically connected to the above-mentioned P line 7. The P terminal 611 is electrically connected to the positive terminal of the smoothing capacitor 5. The P terminal 611 may be referred to as a positive terminal, a high potential power supply terminal, or the like. The P terminal 611 is connected to a terminal connection portion 421c of the P wiring 421. The P terminal 611 is electrically connected to the drain electrode 31 of the semiconductor element 30H constituting the upper arm 9H via the P wiring 421.

[0081] As shown in FIG. 2 and other figures, the P terminal 611 has a connection portion 611a with an external device and a connection portion 611b with the substrate 40. The P terminal 611 generally extends in the Y direction. One of the ends of the P terminal 611 in the Y direction forms the connection portion 611a, and the other end forms the connection portion 611b. In the example shown in FIG. 2 and other figures, a part of the P terminal 611 is held by the frame 221 of the housing 22. The connection portion 611a of the P terminal 611 protrudes outward from the wall portion 221a of the frame 221, and the connection portion 611b protrudes inward from the wall portion 221a, that is, toward the partitioned area. The P terminal 611 has one each of the connection portions 611a and 611b. The connection portion 611b is connected to the terminal connection portion 421c of the P wiring 421. A capacitor device providing a smoothing capacitor 5 is connected to the connection portion 611a, for example, via a bus bar or the like.

[0082] The N terminal 612 is an external connection terminal 60 electrically connected to the above-mentioned N line 8. The N terminal 612 is electrically connected to the negative terminal of the smoothing capacitor 5. The N terminal 612 may be referred to as a negative terminal, a low potential power supply terminal, or the like. The N terminal 612 is connected to a terminal connection portion 422c of the N wiring 422. The N terminal 612 is electrically connected to the source electrode 32 of the semiconductor element 30L constituting the lower arm 9L via the N wiring 422 and the clip 50L.

[0083] The N terminal 612 has a connection portion 612a with an external device and a connection portion 612b with the board 40. The N terminal 612 generally extends in the Y direction. One of the ends of the N terminal 612 in the Y direction forms the connection portion 612a, and the other end forms the connection portion 612b. In this embodiment, as an example, a part of the N terminal 612 is held by the frame 221 of the housing 22. The connection portion 612a of the N terminal 612 protrudes outward from the wall portion 221a of the frame 221, and the connection portion 612b protrudes inward from the wall portion 221a. The N terminal 612 has one connection portion 612a and two connection portions 612b. One of the connection portions 612b is connected to one of the terminal connection portions 421c of the N wiring 422, and the other of the connection portions 612b is connected to the other of the terminal connection portions 421c. A smoothing capacitor 5 is connected to the connection portion 612a via, for example, a bus bar.

[0084] The O terminal 613 is an external connection terminal 60 electrically connected to the above-mentioned output line 10. The O terminal 613 is electrically connected to the winding 3a of the opposing phase of the motor generator 3. The O terminal 613 may be referred to as an output terminal, an AC terminal, or the like. The semiconductor module 20 includes, as the O terminals 613, a U-phase O terminal 613U, a V-phase O terminal 613V, and a W-phase O terminal 613W.

[0085] The O terminal 613 is connected to the terminal connection portion 423c of the O wiring 423. The O terminal 613 is electrically connected to the drain electrode 31 of the semiconductor element 30L constituting the lower arm 9L via the O wiring 423. The O terminal 613 is electrically connected to the source electrode 32 of the semiconductor element 30H constituting the upper arm 9H via the O wiring 423 and a clip 50H.

[0086] The O terminal 613 has a connection portion 613a with an external device and a connection portion 613b with the board 40. The O terminal 613 generally extends in the Y direction. One of the ends of the O terminal 613 in the Y direction forms the connection portion 613a, and the other end forms the connection portion 613b. In this embodiment, as an example, a part of the O terminal 613 is held by the frame 221 of the housing 22. The connection portion 613a of the O terminal 613 protrudes outward from the wall portion 221b of the frame 221, and the connection portion 613b protrudes inward from the wall portion 221b. The O terminal 613 has one each of the connection portions 613a and 613b. The connection portion 613b is connected to the terminal connection portion 423c of the O wiring 423. The motor generator 3 is connected to the connection portion 613a via, for example, a bus bar or the like.

[0087] The signal terminal 62 electrically connects the semiconductor element 30 to a circuit board (not shown). The signal terminal 62 is electrically connected to the pad 33 of the semiconductor element 30 via a connecting member such as a bonding wire 80. The number of signal terminals 62 is not particularly limited. The signal terminal 62 may include at least a terminal for applying a drive voltage to the gate electrode of the semiconductor element 30. The signal terminal 62 may include a terminal for detecting a source potential of the semiconductor element 30. The signal terminal 62 may include a terminal for detecting a drain potential of the semiconductor element 30. The signal terminal 62 may include a terminal for detecting a temperature of the semiconductor element 30.

[0088] The signal terminal 62 has a connection portion 621 with the circuit board and a connection portion 622 with the signal wirings 425 and 426. One of the ends of the signal terminal 62 in the extending direction forms the connection portion 621, and the other end forms the connection portion 622. In the example shown in FIG. 2 and the like, a part of the signal terminal 62 is held by the walls 221b and 221c of the frame body 221 and the partition walls 222a and 222b. The signal terminal 62 on the upper arm 9H side is held by the frame body 221 and the partition wall 222. For example, the U-phase signal terminal 62 is held by the wall portion 221c of the frame body 221. The V-phase signal terminal 62 is held by the partition wall 222a, and the W-phase signal terminal 62 is held by the partition wall 222b. The signal terminal 62 of the lower arm 9L is held by the wall portion 221b of the frame body 221.

[0089] The connection portion 621 of the signal terminal 62 protrudes upward from the upper end of the housing 22. The connection portion 622 protrudes inward from the housing 22. Each signal terminal 62 has a bent portion. The signal terminal 62 is, for example, substantially L-shaped. The connection portion 622 of the upper arm 9H is connected to the corresponding signal wiring 425 via a bonding wire 80. The connection portion 622 of the lower arm 9L is connected to the corresponding signal wiring 426 via a bonding wire 80. The connection portion 621 of the signal terminal 62 is connected to the above-mentioned circuit board.

[0090] The snubber circuit 70 includes at least a capacitor 71 as an electronic component. The snubber circuit 70 illustrated in FIG. 5 and the like is an RC snubber circuit. The snubber circuit 70 includes a plurality of resistors 72 in addition to the capacitor 71. The snubber circuit 70 provides the snubber circuit 13 shown in FIG. 1. The capacitor 71 provides the capacitor 131, and the resistor 72 provides the resistor 132. The snubber circuit 70 is connected in parallel to the upper and lower arm circuits 9 as described above. The snubber circuit 70 electrically bridges the P wiring 421 and the N wiring 422. The snubber circuit 70 includes the relay wiring 424 (424a, 424b) described above in addition to the capacitor 71 and the resistor 72.

[0091] The capacitor 71 is connected to the extension portion 421b of the P wiring 421 and the relay wiring 424a. The capacitor 71 electrically bridges the extension portion 421b and the relay wiring 424a. Some of the resistors 72 are connected to the relay wiring 424a and the relay wiring 424b. Some of the resistors 72 electrically bridge the relay wirings 424a and 424b. Another part of the resistors 72 is connected to the relay wiring 424b and the extension portion 422b of the N wiring 422. Another part of the resistors 72 electrically bridges the relay wiring 424b and the extension portion 422b.

[0092] <Connection structure between capacitor and substrate> Fig. 7 is a cross-sectional view taken along line VII-VII in Fig. 5. Fig. 7 shows an example of a connection structure between a capacitor constituting a snubber circuit and a substrate. Figs. 8, 9, and 10 each show another example of a connection structure between a capacitor and a substrate.

[0093] 7, the capacitor 71 may be mounted on the substrate 40 via a bonding material such as solder 73. The terminals of the capacitor 71 are bonded to a P wiring 421 and a relay wiring 424.

[0094] As shown in FIG. 8, the capacitor 71 may be sealed by a sealant 74. The sealant 74 may seal only the capacitor 71 among the components mounted on the substrate 40, or may seal the capacitor 71 and other components together. The sealant 74 is formed using an electrical insulating material such as a resin or gel. The sealant 74 has a higher thermal conductivity than air. A filler may be added to the sealant 74 to increase the thermal conductivity. The sealant 74 is a thermally conductive member that thermally connects the capacitor 71 and a portion of the substrate 40 excluding the joint portion with the capacitor 71.

[0095] As shown in FIG. 9, a dummy wiring 44 may be provided on the substrate 40, and heat from the capacitor 71 may be released to the substrate 40 side through the dummy wiring 44. The dummy wiring 44 is provided on the substrate 40 between an extension portion 421b of the P wiring 421 and a relay wiring 424 (424a). The dummy wiring 44 is electrically isolated from other conductors 42 arranged on one surface 41a of the insulating base material 41, and does not provide a wiring function. The bottom surface of the main body of the capacitor 71 is in contact with the dummy wiring 44. The dummy wiring 44 is a thermally conductive member that thermally connects the capacitor 71 to a portion of the substrate 40 excluding the joint portion with the capacitor 71.

[0096] 10, an adhesive 75 may be disposed between the capacitor 71 and the dummy wiring 44. The adhesive 75 may be a material having excellent thermal conductivity, such as a TIM. The adhesive 75 is a thermally conductive member that is disposed between the capacitor 71 and the dummy wiring 44 and thermally connects the capacitor 71 to a portion of the substrate 40 excluding the joint portion with the capacitor 71.

[0097] <Capacitor capacity> The required capacitance C of the capacitor that constitutes the snubber circuit depends on the parasitic inductance Ldc of the main circuit outside the capacitor. Therefore, we investigated whether it is possible to specify the required capacitance C using C / Ldc as a parameter.

[0098] FIG. 11 is a circuit diagram showing a verification model. In FIG. 11, the capacitance of the capacitor 131 of the snubber circuit 13 is indicated as C. In addition, in the main circuit connecting the smoothing capacitor 5 and the upper and lower arm circuits 9 (MOSFETs 11), the parasitic inductance of the portion connecting the smoothing capacitor 5 and the snubber circuit 13 is indicated as Ldc. The parasitic inductance Ldc is the parasitic inductance of the portion from the connection point of the snubber circuit 13 to the smoothing capacitor 5 in the main circuit. An inductive load 16 is connected to the midpoint of the upper and lower arm circuits 9. The inductive load 16 is sometimes referred to as an L load.

[0099] In the verification, the circuit constants were set as follows. In the main circuit, the parasitic inductance from the connection point of the snubber circuit 13 to the MOSFET 11 was set to 5 nH. The resistance value of resistor 132 in the snubber circuit 13 was set to 0.1 Ω. The resistance value of gate resistor 15 provided in the wiring connecting the gate driver (GD) 14 and the gate of the MOSFET 11 was set to 1 Ω. Furthermore, Vdd was set to 800 V, and the drain current Id flowing through the MOSFET 11 of the upper arm 9H was set to 400 A.

[0100] FIG. 12 is a diagram showing the verification results. In FIG. 12, the horizontal axis indicates C / Ldc, and the vertical axis indicates the ΔVds ratio. The ΔVds ratio is the ratio of the voltage Vds at each value of C / Ldc to the voltage Vds when C / Ldc is 0 (zero). The voltage Vds is the drain-source voltage. As shown in FIG. 12, the ΔVds ratio decreases with an increase in C / Ldc. The intersection of the two imaginary straight lines shown in FIG. 12 corresponds to the inflection point. The intersection is where C / Ldc=0.004. In the range where C / Ldc exceeds 0.004, the ΔVds ratio converges (saturates).

[0101] <Summary of the First Embodiment> According to the semiconductor device 21 and the semiconductor module 20 of this embodiment, the signal wiring 425 that electrically relays the signal terminal 62 and the semiconductor element 30 (30H) is provided by intentional wiring patterning of the substrate 40. In addition, the signal wiring 425 is arranged between the semiconductor element 30 and the snubber circuit 70 as illustrated in Figs. 5 and 6. The capacitor 71 that constitutes the snubber circuit 70 is separated from the semiconductor element 30 by the amount of the signal wiring 425. This makes it possible to reduce the effect of heat from the semiconductor element 30 on the capacitor 71 while enabling high-speed switching by providing the snubber circuit 70. The arrangement of the signal wiring 425, which is the conductor 42, makes it possible to suppress the heat reception of the capacitor 71.

[0102] Since the heat reception of capacitor 71 can be suppressed, the margin up to the upper limit temperature of heat resistance of capacitor 71 is increased. This allows the size of capacitor 71 to be reduced. Furthermore, in a configuration in which a plurality of capacitors 71 are provided and connected in parallel for heat resistance, the number of capacitors 71 can be reduced by suppressing heat reception. As a result, the size of semiconductor device 21 can be reduced. Furthermore, manufacturing costs can be reduced.

[0103] Fig. 13 shows the results of a simulation showing the temperature distribution caused by heat generation from semiconductor element 30. In Fig. 13, the temperature distribution is shown by the density of dots. The denser the dots, the higher the temperature, and the sparser the dots, the lower the temperature. It is clear from the simulation results shown in Fig. 13 that the temperature of capacitor 71 constituting snubber circuit 70 can be reduced by providing signal wiring 425 as described above.

[0104] The semiconductor device 21 may provide the upper and lower arm circuits 9 for one phase. The semiconductor device 21 includes a semiconductor element 30H as a first element and a semiconductor element 30L as a second element. The first main terminal is a P terminal 611, and the second main terminal is an N terminal 612. The first wiring is a P wiring 421, and the second wiring is an N wiring 422. The drain electrode 31 of the semiconductor element 30H is electrically connected to the P wiring 421, and the source electrode 32 of the semiconductor element 30L is electrically connected to the N wiring 422. In this configuration, the signal wiring 425 may be disposed between the semiconductor element 30H and the snubber circuit 70. In a configuration in which the snubber circuit 70 (13) is connected in parallel to the upper and lower arm circuits 9, the effect of heat of the semiconductor element 30 on the capacitor 71 can be reduced.

[0105] The number of capacitors 71 is not particularly limited. It may be one or more. In order to realize high-speed switching, it is effective to arrange multiple capacitors 71 near the semiconductor element 30 and increase the capacity. Increasing the capacity by using multiple capacitors 71 is also effective in suppressing a voltage increase caused by LC resonance between the inductance (L) of the wiring connecting the snubber circuit 70 and the smoothing capacitor 5 and the capacitor 71 (C).

[0106] In this manner, in a configuration in which the snubber circuit 70 includes a plurality of capacitors 71, the plurality of current paths may be arranged so that the impedances of the plurality of current paths including the capacitors 71 are equal to each other. This makes it possible to suppress current imbalance in the plurality of current paths, i.e., the plurality of capacitors 71. It is possible to suppress the current from flowing unevenly and causing the temperature of some of the capacitors 71 to rise. By suppressing the current imbalance, the margin of the capacitor 71 up to the upper limit temperature of its heat resistance is increased. This makes it possible to reduce the size of the capacitor 71. It is also possible to reduce the number of capacitors 71 connected in parallel. As a result, it is possible to reduce the size of the semiconductor device 21. It is also possible to reduce the manufacturing cost.

[0107] The impedances of the multiple current paths may be equal to each other by arranging the multiple current paths in line symmetry. The line symmetry is not limited to a line symmetry that is completely aligned on the left and right sides of the symmetry axis (for example, the center line CL). The relationship may be approximately line symmetric. For example, the mounting position of the capacitor 71 may be slightly shifted on the left and right sides. The wiring pattern may be completely aligned and symmetric, while the arrangement of the capacitor 71 and the resistor 72 may be the same on the left and right sides. For example, in the example shown in FIG. 5, the resistor 72 of one current path may be located next to the capacitor 71 of another current path. The relationship of approximately line symmetry makes it possible to make the impedances of the multiple current paths approximately equal to each other and suppress power imbalance. Although not line symmetric, multiple current paths may be provided so that the impedances are equal.

[0108] The semiconductor device 21 may have the configuration illustrated in Fig. 5. The semiconductor device 21 illustrated in Fig. 5 includes one P terminal 611, which is a first main terminal, and two N terminals 612, which are second main terminals. The P terminal 611 and the N terminal 612 are arranged side by side in the X direction, and the P terminal 611 is arranged between the N terminals 612. Furthermore, the semiconductor element 30H, which is the first element, and the semiconductor element 30L, which is the second element, are arranged side by side in the Y direction. The N wiring 422, which is the second wiring, is arranged to sandwich the P wiring 421, which is the first wiring, in the X direction. That is, the P wiring 421 is arranged between the two extension parts 422b of the N wiring 422.

[0109] 14, the semiconductor device 21 having such a configuration includes two current paths including a P terminal 611 (first main terminal), a P wiring 421 (first wiring), a capacitor 71, an N wiring 422 (second wiring), and an N terminal 612 (second main terminal). The two current paths are arranged symmetrically with respect to the center line CL of the substrate 40. Therefore, the above-mentioned effects can be achieved.

[0110] If the capacitance of the capacitor 131 (71) constituting the snubber circuit 13 (70) is C and the parasitic inductance of the main circuit portion connecting the snubber circuit 13 and the smoothing capacitor 5 is Ldc, then the capacitance C should be set so that C / Ldc>0.004. By setting the C value that satisfies the above relationship, the ΔVds ratio, that is, the surge voltage, can be effectively suppressed, as shown in FIG.

[0111] Capacitor 71 constituting snubber circuit 70 may be joined to at least one of P wiring 421 and N wiring 422. That is, capacitor 71 may be mounted on substrate 40. Compared with a configuration using a separate substrate for the snubber circuit, the thermal resistance between capacitor 71 and substrate 40 can be reduced. This allows heat from capacitor 71 to be effectively dissipated through substrate 40. Heat from capacitor 71 can be effectively dissipated to conductor 43 on the rear surface 41b side and further to cooler 23. This allows the size of capacitor 71 to be reduced. Also, in a configuration in which capacitors are connected in parallel, the number of capacitors 71 can be reduced.

[0112] The semiconductor device 21 may include a heat conductive member that thermally connects the capacitor 71 and a portion of the substrate 40 other than the joint portion with the capacitor 71. As the heat conductive member, for example, the sealing body 74 or the dummy wiring 44 may be included. The semiconductor device 21 may include an adhesive 75 interposed between the capacitor 71 and the dummy wiring 44. By including the heat conductive member, the heat of the capacitor 71 can be more effectively dissipated through the substrate 40. That is, the heat dissipation of the capacitor 71 can be improved. Thus, the size of the capacitor 71 can be reduced. Also, in a configuration in which the capacitors 71 are connected in parallel, the number of capacitors 71 can be reduced. By improving the heat dissipation of the capacitor 71, the switching speed can be further increased. The sealing body 74 and the dummy wiring 44 may be combined. The sealing body 74, the dummy wiring 44, and the adhesive 75 may be combined.

[0113] <Modification> In the configuration having one P terminal 611 and two N terminals 612, the current paths including the capacitors 71 of the snubber circuit 70 are arranged symmetrically with respect to a line, but the present invention is not limited to this. As shown in Fig. 15, in a configuration having two P terminals 611 and one N terminal 612, the current paths may be arranged symmetrically with respect to a line. In Fig. 15, the source electrode 32, the pad 33, the O terminal 613, the signal terminal 62, and the bonding wire 80 are omitted for convenience.

[0114] The P terminal 611 and the N terminal 612 are arranged side by side in the X direction, and the N terminal 612 is arranged between the P terminals 611. Furthermore, the semiconductor element 30H and the semiconductor element 30L are arranged side by side in the Y direction, with the semiconductor element 30L on the P terminal 611 and N terminal 612 side. The P wiring 421 is arranged to sandwich the N wiring 422 in the X direction.

[0115] The P wiring 421 has a substantially C-shape in plan. The P terminals 611 are connected to both ends of the C shape. Four semiconductor elements 30H are mounted on the base of the P wiring 421. The N wiring 422 has a substantially T-shape in plan. The N terminals 612 are connected to the tips of the extensions of the N wiring 422. In the X direction, the relay wiring 424 is disposed between both ends of the base of the N wiring 422 and the two extensions of the P wiring 421. A capacitor 71 constituting a snubber circuit 70 bridges the P wiring 421 and the relay wiring 424, and a resistor 72 bridges the relay wiring 424 and the N wiring 422. The O wiring 423 is divided into two. One of the O wirings 423 is disposed between the base of the P wiring 421 and the base of the N wiring 422 in the Y direction. The semiconductor element 30L is mounted on this O wiring 423. The other O wiring 423 is provided at the end of the substrate 40 opposite to the end at which the P terminal 611 and the N terminal 612 are provided.

[0116] The source electrode 32 of the semiconductor element 30H is connected to the O wiring 423 between the P wiring 421 and the N wiring 422 via a clip 50H. The source electrode 32 of the semiconductor element 30L is connected to the base of the N wiring 422 via a clip 50L. The two O wirings 423 are connected to each other via a clip 50M. The signal wiring 425 is disposed between the base of the P wiring 421 and the O wiring 423 provided at the end of the substrate in the Y direction. The signal wiring 426 is disposed between the O wiring 423 surrounded by the P wiring 421 and the base of the N wiring 422. The signal wiring 426 extends in the X direction to a position facing the snubber circuit 70.

[0117] 15, the signal wiring 426 is disposed between the semiconductor element 30L and the snubber circuit 70. Therefore, the effect of heat from the semiconductor element 30L on the capacitor 71 can be reduced. The semiconductor device 21 includes two current paths including the N terminal 612 (first main terminal), the N wiring 422 (first wiring), the capacitor 71, the P wiring 421 (second wiring), and the P terminal 611 (second main terminal). The two current paths are arranged symmetrically with respect to the center line CL of the substrate 40 as shown in FIG. 15. Therefore, as described above, the current imbalance in the multiple current paths, that is, the multiple capacitors 71, can be suppressed.

[0118] Although an example in which the semiconductor element 30H on the upper arm 9H side and the semiconductor element 30L on the lower arm 9L side are aligned in the Y direction has been shown, this is not limiting. As shown in FIG. 16, the semiconductor element 30H and the semiconductor element 30L may be aligned in the X direction. For convenience, the source electrode 32, the pad 33, the signal terminal 62, and the bonding wire 80 are omitted in FIG. 16. The semiconductor device 21 includes one P terminal 611 and one N terminal 612. The P terminal 611 and the N terminal 612 are aligned in the X direction. The semiconductor element 30H and the semiconductor element 30L are aligned in the X direction.

[0119] The P wiring 421 has a substantially L-shape in plan view. The semiconductor element 30H is mounted on the base of the P wiring 421. The extension of the P wiring 421 extends from the base in the Y direction. The P terminal 611 is connected to the vicinity of the tip of the extension of the P wiring 421. The O wiring 423 has a substantially L-shape in plan view. The semiconductor element 30L is mounted on the base of the O wiring 423. The extension of the O wiring 423 extends from the base in the Y direction in the same direction as the extension of the P wiring 421. The O terminal 613 is connected to the vicinity of the tip of the extension of the O wiring 423. The N wiring 422 extends in the Y direction. The N wiring 422 is aligned with the base of the O wiring 423 in the Y direction. The N wiring 422 is disposed between the extension of the P wiring 421 and the extension of the O wiring 423 in the X direction. An N terminal 612 is connected near the end of the N wiring 422.

[0120] The source electrode 32 of the semiconductor element 30H is connected to the base of the O wiring 423 via the clip 50H. The source electrode 32 of the semiconductor element 30L is connected to the N wiring 422 via the clip 50L. The relay wiring 424 is disposed between the extension of the P wiring 421 and the N wiring 422 in the X direction. The capacitor 71 constituting the snubber circuit 70 bridges the extension of the P wiring 421 and the relay wiring 424. The resistor 72 bridges the relay wiring 424 and the N wiring 422. The signal wiring 425 is disposed between the base of the P wiring 421 and the snubber circuit 70 in the Y direction. That is, the signal wiring 425 is disposed between the semiconductor element 30H and the snubber circuit 70. Therefore, the effect of heat of the semiconductor element 30H on the capacitor 71 can be reduced.

[0121] Although an example in which the snubber circuit 70 (13) is provided in parallel with the upper and lower arm circuits 9 has been shown, this is not limiting. As shown in Fig. 17, the snubber circuit 70 may be provided in parallel with the arm. For convenience, the source electrode 32, the pad 33, the signal terminal 62, and the bonding wire 80 are omitted in Fig. 17. The semiconductor device 21 shown in Fig. 17 includes one drain terminal 614 and one source terminal 615 as the main terminal 61. The drain terminal 614 and the source terminal 615 are arranged side by side in the X direction.

[0122] The substrate 40 includes a drain wiring 427, a source wiring 428, and a signal wiring 429 as the conductor 42. The drain wiring 427 has a substantially L-shape in plan view. The semiconductor element 30 is mounted on the base of the drain wiring 427. The extension of the drain wiring 427 extends in the Y direction from the base. A drain terminal 614 is connected to the vicinity of the tip of the extension of the drain wiring 427. The source wiring 428 extends in the Y direction. The source wiring 428 is aligned with the base of the drain wiring 427 in the Y direction. The source wiring 428 is aligned with the extension of the drain wiring 427 in the X direction. A source terminal 615 is connected to the vicinity of the end of the source wiring 428.

[0123] The source electrode 32 of the semiconductor element 30 is connected to the source wiring 428 via the clip 50. The relay wiring 424 is disposed between the extended portion of the drain wiring 427 and the source wiring 428 in the X direction. The capacitor 71 constituting the snubber circuit 70 bridges the extended portion of the drain wiring 427 and the relay wiring 424. The resistor 72 bridges the relay wiring 424 and the source wiring 428. The signal wiring 429 is disposed between the base portion of the drain wiring 427 and the snubber circuit 70 in the Y direction. That is, the signal wiring 429 is disposed between the semiconductor element 30 and the snubber circuit 70. Therefore, the effect of heat from the semiconductor element 30 on the capacitor 71 can be reduced.

[0124] Second embodiment This embodiment is a modification based on the preceding embodiment, and the description of the preceding embodiment can be used.

[0125] <Semiconductor element> FIG. 18 is a plan view showing an example of a semiconductor element 30 in the semiconductor device 21 according to this embodiment. FIG. 19 is a cross-sectional view taken along line XIX-XIX in FIG. 18. The semiconductor element 30 includes a drain electrode 31, a source electrode 32, and a pad 33, as in the configuration shown in the preceding embodiment. As shown in FIG. 18, the pad 33 includes at least a gate pad 33G. The pad 33 may include an anode pad 33A and a cathode pad 33C. The anode pad 33A and the cathode pad 33C are pads for temperature detection connected to a temperature-sensitive diode. The pad 33 may include a Kelvin source pad 33KS. The Kelvin source pad 33KS is a pad for detecting the potential of the source electrode 32. The semiconductor element 30 shown in FIG. 18 includes four pads 33. All the pads 33 may be electrically connected to the signal terminal 62, or some of the pads 33 including the gate pad 33G may be electrically connected to the signal terminal 62.

[0126] The semiconductor element 30 includes a semiconductor substrate 34. The semiconductor substrate 34 has, for example, a substantially rectangular shape in plan view. The semiconductor substrate 34 has an element region 341 and a peripheral region 342. The element region 341 is located inside the two-dot chain line shown in FIG. 18, and the peripheral region 342 is located outside the two-dot chain line. The element region 341 is a region in which a vertical element is formed. The MOSFET 11 is formed in the element region 341. The element region 341 may be referred to as an active region, a main region, a cell region, or the like. The peripheral region 342 surrounds the element region 341 in plan view. A voltage-resistant structure (not shown), such as a guard ring, is formed in the peripheral region 342.

[0127] The semiconductor substrate 34 has one surface 34a and a back surface 34b. The back surface 34b is the surface opposite to the one surface 34a in the thickness direction of the semiconductor substrate 34 (semiconductor element 30). The semiconductor element 30 includes an insulating film 35 disposed on the one surface 34a of the semiconductor substrate 34. The insulating film 35 is disposed on the outer periphery region 342. The insulating film 35 is also disposed on a part of the element region 341. The insulating film 35 may include, for example, polyimide. The insulating film 35 is sometimes referred to as a protective film.

[0128] The drain electrode 31 is disposed over almost the entire area of ​​the back surface 34b. The source electrode 32 is disposed mainly on the element region 341 on the one surface 34a. The pad 33 is disposed on the outer peripheral region 342 on the one surface 34a. The source electrode 32 has a multi-layer structure. The source electrode 32 has a lower layer 321 and an upper layer 322. The lower layer 321 may be formed using a material mainly composed of Al (aluminum), for example. The lower layer 321 may be formed using an Al alloy such as AlSi or AlSiCu. The lower layer 321 may be referred to as a base electrode, a wiring electrode, a base layer, or the like. The lower layer 321 is connected to the one surface 34a of the semiconductor substrate 34. The lower layer 321 is connected to the source and anode of the vertical element. The lower layer 321 extends from above the element region 341 to above the outer peripheral region 342, and the outer peripheral edge of the lower layer 321 is covered with an insulating film 35.

[0129] The upper layer 322 is laminated on the lower layer 321 for the purpose of improving the bonding strength with the solder and improving the wettability with the solder. The upper layer 322 may be formed, for example, using a material mainly composed of Ni (nickel). The upper layer 322 may be a Ni plating film containing P. The NiP film is formed by an electroless plating method. The upper layer 322 may be called an upper electrode, a connection electrode, an upper layer, a plating layer, etc. Note that an Au layer may be provided on the upper layer 322 during the manufacturing process. Au, for example, suppresses the oxidation of Ni to improve the wettability with the solder. Au diffuses into the solder during soldering, so it exists in the state before bonding and does not exist in the bonded state. The pad 33 has a similar configuration to the source electrode 32.

[0130] The semiconductor element 30 includes a signal wiring. At least a part of the signal wiring is disposed on the element region 341 of the one surface 34a. The signal wiring is disposed side by side with the source electrode 32 in a plan view. The signal wiring may be disposed on the same surface as the lower layer 321 of the source electrode 32. The signal wiring may include, for example, a gate wiring 36 shown by a dashed line in FIG. 18. The gate wiring 36 electrically connects the gate of the MOSFET 11 formed in the element region 341 to the gate pad 33G. The signal wiring may include, for example, an anode wiring and a cathode wiring. The anode wiring electrically connects the anode of the temperature sensing diode to the anode pad 33A. The cathode wiring electrically connects the cathode of the temperature sensing diode to the cathode pad 33C. The signal wiring may include the gate wiring 36, the anode wiring, and the cathode wiring. For convenience, only the gate wiring 36 is shown in FIG. 18.

[0131] The insulating film 35 has openings 351 and 352. The opening 351 defines a bonding region of the source electrode 32. The upper layer 322 is laminated on a portion of the lower layer 321 facing the opening 351. The upper layer 322 is disposed on the upper layer 322 within the opening 351. The outer contour of the opening 351, i.e., the bonding region (exposed portion) of the source electrode 32, approximately matches the outer contour of the element region 341 in a plan view in the plate thickness direction. The opening 352 defines a bonding region of the pad 33.

[0132] The insulating film 35 has an outer peripheral portion 353 arranged on the outer peripheral region 342 and an upper element portion 354 arranged on the element region 341. The upper element portion 354 is continuous with the outer peripheral portion 353. The upper element portion 354 is arranged on the surface 34a and covers the signal wiring arranged on the element region 341. The upper element portion 354 electrically separates the signal wiring from the source electrode 32. The upper element portion 354 extends along the signal wiring. In a plan view, the upper element portion 354 is sandwiched between the source electrode 32. The upper element portion 354 and the outer peripheral portion 353 provide the wall surface of the opening 351. The source electrode 32 is in contact with the side surface of the upper element portion 354. The upper end of the upper element portion 354 is located above the upper surface of the source electrode 32, that is, the surface exposed from the opening 351.

[0133] 18, the upper element part 354 covers the signal wiring including the gate wiring 36. The gate wiring 36 is disposed approximately at the center of the element region 341 in the X direction, and extends in the Y direction so as to approximately bisect the element region 341. The upper element part 354 extends along the gate wiring 36, and approximately bisects the source electrode 32. The source electrode 32 is divided (partitioned) by the upper element part 354. The upper element part 354 is connected to the outer periphery 353 at both ends in the Y direction.

[0134] The pattern of the signal wiring including the gate wiring 36, that is, the pattern of the element upper portion 354, is not limited to the example shown in Fig. 18. For example, it may be a cross shape in a plan view. The element upper portion 354 may be connected to the outer periphery portion 353 only on the pad 33 side.

[0135] <Semiconductor device and semiconductor module> The semiconductor device 21 of this embodiment includes at least the semiconductor element 30, the metal plate, and the solder illustrated in FIG. 18 and FIG. 19. The metal plate is soldered to the main electrode. The metal plate may be the clip 50 described in the preceding embodiment, or may be a member other than the clip 50, such as a lead. The semiconductor device 21 may include a substrate having wiring. The semiconductor element 30 is mounted on the substrate. The clip 50, which is a metal plate, is joined to the wiring as well as the main electrode. The semiconductor device 21 may include a sintered member. The semiconductor element 30 is connected to the metal member via the sintered member. The metal member may be the wiring of the substrate, or may be a metal plate such as a heat sink. The semiconductor device 21 may include a sealer that seals the semiconductor element 30 and the metal plate. A gel may be used as the sealer.

[0136] FIG. 20 shows an example of the semiconductor device 21 and the semiconductor module 20. FIG. 20 is a partial cross-sectional view showing the periphery of the semiconductor element 30L and the clip 50L in the semiconductor device 21 and the semiconductor module 20. The basic configuration of the semiconductor device 21 and the semiconductor module 20 is the same as that described in the preceding embodiment. The semiconductor module 20 includes the semiconductor device 21, the housing 22, and the cooler 23. The semiconductor device 21 includes the semiconductor element 30, the substrate 40, the clip 50, and the external connection terminal 60. The semiconductor device 21 may include a snubber circuit 70, as in the preceding embodiment. The semiconductor device 21 includes a solder 81 and a sintered member 82 as bonding materials. The semiconductor device 21 includes a sealing body 90.

[0137] The clip 50L (50) corresponds to a metal plate material. The clip 50L has a joint 51 with the source electrode 32 of the semiconductor element 30L and a joint 52 with the N wiring 422. In this embodiment, the joint 51 corresponds to a first joint, and the joint 52 corresponds to a second joint. The solder 81 is interposed between the source electrode 32 and the joint 51. The solder 81 joins the source electrode 32 and the clip 50L. The solder 81 is interposed between the N wiring 422 and the joint 52. The solder 81 joins the N wiring 422 and the clip 50L. The clip 50L has a connecting portion 53. The connecting portion 53 is connected to the connecting portions 51 and 52. The connecting portion 53 connects the connecting portions 51 and 52 to form a continuous integral body. The connecting portion 53 may connect the connecting portions 51 connected to different semiconductor elements 30.

[0138] The connecting portion 53 has inclined portions 531 and 532 and an intermediate portion 533. The inclined portion 531 rises obliquely upward from the joint portion 51. The inclined portion 531 has an inclination such that the farther the inclined portion 531 is from the joint portion 51 in the Y direction, the farther the inclined portion 531 is from the joint portion 51 (semiconductor element 30L) in the Z direction. The inclined portion 532 rises obliquely upward from the joint portion 52. The inclined portion 532 has an inclination such that the farther the inclined portion 532 is from the joint portion 52 in the Y direction, the farther the inclined portion 532 is from the joint portion 52 (substrate 40) in the Z direction. The inclined portions 531 and 532 are inclined with respect to the Y direction in which the joint portions 51 and 52 are arranged. The intermediate portion 533 connects the inclined portions 531 and 532. The intermediate portion 533 may be approximately parallel to the joint portions 51 and 52 in the mounted state.

[0139] Although not shown in the figures, clip 50H has the same configuration as clip 50L. Clip 50H has a joint 51 with source electrode 32 of semiconductor element 30H, a joint 52 with O wiring 423, and a coupling portion 53. Solder 81 is interposed between source electrode 32 and joint 51. Solder 81 joins source electrode 32 to clip 50H. Solder 81 is interposed between O 423 and joint 52. Solder 81 joins O wiring 423 to clip 50H.

[0140] The sintered member 82 is interposed between the drain electrode 31 of the semiconductor element 30L and the O wiring 423. The sintered member 82 bonds the drain electrode 31 and the O wiring 423. Although not shown, the sintered member 82 is interposed between the drain electrode 31 and the P wiring 421 of the semiconductor element 30H. The sintered member 82 bonds the drain electrode 31 and the P wiring 421. The sintered member 82 is disposed below the semiconductor element 30, and the solder 81 is disposed on the semiconductor element 30.

[0141] The sintered member 82 is made of Ag or Cu. The sintered member 82 is a sintered body made of Ag particles or Cu particles. The sintered member 82 can be bonded at a lower temperature than solder. Ideally, the sintered member 82 is arranged so as to almost coincide with the bonding surface of the drain electrode 31 in a plan view. The sintered member 82 is provided, for example, as a sintered sheet. The sintered sheet is sometimes called a sintered film. The sintered sheet is smaller than the drain electrode 31 in a plan view before pressure is applied. The sintered sheet is placed between the drain electrode 31 and the target wiring to form a laminate, and the laminate is pressed from the semiconductor element 30 side while being heated. As a result, the sintered sheet is expanded between the opposing surfaces of the drain electrode 31 and the wiring to reduce its thickness and is sintered to form the sintered member 82.

[0142] The sealing body 90 seals the elements of the semiconductor device 21. The sealing body 90 integrally seals a part of each of the semiconductor element 30, the substrate 40, the clip 50, and the external connection terminal 60. The sealing body 90 also seals the bonding wire 80 that electrically connects the pad 33 of the semiconductor element 30 and the signal terminal 62. In the example shown in FIG. 20, a gel 91 is used as the sealing body 90. Potting resin may be used instead of the gel 91. The sealing body 90 fills a space that includes the housing 22 and the cooler 23. The sealing body 90 may be a resin molded body. The sealing body 90 may be provided in the semiconductor device 21 or in the semiconductor module 20.

[0143] <Clip> 21, 22, 23, and 24 show an example of the clip 50 applied to the semiconductor element 30 shown in FIG. 18 and FIG. 19. FIG. 21 and FIG. 22 show an example of the clip 50L. FIG. 22 is a cross-sectional view taken along the line XXII-XXII in FIG. 21. FIG. 23 and FIG. 24 show an example of the clip 50H. FIG. 21, FIG. 22, and FIG. 23 show a connection structure between the clip 50 and the semiconductor element 30. The clip 50 shown in FIG. 21 to FIG. 24 has the same configuration as that shown in the preceding embodiment.

[0144] As shown in FIG. 21 and FIG. 22, the clip 50L is connected to a single semiconductor element 30L. The joint 51 with the source electrode 32 is arranged to avoid the signal line including the gate wiring 36 arranged on the element region 341. In a plan view, the joint 51 is arranged not to overlap with the signal line over the entire length of the signal line. As exemplified in FIG. 21 and FIG. 22, the joint 51 may be arranged to avoid the element upper part 354 covering the signal line. By avoiding overlap with the element upper part 354, overlap with the signal line covered by the element upper part 354 is also avoided. The joint 51 may be arranged to overlap with the element upper part 354 but not with the signal line in a plan view.

[0145] The clip 50L has two joints 51 corresponding to the two divided source electrodes 32. The joints 51 are branched into the same number as the source electrodes 32. Between the opposing side surfaces of the adjacent joints 51, an opposing space 54 is formed as shown by a dashed line in FIG. 22. The opposing space 54 is sometimes referred to as an opposing region. In a plan view, one of the joints 51 overlaps one of the source electrodes 32, and the other of the joints 51 overlaps the other of the source electrodes 32. One of the joints 51 is solder-joined to one of the source electrodes 32, and the other of the joints 51 is solder-joined to the other of the source electrodes 32. The opposing space 54 is located above the signal lines and the upper part 354 of the element. In a plan view, each of the joints 51 does not overlap the signal lines and the upper part 354 of the element.

[0146] The clip 50L extends in the Y direction. The joints 51 and 52 are aligned in the Y direction. The two joints 51 are aligned in the X direction. Each joint 51 has a generally rectangular shape in plan view with the Y direction as the longitudinal direction and the X direction as the lateral direction. In a plan view, the area of ​​each joint 51 is smaller than the area of ​​the corresponding source electrode 32. The clip 50L has a connecting portion 53. As illustrated in FIG. 20, the connecting portion 53 has inclined portions 531 and 532 and an intermediate portion 533.

[0147] As shown in Fig. 23, the clip 50H is connected to two semiconductor elements 30H. The joints 51 with the source electrodes 32 are arranged to avoid the signal lines including the gate wiring 36 arranged on the element region 341. In a plan view, the joints 51 are arranged so as not to overlap with the signal lines over the entire length of the signal lines. As shown in Fig. 23, the joints 51 are preferably arranged to avoid the upper part 354 of the element that covers the signal lines.

[0148] The clip 50H has four joints 51 corresponding to the two divided source electrodes 32 of each of the two semiconductor elements 30H. Two of the joints 51 are connected to one of the semiconductor elements 30H, and the other two joints 51 are connected to the other of the semiconductor elements 30H. An opposing space 54 is formed between the side surfaces of the joints 51 that are connected to the common semiconductor element 30. The distance between the joints 51 connected to the different semiconductor elements 30H, that is, the distance between the second and third joints 51 in the X direction, is longer than the opposing space 54 in the X direction. In a plan view, each joint 51 overlaps the corresponding source electrode 32. The joints 51 are solder-joined to the corresponding source electrode 32. The opposing space 54 is located above the signal line and the upper part 354 of the element. In a plan view, each of the joints 51 does not overlap the signal line and the upper part 354 of the element.

[0149] The clip 50H extends in the Y direction. The joints 51 and 52 are aligned in the Y direction. The four joints 51 are aligned in the X direction. Each joint 51 has a generally rectangular shape in plan view with the Y direction as the longitudinal direction and the X direction as the lateral direction. Each joint 51 is smaller than the area of ​​the corresponding source electrode 32 in plan view. The clip 50H has a connecting portion 53. The connecting portion 53 connects the joints 51 and 52. The connecting portion 53 connects the joints 51 connected to different semiconductor elements 30H. The connecting portion 53 has inclined portions 531 and 532 and an intermediate portion 533, similar to the clip 50L.

[0150] The intermediate portion 533 includes a first intermediate portion 533a and a second intermediate portion 533b. The first intermediate portion 533a extends in the arrangement direction of the joint portions 51, that is, in the X direction. The first intermediate portion 533a connects the four joint portions 51 via the inclined portion 531. In FIG. 24, the inclined portion 531 is provided for each joint portion 51, but a configuration in which a plurality of joint portions 51 are connected to a common inclined portion 531 may also be used. The second intermediate portion 533b extends in the arrangement direction of the joint portions 51 and 52, that is, in the Y direction. The second intermediate portion 533b connects the joint portion 52 and the first intermediate portion 533a. The clip 50H has a tapered portion 534 at the end of the first intermediate portion 533a on the joint portion 52 side. The tapered portion 534 has an inclination such that the length of the first intermediate portion 533a in the X direction increases as the tapered portion 534 moves away from the joint portion 52 in the Y direction. The tapered portion 534 is inclined with respect to the Y direction, which is the arrangement direction of the joint portions 51, 52.

[0151] The clip 50 is not limited to the above-mentioned shape. Various shapes can be adopted. For example, as shown in FIG. 25, a tapered portion 535 may be added to the configuration shown in FIG. 24. The tapered portion 535 is provided at the end of the first intermediate portion 533a on the joint 51 side. The clip 50H has a shape in which the end of the first intermediate portion 533a on the joint 51 side is cut out at a position between the second joint 51 and the third joint 51. The cut-out space is approximately triangular in plan view, and the length in the X direction increases as it moves away from the joint 52 in the Y direction. The tapered portion 535 is an end surface that defines the cut-out space. The tapered portion 535 is inclined with respect to the Y direction, which is the arrangement direction of the joints 51 and 52.

[0152] 26, clip 50L may have a tapered portion 536. Tapered portion 534 has an inclination such that the length of connecting portion 53 in the X direction increases the farther away from joint portion 52 in the Y direction. Tapered portion 536 is inclined with respect to the Y direction, which is the arrangement direction of joint portions 51, 52.

[0153] As shown in Fig. 27, clip 50L may have inclined portions 531 and 532, but may not have intermediate portion 533. Inclined portion 531 is connected to inclined portion 532 without intermediate portion 533. Since intermediate portion 533 is not included, inclination of inclined portions 531 and 532 is gentle. Clip 50H may have a similar structure. Inclined portions 531 and 532 are inclined with respect to the Y direction in which joint portions 51 and 52 are arranged.

[0154] As shown in FIG. 28, clip 50L may have a through hole 55. Through hole 55 penetrates connecting portion 53 in the plate thickness direction. The planar shape of through hole 55 is not particularly limited. It may be a circle as shown in the figure, or a polygonal shape such as a triangle or a rectangle. It may be a planar cross shape or a planar L-shape. It may be an oblong hole that is long in one direction. The number of through holes 55 is not particularly limited. It may be one or more. The position of through hole 55 is also not particularly limited. Clip 50H may have a similar structure.

[0155] As shown in Figs. 29 and 30, the clip 50L may have a bridging portion 56. Fig. 30 is a cross-sectional view taken along line XXX-XXX in Fig. 29. The bridging portion 56 is connected to a plurality of joints 51 connected to a common semiconductor element 30L. The bridging portion 56 bridges adjacent joints 51 at a position farther away from the semiconductor element 30L than the joints 51. The facing space 54 is formed directly below the bridging portion 56. The bridging portion 56 is provided so as to overlap the facing space 54 in a plan view. The clip 50H may have a similar structure.

[0156] As shown in Fig. 31, the clip 50H may be substantially L-shaped in plan view. The clip 50H has a connecting portion 57 and an extending portion 58. The connecting portion 57 is connected to the source electrodes 32 of the two semiconductor elements 30H and electrically connects the source electrodes 32 to each other. The extending portion 58 is continuous with the connecting portion 57 and electrically connects the source electrodes 32 to the O wiring 423. In Fig. 31, the connecting portion 57 extends in the X direction in plan view and is disposed so as to overlap with the source electrodes 32. The extending portion 58 extends in the Y direction.

[0157] For convenience, clip 50H is shown in a simplified form in Fig. 31. Although omitted in Fig. 31, connecting portion 57 includes joint portion 51. Joint portion 51 branches in accordance with the divided structure of source electrode 32. Extension portion 58 includes joint portion 52. Connecting portion 57 and extension portion 58 each include connecting portion 53. Connecting portion 57 may include bridge portion 56. Connecting portion 53 may have a through hole 55. The same applies to Figs. 32 to 37 shown below.

[0158] As shown in Fig. 32, the clip 50H may be substantially U-shaped in plan view. As in Fig. 31, the connecting portion 57 extends in the X direction and electrically connects the source electrodes 32 of the two semiconductor elements 30H. The clip 50H has two extension portions 58. The two extension portions 58 are connected to the O wiring 423. One of the extension portions 58 is connected to one of the ends of the connecting portion 57, and the other of the extension portions 58 is connected to the other of the ends of the connecting portion 57.

[0159] As shown in Fig. 33, clip 50H may be substantially Y-shaped in plan view. Linking portion 57 of clip 50H is substantially U-shaped in plan view. One end of linking portion 57 is connected to one of semiconductor elements 30H, and the other end is connected to the other one of semiconductor elements 30H. Extension portion 58 is continuous with linking portion 57 at a position offset toward one of semiconductor elements 30H in the X direction. Extension portion 58 extends in the Y direction and is connected to O wiring 423.

[0160] As shown in Fig. 34, clip 50H may be substantially H-shaped in plan. As in Fig. 34, connecting portion 57 has a substantially U-shaped plan. Clip 50H has two extension portions 58. One of extension portions 58 is connected to connecting portion 57 at a position offset toward one side of semiconductor element 30H. The other extension portion 58 is connected to connecting portion 57 at a position offset toward the other side of semiconductor element 30H. Both extension portions 58 extend in the Y direction and are connected to O wiring 423.

[0161] As shown in Fig. 35, the clip 50H may be substantially T-shaped. As in Fig. 31, the connecting portion 57 extends in the X direction and electrically connects the source electrodes 32 of the two semiconductor elements 30H. The extension portion 58 is continuous with the connecting portion 57 near the center in the X direction. The extension portion 58 extends in the Y direction and is connected to the O wiring 423.

[0162] In Figs. 31 to 35, two clips 50H are used for four semiconductor elements 30H. Alternatively, as shown in Fig. 36, one clip 50H may be used for four semiconductor elements 30H. As in Fig. 31, the connecting portion 57 extends in the X direction and electrically connects the source electrodes 32 of the four semiconductor elements 30H. The clip 50H has four extension portions 58. The extension portions 58 are arranged in parallel in the X direction with an interval corresponding to the semiconductor elements 30H. All of the extension portions 58 extend in the Y direction and are connected to the O wiring 423.

[0163] A clip 50H shown in FIG. 37 may be used. The connecting portion 57 has a structure in which two planar substantially U-shaped portions are connected together. The connecting portion 57 electrically connects the source electrodes 32 of the four semiconductor elements 30H. The clip 50H has four extension portions 58. The extension portions 58 are arranged in parallel in the X direction with an interval corresponding to the semiconductor elements 30H. All of the extension portions 58 extend in the Y direction and are connected to the O wiring 423.

[0164] As shown in FIG. 38, a clip 50 may be provided for each semiconductor element 30. In other words, one clip 50 may be used for each semiconductor element 30. Clips 50H and 50L have a common structure. Clip 50 is generally L-shaped in plan view. Clip 50 has widened portion 59a, which is a wide portion having a length in the X-direction in plan view, and narrowed portion 59b, which is a narrow portion. Widened portion 59a includes joint portion 51 and a portion of connecting portion 53. Narrowed portion 59b includes joint portion 52 and a portion of connecting portion 53.

[0165] In this way, the clips 50H and 50L have a common structure of a substantially L-shape, and the clip 50L is arranged rotated 180 degrees with respect to the clip 50H. Therefore, even if the number of semiconductor elements 30H and 30L is the same, the clips 50H and 50L can be arranged so as to interlock with each other. This allows the size in the X direction to be reduced. Note that "interlocking with each other" refers to a positional relationship in which at least a part of the narrowed portion 59b of the clip 50H faces the widened portion 59a of the clip 50L in the Y direction, and at least a part of the narrowed portion 59b of the clip 50L faces the widened portion 59a of the clip 50H in the Y direction.

[0166] For convenience, the clip 50 is also shown in a simplified form in Fig. 38. Although not shown, the joint portion 51 branches in accordance with the divided structure of the source electrode 32. The clip 50 may have a bridge portion 56 or a through hole 55. The same applies to Figs. 39 and 40 shown below.

[0167] As shown in FIG. 39, the width of the narrowed portion 59b may be increased while shifting the position in the X direction. The clip 50 has an expanded portion 59a including the joint 51 and a narrowed portion 59b including the joint 52. The narrowed portion 59b is shifted in the X direction relative to the expanded portion 59a and connected to the joint 52. Due to this shift, the connecting portion 53 has a step. The width of the narrowed portion 59b is wider than that of the example shown in FIG. 38. The joint 52 is not pulled out straight from the joint 51, but is pulled out shifted in the X direction. The clip 50L has a common structure with the clip 50H, and is arranged rotated 180 degrees relative to the clip 50H. Therefore, even if the width of the narrowed portion 59b is increased, the clips 50H and 50L can be arranged so as to mesh with each other. Therefore, the size in the X direction can be reduced.

[0168] As shown in FIG. 40, the narrowed portion 59b may be extended in an oblique direction. The clip 50 has an expanded portion 59a including the joint 51 and a narrowed portion 59b including the joint 52. The narrowed portion 59b extends from the expanded portion 59a in a direction inclined with respect to the X-direction and the Y-direction. The width of the narrowed portion 59b is wider than that of the example shown in FIG. 38. The joint 52 is not pulled out straight from the joint 51 but is pulled out in an oblique direction. The clip 50L has a common structure with the clip 50H and is arranged at a 180-degree rotation with respect to the clip 50H. Therefore, even if the narrowed portion 59b is made wider, the clips 50H and 50L can be arranged so as to mesh with each other. Therefore, the size in the X-direction can be reduced.

[0169] <Summary of the second embodiment> According to this embodiment, the semiconductor device 21 includes a semiconductor element 30, a clip 50 which is a metal plate, and a solder 81 which joins the semiconductor element 30 and the clip 50. As described above, the semiconductor element 30 has a signal line including the source electrode 32 and the gate wiring 36 which are arranged on one surface of the semiconductor substrate 34 and on the element region 341. The semiconductor element 30 also has an element upper portion 354 of an insulating film 35 which covers the signal line. As shown in FIG. 22 and other figures, the joint portion 51 of the clip 50 is provided so as to avoid the signal line. This makes it possible to prevent the solder 81 from flowing into the scratches on the element upper portion 354 which are generated during the manufacturing process. This makes it possible to prevent leakage of the signal line, for example, gate leakage. It is possible to prevent leakage current (leakage current) from occurring in the signal line.

[0170] The clip 50 may have a plurality of joints 51 for the common semiconductor element 30. This can prevent leakage of the signal line while securing the joint area. In particular, it is preferable that the joint 51 for the common semiconductor element 30 is branched into a plurality of parts. By adopting the joint 51 having a structure with a plurality of branches, it is easy to secure the joint area while avoiding the signal line. Due to the branched structure, the facing space 54 between the adjacent joints 51 functions as an inlet for injection of the sealing material when forming the sealing body 90 and an outlet for air. Therefore, it is possible to prevent the sealing body 90 from being left unfilled and the formation of air pockets in the sealing body 90.

[0171] The clip 50 may have a bridge portion 56 that is connected to the adjacent joint portion 51 at a position farther away from the joint portion 51 on the one surface 34a of the semiconductor substrate 34. By having the bridge portion 56, the heat dissipation area and the current passing area can be increased. As shown in Fig. 30, the bridge portion 56 is located above the joint portion 51, so that the solder 81 can be prevented from spreading over the surface of the bridge portion 56 and flowing onto the upper portion 354 of the element.

[0172] The clip 50 may have a plurality of joints 51 and 52. In other words, it is preferable to have a total of three or more joints 51, 52. The clip 50 is supported at three or more points, and the position of the clip 50 is stable. This makes it possible to suppress misalignment, including tilt, of the clip 50. The joints 52 may be connected to the wiring of the substrate 40 on which the semiconductor element 30 is mounted. For example, the configuration can be simplified. Since the semiconductor element 30 and the clip 50 are connected to the substrate 40, it is easy to determine the positions of the semiconductor element 30, the wiring of the substrate 40, and the clip 50.

[0173] The drain electrode 31 of the semiconductor element 30 may be connected to the metal member to be connected via the sintered member 82. That is, the sintered member 82 may be disposed directly below the drain electrode 31 of the semiconductor element 30, and the solder 81 may be disposed directly above the source electrode 32 of the semiconductor element 30. By using the sintered member 82, the thermal resistance of the path that mainly contributes to heat dissipation can be reduced. When applying pressure to form the sintered member 82, there is a risk that the upper part 354 of the element of the insulating film 35 may be scratched by the pressing device. However, even if a scratch is caused, the solder 81 can be prevented from flowing into the scratch of the upper part 354 of the element by arranging the joint 51 to avoid the signal line.

[0174] The semiconductor element 30 having the pad 33, the clip 50, a part of the signal terminal 62, and the bonding wire 80 connecting the pad 33 and the signal terminal 62 may be integrally sealed with the gel 91. In such a sealing structure, a through hole 55 may be provided in the connecting portion 53 of the clip 50. The gel 91 located above the clip 50 and the gel 91 located below the clip 50 are continuously connected through the gel 91 arranged in the through hole 55. Even if the vibration of the moving body is transmitted to the gel 91, the vibration of the gel 91 is restricted by the through hole 55 (clip 50). The gel 91 is fixed by the through hole 55. Therefore, it is possible to suppress the bonding wire 80 from being broken due to the vibration of the gel 91.

[0175] The semiconductor element 30 and the clip 50 may be integrally sealed by a sealant 90 such as a gel 91 or a potting resin. In such a sealing structure, the connecting portion 53 of the clip 50 may be provided with a shape that is inclined with respect to the arrangement direction of the joint portions 51 and 52. As shown in FIG. 20 and FIG. 27, the inclined portions 531 and 532 are inclined with respect to the Y direction, which is the arrangement direction of the joint portions 51 and 52. As shown in FIG. 23, FIG. 25, and FIG. 26, the tapered portions 534, 535, and 536 are all inclined with respect to the Y direction, which is the arrangement direction of the joint portions 51 and 52. This makes it difficult for the connecting portion 53 to hinder the flow of the sealant along the clip 50 when the sealant 90 is filled to form the sealant 90. The sealant flows along the inclination. This can assist the flowability of the sealant. It is possible to suppress the sealant 90 from being left unfilled and the formation of air pockets in the sealant 90.

[0176] The configuration described in this embodiment can be combined with the configuration described in the preceding embodiment.

[0177] Third embodiment This embodiment is a modification based on the preceding embodiment, and the description of the preceding embodiment can be used.

[0178] <Semiconductor device> The semiconductor device 21 of this embodiment includes at least a resin housing, a substrate having wiring, a plurality of semiconductor elements joined to the wiring and connected in parallel, and a signal terminal. The signal terminal includes a branch terminal. The branch terminal has a single first connection portion connected to an external device, a plurality of second connection portions electrically connected to pads of the semiconductor elements, and a linking portion connecting the first connection portion and the second connection portion.

[0179] FIG. 41 is a diagram showing an example of the semiconductor device 21 and the semiconductor module 20 according to the present embodiment. FIG. 41 shows a part of the semiconductor device 21. FIG. 42 is an enlarged perspective view of the periphery of the O terminal 613 of the semiconductor device 21 shown in FIG. 41. In FIG. 41 and FIG. 42, the housing 22 is shown in a see-through manner. The basic configuration of the semiconductor device 21 and the semiconductor module 20 shown in FIG. 41 and FIG. 42 is the same as the configuration described in the preceding embodiment. The semiconductor module 20 includes the semiconductor device 21, the housing 22, and the cooler 23. The semiconductor device 21 includes a semiconductor element 30, a substrate 40, a clip 50, and an external connection terminal 60. The semiconductor device 21 may include a snubber circuit 70, as in the preceding embodiment. The semiconductor device 21 may include a sealing body 90.

[0180] As shown in FIG. 5, the semiconductor device 21 of this embodiment includes a plurality of semiconductor elements 30H and a plurality of semiconductor elements 30L. The configuration of the semiconductor elements 30 is the same as that shown in, for example, FIGS. 18 and 19. The semiconductor elements 30H are aligned in the X direction. The drain electrodes 31 of the semiconductor elements 30H are joined to the P wiring 421 of the substrate 40. The semiconductor elements 30L are aligned in the X direction. The drain electrodes 31 of the semiconductor elements 30L are joined to the O wiring 423. The semiconductor elements 30H and 30L are aligned in the Y direction.

[0181] The pads 33 of the semiconductor element 30H are electrically connected to the corresponding signal terminals 62 via signal wiring 425. The pads 33 of the semiconductor element 30L are electrically connected to the corresponding signal terminals 62 via signal wiring 426. The pads 33 are connected to the corresponding signal terminals 62 via bonding wires 80.

[0182] The P terminal 611, N terminal 612, and O terminal 613, which are the main terminals 61, and the signal terminal 62 are inserted into the housing 22. The main terminals 61 and the signal terminals 62 are integrally molded with the housing 22. The main terminals 61 and the signal terminals 62 are each held by the housing 22. In the P terminal 611, the N terminal 612, and the O terminal 613, connection portions 611a, 612a, and 613a for connection with an external device protrude from the housing 22. Connection portions 611b, 612b, and 613b for connection with the wiring of the board 40 protrude from the housing 22. In the signal terminal 62, a connection portion 621 for connection with an external device and a connection portion 622 for connection with the pad 33 protrude from the housing 22.

[0183] <Output terminal arrangement> As shown in FIG. 41 and FIG. 5, the O terminal 613 is aligned with the semiconductor element 30L in the Y direction. The O terminal 613 is connected to the central region of the O wiring 423 in the arrangement direction (X direction) of the semiconductor elements 30L. The O terminal 613 is connected near the center of the O wiring 423 in the X direction. The O terminal 613 is joined near the center of the arrangement area of ​​the O wiring 423 in the X direction. The arrangement area of ​​the semiconductor elements 30L is a virtual rectangular area connecting the outer contours of the semiconductor elements 30L in a plan view in the Z direction. The O terminal 613 is arranged so as to overlap with the center position between the second semiconductor element 30L and the third semiconductor element 30L. The O terminal 613 is joined to the terminal connection portion 423c of the extension portion 423b connected to the base portion 423a on which the semiconductor element 30L is mounted in the O wiring 423.

[0184] <Signal wiring> The signal wiring 426 corresponding to the semiconductor element 30L is disposed between the semiconductor element 30L and the signal terminal 62 in the Y direction. The signal wiring 426 extends in the X direction. The signal wiring 426 includes a gate wiring 426G, a Kelvin source wiring 426KS, an anode wiring 426A, and a cathode wiring 426C.

[0185] The signal wiring 426 includes wiring that is divided (segmented) into a plurality of parts by the O terminal 613 and the O wiring 423 (extension portion 423b), that is, split wirings. In the example shown in FIGS. 41 and 42, the gate wiring 426G and the Kelvin source wiring 426KS are split wirings. The gate wiring 426G and the Kelvin source wiring 426KS are split into two by the O terminal 613 and the O wiring 423. The two gate wirings 426G and the two Kelvin source wirings 426KS are arranged to sandwich the O terminal 613 and the O wiring 423 in the X direction.

[0186] The gate pad 33G is connected to the gate wiring 426G located closer to the semiconductor element 30L. The gate pads 33G of the two semiconductor elements 30L are connected to one of the gate wirings 426G, and the gate pads 33G of the other two semiconductor elements 30L are connected to the other one of the gate wirings 426G. The Kelvin source pad 33KS is connected to the Kelvin source wiring 426KS located closer to the semiconductor element 30L. The Kelvin source pads 33KS of the two semiconductor elements 30L are connected to one of the Kelvin source wirings 426KS, and the Kelvin source pads 33KS of the other two semiconductor elements 30L are connected to the other one of the Kelvin source wirings 426KS.

[0187] In the example shown in FIG. 41 and FIG. 42, only the temperature of one of the ends in the X direction among the four semiconductor elements 30L is monitored. For this reason, the anode wiring 426A and the cathode wiring 426C are arranged near the semiconductor element 30L whose temperature is monitored. The anode wiring 426A and the cathode wiring 426C are arranged on one side in the X direction with respect to the O terminal 613. The anode wiring 426A and the cathode wiring 426C are arranged side by side with the split wiring. In the example shown in FIG. 41, the anode wiring 426A is arranged side by side with one of the Kelvin source wirings 426KS in the X direction. The cathode wiring 426C is arranged side by side with one of the gate wirings 426G in the X direction.

[0188] The anode pad 33A of the semiconductor element 30L arranged at the end is connected to the anode wiring 426A via the bonding wire 80. The cathode pad 33C is connected to the cathode wiring 426C via the bonding wire 80. The anode pad 33A and the cathode pad 33C of the other three semiconductor elements 30L are not connected to the anode wiring 426A and the cathode wiring 426C. In order to ground the temperature sensitive diode to the source potential, at least one of the anode pad 33A and the cathode pad 33C is connected to a nearby Kelvin source wiring 426KS. In the example shown in FIG. 41, the anode pad 33A is connected to the nearby Kelvin source wiring 426KS.

[0189] <Signal terminal> The signal terminal 62 corresponding to the semiconductor element 30L is held by the frame 221 of the housing 22. The signal terminal 62 is held by the wall portion 221b of the frame 221 as shown in Fig. 3. The signal terminal 62 includes a gate terminal 62G, a Kelvin source terminal 62KS, an anode terminal 62A, and a cathode terminal 62C. The semiconductor device 21 includes one each of the gate terminal 62G, the Kelvin source terminal 62KS, the anode terminal 62A, and the cathode terminal 62C as the signal terminals 62 corresponding to the semiconductor element 30L.

[0190] The gate terminal 62G is connected to the gate wiring 426G via a bonding wire 80. The Kelvin source terminal 62KS is connected to the Kelvin source wiring 426KS via a bonding wire 80. The anode terminal 62A is connected to the anode wiring 426A via a bonding wire 80. The cathode terminal 62C is connected to the cathode wiring 426C via a bonding wire 80.

[0191] The connection portions 621 of the four signal terminals 62 are arranged together on one side in the X direction with respect to the O terminal 613. The four connection portions 621 are arranged on the side where the anode wiring 426A and the cathode wiring 426C are arranged with respect to the O terminal 613. The signal terminal 62 includes a branch terminal in which the connection portion 622 is divided (severed) into a plurality of parts by the O terminal 613. In the example shown in FIGS. 41 and 42, the gate terminal 62G and the Kelvin source terminal 62KS are branch terminals.

[0192] The gate terminal 62G has a single connection portion 621, two connection portions 622, and a linking portion 623. In this embodiment, the connection portion 621 corresponds to a first connection portion, and the connection portion 622 corresponds to a second connection portion. The two connection portions 622 are disposed to sandwich the O terminal 613 in a plan view. The two connection portions 622 are disposed approximately symmetrically with respect to the center of the O terminal 613 in the X direction. One of the connection portions 622 is connected to one of the gate wirings 426G, and the other connection portion 622 is connected to the other of the gate wirings 426G.

[0193] The coupling portion 623 electrically connects the single connection portion 621 and the multiple connection portions 622. The coupling portion 623 is disposed within the frame body 221 of the housing 22. As shown in FIG. 42, the coupling portion 623 may include a coupling portion 623a that connects one of the connection portions 622 to the connection portion 621, and a coupling portion 623b that connects the other one of the connection portions 622 to the coupling portion 623a. The coupling portion 623a includes a portion extending in the Z direction. The coupling portion 623b includes a portion extending in the X direction.

[0194] 43 and 44 show an example of the arrangement of O terminal 613 and gate terminal 62G which is a branch terminal. FIG. 43 is a plan view seen from the X direction. FIG. 44 is a plan view seen from the Y direction. For convenience, O wiring 423 and housing 22 are omitted in FIG. 44. As shown in FIG. 43 and FIG. 44, coupling portion 623 (coupling portion 623b) electrically connecting two connection portions 622 is arranged below O terminal 613 and may straddle O terminal 613.

[0195] Figures 45 and 46 show other examples of the arrangement of O terminal 613 and gate terminal 62G, which is a branch terminal. Figure 45 corresponds to Figure 43. Figure 46 corresponds to Figure 44. As shown in Figures 45 and 46, coupling portion 623 (coupling portion 623b) electrically connecting two connection portions 622 may be arranged above O terminal 613 and straddle O terminal 613.

[0196] The Kelvin source terminal 62KS has a similar configuration to the gate terminal 62G as shown in Fig. 42. The Kelvin source terminal 62KS has a single connection portion 621, two connection portions 622, and a coupling portion 623. The coupling portion 623 may include a coupling portion 623a and a coupling portion 623b.

[0197] <Current sense integrated structure> As shown in FIG. 47, a shunt resistor 613d for detecting a current may be provided in a part of the O terminal 613. For example, the length, width, and thickness of the shunt resistor 613d in the extension direction are managed so as to have a predetermined resistance value. The signal wiring 426 includes two sense wirings 426S. The signal terminal 62 includes two sense terminals 62S. One end of the shunt resistor 613d is connected to one of the sense terminals 62S via the bonding wire 80 and one of the sense wirings 426S. The other end of the shunt resistor 613d is connected to the other of the sense terminals 62S via the bonding wire 80 and the other of the sense wirings 426S. With the above configuration, it is possible to detect the potential difference between both ends of the shunt resistor 613d, that is, the current flowing through the shunt resistor 613d.

[0198] 48, the semiconductor device 21 may include a core 63 constituting a current sensor. The core 63 is held in the housing 22. The core 63 is inserted into the housing 22. The core 63 is disposed around a connecting portion 613c of the O terminal 613. By measuring the magnitude of a magnetic field generated in the core 63 by a current flowing through the O terminal 613, it is possible to detect the current.

[0199] <Summary of the third embodiment> The semiconductor device 21 of this embodiment includes a resin housing 22, a substrate 40, a plurality of semiconductor elements 30 (30L) joined to wiring on the substrate 40 and connected in parallel, and a signal terminal 62. The signal terminal 62 is inserted into the housing 22. The signal terminal 62 includes a branch terminal. The branch terminal is, for example, a gate terminal 62G or a Kelvin source terminal 62KS. The branch terminal has a single connection portion 621 connected to an external device, a plurality of connection portions 622 individually connected to pads 33 having the same function of different semiconductor elements 30L, and a linking portion 623.

[0200] In this manner, the multiple connection portions 622 (second connection portions) and the single connection portion 621 (first connection portion) are electrically connected inside the housing 22. Therefore, in a configuration in which multiple semiconductor elements 30L are connected in parallel, contact and breakage of the bonding wires 80 can be suppressed while suppressing an increase in the physical size.

[0201] The semiconductor device 21 may include a main terminal 61 (613) connected to the wiring on which the semiconductor element 30 (30L) is mounted. The main terminal 61 is aligned with the semiconductor element 30 in the Y direction (second direction) perpendicular to the X direction (first direction) in which the semiconductor elements 30 (30L) are aligned, and is connected to the central region of the wiring in the X direction. In this configuration, a plurality of connection parts 622 may be arranged to sandwich the main terminal 61 in the X direction. Since the main terminal 61 is connected to the central region of the wiring, it is possible to prevent current from flowing unevenly to some of the semiconductor elements 30. In other words, it is possible to prevent current imbalance.

[0202] When the main terminal 61 is connected to the central region of the wiring, the connection parts 622 having the same function have to be separated by the main terminal 61. As described above, the separated connection parts 622 are connected to the single connection part 621 inside the housing 22. Therefore, it is possible to suppress an increase in the physical size while suppressing current imbalance.

[0203] The substrate 40 may have a signal wiring 426 that relays the pad 33 and the signal terminal 62. In a configuration having the signal wiring 426, the signal wiring 426 may include a plurality of split wirings that are provided according to the connection portion 622 and are individually connected to pads 33 of different semiconductor elements 30 (30L) that have the same function. The branch terminal is, for example, a gate wiring 426G or a Kelvin source wiring 426KS. The plurality of split wirings may be positioned between the semiconductor element 30 and the connection portion 622 in the Y direction and may be arranged to sandwich the main terminal 61 (613) in the X direction.

[0204] This makes it possible to suppress contact and breakage of the bonding wires 80 in a configuration in which more semiconductor elements 30 are connected in parallel in order to increase the output of the semiconductor device 21, and therefore the semiconductor module 20. Even if signal wiring having the same function is divided, it is electrically connected inside the housing 22 via the connection portion 622. Therefore, it is possible to suppress an increase in the physical size.

[0205] In a configuration in which semiconductor device 21 provides upper and lower arm circuits 9 and a plurality of semiconductor elements 30H and a plurality of semiconductor elements 30L are arranged side by side in the Y direction, O terminal 613 may be a main terminal 61 that divides connection portion 622 and signal wiring 426. P terminal 611 and N terminal 612 can be drawn from one end side in the Y direction, and O terminal 613 can be drawn from the other end side. In addition, since O terminal 613 is connected to the central region of O wiring 423, it is possible to suppress an increase in size while suppressing current imbalance.

[0206] The O terminal 613 may be inserted into the housing 22. The O terminal 613 is held in the housing 22 together with the signal terminal 62. This allows the configuration to be simplified. Also, the accuracy of the relative positions of the O terminal 613 and the signal terminal 62 can be improved.

[0207] The O terminal 613 may have a shunt resistor portion 613d for detecting a current. By providing the O terminal 613 with a shunt resistor function, the size of the device can be made smaller than a configuration in which a current sensor is provided separately.

[0208] The semiconductor device 21 may include a core 63 that is inserted into the housing 22 and arranged around the O terminal 613. By providing the core 63 of the current sensor in the housing 22, the size of the semiconductor device 21 can be made smaller than a configuration in which the current sensor is provided separately. In addition, the accuracy of the relative positions of the O terminal 613 and the core 63 can be improved.

[0209] In the above example, a branch terminal is applied to the signal terminal 62 corresponding to the semiconductor element 30L, and divided wiring is applied to the signal wiring 426. However, a branch terminal may be applied to the signal terminal 62 corresponding to the semiconductor element 30H, or divided wiring may be applied to the signal wiring 425. For example, in a configuration that does not include the snubber circuit 70, the signal terminal 62 corresponding to the semiconductor element 30H may be provided on the wall portion 221a of the frame body 221, and the signal terminal 62 corresponding to the semiconductor element 30H may include a branch terminal.

[0210] The configuration described in this embodiment can be combined with the configuration described in the preceding embodiment.

[0211] (Fourth embodiment) This embodiment is a modification based on the preceding embodiment, and the description of the preceding embodiment can be used.

[0212] <Semiconductor device> FIG. 49 is a plan view showing an example of the semiconductor device 21 according to this embodiment. In FIG. 49, the semiconductor device 21 is illustrated in a simplified form. In FIG. 49, the signal terminal 62 is omitted for convenience. The configurations of the semiconductor device 21 and the semiconductor module 20 are similar to those of the preceding embodiment (see, for example, FIGS. 2 to 6). The semiconductor device 21 includes a plurality of semiconductor elements 30, a substrate 40, a clip 50, an external connection terminal 60, and a snubber circuit 70. The semiconductor device 21 may include the sealing body 90 shown in the preceding embodiment.

[0213] The semiconductor device 21 provides upper and lower arm circuits 9 for one phase. The semiconductor elements 30 include a plurality of semiconductor elements 30H that provide the upper arm 9H and a plurality of semiconductor elements 30L that provide the lower arm 9L. The plurality of semiconductor elements 30H are arranged on a common wiring and connected in parallel. The plurality of semiconductor elements 30L are arranged on a common wiring and connected in parallel. The number of semiconductor elements 30H and 30L may be the same or different. In the example shown in FIG. 49, the semiconductor device 21 includes four each of the semiconductor elements 30H and 30L. The semiconductor elements 30H are arranged side by side in the X direction. The semiconductor elements 30L are also arranged side by side in the X direction. The semiconductor elements 30H and the semiconductor elements 30L are arranged side by side in the Y direction. The semiconductor elements 30H and 30L are arranged at a common interval (pitch).

[0214] The external connection terminal 60 has a main terminal 61 and a signal terminal 62 (not shown) as in the preceding embodiment (see FIG. 3 and FIG. 5). The main terminal 61 includes a P terminal 611, an N terminal 612, and an O terminal 613. The P terminal 611 and the N terminal 612 are connected to the corresponding conductor 42 at one of the ends in the Y direction of the substrate 40, and the O terminal 613 is connected to the corresponding conductor 42 at the other end in the Y direction. The semiconductor device 21 has one P terminal 611 and one O terminal 613, and two N terminals 612. The P terminal 611 and the O terminal 613 are each connected at a position including approximately the center of the substrate 40 in the X direction. The N terminals 612 are arranged to sandwich the P terminal 611.

[0215] The substrate 40 has a conductor 42 on one surface. The conductor 42 is patterned to have a plurality of wirings. The conductor 42 is patterned in the same manner as in the preceding embodiment (see FIG. 6). The conductor 42 has a P wiring 421, an N wiring 422, an O wiring 423, a relay wiring 424, and signal wirings 425 and 426. The P wiring 421 has a substantially T-shape in plan view. The P wiring 421 extends in the X direction and has a base 421a on which a plurality of semiconductor elements 30H are mounted, and an extension portion 421b extending in the Y direction from near the center of the base 421a. A terminal connection portion 421c is provided at an end of the extension portion 421b.

[0216] The N wiring 422 has a substantially C-shape (or U-shape) in plan. The N wiring 422 has a base 422a extending in the X direction and two extensions 422b extending from both ends of the base 422a in the Y direction. The extensions 422b are arranged so as to bypass the multiple semiconductor elements 30H. The extensions 422b are disposed near the end of the substrate 40 in the X direction. The P wiring 421, the relay wiring 424, and the signal wiring 425 are disposed between the two extensions 422b. The terminal connection parts 422c are provided at the ends of the extensions 422b. The O wiring 423 has a substantially T-shape in plan. The O wiring 423 extends in the X direction and has a base 423a on which multiple semiconductor elements 30L are mounted, and an extension 423b extending in the Y direction from near the center of the base 423a. A terminal connection portion 423c is provided at the end of the extension portion 423b.

[0217] The relay wiring 424, together with electronic components such as the capacitor 71, provides the snubber circuit 70. The relay wiring 424, together with the electronic components of the snubber circuit 70, electrically bridges the P wiring 421 and the N wiring 422. The relay wiring 424 is arranged to sandwich the extension portion 421b of the P wiring 421 in the X direction. The relay wiring 424 includes relay wirings 424a and 424b. The relay wirings 424a and 424b are aligned in the X direction between the extension portion 421b of the P wiring 421 and the extension portion 422b of the N wiring 422.

[0218] The signal wiring 425 electrically connects the pad 33 of the semiconductor element 30H to the signal terminal 62. The signal wiring 425 extends in the X direction. The signal wiring 425 is disposed between the extension portion 421b of the P wiring 421 and the extension portion 422b of the N wiring 422 in the X direction. The signal wiring 425 is disposed between the base portion 421a of the P wiring 421 and the relay wiring 424 in the Y direction. The signal wiring 426 electrically connects the pad 33 of the semiconductor element 30L to the signal terminal 62. The signal wiring 426 extends in the X direction. The signal wiring 426 is disposed so as to sandwich the extension portion 422b of the O wiring in the X direction. The signal wiring 426 is disposed at one of the ends of the substrate 40 in the Y direction.

[0219] The clip 50 electrically connects the source electrode 32 of the semiconductor element 30 and the wiring of the substrate 40. The clip 50 includes a clip 50H connected to the source electrode 32 of the semiconductor element 30H and a clip 50L connected to the source electrode 32 of the semiconductor element 30L. The semiconductor device 21 includes two clips 50H and four clips 50L. One clip 50H is provided for two adjacent semiconductor elements 30H. The clip 50H has the same configuration as the preceding embodiment (see Figs. 23 and 24). The clip 50H is substantially Y-shaped in plan, and both ends are bifurcated. The clip 50L is provided individually for the semiconductor element 30L. The clip 50L has the same configuration as the preceding embodiment (see Figs. 21 to 23). The clip 50L has a substantially I-shaped in plan, and one end is bifurcated.

[0220] The snubber circuit 70 includes a capacitor 71 and a resistor 72. The capacitor 71 bridges the extension portion 421b of the P wiring 421 and the relay wiring 424a. A part of the resistor 72 bridges the relay wiring 424a and the relay wiring 424b. Another part of the resistor 72 bridges the relay wiring 424b and the extension portion 422b of the N wiring 422.

[0221] <Heat reception and generation> In FIG. 49, the four semiconductor elements 30L are shown as semiconductor element 30L1, semiconductor element 30L2, semiconductor element 30L3, and semiconductor element 30L4 from one end side in the X direction. Semiconductor element 30L1 is located at the end and has one adjacent semiconductor element 30L. Semiconductor element 30L2 is located in the central region and has two adjacent semiconductor elements 30L. Like semiconductor element 30L2, semiconductor element 30L3 has two adjacent semiconductor elements 30L. Like semiconductor element 30L1, semiconductor element 30L4 has one adjacent semiconductor element 30L.

[0222] The semiconductor element 30L is affected by heat generated by the adjacent semiconductor elements 30L. Therefore, the greater the number of adjacent semiconductor elements 30L, the greater the amount of heat received. The amount of heat received by the semiconductor elements 30L1 and 30L4 is smaller than that of the semiconductor elements 30L2 and 30L3. The amount of heat received by the semiconductor elements 30L2 and 30L3 is greater than that of the semiconductor elements 30L1 and 30L4.

[0223] In the above-described semiconductor device 21, the multiple semiconductor elements 30L connected in parallel are turned on and off at the same timing. When the semiconductor element 30L is turned on, a current flows through a path from the O-terminal 613 to the terminal connection portion 423c of the O-wiring 423 to the extension portion 423b to the base portion 423a to the semiconductor element 30L to the clip 50L to the base portion 422a of the N-wiring 422 to the extension portion 422b to the terminal connection portion 422c to the N-terminal 612.

[0224] When the semiconductor element 30L1 is turned on, a current flows through the path indicated by the dashed line in the figure. When the semiconductor element 30L2 is turned on, a current flows through the path indicated by the two-dot chain line in the figure. The source electrode 32 of the semiconductor element 30L is connected to the base 422a of the N wiring 422 via the clip 50L. The source electrode 32 of the semiconductor element 30L1 is connected to the base 422a at a position closer to the extension portion 422b in the X direction. The source electrode 32 of the semiconductor element 30L2 is connected to the base 422a at a position farther from the extension portion 422b than the semiconductor element 30L1. Therefore, the current path of the semiconductor element 30L1 (dashed line) is shorter than the current path of the semiconductor element 30L2 (dashed line). The current path of the semiconductor element 30L2 is longer than the current path of the semiconductor element 30L1.

[0225] The two current paths have different lengths at the base 422a where the line width is narrow. The length of the path at the base 422a of the semiconductor element 30L2 is longer than that of the semiconductor element 30L1. As a result, the wiring resistance between the main terminals 612, 613 is greater in the semiconductor element 30L2 than in the semiconductor element L1. The current path length is longer in the semiconductor element 30L2 than in the semiconductor element L1. A current flows more easily through the semiconductor element 30L1 than through the semiconductor element L2. A current flows less easily through the semiconductor element 30L2 than through the semiconductor element 30L1. In other words, the amount of heat generated by energization is greater in the semiconductor element 30L1 than in the semiconductor element 30L2.

[0226] The semiconductor element 30L4 is similar to the semiconductor element 30L1, and the semiconductor element 30L3 is similar to the semiconductor element 30L2.

[0227] FIG. 50 shows the current path on the semiconductor element 30H side. In FIG. 50, the four semiconductor elements 30H are shown as semiconductor elements 30H1, 30H2, 30H3, and 30H4 from one end side in the X direction. The semiconductor elements 30H1 and 30H4 are located at the end, and there is one adjacent semiconductor element 30H. The semiconductor elements 30H2 and 30H3 are located in the central region, and there are two adjacent semiconductor elements 30L. The semiconductor element 30 is also affected by the heat generated by the adjacent semiconductor element 30H. Therefore, the more the number of adjacent semiconductor elements 30H is, the greater the amount of heat received. The amount of heat received by the semiconductor elements 30H1 and 30H4 is smaller than that of the semiconductor elements 30H2 and 30H3. The amount of heat received by the semiconductor elements 30H2 and 30H3 is larger than that of the semiconductor elements 30H1 and 30H4.

[0228] In the above-described semiconductor device 21, the multiple semiconductor elements 30H connected in parallel are turned on and off at the same timing. When the semiconductor element 30H is turned on, a current flows through a path from the P terminal 611 to the terminal connection portion 421c of the P wiring 421 to the extension portion 421b to the base portion 421a to the semiconductor element 30H to the clip 50H to the base portion 423a of the O wiring 423 to the extension portion 423b to the terminal connection portion 423c to the O terminal 613.

[0229] When the semiconductor element 30H2 is turned on, a current flows through the path indicated by the dashed line in the figure. When the semiconductor element 30H1 is turned on, a current flows through the path indicated by the two-dot chain line in the figure. The source electrode 32 of the semiconductor element 30H is connected to the base 423a of the O wiring 423 via the clip 50H. The drain electrode 31 of the semiconductor element 30H2 is connected to the base 421a at a position close to the connection between the extension portion 421b and the base 421a. The drain electrode 31 of the semiconductor element 30H1 is connected to the base 421a at a position farther from the connection than the semiconductor element 30H2. The current path of the semiconductor element 30H2 (dashed line) is shorter than the current path of the semiconductor element 30H1 (dashed line). The current path of the semiconductor element 30H1 is longer than the current path of the semiconductor element 30H2.

[0230] In the base 421a, a current flows through a region between the mounting position of the semiconductor element 30H and the end on the P terminal 611 side. This region is narrow. The lengths of the paths in the base 421a are different between the two current paths. The path length in the base 421a of the semiconductor element 30H1 is longer than that of the semiconductor element 30H2. As a result, the wiring resistance between the main terminals 611, 613 is greater in the semiconductor element 30H1 than in the semiconductor element H2. The current path length in the semiconductor element 30H1 is longer than that in the semiconductor element H2. A current flows more easily in the semiconductor element 30H2 than in the semiconductor element H1. A current flows less easily in the semiconductor element 30H1 than in the semiconductor element 30H2. In other words, the amount of heat generated by energization is greater in the semiconductor element 30H2 than in the semiconductor element 30H1.

[0231] The semiconductor element 30H4 is similar to the semiconductor element 30H1, and the semiconductor element 30H3 is similar to the semiconductor element 30H2.

[0232] As described above, current tends to flow through semiconductor elements 30L1 and 30L4 located at both ends of semiconductor element 30L, and current tends to flow through semiconductor elements 30H2 and 30H3 located in the central region of semiconductor element 30H.

[0233] <Clip> Semiconductor elements having different numbers of adjacent semiconductor elements and / or semiconductor elements having different current path lengths between main electrodes and main terminals may be electrically connected by a metal plate material.

[0234] 50, a semiconductor element 30H1 and a semiconductor element 30H2 are electrically connected by a common clip 50H. A semiconductor element 30H3 and a semiconductor element 30H4 are electrically connected by a common clip 50H.

[0235] As described above, the semiconductor elements 30H1 and 30H4 are adjacent to one semiconductor element 30H. The semiconductor elements 30H2 and 30H3 are adjacent to two semiconductor elements 30H. This causes the semiconductor elements 30H1 and 30H4 and the semiconductor elements 30H2 and 30H3 to receive different amounts of heat.

[0236] 50, the source electrode 32 of the semiconductor element 30H1 of adjacent semiconductor elements 30H and the source electrode 32 of the two semiconductor elements 30H2 of adjacent semiconductor elements 30 are connected by a common clip 50H. The source electrode 32 of the two semiconductor elements 30H3 of adjacent semiconductor elements 30H and the source electrode 32 of the one semiconductor element 30H1 of adjacent semiconductor element 30 are connected by a common clip 50H.

[0237] The semiconductor elements 30H1 and 30H4 have a long current path length from the P terminal 611 to the drain electrode 31. The semiconductor elements 30H2 and 30H3 have a short current path length from the P terminal 611 to the drain electrode 31. The semiconductor elements 30H1 and 30H4 and the semiconductor elements 30H2 and 30H3 have different current path lengths. The semiconductor elements 30H1 and 30H4 and the semiconductor elements 30H2 and 30H3 differ in ease of current flow, and therefore in amount of heat generation.

[0238] 50, the source electrode 32 of the semiconductor element 30H1 having a long current path length and the source electrode 32 of the semiconductor element 30H2 having a short current path length are connected by a common clip 50H. The source electrode 32 of the semiconductor element 30H3 having a short current path length and the source electrode 32 of the semiconductor element 30H1 having a long current path length are connected by a common clip 50H.

[0239] <Substrate> Conductors 42 may have various patterns on substrate 40. The area of ​​the first conductor, which is the mounting portion on which a semiconductor element is mounted, may be different between semiconductor element 30H, which is the upper arm element, and semiconductor element 30L, which is the lower arm element. In such a configuration in which the areas of the first conductors are different, a second conductor on which a semiconductor element 30 is not mounted may be disposed near the first conductor with a smaller area.

[0240] FIG. 51 shows an example of the substrate 40 in the semiconductor device 21. In FIG. 51, the conductor pattern is shown in a simplified manner. The conductor 42 shown in FIG. 51 has a configuration similar to that shown in the preceding embodiment (see FIG. 6) and the configuration shown in FIG. 49. The P wiring 421 has a base 421a on which a plurality of semiconductor elements 30H are arranged. The O wiring 423 has a base 423a on which a plurality of semiconductor elements 30L are arranged. The bases 421a and 423a correspond to the first conductor. The relay wiring 424 is a conductor on which the semiconductor element 30, which is a heat generating body, is not mounted. The relay wiring 424 corresponds to the second conductor. The electronic components, such as the capacitor 71 and the resistor 72, which constitute the snubber circuit 70, are arranged in the relay wiring 424.

[0241] The base 421a has a smaller area than the base 423a. The length LX1 in the X direction of the base 421a is shorter than the length LX2 in the X direction of the base 423a. The length LY1 in the Y direction of the base 421a is shorter than the length LY2 in the Y direction of the base 423a. The relay wiring 424 is disposed closer to the base 421a, which has the smaller area, of the bases 421a and 423a. The base 421a is disposed between the relay wiring 424 and the base 423a in the Y direction.

[0242] As described above, the semiconductor element 30, which is a heating element, is mounted on the first conductor. For this reason, the first conductor may be formed using a highly thermally conductive material that has superior thermal conductivity to other portions of the conductor 42, including the second conductor.

[0243] FIG. 52 shows another example of the substrate 40. The pattern of the conductor 42 is the same as that shown in FIG. 51. The base 421a of the P wiring 421 is formed using a highly heat-conductive material. The base 423a of the O wiring 423 is also formed using a highly heat-conductive material. The highly heat-conductive material is, for example, copper graphite (CuGr). The other wirings including the relay wiring 424 are formed using a material having a lower thermal conductivity than the highly heat-conductive material, for example, Cu. In FIG. 52, the bases 421a and 423a are hatched for distinction. The Cu material and the CuGr material are disposed on a common insulating base material 41.

[0244] The highly thermally conductive material may be anisotropic. The highly thermally conductive material may be arranged so that the high thermal conductivity direction is approximately aligned with the arrangement direction of the semiconductor elements 30. Fig. 52 shows the high thermal conductivity (HD) direction and low thermal conductivity (LD) direction of the highly thermally conductive material. The highly thermally conductive material is arranged so that the HD direction is approximately parallel to the X direction and the LD direction is approximately parallel to the Y direction.

[0245] <Temperature monitor> As described above, in a configuration in which the semiconductor device 21 includes a plurality of semiconductor elements 30, the semiconductor device 21 may be configured to output the temperature of only one of the semiconductor elements 30. For example, as shown in FIG. 49, the semiconductor element 30 may be configured to output the temperature of only the semiconductor element 30L1. As shown in the preceding embodiment (see FIG. 18), the semiconductor element 30 includes a gate pad 33G, a Kelvin source pad 33KS, an anode pad 33A, and a cathode pad 33C. The anode pad 33A and the cathode pad 33C are connected to the temperature-sensitive diodes included in the semiconductor element 30.

[0246] The anode pad 33A of the semiconductor element 30L1 is connected to the signal wiring 426 for the anode. The cathode pad 33C of the semiconductor element 30L1 is connected to the signal wiring 426 for the cathode. The anode pad 33A and the cathode pad 33C of the semiconductor element 30L1 are connected to the corresponding signal terminal 62 via the signal wiring 426, similar to the preceding embodiment (see FIG. 41 and FIG. 42). The anode pad 33A and the cathode pad 33C of the other semiconductor elements 30 are not connected to the signal terminal 62. For example, the anode pad 33A is connected to the signal wirings 425 and 426 for the Kelvin source.

[0247] In FIG. 49, the temperature of the semiconductor element 30L1 located at the end in the X direction and the end in the Y direction is output. Alternatively, the temperature of the semiconductor element 30L4 may be output. The temperature of either of the semiconductor elements 30L2 or 30L3 may be output. Of the multiple semiconductor elements 30H, the semiconductor elements 30H2 and 30H3 located in the central region receive a large amount of heat and allow current to flow easily. Therefore, the temperature of either of the semiconductor elements 30H2 and 30H3 may be output. The temperature of either of the semiconductor elements 30H1 and 30H4 located at the end in the X direction may be output.

[0248] <Summary of the Fourth Embodiment> The semiconductor device 21 may include a substrate 40, a plurality of semiconductor elements 30 arranged on one surface of the substrate 40 and connected in parallel to one another, and a main terminal 61 common to the main electrodes of the plurality of semiconductor elements 30. The wiring resistance between the main terminal 61 and the main electrode may vary depending on the number of adjacent semiconductor elements 30, and the wiring resistance may be greater as the number of adjacent semiconductor elements 30 increases.

[0249] As described above, among the multiple semiconductor elements 30 connected in parallel, the semiconductor elements 30 with a larger number of adjacent semiconductor elements 30 receive a larger amount of heat. The semiconductor elements 30 with a larger wiring resistance between the main terminals 61 and the main electrodes have a smaller amount of heat generated by current flow because current is less likely to flow through them. If the wiring resistance is increased as the number of adjacent semiconductor elements 30 increases, the heat generation of the semiconductor elements 30 with a larger number of adjacent semiconductor elements 30 can be suppressed. This allows the total amounts of heat received and generated to be closer to each other in the multiple semiconductor elements 30. This makes it possible to suppress heat variations in the multiple semiconductor elements 30. In other words, it is possible to suppress temperature bias.

[0250] Since local temperature rise can be suppressed, it is possible to suppress the temperature of some of the semiconductor elements 30 from exceeding the allowable upper limit temperature, which would otherwise cause a decrease in the output of the semiconductor device 21. In addition, since the arrangement of the multiple semiconductor elements 30 connected in parallel is not limited to a staggered arrangement, the degree of freedom in arrangement can be improved. Since it is not necessary to arrange them in a staggered arrangement, it is possible to suppress an increase in the physical size.

[0251] The substrate 40 may have a common wiring to which the main terminals 61 are bonded and to which the main electrodes of the multiple semiconductor elements 30 are connected. This wiring may be arranged so that the length from the bonded portion of the main terminals 61 to the electrical connection portion of the main electrodes increases as the number of adjacent semiconductor elements 30 increases. By using a common wiring in this way and varying the positions of the connection portions of the main electrodes in the wiring, the current path length can be varied, that is, the wiring resistance can be varied. With a simple configuration, heat variation can be suppressed.

[0252] The semiconductor device 21 may provide the upper and lower arm circuits 9. The semiconductor device 21 may include a plurality of semiconductor elements 30H (second semiconductor elements) arranged in parallel in the X direction (first direction) and connected to each other, and a plurality of semiconductor elements 30L (first semiconductor elements) arranged in parallel in the X direction. The semiconductor element 30H may be arranged between the N terminal 612 (main terminal 61) and the semiconductor element 30L in the Y direction (second direction), and the N wiring 422 may be arranged to bypass the plurality of semiconductor elements 30H. This can increase the wiring resistance of the semiconductor elements 30L2 and 30L3 that have a large number of adjacent semiconductor elements 30L among the plurality of semiconductor elements 30L arranged in the X direction. It can reduce the wiring resistance of the semiconductor elements 30L1 and 30L4 that have a small number of adjacent semiconductor elements 30L. Therefore, the thermal variation can be suppressed with a simple configuration.

[0253] The semiconductor elements 30H, 30L may be provided in equal numbers. The positions of the semiconductor elements 30L1, 30L4 through which current easily flows among the plurality of semiconductor elements 30L (first semiconductor elements) and the positions of the semiconductor elements 30H2, 30H3 through which current easily flows among the plurality of semiconductor elements 30H (second semiconductor elements) may be configured to be shifted from each other in the X direction (first direction). Among the plurality of semiconductor elements 30 constituting the upper and lower arm circuits 9, the semiconductor elements 30 that generate a large amount of heat due to current flow are dispersedly disposed. Thus, it is possible to suppress heat variation among the plurality of semiconductor elements 30 constituting the upper and lower arm circuits 9.

[0254] As illustrated in FIG. 49, in a semiconductor element 30L providing a lower arm 9L, the wiring resistance may be increased as the number of adjacent semiconductor elements 30L increases. Although not illustrated, in a semiconductor element 30H providing an upper arm 9H, the wiring resistance may be increased as the number of adjacent semiconductor elements 30H increases. The semiconductor device 21 is not limited to a configuration that provides upper and lower arm circuits 9. The present invention can also be applied to a semiconductor device 21 that provides one of the arms. In a plurality of semiconductor elements 30 that are connected in parallel and provide one of the arms, the wiring resistance may be increased as the number of adjacent semiconductor elements 30 increases.

[0255] The semiconductor device 21 may include a substrate 40, a plurality of semiconductor elements 30 arranged on one surface of the substrate 40 and connected in parallel, a main terminal 61 which is a common connection target for main electrodes of the plurality of semiconductor elements 30, and a clip 50 which is a metal plate. The clip 50 may electrically connect semiconductor elements 30 having different numbers of adjacent semiconductor elements 30 and / or semiconductor elements 30 having different current path lengths between the main electrodes and the main terminals 61.

[0256] 50, among the multiple semiconductor elements 30H connected in parallel, the source electrodes 32 of the semiconductor elements 30H1 and 30H2 having different numbers of adjacent semiconductor elements 30H may be connected by clips 50H. The source electrodes 32 of the semiconductor elements 30H3 and 30H4 having different numbers of adjacent semiconductor elements 30H may be connected by clips 50H. Among the multiple semiconductor elements 30H connected in parallel, the source electrodes 32 of the semiconductor elements 30H1 and 30H2 having different current path lengths may be connected by clips 50H. The source electrodes 32 of the semiconductor elements 30H3 and 30H4 having different current path lengths may be connected by clips 50H.

[0257] As described above, a semiconductor element 30 with a large number of adjacent semiconductor elements 30 receives a large amount of heat, and a semiconductor element 30 with a small number of adjacent semiconductor elements 30 receives a small amount of heat. A current does not easily flow through a semiconductor element 30 with a long current path length between the main electrode and the main terminal 61, and a current easily flows through a semiconductor element 30 with a short current path length. For this reason, by connecting the semiconductor elements 30 with different numbers of adjacent semiconductor elements 30 and thus having different amounts of heat received, with the clip 50, it is possible to suppress heat variation by the transfer of heat via the clip 50. In addition, by connecting the semiconductor elements 30 with different current path lengths and thus having different amounts of heat generated, with a metal plate material, it is possible to suppress heat variation. Therefore, it is possible to suppress heat variation in a plurality of semiconductor elements 30. For example, it is possible to suppress a decrease in output.

[0258] The metal plate material connecting the source electrodes to each other is not limited to the clip 50. It may be a lead. The semiconductor element 30 is not limited to the semiconductor element 30H. Although not shown, it may also be applied to a plurality of semiconductor elements 30L connected in parallel. The semiconductor device 21 is not limited to a configuration providing upper and lower arm circuits 9. It may also be applied to a semiconductor device 21 providing one of the arms. In a plurality of semiconductor elements 30 connected in parallel and providing one of the arms, the source electrodes 32 may be electrically connected by the clip 50.

[0259] The semiconductor device 21 may include a substrate 40 and a plurality of semiconductor elements 30 arranged on one surface of the substrate 40, and the semiconductor elements 30 may include a semiconductor element 30H which is an upper arm element and a semiconductor element 30L which is a lower arm element. The conductor 42 of the substrate 40 may include bases 421a, 423a (first conductors) on which the semiconductor elements 30 are mounted, and a relay wiring 424 (second conductor) on which the semiconductor elements 30 are not mounted. The relay wiring 424 may be arranged near the base 421a which has an area smaller than that of the base 423a.

[0260] Since the base 421a having a small area is disposed near the relay wiring 424, the heat of the semiconductor element 30H mounted on the base 421a having a small area can be dissipated to the relay wiring 424 side. Even if the area of ​​the base 421a is small, the heat of the semiconductor element 30H can be dissipated by using the relay wiring 424. Since the base 423a located away from the relay wiring 424 has a large area, it functions better as a thermal mass than the base 421a and has a large heat dissipation area. The heat of the semiconductor element 30L can be dissipated through the base 423a. Therefore, it is possible to suppress the thermal variation in the multiple semiconductor elements 30 constituting the upper and lower arm circuits 9. For example, it is possible to suppress the decrease in output.

[0261] Although the semiconductor element 30, which is a heat generating body, is not mounted, the relay wiring 424 that provides a wiring function is used, and the base 421a is made smaller accordingly. This allows the size of the substrate 40, and therefore the size of the semiconductor device 21, to be reduced.

[0262] A configuration may be adopted in which a snubber circuit 70 including a capacitor 71 is provided, and the capacitor 71 is disposed on the relay wiring 424. The wiring constituting the snubber circuit 70, particularly the wiring on which the capacitor 71 is disposed, requires a relatively large area. While utilizing the second conductor (relay wiring 424) as a mounting conductor for the capacitor 71, it is possible to dissipate heat from the semiconductor element 30 mounted on the base 421a having a small area.

[0263] The bases 421a and 423a, which are the first conductors, may be formed using a highly thermally conductive material having better thermal conductivity than the material forming the other conductors 42, including the second conductor. By using a highly thermally conductive material only for the bases 421a and 423a, on which the semiconductor element 30, which is a heat generating body, is mounted, it is possible to improve heat dissipation while suppressing an increase in costs.

[0264] The semiconductor device 21 may include a plurality of semiconductor elements 30H arranged in the X direction, and a plurality of semiconductor elements 30L arranged in the X direction. A highly thermally conductive material having anisotropic thermal conduction may be used as the highly thermally conductive material. The highly thermally conductive material may be provided so that the highly thermally conductive direction of the highly thermally conductive material coincides with the X direction in which the semiconductor elements 30H and 30L are arranged. The heat of the semiconductor elements 30H and 30L is mainly transferred in the X direction in the bases 421a and 423a, and is not easily transferred in the Y direction. Even if the length of the bases 421a and 423a in the Y direction is shortened, the heat dissipation can be ensured. Therefore, the size of the substrate 40 and thus the semiconductor device 21 can be reduced.

[0265] In a configuration in which the semiconductor device 21 includes a plurality of semiconductor elements 30, the temperature of only one of the plurality of semiconductor elements 30 may be output. The deterioration of the semiconductor device 21 can be detected with a minimum number of temperature monitors. The deterioration can be detected while reducing costs. For example, as shown in FIG. 49, the temperature of only the semiconductor element 30L1 may be output. The semiconductor element 30L1 is located near the end of the substrate 40 in the X direction and the Y direction. The bonding material 24 (solder) that bonds the substrate 40 to the cooler 23 cracks from the outer periphery of the substrate 40 and deteriorates. As described above, a current easily flows through the semiconductor element 30L1. The semiconductor element 30L1 easily generates heat. By detecting the temperature of the semiconductor element 30L1, the deterioration of the semiconductor device 21 can be more effectively detected with a minimum number of temperature monitors.

[0266] The configuration described in this embodiment can be combined with the configuration described in the preceding embodiment.

[0267] Fifth embodiment This embodiment is a modification based on the preceding embodiment, and the description of the preceding embodiment can be used.

[0268] <Semiconductor module> Fig. 53 is a plan view showing an example of the semiconductor module 20 according to this embodiment. Fig. 54 is a plan view showing a configuration of the semiconductor module 20 excluding the housing 22, that is, a state in which the semiconductor device 21 is arranged on the cooler 23. For convenience, the sealing body is omitted in Figs. 53 and 54. Fig. 55 is a cross-sectional view taken along the line LV-LV shown in Fig. 53. Fig. 55 shows a simplified semiconductor module 20.

[0269] 53 to 55, the basic configurations of the semiconductor module 20 and the semiconductor device 21 are similar to those shown in the preceding embodiments (see FIGS. 2 to 6). The semiconductor module 20 includes the semiconductor device 21, a housing 22, and a cooler 23. The semiconductor device 21 and the housing 22 are disposed on one surface 23a of the cooler 23.

[0270] The semiconductor device 21 includes a semiconductor element 30, a substrate 40, and an external connection terminal 60, similar to the configuration shown in the preceding embodiment. The external connection terminal 60 includes a main terminal 61 and a signal terminal 62. The external connection terminal 60 is inserted into the housing 22. The main terminals 61, that is, a P terminal 611, an N terminal 612, and an O terminal 613, are joined to corresponding wiring of the conductor 42, similar to the preceding embodiment.

[0271] The semiconductor device 21 includes a sealing body 90, similar to the configuration shown in the preceding embodiment (see FIG. 20). The sealing body 90 seals other elements of the semiconductor device 21. The sealing body 90 seals a portion of the semiconductor device 21 that is exposed to the accommodation space. The sealing body 90 is filled up to a predetermined position that is lower than the upper end of the housing 22. The sealing body 90 may be included in the semiconductor device 21 or in the semiconductor module 20. As shown in FIG. 55, the sealing body 90 may include a gel 91, or may include a sealing body made of resin.

[0272] The semiconductor device 21 may further include a clip 50. The semiconductor device 21 may further include a snubber circuit 70. As shown in FIGS. 53 to 55, the semiconductor device 21 may further include a clip 50 and a snubber circuit 70.

[0273] The semiconductor device 21 constitutes a power converter. The semiconductor device 21 may provide one arm. As shown in Figs. 53 to 55, the semiconductor device 21 may provide upper and lower arm circuits 9 for one phase. The semiconductor module 20 may include three semiconductor devices 21 each providing an upper and lower arm circuit 9 for one phase. The three semiconductor devices 21, i.e., the three substrates 40, may be arranged side by side in the X direction. The substrate 40 may be fixed to the cooler 23 via a bonding material 24 such as solder.

[0274] The cooler 23 may have a flow path 231 as shown in the preceding embodiment (see FIG. 4). The cooler 23 may be a heat dissipation member such as a heat sink. The heat dissipation member may include heat dissipation fins. The semiconductor module 20 may include fastening holes 233 penetrating the cooler 23 as illustrated in FIG. 54. The semiconductor module 20 may include a collar 234 that provides the fastening holes 233, which is integral with the cooler 23. The collar 234 is a cylindrical surface pressure buffer member formed using a highly rigid material. The collar 234 is a metal member. A plurality of fastening holes 233 may be provided in the cooler 23. As shown in FIG. 54, the collar 234 may be provided on the outer periphery of one surface 23a that is substantially rectangular in plan view. Parts of the collar 234 may be provided at the four corners, and other parts of the collar 234 may be provided at positions between the substrates 40 in the arrangement direction (X direction) of the substrates 40.

[0275] <Housing> The housing 22 includes a frame 221. The frame 221 is fixed to the cooler 23. The frame 221, together with the cooler 23, provides an accommodation space. The frame 221 has walls 221a, 221b, 221c, and 221d. The wall 221a holds a P terminal 611 and an N terminal 612. The wall 221b holds an O terminal 613 (613U, 613V, 613W). The semiconductor device 21 is disposed in the accommodation space. The accommodation space is filled with a sealing body 90.

[0276] The frame 221 is fixed to the cooler 23. The frame 221, together with the cooler 23, provides a storage space. The frame 221 has walls 221a, 221b, 221c, and 221d. The wall 221a holds a P terminal 611 and an N terminal 612. The wall 221b holds an O terminal 613 (613U, 613V, 613W). The semiconductor device 21 is disposed in the storage space. The storage space is filled with a sealing body 90.

[0277] 53, the semiconductor module 20 may include fastening holes 223 penetrating the housing 22. The fastening holes 223 are provided corresponding to the fastening holes 233. For example, the housing 22 and the cooler 23, and further the semiconductor device 21, are fastened and fixed to a case of a power converter (not shown) by bolts inserted through the fastening holes 223 and 233.

[0278] The semiconductor module 20 may include a collar 224 that provides the fastening hole 223, and is integral with the housing 22. The collar 224 is a metal member. The collar 224 is a cylindrical surface pressure buffer member formed using a high rigidity material. The collar 224 is inserted into the housing 22. The semiconductor module 20 may include a plurality of fastening holes 223. As shown in FIG. 53, the collar 224 may be provided on a frame 221 that is substantially rectangular and annular in plan view. Parts of the collar 224 may be provided at the four corners of the frame 221, and other parts of the collar 224 may be provided at positions between the substrates 40 in the arrangement direction (X direction) of the substrates 40.

[0279] FIG. 56 is a cross-sectional view showing the periphery of collar 224. FIG. 56 shows a connection structure between housing 22 and cooler 23. For convenience, collar 234 on the cooler 23 side is omitted in FIG. 56. As shown in FIG. 56, collar 224 may protrude a predetermined amount from lower surface 22a of housing 22 toward cooler 23 and contact one surface 23a. In other words, a configuration may be adopted in which collar 224 contacts one surface 23a of cooler 23 and housing 22 (for example, frame body 221) does not contact one surface 23a. Lower surface 22a is the surface facing one surface 23a of cooler 23.

[0280] The collar 224 ensures a gap (space) of a predetermined height H10 between the lower surface 22a of the housing 22 and the one surface 23a of the cooler 23. The sealant 25 is disposed in this gap. The sealant 25 is interposed between the lower surface 22a of the housing 22 and the one surface 23a of the cooler 23. The sealant 25 has an adhesive function. The sealant 25 fixes the housing 22 to the cooler 23. The sealant 25 has a sealing function. The sealant 25 liquid-tightly seals the gap between the lower surface 22a and the one surface 23a. The sealant 25 suppresses leakage of the sealing body 90 from the accommodation space. The thickness of the sealant 25 is controlled by the amount of protrusion of the collar 224. The thickness of the sealant 25 is approximately equal to the height H10.

[0281] FIG. 57 is a diagram showing the relationship between sealant 25 and thermal resistance. As shown in FIG. 57, the thicker sealant 25 is, the higher the thermal resistance is. If the thickness of sealant 25 is less than 0.1 mm, the amount of protrusion of collar 224 is small, and there is a risk that sealing body 90 will rest on the seating surface. In addition, the manufacturing tolerance is ±0.1 mm. From the above, it is advisable to set the thickness of sealant 25, that is, the amount of protrusion of collar 224 from lower surface 22a, within the range of 0.1 mm or more and 0.3 mm or less.

[0282] As illustrated in Fig. 53, the housing 22 may include a partition wall 222 in addition to the frame body 221. The partition wall 222 divides the storage space according to the boards 40. In the example illustrated in Fig. 53, the housing 22 includes two partition walls 222 so as to divide the storage space into three. The partition walls 222 divide the storage space into the same number as the boards 40 in the X direction, which is the arrangement direction of the boards 40. The partition wall 222 extends in the Y direction perpendicular to the arrangement direction of the boards 40, and both ends thereof are connected to the walls 221a, 221b of the frame body 221.

[0283] The partition walls 222 are provided at positions between adjacent substrates 40 in the arrangement direction of the substrates 40. The partition wall 222a is provided between the substrate 40 constituting the U-phase semiconductor device 21 and the substrate 40 constituting the V-phase semiconductor device 21. The partition wall 222b is provided between the substrate 40 constituting the V-phase semiconductor device 21 and the substrate 40 constituting the W-phase semiconductor device 21. The substrates 40, i.e., the semiconductor devices 21 of each phase, are arranged individually in the accommodation space divided into three.

[0284] The partition walls 222a and 222b may hold at least some of the signal terminals 62. As shown in Fig. 53, some of the signal terminals 62 may be held by the partition walls 222a and 222b, and other parts of the signal terminals may be held by the walls 221b and 221c. Fig. 58 shows a cross-sectional view of a reference example. Fig. 58 corresponds to Fig. 59. In the reference example, r is added to the end of the reference numerals of elements related to the configuration of this embodiment.

[0285] In the reference example shown in FIG. 58, the partition wall 222r of the housing 22r has a protruding portion 225r. The protruding portion 225r is located on the partition wall 222r below the connecting portion 622r of the signal terminal 62r. ​​The protruding portion 225r supports the connecting portion 622r. The connecting portion 622r is disposed on the upper surface 225ar of the protruding portion 225r. The protruding portion 225r is provided between the connecting portion 622r and one surface 23ar of the cooler 23r. In the partition wall 222r, the protruding portion 225r is an expanded portion having a large length (width) in the X direction, and the portion above the protruding portion 225r is a reduced width portion having a narrower width than the protruding portion 225r. The connecting portion 621r of the signal terminal 62r protrudes from the upper surface of the reduced width portion.

[0286] Between the partition wall 222r and the substrate 40r, there is nothing blocking the sealing body 90r between the surface 23ar and the upper surface of the sealing body 90r. Therefore, for example, if the sealing body 90r is a gel 91r, when the vibration of the moving body is transmitted to the gel 91r, the gel 91r can vibrate in a wide range from the surface 23ar to the upper surface of the sealing body 90r. In other words, the deformation amount of the gel 91r is large. Therefore, there is a risk that the bonding wire 80r will break. If the sealing body 90r is made of resin, the resin expands and contracts greatly with temperature changes, so there is a risk that the sealing body 90r will peel off.

[0287] FIG. 59 is a cross-sectional view taken along the line LIX-LIX in FIG. 53. FIG. 59 shows an example of the structure of the semiconductor module 20 around the partition wall 222. As shown in FIG. 59, the partition wall 222 may be provided with a recess 226. The partition wall 222 is an inner surface that contacts the sealing body 90, and has an uneven shape at the portion that contacts the sealing body 90. The connection portion 622 of the signal terminal 62 is disposed on the upper surface 225a of the partition wall 222. The protrusion 225 may be referred to as a support portion that supports the connection portion 622. The bonding wire 80 electrically connects the connection portion 622 and the signal wiring 425.

[0288] The recess 226 is provided directly below the protrusion 225. The recess 226 is sometimes referred to as a hollow portion. The recess 226 is provided between the protrusion 225 and one surface 23a of the cooler 23. The partition wall 222 is recessed from the lower surface 22a to the protrusion 225. The upper portion of the protrusion 225 is also recessed relative to the protrusion 225. The protrusion 225 protrudes toward the substrate 40. In the example shown in FIG. 59, a portion of the substrate 40 is inserted directly below the protrusion 225. The substrate 40 is inserted into the region recessed by the recess 226. In a plan view in the Z direction, a portion of the substrate 40 overlaps with the protrusion 225.

[0289] Fig. 60 is a cross-sectional view showing another example of the structure around partition wall 222. Fig. 60 corresponds to Fig. 59. In the example shown in Fig. 60, substrate 40 does not overlap convex portion 225 in plan view. Except for this, the configuration is the same as that shown in Fig. 59. Partition wall 222 has convex portion 225 and concave portion 226.

[0290] The uneven structure may be provided on at least one of the partition walls 222a and 222b. The uneven structure may be provided on at least one of the walls 221a, 221b, 221c, and 221d of the frame body 221. It is particularly effective to provide the uneven structure on the walls 221b and 221c that hold the signal terminal 62 and the partition walls 222a and 222b. In the example shown in FIG. 53, the uneven structure is provided on the partition walls 222a and 222b and the walls 221b, 221c, and 221d. In either case, the substrate 40 overlaps the protrusion 225.

[0291] <Summary of the Fifth Embodiment> The semiconductor module 20 may include a cooler 23, a housing 22, a substrate 40, a semiconductor element 30, a main terminal 61, a sealing body 90, a sealant 25, and a metal member having a fastening hole 223. The substrate 40 is disposed in an accommodation space formed by the housing 22 disposed on one surface 23a of the cooler 23 and the cooler 23, and the semiconductor element 30 is joined to the conductor 42 of the substrate 40. The main terminal 61 inserted into the housing 22 is joined to the conductor 42. The sealing body 90 fills the accommodation space. The sealant 25 is interposed between the one surface 23a of the cooler 23 and the lower surface 22a of the housing 22. The metal member is integrated with the housing 22. In the above configuration, the metal member may protrude from the housing 22 toward the one surface 23a and contact the one surface 23a so as to secure a gap of a predetermined height H10 between the one surface 23a of the cooler 23 and the lower surface 22a of the housing 22.

[0292] The seal material 25 is disposed in the gap of a predetermined height H10 secured by the metal member. This ensures sealing performance and suppresses leakage of the sealing body 90. In addition, the metal member is in contact with the cooler 23, and the resin housing 22 is not in contact with the cooler 23. This prevents the housing 22 from pressing strongly against the cooler 23 when the housing 22 is fastened. In other words, it prevents the stress generated in the housing 22 by the pressing from acting on the joint between the main terminal 61 and the conductor 42 inserted in the housing 22, and further on the board 40. This prevents distortion of the joint and the board 40.

[0293] 53 and 56 may be used as the metal member that provides the fastening hole 223. The collar 224 is inserted into the housing 22. With a simple configuration, distortion of the joint and the substrate 40 can be suppressed.

[0294] The amount of protrusion of the metal member from the housing 22 should be set within the range of 0.1 mm to 0.3 mm. In other words, the thickness of the seal material 25 should be set within the range of 0.1 mm to 0.3 mm. This makes it possible to prevent the seal 90 from resting on the seating surface, that is, to prevent deterioration of the fastening fixation due to resin creep. Also, the thermal resistance can be suppressed.

[0295] The semiconductor module 20 may include only one substrate 40, or may include multiple substrates 40. Multiple substrates 40 may be arranged side by side in a predetermined direction (X direction), and fastening holes 223 may be provided at positions between adjacent substrates 40 in the arrangement direction. Even if the cooler 23 (e.g., a cooling plate) warps due to a difference in linear expansion coefficient between the cooler 23 and the substrate 40, by providing fixing points between the substrates 40 in the arrangement direction, it is possible to reduce stress acting on the substrate 40 and the bonding material 24 due to fastening.

[0296] The semiconductor element 30 and the signal terminal 62 may be electrically connected via a bonding wire 80, and the bonding wire 80 may be sealed by a gel 91 as a sealant 90 filled in the storage space. In this configuration, the housing 22 may be provided with a partition wall 222 that divides the storage space according to the arrangement of the multiple boards 40. Even if vibrations of the moving body are transmitted to the gel 91, the partition wall 222 narrows the range in which the gel 91 can deform, so that the amount of deformation of the gel 91 can be reduced. Thus, breakage of the bonding wire 80 can be suppressed.

[0297] The semiconductor module 20 may include three substrates 40 that provide upper and lower arm circuits 9 for one phase together with the semiconductor elements 30. In this configuration, a partition wall 222 (222a, 222b) may be provided between adjacent substrates 40 to divide the accommodation space into three spaces, and the substrates 40 may be individually disposed in the divided spaces. This makes it possible to suppress breakage of the bonding wires 80 in all of the semiconductor devices 21 in the semiconductor module 20 that provides the inverter 6.

[0298] The partition wall 222 may be combined with the above-mentioned configuration in which a gap of the predetermined height H10 is secured by the metal member, or may be used alone. For example, the partition wall 222 may be provided in a configuration in which the collar 224 is not used.

[0299] The housing 22 may have a protrusion 225 and a recess 226 provided between the protrusion 225 and the one surface 23a of the cooler 23 as a portion with which the sealing body 90 comes into contact. When the sealing body 90 is made of resin, the anchor effect can suppress interfacial peeling of the resin. Also, the protruding protrusion 225 limits the area in which the resin expands and contracts, so that resin peeling can be suppressed. When the sealing body 90 is made of gel 91, the protruding protrusion 225 limits the deformation of the gel 91 due to vibration transmission, so that the amount of deformation can be reduced, and thus breakage of the bonding wire 80 can be suppressed.

[0300] In a configuration in which the housing 22 has the convex portion 225 and the concave portion 226, a part of the substrate 40 may be arranged to overlap the convex portion 225 in a plan view. That is, the substrate 40 may be arranged to enter directly under the convex portion 225. When the sealing body 90 is a resin, the anchor effect can be enhanced. In addition, since the substrate 40 is located directly under the convex portion 225, the region in which the resin expands and contracts can be further restricted. Therefore, resin peeling can be effectively suppressed. For example, peeling of the sealing body 90 from the substrate 40 can be suppressed. When the sealing body 90 is a gel 91, the substrate 40 is located directly under the convex portion 225, so that deformation of the gel 91 can be further suppressed. Therefore, breakage of the bonding wire 80 can be effectively suppressed. In addition, since the substrate 40 enters directly under the convex portion 225, the size in the direction perpendicular to the Z direction can be reduced.

[0301] In a configuration in which the housing 22 has the protrusion 225 and the recess 226, the signal terminal 62 may be held by the housing 22, and the connection portion 622 may be disposed on the upper surface 225a of the protrusion 225. This can prevent the bonding wire 80 connected to the connection portion 622 from breaking. Since the upper surface 225a of the protrusion 225 is used to connect the bonding wire 80, the size can be reduced while preventing resin peeling due to the anchor effect. In addition, this can prevent the bonding wire 80 connected to the connection portion 622 from breaking.

[0302] The configuration having the convex portion 225 and the concave portion 226 may be combined with the above-mentioned configuration in which a gap of a predetermined height H10 is secured by the metal member, or may be used alone without being combined. The configuration having the convex portion 225 and the concave portion 226 may be combined with the partition wall 222, or may be used alone without being combined. For example, in a configuration in which the housing 22 does not have the partition wall 222, the convex portion 225 and the concave portion 226 may be provided on the frame body 221.

[0303] The configuration described in this embodiment can be combined with the configuration described in the preceding embodiment.

[0304] Sixth embodiment This embodiment is a modification based on the preceding embodiment, and the description of the preceding embodiment can be used.

[0305] <Semiconductor module> FIG. 61 is a cross-sectional view showing an example of the semiconductor module 20 according to this embodiment. The semiconductor module 20 includes a semiconductor device 21, a cooler 23, and a bonding material 24, similar to the configuration shown in the preceding embodiment (see FIG. 2 to FIG. 4). The semiconductor device 21 is disposed on one surface 23a of the cooler 23. The cooler 23 may have a configuration having a flow path 231 as shown in the preceding embodiment (see FIG. 4), or may be a heat dissipation member such as a heat sink. The bonding material 24 is interposed between the semiconductor device 21 and the cooler 23. The heat conductive member interposed between the semiconductor device 21 and the cooler 23 is not limited to the bonding material 24. A TIM or the like may be used. Although not shown, the semiconductor module 20 may include a housing 22.

[0306] Fig. 62 is a plan view showing an example of the semiconductor device 21. Fig. 62 shows a substrate 40 and electronic components mounted on the substrate 40. The semiconductor device 21 includes a semiconductor element 30 and a substrate 40, similar to the configuration shown in the preceding embodiment (see Figs. 5 and 6). In Fig. 62, the semiconductor element 30 is shown in a simplified form.

[0307] As shown in Fig. 62, the semiconductor device 21 may include a snubber circuit 70. Although not shown, the semiconductor device 21 may include a clip 50. The semiconductor device 21 may include an external connection terminal 60. The semiconductor device 21 may include a sealing body 90, similar to the configuration shown in the preceding embodiment (see Fig. 20). The sealing body 90 may be included in the semiconductor device 21 or in the semiconductor module 20. The sealing body 90 may be a gel 91, or may be a sealing body made of resin.

[0308] The semiconductor device 21 constitutes a power converter. The semiconductor device 21 includes a plurality of semiconductor elements 30. The configuration of the semiconductor elements 30 is the same as that shown in the preceding embodiment (see FIG. 5 and FIG. 18). The semiconductor device 21 includes a plurality of semiconductor elements 30 connected in parallel to each other. The parallel-connected semiconductor elements 30 provide one arm. The semiconductor device 21 may provide only one arm. As shown in FIG. 61 and FIG. 62, the semiconductor device 21 provides upper and lower arm circuits 9 for one phase. The semiconductor device 21 providing the upper and lower arm circuits 9 includes a plurality of semiconductor elements 30H providing the upper arm 9H and a plurality of semiconductor elements 30L providing the lower arm 9L. The semiconductor elements 30H correspond to the upper arm elements, and the semiconductor elements 30L correspond to the lower arm elements.

[0309] A plurality of semiconductor elements 30H are arranged in the X direction. A plurality of semiconductor elements 30L are arranged in the X direction. The semiconductor elements 30H and the semiconductor elements 30L are arranged in the Y direction. The number of semiconductor elements 30H and 30L may be the same or different. In the example shown in FIG. 62, the configuration of the semiconductor elements 30H and 30L is common to each other, and the number of the semiconductor elements 30H and 30L is the same.

[0310] The semiconductor module 20 may include three semiconductor devices 21 each providing one phase of upper and lower arm circuits 9, similarly to the configuration shown in the preceding embodiment. The three semiconductor devices 21, i.e., the three substrates 40, may be arranged side by side in the X direction.

[0311] <Semiconductor elements and substrates> Fig. 63 is a cross-sectional view taken along line LXIII-LXIII in Fig. 62. Similar to the configuration shown in the preceding embodiment (see Fig. 4), substrate 40 includes insulating base material 41 and conductors 42 and 43. Conductor 42 corresponds to the front conductor, and conductor 43 corresponds to the back conductor. Conductor 42 is patterned and has a plurality of wiring patterns. Conductor 43 may be a so-called solid conductor that is not patterned, for example, as shown in Fig. 63. Conductor 43 may be patterned.

[0312] The conductor 42 includes an element mounting portion as a wiring pattern. The conductor 42 includes at least one element mounting portion. The drain electrodes 31 of the multiple semiconductor elements 30 arranged in the X direction are connected to the element mounting portion. As shown in Figs. 62 and 63, the conductor 42 may have, as the element mounting portion, a base 421a on which the multiple semiconductor elements 30H are mounted and a base 423a on which the multiple semiconductor elements 30L are mounted. The base 421a corresponds to the upper arm mounting portion, and the base 423a corresponds to the lower arm mounting portion.

[0313] The base 421a extends in the X direction. The multiple semiconductor elements 30H are arranged on the base 421a and lined up in the X direction. The source electrodes 32 of the multiple semiconductor elements 30H are bonded to the common base 421a. As a result, the multiple semiconductor elements 30H are connected in parallel to each other. The base 423a extends in the X direction. The multiple semiconductor elements 30L are arranged on the base 423a and lined up in the X direction. The source electrodes 32 of the multiple semiconductor elements 30L are bonded to the common base 423a. As a result, the multiple semiconductor elements 30L are connected in parallel to each other.

[0314] One of the element mounting portions is disposed in a central region of the substrate 40 in the Y direction. The central region is a region of a predetermined range centered on the central position of the substrate 40 in the Y direction. As shown in FIG. 62 and FIG. 63, in a configuration including two base portions 421a, 423a, the base portion 421a may be disposed in the central region of the substrate 40. That is, a plurality of semiconductor elements 30H may be mounted in the central region of the substrate 40 in the Y direction. In this configuration, the base portion 423a is disposed outside the central region in the Y direction. A plurality of semiconductor elements 30L are mounted on the substrate 40 outside the central region in the Y direction.

[0315] The conductor 42 may be divided into a plurality of wiring patterns in the Y direction. For example, in the portion indicated by the dashed line in Fig. 62, the conductor 42 is divided into an N wiring 422, a relay wiring 424, a signal wiring 425, a base 421a, an N wiring 422, a base 423a, and a signal wiring 426. The conductor 42 is laid out in a divided manner according to the bases 421a and 423a which are the mounting portions of the semiconductor element 30, the relay wiring 424 which are the mounting portions of the capacitor 71 and the resistor 72 which are passive components, and the signal wirings 425 and 426.

[0316] As shown in Fig. 62, the substrate 40 may have a non-arrangement region 411 where the conductor 42 is not arranged, which is provided so as to cross the conductor 42 in the X direction. The non-arrangement region 411 is a region where the conductor 42 is not arranged on the insulating base material 41, and extends from one end to the other end of the substrate 40 in the X direction. The non-arrangement region 411 separates the conductor 42 in the Y direction. The number of non-arrangement regions 411 is not particularly limited. The substrate 40 may have only one non-arrangement region 411 as shown in Fig. 62, or may have multiple non-arrangement regions 411.

[0317] The conductor 42 may have an extension portion 421b and an N wiring 422 as a main wiring portion. The extension portion 421b electrically connects the drain electrode 31 of the semiconductor element 30H to the P terminal 611 via the base portion 421a. The N wiring 422 electrically connects the source electrode 32 of the semiconductor element 30L to the N terminal 612. As shown in FIG. 62 and FIG. 63, the N wiring 422, which is a main wiring electrically isolated from the semiconductor element 30H arranged in the central region, may be arranged between the base portion 421a and the base portion 423a. That is, the main wiring may be arranged between the base portions 421a and 423a in the Y direction.

[0318] The wiring pattern of the conductor 42 shown in FIG. 62 is similar to that of the preceding embodiment (see FIG. 5 and FIG. 6). The N wiring 422 has a base 422a located between the bases 421a and 423a, and an extension 422b connecting the main terminal 612 and the base 422a. A terminal connection 422c provided at an end of the extension 422b is aligned with the terminal connection 421c of the P wiring 421 in the X direction. The N wiring 422 has two extensions 422b extending from both ends of the base 422a. The N wiring 422 has a substantially C-shaped planar shape, and the two extensions 422b sandwich the P wiring 421, the relay wiring 424, and the signal wiring 425 in the X direction.

[0319] The area relationship between bases 421a and 423a in plan view from the Z direction is not particularly limited. For example, they may be equal in area. The area of ​​the element mounting portion arranged in the central region may be smaller than the area of ​​the element mounting portion arranged outside the central region. In the example shown in FIG. 62, the area of ​​base 421a arranged in the central region is smaller than the area of ​​base 423a arranged outside the central region.

[0320] The interval between the semiconductor elements 30 mounted on the bases 421a and 423a is not particularly limited. For example, as shown in FIG. 62, the interval between the semiconductor elements 30H and the interval between the semiconductor elements 30L may be substantially equal. The interval between the semiconductor elements 30H may be narrower than the interval between the semiconductor elements 30L. For example, the interval between the semiconductor elements 30H on the base 421a having a small area and disposed in the central region may be narrower than the interval between the semiconductor elements 30L on the base 423a having a large area and disposed outside the central region.

[0321] The thickness of the conductor 42 may be substantially equal to the thickness of the conductor 43. As shown in FIG.

[0322] <Summary of the Sixth Embodiment> The semiconductor module 20 may include a cooler 23, a substrate 40, a bonding material 24, and a plurality of semiconductor elements 30. The substrate 40 is disposed on one surface 23a of the cooler 23, and a bonding material 24 (thermal conductive member) is interposed between a conductor 43 (rear surface conductor) of the substrate and the cooler 23. Drain electrodes 31 (first main electrodes) of the plurality of semiconductor elements 30 are bonded to a conductor 42 (surface conductor) of the substrate 40. In the above configuration, one of the element mounting sections in which the drain electrodes 31 of the plurality of semiconductor elements 30 arranged in the X direction are commonly connected may be disposed in a central region of the substrate 40 in the Y direction (orthogonal direction).

[0323] According to the above configuration, the substrate 40 has a convex warp toward the cooler 23 due to the difference in expansion and contraction between the patterned conductors 42 and 43. The substrate 40 warps due to heat during the manufacturing process. The substrate 40 warps in the Y direction with the central region as the apex of the convex. The substrate 40 warps more in the Y direction than in the X direction in which the multiple semiconductor elements 30 are arranged. As illustrated in FIG. 64, the substrate 40 is fixed to the cooler 23 via a heat conductive member in a warped state. For example, the substrate 40 warps toward the cooler 23 due to heat during soldering (reflow), and the substrate 40 is fixed (soldered) to the cooler 23 in a warped state. The thickness of the bonding material 24 is thin near the apex of the convex, that is, directly below the central region. Since the element mounting portion is disposed in the central region, the thermal resistance can be reduced in a configuration in which multiple semiconductor elements 30 are connected in parallel. The heat of the semiconductor element 30, which is a heat generating body, can be effectively dissipated to the cooler 23.

[0324] 63, the conductor 42 may be divided into a plurality of wiring patterns in the Y direction. By dividing the wiring patterns into a plurality of wiring patterns and narrowing the portion that expands and contracts, the substrate 40 becomes more likely to warp in the Y direction. Therefore, the thermal resistance between the substrate 40 and the cooler 23 directly below the plurality of semiconductor elements 30 located in the central region can be effectively reduced.

[0325] 62, the substrate 40 may be provided with a non-placement area 411 that crosses the conductor 42 in the X direction. By providing the non-placement area 411, the substrate 40 is more likely to warp in the Y direction. Therefore, it is possible to effectively reduce the thermal resistance between the substrate 40 and the cooler 23 directly below the multiple semiconductor elements 30 located in the central region.

[0326] The multiple semiconductor elements 30 may include multiple semiconductor elements 30H (upper arm elements) arranged in the X direction and multiple semiconductor elements 30L (lower arm elements) arranged in the X direction. The element mounting portion may include a base 421a (upper arm element portion) to which the drain electrodes 31 of the semiconductor elements 30H are commonly connected, and a base 423a (lower arm element portion) to which the drain electrodes 31 of the semiconductor elements 30L are commonly connected. In the above configuration, one of the bases 421a and 423a may be disposed in the central region of the substrate 40 in the Y direction, and the other of the bases 421a and 423a may be disposed outside the central region. In other words, the present invention may be applied to a configuration that provides upper and lower arm circuits 9.

[0327] For example, when the base 421a is disposed in the central region as illustrated in Fig. 62, the thermal resistance between the substrate 40 and the cooler 23 directly below the multiple semiconductor elements 30H can be effectively reduced. Although not shown, when the base 423a is disposed in the central region, the thermal resistance between the substrate 40 and the cooler 23 directly below the multiple semiconductor elements 30L can be effectively reduced.

[0328] In a configuration providing upper and lower arm circuits 9, a main wiring section electrically isolated from the semiconductor elements 30 arranged in the central region may be arranged between the bases 421a, 423a. By arranging the main wiring section, the conductor 42 is divided into more wiring patterns in the Y direction. Therefore, the substrate 40 is more likely to warp in the Y direction. The thermal resistance between the substrate 40 and the cooler 23 directly below the multiple semiconductor elements 30 located in the central region can be effectively reduced.

[0329] The area of ​​the bases 421a, 423a in a plan view in the Z direction may be smaller for the bases arranged in the central region than for the bases arranged outside the central region. The semiconductor element 30 in the central region can effectively dissipate heat even if the base is small because the thermal resistance directly below can be reduced as described above. The semiconductor element 30 outside the central region can effectively dissipate heat even if the thermal resistance directly below is larger than that in the central region because the base area is large. In other words, heat from both the semiconductor elements 30H, 30L constituting the upper and lower arm circuits 9 can be effectively dissipated.

[0330] In a configuration in which one of the element mounting parts is disposed in the central region of the substrate 40 in the Y direction, the conductor 42 may be thicker than the conductor 43. By making the conductor 42 thicker, the amount of warping of the substrate 40 can be reduced. In other words, outside the central region, the increase in thermal resistance due to warping can be suppressed. Note that the substrate 40 will warp convexly toward the cooler 23 when the relationship is: volume of the conductor 43 ≧ volume of the conductor 42. The conductor 42 is patterned so as to warp convexly toward the cooler 23 when the relationship is: volume of the conductor 43 ≧ volume of the conductor 42. Even if the conductor 42 is thickened, the substrate 40 will warp convexly toward the cooler 23 as long as the relationship is within a range in which the relationship is: volume of the conductor 43 ≧ volume of the conductor 42.

[0331] <Modification> As shown in FIG. 65, in a semiconductor device 21 providing one arm, one of the element mounting portions may be disposed in the central region of the substrate 40 in the Y direction. A plurality of semiconductor elements 30 are mounted on a base 427a (element mounting portion) of a drain wiring 427. The base 427a is disposed in the central region of the substrate 40 in the Y direction perpendicular to the arrangement direction (X direction) of the plurality of semiconductor elements 30. The base 427a and the source wiring 428 are aligned in the Y direction. The source electrode 32 of the semiconductor element 30 is electrically connected to the source wiring 428 via a clip 50.

[0332] The configuration described in this embodiment can be combined with the configuration described in the preceding embodiment.

[0333] Seventh embodiment This embodiment is a modification based on the preceding embodiment, and the description of the preceding embodiment can be used.

[0334] <Oscillation in parallel connection> FIG. 66 is an equivalent circuit diagram showing an example of an upper arm 9H. In FIG. 66, two MOSFETs 11 are connected in parallel to form the upper arm 9H. The MOSFETs 11 have parasitic capacitances between the gate and source, between the gate and drain, and between the drain and source. The gate electrodes of the two MOSFETs 11 are connected to each other. A gate drive signal is input to each gate electrode from a common gate driver (GD) 14. The gate wiring connecting the gate driver 14 and each gate electrode has resistance Rg and parasitic inductance Lg. The source electrodes of the two MOSFETs 11 are connected to each other. The wiring connecting the source electrodes has parasitic inductance Ls.

[0335] In a parallel circuit of multiple MOSFETs 11, an oscillation circuit is formed by the parasitic capacitance of the MOSFETs 11, the parasitic inductance of the wiring, etc. Oscillation occurs when an input signal input from the gate driver 14 to the gate electrode and a feedback signal on a path via the parasitic capacitance, parasitic inductance, etc. are in phase and the gain is 0 dB or more, that is, the feedback signal is amplified. When the resonance condition is met, oscillation occurs.

[0336] The parasitic inductance Ls between the source electrodes is large, while the parasitic inductance Lg of the gate wiring is small. In order to suppress oscillation, it is effective to reduce the parasitic inductance Ls between the source electrodes and / or to increase the gate impedance.

[0337] <Reducing parasitic inductance between source electrodes> FIG. 67 shows an example of the semiconductor device 21 according to this embodiment. The basic configuration of the semiconductor device 21 is similar to the configuration described in the preceding embodiment (see FIGS. 2 to 6 and 18). The semiconductor device 21 includes a plurality of semiconductor elements 30 and a substrate 40. As shown in FIG. 67, the semiconductor device 21 may include a clip 50. The semiconductor device 21 may include an external connection terminal 60. The semiconductor device 21 may include a snubber circuit 70.

[0338] As described above, the semiconductor element 30 has the source electrode 32 and the pad 33 arranged on one surface 34a of the semiconductor substrate 34, and the drain electrode 31 arranged on the back surface 34b. The multiple semiconductor elements 30 may provide only one arm. As shown in FIG. 67, the semiconductor device 21 may provide upper and lower arm circuits 9 for one phase. The semiconductor device 21 providing the upper and lower arm circuits 9 includes multiple semiconductor elements 30H providing upper arms 9H and multiple semiconductor elements 30L providing lower arms 9L. The multiple semiconductor elements 30H are aligned in the X direction. The multiple semiconductor elements 30L are aligned in the X direction. The semiconductor elements 30H and the semiconductor elements 30L are aligned in the Y direction.

[0339] The semiconductor module 20 may include three semiconductor devices 21 each providing one phase of upper and lower arm circuits 9, similarly to the configuration shown in the preceding embodiment. The three semiconductor devices 21, i.e., the three substrates 40, may be arranged side by side in the X direction.

[0340] The substrate 40 has an insulating base material 41 and a conductor 42 disposed on the insulating base material 41, similar to the configuration described in the preceding embodiment. The conductor 42 corresponds to a wiring. The substrate 40 may have a conductor 43 on the surface opposite to the conductor 42. The conductor 42 is patterned. The conductor 42 has a P wiring 421, an N wiring 422, and an O wiring 423 to provide the upper and lower arm circuits 9. As shown in FIG. 67, the conductor 42 may have a relay wiring 424. The conductor 42 may have signal wirings 425 and 426.

[0341] A plurality of semiconductor elements 30H are mounted on the base 421a of the P wiring 421. The drain electrodes 31 of the plurality of semiconductor elements 30H are joined to the base 421a. The plurality of semiconductor elements 30H are connected in parallel to each other. A plurality of semiconductor elements 30L are mounted on the base 423a of the O wiring 423. The drain electrodes 31 of the plurality of semiconductor elements 30L are joined to the base 423a. The plurality of semiconductor elements 30L are connected in parallel to each other. The source electrodes 32 of the plurality of semiconductor elements 30H are electrically connected to the base 423a of the O wiring 423 via the clip 50H. The source electrodes 32 of the plurality of semiconductor elements 30L are electrically connected to the base 422a of the N wiring 422 via the clip 50L.

[0342] As shown in FIG. 67, the semiconductor device 21 may include a metal plate 100. The metal plate 100 is a plate formed using a metal material having good conductivity such as copper. The metal plate 100 may be, for example, flat. The metal plate 100 shorts the source electrodes 32 of the multiple semiconductor elements 30 connected in parallel. The metal plate 100 electrically connects the multiple source electrodes 32 to each other with low impedance. The metal plate 100 may be joined to the source electrode 32 or may be connected to the source electrode 32 via another metal member. The metal plate 100 bridges the multiple source electrodes 32. The metal plate 100 may be arranged so as to be included in the wiring on which the multiple semiconductor elements 30 to be connected are mounted in a planar view.

[0343] As shown in Fig. 67, the metal plate material 100 may include a metal plate material 100H and a metal plate material 100L. The metal plate material 100H shorts the source electrodes 32 of the multiple semiconductor elements 30H. The metal plate material 100L shorts the source electrodes 32 of the multiple semiconductor elements 30L. The metal plate material 100H is joined to a clip 50H. The metal plate material 100L is joined to a clip 50L. Although not shown in the figure, the clip 50 may also have the function of the metal plate material 100.

[0344] Fig. 68 shows an equivalent circuit of the upper and lower arm circuits 9 provided by the semiconductor device 21 illustrated in Fig. 67. The short-circuit portion made of the metal plate material 100H shorts the source electrodes 32 of the multiple MOSFETs 11 constituting the upper arm 9H. The short-circuit portion made of the metal plate material 100L shorts the source electrodes 32 of the multiple MOSFETs 11 constituting the lower arm 9L.

[0345] The configuration for short-circuiting the source electrodes 32 is not limited to the above example. For example, as shown in FIG. 69, instead of the metal plate 100, a bonding wire 80 may be used. The bonding wire 80 electrically connects adjacent joints 51 in the X direction. As shown in FIG. 69, the bonding wire 80 may electrically connect adjacent joints 51 joined to the source electrodes 32 of different semiconductor elements 30H. The bonding wire 80 may electrically connect adjacent joints 51 joined to the source electrodes 32 of different semiconductor elements 30L. The number of bonding wires 80 connecting adjacent joints 51 is not particularly limited. As shown in FIG. 69, a plurality of bonding wires 80 may be connected.

[0346] As shown in FIG. 70, a configuration without using the clip 50 may be used. The metal plate 100H is joined to the source electrode 32 of the semiconductor element 30H. The metal plate 100H bridges four semiconductor elements 30H. A plurality of bonding wires 80 are connected to the metal plate 100H. The bonding wires 80 extend in the Y direction in a plan view. One end of the bonding wire 80 is connected to the metal plate 100H, and the other end is connected to the base 423a of the O wiring 423. The plurality of bonding wires 80 are arranged in the X direction in a plan view.

[0347] Similarly, the metal plate 100L is bonded to the source electrode 32 of the semiconductor element 30L. The metal plate 100L bridges the four semiconductor elements 30L. A plurality of bonding wires 80 are connected to the metal plate 100L. The bonding wires 80 extend in the Y direction in a plan view. One end of the bonding wire 80 is connected to the metal plate 100L, and the other end is connected to the base 422a of the N wiring 422. The plurality of bonding wires 80 are arranged in the X direction in a plan view. The bonding wires 80 connected to the metal plate 100H and the bonding wires 80 connected to the metal plate 100L are alternately arranged in the X direction.

[0348] As shown in Figs. 71, 72, and 73, a metal block 101 of a predetermined height may be interposed between the source electrode 32 of the semiconductor element 30 and the metal plate material 100. Fig. 71 shows the periphery of the semiconductor elements 30H and 30L in the semiconductor device 21. Fig. 72 is a cross-sectional view taken along the line LXXII-LXXII in Fig. 71. Fig. 73 is an enlarged view of the region LXXIII shown by the dashed line in Fig. 72. The metal block 101 may be called a terminal, a conductive spacer, or the like. The metal block 101 is provided separately for the semiconductor element 30. The metal block 101 is connected to the source electrode 32 via a bonding material such as solder 81. The metal block 101 is connected to the metal plate material 100 via a bonding material 83 such as solder.

[0349] As shown in FIG. 73, the metal block 101 may have an oxide film 102. The oxide film 102 is a surface facing the semiconductor element 30, and is provided on a portion of the insulating film 35 facing the element upper portion 354 (see FIGS. 18 and 19). The metal block 101 may have a base material made of a metal with good conductivity such as copper, and a plating film formed on the base material. The plating film contains, for example, Ni as a main component. The oxide film 102 is formed, for example, by irradiating the plating film with laser light. The oxide film 102 has low wettability with respect to solder. The oxide film 102 can prevent the solder 81 from being located above the element upper portion 354.

[0350] <Increase in gate impedance> Fig. 74 shows another example of the semiconductor device 21. The semiconductor device 21 includes a plurality of semiconductor elements 30 and a substrate 40, similar to the configuration shown in Fig. 67. As shown in Fig. 74, the semiconductor device 21 may include a clip 50. The semiconductor device 21 may include an external connection terminal 60. The semiconductor device 21 may include a snubber circuit 70.

[0351] The semiconductor device 21 may include a passive component 103. The passive component 103 includes a ferrite bead or a balance resistor. The passive component 103 is disposed in a gate wiring (signal path) connecting the gate electrode of the MOSFET 11, that is, the gate pad 33G of the semiconductor element 30, and the gate driver 14, and increases the impedance of the gate wiring. As shown in FIG. 74, in a configuration in which the substrate 40 includes signal wirings 425 and 426, the passive component 103 may be mounted on the gate wirings 425G and 426G.

[0352] In the example shown in Fig. 74, the semiconductor device 21 includes a signal terminal 62. For convenience, Fig. 74 shows only a gate terminal 62G as the signal terminal 62. The arrangement and connection structure of the signal wirings 425, 426 including gate wirings 425G, 426G, and the signal terminal 62 including a gate terminal 62G are similar to the configurations described in the preceding embodiment (see Figs. 5 and 42). The signal wirings 425 having the same function and divided by the P wiring 421 are electrically connected by a bonding wire 80.

[0353] The passive component 103 is mounted on the gate wiring 425G so as to electrically relay between a portion to which the gate terminal 62G is electrically connected and a portion to which the gate pad 33G is electrically connected. The passive component 103 is mounted on the gate wiring 426G so as to electrically relay between a portion to which the gate terminal 62G is electrically connected and a portion to which the gate pad 33G is electrically connected.

[0354] The multiple semiconductor elements 30 connected in parallel are divided into groups with a number smaller than the number of elements. The multiple semiconductor elements 30 connected in parallel are grouped together with elements arranged in a similar manner. In the example shown in FIG. 74, the semiconductor elements 30H are divided into two groups 301H and 302H. Of the four semiconductor elements 30H aligned in the X direction, the two semiconductor elements 30H on one end side belong to the group 301H, and the two semiconductor elements 30H on the other end side belong to the group 302H. Similarly, the semiconductor elements 30L are divided into two groups 301L and 302L. Of the four semiconductor elements 30L aligned in the X direction, the two semiconductor elements 30L on one end side belong to the group 301L, and the two semiconductor elements 30L on the other end side belong to the group 302L.

[0355] The above-mentioned passive components 103 are provided for each group, not for each semiconductor element 30. As shown in FIG. 74, the gate pad 33G of the semiconductor element 30H belonging to the group 301H is electrically connected to the gate wiring 425G located on the group 301H side in the X direction via a bonding wire 80. The passive components 103 are mounted on the gate wiring 425G corresponding to the group 301H. The gate pad 33G of the semiconductor element 30H belonging to the group 302H is electrically connected to the gate wiring 425G located on the group 302H side in the X direction via a bonding wire 80. The passive components 103 are mounted on the gate wiring 425G corresponding to the group 302H.

[0356] Similarly, the gate pad 33G of the semiconductor element 30L belonging to the group 301L is electrically connected to a gate wiring 426G located on the group 301L side in the X direction via a bonding wire 80. A passive component 103 is mounted on the gate wiring 426G corresponding to the group 301L. The gate pad 33G of the semiconductor element 30L belonging to the group 302L is electrically connected to a gate wiring 426G located on the group 302L side in the X direction via a bonding wire 80. A passive component 103 is mounted on the gate wiring 426G corresponding to the group 302L.

[0357] In the example shown in FIG. 75, the passive component 103 is disposed outside the semiconductor device 21. As described above, the passive component 103 is provided in the signal path between the gate driver 14 and the gate pad 33G. The passive component 103 may be mounted on a circuit board (not shown) on which the gate driver 14 is formed. The gate terminal 62G is provided for each group. The semiconductor device 21 includes a gate terminal 62G corresponding to the group 301H, a gate terminal 62G corresponding to the group 302H, a gate terminal 62G corresponding to the group 301L, and a gate terminal 62G corresponding to the group 302L.

[0358] A configuration for reducing the inductance between source electrodes 32 and a configuration for increasing the impedance of the gate wiring may be combined. For example, as shown in Fig. 76, a configuration for shorting source electrodes 32 with a metal plate 100 and a configuration for providing a passive component 103 for each group may be combined. In Fig. 76, a metal plate 100 is provided for each group. The metal plate 100 shorts the source electrodes 32 of two semiconductor elements 30 that belong to a common group.

[0359] Although an example in which the passive component 103 is mounted on the substrate 40 has been shown, the present invention is not limited to this. A printed circuit board may be prepared separately from the insulating substrate as the substrate 40, and the passive component 103 may be mounted on the printed circuit board. The insulating base material of the printed circuit board contains resin. The insulating base material of the insulating substrate does not contain resin and is made of, for example, ceramic. The printed circuit board allows for finer wiring patterns than the insulating substrate.

[0360] The semiconductor device 21 shown in FIG. 77 includes an intermediate board 104. The intermediate board 104 is a printed circuit board. A passive component 103 is mounted on the intermediate board 104. The board 40 shown in FIG. 77 is an insulating board. As shown in FIG. 77, the intermediate board 104 may be mounted on the board 40. The intermediate board 104 is disposed on an insulating base material 41 made of ceramic. The intermediate board 104 is, for example, adhesively fixed to the board 40. In the example shown in FIG. 77, the semiconductor device 21 includes three semiconductor elements 30H. An intermediate board 104 is provided for each semiconductor element 30H. A passive component 103 is mounted on each of the intermediate boards 104. The semiconductor elements 30H are arranged in the X direction, and the intermediate boards 104 are also arranged in the X direction. The intermediate boards 104 are arranged to avoid the P wiring 421 and the N wiring 422.

[0361] The pad 33 is connected to a corresponding wiring of the relay board 104 via a bonding wire 80. The passive component 103 is provided on a signal path connecting a gate pad 33G of the semiconductor element 30H corresponding to the mounted relay board 104 and a gate terminal 62G. Wires having the same function of adjacent relay boards 104 are electrically connected via a bonding wire 80. One of the relay boards 104 at the end in the X direction is electrically connected to the gate terminal 62G via a bonding wire 80.

[0362] The relay substrate 104 may be disposed on a metal member bonded to the source electrode 32 of the semiconductor element 30. For example, as shown in FIG. 78, the relay substrate 104 may be disposed on a metal plate 100. The metal plate 100 is bonded to a clip 50H, similar to the configuration shown in FIG. 67. The metal plate 100 extends in the X direction so as to overlap with the three semiconductor elements 30H in a plan view. The metal plate 100 shorts the source electrodes 32 of the three semiconductor elements 30H via the clip 50H. The relay substrate 104 is adhesively fixed to the metal plate 100.

[0363] The relay substrates 104 are disposed so as to overlap with the corresponding semiconductor elements 30H in a plan view. The pads 33 are connected to corresponding wiring of the relay substrates 104 via bonding wires 80. Wires having the same function of adjacent relay substrates 104 are electrically connected via bonding wires 80. One of the relay substrates 104 at the end in the X direction is electrically connected to the gate terminal 62G via the bonding wire 80.

[0364] 77 and 78 show an example of the semiconductor element 30H, but the same structure can be adopted for the semiconductor element 30L. In the example shown in FIG. 77 and FIG. 78, the relay board 104 is provided for each semiconductor element 30, but the present invention is not limited to this. In a configuration in which the relay board 104 is mounted on the board 40, the relay board 104 may be provided for each of the semiconductor elements 30. For example, a common relay board 104 may be provided for two semiconductor elements 30, and the passive components 103 provided for each semiconductor element 30 may be mounted on the common relay board 104. The relay board 104 may be provided for each of the above-mentioned groups. The passive components 103 common to the group are mounted on the relay board 104.

[0365] In a configuration in which the relay board 104 is disposed on the metal plate 100, the relay board 104 may be provided for each of the semiconductor elements 30. For example, a common relay board 104 may be provided for two semiconductor elements 30, and the passive components 103 provided for each semiconductor element 30 may be mounted on the common relay board 104. A relay board 104 may be provided for each of the above-mentioned groups. Passive components 103 common to the group are mounted on the relay board 104. A common relay board 104 may be provided for all the semiconductor elements 30 connected in parallel. In this case, the passive components 103 provided for each semiconductor element 30 may be mounted on the common relay board 104. The passive components 103 provided for each group may be mounted on the common relay board 104.

[0366] 78 shows an example in which the relay substrate 104 is disposed on the metal plate 100, but the present invention is not limited to this. The relay substrate 104 may be disposed on the clip 50. In a configuration in which the clip 50 is not provided, the relay substrate 104 may be disposed on the metal plate 100.

[0367] <Summary of the Seventh Embodiment> The semiconductor device 21 may include a substrate 40 having a conductor 42 (wiring), and a plurality of semiconductor elements 30 connected in parallel with each other by having their drain electrodes 31 (first main electrodes) joined to a common wiring. The source electrodes 32 (second main electrodes) of the plurality of semiconductor elements 30 connected in parallel may be short-circuited by a metal member.

[0368] Since the source electrodes 32 are short-circuited by the metal member, the parasitic inductance Ls between the source electrodes 32 is small. This makes it possible to prevent oscillation from occurring between the semiconductor elements 30, that is, in the parallel circuit.

[0369] The metal member may be a metal plate 100 or a bonding wire 80. When the metal plate 100 is used, the parasitic inductance Ls between the source electrodes 32 can be further reduced. When the bonding wire 80 is used, the source electrodes 32 can be short-circuited with each other in the wire connection process for electrically connecting the pad 33 and the signal terminal 62. Therefore, the process can be simplified and the parasitic inductance Ls between the source electrodes 32 can be reduced.

[0370] The semiconductor device 21 may include a substrate 40 having a conductor 42 (wiring), and a plurality of semiconductor elements 30 connected in parallel with each other by having drain electrodes 31 (first main electrodes) joined to a common wiring. In addition to the substrate 40 and the semiconductor elements 30, the semiconductor device 21 may include a passive component 103 including a ferrite bead or a balance resistor provided on a gate wiring electrically connected to a gate pad 33G. The plurality of semiconductor elements 30 may be grouped together with those arranged in a similar manner, and divided into groups that are fewer than the number of semiconductor elements 30 connected in parallel, and a passive component 103 may be provided for each group.

[0371] Since the gate wiring is provided with a ferrite bead or a balance resistor as the passive component 103, the impedance of the gate wiring can be increased. Therefore, it is possible to suppress the occurrence of oscillation between the semiconductor elements 30, that is, in a parallel circuit. In a plurality of semiconductor elements 30 connected in parallel, the greater the distance between the semiconductor elements 30, the greater the parasitic inductance between the source electrodes 32, and therefore the more likely oscillation is to occur. In other words, oscillation is less likely to occur between semiconductor elements 30 that are arranged close to each other. By grouping the semiconductor elements 30 that are arranged close to each other and less likely to cause oscillation, and providing a passive component 103 for each group, it is possible to suppress the occurrence of oscillation between the groups. Since a passive component 103 is provided for each group, it is possible to suppress the occurrence of oscillation in a parallel circuit while reducing the number of passive components 103.

[0372] The semiconductor device 21 may include a gate terminal 62G as the signal terminal 62. The passive component 103 may be mounted on the gate wirings 425G, 426G that electrically connect the gate pad 33G and the gate terminal 62G on the substrate 40. This makes it possible to adjust the impedance of the gate wiring in the semiconductor device 21. Since the passive component 103 can be mounted using the manufacturing process of the semiconductor device 21, the manufacturing process can be simplified.

[0373] An insulating substrate may be adopted as the substrate 40. The semiconductor device 21 may include a substrate 40 (insulating substrate) having a conductor 42 (wiring), and a plurality of semiconductor elements 30 whose drain electrodes 31 (first main electrodes) are joined to a common wiring and connected in parallel with each other. In addition to the substrate 40 and the semiconductor elements 30, the semiconductor device 21 may include a gate terminal 62G and an intermediate substrate 104 (printed substrate) on which a passive component 103 is mounted. The passive component 103 includes a ferrite bead or a balancing resistor, and adjusts the impedance of the gate wiring provided on the intermediate substrate 104.

[0374] Since the gate wiring of the relay substrate 104 is provided with the passive components 103, ferrite beads or balance resistors, the impedance of the gate wiring can be increased. This makes it possible to suppress oscillation between the semiconductor elements 30, i.e., in the parallel circuit. A printed circuit board allows finer wiring than an insulating board such as an AMB board. AMB is an abbreviation for Active Metal Brazing. Since the gate wiring is provided on the relay substrate 104, which can be finely processed, rather than on the board 40, the size of the semiconductor device 21 can be reduced in a configuration including the passive components 103.

[0375] The relay substrate 104 may be mounted on the substrate 40, or may be disposed on a metal member bonded to the source electrode 32 (second main electrode). When disposed on the substrate 40, the wiring can be made finer as described above, and the size of the semiconductor device 21 can be reduced. When disposed on a metal member, it is not necessary to provide a space for the relay substrate 104 on the substrate 40, and the size of the semiconductor device 21 can be further reduced. The metal member may be a metal plate 100 that shorts the source electrode 32, as illustrated in FIG. 78.

[0376] The configuration described in this embodiment can be combined with the configuration described in the preceding embodiment.

[0377] (Other embodiments) The disclosure in this specification and drawings, etc. is not limited to the exemplified embodiments. The disclosure includes the exemplified embodiments and modifications by those skilled in the art based thereon. For example, the disclosure is not limited to the combination of parts and / or elements shown in the embodiments. The disclosure can be implemented by various combinations. The disclosure can have additional parts that can be added to the embodiments. The disclosure includes the omission of parts and / or elements of the embodiments. The disclosure includes the substitution or combination of parts and / or elements between one embodiment and another embodiment. The disclosed technical scope is not limited to the description of the embodiments. Some disclosed technical scopes are indicated by the description of the claims, and should be interpreted as including all modifications within the meaning and scope equivalent to the description of the claims.

[0378] The disclosure in the specification and drawings is not limited by the claims. The disclosure in the specification and drawings includes the technical ideas described in the claims, and extends to more diverse and broader technical ideas than the technical ideas described in the claims. Therefore, various technical ideas can be extracted from the disclosure in the specification and drawings without being bound by the claims.

[0379] When an element or layer is referred to as being "on," "coupled," "connected," or "bonded," it may be directly coupled, connected, or bonded to another element or layer, and intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on," "directly coupled," "directly connected," or "directly bonded" to another element or layer, there are no intervening elements or layers. Other words used to describe relationships between elements should be construed in a similar manner (e.g., "between" vs. "directly between," "adjacent" vs. "directly adjacent," etc.). As used in this specification, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0380] Spatially relative terms such as "inside," "outside," "back," "bottom," "low," "top," "top," and the like are utilized herein to facilitate the description of the relationship of one element or feature to another element or feature as depicted in the figures. Spatially relative terms may be intended to encompass different orientations of the device during use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "directly below" other elements or features would be oriented "above" the other elements or features. Thus, the term "bottom" can encompass both an orientation of top and bottom. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used in this specification would be interpreted accordingly.

[0381] The vehicle drive system 1 is not limited to the above-mentioned configuration. For example, although an example has been shown in which one motor generator 3 is provided, the present invention is not limited to this. A plurality of motor generators may be provided. Although an example has been shown in which the power conversion device 4 is provided with an inverter 6 as a power conversion unit, the present invention is not limited to this. For example, a configuration may be provided with a plurality of inverters. A configuration may be provided with at least one inverter and a converter. A configuration may be provided with only a converter. [Explanation of symbols]

[0382] 1... drive system, 2... DC power supply, 3... motor generator, 3a... winding, 4... power conversion device, 5... smoothing capacitor, 6... inverter, 7... P line, 8... N line, 9, 9U, 9V, 9W... upper and lower arm circuits, 9H... upper arm, 9L... lower arm, 10... output line, 11... MOSFET, 12... diode, 13... snubber circuit, 131... capacitor, 132... resistor, 14... gate driver, 15... gate resistor, 16... inductive load, 20... semiconductor module, 21, 21U, 21V, 21W... semiconductor device, 22... housing, 22a... lower surface, 22 1...frame, 221a, 221b, 221c, 221d...wall portion, 222, 222a, 222b...partition wall, 223...fastening hole, 224...collar, 225...projection portion, 225a...support surface, 226...recess, 23...cooler, 23a...one surface, 231...flow path, 232...refrigerant, 233...fastening hole, 234...collar, 24...bonding material, 25...sealing material, 30, 30H, 30L, 30L1, 30L2, 30L3, 30L4...semiconductor element, 301H, 302H, 301L, 302L...group, 31...drain electrode, 32...source electrode, 321...lower layer, 322...upper layer, 33...pa pad, 33A...anode pad, 33C...cathode pad, 33G...gate pad, 33KS...Kelvin source pad, 34...semiconductor substrate, 34a...one side, 34b...rear side, 341...element region, 342...peripheral region, 35...insulating film, 351, 352...openings, 353...peripheral portion, 354...element upper portion, 36...gate wiring, 40...substrate, 41...insulating base material, 41a...one side, 41b...rear side, 411...non-placement region, 42...conductor, 421...P wiring, 421a...base, 421b...extension, 421c...terminal connection portion, 422...N wiring, 422a...base, 422b...extension , 422c... terminal connection portion, 423... O wiring, 423a... base portion, 423b... extension portion, 423c... terminal connection portion, 424, 424a, 424b... relay wiring, 425, 426... signal wiring, 426A... anode wiring, 426C... cathode wiring, 425G, 426G... gate wiring, 426KS... Kelvin source wiring, 426S... sense wiring, 427... drain wiring, 427a... element mounting portion, 428... source wiring, 429... signal wiring, 43... conductor, 44... dummy wiring, 50, 50H, 50L, 50M... clip, 51, 52... joint portion, 53... connection portion, 531,532... inclined portion, 533... intermediate portion, 533a... first intermediate portion, 533b... second intermediate portion, 534, 535, 536... tapered portion, 54... opposing space, 55... through hole, 56... bridging portion, 57... connecting portion, 58... extension portion, 59a... widening portion, 59b... narrowing portion, 60... external connection terminal, 61... main terminal, 611... P terminal, 611a, 611b... connection portion, 612... N terminal, 612a, 612b... connection portion, 613, 613U, 613V, 613W... O terminal, 613a, 613b... connection portion, 613c... coupling portion, 613d... shunt resistor portion, 614... drain terminal, 615... source terminal, 62...signal terminal, 62A...anode terminal, 62C...cathode terminal, 62G...gate terminal, 62KS...Kelvin source terminal, 62S...sense terminal, 621, 622...connection portion, 623, 623a, 623b...connection portion, 3...core, 70...snubber circuit, 71...capacitor, 72...resistor, 73...solder, 74...sealing body, 75...adhesive, 80...bonding wire, 81...solder, 82...sintered member, 83...jointing material, 90...sealing body, 91...gel, 100, 100H, 100L...metal plate material, 101...metal block, 102...oxide film, 103...passive component, 104...relay board,

Claims

1. an insulating substrate (40) having wiring (42); a plurality of semiconductor elements (30) each having a first main electrode (31), a second main electrode (32) provided on a surface opposite to the first main electrode, and a gate pad (33G) provided on the same surface as the second main electrode, the first main electrode being connected to the common wiring; A gate terminal (62G); a printed circuit board (104) that provides gate wiring that electrically connects the gate pad and the gate terminal; a passive component (103) including a ferrite bead or a balancing resistor, mounted on the printed circuit board, for adjusting the impedance of the gate wiring; The semiconductor device, wherein the insulating substrate includes an insulating base material that contains ceramic, and the printed circuit board includes an insulating base material that contains resin.

2. The semiconductor device according to claim 1 , wherein said printed circuit board is mounted on said insulating substrate.

3. a metal member (100) joined to the second main electrode of the semiconductor element; The semiconductor device according to claim 1 , wherein the printed circuit board is disposed on the metal member.

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