Linear robot having dual link arm

Abstract

To provide a robot capable of extending and contracting by rotating a dual link arm and at the same time moving a linear transport mechanism along a straight path.SOLUTION: A robot includes a robot drive portion 38 and a robot arm 36 having a dual link arm. The dual link arm has a first link 90 connected to the robot drive portion, and a second link 92 forming an end effector for supporting a substrate. The robot arm extends or contracts simultaneously as the linear transport mechanism moves along the linear path. The controller moves the end effector in and out of a substrate process chamber or substrate holding area while both the linear transport mechanism and the dual link arm move by adjusting the non-translational movement of the end effector along a path that passing through an entrance of the substrate process chamber and curves with respect to the entrance of the substrate process chamber, and the translational movement of the end effector from the entrance into the substrate process chamber.SELECTED DRAWING: Figure 3B

Description

[Technical field]

[0001] The illustrative and non-limiting embodiments relate generally to robots, and more particularly, to linear robots.

[0002] Robots for transporting substrates are known. Linear drive systems for transport of substrate transport robots are also known, such as those described in U.S. Patent Application Publication Nos. 2016 / 0229296, 2013 / 0071218, 2015 / 0214086, and 2017 / 0028546, which are incorporated herein by reference in their entirety.

[0003] The following summary is intended to be merely exemplary and is not intended to limit the scope of the claims.

[0004] Disclosed herein is a method comprising: moving a linear transport mechanism along a linear path inside a transfer chamber; and simultaneously extending or retracting a robot arm as the linear transport mechanism moves along the linear path, the robot arm being part of a robot having a robot drive connected to the robot arm, the robot arm comprising a dual link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate, the method further comprising controlling the movement of the linear transport mechanism along the linear path, simultaneously with the extension and contraction by rotation of the dual link arm, by a controller connected to the linear transport mechanism and the robot drive, to move the end effector into or out of the substrate processing chamber or substrate holding area while both the linear transport mechanism and the dual link arm are moving, by coordinating non-translational movement of the end effector along a path that is curved through an entrance to a substrate processing chamber and translational movement of the end effector from the entrance into the substrate processing chamber.

[0005] The present application also discloses an apparatus as follows. The apparatus comprises a linear transport mechanism configured to move along a linear path inside a transport chamber; and a robot, the robot comprising a robot drive; and a robot arm having a dual link arm, the dual link arm having a first link connected to the robot drive and a second link forming an end effector configured to support a substrate, the robot arm configured to simultaneously extend or contract as the linear transport mechanism moves along the linear path, the apparatus further comprising a controller connected to the linear transport mechanism and the robot drive, the controller configured to control movement of the linear transport mechanism along the linear path simultaneously with extension and contraction by rotation of the dual link arm to move the end effector into or out of the substrate processing chamber or substrate holding area while both the linear transport mechanism and the dual link arm move by coordinating non-translational movement of the end effector along a path curved relative to an entrance of a substrate processing chamber and translational movement of the end effector from the entrance into the substrate processing chamber.

[0006] The present application also discloses an apparatus comprising: a linear transport mechanism configured to move in a transport chamber along a linear path; and a robot connected to the linear transport mechanism. The robot comprises a robot drive and a robot arm connected to the robot drive. The robot arm comprises a dual link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon. The apparatus further comprises a controller connected to the linear transport mechanism and the robot drive. The controller is configured to control the movement of the linear transport mechanism along the linear path and is configured to control the robot drive to extend and retract the dual link arm. The controller is further configured to provide the movement of the linear transport mechanism along the linear path simultaneously with the extension and retraction of the dual link arm, thereby moving the end effector into or out of a substrate processing chamber or substrate holding area while both the linear transport mechanism and the dual link arm are moving. The present application also discloses a method comprising: providing a robot comprising a robot drive and a robot arm connected to the robot drive, the robot arm comprising a dual link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon, mounting the robot on a linear transport mechanism configured to move in a transport chamber along a linear path, connecting the robot drive and the linear transport mechanism to a controller configured to control movement of the linear transport mechanism along the linear path and configured to control the robot drive to extend and retract the dual link arm, the controller configured to provide the movement of the linear transport mechanism along the linear path simultaneously with the extension and retraction of the robot drive of the dual link arm, thereby moving the end effector into or out of a substrate processing chamber or substrate holding area while both the linear transport mechanism and the dual link arm are moving. [Brief description of the drawings]

[0007] The foregoing aspects and other features are explained in the following description taken in conjunction with the accompanying drawings.

[0008] [Figure 1] FIG. 1 illustrates a top view of an example cluster tool.

[0009] [Diagram 2] FIG. 2 is a top view of an example of an embodiment including features as described herein.

[0010] [Figure 3A] FIG. 3 is a side view of the robot shown in FIG. 2.

[0011] [Figure 3B] FIG. 3B is a schematic cross-sectional view of the robot shown in FIG. 3A.

[0012] [Figure 4] FIG. 1 is a top view of an exemplary embodiment including features as described herein.

[0013] [Figure 5A] 13 is a schematic top view illustrating removal of a substrate from a process module by simultaneously moving a robot and a linear transport mechanism. FIG. [Figure 5B] 13 is a schematic top view illustrating removal of a substrate from a process module by simultaneously moving a robot and a linear transport mechanism. FIG. [Figure 5C] 13 is a schematic top view illustrating removal of a substrate from a process module by simultaneously moving a robot and a linear transport mechanism. FIG. [Figure 5D] 13 is a schematic top view illustrating removal of a substrate from a process module by simultaneously moving a robot and a linear transport mechanism. FIG. [Figure 5E] 13 is a schematic top view illustrating removal of a substrate from a process module by simultaneously moving a robot and a linear transport mechanism. FIG.

[0014] [Figure 5F] 1 is a schematic top view illustrating placement of a substrate in a process module by simultaneously moving a robot and a linear transport mechanism. [Figure 5G] 1 is a schematic top view illustrating placement of a substrate in a process module by simultaneously moving a robot and a linear transport mechanism. [Figure 5H] 1 is a schematic top view illustrating placement of a substrate in a process module by simultaneously moving a robot and a linear transport mechanism. [Figure 5I] 1 is a schematic top view illustrating placement of a substrate in a process module by simultaneously moving a robot and a linear transport mechanism. [Figure 5J]1 is a schematic top view illustrating placement of a substrate in a process module by simultaneously moving a robot and a linear transport mechanism.

[0015] [Figure 6] FIG. 2 is a schematic top view illustrating an exemplary embodiment of a load lock area.

[0016] [Figure 7] FIG. 2 is a schematic top view illustrating an exemplary embodiment of a load lock area.

[0017] [Figure 8] FIG. 2 is a schematic top view illustrating an exemplary embodiment of a load lock area.

[0018] [Figure 9A] 13 shows a side view of the end effector movement for picking up a substrate. [Figure 9B] 13 shows a side view of the end effector movement for picking up a substrate. [Figure 9C] 13 shows a side view of the end effector movement for picking up a substrate. [Figure 9D] 13 shows a side view of the end effector movement for picking up a substrate. [Figure 9E] 13 shows a side view of the end effector movement for picking up a substrate.

[0019] [Figure 10A] 1 illustrates an example of an embodiment having features as described herein. [Figure 10B] 1 illustrates an example of an embodiment having features as described herein. [Figure 10C] 1 illustrates an example of an embodiment having features as described herein. [Figure 10D] 1 illustrates an example of an embodiment having features as described herein. [Figure 10E] 1 illustrates an example of an embodiment having features as described herein. Detailed Description of the Embodiments

[0020] 1, there is shown a schematic top view of a conventional cluster tool configuration of a substrate processing apparatus 10. The apparatus includes a substrate transport apparatus 12 comprising a robot adapted to transport substrates 14 between a substrate processing chamber 16 and a load lock 18 in an Equipment Front End Module (EFEM) 20 having a substrate cassette elevator 22. The load lock forms some type of substrate holding area having a movable separation door or gate between the transfer chamber 32 and the EFEM 20.

[0021] To reduce costs and improve efficiency, modern semiconductor factories are constantly striving to fit more process equipment into smaller buildings. A typical factory layout has process tools arranged in linear rows, called bays. The number of bays that can be fitted on the factory floor is limited by the individual process tool length (depth). The number of tools that can be fitted in each row is limited by the individual process tool width. Each individual process tool consists of a process module and automation hardware to move wafers from input / output modules (load locks) to the process module and back again. Traditional process tool layouts use a single wafer transfer robot at the center of the tool and multiple (e.g., four to six) process module spaces in a circular array around the robot, as shown in the example cluster tool in Figure 1. Cluster tools typically have a round footprint and are not optimally shaped to be arranged in rows due to their width. Factory planners are pushing to reduce the width of individual process tools to fit more equipment into each factory bay and increase production without the need for additional floor space. One way to reduce individual tool width is to abandon a circular arrangement of process modules in favor of a linear arrangement. A linear process module arrangement requires more complex automation, including the ability to move the robot on a linear axis from the front to the back of the tool. This type of robot is referred to as a "linear robot." The overall tool width is limited by the depth of the process modules and the width of the linear robot. As described herein, a method is disclosed for reducing the width and complexity of a linear robot using a two-link arm to fold flat (inside a linear tunnel) in a retracted position as described further below.

[0022] Referring also to Figure 2, a schematic top view of a substrate processing apparatus 30 incorporating features of an exemplary embodiment is shown. Although features are described with reference to the exemplary embodiment shown in the drawings, it should be understood that the features may be embodied in many alternative forms of embodiment. Additionally, any suitable size, shape, or type of elements or materials may be used.

[0023] The substrate processing apparatus 30 generally comprises a substrate transfer chamber 32, a substrate processing module 16, a load lock 18', an equipment front end module (EFEM) 20 having a substrate cassette elevator 22, and a linear robot 34 having a two-link arm 36 and a robot drive 38 (see Figures 3A and 3B). The apparatus 30 is connected to a controller 40 having at least one processor 42 and at least one memory 44 containing computer program code 46. Figure 2 shows an example of a linear robot having a two-link arm in a compact retracted position.

[0024] 3A and 3B, the two-link arm 36 generally comprises a first link or upper arm 90 and a second link forming an end effector 92 rotatably connected to the upper arm 90 at a joint 94. The robot drive 38 comprises first and second motors 52, 54 with corresponding first and second encoders 56, 58 connected to the housing 60, driving first and second shafts 62, 64, respectively, where shaft 62 may be connected to a pulley 66 and shaft 64 may be connected to the upper arm 90, where shafts 62, 64 may be concentric or otherwise arranged. In alternative embodiments, any suitable drive may be provided. The housing 60 may be in communication with a chamber 68, where the bellows 70, chamber 68, and the interior of the housing 60 separate a vacuum environment 72 from an atmospheric environment 74. The housing 60 may slide in the z-direction as a carriage on a slide 76. Here, a lead screw or other suitable vertical or linear z-drive 78 may be provided to selectively move the housing 60 and the two-link arm 36 connected thereto in a z-direction 80. The robot 34 is mounted on a linear transport 98 configured to move the robot 36 along a linear path inside the chamber 32, as indicated by arrow 100 in FIG. 2. This may use rails or magnetic levitation, for example. Features as described herein may include features as described in U.S. Pat. Nos. 10,269,606, 9,149,936, 10,224,232, and U.S. Patent Application Publication Nos. 2019 / 0115238 and 2018 / 0104831, which are incorporated herein by reference in their entireties.

[0025] The two-link arm 36 has an advantage over conventional SCARA arms in linear systems because it is slim when in a folded or link-on-link position. As can be seen in Figure 2 versus Figure 1, this allows for the use of a narrow width 102 of the linear chamber or tunnel 32 and the overall system while still being able to reach extended positions at the process modules 16 and load locks 18'. A two-link or dual-link arm simply has two links connected in series from the robot drive, one of which forms an end effector for supporting a substrate.

[0026] Referring also to FIG. 4, this exemplary embodiment shows that many more than six process modules 16 can be mounted in the transport chamber 32'. It also shows how the transport apparatus 98 and robot 34 can be used to access the various process modules 16 using a two-link arm 36 as shown by configurations 104a, 104b, 104c. FIG. 4 shows an exemplary operation of a linear robot with a dual independent end effector two-link arm. The arm in this example comprises a first link 90 attached directly to the drive shaft of the robot drive and two second links 92, 92' connected to the first link 90. ​​Thus, a first dual link arm is provided with links 90, 92 and a second dual link arm is provided with links 90, 92'.

[0027] Each of the two link arms may support one or more independent end effectors. The use of a single end effector system reduces the cost, complexity, and size of the system by reducing the number of axes of motion required to control the robot. The use of a robot with multiple end effectors may perform a fast swap at the load lock and the process module. A fast swap involves successive pick and place moves at the same station (using one end effector to pick up a substrate from a station and a second end effector to place a second substrate at the same station). A robot with multiple end effectors may fast swap at the load lock and then fast swap at the process module. This is shown in a series of snapshot type views in Figures 5A-5J. Figures 5A-5E show the removal of a substrate 14a from a process module, and Figures 5F-5J show the insertion of a new substrate 14b into the same module 16.

[0028] 5A-5E, when the linear transport mechanism moves in the direction X, the robot drive moves the dual link arm 36 to move the end effector into the entrance 17 of the process module 16. Because of the size, shape, and location of the various parts, as well as the reduced width 102 of the transport chamber, the only way for the end effector to enter the entrance 17 is for the rotation of the robot arm 36 and the linear movement of the linear transport mechanism to work together to allow the end effector to begin passing into the entrance 17 in an angled direction Y, in this case perpendicular to the direction X. The longitudinal length of the second link 92 may be longer than the width 102 of the transport chamber 32, for example. The second link 92 may enter the entrance 17 at an angle and then move straight into the module 16 after initially passing through the entrance at an angle or along a curved path. Thus, the movement of the end effector into the module may be non-translational, but may subsequently change to translational for the final stroke of the movement. Once the substrate 14a has been lifted by the end effector, the robot motors and linear transport mechanism can move in coordination in the directions X' and Y' to remove the end effector and substrate from the module.

[0029] In one example, a two-link arm can use the robot's linear axes to control the end effector orientation during arm extension and retraction movements (movement in direction 100). In another example, a two-link arm cannot use the robot's linear axes to control the end effector orientation during arm extension and retraction movements.

[0030] The linear axis of the robot can move in either direction, as shown by arrow 100, to control the end effector orientation at different arm extensions. This control can be applied to maintain alignment between the end effector and the station as the arm extends and retracts. This can be desirable for certain types of stations, such as process modules.

[0031] The linear axis of the robot may also remain stationary during the arm extension and retraction movements, which may allow the arm to extend and / or retract to stations where the linear axis cannot move, such as at the ends of the linear axis movement in either direction.

[0032] A third option is to combine segments of motion that use and do not use the robot's linear axes to perform non-translational extension or retraction movements when necessary.

[0033] The narrow transfer chamber limits the space available at the ends of the chamber to accommodate and access the load lock modules. The location of the load lock determines the use of two main types of robotic motion while accessing the load lock station. (a.) A robotic motion in which the primary end effector enters a load lock and the secondary end effector(s) rotate to an alternative open space in the chamber during the load lock transfer, as shown in Figures 6 and 7. (b.) Robot motion where all end effector(s) enter the load lock during a move as shown in FIG. 8. This type of move requires supporting substrates in the load lock with the same vertical spacing as the pitch between the end effectors. The number of slots for substrates defines the number of wafers moved. If the robot has two end effectors, the number of load lock slots is one as shown by FIG. 9A-9E, which shows an example of a two end effector move to a station with all end effectors inside the station. Substrates can be placed in one load lock and then picked up from another load lock, or multiple groups of substrate supports can be stacked in a single load lock for pick and place moves to the same load lock. In the alternative, there can be any suitable number of end effectors. (c.) Examples of load lock configurations 18, 18', 18'', 18'''', 18'''' between the transfer chamber 32 and the EFEM 20 are shown in Figures 10A-10E that may be used with the robot 34. Note that these are merely examples and should not be considered limiting.

[0034] According to an exemplary embodiment, an apparatus may be provided that includes a linear transport mechanism configured to move in a transport chamber along a linear path, a robot connected to the linear transport mechanism, the robot comprising a robot drive and a robot arm connected to the robot drive, the robot arm comprising a dual link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon, and a controller connected to the linear transport mechanism and the robot drive, the controller configured to control movement of the linear transport mechanism along the linear path, the controller configured to control the robot drive to extend and retract the dual link arm. The controller is configured to provide movement of the linear transport mechanism along the linear path simultaneously with the extension and retraction of the dual link arm, thereby moving the end effector into or out of a substrate processing chamber or substrate holding area while both the linear transport mechanism and the dual link arm are moving.

[0035] The apparatus may further comprise a transfer chamber and a plurality of substrate processing chambers connected to the transfer chamber on opposite sides of the transfer chamber. The apparatus is sized and shaped such that the end effector cannot be moved by the dual link arm into or out of the substrate processing chamber unless the linear transport mechanism is moving. The apparatus may further comprise a second linear transport mechanism configured to move in the transfer chamber along at least a partially linear path and a second robot connected to the second linear transport mechanism. The second robot comprises a second robot drive and a second robot arm connected to the second robot drive. The second robot arm comprises a second dual link arm having a third link connected to the second robot drive and a fourth link forming a second end effector for supporting a substrate thereon. A controller is connected to the second linear transport mechanism and the second robot drive. The controller is configured to control movement of the second linear transport mechanism along the linear path. The controller is configured to control the second robot drive to extend and retract the second dual link arm. The controller is configured to provide movement of the second linear transport mechanism along a linear path simultaneously with the extension and retraction of the second dual link arm, thereby moving the second end effector into or out of the substrate processing chamber or substrate holding area while both the second linear transport mechanism and the second dual link arm are moving. The transfer chamber may comprise a first section having a generally rectangular shape and a second section at an end of the generally rectangular shape. The second section is wider than the first section and is connected to or forms at least two of the substrate holding areas. The apparatus may further comprise an equipment front end module connected to the second section of the transfer chamber. The equipment front end module comprises a substrate cassette elevator and is configured to move substrates between the substrate cassette elevator and the at least two substrate holding areas.The robot arm may include a third link connected to the first link. The first link and the third link form a second dual link arm with a second end effector formed on the third link. The apparatus may further include a transfer chamber and a plurality of substrate holding areas at an end of the transfer chamber. Each of the substrate holding areas has a central axis that is at least partially offset from or angled relative to a central axis along a linear path of the transfer chamber.

[0036] An exemplary method may include providing a robot comprising a robot drive and a robot arm connected to the robot drive, the robot arm comprising a dual link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon, mounting the robot on a linear transport mechanism configured to move in a transport chamber along a linear path, and connecting the robot drive and the linear transport mechanism to a controller configured to control movement of the linear transport mechanism along the linear path and configured to control the robot drive to extend and retract the dual link arm, The controller is configured to provide movement of the linear transport mechanism along the linear path simultaneously with extension and retraction of the robot drive of the dual link arm, thereby moving the end effector into or out of a substrate processing chamber or substrate holding area while both the linear transport mechanism and the dual link arm are moving.

[0037] The transfer chamber, robot arm, and linear transport mechanism may be sized and shaped such that the end effector cannot be moved by the dual link arm into or out of the substrate processing chamber unless the linear transport mechanism is moving. The method may further include providing a second robot comprising a second robot drive and a second robot arm connected to the second robot drive, the second robot arm comprising a second dual link arm having a third link connected to the second robot drive and a fourth link forming a second end effector for supporting a substrate thereon, mounting the second robot on a second linear transport mechanism configured to move in the transfer chamber along an at least partially linear path, and connecting the second robot drive and the second linear transport mechanism to a controller configured to control movement of the second linear transport mechanism along the linear path and configured to control the second robot drive to extend and retract the second dual link arm. The controller is configured to provide movement of the second linear transport mechanism along a linear path simultaneously with extension and retraction of the second robot drive of the second dual link arm, thereby moving the second end effector into or out of the substrate processing chamber or substrate holding area while both the second linear transport mechanism and the second dual link arm are moving. The transfer chamber may include a first section having a generally rectangular shape and a second section at an end of the generally rectangular shape. The second section is wider than the first section and is connected to or forms at least two of the substrate holding areas. The robot arm may include a third link connected to the first link. The first link and the third link form a second dual link arm with a second end effector formed on the third link. A plurality of substrate holding areas may be provided at an end of the transfer chamber.Each of the substrate holding areas has a central axis that is at least partially offset from or angled relative to a central axis along the linear path of the transfer chamber.

[0038] An exemplary method may be provided that includes moving a linear transport mechanism along a linear path inside a transfer chamber, extending or retracting a robot arm simultaneously as the linear transport mechanism is moving along the linear path, the robot arm being part of a robot having a robot drive connected to the robot arm, the robot arm comprising a dual link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon, and controlling, with a controller connected to the linear transport mechanism and the robot drive, the movement of the linear transport mechanism along the linear path and the extension and retraction of the dual link arm, thereby moving the end effector into or out of a substrate processing chamber or substrate holding area while both the linear transport mechanism and the dual link arm are moving.

[0039] The transfer chamber, robot arm, and linear transport mechanism may be sized and shaped such that the end effector cannot be moved into or out of the substrate processing chamber by the dual link arm unless the linear transport mechanism is moving. The method may further include moving a second linear transport mechanism at least partially along a linear path inside the transfer chamber, and extending or retracting a second robot arm simultaneously as the second linear transport mechanism is moving along the linear path, the second robot arm being part of a second robot having a second robot drive connected to the second robot arm, the second robot arm comprising a second dual link arm having a third link connected to the second robot drive and a fourth link forming a second end effector for supporting a substrate thereon, and controlling the movement of the second linear transport mechanism along the linear path and the extension and retraction of the second dual link arm by a controller connected to the second linear transport mechanism and the second robot drive, thereby moving the second end effector into or out of the substrate processing chamber or substrate holding area while both the second linear transport mechanism and the second dual link arm are moving. The robot arm may comprise a third link connected to the first link. The first link and the third link form a second dual link arm having a second end effector formed on the third link. The method includes controlling, with a controller connected to the linear transport mechanism and the robot drive, movement of the linear transport mechanism along a linear path and extension and retraction of the second dual link arm, thereby moving the second end effector into or out of the substrate processing chamber or substrate holding area while both the linear transport mechanism and the second dual link arm are moving.

[0040] An exemplary embodiment may be provided in an apparatus comprising: means for moving a linear transport mechanism along a linear path inside a transport chamber; means for extending or retracting a robot arm simultaneously as the linear transport mechanism is moving along the linear path, the robot arm being part of a robot having a robot drive connected to the robot arm, the robot arm comprising a dual link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon; and means for controlling, by a controller connected to the linear transport mechanism and the robot drive, the movement of the linear transport mechanism along the linear path and the extension and retraction of the dual link arm, thereby moving the end effector into or out of a substrate processing chamber or substrate holding area while both the linear transport mechanism and the dual link arm are moving.

[0041] In an exemplary embodiment, an apparatus may be provided, the apparatus comprising at least one processor and at least one non-transitory memory including computer program code, the at least one memory and the computer program code being transmitted by the at least one processor to the apparatus to: moving the linear transport mechanism along a linear path inside the transport chamber; The robot arm is extended or retracted at the same time that the linear transport mechanism is moving along a linear path; Controlling the movement of the linear transport mechanism along a linear path and the extension and retraction of the dual link arm, thereby moving the end effector into or out of the substrate processing chamber or substrate holding area while both the linear transport mechanism and the dual link arm are moving; The robot arm is part of a robot having a robot drive connected to the robot arm. The robot arm comprises a dual link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon.

[0042] Exemplary embodiments may include a non-transitory program storage device readable by a machine, tangibly embodying a program of instructions executable by the machine to perform operations, such as: moving a linear transport mechanism along a linear path within the transport chamber; extending or retracting a robot arm simultaneously with the linear transport mechanism moving along the linear path, the robot arm being part of a robot having a robot drive connected to the robot arm, the robot arm comprising a dual link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate thereon; moving the linear transport mechanism along a linear path and extending and retracting the dual link arm to move the end effector into or out of the substrate processing chamber or substrate holding area while both the linear transport mechanism and the dual link arm are moving; Includes.

[0043] To reduce costs and improve efficiency, modern semiconductor factories are constantly striving to fit more process equipment into smaller buildings. A typical factory layout has process tools arranged in linear rows, called bays. The number of bays that can be fitted on the factory floor is limited by the individual process tool length (depth). The number of tools that can be fitted in each row is limited by the individual process tool width. Each individual process tool consists of a process module and automation hardware to move wafers from input / output modules (load locks) to the process module and back again. Traditional process tool layouts use a single wafer transfer robot at the center of the tool and multiple (four to six) process module spaces in a circular array around the robot. This type of layout is referred to as a "cluster tool" (see, for example, Figure 1). Cluster tools typically have a round footprint and are not optimally shaped to be arranged in rows because of their width. Factory planners are pushing to reduce the width of individual process tools to fit more equipment into each factory bay and increase production without the need for additional floor space. Features as described herein may be used to reduce individual tool width, for example, by forgoing a circular arrangement of process modules in favor of a linear arrangement, as shown in FIG. 2. A linear process module arrangement requires more complex automation, including the ability to move the robot on a linear axis from the front to the back of the tool. This type of equipment may be referred to as a "linear robot." The overall tool width is limited by the depth of the process modules and the width of the linear robot. One way to reduce the width and complexity of a linear robot is to use a two-link arm that folds flat (inside a linear tunnel) in a retracted position, as shown in FIG. 2.

[0044] The two-link arm has an advantage over conventional SCARA arms in linear systems because it is slim when placed in the folded or link-on-link position as shown in Figure 2. This allows for a narrower width for the linear chamber or tunnel and overall system while still being able to reach extended positions at the process modules and load locks (see, e.g., Figures 5A-5J).

[0045] A two-link arm or a dual-link arm may support one or more independent end effectors. A single end effector system reduces the cost, complexity, and size of the system by reducing the number of axes of motion required to control the robot. A robot with multiple end effectors may perform a fast swap at the load lock and a process module. A fast swap is defined as consecutive pick and place moves at the same station (picking up a substrate from a station with one end effector and placing a second substrate at the same station with a second end effector). A robot with two end effectors may fast swap at the load lock and then fast swap at a process module. A robot with more than two (n) end effectors may pick up multiple substrates at the load lock and then perform a fast swap at n-1 number of process modules. For example, a robot with three end effectors may pick up two substrates at the load lock and then perform a fast swap at two different process modules. A robot with four end effectors can pick up three substrates at a load lock and perform a fast swap in three different process modules.

[0046] The two-link arm may use the robot's linear axis to control the end effector orientation during the arm extension and retraction motions, or alternatively, in some circumstances, may not use the robot's linear axis to control the end effector orientation during the arm extension and retraction motions. The robot's linear axis may move in either direction to control the end effector orientation at different arm extensions. This control may be applied to maintain alignment between the end effector and the station as the arm extends and retracts. This may be desirable for certain types of stations, such as process modules. The robot's linear axis may also remain stationary during the arm extension and retraction motions, which may allow the arm to extend and / or retract to stations where the linear axis cannot move, for example, at the end of the linear axis motion in either direction. A third option is to combine segments of operations that use and do not use the robot's linear axis to perform non-translational extension or retraction motions, if necessary.

[0047] The narrow transfer chamber limits the space available at the ends of the chamber to accommodate and access the load lock modules. The location of the load lock determines the use of two main types of robotic motion while accessing the load lock station. A robotic motion where the primary end effector enters a load lock and the secondary end effector(s) rotate to an alternative open space in the chamber during the load lock transfer (see e.g. Figures 6 and 7). Robot motion where all end effector(s) enter the load lock during the move (see, for example, FIG. 8). This type of move requires supporting substrates in the load lock at the same vertical spacing as the pitch between the end effectors. The number of slots for substrates defines the number of wafers moved. If the robot has two end effectors, the number of load lock slots is one (see FIGS. 9A-9E). If the robot has three end effectors, the number of load lock slots is two. Substrates can be placed in one load lock and then picked up from another load lock, or multiple groups of substrate supports can be stacked in a single load lock for pick and place moves to the same load lock.

[0048] It should be understood that the foregoing description is merely illustrative. Various alternatives and modifications may be devised by those skilled in the art. For example, the features recited in the various dependent claims may be combined with each other in any suitable combination(s). In addition, features from different embodiments described above may be selectively combined into new embodiments. Accordingly, the description is intended to embrace all such alternatives, modifications, and variations that fall within the scope of the appended claims.

Claims

1. 1. A method comprising: moving a linear transport mechanism along a linear path within the transport chamber; simultaneously extending or retracting a robot arm while the linear transport mechanism is moving along the linear path; the robot arm is part of a robot having a robot drive connected to the robot arm, the robot arm comprising a dual link arm having a first link connected to the robot drive and a second link forming an end effector for supporting a substrate, the method further comprising: and controlling movement of the linear transport mechanism along the linear path by a controller connected to the linear transport mechanism and the robot drive, simultaneously with extension and retraction due to rotation of the dual link arm, to move the end effector into or out of the substrate processing chamber or substrate holding area while both the linear transport mechanism and the dual link arm are moving by coordinating non-translational movement of the end effector along a path that is curved relative to an entrance of a substrate processing chamber and translational movement of the end effector from the entrance into the substrate processing chamber. method.

2. 2. The method of claim 1, wherein the transfer chamber, the robot arm, and the linear transport mechanism are sized and shaped such that the end effector cannot be moved into or out of the substrate processing chamber by the dual link arm unless the linear transport mechanism is moving.

3. moving a second linear transport mechanism inside the transport chamber at least partially along the linear path; extending or retracting a second robot arm simultaneously with the second linear transport mechanism moving along the linear path, the second robot arm being part of a second robot having a second robot drive connected to the second robot arm, the second robot arm comprising a second dual link arm having a third link connected to the second robot drive and a fourth link forming a second end effector for supporting a substrate thereon; controlling, with the controller connected to the second linear transport mechanism and the second robot drive, the movement of the second linear transport mechanism along the linear path and the extension and retraction of the second dual link arm, thereby moving the second end effector into or out of a substrate processing chamber or substrate holding area while both the second linear transport mechanism and the second dual link arm are moving; The method of claim 1 further comprising:

4. the robot arm includes a third link connected to the first link; the first link and the third link form a second dual link arm having a second end effector formed on the third link; the method includes controlling, by the controller coupled to the linear transport mechanism and the robot drive, the movement of the linear transport mechanism along the linear path and the extension and retraction of the second dual link arm, thereby moving the second end effector into or out of a substrate processing chamber or substrate holding area while both the linear transport mechanism and the second dual link arm are moving. The method of claim 1.

5. An apparatus comprising: a linear transport mechanism configured to move along a linear path inside the transport chamber; With robots; The robot comprises: A robot drive; A robotic arm having a dual link arm; the dual link arm having a first link connected to the robot drive and a second link forming an end effector configured to support a substrate, the robot arm configured to simultaneously extend or retract as the linear transport mechanism moves along the linear path; The apparatus further comprises a controller connected to the linear transport mechanism and the robot drive, the controller being configured to control movement of the linear transport mechanism along the linear path, simultaneously with extension and contraction due to rotation of the dual link arm, to move the end effector into or out of the substrate processing chamber or substrate holding area while both the linear transport mechanism and the dual link arm are moving, by coordinating non-translational movement of the end effector along a path that is curved relative to an entrance of a substrate processing chamber and translational movement of the end effector from the entrance into the substrate processing chamber.

6. 6. The apparatus of claim 5, wherein the transport chamber, the robot arm, and the linear transport mechanism are sized and shaped such that the end effector cannot be moved into or out of the substrate processing chamber by the dual link arm unless the linear transport mechanism is moving.

7. 6. The apparatus of claim 5, wherein the robotic arm comprises a third link connected to the first link, the first link and the third link forming a second dual link arm having a second end effector formed on the third link.

8. 6. The apparatus of claim 5, further comprising a second robot arm, the second robot arm being part of a second robot having a second robot drive connected to the second robot arm, the second robot arm comprising a second dual link arm having a third link connected to the second robot drive and a fourth link forming a second end effector for supporting a second substrate.

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