Airtight connection unit, airtight connection assembly, air tight container, evaporation device, and manufacturing method of the airtight connection assembly

Abstract

To enable reception of an electric signal or the like between an internal part and an external part of an air tight container while maintaining air tight of an air tight container with a simple construction.SOLUTION: An airtight connection assembly comprises: a conductive member constructing a path of a signal or fluid; a sealing part that contains a first sealing part having a shape that can cover a first hole formed in a separation wall of an air tight container, and a sealing material; and a connection part containing a connector connected to one or both end parts of the conductive member. In the airtight connection assembly, a second hole as a penetration hole formed so as to communicate the internal part with the external part of the air tight container is formed in the first sealing member. The conductive member is individually inserted into a second hole. The sealing material is filled to the conductive member and an inner peripheral surface of the second hole. By coupling the connector and the first sealing part, a coupling member for fixing a position relation of the connector and the first sealing part may be further comprised, and a second sealing member that surrounds a first hole, and is interposed to between the interference wall and the first sealing part may be further comprised.SELECTED DRAWING: Figure 14

Description

[Technical field]

[0001] The present invention relates to an airtight connection unit that enables transmission of electrical signals between the inside and outside of an airtight container containing an electric device or the like while maintaining the airtightness of the airtight container, and to an airtight connection assembly, an airtight container, and a vaporizer, which are related products of the airtight connection unit, and further to a method for manufacturing the airtight connection assembly. [Background technology]

[0002] In the technical field, a technique is known for preventing an explosion induced by a spark generated from an electric device by keeping the pressure of the gas inside an airtight container that houses the electric device higher than the pressure of the gas surrounding the airtight container. More specifically, a technique is known in which an electric device is housed inside an airtight container, and the pressure of the gas inside the airtight container (e.g., an inert gas such as nitrogen gas) is kept higher than the pressure of the surrounding gas, thereby preventing, for example, explosive, flammable, or spontaneously combustible gas, steam, or dust (hereinafter, sometimes collectively referred to as "flammable material") from entering the inside of the airtight container (see, for example, Patent Document 1).

[0003] The above technology is also effective when flammable materials are present inside the airtight container. For example, a tank storing flammable materials is placed in the airtight container, and the inside of the airtight container is filled with an inert gas. This allows the flammable materials to be kept inside the airtight container even if the flammable materials leak from the tank. In addition, by keeping the pressure of the gas inside the airtight container higher than the pressure of the surrounding air, it is possible to prevent the surrounding air from entering the inside of the airtight container, so that the oxygen concentration inside the airtight container can be kept below the lower explosion limit concentration, thereby preventing the flammable materials from burning and exploding.

[0004] Incidentally, for example, there are cases where it is necessary to supply power from outside the airtight container to an electrical device housed inside the airtight container, or to take out an electrical signal output from an electrical device housed inside the airtight container or a sensor or the like provided in a tank to the outside of the airtight container. In such cases, it is common to use a special connector called a "hermetic connector" or "airtight terminal" to transmit and receive the above-mentioned power and / or electrical signal between the inside and outside of the airtight container.

[0005] In such a special connector, for example, the metal outer ring and the lead wire are hermetically sealed via glass, so that the metal outer ring and the lead wire are electrically insulated while the airtight container is kept airtight (see, for example, Patent Document 2). Note that the lead wire and a cable or the like for electrically connecting with another device outside the airtight container can be connected by a method such as welding or soldering. Alternatively, the cable or the like and the lead wire can be connected via, for example, a connector. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] U.S. Patent No. 5,101,710 [Patent Document 2] Japanese Patent Publication No. 57-211255 Summary of the Invention [Problem to be solved by the invention]

[0007] Hermetic connectors currently available on the market come in a wide variety of configurations, such as the size and shape of the metal outer ring, the thickness, shape and material of the lead wire, and the material of the sealing material (e.g., glass, etc.), etc. However, the number of variations is limited, and it is not necessarily easy to obtain a hermetic connector that is suitable for the required specifications for a desired application.

[0008] As described above, the cables for electrical connection with other devices outside and / or inside the airtight container and the lead wires constituting the hermetic connector can be connected, for example, via a connector. However, in conventional hermetic connectors, there are no unified standards for the configuration of the lead wires (thickness, shape, material, and arrangement of the lead wires, etc.). Therefore, in order to facilitate the connection between the lead wires constituting the conventional hermetic connector and the above-mentioned cables, it is necessary to prepare a dedicated connector corresponding to each hermetic connector (the configuration of the lead wires in the hermetic connector). As a result, there is a risk of problems such as an increase in the cost of a device (e.g., a vaporizer) including an airtight container equipped with a hermetic connector.

[0009] As described above, there is a demand in the technical field for a technique that enables transmission of electrical signals and the like between the inside and outside of an airtight container while maintaining the airtightness of the airtight container with a simple configuration. [Means for solving the problem]

[0010] In view of the above problems, the inventor conducted intensive research and discovered that it is possible to meet the above demands by realizing the three functions of insulation, sealing, and connection, which are achieved by a single structure in conventional hermetic connectors, by multiple structures.

[0011] Specifically, the airtight connection unit according to the present invention (hereinafter, sometimes referred to as the "unit of the present invention") is an airtight connection unit that enables transmission of signals or fluids between the inside and outside of an airtight container via one or more conductive members inserted into a first hole penetrating a partition wall of the airtight container. The unit of the present invention comprises a sealing portion and a connection portion. The sealing portion includes a first sealing member that is a member having a shape capable of covering the first hole. The connection portion includes a connector that can be connected to either one or both ends of the conductive members. In the unit of the present invention, a second hole is formed that penetrates the first sealing member so that the conductive member inserted into the first hole can be further inserted.

[0012] Furthermore, the airtight connection assembly according to the present invention (hereinafter, sometimes referred to as the "assembly of the present invention") is an airtight connection assembly comprising the above-mentioned unit of the present invention and a conductive member, and the sealing portion further comprises a sealant. Furthermore, the conductive members are individually inserted into the second holes, and a sealant is filled between the conductive members and the inner peripheral surface of the second holes. In addition, a connector is connected to one or both ends of the conductive members.

[0013] Furthermore, the airtight container according to the present invention (hereinafter, may be referred to as the "container of the present invention") is an airtight container including the above-mentioned assembly of the present invention. Furthermore, the first hole is blocked by the first sealing member covering the first hole. In addition, the conductive member is inserted into the first hole via the second hole and extends from the inside to the outside of the airtight container.

[0014] In addition, the vaporizer according to the present invention (hereinafter, sometimes referred to as the "vaporizer of the present invention") is a vaporizer comprising the airtight container of the present invention described above, a tank housed inside the airtight container of the present invention, and a sensor and / or a heater. The sensor is configured to output a detection signal corresponding to the amount and / or state of the gas and / or gas raw material, which is a substance that is a source of gas generation, housed inside the tank. The heater is configured to receive power to heat the gas raw material. The vaporizer of the present invention is configured such that the gas and / or the detection signal and / or power are exchanged between the inside and outside of the container of the present invention via a conductive member provided in the assembly of the present invention.

[0015] On the other hand, the manufacturing method of an assembly for hermetic connection according to the present invention (hereinafter, may be referred to as the "method of the present invention") is a manufacturing method of the above-mentioned assembly of the present invention, and includes the steps listed below.

[0016] Connecting a connector to one or both ends of the conductive member, individually inserting the conductive members into the second holes, filling a sealant between the inner surface of the second hole and the conductive member, inserting the conductive member into the first hole, and fixing a first sealing member at a predetermined position on a partition wall of the airtight container to seal the first hole with the first sealing member. Effect of the Invention

[0017] According to the unit of the present invention, the sealing portion that achieves the functions of insulating and sealing the conductive member and the connector that achieves the function of connecting the conductive member are configured as different independent members, which increases the range of options for the configuration of the sealing portion and the connector. Therefore, it is possible to provide a container of the present invention that can be assembled with the assembly of the present invention, the container of the present invention, and the vaporizer of the present invention with a simple configuration that has a high degree of freedom and allows transmission of electrical signals, etc. between the inside and outside of the airtight container while maintaining the airtightness of the container.

[0018] That is, according to the unit of the present invention, the sealing portion and connector can be configured more freely than in the prior art, so that an airtight connection unit optimal for the required specifications can be easily realized. Also, since the unit and / or assembly of the present invention has a simple configuration, there is no need to prepare a dedicated connector, and the cost of the device including the airtight container can be reduced.

[0019] Other objects, features and attendant advantages of the present invention will become readily apparent from the following description of the embodiments of the present invention which are given with reference to the accompanying drawings. [Brief description of the drawings]

[0020] [Figure 1] FIG. 1 is a schematic cross-sectional view showing an example of the configuration of an airtight connection unit (first unit) according to a first embodiment of the present invention. [Diagram 2] FIG. 1 is a schematic cross-sectional view showing an example of the configuration of an airtight connection assembly (first assembly) according to a first embodiment of the present invention. [Diagram 3]FIG. 1 is a schematic cross-sectional view showing an example of the configuration of an airtight container (first container) according to a first embodiment of the present invention. [Figure 4] FIG. 2 is a schematic diagram showing an example of the configuration of a vaporizer (first vaporizer) according to the first embodiment of the present invention. [Diagram 5] 5 is a flowchart showing an example of the flow of each step included in the manufacturing method (first method) of the airtight connection assembly according to the first embodiment of the present invention. [Figure 6] FIG. 11 is a schematic cross-sectional view showing an example of the configuration of an airtight connection unit (second unit) according to a second embodiment of the present invention. [Figure 7] FIG. 11 is a schematic cross-sectional view showing an example of the configuration of an airtight connection assembly (second assembly) according to a second embodiment of the present invention. [Figure 8] FIG. 11 is a schematic cross-sectional view showing an example of the configuration of an airtight container (second container) according to a second embodiment of the present invention. [Figure 9] 10 is a flowchart showing an example of the flow of steps included in a manufacturing method (second method) for an airtight connection assembly according to a second embodiment of the present invention. [Figure 10] FIG. 11 is a schematic cross-sectional view showing an example of the configuration of an airtight connection unit (third unit) according to a third embodiment of the present invention. [Figure 11] FIG. 11 is a schematic cross-sectional view showing an example of the configuration of an airtight connection assembly (third assembly) according to a third embodiment of the present invention. [Figure 12] FIG. 11 is a schematic cross-sectional view showing an example of the configuration of an airtight container (third container) according to a third embodiment of the present invention. [Figure 13] 10 is a flowchart showing an example of the flow of steps included in a manufacturing method (third method) for an airtight connection assembly according to a third embodiment of the present invention. [Figure 14] FIG. 1 is a schematic exploded perspective view showing an example of the configuration of an airtight connection assembly (embodiment assembly) according to an embodiment of the present invention. [Figure 15] FIG. 15 is a schematic exploded perspective view of the embodiment assembly shown in FIG. 14 turned upside down. [Figure 16]16 is a schematic exploded perspective view showing the positional relationship between a recess formed on a surface of a first sealing member that faces the airtight container and a second sealing member provided in the embodiment assembly shown in FIGS. 14 and 15. FIG. [Figure 17] 17 is a schematic exploded perspective view showing a state in which a conductive member connected to an external connector provided in the embodiment assembly shown in FIGS. 14 to 16 is inserted into a first hole formed in a partition wall of the airtight container and a second hole formed in a first sealing member. FIG. [Figure 18] FIG. 18 is a schematic perspective view showing a state in which the embodiment assembly shown in FIGS. 14 to 17 is attached to an airtight container. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] First Embodiment <composition> (1) Airtight connection unit Hereinafter, an airtight connection unit according to a first embodiment of the present invention (hereinafter, may be referred to as a "first unit") will be described with reference to the drawings.

[0022] The first unit is an airtight connection unit that enables transmission of a signal or a fluid between the inside and the outside of the airtight container via one or more conductive members that are inserted into a first hole that penetrates a partition wall of the airtight container. The first unit includes a sealing part and a connecting part.

[0023] The sealing portion includes a first sealing member, which is a member having a shape capable of covering the first hole. The shape of the first sealing member is not particularly limited as long as it is a shape capable of covering the first hole, which is a through hole formed in the partition wall of the airtight container. Typically, the first sealing member is a plate-shaped member larger than the first hole. In addition, the material constituting the first sealing member is not particularly limited as long as it can withstand the usage environment in the application of the airtight container to which the first unit is attached. Typically, the material constituting the first sealing member is, for example, metal such as aluminum and iron, resin, or a composite material thereof.

[0024] The connection portion includes a connector that can be connected to one or both ends of the conductive member. The first unit is configured so that a connector can be connected to one or both ends of the conductive member to communicate a conductive member (e.g., a signal line provided in a sensor or a pipe through which a fluid flows) provided in another device or facility and a conductive member provided in a device or facility disposed inside the airtight container to which the first unit is applied, in order to exchange a signal transmitted by the conductive member or a fluid flowing through a passage formed by the conductive member.

[0025] When the signal is an electrical signal, the connector may be, for example, a plug or jack (including a receptacle), or a male or female Giboshi terminal. When the signal is an optical signal, the connector may be, for example, an optical connector. On the other hand, when a fluid flows through a passage formed by a conductive member, the connector may be, for example, a joint. The number of connectors connected to either end of the conductive member may be one or more (i.e., two or more). In the latter case, the multiple connectors may be the same type of connector or different types of connectors. In the first unit, for example, a commercially available general connector and / or joint may be adopted as the connector included in the connection part.

[0026] As described above, the first sealing member is a member having a shape capable of covering the first hole. In a state where the airtight connection assembly according to the present invention manufactured from the first unit is attached to the airtight container, the first sealing member is arranged so as to cover the first hole. The means and / or method for achieving and maintaining such a state are not particularly limited. For example, the first sealing member may be fixed to the partition wall of the airtight container by a fastening member such as a bolt or a screw inserted into a through hole formed in the partition wall of the airtight container and / or the first sealing member, or the first sealing member may be fixed to the partition wall of the airtight container by, for example, an adhesive, so that the first hole may be covered by the first sealing member. In order to enable the transmission and reception of signals and / or fluids via the conductive member between the inside and outside of the airtight container even in such a state, it is necessary that the conductive member can be extended from the inside to the outside of the airtight container via the first sealing member arranged so as to cover the first hole.

[0027] Therefore, in the first unit, a second hole is formed penetrating the first sealing member so that the conductive member inserted in the first hole can be further inserted. The number, size, shape, etc. of the second holes are appropriately designed according to, for example, the number, thickness, and shape of the conductive members inserted in the second holes. In addition, the arrangement of the second holes does not necessarily have to correspond to the arrangement of the connection points between the connector and the conductive members in the connection part. For example, as described in detail later, in order to facilitate the work of filling the space between the inner circumferential surface of the second hole and the conductive member with a sealant, the intervals between the multiple second holes may be sufficiently wide, or each second hole may be arranged at a position that is easily accessible from the surroundings. This makes it possible to transmit and receive signals and / or fluids via the conductive member between the inside and outside of the airtight container even when the first hole is covered by the first sealing member.

[0028] FIG. 1 is a schematic cross-sectional view showing an example of the configuration of the first unit. In FIG. 1, a partition wall 310 and a conductive member 210 of an airtight container 300 to which the first unit is attached are depicted by dashed lines. The airtight container 300 and the conductive member 210 are not included in the components of the first unit. The first unit 101 illustrated in FIG. 1 enables transmission and reception of a signal or a fluid through the conductive member 210, which is a member constituting a path of a signal or a fluid between the inside and the outside of the airtight container 300, while maintaining the airtightness of the airtight container 300. The first unit 101 includes a sealing portion 110 (a portion surrounded by a thick dashed line) and a connection portion 120.

[0029] The conductive member 210 will be described in detail in the description of the airtight connection assembly described later, and therefore will not be described here. The sealing portion 110 includes a first sealing member 111 which is a member having a shape capable of covering a first hole 311 which is a through hole formed in a partition wall 310 of the airtight container 300. The first sealing member 111 illustrated in Fig. 1 is a plate-like member made of aluminum (the portion with diagonal lines slanting upwards to the right).

[0030] 1 is in a state where the first sealing member 111 is fixed to the partition wall 310 of the airtight container 300 by bolts (not shown) so as to cover the first holes 311 and block the first holes 311. In this state, second holes 111a, which are through holes formed to communicate with the first holes 311, are formed in the first sealing member 111. In other words, the first holes 311 are formed in the partition wall 310 of the airtight container 300 so as to have a size and shape capable of communicating with all the second holes 111a.

[0031] 1 includes an external connector 121 and an internal connector 122 as the above-mentioned connectors. The external connector 121 is a connector configured to be connected to the conductive member 210 at an end of the conductive member 210 located outside the airtight container 300 so as to enable transmission of signals and / or fluid between the conductive member 210 and a conductive member (e.g., a signal line provided by a sensor or a pipe through which a fluid flows) provided by another device or equipment (not shown) located outside the airtight container 300. On the other hand, the internal connector 122 is a connector configured to be connected to the conductive member 210 at an end of the conductive member 210 located inside the airtight container 300 so as to enable transmission of signals and / or fluid between the conductive member 210 and a conductive member (e.g., a signal line provided by a sensor or a pipe through which a fluid flows) provided by another device or equipment (not shown) located inside the airtight container 300. For example, the external connector 121 and the internal connector 122 are commercially available connectors having terminals that can be electrically connected to the respective conductive members 210 that are electric wires.

[0032] As described above, the number, size, shape, etc. of the second holes 111a formed in the first sealing member 111 are appropriately designed according to the number, thickness, and shape of the conductive members 210 inserted into the second holes 111a. In the first unit 101 illustrated in Fig. 1, the two second holes 111a are arranged at positions that are easily accessible from the periphery with a sufficient distance between them. This makes it easy to fill the gap between the inner circumferential surfaces of the second holes 111a and the conductive members 210 with a sealant (described in detail later).

[0033] (2) Airtight connection assembly Hereinafter, an airtight connection assembly according to a first embodiment of the present invention (hereinafter, may be referred to as a "first assembly") will be described with reference to the drawings.

[0034] As mentioned at the beginning of this specification, the present invention relates not only to the unit of the present invention having the above-mentioned characteristics, but also to an assembly for airtight connection. The term "assembly for airtight connection" refers to an assembly that includes the unit of the present invention and that enables transmission and reception of electrical signals between the inside and outside of an airtight container that houses an electric device or the like while maintaining the airtightness of the container.

[0035] The first assembly is an assembly for hermetic connection that includes the above-mentioned first unit and conductive member, and the sealing portion further includes a sealant. Furthermore, the conductive members are individually inserted into the second holes, and a sealant is filled between the conductive members and the inner circumferential surface of the second holes. In addition, a connector is connected to one or both ends of the conductive members. The first unit has already been described in detail in the above description of the first unit, so a description thereof will be omitted here.

[0036] The conductive member is a member that constitutes a path for a signal and / or a fluid. The signal transmitted by the conductive member is not particularly limited, and may be, for example, an electric signal (including, for example, not only a detection signal output from a sensor or the like and an instruction signal output from a control device or the like, but also power output from a power supply device or the like) or an optical signal. When the signal is an electric signal, the conductive member is an electric wire, and the electric wire may be covered with, for example, an insulator and / or a protective coating or the like. When the signal is an optical signal, the conductive member is an optical fiber, and the optical fiber may be, for example, an optical cable covered with a protective coating or the like. On the other hand, the fluid that flows through the path formed by the conductive member is also not particularly limited, and may be, for example, a fluid such as a gas or a liquid. In this case, the conductive member may be, for example, a tubular member such as a tube or a pipe in which a space that becomes a flow path through which the fluid flows is formed inside. Unlike an electric wire and an optical fiber, a tubular member such as a tube or a pipe may not necessarily be covered with an insulator and / or a protective coating or the like.

[0037] The number of conductive members included in the first assembly may be one or more (i.e., two or more). When the first assembly includes multiple conductive members, the signals flowing through the multiple paths formed by the multiple conductive members may all be electrical signals, may all be optical signals, may all be fluids, or may include at least two or more of electrical signals, optical signals, and fluids.

[0038] The sealing material is not particularly limited as long as it is a material that can remain between the conductive member and the inner circumferential surface of the second hole and maintain airtightness in the usage environment of the application of the airtight container to which the first assembly is attached. Note that the term "airtight" here is not necessarily limited to a state in which gas leakage is completely prevented, but is a concept that also includes a state in which gas leakage is prevented to a degree required for the application of the airtight container to which the first assembly is attached.

[0039] Specific examples of the above-mentioned sealing material include polymer organic materials such as rubbers such as silicone sealant and resins such as epoxy resins, and ceramic materials such as glass. The above-mentioned polymer organic materials may be room temperature curing, thermosetting, or thermoplastic, as long as they can withstand the usage environment in the application of the airtight container to which the first assembly is attached. Therefore, the material constituting the conductive member and the first sealing member must be able to withstand the conditions when the sealing material is filled and / or cured. Alternatively, the sealing material may be a member formed in advance to fit the shape of the second hole, such as a grommet, and composed of a solid having a through hole through which the conductive member is inserted.

[0040] The first hole is closed by the sealing portion including the first sealing member and the sealing material as described above, thereby achieving the function of airtightly sealing the airtight container.

[0041] However, when multiple conductive members are inserted into one second hole, there is a risk that the sealing material may not be filled sufficiently to improve airtightness, for example, because the sealing material is not filled sufficiently between the multiple conductive members. For this reason, in the first assembly, the conductive members are individually inserted into the second holes as described above. That is, one conductive member is inserted into one second hole, and multiple conductive members are not inserted into one second hole.

[0042] FIG. 2 is a schematic cross-sectional view showing an example of the configuration of the first assembly. In FIG. 2, a partition wall 310 of an airtight container 300 to which the first assembly is attached is depicted by a broken line. The airtight container 300 is not included in the components of the first assembly. The first assembly 201 illustrated in FIG. 2 is an airtight connection assembly including two conductive members 210, a sealing portion 110 (a portion surrounded by a thick dashed line), and a connection portion 120. In other words, the first assembly 201 is an airtight connection assembly including the above-mentioned first unit 101 and two conductive members 210, and the sealing portion 110 further includes a sealant 113. The two conductive members 210 are individually inserted into the second hole 111a, and the sealant 113 is filled between each conductive member 210 and the inner peripheral surface of the second hole 111a. An external connector 121 and an internal connector 122 are connected to both ends of the conductive member 210, respectively.

[0043] The conductive member 210 is an electric wire that transmits an electric signal, and the electric wire is covered with a protective coating made of an insulator. The sealing part 110 includes a first sealing member 111, which is a member having a shape capable of covering a first hole 311, which is a through hole formed in a partition wall 310 of the airtight container 300, and a sealing material 113. The first sealing member 111 is an aluminum plate-shaped member (part with diagonal lines slanting upwards to the right), and the sealing material 113 is a room temperature curing silicone sealant (part painted black).

[0044] 2 illustrates the first assembly 201 in a state in which the first sealing member 111 is fixed to the partition wall 310 of the airtight container 300 by a bolt (not shown) so as to cover the first hole 311 and block the first hole 311. As illustrated in FIG. 2, the first hole 311 is formed in the partition wall 310 of the airtight container 300 so as to have a size and shape that allows the first hole 311 to communicate with all the second holes 111a.

[0045] Furthermore, second holes 111a, which are through holes formed to connect the inside and outside of the airtight container 300 when the first sealing member 111 is fixed to the partition wall 310 of the airtight container 300 so as to cover the first hole 311, are formed in the first sealing member 111, the conductive members 210 are individually inserted into the second holes 111a, and a sealant 113 is filled between the conductive members 210 and the inner surfaces of the second holes 111a.

[0046] 2 are disposed at positions that are easily accessible from the periphery and spaced apart from each other with a sufficient distance between them, which facilitates the work of filling the gap between the inner circumferential surface of the second hole 111a and the conductive member 210 with the sealant 113, as described above.

[0047] (3) Airtight container Hereinafter, an airtight container according to a first embodiment of the present invention (hereinafter, may be referred to as a "first container") will be described with reference to the drawings.

[0048] As mentioned at the beginning of this specification, the present invention not only relates to an inventive unit and an inventive assembly having the characteristics as described above, but also to an airtight container comprising an inventive assembly.

[0049] The first container is an airtight container including the above-mentioned first assembly. Details of the first assembly have already been described in the description of the above-mentioned first assembly, so description here will be omitted. The configuration of the airtight container, such as the size, shape, and material of the partition, constituting the first container, can be appropriately selected depending on, for example, the device and / or equipment housed inside the airtight container, the properties of the fluid such as gas, and the use environment in the application of the airtight container.

[0050] In the first container, a first sealing member of the first assembly covers a first hole, which is a through hole formed in a partition wall of the first container, thereby blocking the first hole. Furthermore, a conductive member is inserted into the first hole via a second hole, which is a through hole formed in the first sealing member, and extends from the inside to the outside of the first container.

[0051] FIG. 3 is a schematic cross-sectional view showing an example of the configuration of the first container. The first container 301 shown in FIG. 3 is an airtight container including a first assembly 201. The first container 301 includes a first assembly 201, and has a similar configuration to the first assembly 201 shown in FIG. 2, except that the first container 301 does not include an internal connector. Also in the first container 301, a first hole 311, which is a through hole, is formed in a partition wall 310, and the first hole 311 is blocked by a first sealing member 111 included in a sealing portion 110 included in the first assembly 201. Furthermore, a conductive member 210 inserted into the first hole 311 via a second hole 111a formed in the first sealing member 111 extends from the inside to the outside of the first container 301.

[0052] A sensor 420 is housed inside the first container 301 (see the oval shape drawn by the broken line), and the conductive member 210 is, for example, an electric wire serving as a path for transmitting a detection signal output from the sensor 420. However, the conductive member 210 may be a power line for supplying power to an apparatus or facility housed inside the first container 301, or may be piping such as a tube or pipe for transferring a fluid between a tank housed inside the first container 301 and the outside of the first container 301.

[0053] As described above, the first assembly 201 included in the first container 301 illustrated in Fig. 3 does not include an internal connector. Therefore, in the example illustrated in Fig. 3, the signal lines 421 and 422 included in the sensor 420 and the two conductive members 210 included in the first assembly 201 are directly connected to each other. However, if the first assembly 201 included in the first container 301 includes an internal connector, these can be easily connected by the internal connector.

[0054] (4) Carburetor Hereinafter, a vaporizer according to a first embodiment of the present invention (hereinafter, may be referred to as a "first vaporizer") will be described with reference to the drawings.

[0055] As stated at the beginning of this specification, the invention not only relates to an inventive unit, an inventive assembly and an inventive container having the characteristics as described above, but also to a vaporizer comprising an inventive container.

[0056] The first vaporizer is a vaporizer including the first container described above, a tank accommodated inside the first container, and a sensor and / or a heater. Details of the first container have already been described in the description of the first container described above, so a description thereof will be omitted here.

[0057] The tank is a container that contains the gas to be supplied by the first vaporizer and / or the gas raw material, which is the substance that serves as the source of gas, and the gas contained inside the tank and / or the gas generated inside the tank is discharged from the inside of the first container to the outside.

[0058] The sensor is configured to output a detection signal corresponding to the amount and / or state of the gas and / or gas raw material, which is a substance that generates the gas, contained inside the tank. The amount of the gas and / or gas raw material means, for example, the mass, volume, and liquid level (if the gas raw material is liquid) of the gas and / or gas raw material. The state of the gas and / or gas raw material means, for example, the temperature, pressure, and concentration of a specific component of the gas and / or gas raw material.

[0059] The heater is configured to receive power to heat the gas raw material. Specific examples of such a heater include a resistance heating heater, a dielectric heating heater, a microwave heating heater, and an induction heating heater. Typically, the heater is a resistance heating heater.

[0060] In addition, the first vaporizer is configured such that gas and / or detection signal and / or power are exchanged between the inside and the outside of the first container via the conductive member provided in the first assembly.

[0061] The first vaporizer may be configured so that at least one of the above-mentioned gas, the detection signal, and the power is transferred between the inside and outside of the first container without passing through the conductive member of the first assembly. For example, the first vaporizer may include an outlet pipe as a flow path configured to lead the gas from the inside of the tank to the outside of the airtight container, separately from the conductive member. In this case, the configuration of the outlet pipe is not particularly limited as long as it is possible to lead the gas from the inside of the tank to the outside of the airtight container, and can be appropriately selected depending on, for example, the properties of the gas and the usage environment in the application of the vaporizer.

[0062] Fig. 4 is a schematic diagram showing an example of the configuration of the first vaporizer. The first vaporizer 401 shown in Fig. 4 includes the above-mentioned first container 301, a tank 410 accommodated inside the first container 301, a sensor 420, and an outlet pipe 430 that leads the gas generated inside the tank 410 from inside the first container 301 to the outside. In the example shown in Fig. 4, the sensor 420 is configured to detect the temperature (T) of the gas raw material (a substance that is a source of gas generation) stored inside the tank 410, the concentration (C) of a specific component in the gas raw material, and the pressure (P) of the gas generated from the gas raw material. In the example shown in Fig. 4, a heater is not shown.

[0063] First vaporizer 401 includes an introduction pipe 440 that introduces a carrier gas below the liquid surface of the gas raw material stored inside tank 410. In addition, first vaporizer 401 includes a flow rate control device 510 that controls the flow rate of the carrier gas introduced into tank 410, and a flow meter 520 that measures the flow rate of a mixed gas of the carrier gas and the gas generated from the gas raw material that is discharged from the inside of first container 301 to the outside by discharge pipe 430.

[0064] The first vaporizer 401 having the above-mentioned configuration is configured to introduce a carrier gas at a predetermined flow rate below the liquid surface of the gas raw material stored in the tank 410 while keeping constant the temperature of the gas raw material stored in the tank 410 and the pressure of the gas generated from the gas raw material. The first vaporizer 401 then discharges a mixed gas of the gas generated from the gas raw material and the carrier gas from the exhaust port of the tank 410 through the discharge pipe 430 to the outside of the first container 301. That is, the first vaporizer 401 is a bubbling type vaporizer.

[0065] In the first vaporizer 401 having the above-mentioned configuration, the flow rate Qs of the gas generated from the gas raw material can be obtained by subtracting the flow rate Q1 of the carrier gas measured by the flow control device 510 from the flow rate Q2 of the mixed gas measured by the flow meter 520 (Qs=Q2-Q1).

[0066] In the process of supplying the gas generated from the gas raw material at a predetermined flow rate as described above to a predetermined destination (chamber 530 in FIG. 4), detection signals corresponding to the temperature (T) of the gas raw material, the concentration (C) of a specific component in the gas raw material, and the pressure (P) of the gas generated from the gas raw material are output from the sensor 420. These detection signals are transmitted from the inside to the outside of the first container 301 by the first assembly 201 provided in the first container 301 while maintaining the airtightness of the first container 301, and are transmitted to a control device or the like (not shown) via a plug 450 connected to an external connector (not shown) provided in the first assembly 201 and a cable 460 connected to the plug 450, and are used for controlling the flow rate of the gas.

[0067] In the first container and the first vaporizer illustrated with reference to FIG. 3 and FIG. 4, respectively, the conductive member is configured as a signal line (electric wire) that transmits the detection signal output from the sensor from the inside to the outside. However, as described above, the conductive member is a member that configures a path for a signal or a fluid. In addition, the signal transmitted by the conductive member is not limited to an electric signal, and may be, for example, an optical signal. Furthermore, the fluid that flows through the path configured by the conductive member is also not particularly limited, and may be, for example, a fluid such as a gas or a liquid. Therefore, the conductive member may be, for example, an electric wire or an optical fiber, or may be, for example, a tubular member such as a tube or a pipe in which a space that serves as a flow path through which the fluid flows is formed. Specifically, the outlet pipe 430 and the inlet pipe 440 provided in the first vaporizer 401 illustrated in FIG. 4 may be configured to transfer the gas and the gas raw material between the inside and the outside of the first container 301 via the first assembly 201 arranged so as to cover a through hole (not shown) formed in the partition wall 310 of the first container 301.

[0068] (5) Method for manufacturing an assembly for airtight connection Hereinafter, a method for manufacturing an airtight connection assembly according to a first embodiment of the present invention (hereinafter, may be referred to as a "first method") will be described with reference to the drawings.

[0069] As mentioned at the beginning of this specification, the present invention not only relates to the inventive unit, the inventive assembly, the inventive container and the inventive vaporizer having the characteristics as described above, but also to a method for producing the inventive assembly.

[0070] The first method is a method for manufacturing the first assembly described above. Details of the first assembly have already been described in the description of the first assembly described above, so a description thereof will be omitted here. Furthermore, the first method includes the steps listed below.

[0071] Step A: Connecting a connector to at least one end of the conductive member. Step B: Inserting the conductive members individually into the second holes, which are through holes formed in the first sealing member. Step C: filling a sealant between the inner circumferential surface of the second hole and the conductive member. Step D: Inserting a conductive member into a first hole which is a through hole formed in a partition wall of the airtight container. Step E: fixing a first sealing member to a predetermined position of the partition wall of the airtight container to close the first hole with the first sealing member.

[0072] Fig. 5 is a flow chart showing an example of the flow of each step included in the first method. In the first method illustrated in Fig. 5, each step is executed in the order of S10, S20, S30, S40, and S50. That is, in the first method illustrated in Fig. 5, the above-mentioned steps are executed in the order of "step A → step B → step C → step D → step E". However, the execution order of the above steps A to E included in the first method does not necessarily have to be as described above, and the execution order of each step can be appropriately changed depending on, for example, the airtight container to which the first assembly is applied, the configuration of the first assembly, and the surrounding environment of the airtight container.

[0073] Specifically, for example, the first assembly 201 illustrated in FIG. 2 can be assembled from the first unit 101 illustrated in FIG. 1 by the following procedure. First, the external connector 121 is connected to one end of each of the two conductive members 210. Next, each of the conductive members 210 connected to the external connector 121 is individually inserted into two second holes 111a formed in the first sealing member 111 from the end opposite to the external connector 121. Then, the sealant 113 is filled between the inner circumferential surface of each second hole 111a and the conductive member 210 and hardened. The end of the conductive member 210 opposite to the external connector 121, which constitutes the assembly consisting of the external connector 121, the conductive member 210, and the first sealing member 111 assembled in this way, is inserted from the outside of the airtight container 300 into the first hole 311 formed in the partition wall 310 of the airtight container 300.

[0074] Furthermore, the first sealing member 111 is fixed to a predetermined position of the partition wall 310 of the airtight container 300 by a bolt (not shown), and the first hole 311 is covered and blocked by the first sealing member 111. The end of the conductive member 210 opposite to the external connector 121 is connected to a device or equipment (not shown) such as a sensor disposed inside the airtight container 300. The connection may be a direct connection between the conductive member 210 and a terminal of the device or equipment, or may be a connection via the internal connector 122 provided in the first unit 101 illustrated in FIG. 1. In addition, if the internal connector 122 can pass through the first hole 311, the conductive member 210 and the internal connector 122 may be connected before the first sealing member 111 is fixed to a predetermined position of the partition wall 310 of the airtight container 300.

[0075] <effect> As described above, in the first unit, the sealing portion and the connection portion can be formed from readily available general-purpose components such as, for example, commercially available metal plates and connectors. As a result, the first unit can provide an airtight connection assembly that maintains the airtightness of the airtight container with a simple configuration and enables transmission and reception of electrical signals between the inside and outside of the airtight container.

[0076] The first assembly is an assembly for airtight connection including a first unit and a conductive member, and the sealing portion further includes a sealant, the conductive members are individually inserted into the second holes, a sealant is filled between the conductive members and the inner peripheral surface of the second holes, and a connector is connected to one or both ends of the conductive members. As a result, the first assembly can provide an airtight container that maintains the airtightness of the airtight container with a simple configuration and allows electrical signals and the like to be exchanged between the inside and outside of the airtight container.

[0077] Furthermore, the first container is an airtight container including a first assembly, the first hole is blocked by a first sealing member, and a conductive member inserted into the first hole via a second hole formed in the first sealing member extends from the inside to the outside of the first container. As a result, in the first container, it is possible to transmit and receive electrical signals between the inside and outside of the first container while maintaining the airtightness of the first container with a simple configuration.

[0078] In addition, the first vaporizer includes a first container. As a result, as already described in the description of the first container, it is possible to maintain the airtightness of the first container with a simple configuration while enabling transmission of electric signals between the inside and outside of the first container. Therefore, the first vaporizer can reduce, for example, leakage of gas from a tank accommodated inside the first container to the outside of the first container and / or intrusion of foreign matter (for example, surrounding gas, etc.) from the outside of the first container into the inside of the tank, and therefore it is possible to provide a vaporizer with high safety with a simple configuration.

[0079] On the other hand, in the first method, which is a method for manufacturing the first assembly having the above-mentioned configuration, the steps of connecting the conductive member and the connector (step A), inserting the conductive member into the second hole of the first sealing member (step B), filling the gap between the inner circumferential surface of the second hole and the conductive member with a sealant (step C), inserting the conductive member into the first hole of the airtight container (step D), and closing the first hole by fixing the first sealing member to a predetermined position of the partition wall of the airtight container (step E) can each be performed individually. Therefore, according to the first method, the first assembly that can achieve the above-mentioned effects can be easily manufactured by a simple process with a high degree of flexibility.

[0080] Second Embodiment <composition> (1) Airtight connection unit Hereinafter, an airtight connection unit according to a second embodiment of the present invention (hereinafter, may be referred to as a "second unit") will be described with reference to the drawings.

[0081] In the airtight connection units (units of the present invention) according to various embodiments of the present invention, including the first unit described above, the sealing portion and the connection portion can be formed from readily available general-purpose components such as commercially available metal plates and connectors. As a result, the unit of the present invention can provide an airtight connection assembly that maintains the airtightness of the airtight container with a simple configuration and allows electrical signals and the like to be transmitted and received between the inside and outside of the airtight container.

[0082] However, for example, when the conductive member is made of a flexible material, the connector connected to one or both ends of the conductive member and / or the conductive member itself can move flexibly. As a result, for example, as described above, the workability can be improved when fixing the first sealing member to a predetermined position of the partition wall of the airtight container. However, depending on the surrounding conditions of the place where the airtight connection assembly formed by the unit of the present invention is attached, if the connector and / or the conductive member can move flexibly, the work of fixing the first sealing member may be difficult. In addition, depending on the configuration of the conductive member, the conductive member may be damaged by bending or deforming, for example, when assembled into the airtight container.

[0083] Therefore, the second unit is an airtight connection unit that further includes a coupling portion including a coupling member in addition to the components of the first unit described above. The coupling member is a member capable of coupling at least one of the connectors to the first sealing member to fix the positional relationship between the connector and the first sealing member.

[0084] The specific configuration of the coupling member is not particularly limited as long as it is possible to couple at least one connector included in the connection portion and the first sealing member so as to fix the positional relationship between the connector and the first sealing member. For example, the coupling member may include a connector holding member that is a member for holding the connector, and a connector support member that is a member for connecting the first sealing member and the connector holding member and supporting the connector holding member. In this case, the connector holding member and the connector support member may be configured as separate members, or may be configured as an integrated member.

[0085] As described above, in the first unit, a second hole is formed penetrating the first sealing member so that the conductive member inserted into the first hole, which is a through hole formed in the partition wall of the airtight container, can be further inserted. When the first assembly is assembled from the first unit, the conductive members are individually inserted into the second holes, and a sealant is filled between the conductive members and the inner peripheral surfaces of the second holes. Therefore, in the second unit, even when the sealant is filled between the conductive member and the inner peripheral surface of the second hole after at least one connector included in the connection part is connected to the first sealing member by the coupling member, it is preferable that the coupling member has a structure that does not hinder or is unlikely to hinder the filling operation of the sealant.

[0086] A specific example of the configuration of the coupling member as described above is a configuration including, for example, a pair of plate-shaped connector support members facing each other and a plate-shaped connector holding member coupled to one end of the pair of connector support members. In this case, when the airtight connection assembly is assembled from the second unit, a sealant can be filled between the conductive member and the inner peripheral surface of the second hole through the space between the pair of connector support members. Alternatively, the coupling member may be composed of a plate-shaped connector holding member and a connector support member as a plurality of legs extending from the connector holding member toward the first sealing member. In this case, when the airtight connection assembly is assembled from the second unit, a sealant can be filled between the conductive member and the inner peripheral surface of the second hole through the space between the adjacent legs.

[0087] The material constituting the joining member is also not particularly limited as long as it can withstand the usage environment in the application of the airtight container to which the airtight connection assembly constituted by the second unit is attached. Typically, the material constituting the joining member is metal such as aluminum or iron, resin, or a composite material thereof.

[0088] Fig. 6 is a schematic cross-sectional view showing an example of the configuration of the second unit. Similarly to Fig. 1 described above, the second unit 102 shown in Fig. 6 is in a state in which the first sealing member 111 is fixed to the partition wall 310 of the airtight container 300 by a bolt (not shown) so as to cover the first hole 311 and close the first hole 311. In addition, the partition wall 310 and the conductive member 210 of the airtight container 300 to which the airtight connection assembly formed by the second unit 102 is attached are shown by dashed lines.

[0089] The second unit 102 illustrated in Fig. 6 further includes a coupling portion 130 including a coupling member 131 that is a member configured to couple the external connector 121 and the first sealing member 111 to fix the positional relationship between the external connector 121 and the first sealing member 111. Except for this point, the second unit 102 has a similar configuration to the first unit 101 illustrated in Fig. 1. Therefore, in the following description of the second unit 102, the above-mentioned differences will be mainly described.

[0090] As illustrated in FIG. 6, the coupling member 131 included in the coupling portion 130 of the second unit 102 is composed of a connector holding member 131a and a connector support member 131b (a portion with a diagonal lattice pattern). The connector holding member 131a is a member for holding the external connector 121. The connector support members 131b are a pair of plate-like members facing each other, and the connector holding member 131a is coupled to one end of the pair of connector support members 131b so as to span the pair. The other ends of the pair of connector support members 131b are fixed to the outer edge of the first sealing member 111, so that the positional relationship between the external connector 121 and the first sealing member 111 can be fixed. When assembling an airtight connection assembly from the second unit 102 illustrated in FIG. 6, the sealant 113 can be easily filled between the conductive member 210 and the inner circumferential surface of the second hole 111a through the space between the pair of connector support members 131b (described in detail later).

[0091] (2) Airtight connection assembly Hereinafter, an airtight connection assembly according to a second embodiment of the present invention (hereinafter, may be referred to as a "second assembly") will be described with reference to the drawings.

[0092] The second assembly is an assembly for hermetic connection that includes the above-mentioned second unit as an airtight connection unit in addition to the components included in the first assembly, and at least one connector and the first sealing member are connected by a connecting member to fix the positional relationship between the connector and the first sealing member. Note that the specific configurations of the second unit constituting the second assembly and the connecting portion included in the second unit have already been described in the description of the above-mentioned second unit, so description thereof will be omitted here.

[0093] FIG. 7 is a schematic cross-sectional view showing an example of the configuration of the second assembly. As illustrated in FIG. 7, the coupling member 131 included in the coupling portion 130 of the second assembly 202 is composed of a connector holding member 131a and a connector support member 131b (a portion with a diagonal lattice pattern). The connector holding member 131a is a plate-shaped member for holding the external connector 121. The connector support member 131b is a plurality of columnar (rod-shaped) or plate-shaped members configured as legs extending from the connector holding member 131a toward the first sealing member 111. The connector holding member 131a is coupled to one end of the plurality of connector support members 131b. Furthermore, the other ends of the plurality of connector support members 131b are fixed to the surface of the first sealing member 111 (the surface opposite to the partition wall 310 of the airtight container 300). This fixes the positional relationship between the external connector 121 and the first sealing member 111. As a result, in the second assembly 202 illustrated in FIG. 7, the sealant 113 can be easily filled between the conductive member 210 and the inner surface of the second hole 111a through the space between the multiple connector support members 131b.

[0094] (3) Airtight container An airtight container according to a second embodiment of the present invention (hereinafter, may be referred to as a "second container") will be described below with reference to the drawings.

[0095] The second container is an assembly for hermetic connection that includes the second assembly described above as the assembly for hermetic connection in addition to the components of the first container described above. Note that the specific configurations of the second assembly constituting the second container and the coupling portion of the second assembly have already been described in the description of the second assembly described above, and therefore will not be described here.

[0096] Fig. 8 is a schematic cross-sectional view showing an example of the configuration of the second container. The second container 302 shown in Fig. 8 further includes a coupling portion 130 including a coupling member 131 that is a member configured to couple the external connector 121 and the first sealing member 111 to fix the positional relationship between the external connector 121 and the first sealing member 111. Except for this point, the second container 302 has a similar configuration to the first container 301 shown in Fig. 3. Therefore, in the following description of the second container 302, the above-mentioned differences will be mainly described.

[0097] As illustrated in FIG. 8, the coupling member 131 included in the coupling portion 130 provided in the second assembly 202 constituting the second container 302 is composed of a connector holding member 131a and a connector support member 131b (parts with a diagonal checkered pattern). The connector holding member 131a is a plate-like member for holding the external connector 121. The connector support member 131b is a pair of plate-like members facing each other, and the connector holding member 131a is coupled to one end of the pair of connector support members 131b. The other ends of the pair of connector support members 131b are fixed to the outer edge portion of the first sealing member 111, thereby fixing the positional relationship between the external connector 121 and the first sealing member 111.

[0098] In addition, when assembling the second container 302 illustrated in FIG. 8, the sealant 113 can be easily filled between the conductive member 210 and the inner surface of the second hole 111a through the space between the pair of connector support members 131b.

[0099] (4) Carburetor Hereinafter, a vaporizer according to a second embodiment of the present invention (hereinafter, may be referred to as a "second vaporizer") will be described.

[0100] The second vaporizer is a vaporizer that includes the components of the first vaporizer described above, and further includes a second container as an airtight container instead of the first container described above. Details of the second container have already been described in the above description of the second container, so the description and reference to the drawings will be omitted here.

[0101] (5) Method for manufacturing an assembly for airtight connection Hereinafter, a method for manufacturing an airtight connection assembly according to a second embodiment of the present invention (hereinafter, may be referred to as a "second method") will be described with reference to the drawings.

[0102] The second method is a method of assembling the second assembly from the second unit instead of the first unit. That is, the airtight connection assembly manufactured by the second method further includes a joining portion including a joining member that joins at least one connector and the first sealing member to fix the positional relationship between the connector and the first sealing member. Therefore, the second method further includes the following step F in addition to the configuration of the first method.

[0103] Step F: joining at least one connector and the first sealing member with a joining member to fix the positional relationship between the connector and the first sealing member.

[0104] The elements constituting the second assembly have already been described in the description of the second assembly, and therefore the description here will be omitted. FIG. 9 is a flowchart showing an example of the flow of each step included in the second method. In the second method illustrated in FIG. 9, each step is executed in the order of S10, S20, S25, S30, S40, and S50. That is, in the second method illustrated in FIG. 9, the above-mentioned steps are executed in the order of "step A → step B → step F → step C → step D → step E". However, the execution order of the above steps A to E and F included in the second method does not necessarily have to be as described above, and the execution order of each step can be appropriately changed depending on, for example, the configuration of the airtight container to which the second assembly is applied and the second assembly, and the surrounding environment of the airtight container.

[0105] <effect> As described above, the second unit is an airtight connection unit that further includes a coupling part including a coupling member that is a member capable of coupling at least one of the connectors and the first sealing member to fix the positional relationship between the connector and the first sealing member, in addition to the configuration of the first unit described above. Therefore, according to the second unit, the positional relationship between the connector and the first sealing member can be fixed by coupling at least one of the connectors included in the connection part to the first sealing member with the coupling member. As a result, even if the connector and / or the conductive member can move flexibly, problems such as a decrease in efficiency of the work of fixing the first sealing member in the process of assembling the second assembly and / or damage to the conductive member can be reduced. Naturally, the same effect is also achieved in the process of assembling the second assembly in the manufacturing process of the second container and the second vaporizer.

[0106] In addition, in the second method, the following steps can be individually performed: connecting the conductive member and the connector (step A), inserting the conductive member into the second hole of the first sealing member (step B), joining the connector and the first sealing member with a joining member (step F), filling a sealant between the inner circumferential surface of the second hole and the conductive member (step C), inserting the conductive member into the first hole of the airtight container (step D), and closing the first hole by fixing the first sealing member to a predetermined position of the partition wall of the airtight container (step E). Therefore, according to the second method, the second assembly can be easily manufactured by a simple and flexible process, which maintains the airtightness of the airtight container with a simple configuration, enables transmission and reception of electric signals between the inside and outside of the airtight container, and can achieve the above-mentioned effects.

[0107] Third Embodiment <composition> (1) Airtight connection unit Hereinafter, an airtight connection unit according to a third embodiment of the present invention (hereinafter, may be referred to as a "third unit") will be described with reference to the drawings.

[0108] In an airtight connection assembly constituted by the airtight connection unit (unit of the present invention) according to various embodiments of the present invention including the first unit and the second unit described above, the first hole, which is a through hole formed in the partition wall of the airtight container, is covered with the first sealing member to close the first hole and achieve airtightness. However, depending on the application of the airtight container to which the airtight connection assembly is attached, it may be difficult to achieve sufficient airtightness with the above-mentioned configuration. Specific examples of such cases include a case where the partition wall and / or the first sealing member of the airtight container do not have sufficient flatness, or a case where the partition wall and / or the first sealing member of the airtight container are deformed due to a stress acting in association with the fixing of the first sealing member to the partition wall of the airtight container, etc.

[0109] Therefore, the third unit is an airtight connection unit further including a second sealing member in addition to the components included in the first or second unit described above. The second sealing member is a member that can surround the first hole and be interposed between the partition wall of the airtight container and the first sealing member when the airtight connection assembly formed by the third unit is attached to the airtight container (hereinafter, sometimes referred to as "state A").

[0110] The second sealing member enhances the airtightness of the airtight container by reducing the leakage of gas through the first hole, which is a through hole formed in the partition of the airtight container, and through the gap between the partition of the airtight container and the first sealing member in the above-mentioned state A. Therefore, as described above, the second sealing member needs to surround the first hole in the state A and be interposed between the partition of the airtight container and the first sealing member.

[0111] As long as the above requirements are satisfied, the specific configuration of the second sealing member is not particularly limited, but typically, a sealing member well known in the art, such as an O-ring, a packing, a gasket, etc., can be used as the second sealing member. Alternatively, a material similar to the above-mentioned sealing material may be disposed so as to surround the first hole in state A and to be interposed between the partition wall of the airtight container and the first sealing member.

[0112] Furthermore, a structure such as a groove or a step may be provided in the portion of the first sealing member and / or the partition of the airtight container facing the second sealing member in state A to facilitate positioning of the second sealing member in the process of assembling the airtight connection assembly from the third unit and to reduce deviation of the second sealing member from its predetermined position.

[0113] Furthermore, as described above, when the first sealing member is fixed to the partition of the airtight container by a fastening member such as a bolt or screw inserted into a through hole formed in the partition of the airtight container and / or the first sealing member, there is a risk that the airtightness of the airtight container will be reduced due to gas leakage, for example, between the fastening member and the through hole.

[0114] In the above case, the second sealing member may be configured to surround not only the first hole formed in the partition wall of the airtight container in state A but also the through hole through which the fastening member is inserted. This reduces the leakage of gas through a gap between the through hole formed in the partition wall of the airtight container for inserting the fastening member and the fastening member, and reduces the deterioration of the airtightness of the airtight container. Alternatively, the second sealing member may be configured to surround only the first hole formed in the partition wall of the airtight container in state A but not the through hole through which the fastening member is inserted. This reduces the leakage of gas through a gap between the through hole formed in the first sealing member for inserting the fastening member and the fastening member, and reduces the deterioration of the airtightness of the airtight container. In addition to the above, a member such as a packing or a gasket may be interposed between the partition wall of the airtight container and the fastening member to reduce the deterioration of the airtightness of the airtight container.

[0115] Fig. 10 is a schematic cross-sectional view showing an example of the configuration of the third unit. The third unit 103 illustrated in Fig. 10 further includes a second sealing member 112 (a portion shaded diagonally downward to the right) that surrounds the first hole 311 formed in the partition wall 310 of the airtight container 300 in the above-mentioned state A and is disposed so as to be interposed between the partition wall 310 of the airtight container 300 and the first sealing member 111. Except for this point, the third unit 103 has the same configuration as the first unit 101 illustrated in Fig. 1. The second sealing member 112 included in the third unit 103 illustrated in Fig. 10 is an O-ring.

[0116] (2) Airtight connection assembly Hereinafter, an airtight connection assembly according to a third embodiment of the present invention (hereinafter, may be referred to as a "third assembly") will be described with reference to the drawings.

[0117] The third assembly includes the above-mentioned third unit as an airtight connection unit in addition to the components included in the first assembly or the second assembly. Furthermore, in the third assembly, a second sealing member is disposed so as to surround the first hole and to be interposed between the partition wall of the airtight container and the first sealing member in the above-mentioned state A. The specific configuration and arrangement of the second sealing member have already been described in the description of the above-mentioned third unit, and therefore will not be described here.

[0118] Fig. 11 is a schematic cross-sectional view showing an example of the configuration of the third assembly. In the third assembly 203 shown in Fig. 11, the second sealing member 112 is disposed so as to surround the first hole 311 formed in the partition wall 310 of the airtight container 300 in state A and to be interposed between the partition wall 310 of the airtight container 300 and the first sealing member 111 (part shaded diagonally downward to the right). Except for this point, the third assembly 203 has the same configuration as the second assembly 202 shown in Fig. 7. The second sealing member 112 included in the third assembly 203 shown in Fig. 11 is an O-ring.

[0119] (3) Airtight container Hereinafter, an airtight container according to a third embodiment of the present invention (hereinafter, may be referred to as a "third container") will be described with reference to the drawings.

[0120] The third container includes the above-mentioned third assembly as an airtight connection assembly in addition to the components of the first container or the second container, and the second sealing member is disposed so as to surround the first hole and be interposed between the partition wall of the third container and the first sealing member. The specific configuration and arrangement of the second sealing member have already been described in the description of the third assembly, and therefore will not be described here.

[0121] Fig. 12 is a schematic cross-sectional view showing an example of the configuration of the third container. In the third container 303 shown in Fig. 12, the second sealing member 112 is disposed so as to surround the first hole 311 formed in the partition wall 310 of the third container 303 in state A and to be interposed between the partition wall 310 of the third container 303 and the first sealing member 111 (part shaded diagonally downward to the right). Except for this point, the third container 303 has the same configuration as the second container 302 shown in Fig. 8. The second sealing member 112 provided in the third assembly 203 constituting the third container 303 shown in Fig. 12 is an O-ring.

[0122] (4) Carburetor Hereinafter, a vaporizer according to a third embodiment of the present invention (hereinafter, may be referred to as a "third vaporizer") will be described.

[0123] The third vaporizer is a vaporizer that includes the above-mentioned third container as an airtight container in addition to the components of the first or second vaporizer. The details of the third container have already been described in the above description of the third container, so the description and reference to the drawings will be omitted here.

[0124] (5) Method for manufacturing an assembly for airtight connection Hereinafter, a method for manufacturing an airtight connection assembly according to a third embodiment of the present invention (hereinafter, may be referred to as a "third method") will be described with reference to the drawings.

[0125] The third method is a method for assembling the third assembly from the third unit. That is, the airtight connection assembly manufactured by the third method further includes a second sealing member that is a member that surrounds the first hole, which is a through hole formed in the partition wall of the airtight container, and can be interposed between the partition wall and the first sealing member. Therefore, the third method further includes the following steps G and H in addition to the configuration of the first or second method.

[0126] Step G: Inserting the conductive member into the second sealing member. Step H: disposing a second sealing member so as to surround the first hole formed in the partition wall of the airtight container and to be interposed between the partition wall and the first sealing member.

[0127] The elements constituting the third assembly have already been described in the description of the third assembly, and therefore the description here will be omitted. FIG. 13 is a flowchart showing an example of the flow of each step included in the third method. In the third method illustrated in FIG. 13, each step is executed in the order of S10, S20, S25, S30, S35, S40, S45, and S50. That is, in the third method illustrated in FIG. 13, the above-mentioned steps are executed in the order of "step A → step B → step F → step C → step G → step D → step H → step E". However, the execution order of the above steps A to E and steps F to H included in the third method does not necessarily have to be as described above, and the execution order of each step can be appropriately changed depending on, for example, the configuration of the airtight container to which the third assembly is applied and the third assembly, and the surrounding environment of the airtight container.

[0128] <effect> As described above, the third unit is an airtight connection unit that further includes the second sealing member that is a member that surrounds the first hole and can be interposed between the partition wall of the airtight container and the first sealing member when the airtight connection assembly formed by the third unit is attached to the airtight container (state A) in addition to the configuration of the first unit or the second unit. Therefore, according to the third unit, even when the partition wall and / or the first sealing member of the airtight container do not have sufficient flatness as described above, or when the partition wall and / or the first sealing member of the airtight container are deformed due to stress acting with the fixing of the first sealing member to the partition wall of the airtight container, the airtightness required for the use of the third container that is an airtight container including the third assembly that is an airtight connection assembly formed by the third unit and / or the third vaporizer that is a vaporizer including the third container can be sufficiently achieved.

[0129] In addition, in the third method, the following steps can be individually performed: connecting the conductive member and the connector (step A), inserting the conductive member into the second hole of the first sealing member (step B), joining the connector and the first sealing member with a joining member (step F), filling a sealant between the inner circumferential surface of the second hole and the conductive member (step C), inserting the conductive member into the second sealing member (step G), inserting the conductive member into the first hole of the airtight container (step D), disposing the second sealing member at a predetermined position between the partition wall of the airtight container and the first sealing member (step H), and closing the first hole by fixing the first sealing member to a predetermined position of the partition wall of the airtight container (step E). Therefore, according to the third method, it is possible to easily manufacture the third assembly, which is simple and has a high degree of freedom, and which is capable of transmitting and receiving electrical signals between the inside and outside of the airtight container while maintaining the airtightness of the airtight container with a simple configuration and achieving the above-mentioned effects. EXAMPLES

[0130] Hereinafter, an airtight connection assembly according to an embodiment of the present invention (hereinafter, may be referred to as an "embodiment assembly") will be described in more detail with reference to the drawings.

[0131] <composition> FIG. 14 is a schematic exploded perspective view showing an example of the configuration of the embodiment assembly, and FIG. 15 is a schematic exploded perspective view of the embodiment assembly 204 shown in FIG. 14 turned upside down. The embodiment assembly 204 shown in FIG. 14 and FIG. 15 has a similar configuration to the third assembly 203 shown in FIG. 11, except that the number of second holes 111a formed in the first sealing member 111 for inserting the conductive member is four, and the connection part 120 does not include the internal connector 122. In addition, in order to facilitate understanding of the configuration of the embodiment assembly, a part of the partition wall 310 of the airtight container 300 is also depicted, as in FIG. 2, FIG. 7, and FIG. 11. In addition, the sealant to be filled in the second holes 111a formed in the first sealing member 111 and the conductive member to be inserted into the second holes 111a are omitted in both FIG. 14 and FIG. 15.

[0132] 14 and 15, the embodiment assembly 204 is an assembly for airtight connection including a conductive member (not shown), a sealing portion 110, and a connection portion 120. The conductive member is a member that constitutes a passage for a signal or a fluid. The sealing portion 110 includes a first sealing member 111 that is an aluminum plate-like member having a shape capable of covering a first hole 311 that is a through hole formed in a partition wall 310 of the airtight container 300, and a sealing material (not shown).

[0133] 16 is a schematic exploded perspective view showing the positional relationship between the recess formed on the surface of the first sealing member 111 of the embodiment assembly 204 shown in FIGS. 14 and 15 facing the airtight container 300 and the second sealing member 112. As shown in FIGS. 14 to 16, a circular recess corresponding to the shape of the O-ring as the second sealing member 112 is formed on the surface of the first sealing member 111 of the embodiment assembly 204 facing the airtight container 300. This makes it easy to align the O-ring when assembling the embodiment assembly 204 to the airtight container 300, and prevents the O-ring from being displaced. If there is a risk that the airtightness of the airtight container 300 will be reduced due to a gap between the illustrated bolt that fixes the first sealing member 111 to the airtight container 300 and the through-hole formed in the partition wall 310 of the airtight container 300 to insert the bolt, it is preferable to seal the gap by known means such as a packing and a gasket.

[0134] As described above, the connection part 120 of the embodiment assembly 204 does not include an internal connector as the connector described above, but includes only the external connector 121. The external connector 121 is a connector for electrically connecting the conductive member of the embodiment assembly 204 to a conductive member of another device or equipment at the end of the conductive member on the outside side of the airtight container 300. In addition, the first sealing member 111 is formed with the second holes 111a, which are four through holes formed to communicate with the first holes 311 of the airtight container 300 in a state (state A) in which the embodiment assembly 204 is attached to the airtight container 300. The conductive members are inserted into these second holes 111a one by one, and a sealant (not shown) is filled between the conductive members and the inner peripheral surface of the second holes 111a. This makes it possible to maintain the airtightness of the airtight container 300 while enabling electrical signals and the like to be transmitted between the inside and outside of the airtight container 300 by the conductive member extending from the inside to the outside of the airtight container 300.

[0135] In the embodiment assembly 204, the sealing part 110 further includes a second sealing member 112 which is a member that surrounds the first hole 311 formed in the partition wall 310 of the airtight container 300 in the above-mentioned state A and is disposed between the partition wall 310 of the airtight container 300 and the first sealing member 111. In addition, the embodiment assembly 204 further includes a coupling part 130 including a coupling member 131 which is a member configured to couple the external connector 121 and the first sealing member 111 to fix the positional relationship between the external connector 121 and the first sealing member 111.

[0136] The coupling member 131 included in the coupling section 130 of the embodiment assembly 204 is composed of a connector holding member, which is a plate-shaped member for holding the external connector 121, and a connector support member, which is a pair of plate-shaped members for fixing both ends of the holding member to the first sealing member 111, and these members are integrally formed. The external connector 121 is fixed and held by the connector holding member in a state in which the connection terminal is inserted into a through hole formed in the plate-shaped connector holding member. That is, the external connector 121 illustrated in Figs. 14 to 16 is a so-called "receptacle", and for example, a commercially available general-purpose receptacle can be used as the external connector 121. It is sufficient for a general-purpose receptacle to have the functions of insulating and connecting terminals, and it is not necessary for it to have a sealing function to achieve airtightness, so the range of connector selection is wider than that of a conventional hermetic connector. In addition, a general-purpose receptacle can generally be obtained at a low price.

[0137] Next, an example of a procedure for assembling the embodiment assembly 204 having the above-mentioned configuration will be described below with reference to Fig. 17. Fig. 17 is a schematic exploded perspective view showing a state in which the conductive member 210 connected to the external connector 121 included in the embodiment assembly 204 shown in Figs. 14 to 16 is inserted into the first hole 311 formed in the partition wall 310 of the airtight container 300 and the second hole 111a formed in the first sealing member 111. Note that in Fig. 17 and the following description, only two conductive members 210 are mentioned for the purpose of making Fig. 17 easy to see and explaining the assembly procedure of the embodiment assembly 204 in an easy-to-understand manner. However, it goes without saying that one conductive member 210 can be inserted into each of all the second holes 111a formed in the first sealing member 111 and sealing can be performed by filling a sealant between the inner circumferential surface of each second hole 111a and the conductive member 210. Alternatively, if any of the second holes 111a formed in the first sealing member 111 remain without the conductive member 210 being inserted therethrough, the airtightness of the airtight container 300 can be achieved by filling and sealing the second holes 111a with a sealant.

[0138] First, as shown in Fig. 17, the conductive members 210 are connected to predetermined terminals of the external connector 121 (step A), the conductive members 210 are inserted into through holes formed in the joining member 131, and the external connector 121 is fixed to the joining member 131 by a fastening member. Next, each of the conductive members 210 is inserted into each of the two second holes 111a formed in the first sealing member 111 (step B). Then, the first sealing member 111 is fixed to a predetermined position on the opposite side of the joining member 131 from the external connector 121 (step F). Next, a room temperature curing silicone sealant (not shown) is filled between the inner circumferential surface of each second hole 111a and the conductive member 210 and cured (step C).

[0139] The conductive member 210 protruding from the second hole 111a of the first sealing member 111 of the assembly consisting of the external connector 121, the conductive member 210, the coupling member 131, the first sealing member 111, and the sealing material assembled in this way is inserted into an O-ring as the second sealing member 112 and a first hole 311 formed in the partition wall 310 of the airtight container 300 (steps G and D). Then, in a state where the O-ring is partially fitted into a recess formed on the surface of the first sealing member 111 facing the airtight container 300 and aligned (step H), the first sealing member 111 is fixed at a predetermined position of the partition wall 310 of the airtight container 300 by a fastening member, and the first hole 311 is blocked by the first sealing member 111 (step E). That is, the embodiment assembly 204 can be manufactured by a procedure similar to the manufacturing method (third method) of the airtight connection assembly according to the third embodiment of the present invention described above.

[0140] The end of the conductive member 210 opposite to the external connector 121 is connected to a device or equipment (not shown) such as a sensor disposed inside the airtight container 300. The connection may be via the internal connector 122 as in the first assembly 201 to the third assembly 203 illustrated in Fig. 2, Fig. 7, and Fig. 11. Alternatively, the connection may be a direct connection between the conductive member 210 and a terminal of the device or equipment as in the first assembly 201 to the third assembly 203 illustrated in Fig. 3, Fig. 8, and Fig. 12.

[0141] <effect> 14 to 17 is attached to the airtight container 300. A plug 450 is connected to the external connector 121 of the embodiment assembly 204 illustrated in Fig. 18, and a cable 460 is connected to the plug 450. This enables transmission of electric signals between, for example, a device or equipment such as a sensor (not shown) disposed inside the airtight container 300 and a control device (not shown) disposed outside the airtight container 300.

[0142] 14 to 18 and the above description, in the embodiment assembly 204, the sealing portion 110 and the connection portion 120 can be formed from readily available general-purpose components such as a commercially available metal plate and connector. As a result, according to the embodiment assembly 204, it is possible to maintain the airtightness of the airtight container 300 with a simple configuration and transmit and receive electrical signals between the inside and outside of the airtight container 300.

[0143] In the embodiment assembly 204, the sealing part 110 further includes a second sealing member 112 which is a member that surrounds the first hole 311 in the above-mentioned state A and is disposed between the partition wall 310 and the first sealing member 111 of the airtight container 300. Therefore, even when the partition wall 310 and / or the first sealing member 111 of the airtight container 300 do not have sufficient flatness as described above, or when the partition wall 310 and / or the first sealing member 111 of the airtight container 300 are deformed due to a stress acting in association with the fixing of the first sealing member 111 to the partition wall 310 of the airtight container 300, sufficient airtightness can be achieved in the application of the airtight container 300 to which the embodiment assembly 204 is attached.

[0144] Furthermore, in the embodiment assembly 204, the external connector 121 and the first sealing member 111 are connected by a connecting member 131, and the positional relationship between the external connector 121 and the first sealing member 111 is fixed. Therefore, for example, even in a case where it is difficult to fix the embodiment assembly 204 to the airtight container 300 if the external connector 121 and / or the conductive member 210 are allowed to move flexibly, or even in a case where the conductive member 210 is damaged due to bending or deformation during assembly into the airtight container 300, problems such as a decrease in work efficiency and damage to the conductive member 210 can be reduced.

[0145] The effects achieved by the embodiment assembly 204 as described above are similarly achieved in an airtight container to which the embodiment assembly 204 is attached and in a vaporizer or the like that includes the airtight container.

[0146] For the purpose of explaining the present invention, several embodiments and examples having specific configurations have been described above, sometimes with reference to the attached drawings. However, the scope of the present invention should not be construed as being limited to these exemplary embodiments and examples, and it goes without saying that appropriate modifications can be made within the scope of the claims and the matters described in the specification. [Explanation of symbols]

[0147] 101 Unit 1 102 Unit 2 103 Unit 3 110 Sealing part 111 First sealing member 111a 2nd hole 112 Second sealing member 113 Encapsulating materials 120 Connection 121 (external) connector 122 (internal) connector 130 Joint 131 Connecting members 131a Connector holding member 131b Connector support member 201 1st Assembly 202 2nd Assembly 203 3rd Assembly 204 Example Assembly 210 Conductive materials 300 Airtight Container 301 1st container 302 Second container 303 Third container 310 Bulkhead 311 Hole 1 401 First Carburetor 410 Tank 420 Sensors 421, 422 signal lines 430 Outlet pipe 440 Introductory tube 450 Plug 460 Cable 510 Flow Control Device 520 flowmeter 530 Chamber

Claims

1. An airtight connection unit that enables transmission and reception of a signal or a fluid between an inside and an outside of an airtight container via one or more conductive members that are inserted into a first hole penetrating a partition wall of the airtight container, a sealing portion including a first sealing member which is a general-purpose member having a flat plate shape larger than the first hole and capable of covering the first hole; a connection portion including a general-purpose connector that can be connected to either one or both ends of the conductive member and is a member separate from the conductive member; Equipped with a second hole is formed penetrating the first sealing member so that the conductive member inserted into the first hole can be further inserted individually; the number, size, and shape of the second holes are designed according to the number, thickness, and shape of the conductive members to be inserted into the second holes; the sealing portion further includes a sealant that is filled between the conductive member and an inner circumferential surface of the second hole to maintain airtightness; the insertion position of the conductive member in the second hole is not restricted by any member other than the sealing material; Unit for airtight connection.

2. 2. The airtight connection unit according to claim 1, a coupling portion including a coupling member that is a member capable of coupling at least one of the connectors and the first sealing member to fix a positional relationship between the connector and the first sealing member; Further comprising: Unit for airtight connection.

3. The airtight connection unit according to claim 1 or 2, a second sealing member that surrounds the first hole and is capable of being interposed between the partition wall and the first sealing member; Unit for airtight connection.

4. An assembly for hermetic connection comprising the hermetic connection unit according to any one of claims 1 to 3 and the conductive member, The conductive members are individually inserted into the second holes, The sealant is filled between the conductive member and an inner circumferential surface of the second hole, The connector is connected to one or both ends of the conductive member. Assembly for airtight connection.

5. An airtight container comprising the airtight connection assembly according to claim 4, the first sealing member covers the first hole to close the first hole, the conductive member is inserted into the first hole via the second hole and extends from the inside to the outside of the airtight container; Airtight container.

6. The airtight container according to claim 5 , A tank accommodated inside the airtight container; and a sensor configured to output a detection signal corresponding to the amount and / or state of the gas and / or the gas source material, which is a substance that generates the gas, contained inside the tank, and / or a heater configured to receive power to heat the gas source; A vaporizer comprising: The gas and / or the detection signal and / or the power are transmitted between the inside and the outside of the airtight container via the conductive member of the airtight connection assembly. Carburetor.

7. A method for manufacturing an airtight connection assembly that enables transmission of a signal or a fluid between the inside and the outside of an airtight container via one or more conductive members that are inserted into a first hole penetrating a partition wall of the airtight container, comprising: The airtight connection assembly includes: a sealing portion including a first sealing member which is a general-purpose member having a flat plate shape larger than the first hole and capable of covering the first hole; a connection portion including a general-purpose connector that can be connected to either one or both ends of the conductive member and is a member separate from the conductive member; Equipped with a second hole is formed penetrating the first sealing member so that the conductive member inserted into the first hole can be further inserted individually; the number, size, and shape of the second holes are designed according to the number, thickness, and shape of the conductive members to be inserted into the second holes; the sealing portion further includes a sealant that is filled between the conductive member and an inner circumferential surface of the second hole to maintain airtightness; the insertion position of the conductive member in the second hole is not restricted by any member other than the sealing material, The method for manufacturing the airtight connection assembly includes the steps of: connecting the connector to at least one end of the conductive member; Inserting the conductive members individually into the second holes; filling the sealant between the inner circumferential surface of the second hole and the conductive member; Inserting the conductive member into the first hole; and fixing the first sealing member at a predetermined position of the partition wall to close the first hole with the first sealing member; Including, A method for manufacturing an assembly for a gas-tight connection.

8. A method for manufacturing an assembly for hermetic connection according to claim 7, comprising the steps of: The airtight connection assembly further includes a coupling portion including a coupling member that couples at least one of the connectors and the first sealing member to fix a positional relationship between the connector and the first sealing member, The method for manufacturing the airtight connection assembly includes the steps of: connecting at least one of the connectors and the first sealing member with the connecting member to fix a positional relationship between the connector and the first sealing member; Further comprising: A method for manufacturing an assembly for a gas-tight connection.

9. A method for manufacturing the airtight connection assembly according to claim 7 or 8, comprising the steps of: The airtight connection assembly further includes a second sealing member that surrounds the first hole and is capable of being interposed between the partition wall and the first sealing member, The method for manufacturing the airtight connection assembly includes the steps of: Inserting the conductive member into the second sealing member; and disposing the second sealing member so as to surround the first hole and be interposed between the partition wall and the first sealing member; Further comprising: A method for manufacturing an assembly for a gas-tight connection.

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