Processing liquid supply device

Abstract

To notify a worker of the suitability of a replaced storage container so as to allow the worker in the replacement work to immediately perform visual recognition at the time of replacement of a storage container for processing liquid in a processing liquid supply device.SOLUTION: A storage device 201 includes: a shelf 210 which has a plurality of compartments K where storage containers storing processing liquid are installed from one side surface side; RFID readers 230, 231 which are respectively provided in the compartments and acquire identification information on the storage containers from RFID tags attached to the side surfaces of the storage containers installed in the corresponding compartments; and notification units 240, 241 which are respectively provided in the compartments and notify of the installation states of the storage containers in the compartments using the light emission states of light-emitting elements 250, 251 on the basis of the acquisition results from the RFID readers in the corresponding compartments. The light-emitting elements emit light toward one side surface side. The shelf includes first and second installation platforms 220, 221 each having the compartments. The second installation platform is positioned lower than the first installation platform, and the height position of notification unit 241 is lower than the height position of the notification unit 240.SELECTED DRAWING: Figure 8

Description

[Technical field]

[0001] The present disclosure relates to a treatment liquid supplying apparatus. [Background technology]

[0002] Patent Document 1 discloses a method for replacing a liquid medicine storage container. In this method, an LED display unit is used in which the LEDs are arranged in a manner substantially identical to the arrangement of the containers, and when the liquid medicine in a container is emptied, the LED in the LED display unit lights up. Prior to replacing the container 71, an operator reads the barcode of an unused container with a barcode reader. A barcode reader collator collates the barcode data of the unused container with the barcode data of the container that is registered in a database and corresponds to the lit LED. Then, when the barcode reader collator determines that the liquid medicine types in both containers are the same, the LED display is changed from a lit display to a flashing display. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2006-218391 A Summary of the Invention [Problem to be solved by the invention]

[0004] The technique according to the present disclosure notifies an operator performing replacement of a treatment liquid storage container in a treatment liquid supplying apparatus so that the operator can immediately visually confirm whether the replaced storage container is suitable or not. [Means for solving the problem]

[0005] According to one aspect of the present disclosure, there is provided a processing liquid supplying device for supplying a processing liquid to a substrate processing apparatus for processing a substrate using the processing liquid, the processing liquid supplying device including: a storage unit having a plurality of compartments in which a storage container storing the processing liquid is installed from one side; an acquisition unit provided for each of the compartments and acquiring identification information of the storage container from an identification information holder attached to a side of the storage container installed in the corresponding compartment; and a notification unit provided for each of the compartments and notifying an installation state of the storage container in the corresponding compartment based on an acquisition result by the acquisition unit of the corresponding compartment by an emission state of a light-emitting element, The element emits light toward the one side, the storage section has a first mounting stand and a second mounting stand each having the compartment, the acquisition section has a first acquisition section provided for the first mounting stand and a second acquisition section provided for the second mounting stand, the notification section has a first notification section provided for the first mounting stand and a second notification section provided for the second mounting stand, the second mounting stand is located at a lower position than the first mounting stand, and the height position of the first notification section based on the height position of the first mounting stand is lower than the height position of the second notification section based on the height position of the second mounting stand. Effect of the Invention

[0006] According to the present disclosure, when replacing a storage container for a processing liquid in a processing liquid supplying apparatus, the suitability of the replaced storage container can be notified so that a worker performing the replacement can immediately and visually confirm the suitability of the replaced storage container. [Brief description of the drawings]

[0007] [Figure 1] 1 is an explanatory diagram showing an outline of an internal configuration of a wafer processing system including a processing liquid supply device according to an embodiment of the present invention; [Diagram 2] 1 is a diagram showing a schematic outline of the internal configuration of a front side of a wafer processing system. [Diagram 3] 2 is a diagram showing a schematic outline of the internal configuration of the rear side of the wafer processing system. FIG. [Figure 4] 1 is a front view showing a schematic external appearance of a wafer processing system; [Diagram 5]FIG. 4 is a diagram illustrating an example of a display screen displayed by a touch panel. [Figure 6] FIG. 2 is a perspective view showing an outline of a configuration of a storage container for a treatment liquid. [Figure 7] FIG. 2 is a side view showing the outline of the configuration of the storage device, showing the state in which the storage container is installed. [Figure 8] FIG. 2 is a side view showing the outline of the configuration of the storage device, in a state where a storage container is not installed. [Figure 9] 11 is a perspective view showing the outline of the configuration of a holder provided on a second installation table. FIG. [Figure 10] 4 is a perspective view showing the outline of the configuration of a holder provided on the first installation table. FIG. [Figure 11] 1 is an explanatory diagram showing an outline of a configuration of a mechanism for supplying a treatment liquid from a storage container installed in a storage device; [Figure 12] 10 is a flowchart showing the flow of a method for replacing a storage container. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] In the manufacturing process of semiconductor devices, etc., various liquid processes are performed to form a resist pattern on a semiconductor wafer (hereinafter referred to as "wafer"), such as a process of applying a resist liquid onto the wafer to form a resist film, a process of supplying a developer onto the wafer to develop the resist film, etc. These liquid processes are performed by a substrate processing system equipped with various liquid processing equipment and a transport mechanism for transporting the wafer between the equipment.

[0009] In such a substrate processing system, various processing liquids are supplied to various liquid processing devices from storage containers that store the processing liquids. In addition, multiple types of processing liquids, such as resist liquid and developing liquid, are used, and multiple types of resist liquids are also used. Therefore, multiple storage containers for processing liquids are arranged in the substrate processing system.

[0010] One method for replacing storage containers for processing liquid when multiple storage containers are arranged in this manner is the method disclosed in the above-mentioned Patent Document 1. However, with the method disclosed in Patent Document 1, if an operator places an unused storage container, the barcode of which has been read by a barcode reader, in the wrong place, the operator cannot know this, and the wrong processing liquid may be supplied. As described above, it is preferable that the worker immediately (i.e., on the spot) recognizes that the unused storage container has been placed in the wrong place, in order to minimize the time required for replacement work.

[0011] Therefore, the technology disclosed herein notifies, when replacing a storage container for a processing liquid, a worker performing the replacement operation as to whether the replaced storage container is suitable or not, so that the worker can immediately visually confirm the suitability of the storage container.

[0012] Hereinafter, a processing liquid supplying apparatus and a reporting method according to the present embodiment will be described with reference to the drawings. In this specification, elements having substantially the same functional configurations are denoted by the same reference numerals and redundant description will be omitted.

[0013] <Wafer processing system> FIG. 1 is an explanatory diagram showing an outline of the internal configuration of a wafer processing system 1 including a processing liquid supply device according to this embodiment. FIGS. 2 and 3 are diagrams each showing a schematic outline of the internal configuration of the front side and rear side of the wafer processing system 1. FIG. 4 is a front view showing an outline of the exterior of the wafer processing system 1. FIG. 5 is a diagram showing an example of a display screen displayed by a touch panel described later. FIG. 6 is a perspective view showing an outline of the configuration of a storage container for a processing liquid. In the following example, the wafer processing system 1 is a coating and developing processing system that performs a coating and developing process on a wafer W.

[0014] 1, the wafer processing system 1 has a cassette station 10 where a cassette C containing a plurality of wafers W is loaded and unloaded, and a processing station 11 equipped with a plurality of various processing devices that perform predetermined processing on the wafers W. The wafer processing system 1 has a configuration in which the cassette station 10, the processing station 11, and an interface station 13 that transfers the wafer W between the processing station 11 and an exposure device 12 adjacent to the processing station 11 are integrally connected.

[0015] The cassette station 10 is provided with a cassette mounting table 20. The cassette mounting table 20 is provided with a plurality of cassette mounting plates 21 on which the cassettes C are placed when the cassettes C are carried in and out of the wafer processing system 1.

[0016] The cassette station 10 is provided with a wafer transfer device 23 that is movable on a transfer path 22 extending in the X direction. The wafer transfer device 23 is also movable in the up-down direction and around the vertical axis (the θ direction), and can transfer wafers W between the cassettes C on each cassette mounting plate 21 and a transfer device in the third block G3 of the processing station 11, which will be described later.

[0017] The processing station 11 is provided with a plurality of blocks, for example, four blocks G1, G2, G3, and G4, each equipped with various devices. For example, a first block G1 is provided on the front side (negative side in the X direction in FIG. 1) of the processing station 11, and a second block G2 is provided on the rear side (positive side in the X direction in FIG. 1) of the processing station 11. A third block G3 is provided on the cassette station 10 side (negative side in the Y direction in FIG. 1) of the processing station 11, and a fourth block G4 is provided on the interface station 13 side (positive side in the Y direction in FIG. 1) of the processing station 11.

[0018] 2, in the first block G1, a plurality of liquid processing devices, for example, a developing device 30, a lower anti-reflective film forming device 31, a resist coating device 32, and an upper anti-reflective film forming device 33 are arranged in this order from the bottom. The developing device 30 develops the wafer W, and the lower anti-reflective film forming device 31 forms an anti-reflective film (hereinafter referred to as "lower anti-reflective film") on the lower layer of the resist film of the wafer W. The resist coating device 32 applies a resist liquid to the wafer W to form a resist film, and the upper anti-reflective film forming device 33 forms an anti-reflective film (hereinafter referred to as "upper anti-reflective film") on the upper layer of the resist film of the wafer W.

[0019] For example, three of each of the developing treatment device 30, the lower anti-reflection film forming device 31, the resist coating device 32, and the upper anti-reflection film forming device 33 are arranged in a horizontal direction. The number and arrangement of these developing treatment device 30, the lower anti-reflection film forming device 31, the resist coating device 32, and the upper anti-reflection film forming device 33 can be selected arbitrarily.

[0020] In the developing treatment device 30, the lower anti-reflection film forming device 31, the resist coating device 32, and the upper anti-reflection film forming device 33, a predetermined treatment liquid is supplied onto the wafer W by, for example, a spin coating method. In the spin coating method, for example, a treatment liquid is discharged onto the wafer W from a discharge nozzle, and the wafer W is rotated to diffuse the treatment liquid onto the surface of the wafer W.

[0021] 3, the second block G2 is provided with a heat treatment device 40 that performs heat treatment such as heating and cooling the wafer W, an adhesion device 41 that enhances the fixation of the resist liquid to the wafer W, and an edge exposure device 42 that exposes the outer periphery of the wafer W. The heat treatment device 40, adhesion device 41, and edge exposure device 42 are arranged vertically and horizontally, and the number and arrangement thereof can be selected arbitrarily.

[0022] For example, in the third block G3, a plurality of transfer devices 50, 51, 52, 53, 54, and 55 are provided in this order from the bottom up. Also, in the fourth block G4, a plurality of transfer devices 60, 61, and 62 are provided in this order from the bottom up.

[0023] 1, a wafer transfer area D serving as a substrate transfer area is formed in an area surrounded by a first block G1 to a fourth block G4. In the wafer transfer area D, a wafer transfer device 70 serving as a substrate transfer device is disposed.

[0024] The wafer transfer device 70 has a transfer arm 70a that is movable in, for example, the Y direction, the X direction, the θ direction, and the vertical direction. The wafer transfer device 70 moves within the wafer transfer region D and can transfer the wafer W to a predetermined device within the surrounding first block G1, second block G2, third block G3, and fourth block G4. A plurality of wafer transfer devices 70 are arranged vertically as shown in, for example, FIG. 3, and can transfer the wafer W to a predetermined device at approximately the same height in each of the blocks G1 to G4.

[0025] In addition, in the wafer transfer region D, a shuttle transfer device 80 is provided which linearly transfers the wafer W between the third block G3 and the fourth block G4.

[0026] The shuttle transfer device 80 is movable linearly, for example, in the Y direction in Fig. 3. The shuttle transfer device 80 moves in the Y direction while supporting the wafer W, and can transfer the wafer W between the delivery device 52 in the third block G3 and the delivery device 62 in the fourth block G4.

[0027] 1, a wafer transfer device 90 is provided next to the third block G3 on the positive side in the X direction. The wafer transfer device 90 has a transfer arm 90a that is movable in, for example, the X direction, the θ direction, and the up and down directions. The wafer transfer device 90 moves up and down while supporting a wafer W, and can transfer the wafer W to each delivery device in the third block G3.

[0028] The interface station 13 is provided with a wafer transfer device 100 and a delivery device 101. The wafer transfer device 100 has a transfer arm 100a that is movable in, for example, the Y direction, the θ direction, and the up and down directions. The wafer transfer device 100 supports a wafer W on, for example, the transfer arm 100a, and can transfer the wafer W between each delivery device in the fourth block G4, the delivery device 101, and the exposure device 12.

[0029] The cassette station 10 described above is provided with a touch panel 110 that also functions as a display device that displays a screen showing various information, as shown in Fig. 4. The touch panel 110 has a display device configured with a liquid crystal panel, an organic EL panel, or the like. The touch panel 110 is provided on the processing station 11 side of the cassette station 10 so that the display surface faces, for example, the front side (the negative side in the X direction in Fig. 4).

[0030] The display screen displayed by the touch panel 110 is, for example, a display screen P having areas R1 and R2 indicating for each RFID reader whether an RFID tag described below has been detected by the RFID reader using a "●" and an "◯" as shown in Fig. 5. For example, a "●" indicates that the RFID tag has been detected, and an "◯" indicates that the RFID tag has not been detected. On the display screen P, area R1 located on the upper side shows information about the RFID reader located at the top among multiple RFID readers. Also, on the display screen P, area R2 located on the lower side shows information about the RFID reader located at the bottom among multiple RFID readers.

[0031] In addition to the display screen P of FIG. 5, the touch panel 110 can also display a setting screen for making settings related to the RFID tag described below, an error screen for displaying information about errors currently occurring in the wafer processing system 1, and the like.

[0032] 1 and 4, the processing station 11 is provided with a storage device 201 of the processing liquid supplying device 200. The storage device 201 stores a storage container B (see FIG. 6) for storing the processing liquid, and is provided, for example, at a lower position on the cassette station 10 side of the processing station 11, as shown in FIG.

[0033] The storage device 201 is configured to be movable along rails (not shown) extending in the front-rear direction (X direction in Figs. 1 and 4), and is thus freely movable along the front-rear direction. The storage device 201 is normally housed within the processing station 11, but when replacing the storage container B, it is pulled out from the processing station 11 to the front side, which allows an operator to remove the storage container B from the storage device 201 and install the storage container B in the storage device 201.

[0034] A storage container B accommodated in the accommodation device 201 stores, for example, a resist liquid as a processing liquid. Further, as shown in Fig. 6, an RFID tag B1 is attached to the storage container B as an identification information storage unit. Specifically, the RFID tag B1 is attached, for example, to a side surface of the storage container B. This RFID tag B1 stores identification information of the storage container B to which the RFID tag B1 is attached. The identification information of the storage container B stored in the RFID tag B1 is, for example, information on the product name of the storage container.

[0035] The wafer processing system 1 having the above-mentioned components is provided with a control device U as shown in FIG. 1. The control device U is configured by a computer having, for example, a CPU, a memory, and the like, and has a program storage unit (not shown). The program storage unit stores a program for controlling the wafer processing in the wafer processing system 1, which will be described later, and a program for notifying the suitability of the replaced storage container B, which will be described later. In addition, a PLC (Programmable Logic Controller) may perform part or all of the control performed by the control device U. The above-mentioned program may be recorded in a computer-readable storage medium H and installed in the control device U from the storage medium H. Part or all of the program may be realized by dedicated hardware (circuit board).

[0036] <Wafer processing> Next, the wafer processing performed using the wafer processing system 1 will be described.

[0037] First, a cassette C storing a plurality of wafers W is placed on a predetermined cassette mounting plate 21 of the cassette station 10. Thereafter, each wafer W in the cassette C is sequentially taken out by the wafer transfer device 23 and transferred to, for example, the delivery device 52 in the third block G3 of the processing station 11.

[0038] Next, the wafer W is transferred by the wafer transfer device 70 to, for example, the lower anti-reflection film forming device 31 in the first block G1, where a lower anti-reflection film is formed on the wafer W. Thereafter, the wafer W is transferred by the wafer transfer device 70 to the heat treatment device 40 in the second block G2, where a heat treatment is performed.

[0039] Next, the wafer W is transferred by the wafer transfer device 70 to the resist coating device 32, where a resist film is formed on the wafer W. Thereafter, the wafer W is transferred by the wafer transfer device 70 to the heat treatment device 40, where it is pre-baked. Note that the pre-baking process is similar to the heat treatment performed after the formation of the lower anti-reflection film, and similar processes are also performed in the heat treatment, PEB process, and post-baking process after the formation of the anti-reflection film, which will be described later. However, the heat treatment device 40 used for each heat treatment is different from each other.

[0040] Next, the wafer W is transferred by the wafer transfer device 70 to the top anti-reflection film forming device 33, where a top anti-reflection film is formed on the wafer W. The wafer W is then transferred to the heat treatment device 40, where a heat treatment is performed. The wafer W is then transferred by the wafer transfer device 70 to the edge exposure device 42, where an edge exposure process is performed.

[0041] Next, the wafer W is transferred to the transfer device 52 by the wafer transfer device 70, and then transferred to the transfer device 62 in the fourth block G4 by the shuttle transfer device 80. The wafer W is then transferred to the exposure device 12 by the wafer transfer device 100 in the interface station 13, where it is exposed to a predetermined pattern. The wafer W is then transferred to the transfer device 60 in the fourth block G4 by the wafer transfer device 100. The wafer W is then transferred to the heat treatment device 40 by the wafer transfer device 70, where it is subjected to PEB treatment.

[0042] Next, the wafer W is transferred by the wafer transfer device 70 to the developing treatment device 30, where the developing treatment is performed. After the developing treatment, the wafer W is transferred by the wafer transfer device 70 to the heat treatment device 40, where the wafer W is subjected to a post-bake treatment.

[0043] Next, the wafer W is transferred to the delivery device 50 in the third block G3 by the wafer transfer device 70. Thereafter, the wafer W is transferred to a cassette C on a predetermined cassette mounting plate 21 by the wafer transfer device 23 in the cassette station 10, completing a series of photolithography steps. Then, this series of photolithography steps is also performed on the subsequent wafer W in the same cassette C.

[0044] <Containment Device> Next, the configuration of the storage device 201 will be described. Figures 7 and 8 are side views showing an outline of the configuration of the storage device 201, with Figure 7 showing a state in which the storage container B is installed and Figure 8 showing a state in which the storage container B is not installed. Figures 9 and 10 are perspective views showing an outline of the configuration of a holder, which will be described later, provided in the storage device 201.

[0045] As shown in Figures 7 and 8, the storage device 201 has a shelf 210 as a storage section having a plurality of compartments (hereinafter referred to as "installation compartments") K in which the storage container B is installed from one side (the positive side in the Y direction in the figure).

[0046] The shelf 210 has a first installation stand 220 and a second installation stand 221 each having an installation section K, and the second installation stand 221 is located on the bottom side of the first installation stand 220, i.e., at a lower position than the first installation stand 220. The space inside the shelf 210 is vertically divided into three by shelf boards 211 and 212, and for example, the shelf board 211 located on the upper side constitutes the first installation stand 220, and the shelf board 212 located on the lower side constitutes the second installation stand 221. The height position of the second installation stand 221 is, for example, 80 cm to 105 cm, while the height position of the first installation stand 220 is, for example, 140 cm to 165 cm, which is relatively high.

[0047] In addition, each of the first installation stand 220 and the second installation stand 221 has a plurality of installation sections K (three in the example shown in the figure) arranged in the horizontal direction (X direction in the figure). Hereinafter, the three installation sections K of the first installation stand 220 may be referred to as installation section K11, installation section K12, and installation section K13 in order from the negative side in the X direction in the figure, and the three installation sections K of the second installation stand 221 may be referred to as installation section K21, installation section K22, and installation section K23 in order from the negative side in the X direction in the figure.

[0048] The storage device 201 also includes RFID readers 230 and 231 as acquisition units that read (i.e., acquire) the identification information of the storage container B from the RFID tag B1 attached to the side of the storage container B. The RFID readers 230 and 231 are provided for each installation section K, and specifically, the RFID reader 230 as the first acquisition unit is provided for each installation section K of the first installation stand 220, and the RFID reader 231 as the second acquisition unit is provided for each installation section K of the second installation stand 221. The acquisition results by the RFID readers 230 and 231 are output to the control device U (see FIG. 1) by at least one of wireless communication and wired communication. A part or all of the communication between the RFID readers 230 and 231 and the control device U may be performed via an IO-Link master.

[0049] The control device U judges the installation state of the storage container B in the corresponding installation section K based on the results obtained for each of the RFID readers 230 and 231. The above-mentioned judgments made by the control device U include, for example, the following. (1) Determining whether storage container B installed in corresponding installation section K should be installed in said installation section K (2) Determine whether the RFID tag of storage container B is detected.

[0050] The above determination (1) is performed, for example, based on the results obtained by the RFID readers 230 and 231, by referring to a table in advance stored in a storage unit (not shown) in which each installation section K is associated with identification information of an appropriate storage container B. The identification information of the appropriate storage container B is registered in the table, for example, in a registration mode for the identification information prepared in the wafer processing system 1. Specifically, when the operator selects the registration mode from a selection screen (not shown) displayed on a touch panel and installs an appropriate storage container B in an appropriate installation section K, the result read by the RFID reader 230 (or RFID reader 231) corresponding to the installation section K is registered in the table as the identification information of the appropriate storage container B. This registration is performed, for example, when the wafer processing system 1 is started up or when a processing recipe involving a change in the processing liquid is changed. The registration may also be performed every time the storage container B is replaced.

[0051] Furthermore, the storage device 201 is also provided with notification units 240, 241 for each installation section K. Specifically, a notification unit (hereinafter sometimes referred to as a "first notification unit") 240 is also provided for each installation section K of the first installation stand 220, and a notification unit (hereinafter sometimes referred to as a "second notification unit") 241 is also provided for each installation section K of the second installation stand 221.

[0052] Each of the notification units 240, 241 notifies the installation state of the storage container B in the corresponding installation section K based on the results obtained by the RFID readers 230, 231 of the corresponding installation section K, using the light emitting states of the two light emitting elements 250, 251. The light emitting elements 250, 251 are, for example, LEDs. The light emitting elements 250, 251 of the notification units 240, 241 are disposed so as to emit light toward the one side surface (the positive side in the Y direction in the drawing) on ​​which the worker is positioned during the replacement work of the storage container B.

[0053] The light emitting element 250 and the light emitting element 251 emit light of different colors from each other. For example, the light emitting element 250 emits green light, and the light emitting element 251 emits red light.

[0054] The light emission of the light emitting elements 250 and 251 is controlled by a control device U. In the notification units 240, 241, for example, when the storage container B installed in the corresponding installation section K is one that should be installed in the installation section K, i.e., when it is appropriate, the green light-emitting element 250 is lit, and when it is inappropriate, the red light-emitting element 251 is lit.

[0055] In addition, the notification units 240, 241 are in a state where both the green light emitting element 250 and the red light emitting element 251 flash simultaneously at short intervals from the time when the RFID tag B1 is detected by the RFID reader 230, 231 provided in the corresponding installation section K until the determination of the suitability of the storage container B installed in the corresponding installation section K is completed. In this way, the notification units 240, 241 notify that the above-mentioned determination is in progress. Furthermore, for example, when the RFID tag B1 is not detected by the RFID readers 230, 231 provided in the corresponding installation section K, that is, when the storage container B is not installed in the corresponding installation section K (or when the storage container B is installed poorly in the corresponding installation section K), the notification units 240, 241 are in a state where both of the light emitting elements 250, 251 flash simultaneously at long intervals. In this way, the notification units 240, 241 notify that the RFID tag B1 has not been detected, as described above.

[0056] The notification units 240 and 241 can also notify information other than the installation state of the storage container B installed in the corresponding installation section K using the light emitting state of the light emitting elements 250 and 251. For example, when an abnormality occurs in the RFID readers 230 and 231, the notification units 240 and 241 are in a state where both the light emitting elements 250 and 251 flash alternately at short intervals to notify the occurrence of the abnormality. For example, if an abnormality occurs in a device (e.g., an IO-Link master) that controls communication between the alarm units 240, 241 and the control device U, both of the light-emitting elements 250, 251 of the alarm units 240, 241 that use that device will flash alternately at short intervals to notify the abnormality. Furthermore, for example, when an abnormality occurs in the control section related to the processing liquid supply device 200 of the control device U, both of the light emitting elements 250, 251 of all the notification sections 240, 241 are turned off to notify the abnormality.

[0057] In this manner, the notification units 240 and 241 can notify various types of information by the light emitting states of the light emitting elements 250 and 251 that emit light in different colors.

[0058] In addition, the determination as to whether or not an abnormality has occurred in the RFID readers 230 and 231, the determination as to whether or not an abnormality has occurred in the device that controls the communication between the notification units 240 and 241 and the control device U, and the determination as to whether or not an abnormality has occurred in the control part related to the processing liquid supply device 200 of the control device U are performed by the following methods. This is carried out by the control device U.

[0059] The height positions of the first notification section 240 and the second notification section 241 are as follows. That is, the height position of the first notification unit 240 based on the height position of the first installation stand 220 is lower than the height position of the second notification unit 241 based on the height position of the second installation stand 221. Specifically, the relative height position of the first notification unit 240 provided for the installation section K based on the position of the storage container B provided for the installation section K of the first installation stand 220 is lower than the relative height position of the second notification unit 241 provided for the installation section K based on the position of the storage container B provided for the installation section K of the second installation stand 221. Therefore, when the height position of the first installation stand 220 is relatively high as described above, even a worker who is not tall (for example, a worker whose height is about average for an Asian woman) can visually recognize the light emission state of the light-emitting elements 250, 251 of the first notification unit 240 and can grasp the installation state of the storage container B in the corresponding installation section K.

[0060] In addition, the first notification units 240 are arranged together on the side of the first installation stand 220, while the second notification units 241 are provided around the corresponding installation sections K for each installation section K on the second installation stand 221. The first notification unit 240 is provided on the front side (positive side of the Y direction in FIG. 7), and the second notification unit 241 is provided on the back side (negative side of the Y direction in FIG. 7). The reasons why the first notification unit 240 and the second notification unit 241 are positioned differently in the depth direction (Y direction in the figure) include, for example, the following reasons. That is, if the second notification unit 241 provided around the corresponding installation section K for each installation section K is provided on the front side (positive side of the Y direction in the figure), there is a risk that the wiring to the notification unit 241 may interfere with the replacement work of the storage container B.

[0061] The first notification units 240 are arranged, for example, in a vertical line. The upper first notification unit 240 corresponds to the installation section K11, the central first notification unit 240 corresponds to the installation section K12, and the lower first notification unit 240 corresponds to the installation section K13.

[0062] Furthermore, the storage device 201 is provided with a holder 260 or a holder 261 for each installation section K. The holder 260 provided in the installation section K of the first installation stand 220 and the holder 261 provided in the installation section K of the second installation stand 221 have different configurations.

[0063] 9, the holder 261 has an individual storage section 300 that individually stores the storage container B, and the individual storage section 300 is fixed to the second installation stand 221 (see FIG. 7). The individual storage section 300 has a bottom plate 301 that supports the bottom surface of the storage container B, and side plates 302, 303, a front plate 304, and a back plate 305 that surround the lateral periphery of the storage container B supported by the bottom plate 301.

[0064] An RFID reader 231 is provided on the front side (positive side in the Y direction in FIG. 9) of a back plate 305 provided on the back side (negative side in the Y direction in FIG. 9). Further, a support member 310 that supports the light emitting elements 250 and 251 of the notification section 241 is connected to the rear plate 305 .

[0065] Like the holder 261, the holder 260 has an individual storage section 400 that individually stores the storage container B, as shown in Fig. 10. However, the individual storage section 400 is not fixed to the first installation stand 220 (see Fig. 7) and is freely movable between a supply position, which is a position on the first installation stand 220, and an exchange position, which is a position below the first installation stand 220 and where the storage container B is exchanged. The exchange position is specifically a position diagonally below the supply position on the near side (positive side in the Y direction in Fig. 10).

[0066] To enable the above-mentioned movement, the holder 260 has a lifting member 410. The lifting member 410 is a member that lifts and lowers the individual accommodating unit 400 between the supply position and the exchange position. This lifting member 410 is configured to be foldable, for example, with the individual accommodating unit 400 fixed to a tip end side and pivotally supported by a fixed member 420 at a base end side. When the lifting member 410 is folded, the position of the individual accommodating unit 400 becomes the supply position, and when the lifting member 410 is extended, the position of the individual accommodating unit 400 becomes the exchange position. The fixed member 420 itself is fixed to the first installation stage 220. In addition, the fixed member 420 also has an RFID reader 230 fixed thereto.

[0067] When replacing the storage container B held by the holder 260, the worker moves the individual storage part 400 from the supply position to the replacement position, and replaces the storage container B in the individual storage part 400. After the replacement, the worker returns the individual storage part 400 to the supply position.

[0068] As described above, by configuring the holder 260 for the first installation stand 220, which is located at a relatively high height, as described above, even a worker who is not tall (for example, a worker who is about the average height of an Asian woman) can easily replace the storage container B on the first installation stand 220.

[0069] A locking mechanism for maintaining the position of the individual accommodating unit 400 at the supply position or the replacement position, and an unlocking mechanism for unlocking the locking mechanism may be provided in the holder 260. A handle may be provided below the surface of the individual accommodating unit 400 on the front side (the positive side in the Y direction in FIG. 10) so that an operator can easily move the individual accommodating unit 400 between the supply position and the replacement position.

[0070] Moreover, the individual storage section 400 has a bottom plate 401 supporting the bottom surface of the storage container B, a cylindrical wall 402 surrounding the lower part of the storage container B supported by the bottom plate 401, and an upper back plate 403 facing the upper part on the rear side (negative side in the Y direction in the figure) of the storage container B. Also, notches 404, 405 are provided at the center of the upper end of the rear side (negative side in the Y direction in the figure) part of the cylindrical wall 402 and at the center of the lower end of the upper back plate 403, respectively. When the individual storage unit 400 is located at the supply position, the RFID reader 230 fixed to the fixing member 420 fits within the notches 404, 405. Therefore, the cylindrical wall 402 and the upper back plate 403 do not prevent the RFID reader 230 from reading the RFID tag B1 affixed to the storage container B stored in the individual storage unit 400 at the supply position.

[0071] <Supply mechanism from storage container B> FIG. 11 is an explanatory diagram showing an outline of the configuration of a mechanism for supplying the treatment liquid from the storage container B installed in the accommodating device 201. As shown in FIG.

[0072] After storage container B is placed in accommodating device 201 (see FIG. 7), cap B2 is attached to close the opening at the top of storage container B. Cap B2 is provided with supply pipe 501 for pressurized gas such as nitrogen gas, and supply pipe 502 for processing liquid. When pressurized gas is supplied into storage container B through supply pipe 501, the processing liquid in storage container B flows into supply pipe 502 and is pumped to buffer tank 503. The processing liquid is supplied from buffer tank 503 to each liquid processing device in wafer processing system 1.

[0073] Further, supply pipe 501 is provided with an on-off valve 510 that switches between supplying and stopping the supply of pressurized gas via supply pipe 501. On-off valve 510 is provided with a solenoid 511 for causing on-off valve 510 to open and close supply pipe 501. A control circuit 512 that controls solenoid 511 is connected to solenoid 511 via wiring 513.

[0074] In this embodiment, a relay 514 that cuts off communication between the control circuit 512 and the solenoid 511 is provided on the wiring 513. The relay 514 may be provided so as to be capable of cutting off the power supply from the control circuit 512 to the solenoid 511. By providing the relay 514 in this manner, an interlock can be performed to disable the operation of supplying pressurized gas to the storage container B, i.e., the operation of supplying the treatment liquid from the storage container B. In other words, the relay 514 is a mechanism that performs the above-mentioned interlock.

[0075] The above interlock is effective, for example, when the storage container B installed in the installation section K is not one that should be installed in the installation section K.

[0076] The control circuit 512 and the relay 514 operate under the control of the control device U.

[0077] <Exchange method> Next, an example of a method for replacing the storage container B will be described, including a method for notifying whether the storage container B is suitable when it is replaced. Fig. 12 is a flow chart showing the flow of the method for replacing the storage container B.

[0078] When the control device U determines that the storage container B has become empty, for example, a screen showing a warning that the storage container B has become empty is displayed on the touch panel 110 to prompt replacement of the storage container B (step S1). In addition to the warning, the screen also shows, for example, the position of the storage container B to be replaced in the storage device 201, information on a new storage container B to be prepared, etc. In the following, it is assumed that the storage container B in the installation section K11 has become empty. Whether or not the storage container B is empty is determined, for example, as follows: When a liquid level sensor (not shown) provided in the buffer tank 503 detects that the amount of processing liquid in the buffer tank 503 is low, pressurized gas is supplied to the corresponding storage container B via the supply pipe 501 in order to replenish the processing liquid. If there is no change in the detection result of the liquid level sensor even after a predetermined time has elapsed since the start of the supply of this pressurized gas, it is determined that the corresponding storage container B is empty.

[0079] Thereafter, when the storage container B installed in the installation section K11 is removed, the RFID tag B1 is no longer detected by the RFID reader 230 in the installation section K11. When the RFID tag B1 is no longer detected in this manner, the relay 514 operates, and the above-mentioned interlock is enabled (step S2).

[0080] In addition, when the RFID tag B1 is no longer detected by the RFID reader 230 in the installation section K11, both light-emitting elements 250, 251 of the notification section 240 in the installation section K11 are made to flash simultaneously at long intervals to notify the same (step S3).

[0081] When a new storage container B is placed in the installation section K11 by an operator, the RFID tag B1 is detected by the RFID reader 230 in the installation section K11, so following step S3, the control device U determines whether the RFID tag B1 is detected by the RFID reader 230 in the installation section K11 (step S4). This determination is repeated until the RFID tag B1 is detected. Specifically, the replaced storage container B is placed in the installation section K11, and the process is repeated until the identification information of the replaced storage container B is acquired by the RFID reader 230 provided in the installation section K11. When the readable range of the RFID reader 230 is narrow, it may be necessary to make the RFID reader 230 face the RFID tag B1 of the new storage container B when installing the new storage container B. In this case, a message prompting the user to face the RFID reader 230 and the RFID tag B1 of the new storage container B may be displayed on the display screen displayed in step S1.

[0082] When a new storage container B is installed in the installation section K11 and the RFID tag B1 is detected by the RFID reader 230 of the installation section K11 (step S4, YES), the control device U judges whether the storage container B installed in the installation section K11 is appropriate (step S5). Specifically, for example, the control device U judges whether the new storage container B is appropriate based on the identification information of the new storage container B held in the RFID tag B1 acquired by the RFID reader 230 of the installation section K11. More specifically, for example, the control device U judges whether the identification information of the new storage container B held in the RFID tag B1 acquired by the RFID reader 230 of the installation section K11 matches the identification information of the storage container B appropriate for the installation section K11 registered in the above-mentioned table. In addition, when judging whether or not they match, the above-mentioned identification information acquired by the RFID reader 230 of the installation section K11 is converted into a predetermined character code by the control device U as necessary.

[0083] The result of the determination in step S4 is notified by the notification unit 240 of the installation section K11, as described below.

[0084] If the result of the judgment in step S5 is appropriate, i.e., if the identification information matches (YES), only the green light-emitting element 250 among the light-emitting elements 250, 251 of the notification unit 240 in the installation section K11 is turned on so that the notification unit 240 in the installation section K11 notifies the user that the information is appropriate (step S6).

[0085] Moreover, relay 514 operates to release (disable) the above-mentioned interlock (step S7).

[0086] Then, the display of the screen showing a warning or the like that the storage container B in the installation section K11 is empty is cancelled (step S8). This cancellation may be performed at the following timing. That is, after the interlock is released, the supply of pressurized gas to the storage container B in the installation section K11 is resumed, an appropriate processing liquid is supplied from the storage container B, and a predetermined amount of the corresponding buffer tank 503 is replenished, and the warning screen display of step S8 may be cancelled.

[0087] In step S5, if the identification information of the storage container B installed in the installation section K11 does not match the information registered in the above-mentioned table and the storage container B is not appropriate (if NO), only the red light-emitting element 251 of the light-emitting elements 250, 251 of the alarm unit 240 is turned on so that the alarm unit 240 in the installation section K11 notifies the user of this (step S9). Thereafter, when the inappropriate storage container B installed in the installation area K11 is removed by the worker who received the above-mentioned notification, the RFID tag B1 will no longer be detected by the RFID reader 230 in the installation area K11, and the process is returned to step S3 so that this fact is notified again.

[0088] As described above, in this embodiment, the processing liquid supplying apparatus 200 includes the shelf 210 having a plurality of sections K in which the storage containers B are installed from one side. The processing liquid supplying apparatus 200 also includes RFID readers 230, 231 provided for each section K and configured to acquire identification information of the storage containers B from the RFID tags B1 of the storage containers B installed in the corresponding section K. The processing liquid supplying apparatus 200 also includes notification units 240, 241 provided for each section K and configured to notify the installation state of the storage containers B in the corresponding section K based on the acquisition results by the RFID readers 230, 231 of the corresponding section K, based on the light emission states of the light emitting elements 250, 251. Therefore, according to the processing liquid supplying apparatus 200, when replacing the storage containers B, a worker performing the replacement work can visually check whether the replaced storage container B is appropriate. In the processing liquid supplying apparatus 200, the light emitting elements 250, 251 of the notification units 240, 241 emit light toward the one side surface, i.e., toward the operator. Therefore, the following effects are obtained. As a technology different from the technology disclosed herein (alternative technology), a technology is conceivable in which the information notified by the notification unit 240 in this embodiment is notified by displaying it on the touch panel 110. In the above alternative technology, the worker needs to move to the touch panel 110 to check the notification content, whereas in this embodiment, the light-emitting elements 250, 251 emit light toward the worker as described above, so that the worker can immediately check the notification content from the light-emitting elements 250, 251 on the spot without having to move. That is, according to the processing liquid supplying apparatus 200, when replacing the storage container B, it is possible to notify the operator performing the replacement so that the operator can immediately visually confirm whether the replaced storage container B is suitable or not.

[0089] In particular, according to this embodiment, the worker can determine on the spot whether the storage container B installed in the section K is suitable, regardless of the worker's level of skill.

[0090] In addition, in this embodiment, the notification units 240 for the first installation stand 220 are arranged together on the side of the first installation stand 220. Therefore, even if the notification units 240 are provided on the front side (the positive side in the Y direction in FIG. 7, etc.), that is, on the worker side, the replacement work of the storage container B in the installation section K of the first installation stand 220 is not hindered by wiring to the notification units 240. In addition, since the notification units 240 are located on the front side, the worker can more easily visually recognize the notification by the notification units 240. In particular, if the worker is short, if the notification unit 240 for the first installation stand 220, which is high in height, is located on the back side, there is a risk that the worker will not be able to visually recognize the notification by the notification units 240, but since the notification unit 240 is located on the front side, this can be prevented.

[0091] Furthermore, in this embodiment, the notification units 241 for the second installation stand 221 are disposed around the corresponding installation sections K for each installation section K. This allows the worker to more easily grasp the correspondence between the notification units 241 and the installation sections K. Moreover, the notification unit 241 is provided at the rear side (negative side in the Y direction in FIG. 7, etc.), i.e., at a position farther away from the worker, so that wiring to the notification unit 241, etc., does not impede the replacement work of the storage container B in the installation section K of the second installation stand 221 in which the notification unit 241 is provided. Furthermore, since the height position of the second installation stand 221 in which the notification unit 241 is provided is low, even a short worker can visually recognize the notification by the notification unit 241 provided at the rear side.

[0092] In addition, in this embodiment, the notification units 240, 241 have a simple configuration consisting of two light-emitting elements 250, 251 that emit light in different colors. Then, the light-emitting states of the two light-emitting elements 250, 251 can notify a number of states related to the treatment liquid supplying apparatus 200, including the suitability of the storage containers B installed in each section K. That is, in this embodiment, the notification units 240, 241 can notify a number of states related to the treatment liquid supplying apparatus 200 with a simple configuration.

[0093] Furthermore, in this embodiment, a relay 514 is provided for performing an interlock to disable the operation of supplying the processing liquid from the storage container B, and the interlock is activated when the storage container B installed in the installation section K is not appropriate. Therefore, it is possible to prevent an inappropriate processing liquid from being supplied. As a result, it is possible to prevent mixing of an appropriate processing liquid and an inappropriate processing liquid in the buffer tank 503 and the occurrence of product defects.

[0094] <Modification> The number of light emitting elements included in each of the notification sections 240 and 241 is not limited to two, but may be one, or may be three or more.

[0095] In the above example, information on the product name of the storage container B was used to determine whether the storage container B installed in the installation section K during replacement was suitable. The RFID tag B1 may hold other identification information of the storage container B (e.g., information on the type of processing liquid, lot number, etc.) instead of or in addition to the product name information. In this case, the other identification information may be used to determine the suitability. The suitability may also be determined based on two or more pieces of the identification information of the storage container B held in the RFID tag B1. The setting of which of the identification information of the storage container B held in the RFID tag B1 is to be used for the above-mentioned suitability determination is performed, for example, by an operator looking at a setting screen displayed on the touch panel 110 and operating the touch panel 110.

[0096] In the above example, the suitability of the storage container B installed in the installation section K was notified only by the light emission state of the notification units 240, 241. In addition to this, the suitability of the storage container B installed in the installation section K may be notified by sound via a sound output means or by voice via a voice output means.

[0097] In the above example, the warning that the storage container B is empty is notified by a screen display via the touch panel 110, but instead of or in addition to this, the warning may be notified by a sound via a sound output means or a voice via a voice output means. This makes it possible to prevent oversight.

[0098] In the above example, the shelf 210 has only one row of storage containers B installed in the depth direction (Y direction in FIG. 7, etc.), but two rows of storage containers B may be installed in the depth direction. In this case, the storage container B on the far side (negative side of the Y direction in FIG. 7, etc.) is installed from the far side of the shelf 210, and the notification units 240, 241 for the storage container B emit light toward the far side. In the above example, the shelf 210 has two installation stands, the first installation stand 220 and the second installation stand 221, arranged in the height direction, but may have three or more installation stands arranged in the height direction. In this case, the installation stand at a position higher than the first installation stand 220 is provided with the RFID reader 230, the notification unit 240, and the holder 260, similar to the first installation stand 220, and the installation stand at a position lower than the second installation stand 221 is provided with the RFID reader 231, the notification unit 241, and the holder 261, similar to the second installation stand 221.

[0099] The embodiments disclosed herein should be considered as illustrative and not restrictive in all respects. The above-described embodiments may be omitted, substituted, or modified in various forms without departing from the scope and spirit of the appended claims. [Explanation of symbols]

[0100] 30 Development processing device 31 Lower anti-reflection film forming equipment 32 Resist coating equipment 33 Upper anti-reflection film forming equipment 200 Processing liquid supply device 210 Shelf 230, 231 RFID reader 231 RFID Reader 240, 241 Notification Department 250, 251 Light emitting element B Storage container B1 RFID tag H storage medium K Section W wafer based on

Claims

[Claim 1] A processing liquid supplying apparatus for supplying a processing liquid to a substrate processing apparatus for processing a substrate using the processing liquid, a storage section having a plurality of compartments in which a storage container storing a processing liquid is placed from one side; An acquisition unit is provided for each of the sections and acquires identification information of the storage container from an identification information storage unit attached to a side surface of the storage container installed in the corresponding section; A notification unit is provided for each of the sections, and notifies the installation state of the storage container in the corresponding section based on the acquisition result by the acquisition unit of the corresponding section by the light emitting state of the light emitting element, The light emitting element of the notification unit emits light toward the one side surface, The storage unit includes a first mounting table and a second mounting table each having the compartment, the acquiring unit includes a first acquiring unit provided for the first mounting stand and a second acquiring unit provided for the second mounting stand, the notification unit includes a first notification unit provided for the first mounting stand and a second notification unit provided for the second mounting stand, the second mounting stand is located at a lower position than the first mounting stand, A processing liquid supplying device, wherein a height position of the first notification unit based on a height position of the first installation stand is lower than a height position of the second notification unit based on a height position of the second installation stand.

Images