Method for measuring light

Abstract

To provide a method for measuring light which can suppress temporal reduction of the accuracy of measuring the optical output of a target light-emitting device.SOLUTION: The method for measuring light includes steps of: acquiring an initial measurement value A0 of optical output of a reference light-emitting device by using a light measurement device 2; acquiring a measured value M of optical output of a target light-emitting device by using the light measurement device 2; acquiring an indication value An of the measurement value of the optical output of the reference light-emitting device using the light measurement device 2 at the time of measuring the measured value M; and multiplying the measured value M by at least a time difference correction coefficient A0 / An when the value A0 / An obtained by dividing the initial measurement value A0 by the indication value An is the time difference correction coefficient A0 / An, thereby obtaining a correction value Mc of the optical output of the target light-emitting device.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to an optical measurement method. [Background technology]

[0002] Patent Document 1 discloses a method for measuring the light output of an LED (Light Emitting Diode) as a light emitting device by using a light measuring device having an integrating sphere or an integrating hemisphere. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2012-227201 A Summary of the Invention [Problem to be solved by the invention]

[0004] The state of the light measurement device changes over time, and there is a risk that the measurement accuracy will decrease over time.

[0005] The present invention has been made in consideration of the above circumstances, and has an object to provide a light measurement method that can suppress deterioration over time in the measurement accuracy of the light output of a target light-emitting device. [Means for solving the problem]

[0006] In order to achieve the above object, the present invention provides a method for obtaining an initial measurement value A0 of the light output of a reference light-emitting device using a light measuring device, obtaining a measurement value M of the light output of a target light-emitting device using the light measuring device, and obtaining a guideline value A of the measurement value of the light output of the reference light-emitting device using the light measuring device at the time of measuring the measurement value M. n The initial measurement value A0 is obtained, and the reference value A n A0 / A divided by n Time difference correction coefficient A0 / A n When the measured value M is set to 0, the time difference correction coefficient A0 / A nBy multiplying by , the correction value M of the light output of the target light emitting device is obtained. c The present invention provides a light measurement method. Effect of the Invention

[0007] According to the present invention, it is possible to provide a light measurement method capable of suppressing deterioration over time in the measurement accuracy of the light output of a target light-emitting device. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a plan view of a light emitting device in first and second embodiments. [Diagram 2] FIG. 1 is a cross-sectional view showing a configuration of a light measurement device in first and second embodiments. [Diagram 3] 4 is a side view of the light measurement device in the first and second embodiments, showing the periphery of an insertion hole. FIG. [Figure 4] FIG. 2 is a cross-sectional view showing a configuration of a standard machine in the first and second embodiments. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] [First embodiment] A first embodiment of the present invention will be described with reference to Figures 1 to 4. Note that the embodiment described below is shown as a preferred specific example for carrying out the present invention, and while there are some parts that specifically exemplify various technical matters that are technically preferable, the technical scope of the present invention is not limited to this specific embodiment.

[0010] (Light emitting device) First, a light emitting device used in the light measuring method of the present embodiment will be described. Fig. 1 is a plan view of a light emitting device 1 used in the light measuring method of the present embodiment.

[0011] The light emitting device 1 used in the light measurement method of this embodiment includes a target light emitting device to be measured for light output, a first reference light emitting device for calculating a time difference correction coefficient described below, and a second reference light emitting device for calculating a device difference correction coefficient described below. These have the same configuration as each other, unless otherwise specified.

[0012] The light emitting device 1 is, for example, a light emitting diode (LED). The light emitting device 1 is not particularly limited, but may be a light emitting diode having a so-called CoS (Chip on Submount) structure, a light emitting diode having a so-called airtight sealing structure, etc. The light emitting device 1 may be a light source other than a light emitting diode.

[0013] In this embodiment, the light emitting device 1 is, for example, an ultraviolet LED that emits ultraviolet light with a central wavelength of 365 nm or less. The light emitting device 1 may also emit deep ultraviolet light with a central wavelength of 280 nm or less. It is preferable that the target light emitting device as the light emitting device 1, the first reference light emitting device, and the second reference light emitting device have the same central wavelength of the emitted light. For example, if the difference between the maximum and minimum central wavelengths of the light emitted by the target light emitting device as the light emitting device 1, the first reference light emitting device, and the second reference light emitting device is 10 nm or less, it can be said that these central wavelengths are the same.

[0014] The light output of the light emitting devices 1 is measured by a light measuring device described later while a plurality of light emitting devices 1 are mounted on the collective substrate 10. The collective substrate 10 includes a base material 101, a plurality of electrode pairs 102, and a plurality of light emitting devices 1. The base material 101 is made of an electrically insulating material such as ceramic. The electrode pairs 102 are formed on the surface of the base material 101 and include an anode electrode 102a and a cathode electrode 102b electrically connected to the light emitting devices 1. The plurality of electrode pairs 102 are arranged in a matrix on the base material 101. The plurality of light emitting devices 1 are respectively connected to the plurality of electrode pairs 102 of the collective substrate 10. As a result, the plurality of light emitting devices 1 are arranged in a matrix on the collective substrate 10 in the same manner as the plurality of electrode pairs 102.

[0015] Moreover, after the optical output of each of the collective substrates 10 mounting the target light-emitting device and the collective substrates 10 mounting the second reference light-emitting device is measured using a light measuring device, the base material 101 is divided and the substrates 101 are separated into individual light-emitting devices 1. Hereinafter, among the collective substrates 10, the one mounting the target light-emitting device is referred to as the target collective substrate, the one mounting the first reference light-emitting device is referred to as the first reference collective substrate, and the one mounting the second reference light-emitting device is referred to as the second reference collective substrate. Each of the first reference collective substrate and the second reference collective substrate needs only to have a necessary number of light-emitting devices mounted thereon, and it is not necessary that light-emitting devices are mounted on all electrode pairs.

[0016] (Light measuring device) Next, a description will be given of a light measurement device used in the light measurement method of this embodiment. Fig. 2 is a cross-sectional view showing the configuration of light measurement device 2. Fig. 3 is a side view of light measurement device 2 showing the periphery of insertion hole 232 of integrating sphere 23.

[0017] The light measurement device 2 is a device that requires calibration in order to bring the measurement results of light of each wavelength in the measurable wavelength range closer to the true value. The measurable wavelength range is a wavelength range in which the light output can be accurately measured by the light measurement device 2 after calibration. As an example, the measurable wavelength range can be a predetermined wavelength range of 250 nm or more and 365 nm or less. In this embodiment, the light measurement device 2 is configured to be capable of continuously measuring the light output of multiple light emitting devices 1 in a state where they are mounted on an aggregate substrate 10.

[0018] The light measurement device 2 includes a support 21, a current conductor 22, an integrating sphere 23, a light receiving element 24, and a control unit 25. The support 21 supports the collective substrate 10. The light emitting device 1 of the collective substrate 10 supported by the support 21 emits light when it receives electricity from the current conductor 22.

[0019] The current-carrying unit 22 is connected to a power supply device (not shown), and sequentially contacts the electrode pairs 102 to sequentially energize the light-emitting devices 1 and cause them to emit light. The current-carrying unit 22 includes a pair of probes 221 that are respectively in contact with the anode electrode 102a and the cathode electrode 102b constituting the electrode pair 102, and a pair of probe holders 222 that respectively hold the pair of probes 221. The probes 221 are formed in a needle shape, and their tips are in contact with the anode electrode 102a or the cathode electrode 102b. The probes 221 are in contact with the anode electrode 102a or the cathode electrode 102b from the side of the collective substrate 10 on which the light-emitting device 1 is mounted. The probe holder 222 is formed in an elongated shape, and the probes 221 are held near one end of the probe holder.

[0020] The current-carrying unit 22 and the support unit 21 are configured to be movable relative to each other so that the current-carrying unit 22 sequentially comes into contact with the multiple electrode pairs 102 of the aggregate substrate 10. For example, a configuration can be employed in which the current-carrying unit 22 is fixed in the light measurement device 2, and the support unit 21 moves so that the probe 221 sequentially comes into contact with the multiple electrode pairs 102 of the aggregate substrate 10 that it supports.

[0021] During the relative movement between the current-carrying unit 22 and the support unit 21, in order to prevent the collective substrate 10 and the integrating sphere 23 from colliding with each other, the relative movement between the current-carrying unit 22 and the support unit 21 is controlled so that the collective substrate 10 continues to be located outside (the support unit 21 side) of an inlet 231 of the integrating sphere 23, which will be described later. Even in a state in which the current-carrying unit 22 is in contact with the electrode pair 102 to cause the light-emitting device 1 to emit light, the collective substrate 10 is disposed at a position spaced apart from the inlet 231 toward the support unit 21. In a state in which the current-carrying unit 22 is in contact with the electrode pair 102 to cause the light-emitting device 1 to emit light, the collective substrate 10 and an inlet 231 of the integrating sphere 23, which will be described later, are disposed as close to each other as possible, while being spaced apart from each other, thereby suppressing leakage of light from the integrating sphere 23. The light emitted from the light-emitting device 1 is introduced into the inside of the integrating sphere 23.

[0022] Integrating sphere 23 is disposed on the side of collective substrate 10 on which multiple light emitting devices 1 are mounted. Integrating sphere 23 is formed so as to be hollow, and its inner surface is formed in a spherical shape. The inner surface of integrating sphere 23 is made of a material capable of diffusively reflecting light. Integrating sphere 23 is formed with introduction port 231 for introducing light emitted from light emitting device 1 into integrating sphere 23. Introduction port 231 opens toward collective substrate 10.

[0023] Furthermore, a pair of insertion holes 232 are formed in integrating sphere 23, through which a pair of probe holding parts 222 are respectively inserted. In this embodiment, insertion hole 232 is formed at the end of integrating sphere 23 on the introduction port 231 side, and communicates with introduction port 231. Insertion hole 232 is formed as small as possible to suppress leakage of light from integrating sphere 23.

[0024] When light emitted from light emitting device 1 is introduced into integrating sphere 23 from inlet 231, the light is repeatedly diffusely reflected on the inner surface of integrating sphere 23, thereby homogenizing the distribution of light intensity inside integrating sphere 23. Then, the light inside integrating sphere 23 is extracted from outlet 233 formed in integrating sphere 23.

[0025] The light extracted from outlet 233 of integrating sphere 23 is sent to light receiving element 24. For example, end 261 of optical fiber 26 is connected to outlet 233, and light receiving element 24 receives the light extracted from integrating sphere 23 through optical fiber 26. Note that light receiving element 24 may be attached directly to outlet 233 and receive the light within integrating sphere 23 without passing through optical fiber 26.

[0026] When the light receiving element 24 receives light, it outputs a current value corresponding to the optical output of the light receiving element 24. In this embodiment, the light receiving element 24 is a photodiode such as a silicon photodiode. The output of the light receiving element 24 is sent to the control unit 25.

[0027] The control unit 25 calculates the optical output of the light received by the light receiving element 24 based on the output current of the light receiving element 24. The control unit 25 includes an I / V conversion unit 251 and a calculation unit 252.

[0028] The I / V conversion unit 251 converts the current output from the light receiving element 24 into a voltage signal. For example, the I / V conversion unit 251 can be configured with a circuit having an operational amplifier and a resistor. The voltage signal output from the I / V conversion unit 251 is sent to the calculation unit 252.

[0029] The calculation unit 252 performs a process of converting the voltage information acquired from the I / V conversion unit 251 into light output information in accordance with a predetermined rule. For example, the calculation unit 252 converts the voltage information acquired from the I / V conversion unit 251 into light output in accordance with a predetermined rule. For example, the calculation unit 252 calculates the light output of the light emitting device 1 by multiplying the voltage information acquired from the I / V conversion unit 251 by a predetermined coefficient. Here, when the light measurement device 2 is in an uncalibrated state, the calculation unit 252 may not be able to accurately calculate the light output of the light emitting device 1, so the light measurement device 2 is calibrated as described below before use.

[0030] The calculation unit 252 converts the voltage information acquired from the I / V conversion unit 251 into optical output information in units of watts [W] or milliwatts [mW]. Note that, without being limited thereto, the calculation unit 252 may convert the voltage information acquired from the I / V conversion unit 251 into optical output information in units of volts [V] or millivolts [mV], or may eliminate the I / V conversion unit 251 and convert information on the current output from the light receiving element 24 into optical output information in units of amperes [A] or milliamperes [mA].

[0031] The calculation unit 252 includes a processor, a memory such as a RAM (Random Access Memory) that serves as a calculation area during operation of the processor, and a ROM (Read Only Memory) that stores programs executed by the processor and various data calculated by the processor. The calculation unit 252 may be realized by any method other than software as long as it is configured to realize its functions. For example, at least a part of the functions of the control unit 25 may be realized by hardware such as a logic circuit. The optical output information calculated by the calculation unit 252 is output to, for example, a display (not shown).

[0032] (Standard machine) Next, the standard machine used in the light measuring method of this embodiment will be described.

[0033] The standard device 3 is a device that is calibrated so that a true value can be calculated when light of each wavelength in at least the measurable wavelength range of the light measuring device 2 is measured. The standard device 3 is configured so that the light output of the individual light emitting device 1 can be measured.

[0034] Standard device 3 includes integrating sphere 31, spectroscope 32, light receiving element 33, and control unit 34. Except where otherwise specified, integrating sphere 31, light receiving element 33, and control unit 34 have the same configurations as those in light measurement device 2, and therefore differences from light measurement device 2 will be mainly described.

[0035] The light emitting device 1, which is singulated and mounted on the mounting substrate 100, is attached to the inlet 311 of the integrating sphere 31, and the light emitting device 1 is disposed inside the integrating sphere 31. The light emitting device 1, which is mounted on the mounting substrate 100, is attached to the inlet 311 without any gaps, and the light emitted from the light emitting device 1 is taken into the inside of the integrating sphere 31 without leakage. The integrating sphere 31 does not have an insertion hole 232, such as that formed in the integrating sphere 23 of the light measurement device 2, and power is supplied to the light emitting device 1 appropriately so that no light leaks from inside the integrating sphere 31. The light inside the integrating sphere 31 is sent to the spectroscope 32 through, for example, an optical fiber 35 having an end 351 connected to the outlet 312.

[0036] The spectroscope 32 monochromatizes the incident light and outputs it. In other words, the spectroscope 32 is configured to extract only light of a specific wavelength from the incident light. If the standard device 3 is a multi-channel detector, the spectroscope 32 used is one that operates as a polychromator. The light receiving element 33 outputs the detection results of the light of each wavelength dispersed by the spectroscope 32 to the control unit 34.

[0037] The control unit 34 includes an I / V conversion unit 341 and a calculation unit 342, and calculates and integrates the optical output of each wavelength to obtain the optical output of the light emitting device 1. The calculation unit 342 is adjusted in advance so that the optical output of the light emitting device 1 can be calculated with high accuracy.

[0038] (Light measurement method) Next, the light measurement method of this embodiment will be described. First, the outline of the light measurement method of this embodiment will be described, and then the details of the light measurement method of this embodiment will be described.

[0039] In the light measurement method of this embodiment, first, an initial measurement is performed to calculate an apparatus difference correction coefficient for matching the optical output value of the second reference light-emitting device measured by the optical measurement device 2 to the optical output value of the second reference light-emitting device measured by the standard device 3. The apparatus difference correction coefficient is calculated by multiplying the reference measurement value B true is obtained by dividing by the initial measurement value B0, which is the measurement value of the light output of the second reference light-emitting device using the light measurement device 2. In other words, the device difference correction coefficient is B true By multiplying the measurement result of the target light emitting device by the light measurement device 2 by this device difference correction coefficient, the difference in measurement value caused by the device difference between the light measurement device 2 and the standard device 3 can be corrected.

[0040] However, as time passes from the time of the initial measurement, the state of the light measurement device 2 changes, causing the measurement accuracy of the light output by the light measurement device 2 to fluctuate. For example, the light measurement device 2 may be affected by changes in the surrounding environment due to seasonal changes, causing the measurement accuracy of the light output to fluctuate. Furthermore, when measuring the light output of a light-emitting device that emits ultraviolet light as in this embodiment, it is possible that the measurement accuracy of the light output will fluctuate due to the state of the light measurement device 2 changing under the influence of the ultraviolet light.

[0041] Taking this into consideration, in the light measurement method of this embodiment, a time difference correction coefficient is calculated to correct the difference in accuracy of the light output measurement by the light measurement device 2 due to the time difference from the time point when the initial measurement value B0 is measured to the time point when the measurement value M of the light output of the target light-emitting device is measured using the light measurement device 2. The time difference correction coefficient is calculated by subtracting the reference value A of the measurement value A of the initial measurement value A0 obtained by measuring the light output of the first reference light-emitting device using the light measurement device 2 at the time point when the initial measurement value B0 is measured and the measurement value M of the light output of the first reference light-emitting device using the light measurement device 2. n Ratio of A0 / A n It is assumed that the true value of the light output of the first reference light-emitting device does not change over time, and the light emission time of the first reference light-emitting device for each time is an extremely short time, such as milliseconds.

[0042] The light measuring method of this embodiment will now be described in detail. In the light measurement method of this embodiment, an initial measurement is first performed. In the initial measurement, an initial measurement value A0 of the light output of a specific first reference light-emitting device (hereinafter, the "specific first reference light-emitting device" will be simply referred to as the "first reference light-emitting device") mounted on a first reference collective substrate and an initial measurement value B0 of the light output of a specific second reference light-emitting device (hereinafter, the "specific second reference light-emitting device" will be simply referred to as the "second reference light-emitting device") mounted on a second reference collective substrate are obtained using a light measurement device 2. In the initial measurement, after the initial measurement value B0 is measured, the second reference light-emitting device is separated from the second reference collective substrate, and a standard machine 3 is used to obtain a reference measurement value B0 of the light output of the separated second reference light-emitting device. true is obtained.

[0043] Various optical output data obtained in the initial measurements are summarized in Table 1. Note that the optical output measurement results using the optical measurement device 2 are the results of measuring the optical output of the light emitting device 1 in a state where it is mounted on the collective substrate 10, and the optical output measurement results using the standard device 3 are the results of measuring the optical output of the individual light emitting devices 1.

[0044] [Table 1]

[0045] Here, as described above, the initial measurement value A0 is an index of the measurement value obtained by measuring the first reference light-emitting device using the light measurement device 2 at the time of measuring the initial measurement value B0. However, at the time of measuring the initial measurement value B0, the light measurement device 2 is being used to measure the initial measurement value B0, and considering the work of replacing the first reference light-emitting device and the second reference light-emitting device with the light measurement device 2, it is impossible to measure the initial measurement value A0 at the exact same time as the measurement of the initial measurement value B0. Therefore, the measurement time of the initial measurement value A0 is set to be close to the time of the initial measurement value B0, and the initial measurement value A0 is an approximate value (estimated value) of the result of measuring the light output of the first reference light-emitting device using the light measurement device 2 at the time of measuring the initial measurement value B0.

[0046] The initial measurement value A0 and the initial measurement value B0 are both measured on the same day, for example. The initial measurement value A0 and the initial measurement value B0 are preferably measured within 8 hours of each other. Furthermore, even taking into consideration the work of replacing the first reference collective substrate and the second reference collective substrate on the light measurement device 2, the time interval between the measurements of the initial measurement value A0 and the initial measurement value B0 is preferably within 15 minutes, for example.

[0047] After the initial measurement, the main measurement is performed. In the main measurement, a measurement value M of the light output of the target light-emitting device is obtained using the light measurement device 2, and a reference value A of the measurement value of the light output of the first reference light-emitting device using the light measurement device 2 at the time of measurement of the measurement value M is obtained. nThe various optical output data obtained in this measurement are summarized in Table 2.

[0048] [Table 2]

[0049] Here, as mentioned above, the guideline value A n is an index of the measurement value obtained by measuring the first reference light-emitting device using the light measuring device 2 at the time of measuring the measurement value M. However, at the time of measuring the measurement value M, the light measuring device 2 is being used to measure the measurement value M, and considering the work of switching the target light-emitting device and the first reference light-emitting device to the light measuring device 2, it is impossible to measure the light output of the first reference light-emitting device using the light measuring device 2 at the exact same time as the measurement value M. Therefore, the guideline value A n The measurement time of is close to the measurement time of measurement M, and the reference value A n is a reference value (estimated value) of the result of measuring the light output of the first reference light emitting device using the light measuring device 2 at the time when the measured value M is measured.

[0050] Guideline value A n The reference value A and the measurement value M are measured on the same day, for example. n It is preferable that the measurement values ​​A and M are measured within 8 hours of each other. n The shorter the time interval between the measurement of the measured value and the measured value M, the more preferable, for example, within 3 hours.

[0051] Then, for the obtained measurement value M, the initial measurement value A0 is set as the reference value A n Time difference correction coefficient A0 / A n and standard measurement value B true The device difference correction coefficient B is calculated by dividing the initial measurement value B0. true By multiplying the measurement value M by / B0, the correction value M c That is, the correction value M c is expressed by the following equation (1).

[0052]

number

[0053] According to formula (1), the deviation of the measurement results caused by the difference in the measurement device and the difference in the measurement time between the measurement result of the optical output of the target light-emitting device on the target assembly board using the optical measurement device 2 and the measurement result of the optical output of the second reference light-emitting device using the standard device 3 is corrected, and the correction value M c is obtained.

[0054] The measurement of the light output of the target light emitting device using the light measuring device 2 can be carried out, for example, as a pre-shipment inspection of the target light emitting device. In the pre-shipment inspection of the target light emitting device, it is necessary to measure the light output of a large number of target light emitting devices to be shipped. Therefore, if the light output of the individualized target light emitting devices is measured one by one in the pre-shipment inspection of the target light emitting device, the labor required to replace the target light emitting devices in the light measuring device 2 becomes excessive and inefficient. Therefore, in the pre-shipment inspection of the target light emitting device, it is efficient to continuously measure the light output of a large number of target light emitting devices mounted on a target collective board. After the light output of all the target light emitting devices on the target collective board is measured, the target light emitting devices are individualized and shipped with no performance problems.

[0055] Correction value M for the light output of multiple target light-emitting devices c Each time the guideline value A is calculated n For example, it is not necessary to re-obtain the correction value M by measuring the light output of each of a large number of target light-emitting devices during the course of a day. c When calculating the value of the common guideline A for at least some of the many target light-emitting devices, n Using the correction value M c Also, the guideline value A can be obtained several times a day. n In this case, the correction values ​​M c is the reference value A obtained close to the measurement time of the measurement value M of the target light-emitting device. n It can be calculated using:

[0056] (Functions and Effects of the First Embodiment) In the light measurement method of this embodiment, an initial measurement value A0 of the light output of the first reference light-emitting device is obtained using the light measurement device 2. Also, a measurement value M of the light output of the target light-emitting device is obtained using the light measurement device 2. Furthermore, a guideline value A of the light output of the first reference light-emitting device using the light measurement device 2 at the time of measuring the measurement value M is obtained. n Then, the measured value M is adjusted to obtain at least the time difference correction coefficient A0 / A n By multiplying this, the correction value M of the light output of the target light-emitting device is obtained. c Therefore, a correction value M is obtained by taking into account the fluctuation in the measurement accuracy of the light output of the light measuring device 2 due to the passage of time from the time of measurement of the initial measurement value A0 to the time of measurement of the measurement value M. c This suppresses the measurement accuracy of the light output of the target light-emitting device by the light measurement device 2 from decreasing over time.

[0057] In addition, the guideline value A n is determined based on the measured value of the light output of the first reference light-emitting device measured within 8 hours before or after the measurement of the measured value M of the light output of the target light-emitting device using the light measurement device 2. Therefore, the guideline value A n approaches the true value of the light output of the first reference light-emitting device using the light measuring device 2 at the time of measuring the measured value M, and the correction value M c is required with higher accuracy.

[0058] In addition, the light measurement method of this embodiment uses a light measurement device 2 to obtain an initial measurement value A0 of the first reference light emitting device in a state where it is mounted on a first reference collective substrate, and also obtain an initial measurement value B0 of the light output of the second reference light emitting device in a state where it is mounted on a second reference collective substrate. After obtaining the initial measurement value B0, the second reference light emitting device is separated from the second reference collective substrate, and a standard machine 3 is used to obtain a reference measurement value B0 of the light output of the separated second reference light emitting device. true Then, a measurement value M of the target light emitting device mounted on the target collective substrate is obtained using the light measurement device 2. Furthermore, at least a time difference correction coefficient A0 / A n and the device difference correction coefficient B trueBy multiplying by / B0, the correction value M c Therefore, the deviation of the measurement result caused by the difference in the measurement device and the difference in the measurement time between the measurement result of the optical output of the target light-emitting device on the target aggregate board using the optical measurement device 2 and the measurement result of the optical output of the second reference light-emitting device using the standard device 3 is corrected, and the optical output of the target light-emitting device mounted on the target aggregate board can be obtained with high accuracy.

[0059] In addition, the initial measurement value A0 and the initial measurement value B0 are measured within 8 hours of each other. Therefore, the initial measurement value A0 approaches the value of the light output of the first reference light-emitting device using the light measurement device 2 at the time of measuring the initial measurement value B0, and the correction value M c is required with higher accuracy.

[0060] In addition, each of the first reference light emitting device and the target light emitting device emits ultraviolet light. Therefore, the light measuring device 2 that measures these light outputs deteriorates with use and is prone to change in condition over time. Therefore, as described above, the time difference measurement coefficient A0 / A0 is applied to the measurement value M. n The advantage of multiplication is great.

[0061] As described above, according to this embodiment, it is possible to provide a light measurement method capable of suppressing deterioration over time in the measurement accuracy of the light output of a target light-emitting device.

[0062] [Second embodiment] The light measurement method of this embodiment is basically the same as that of the first embodiment, but the time difference correction coefficient A0 / A n is determined based on the results obtained by measuring the optical output of the first reference light-emitting devices mounted on the first reference collective substrate multiple times using the optical measurement device 2. Furthermore, the optical measurement method of this embodiment determines the device difference correction coefficient B true / B0 is determined based on the results obtained by measuring the optical output of multiple second reference light-emitting devices mounted on the second reference collective substrate multiple times using an optical measuring device 2, and the results obtained by measuring the optical output of multiple second reference light-emitting devices separated from the second reference collective substrate multiple times using a standard device 3.

[0063] In the initial measurement of the light measurement method of this embodiment, a light measurement device 2 is used to measure the light output A of i (i is a natural number of 2 or more) first reference light emitting devices mounted on a first reference collective substrate. 1,0 ~A i,0 are measured respectively. Here, the measured value A 1,0 ~A i,0 Each of the values ​​was a representative value obtained by measuring the light output of each of the first reference light emitting devices multiple times. The representative value may be an average, a median, a mode, or the like.

[0064] In the initial measurement, the light measuring device 2 is used to measure the light output of j (j is a natural number equal to or greater than 2) second reference light emitting devices mounted on the second reference collective substrate. 1,0 ~B j,0 are measured respectively. Here, the measured value B 1,0 ~B j,0 Each of the values ​​was a representative value obtained by measuring the light output of each of the second reference light emitting devices multiple times. The representative value may be an average, a median, a mode, or the like.

[0065] In the initial measurement, the standard machine 3 is used to measure the optical output of j second reference light emitting devices separated from the second reference collective substrate. 1,true ~B j,true are measured respectively. Here, the measured value B 1,true ~B j,true Each of the values ​​is a representative value of the results of measuring the light output of each of the second reference light emitting devices multiple times. The representative value may be the average, median, mode, or the like. The data of various light outputs obtained in the initial measurements are summarized in Table 3.

[0066] [Table 3]

[0067] Here, measurement value A 1,0 ~A i,0 and measurement value B 1,0 ~B j,0 For example, both are measured on the same day.1,0 ~A i,0 and measurement value B 1,0 ~B j,0 are preferably measured within 8 hours of each other, more preferably within 15 minutes.

[0068] After the initial measurement, the main measurement is performed. In the main measurement, the measurement value M of the optical output of the target light-emitting device is measured using the optical measurement device 2, and the measurement value A of the optical output of the i first reference light-emitting devices using the optical measurement device 2 at the time of measuring the measurement value M is measured. 1,n ~A i,n are obtained, respectively. Here, the measured value A 1,n ~A i,n Each of the values ​​is a representative value obtained by measuring the light output of each of the first reference light emitting devices multiple times. The representative value may be an average, a median, or a mode. The data on the various light outputs obtained by this measurement are summarized in Table 4.

[0069] [Table 4]

[0070] Here, measurement value A 1,n ~A i,n Measurement value A and measurement value M are, for example, both measured on the same day. 1,n ~A i,n Preferably, and measurement M are measured within 8 hours of each other, more preferably within 3 hours.

[0071] And the time difference correction coefficient A0 / A n A 1,0 / A 1,n ~A i,0 / A i,n The representative value is the device difference correction coefficient B true / B0 to B 1,true / B 1,0 ~B j,true / B j,0 As an example, the time difference correction coefficient A0 / A n A 1,0 / A 1,n ~Ai,0 / A i,n The average value of the above is shown in the following formula (2), and the device difference correction coefficient B true / B0 to B 1,true / B 1,0 ~B j,true / B j,0 An example of the average value is shown in the following formula (3).

[0072]

number

[0073]

number

[0074] And these time difference correction coefficients A0 / A n and device difference correction coefficient B true By multiplying the measured value M by / B0 in the same way as in formula (1), a correction value M that indicates the light output of the target light-emitting device with high accuracy is obtained. c is obtained.

[0075] In addition, in the formulas (2) and (3), examples of simple averages are shown, but the present invention is not limited to these. 1,0 / A 1,n ~A i,0 / A i,n Representative values ​​other than the simple average of B 1,true / B 1,0 ~B j,true / B j,0 It is possible to use a representative value other than the simple average of the time difference correction coefficient A0 / A n , (A 1、0 ,A 1,n )~(A i、0 ,A i,n ) The slope obtained by fitting the scatter plot of the above equation may be used. true The same is true for / B0.

[0076] The rest is similar to the first embodiment. In addition, among the symbols used in the second and subsequent embodiments, the same symbols as those used in the previously described embodiments represent the same components, etc. as those in the previously described embodiments, unless otherwise specified.

[0077] (Functions and Effects of the Second Embodiment) In this embodiment, the time difference correction coefficient A0 / A n is the result obtained by measuring the optical output of a plurality of first reference light emitting devices mounted on a first reference collective substrate multiple times (i.e., A 1,0 ~A i,0 and A 1,n ~A j,n ) is determined based on the device difference correction coefficient B true / B0 is the result obtained by measuring the light output of the plurality of second reference light emitting devices mounted on the second reference collective substrate multiple times (i.e., B 1,0 ~B j,0 ) and the results obtained by measuring the light output of a plurality of second reference light emitting devices separated from the second reference collective substrate multiple times (i.e., B 1,true ~B j,true Therefore, for example, the time difference correction coefficient A0 / A n and device difference correction coefficient B true The average value can be obtained as / B0, and the correction value M c In addition, by using a plurality of first reference light-emitting devices, even if some of the first reference light-emitting devices fail during the process, the time difference correction coefficient A0 / A n can be calculated. In addition, the second embodiment has the same functions and effects as the first embodiment.

[0078] [Other embodiments] In the first or second embodiment, the light output of the first reference light emitting device is measured on a daily basis using the light measurement device 2, and the measurement value of the light output of the first reference light emitting device measured at a time close to the measurement of the measurement value M is set as the reference value A. n and the time difference correction factor A0 / A nmay be calculated. In this case, the measurement of the light output of the first reference light emitting device may be performed every day, or may be performed for, for example, the majority of the days of the week (i.e., four or more days). The measurement of the light output of the first reference light emitting device may also be performed at multiple times in a day. In this way, by measuring the light output of the first reference light emitting device on a daily basis using the light measuring device 2, it is easy to find an abnormality in the light measuring device 2. In other words, when the light output of the first reference light emitting device is measured on a daily basis using the light measuring device 2, if the measured value of the light output of the first reference light emitting device suddenly changes, it can be determined that some abnormality has occurred in the light measuring device 2.

[0079] In the first and second embodiments, the reference value A of the measured light output of the first reference light emitting device using the light measuring device 2 at the time of measuring the measured value M is n is a result of measuring the light output of the first reference light-emitting device using the light measurement device 2 at a time close to the time of measuring the measurement value M, but is not limited to this. n can be regarded as the result of measuring the light output of the first reference light-emitting device using the light measuring device 2 at the time of measuring the measurement value M. For example, when the light output of the first reference light-emitting device is measured on a daily basis using the light measuring device 2 as described above, the reference value A can be, for example, the average value of the measurement results of the light output of the first reference light-emitting device a predetermined number of times before the measurement of the measurement value M. n It is also possible to use the following.

[0080] In the first and second embodiments, the correction value M c is the measured value M of the optical output of the target light-emitting device using the optical measurement device 2, and the time difference correction coefficient A0 / A n and the device difference correction coefficient B true / B0. However, if the light measuring device 2 has already been calibrated at an initial stage, the device difference correction coefficient B true There is no need to use / B0.

[0081] (Summary of the embodiment) Next, the technical ideas grasped from the above-described embodiment will be described by using the reference numerals and the like in the embodiment. However, the reference numerals and the like in the following description do not limit the components in the claims to the members and the like specifically shown in the embodiment.

[0082] [1] In a first embodiment of the present invention, an initial measurement value A0 of the light output of a reference light-emitting device is obtained using a light measurement device 2, a measurement value M of the light output of a target light-emitting device is obtained using the light measurement device 2, and a guideline value A of the measurement value of the light output of the reference light-emitting device using the light measurement device 2 at the time of measurement of the measurement value M is obtained. n The initial measurement value A0 is obtained, and the reference value A n A0 / A divided by n Time difference correction coefficient A0 / A n When the measured value M is set to 0, the time difference correction coefficient A0 / A n By multiplying by , the correction value M of the light output of the target light emitting device is obtained. c This is an optical measurement method. This prevents the measurement accuracy of the light output of the target light-emitting device from decreasing over time.

[0083] [2] The second embodiment of the present invention is the first embodiment, wherein the guide value A n is determined based on a measured value of the light output of the reference light emitting device measured within 8 hours before and after the measurement of the measurement value M. This results in a correction value M c can be obtained with higher accuracy.

[0084] [3] A third embodiment of the present invention is the first or second embodiment, further comprising: using the light measurement device 2 to obtain the initial measurement value A0 of the reference light emitting device mounted on a reference collective substrate; and obtaining an initial measurement value B0 of the light output of a second reference light emitting device mounted on a second reference collective substrate; after obtaining the initial measurement value B0, the second reference light emitting device is singulated from the second reference collective substrate; and using a standard machine 3 to obtain a reference measurement value B of the light output of the singulated second reference light emitting device. trueand using the light measurement device 2, obtain the measurement value M of the target light-emitting device in a state where it is mounted on a target collective substrate, and obtain the reference measurement value B true The value B obtained by dividing the initial measurement value B0 true / B0 is the instrument difference correction coefficient B true / B0, the measured value M is adjusted to have at least the time difference correction coefficient A0 / A n and the device difference correction coefficient B true / B0 to obtain the correction value M c The aim is to obtain This results in a correction value M c can be obtained with higher accuracy.

[0085] [4] A fourth embodiment of the present invention is the third embodiment, wherein the initial measurement value A0 and the initial measurement value B0 are measured within 8 hours of each other. This results in a correction value M c can be obtained with higher accuracy.

[0086] [5] A fifth embodiment of the present invention is the third or fourth embodiment, wherein the time difference correction coefficient A0 / A n is determined based on the results obtained by measuring the light output of the plurality of reference light-emitting devices mounted on the reference collective substrate multiple times, and the device difference correction coefficient B true / B0 is determined based on the results obtained by measuring the light output of the multiple second reference light-emitting devices mounted on the second reference aggregate substrate multiple times, and the results obtained by measuring the light output of the multiple second reference light-emitting devices separated from the second reference aggregate substrate multiple times. This results in a correction value M c can be obtained with higher accuracy.

[0087] [6] A sixth embodiment of the present invention is any one of the first to fifth embodiments, wherein each of the reference light-emitting device and the target light-emitting device emits ultraviolet light. This prevents the measurement accuracy of the light output of the target light-emitting device from decreasing over time, even in a situation where the state of the light measurement device 2 is prone to change over time.

[0088] (Additional Note) Although the embodiment of the present invention has been described above, the invention according to the claims is not limited to the above embodiment. It should be noted that not all of the combinations of features described in the embodiment are essential to the means for solving the problems of the invention. The present invention can be modified appropriately without departing from the spirit of the invention. [Explanation of symbols]

[0089] 1...Light emitting device 2. Optical measurement device 3…Standard machine

Claims

1. The initial measurement value A of the light output of the reference light-emitting device using the light measurement device ０ Get Obtaining a measurement value M of the light output of a target light-emitting device using the light measurement device; A reference value A of the measured light output of the reference light emitting device using the light measuring device at the time of measuring the measured value M ｎ Get The initial measurement value A ０ The above-mentioned guideline value A ｎ Value A divided by ０ / A ｎ Time difference correction coefficient A ０ / A ｎ When the measured value M is ０ / A ｎ By multiplying by , the correction value M of the light output of the target light emitting device is obtained. ｃ get Light measurement method.

2. The reference value A ｎ is determined based on a measured value of the light output of the reference light emitting device measured within 8 hours before and after the measurement of the measurement value M. The optical measurement method according to claim 1 .

3. The initial measurement value A of the reference light emitting device mounted on the reference assembly substrate using the light measurement device ０ and an initial measurement value B of the light output of the second reference light emitting device mounted on the second reference collective substrate. ０ Get The initial measurement value B ０ After obtaining the above, the second reference light emitting device is separated from the second reference collective substrate, and a reference measurement value B of the optical output of the separated second reference light emitting device is obtained using a standard machine. ｔｒｕｅ Get Using the light measurement device, the measurement value M of the target light-emitting device in a state where it is mounted on a target aggregate substrate is obtained; The reference measurement value B ｔｒｕｅ The initial measurement value B ０ Value B divided by ｔｒｕｅ / B ０ The device difference correction coefficient B ｔｒｕｅ / B ０ When the measured value M is ０ / A ｎ and the device difference correction coefficient B ｔｒｕｅ / B ０ By multiplying this by the correction value M ｃ get The optical measurement method according to claim 1 or 2.

4. The initial measurement value A ０ and the initial measurement value B ０ are measured within 8 hours of each other, The optical measurement method according to claim 3.

5. The time difference correction coefficient A ０ / A ｎ is determined based on the results obtained by measuring the light output of the plurality of reference light emitting devices mounted on the reference collective substrate multiple times, The device difference correction coefficient B ｔｒｕｅ / B ０ is determined based on a result obtained by measuring the light output of the plurality of second reference light emitting devices mounted on the second reference aggregate substrate multiple times, and a result obtained by measuring the light output of the plurality of second reference light emitting devices separated from the second reference aggregate substrate multiple times. The optical measurement method according to claim 3.

6. Each of the reference light-emitting device and the target light-emitting device emits ultraviolet light. The optical measurement method according to claim 1 or 2.

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