Desmear processing method and light processing device

Abstract

To provide a desmear method for effectively performing desmear processing and a light processing device used in the desmear processing method.SOLUTION: The desmear processing method includes irradiating a substrate 10 having a hole 5 and a smear 7 in the hole 5 with vacuum ultraviolet light L1 so that the water contact angle of the substrate 10 is 40 to 70 degrees, supplying a swelling liquid to the substrate 10 that has been irradiated with the vacuum ultraviolet light L1 to cause the smear 7 to swell, and supplying a removal liquid to the substrate 10 that has caused the smear 7 to swell to remove the smear 7 from the substrate 10.SELECTED DRAWING: Figure 3A

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