Sheet sticking device and sheet sticking method

Abstract

To provide a sheet-sticking device and sheet-sticking method that can prevent the occurrence of defects in the sticking of an adhesive sheet.SOLUTION: A sheet sticking device EA includes pressing means 10 for deforming an adhesive sheet AS, pressing, and sticking the adhesive sheet AS onto an adherend WK and energy applying means 20 for applying a predetermined amount of energy to the adhesive sheet AS. The adhesive sheet AS is considered to cause a change specific to predetermined energy when the predetermined energy is applied. The energy applying means 20 applies the predetermined energy to the adhesive sheet AS after it has been deformed by the pressing means 10.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a sheet sticking device and a sheet sticking method. [Background technology]

[0002] 2. Description of the Related Art There is known a sheet attachment device that deforms an adhesive sheet and presses the adhesive sheet against an adherend to attach the sheet to the adherend (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2014-49626 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the adhesive tape application device (sheet application device) described in Patent Document 1, heat (predetermined energy) is applied to the adhesive tape PT (adhesive sheet) by a heater 49 (energy application means) before the adhesive sheet is deformed. This causes the adhesive sheet to soften due to the heat (a change specific to the predetermined energy) and become loose before the adhesive sheet is deformed, resulting in poor application of the adhesive sheet.

[0005] An object of the present invention is to provide a sheet application device and a sheet application method that can prevent the occurrence of defective application of an adhesive sheet. [Means for solving the problem]

[0006] The present invention employs the configurations set forth in the claims. Effect of the Invention

[0007] According to the present invention, a predetermined energy is applied to the adhesive sheet after deformation, so that the adhesive sheet is prevented from undergoing changes specific to the predetermined energy before the adhesive sheet is deformed, and poor application of the adhesive sheet can be prevented. [Brief description of the drawings]

[0008] [Figure 1] 1A to 1C are explanatory views of a sheet sticking device according to one embodiment of the present invention, and FIG. 1D is an explanatory view of a sheet sticking device according to a modified example of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X-axis, Y-axis, and Z-axis are mutually orthogonal, the X-axis and Y-axis are axes within a specified plane, and the Z-axis is an axis orthogonal to the specified plane. Furthermore, in this embodiment, the view from the front direction of Fig. 1(A) parallel to the Y-axis is used as a reference, and when indicating directions, "up" is the direction of the Z-axis arrow, "down" is the opposite direction, "left" is the direction of the X-axis arrow, "right" is the opposite direction, "front" is the direction toward the front of Fig. 1(A) parallel to the Y-axis, and "rear" is the opposite direction.

[0010] The sheet application apparatus EA includes a pressing means 10 that performs a pressing step of deforming an adhesive sheet AS and pressing the adhesive sheet AS against an adherend WK to adhere it thereto, and an energy application means 20 that performs an energy application step of applying heat as a predetermined energy to the adhesive sheet AS. The adhesive sheet AS undergoes a change specific to the heat when heat is applied, and has a first attachment area AS1 in the center which is attached first to the adherend WK, and a second attachment area AS2 which is attached to the adherend WK after the first attachment area AS1 is attached to the adherend WK. The adhesive sheet AS of this embodiment is attached to a ring frame RF as a frame member to form an attachment body SA.

[0011] The pressing means 10 comprises a linear motor 11 as a driving device, an upper case 12 supported by an output shaft 11A of the linear motor 11 and shaped like a box with an open bottom, capable of forming a first sealed space SP1 together with the adhesive body SA, a first pressure control means 13 such as a pressurizing / depressurizing pump, a vacuum ejector, a turbine, or the like, capable of increasing or decreasing the pressure in the first sealed space SP1 via piping 13A, a lower case 14 shaped like a box with an open top, capable of forming a second sealed space SP2 together with the adhesive body SA, a second pressure control means 15 such as a pressurizing / depressurizing pump, a vacuum ejector, a turbine, or the like, capable of increasing or decreasing the pressure in the second sealed space SP2 via piping 15A, and a support table 17 as a supporting means supported by an output shaft 16A of a linear motor 16 as a driving device and supporting the adherend WK on a support surface 17A, and is configured to press and adhere the adhesive sheet AS to the adherend WK in a reduced pressure atmosphere. The first pressure control means 13 and the second pressure control means 15 are capable of controlling the pressure in the first sealed space SP1 and the second sealed space SP2 to a predetermined pressure based on the detection results of a first pressure detection means and a second pressure detection means (not shown), such as a pressure sensor or a load cell, respectively.

[0012] The energy applying means 20 includes heating means 21, such as a coil heater or the heating side of a heat pipe, supported by the upper case 12, and a plurality of reflecting means 22-24, such as mirrors or reflectors, supported by the upper case 12 and surrounding the heating means 21, and applies heat to the adhesive sheet AS after it has been deformed by the pressing means 10. In the case of this embodiment, the energy applying means 20 is configured to apply heat to a first attachment area AS1 of the adhesive sheet AS, and then apply heat to a second attachment area AS2 of the adhesive sheet AS. The heating means 21 includes a first attachment area heating means 21A that is disposed opposite the first attachment area AS1 of the adhesive sheet AS and heats the first attachment area AS1 of the adhesive sheet AS, and a plurality of second attachment area heating means 21B that is disposed side by side surrounding the first attachment area heating means 21A and disposed opposite the second attachment area AS2 of the adhesive sheet AS and heats the second attachment area AS2 of the adhesive sheet AS. The reflection means 22 to 24 are cylindrical in shape and different sizes, and are arranged concentrically in this order around the reflection means 22. The central reflection means 22 surrounds the periphery of the first application area heating means 21A arranged inside it, and the outer reflection means 23 and 24 surround on both radial sides the second application area heating means 21B arranged therebetween.

[0013] The operation of the sheet sticking apparatus EA will now be described. First, a user of the sheet sticking device EA (hereinafter, simply referred to as "user") inputs a signal to start automatic operation via an operation means such as an operation panel or a personal computer (not shown) to the sheet sticking device EA in which each member is arranged at the initial position shown by the solid line in Fig. 1 (A). Next, the user or a conveying means (not shown) such as an articulated robot or a belt conveyor places the adherend WK at a predetermined position on the support table 17, and then places the adhesive body SA at a predetermined position on the lower case 14. After that, the pressing means 10 drives the linear motor 11, and as shown by the two-dot chain line in Fig. 1 (A), the outer edge of the adhesive body SA is sandwiched between the upper case 12 and the lower case 14. Next, the pressing means 10 drives the first and second pressure control means 13, 15, and reduces the pressure of the sealed spaces SP1, SP2 while making the first and second sealed spaces SP1, SP2 have the same pressure based on the detection results of the first and second pressure detection means (not shown). Then, when the first sealed space SP1 and the second sealed space SP2 are depressurized to a predetermined pressure, the pressing means 10 stops driving the first and second pressure control means 13, 15, and then drives the first pressure control means 13 to increase the pressure in the first sealed space SP1 relative to the pressure in the second sealed space SP2, thereby deforming the adhesive sheet AS into a downwardly convex state.

[0014] Next, the energy applying means 20 drives the first application area heating means 21A to apply heat to the first application area AS1 of the adhesive sheet AS after deformation by the pressing means 10. At this time, the heat generated by the first application area heating means 21A is reflected by the reflecting means 22 and collected in the first application area AS1 of the adhesive sheet AS, so that application of heat to areas other than the first application area AS1 is reduced. After that, the pressing means 10 drives the linear motor 16 to raise the support table 17 as shown in FIG. 1(B), and presses the adherend WK against the adhesive sheet AS. As a result, the first application area AS1 of the adhesive sheet AS is pressed against the adherend WK and adhered. Next, after the energy applying means 20 stops driving the first application area heating means 21A, the second application area heating means 21B is driven before the second application area AS2 of the adhesive sheet AS is pressed against the adherend WK, and heat is applied to the second application area AS2 of the adhesive sheet AS, as shown in Fig. 1(C). At this time, the heat generated by the second application area heating means 21B is reflected by the reflecting means 23, 24 and collected in the second application area AS2 of the adhesive sheet AS, so that application of heat to areas other than the second application area AS2 is reduced. Then, as the support table 17 rises, the second application area AS2 of the adhesive sheet AS is pressed against the adherend WK and applied thereto.

[0015] When the entire adhesive sheet AS is attached to the adherend WK and the adherend WK and the attachment body SA are integrated to form an integrated body, the pressing means 10 drives the second pressure control means 15, and based on the detection result of the second pressure detection means (not shown), the pressure of the second sealed space SP2 is increased until it becomes the same as the pressure of the first sealed space SP1. Then, the pressing means 10 drives the first and second pressure control means 13, 15, and based on the detection result of the first and second pressure detection means (not shown), the pressure of the first and second sealed spaces SP1, SP2 is increased to atmospheric pressure while the pressure of the first and second sealed spaces SP1, SP2 is made the same as the pressure of the first and second sealed spaces SP1, SP2. Next, the pressing means 10 drives the linear motors 11, 16 to return the upper case 12 and the support table 17 to their initial positions, and the user or the conveying means (not shown) conveys the integrated body to the next process, and the same operations as above are repeated thereafter.

[0016] According to the embodiment described above, heat is applied to the deformed adhesive sheet AS, thereby suppressing the heat-specific changes that the adhesive sheet AS undergoes before it deforms, and preventing poor application of the adhesive sheet AS.

[0017] As described above, the best configuration, method, etc. for carrying out the present invention are disclosed in the above description, but the present invention is not limited thereto. That is, the present invention is mainly illustrated and described with respect to a specific embodiment, but a person skilled in the art can make various modifications to the above-described embodiment in terms of shape, material, quantity, and other detailed configurations without departing from the scope of the technical idea and purpose of the present invention. In addition, the description of the shape, material, etc. disclosed above, which is limited, is illustratively described to facilitate understanding of the present invention, and does not limit the present invention, so that the description of the names of the members from which some or all of the limitations of the shape, material, etc. are removed is included in the present invention. Furthermore, the means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps, and are in no way limited to the components and steps of a mere embodiment shown in the above embodiment. For example, the pressing means may be anything that can deform the adhesive sheet and press the adhesive sheet against the adherend to attach it, and is not limited in any way as long as it is within the technical scope of the common general knowledge at the time of filing (the same applies to other means and steps).

[0018] The pressing means 10 may press and attach the adhesive sheet AS to the adherend WK by lowering the pressure of the second sealed space SP2 relative to the pressure of the first sealed space SP1, or may not be configured to press and attach the adhesive sheet AS to the adherend WK by the pressure difference between the first sealed space SP1 and the second sealed space SP2, may press and attach the adhesive sheet AS to the adherend WK in an atmospheric pressure atmosphere or a pressurized atmosphere, may not form the first sealed space SP1 or the second sealed space SP2, may not have a first pressure detection means or a second pressure detection means (not shown), may be omitted, or may be configured such that the lower part of the upper case 12 or the upper part of the lower case 14 is open. It is not necessary for the ring frame RF to be open, it is not necessary for the upper case 12 and the lower case 14 to be open, it is not necessary for the linear motor 16 to be open, it is possible for the lower case 14 or the support table 17 to be equipped with a holding device that adsorbs and holds an object placed on it or electrostatically holds it, it is possible to sandwich a strip-shaped adhesive sheet between the upper case 12 and the lower case 14 and press the strip-shaped adhesive sheet onto the adherend WK to affix it, it is possible to press an adhesive sheet AS that is not affixed to the ring frame RF onto the adherend WK to affix it, or it is possible to press the adhesive sheet AS onto the adherend WK using a pressing member such as a pressing roller or a pressing plate to affix it.

[0019] 1(D), instead of the heating means 21 and the reflecting means 22, 23, the energy applying means 20 includes a reflecting means 24, a heating means 25 such as a coil heater or the heating side of a heat pipe arranged inside the reflecting means 24 and supported by the upper case 12, a heat insulating member 26 such as a circular metal plate or glass plate supported by the heating means 25, a reflecting means 27 such as a cylindrical mirror or reflecting plate supported on the inner edge of the heat insulating member 26 and aligned along said inner edge, and a reflecting means 28 such as a cylindrical mirror or reflecting plate supported on the outer edge of the heat insulating member 26 and aligned along said outer edge. As shown by the two-dot chain line in the figure, the adhesive sheet AS may be deformed by the pressing means 10 and then heat may be applied to the adhesive sheet AS by the heating means 25, or heat may be applied to the adhesive sheet AS after it has been deformed by the pressing means 10 and attached to the adherend WK. The energy applying means 20 may apply heat simultaneously to the first application area AS1 and the second application area AS2 of the adhesive sheet AS by the first application area heating means 21A and the second application area heating means 21B, or may configure the heating means 21 by only one of the first application area heating means 21A and the second application area heating means 21B and apply heat to only one of the first application area AS1 and the second application area AS2 of the adhesive sheet AS, or may configure the heating means 21 by only one of the first application area heating means 21A and the second application area heating means 21B and apply heat to only one of the first application area AS1 and the second application area AS2 of the adhesive sheet AS. Without providing the regional heating means 21B, heat may be applied to the entire adhesive sheet AS by one or more heating means 21 simultaneously or with a time lag, or heat may be applied by blowing heated gas by heating means 21, 25 onto the adhesive sheet AS, or one or all of the reflecting means 22-24, 27, 28 may be omitted, and when the pressing means 10 uses a pressing member to press and attach the adhesive sheet AS to the adherend WK, heat may be applied to the adhesive sheet AS by heating the pressing member. If the adhesive sheet AS softens when cooled, the energy imparting means 20 may comprise, instead of the heating means 21, a cooling means such as a Peltier element or the cooling side of a heat pipe, and the adhesive sheet AS may be cooled by the cooling means to impart a predetermined amount of cooling energy to the adhesive sheet AS, or cooling energy may be imparted by blowing gas cooled by the cooling means onto the adhesive sheet AS, or, if the pressing means 10 uses a pressing member to press and attach the adhesive sheet AS to the adherend WK, cooling energy may be imparted to the adhesive sheet AS by cooling the pressing member. The energy application means 20 may be any type of energy that applies electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays or gamma rays as a predetermined energy that causes a specific change in the adhesive sheet AS, or that applies a heating medium such as hot water or hot air, or that applies a cooling medium such as cold water or cold air, and any configuration may be adopted taking into consideration the characteristics, properties, properties, material, composition and configuration of the adhesive sheet AS. The reflecting means 22 to 24, 27, and 28 may not be cylindrical (the outer periphery is not continuous), may be a square cylindrical shape, a frustum shape, or may have another shape. The change in the adhesive sheet AS specific to the predetermined energy may be any change such as softening, hardening, expansion, contraction, temperature change, discoloration, deterioration, dissolution, melting, oxidation, and the like.

[0020] The adhesive sheet AS does not have to be attached to the ring frame RF. The frame member may be a ring frame, but may also be non-annular (not connected at the outer periphery) or may be circular, elliptical, polygonal, or of other shapes.

[0021] The material, type, shape, etc. of the adhesive sheet AS and the adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS and the adherend WK may be circular, elliptical, polygonal such as a triangle or a rectangle, or other shapes, and the adhesive sheet AS may be pressure-sensitive, heat-sensitive, or other adhesive forms. When a heat-sensitive adhesive sheet AS is used, the adhesive sheet AS may be adhered by an appropriate method such as providing a heating means such as a suitable coil heater or the heating side of a heat pipe for heating the adhesive sheet AS. In addition, such an adhesive sheet AS may be, for example, a single layer of only an adhesive layer, a two-layered one in which a substrate and an adhesive layer are laminated, a three-layered one or more layers in which one or more intermediate layers are laminated between the substrate and the adhesive layer, a three-layered one or more layers in which one or more cover layers are laminated on the upper surface of the substrate, a substrate, an intermediate layer, or a cover layer is provided in a peelable manner, a double-sided adhesive sheet of a single layer consisting of only an adhesive layer, a double-sided adhesive sheet in which an adhesive layer is laminated on both outermost surfaces of one or more intermediate layers, etc. Furthermore, the adherend WK may be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, a ceramic plate, a wooden board, or a resin, or may be a composite formed of two or more of these, and may be any type of member or article, etc. The adhesive sheet AS may be, for example, any sheet, film, tape, etc., such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer-forming resin sheet, etc.

[0022] The driving equipment in the above-described embodiments may be electric equipment such as rotary motors, linear motors, single-axis robots, so-called multi-joint robots having joints on two or three or more axes, actuators such as air cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders, which may be used alone, or a direct or indirect combination of such electric equipment and actuators may be used, and electric equipment, actuators, etc. may or may not be capable of torque control or speed control for the output parts of such electric equipment, actuators, etc. may be used.

[0023] In the above embodiment, there is a certain object (hereinafter referred to as "object A") and an object (hereinafter referred to as "object B") that moves relative to object A. In other words, object A and object B that move relatively may be object B moving relative to object A that does not move, object A may move relative to object B that does not move, or both objects A and B may move. As long as the result achieved by the movement is the same, either object A or object B may move. When a rotating member such as a roller is used, a driving device that rotates the rotating member may be provided. The surface of the rotating member or the rotating member itself may be made of a deformable material such as rubber or resin, or the surface of the rotating member or the rotating member itself may be made of a non-deformable material. Alternatively, instead of the roller, a rotating or non-rotating shaft, blade, or other device may be used. In the case where a pressing means or pressing member such as a pressing roller or a pressing head is used to press the object to be pressed, a roller, a round bar, a blade material, a brush-like member, or a member that sprays air or gas may be used instead of or in combination with the above examples. The pressing means may be made of a deformable material such as rubber, resin, sponge, or may be made of an indeformable material such as metal or glass. In the case where a supporting (holding) means or a supporting (holding) member that supports (holds) a supported member (held member), a gripping means such as a mechanical chuck or a chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), pressure sensitive adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, driving equipment, or the like may be used to support (hold) the supported member. [Explanation of symbols]

[0024] EA…Sheet attachment device 10...Pressing means 20...Energy imparting means AS…adhesive sheet AS1: First attachment area AS2: Second attachment area WK...Adherent

Claims

1. a pressing means for deforming the adhesive sheet and pressing the adhesive sheet against an adherend to attach the adhesive sheet to the adherend; and an energy applying means for applying a predetermined energy to the adhesive sheet, the adhesive sheet undergoes a change specific to the given energy upon application of the given energy, The sheet sticking device, wherein the energy applying means applies the predetermined energy to the adhesive sheet after it has been deformed by the pressing means.

2. the adhesive sheet includes a first attachment region that is attached to the adherend first, and a second attachment region that is attached to the adherend after the first attachment region is attached to the adherend, 2. The sheet sticking device according to claim 1, wherein the energy applying means applies the predetermined energy to the first sticking area of ​​the adhesive sheet, and then applies the predetermined energy to the second sticking area of ​​the adhesive sheet.

3. a pressing step of deforming the adhesive sheet and pressing the adhesive sheet against an adherend to attach the adhesive sheet to the adherend; and an energy applying step of applying a predetermined energy to the adhesive sheet, the adhesive sheet undergoes a change specific to the given energy upon application of the given energy, A sheet adhering method, characterized in that in the energy applying step, the predetermined energy is applied to the adhesive sheet after the deformation caused by the pressing step.

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