Work-piece departure device and work-piece departure method

Abstract

To provide a work-piece departure device and a work-piece departure method, capable of suppressing the generation of a departure error while keeping an adhesion force of an adhesive material in a construction that makes a work-piece to departure from a layer of the adhesive material.SOLUTION: A work-piece departure device comprises: a support body holding plate 12 that holds a work-piece lamination body WP in which a support body P, an adhesive material C, and a work-piece W are laminated in this order from the support body P side; a work-piece holding plate 4 that holds the work-piece W from the side opposite to a boundary surface of the work-piece W and the adhesive material C; a departure assistant member 51 that includes a tip end part 53 that becomes a predetermined shape; a departure assistant mechanism 9 that peels at least one part of the work-piece W from the adhesive material C by inserting a tip end part 53 of the departure assistant member 51 to the boundary surface of the work-piece W and the adhesive material C; and an inclination departure mechanism 5 and a vertical departure mechanism 7 that separate the work-piece W from the support body holding plate 12.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a workpiece processing method and a workpiece processing apparatus for detaching a workpiece, for example a substrate or a semiconductor wafer (hereinafter referred to as "wafer"), from an adhesive material. [Background technology]

[0002] In recent years, in a process of mounting a semiconductor chip, for example an LED, on a film substrate, etc., a semiconductor chip formed along the surface of a work, for example a sapphire substrate, is transferred to a target support. In one example of such a transfer process, the semiconductor chip-forming surface of the work is opposed to a layer of adhesive material formed on one surface of the support, and the work and the support are pressed together. Through such a process, a work stack is formed in which the support, the adhesive material containing the semiconductor chip, and the work are stacked. In such a work stack, the chip transfer process is completed by detaching the work from the layer of adhesive material. In other words, the semiconductor chip transfer process is completed by separating the work stack into the work and the stack of adhesive material and support.

[0003] Conventionally, when a workpiece is to be detached from a layer of adhesive material, the following method has been used: the adhesive layer is subjected to a process such as heating to reduce the adhesive strength of the adhesive, and a Bernoulli chuck is brought close to the surface of the workpiece that is not in contact with the adhesive, and the workpiece is sucked and detached by Bernoulli's principle, thereby peeling the workpiece from the adhesive material (see Patent Document 1).

[0004] [Patent Document 1] JP 2005-116678 A DISCLOSURE OF THEINVENTION [Problem to be solved by the invention]

[0005] However, the above conventional method has the following problems. That is, in the process of mounting the chip, it is required to maintain high positional accuracy of the semiconductor chip. When the adhesive layer is subjected to a process such as heating as in Patent Document 1, the adhesive strength of the entire adhesive layer is reduced. As a result of the reduction in adhesive strength of the entire adhesive, the positional accuracy of the semiconductor chip included in the adhesive layer is reduced.

[0006] On the other hand, when the adhesive has a high adhesive strength in order to maintain the positional accuracy of the semiconductor chip in the adhesive layer, if the workpiece is moved in a direction away from the adhesive layer, the frequency of detachment errors increases due to the high adhesive strength of the adhesive. An example of a detachment error is a situation in which peeling occurs at the interface between the adhesive and the support or at the adhesive layer, causing the adhesive and the semiconductor chip to detach together with the workpiece. Another example of a detachment error is a situation in which peeling does not occur between the adhesive with high adhesive strength and the workpiece, making it impossible to separate the workpiece stack into the stack of adhesive and support and the workpiece.

[0007] The present invention has been made in consideration of the above circumstances, and has as its main object to provide a workpiece detachment device and a workpiece detachment method that can suppress the occurrence of detachment errors while maintaining the adhesive force of the adhesive in a configuration for detaching a workpiece from a layer of adhesive material. [Means for solving the problem]

[0008] In order to achieve the above object, the present invention has the following configuration. That is, the workpiece removal device according to the present invention includes a support holding mechanism that holds a workpiece stack in which a support, an adhesive material, and a workpiece are stacked in this order from the support side; a workpiece holding mechanism that holds the workpiece from an opposite side to an interface between the workpiece and the adhesive material; a work detachment mechanism that detaches the work from the adhesive material while the work stack is held by the support holding mechanism; Equipped with The workpiece detachment mechanism includes: A detachment assist member having a tip portion having a predetermined shape; an auxiliary member insertion mechanism that inserts the tip portion of the detachment auxiliary member into an interface between the workpiece and the adhesive material to detach at least a portion of the workpiece from the adhesive material; a separation mechanism that separates the workpiece holding mechanism, which is in a state of holding the workpiece, from the support body holding mechanism; The present invention is characterized by comprising:

[0009] (Action and Effect) According to this configuration, the work removal mechanism for removing the work from the adhesive in the work stack held by the support holding mechanism includes a removal auxiliary member, an auxiliary member insertion mechanism, and a separation mechanism. The removal auxiliary member has a tip portion with a predetermined shape. The auxiliary member insertion mechanism inserts the tip portion of the removal auxiliary member into the interface between the work and the adhesive. By inserting the tip portion of the removal auxiliary member into the interface between the work and the adhesive, a very high peeling force acts on the inserted portion. Therefore, even if the adhesive maintains a high adhesive force, a peeled portion can be generated at the interface between the adhesive and the work.

[0010] The separation mechanism separates the workpiece holding mechanism, which is holding the workpiece, from the support holding mechanism. At this time, at least a part of the interface between the workpiece and the adhesive is peeled off by the detachment assisting member, and this part functions as a peeling start part. That is, when the separation mechanism separates the workpiece, a peeling force is concentrated around the peeling start part that has already been peeled off. Therefore, the workpiece is gradually peeled off from the adhesive starting from the peeling start part formed by the detachment assisting member. As a result, even if the adhesive maintains a high adhesive force, the area of ​​the workpiece that is peeled off from the adhesive spreads radially from the peeling start part, and the entire workpiece can be easily peeled off from the adhesive.

[0011] In addition, since the peeling start portion is formed at the interface between the workpiece and the adhesive, the peeling portion tends to spread along the interface between the workpiece and the adhesive, which prevents the inside of the adhesive layer or the interface between the adhesive and the support from peeling off, causing a part of the adhesive to adhere to the workpiece.

[0012] In addition, in the above-mentioned invention, it is preferable that the separation mechanism includes a vertical detachment mechanism that separates the work holding mechanism in a direction perpendicular to a holding surface on which the support holding mechanism holds the work stack, and the work removal mechanism includes a detachment control mechanism that controls the vertical detachment mechanism and the auxiliary member insertion mechanism, and that the detachment control mechanism starts operation of the vertical detachment mechanism after the auxiliary member insertion mechanism has started an operation of inserting the tip end of the detachment auxiliary member into the interface between the workpiece and the adhesive material.

[0013] (Action and Effect) According to this configuration, the work detachment mechanism includes a vertical detachment mechanism and a detachment control mechanism. The vertical detachment mechanism separates the work holding mechanism in a direction perpendicular to the holding surface on which the support holding mechanism holds the work stack. The detachment control mechanism starts the operation of the vertical detachment mechanism after starting the operation of inserting the detachment auxiliary member into the interface between the work and the adhesive. In this case, the insertion of the detachment auxiliary member is performed before the operation of the vertical detachment mechanism. Therefore, at the time when the work is separated by the vertical detachment mechanism, at least a part of the interface between the work and the adhesive has already been peeled off by the detachment auxiliary member. Therefore, the peeling force acting on the interface between the work and the adhesive by the vertical detachment mechanism is concentrated on the part that has already been peeled off. As a result, even if the adhesive maintains a high adhesive force, the two can be peeled off more accurately over the entire interface between the work and the adhesive.

[0014] In addition, in the above-mentioned invention, it is preferable that the separation mechanism includes a vertical detachment mechanism that separates the work holding mechanism in a direction perpendicular to a holding surface on which the support holding mechanism holds the work stack, and the work removal mechanism includes a detachment control mechanism that controls the vertical detachment mechanism and the auxiliary member insertion mechanism, and that the detachment control mechanism causes the auxiliary member insertion mechanism to insert the tip of the detachment auxiliary member into the interface between the work and the adhesive after operation by the vertical detachment mechanism has begun.

[0015] (Action and Effect) According to this configuration, the work detachment mechanism includes a vertical detachment mechanism and a detachment control mechanism. The vertical detachment mechanism separates the work holding mechanism in a direction perpendicular to the holding surface on which the support holding mechanism holds the work stack. The detachment control mechanism starts an operation of inserting the detachment auxiliary member into the interface between the work and the adhesive material after the vertical detachment mechanism starts its operation. In this case, the adhesive layer is pulled up in a direction perpendicular to the holding surface of the support holding mechanism by the operation of the vertical detachment mechanism, thereby reducing the density of the adhesive material at the interface between the work and the adhesive material. Therefore, when the detachment auxiliary member is inserted into the interface between the work and the adhesive material, the inserted portion can be peeled off more reliably.

[0016] In addition, in the above-mentioned invention, the separation mechanism is provided with a tilting detachment mechanism that separates the work holding mechanism from the support holding mechanism so that one side of the work holding mechanism is spaced from the support holding mechanism by a larger distance than the other side of the work holding mechanism, and the work removal mechanism is provided with a detachment control mechanism that controls the tilting detachment mechanism and the auxiliary member insertion mechanism, and it is preferable that the detachment control mechanism starts operation by the tilting detachment mechanism after operation by the auxiliary member insertion mechanism has begun.

[0017] (Function and Effect) According to this configuration, the work detachment mechanism includes a tilt detachment mechanism and a detachment control mechanism. The tilt detachment mechanism separates the work holding mechanism from the support holding mechanism so that one side of the work holding mechanism is separated from the support holding mechanism by a larger distance than the other side of the work holding mechanism. The detachment control mechanism starts the operation of the tilt detachment mechanism after starting the operation of inserting the detachment auxiliary member into the interface between the work and the adhesive. In this case, the insertion of the detachment auxiliary member is performed before the operation of the tilt detachment mechanism. Therefore, at the time when the work is separated by the tilt detachment mechanism, at least a part of the interface between the work and the adhesive has already been peeled off by the detachment auxiliary member. Therefore, the peeling force acting on the interface between the work and the adhesive by the tilt detachment mechanism is concentrated on the part that has already been peeled off. As a result, even if the adhesive maintains a high adhesive force, the two can be peeled off more accurately over the entire interface between the work and the adhesive.

[0018] In addition, in the above-mentioned invention, the separation mechanism comprises a vertical release mechanism which separates the work holding mechanism in a direction perpendicular to a holding surface on which the support holding mechanism holds the work stack, and a tilt release mechanism which separates the work holding mechanism from the support holding mechanism so that the separation distance between one side of the work holding mechanism and the support holding mechanism is greater than the other side of the work holding mechanism, and the work release mechanism comprises a release control mechanism which controls the vertical release mechanism, the tilt release mechanism, and the auxiliary member insertion mechanism, and it is preferable that the release control mechanism starts operation by the auxiliary member insertion mechanism after operation by the tilt release mechanism has started, and further starts operation by the vertical release mechanism after operation by the auxiliary member insertion mechanism has started.

[0019] (Action and Effect) According to this configuration, the work detachment mechanism includes a tilt detachment mechanism and a detachment control mechanism. The tilt detachment mechanism separates the work holding mechanism from the support holding mechanism so that one side of the work holding mechanism is separated from the support holding mechanism by a larger distance than the other side of the work holding mechanism. The detachment control mechanism starts an operation of inserting the detachment auxiliary member into the interface between the work and the adhesive material after the tilt detachment mechanism starts its operation. In this case, when the work is separated by the operation of the tilt detachment mechanism, the layer of adhesive material is also pulled up in the direction of separation together with the work. Therefore, the density of the adhesive material at the interface between the work and the adhesive material is reduced. Therefore, when the detachment auxiliary member is inserted into the interface between the work and the adhesive material, the inserted portion can be peeled off more reliably.

[0020] In addition, in the above-mentioned invention, the separation mechanism comprises a vertical release mechanism which separates the work holding mechanism in a direction perpendicular to a holding surface on which the support holding mechanism holds the work stack, and a tilt release mechanism which separates the work holding mechanism from the support holding mechanism so that the separation distance between one side of the work holding mechanism and the support holding mechanism is greater than the other side of the work holding mechanism, and the work release mechanism comprises a release control mechanism which controls the vertical release mechanism, the tilt release mechanism, and the auxiliary member insertion mechanism, and it is preferable that the release control mechanism starts operation by the tilt release mechanism after operation by the auxiliary member insertion mechanism has started, and further starts operation by the vertical release mechanism after operation by the tilt release mechanism has started.

[0021] (Function and Effect) According to this configuration, the workpiece detachment mechanism includes the tilt detachment mechanism, the vertical detachment mechanism, and the detachment control mechanism. The detachment control mechanism starts the operation of the tilt detachment mechanism after the operation of the auxiliary member insertion mechanism starts, and further starts the operation of the vertical detachment mechanism after the operation of the tilt detachment mechanism starts.

[0022] In this case, at the time when the workpiece is separated by the tilt release mechanism, at least a part of the interface between the workpiece and the adhesive has already been peeled off by the release assist member. Therefore, the peeling force acting on the interface between the workpiece and the adhesive by the tilt release mechanism is concentrated on the part that has already been peeled off. As a result, even if the adhesive maintains a high adhesive force, the workpiece and the adhesive can be peeled off more accurately over the entire interface between the workpiece and the adhesive. In addition, the tilt release mechanism separates the workpiece holding mechanism from the support holding mechanism so that the separation distance between one side of the workpiece holding mechanism and the support holding mechanism is greater than the other side of the workpiece holding mechanism. Therefore, by increasing the separation distance in the part that has already been peeled off by the release assist member, the peeling force acting on the part that has already been peeled off by the release assist member can be further increased. Therefore, the peeling portion can be expanded more accurately along the interface between the workpiece and the adhesive starting from the peel start portion.

[0023] Then, after the inclined release mechanism starts its operation, the vertical release mechanism starts its operation. The vertical release mechanism separates the workpiece holding mechanism in a direction perpendicular to the holding surface on which the support holding mechanism holds the workpiece stack, so that the entire workpiece moves in a direction away from the holding surface of the support holding mechanism. As a result, the workpiece can be released from the adhesive material while being maintained in a more stable position.

[0024] In addition, in the above-mentioned invention, the separation mechanism comprises a vertical release mechanism which separates the work holding mechanism in a direction perpendicular to a holding surface on which the support holding mechanism holds the work stack, and a tilt release mechanism which separates the work holding mechanism from the support holding mechanism so that the separation distance between one side of the work holding mechanism and the support holding mechanism is greater than the other side of the work holding mechanism, and the work release mechanism comprises a release control mechanism which controls the vertical release mechanism, the tilt release mechanism, and the auxiliary member insertion mechanism, and it is preferable that the release control mechanism starts operation by the auxiliary member insertion mechanism after operation by the tilt release mechanism has started, and further starts operation by the vertical release mechanism after operation by the auxiliary member insertion mechanism has started.

[0025] (Function and Effect) According to this configuration, the workpiece detachment mechanism includes the tilt detachment mechanism, the vertical detachment mechanism, and the detachment control mechanism. The detachment control mechanism starts the operation of the auxiliary member insertion mechanism after the operation of the tilt detachment mechanism starts, and starts the operation of the vertical detachment mechanism after the operation of the auxiliary member insertion mechanism starts.

[0026] In this case, when the workpiece is separated by the operation of the tilt release mechanism, the layer of the adhesive is also pulled up in the direction of separation together with the workpiece. Therefore, the density of the adhesive is reduced at the interface between the workpiece and the adhesive. Therefore, when the release assist member is inserted into the interface between the workpiece and the adhesive, the inserted portion can be more reliably peeled off. The workpiece and the adhesive can be more accurately peeled off over the entire interface between the workpiece and the adhesive. In addition, the tilt release mechanism separates the workpiece holding mechanism from the support holding mechanism such that one side of the workpiece holding mechanism is spaced from the support holding mechanism by a larger distance than the other side of the workpiece holding mechanism. Therefore, by increasing the distance on the side where the release assist member is inserted, the release assist member can be inserted with greater precision.

[0027] Then, after the start of the operation of inserting the detachment auxiliary member, the operation of the vertical detachment mechanism is started. The vertical detachment mechanism separates the workpiece holding mechanism in a direction perpendicular to the holding surface on which the support holding mechanism holds the workpiece stack, so that the entire workpiece moves in a direction away from the holding surface of the support holding mechanism. As a result, the workpiece can be detached from the adhesive material while being maintained in a more stable position.

[0028] In addition, in the above-mentioned invention, it is preferable that the workpiece has a shape that includes a corner, and a rotation mechanism is provided that rotates the support holding mechanism holding the workpiece stack so that the corner of the workpiece faces the tip of the detachment auxiliary member, and the auxiliary member insertion mechanism inserts the tip of the detachment auxiliary member into the interface between the corner of the workpiece and the adhesive material, and peels off at least a part of the workpiece from the adhesive, when the rotation mechanism has rotated the support holding mechanism so that the corner of the work faces the tip of the detachment auxiliary member, and the tilt detachment mechanism separates the workpiece holding mechanism from the support holding mechanism so that one side of the workpiece holding the corner of the workpiece is spaced apart from the support holding mechanism by a larger distance than the other side of the work holding mechanism.

[0029] (Function and Effect) According to this configuration, the workpiece has a shape with a corner, and a rotation mechanism is provided that rotates the support holding mechanism that holds the workpiece stack. Then, in a state in which the rotation mechanism rotates the support holding mechanism so that the corner of the workpiece faces the tip of the detachment auxiliary member, the tip of the detachment auxiliary member is inserted into the interface between the corner of the workpiece and the adhesive material. Then, the tilt detachment mechanism separates the workpiece holding mechanism from the support holding mechanism so that one side of the workpiece holding mechanism that holds the corner of the workpiece is separated from the support holding mechanism by a larger distance than the other side of the workpiece holding mechanism.

[0030] In this configuration, the corner of the workpiece and the tip of the detachment assisting member are opposed to each other, so that the tip of the detachment assisting member can be inserted into the interface between the corner of the workpiece and the adhesive. By inserting the detachment assisting member into the interface between the corner of the workpiece and the adhesive, the workpiece is detached from the adhesive at the corner of the workpiece to form a detachment start portion. Here, the tilt detachment mechanism separates the workpiece holding mechanism so that the side of the workpiece holding mechanism that holds the corner of the workpiece has a larger separation distance between the support holding mechanism and the work holding mechanism, so that the peeling force is more likely to concentrate on the corner of the workpiece where the detachment start portion is formed. As a result, even if the adhesive maintains a high adhesive force, the workpiece can be more easily and quickly detached from the adhesive over the entire interface between the workpiece and the adhesive.

[0031] In the above-described invention, it is preferable that the distance by which the auxiliary member insertion mechanism inserts the detachment auxiliary member into the interface between the workpiece and the adhesive material is ¼ or less of the length of the workpiece in the insertion direction of the detachment auxiliary member.

[0032] (Function and Effect) According to this configuration, it is possible to prevent the separation of the portion other than the interface between the workpiece and the adhesive material caused by the excessive insertion distance of the detachment assist member, and therefore it is possible to more accurately detach the workpiece from the adhesive material.

[0033] In the above-mentioned invention, it is preferable that a plurality of the detachment auxiliary members are provided, and each of the plurality of the detachment auxiliary members is inserted at a different position on the interface between the workpiece and the adhesive material.

[0034] (Action and Effect) According to this configuration, each of the multiple detachment assisting members is inserted at a different position at the interface between the workpiece and the adhesive. That is, since the detachment assisting members are inserted at multiple parts at the interface between the workpiece and the adhesive, multiple peel start parts are formed. Then, when the separating mechanism separates the workpiece together with the work holding mechanism, the part where the workpiece and the adhesive are separated spreads radially from each of the multiple peel start parts. Therefore, it is possible to more quickly and reliably separate the adhesive from the entire surface of the workpiece.

[0035] In order to achieve the above object, the present invention may have the following configuration. That is, the workpiece detachment method according to the present invention includes a support holding process in which a workpiece stack in which a support, an adhesive material, and a workpiece are stacked in this order is held from the support side by a support holding mechanism; a work holding process in which the work is held by a work holding mechanism from an opposite side of an interface between the work and the adhesive material; a work detachment process of detaching the work from the adhesive material while the work stack is held by the support holding mechanism; Equipped with The workpiece removal process includes: an auxiliary member insertion process in which a tip end of a detachment auxiliary member having a predetermined shape is inserted into an interface between the workpiece and the adhesive material to detach at least a portion of the workpiece from the adhesive material; a separating process of separating the workpiece holding mechanism, which is in a state of holding the workpiece, from the support body holding mechanism; The present invention is characterized by comprising:

[0036] (Action and Effect) According to this configuration, in the workpiece removal process in which the workpiece is removed from the adhesive in the workpiece stack held by the support holding mechanism, an auxiliary member insertion process and a separation mechanism process are performed. In the auxiliary member insertion process, the tip of the removal auxiliary member is inserted into the interface between the workpiece and the adhesive. By inserting the tip of the removal auxiliary member into the interface between the workpiece and the adhesive, a very high peeling force acts on the inserted portion. Therefore, even if the adhesive maintains a high adhesive force, a peeled portion can be generated at the interface between the adhesive and the workpiece.

[0037] In the separation process, the workpiece holding mechanism, which is holding the workpiece, is separated from the support holding mechanism. At this time, at least a part of the interface between the workpiece and the adhesive is peeled off by the detachment assisting member, and this part functions as a peeling start part. That is, when the separation mechanism separates the workpiece, the peeling force is concentrated around the peeling start part that has already been peeled off. Therefore, the workpiece is gradually peeled off from the adhesive starting from the peeling start part formed by the detachment assisting member. As a result, even if the adhesive maintains a high adhesive force, the area of ​​the workpiece that is peeled off from the adhesive spreads radially from the peeling start part, and the entire workpiece can be easily peeled off from the adhesive.

[0038] In addition, since the peeling start portion is formed at the interface between the workpiece and the adhesive, the peeling portion tends to spread along the interface between the workpiece and the adhesive. As a result, it is possible to prevent the inside of the adhesive layer or the interface between the adhesive and the support from peeling off, causing a part of the adhesive to adhere to the workpiece. Effect of the Invention

[0039] According to the work detachment device and work detachment method of the present invention, a work detachment mechanism for detaching a work from an adhesive in a work stack held by a support holding mechanism includes a detachment auxiliary member, an auxiliary member insertion mechanism, and a separation mechanism. The detachment auxiliary member has a tip portion with a predetermined shape. The auxiliary member insertion mechanism inserts the tip portion of the detachment auxiliary member into the interface between the work and the adhesive. By inserting the tip portion of the detachment auxiliary member into the interface between the work and the adhesive, a very high peeling force acts on the inserted portion. Therefore, even if the adhesive maintains a high adhesive force, a peeled portion can be generated at the interface between the adhesive and the work.

[0040] The separation mechanism separates the workpiece holding mechanism, which is holding the workpiece, from the support holding mechanism. At this time, at least a part of the interface between the workpiece and the adhesive is peeled off by the detachment assisting member, and this part functions as a peeling start part. That is, when the separation mechanism separates the workpiece, a peeling force is concentrated around the peeling start part that has already been peeled off. Therefore, the workpiece is gradually peeled off from the adhesive starting from the peeling start part formed by the detachment assisting member. As a result, even if the adhesive maintains a high adhesive force, the area of ​​the workpiece that is peeled off from the adhesive spreads radially from the peeling start part, and the entire workpiece can be easily peeled off from the adhesive.

[0041] In addition, since the peeling start portion is formed at the interface between the workpiece and the adhesive, the peeling portion tends to spread along the interface between the workpiece and the adhesive. As a result, it is possible to prevent the inside of the adhesive layer or the interface between the adhesive and the support from peeling off, causing a part of the adhesive to adhere to the workpiece. In other words, in a configuration in which the workpiece is detached from the adhesive layer, it is possible to suppress the occurrence of detachment errors while maintaining the adhesive force of the adhesive. [Brief description of the drawings]

[0042] [Figure 1] 1 is a front view showing an overall configuration of a workpiece removal device according to a first embodiment. FIG. [Diagram 2]1A and 1B are diagrams illustrating a workpiece stack according to Example 1, in which (a) is a vertical cross-sectional view showing the configuration of the workpiece stack, and (b) is a diagram showing an example of a process for producing the workpiece stack. [Diagram 3] FIG. 2 is a front view illustrating a main part of the workpiece removing device according to the first embodiment. [Figure 4] FIG. 2 is a right side view illustrating a main part of the workpiece separating device according to the first embodiment. [Diagram 5] FIG. 2 is a left side view illustrating a main part of the workpiece separating device according to the first embodiment. [Figure 6] 1A and 1B are diagrams for explaining a tilt release mechanism according to Example 1. FIG. 1A is a diagram showing an initial state in which the tilt release mechanism is not in operation, and FIG. 1B is a diagram showing a state in which the tilt release mechanism is in operation and the tilt plate is inclined. [Figure 7] FIG. 2 is a front view illustrating the configuration of a detachment assistance mechanism according to the first embodiment. [Figure 8] 4 is a flowchart illustrating steps in the workpiece removal device according to the first embodiment. [Figure 9] FIG. 4 is a diagram for explaining step S1 according to the first embodiment. [Figure 10] FIG. 11 is a diagram for explaining step S2 according to the first embodiment. [Figure 11] FIG. 11 is a diagram for explaining step S3 according to the first embodiment. [Figure 12] FIG. 11 is a diagram for explaining step S4 according to the first embodiment. [Figure 13] FIG. 11 is a diagram for explaining step S4 according to the first embodiment. [Figure 14] FIG. 11 is a diagram for explaining step S5 according to the first embodiment. [Figure 15] FIG. 11 is a diagram for explaining step S5 according to the first embodiment. [Figure 16] FIG. 11 is a front view for explaining the configuration of the workpiece removing device according to the second embodiment. [Figure 17] FIG. 11 is a plan view illustrating a workpiece according to a second embodiment. [Figure 18] 10 is a flowchart illustrating steps in the workpiece removal device according to the second embodiment. [Figure 19] 11A and 11B are diagrams illustrating step S2 according to Example 2. (a) is a plan view showing the positional relationship between the workpiece and the detachment assisting member before rotation, and (b) is a plan view showing the positional relationship between the workpiece and the detachment assisting member after rotation. [Figure 20] FIG. 11 is a diagram for explaining step S4 according to the second embodiment. [Figure 21] FIG. 11 is a diagram for explaining step S5 according to the second embodiment. [Figure 22] 1A and 1B are diagrams illustrating the effect of Example 2. (a) is a plan view showing the positional relationship between a workpiece and a detachment assisting member in a comparative example, and (b) is a plan view showing the positional relationship between the workpiece and the detachment assisting member in Example 2. [Figure 23] FIG. 11 is a front view for explaining the configuration of the workpiece removing device according to the third embodiment. [Figure 24] 10 is a flowchart illustrating steps in the workpiece removal device according to the third embodiment. [Diagram 25] FIG. 11 is a diagram for explaining step S3 according to the third embodiment. [Figure 26] FIG. 11 is a diagram for explaining step S3 according to the third embodiment. [Figure 27] FIG. 11 is a diagram for explaining step S4 according to the third embodiment. [Figure 28] FIG. 11 is a front view for explaining the configuration of the workpiece removing device according to the fourth embodiment. [Figure 29] 10 is a flowchart illustrating steps in the workpiece removal device according to the fourth embodiment. [Diagram 30] FIG. 11 is a diagram for explaining step S3 according to the third embodiment. [Diagram 31] FIG. 11 is a diagram for explaining step S4 according to the third embodiment. [Diagram 32] FIG. 11 is a diagram for explaining step S4 according to the third embodiment. [Diagram 33] 4 is a time chart illustrating steps according to the first embodiment and a modification of the first embodiment. [Diagram 34] 13 is a time chart illustrating steps according to the third embodiment and a modification example. [Diagram 35]13 is a time chart illustrating steps according to the fourth embodiment and a modification thereof. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS EXAMPLES

[0043] A first embodiment of the present invention will be described below with reference to the drawings. As shown in Fig. 1, the workpiece removal device 1 according to the first embodiment includes a stack support mechanism 3, a workpiece holding plate 4, an inclined removal mechanism 5, a vertical removal mechanism 7, a removal assistance mechanism 9, a vacuum device 13, a control unit 14, and an input unit 15. As shown in Fig. 1, the stack support mechanism 3 supports the workpiece stack WP. The left-right direction of the workpiece removal device 1 is defined as the x-direction, the front-rear direction is defined as the y-direction, and the up-down direction is defined as the z-direction.

[0044] <Explanation of workpiece stack> Here, the workpiece stack WP will be described. Fig. 2(a) is a vertical cross-sectional view showing the structure of the workpiece stack WP. The workpiece stack WP has a structure in which a support P, an adhesive material C, and a workpiece W are stacked in this order from the bottom.

[0045] The support P is a plate-shaped member, and examples thereof include a sapphire substrate or a resin substrate, etc. Specific examples of the constituent material of the support P include metals such as aluminum or iron, inorganic solid materials such as ceramics, sapphire, glass, silicon, silicon carbide, silicon carbide, gallium nitride, gallium oxide, and resins such as epoxy resins or phenolic resins.

[0046] The adhesive C is formed on one surface (here, the upper surface) of the support P and has adhesive power. In the first embodiment, the elements EL are embedded in the adhesive C in a two-dimensional matrix. An example of the elements EL is a semiconductor chip. Examples of materials constituting the adhesive C include organic synthetic resins such as adhesive epoxy resin, acrylic resin, phenolic resin, polyester resin, and polyimide resin. Hereinafter, the laminate of the adhesive C and the support P will be referred to as the "support laminate SP."

[0047] The workpiece W is a plate-like member similar to the support P, and examples thereof include a sapphire substrate or a glass substrate. Specific examples of the material of the workpiece W include sapphire, glass, silicon, silicon carbide, silicon carbide, gallium nitride, gallium oxide, and resins such as epoxy resins or phenolic resins. In addition, rigid bodies are used as the support P and the workpiece W.

[0048] An example of a process for producing the workpiece stack WP is shown in Fig. 2(b). First, a support stack SP is produced by applying a liquid adhesive C to the upper surface of the support P and drying it, or by attaching a sheet-like adhesive C to the upper surface of the support P. Then, a workpiece W having an element EL mounted on its underside is placed facing the adhesive C of the support stack SP. Finally, the workpiece W is pressed against the adhesive C, and the element EL is mounted on the support P via the adhesive C, forming the workpiece stack WP.

[0049] The workpiece removing device 1 is intended to remove the workpieces W from the adhesive material C in the workpiece stack WP, i.e., to remove the workpieces W from the supporting stack SP. For the sake of convenience, in the following drawings, the elements EL in the adhesive material C are omitted.

[0050] <Explanation of overall configuration> As shown in Figures 1 and 3, the stack support mechanism 3 includes a support table 11 and a support holding plate 12. The support table 11 is disposed on the base 6 of the workpiece removing device 1, and supports the workpiece stack WP via the support holding plate 12. Support columns 8 are erected at the four corners of the base 6. A top plate 10 is horizontally supported on the upper ends of the support columns 8.

[0051] The support holding plate 12 is placed on the upper surface of the support table 9. Suction holes are provided on the upper surface of the support holding plate 12, and the support holding plate 12 is connected to a vacuum device 13 via the suction holes. When the vacuum device 13 is activated, the support holding plate 12 is configured to vacuum-suck and hold the support P side of the workpiece stack WP. The operation of the vacuum device 13 is controlled by a control unit 14.

[0052] The control unit 14 includes a CPU (Central Processing Unit) and the like, and controls various operations of each of the components provided in the workpiece removing device 1. The input unit 15 inputs various instructions from an operator or the like. The instructions input to the input unit 15 are transmitted to the control unit 14, and the control unit 14 can perform various controls in accordance with the instructions. Examples of the input unit 15 include a console panel and a keyboard.

[0053] The work holding plate 4 holds the work W. The work holding plate 4 is disposed above the support body holding plate 12. Suction holes are provided on the underside of the work holding plate 4, and the work holding plate 4 is connected to a vacuum device 13 via the suction holes. When the vacuum device 13 is activated, the work holding plate 4 is configured to hold the work W side of the work stack WP by vacuum suction.

[0054] The work detachment device 1 also includes a stack storage mechanism, a stack transport mechanism, a work storage mechanism, and a work transport mechanism, all of which are not shown. The stack storage mechanism stores the work stack WP, and is, for example, a cassette that stores the work stack WP in multiple stages. The stack transport mechanism transports the work stack WP from the stack storage mechanism to the stack support mechanism 3, and is, for example, a horseshoe-shaped suction arm that adsorbs and holds the work stack WP. The work storage mechanism stores the work W that has been detached from the adhesive material C, and is, for example, a cassette that stores the work W in multiple stages. The work transport mechanism transports the work W that has been detached from the adhesive material C from the stack support mechanism 3 to the work storage mechanism, and is, for example, a horseshoe-shaped suction arm that adsorbs and holds the work W.

[0055] <Configuration of tilt release mechanism> The tilt release mechanism 5 includes a tilt plate 17 and a cam 19. The tilt plate 17 is a plate-like member made of metal or the like, and supports the workpiece holding plate 4 by suspending it. As shown in FIG. 1 and FIG. 3, a rotating shaft 21 is attached to one end side (the right side in the figure) of the tilt plate 17. As shown in FIG. 4, the rotating shaft 21 extends in the y direction and is connected to a motor 25. The rotating shaft 21 is configured to rotate around an axis in the y direction by the rotation of the motor 25. Since the tilt plate 17 is fixed to the rotating shaft 21, the tilt plate 17 pivots about the rotating shaft 21 when the rotating shaft 21 rotates. Note that the position of the rotating shaft 21 in the tilt release mechanism 5 is adjusted in advance so that the height of the interface between the workpiece W and the adhesive C is equal to the height of the rotation center of the rotating shaft 21 when the workpiece stack WP is held by the support holding plate 12 and the workpiece holding plate 4.

[0056] As shown in Figs. 1 and 3, the cam 19 is disposed on the upper surface of the other end side (the left side in the figures) of the inclined plate 17. A rotating shaft 23 is attached to the cam 19. As shown in Fig. 5, the rotating shaft 23 extends in the y direction and is connected to a motor 27. The rotating shaft 23 is configured to rotate about an axis in the y direction by the rotation of the motor 27. The position of the rotating shaft 23 in the xz plane is fixed, and the cam 19 is fixed to the rotating shaft 23. Therefore, when the rotating shaft 23 rotates, the cam 19 rotates together with the rotating shaft.

[0057] The other end of the inclined plate 17 on which the cam 19 is disposed is biased upward by an electric cylinder (not shown) or the like. In the initial state shown in Figures 1 and 3, the cam 19 is disposed so that the nose portion 19A abuts against the upper surface of the inclined plate 17, and the distance from the center of the rotation shaft 23 to the inclined plate 17 is maximized. That is, in the initial state, the force with which the cam 19 presses down on the other end of the inclined plate 17, which is biased upward, is maximized.

[0058] Fig. 6(a) is a diagram showing the initial state of the tilted release mechanism 5. In the workpiece release device 1 according to the first embodiment, the positions of the tilted plate 17 and the cam 19 are adjusted in advance so that the tilted plate 17 is in a horizontal state when the nose portion 19A abuts against the tilted plate 17. In this initial state, the rotating shaft 21 is not rotating, and the nose portion 19A of the cam 19 abuts against the tilted plate 17 to press down the tilted plate 17. As a result, the tilted plate 17 and the workpiece holding plate 4 are in a horizontal state as a whole. In Fig. 6(a), the horizontal plane is indicated by a dotted line marked with the symbol FL.

[0059] 6(b) is a diagram showing a state in which the tilt release mechanism 5 is activated. When the tilt release mechanism 5 is activated, the rotating shaft 21 rotates clockwise and the rotating shaft 23 also rotates around an axis in the y direction. The rotating shaft 21 provided at the right end of the tilt plate 17 rotates clockwise, causing the tilt plate 17 to pivot about the rotating shaft 21. As a result, the distance by which the left end side of the tilt plate 17 rises is greater than the distance by which the right end side of the tilt plate 17 rises.

[0060] Furthermore, the cam 19 rotates together with the pivot shaft 23, so that the portion of the cam 19 that contacts the inclined plate 17 changes. That is, the nose portion 19A of the cam 19 moves away from the inclined plate 17, so that the force with which the cam 19 presses down the inclined plate 17 decreases. As a result, the biasing force of the inclined plate 17 exceeds the pressing force of the cam 19, so that the inclined plate 17 is inclined such that the left end side is higher than the right end side. The work holding plate 4 supported by the inclined plate 17 is also inclined in the same manner. In this way, the tilt release mechanism 5 is actuated, so that the work holding plate 4 that holds the workpiece W is displaced from the horizontal state shown in FIG. 6(a) to the inclined state shown in FIG. 6(b).

[0061] In this way, the tilt release mechanism 5 displaces the work holding plate 4 to an inclined state, thereby separating the work holding plate 4 from the support body holding plate 12 so that the distance between one side of the work holding plate 4 and the support body holding plate 12 is greater than the other side.

[0062] <Configuration of vertical release mechanism> The vertical release mechanism 7 separates the workpiece holding plate 4 in a vertical direction from the holding surface of the support holding plate 12. As shown in FIG. 3 and other figures, the vertical release mechanism 7 includes a horizontal plate 29 and an electric cylinder 31. The horizontal plate 29 is disposed above the inclined plate 17 and is connected to a rod portion 35 of the electric cylinder 31 via a linear guide 33. A support member 37 is disposed on one end side (the right end side in the figure) of the horizontal plate 29. The support member 37 extends downward from one end side of the horizontal plate 29 and is supported by the rotating shaft 21 of the inclined plate 17. The inclined plate 17 is fixed to the rotating shaft 21, while the support member 37 is configured not to be fixed to the rotating shaft 21. Therefore, when the rotating shaft 21 rotates, the support member 37 maintains a vertical state. As a result, as shown in FIG. 6(b), the inclined plate 17 rotates together with the rotating shaft 21 around the axis in the y direction to become inclined, while the support member 37 and the horizontal plate 29 maintain a horizontal state without rotating.

[0063] The electric cylinder 31 is disposed on the tabletop 10. A through hole extending in the z direction is provided in the tabletop 10, and a rod portion 35 of the electric cylinder 31 extends downward through the through hole. The electric cylinder 31 has a built-in motor and ball screw (not shown), and the height of the rod portion 35 is controlled by increasing or decreasing the amount that the ball screw protrudes in the z direction as the motor rotates. The rod portion 35 is connected to the horizontal plate 29 via a linear guide 33, so that when the rod portion 35 moves up and down due to the operation of the electric cylinder 31, the horizontal plate 29 moves up and down synchronously while maintaining a horizontal state.

[0064] In addition, the rod portion 35 protruding from the electric cylinder 31 supports the inclined plate 17 in a suspended state via a link member 39. The link member 39 is, for example, a rectangular plate-like member, and is supported by support shafts 40 and 41, respectively. Since the support shafts 40 and 41 are not fixed to the link member 39, when the inclined plate 17 changes from a horizontal state to an inclined state, the link member 39 swings appropriately around the support shaft 40 in response to the displacement of the support shaft 41. By swinging the link member 39, the horizontal plate 29 is maintained in a horizontal state even when the inclined plate 17 is inclined.

[0065] <Configuration of release assistance mechanism> 7, the removal assistance mechanism 9 includes a base 43, a vertical rail 44, a lifting platform 45, a support platform 47, an electric slider 49, and a removal assistance member 51. The base 43 is a box-shaped member, and the vertical rail 44 is disposed on the side of the base 43 so as to extend in the z direction. The lifting platform 45 is supported on the base 43 via the vertical rail 44 so as to be able to slide up and down. The lifting platform 45 is raised and lowered by a ball shaft that is connected and driven by a motor (not shown).

[0066] The support base 47 is mounted on the lift base 45, and the support base 47 moves up and down in accordance with the operation of the lift base 45. An electric slider 49 is supported on the upper surface of the support base 47 so as to be horizontally movable in the x direction. The electric slider 49 is connected to a motor (not shown) and a ball shaft (not shown) that is coupled and driven by the motor. The ball shaft is appropriately protruded by the motor, thereby controlling the position of the electric slider 49 in the horizontal direction.

[0067] The detachment auxiliary member 51 is mounted on the upper surface of the electric slider 49. The detachment auxiliary member 51 is a plate-shaped member as a whole, and has a tip portion 53 having a sharp shape. The detachment auxiliary member 51 is arranged so that the tip portion 53 faces the stack support mechanism 3. The detachment auxiliary member 51 is configured to be movable in the vertical direction (z direction) by the vertical movement of the lifting platform 45. The detachment auxiliary member 51 is also configured to be movable in the horizontal direction with the horizontal movement of the electric slider 49. The detachment auxiliary member 51 appropriately moves vertically and horizontally to insert the tip portion 53 into the interface between the workpiece W and the adhesive material C in the workpiece stack WP placed on the stack support mechanism 3. The operation of each component that moves the detachment auxiliary member 51, such as the lifting platform 45 and the electric slider 49, is centrally controlled by the control unit 14.

[0068] <Overview of operation> A series of operations for releasing the workpiece W using the workpiece releasing device 1 according to the first embodiment will now be described with reference to the flowchart shown in Fig. 8. At the start of the operation for releasing the workpiece W, the inclined release mechanism 5 and the vertical release mechanism 7 are in their initial states, and the workpiece holding plate 4 and the horizontal plate 29 are maintained in their horizontal states.

[0069] Step S1 (Placement of work stack) When an instruction to remove the workpieces W is input using the input unit 15 or the like, first the workpiece stack WP is placed on the stack support mechanism 3 by the stack transport mechanism. That is, the workpiece stack WP stored in the stack storage mechanism (not shown) is carried out by the stack transport mechanism (not shown) and transported to the stack support mechanism 3. Then, the workpiece stack WP is placed on the holding surface of the support body holding plate 12 in the stack support mechanism 3 with the support body P facing downward.

[0070] When the workpiece stack WP is placed on the support holding plate 12, the control unit 14 operates the vacuum device 13 to hold the supports P. That is, by operating the vacuum device 13, the support holding plate 12 adsorbs and holds the lower surface of the supports P in the workpiece stack WP. Fig. 9 shows the state in which the workpiece stack WP is placed on the stack support mechanism 3. When the workpiece stack WP is held by the support holding plate 12, the process of step S1 is completed.

[0071] Step S2 (holding the workpiece) When the workpiece stack WP is adsorbed and held by the support holding plate 12, an operation of holding the workpieces W of the workpiece stack WP is started. That is, the control unit 14 operates the electric cylinder 31 of the vertical release mechanism 7 to lower the rod portion 35. As the rod portion 35 lowers, the horizontal plate 29, the inclined plate 17, and the workpiece holding plate 4 connected to the rod portion 35 lower synchronously. As the workpiece holding plate 4 lowers and abuts against the workpiece W side of the workpiece stack WP, the control unit 14 stops the operation of the electric cylinder 31.

[0072] When the workpiece holding plate 4 descends and abuts against the workpiece W side of the workpiece stack WP, the control unit 14 controls the vacuum device 13 to hold the workpiece W. That is, the vacuum device 13 is activated, and the workpiece holding plate 4 adsorbs and holds the upper surfaces of the works W in the workpiece stack WP. Figure 10 shows the state in which the workpiece stack WP is held by the support body holding plate 12 and the workpiece holding plate 4. When the workpiece W is held by the work holding plate 4, the process of step S2 is completed.

[0073] Step S3 (workpiece tilt) After the workpiece stack WP is held by the support holding plate 12 and the workpiece holding plate 4, in the first embodiment, the tilt release mechanism 5 is operated to tilt the workpieces W. That is, the control unit 14 operates the tilt release mechanism 5 to rotate the rotating shaft 21 connected to the tilt plate 17 in the clockwise direction. The control unit 14 also rotates the rotating shaft 23 connected to the cam 19.

[0074] As the rotating shaft 21 provided at the right end of the inclined plate 17 rotates clockwise, the inclined plate 17 pivots about the rotating shaft 21. Furthermore, as the cam 19 rotates together with the rotating shaft 23, the portion of the cam 19 that contacts the inclined plate 17 changes. That is, the nose portion 19A of the cam 19 moves away from the inclined plate 17, and the force with which the cam 19 presses down on the inclined plate 17 decreases. As a result, the upward biasing force acting on the inclined plate 17 exceeds the pressing force of the cam 19.

[0075] As a result of the rotation of the rotating shaft 21 and the rotating shaft 23 in this way, the inclined plate 17 is inclined so that the left end side is higher than the right end side. The work holding plate 4 supported by the inclined plate 17 is also inclined in the same manner. That is, as shown in FIG. 11, the tilt release mechanism 5 is operated, and the work holding plate 4 holding the work W is separated from the support holding plate 12 so that the distance the left end side rises is greater than the distance the right end side rises. Note that the magnitude of the tilt angle θ1 at which the inclined plate 17 and the work W are tilted in step S3 may be appropriately set according to various conditions, such as the constituent material and thickness of the adhesive material C and the constituent material and thickness of the work W. The magnitude of the tilt angle θ1 is preferably 0.5° or more and 1.5° or less, as an example.

[0076] 6(b), the tilt release mechanism 5 separates the work holding plate 4 from the support body holding plate 12 so that one side of the work holding plate 4 is spaced apart from the support body holding plate 12 by being displaced to the tilted state as shown in FIG. 6(b). As a result of the work holding plate 4 being in the tilted state, the work W held by the work holding plate 4 is also separated from the support body holding plate 12 so that one side (here, the left side) is spaced apart from the support body holding plate 12 by being displace ...

[0077] As the workpiece W is separated from the support holding plate 12, the layer of the adhesive material C is pulled upward and becomes thicker. As the workpiece W is tilted while being separated, a large force acts particularly upward on the portion of the adhesive material C adhering to the portion of the workpiece W where the separation distance is large, and the thickness of the adhesive material C becomes large. In other words, by operating the tilt release mechanism 5 so as to increase the separation distance on the left end side of the workpiece W, the thickness of the left end side Ck of the adhesive material C becomes larger than the thickness on the right end side, while the density of the adhesive material C becomes smaller on the left end side Ck of the adhesive material C. The tilt release mechanism 5 is operated to tilt the workpiece W together with the workpiece holding plate 4, completing the process of step S3.

[0078] Step S4 (insertion of removal aid) After tilting the workpiece W by the tilt detachment mechanism 5, an operation is performed to insert the detachment assist member 51 into the interface between the workpiece W and the adhesive material C. That is, the control unit 14 appropriately controls the vertical movement of the lifting platform 45 and the horizontal movement of the electric slider 49 in the detachment assist mechanism 9 to adjust the position of the detachment assist member 51 in the vertical and horizontal directions. That is, in a state in which the height of the detachment assist member 51 is adjusted so that the tip 53 of the detachment assist member 51 faces the interface between the workpiece W and the adhesive material C, the detachment assist member 51 moves horizontally toward the workpiece stack WP supported by the stack support mechanism 3.

[0079] The detachment auxiliary member 51 moves horizontally toward the workpiece stack WP, and as shown in FIG. 12, the sharp tip 53 of the detachment auxiliary member 51 is pierced into the interface between the workpiece W and the adhesive material C. After the tip 53 is pierced into the interface between the workpiece W and the adhesive material C, the control unit 14 controls the lifting platform 45 and the electric slider 49, etc., and further inserts the detachment auxiliary member 51 along the interface between the workpiece W and the adhesive material C. By inserting the detachment auxiliary member 51, a part of the peripheral portion of the adhesive material C is peeled off from the workpiece W by the tip 53. The distance by which the detachment auxiliary member 51 is inserted into the interface between the workpiece W and the adhesive material C in the x direction may be set appropriately, but the distance is preferably 1 / 4 or less of the length of the workpiece W in the x direction. Here, the x direction corresponds to the insertion direction of the detachment auxiliary member 51.

[0080] After inserting the detachment assisting member 51 a certain distance, the control unit 14 stops the insertion of the detachment assisting member 51 and returns the detachment assisting member 51 to its initial position. Fig. 13 shows a state in which the detachment assisting member 51 has been pulled out from the interface between the workpiece W and the adhesive material C and returned to its initial position. In Fig. 13, the portion of the adhesive material C that has been peeled off from the workpiece W by the insertion of the detachment assisting member 51 is shown as a peeling start portion Dp. The process of step S4 is completed by inserting the tip portion 53 of the detachment assisting member 51 to peel off at least a portion of the adhesive material C from the workpiece W.

[0081] Step S5 (vertical removal of workpiece) After inserting the detachment auxiliary member 51 to form the peeling start portion Dp, the process of vertically detaching the workpiece W is started. That is, the control unit 14 operates the vertical detachment mechanism 7 and controls the motor of the electric cylinder 31 to raise the rod portion 35. As the rod portion 35 rises, the horizontal plate 29 and the inclined plate 17 connected to the rod portion 35 rise in a direction perpendicular to the holding surface of the support body holding plate 12 and are separated from the support table 11. Therefore, the workpiece W supported by the inclined plate 17 via the workpiece holding plate also rises in a direction perpendicular to the holding surface of the support body holding plate 12 and is separated from the support table 11.

[0082] When the vertical release mechanism 7 is operated, a force (a force that lifts the workpiece W) in the direction in which the workpiece W is released from the adhesive C is concentrated and acts on the peeling start site Dp. As a result, a strong shear force acts on the peeling start site Dp, and the workpiece W is peeled off from the adhesive C also at the interface between the workpiece W and the adhesive C around the peeling start site Dp. Therefore, as shown in FIG. 14, by operating the vertical release mechanism 7, the area of ​​the workpiece W that is peeled off from the adhesive C (peeling area Ds) is formed so as to spread radially from the peeling start site Dp. In other words, the peeling area Ds spreads to the right in FIG. 14 from the peeling start site Dp, and the entire surface of the workpiece W is peeled off from the adhesive C and the workpiece W is detached from the adhesive C in a vertical direction. FIG. 15 shows a state in which the entire surface of the workpiece W is peeled off from the adhesive C and the workpiece W is detached in a vertical direction with respect to the holding surface of the support holding plate 12. The entire surface of the workpiece W is peeled off from the adhesive C and separated in the vertical direction, whereby the process of step S5 is completed.

[0083] Step S6 (collection of workpieces) After the workpiece W is detached from the adhesive material C in a direction perpendicular to the support holding plate 12, a process of recovering the detached workpiece W is started. That is, the control unit 14 operates a work transport mechanism (not shown) to hold the workpiece W held by the work holding plate 4. Thereafter, the operation of the vacuum device 13 is controlled to stop the suction and holding of the workpiece W by the work holding plate 4, whereby the workpiece W is transferred from the work holding plate 4 to the work transport mechanism.

[0084] When the work W is transferred from the work holding plate 4 to the work transport mechanism, the work transport mechanism transports the work W to a work storage mechanism (not shown). The work transport mechanism stores the work W in the work storage mechanism, completing the process of recovering the work W detached from the adhesive material C. The support stack SP from which the work W has been detached is also transported out of the stack support mechanism 3 using a transport arm (not shown) or the like. The process of step S6 is completed by transporting both the work W and the support stack SP out of the stack.

[0085] In this manner, by a series of steps from step S1 to step S6, the workpieces W in the workpiece stack WP are detached from the adhesive material C. Thereafter, by appropriately repeating the series of steps from step S1 to step S6, a specified number of workpieces W are detached from the adhesive material C.

[0086] <Effects of the configuration of the first embodiment> The workpiece detachment device 1 according to the first embodiment includes a detachment assist mechanism 9 having a detachment assist member 51. When the workpiece W is detached from the adhesive material C in the workpiece stack WP, the tip 53 of the detachment assist member 51 is inserted into the interface between the workpiece W and the adhesive material C, and then the workpiece W is separated from the stack support mechanism 3. By inserting the detachment assist member 51 into the interface between the workpiece W and the adhesive material C, the workpiece W can be peeled off from the adhesive material C at the inserted portion even when the adhesive strength of the adhesive material C is high. In addition, since the tip 53 of the detachment assist member 51 has a sharp shape, the tip 53 can be inserted into the interface between the workpiece W and the adhesive material C more reliably to peel off the workpiece W from the adhesive material C.

[0087] By inserting the detachment assisting member 51, the workpiece W is detached from the adhesive material C at the inserted portion, and the detached portion becomes a notched detachment start portion Dp. When the detachment start portion Dp is formed, the workpiece W is separated from the stack support mechanism 3 by the vertical detachment mechanism 7, and the force that separates the workpiece W from the support stack SP held by the stack support mechanism 3 is concentrated at the notched detachment start portion Dp.

[0088] Such stress concentration generates a strong shear force at the peel start site Dp. Therefore, the workpiece W can be more easily peeled off from the adhesive C at the interface between the workpiece W and the adhesive C around the peel start site Dp. As a result, the peel region Ds spreads quickly from the peel start site Dp as a starting point, so that the entire surface of the workpiece W can be reliably and quickly peeled off from the adhesive C even when the adhesive strength of the adhesive C is high. Therefore, it is possible to quickly and reliably detach the workpiece W from the adhesive C while avoiding a decrease in the positional accuracy of the element EL present in the layer of the adhesive C.

[0089] In addition, in the first embodiment, the tip 53 of the detachment auxiliary member 51 is inserted into the interface between the workpiece W and the adhesive C while the tilt detachment mechanism 5 is operated. The tilt detachment mechanism 5 separates the workpiece W from the stack support mechanism 3 while tilting the workpiece W so that the separation distance at one end of the workpiece W is longer than the separation distance at the other end. In this case, since the separation distance from the stack support mechanism 3 is longer at one end of the workpiece W, a relatively strong separation force acts on the one end of the adhesive C adhering to the workpiece W, and the adhesive C is stretched upward. As a result, the density of the adhesive C at one end becomes relatively low. In other words, the adhesive force of the adhesive C at one end becomes relatively low.

[0090] Then, in step S4, with the tilt release mechanism 5 in operation, the tip 53 of the release assist member 51 is inserted into the interface between the workpiece W and the adhesive material C at a portion of the workpiece W that is farther away from the stack support mechanism 3, i.e., at one end of the workpiece. Since the adhesive strength of the adhesive material C is relatively low at the one end, the insertion of the release assist member 51 allows the workpiece W to be more reliably peeled off from the adhesive material C. EXAMPLES

[0091] Next, a second embodiment of the present invention will be described. Note that the same components as those in the workpiece removing device 1 described in the first embodiment are given the same reference numerals, and different components will be described in detail.

[0092] As shown in Fig. 16, the workpiece removal device 1A according to the second embodiment includes a stack rotation mechanism 55 in addition to the components of the workpiece removal device 1 according to the first embodiment. The stack rotation mechanism 55 rotates the workpiece stack WP held by the stack support mechanism 3 around an axis in the z direction. The stack rotation mechanism 55 includes a rotation shaft 57 and a motor 59. One end of the rotation shaft 57 is connected to the support table 11, and the other end of the rotation shaft 57 is connected to the motor 59. The rotation shaft 57 extends in a direction perpendicular to the holding surface of the workpiece stack WP on the support holding plate 12. That is, in the configuration of this embodiment, the rotation shaft 57 extends in the z direction.

[0093] The motor 59 rotates the rotary shaft 57, whereby the support table 11 rotates around the axis in the z direction together with the support holding plate 12. By rotating the support table 11 while the support holding plate 12 is holding the workpiece stack WP, it is possible to change the portion of the workpiece W facing the tip 53 of the detachment auxiliary member 51 in the workpiece stack WP.

[0094] In the embodiment having the laminate rotating mechanism 55, the workpiece W is preferably a predetermined shape having a flat portion and a corner portion. An example of the shape of the workpiece W having a flat portion and a corner portion is a polygonal shape. In this case, the sides of the polygonal workpiece W correspond to the flat portions, and the vertices correspond to the corner portions. In the second embodiment, as shown in FIG. 17, the workpiece W is rectangular in plan view. That is, in the second embodiment, the workpiece W has a shape having four flat portions Wa and four corner portions Wb. The shapes of the adhesive material C and the support P are also rectangular in plan view, similar to the workpiece W. The shapes of the support table 11 and the support holding plate 12 may be any suitable shape. The flat portion Wa is not limited to a straight line, and may have a gentle curve. An example of such a shape of the workpiece W is a Reuleaux polygon.

[0095] <Description of steps according to Example 2> Here, a series of operations for detaching the workpiece W using the workpiece detachment device 1A according to the second embodiment will be described with reference to the flowchart shown in FIG. 18. The series of operations for detaching the workpiece W according to the second embodiment differs from the operations of the first embodiment shown in FIG. 8 in that it includes a process of rotating the workpiece W in step S2. Moreover, the second embodiment differs from the first embodiment in that the tilted detachment mechanism 5 is operated after the process of inserting the detachment auxiliary member 51. Therefore, detailed explanations of the parts common to the first embodiment will be omitted, and the processes different from the first embodiment will be described in detail.

[0096] Step S1 (Placement of work stack) The process of step S1 in the second embodiment is the same as step S1 in the first embodiment. That is, the work stack WP stored in a stack storage mechanism (not shown) is transported to the stack support mechanism 3 by a stack transport mechanism (not shown). Then, the work stack WP is placed on the holding surface of the support holding plate 12 in the stack support mechanism 3 with the supports P facing downward. Thereafter, the support holding plate 12 adsorbs and holds the lower surface of the supports P of the work stack WP.

[0097] Step S2 (Rotating the workpiece) After the workpiece stack WP is placed on the support holding plate 12, in the second embodiment, the workpiece W is rotated using the stack rotation mechanism 55. That is, the control unit 14 controls the motor 59 to rotate the rotation shaft 57 around the axis in the z direction. By the rotation of the rotation shaft 57, the support table 11 connected to the rotation shaft 57 rotates together with the support holding plate 12 and the workpiece stack WP around the axis in the z direction.

[0098] Fig. 19(a) shows a plan view in a state (initial state) before the rotating shaft 57 rotates, and Fig. 19(b) shows a plan view in a state after the rotating shaft 57 has rotated. In the initial state immediately after the workpiece stack WP is placed on the support holding plate 12, the flat portion Wa of the workpiece W faces the tip portion 53 of the detachment assist member 51, as shown in Fig. 19(a).

[0099] In step S2, the support table 11 is rotated together with the support body holding plate 12 so that the corner Wb of the workpiece W faces the tip 53 of the detachment auxiliary member 51. That is, in this embodiment, the support table 11 is rotated 45° around the axis in the z direction. The state in which the corner Wb of the workpiece W faces the tip 53 of the detachment auxiliary member 51 is shown in FIG. 19(b). By rotating the workpiece W so that the corner Wb faces the tip 53, the process of step S2 according to the second embodiment is completed.

[0100] Step S3 (holding the workpiece) When the rotation of the workpiece W is completed, an operation of holding the workpiece W in the workpiece stack WP is started. The process of step S3 according to the second embodiment is common to the process of step S2 according to the first embodiment. That is, the control unit 14 operates the electric cylinder 31 of the vertical release mechanism 7 to lower the workpiece holding plate 4 together with the rod portion 35. When the workpiece holding plate 4 lowers and abuts against the workpiece W side of the workpiece stack WP, the control unit 14 stops the operation of the electric cylinder 31. Thereafter, the control unit 14 operates the vacuum device 13, so that the workpiece holding plate 4 adsorbs and holds the upper surface of the workpiece W in the workpiece stack WP. When the workpiece W is held by the workpiece holding plate 4, the process of step S3 in the second embodiment is completed.

[0101] Step S4 (insertion of removal aid) After the workpiece stack WP is held by the support holding plate 12 and the workpiece holding plate 4, the detachment assisting member 51 is inserted into the interface between the workpieces W and the adhesive material C. That is, the control unit 14 raises and lowers the lifting platform 45, and adjusts the height of the detachment assisting member 51 so that the tip 53 of the detachment assisting member 51 faces the interface between the workpieces W and the adhesive material C. Then, the control unit horizontally moves the electric slider 49, and moves the detachment assisting member 51 horizontally in the x direction toward the workpiece stack WP.

[0102] The detachment auxiliary member 51 moves horizontally toward the workpiece stack WP, so that the sharp tip 53 of the detachment auxiliary member 51 pierces the interface between the workpiece W and the adhesive C. In step S2, the support table 11 rotates so that the corner Wb of the workpiece W faces the tip 53. Therefore, in step S5 of the second embodiment, the tip 53 of the detachment auxiliary member 51 pierces the interface between the corner Wb of the workpiece W and the adhesive C to form a peel start site Dp. After inserting the detachment auxiliary member 51 a certain distance, the control unit 14 stops the insertion of the detachment auxiliary member 51 and returns the detachment auxiliary member 51 to its initial position. In FIG. 20, the area where the peel start site Dp is formed is indicated by hatching in a plan view of the workpiece W. The process of step S4 in the second embodiment is completed by forming the peel start site Dp by inserting the detachment auxiliary member 51.

[0103] Step S5 (workpiece tilt) After inserting the detachment auxiliary member 51 to form the peeling start site Dp, the tilt detachment mechanism 5 is operated to tilt the workpiece W. That is, the control unit 14 operates the tilt detachment mechanism 5 to rotate the rotating shaft 21 connected to the tilt plate 17 in the clockwise direction. The control unit 14 also rotates the rotating shaft 23 connected to the cam 19.

[0104] As a result of the rotation of the rotating shaft 21 and the rotating shaft 23, the inclined plate 17 is inclined so that the left end side is higher than the right end side, as shown in FIG. 6(b). As a result, the workpiece W moves upward from the support holding plate 12 so that the distance by which the left end side Lf rises becomes larger than the distance by which the right end side Rg rises. As a result, a larger peeling force acts on the left end side Lf of the workpiece W compared to the right end side Rg of the workpiece W. In addition, by inserting the tip portion 53 into the interface between the workpiece W and the adhesive material C at the corner portion Wb that has moved to the left end side Lf (the corner portion Wb that has moved to a position opposite the tip portion 53), a peeling start site Dp is formed on the left end side Lf of the workpiece W.

[0105] Therefore, when the tilt detachment mechanism 5 is operated, a force acting in a direction in which the workpiece W is detached from the adhesive material C (a force causing the workpiece W to rise) is concentrated and acts on the peel start site Dp. As a result, a strong shear force acts on the peel start site Dp, and the workpiece W is peeled off from the adhesive material C also at the interface between the workpiece W and the adhesive material C around the peel start site Dp. Therefore, as shown in Fig. 21, by operating the tilt detachment mechanism 5, a peeled region Ds is formed so as to spread radially from the peel start site Dp. The process of step S5 is completed by operating the tilt detachment mechanism 5 to tilt the workpiece W.

[0106] Step S6 (vertical removal of workpiece) After the tilt release mechanism 5 is operated to tilt the workpiece W, the workpiece W is released in the vertical direction. That is, the control unit 14 operates the vertical release mechanism 7 in the same manner as in the first embodiment, and controls the motor of the electric cylinder 31 to lift the rod portion 35. By lifting the rod portion 35, the workpiece W supported by the workpiece holding plate is lifted in the direction perpendicular to the holding surface of the support body holding plate 12 and separated from the support table 11.

[0107] When the vertical detachment mechanism 7 is activated, a force acting in a direction in which the workpiece W is detached from the adhesive material C (a force causing the workpiece W to rise) is concentrated and acts on the tip of the peeling region Ds (the right side in FIG. 21). As a result, a strong shear force acts on the tip of the peeling region Ds, further peeling the workpiece W from the adhesive material C. Then, the entire surface of the workpiece W is peeled off from the adhesive material C and the workpiece W is detached vertically from the adhesive material C. When the entire surface of the workpiece W is peeled off from the adhesive material C and detached vertically, the process of step S6 is completed.

[0108] Step S7 (collection of workpieces) After the workpiece W is detached from the adhesive material C in a direction perpendicular to the support holding plate 12, a process of recovering the detached workpiece W is started. That is, the control unit 14 operates a work transport mechanism (not shown) to hold the workpiece W held by the work holding plate 4. Thereafter, the operation of the vacuum device 13 is controlled to stop the suction and holding of the workpiece W by the work holding plate 4, whereby the workpiece W is transferred from the work holding plate 4 to the work transport mechanism.

[0109] When the workpiece W is transferred from the work holding plate 4 to the workpiece transport mechanism, the workpiece transport mechanism transports the workpiece W to a workpiece storage mechanism (not shown). The workpiece transport mechanism stores the workpiece W in the workpiece storage mechanism, completing the process of recovering the workpiece W detached from the adhesive material C. The support stack SP from which the workpiece W has been detached is also transported out of the stack support mechanism 3 using a transport arm (not shown) or the like. The process of step S7 is completed by transporting out each of the workpiece W and the support stack SP. Thereafter, the processes of steps S1 to S7 are appropriately repeated to detach the workpieces W from the adhesive material C for a predetermined number of workpiece stacks WP.

[0110] <Effects of the configuration of the second embodiment> The workpiece removal device 1A according to the second embodiment includes a removal assistance mechanism 9 having a removal assistance member 51, as in the first embodiment. When removing the workpiece W from the adhesive material C in the workpiece stack WP, the tip 53 of the removal assistance member 51 is inserted into the interface between the workpiece W and the adhesive material C, and then the workpiece W is separated from the stack support mechanism 3. By inserting the removal assistance member 51 into the interface between the workpiece W and the adhesive material C, the workpiece W can be peeled off from the adhesive material C at the inserted portion even when the adhesive strength of the adhesive material C is high. In addition, since the tip 53 of the removal assistance member 51 has a sharp shape, the tip 53 can be inserted into the interface between the workpiece W and the adhesive material C more reliably to remove the workpiece W from the adhesive material C.

[0111] By inserting the detachment assisting member 51, the workpiece W is detached from the adhesive material C at the inserted portion, and the detached portion becomes a notched detachment start portion Dp. When the detachment start portion Dp is formed, the workpiece W is separated from the stack support mechanism 3 by the vertical detachment mechanism 7, and the force that separates the workpiece W from the support stack SP held by the stack support mechanism 3 is concentrated at the notched detachment start portion Dp.

[0112] Such stress concentration generates a strong shear force at the peel start site Dp. Therefore, the workpiece W can be more easily peeled off from the adhesive C at the interface between the workpiece W and the adhesive C around the peel start site Dp. As a result, the peel region Ds spreads quickly from the peel start site Dp as a starting point, so that the entire surface of the workpiece W can be reliably and quickly peeled off from the adhesive C even when the adhesive strength of the adhesive C is high. Therefore, it is possible to quickly and reliably detach the workpiece W from the adhesive C while avoiding a decrease in the positional accuracy of the element EL present in the layer of the adhesive C.

[0113] Furthermore, in the second embodiment, the workpiece W has a shape including a corner portion Wb. The workpiece detachment device 1A includes a stack rotation mechanism 55 that rotates the stack support mechanism 3 that supports the workpiece stack WP. The stack rotation mechanism 55 rotates the workpiece stack WP so that the corner portion Wb of the workpiece W faces the tip portion 53 of the detachment auxiliary member 51. That is, the workpiece W, together with the adhesive material C and the support P, is rotated around the axis in the z direction by the stack rotation mechanism 55.

[0114] In the second embodiment, with the corner Wb of the workpiece W facing the tip 53 of the detachment assisting member 51, the tip 53 of the detachment assisting member 51 is inserted into the interface between the workpiece W and the adhesive material C. That is, the tip 53 of the detachment assisting member 51 is inserted into the interface between the corner Wb of the workpiece W and the adhesive material C, and the workpiece W is peeled off from the adhesive material C at the interface between the corner Wb of the workpiece W and the adhesive material C to form a peel start site Dp.

[0115] Then, after the peel start site Dp is formed at the corner Wb of the work W by inserting the detachment auxiliary member 51, the tilt detachment mechanism 5 is used to tilt the work W so that the separation distance between the work W and the support holding plate 12 is maximized at the corner Wb where the peel start site Dp is formed. In other words, the tilt detachment mechanism 5 is used to tilt the work W so that the separation distance between the work W and the support holding plate 12 is larger on the side of the corner Wb where the peel start site Dp is formed (the left end side Lf in FIG. 20) than on the opposite side (the right end side Rg) in the insertion direction of the detachment auxiliary member 51. Therefore, a particularly large shear force can be applied to the left end side Lf where the peel start site Dp is formed, so that the work W can be peeled from the adhesive C more quickly starting from the peel start site Dp, and the peeled region Ds can be expanded.

[0116] Here, further effects of the configuration in which the corner Wb of the work W is disposed opposite the tip 53 using the laminate rotation mechanism 55 will be described with reference to the drawings. FIG. 22(a) shows a comparative example in which the detachment assist member 51 is inserted in a state in which the flat portion Wa of the work W is disposed opposite the tip. In this comparative example, the length L1 in the y direction of the work W disposed on the left end side Lf is long. Therefore, in the comparative example, as shown in FIG. 22(a), when the detachment assist member 51 is inserted into the interface between the flat portion Wa of the work W and the adhesive C, the peel start site Dp is formed only in a part of the flat portion Wa extending in the y direction. That is, the adhesive C is adhered to the work W in most of the flat portion Wa indicated by the symbol F.

[0117] The tilt detachment mechanism 5 rotates the rotary shaft 21 extending in the y direction to tilt the workpiece W and separate the workpiece W from the support holding plate 12. At this time, the peeling force acting on the interface between the workpiece W and the adhesive C acts evenly in the direction in which the rotary shaft 21 extends (y direction). Therefore, when the tilt detachment mechanism 5 is operated in the state shown in FIG. 22(a), the peeling force acting on the left end side Lf of the workpiece W is not concentrated only on the center of the flat part Wa where the peeling start part Dp is formed, but is also distributed to the part indicated by the symbol F of the flat part Wa. The part indicated by the symbol F does not have the peeling start part Dp formed, and the adhesive C is adhered to the workpiece W. Therefore, the adhesive force of the adhesive C remaining in the part indicated by the symbol F prevents the workpiece W from being peeled off from the adhesive C. As a result, in the configuration of the comparative example in which the flat part Wa faces the tip part 53 of the detachment auxiliary member 51, it is difficult to quickly detach the workpiece W from the adhesive C.

[0118] On the other hand, in Example 2, as shown in FIG. 22(b), the detachment assisting member 51 is inserted in a state in which the corner Wb of the workpiece W is disposed facing the tip 53. In Example 2, since the corner Wb is disposed on the left end side Lf, the length L2 in the y direction of the workpiece W disposed on the left end side Lf is shorter than the length L1 in the comparative example. Therefore, in the comparative example, as shown in FIG. 22(a), when the detachment assisting member 51 is inserted into the interface between the corner Wb of the workpiece W and the adhesive C, the peel start site Dp is formed over the entire corner Wb. That is, at the left end Lf, the workpiece W is peeled off from the adhesive C over the entire y direction.

[0119] 22(b), the peeling force acting on the left end side Lf of the workpiece W is concentrated on the corner Wb where the peeling start site Dp is formed. This further increases the magnitude of the peeling force acting on a unit area, making it possible to more reliably and quickly expand the peeling region Ds starting from the peeling start site Dp. EXAMPLES

[0120] Next, a third embodiment of the present invention will be described. As shown in FIG. 23, the workpiece separating device 1B according to the third embodiment has a configuration in which the inclined separating mechanism 5 is omitted from the workpiece separating device 1 according to the first embodiment. That is, the workpiece separating device 1B according to the third embodiment does not include the inclined plate 17 and the cam 19, and as an example, the support member 37 and the link member 39 support the workpiece holding plate 4 in a suspended manner. That is, while the inclined separating mechanism 5 and the vertical separating mechanism 7 are used to separate the workpiece W from the support body holding plate 12 in the first and second embodiments, the vertical separating mechanism 7 is used to separate the workpiece W from the support body holding plate 12 in the third embodiment. In the third embodiment, the vertical separating mechanism 7 corresponds to the separating mechanism.

[0121] Moreover, in the fourth embodiment, a plurality of detachment assist mechanisms 9 are provided. In the fourth embodiment, a configuration in which a total of two detachment assist mechanisms 9 are provided on the left end side Lf and the right end side Rg is illustrated, but the number of detachment assist mechanisms 9 may be changed as appropriate. Moreover, it is preferable that the plurality of detachment assist mechanisms 9 are arranged point-symmetrically with the workpiece W as the center.

[0122] <Description of steps according to Example 3> Here, a series of operations for removing the workpiece W using the workpiece removing device 1B according to the third embodiment will be described with reference to the flowchart shown in Fig. 24. The series of operations for removing the workpiece W according to the third embodiment differs from the operations according to the first embodiment shown in Fig. 8 in that the process of tilting the workpiece W is omitted.

[0123] Step S1 (Placement of work stack) The process of step S1 in the embodiment 3 is the same as step S1 in the embodiment 1. That is, the work stack WP stored in a stack storage mechanism (not shown) is transported to the stack support mechanism 3 by a stack transport mechanism (not shown). Then, the work stack WP is placed on the holding surface of the support holding plate 12 in the stack support mechanism 3 with the supports P facing downward. Thereafter, the support holding plate 12 adsorbs and holds the lower surface of the supports P of the work stack WP.

[0124] Step S2 (holding the workpiece) When the rotation of the workpiece W is completed, an operation of holding the workpiece W in the workpiece stack WP is started. The process of step S2 according to the third embodiment is common to the process of step S2 according to the first embodiment. That is, the control unit 14 operates the electric cylinder 31 of the vertical release mechanism 7 to lower the workpiece holding plate 4 together with the rod portion 35. When the workpiece holding plate 4 descends and abuts against the workpiece W side of the workpiece stack WP, the control unit 14 stops the operation of the electric cylinder 31. Thereafter, the control unit 14 operates the vacuum device 13, so that the workpiece holding plate 4 adsorbs and holds the upper surface of the workpiece W in the workpiece stack WP. When the workpiece W is held by the workpiece holding plate 4, the process of step S2 is completed.

[0125] Step S3 (insertion of removal aid) After the workpiece stack WP is held by the support holding plate 12 and the workpiece holding plate 4, multiple detachment assist members 51 are inserted into the interface between the workpieces W and the adhesive material C. That is, the control unit 14 raises and lowers each of the lifting tables 45, and adjusts the height of each detachment assist member 51 so that the tip 53 of each detachment assist member 51 faces the interface between the workpieces W and the adhesive material C. Then, the control unit horizontally moves the electric slider 49, and horizontally moves each detachment assist member 51 in the x direction toward the workpiece stack WP.

[0126] The detachment assisting member 51 moves horizontally toward the workpiece stack WP, so that the sharp tip 53 of the detachment assisting member 51 pierces the interface between the workpieces W and the adhesive material C, as shown in Fig. 25. As a result, the workpieces W are peeled off from the adhesive material C at the portion of the interface between the workpieces W and the adhesive material C that is pierced by the tip 53.

[0127] After inserting the detachment assisting member 51 a certain distance, the control unit 14 stops the insertion of the detachment assisting member 51 and returns the detachment assisting member 51 to its initial position. FIG. 26 shows a state in which the detachment assisting member 51 is pulled out from the interface between the workpiece W and the adhesive material C and returns to its initial position. In FIG. 26, similar to FIG. 13, the part of the adhesive material C peeled off from the workpiece W by inserting the detachment assisting member 51 is shown as a peeling start site Dp. In the third embodiment, two peeling start sites Dp are formed by inserting two detachment assisting members 51. The process of step S3 is completed by inserting the tip portion 53 of the detachment assisting member 51 to peel off at least a part of the adhesive material C from the workpiece W.

[0128] Step S4 (vertical removal of workpiece) After inserting the detachment auxiliary member 51 to form the peeling start site Dp, the process of vertically detaching the workpiece W is started. That is, the control unit 14 operates the vertical detachment mechanism 7 and controls the motor of the electric cylinder 31 to raise the rod portion 35. As the rod portion 35 rises, the workpiece holding plate 4 connected to the rod portion 35 rises in a direction perpendicular to the holding surface of the support body holding plate 12 and is separated from the support table 11. Therefore, the workpiece W supported by the workpiece holding plate also rises in a direction perpendicular to the holding surface of the support body holding plate 12 and is separated from the support table 11.

[0129] When the vertical release mechanism 7 is operated, a force acting in a direction in which the workpiece W is released from the adhesive material C (a force causing the workpiece W to rise) is concentrated and acts on the peel start site Dp. As a result, a strong shear force acts on each peel start site Dp, and the workpiece W is peeled off from the adhesive material C also at the interface between the workpiece W and the adhesive material C around the peel start site Dp. As a result, each peel region Ds is formed so as to spread radially from the peel start site Dp, and the entire surface of the workpiece W is peeled off from the adhesive material C and the workpiece W is vertically released from the adhesive material C. FIG. 27 shows a state in which the entire surface of the workpiece W is peeled off from the adhesive material C and the workpiece W is released in a vertical direction relative to the holding surface of the support holding plate 12. When the entire surface of the workpiece W is peeled off from the adhesive material C and released in the vertical direction, the process of step S4 is completed.

[0130] Step S5 (collection of workpieces) After the workpiece W is detached from the adhesive material C in a direction perpendicular to the support holding plate 12, a process of recovering the detached workpiece W is started. That is, the control unit 14 operates a work transport mechanism (not shown) to hold the workpiece W held by the work holding plate 4. Thereafter, the operation of the vacuum device 13 is controlled to stop the suction and holding of the workpiece W by the work holding plate 4, whereby the workpiece W is transferred from the work holding plate 4 to the work transport mechanism.

[0131] When the work W is transferred from the work holding plate 4 to the work transport mechanism, the work transport mechanism transports the work W to a work storage mechanism (not shown). The work transport mechanism stores the work W in the work storage mechanism, completing the process of recovering the work W detached from the adhesive material C. The support stack SP from which the work W has been detached is also transported out of the stack support mechanism 3 using a transport arm (not shown) or the like. The process of step S5 is completed by transporting both the work W and the support stack SP out of the stack.

[0132] Thereafter, steps S1 to S5 are appropriately repeated to detach the workpieces W from the adhesive material C for a predetermined number of workpiece stacks WP. In this way, even in a configuration in which the inclined detachment mechanism 5 is omitted, the workpieces W can be accurately detached from the adhesive material C by inserting the detachment auxiliary member 51 into the interface between the workpieces W and the adhesive material C to form the peel start site Dp and then operating the vertical detachment mechanism 7. That is, the workpieces W can be accurately detached from the adhesive material C without performing an operation to reduce the adhesive strength of the adhesive material C, such as heating. Therefore, the workpieces W can be accurately detached from the adhesive material C while maintaining the positional accuracy of the elements EL. EXAMPLES

[0133] Next, a fourth embodiment of the present invention will be described. As shown in Fig. 28, the workpiece separation device 1C according to the fourth embodiment has a configuration in which the vertical separation mechanism 7 is omitted from the workpiece separation device 1 according to the first embodiment. That is, in the fourth embodiment, the workpiece W is separated from the support body holding plate 12 using the inclined separation mechanism 5. In the fourth embodiment, the inclined separation mechanism 5 corresponds to the separation mechanism.

[0134] <Description of steps according to Example 4> Here, a series of operations for detaching the workpiece W using the workpiece detaching device 1C according to the fourth embodiment will be described with reference to the flowchart shown in FIG.

[0135] Step S1 (Placement of work stack) The process of step S1 in Example 4 is the same as step S1 in Example 1. That is, the work stack WP stored in a stack storage mechanism (not shown) is transported to the stack support mechanism 3 by a stack transport mechanism (not shown). Then, the work stack WP is placed on the holding surface of the support holding plate 12 in the stack support mechanism 3 with the supports P facing downward. Thereafter, the support holding plate 12 adsorbs and holds the lower surface of the supports P of the work stack WP.

[0136] Step S2 (holding the workpiece) When the rotation of the workpiece W is completed, an operation of holding the workpiece W in the workpiece stack WP is started. The process of step S2 according to the fourth embodiment is common to the process of step S2 according to the first embodiment. That is, the control unit 14 operates the electric cylinder 31 of the vertical release mechanism 7 to lower the workpiece holding plate 4 together with the rod portion 35. When the workpiece holding plate 4 descends and abuts against the workpiece W side of the workpiece stack WP, the control unit 14 stops the operation of the electric cylinder 31. Thereafter, the control unit 14 operates the vacuum device 13, so that the workpiece holding plate 4 adsorbs and holds the upper surface of the workpiece W in the workpiece stack WP. When the workpiece W is held by the workpiece holding plate 4, the process of step S2 in the fourth embodiment is completed.

[0137] Step S3 (insertion of removal aid) After the workpiece stack WP is held by the support holding plate 12 and the workpiece holding plate 4, the detachment assisting member 51 is inserted into the interface between the workpieces W and the adhesive material C. That is, the control unit 14 raises and lowers the lifting platform 45, and adjusts the height of the detachment assisting member 51 so that the tip 53 of the detachment assisting member 51 faces the interface between the workpieces W and the adhesive material C. Then, the control unit horizontally moves the electric slider 49, and moves the detachment assisting member 51 horizontally in the x direction toward the workpiece stack WP.

[0138] The detachment assisting member 51 moves horizontally toward the workpiece stack WP, so that the sharp tip 53 of the detachment assisting member 51 pierces the interface between the workpieces W and the adhesive material C, as shown in Fig. 30. In the third embodiment, the detachment assisting member 51 is inserted while the workpieces W are maintained in a horizontal state. As a result, the workpieces W are peeled off from the adhesive material C at the portion of the interface between the workpieces W and the adhesive material C that is pierced by the tip 53.

[0139] After inserting the detachment assisting member 51 a certain distance, the control unit 14 stops the insertion of the detachment assisting member 51 and returns the detachment assisting member 51 to its initial position. Fig. 26 shows a state in which the detachment assisting member 51 has been pulled out from the interface between the workpiece W and the adhesive material C and has returned to its initial position. In Fig. 26, similar to Fig. 13, the portion of the adhesive material C that has been peeled off from the workpiece W by the insertion of the detachment assisting member 51 is shown as a peeling start portion Dp. The process of step S3 is completed by inserting the tip portion 53 of the detachment assisting member 51 to peel off at least a portion of the adhesive material C from the workpiece W.

[0140] Step S4 (Tilt removal of workpiece) After inserting the detachment assisting member 51 to form the peeling start portion Dp, the process of tilting the workpiece W to detach it from the adhesive material C is started. That is, the control unit 14 operates the tilt detachment mechanism 5 to rotate the rotating shaft 21 connected to the tilt plate 17 in the clockwise direction. The control unit 14 also rotates the rotating shaft 23 connected to the cam 19.

[0141] As a result of the rotation of the rotating shaft 21 and the rotating shaft 23, the inclined plate 17 is inclined so that the left end side Lf is higher than the right end side Rg, as shown in Fig. 6(b) and Fig. 31. As a result, the workpiece W moves upward from the support holding plate 12 so that the distance by which the left end side Lf rises becomes larger than the distance by which the right end side Rg rises. As a result, a larger peeling force acts on the left end side Lf of the workpiece W compared to the right end side Rg of the workpiece W. In addition, by inserting the tip portion 53 into the interface between the workpiece W and the adhesive C on the left end side Lf, a peeling start site Dp is formed on the left end side Lf of the workpiece W.

[0142] Therefore, when the tilt detachment mechanism 5 is operated, a force acting in a direction in which the workpiece W is detached from the adhesive material C (a force causing the workpiece W to rise) is concentrated and acts on the peel start site Dp. As a result, a strong shear force acts on the peel start site Dp, and the workpiece W is peeled off from the adhesive material C also at the interface between the workpiece W and the adhesive material C around the peel start site Dp. Therefore, as shown in Fig. 31, by operating the tilt detachment mechanism 5, a peeled region Ds is formed so as to spread radially from the peel start site Dp.

[0143] Then, when the rotation shaft 21 and the rotation shaft 23 are further rotated to increase the tilt angle of the workpiece W, as shown in Fig. 32, the peeling region Ds reaches the right end side Rg of the workpiece W, and the entire surface of the workpiece W is detached from the adhesive material C. The tilt detachment mechanism 5 is operated to detach the entire surface of the workpiece W from the adhesive material C, thereby completing the process of step S4.

[0144] Step S5 (collection of workpieces) After the workpiece W is tilted and detached from the adhesive material C using the tilt detachment mechanism 5, a process of recovering the detached workpiece W is started. That is, the control unit 14 operates a work transport mechanism (not shown) to hold the workpiece W held by the work holding plate 4. Thereafter, the operation of the vacuum device 13 is controlled to stop the suction and holding of the workpiece W by the work holding plate 4, whereby the workpiece W is transferred from the work holding plate 4 to the work transport mechanism.

[0145] When the work W is transferred from the work holding plate 4 to the work transport mechanism, the work transport mechanism transports the work W to a work storage mechanism (not shown). The work transport mechanism stores the work W in the work storage mechanism, completing the process of recovering the work W detached from the adhesive material C. The support stack SP from which the work W has been detached is also transported out of the stack support mechanism 3 using a transport arm (not shown) or the like. The process of step S5 is completed by transporting both the work W and the support stack SP out of the stack.

[0146] Thereafter, steps S1 to S5 are appropriately repeated to detach the workpieces W from the adhesive material C for a predetermined number of workpiece stacks WP. In this way, even in a configuration in which the vertical detachment mechanism 7 is omitted, the workpieces W can be accurately detached from the adhesive material C by inserting the detachment auxiliary member 51 into the interface between the workpieces W and the adhesive material C to form the peel start site Dp and then operating the inclined detachment mechanism 5. That is, the workpieces W can be accurately detached from the adhesive material C without performing an operation to reduce the adhesive strength of the adhesive material C, such as heating. Therefore, the workpieces W can be accurately detached from the adhesive material C while maintaining the positional accuracy of the elements EL.

[0147] <Other embodiments> The embodiments disclosed herein are illustrative and not restrictive in all respects. The scope of the present invention is indicated by the claims, not by the description of the above embodiments, and includes all modifications (variations) within the meaning and scope of the claims. For example, the present invention can be modified as follows.

[0148] (1) In each embodiment, the workpiece stack WP having the element EL inside the adhesive material C has been described as an example, but the workpiece stack WP is not limited to having the element EL. In other words, the workpiece stack WP may have a structure in which the support body P, the adhesive material C, and the workpieces W are stacked, and may have a structure in which the adhesive material C does not have the element EL.

[0149] (2) In each embodiment, the shape of the tip 53 of the detachment assisting member 51 is not limited to the shape shown in FIG. 7 and the like, and may be changed as appropriate as long as it is a shape that tapers toward the workpiece stack WP placed on the support holding plate 12. Examples of tapered shapes include any triangular shape, such as a right triangle or an isosceles triangle. Other examples of tapered shapes include a trapezoidal shape that tapers from the left end side Lf toward the right end side Rg. The tip side of the tip 53 (here, the right end side Rg) is not limited to a sharp shape, and may be a shape having a flat surface.

[0150] (3) In each embodiment, the timing for operating the detachment assist mechanism 9, the inclined detachment mechanism 5, and the vertical detachment mechanism 7 may be changed as appropriate as long as the workpiece W is detached by the inclined detachment mechanism 5 or the vertical detachment mechanism 7 when the peeling start site Dp is formed by inserting the detachment assist member 51.

[0151] The diagrams in Fig. 33 show timing charts for operating the removal assist mechanism 9, the tilt removal mechanism 5, and the vertical removal mechanism 7 in a modified example based on Example 1 and in Example 1. Fig. 34 shows a timing chart for operating the removal assist mechanism 9 and the vertical removal mechanism 7 in a modified example based on Example 3 and in Example 3. Fig. 35 shows a timing chart for operating the removal assist mechanism 9 and the tilt removal mechanism 5 in a modified example based on Example 4 and in Example 4.

[0152] FIG. 33(a) shows a timing chart according to the first embodiment. In the first embodiment, from time t1 to time t2, the detachment assist mechanism 9 is operated to insert the detachment assist member 51 into the interface between the workpiece W and the adhesive material C to form a peeling start site Dp (step S3). Then, at time t2, the detachment assist member 51 is returned to the initial position, and the operation of the tilt detachment mechanism 5 is started. Then, from time t2 to time t3, the rotating shaft 21 and the rotating shaft 23 are rotated to tilt the workpiece W, and the peeling region Ds is expanded from the peeling start site Dp as a starting point (step S4). Then, at time t3, the rotation of the rotating shaft 21 and the rotating shaft 23 is stopped. After that, from time t3 to time t4, the vertical detachment mechanism 7 is operated while maintaining the tilt angle θ1 of the workpiece W to detach the workpiece W in the vertical direction (step S5).

[0153] FIG. 33(b) shows a timing chart according to a first modified example based on the first embodiment. In the first modified example, the operation of the tilt detachment mechanism 5 is started at time t1, and the workpiece W is tilted by rotating the rotating shaft 21 and the rotating shaft 23 from time t1 to time t2. Then, the operation of the detachment assist mechanism 9 is started at time t2. After that, the tilt angle θ1 of the workpiece W is further increased by rotating the rotating shaft 21 and the rotating shaft 23 from time t2 to time t3, and the detachment assist member 51 is inserted into the interface between the workpiece W and the adhesive material C to form the peel start site Dp. At time t3, the rotation of the rotating shaft 21 and the rotating shaft 23 is stopped, and the detachment assist member 51 is returned to the initial position. Then, the vertical detachment mechanism 7 is operated while maintaining the tilt angle θ1 of the workpiece W from time t3 to time t4, and the workpiece W is detached in the vertical direction.

[0154] FIG. 33(c) shows a timing chart according to a second modified example based on the first embodiment. In the second modified example, from time t1 to time t2, the detachment assist mechanism 9 is operated to insert the detachment assist member 51 into the interface between the workpiece W and the adhesive material C to form a peel start site Dp. Then, at time t2, the detachment assist member 51 is returned to the initial position and the operation of the tilt detachment mechanism 5 is started. After that, from time t2 to time t3, the rotating shaft 21 and the rotating shaft 23 are rotated to further increase the tilt angle θ1 of the workpiece W, and the peeling region Ds is expanded starting from the peel start site Dp. At time t3, the rotation of the rotating shaft 21 and the rotating shaft 23 is stopped. Then, from time t3 to time t4, the vertical detachment mechanism 7 is operated while maintaining the tilt angle θ1 of the workpiece W to detach the workpiece W in the vertical direction.

[0155] FIG. 33(d) shows a timing chart according to a third modified example based on the first embodiment. In the third modified example, the detachment assisting member 51 is inserted into the interface between the workpiece W and the adhesive C to form a peeling start portion Dp between time t1 and time t2, and the rotating shaft 21 and the rotating shaft 23 are rotated to tilt the workpiece W. Then, at time t2, the detachment assisting member 51 is returned to the initial position, while the rotation of the rotating shaft 21 and the rotating shaft 23 is continued. After that, the rotation of the rotating shaft 21 and the rotating shaft 23 of the tilt detachment mechanism 5 is continued to further increase the tilt angle θ1 of the workpiece W. At time t3, the rotation of the rotating shaft 21 and the rotating shaft 23 is stopped, and the operation of the vertical detachment mechanism 7 is started. Then, from time t3 to time t4, the tilt angle θ1 of the workpiece W is maintained, and the vertical detachment mechanism 7 is operated to detach the workpiece W in the vertical direction.

[0156] 33(e) shows a timing chart according to a fourth modified example based on the first embodiment. In the fourth modified example, the detachment assisting member 51 is inserted into the interface between the workpiece W and the adhesive material C to form a peel start site Dp between time t1 and time t3, and the rotating shaft 21 and the rotating shaft 23 are rotated to tilt the workpiece W. Then, at time t3, the detachment assisting member 51 is returned to the initial position, and the rotation of the rotating shaft 21 and the rotating shaft 23 is stopped. Then, between time t3 and time t4, the tilt angle θ1 of the workpiece W is maintained, and the vertical detachment mechanism 7 is operated to detach the workpiece W in the vertical direction.

[0157] FIG. 33(f) shows a timing chart according to a fifth modified example based on the first embodiment. In the fifth modified example, the operation of the tilt detachment mechanism 5 is started at time t1, and the workpiece W is tilted by rotating the rotating shaft 21 and the rotating shaft 23 from time t1 to time t2. Then, the operation of the detachment assist mechanism 9 is started at time t2. After that, the rotating shaft 21 and the rotating shaft 23 are rotated to further increase the tilt angle θ1 of the workpiece W from time t2 to time t3, and the detachment assist member 51 is inserted into the interface between the workpiece W and the adhesive material C to form the peel start site Dp. At time t3, the rotation of the rotating shaft 21 and the rotating shaft 23 is stopped, and the detachment assist member 51 is returned to the initial position. Then, at time t3, the rotating shaft 21 and the rotating shaft 23 are rotated in the reverse direction. That is, the rotating shaft 21 is rotated counterclockwise. By rotating the rotary shafts 21 and 23 in the reverse direction, the workpiece W transitions from the inclined state shown in Fig. 6(b) to the horizontal state shown in Fig. 6(a). Between time t3 and time t4, the vertical release mechanism 7 is operated to release the workpiece W in the vertical direction while the workpiece W transitions from the inclined state to the horizontal state.

[0158] Fig. 34(a) shows a timing chart according to Example 3. In Example 3, from time t1 to time t2, the detachment assist mechanism 9 is operated to insert the detachment assist members 51 into the interface between the workpiece W and the adhesive material C to form a peel start site Dp (step S3). Then, at time t2, each detachment assist member 51 is returned to its initial position, and the operation of the vertical detachment mechanism 7 is started. Then, from time t2 to time t4, the electric cylinder 31 is operated to continue separating the workpiece W in a direction perpendicular to the holding surface of the support holding plate 12. That is, the vertical detachment mechanism 7 is continuously operated to detach the workpiece W in the vertical direction (step S4).

[0159] FIG. 34(b) shows a timing chart according to the first modified example based on the third embodiment. In the first modified example based on the third embodiment, the vertical release mechanism 7 is operated from time t1 to time t2, and a force (here, an upward force) in a direction perpendicular to the holding surface of the support holding plate 12 is applied to the workpiece W. Then, at time t2, the release assist mechanism 9 is operated to insert the release assist member 51 into the interface between the workpiece W and the adhesive material C. At time t2, the layer of the adhesive material C is stretched upward and its density is reduced by applying an upward force to the workpiece W in advance by the vertical release mechanism 7. Therefore, at time t2, the tip 53 of the release assist member 51 can more easily enter the interface between the adhesive material C and the workpiece W, making it easier to peel the workpiece W from the adhesive material C. From time t2 to time t3, the operation of the vertical release mechanism 7 is stopped, and the process of inserting the release assist member 51 is continued. Then, at time t3, the release assist member 51 is returned to its initial position. Thereafter, during the period from time t3 to time t4, the vertical release mechanism 7 is operated to release the workpiece W in the vertical direction.

[0160] FIG. 34(c) shows a timing chart according to the second modified example based on the third embodiment. In the second modified example based on the third embodiment, the vertical release mechanism 7 is operated to apply an upward force to the workpiece W from time t1 to time t2. Then, at time t2, the release assist mechanism 9 is operated to insert the release assist member 51 into the interface between the workpiece W and the adhesive material C. At time t2, the layer of the adhesive material C is stretched upward and its density is reduced by applying an upward force to the workpiece W in advance by the vertical release mechanism 7. Therefore, at time t2, the tip 53 of the release assist member 51 can more easily enter the interface between the adhesive material C and the workpiece W, making it easier to peel the workpiece W from the adhesive material C. From time t2 to time t3, the vertical release mechanism 7 is operated and the process of inserting the release assist member 51 is continued. Then, at time t3, the release assist member 51 is returned to its initial position. Thereafter, during the period from time t3 to time t4, the vertical release mechanism 7 is operated to release the workpiece W in the vertical direction.

[0161] FIG. 35(a) shows a timing chart according to the fourth embodiment. In the first embodiment, from time t1 to time t2, the detachment assist mechanism 9 is operated to insert the detachment assist member 51 into the interface between the workpiece W and the adhesive material C to form a peel start site Dp (step S3). Then, at time t2, the detachment assist member 51 is returned to the initial position, and the operation of the tilt detachment mechanism 5 is started. Then, from time t2 to time t4, the rotating shaft 21 and the rotating shaft 23 are rotated to continue tilting the workpiece W, and the peel region Ds is expanded starting from the peel start site Dp to detach the workpiece W (step S4).

[0162] FIG. 35(b) shows a timing chart according to the first modified example based on the fourth embodiment. In the first modified example based on the fourth embodiment, the tilt detachment mechanism 5 is operated between time t1 and time t2, and the rotating shaft 21 and the rotating shaft 23 are rotated to tilt the workpiece W. Then, at time t2, the detachment assist mechanism 9 is operated to insert the detachment assist member 51 into the interface between the workpiece W and the adhesive material C. At time t2, the layer of the adhesive material C is stretched diagonally upward and its density is reduced by applying a force in the diagonal upward direction to the workpiece W in advance by the tilt detachment mechanism 5. Therefore, at time t2, the tip 53 of the detachment assist member 51 can more easily enter the interface between the adhesive material C and the workpiece W, so that the workpiece W can be easily peeled off from the adhesive material C. Between time t2 and time t3, the operation of the tilt detachment mechanism 5 is stopped, and the process of inserting the detachment assist member 51 is continued. Then, at time t3, the detachment assist member 51 is returned to its initial position. Thereafter, during the period from time t3 to time t4, the tilt angle θ1 of the workpiece W is increased by operating the tilt removal mechanism 5, thereby removing the workpiece W.

[0163] FIG. 35(c) shows a timing chart according to the second modified example based on the fourth embodiment. In the second modified example based on the fourth embodiment, the tilt detachment mechanism 5 is operated between time t1 and time t2, and the rotating shaft 21 and the rotating shaft 23 are rotated to tilt the workpiece W. Then, at time t2, the detachment assist mechanism 9 is operated to insert the detachment assist member 51 into the interface between the workpiece W and the adhesive material C. At time t2, the layer of the adhesive material C is stretched diagonally upward and its density is reduced by applying a force in the diagonal upward direction to the workpiece W in advance by the tilt detachment mechanism 5. Therefore, at time t2, the tip 53 of the detachment assist member 51 can more easily enter the interface between the adhesive material C and the workpiece W, so that the workpiece W can be easily peeled off from the adhesive material C. Between time t2 and time t3, the operation of the tilt detachment mechanism 5 is continued, and the process of inserting the detachment assist member 51 is continued. Then, at time t3, the detachment assist member 51 is returned to its initial position. Thereafter, during the period from time t3 to time t4, the tilt detachment mechanism 5 is operated to increase the tilt angle θ1 of the workpiece W, thereby detaching the workpiece W.

[0164] In this way, in each embodiment, even if the timing of operating the detachment assistance mechanism 9, the inclined detachment mechanism 5, and the vertical detachment mechanism 7 is appropriately changed, the workpiece W can be accurately detached from the adhesive material C without reducing the adhesive force of the adhesive material C. Note that the timing chart is not limited to the configurations shown in Figures 33 to 35, and the process of detaching the workpiece W may be performed according to other timing charts.

[0165] (4) In each embodiment, the number of detachment assist members 51 is not limited to one, and a configuration may be provided with a plurality of detachment assist members 51. As an example, in the configuration of embodiment 1, three detachment assist members 51 may be arranged side by side in the y direction on the left end side Lf of the workpiece W, and each detachment assist member 51 may be moved horizontally to the right to insert the tip portion 53 between the workpiece W and the adhesive material C. [Explanation of symbols]

[0166] 1 … Work removal device 3 ... Stack support mechanism 4 … Work holding plate 5. Tilt release mechanism 6 … Foundation 7 … Vertical release mechanism 8 … Pillar 9 … Release aid mechanism 10 ... Top plate 11 … Support table 12 … Support holding plate 13 … Vacuum equipment 14 ... Control section 15 … Input section 17 ... Inclined plate 19 ... Cam 21 … Rotating shaft 23 … Rotation axis 25 … Motor 27 ... Motor 29 ... horizontal plate 31 ... Electric cylinder 33 … Linear guide 35 ... Rod section 37 ... Support member 39 ... Link member 40 … Support shaft 41 … Support shaft 43 … Foundation 44 … Vertical rail 45 … Lift platform 47 … Support stand 49 ... Electric slider 51 ... Release aid parts 53 … Tip 55 ... Laminated body rotation mechanism 57 … Rotation axis 59 ... Motor W … Work C…Adhesive material P...Support WP: Work stack SP: Support laminate EL ... element

Claims

1. A support holding mechanism that holds a work stack in which a support, an adhesive material, and a work are stacked in this order from the support; a workpiece holding mechanism that holds the workpiece from an opposite side to an interface between the workpiece and the adhesive material; a work detachment mechanism that detaches the work from the adhesive material while the work stack is held by the support holding mechanism; Equipped with The workpiece detachment mechanism includes: A detachment assist member having a tip portion having a predetermined shape; an auxiliary member insertion mechanism that inserts the tip portion of the detachment auxiliary member into an interface between the workpiece and the adhesive material to detach at least a portion of the workpiece from the adhesive material; a separation mechanism that separates the workpiece holding mechanism, which is in a state of holding the workpiece, from the support body holding mechanism; A workpiece removal device comprising:

2. In the workpiece removing device according to claim 1, The spacing mechanism includes: The support holding mechanism includes a vertical release mechanism that separates the work holding mechanism in a direction perpendicular to a holding surface that holds the work stack, The workpiece detachment mechanism includes: a detachment control mechanism for controlling the vertical detachment mechanism and the auxiliary member insertion mechanism, The release control mechanism includes: A workpiece detachment device which starts an operation by the vertical detachment mechanism after starting an operation of inserting the tip portion of the detachment auxiliary member into the interface between the workpiece and the adhesive material by the auxiliary member insertion mechanism.

3. In the workpiece removing device according to claim 1, The spacing mechanism includes: The support holding mechanism includes a vertical release mechanism that separates the work holding mechanism in a direction perpendicular to a holding surface that holds the work stack, The workpiece detachment mechanism includes: a detachment control mechanism for controlling the vertical detachment mechanism and the auxiliary member insertion mechanism, The release control mechanism includes: A workpiece removal device that, after the vertical removal mechanism starts operation, inserts the tip of the removal auxiliary member into the interface between the workpiece and the adhesive material using the auxiliary member insertion mechanism.

4. In the workpiece removing device according to claim 1, The spacing mechanism includes: a tilt release mechanism that separates the workpiece holding mechanism from the support body holding mechanism so that one side of the workpiece holding mechanism is spaced from the support body holding mechanism by a larger distance than the other side of the workpiece holding mechanism; The workpiece detachment mechanism includes: a removal control mechanism for controlling the tilt removal mechanism and the auxiliary member insertion mechanism, The release control mechanism includes: A workpiece removal device that starts operation by the tilt removal mechanism after operation by the auxiliary member insertion mechanism has started.

5. In the workpiece removing device according to claim 1, The spacing mechanism includes: a tilt release mechanism that separates the workpiece holding mechanism from the support body holding mechanism so that one side of the workpiece holding mechanism is spaced from the support body holding mechanism by a larger distance than the other side of the workpiece holding mechanism; The workpiece detachment mechanism includes: a removal control mechanism for controlling the tilt removal mechanism and the auxiliary member insertion mechanism, The release control mechanism includes: A workpiece removal device that, after the inclined removal mechanism starts operation, inserts the tip of the removal auxiliary member into the interface between the workpiece and the adhesive material using the auxiliary member insertion mechanism.

6. In the workpiece removing device according to claim 1, The spacing mechanism includes: A vertical removal mechanism that separates the workpiece holding mechanism in a direction perpendicular to a holding surface on which the support holding mechanism holds the workpiece stack; a tilt release mechanism that separates the work holding mechanism from the support holding mechanism so that one side of the work holding mechanism is spaced from the support holding mechanism by a larger distance than the other side of the work holding mechanism; Equipped with The workpiece detachment mechanism includes: a detachment control mechanism for controlling the vertical detachment mechanism, the inclined detachment mechanism, and the auxiliary member insertion mechanism, The release control mechanism includes: A workpiece removal device that starts operation by the tilt removal mechanism after operation by the auxiliary member insertion mechanism has started, and further starts operation by the vertical removal mechanism after operation by the tilt removal mechanism has started.

7. In the workpiece removing device according to claim 1, The spacing mechanism includes: A vertical removal mechanism that separates the workpiece holding mechanism in a direction perpendicular to a holding surface on which the support holding mechanism holds the workpiece stack; a tilt release mechanism that separates the work holding mechanism from the support holding mechanism so that one side of the work holding mechanism is spaced from the support holding mechanism by a larger distance than the other side of the work holding mechanism; Equipped with The workpiece detachment mechanism includes: a detachment control mechanism for controlling the vertical detachment mechanism, the inclined detachment mechanism, and the auxiliary member insertion mechanism, The release control mechanism includes: A workpiece removal device that starts operation by the auxiliary member insertion mechanism after operation by the inclined removal mechanism has started, and further starts operation by the vertical removal mechanism after operation by the auxiliary member insertion mechanism has started.

8. In the workpiece removing device according to any one of claims 4 to 7, The workpiece has a shape including a corner, A rotation mechanism is provided that rotates the support holding mechanism that holds the workpiece stack so that the corner portion of the workpiece faces the tip portion of the detachment auxiliary member, The auxiliary member insertion mechanism includes: In a state in which the rotation mechanism rotates the support holding mechanism so that the corner portion of the workpiece faces the tip portion of the detachment auxiliary member, the tip portion of the detachment auxiliary member is inserted into an interface between the corner portion of the workpiece and the adhesive material to peel off at least a portion of the workpiece from the adhesive material; The tilt release mechanism includes: A work removal device that separates the work holding mechanism from the support body holding mechanism so that one side of the work holding mechanism that holds the corner portion of the work is spaced apart from the support body holding mechanism at a greater distance than the other side of the work holding mechanism.

9. In the workpiece removing device according to any one of claims 1 to 7, A work removal device, wherein the distance by which the auxiliary member insertion mechanism inserts the removal auxiliary member into the interface between the workpiece and the adhesive is less than or equal to 1 / 4 of the length of the workpiece in the insertion direction of the removal auxiliary member.

10. In the workpiece removing device according to any one of claims 1 to 7, The detachment assisting member is provided in plurality, A workpiece removal device in which each of the multiple removal assistance members is inserted at a different position on the interface between the workpiece and the adhesive material.

11. a support holding process in which a work stack in which a support, an adhesive material, and a work are stacked in this order is held from the support side by a support holding mechanism; a work holding process in which the work is held from an opposite side of the interface between the work and the adhesive material by a work holding mechanism; a work detachment process of detaching the work from the adhesive material while the work stack is held by the support holding mechanism; Equipped with The workpiece removal process includes: an auxiliary member insertion process in which a tip end of a detachment auxiliary member having a predetermined shape is inserted into an interface between the workpiece and the adhesive material to detach at least a portion of the workpiece from the adhesive material; a separating process of separating the workpiece holding mechanism, which is in a state of holding the workpiece, from the support body holding mechanism; The workpiece detachment method includes the steps of:

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