Conveying device

Abstract

To provide a technique capable of suppressing temperature rise of a motor in a conveying device that conveys a conveyance object within a vacuum chamber.SOLUTION: A conveying device 10 includes: an arm unit 1 which is disposed within a vacuum chamber 20; a shell 2 which supports the arm unit 1; a motor 3 being a drive source of the arm unit 1 which includes a support shaft 31 having a hollow portion 31h extending in an axial direction, a stator 32 supported on the outer peripheral side of the support shaft 31, and a rotor 33 provided on the outer peripheral side of the stator 32; and an air flow formation part 330 that circulates gas through the hollow portion 31h.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a transport device. [Background technology]

[0002] In manufacturing processes of semiconductors and liquid crystals, a transport device (transport robot) for transporting substrates is required. The transport device includes, for example, a hand for holding the substrate, an arm supporting one end of the hand in a cantilever manner, and a body supporting one end of the arm in a cantilever manner, and the arm rotates with respect to the body and the hand rotates with respect to the arm. As a driving source for driving the hand and the arm, an inner rotor type motor in which the rotor is arranged inside the stator may be used (for example, Patent Document 1), or an outer rotor type motor in which the rotor is arranged outside the stator may be used (for example, Patent Document 2). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6382213 [Patent Document 2] Patent No. 6800925 Summary of the Invention [Problem to be solved by the invention]

[0004] Incidentally, the motor used as a drive source in the transport device generates heat when electricity is applied. In the case of a typical transport device used in an air atmosphere, at least a part of the heat of the motor is dissipated to the outside through the hand or arm. However, in the case of a transport device used in a vacuum atmosphere, that is, a transport device (vacuum transport robot) that transports substrates and the like in a vacuum chamber, the hand and arm are disposed in the vacuum chamber, so it cannot be expected that the heat of the motor will be dissipated to the outside through the hand or arm. For this reason, the motor is prone to heating up.

[0005] If a motor is prone to heating up, it becomes necessary to reduce the amount of heat generated by the motor (motor loss) in order to ensure that the motor temperature does not exceed a certain temperature limit. However, in order to reduce the amount of heat generated while maintaining the motor's output (torque), the motor must be made larger. And if the motor is made larger, the conveying device will also become larger.

[0006] As described above, in a transport device that transports an object within a vacuum chamber, the motor is prone to temperature rise, which has been an obstacle to making the transport device more compact.

[0007] The present invention has been made to solve the above-mentioned problems, and aims to provide technology that can suppress the temperature rise of a motor in a transport device that transports an object to be transported within a vacuum chamber. [Means for solving the problem]

[0008] In order to achieve the above object, the present invention takes the following measures.

[0009] That is, the present invention is a conveying device comprising: an arm unit arranged in a vacuum chamber; a body supporting the arm unit; a drive source for the arm unit, the drive source being a support shaft having a hollow portion extending in the axial direction, a stator supported on the outer periphery of the support shaft, and a motor including a rotor provided on the outer periphery of the stator; and an airflow forming section for circulating gas through the hollow portion.

[0010] When the arm unit is placed in a vacuum chamber, the heat of the motor is likely to build up because it cannot be expected to be dissipated to the outside through the arm unit. However, with the above configuration, the motor is cooled by the airflow formed in the hollow part of the support shaft. Therefore, even if the heat of the motor is not easily dissipated to the outside through the arm unit, it is possible to prevent the temperature of the motor from rising.

[0011] Preferably, the conveying device is characterized in that it includes a plurality of motors, the support shafts of each of the plurality of motors are arranged coaxially and stacked in the axial direction, and the hollow portions of the support shafts adjacent to each other in the axial direction are connected to each other.

[0012] With this configuration, a continuous airflow can be formed in the hollow portion of the support shaft of each of the multiple motors, making it possible to simply and efficiently cool the multiple motors.

[0013] Preferably, the conveying device is characterized in that it includes a pipe arranged in the hollow portion, and the airflow forming portion circulates the gas through a flow path including a gap provided between the inner surface of the support shaft and the outer surface of the pipe and the inside of the pipe, thereby forming an airflow that moves back and forth along the extension direction of the support shaft.

[0014] According to this configuration, the gas can be exhausted from the same side as the gas is introduced in the extending direction of the support shaft, so that the structure is simplified.

[0015] Preferably, the conveying device is characterized in that the support shaft has a communication hole that connects the space on the outer periphery of the support shaft with the hollow portion, and the airflow forming unit circulates the gas through a flow path that includes the space on the outer periphery of the support shaft and the hollow portion, thereby forming an airflow that moves back and forth along the extension direction of the support shaft.

[0016] This configuration also simplifies the structure because the gas can be exhausted from the same side as the gas is introduced in the extending direction of the support shaft. In addition, the flow path through which the gas flows is configured to include the space on the outer periphery side of the support shaft, so the airflow can be directly applied to the stator supported on the outer periphery side of the support shaft. Therefore, the stator can be effectively cooled.

[0017] Preferably, in the transport device, the motor includes a partition wall provided between the stator and the rotor for maintaining the rotor side in a vacuum atmosphere.

[0018] According to this configuration, the partition separates the stator from the vacuum atmosphere, thereby preventing dust and gas generated from the stator from entering the vacuum atmosphere. Effect of the Invention

[0019] According to the present invention, in a transport device that transports an object to be transported within a vacuum chamber, a rise in temperature of a motor can be suppressed. [Brief description of the drawings]

[0020] [Figure 1] FIG. 2 is a side view of the transport device according to the embodiment. [Diagram 2] FIG. [Diagram 3] FIG. 4 is an enlarged cross-sectional side view showing a portion where a motor is installed. [Figure 4] FIG. 11 is a diagram for explaining a cooling structure according to a first modified example. [Diagram 5] FIG. 11 is a diagram for explaining a cooling structure according to a second modified example. [Figure 6] FIG. 13 is a diagram for explaining a cooling structure according to a third modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0021] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0022] <1. Overall configuration of the transport device> The overall configuration of a conveying device 10 according to an embodiment will be described with reference to Fig. 1. Fig. 1 is a side view of the conveying device 10.

[0023] The transfer device 10 is a vacuum transfer device (vacuum transfer robot) that transfers an object to be transferred within a vacuum chamber 20. The vacuum chamber 20 separates these two spaces so that gas does not flow from the external space to the internal space. For example, a pump or the like is connected to the vacuum chamber 20, and the pump exhausts gas from the internal space of the vacuum chamber 20, thereby reducing the pressure of the internal space to a vacuum atmosphere (a pressure value equal to or lower than a predetermined value) Q1. In other words, the inside of the vacuum chamber 20 is maintained in the vacuum atmosphere Q1, and the outside of the vacuum chamber 20 is an atmosphere (here, air atmosphere) Q2 with a pressure value higher than the vacuum atmosphere Q1.

[0024] The transfer device 10 includes an arm unit 1 and a body 2. The arm unit 1 is disposed inside a vacuum chamber 20, and the body 2 is disposed outside the vacuum chamber 20. That is, the arm unit 1 is disposed in a vacuum atmosphere Q1, and the body 2 is disposed in an air atmosphere Q2. The arm unit 1 is supported by the body 2. Specifically, for example, a lower end portion of the arm unit 1 is inserted through an opening 20a provided in a bottom wall of the vacuum chamber 20, and supported by a support base 21 provided in the body 2 attached to the bottom wall of the vacuum chamber 20.

[0025] A lifting mechanism 22 is connected to the support base 21 that supports the arm unit 1. The lifting mechanism 22 includes, for example, a motor as a drive source, and a transmission mechanism (e.g., a gear mechanism, a ball screw mechanism, etc.) that transmits the driving force provided by the motor to the support base 21 to lift and lower it. When the lifting mechanism 22 lifts and lowers the support base 21, the arm unit 1 supported by the support base 21 lifts and lowers in the vacuum chamber 20. A bellows 23 that can deform in response to the lifting and lowering of the support base 21 is provided between the opening 20a and the support base 21. The bellows 23 is airtightly connected to the periphery of the opening 20a at one end, and airtightly connected to the support base 21 at the other end. This allows the space between the opening 20a and the support base 21 to be airtightly sealed.

[0026] The transfer device 10 is a horizontal articulated robot. Specifically, the arm unit 1 includes, for example, a first arm 11, a second arm 12, and one or more (here, two) hands 13a and 13b.

[0027] The first arm 11 is a long member extending in a substantially horizontal position, and its base end is connected to the body 2 so as to be rotatable about a first axis L1. The extension direction of the first axis L1 is the vertical direction, and the first arm 11 rotates within a horizontal plane.

[0028] Second arm 12 is a long member extending in a substantially horizontal position, and its base end is connected to the tip end of first arm 11 so as to be rotatable around second axis L2. The extension direction of second axis L2 is the vertical direction, and second arm 12 rotates within a horizontal plane.

[0029] The first hand 13a and the second hand 13b are both long members extending in a substantially horizontal position, and their base ends are connected to the tip end of the second arm 12 so as to be rotatable around the third axis L3. The third axis L3 extends vertically, and both the first hand 13a and the second hand 13b rotate within a horizontal plane. The first hand 13a and the second hand 13b hold the object to be transported at their tips (so-called end effectors). As an example, each of the hands 13a and 13b has a fork-like tip that branches into two branches.

[0030] The object to be transferred by the transfer device 10 is, for example, a substrate. That is, various modules 30 (for example, an Equipment Front End Module (EFEM) which is an interface for transferring the substrate to and from a storage vessel that stores the substrate, a processing module for performing various processes on the substrate, etc.) are connected to the vacuum chamber 20 directly or via a load lock chamber. The transfer device 10 transfers the substrate between the modules 30 connected to the vacuum chamber 20. The transfer device 10, the vacuum chamber 20, and the modules 30 constitute a substrate processing apparatus 100.

[0031] <2. Arm unit drive configuration> The configuration relating to the drive of the arm unit 1 will be described with reference to Figures 2 and 3. Figure 2 is a side cross-sectional view of the transport device 10. Figure 3 is an enlarged side cross-sectional view showing a portion where the motor 3 is installed.

[0032] (a) Motor role and layout As shown in Fig. 2, the transport device 10 includes a plurality of (four in this embodiment) motors 3A, 3B, 3C, and 3D that are drive sources for the arm unit 1. The first motor 3A provides a drive force for rotating the first arm 11 around the first axis L1. The second motor 3B provides a drive force for rotating the first hand 13a around the third axis L3. The third motor 3C provides a drive force for rotating the second hand 13b around the third axis L3. The fourth motor 3D provides a drive force for rotating the second arm 12 around the second axis L2.

[0033] The first motor 3A, the second motor 3B, the third motor 3C, and the fourth motor 3D are arranged coaxially with the first axis L1 and stacked in the axial direction (vertical direction). Specifically, the support shaft 31 (described later) of the first motor 3A is arranged coaxially with the first axis L1 while being supported at its lower end by the support base 21. The support shaft 31 of the second motor 3B is arranged coaxially with the first axis L1 and stacked on the support shaft 31 of the first motor 3A. The support shaft 31 of the third motor 3C is arranged coaxially with the first axis L1 and stacked on the support shaft 31 of the second motor 3B. The support shaft 31 of the fourth motor 3D is arranged coaxially with the first axis L1 and stacked on the support shaft 31 of the third motor 3C. The support shafts 31 adjacent to each other in the axial direction (vertical direction) may be connected via a connecting member such as a bolt, or may be formed integrally.

[0034] At least one of the four motors 3A, 3B, 3C, 3D, which are arranged coaxially with the first axis L1 and stacked vertically, is arranged inside the arm unit 1. As an example, the three motors from the top (the fourth motor 3D, the third motor 3C, and the second motor 3B) are housed inside the housing 11m of the first arm 11. The remaining motor (the first motor 3A) is arranged, for example, in a space surrounded by the bellows 23 and the support base 21 within the internal space of the body 2.

[0035] (b) Motor configuration The first motor 3A, the second motor 3B, the third motor 3C, and the fourth motor 3D have the same basic configuration. In the following, when the first motor 3A, the second motor 3B, the third motor 3C, and the fourth motor 3D are not distinguished from one another, they will be simply referred to as "motors 3."

[0036] As shown in FIG. 3, the motor 3 includes a support shaft 31, a stator 32, a rotor 33, and a partition wall .

[0037] The support shaft 31 is a rod-shaped shaft body extending in the axial direction. A hollow portion 31h extending in the axial direction is provided on the inner side (axial center side) of the support shaft 31. Here, the hollow portion 31h penetrates the support shaft 31 in the axial direction. In other words, the support shaft 31 is cylindrical.

[0038] The stator 32 is cylindrical, arranged coaxially with the support shaft 31, and supported on the outer periphery of the support shaft 31. Specifically, for example, the support shaft 31 is provided with flange portions 311 that protrude in the radial direction at one end side and the other end side in the axial direction, and the stator 32 is supported between the pair of flange portions 311, 311. That is, the stator 32 is accommodated in a space (stator accommodating space) E surrounded by the outer periphery of the support shaft 31 and the pair of flange portions 311, 311, and is supported by the support shaft 31. The stator 32 includes, for example, a stator core and a coil wound around it. The stator 32 (specifically, the coil) is connected to a power supply unit (not shown) via a lead wire (not shown). The lead wire is, for example, inserted through an insertion hole (not shown) provided in the support shaft 31 and arranged between the stator 32 and the power supply unit.

[0039] The rotor 33 is provided on the outer periphery of the stator 32. As an example, the rotor 33 is cylindrical with an inner diameter larger than the outer diameter of the stator 32, and is arranged coaxially with the stator 32 so as to surround the stator 32 from the outside. In other words, the motor 3 is a so-called outer rotor type motor in which the rotor 33 is arranged outside the stator 32. When power is supplied from a power supply unit to the stator 32 (specifically, a coil) through a lead wire, the rotor 33 rotates around the stator 32, generating a driving force (rotational driving force). Here, since the rotor 33 is arranged outside the stator 32, as will be apparent later, it is possible to transmit the rotation of the rotor 33 to a driven object without passing through a shaft. This allows the axial dimension to be kept small.

[0040] The partition wall 34 is provided between the stator 32 and the rotor 33, and separates (isolates) the two spaces so that gas does not flow between the space on the stator 32 side and the space on the rotor 33 side. Specifically, the partition wall 34 is, for example, thin-walled and tubular, and is arranged coaxially with the stator 32 and the rotor 33, and is provided in the gap between the stator 32 and the rotor 33, and each end in the axial direction is airtightly connected to each flange portion 311 of the support shaft 31. The space outside the partition wall 34 communicates with the internal space of the vacuum chamber 20, and the space inside the partition wall 34 communicates with the external space of the vacuum chamber 20. That is, the space outside the partition wall 34 (the rotor 33 side) is held in a vacuum atmosphere Q1, and the space inside the partition wall 34 (the stator 32 side) is held in an air atmosphere Q2. That is, the partition wall 34 serves as a vacuum partition wall (vacuum barrier) that separates the stator 32 from the vacuum atmosphere Q1.

[0041] As described above, here, the four motors 3 are arranged coaxially with the first axis L1 and stacked in the axial direction (vertical direction), with three of the four motors 3 arranged in the arm unit 1 and the remaining one arranged in the body 2. In other words, here, the internal space of the arm unit 1 (specifically, the internal space of the housing 11m of the first arm 11 and the internal space of the housing 12m of the second arm 12) and the space surrounded by the bellows 23 and the support base 21 out of the internal space of the body 2 are maintained in a vacuum atmosphere Q1, except for the space inside the partition wall 34 of each motor 3 (on the stator 32 side) (see FIG. 1).

[0042] (c) Driving mode The first motor 3A is a direct drive motor that is directly connected to a load. That is, the rotor 33 of the first motor 3A is connected to the first arm 11 on the outer periphery side. Therefore, when the rotor 33 of the first motor 3A rotates about the first axis L1 by supplying power to the stator 32 of the first motor 3A, the first arm 11 rotates about the first axis L1. That is, the first arm 11 rotates about the first axis L1 by the driving force provided by the first motor 3A.

[0043] A first rotation transmission mechanism 4a and a second rotation transmission mechanism 5a are provided between the second motor 3B and the first hand 13a. The first rotation transmission mechanism 4a includes a first pulley 41a, a second pulley 42a, and a belt 43a stretched between them. These parts 41a, 42a, and 43a are housed in a housing 11m of the first arm 11. The second rotation transmission mechanism 5a includes a third pulley 51a, a fourth pulley 52a, and a belt 53a stretched between them. These parts 51a, 52a, and 53a are housed in a housing 12m of the second arm 12.

[0044] The first pulley 41a is connected to the outer periphery of the rotor 33 of the second motor 3B on the inner periphery side. The second pulley 42a and the third pulley 51a are both arranged coaxially with the second axis L2 and are connected to each other on the inner periphery side via the shaft body 44a. The fourth pulley 52a is arranged coaxially with the third axis L3 and is connected to the first hand 13a on the inner periphery side via the shaft body 54a. Therefore, when the rotor 33 of the second motor 3B rotates around the first axis L1 by supplying power to the stator 32 of the second motor 3B, the first pulley 41a rotates, and the driving force is transmitted through the belt 43a to rotate the second pulley 42a and the third pulley 51a. When the third pulley 51a rotates, the driving force is transmitted through the belt 53a to rotate the fourth pulley 52a, and the first hand 13a rotates around the third axis line L3. That is, the first hand 13a rotates around the third axis line L3 by the driving force provided by the second motor 3B.

[0045] A first rotation transmission mechanism 4b and a second rotation transmission mechanism 5b are provided between the third motor 3C and the second hand 13b. The first rotation transmission mechanism 4b includes a first pulley 41b, a second pulley 42b, and a belt 43b stretched between them. These parts 41b, 42b, and 43b are housed in a housing 11m of the first arm 11. The second rotation transmission mechanism 5b includes a third pulley 51b, a fourth pulley 52b, and a belt 53b stretched between them. These parts 51b, 52b, and 53b are housed in a housing 12m of the second arm 12.

[0046] The first pulley 41b is connected to the outer periphery of the rotor 33 of the third motor 3C on the inner periphery side. The second pulley 42b and the third pulley 51b are both arranged coaxially with the second axis L2 and are connected to each other on the inner periphery side via the shaft body 44b. The fourth pulley 52b is arranged coaxially with the third axis L3 and is connected to the second hand 13b on the inner periphery side via the shaft body 54b. Therefore, when the rotor 33 of the third motor 3C rotates around the first axis L1 by supplying power to the stator 32 of the third motor 3C, the first pulley 41b rotates, and the driving force is transmitted through the belt 43b to rotate the second pulley 42b and the third pulley 51b. When the third pulley 51b rotates, the driving force is transmitted through the belt 53b to rotate the fourth pulley 52b, and the second hand 13b rotates around the third axis L3. That is, the second hand 13b rotates around the third axis L3 by the driving force provided by the third motor 3C.

[0047] A rotation transmission mechanism 6 is provided between the fourth motor 3D and the second arm 12. The rotation transmission mechanism 6 includes a first pulley 61, a second pulley 62, and a belt 63 stretched between them. These components 61, 62, and 63 are housed within a housing 11m of the first arm 11.

[0048] The first pulley 61 is connected to the outer periphery of the rotor 33 of the fourth motor 3D on the inner periphery side. The second pulley 62 is disposed coaxially with the second axis L2 and is connected to the second arm 12 on the inner periphery side. Therefore, when the rotor 33 of the fourth motor 3D rotates around the first axis L1 by supplying power to the stator 32 of the fourth motor 3D, the first pulley 61 rotates, and the driving force is transmitted through the belt 63 to rotate the second pulley 62. When the second pulley 62 rotates, the second arm 12 revolves around the second axis L2. That is, the second arm 12 revolves around the second axis L2 by the driving force provided by the fourth motor 3D.

[0049] <3. Cooling structure> The conveying device 10 includes a cooling structure M that cools the motor 3. The cooling structure M will be described with continued reference to FIGS.

[0050] The cooling structure M includes a connecting shaft 310, a pipe 320, and an airflow forming portion 330.

[0051] (Connected shaft) As described above, each of the four motors 3A, 3B, 3C, and 3D included in the conveying device 10 includes a support shaft 31 that supports a stator 32 on the outer periphery. The support shafts 31 of the motors 3A, 3B, 3C, and 3D are arranged coaxially with the first axis L1 and stacked in the axial direction. Hereinafter, a structure including the four support shafts 31 stacked in the axial direction is referred to as a "connected shaft 310." Four stator accommodating spaces E are arranged along the axial direction on the outer periphery of the connected shaft 310, and a stator 32 is accommodated in each stator accommodating space E.

[0052] As described above, a hollow portion 31h is provided on the inner side of each support shaft 31, extending in the axial direction and penetrating the support shaft 31. When the four support shafts 31 are coaxially arranged and stacked, the hollow portions 31h of the support shafts 31 adjacent in the axial direction communicate with each other. In other words, the four hollow portions 31h form a hollow portion on the inner side of the connected shaft 310, extending in the axial direction and penetrating the connected shaft 310. Hereinafter, the hollow portion formed in the connected shaft 310 is referred to as a "connected hollow portion 310h."

[0053] As described above, the lower end of the connecting shaft 310 (i.e., the lower end of the support shaft 31 of the first motor 3A) is supported by the support base 21. The support base 21 is provided with an opening 211 that connects the lower opening of the connecting hollow portion 310h to the space below the support base 21. The space below the support base 21 is a space that connects to the external space of the body 2, and is the atmospheric atmosphere Q2. In other words, by connecting to the external space via the opening 211, the connecting hollow portion 310h and the space on the outer periphery side of the connecting shaft 310 (the stator accommodating space E) become the atmospheric atmosphere Q2. The atmospheric atmosphere Q2 is sealed by the partition wall 34 of each motor 3. In other words, as described above, the space inside the partition wall 34 is maintained in the atmospheric atmosphere Q2 (see FIG. 1).

[0054] (pipe) The pipe 320 is a rod-shaped shaft extending in the axial direction. The pipe 320 is disposed coaxially with the connecting shaft 310 and provided in the connecting hollow portion 310h. The outer diameter of the pipe 320 is smaller than the inner diameter of the connecting shaft 310, and a gap G is provided between the outer peripheral surface of the pipe 320 and the inner peripheral surface of the connecting shaft 310.

[0055] A hollow portion (pipe hollow portion) 320h extending in the axial direction is provided on the inner side (axial center side) of the pipe 320. Here, the pipe hollow portion 320h penetrates the pipe 320 in the axial direction. That is, the pipe 320 is cylindrical.

[0056] A communication hole 321 that connects a space on the outer periphery side of the pipe 320 to a space on the inner periphery side (i.e., the gap G and the pipe hollow portion 320h) is provided near the upper end edge of the pipe 320. A plurality of communication holes 321 are provided, for example, all over the circumferential direction of the pipe 320.

[0057] A lid 322 that closes the upper opening of the pipe hollow portion 320h is provided on the upper end edge of the pipe 320. The lid 322 protrudes outward in the radial direction of the pipe 320, and the protruding portion abuts against the upper end surface of the connecting shaft 310 from above and is airtightly connected to the upper end surface. This closes the upper opening of the connecting hollow portion 310h, and the pipe 320 is suspended and supported within the connecting hollow portion 310h.

[0058] The pipe 320 is longer than the connecting shaft 310. That is, the lower end edge of the pipe 320 is lower than the lower end edge of the connecting shaft 310. The lower end edge of the pipe 320 faces the external space of the body 2 or a space communicating with the external space. No lid is provided on the lower end edge of the pipe 320. That is, the lower opening of the pipe hollow portion 320h is open to the external space.

[0059] (Air flow forming part) The airflow forming unit 330 circulates gas (cooling gas, for example, air here) through the connected hollow portion 310h of the connected shaft 310 (i.e., the hollow portion 31h of each support shaft 31). Specifically, for example, the airflow forming unit 330 circulates air through a flow path including the gap G and the pipe hollow portion 320h to form an airflow that reciprocates along the extension direction of the connected shaft 310 (i.e., each support shaft 31).

[0060] As an example, the airflow forming unit 330 includes a push type fan 331. The fan 331 is disposed, for example, below the lower end edge of the connecting shaft 310 and above the lower end edge of the pipe 320 with an air outlet facing upward, and blows out air from the air outlet.

[0061] When the fan 331 is operated, air blown upward from the air outlet flows into the gap G from the lower end edge of the connecting shaft 310, and an air current flowing upward through the gap G is formed. This air current removes heat from the stators 32 supported by each support shaft 31. That is, each stator 32 is cooled by removing heat. The air that reaches the upper end of the connecting shaft 310 collides with the lid 322 and flows into the pipe hollow portion 320h through the communication hole 321. The air that flows into the pipe hollow portion 320h flows downward through the pipe hollow portion 320h and flows out from the lower end edge of the pipe 320. That is, the air that has been heated by removing heat from each stator 32 is exhausted to the outside space.

[0062] <4. Effects> The conveying device 10 according to the embodiment described above includes an arm unit 1 arranged in a vacuum chamber 20, a body 2 supporting the arm unit 1, a motor 3 serving as a drive source for the arm unit 1 (specifically, the motor 3 including a support shaft 31 having a hollow portion 31h extending in the axial direction, a stator 32 supported on the outer periphery of the support shaft 31, and a rotor 33 provided on the outer periphery of the stator 32), and an airflow forming unit 330 for circulating gas through the hollow portion 31h. When the arm unit 1 is arranged in the vacuum chamber 20 (that is, in the vacuum atmosphere Q1), it is not expected that the heat of the motor 3 will be dissipated to the outside through the arm unit 1, and therefore the heat of the motor 3 is likely to build up. However, here, the motor 3 (particularly the stator 32 supported by the support shaft 31) is cooled by being removed from the heat by the airflow formed in the hollow portion 31h of the support shaft 31. Therefore, even if the heat of the motor 3 is not easily dissipated to the outside through the arm unit 1, the temperature rise of the motor 3 can be suppressed.

[0063] Various effects are obtained by suppressing the temperature rise of the motor 3. First, if the temperature rise of the motor 3 is suppressed, the upper limit of the allowable heat generation amount of the motor 3 (i.e., the upper limit of the heat generation amount of the motor 3 for ensuring that the temperature of the motor 3 does not exceed a predetermined temperature limit value) becomes large. Therefore, the motor 3 can be made smaller while realizing the output required for the motor 3. In turn, the transport device 10 can be made smaller. Second, if the temperature rise of the motor 3 is suppressed, the members arranged around the motor 3 (e.g., bearings, angle detectors (encoders, resolvers, etc.)) are prevented from being thermally damaged or having a shortened life due to the heat of the motor 3. Third, if the temperature rise of the motor 3 is suppressed, the thermal deformation (e.g., thermal expansion) of the arm unit 1 is suppressed. The thermal deformation of the arm unit 1 can lead to a decrease in the positioning accuracy of the transport object (here, the substrate), but if the thermal deformation of the arm unit 1 is suppressed, the positioning accuracy of the substrate is sufficiently guaranteed.

[0064] Moreover, the conveying device 10 according to the above embodiment includes a plurality of motors 3. The motors 3 are arranged coaxially and stacked in the axial direction. This configuration simplifies the device structure compared to the case where the motors 3 are arranged in a dispersed manner. The stacked motors 3 are arranged coaxially with the first axis L1, which is the rotation center of the first arm 11, so that the center of gravity of the arm unit 1 can be stabilized. On the other hand, when the motors 3 are arranged stacked in the axial direction, the heat of the motor 3 located relatively far from the external space in the axial direction (in the above embodiment, the relatively upper position) tends to be trapped. However, as described above, the motors 3 are forcibly cooled by the airflow formed in the hollow portion 31h of the support shaft 31, so that the temperature rise of the motor 3 located relatively far from the external space in the axial direction is sufficiently suppressed. That is, by providing the cooling structure M including the support shaft 31 and the airflow forming portion 330, it is possible to adopt a configuration in which the motors 3 are arranged stacked in the axial direction.

[0065] In the above embodiment, at least one of the multiple motors 3 stacked in the axial direction is disposed in the arm unit 1. With this configuration, the dimensions (dimensions in the axial direction (vertical direction)) of the transport device 10 can be made smaller than when all the motors 3 are disposed in the body 2. On the other hand, since the arm unit 1 is disposed in the vacuum chamber 20, the motor 3 disposed in the arm unit 1 is likely to retain heat. However, as described above, the motor 3 is forcibly cooled by the airflow formed in the hollow portion 31h of the support shaft 31, so that the temperature rise of the motor 3 disposed in the arm unit 1 is sufficiently suppressed. In other words, by providing the cooling structure M, it is possible to adopt a configuration in which at least one motor 3 is disposed in the arm unit 1.

[0066] In the above embodiment, the motor 3 includes a partition wall 34 that is provided between the stator 32 and the rotor 33 and keeps the rotor 33 in the vacuum atmosphere Q1. With this configuration, the partition wall 34 separates the stator 32 from the vacuum atmosphere Q1, so that dust and gas generated from the stator 32 can be prevented from entering the vacuum atmosphere Q1. In addition, since the stator 32 is disposed in the air atmosphere Q2, for example, a lead wire extending from a power supply unit disposed in an external space can be easily connected to the stator 32 (specifically, a coil). On the other hand, in an outer rotor type motor 3 in which the rotor 33 is disposed outside the stator 32, if the outside of the partition wall 34 is made into the vacuum atmosphere Q1, heat generated in the stator 32 is not dissipated from the radially outer side. For this reason, the heat generated in the stator 32 is particularly likely to be trapped. However, as described above, the stator 32 is forcibly cooled by the airflow formed in the hollow portion 31h of the support shaft 31, so that the temperature rise of the stator 32 is sufficiently suppressed. That is, by providing the cooling structure M, it becomes possible to adopt a configuration in which the partition wall 34 is provided between the stator 32 and the rotor 33.

[0067] In the above embodiment, the multiple motors 3 (specifically, the support shafts 31 of each motor 3) are coaxially arranged and stacked in the axial direction, and the hollow portions 31h of the support shafts 31 adjacent to each other in the axial direction are in communication with each other. With this configuration, a continuous airflow can be formed in the hollow portions 31h of the support shafts 31 of each of the multiple motors 3. Therefore, the multiple motors 3 can be simply and efficiently cooled.

[0068] Moreover, the conveying device 10 according to the above embodiment includes a pipe 320 disposed in the hollow portion 31h, and the airflow forming portion 330 circulates the gas through a flow path including a gap G provided between the inner circumferential surface of the connecting shaft 310 (i.e., the support shaft 31) and the outer circumferential surface of the pipe 320 and the inside of the pipe 320 (the pipe hollow portion 320h), thereby forming an airflow that travels back and forth along the extending direction of the connecting shaft 310. With this configuration, the gas can be discharged from the same side as the side where the gas was introduced in the extending direction of the connecting shaft 310, thus simplifying the structure.

[0069] In the above embodiment, one opening of the pipe hollow portion 320h is closed, and a communication hole 321 that communicates between the space on the outer periphery side and the space on the inner periphery side of the pipe 320 is provided near the edge on that side of the pipe 320. With this configuration, the gas can be made to travel back and forth along the extension direction of the support shaft 31 without complicating the configuration.

[0070] In the above embodiment, the airflow forming unit 330 forms an airflow that flows upward through the gap G. Therefore, the motor 3 that is disposed in a relatively low position can be cooled relatively strongly. This configuration is effective, for example, when a motor 3 that is relatively likely to heat up (for example, the first motor 3A that is most likely to generate the greatest amount of heat due to the greatest load) is disposed in a relatively low position.

[0071] <5. Modifications> The conveying device 10 according to the above embodiment can be modified as appropriate. Modified examples of the conveying device 10 will be described below. Note that, in the following, differences from the above embodiment will be described, and elements that do not differ from the above embodiment will be indicated with the same reference numerals and will not be described.

[0072] <5-1. Cooling structure according to the first modified example> The cooling structure Ma according to the first modified example will be described with reference to Fig. 4. Fig. 4 is a diagram for explaining the cooling structure Ma according to the first modified example.

[0073] The cooling structure Ma includes a connecting shaft 310, a pipe 320, and an airflow forming portion 330a.

[0074] The airflow forming unit 330a, like the airflow forming unit 330 according to the above embodiment, circulates a gas (cooling gas, for example, air here) through the connected hollow portion 310h. Specifically, for example, the airflow forming unit 330a circulates air through a flow path including the gap G and the pipe hollow portion 320h to form an airflow that reciprocates along the extension direction of the connected shaft 310 (i.e., each support shaft 31).

[0075] As an example, the airflow forming section 330a includes a pull-type fan 332. The fan 332 is disposed, for example, below the lower end edge of the connecting shaft 310 and above the lower end edge of the pipe 320 with its suction port facing upward and its outlet facing downward, sucking in air from the suction port and blowing the sucked air out from the outlet. The outlet of the fan 332 faces the external space of the body 2 or a space communicating with the external space.

[0076] When the fan 332 operates, air is sucked in from the suction port. Then, air flows into the pipe hollow portion 320h from the lower end edge of the pipe 320 and flows upward through the pipe hollow portion 320h. The air that reaches the upper end of the connecting shaft 310 collides with the lid 322 and flows into the gap G through the communication hole 321, forming an airflow that flows downward through the gap G. This airflow removes heat from the stators 32 supported by each support shaft 31. That is, each stator 32 is cooled by removing heat. The air that flows out from the lower end edge of the gap G is sucked in from the suction port of the fan 332 and blown out from the blowout port. That is, the air that has been heated by removing heat from each stator 32 is exhausted to the outside space.

[0077] In this modified example, similarly to the above embodiment, the airflow forming section 330a circulates the gas through a flow path including the gap G and the inside of the pipe 320 (the pipe hollow section 320h), forming an airflow that travels back and forth along the extending direction of the connecting shaft 310. With this configuration, the gas can be exhausted from the same side as the side where the gas was introduced in the extending direction of the connecting shaft 310, thus simplifying the structure.

[0078] However, in this modification, the airflow forming part 330a forms an airflow that flows downward through the gap G. Therefore, the motor 3 that is disposed in a relatively high position can be cooled relatively strongly. This configuration is effective, for example, when the motor 3 that is relatively likely to heat up is disposed in a relatively high position.

[0079] <5-2. Cooling structure according to the second modified example> The cooling structure Mb according to the second modified example will be described with reference to Fig. 5. Fig. 5 is a diagram for explaining the cooling structure Mb according to the second modified example.

[0080] The cooling structure Mb includes a connecting shaft 310, a pipe 320b, and an airflow forming portion 330b.

[0081] The pipe 320b has a configuration similar to that of the pipe 320 according to the above embodiment, but differs in that in addition to the communication hole 321, the pipe 320b has an intermediate communication hole 323.

[0082] As described above, the communication hole 321 is provided near the upper end edge of the pipe 320b, and connects the space on the outer periphery side of the pipe 320b with the space on the inner periphery side (i.e., the gap G and the pipe hollow portion 320h). For example, a plurality of communication holes 321 are provided over the entire circumferential direction of the pipe 320b.

[0083] The midway communication hole 323 is provided at a position corresponding to the motor 3 in the extension direction of the pipe 320 (for example, a position overlapping with the motor 3 when viewed from the side), and communicates the space on the outer periphery side and the space on the inner periphery side of the pipe 320b. The midway communication hole 323 may be provided at a position corresponding to each of one or more motors 3 arbitrarily selected from the four motors 3A, 3B, 3C, and 3D. In the example shown in the figure, the midway communication hole 323 is provided at a position corresponding to the first motor 3A. A plurality of midway communication holes 323 are provided, for example, over the entire circumferential direction of the pipe 320b.

[0084] The airflow forming unit 330b, like the airflow forming unit 330 according to the above embodiment, circulates a gas (cooling gas, for example, air here) through the connected hollow portion 310h. Specifically, for example, the airflow forming unit 330b circulates air through a flow path including the gap G and the pipe hollow portion 320h to form an airflow that reciprocates along the extension direction of the connected shaft 310 (i.e., each support shaft 31).

[0085] As an example, the airflow forming section 330b includes a pull-type fan 332, similar to the airflow forming section 330a according to the first modification. The fan 332 is disposed, for example, below the lower end edge of the connecting shaft 310 and above the lower end edge of the pipe 320b, with its intake port facing upward and its outlet facing downward, and draws in air from the intake port and blows out the drawn-in air from the outlet. The outlet of the fan 332 faces the external space of the body 2 or a space communicating with the external space.

[0086] When the fan 332 operates, air is sucked in from the suction port. Then, air flows into the pipe hollow section 320h from the lower end edge of the pipe 320b, and flows upward through the pipe hollow section 320h. The airflow flowing upward through the pipe hollow section 320h branches at the position where the intermediate communication hole 323 is formed. That is, a part of the airflow flowing upward through the pipe hollow section 320h flows into the gap G through the intermediate communication hole 323, and forms an airflow flowing downward through the gap G (first branched flow). On the other hand, the rest of the airflow flowing upward through the pipe hollow section 320h continues to flow upward through the pipe hollow section 320h, collides with the lid 322, flows into the gap G through the communication hole 321, and forms an airflow flowing downward through the gap G (second branched flow). The first branched flow removes heat from the stator 32 (the stator 32 of the first motor 3A in the illustrated example) that is provided at a position corresponding to the intermediate communication hole 323. The second branched flow removes heat from each stator 32, starting from the stator 32 that is provided at the top (the stator 32 of the fourth motor 3D in the illustrated example). Both the first branched flow and the second branched flow flow out from the lower edge of the gap G, are sucked in through the intake port of the fan 332, and are blown out through the exhaust port. That is, the air that has been heated by removing heat from each stator 32 is exhausted to the outside space.

[0087] In this modification, a branched flow is formed at the position where the intermediate communication hole 323 is formed, so that the stator 32 of the motor 3 at the position corresponding to the intermediate communication hole 323 can be strongly cooled. As described above, the intermediate communication hole 323 may be provided at a position corresponding to each of one or more motors 3 arbitrarily selected from the four motors 3A, 3B, 3C, and 3D. For example, the intermediate communication hole 323 may be provided at a position corresponding to a motor 3 that generates a relatively large amount of heat, or the intermediate communication hole 323 may be provided at a position corresponding to all of the motors 3. In the latter case, the communication hole 321 provided near the upper end edge of the pipe 320b may be omitted. In addition, the size, number, etc. of the intermediate communication hole 323 formed at the position corresponding to the motor 3 may be adjusted according to the amount of heat generated by the motor 3.

[0088] <5-3. Cooling structure according to the third modified example> The cooling structure Mc according to the third modified example will be described with reference to Fig. 6. Fig. 6 is a diagram for explaining the cooling structure Mc according to the third modified example.

[0089] The cooling structure Mc includes a connecting shaft 310c and an airflow forming portion 330c. The cooling structure Mc differs from the cooling structure M according to the above embodiment in that the cooling structure Mc does not include the pipe 320.

[0090] The connecting shaft 310c has a configuration similar to that of the connecting shaft 310 according to the above embodiment, but differs in that it has multiple types of communication holes (horizontal communication holes 312, vertical communication holes 313, and end communication holes 314).

[0091] The connected shaft 310c is a structure including four support shafts 31 stacked in the axial direction, similar to the connected shaft 310 according to the above embodiment. Four stator accommodating spaces E are arranged along the axial direction on the outer periphery of the connected shaft 310c, and each stator accommodating space E accommodates a stator 32. A connected hollow portion 310h is provided on the inner side of the connected shaft 310.

[0092] The horizontal communication holes 312 are provided near the upper end edge of the connecting shaft 310c, penetrating the connecting shaft 310 in the radial direction, and connect the space on the outer periphery side of the connecting shaft 310 to the space on the inner periphery side (i.e., the stator accommodating space E at the highest position and the connecting hollow portion 310h). For example, a plurality of the horizontal communication holes 312 are provided over the entire circumferential direction of the connecting shaft 310c.

[0093] The vertical communication hole 313 communicates with adjacent stator accommodating spaces E in the axial direction. For example, when adjacent stator accommodating spaces E in the axial direction are separated by two overlapping flange portions 311, the vertical communication hole 313 is provided penetrating the two flange portions 311 in the axial direction of the connecting shaft 310c. A plurality of vertical communication holes 313 are provided, for example, over the entire circumferential direction of the connecting shaft 310c.

[0094] The end communication hole 314 communicates the stator accommodating space E at the lowest position with the external space or with a space that communicates with the external space. For example, when the stator accommodating space E at the lowest position and the external space are separated by the flange portion 311 and the support base 21, the end communication hole 314 is provided penetrating the flange portion 311 and the support base 21 in the axial direction of the connecting shaft 310c. For example, a plurality of end communication holes 314 are provided over the entire circumferential direction of the connecting shaft 310c.

[0095] The airflow forming unit 330c, like the airflow forming unit 330 according to the above embodiment, circulates gas (cooling gas, for example, air here) through the connected hollow portion 310h. Specifically, for example, the airflow forming unit 330c circulates air through a flow path including the stator accommodating space E and the connected hollow portion 310h, forming an airflow that travels back and forth along the extension direction of the connected shaft 310 (i.e., each support shaft 31).

[0096] As an example, the airflow forming section 330c includes a push type fan 333. The fan 333 is disposed in a position near the lower end edge of the connecting shaft 310c with an air outlet facing the lower opening of the connecting hollow section 310h in the vertical direction, and blows out air from the air outlet.

[0097] When the fan 333 is operated, air blown upward from the air outlet flows into the connecting hollow portion 310h from the lower end edge of the connecting shaft 310, and flows upward through the connecting hollow portion 310h. The air that reaches the upper end of the connecting shaft 310c collides with the cover 322 and flows into the stator accommodating space E at the highest position through the horizontal communication hole 312. The air that flows into the stator accommodating space E flows downward through the stator accommodating space E and flows into the second stator accommodating space E from the top through the vertical communication hole 313. The air that flows into the stator accommodating space E flows downward through the stator accommodating space E and flows into the third stator accommodating space E from the top through the vertical communication hole 313. The air that flows into the stator accommodating space E flows downward through the stator accommodating space E and flows into the fourth stator accommodating space E from the top through the vertical communication hole 313. The air that flows into the stator accommodating space E flows downward through the stator accommodating space E. The airflow that flows downward across each stator accommodating space E removes heat from the stator 32 accommodated in the stator accommodating space E. That is, the stator 32 is cooled by being dissipated heat. The air that flows downward through the lowest stator accommodating space E flows out into the external space through the end communication holes 314. That is, the air that has been heated by removing heat from each stator 32 is exhausted to the external space.

[0098] In this modification, the connecting shaft 310 (i.e., the support shaft 31) has a horizontal communication hole 312 that communicates the space on the outer periphery side (the stator housing space E) with the connecting hollow portion 310h, and the airflow forming portion 330c circulates the gas through a flow path that includes the space on the outer periphery side of the connecting shaft 310 and the connecting hollow portion 310h, forming an airflow that travels back and forth along the extending direction of the connecting shaft 310. With this configuration, as in the above embodiment, the gas can be discharged from the same side as the side where the gas was introduced in the extending direction of the connecting shaft 310, so that the structure is simplified. In addition, since the flow path through which the gas flows is configured to include the space on the outer periphery side of the connecting shaft 310, the airflow can be directly applied to the stator 32 supported on the outer periphery side of the connecting shaft 310. Therefore, the stator 32 can be effectively cooled.

[0099] In the above modification, the air heated by removing heat from the stator 32 is exhausted to the outside space through the end communication hole 314. If the exhausted air is directly sucked into the fan 333, the cooling capacity may be reduced. Therefore, it is preferable that the position where the heated air is exhausted and the position of the fan 333 are shifted in the axial direction of the connecting shaft 310c. For example, as illustrated in FIG. 6, the fan 333 may be provided at the lower opening of the connecting shaft 310c, while the exhaust duct 315 may be connected to the lower end of the end communication hole 314. Alternatively, the exhaust duct 315 may not be provided at the end communication hole 314, and instead, an introduction duct may be connected to the lower end of the connecting shaft 310c, and the fan 333 may be provided at the lower opening of the introduction duct. According to the former configuration, the heated air is exhausted at a position lower than the fan 333, and according to the latter configuration, the heated air is exhausted at a position higher than the fan 333. In either configuration, the exhausted air is less likely to be directly sucked into the fan 333, and the cooling capacity is less likely to decrease.

[0100] In the above modification, the stator 32 may be provided with through holes or grooves that penetrate the stator 32 vertically. In this case, the air that has flowed into the stator accommodating space E flows downward through the through holes or grooves provided in the stator 32, so that the stator 32 is cooled particularly effectively. However, even if such through holes or grooves are not provided, the air can flow downward through gaps between the coils of the stator 32.

[0101] Furthermore, in the above-described modified example, a horizontal communication hole 312 may be provided to communicate the connecting hollow portion 310h with each of one or more stator accommodating spaces E arbitrarily selected from the four stator accommodating spaces E. In this case, a branch flow is formed at the position where the horizontal communication hole 312 is formed, so that the stator 32 accommodated in the stator accommodating space E at the position corresponding to the horizontal communication hole 312 can be strongly cooled. For example, the horizontal communication hole 312 may be provided at a position corresponding to the stator accommodating space E that accommodates the stator 32 that generates a relatively large amount of heat, or the horizontal communication hole 312 may be provided at a position corresponding to all of the stator accommodating spaces E.

[0102] <5-4. Other variations> Although the airflow forming unit 330 according to the above embodiment includes the fan 331, the configuration of the airflow forming unit 330 is not limited to this. For example, the airflow forming unit may circulate the gas through the flow path by ejecting compressed gas (e.g., compressed air). In this case, the airflow forming unit may include a compressed air supply source, a pipe connecting the supply source to the flow path, and a valve inserted in the pipe.

[0103] In the above embodiment, the gas (i.e., the cooling gas) that the airflow forming unit 330 circulates through the hollow portion 31h is air, but the cooling gas is not limited to air. For example, an inert gas (nitrogen, rare gas, etc.) may be used as the cooling gas. Also, for example, a cooling liquid may be circulated through the hollow portion 31h.

[0104] In the above embodiment, the conveying device 10 may have any number of motors 3. That is, the number of motors 3 mounted on the conveying device 10 is not limited to four, and may be three or less, or five or more.

[0105] In the above embodiment, the arrangement of the motor 3 provided in the conveying device 10 can be changed as appropriate.

[0106] For example, in the above embodiment, the first motor 3A, the second motor 3B, the third motor 3C, and the fourth motor 3D are stacked in this order from the bottom up, but the stacking order is not limited to this and can be changed as appropriate.

[0107] Furthermore, for example, the number of motors 3 arranged coaxially and stacked in the axial direction is not limited to four, and may be three or less, or five or more. Alternatively, the motors 3 do not necessarily have to be stacked.

[0108] Furthermore, for example, of the four motors 3A, 3B, 3C, and 3D that are arranged coaxially with the first axis L1 and stacked vertically, only one motor 3 from the top (the fourth motor 3D) may be housed in the housing 11m, only two motors 3 from the top (the fourth motor 3D and the third motor 3C) may be housed in the housing 11m, or all four motors 3 (the fourth motor 3D, the third motor 3C, the second motor 3B, and the first motor 3A) may be housed in the housing 11m. Alternatively, all four motors 3 may be housed in the body 2.

[0109] In the above-described embodiments, the motor 3 may be, for example, a servo motor (eg, a brushless DC servo motor, an AC servo motor, etc.) or a stepping motor.

[0110] In the above embodiment, the conveying device 10 may be provided with, at appropriate positions, angle detectors (e.g., encoders, resolvers, etc.) for detecting the rotation angle of each motor 3, bearings for rotatably supporting the rotating members, seals for hermetically sealing between the members, etc.

[0111] Although the transport device 10 according to the above embodiment includes two hands (first hand 13a and second hand 13b), the number of hands included in the transport device 10 may be one or three or more. Furthermore, although the transport device 10 includes two arms (first arm 11 and second arm 12), the number of arms included in the transport device 10 may be one or three or more. The number of motors 3 mounted on the transport device 10 may be appropriately changed depending on the number of hands and arms, the drive type thereof, and the like.

[0112] In the above embodiment, the housing of the arm unit 1 (specifically, the housing 11m of the first arm 11 and the housing 12m of the second arm 12) may serve as a vacuum partition (vacuum barrier). In this case, the outside of the housing of the arm unit 1 becomes a vacuum atmosphere Q1, and the inside of the housing of the arm unit 1 becomes an air atmosphere Q2. In this case, the partition 34 of each motor 3 may be omitted.

[0113] In the above embodiment, the vacuum chamber 20 may be disposed in a processing chamber maintained in a predetermined gas atmosphere. That is, the external space of the vacuum chamber 20 may be the air atmosphere Q2 or a predetermined gas atmosphere.

[0114] In the above embodiment, the substrate to be transported by the transport device 10 may be a wafer, a glass substrate, a wafer held in a tape frame (tape frame wafer), etc. The shape of the substrate may be circular or a shape other than circular (e.g., elliptical, rectangular, etc.). However, the object to be transported by the transport device 10 is not limited to a substrate, and may be, for example, various electronic components.

[0115] Other configurations can also be modified in various ways without departing from the spirit of the present invention. [Explanation of symbols]

[0116] 1 Arm unit 11 First Arm 12 Second Arm 13a 1st hand 13b 2nd hand 2. Torso 3 Motor 3A 1st motor 3B Second motor 3C 3rd motor 3D 4th motor 31 Support shaft 31h Hollow part of support shaft 32 Stator 33 Rotor 34 Bulkhead 310,310c Connecting shaft 310h Continuous hollow part 312 Vertical connecting hole 313 Lateral communication hole 314 End communication hole 320,320b Pipe 320h Pipe Hollow Section 321 Communication hole 322 Lid 323 Midway communication hole 330, 330a, 330b, 330c Air flow forming section 331,332,333 fans 10. Conveyor 20 Vacuum Chamber M,Ma,Mb,Mc cooling structure E Stator housing space G Gap Q1 Vacuum atmosphere Q2 Air atmosphere

Claims

1. an arm unit disposed within a vacuum chamber; A body supporting the arm unit; a motor that is a drive source of the arm unit and includes a support shaft having a hollow portion extending in an axial direction, a stator supported on an outer periphery of the support shaft, and a rotor provided on an outer periphery of the stator; an airflow forming unit that circulates gas through the hollow portion; A conveying device comprising:

2. 2. The conveying device according to claim 1, A plurality of the motors are provided, The support shafts of each of the plurality of motors are coaxially arranged and stacked in the axial direction, and the hollow portions of the support shafts adjacent to each other in the axial direction are in communication with each other. A conveying device comprising:

3. 3. The conveying device according to claim 1 or 2, A pipe disposed in the hollow portion; Equipped with The air flow forming unit, The gas is caused to flow through a flow path including a gap provided between an inner peripheral surface of the support shaft and an outer peripheral surface of the pipe, and an interior of the pipe, to form an airflow that reciprocates along an extension direction of the support shaft. A conveying device comprising:

4. 3. The conveying device according to claim 1 or 2, The support shaft is a communication hole that communicates a space on an outer circumferential side of the support shaft with the hollow portion; Equipped with The air flow forming unit, The gas is caused to flow through a flow path including a space on an outer circumferential side of the support shaft and the hollow portion, thereby forming an airflow that reciprocates along an extension direction of the support shaft. A conveying device comprising:

5. 3. The conveying device according to claim 1 or 2, The motor is a partition wall provided between the stator and the rotor to maintain the rotor side in a vacuum atmosphere; A conveying device comprising:

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