Inspection system and inspection method

Abstract

To provide an inspection system that can accurately indicate the positions of targets even in a portion on a curved surface of a workpiece having large curvature or on a complex curved surface.SOLUTION: An inspection system 100 comprises a robot 10, an inspection unit 20, and processing units 41, 51, 61. The processing units 41, 51, 61 perform: processing of creating a moving path 13 of the robot 10; processing of generating coordinate conversion information 71, 72 on the basis of the moving path 13; processing of causing the robot 10 to operate on the basis of the moving path 13 and causing the inspection unit 20 to inspect the workpiece 200, thereby acquiring an inspection image 21; processing of detecting targets 201 on the workpiece 200 in the inspection image 21; processing of converting coordinate values of inspection coordinate systems of the targets 201 into coordinate values of three-dimensional coordinate systems on the basis of the coordinate conversion information 71, 72; and processing of showing the positions of the targets 201 on the actual workpiece 200 or in a three-dimensional image of the workpiece 200 on the basis of the coordinate values of the three-dimensional coordinate systems of the targets 201.SELECTED DRAWING: Figure 12

Description

[Technical field]

[0001] This disclosure relates to inspection systems and methods. [Background technology]

[0002] Conventionally, a coating quality inspection method is known (see, for example, Patent Document 1).

[0003] The above-mentioned Patent Document 1 discloses a paint quality inspection method for inspecting the paint quality of a vehicle body as a painted object after painting. In this paint quality inspection method, first, the vehicle body is imaged by a television camera. Then, image information based on the image of the captured vehicle body is analyzed by a computer. Then, it is determined whether or not there is a paint defect, and if it is determined that there is a paint defect, the position of the paint defect on the vehicle body is found. Then, the position of the paint defect is printed on a picture of the vehicle body drawn on a printout sheet. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 05-126758 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the paint quality inspection method described in the above Patent Document 1, since the position of the paint defect is printed on the picture of the car body as a two-dimensional image, it is possible to accurately indicate the position of the paint defect in the picture of the car body in the flat or curved surface part of the actual car body with a small curvature, but there is a disadvantage that it may be difficult to accurately indicate the position of the paint defect in the picture of the car body in the curved surface part of the actual car body with a large curvature or a complex curved surface. Such inconvenience is also true when detecting objects other than paint defects and when inspecting workpieces other than the car body. As such, since the picture of the workpiece may not be able to accurately indicate the position of the object in the curved surface part of the workpiece with a large curvature or a complex curved surface, it is desired to accurately indicate the position of the object even in the curved surface part of the workpiece with a large curvature or a complex curved surface.

[0006] This disclosure has been made to solve the above-mentioned problems, and aims to provide an inspection system and inspection method that can accurately indicate the position of an object even if the workpiece has a curved surface with a large curvature or a complex curved surface. [Means for solving the problem]

[0007] An inspection system according to a first aspect of this disclosure includes a robot, an inspection unit for inspecting a workpiece, and a processing unit that performs the following processes: generating a movement path for the robot when the inspection unit inspects the workpiece by moving the inspection unit relative to the workpiece using the robot; generating coordinate transformation information for converting, based on the generated movement path, coordinate values ​​in an inspection coordinate system of an inspection image obtained by inspecting the workpiece using the inspection unit into coordinate values ​​in a three-dimensional coordinate system that can express the coordinate values ​​of the workpiece in three dimensions; acquiring an inspection image by operating the robot and inspecting the workpiece using the inspection unit based on the generated movement path; detecting an object of the workpiece in the acquired inspection image; converting the coordinate values ​​of the inspection coordinate system of the object into coordinate values ​​in the three-dimensional coordinate system based on the generated coordinate transformation information; and showing the position of the object on the actual workpiece or a three-dimensional image of the workpiece based on the converted coordinate values ​​of the object in the three-dimensional coordinate system.

[0008] In the inspection system according to the first aspect of this disclosure, as described above, the following processes are performed: converting the coordinate values ​​of the inspection coordinate system of the object into coordinate values ​​of a three-dimensional coordinate system based on the generated coordinate conversion information; and displaying the position of the object on the actual workpiece or a three-dimensional image of the workpiece based on the converted coordinate values ​​of the object in the three-dimensional coordinate system. This makes it possible to display the position of the object on the actual workpiece or a three-dimensional image of the workpiece, so that, unlike the case where the position of the object is displayed on a two-dimensional image of the workpiece, the position of the object can be displayed with high accuracy even on a part of a curved surface with a large curvature or a complex curved surface.

[0009] An inspection method according to a second aspect of this disclosure comprises: generating a movement path for the robot when the inspection unit inspects the work by moving an inspection unit relative to a work using the robot; generating coordinate transformation information based on the generated movement path for converting coordinate values ​​of an inspection coordinate system of an inspection image obtained by inspecting the work using the inspection unit into coordinate values ​​of a three-dimensional coordinate system that can express the coordinate values ​​of the work in three dimensions; operating the robot based on the generated movement path to inspect the work using the inspection unit, thereby obtaining an inspection image; detecting an object of the work in the obtained inspection image; converting the coordinate values ​​of the inspection coordinate system of the object into coordinate values ​​of the three-dimensional coordinate system based on the generated coordinate transformation information; and showing the position of the object on the actual work or a three-dimensional image of the work based on the converted coordinate values ​​of the object in the three-dimensional coordinate system.

[0010] In the inspection method according to the second aspect of the disclosure, as described above, the coordinate values ​​of the inspection coordinate system of the object are converted into coordinate values ​​of a three-dimensional coordinate system based on the coordinate conversion information generated based on the movement path of the robot, and the position of the object is displayed on the actual workpiece or a three-dimensional image of the workpiece based on the converted coordinate values ​​of the three-dimensional coordinate system of the object. This makes it possible to display the position of the object on the actual workpiece or a three-dimensional image of the workpiece, and therefore, unlike the case where the position of the object is displayed on a two-dimensional image of the workpiece, it is possible to provide an inspection method that can accurately display the position of the object even in a part of a curved surface with a large curvature or a complex curved surface. Effect of the Invention

[0011] According to the present disclosure, as described above, the position of a target can be indicated with high accuracy even in a portion of a workpiece having a curved surface with a large curvature or a complex curved surface. [Brief description of the drawings]

[0012] [Figure 1] FIG. 1 illustrates an inspection system according to one embodiment. [Diagram 2] FIG. 1 is a block diagram illustrating an inspection system according to one embodiment. [Diagram 3] 11 is a flowchart for explaining a control process of the inspection system according to an embodiment. [Figure 4] FIG. 1 is a diagram for explaining generation of a movement path of a robot according to an embodiment. [Diagram 5] FIG. 11 is a diagram for explaining generation of coordinate transformation information according to an embodiment. [Figure 6] FIG. 1 is a diagram for explaining coordinate transformation information according to one embodiment. [Figure 7] FIG. 2 is a diagram for explaining coordinate transformation information according to an embodiment; [Figure 8] FIG. 1 is a diagram for explaining inspection of a workpiece according to one embodiment. [Figure 9] FIG. 2 is a diagram for explaining the inspection of a workpiece according to an embodiment. [Figure 10] FIG. 3 is a diagram for explaining the inspection of a workpiece according to an embodiment. [Figure 11] FIG. 1 is a diagram for explaining an inspection image according to an embodiment. [Figure 12] FIG. 1 is a diagram for explaining coordinate transformation according to an embodiment. [Figure 13] 1A to 1C are diagrams for explaining how a target position is indicated on an actual workpiece by a robot according to an embodiment. [Figure 14] FIG. 13 is a diagram for explaining how a target position is displayed in a three-dimensional image of a workpiece according to one embodiment. [Figure 15] FIG. 2 is a diagram illustrating how multiple objects are shown as one object according to one embodiment. [Figure 16] FIG. 13 is a block diagram showing an inspection system according to a modified example of the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] Hereinafter, specific embodiments of the present disclosure will be described with reference to the drawings.

[0014] (Inspection system configuration) The overall configuration of an inspection system 100 according to one embodiment will be described with reference to FIGS.

[0015] 1, the inspection system 100 is an appearance inspection system that inspects the appearance of a workpiece 200. The workpiece 200 is, for example, a product or part related to an automobile, an agricultural machine, ceramics, or a household electrical appliance. The workpiece 200 is not particularly limited.

[0016] The inspection system 100 includes a robot 10, an inspection unit 20, an instruction unit 30, a robot controller 40, an image processing device 50, and a result display device 60.

[0017] The robot 10 moves the inspection unit 20 relative to the workpiece 200. The robot 10 is a vertical articulated robot. The robot 10 includes a base unit 11 and an arm unit 12 connected to the base unit 11. The base unit 11 is fixed to an installation surface such as a floor, a wall, or a ceiling. The base unit 11 may be attached to a movable cart. The arm unit 12 has a plurality of joints. Each of the plurality of joints has a servo motor as a driving source. In addition, the tip of the arm unit 12 holds the inspection unit 20 and the instruction unit 30. The robot 10 drives the plurality of joints of the arm unit 12 to move the inspection unit 20 and the instruction unit 30 held at the tip of the arm unit 12 relative to the fixed workpiece 200.

[0018] The inspection unit 20 is disposed on the robot 10 and inspects the workpiece 200. The inspection unit 20 is an imaging unit and images the workpiece 200. Specifically, the inspection unit 20 is a line-type camera, and is moved along the surface of the workpiece 200 by the robot 10 to scan and image the surface of the workpiece 200.

[0019] The instruction unit 30 is disposed on the robot 10, and indicates the position of an object 201 (described later) acquired by inspection to the workpiece 200. The instruction unit 30 is a laser irradiation unit, and indicates the position of the object 201 to the workpiece 200 by irradiating with laser light.

[0020] 1 and 2, the robot controller 40 controls the operation of the robot 10. The robot controller 40 includes a processing unit 41 and a storage unit 42. The processing unit 41 includes a processor, and performs various processes related to the operation of the robot 10. The storage unit 42 includes a non-volatile memory, and stores coordinate conversion information 71, 72, which will be described later, and the like.

[0021] The image processing device 50 performs image processing on the image captured by the inspection unit 20. The image processing device 50 also controls the timing of imaging by the inspection unit 20. The image processing device 50 includes a processing unit 51 and a storage unit 52. The processing unit 51 includes a processor, and performs various processes related to the image captured by the inspection unit 20 and the timing of imaging by the inspection unit 20. The storage unit 52 includes a non-volatile memory, and stores the inspection image 21 described below, etc.

[0022] The result display device 60 displays the inspection results of the workpiece 200. The result display device 60 includes a processing unit 61, a storage unit 62, a display unit 63, and an operation unit 64. The processing unit 61 includes a processor and performs various processes related to the display of the inspection results of the workpiece 200. The storage unit 62 includes a non-volatile memory and stores coordinate conversion information 72, a three-dimensional image of the workpiece 200, and the like. The display unit 63 includes a monitor such as a liquid crystal monitor and displays a screen of the inspection results of the workpiece 200, and the like. The operation unit 64 includes input devices such as a mouse and a keyboard, and accepts input operations by the user. The display unit 63 and the operation unit 64 may be integrated. That is, the display unit 63 and the operation unit 64 may be configured by an operation unit / display unit such as a touch panel.

[0023] (Inspection system control process) The control process of the inspection system 100 will be described with reference to FIGS.

[0024] 3 and 4, in step S1, the processing unit 41 of the robot controller 40 performs processing to generate a movement path 13 of the robot 10 when the robot 10 moves the inspection unit 20 relative to the workpiece 200 to inspect the workpiece 200 with the inspection unit 20. The movement path 13 is a path for operating the arm unit 12 of the robot 10, and multiple movement paths 13 are generated to inspect the workpiece 200.

[0025] For example, the processing unit 41 performs a process of receiving an instruction of the operation of the arm unit 12 from a user, and generating a movement path 13 of the robot 10 based on the received instruction. Also, for example, the processing unit 41 performs a process of automatically generating the movement path 13 of the robot 10, regardless of an instruction of the operation of the arm unit 12 from a user. Also, the processing unit 41 performs a process of generating a movement path 13 that follows a surface of the workpiece 200, such as a curved surface.

[0026] Here, in this embodiment, as shown in Fig. 3 and Fig. 5 to Fig. 7, in step S2, the processing unit 41 of the robot controller 40 performs processing to generate coordinate conversion information 71, 72 based on the generated movement path 13. The coordinate conversion information 71, 72 is information for converting the coordinate values ​​of an inspection coordinate system of an inspection image 21, which will be described later and is acquired by inspecting the workpiece 200 by the inspection unit 20, into coordinate values ​​of a three-dimensional coordinate system that can express the coordinate values ​​of the workpiece 200 three-dimensionally. The inspection coordinate system is an orthogonal coordinate system of two axes perpendicular to each other, and the three-dimensional coordinate system is an orthogonal coordinate system of three axes perpendicular to each other. Details of the coordinate conversion using the coordinate conversion information 71, 72 will be described later.

[0027] As shown in FIG. 5, the processing unit 41 performs a process of acquiring coordinate values ​​of a three-dimensional coordinate system at each first distance interval D1 along the moving path 13 and generating coordinate conversion information 71, 72. At this time, the processing unit 41 actually moves the inspection unit 20 along the moving path 13 relative to the workpiece 200 by the robot 10, and performs a process of acquiring coordinate values ​​of the three-dimensional coordinate system at each first distance interval D1. The first distance interval D1 is the distance interval of the control point 14a. The processing unit 41 performs a process of acquiring coordinate values ​​of the three-dimensional coordinate system of the control point 14a at each first distance interval D1. When the inspection unit 20 is an imaging unit, the control point 14a is set at the focal position of the imaging of the inspection unit 20. The focal position of the imaging of the inspection unit 20 is set near the surface of the workpiece 200. The control point 14a is provided to perform a process of acquiring coordinate values ​​of the three-dimensional coordinate system.

[0028] In this embodiment, the first distance D1 is larger than a second distance D2, which will be described later, when inspecting the workpiece 200. For example, the first distance D1 is about 5 mm, and the second distance D2 is about 0.1 mm. The first distance D1 and the second distance D2 are not particularly limited because they differ depending on the workpiece 200. The first distance D1 is set to a value that can ensure the accuracy required to indicate the position of the target 201, which will be described later. The second distance D2 is set to a value that can ensure the accuracy required to inspect the workpiece 200.

[0029] For convenience, FIG. 5 shows only one movement path 13, but the processing unit 41 performs processing to acquire coordinate values ​​in a three-dimensional coordinate system for all of the movement paths 13 and generate coordinate conversion information 71 and 72.

[0030] 6 and 7, the coordinate conversion information 71, 72 is a coordinate conversion table that associates the movement amount of the robot 10 in a direction along the movement path 13 with coordinate values ​​in a three-dimensional coordinate system. In Fig. 6 and Fig. 7, the path number represents the number of the movement path 13, the position number represents the number of the control point 14, the movement amount represents the movement amount of the control point 14a of the robot 10 along the movement path 13, and the coordinate value represents the coordinate value of the control point 14a in the three-dimensional coordinate system. That is, in the coordinate conversion information 71, 72, for each movement path 13, the movement amount of the robot 10 for each control point 14a is associated with the coordinate value of the control point 14a in the three-dimensional coordinate system.

[0031] The coordinate values ​​of the three-dimensional coordinate system of the coordinate conversion information 71, 72 may be composed of only the acquired values ​​of the coordinate values ​​of the three-dimensional coordinate system acquired at the first distance interval D1, or may be composed of the acquired values ​​of the coordinate values ​​of the three-dimensional coordinate system acquired at the first distance interval D1 and the interpolated values ​​of the coordinate values ​​of the three-dimensional coordinate system interpolated from the acquired values. That is, the coordinate values ​​of the three-dimensional coordinate system may be acquired in units of 5 mm, and the coordinate conversion information 71, 72 in units of 5 mm may be generated, or the coordinate values ​​of the three-dimensional coordinate system may be acquired in units of 10 mm, and the coordinate conversion information 71, 72 in units of 5 mm may be generated by interpolating the acquired coordinate values ​​of the three-dimensional coordinate system. Examples of the interpolation include polynomial interpolation and linear interpolation. Examples of the linear interpolation include linear interpolation and circular interpolation. The movement amount of the coordinate conversion information 71, 72 may be the movement amount calculated from the actual movement of the robot 10, or may be the movement amount calculated from a movement command of the robot 10.

[0032] 6, in the coordinate conversion information 71, the three-dimensional coordinate system is a robot coordinate system related to the robot 10. The robot coordinate system is a coordinate system based on the base unit 11. The coordinate conversion information 71 is a coordinate conversion table that associates the movement amount of the robot 10 with the coordinate values ​​of the robot coordinate system. In the coordinate conversion information 71, the coordinate values ​​used are those that indicate the position and posture of the control point 14a in the robot coordinate system.

[0033] 7, in the coordinate conversion information 72, the three-dimensional coordinate system is a workpiece coordinate system related to the workpiece 200. The workpiece coordinate system is a coordinate system based on the workpiece 200. The coordinate conversion information 72 is a coordinate conversion table that associates the movement amount of the robot 10 with the coordinate values ​​of the workpiece coordinate system. In the coordinate conversion information 72, the coordinate values ​​that indicate the position of the control point 14a in the workpiece coordinate system are used as the coordinate values.

[0034] For example, the processing unit 41 acquires coordinate values ​​in a robot coordinate system to generate coordinate transformation information 71, and generates coordinate transformation information 72 based on the generated coordinate transformation information 71. Furthermore, for example, the processing unit 41 generates the coordinate transformation information 72 from the coordinate transformation information 71 by converting the coordinate values ​​in the robot coordinate system of the coordinate transformation information 71 into coordinate values ​​in a workpiece coordinate system using conversion information such as a conversion matrix.

[0035] Furthermore, the processing unit 41 performs a process of storing the coordinate conversion information 71, 72 in the storage unit 42, and also performs a process of outputting the coordinate conversion information 72 to the processing unit 61 of the result display device 60. The processing unit 61 performs a process of storing the coordinate conversion information 72 in the storage unit 62.

[0036] 3 and 8 to 11, in step S3, the processing unit 41 of the robot controller 40 operates the robot 10 based on the movement path 13, and performs processing to inspect the workpiece 200 by the inspection unit 20. Then, the processing unit 51 of the image processing device 50 performs processing to obtain an inspection image 21 based on the output result of the inspection unit 20. The inspection image 21 is an image of the surface of the workpiece 200 captured by the inspection unit 20.

[0037] As shown in FIG. 9, the processing unit 51 operates the inspection unit 20 to inspect the workpiece 200 at every second distance interval D2 along the moving path 13, and performs a process of acquiring the inspection image 21. Specifically, the processing unit 51 operates the inspection unit 20 to image the workpiece 200 at every second distance interval D2, and scans and images the workpiece 200. More specifically, the processing unit 41 performs a process of outputting a pulse signal to the processing unit 51 at every second distance interval D2. The processing unit 51 performs a process of outputting a trigger signal to the inspection unit 20 at every second distance interval D2 based on the pulse signal from the processing unit 41. The inspection unit 20 images the workpiece 200 at every second distance interval D2 based on the trigger signal. The second distance interval D2 is the distance interval of the control point 14b. When the inspection unit 20 is an imaging unit, the control point 14b is set to the focal position of the imaging of the inspection unit 20. Also, the focal position of the imaging of the inspection unit 20 is set near the surface of the workpiece 200. The control point 14b is provided for performing a process of imaging the workpiece 200 by the inspection unit 20.

[0038] 9 illustrates only one movement path 13, the processing unit 41 performs a process of inspecting the workpiece 200 by the inspection unit 20 for all movement paths 13. The processing unit 51 also performs a process of acquiring the inspection image 21 for all movement paths 13.

[0039] 10, the inspection ranges 22 of the inspection unit 20 are set to partially overlap with each other on adjacent movement paths 13. That is, the inspection range 22 of the inspection unit 20 for a certain movement path 13 partially overlaps with the inspection range 22 of the inspection unit 20 for a movement path 13 adjacent to the certain movement path 13. This makes it possible to prevent inspection omissions. Note that the inspection range 22 is an imaging range when scanning and imaging along the movement path 13.

[0040] 3 and 11, in step S4, the processing unit 51 of the image processing device 50 performs processing to detect the object 201 of the workpiece 200 in the inspection image 21. The processing unit 51 performs predetermined image processing on the inspection image 21, thereby performing processing to detect the object 201 in the inspection image 21. The object 201 is, for example, a defect such as a scratch, a foreign object, or a dent. The processing unit 51 performs processing to detect the object 201 in the inspection image 21 for all inspection images 21.

[0041] As shown in FIG. 11, the inspection coordinate system of the inspection image 21 is a two-dimensional coordinate system in which the direction along the movement path 13 is the Y-axis direction and the direction perpendicular to the movement path 13 is the X-axis direction. The processing unit 51 performs a process of acquiring the coordinate values ​​of the inspection coordinate system of the object 201. That is, the processing unit 51 performs a process of acquiring the coordinate values ​​of the X-axis and Y-axis of the inspection coordinate system of the object 201. The processing unit 51 also performs a process of acquiring the coordinate values ​​of the inspection coordinate system of the object 201 for all the inspection images 21 in which the object 201 is detected. The processing unit 51 also performs a process of storing the inspection image 21, the number of the movement path 13 corresponding to the inspection image 21, and the coordinate values ​​of the inspection coordinate system of the object 201 in the storage unit 52. The processing unit 51 also performs a process of outputting the number of the movement path 13 corresponding to the inspection image 21 and the coordinate values ​​of the inspection coordinate system of the object 201 to the processing unit 41 of the robot controller 40 and the processing unit 61 of the result display device 60.

[0042] 3 and 12, in step S5, the processing unit 41 of the robot controller 40 performs a process of converting the coordinate values ​​of the inspection coordinate system of the object 201 into coordinate values ​​of the robot coordinate system based on the coordinate conversion information 71. Also in step S5, the processing unit 61 of the result display device 60 performs a process of converting the coordinate values ​​of the inspection coordinate system of the object 201 into coordinate values ​​of a three-dimensional coordinate system based on the coordinate conversion information 72. First, the process of the processing unit 41 will be described.

[0043] As shown in FIG. 12, the processing unit 41 performs a process of identifying the number of the movement path 13 of the coordinate conversion information 71 based on the number of the movement path 13 corresponding to the inspection image 21. Then, the processing unit 41 performs a process of acquiring the movement amount of the robot 10 of the coordinate conversion information 71 corresponding to the coordinate value of the inspection coordinate system in the Y-axis direction along the movement path 13 of the object 201 for the identified number of the movement path 13. At this time, the processing unit 41 performs a process of acquiring the movement amount of the robot 10 closest to the coordinate value of the inspection coordinate system in the Y-axis direction of the object 201 as the corresponding movement amount of the robot 10. Then, the processing unit 41 performs a process of acquiring the coordinate value of the robot coordinate system of the coordinate conversion information 71 corresponding to the movement amount of the robot 10 of the acquired coordinate conversion information 71. As a result, the coordinate value of the robot coordinate system corresponding to the coordinate value of the inspection coordinate system in the Y-axis direction of the object 201 is acquired.

[0044] On the other hand, the coordinate values ​​of the robot coordinate system in the acquired coordinate transformation information 71 do not reflect the coordinate values ​​of the inspection coordinate system in the X-axis direction of the object 201, and include a deviation for that amount. For this reason, the processing unit 41 performs a process of correcting the coordinate values ​​of the robot coordinate system in the acquired coordinate transformation information 71 based on the coordinate values ​​of the inspection coordinate system in the X-axis direction perpendicular to the moving path 13 of the object 201. At this time, the processing unit 41 performs a process of correcting the coordinate values ​​of the robot coordinate system in the coordinate transformation information 71 by adding the coordinate values ​​of the inspection coordinate system in the X-axis direction of the object 201. As a result, the processing unit 41 performs a process of acquiring the coordinate values ​​of the robot coordinate system of the object 201. Furthermore, the processing unit 41 performs a process of converting the coordinate values ​​for all the objects 201 to acquire the coordinate values ​​of the robot coordinate system.

[0045] For example, in the example shown in FIG. 12, the number of the movement path 13 corresponding to the inspection image 21 is 2, the coordinate value of the target 201 in the X-axis direction is 5.5, and the coordinate value of the target 201 in the Y-axis direction is 15.2. In this case, the processing unit 41 performs a process of identifying 2 as the number of the movement path 13. Then, the processing unit 41 performs a process of acquiring 15 as the movement amount of the robot 10 that is closest to the coordinate value 15.2 of the target 201 in the Y-axis direction for the identified number 2. Then, the processing unit 41 performs a process of acquiring (xr, yr, zr, or, ar, tr) as the coordinate value of the robot coordinate system corresponding to the movement amount 15 of the robot 10. Then, the processing unit 41 performs a process of acquiring the coordinate value of the robot coordinate system of the target 201 by adding the coordinate value 5.5 of the target 201 in the X-axis direction to the coordinate value (xr, yr, zr, or, ar, tr) of the robot coordinate system.

[0046] The processing of the processing unit 41 of the robot controller 40 has been described above. However, the processing of the processing unit 61 of the result display device 60 is similar to the above, except that the coordinate conversion information 72 is used. That is, the processing unit 61 performs a process of identifying the number of the movement path 13 of the coordinate conversion information 72 based on the number of the movement path 13 corresponding to the inspection image 21. Then, the processing unit 61 performs a process of acquiring the movement amount of the robot 10 of the coordinate conversion information 72 corresponding to the coordinate value of the inspection coordinate system in the Y-axis direction along the movement path 13 of the object 201 at the identified number of the movement path 13. At this time, the processing unit 61 performs a process of acquiring the movement amount of the robot 10 closest to the coordinate value of the inspection coordinate system in the Y-axis direction of the object 201 as the corresponding movement amount of the robot 10. Then, the processing unit 61 performs a process of acquiring the coordinate value of the work coordinate system of the coordinate conversion information 72 corresponding to the movement amount of the robot 10 of the acquired coordinate conversion information 72. As a result, the coordinate value of the work coordinate system corresponding to the coordinate value of the inspection coordinate system in the Y-axis direction of the object 201 is acquired.

[0047] On the other hand, the coordinate values ​​of the work coordinate system of the acquired coordinate transformation information 72 do not reflect the coordinate values ​​of the inspection coordinate system in the X-axis direction of the object 201, and include a deviation for that amount. For this reason, the processing unit 61 performs a process of correcting the coordinate values ​​of the work coordinate system of the acquired coordinate transformation information 72 based on the coordinate values ​​of the inspection coordinate system in the X-axis direction perpendicular to the moving path 13 of the object 201. At this time, the processing unit 61 performs a process of correcting the coordinate values ​​of the work coordinate system of the coordinate transformation information 72 by adding the coordinate values ​​of the inspection coordinate system in the X-axis direction of the object 201. As a result, the processing unit 61 performs a process of acquiring the coordinate values ​​of the work coordinate system of the object 201. Furthermore, the processing unit 61 performs a process of converting the coordinate values ​​for all the objects 201 and acquiring the coordinate values ​​of the work coordinate system.

[0048] 3 and 13, in step S6, the processing unit 41 of the robot controller 40 performs a process of indicating the position of the target 201 on the actual workpiece 200 based on the converted coordinate values ​​of the target 201 in the three-dimensional coordinate system. Specifically, the processing unit 41 performs a process of operating the robot 10 and indicating the position of the target 201 on the actual workpiece 200 by the instruction unit 30 based on the coordinate values ​​of the target 201 converted into the coordinate values ​​of the robot coordinate system. That is, the processing unit 41 performs a process of operating the robot 10 and moving the instruction unit 30 to a predetermined position where the position of the target 201 can be indicated. Then, the processing unit 41 performs a process of indicating the position of the target 201 on the actual workpiece 200 by irradiating a laser beam from the instruction unit 30 with the instruction unit 30 placed at the predetermined position.

[0049] As shown in FIG. 3 and FIG. 14, in step S6, the processing unit 61 of the result display device 60 performs a process of indicating the position of the object 201 on the three-dimensional image of the workpiece 200 based on the coordinate values ​​of the converted three-dimensional coordinate system of the object 201. Specifically, the processing unit 61 performs a process of indicating the position of the object 201 on the three-dimensional image of the workpiece 200 based on the coordinate values ​​of the object 201 converted into the coordinate values ​​of the workpiece coordinate system. That is, the processing unit 61 performs a process of superimposing an image indicating the position of the object 201 on the three-dimensional image of the workpiece 200. Then, the processing unit 61 performs a process of displaying the three-dimensional image of the workpiece 200 on which the image indicating the position of the object 201 is superimposed on the display unit 63. The three-dimensional image of the workpiece 200 on which the image indicating the position of the object 201 is superimposed can be enlarged, reduced, or rotated based on the user's operation using the operation unit 64.

[0050] In this embodiment, as shown in FIG. 15, when the coordinate values ​​of the multiple targets 201 converted into the coordinate values ​​of the robot coordinate system are within a threshold range, the processing unit 41 performs a process of treating the multiple targets 201 as one target 201 and displaying the positions of the targets 201 on the real workpiece 200. The threshold value is a value for determining whether the coordinate values ​​can be regarded as indicating the same position. That is, when the coordinate values ​​of the multiple targets 201 converted into the coordinate values ​​of the robot coordinate system can be regarded as indicating the same position, the processing unit 41 performs a process of combining the multiple targets 201 that should actually be one into one and displaying the positions of the targets 201 on the real workpiece 200. For example, when the coordinate values ​​converted into the coordinate values ​​of the robot coordinate system of the target 201 detected from the inspection image 21 for a certain movement path 13 and the target 201 detected from the inspection image 21 for a movement path 13 adjacent to the certain movement path 13 are within a threshold range, the processing unit 41 performs a process of treating these targets 201 as one target 201 and displaying the positions of the targets 201 on the real workpiece 200.

[0051] (Effects of this embodiment) In this embodiment, as described above, a process of converting the coordinate values ​​of the inspection coordinate system of the object 201 into coordinate values ​​of a three-dimensional coordinate system based on the generated coordinate conversion information 71, 72, and a process of displaying the position of the object 201 on the actual workpiece 200 or a three-dimensional image of the workpiece 200 based on the converted coordinate values ​​of the three-dimensional coordinate system of the object 201 are performed. This makes it possible to display the position of the object 201 on the actual workpiece 200 or a three-dimensional image of the workpiece 200. Therefore, unlike the case where the position of the object 201 is displayed on a two-dimensional image of the workpiece 200, the position of the object 201 can be displayed with high accuracy even if the workpiece 200 is on a curved surface with a large curvature or a complex curved surface.

[0052] In addition, when the position of the target 201 is shown on the actual workpiece 200 or a three-dimensional image of the workpiece 200, it is necessary to convert the coordinate values ​​of the inspection coordinate system of the target 201 into coordinate values ​​of the three-dimensional coordinate system. In this embodiment, a process is performed to convert the coordinate values ​​of the inspection coordinate system of the target 201 into coordinate values ​​of the three-dimensional coordinate system based on the coordinate conversion information 71, 72 generated based on the moving path 13 of the robot 10. As a result, since the coordinate conversion information 71, 72 generated based on the moving path 13 of the robot 10, which has a high correlation with the shape of the workpiece 200, is used, the coordinate values ​​of the inspection coordinate system of the target 201 can be converted accurately into coordinate values ​​of the three-dimensional coordinate system. As a result, the position of the target 201 can be accurately shown on the actual workpiece 200 or a three-dimensional image of the workpiece 200 using the coordinate values ​​of the three-dimensional coordinate system of the target 201 converted accurately. This effect is particularly effective when inspecting a workpiece 200 with a complex shape.

[0053] Furthermore, by using the coordinate conversion information 71 and 72 created in advance, the process of converting the coordinate values ​​of the inspection coordinate system of the object 201 into the coordinate values ​​of a three-dimensional coordinate system can be efficiently performed.

[0054] Furthermore, in this embodiment, as described above, the processing unit 41 performs processing to acquire coordinate values ​​of a three-dimensional coordinate system at each first distance interval D1 along the movement path 13 and generate the coordinate conversion information 71, 72. This makes it possible to uniformly acquire coordinates of a three-dimensional coordinate system along the movement path 13 and generate the coordinate conversion information 71, 72, thereby making it possible to suppress unevenness in the accuracy of the coordinate conversion by the coordinate conversion information 71, 72.

[0055] In the present embodiment, as described above, the processing unit 51 operates the inspection unit 20 to inspect the workpiece 200 at every second distance interval D2 along the movement path 13 to acquire the inspection image 21, and the first distance interval D1 is greater than the second distance interval D2. This makes it possible to reduce the amount of information in the coordinate conversion information 71, 72 while ensuring the accuracy required for the coordinate conversion by the coordinate conversion information 71, 72 by utilizing the fact that the inspection of the workpiece 200 needs to be performed precisely but the position of the target 201 does not need to be indicated in such detail.

[0056] In the present embodiment, as described above, the coordinate conversion information 71, 72 is a coordinate conversion table in which the movement amount of the robot 10 in the direction along the movement path 13 corresponds to the coordinate value of the three-dimensional coordinate system, and the processing units 41, 61, in the process of converting the coordinate value of the inspection coordinate system of the object 201 into the coordinate value of the three-dimensional coordinate system, perform the following processes: acquiring the movement amount of the robot 10 in the coordinate conversion table corresponding to the coordinate value of the inspection coordinate system in the direction along the movement path 13 of the object 201, acquiring the coordinate value of the three-dimensional coordinate system in the coordinate conversion table corresponding to the movement amount of the robot 10 in the acquired coordinate conversion table, and correcting the coordinate value of the three-dimensional coordinate system in the acquired coordinate conversion table based on the coordinate value of the inspection coordinate system in the direction perpendicular to the movement path 13 of the object 201. As a result, by utilizing the correspondence between the movement amount of the robot 10 in the direction along the movement path 13 and the coordinate value of the inspection coordinate system in the direction along the movement path 13 of the object 201, the coordinate value of the inspection coordinate system of the object 201 can be easily and accurately converted into the coordinate value of the three-dimensional coordinate system.

[0057] In addition, in this embodiment, as described above, the inspection system 100 includes an instruction unit 30 that is disposed on the robot 10 and indicates the position of the target 201 with respect to the real workpiece 200, and the three-dimensional coordinate system is a robot coordinate system related to the robot 10. The processing unit 41 operates the robot 10 based on the coordinate values ​​of the target 201 converted into the coordinate values ​​of the robot coordinate system, and performs processing to indicate the position of the target 201 on the real workpiece 200 by the instruction unit 30. As a result, since the coordinate values ​​of the target 201 can be converted into the coordinate values ​​of the robot coordinate system, when the position of the target 201 is indicated on the real workpiece 200 using the robot 10, the position of the target 201 on the real workpiece 200 can be easily grasped. As a result, the position of the target 201 can be easily indicated on the real workpiece 200. In addition, since the instruction unit 30 is disposed on the robot 10 that performs the inspection, it is not necessary to provide a robot in which the instruction unit 30 is disposed separately from the robot 10 that performs the inspection. As a result, the complexity of the structure can be suppressed.

[0058] Furthermore, in this embodiment, as described above, the three-dimensional coordinate system is a workpiece coordinate system related to the workpiece 200, and the processing unit 61 performs processing to indicate the position of the object 201 in the three-dimensional image of the workpiece 200 based on the coordinate values ​​of the object 201 converted into the coordinate values ​​of the workpiece coordinate system. This allows the coordinate values ​​of the object 201 to be converted into the coordinate values ​​of the workpiece coordinate system, so that the position of the object 201 in the three-dimensional image of the workpiece 200 can be easily grasped. As a result, the position of the object 201 can be easily indicated in the three-dimensional image of the workpiece 200.

[0059] Furthermore, in this embodiment, as described above, when the coordinate values ​​of the multiple targets 201 converted into the coordinate values ​​of the robot coordinate system are within a threshold range, the processing unit 41 performs processing to treat the multiple targets 201 as one target 201 and display the position of the target 201 on the actual workpiece 200. This makes it possible to prevent one target 201 from being erroneously displayed as multiple targets 201 even when one target 201 is erroneously detected as multiple targets 201. This effect is particularly effective in a configuration in which one target 201 can be detected from different inspection images 21 because part of the inspection ranges 22 of the inspection unit 20 overlap, as in this embodiment.

[0060] (Modification) It should be noted that the embodiments disclosed herein are illustrative and not restrictive in all respects. The scope of the present disclosure is indicated by the claims, not by the description of the embodiments above, and further includes all modifications (variations) within the meaning and scope equivalent to the claims.

[0061] For example, in the above embodiment, an example has been described in which the inspection system is an appearance inspection system that inspects the appearance of a workpiece, but the present disclosure is not limited to this. In the present disclosure, the inspection system may be an inspection system that inspects the inside of a workpiece. In this case, the inspection unit may be an ultrasonic flaw detector that inspects the workpiece by transmitting ultrasonic waves to the inside of the workpiece and receiving ultrasonic waves reflected from the inside of the workpiece. By using the ultrasonic flaw detector, it is possible to detect objects such as defects inside the workpiece.

[0062] In the above embodiment, the robot is a vertical articulated robot, but the present disclosure is not limited to this. In the present disclosure, the robot may be an industrial robot other than a vertical articulated robot.

[0063] In the above embodiment, an example has been described in which the robot moves the imaging unit to move the inspection unit relative to the workpiece, but the present disclosure is not limited to this. In the present disclosure, the robot may move the workpiece to move the inspection unit relative to the workpiece.

[0064] In the above embodiment, the processing unit of the robot controller, the processing unit of the image processing device, and the processing unit of the result display device share the tasks of performing various processes, but the present disclosure is not limited to this. In the present disclosure, the number and configuration of the processing units are not particularly limited. One processing unit may perform various processes in the above embodiment, or multiple processing units may perform various processes in the above embodiment. The configuration of the storage unit is also not limited. The configuration of the robot controller, the image processing device, and the result display device is also not limited. The robot controller, the image processing device, and the result display device may be integrated, or may be separate as in the above embodiment. The robot controller, the image processing device, and the result display device may be further separated. For example, an operation device for operating the result display device may be provided separately from the result display device.

[0065] In the above embodiment, the processing unit of the robot controller performs the process of generating the movement path and the process of generating the coordinate conversion information, but the present disclosure is not limited to this. In the present disclosure, as in a modified example shown in FIG. 16, the inspection system 100 may include a simulation device 180 that generates the movement path 13 of the robot 10 on a display screen by simulation without using an actual machine. In the modified example, the simulation device 180 includes a processing unit 181, a storage unit 182, and a display unit 183. The processing unit 181 includes a processor and performs various processes related to the simulation. The storage unit 182 includes a non-volatile memory and stores the coordinate conversion information 71, 72, etc. The display unit 183 includes a monitor such as a liquid crystal monitor and displays a simulation screen, etc.

[0066] The processing unit 181 displays three-dimensional images of the robot 10, the inspection unit 20, and the workpiece 200 on the display unit 183, and performs a process of generating a movement path 13 of the robot 10 by simulation. The processing unit 181 also performs a process of generating coordinate conversion information 71, 72 based on the generated movement path 13. The processing unit 181 also performs a process of storing the coordinate conversion information 71, 72 in the storage unit 182. The processing unit 181 also performs a process of outputting the coordinate conversion information 71 to the processing unit 41 of the robot controller 40, and a process of outputting the coordinate conversion information 72 to the processing unit 61 of the result display device 60.

[0067] In the above embodiment, an example is shown in which both the process of displaying the position of the target on the actual workpiece and the process of displaying the position of the target on a three-dimensional image of the workpiece are performed, but the present disclosure is not limited to this. In the present disclosure, only one of the process of displaying the position of the target on the actual workpiece and the process of displaying the position of the target on a three-dimensional image of the workpiece may be performed.

[0068] In the above embodiment, the coordinate conversion information is a coordinate conversion table, but the present disclosure is not limited to this. In the present disclosure, the coordinate conversion information may be information other than a table, such as a coordinate conversion formula.

[0069] In the above embodiment, the instruction unit is a laser irradiation unit, but the present disclosure is not limited to this. In the present disclosure, the instruction unit is not particularly limited as long as it is possible to indicate the position of the target on the work. For example, the instruction unit may be an ink application unit that applies ink to indicate the position of the target on the work. For example, the instruction unit may be a stamp imprinting unit that imprints a stamp to indicate the position of the target on the work. For example, the instruction unit may be a paint gun that sprays paint to indicate the position of the target on the work. For example, the instruction unit may be an attachment unit that attaches an attachment such as a sticky note to indicate the position of the target on the work. Unlike the above embodiment, the position of the target may be indicated on the actual work by an augmented reality display device that displays augmented reality. The augmented reality display device displays an augmented reality image indicating the position of the target to indicate the position of the target on the work.

[0070] In addition, in the above embodiment, an example in which the instruction unit is disposed in the inspection robot has been described, but the present disclosure is not limited to this. In the present disclosure, an instruction robot in which an instruction unit is disposed may be provided separately from the inspection robot. The instruction robot operates to indicate the position of the target on the actual workpiece. In addition, the location where the inspection robot inspects the workpiece and the location where the instruction robot issues instructions for the workpiece may be separate, remote locations.

[0071] In the above embodiment, the first distance is greater than the second distance, but the present disclosure is not limited to this. In the present disclosure, the first distance may be equal to or less than the second distance.

[0072] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general purpose processors, special purpose processors, integrated circuits, Application Specific Integrated Circuits (ASICs), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. Processors are considered processing circuits or circuits because they include transistors and other circuits. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. Where the hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or the processor.

[0073] [Aspects] The above-described embodiment is a specific example of the following aspects.

[0074] (Aspect 1) Robots and An inspection unit that inspects the workpiece; A process of generating a movement path of the robot when the inspection unit inspects the workpiece by moving the inspection unit relative to the workpiece by the robot; A process of generating coordinate conversion information for converting coordinate values ​​of an inspection coordinate system of an inspection image acquired by inspecting the workpiece by the inspection unit into coordinate values ​​of a three-dimensional coordinate system capable of expressing coordinate values ​​of the workpiece in three dimensions, based on the generated movement path; A process of operating the robot based on the generated movement path and acquiring the inspection image by inspecting the workpiece with the inspection unit; detecting an object of the workpiece within the acquired inspection image; A process of converting coordinate values ​​of the inspection coordinate system of the object into coordinate values ​​of the three-dimensional coordinate system based on the generated coordinate conversion information; A process of displaying a position of the object on the actual workpiece or a three-dimensional image of the workpiece based on the converted coordinate values ​​of the three-dimensional coordinate system of the object; and a processing unit that performs the above.

[0075] (Aspect 2) 2. The inspection system according to claim 1, wherein the processing unit performs processing to acquire coordinate values ​​of the three-dimensional coordinate system at each first distance interval along the movement path and generate the coordinate transformation information.

[0076] (Aspect 3) The processing unit operates the inspection unit to inspect the workpiece at second distance intervals along the movement path, and performs processing to acquire the inspection image; 3. The inspection system of claim 2, wherein the first distance is greater than the second distance.

[0077] (Aspect 4) the coordinate conversion information is a coordinate conversion table that associates a movement amount of the robot in a direction along the movement path with a coordinate value of the three-dimensional coordinate system; The processing unit, in a process of converting coordinate values ​​of the inspection coordinate system of the object into coordinate values ​​of the three-dimensional coordinate system, acquiring a movement amount of the robot in the coordinate conversion table corresponding to a coordinate value of the inspection coordinate system in a direction along the movement path of the object; A process of acquiring coordinate values ​​of the three-dimensional coordinate system of the coordinate conversion table corresponding to the movement amount of the robot of the acquired coordinate conversion table; a process of correcting the coordinate values ​​of the three-dimensional coordinate system of the acquired coordinate conversion table based on coordinate values ​​of the inspection coordinate system in a direction perpendicular to the movement path of the object; The inspection system according to any one of aspects 1 to 3,

[0078] (Aspect 5) An indication unit is provided on the robot and indicates a position of the target relative to the actual workpiece, the three-dimensional coordinate system is a robot coordinate system related to the robot, The processing unit operates the robot based on the coordinate values ​​of the object converted into coordinate values ​​in the robot coordinate system, and performs processing to indicate the position of the object on the actual workpiece using the instruction unit.

[0079] (Aspect 6) the three-dimensional coordinate system is a workpiece coordinate system relating to the workpiece, An inspection system described in any one of aspects 1 to 5, wherein the processing unit performs processing to indicate the position of the object in a three-dimensional image of the work based on the coordinate values ​​of the object converted into coordinate values ​​of the work coordinate system.

[0080] (Aspect 7) the three-dimensional coordinate system is a robot coordinate system related to the robot, An inspection system described in any one of aspects 1 to 6, wherein the processing unit performs processing to treat the multiple targets as a single target and indicate the position of the target on the actual workpiece when the coordinate values ​​of the multiple targets converted into coordinate values ​​in the robot coordinate system are within a threshold range.

[0081] (Aspect 8) generating a movement path of the robot when the inspection unit inspects the workpiece by moving the inspection unit relative to the workpiece by the robot; generating coordinate conversion information for converting coordinate values ​​of an inspection coordinate system of an inspection image acquired by inspecting the workpiece with the inspection unit into coordinate values ​​of a three-dimensional coordinate system capable of expressing coordinate values ​​of the workpiece in three dimensions, based on the generated movement path; operating the robot based on the generated movement path, and acquiring the inspection image by inspecting the workpiece with the inspection unit; Detecting an object of the workpiece within the acquired inspection image; converting coordinate values ​​of the inspection coordinate system of the object into coordinate values ​​of the three-dimensional coordinate system based on the generated coordinate conversion information; and indicating a position of the object on the actual workpiece or a three-dimensional image of the workpiece based on the transformed coordinate values ​​of the object in the three-dimensional coordinate system. [Explanation of symbols]

[0082] 10. Robot 13. Travel Route 20 Inspection Department 21 Inspection images 30 Instruction section 41 Processing section 51 Processing section 61 Processing section 71, 72 Coordinate conversion information 100 Inspection Systems 181 Processing section 200 Work 201 Target D1 First distance interval D2 Second distance interval

Claims

1. Robots and An inspection unit that inspects the workpiece; A process of generating a movement path of the robot when the inspection unit inspects the workpiece by moving the inspection unit relative to the workpiece by the robot; a process of generating coordinate conversion information for converting coordinate values ​​of an inspection coordinate system of an inspection image acquired by inspecting the workpiece by the inspection unit into coordinate values ​​of a three-dimensional coordinate system capable of expressing coordinate values ​​of the workpiece three-dimensionally, based on the generated movement path; A process of operating the robot based on the generated movement path and acquiring the inspection image by inspecting the workpiece with the inspection unit; detecting an object of the workpiece within the acquired inspection image; A process of converting coordinate values ​​of the inspection coordinate system of the object into coordinate values ​​of the three-dimensional coordinate system based on the generated coordinate conversion information; A process of displaying a position of the object on the actual workpiece or a three-dimensional image of the workpiece based on the converted coordinate values ​​of the three-dimensional coordinate system of the object; and a processing unit that performs the above.

2. The inspection system according to claim 1 , wherein the processing unit performs processing to acquire coordinate values ​​of the three-dimensional coordinate system at first distance intervals along the movement path and generate the coordinate conversion information.

3. The processing unit operates the inspection unit to inspect the workpiece at second distance intervals along the movement path, and performs processing to acquire the inspection image; The inspection system of claim 2 , wherein the first distance is greater than the second distance.

4. the coordinate conversion information is a coordinate conversion table that associates a movement amount of the robot in a direction along the movement path with a coordinate value of the three-dimensional coordinate system; The processing unit, in a process of converting coordinate values ​​of the inspection coordinate system of the object into coordinate values ​​of the three-dimensional coordinate system, acquiring a movement amount of the robot in the coordinate conversion table corresponding to a coordinate value of the inspection coordinate system in a direction along the movement path of the object; A process of acquiring coordinate values ​​of the three-dimensional coordinate system of the coordinate conversion table corresponding to the movement amount of the robot of the acquired coordinate conversion table; a process of correcting coordinate values ​​of the three-dimensional coordinate system of the acquired coordinate conversion table based on coordinate values ​​of the inspection coordinate system in a direction perpendicular to the movement path of the object; The inspection system according to claim 1 ,

5. An indication unit is provided on the robot and indicates a position of the target relative to the actual workpiece, the three-dimensional coordinate system is a robot coordinate system related to the robot, The inspection system according to claim 1 , wherein the processing unit operates the robot based on the coordinate values ​​of the object converted into coordinate values ​​in the robot coordinate system, and performs processing to indicate the position of the object on the actual workpiece by the instruction unit.

6. the three-dimensional coordinate system is a workpiece coordinate system related to the workpiece, The inspection system according to claim 1 , wherein the processing unit performs processing to indicate a position of the target in a three-dimensional image of the workpiece based on the coordinate values ​​of the target converted into coordinate values ​​in the workpiece coordinate system.

7. the three-dimensional coordinate system is a robot coordinate system related to the robot, The inspection system of claim 1, wherein the processing unit performs processing for treating the multiple targets as a single target and indicating the position of the target on the actual workpiece when the coordinate values ​​of the multiple targets converted into coordinate values ​​in the robot coordinate system are within a threshold range.

8. generating a movement path of the robot when the inspection unit inspects the workpiece by moving the inspection unit relative to the workpiece by the robot; generating coordinate conversion information for converting coordinate values ​​of an inspection coordinate system of an inspection image acquired by inspecting the workpiece with the inspection unit into coordinate values ​​of a three-dimensional coordinate system capable of expressing coordinate values ​​of the workpiece three-dimensionally, based on the generated movement path; operating the robot based on the generated movement path, and acquiring the inspection image by inspecting the workpiece with the inspection unit; Detecting an object of the workpiece within the acquired inspection image; converting coordinate values ​​of the inspection coordinate system of the object into coordinate values ​​of the three-dimensional coordinate system based on the generated coordinate conversion information; and indicating a position of the object on the actual workpiece or a three-dimensional image of the workpiece based on the transformed coordinate values ​​of the object in the three-dimensional coordinate system.

Images