Robot for simultaneous substrate transfer

Abstract

To provide a substrate processing system and a substrate transfer method that may provide ab increased transfer speed and accommodate a transfer region having a plurality of rows of substrates.SOLUTION: A substrate processing system 200 includes a transfer region housing 205 having a sidewall that defines a sealable access for providing and receiving substrates. The system includes a plurality of substrate supports 210a to 210d disposed within a transfer region, and a transfer apparatus 220 having a central hub 225 including a first shaft and a second shaft concentric with and counter-rotatable to the first shaft. The transfer apparatus includes a first end effector 230 coupled with the first shaft, and the first end effector includes a plurality of first arms. The transfer apparatus also includes a second end effector 235 coupled with the second shaft. The second end effector includes a plurality of second arms, the number of which is equal to the number of the first arms of the first end effector.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims the benefit of priority to U.S. Provisional Patent Application No. 62 / 873,400, filed July 12, 2019, the contents of which are incorporated herein by reference in their entirety for all purposes.

[0002] The present technology relates to the following applications, filed concurrently on July 12, 2019, entitled "ROBOT FOR SIMULTANEOUS SUBSTRATE TRANSFER" (U.S. Provisional Application No. 62 / 873,432), "ROBOT FOR SIMULTANEOUS SUBSTRATE TRANSFER" (U.S. Provisional Application No. 62 / 873,458), "ROBOT FOR SIMULTANEOUS SUBSTRATE TRANSFER" (U.S. Provisional Application No. 62 / 873,480), "MULTI-LID STRUCTURE FOR SEMICONDUCTOR PROCESSING SYSTEMS" (U.S. Provisional Application No. 62 / 873,518), and "HIGH-DENSITY SUBSTRATE PROCESSING SYSTEMS AND METHODS" (U.S. Provisional Application No. 62 / 873,503), each of which is incorporated herein by reference in its entirety for all purposes.

[0003] The present technology relates to semiconductor processing and apparatus, and more particularly to substrate processing systems. [Background technology]

[0004] background Semiconductor processing systems often utilize cluster tools to integrate multiple processing chambers. This configuration can facilitate the performance of several sequential processing operations without removing the substrate from the controlled processing environment, or can allow similar processes to be performed on multiple substrates at once in various chambers. These chambers can include, for example, degassing chambers, pre-treatment chambers, transfer chambers, chemical vapor deposition chambers, physical vapor deposition chambers, etch chambers, metrology chambers, and other chambers. The combination of chambers in the cluster tool, and the operating conditions and parameters under which these chambers are run, are selected to produce a particular structure using a particular processing recipe and process flow.

[0005] Cluster tools often process multiple substrates by passing the substrates sequentially through a series of chambers for processing operations. Process recipes and sequences are typically programmed into a microprocessor controller that directs, controls, and monitors the processing of each substrate through the cluster tool. Once an entire cassette of wafers has been successfully processed through the cluster tool, the cassette can be sent to yet another cluster tool or a stand-alone tool, such as a chemical mechanical polisher, for further processing.

[0006] Robots are typically used to transport wafers through the various processing and holding chambers. The time required for each process and processing operation directly impacts the throughput of substrates per unit time. The substrate throughput of a cluster tool can be directly related to the speed of the substrate processing robot located in the transfer chamber. As processing chamber configurations become more developed, traditional wafer transport systems can become inadequate. Summary of the Invention

[0007] Thus, there is a need for improved systems and methods that can be used to efficiently orient substrates within a cluster tool environment. These and other needs are addressed by current technology.

[0008] An exemplary substrate processing system may include a transfer region housing defining a transfer region. A sidewall of the transfer region housing may define a sealable access for providing and receiving a substrate. The system may include a plurality of substrate supports disposed within the transfer region. The system may also include a transfer apparatus. The transfer apparatus may include a central hub including a first shaft and a second shaft extending around and concentric with the first shaft. The second shaft may be counter-rotatable with the first shaft. The transfer apparatus may include a first end effector coupled to the first shaft. The first end effector may include a plurality of first arms having a number of first arms equal to a number of substrate supports of the plurality of substrate supports. The transfer apparatus may also include a second end effector coupled to the second shaft. The second end effector may include a plurality of second arms having a number of second arms equal to a number of first arms of the first end effector.

[0009] In some embodiments, the plurality of substrate supports may include at least four substrate supports. The second end effector may be vertically offset from the first end effector along the central hub. The first end effector may also include a plurality of first end pieces, each of which is coupled to a separate first arm of the plurality of first arms. The second end effector may also include a plurality of second end pieces, each of which is coupled to a separate second arm of the plurality of second arms. Each of the first end pieces and each of the second end pieces may extend perpendicular to a similar plane that extends perpendicular to the central hub. Each of the first end pieces and each of the second end pieces may define a recessed ledge or shelf. Each of the first end pieces and each of the second end pieces may be characterized by an arcuate exterior profile. Each of the first end pieces may include a force generating plunger configured to releasably engage the substrate relative to a corresponding second end piece. The central hub may be vertically translatable along a central axis of the central hub.

[0010] Some embodiments of the present technology may include a method of transferring a substrate. The method may include receiving a substrate on a first substrate support in a transfer region of a substrate processing system. The substrate processing system may include a transfer apparatus. The transfer apparatus may include a central hub including a first shaft and a second shaft extending around and concentric with the first shaft. The transfer apparatus may include a first end effector coupled to the first shaft, the first end effector may include a plurality of first arms. The transfer apparatus may also include a second end effector coupled to the second shaft, the second end effector may include a plurality of second arms. The method may include rotating the first shaft in a first direction about a central axis of the central hub. The method may include rotating the second shaft in a second direction about a central axis of the central hub. The method may include engaging the substrate with a first arm of the plurality of first arms and a second arm of the plurality of second arms. The method may include co-rotating the first arm and the second arm about a central axis to reposition the substrate. The method may also include delivering the substrate to a second substrate support of the substrate processing system.

[0011] In some embodiments, the method may include decoupling the substrate from the transfer apparatus by rotating the first shaft in a second direction about a central axis and rotating the second shaft in a first direction about a central axis. The method may then include engaging the substrate and lifting the substrate from the first substrate support by vertically translating the transfer apparatus in the transfer region. The method may then include engaging the substrate and retracting the first substrate support from the substrate. The first end effector may include a plurality of first end pieces, each first end piece coupled to a respective first arm of the plurality of first arms. The second end effector may include a plurality of second end pieces, each second end piece coupled to a respective second arm of the plurality of second arms. Each first end piece and each second end piece may define a recessed ledge and shelf. Engaging the substrate may include extending a shelf of a first end piece of the first arm and a shelf of a second end piece of the second arm below an outer edge of the substrate. The substrate processing system may include at least four substrates, and engaging the substrate may include simultaneously engaging the at least four substrates with the first end effector and the second end effector. The method may also include delivering the substrate to an alignment hub disposed between the first substrate support and the second substrate support prior to delivering the substrate to the second substrate support.

[0012] Some embodiments of the present technology may include a substrate processing system including a transfer region housing defining a transfer region. A sidewall of the transfer region housing may define a sealable access for providing and receiving a substrate. The system may include a plurality of substrate supports disposed within the transfer region. The system may include a transfer apparatus. The transfer apparatus may include a central hub including a first shaft and a second shaft extending around and concentric with the first shaft. The second shaft may be rotatable independently of the first shaft. The transfer apparatus may include a first end effector coupled to the first shaft. The first end effector may include a plurality of first arms extending radially outward from the central hub to a distal end of each of the plurality of first arms. Each of the first arms may be characterized by an arcuate shape extending along a first arc path to a distal end of each of the first arms. The transfer apparatus may include a second end effector coupled to the second shaft. The second end effector may include a plurality of second arms extending radially outward from a central hub to a distal end of each of the plurality of second arms. Each of the second arms may be characterized by an arcuate shape extending to the distal end of each of the second arms along a second arc path. The second arc path may be mirrored to the first arc path about a transverse axis extending from the central hub perpendicular to the central axis of the central hub.

[0013] In some embodiments, the first end effector may include a plurality of first end pieces, each first end piece coupled to a respective first arm of the plurality of first arms. The second end effector may also include a plurality of second end pieces, each second end piece coupled to a respective second arm of the plurality of second arms. The central hub may be vertically translatable along a central axis of the central hub.

[0014] Such techniques may provide many advantages over conventional systems and techniques. For example, the handling system may provide increased transfer speeds compared to conventional designs. Additionally, the handling system may accommodate a transfer region having multiple rows of substrates. These and other embodiments, along with many of their advantages and features, are described in more detail in conjunction with the following description and accompanying figures.

[0015] A further understanding of the nature and advantages of the disclosed techniques may be realized by reference to the remaining portions of the specification and the drawings. [Brief description of the drawings]

[0016] [Figure 1A] 1 shows a schematic top view of an exemplary processing system in accordance with some embodiments of the present technique. [Figure 1B] 1 shows a schematic partial cross-sectional view of an exemplary chamber system in accordance with some embodiments of the present technique. [Diagram 2] 1 shows a schematic perspective view of a transfer region of an exemplary chamber system in accordance with some embodiments of the present technique; [Figure 3A-3B] 3A and 3B show schematic cross-sectional views of an exemplary transfer device in accordance with some embodiments of the present technology. [Figure 4] 1 illustrates example operations in a method of transferring a substrate in accordance with some embodiments of the present technique. [Figure 5A-5B] 5A and 5B show schematic top views of a substrate being transferred in accordance with some embodiments of the present technique. [Fig. 5C-5D] 5C and 5D show schematic top views of a substrate being transferred according to some embodiments of the present technique. [Fig. 5E-5F] 5E and 5F show schematic top views of a substrate being transferred according to some embodiments of the present technique. [Fig. 5G-5H] 5G and 5H show schematic top views of a substrate being transferred according to some embodiments of the present technique. [Figure 6A]1 shows a schematic diagram of substrate seating according to some embodiments of the present technique; [Figure 6B] 1 shows a schematic diagram of a substrate pedestal according to some embodiments of the present technique; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] Some figures are included as schematics. It is understood that these figures are for illustrative purposes and should not be considered to be to scale or to ratio unless specifically stated to be to scale or to ratio. Furthermore, as schematics, the drawings are provided to aid in understanding and may not include all aspects or information compared to a realistic depiction and may include material that is emphasized for illustrative purposes.

[0018] In the accompanying drawings, similar components and / or features may have the same reference numbers. Furthermore, various components of the same type may be distinguished according to the reference numbers, with a letter distinguishing between the similar components. If only a first reference number is used in this specification, the description is applicable to any of the similar components having the same first reference number, regardless of the letter.

[0019] Substrate processing may include time-consuming operations to add, remove, or otherwise modify material on a wafer or semiconductor substrate. Efficient movement of substrates may reduce queue times and increase substrate throughput. Additional chambers may be incorporated into the mainframe to improve the number of substrates processed within the cluster tool. Lengthening the tool allows for the continual addition of transfer robots and processing chambers, but as the footprint of the cluster tool expands, space inefficiencies may result. Thus, the present technology may include a cluster tool with an increased number of processing chambers within a defined footprint. To accommodate the limited footprint on the transfer robot, the present technology may increase the number of processing chambers laterally outward from the robot. For example, some conventional cluster tools may include one or two processing chambers located around a section of the centrally located transfer robot to maximize the number of chambers radially about the robot. The present technology may extend this concept by incorporating additional chambers laterally outward as another row or group of chambers. For example, the techniques of the present invention may be applied to cluster tools that include three, four, five, six or more processing chambers each accessible at one or more robot access locations.

[0020] However, as additional process locations are added, accessing these locations from the central robot may no longer be feasible without additional transfer capabilities at each location. Some conventional techniques may include a wafer carrier on which the substrate remains seated during transfer. However, the wafer carrier may contribute to thermal non-uniformities and particle contamination on the substrate. The present technology overcomes these problems by incorporating a transfer section vertically aligned to the processing chamber area and a carousel or transfer device that can operate in concert with the central robot to access the additional wafer locations. The present technology does not use a conventional wafer carrier in some embodiments, and a particular wafer can be transferred from one substrate support to a different substrate support in the transfer area. Although the remaining disclosure routinely identifies a particular structure, such as a four-position transfer area, in which the present structure and method may be used, it will be readily understood that the system and method are equally applicable to any number of structures and devices that may benefit from the transfer capabilities described. Thus, the technology should not be considered so limited as to be usable with only a particular structure. Additionally, while an exemplary tool system is described to provide a foundation for the present technology, it should be understood that the present technology may be incorporated into any number of semiconductor processing chambers and tools that may benefit from some or all of the described operations and systems.

[0021] FIG. 1A shows a top view of one embodiment of a deposition, etch, bake, and cure chamber substrate processing tool or processing system 100 according to some embodiments of the present technology. In this figure, a set of front-opening unified pods 102 deliver substrates of various dimensions that are received in a factory interface 103 by robot arms 104a and 104b and placed in a load lock or low pressure holding area 106 before being delivered to one of the substrate processing areas 108 located in chamber systems or quad sections 109a-c, each of which may be a substrate processing system having a transfer area fluidly coupled with multiple processing areas 108. Although a quad system is shown, it should be understood that platforms incorporating stand-alone chambers, twin chambers, and other multi-chamber systems are equally encompassed by the present technology. A second robot arm 110 housed in a transfer chamber 112 may be used to transport substrate wafers from the holding area 106 to the quad section 109 and vice versa, and the second robot arm 110 may be housed in a transfer chamber to which each of the quad sections or processing systems may be connected. Each substrate processing region 108 can be equipped to perform a number of substrate processing operations, including any number of deposition processes, including cyclic layer deposition, atomic layer deposition, chemical vapor deposition, physical vapor deposition, as well as etching, pre-cleaning, annealing, plasma treatment, degassing, alignment, and other substrate processes.

[0022] Each quad section 109 may include a transfer region capable of receiving and delivering substrates from the second robot arm 110. The transfer region of the chamber system may be aligned with the transfer chamber with the second robot arm 110. In some embodiments, the transfer region may be laterally accessible to the robot. In subsequent operations, components of the transfer section may translate the substrate vertically to the overlying processing region 108. Similarly, the transfer region may also be operable to rotate the substrate between positions within each transfer region. The substrate processing region 108 may include any number of system components for depositing, annealing, curing, and / or etching a material film on a substrate or wafer. In one configuration, two sets of processing regions, such as the processing regions in quad sections 109a and 109b, may be used to deposit material on a substrate, and a third set of processing chambers, such as the processing chambers or region in quad section 109c, may be used to cure, anneal, or otherwise process the deposited film. In another configuration, all three sets of chambers, such as all twelve chambers shown, may be configured to deposit and / or cure a film on a substrate.

[0023] As shown in the figure, the second robot arm 110 may include two arms for simultaneously delivering and / or retrieving multiple substrates. For example, each quad section 109 may include two accesses 107 along a surface of the housing of the transfer region that may be aligned laterally with the second robot arm. The accesses may be defined along a surface adjacent to the transfer chamber 112. In some embodiments as shown, the first access may be aligned with a first substrate support of the plurality of substrate supports of the quad section. Additionally, the second access may be aligned with a second substrate support of the plurality of substrate supports of the quad section. In some embodiments, the first substrate support may be adjacent to the second substrate support, and the two substrate supports may define a first row of substrate supports. As shown in the illustrated configuration, the second row of substrate supports may be positioned behind the first row of substrate supports laterally outward from the transfer chamber 112. The two arms of the second robot arm 110 can be spaced apart to allow both arms to simultaneously enter a quad section or chamber system and deliver or retrieve one or two substrates to a substrate support in the transfer region.

[0024] Any one or more of the described transfer regions may be incorporated with additional chambers separate from the fabrication system shown in different embodiments. It will be understood that additional configurations of deposition, etching, annealing, and curing chambers for material films are contemplated by the processing system 100. Additionally, any number of other processing systems may be utilized with the present technology, which may incorporate a transfer system for performing any of the specific operations, such as moving a substrate. In some embodiments, a processing system that may provide access to multiple processing chamber regions while maintaining a vacuum environment in various sections, such as the noted holding and transfer regions, may allow operations to be performed in multiple chambers while maintaining a specific vacuum environment between individual processes.

[0025] FIG. 1B shows a schematic cross-sectional elevation view of one embodiment of an exemplary processing tool, e.g., through a chamber system, according to some embodiments of the present technique. FIG. 1B may show a cross-sectional view of any two adjacent processing regions 108 in any quad section 109. The elevation view may show the configuration of the fluid coupling between one or more processing regions 108 and the transfer region 120. For example, the continuous transfer region 120 may be defined by a transfer region housing 125. The housing may define an open interior volume in which multiple substrate supports 130 may be placed. For example, as shown in FIG. 1A, the exemplary processing system may include four or more including multiple substrate supports 130 distributed within the housing around the transfer region. The substrate support may be a pedestal as shown, although many other configurations may be used. In some embodiments, the pedestal may be vertically transportable between the transfer region 120 and a processing region covering the transfer region. The substrate support may be vertically transportable along a central axis of the substrate support along a path between a first position and a second position within the chamber system. Thus, in some embodiments, each substrate support 130 may be axially aligned with an overlying processing region 108 defined by one or more chamber components.

[0026] The open transfer area may provide the ability for a transfer device 135, such as a carousel, to engage and move, such as rotate, a substrate between various substrate supports. The transfer device 135 may be rotatable about a central axis. This may position the substrate for processing in any of the processing regions 108 in the processing system. The transfer device 135 may include one or more end effectors that may engage the substrate from above, below, or may engage the outer edge of the substrate to move around the substrate support. The transfer device may receive a substrate from a transfer chamber robot, such as the robot 110 described above. The transfer device may then rotate the substrate to an alternate substrate support to facilitate delivery of additional substrates.

[0027] Once positioned and awaiting processing, the transfer device can place an end effector or arm between the substrate supports, thereby lifting the substrate support over the transfer device 135 and delivering the substrate to the processing region 108, which may be vertically offset from the transfer region. For example and as shown, the substrate support 130a can deliver the substrate to the processing region 108a, while the substrate support 130b can deliver the substrate to the processing region 108b. This can occur with the other two substrate supports and processing regions, as well as additional substrate supports and processing regions in embodiments where additional processing regions are included. In this configuration, the substrate support, when operably engaged to process a substrate, such as in a second position, can at least partially define the processing region 108 from below, and the processing region can be axially aligned with the associated substrate support. The processing region can be defined from above by the face plate 140, as well as other lid stack components. In some embodiments, each processing region can have an individual lid stack component, while in some embodiments, the components can accommodate multiple processing regions 108. Based on this configuration, in some embodiments, each processing region 108 can be fluidly coupled to the transfer region while being fluidly isolated from above from other processing regions within the chamber system or quad section.

[0028] In some embodiments, the face plate 140 can operate as an electrode of the system for generating a local plasma in the processing region 108. As shown, each processing region can utilize or incorporate a separate face plate. For example, face plate 140a can be included to define from above processing region 108a, and face plate 140b can be included to define from above processing region 108b. In some embodiments, the substrate support can operate as a companion electrode for generating a capacitively coupled plasma between the substrate support and the substrate support. The pumping liner 145 can at least partially define the processing region 108 radially or laterally, depending on the volume geometry. Again, separate pump liners can be utilized for each processing region. For example, pumping liner 145a can at least partially define the processing region 108a radially, and pumping liner 145b can at least partially define the processing region 108b radially. In embodiments, blocker plate 150 may be disposed between lid 155 and faceplate 140, and individual blocker plates may be included to facilitate fluid distribution within each processing region. For example, blocker plate 150a may be included for distribution to processing region 108a, and blocker plate 150b may be included for distribution to processing region 108b.

[0029] The lid 155 may be a separate component for each processing region or may include one or more common aspects. In some embodiments as shown, the lid 155 may be a single component that defines multiple apertures 160 for fluid delivery to the individual processing regions. For example, the lid 155 may define a first aperture 160a for fluid delivery to processing region 108a, and the lid 155 may define a second aperture 160b for fluid delivery to processing region 108b. Additional apertures may be defined for additional processing regions within each section, if included. In some embodiments, each quad section 109 or multi-processing region section that may accommodate more or less than four substrates may include one or more remote plasma units 165 for delivering plasma effluent to the processing chamber. In some embodiments, individual plasma units may be incorporated into each chamber processing region, while in some embodiments, fewer remote plasma units may be used. For example, as shown, a single remote plasma unit 165 can be used to service multiple chambers, such as two, three, four, or more chambers up to all chambers in a particular quad section. Plumbing can extend from the remote plasma unit 165 to each aperture 160 for delivery of plasma effluent for treatment or cleaning in embodiments of the present technology.

[0030] As previously mentioned, the processing system 100, or more specifically, a quad section or chamber system incorporated with the system 100, or other processing systems, may include a transfer region disposed below the illustrated processing chamber region. FIG. 2 shows a schematic isometric view of an exemplary substrate processing system 200 according to some embodiments of the present technique. The illustrated system may include a transfer region housing 205 that defines an interior volume or transfer region in which some components may be included. The transfer region may further be defined at least in part from above by a processing chamber, such as the processing chamber shown in the quad section 109 of FIG. 1A. A sidewall of the transfer region housing may define one or more access locations 205 where substrates may be delivered and retrieved, such as by the second robot arm 110 as described above. The access location 205 may be a slit valve or other sealable access location, in some embodiments, including a door or other sealing mechanism to provide an airtight environment within the transfer region housing 205. Although shown with two such access locations 205, it should be understood that in some embodiments, only a single access location 205 may be included. It should also be understood that the substrate processing system 200 may be sized to accommodate any substrate size, including 200 mm, 300 mm, 450 mm, or larger or smaller substrates, including substrates characterized by any number of geometries or configurations.

[0031] Within the transfer region housing 205 can be multiple substrate supports 210 arranged around the transfer region volume. Although four substrate supports are shown, it should be understood that any number of substrate supports are similarly encompassed by embodiments of the present technology. For example, according to embodiments of the present technology, about 3, 4, 5, 6, 8, or more substrate supports 210 can be housed in the transfer region. The second robot arm 110 can deliver substrates to either or both of the substrate supports 210a or 210b via the access 205, and in some embodiments, can deliver substrates directly to a transfer device in the transfer region. Similarly, the second robot arm 110 can retrieve substrates from these locations. Lift pins 212 can protrude from the substrate support 210, allowing the robot to access underneath the substrate. The lift pins can be fixed on the substrate support or where the substrate support can retract underneath, or the lift pins can be further raised or lowered through the substrate support in some embodiments. The substrate support 210 may be vertically transportable and in some embodiments may extend to a processing chamber, such as processing chamber 108 disposed above the transfer region housing 205 .

[0032] The transfer region housing 205 may extend through apertures in the transfer region as shown, and may operate in conjunction with a laser, camera, or other monitoring device projecting or transmitting through adjacent apertures, to provide access to an alignment system 215, whereby the translated substrate is properly positioned. The transfer region housing 205 may also include a transfer apparatus 220, which may be operated in a number of ways to position and move the substrate between the various substrate supports. Exemplary operations are described below, but in one example, the transfer apparatus 220 may move substrates on substrate supports 210a and 210b to substrate supports 210c and 210d, so that additional substrates can be delivered to the transfer region.

[0033] The transfer apparatus 220 may include a central hub 225 that may include one or more shafts extending into the transfer region. Coupled to the central hub may be a first end effector 230 and a second end effector 235. The first end effector 230 may include a number of first arms 233 extending radially or laterally outward from the central hub. Similarly, the second end effector 235 may include a number of second arms 237 extending radially or laterally outward from the central hub. Although shown with a central body from which the arms extend, each end effector may further include individual arms each coupled to the central hub 225. Any number of arms may be included in embodiments of the present technology. In some embodiments, the number of first arms 233 may be the same or equal to the number of substrate supports 210 included in the chamber, and the number of second arms 237 may be the same or equal to the number of first arms 233. Thus, as shown, for four substrate supports, the transfer apparatus 220 may include four arms for each of the first and second end effectors. The arms may be characterized by any number of shapes and profiles, such as linear profiles, as shown, as well as arcuate profiles. While any profile may be utilized, in some embodiments, the arcuate profiles may accommodate substrates that may be circular in some embodiments.

[0034] When used, the arcuate profile of the first arm of the first end effector may be characterized by a particular arcuate profile that extends along the edge of each first arm to the distal end of the first arm. Additionally, the second arm of the second end effector may also be characterized by a particular arcuate profile that extends along the edge of each second arm to the distal end. However, the arcuate profile of the second arm may be inverted or mirrored from the arcuate profile of the first arm, which may correspond to the opposite edge of the substrate being transferred. The mirroring may be along an axis that extends radially or laterally outward from the central hub between the first arm of the first end effector and the second arm of the second end effector, such as an axis perpendicular to a central axis that extends vertically through the central hub. As a result, in some embodiments, the second end effector may be an inverted version of the first end effector, as shown.

[0035] The first end effector 230 may further include a plurality of first end pieces 240. Each first end piece 240 may be coupled to a respective first arm of the plurality of first arms 233. Similarly, the second end effector 235 may further include a plurality of second end pieces 242. Each second end piece 242 may be coupled to a respective second arm of the plurality of second arms 237. Each end piece may also be characterized by an arcuate exterior profile to accommodate circular or otherwise arcuate substrates. The end pieces are described in more detail below and may be used to contact the substrate during transfer or movement. The end pieces as well as the end effectors may be made of or include a number of materials, including conductive and / or insulating materials. In some embodiments, the materials may be coated or plated to withstand contact with precursors or other chemicals that may enter the transfer region from the overlying processing chamber.

[0036] Additionally, materials may be provided or selected to withstand other environmental characteristics such as temperature. In some embodiments, the substrate support may be operable to heat a substrate disposed thereon. The substrate support may be configured to elevate the surface or substrate temperature to temperatures of about 100° C. or more, about 200° C. or more, about 300° C. or more, about 400° C. or more, about 500° C. or more, about 600° C. or more, about 700° C. or more, about 800° C. or more, or more. Any of these temperatures may be maintained during operation, and thus components of the transfer apparatus 220 may be exposed to any of these stated or encompassed temperatures. As a result, in some embodiments, any material may be selected to accommodate these temperature regimes, and may include materials such as ceramics and metals that may be characterized by relatively low coefficients of thermal expansion or other beneficial properties. The coupling of components may also be adapted for operation in high temperature and / or corrosive environments. For example, if the end effector and end piece are each ceramic, the coupling may include press fittings, snap fittings, or fittings such as bolts that may not include additional materials that expand and contract with temperature and may crack the ceramic. In some embodiments, the end piece may be continuous with the end effector or monolithically formed therewith. Any number of other materials that may facilitate movement or resistance during operation may be utilized and are also within the scope of the present technology.

[0037] The transfer device 220 can include a number of components and configurations that can facilitate movement of the end effector, as described further below. Figures 3A-3B show schematic cross-sectional views of an exemplary transfer device 220 in accordance with some embodiments of the present technology, although it should be understood that other configurations that provide the described independent rotational movement are encompassed by the present technology as well.

[0038] The central hub 225 may include a first shaft 310 and a second shaft 320, which may be axially aligned with the first shaft 310. For example, the first shaft 310 and the second shaft 320 may be concentric about a central axis that extends vertically through the central hub. In some embodiments, the first shaft 310 may extend through the second shaft 310 or through the aspects of the second shaft 320. As shown in FIG. 3A, the first shaft 310 and the second shaft 320 may be coaxial, but the two shafts may be coupled with separate motors or drive systems. As shown, the first shaft 310a may be coupled to a first drive system 312a, which may include a motor and enable rotation about a central axis, which may rotate the first end effector 230 in a first direction about the central axis or in a second direction opposite the first. Similarly, the second shaft 320a can be coupled to a second drive system 314a, which can independently rotate the second end effector 235 in a first direction or a second direction about a central axis. In some embodiments, a vertical translation drive 325 can be included, which can translate the transfer apparatus vertically along the central axis. This can facilitate lifting of the substrate from the substrate support or lift pins in some embodiments, although in some embodiments the substrate can be raised and lowered using lift pins and / or substrate support, and the transfer apparatus 220 may not include a vertical drive mechanism.

[0039] FIG. 3B illustrates another embodiment of the transfer device 220 that may utilize a gear box to facilitate counter-rotation of the first shaft 310b relative to the second shaft 320b. For example, the second shaft 320b may be coupled to a gear box 330 that includes a gear set 332 having a first gear coupled to the first shaft 310b. As will be readily appreciated, driving the first gear in a first direction with the first drive system 312b results in counter-rotation of the opposite gear, which may be coupled to the second shaft 320b and the second end effector 235. Additionally, the second drive system 314b may be coupled to components for rotating the gear box and the first shaft together, thereby facilitating simultaneous rotation of the end effectors. This figure also illustrates an optional vertical translation drive 325, which may linearly move the transfer device up and down, as described above. It should be understood that Figures 3A-3B are merely illustrative of any number of configurations and components that may be used to independently rotate a first shaft and a second shaft to allow for separate control of the first and second end effectors. As a result, in some embodiments, the first and second shafts may co-rotate about a central axis, or the two shafts may counter-rotate relative to the other shaft, as will be described in more detail below.

[0040] As shown in both figures, in some embodiments, the first end effector 230 and the second end effector 235 may be vertically offset from one another along the central hub. This may offset associated components in some embodiments, such as the first end piece and the second end piece. Thus, the present technology may further modify the first end piece and the second end piece to accommodate the vertical offset of the first end effector and the second end effector, as described further below.

[0041] FIG. 4 illustrates exemplary operations in a method 400 of transferring a substrate according to some embodiments of the present technique. The method 400 may be performed in one or more transfer systems, such as the system 200, which may be incorporated into the processing system 100, for example. The method may include several optional operations as illustrated in the figures, which may or may not be specifically related to some embodiments of the method according to the present technique. The method 400 describes the operations shown generally in FIGS. 5A-5H, which are described in conjunction with the operations of the method 400. It should be understood that FIG. 5 shows only a partial schematic view with limited details, and that in some embodiments, the system may include more or less substrate supports and other components, as well as alternative structural aspects that may still benefit from any aspect of the present technique.

[0042] FIG. 5A may depict a substrate processing system 500 as previously described and may include any of the features and aspects of the substrate processing system 200 described above, including any of the drive components previously described in FIG. 3, as well as any other drive components understood to be encompassed by the present technology as well. Additionally, the system 500 may be depicted with several substrates 501 positioned within the chamber, such as seated on a substrate support 510 as shown. This diagram may depict a configuration for subsequent initial operations of the method 400, which may include receiving a substrate at a first substrate support 510a in operation 405, such as through robotic access as previously described. The robot may deliver one or two or more substrates to a transfer region 505 on a substrate support proximate to an access or slit valve. A transfer device 520 may rotate the two substrates to the opposing substrate support and deliver two additional substrates. It is understood that the same process may be performed with any number of substrates, including sending one substrate at a time to a processing chamber. FIG. 5A shows four substrates after being positioned within the transfer region, where the transfer device 520 may be positioned in a recessed configuration.

[0043] The transfer process may include rotating the transfer device in several ways. For example, to engage the substrate, the method may include rotating a first shaft of the central hub in a first direction about the central axis of the central hub in operation 410. Beforehand, subsequently, or simultaneously, the method may include rotating a second shaft in a second direction about the central axis of the second hub in operation 415. The second direction may be an opposite rotation to the first direction, as previously described. The rotation may continue until the first arm 533 of the first end effector 530 and the second arm 537 of the second end effector 535 engage the substrate in operation 420, as shown in FIG. 5B.

[0044] Depending on whether or not it has vertical movement capability, the movement and engagement may or may not include raising or lowering either the substrate or the transfer device or both. Furthermore, engaging the substrate may include one or more operations, including passive engagement and active engagement, in some embodiments. For example, as further described below, the end pieces of the first and second end effectors may include various configurations to facilitate engagement. In one form of passive engagement, the end pieces may define recessed ledges and shelves on which the substrate may seat. Thus, with the end pieces in this configuration, the first and second arms may rotate back toward the substrate until the shelves of each end piece extend below the edge of the substrate. In a form of active engagement, one or both of the end pieces may physically and / or forcibly engage the substrate, including compressing or clamping the substrate between the end pieces. When multiple substrates are incorporated within the transfer region, the substrates may be engaged simultaneously, as shown in FIG. 5B. The arms may be distributed equidistantly around a central hub so that the arms may be configured to engage all of the substrates together.

[0045] Once the substrate is engaged by the transfer apparatus, a complete transfer of the substrate can take place between the substrate support and the transfer apparatus. For example, in some embodiments, the transfer apparatus can lift the substrate in optional operation 425, lifting the substrate support or pins on which the substrate can sit. This can be done, for example, by vertically translating the transfer apparatus. In some embodiments, the substrate support can be retracted away from the substrate to complete the transfer.

[0046] After the transfer to the transfer apparatus is completed, the substrate may be rotated between the substrate supports for further processing in a different chamber or to deliver the substrate to a substrate support accessible by a transfer robot, such as the second robot arm 110 as described above. Translation of one or more substrates may occur in operation 430 and as shown in FIG. 5C. Although the figure shows a counterclockwise rotation, it should be understood that in an embodiment, the substrate may be rotated in either direction about the central axis. Rotational translation of the substrate may be performed by co-rotating the first arm 533 and the second arm 537 at a common speed to maintain the engagement of the substrate 501. As shown, the co-rotation may occur along a second direction about the central axis. As a result, the direction of rotation of the first shaft may be reversed and the rotation of the second shaft may continue in the same direction as used for engagement. Of course, if the translation of the substrate proceeds along the first direction, the direction of rotation of the shafts will also be reversed.

[0047] As mentioned above, a substrate processing system according to an embodiment of the present technology can have a monitoring and alignment system including an alignment hub 540 disposed between each pair of substrate supports. An additional access port 542 can allow a camera or laser to impinge on the substrate to identify misalignment, which can be based on a notch or other identifier on the substrate. In some embodiments, an optional alignment operation can be performed on each substrate in optional operation 435. In some embodiments, the transfer apparatus can release the substrate onto the aligner when the substrate is translated on the alignment device, as shown in FIG. 5D. Depending on the number of substrates being transferred, one or more aligners may protrude into the transfer region to receive the substrate. An alignment adjustment can be performed and the transfer apparatus can re-engage the substrate.

[0048] Also shown in FIG. 5D can be an embodiment of a transfer region to accommodate rotation of the substrate through the chamber. As shown, during rotation, the substrate can pass through a zenith position between adjacent substrate supports. The transfer region 505 can be linear, while the rotation path can be elliptical or circular, as shown. In some embodiments, the transfer region 505 can be large enough to extend beyond the rotation path. However, in some embodiments, the transfer region 505 can include adjustments along the path where recesses 550 can be formed in the transfer region walls to limit or prevent impacts between the moving substrate 501 and the walls of the transfer region. In some embodiments, such recesses 550 can be formed in each wall of the transfer region.

[0049] As shown in FIG. 5E, the transfer apparatus can continue to rotate the substrate toward the substrate support to which the substrate 501 is delivered. It should be understood that while movement to an adjacent substrate support in a counterclockwise direction is shown, delivery to other substrate supports in either rotational direction can be performed as well. In operation 440, the substrate 501 can be delivered to the second substrate support 510b, as shown in FIG. 5F. Once delivered, the transfer apparatus can decouple the substrate from the transfer apparatus. Again, the substrate can be lowered along with the transfer apparatus and / or the substrate support, or lift pins of the substrate support can engage the substrate to receive it from the transfer apparatus.

[0050] Releasing may also include rotating the first and second shafts in a direction opposite to the original movement for engagement. For example, as shown in FIG. 5G, the first shaft may be rotated in a second direction while the second shaft may be rotated in a first direction to separate the first arm 533 of the first end effector and the second arm 537 of the second end effector from each other away from the substrate. As shown in FIG. 5H, the arms may be rotated into a recessed configuration to avoid interaction with the substrate support during further processing. Additionally, such a position, if included, may align the arms of the first and second end effectors over the alignment hub 540, which may provide protection for the alignment hub against particle accumulation, for example.

[0051] As previously discussed, the transfer apparatus may include passive or active engagement of the substrate with different end piece configurations. Figures 6A-6B show schematic diagrams of substrate seating according to some embodiments of the present technology. These figures may include any aspect of the system or transfer apparatus described above and may show additional aspects of the components described above. While these figures may show examples of both passive and active engagement, it should be understood that any number of variations may be used and are also encompassed by the present technology.

[0052] FIG. 6A shows an end elevation view, such as the distal end, of the transfer device 600. This view may include the distal end of the first arm 633 of the first end effector 630, as well as the distal end of the second arm 637 of the second end effector 635. As previously described, the first end effector 630 and the second end effector 635 may be vertically offset from one another along a central hub. Although the first end effector 630 is shown above the second end effector 635, it should be understood that the components may be reversed. The first end piece 640 may be coupled to the first arm 633 of the first end effector 630, and the second end piece 642 may be coupled to the second arm 637 of the second end effector 635, as previously described. FIG. 6A may show passive engagement of the substrate 601, where a support surface is provided, upon which the substrate may be seated. Each of the first end piece 640 and the second end piece 642 can define a recessed ledge including a shelf portion that extends toward the associated end piece for substrate support. The first end piece 640 can define a shelf 641 that extends toward the associated second end piece 642, and the second end piece 642 can define a shelf 643 that extends toward the associated first end piece 640. Together, the shelves can create a wafer support surface around two outer or radial edges of the substrate 601.

[0053] In some embodiments, the first end piece and the second end piece can be similar components, but in some embodiments, the two components can be modified to account for the vertical offset of the end effectors. For example, despite the vertical offset of the end effectors, the first end piece and the second end piece can extend vertically through the central axis of the central hub in a similar horizontal plane. Thus, the first end piece and the second end piece can compensate for the vertical offset to maintain or generate a substantially planar surface for substrate support. Thus, the first end piece 640 can extend vertically further than the second end piece 642 to account for the offset. Thus, this adjustment can cause the shelves 641 and 643 to be substantially aligned along the horizontal plane.

[0054] FIG. 6B may show active engagement, which may facilitate faster translation since the substrate may not be subject to motion with active engagement. This figure may show a transfer apparatus 650 for supporting a substrate 651. The components of the apparatus may include a distal end of a first arm 663 of a first end effector 660, as well as a distal end of a second arm 667 of a second end effector 665. Again, as previously described, the first end effector 660 and the second end effector 665 may be vertically offset from one another along a central hub, and while the first end effector 660 is shown above the second end effector 665, it should be understood that the components may be reversed. A first end piece 670 may mate with the first arm 663 of the first end effector 660, and a second end piece 672 may mate with the second arm 667 of the second end effector 665, as previously described.

[0055] Unlike the end pieces of FIG. 6A, the first end piece 670 and the second end piece 672 may be configured to contact an edge region of the substrate 651. The second end piece 672 may be configured to receive the substrate against a surface of the end piece and may include a material configured to support contact between the substrate and the end piece within the transfer region environmental conditions. The first end piece 670 may be configured to apply a force against the substrate 651 to mechanically, electrically, or otherwise seat the substrate against the second end piece. For example, the first end piece 670 may include a spring-loaded or similar physical coupling plunger that may mechanically or otherwise press the substrate against the second end piece and may include rollers 674 or other components for direct contact with the substrate. Additionally, the force-generating end piece may provide electrical coupling, such as by electrostatically engaging the substrate along components 674, which may be conductive or otherwise facilitate coupling. In such a configuration, a first end effector may be coupled to the inner shaft or first shaft such that electrical leads may be delivered through the first shaft of the central hub and output to the first end piece 670 of each first arm without affecting other components of the central hub. Any number of other mechanical or attractive forces may be applied to releasably engage the substrate during transfer within the substrate processing system.

[0056] The present technology includes a substrate processing system that can accommodate additional substrate supports that may not otherwise be accessible by a centrally located transfer robot as described above. By incorporating a transfer apparatus according to an embodiment of the present technology, multiple substrate supports can be utilized and accessed during substrate processing. When the transfer apparatus includes a first end effector and a second end effector as described throughout the present technology, the motions of engaging, transferring, and releasing the substrate can all be performed along the outer edge of the substrate, which may facilitate avoidance of lift pins along the interior of the substrate support. The system can also provide increased transfer speeds by maintaining an outer contact and recessed position of the arms of the end effectors relative to the substrate.

[0057] In the above description, for purposes of explanation, numerous details are presented in order to facilitate an understanding of various embodiments of the present technology. However, it will be apparent to one of ordinary skill in the art that certain embodiments may be practiced without some of these details or with additional details.

[0058] Although several embodiments have been disclosed, those skilled in the art will recognize that various modifications, alternative structures, and equivalents can be used without departing from the spirit of the embodiments. Additionally, some well-known processes and elements have not been described to avoid unnecessarily obscuring the present technology. Thus, the above description should not be considered as limiting the scope of the present technology. Additionally, while a method or process may be described sequentially or stepwise, it should be understood that operations may be performed simultaneously or in a different order than described.

[0059] Where a range of values ​​is provided, it is to be understood that each intervening value between the upper and lower limits of that range is specifically disclosed to the smallest unit of the lower limit, unless the context clearly indicates otherwise. Any narrower ranges between any stated or unstated intervening value in a stated range, as well as any other stated or intervening value in that stated range, are also encompassed. The upper and lower limits of these smaller ranges may be individually included or excluded from the range, and each range in which either, neither or both limits are included in the smaller ranges is also encompassed within the scope of the technology, subject to any specifically excluded limits in the stated range. Where one or both limits are included in a stated range, ranges excluding either or both of those inclusive limits are also included.

[0060]

[0066] As used in the specification and claims, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to a "substrate" includes a plurality of such substrates, reference to an "arm" includes a reference to one or more arms and equivalents thereof known to those skilled in the art, and so forth.

[0061] Additionally, the terms "comprise(s)", "comprising", "contain(s)", "containing", "include(s)", and "including", when used in this specification and claims, are intended to specify the presence of stated features, integers, components, or steps, but do not exclude the presence or addition of one or more other features, integers, components, steps, operations, or groups.

Claims

1. 1. A substrate processing system comprising: a transfer region housing defining a transfer region, a sidewall of the transfer region housing defining a sealable access for providing and receiving the substrate; a plurality of substrate supports disposed within the transfer region; 13. A transfer device comprising: a central hub including a first shaft and a second shaft extending around and concentric with the first shaft, the second shaft being counter-rotatable with respect to the first shaft; a first end effector including a plurality of first arms coupled to the first shaft, the first end effector having a number of first arms equal to a number of the substrate supports of the plurality of substrate supports; and a transfer device including a second end effector coupled to the second shaft and including a plurality of second arms having a number of second arms equal to the number of first arms of the first end effector; A substrate processing system comprising:

2. The substrate processing system of claim 1 , wherein the second end effector is vertically offset from the first end effector along the central hub.

3. 3. The substrate processing system of claim 2, wherein the first end effector further comprises a plurality of first end pieces, each first end piece being coupled to a respective first arm of the plurality of first arms, and the second end effector further comprises a plurality of second end pieces, each second end piece being coupled to a respective second arm of the plurality of second arms.

4. 4. The substrate system of claim 3, wherein each first end piece and each second end piece extends perpendicular to a similar plane that extends perpendicular to the central hub, and each first end piece and each second end piece defines a recessed ledge or shelf.

5. The substrate processing system of claim 3 , wherein each first end piece and each second end piece is characterized by an arcuate exterior profile.

6. The substrate processing system of claim 3 , wherein each first end piece includes a force generating plunger configured to releasably engage the substrate against a corresponding second end piece.

7. The substrate processing system of claim 1 , wherein the central hub is vertically translatable along a central axis of the central hub.

8. 1. A method of transferring a substrate, comprising: Receiving the substrate on a first substrate support in a transfer region of a substrate processing system, the substrate processing system comprising: a central hub including a first shaft and a second shaft extending around and concentric with said first shaft; a first end effector coupled to the first shaft and including a plurality of first arms; and a second end effector coupled to the second shaft and including a plurality of second arms; the receiving includes a transfer device including: rotating the first shaft in a first direction about a central axis of the central hub; rotating the second shaft in a second direction about a central axis of the central hub; engaging a first arm of the plurality of first arms and a second arm of the plurality of second arms with the substrate; co-rotating the first arm and the second arm about the central axis to reposition the substrate; delivering the substrate to a second substrate support of the substrate processing system; A method for transferring a substrate comprising:

9. 9. The method of claim 8, further comprising: decoupling the substrate from the transfer apparatus by rotating the first shaft in the second direction about the central axis and rotating the second shaft in the first direction about the central axis.

10. 9. The method of claim 8, further comprising subsequently lifting the substrate from the first substrate support by engaging the substrate and vertically translating the transfer apparatus within the transfer region.

11. The method of claim 8 further comprising subsequently engaging and retracting the first substrate support from the substrate.

12. 9. The method of claim 8, wherein the first end effector includes a plurality of first end pieces, each first end piece coupled to a respective first arm of the plurality of first arms, and the second end effector includes a plurality of second end pieces, each second end piece coupled to a respective second arm of the plurality of second arms, each first end piece and each second end piece defining a recessed ledge and shelf, and engaging the substrate includes extending the shelf of the first end piece of the first arm and the shelf of the second end piece of the second arm below an outer edge of the substrate.

13. 9. The method of transferring a substrate of claim 8, further comprising delivering the substrate to an alignment hub disposed between the first substrate support and the second substrate support prior to delivering the substrate to the second substrate support.

14. 1. A substrate processing system, comprising: a transfer region housing defining a transfer region, a sidewall of the transfer region housing defining a sealable access for providing and receiving the substrate; a plurality of substrate supports disposed within the transfer region; 13. A transfer device comprising: a central hub including a first shaft and a second shaft extending around and concentric with the first shaft, the second shaft being rotatable independently of the first shaft and vertically translatable along a central axis of the central hub; a first end effector coupled to the first shaft and including a plurality of first arms extending radially outward from the central hub to a distal end of each of the plurality of first arms, each of the first arms being characterized by an arcuate shape extending along a first arc path to the distal end of each of the first arms; and a second end effector coupled to the second shaft and including a plurality of second arms extending radially outward from the central hub to a distal end of each of the plurality of second arms, each of the second arms being characterized by an arcuate shape extending to the distal end of each of the second arms along a second arc path, the second arc path being the first arc path mirrored about a transverse axis extending from the central hub perpendicular to a central axis of the central hub. A substrate processing system comprising a transfer apparatus comprising:

15. 15. The substrate processing system of claim 14, wherein the first end effector further comprises a plurality of first end pieces, each first end piece being coupled to a respective first arm of the plurality of first arms, and the second end effector further comprises a plurality of second end pieces, each second end piece being coupled to a respective second arm of the plurality of second arms.

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