Robot, system, control method, and program

Abstract

To provide a robot that can be arranged in a narrower area and in which a front-opening unified pod (FOUP) lid opening / closing mechanism and an arm and a base, or arms do not interfere with each other during operation, a system, and a control method.SOLUTION: In a transport system, a robot 100 includes a first movable portion 120, a second movable portion 130 having a third arm 134 and a hand 136, an information storage unit for storing cooperative operation related information, a cooperative operation selection unit for selecting, based on the position of an access target to be accessed by the hand and the cooperative operation related information stored in the information storage unit, whether the hand is caused to access an access target by a cooperative operation of the third arm and the hand, or the hand is caused to access the access target by a cooperative operation of the third arm, the hand and the first movable portion, and a control unit for controlling the first movable portion and the second movable portion such that the hand accesses the access target in a state where the hand is set in parallel to a horizontal plane by the cooperative operation of the robot selected by the cooperative operation selection unit.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a robot, a system, a control method, and a program. [Background technology]

[0002] Patent Document 1 describes a transport system, a robot, and a method for controlling the robot that can perform efficient transport without increasing costs. [Prior art document] [Patent documents] [Patent Document 1] Patent No. 6492271 Summary of the Invention

[0003] According to one embodiment of the present invention, there is provided a robot disposed in a housing having a front wall having a plurality of openings for accessing a cassette storing wafers, and a rear wall facing the front wall and having an opening. The robot may include a first base. The robot may include a first movable part having a first arm, the base end of which is connected to the first base so as to be rotatable in a vertical plane about a first rotation axis, and a second arm, the base end of which is connected to a tip end of the first arm so as to be rotatable in a vertical plane about a second rotation axis. The robot may include a second base, the base end of which is connected to the tip end of the second arm so as to be rotatable in a vertical plane about a third rotation axis, a third arm, the base end of which is connected to the tip end of the second base so as to be rotatable in a fourth rotation axis, and a hand, the base end of which is connected to the tip end of the third arm so as to be rotatable in a fifth rotation axis and which holds the wafer. The robot may include an information storage unit that stores cooperative action related information in which each position of the plurality of openings in the front wall and each position of the opening in the rear wall are associated with a type of cooperative action of the robot when the hand accesses each position of the plurality of openings in the front wall and each position of the opening in the rear wall. The robot may include a cooperative action selection unit that selects whether to cause the hand to access the access target by a cooperative action of the third arm and the hand, or to cause the hand to access the access target by a cooperative action of the third arm, the hand, and the first movable unit, based on a position of an access target of the access by the hand and the cooperative action related information stored in the information storage unit. The robot may include a control unit that controls the first movable unit and the second movable unit so that the hand accesses the access target in a state parallel to a horizontal plane by the cooperative action of the robot selected by the cooperative action selection unit.

[0004] In the robot, when causing the hand to access each of the multiple openings in the front wall, the cooperative operation selection unit may select causing the hand to access the access target through cooperative operation of the third arm and the hand.

[0005] In any of the robots described above, when causing the hand to access the opening in the rear wall, the cooperative operation selection unit may select causing the hand to access the target through cooperative operation of the third arm, the hand, and the first movable part.

[0006] In any of the robots described above, the control unit may control the first movable unit and the second movable unit to allow the hand to access the access target while maintaining a state in which a first angle between a vector parallel to a line that passes through the fourth rotation axis and the fifth rotation axis and is perpendicular to the fourth rotation axis and the fifth rotation axis, and a vector parallel to a center line of the hand that is perpendicular to the fifth rotation axis and passes through the fifth rotation axis, satisfies a predetermined first angle condition.

[0007] Any of the robots may further include a condition storage unit that stores the first angle conditions including a first candidate condition that the first angle is included in a first angle range and a second candidate condition that the first angle is included in a second angle range, and a condition selection unit that selects the first angle condition for an access process that allows the hand to access the access target from the first candidate conditions and the second candidate conditions based on a position of the access target, and the control unit may control the first movable unit and the second movable unit so as to allow the hand to access the access target while maintaining a state that satisfies the first angle condition selected by the condition selection unit.

[0008] In any of the robots, the condition selection unit may select the first candidate condition as the first angle condition for the access processing when the access target is located on a side wall side of the housing and is accessible by the hand only when the first angle is included in the first angle range.

[0009] In any of the robots, the condition selection unit may select the first candidate condition as the first angle condition for the access process when the access target is a PA (Pre-Aligner).

[0010] In any of the robots, the condition selection unit may, when selecting the first candidate condition as the first angle condition of a first access process, select the first candidate condition as the first angle condition of the second access process if the hand is able to access the access target of a second access process that is the next access process after the first access process when the first angle is included in the first angle range, and may select the second candidate condition as the first angle condition of the second access process if the hand is unable to access the access target of the second access process when the first angle is included in the first angle range.

[0011] In any of the robots, the control unit may control the first movable unit and the second movable unit to change the first angle from the first angle range to the second angle range when the condition selection unit selects the second candidate condition as the first angle condition for the second access process.

[0012] In any of the robots, the condition selection unit may select the first candidate condition as the first angle condition for the third access process when the hand is capable of accessing an access target of a third access process, which is the next access process after the second access process, with the first angle included in the first angle range.

[0013] In any of the robots, the condition selection unit may select the second candidate condition as the first angle condition for the third access process when the hand is capable of accessing an access target of a third access process, which is the next access process after the second access process, with the first angle included in the second angle range.

[0014] In any of the robots described above, the first angle range may be angles from 0° to 180°, and the second angle range may be angles from -180° to 0°.

[0015] In any of the robots, the control unit may control the first movable unit and the second movable unit to cause the hand to access the access target while maintaining a state in which a second angle between a vector parallel to the direction in which the wafer is transported and a vector perpendicular to the fifth rotation axis and parallel to a center line of the hand passing through the fifth rotation axis within an operating area defined in a space between the front wall and the rear wall so as not to overlap with an opening / closing area for opening and closing the cassette by cassette openers provided at positions corresponding to each of the multiple openings in the front wall, further satisfies a predetermined second angle condition.

[0016] Any of the robots may further include a condition storage unit that stores the second angle conditions including a third candidate condition that the second angle is included in a third angle range and a fourth candidate condition that the second angle is included in a fourth angle range, and a condition selection unit that selects the second angle condition for an access process that allows the hand to access the access target from the third candidate condition and the fourth candidate condition based on a position of the access target, and the control unit may control the first movable unit and the second movable unit so as to allow the hand to access the access target while maintaining a state that satisfies the second angle condition selected by the condition selection unit.

[0017] In any of the robots described above, the third angle range may correspond to a state in which the tip side of the hand is located to the right of the base end side of the hand, and the fourth angle range may correspond to a state in which the tip side of the hand is located to the left of the base end side of the hand.

[0018] According to one embodiment of the present invention, there is provided a system. The system may include any one of the robots described above. The system may include the housing.

[0019] According to one embodiment of the present invention, there is provided a robot disposed in a housing having a front wall having a plurality of openings for accessing a cassette storing wafers, and a rear wall facing the front wall and having an opening, the robot including a first movable section having a first base, a first arm having a base end connected to the first base so as to be rotatable in a vertical plane about a first rotation axis, and a second arm having a base end connected to a tip end of the first arm so as to be rotatable in the vertical plane about a second rotation axis, a second base having a base end connected to a tip end of the second arm so as to be rotatable in the vertical plane about a third rotation axis, and a second movable section having a second base and a second arm having a base end connected to a tip end of the second arm so as to be rotatable in the vertical plane about a third rotation axis. a second movable section having a third arm, a base end side of which is rotatably connected to a tip side of the third arm about a fourth rotation axis, a hand, the base end side of which is rotatably connected to the tip side of the third arm about a fifth rotation axis and which holds the wafer, and an information storage section that stores cooperative action related information in which each position of the plurality of openings in the front wall and each position of the opening in the rear wall are associated with a type of cooperative action of the robot when the hand accesses each position of the plurality of openings in the front wall and each position of the opening in the rear wall. The control method may include a cooperative action selection step of selecting whether to cause the hand to access the access target by a cooperative action of the third arm and the hand, or to cause the hand to access the access target by a cooperative action of the third arm, the hand, and the first movable section, based on a position of an access target of the access by the hand and the cooperative action related information stored in the information storage section. The control method may include a control step of controlling the first movable part and the second movable part so that the cooperative action of the robot selected in the cooperative action selection step causes the hand to access the access target while the hand is parallel to a horizontal plane.

[0020] According to one embodiment of the present invention, there is provided a program for causing a computer to execute the control method.

[0021] The above summary of the invention does not list all of the necessary features of the present invention. Also, subcombinations of these features may also be inventions. [Brief description of the drawings]

[0022] [Figure 1] FIG. 1 is a perspective view illustrating an example of a robot 100. [Diagram 2] FIG. 1 is a side view that illustrates a schematic diagram of an example of a robot 100. [Diagram 3] An example of the bottom portion 116 is shown diagrammatically. [Figure 4] FIG. 1 is a perspective view showing an example of a robot 100 with its robot arm extended. [Diagram 5] FIG. 1 is a top view that illustrates a schematic diagram of an example of a robot 100 with a robot arm extended. [Figure 6] FIG. 1 is a front view illustrating an example of a robot 100. [Figure 7] 13 is an explanatory diagram for explaining the range of motion of a first arm 122. FIG. [Figure 8] 13 is an explanatory diagram for explaining the range of motion of a second arm 124. FIG. [Figure 9] 11 is an explanatory diagram for explaining the movable range of the second base 132. FIG. [Figure 10] An example of a hand 136 is shown diagrammatically. [Figure 11] 13 is an explanatory diagram for explaining the range of motion of a hand 136. FIG. [Figure 12] FIG. 2 is a perspective view illustrating another example of the robot 100. [Figure 13] An example of a system 10 is shown diagrammatically. [Figure 14] 13 is an explanatory diagram for explaining an example of a cooperative operation of the third arm 134 and the hand 136. FIG. [Figure 15] 13 is an explanatory diagram for explaining an example of a coordinated operation of the third arm 134, the hand 136, and the first movable part 120. FIG. [Figure 16]An example of the second movable part 130 is shown generally in a state where the hand 136 holds the wafer 50 within the operating area 250. [Figure 17] Another example of the second movable part 130 in a state where the hand 136 holds the wafer 50 within the operating area 250 is shown roughly. [Figure 18] 10 is an explanatory diagram for explaining an example of the operating range of a third rotation shaft 105. FIG. [Figure 19] 13 is an explanatory diagram for explaining another example of the operating range of the third rotation shaft 105. FIG. [Figure 20] 13 is an explanatory diagram for explaining an example of a maximum operating range of the third rotation axis 105 and an example of a maximum accessible area of ​​the hand 136. FIG. [Figure 21] 11 is an explanatory diagram for explaining an example of the relationship between a maximum accessible area of ​​the hand 136 and an access target. FIG. [Figure 22] 2 is an explanatory diagram for explaining an example of the operation of the robot 100 placed in the housing 200. FIG. [Figure 23] 10 is an explanatory diagram for explaining another example of the operation of the robot 100 placed in the housing 200. FIG. [Figure 24] 10 is an explanatory diagram for explaining another example of the operation of the robot 100 placed in the housing 200. FIG. [Diagram 25] 2 illustrates an example of a functional configuration of the robot 100. [Figure 26] FIG. 2 is an explanatory diagram for explaining an example of a processing flow of the robot 100. [Figure 27] An example of the hardware configuration of a computer 1200 that functions as the robot 100 is shown in schematic form. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0023] The present invention will be described below through embodiments of the invention, but the following embodiments do not limit the invention according to the claims. In addition, not all of the combinations of features described in the embodiments are necessarily essential to the solution of the invention.

[0024] In addition, in the embodiments described below, expressions such as "parallel," "vertical," and "horizontal" may be used, but these conditions do not need to be strictly met. In other words, each of the above expressions allows for deviations in manufacturing accuracy, installation accuracy, processing accuracy, detection accuracy, and the like.

[0025] In addition, in the embodiments described below, the expression of a "vector" may be used. The expression of a "vector" is not a mathematical expression that defines the magnitude and the direction, but an expression that defines only the direction.

[0026] Fig. 1 is a perspective view that shows a schematic example of a robot 100. The robot 100 is used to move an object to be moved. The object to be moved is, for example, a wafer, a liquid crystal substrate, or the like. Fig. 1 shows an example in which the object to be moved is a wafer 50.

[0027] The robot 100 may be located in an enclosure related to semiconductor manufacturing, which includes processes such as etching, ashing, exposure, and inspection.

[0028] The housing may be, for example, a so-called Equipment Front End Module (EFEM). The housing may be a sorter. The sorter is a housing for sorting the wafers 50.

[0029] The robot 100 may include a first base 110, a first movable part 120, and a second movable part 130. The robot 100 may further include a control unit 152 that controls the operation of the robot 100. FIG. 1 illustrates an example in which the control unit 152 is attached externally to the robot 100. However, the control unit 152 may be housed inside the first base 110 or fixed to the first base 110, for example. The first movable part 120 and the second movable part 130 may be collectively referred to as a robot arm.

[0030] The first base 110 may have a first side portion 112 and a second side portion 114 opposing the first side portion 112. The first base 110 may further have a bottom portion .

[0031] The first side portion 112 may include an inner surface 1121 and an outer surface. The first side portion 112 supports, for example, the first movable portion 120. The first side portion 112 supports the first movable portion 120 by being coupled to a first arm 122, for example.

[0032] The first base 110 supports the first movable part 120 only at the first side surface portion 112. The first base 110 may support the first movable part 120 at both the first side surface portion 112 and the second side surface portion 114.

[0033] The first side surface portion 112 has, for example, a cavity 113. This makes it possible to reduce the weight of the robot.

[0034] The second side surface portion 114 may include an inner surface, an outer surface 1143, a first side surface, and a second side surface 1147. For example, a connector portion 1148 is provided on the second side surface 1147. By providing the connector portion 1148 on the side surface of the second side surface portion 114, cables and the like do not protrude outward from the outer surface 1143. This makes it possible to realize a robot that can be placed in a narrower area. Note that the "width" here refers to the length in the y-axis direction shown in FIG. 1. Therefore, the "narrower area" refers to an area that is short in the y-axis direction shown in FIG. 1.

[0035] The second side surface portion 114 further includes a hollow portion capable of accommodating, for example, a cable. This allows the cable to be accommodated in the hollow portion, thereby achieving a robot that can be placed in a smaller space.

[0036] The first side surface portion 112 and the bottom surface portion 116 may be integral. The second side surface portion 114 and the bottom surface portion 116 may be integral. The first side surface portion 112, the second side surface portion 114, and the bottom surface portion 116 may be integral.

[0037] The first base 110 is disposed, for example, detachably on a placement surface. The first base 110 is disposed, for example, detachably on a bottom of a housing in which the robot 100 is disposed. The first base 110 is disposed, for example, detachably on the bottom of the housing by being fixed to a fixing portion such as a frame that the bottom of the housing has. This makes it possible to realize a robot that is easy to place, perform maintenance, and the like.

[0038] The first movable part 120 may have a first arm 122 and a second arm 124. The first movable part 120 may be movable in a vertical plane. Fig. 1 illustrates an example in which the first movable part 120 is movable in the xz plane.

[0039] The base end side of the first arm 122 may be connected to the first base 110 so as to be rotatable in a vertical plane around the first rotation shaft 101. The first arm 122 includes, for example, a link portion and a connecting portion. The first arm 122 includes, for example, connecting portions on both the base end side and the tip end side. The connecting portion on the base end side may correspond to the first rotation shaft 101, and the connecting portion on the tip end side may correspond to the second rotation shaft 103.

[0040] The base end side of the second arm 124 may be connected to the tip side of the first arm 122 so as to be rotatable in a vertical plane around the second rotation shaft 103. The second arm 124 includes, for example, a link portion and a connecting portion. The second arm 124 includes, for example, connecting portions on both the base end side and the tip side. The connecting portion on the base end side may correspond to the second rotation shaft 103, and the connecting portion on the tip side may correspond to the third rotation shaft 105.

[0041] The second movable part 130 may have a second base 132, a third arm 134, and a hand 136. Fig. 1 illustrates an example in which the robot 100 is equipped with one hand 136. The number of hands 136 equipped to the robot 100 is not limited to one, and may be two or more.

[0042] The second base 132 may be movable in a vertical plane. For example, the base end side of the second base 132 is connected to the tip side of the second arm 124 so as to be rotatable in a vertical plane about the third rotation shaft 105. FIG 1 illustrates an example in which the second base 132 is rotatable in the xz plane.

[0043] The third arm 134 may be movable within a plane perpendicular to the fourth rotation axis 107. Fig. 1 illustrates an example in which the fourth rotation axis 107 is parallel to the z-axis and the third arm 134 is movable within an xy plane perpendicular to the fourth rotation axis 107.

[0044] The third arm 134 is, for example, connected at its base end side to its tip end side of the second base 132 so as to be rotatable around the fourth rotation shaft 107. The third arm 134 includes, for example, a link portion and a connecting portion. The third arm 134 includes, for example, connecting portions on both the base end side and the tip end side. The connecting portion on the base end side may correspond to the fourth rotation shaft 107, and the connecting portion on the tip end side may correspond to the fifth rotation shaft 109.

[0045] The hand 136 holds an object to be moved, such as the wafer 50. The hand 136 may hold the object to be moved in any manner.

[0046] The hand 136 holds the target by, for example, vacuum-adhering the back surface of the target. The hand 136 holds the target by, for example, frictional force generated between the hand 136 and the target. In this case, in order to increase the frictional force, a material with a high friction coefficient such as rubber may be used on the contact surface of the hand 136 that comes into contact with the target. The hand 136 holds the target by, for example, gripping the target. The hand 136 grips the target by, for example, physically clamping the periphery of the target. The hand 136 may hold the target without contact. The hand 136 holds the target without contact by, for example, using the Bernoulli effect, in which the pressure around the fluid such as gas or liquid decreases when the fluid is forcefully ejected. In this case, the hand 136 is a Bernoulli chuck.

[0047] The hand 136 may be movable within a plane perpendicular to the fifth rotation axis 109. For example, the base end side of the hand 136 is connected to the tip side of the third arm 134 so as to be rotatable around the fifth rotation axis 109. FIG. 1 illustrates an example in which the fifth rotation axis 109 is parallel to the z-axis, and the hand 136 is rotatable within an xy plane perpendicular to the fifth rotation axis 109.

[0048] The first rotation axis 101, the second rotation axis 103, and the third rotation axis 105 may be parallel to each other. The fourth rotation axis 107 may be perpendicular to the third rotation axis 105. The fourth rotation axis 107 and the fifth rotation axis 109 may be parallel to each other. In the example shown in Figure 1, the first rotation axis 101, the second rotation axis 103, and the third rotation axis 105 are parallel to the y-axis, and the fourth rotation axis 107 and the fifth rotation axis 109 are parallel to the z-axis.

[0049] The shape of the projection of the first base 110 onto a vertical plane perpendicular to the first rotation axis 101 is, for example, a shape in which the width of the support side supporting the first movable part 120 is narrower than the width of the arrangement surface side of the first base 110. The shape of the projection of the first base 110 onto a vertical plane is, for example, a tapered shape tapered from the arrangement surface side of the first base 110 toward the side supporting the first movable part 120. The shape of the projection of the first base 110 onto a vertical plane is, for example, a trapezoid. The shape of the projection of the first side surface part 112 onto a vertical plane is, for example, a triangle. The shape of the projection of the first side surface part 112 onto a vertical plane may be a convex shape. In the example shown in FIG. 1, the shape of the projection of the first base 110 onto a vertical plane perpendicular to the first rotation axis 101 is the shape of the projection onto the xz plane.

[0050] The shape of the projection of the first side surface portion 112 perpendicular to the first rotation axis 101 onto the vertical surface is, for example, a shape in which the width of the side supporting the first movable part 120 is narrower than the width of the arrangement surface side of the first base 110. The shape of the projection of the first side surface portion 112 onto the vertical surface is, for example, a tapered shape that tapers from the arrangement surface side of the first base 110 toward the side supporting the first movable part 120. The shape of the projection of the first side surface portion 112 onto the vertical surface is, for example, a triangle. The shape of the projection of the first side surface portion 112 onto the vertical surface is, for example, a trapezoid. The shape of the projection of the first side surface portion 112 onto the vertical surface may be a convex shape.

[0051] The shape of the projection of the second side surface portion 114 perpendicular to the first rotation shaft 101 onto the vertical surface is, for example, a shape in which the width of the side where the first movable part 120 is supported is narrower than the width of the arrangement surface side of the first base 110. The shape of the projection of the second side surface portion 114 onto the vertical surface is, for example, a tapered shape that tapers from the arrangement surface side of the first base 110 toward the side where the first movable part 120 is supported. The shape of the projection of the second side surface portion 114 onto the vertical surface is, for example, a trapezoid. The shape of the projection of the second side surface portion 114 onto the vertical surface is, for example, a triangle. The shape of the projection of the second side surface portion 114 onto the vertical surface may be a convex shape.

[0052] The first base 110 has a structure in which the shape of the projection of the first base 110 onto a vertical plane has a width on the support side supporting the first movable part 120 narrower than the width on the arrangement surface side of the first base 110, so that the first base 110 can stably support the robot arm even when the robot arm rotates. Furthermore, because the width of the support side supporting the first movable part 120 is narrow in the shape of the projection of the first base 110 onto a vertical plane, interference between the third arm 134 or the hand 136 and the first base 110 can be avoided even when the robot arm is located near the first base 110. This makes it possible to realize a robot that can move a moving object over a wider range.

[0053] For example, the first arm 122 and the second arm 124 have a structure in which, when the first arm 122 and the second arm 124 rotate, the trajectory of the first arm 122 and the trajectory of the second arm 124 overlap. Note that the "structure in which two trajectories overlap" does not mean a structure in which the two trajectories always overlap, but means a structure in which the two trajectories may overlap.

[0054] For example, the width of the trajectory of the first arm 122 in a direction perpendicular to the vertical plane falls within the width of the trajectory of the second arm 124 in a direction perpendicular to the vertical plane. Fig. 1 illustrates an example of the robot 100 in which the width of the trajectory of the first arm 122 in the y-axis direction falls within the width of the trajectory of the second arm 124 in the y-axis direction.

[0055] For example, at the connecting portion between the first arm 122 and the second arm 124, the connecting portion on the base end side of the second arm 124 is connected to the connecting portion on the tip end side of the first arm 122 so that the width between the outer surfaces of the first arm 122 in the direction parallel to the second rotation shaft 103 falls within the width between the inner surfaces of the second arm 124 in the direction parallel to the second rotation shaft 103. For example, at the connecting portion between the first arm 122 and the second arm 124, the connecting portion on the base end side of the second arm 124 is connected to the connecting portion on the tip end side of the first arm 122 so as to sandwich the outer surface of the first arm 122.

[0056] By having a structure in which the trajectory of first arm 122 and the trajectory of second arm 124 overlap when first arm 122 and second arm 124 rotate, the width of the trajectory can be narrower than a robot having a structure in which the trajectories of the two arms do not overlap when the two arms rotate, thereby realizing a robot that can be placed in a narrower area.

[0057] At least one of the first arm 122 and the second arm 124 has a structure capable of avoiding interference between the first arm 122 and the second arm 124, for example, in a state in which a projection of a link portion of the first arm 122 onto a vertical plane and a projection of a link portion of the second arm 124 onto a vertical plane overlap. For example, in the connecting portion between the first arm 122 and the second arm 124, a connecting portion on the base end side of the second arm 124 is connected to a connecting portion on the tip end side of the first arm 122 so that a gap 123 exists.

[0058] By having a structure capable of avoiding interference between first arm 122 and second arm 124 in a state in which the projection of the link portion of first arm 122 onto the vertical plane and the projection of the link portion of second arm 124 onto the vertical plane overlap, it is possible to further bend first movable part 120 while avoiding the occurrence of interference between first arm 122 and second arm 124. This makes it possible to realize a robot capable of moving an object to be moved over a wider range.

[0059] The second arm 124 has a structure capable of avoiding interference between the second arm 124 and the second base 132, for example, when the second base 132 rotates. For example, at the connecting portion between the second arm 124 and the second base 132, the connecting portion on the tip side of the second arm 124 is connected to the connecting portion on the base side of the second base 132 so that the width between the outer surfaces of the second base 132 in the direction parallel to the third rotation axis 105 falls within the width between the inner surfaces of the second arm 124 in the direction parallel to the third rotation axis 105, and a gap 125 exists. For example, at the connecting portion between the second arm 124 and the second base 132, the connecting portion on the tip side of the second arm 124 is connected to the connecting portion on the base side of the second base 132 so that the outer surfaces of the second base 132 are sandwiched between the connecting portions. This makes it possible to increase the range of motion of second base 132 while avoiding interference between second arm 124 and second base 132, thereby achieving a robot capable of moving an object to be moved over a wider range.

[0060] The first movable part 120 has a structure capable of avoiding interference between the first movable part 120 and the first base 110, for example, when a projection of the link part of the first arm 122 onto the vertical plane and a projection of the link part of the second arm 124 onto the vertical plane overlap, and when a projection of the link part of the first arm 122 onto the vertical plane and a projection of the link part of the first base 110 onto the vertical plane overlap. The first movable part 120 has a structure capable of avoiding interference between the first movable part 120 and the first base 110, for example, when a projection of the link part of the first arm 122 onto the vertical plane and a projection of the link part of the second arm 124 onto the vertical plane overlap, and a projection of the link part of the first arm 122 onto the vertical plane and a projection of the link part of the first base 110 onto the vertical plane overlap. A specific structure capable of avoiding interference between the first movable part 120 and the first base 110 will be described later.

[0061] By having a structure capable of avoiding interference between the first movable part 120 and the first base 110 in a state where the projection of the link part of the first arm 122 onto the vertical plane and the projection of the link part of the second arm 124 onto the vertical plane overlap, and the projection of the link part of the first arm 122 onto the vertical plane and the projection of the link part of the first base 110 onto the vertical plane overlap, the object to be moved can be moved closer to the first base 110 while avoiding the occurrence of interference between the robot arm and the first base 110. In particular, by having a structure capable of avoiding interference between the first movable part 120 and the first base 110 in a state where the projection of the link part of the first arm 122 onto the vertical plane and the projection of the link part of the second arm 124 onto the vertical plane overlap, the object to be moved can be moved closer to the first base 110 while avoiding the occurrence of interference between the robot arm and the first base 110 with the first movable part 120 bent. This makes it possible to realize a robot capable of moving an object over a wider range.

[0062] The first movable part 120 and the second movable part 130 have a structure in which, in a state in which a projection of the link part of the first arm 122 onto a vertical plane and a projection of the first base 110 onto a vertical plane overlap, at least one of a projection of the fourth rotation shaft 107 onto a vertical plane and a projection of the fifth rotation shaft 109 onto a vertical plane does not overlap with a projection of the first base 110 onto a vertical plane. The first movable part 120 and the second movable part 130 have a structure in which, for example, a projection of the fourth rotation shaft 107 onto a vertical plane does not overlap with a projection of the first base 110 onto a vertical plane. The first movable part 120 and the second movable part 130 have a structure in which, for example, a projection of the fifth rotation shaft 109 onto a vertical plane does not overlap with a projection of the first base 110 onto a vertical plane. The first movable part 120 and the second movable part 130 have a structure in which, for example, neither the projection of the fourth rotation shaft 107 onto the vertical plane nor the projection of the fifth rotation shaft 109 onto the vertical plane overlaps with the projection of the first base 110 onto the vertical plane.

[0063] The first movable part 120 and the second movable part 130 have a structure in which, for example, when the projection of the link part of the first arm 122 onto the vertical plane and the projection of the first base 110 onto the vertical plane overlap, the height of the third rotating shaft 105 is higher than the upper end of the first base 110. The first movable part 120 and the second movable part 130 have a structure in which, for example, when the projection of the link part of the first arm 122 onto the vertical plane and the projection of the first base 110 onto the vertical plane overlap, the height of the lower end of the fourth rotating shaft 107 is higher than the upper end of the first base 110. The first movable part 120 and the second movable part 130 have a structure in which, for example, when the projection of the link part of the first arm 122 onto the vertical plane and the projection of the first base 110 onto the vertical plane overlap, the height of the lower end of the fifth rotating shaft 109 is higher than the upper end of the first base 110.

[0064] By having a structure in which at least one of the projection of the fourth rotation shaft 107 onto the vertical plane and the projection of the fifth rotation shaft 109 onto the vertical plane does not overlap with the projection onto the vertical plane of the first base 110 while the projection of the link part of the first arm 122 onto the vertical plane overlaps, it is possible to move an object to be moved near the first base 110 while avoiding interference between the third arm 134 or the hand 136 and the first base 110. This makes it possible to realize a robot capable of moving an object over a wider range.

[0065] Fig. 2 is a side view that illustrates a schematic example of the robot 100. Fig. 2 illustrates an example of the robot 100 in a state in which the first movable part 120 is positioned between the inner surface 1121 of the first side part 112 and the inner surface 1141 of the second side part 114.

[0066] The inner surface 1121 and the inner surface 1141 may be perpendicular to the first rotation axis 101. In FIG. 2, an example in which the inner surface 1121 and the inner surface 1141 are perpendicular to the y-axis parallel to the first rotation axis 101 is illustrated.

[0067] For example, the width of first movable part 120 in a direction perpendicular to the vertical plane falls within the width in a direction perpendicular to the vertical plane between inner surface 1121 and inner surface 1141. A structure in which the width of first movable part 120 in a direction perpendicular to the vertical plane falls within the width in a direction perpendicular to the vertical plane between inner surface 1121 and inner surface 1141 may be an example of a structure that can avoid interference between first movable part 120 and first base 110.

[0068] For example, the width of the first movable part 120 in a direction perpendicular to the vertical plane falls within the width of the first arm 122 in a direction perpendicular to the vertical plane between the inner surface 1121 and the inner surface 1141. For example, the width of the first movable part 120 in a direction perpendicular to the vertical plane falls within the width of the first arm 122 in a direction perpendicular to the vertical plane between the inner surface 1121 and the inner surface 1141. For example, the width of the first movable part 120 in a direction perpendicular to the vertical plane falls within the width of the second arm 124 in a direction perpendicular to the vertical plane between the inner surface 1121 and the inner surface 1141. For example, the width of the first movable part 120 in a direction perpendicular to the vertical plane falls within the width in a direction perpendicular to the vertical plane between the inner surface 1121 and the inner surface 1141 includes both the width of the first arm 122 in a direction perpendicular to the vertical plane and the width of the second arm 124 in a direction perpendicular to the vertical plane falling within the width in a direction perpendicular to the vertical plane between the inner surface 1121 and the inner surface 1141. FIG. 2 illustrates an example in which the vertical plane of the first movable part 120 is the xz plane, the vertical plane between the inner surface 1121 and the inner surface 1141 is the xz plane, and the width of the first movable part 120 in the y-axis direction falls within the width W in the y-axis direction between the inner surface 1121 and the inner surface 1141.

[0069] By fitting the width of first movable part 120 within the width between inner surface 1121 and inner surface 1141, the robot arm can pass through the space between inner surface 1121 and inner surface 1141 while avoiding interference between first movable part 120 and first base 110. This makes it possible to realize a robot with a wider range of motion for the robot arm.

[0070] The second movable part 130 has, for example, a structure capable of avoiding interference between the second movable part 130 and the first base 110. For example, the second base 132 does not protrude from the inner surface 1141 in a direction perpendicular to the vertical plane of the second movable part 130. Fig. 2 illustrates an example of the robot 100 in which the vertical plane of the second movable part 130 is the xz plane, and the left end of the second base 132 does not protrude from the inner surface 1141 in the negative direction of the y axis.

[0071] By having a structure capable of avoiding interference between the second movable part 130 and the first base 110, the robot arm can pass through the space between the inner surface 1121 and the inner surface 1141 while avoiding interference between the second movable part 130 and the first base 110. This makes it possible to realize a robot with a wider range of motion of the robot arm.

[0072] The fourth rotation axis 107 is, for example, the center line l of the width between the inner surface 1121 and the inner surface 1141. Bc The fourth rotation axis 107 is offset from the center line l Bc The fourth rotation shaft 107 is offset toward the first side surface portion 112 side from the center line l Bc 2, the line l is parallel to the fourth rotation axis 107 and passes through the fourth rotation axis 107. 4p is the center line l BC 13 shows an example of the robot 100 that is shifted by ΔD from the first side surface portion 112 side to the first side surface portion 112 side.

[0073] When the fourth rotation axis 107 is shifted toward the first side surface portion 112 from the center line of the width between the inner surface 1121 and the inner surface 1141, the length of the third arm 134 can be made longer within the range of the width in the y-axis direction between the outer surface 1123 and the outer surface 1143, for example, compared to a robot in which the fourth rotation axis is located on the center line of the width between the inner surfaces of the side surfaces, so that a robot in which the hand 136 can easily access the first side surface portion 112 side can be realized. Also, when the fourth rotation axis 107 is shifted toward the second side surface portion 114 from the center line of the width between the inner surface 1121 and the inner surface 1141, the length of the third arm 134 can be made longer within the range of the width in the y-axis direction between the outer surface 1123 and the outer surface 1143, for example, compared to a robot in which the fourth rotation axis is located on the center line of the width between the inner surfaces of the side surfaces, so that a robot in which the hand 136 can easily access the second side surface portion 114 side can be realized.

[0074] The bottom surface portion 116 includes, for example, a first protruding portion 1162 protruding from an outer surface 1123 of the first side surface portion 112, and a second protruding portion 1164 protruding from an outer surface 1143 of the second side surface portion 114. This allows the robot 100 to be carried in and out of the casing using a forklift, thereby realizing a robot that is easy to install, maintain, and perform other operations.

[0075] Fig. 3 is a schematic diagram of an example of the bottom surface portion 116. Fig. 3 is a schematic diagram of an example of the bottom surface portion 116. Note that the first movable portion 120 and the second movable portion 130 are omitted in Fig. 3.

[0076] The bottom surface portion 116 includes, for example, a central portion 1160, a first protruding portion 1162, and a second protruding portion 1164. Fig. 3 illustrates an example of the bottom surface portion 116 in which the first protruding portion 1162 protrudes in the negative direction of the y axis from a first side surface of the central portion 1160, and the second protruding portion 1164 protrudes in the positive direction of the y axis from a second side surface of the central portion 1160 facing the first side surface.

[0077] Bottom surface portion 116 has a structure capable of avoiding interference between first movable portion 120 and bottom surface portion 116, for example, when first movable portion 120 is located above bottom surface portion 116. Here, this structure will be mainly described.

[0078] The case where the first movable part 120 is located above the bottom surface part 116 includes, for example, the case where the second rotating shaft 103 is located above the bottom surface part 116. The case where the second rotating shaft 103 is located above the bottom surface part 116 includes, for example, the case where the second rotating shaft 103 is located above the bottom surface part 116 in a state where the altitude of the second rotating shaft 103 is lower than the altitude of the first rotating shaft 101.

[0079] The central portion 1160 has, for example, a hole 1166. The hole 1166, for example, penetrates the central portion 1160. In this case, the hole 1166 is a through hole. The hole 1166 may form a recess in the central portion 1160 without penetrating the central portion 1160. In this case, the hole 1166 is a blind hole.

[0080] The hole 1166 is provided in the central portion 1160 such that, for example, when the first movable portion 120 is located above the bottom surface portion 116, the first movable portion 120 is included in a space surrounded by the inner wall of the hole 1166. The hole 1166 is provided in the central portion 1160 such that, for example, when the first movable portion 120 is located above the bottom surface portion 116, the tip portion of the first arm 122 is included in a space surrounded by the inner wall of the hole 1166. The hole 1166 is provided in the central portion 1160 such that, for example, when the first movable portion 120 is located above the bottom surface portion 116, the base end portion of the second arm 124 is included in a space surrounded by the inner wall of the hole 1166. The hole 1166 is provided in the central portion 1160 so that, for example, when the first movable portion 120 is located above the bottom surface portion 116, the tip portion of the first arm 122 and the base portion of the second arm 124 are included in a space surrounded by the inner wall of the hole 1166. The hole 1166 is provided in the central portion 1160 so that, for example, when the first movable portion 120 is located above the bottom surface portion 116, the second rotating shaft 103 is included in a space surrounded by the inner wall of the hole 1166. The hole 1166 may be an example of a structure that the bottom surface portion 116 has, which can avoid interference between the first movable portion 120 and the bottom surface portion 116 when the first movable portion 120 is located above the bottom surface portion 116.

[0081] When the hole 1166 is a through hole, the shape of the central portion 1160 is, for example, an O-shape. When the hole 1166 is a through hole, the shape of the central portion 1160 is, for example, a U-shape. FIG. 3 illustrates an example of the bottom portion 116 having an O-shaped central portion 1160.

[0082] Because bottom surface portion 116 has a structure capable of avoiding interference between first movable portion 120 and bottom surface portion 116, a longer robot arm can pass through the space between inner surface 1121 and inner surface 1141 without interfering with first base 110. This makes it possible to realize a robot with a wider range of motion and capable of moving a moving object to a farther position.

[0083] 4 is a perspective view showing an example of the robot 100 with the robot arm extended. Here, matters relating to the control of the robot arm will be mainly described.

[0084] The control unit 152 controls the first movable unit 120, for example, to extend the robot arm. The control unit 152 controls the second movable unit 130, for example, to extend the robot arm. The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, to extend the robot arm.

[0085] The control unit 152 controls the first movable unit 120 by, for example, rotating the first rotating shaft 101 using a motor. The motor that rotates the first rotating shaft 101 is, for example, a servo motor. When the motor that rotates the first rotating shaft 101 is a servo motor, the first rotating shaft 101 may be rotated by combining the servo motor with a reduction mechanism such as a reducer or a belt and pulley. In this case, the control unit 152 may further control the reduction mechanism in addition to the servo motor. The motor that rotates the first rotating shaft 101 may be any other motor.

[0086] The control unit 152 controls the first movable unit 120, for example, by rotating the second rotating shaft 103 using a motor. The motor that rotates the second rotating shaft 103 is, for example, a servo motor. When the motor that rotates the second rotating shaft 103 is a servo motor, the second rotating shaft 103 may be rotated by combining the servo motor with a reduction mechanism. In this case, the control unit 152 may further control the reduction mechanism in addition to the servo motor. The motor that rotates the second rotating shaft 103 may be any other motor.

[0087] The control unit 152 controls the second movable unit 130, for example, by rotating the third rotating shaft 105 using a motor. The motor that rotates the third rotating shaft 105 is, for example, a servo motor. When the motor that rotates the third rotating shaft 105 is a servo motor, the third rotating shaft 105 may be rotated by combining the servo motor with a reduction mechanism. In this case, the control unit 152 may further control the reduction mechanism in addition to the servo motor. The motor that rotates the third rotating shaft 105 may be any other motor.

[0088] The control unit 152 controls the second movable part 130 by, for example, rotating the fourth rotating shaft 107 using a motor. The motor that rotates the fourth rotating shaft 107 is, for example, a DD (Direct Drive) motor. A DD motor is a motor such as a servo motor that directly rotates a rotating object without going through a reduction mechanism. The DD motor is, for example, an axial gap motor. The motor that rotates the fourth rotating shaft 107 may be any other motor.

[0089] The control unit 152 controls the second movable unit 130 by, for example, rotating the fifth rotating shaft 109 using a motor. The motor that rotates the fifth rotating shaft 109 is, for example, a DD motor. The motor that rotates the fifth rotating shaft 109 may be any other motor.

[0090] Unlike a case where a servo motor and a reduction mechanism are combined to rotate a rotation target, a DD motor can rotate a rotation target without using a reduction mechanism, and therefore can rotate the rotation target with low vibration. Therefore, by controlling the second movable part 130 using the DD motor, the robot 100 can realize a robot that can adjust the tip position of the hand with high precision.

[0091] Fig. 5 is a top view that shows a schematic diagram of an example of the robot 100 in a state where the robot arm is extended. Fig. 5 is a top view of the example of the robot 100 in Fig. 4. Here, matters related to the length of the robot arm will be mainly described.

[0092] l 1p is a straight line that is parallel to the first rotation axis 101 and passes through the first rotation axis 101. 2p is a straight line that is parallel to the second rotation axis 103 and passes through the second rotation axis 103. 3p is a straight line that is parallel to the third rotation axis 105 and passes through the third rotation axis 105. 5v is a straight line that is perpendicular to the fifth rotation axis 109 and passes through the fifth rotation axis 109. Ht is a straight line passing through the tip of the hand 136.

[0093] L R is the length of the robot arm. L R is, for example, the distance D between the first rotation shaft 101 and the second rotation shaft 103. 12 , the distance D between the second rotation shaft 103 and the fourth rotation shaft 107 24 , the distance D between the fourth rotation axis 107 and the fifth rotation axis 109 45 , and the length L from the fifth rotating shaft 109 to the tip of the hand 136 5t It is based on the following. D 24 is the distance D between the second rotation shaft 103 and the third rotation shaft 105 23 and the distance D between the third rotation axis 105 and the fourth rotation axis 107 34 5 illustrates an example of the robot 100 in a state where the third rotation axis 105 and the fourth rotation axis 107 are positioned on the same yz plane.

[0094] For example, D 12 is defined as the length of first arm 122. The length from the base end of first arm 122 to the tip end of first arm 122 may be defined as the length of first arm 122.

[0095] For example, D 23 is defined as the length of the second arm 124. The length from the base end of the second arm 124 to the tip end of the second arm 124 may be defined as the length of the second arm 124.

[0096] For example, D34 is defined as the length of the second base 132. The length from the base end of the second base 132 to the tip end of the second base 132 may be defined as the length of the second base 132.

[0097] For example, D 45 is defined as the length of the third arm 134. The length of the third arm 134 may be defined as the length from the base end of the third arm 134 to the tip end of the third arm 134.

[0098] For example, L 5t is defined as the length of the hand 136. The length from the base end of the hand 136 to the tip end of the hand 136 may be defined as the length of the hand 136.

[0099] Fig. 6 is a front view that shows a schematic example of the robot 100. In the example shown in Fig. 6, the third arm 134 and the hand 136 are parallel to the xy plane, which is a horizontal plane.

[0100] p B1 is a plane that is perpendicular to the arrangement surface of the first base 110 and includes the first rotation axis 101. In the example shown in FIG. 6, the arrangement surface of the first base 110 is the xy plane, and p B1 is the yz plane.

[0101] L 4t is the length from the fourth rotation shaft 107 to the tip of the hand 136. In FIG. 6, l is the length when the third arm 134 and the hand 136 are fully extended in the negative direction of the x-axis. 4p 6 shows an example of the length from the tip of the hand 136 to the tip of the hand 136. 4p is a line parallel to the z-axis.

[0102] l 23 is a straight line that passes through the second rotation axis 103 and the third rotation axis 105 and is perpendicular to the second rotation axis 103 and the third rotation axis 105. In the example shown in FIG. 23 is a line parallel to the z-axis.

[0103] In addition, in Figure 6, l 23 The yz plane containing l 4p This figure shows an example in which the yz plane including the y-axis is the same plane. 23 The yz plane containing l 4p The yz plane including the y-axis and the z-axis plane including the y-axis may be different.

[0104] L 2u is the length from the third rotating shaft 105 to the upper end of the second movable part 130. In FIG. 23 is perpendicular to the arrangement surface of the first base 110 and is parallel to the fourth rotation axis 107. 2u An example of the above is shown.

[0105] 7 is an explanatory diagram for explaining the movable range of the first arm 122. The movable range of the first arm 122 is a straight line l perpendicular to the arrangement surface of the first base 110. B1 and a straight line l that passes through the first rotation axis 101 and the second rotation axis 103 and is perpendicular to the first rotation axis 101 and the second rotation axis 103. 12 The angle θ between and a vector parallel to B1 The angle range θ B1 The angle range may be determined by the length of first arm 122, the shape of first base 110, etc. Note that the counterclockwise rotation direction is the positive rotation direction, and the clockwise rotation direction is the negative rotation direction.

[0106] The arm system of the robot 100 is, for example, θ B1 It is determined based on the angle range of θ B1 This angle range may be referred to as the arm system angle range.

[0107] The arm system angle range includes, for example, a first arm system angle range and a second arm system angle range. For example, the first arm system angle range is an angle from 0° to 220°, and the second arm system angle range is an angle from −220° to 0°. In this case, θ B1 The angle range of θ is from -220° to 220°. B1The angle range of θ may be any other angle range. B1 is included in the first arm system angle range.

[0108] FIG. 8 is an explanatory diagram for explaining the range of motion of the second arm 124. The range of motion of the second arm 124 is l 12 A vector parallel to l 23 The angle θ between and a vector parallel to 12 The angle range θ 12 The angle range may be determined by the lengths, shapes, etc. of the first arm 122 and the second arm 124.

[0109] The elbow system of the robot 100 is, for example, 12 It is determined based on the angle range of θ 12 This angle range may be referred to as the elbow angle range.

[0110] The elbow system angle range includes, for example, a first elbow system angle range and a second elbow system angle range. For example, the first elbow system angle range corresponds to a case where the first movable part 120 is extended in a positive rotation direction, and the second elbow system angle range corresponds to a case where the first movable part 120 is extended in a negative rotation direction. In FIG. 8, θ 12 is included in the first elbow system angle range.

[0111] FIG. 9 is an explanatory diagram for explaining the range of motion of the second base 132. The range of motion of the second base 132 is l 23 A vector parallel to l 4p The angle θ between and a vector parallel to 2B The angle range θ 2B The angle range may be determined by the shapes of the second arm 124 and the second base 132, etc.

[0112] The wrist system of the robot 100 is, for example, 2B It is determined based on the angle range of θ 2B This angle range may be referred to as the wrist system angle range.

[0113] The wrist system angle range includes, for example, a first wrist system angle range and a second wrist system angle range. For example, the first wrist system angle range is 23 The direction of the vector parallel to l 4p This corresponds to a case where the second base 132 is rotated in a more positive rotation direction than the state in which the direction of the vector parallel to the axis coincides with the axis of the second wrist system. 23 The direction of the vector parallel to l 4p This corresponds to a case where the second base 132 is rotated in a negative rotation direction compared to a state in which the direction of the vector parallel to θ coincides with the direction of the vector parallel to θ. 2B is included in the second wrist system angle range.

[0114] Fig. 10 is a top view that diagrammatically illustrates an example of the hand 136. Fig. 10 is a top view that diagrammatically illustrates an example of the hand 136.

[0115] l Hc is a center line of the hand 136 that is perpendicular to the fifth rotation axis 109 and passes through the fifth rotation axis 109. Hc is the center point c of the wafer 50 w In the figure, an example is shown in which the hand 136 holds the wafer 50 so that the wafer 50 passes through the first rotation axis 101. The reach of the robot arm is determined by the distance from the first rotation axis 101 to the center point c of the wafer 50. w The length of the

[0116] L 5w is the length from the fifth rotation shaft 109 to the tip of the wafer 50 when the hand 136 is holding the wafer 50. For example, L 5w , L 5t Longer. L 5w , L 5t It may be shorter. 5w and L 5t The magnitude relationship between may be determined according to the way in which the hand 136 holds the wafer 50 and the shape of the hand 136. 5w L 5t An example of a longer case is shown.

[0117] 11 is an explanatory diagram for explaining the movable range of the hand 136. The movable range of the hand 136 is defined by a straight line l that passes through the fourth rotation axis 107 and the fifth rotation axis 109 and is perpendicular to the fourth rotation axis 107 and the fifth rotation axis 109. 45 A vector parallel to l Hc The angle θ between and a vector parallel to 3H The angle range may be determined based on the angle range.

[0118] The hand system of the robot 100 is, for example, θ 3H It is determined based on the angle range of θ 3H This angle range may be referred to as the hand system angle range.

[0119] The hand-based angle range includes a first hand-based angle range and a second hand-based angle range. For example, θ 3H When the tip of the hand 136 is within the first hand angle range, 45 Located to the right of θ 3H When the tip of the hand 136 is l 45 For example, the first hand angle range is l 45 The direction of the vector parallel to l Hc This corresponds to a case where the hand 136 is rotated in a more positive direction than the state in which the direction of the vector parallel to the direction of the hand 136 coincides with the direction of the vector parallel to the direction of the hand 136, and the second hand system angle range is l 45 The direction of the vector parallel to l Hc This corresponds to a case where the hand 136 is rotated in a more negative direction than the state in which the direction of the vector parallel to θ coincides with the direction of the vector parallel to θ. For example, the first hand-based angle range is an angle from 0° to 180°, and the second hand-based angle range is an angle from -180° to 0°. In this case, θ 3H The angle range of θ is from -180° to 180°. 3H The angle range of θ may be any other angle range. 3H is included in the first hand system angle range.

[0120] 12 is a perspective view showing a schematic diagram of another example of the robot 100. Here, differences from the robot 100 in FIG. 1 will be mainly described.

[0121] The robot 100 may include a first movable part 140. The first movable part 140 may have a first arm 142 and a second arm 144. The first movable part 140 may be movable in a vertical plane. In an example shown in Fig. 12, the first movable part 140 is movable in an xz plane.

[0122] The base end side of the first arm 142 may be connected to the first base 110 so as to be rotatable in a vertical plane around the first rotation shaft 101. The base end side of the second arm 144 may be connected to the tip side of the first arm 142 so as to be rotatable in a vertical plane around the second rotation shaft 103.

[0123] The first arm 142 and the second arm 144 have a structure in which, for example, when the first arm 142 and the second arm 144 rotate, the trajectory of the first arm 142 and the trajectory of the second arm 144 overlap. For example, the width of the trajectory of the second arm 144 in a direction perpendicular to the vertical plane fits within the width of the trajectory of the first arm 142 in a direction perpendicular to the vertical plane. Fig. 12 illustrates an example of the robot 100 in which the width of the trajectory of the second arm 144 in the y-axis direction fits within the width of the trajectory of the first arm 142 in the y-axis direction.

[0124] For example, at the connecting portion between the first arm 142 and the second arm 144, the connecting portion on the tip side of the first arm 142 is connected to the connecting portion on the base side of the second arm 144 so that the width between the outer surfaces of the second arm 144 in the direction parallel to the second rotation shaft 103 falls within the width between the inner surfaces of the first arm 142 in the direction parallel to the second rotation shaft 103. For example, at the connecting portion between the first arm 142 and the second arm 144, the connecting portion on the tip side of the first arm 122 is connected to the connecting portion on the base side of the second arm 124 so as to sandwich the outer surface of the second arm 144.

[0125] By having a structure in which the trajectory of first arm 142 and the trajectory of second arm 144 overlap when first arm 142 and second arm 144 rotate, the width of the trajectory can be narrower than a robot having a structure in which the trajectories of the two arms do not overlap when the two arms rotate, thereby realizing a robot that can be placed in a narrower area.

[0126] At least one of the first arm 142 and the second arm 144 has a structure capable of avoiding interference between the first arm 142 and the second arm 144, for example, in a state in which a projection of a link portion of the first arm 142 onto a vertical plane and a projection of a link portion of the second arm 144 onto a vertical plane overlap. For example, in the connecting portion between the first arm 142 and the second arm 144, the connecting portion on the tip side of the first arm 142 is connected to the connecting portion on the base end side of the second arm 144 so that a gap 143 exists.

[0127] By having a structure capable of avoiding interference between first arm 142 and second arm 144 in a state in which the projection of the link portion of first arm 142 onto the vertical plane and the projection of the link portion of second arm 144 onto the vertical plane overlap, first movable part 140 can be bent further while avoiding the occurrence of interference between first arm 142 and second arm 144. This makes it possible to realize a robot capable of moving a moving object over a wider range.

[0128] Fig. 13 is a top view that diagrammatically illustrates an example of the system 10.

[0129] The system 10 may include a robot 100 and a housing 200. The system 10 may further include a PA 300.

[0130] The housing 200 is, for example, an EFEM. The EFEM has, for example, a front wall 210 having one or more openings. The EFEM has, for example, a rear wall 230 facing the front wall 210 and having one or more openings. Note that the openings in the front wall 210 of the housing 200 and the openings in the rear wall 230 of the housing 200 may be collectively referred to as the openings in the housing 200.

[0131] One or more openings in the front wall 210 of the EFEM are openings for access to a cassette that stores the wafers 50. The cassette is, for example, a Front-Opening Unified Pod (FOUP).

[0132] The FOUP, for example, stores multiple wafers 50 in multiple stages and has an openable and closable sealing lid on the side. The FOUP complies with, for example, SEMI standards (Semiconductor Equipment and Materials International standards). The sealing lid is opened and closed by a cassette opener. The specific structure of the cassette opener will be described later.

[0133] One or more openings in the rear wall 230 of the EFEM are openings for access to the processing chamber. For example, when the opening in the rear wall 230 of the EFEM corresponds to a load lock chamber interposed between the EFEM and the processing chamber, the opening is an opening for access to the load lock chamber. In addition, in the processing chamber connected to the EFEM via the load lock chamber, processing of the wafer 50 such as etching, ashing, CVD (Chemical Vapor Deposition), etc. is performed.

[0134] The load lock chamber is a chamber interposed between the EFEM and the processing chamber or vacuum transfer chamber. Processing of the wafer 50 in the processing chamber, such as etching, is usually performed in a reduced pressure environment, so the load lock chamber is provided between the EFEM and the processing chamber or vacuum transfer chamber.

[0135] The load lock chamber has, for example, doors on both the EFEM side and the processing chamber side or the vacuum transfer chamber side that can be opened and closed while sealing the interior of the chamber. The doors are also called gate valves.

[0136] The load lock chamber is adjusted to a state in which the EFEM to be moved can be moved between the processing chamber and the EFEM to be moved, for example, by adjusting the pressure state in the load lock chamber to a reduced pressure state or atmospheric pressure state as appropriate. For example, the load lock chamber is adjusted to a state in which the EFEM to be moved can be moved between the load lock chamber and the EFEM to be moved, for example, by adjusting the pressure state in the load lock chamber to a substantially atmospheric pressure state. For example, the load lock chamber is adjusted to a state in which the EFEM to be moved can be moved between the load lock chamber and the processing chamber or the vacuum transfer chamber, for example, by adjusting the pressure state in the load lock chamber to a reduced pressure state substantially equivalent to that of the processing chamber or the vacuum transfer chamber.

[0137] If the opening in the back wall 230 of the EFEM corresponds to a process chamber that is directly connected to the EFEM without a load lock chamber, the opening may be an opening for access to the process chamber, in which processing of the wafer 50, such as cleaning, is performed in an atmospheric pressure environment.

[0138] The robot 100, for example, accesses an opening in the front wall 210 of the EFEM to insert and remove the wafer 50 into the cassette. The robot 100, for example, inserts and removes the wafer 50 into and from the cassette by moving at least a portion of the hand 136 into and out of the opening in the front wall 210 of the EFEM. The robot 100 further inserts and removes the wafer 50 into and from the cassette by moving at least a portion of the third arm 134 into and out of the opening in the front wall 210 of the EFEM.

[0139] The robot 100, for example, accesses an opening in the rear wall 230 of the EFEM to insert and remove the wafer 50 into and from the load lock chamber or the processing chamber. The robot 100, for example, inserts and removes the wafer 50 into and from the load lock chamber or the processing chamber by moving at least a part of the hand 136 into and out of the opening in the rear wall 230 of the EFEM. The robot 100, for example, further inserts and removes the wafer 50 into and from the load lock chamber or the processing chamber by moving at least a part of the third arm 134 into and out of the opening in the rear wall 230.

[0140] The housing 200 may be a sorter. The housing 200 is, for example, a sorter having one or more openings for accessing the cassettes on both sides of the front wall 210 and the rear wall 230. The housing 200 may be a sorter having multiple openings for accessing the cassettes only on the front wall 210. The robot 100, for example, accesses the multiple openings of the sorter to remove the wafers 50 from one cassette and place the removed wafers 50 in another cassette, thereby sorting the wafers 50 among multiple cassettes. The robot 100 may access a single opening of the sorter to remove the wafers 50 from one stage of one cassette and place the removed wafers 50 in another stage of the one cassette, thereby sorting the wafers 50 among stages of a single cassette.

[0141] 13 illustrates an example in which the housing 200 is an EFEM having a front wall 210 having five openings, namely, an opening 2210 for accessing the cassette 221, an opening 2220 for accessing the cassette 222, an opening 2230 for accessing the cassette 223, an opening 2240 for accessing the cassette 224, and an opening 2250 for accessing the cassette 225, and three openings, namely, an opening 2410 for accessing the load lock chamber 241, an opening 2420 for accessing the load lock chamber 242, and an opening 2430 for accessing the load lock chamber 243. The number of openings in the front wall 210 is not limited to five, and may be four or less, or six or more. The number of openings in the rear wall 230 is not limited to three, and may be two or less, or four or more. In addition, cassettes 221, 222, 223, 224, and 225 may be collectively referred to as cassette 220, and load lock chambers 241, 242, and 243 may be collectively referred to as load lock chamber 240.

[0142] The access target of the robot 100 is, for example, an opening of the housing 200. The access target is, for example, a cassette 220. The access target is, for example, a load lock chamber 240. The access target is, for example, a processing chamber. The access target is, for example, a PA 300. The PA 300 is a device that rotates a turntable with a wafer 50 mounted thereon, detects a notch formed around the wafer 50 with a sensor, and adjusts the direction of the notch to rotate the wafer 50 to a desired direction. The access target is, for example, a storage device that temporarily stores the wafer 50. The access target is, for example, an inspection device such as a camera unit that inspects the wafer 50 for abnormalities. The access target may be any other device related to the manufacture of semiconductors.

[0143] The access target is located, for example, outside the housing 200. In this case, the housing 200 has an opening in a wall for accessing the access target located outside the housing 200. The access target may be located inside the housing 200.

[0144] The access target is located, for example, on the front wall 210 side of the housing 200. Fig. 13 shows an example in which the cassette 220 is located on the front wall 210 side.

[0145] In addition to the cassette 220, further access objects may be located on the front wall 210 side of the housing 200. The further access object is located, for example, above the cassette 220. The further access object is located, for example, below the cassette 220. The further access object is located, for example, to the left of the cassette 221. The further access object is located, for example, to the right of the cassette 225.

[0146] The access target is located, for example, on the rear wall 230 side of the housing 200. In FIG 13, an example in which the load lock chamber 240 is located on the rear wall 230 side is illustrated.

[0147] In addition to the load lock chamber 240 when the housing 200 is an EFEM and the cassette 220 when the housing 200 is a sorter, further access targets may be located on the rear wall 230 side of the housing 200. The further access targets are located, for example, above the load lock chamber 240 or the cassette 220. The further access targets are located, for example, below the load lock chamber 240 or the cassette 220. The further access targets are located, for example, to the left of the load lock chamber 241 or the leftmost cassette 220. The further access targets are located, for example, to the right of the load lock chamber 243 or the rightmost cassette 220.

[0148] The access target is located, for example, on the first side wall 270 side of the housing 200. Fig. 13 illustrates an example in which the PA 300 is located on the first side wall 270 side.

[0149] The access target may be located on the side of the second side wall 290 of the housing 200, which faces the first side wall 270. The first side wall 270 and the second side wall 290 may be collectively referred to as the side walls of the housing 200.

[0150] The cassette 220 may be opened and closed by a cassette opener, which is also called a load port.

[0151] The cassette opener may open and close the sealing lid of the FOUP mounted on a predetermined mounting portion of the cassette opener. By opening and closing the sealing lid of the FOUP with the cassette opener, it is possible to prevent air outside the EFEM from flowing into the EFEM. This allows the robot 100 to insert and remove wafers 50 into and from the FOUP while keeping the inside of the EFEM locally cleaner than the outside of the EFEM.

[0152] The cassette opener is provided, for example, at a position corresponding to an opening in the front wall 210. The cassette opener is provided, for example, at a position corresponding to each of the multiple openings in the front wall 210.

[0153] If the housing 200 is a sorter having an opening in the rear wall 230 for accessing the cassette 220, the cassette opener may be provided at a position corresponding to the opening in the rear wall 230. If the housing 200 is a sorter having a plurality of openings in the rear wall 230 for accessing the cassette 220, the cassette opener may be provided at a position corresponding to each of the plurality of openings in the rear wall 230.

[0154] The opening and closing area 227 is an area where a cassette opener opens and closes a sealing lid of the cassette 220. The opening and closing area 227 is an area defined by, for example, the SEMI standard.

[0155] The operating area 250 is an area for the robot 100 to transport an object to be moved. Here, "transport" means that the robot 100 moves the object to be moved within the operating area 250. Therefore, "transport" does not include the robot 100 moving the object to be moved from within the operating area 250 to outside the operating area 250, or the robot 100 moving the object to be moved from outside the operating area 250 to within the operating area 250.

[0156] The active area 250 is an area defined within the housing 200. The active area 250 is an area defined in the space between the front wall 210 and the rear wall 230, for example.

[0157] The motion area 250 is defined, for example, so as not to overlap with the opening / closing area 227 on the front wall 210 side. The motion area 250 is defined, for example, so as to be separated from the opening / closing area 227 on the front wall 210 side by a predetermined distance d1. d1 is, for example, 10 mm.

[0158] By defining the operating area 250 so as not to overlap with the opening / closing area 227, the system 10 becomes a system that is more compliant with the SEMI standard. The robot 100, which can be placed in a narrow area, transports the object to be moved within the operating area 250. This makes it possible to realize a system that is both highly versatile and has a thin housing.

[0159] The operating area 250 is further defined so as not to overlap with an area whose distance from the opening of the rear wall 230 is equal to or less than a predetermined distance, for example. For example, as shown in FIG. 13, when the housing 200 is an EFEM, the operating area 250 is further defined so as not to overlap with an area whose distance from the rear wall 230 is equal to or less than a predetermined distance d2. When the housing 200 is a sorter having an opening in the rear wall 230 for accessing the cassette 220, the operating area 250 may be defined so as not to overlap with an opening / closing area on the rear wall 230 side. In this case, the operating area 250 is defined so as to be separated from the opening / closing area on the rear wall 230 side by d1, for example.

[0160] By further defining the operating area 250 so as not to overlap with an area that is a predetermined distance or less from the opening of the rear wall 230, the operating area 250 is defined so as not to overlap with the opening / closing area 227 on the front wall 210 side, and so as not to overlap with the opening / closing area of ​​the opening / closing door and cassette 220 provided in the load lock chamber 240 on the rear wall 230 side. This makes it possible to realize a system that combines higher versatility with a thinner housing.

[0161] The robot 100 may move a movement target within the housing 200. For example, the robot 100 moves the movement target from one access target to another access target. Here, an example of moving a wafer 50 from a cassette 225 on the front wall 210 to a load lock chamber 242 on the rear wall 230 shown in Fig. 13 will be mainly described. Note that a state in which the hand 136 does not hold a wafer 50 and is located at a position within an operating area 250 where the hand 136 can access an opening 2250 for accessing the cassette 225 is defined as a starting state.

[0162] First, the control unit 152 controls the second movable unit 130 to move the hand 136 from within the operating area 250 to outside the operating area 250, thereby causing the hand 136 to access the opening 2250 for accessing the cassette 225. The control unit 152 controls the second movable unit 130 to cause the hand 136 to access the opening 2250 by, for example, cooperative operation of the third arm 134 and the hand 136.

[0163] The cooperative movement of the third arm 134 and the hand 136 is, for example, a cooperative movement of only the third arm 134 and the hand 136. The cooperative movement of the third arm 134 and the hand 136 may be a cooperative movement of the third arm 134 and the hand 136 and other components of the robot 100.

[0164] Next, in response to the hand 136 accessing the opening 2250, the control unit 152 controls the second movable unit 130 to remove the wafer 50 from the cassette 225. The control unit 152 controls the second movable unit 130 to remove the wafer 50 from the cassette 225 by, for example, a coordinated operation of the third arm 134 and the hand 136.

[0165] Next, the control unit 152 controls the second movable unit 130 so as to move the hand 136 holding the wafer 50 from outside the operating area 250 to inside the operating area 250. The control unit 152 controls the second movable unit 130 so as to move the hand 136 holding the wafer 50 from outside the operating area 250 to inside the operating area 250 by, for example, cooperative operation of the third arm 134 and the hand 136.

[0166] Next, the control unit 152 controls the first movable unit 120 and the second movable unit 130 so as to transport the wafer 50 held by the hand 136 in a state where the wafer 50 is contained within the operation area 250. The state where the wafer 50 held by the hand 136 is contained within the operation area 250 includes, for example, a state where the width of the wafer 50 in a direction perpendicular to the direction in which the wafer 50 is transported is contained within the width of the operation area 250 in a direction perpendicular to the direction in which the wafer 50 is transported. For example, when the wafer 50 has a disk shape, the width of the wafer 50 in a direction perpendicular to the direction in which the wafer 50 is transported is the diameter of the wafer 50. In FIG. 13, the direction in which the wafer 50 is transported is the x-axis direction, and the width r of the wafer 50 in the y-axis direction is the x-axis direction. w is the width w of the active region 250 in the y-axis direction m 1 illustrates an example of a state in which the wafer 50 is accommodated within the range of 0.5 mm to 1.5 mm. Note that the width of the operating area 250 in a direction perpendicular to the direction in which the wafer 50 is transported may be referred to as the width of the operating area 250.

[0167] The width of the operating area 250 is determined based on, for example, the size of the wafer 50. For example, when the wafer 50 has a disk shape, the width is determined based on the diameter of the wafer 50. For example, the width of the operating area 250 is determined so that the width of the operating area 250 relative to the diameter of the wafer 50 is smaller than a predetermined ratio. For example, when the diameter of the wafer 50 is 300 mm, the width of the operating area 250 is 330 mm.

[0168] The control unit 152 controls the first movable unit 120 and the second movable unit 130 so that, for example, the third arm 134, the hand 136, and the first movable unit 120 cooperate to transport the wafer 50 held by the hand 136 in a state where the wafer 50 is accommodated within the operation area 250. The cooperative operation of the third arm 134, the hand 136, and the first movable unit 120 includes, for example, the cooperative operation of the third arm 134, the hand 136, and the first movable unit 120. The cooperative operation of the third arm 134, the hand 136, and the first movable unit 120 includes, for example, the cooperative operation of the third arm 134, the hand 136, and the second arm 124. The cooperative operation of the third arm 134, the hand 136, and the first movable unit 120 may include the cooperative operation of the third arm 134, the hand 136, the first arm 122, and the second arm 124.

[0169] Next, in response to the wafer 50 being transported to a predetermined position with the wafer 50 accommodated within the operating area 250, the control unit 152 controls the second movable unit 130 to move the hand 136 from within the operating area 250 to outside the operating area 250, thereby allowing the hand 136 to access an opening 2420 for accessing the load lock chamber 242. The control unit 152 controls the second movable unit 130 to allow the hand 136 to access the opening 2420 by, for example, cooperative operation of the third arm 134 and the hand 136.

[0170] Thereafter, in response to the hand 136 accessing the opening, the control unit 152 controls the second movable unit 130 to load the wafer 50 into the load lock chamber 242. The control unit 152 controls the second movable unit 130 to load the wafer 50 into the load lock chamber 242, for example, by cooperative operation of the third arm 134 and the hand 136. This completes the operation of the robot 100 to move the wafer 50 from the cassette 225 to the load lock chamber 242.

[0171] In the above-mentioned example of moving the wafer 50 from the cassette 225 on the front wall 210 to the load lock chamber 242 on the rear wall 230, the robot 100 allows the hand 136 to access the opening 2420 by the cooperative operation of the third arm 134 and the hand 136. However, unlike the cassette 220, the load lock chamber 240 often does not comply with the SEMI standard. For this reason, when the hand 136 tries to access the opening for accessing the load lock chamber 240 by the cooperative operation of the third arm 134 and the hand 136, interference between the load lock chamber 240 and the third arm 134, the wafer 50, or the hand 136 occurs depending on the dimensions, position, etc. of the load lock chamber 240. This may prevent the robot 100 from inserting or removing the wafer 50 into or from the load lock chamber 240. In this case, the robot 100 can access the opening with the hand 136 through coordinated operation of the third arm 134, the hand 136, and the first movable part 120, thereby enabling the wafer 50 to be inserted into and removed from the load lock chamber 240 without interference between the load lock chamber 240 and the third arm 134, the wafer 50, or the hand 136.

[0172] As described above, the robot 100 may have a structure capable of transporting an object to be moved, such as the wafer 50 held by the hand 136, while the object is contained within the operating area 250. As a result, a robot that can contribute to making the housing thinner can be realized.

[0173] For example, the control unit 152 causes the hand 136 to access the access target while the hand 136 is parallel to a horizontal plane. In the example shown in Fig. 13, the control unit 152 causes the hand 136 to access the access target while the hand 136 is parallel to the xy plane.

[0174] By accessing the target with the hand 136 parallel to the horizontal plane, the risk of the target falling from the hand while the robot 100 is performing an operation of taking out the target or an operation of putting in the target can be reduced. This makes it possible to realize a robot that can move the target more safely. As a result, it is possible to realize a robot that can contribute to realizing a system with a high yield in semiconductor manufacturing.

[0175] For example, the width of the trajectory of the first movable part 120 in a direction perpendicular to the vertical plane when the wafer 50 is transported within the operating region 250 falls within the width of the trajectory of the transported wafer 50 in a direction perpendicular to the vertical plane. The trajectory of the first movable part 120 when transporting the wafer 50 includes, for example, the trajectory of the first arm 122 when transporting the wafer 50. The trajectory of the first movable part 120 when transporting the wafer 50 includes, for example, the trajectory of the second arm 124 when transporting the wafer 50. FIG. 13 illustrates an example in which the vertical plane of the trajectory of the first movable part 120 when transporting the wafer 50 is the xz plane, the vertical plane of the trajectory of the wafer 50 is the xz plane, and the width of the trajectory of the first movable part 120 in the y-axis direction when transporting the wafer 50 falls within the width of the trajectory of the wafer 50 in the y-axis direction.

[0176] As described above, the robot 100 may have a structure in which the width of the trajectory of the first movable part 120 when transporting the wafer 50 in a direction perpendicular to the vertical plane is within the width of the trajectory of the transported wafer 50 in a direction perpendicular to the vertical plane. This makes it possible to reduce the thickness of the robot.

[0177] For example, the width of the trajectory of the first movable part 120 in a direction perpendicular to the vertical plane when the wafer 50 is transported within the operating region 250 falls within the width in a direction perpendicular to the vertical plane between the inner surface 1121 of the first side surface part 112 and the inner surface 1141 of the second side surface part 114. Fig. 13 illustrates an example in which the vertical plane of the trajectory of the first movable part 120 when the wafer 50 is transported is the xz plane, the vertical plane between the inner surface 1121 and the inner surface 1141 is the xz plane, and the width of the trajectory of the first movable part 120 in the y-axis direction when the wafer 50 is transported falls within the width in the y-axis direction between the inner surface 1121 and the inner surface 1141 of the second side surface part 114.

[0178] As described above, the robot 100 may have a structure in which the width of the trajectory of the first movable part 120 when transporting the wafer 50 in a direction perpendicular to the vertical plane falls within the width in the direction perpendicular to the vertical plane between the inner surface 1121 and the inner surface 1141. This makes it possible to reduce the thickness of the robot.

[0179] For example, the width of the trajectory of the second movable part 130 when transporting the wafer 50 within the operation area 250 in a direction perpendicular to the vertical plane falls within the width of the trajectory of the wafer 50 being transported in a direction perpendicular to the vertical plane. The trajectory of the second movable part 130 when transporting the wafer 50 includes, for example, the trajectory of the second base 132 when transporting the wafer 50. The trajectory of the second movable part 130 when transporting the wafer 50 includes, for example, the trajectory of the third arm 134 when transporting the wafer 50. The trajectory of the second movable part 130 when transporting the wafer 50 includes, for example, the trajectory of the hand 136 when transporting the wafer 50. Figure 13 shows an example of a case where the vertical plane of the trajectory of the second movable part 130 when transporting the wafer 50 is the xz plane, the vertical plane of the trajectory of the wafer 50 is the xz plane, and the width of the trajectory of the second movable part 130 in the y-axis direction when transporting the wafer 50 falls within the width of the trajectory of the wafer 50 in the y-axis direction.

[0180] As described above, the robot 100 may have a structure in which the width of the trajectory of the second movable part 130 when transporting the wafer 50 in a direction perpendicular to the vertical plane is within the width of the trajectory of the transported wafer 50 in a direction perpendicular to the vertical plane. This makes it possible to reduce the thickness of the robot.

[0181] For example, the trajectory of the fourth rotation axis 107 when the wafer 50 is transported may be offset from the center line of the width in the direction perpendicular to the vertical plane of the trajectory of the second movable part 130 when the wafer 50 is transported. For example, the trajectory of the fourth rotation axis 107 when the wafer 50 is transported is offset toward the rear wall 230 from the center line of the width in the direction perpendicular to the vertical plane of the trajectory of the second movable part 130 when the wafer 50 is transported. The trajectory of the fourth rotation axis 107 when the wafer 50 is transported may be offset toward the front wall 210 from the center line of the width in the direction perpendicular to the vertical plane of the trajectory of the second movable part 130 when the wafer 50 is transported. FIG. 13 illustrates an example in which the trajectory of the fourth rotation axis 107 when the wafer 50 is transported is offset toward the rear wall 230 from the center line of the width in the y-axis direction of the trajectory of the second movable part 130 when the wafer 50 is transported.

[0182] As described above, for example, the robot 100 has a structure in which the trajectory of the fourth rotation axis 107 when transporting the wafer 50 is shifted from the center line of the width in a direction perpendicular to the vertical plane of the trajectory of the second movable part 130 when transporting the wafer 50. This allows the length of the third arm 134 to be longer within the range in which the third arm 134 can rotate in the operating region 250. As a result, a robot that can access an access target that is located farther away from the installation position of the robot can be realized.

[0183] As described above, for example, the robot 100 has a structure in which the trajectory of the fourth rotation axis 107 when transporting the wafer 50 is shifted toward the rear wall 230 side from the center line of the width in the direction perpendicular to the vertical plane of the trajectory of the second movable part 130 when transporting the wafer 50. This makes it possible to realize a robot that can easily access an access target located on the rear wall 230 side. In particular, when the housing 200 is an EFEM, unlike the cassette 220 whose dimensions are determined by the SEMI standard, the load lock chamber 240 whose dimensions are often not determined by the SEMI standard is located on the rear wall 230 side. Therefore, by having the robot 100 have this structure, the hand 136 can access the opening of the rear wall 230 and reach the processing chamber located farther away, so that a robot that can easily access the load lock chamber 240, which may have various dimensions, can be realized. As a result, a robot that can contribute to the realization of a system with a high degree of design freedom can be realized.

[0184] As described above, the robot 100 may have a structure in which the trajectory of the fourth rotation shaft 107 when transporting the wafer 50 is shifted toward the front wall 210 from the center line of the width in the direction perpendicular to the vertical plane of the trajectory of the second movable part 130 when transporting the wafer 50. This makes it possible to realize a robot that can easily access the opening on the cassette 220 side located on the front wall 210 side.

[0185] For example, the length of the third arm 134 is shorter than the width of the working area 250 in a direction perpendicular to the vertical plane. In FIG. 13, the length of the third arm 134 is shorter than the width w m An example of a shorter case is shown.

[0186] As described above, the robot 100 has a structure in which the length of the third arm 134 is shorter than the width of the working area 250. This makes it possible to realize a robot with high operability of the robot arm when transporting an object to be moved within the working area 250.

[0187] For example, the length of the hand 136 and the wafer 50 when the hand 136 holds the wafer 50 is longer than the width in the direction perpendicular to the vertical plane of the operating area 250. The length of the hand 136 and the wafer 50 is L 5w and L 5t For example, L 5w L 5t If it is longer, the length of the hand 136 and the wafer 50 is L 5w For example, L 5t L 5w If it is longer, the length of the hand 136 and the wafer 50 is L 5t The length of the hand 136 and the wafer 50 may be the longer of the length from the base end of the hand 136 to the tip of the wafer 50 and the length from the base end of the hand 136 to the tip of the hand 136. In FIG. 13, the length of the hand 136 and the wafer 50 is the width w m An example of a longer case is shown.

[0188] As described above, the robot 100 has a structure in which the length of the hand 136 and the wafer 50 when the hand 136 holds the wafer 50 is longer than the width of the operating area 250. This makes it possible to realize a robot that can access an access target located at a position farther away from the operating area 250.

[0189] For example, the maximum value of the width in the direction perpendicular to the vertical plane between the outer surface 1123 and the outer surface 1143 falls within the width in the direction perpendicular to the vertical plane of the active area 250. In FIG. 13, the vertical plane between the outer surface 1123 and the outer surface 1143 is the xz plane, and the maximum value of the width in the y-axis direction between the outer surface 1123 and the outer surface 1143 falls within the width w in the y-axis direction of the active area 250. m 13 shows an example of a case where the distance falls within the range of 100 mm.

[0190] Since the maximum value of the width between outer surface 1123 and outer surface 1143 in a direction perpendicular to the vertical plane falls within the width of operating area 250 in a direction perpendicular to the vertical plane, robot 100 can be placed in housing 200 with first side surface portion 112 and second side surface portion 114 of first base 110 falling within operating area 250. This makes it possible to realize a robot that can contribute to the realization of a system that achieves both high versatility and a thin housing.

[0191] 14 is an explanatory diagram for explaining an example of the cooperative operation of the third arm 134 and the hand 136. Here, the robot 100 moves the c of the wafer 50 by the cooperative operation of the third arm 134 and the hand 136. w is the center c of the cassette 223 installation position. p An example of a loading process in which the wafers 50 are loaded into the cassette 223 in a state where the wafers 50 match each other will be mainly described.

[0192] At time t1, the wafer 50 is within the operating region 250. The control unit 152 controls the second movable unit 130 so that the wafer 50 in the state at time t1 moves out of the operating region 250.

[0193] At time t2, a part of the wafer 50 is located outside the operating region 250. The control unit 152 controls the second movable unit 130 so that the wafer 50 in the state at time t2 is included in the space within the cassette 223.

[0194] At time t3, c of the wafer 50 w But, cassette 223 c p A part of the wafer 50 is included in the space inside the cassette 223 while the wafer 50 is positioned on a straight line passing through and parallel to the y-axis. The control unit 152 controls the second movable unit 130 so that the wafer 50 in the state at time t3 moves in the positive direction of the y-axis.

[0195] At time t4, the wafer 50 is located outside the operating region 250. The control unit 152 controls the second movable unit 130 so that the wafer 50 moves further in the positive direction of the y axis.

[0196] At time t5, c of the wafer 50 w Cassette 223 C p When the wafer 50 in the state at time t5 is placed in the cassette 223, the process of inserting the wafer 50 into the cassette 223 by the robot 100 is completed.

[0197] 14, the robot 100 places the wafer 50 in the cassette 223 by the coordinated operation of the third arm 134 and the hand 136. Therefore, in the example of the loading process of the wafer 50 by the robot 100 shown in FIG 14, the position of the fourth rotation shaft 107 does not change throughout the loading process.

[0198] The above description has been given of an example of the cooperative operation of the third arm 134 and the hand 136 when the robot 100 puts the wafer 50 into the cassette 223. The robot 100 may take out the wafer 50 from the cassette 223 by the cooperative operation of the third arm 134 and the hand 136. For example, the control unit 152 controls the second movable unit 130 so that the state of the wafer 50 changes in the order of the state at time t5, the state at time t4, the state at time t3, the state at time t2, and the state at time t1, thereby causing the robot 100 to take out the wafer 50 from the cassette 223.

[0199] 15 is an explanatory diagram for explaining an example of the cooperative operation of the third arm 134, the hand 136, and the first movable part 120. Here, the robot 100 moves the c of the wafer 50 by the cooperative operation of the third arm 134, the hand 136, and the first movable part 120. w is the center c of the installation position of the load lock chamber 241. p An example of a loading process in which the wafer 50 is loaded into the load lock chamber 241 in a state where the wafer 50 coincides with the above will be mainly described.

[0200] At time t1, the wafer 50 is within the operating region 250. The control unit 152 controls the first movable unit 120 and the second movable unit 130 so that the wafer 50 in the state at time t1 moves out of the operating region 250.

[0201] At time t2, a part of the wafer 50 is located outside the operating region 250. When the state of the wafer 50 transitions from the state at time t1 to the state at time t2, the position of the fourth rotation shaft 107 moves in the positive direction of the x-axis. The control unit 152 controls the first movable part 120 and the second movable part 130 so that the wafer 50 in the state at time t2 is included in the space within the load lock chamber 241.

[0202] At time t3, a part of the wafer 50 is contained in the space inside the load lock chamber 241. As the state of the wafer 50 transitions from the state at time t2 to the state at time t3, the position of the fourth rotation shaft 107 moves in the positive direction of the x-axis. The control unit 152 controls the first movable unit 120 and the second movable unit 130 so that the wafer 50 in the state at time t3 moves in the negative direction of the x-axis and also moves in the negative direction of the y-axis.

[0203] At time t4, the wafer 50 is located outside the operating region 250. As the state of the wafer 50 transitions from the state at time t3 to the state at time t4, the position of the fourth rotation axis 107 moves in the negative direction of the x-axis. The control unit 152 controls the first movable unit 120 and the second movable unit 130 so that the wafer 50 in the state at time t4 moves further in the negative direction of the x-axis and further moves in the negative direction of the y-axis.

[0204] At time t5, c of the wafer 50 w is the center c of the load lock chamber 241 p When the state of the wafer 50 changes from the state at time t4 to the state at time t5, the position of the fourth rotation shaft 107 moves in the negative direction of the x-axis. By placing the wafer 50 in the state at time t5 in the load lock chamber 241, the process of loading the wafer 50 into the load lock chamber 241 by the robot 100 is completed.

[0205] 15, the robot 100 loads the wafer 50 into the load lock chamber 241 by the cooperative operation of the third arm 134, the hand 136, and the first movable part 120. Therefore, in the example of the loading process of the wafer 50 by the robot 100 shown in FIG. 15, the position of the fourth rotation shaft 107 changes throughout the loading process. Specifically, while the state of the wafer 50 changes from the state at time t1 to the state at time t2 and the state at time t3 in this order, the position of the fourth rotation shaft 107 moves in the positive direction of the x-axis, and while the state of the wafer 50 changes from the state at time t3 to the state at time t4 and the state at time t5 in this order, the position of the fourth rotation shaft 107 moves in the negative direction of the x-axis.

[0206] In the above description, an example of the coordinated operation of the third arm 134, the hand 136, and the first movable part 120 when the robot 100 puts the wafer 50 into the load lock chamber 241 has been described. The robot 100 may take out the wafer 50 from the load lock chamber 241 by the coordinated operation of the third arm 134, the hand 136, and the first movable part 120. For example, the control unit 152 controls the first movable part 120 and the second movable part 130 so that the state of the wafer 50 changes in the order of the state at time t5, the state at time t4, the state at time t3, the state at time t2, and the state at time t1, thereby causing the robot 100 to take out the wafer 50 from the load lock chamber 241.

[0207] 16 shows an example of the second movable section 130 in a state where the hand 136 holds the wafer 50 within the operating area 250. Here, matters relating to the third arm 134 will be mainly described.

[0208] l d is a straight line parallel to the direction in which the wafer 50 is transported within the operating area 250. d A vector parallel to l 45 The angle θ between and a vector parallel to 3d The wafer 50 is transported while maintaining a state in which the offset angle is a predetermined angle. The offset angle may be referred to as α.

[0209] For example, α≠0°. α=0° is also acceptable.

[0210] The hand system of the robot 100 is, for example, θ 3d It is determined based on the angle range of θ 3d This angle range may be referred to as the hand-based angle range.

[0211] The hand-held system angle range includes a first hand-held system angle range and a second hand-held system angle range. For example, the first hand-held system angle range corresponds to a state in which the tip side of the third arm 134 is located to the right of the base end side of the third arm 134, and the second hand-held system angle range corresponds to a state in which the tip side of the third arm 134 is located to the left of the base end side of the third arm 134. For example, the first hand-held system angle range is an angle from -90° to 90°, and the second hand-held system angle range is an angle from -180° to -90° and an angle from 90° to 180°. In this case, θ 3d The angle range of θ is from -180° to 180°. 3d The angle range of θ may be any other angle range. 3d 1 illustrates an example of the robot 100 when is included in the second hand system angle range.

[0212] l mc is the center line of the width of the active area 250. The fourth rotation axis 107 is mc The fourth rotation axis 107 may be offset from the mc The fourth rotation shaft 107 is offset toward the rear wall 230. mc In FIG. 16, the fourth rotation shaft 107 is shifted toward the front wall 210. mc 2 illustrates an example of the robot 100 shifted toward the rear wall 230 from the front wall 230.

[0213] 17 is a schematic diagram showing another example of the second movable part 130 in a state where the hand 136 holds the wafer 50 within the operating area 250. Here, matters relating to the hand 136 will be mainly described.

[0214] The robot 100 may, for example, d A vector parallel to l Hc The angle θ between and a vector parallel to Hd The wafer 50 is transported while maintaining the state in which the angle is set to a predetermined angle. The predetermined angle may be referred to as β.

[0215] For example, β≠0°. In FIG. Hd 1 illustrates an example of a robot 100 that transports a wafer 50 while maintaining the state where β=β≠0°.

[0216] β may be 0°. In FIG. Hd 1 illustrates an example of a robot 100 that transports a wafer 50 while maintaining the state where β=β=0°.

[0217] The hand system of the robot 100 is, for example, Hd It is determined based on the angle range of θ Hd This angle range may be referred to as the hand system angle range.

[0218] The hand system angle range includes a first hand system angle range and a second hand system angle range. For example, the first hand system angle range corresponds to a state in which the tip side of the hand 136 is located to the right of the base end side of the hand 136, and the second hand system angle range corresponds to a state in which the tip side of the hand 136 is located to the left of the base end side of the hand 136. For example, the first hand system angle range is an angle from -90° to 90°, and the second hand system angle range is an angle from -180° to -90° and an angle from 90° to 180°. In this case, θ Hd The angle range of θ is from -180° to 180°. Hd The angle range of θ may be any other angle range. Hd is included in the first end system angle range.

[0219] FIG. 18 is an explanatory diagram for explaining an example of the operating range of the third rotation axis 105. The robot 100 shown in FIG. B1is included in the second arm system angle range.

[0220] D 13max is the distance between the first rotating shaft 101 and the third rotating shaft 105 when the first movable part 120 is fully extended. For example, D 13max is defined as the length of the first movable part 120 when the first movable part 120 is fully extended. The length from the base end of the first arm 122 to the tip of the second arm 124 when the first movable part 120 is fully extended may be defined as the length of the first movable part 120 when the first movable part 120 is fully extended.

[0221] The area 261 is B1 is included in the second arm system angle range. B1 corresponds to the operating range of the third rotation axis 105 when is included in the second arm system angle range. Here, the relationship between the robot 100 in state 1 and the robot 100 in state 2, respectively, shown in Fig. 18, and the third rotation axis 105 will be described.

[0222] 18 is the robot 100 in a state 1 in which the altitude of the third rotation axis 105 is the highest. The robot 100 in a state 2 in which the altitude of the third rotation axis 105 is the lowest.

[0223] FIG. 19 is an explanatory diagram for explaining another example of the operating range of the third rotation axis 105. The robot 100 shown in FIG. B1 is included in the first arm system angular range. Here, differences from FIG. 18 will be mainly described.

[0224] The area 263 is B1 is included in the first arm system angle range. B1corresponds to the operating range of the third rotation axis 105 when the first arm system angle range is included in the first arm system angle range. Here, the relationship between the robot 100 in state 1 and the robot 100 in state 2, respectively, shown in Fig. 19, and the third rotation axis 105 will be described.

[0225] 19 is the robot 100 in a state 1 in which the altitude of the third rotation axis 105 is the highest. The robot 100 in a state 2 in which the altitude of the third rotation axis 105 is the lowest.

[0226] Fig. 20 is an explanatory diagram for explaining an example of the maximum operating range of the third rotating shaft 105 and an example of a maximum accessible area of ​​the hand 136. First, an example of the maximum operating range of the third rotating shaft 105 will be described. Here, an example of the maximum operating range of the third rotating shaft 105 shown in Fig. 20 will be described with reference to the operating range of the third rotating shaft 105 shown in Fig. 18 and the operating range of the third rotating shaft 105 shown in Fig. 19.

[0227] The area 265 is an area in which the third rotation axis 105 can be located regardless of the arm system angle range. B1 The third rotation axis 105 can be located only when the second arm system angle range is included in the second arm system angle range. B1 is included in the first arm system angle range. The maximum operating range of the third rotation axis 105 corresponds to the sum of the areas 265, 267, and 269.

[0228] The sum of the region 265 and the region 267 is the region 261. The sum of the region 265 and the region 269 is the region 263.

[0229] Next, an example of the maximum accessible area of ​​the hand 136 will be described. Here, the maximum accessible area of ​​the hand 136 is the largest area that the hand 136 can access. Note that the hand 136 can access when the c of the wafer 50 held by the hand 136 is wshall be accessible.

[0230] The fact that the hand 136 is accessible includes, for example, that the hand 136 is accessible without causing interference between components of the robot 100. The fact that the hand 136 is accessible includes, for example, that the hand 136 is accessible without causing interference between the robot 100 and the housing 200.

[0231] The maximum accessible area of ​​the hand 136 is determined based on, for example, the position where the robot 100 is placed in the housing 200. The maximum accessible area of ​​the hand 136 is determined based on, for example, the width of the operating area 250.

[0232] The maximum accessible area of ​​the hand 136 is determined, for example, based on the posture of the robot 100. The maximum accessible area of ​​the hand 136 is determined, for example, based on the posture of the robot 100 in a state in which the first movable part 120 is maximally extended. The maximum accessible area of ​​the hand 136 is determined, for example, based on the posture of the robot 100 in a state in which the second movable part 130 is maximally extended. The maximum accessible area of ​​the hand 136 is determined, for example, based on the posture of the robot 100 in a state in which the first movable part 120 and the second movable part 130 are maximally extended.

[0233] The maximum accessible area of ​​the hand 136 is determined based on, for example, the length of the first movable part 120 when the first movable part is fully extended.

[0234] The maximum accessible area of ​​the hand 136 is determined, for example, based on the range of motion of the second movable part 130 when the third rotating shaft 105 is rotated with the first movable part 120 in a state where it is maximally extended. The maximum accessible area of ​​the hand 136 is determined, for example, based on the range of motion of the second movable part 130 when the third rotating shaft 105 is rotated with the first movable part 120 in a state where it is maximally bent.

[0235] The range of motion of the second movable part 130 is determined, for example, based on the range of motion of the second base 132. The range of motion of the second movable part 130 is determined, for example, based on the range of motion of the third arm 134. The range of motion of the second movable part 130 is determined, for example, based on the range of motion of the hand 136.

[0236] The range of motion of the second movable part 130 is, for example, the range of motion of the second movable part 130 when the third arm 134 and the hand 136 are caused to move in a coordinated manner. The range of motion of the second movable part 130 is, for example, the range of motion of the second movable part 130 when the second base 132, the third arm 134, and the hand 136 are caused to move in a coordinated manner.

[0237] The maximum accessible area of ​​the hand 136 is determined, for example, based further on the range of motion of the third arm 134 and the hand 136 when the fourth rotation shaft 107 is rotated with the first movable part 120 in a state where it is maximally extended. The maximum accessible area of ​​the hand 136 is determined, for example, based further on the range of motion of the third arm 134 and the hand 136 when the fourth rotation shaft 107 is rotated with the first movable part 120 in a state where it is maximally bent.

[0238] The range of motion of the third arm 134 and the hand 136 is determined, for example, based on the range of motion of the third arm 134. The range of motion of the third arm 134 and the hand 136 is determined, for example, based on the range of motion of the hand 136. The range of motion of the third arm 134 and the hand 136 is, for example, the range of motion of the third arm 134 and the hand 136 when the third arm 134 and the hand 136 are caused to move in coordination with each other.

[0239] The maximum accessible area of ​​the hand 136 is determined, for example, based on the range of motion of the hand 136 when the fifth rotation shaft 109 is rotated with the first movable part 120 in a state where it is maximally extended. The maximum accessible area of ​​the hand 136 is determined, for example, based on the range of motion of the hand 136 when the fifth rotation shaft 109 is rotated with the first movable part 120 in a state where it is maximally bent.

[0240] The maximum accessible area of ​​the hand 136 is determined based on, for example, the length of the second movable part 130 when the second movable part 130 is fully extended. The maximum accessible area of ​​the hand 136 is determined based on, for example, the length from the fourth rotation axis 107 to the tip of the hand 136 when the second movable part 130 is fully extended with the third arm 134 and the hand 136 parallel to the horizontal plane.

[0241] The maximum accessible area of ​​the hand 136 is determined, for example, further based on the altitude of the first rotation axis 101. The maximum accessible area of ​​the hand 136 includes, for example, an upper accessible area of ​​the hand 136 when the altitude of the third rotation axis 105 is higher than that of the first rotation axis 101, and a lower accessible area of ​​the hand 136 when the altitude of the third rotation axis 105 is lower than that of the first rotation axis 101. In the example shown in FIG. 20 , the upper accessible area of ​​the hand 136 is a plane p 1p The lower accessible area of ​​the hand 136 is when the altitude of the third rotation axis 105 is higher than p 1p In the example shown in FIG. 20, the area where the hand 136 can access the object is lower than the altitude of p 1p is the xy plane.

[0242] The maximum accessible area of ​​the hand 136 is, for example, l 23 A vector parallel to the fourth rotation axis 107 is perpendicular to the arrangement surface of the first base 110 and is parallel to the fourth rotation axis 107. The vector parallel to the fourth rotation axis 107 is perpendicular to the arrangement surface of the first base 110 and is parallel to the fourth rotation axis 107. The length L from the third rotation axis 105 to the upper end of the second movable part 130 is 2u In the upper accessible area of ​​the hand 136, L 2u contributes to expanding the access area of ​​the hand 136. On the other hand, within the lower accessible area of ​​the hand 136, L 2u does not contribute to expanding the access area of ​​the hand 136.

[0243] The maximum accessible area of ​​the hand 136 is, for example, θ B1 The maximum accessible area of ​​the hand 136 is further defined based on the angular range of, for example, θ B1 is included in the first arm system angle range, and θ B1 and a second accessible area of ​​the hand 136 when the arm system angle range is included in the second arm system angle range.

[0244] The maximum accessible area of ​​the hand 136 is determined based on, for example, the maximum operating range of the third rotation shaft 105. The maximum accessible area of ​​the hand 136 includes, for example, an area within the maximum operating range of the third rotation shaft 105 and an area 284 outside the maximum operating range of the third rotation shaft 105. In FIG. 20, w 2 illustrates an example in which the accessible outer boundary of the region 284 is represented by a dashed-dotted line indicating the outer boundary of the region 284.

[0245] The access target may be located within a maximum accessible area of ​​the hand 136. For example, one or more openings in the front wall 210 of the housing 200 are located within the maximum accessible area of ​​the hand 136. For example, one or more openings in the rear wall 230 of the housing 200 are located within the maximum accessible area of ​​the hand 136. The PA 300 may be located on a side wall side of the housing 200 and within the maximum accessible area of ​​the hand 136.

[0246] According to the system 10 in the embodiment shown in Fig. 20, it is possible to arrange the access targets by making maximum use of the accessible area of ​​the hand 136. As a result, the system 10 in the embodiment shown in Fig. 20 can increase the number of access targets that can be arranged in the housing 200, and as a result, it is possible to realize a system with a high degree of freedom in designing the housing.

[0247] FIG. 21 is an explanatory diagram for explaining an example of the relationship between the maximum accessible area of ​​the hand 136 and the opening of the housing 200. In FIG. 12is included in the first elbow system angle range.

[0248] The multiple openings of the housing 200 are located at positions where the hand 136 can access the housing 200 without interference between components of the robot 100. The multiple openings of the housing 200 are located at positions where the hand 136 can access the housing 200 without interference between the first movable part 120 and the third arm 134. The multiple openings of the housing 200 are located at positions where the hand 136 can access the housing 200 without interference between the second arm 124 and the third arm 134. The multiple openings of the housing 200 are located at positions where the hand 136 can access the housing 200 without interference between the first movable part 120 and the hand 136. The multiple openings of the housing 200 are located at positions where the hand 136 can access the housing 200 without interference between the second arm 124 and the hand 136.

[0249] The multiple openings of the housing 200 are located at positions where the hand 136 can access the housing 200 without causing interference between the robot 100 and the housing 200. The multiple openings of the housing 200 are located at positions where the hand 136 can access the housing 200 without causing interference between the robot 100 and the front wall 210. The multiple openings of the housing 200 are located at positions where the hand 136 can access the housing 200 without causing interference between the robot 100 and the rear wall 230. The multiple openings of the housing 200 are located at positions where the hand 136 can access the housing 200 without causing interference between the robot 100 and the first side wall 270. The multiple openings of the housing 200 are located at positions where the hand 136 can access the housing 200 without causing interference between the robot 100 and the second side wall 290.

[0250] At least one of the multiple openings of the housing 200 is located, for example, within a region within the maximum operating range of the third rotation shaft 105. At least one of the multiple openings of the housing 200 is located, for example, within a region 265. At least one of the multiple openings of the housing 200 is located, for example, within a region 267. At least one of the multiple openings of the housing 200 is located, for example, within a region 269. In the example shown in FIG. 21, three openings of the front wall 210, that is, an opening 2220, an opening 2230, and an opening 2240, are located within the region 265. Note that the openings being located within the region includes not only all of the openings being located within the region, but also a part of the openings being located within the region.

[0251] At least one of the multiple openings in the housing 200 is located, for example, in a region 284 outside the maximum operating range of the third rotation shaft 105. At least one of the multiple openings in the housing 200 is located, for example, within the trajectories of the third arm 134 and the hand 136 when the first movable unit 120 is rotated with the first movable unit 120 fully extended and the third arm 134 and the hand 136 parallel to the horizontal plane. In the example shown in FIG. 21 , two openings, an opening 2210 and an opening 2250, in the front wall 210 are located within the region 284.

[0252] 21, the housing 200 has an opening located in the area 284. This allows the access target to be placed by making maximum use of the length from the third rotation shaft 105 to the upper end of the second movable part 130, thereby further increasing the number of access targets that can be placed in the housing 200, and as a result, a system with a higher degree of freedom in the design of the housing can be realized.

[0253] One of the openings of the front wall 210 is located at a position where the hand 136 can access the lowest wafer storage unit of the cassette 220 that is located at a position corresponding to the opening when the first movable part 120 is bent to the maximum. This allows the space near the boundary of the maximum accessible area to be used as long as the position allows access to the lowest wafer storage unit of the cassette 220, so that the number of accessible targets that can be placed in the housing 200 can be increased, and as a result, a system with a higher degree of freedom in designing the housing can be realized. In the example shown in FIG. 21, the opening 2230 of the front wall 210 is located at a position where the hand 136 can access the lowest wafer storage unit of the cassette 223 that corresponds to the opening 2230 when the first movable part 120 is bent to the maximum.

[0254] The multiple openings of the housing 200 are located, for example, at a position higher than the first rotation shaft 101. The multiple openings of the housing 200 are located, for example, within an upper accessible area. In the example shown in Fig. 21, five openings of the front wall 210, namely, an opening 2210, an opening 2220, an opening 2230, an opening 2240, and an opening 2250, are located within the upper accessible area.

[0255] The housing 200 further has an opening 2850, for example, within the maximum accessible area of ​​the hand 136 and at a position lower than the first rotation axis 101. The housing 200 further has an opening 2850, for example, within a lower accessible area. This makes it possible to further increase the number of access targets that can be placed in the housing 200, and as a result, a system with a higher degree of freedom in the design of the housing can be realized.

[0256] The housing 200 has, for example, an opening 2850 in the front wall 210. The housing 200 may have an opening 2850 in the rear wall 230. Figure 21 illustrates an example of a housing 200 in which the front wall 210 has an opening 2850.

[0257] The opening 2850 is located, for example, at a position accessible by the hand 136 without interference between the third arm 134 and the first base 110. The opening 2850 is located, for example, at a position accessible by the hand 136 without interference between the hand 136 and the first base 110. As a result, since the space near the first base 110 can also be used as long as it is at a position where interference between the third arm 134 and the first base 110 does not occur, it is possible to further increase the number of accessible targets that can be placed in the housing 200, and as a result, it is possible to realize a system with even higher freedom in designing the housing.

[0258] At least one of the multiple openings in the housing 200 is located, for example, in a first accessible area of ​​the hand 136. The at least one opening of the multiple openings in the housing 200 is located, for example, in a second accessible area of ​​the hand 136.

[0259] At least one of the multiple openings in the housing 200 is located, for example, within a first accessible area of ​​the hand 136 and is also located within a second accessible area of ​​the hand 136. The at least one opening is accessible to the hand 136 regardless of the arm system angle range.

[0260] According to the system 10 in an embodiment shown in Fig. 21, the openings of the housing 200 are arranged at positions accessible by the hand 136 regardless of the angle range of the arm system of the robot 100, so that the robot 100 can access the openings without changing the arm system. This makes it possible to realize a system with high throughput overall. In particular, by arranging an access target that is frequently accessed by the hand 136, such as a most frequent opening that is an opening that is most frequently accessed by the hand 136 among the openings of the housing 200, at a position accessible by the hand 136 regardless of the angle range of the arm system, it is possible to realize a system with higher throughput.

[0261] 22 is an explanatory diagram for explaining an example of the operation of the robot 100 placed in the housing 200. Here, an example of the operation for changing the hand system of the robot 100 will be mainly explained.

[0262] The housing 200 has a thickness of, for example, θ Hd The housing 200 has a portion for changing the access target. The portion is, for example, a hole. The hole forms, for example, a recess in the wall of the housing 200 without penetrating the wall of the housing 200. In this case, the hole is a blind hole. The hole may penetrate the wall of the housing 200. In this case, the hole is a through hole. The portion may be an example of an access target.

[0263] The portion is located, for example, on the front wall 210 side. The portion is located, for example, above the cassette 220. The portion is located, for example, below the cassette 220. The portion is located, for example, to the left of the cassette 221. The portion may be located to the right of the cassette 225. The portion may be located on the rear wall 230 side. The portion is located, for example, above the load lock chamber 240 or the cassette 220. The portion is located, for example, below the load lock chamber 240 or the cassette 220. The portion is located, for example, to the left of the load lock chamber 241 or the leftmost cassette 220. The portion may be located to the right of the load lock chamber 243 or the rightmost cassette 220. In FIG. 22 , the portion is arranged such that θ Hd 2 illustrates an example of a housing 200 having a portion 212 for changing the

[0264] The robot 100 may, for example, rotate at θ Hd The robot 100 changes, for example, θ Hd The robot 100 changes the angle range of θ between a first endoscope system angle range and a second endoscope system angle range. Hd The robot 100 changes the angle range of θ Hd By changing θ from 0° to -180°, HdThe robot 100 changes the angle range of θ Hd The robot 100 changes the angle range of θ Hd By changing θ from -180° to 0°, Hd The angle range of is changed from the first hand system angle range to the second hand system angle range.

[0265] The portion 212 has a space where, for example, the robot 100 can change the hand system by rotating only the hand 136. The robot 100 changes the hand system by rotating only the hand 136 in the portion 212. This allows the robot 100 to change the hand system in a short time, thereby achieving a system with high throughput overall.

[0266] Fig. 23 is an explanatory diagram for explaining another example of the operation of the robot 100 placed in the housing 200. Here, differences from Fig. 22 will be mainly explained.

[0267] The front wall 210 of the housing 200 has a thickness of, for example, θ Hd The robot 100 has a portion 214 for changing θ Hd The angle range of the hand system is changed between a first hand system angle range and a second hand system angle range.

[0268] The portion 214 has a space in which the robot 100 can change the hand system by, for example, cooperatively operating the hand 136 and the first movable unit 120. The cooperative operation of the hand 136 and the first movable unit 120 includes, for example, cooperative operation of the hand 136 and the first arm 122. The cooperative operation of the hand 136 and the first movable unit 120 includes, for example, cooperative operation of the hand 136 and the second arm 124. The cooperative operation of the hand 136 and the first movable unit 120 may include cooperative operation of the hand 136, the first arm 122, and the second arm 124.

[0269] The space required to change the hand system of the robot 100 by the cooperative operation of the hand 136 and the first movable part 120 is smaller than the space required to change the hand system of the robot 100 by rotating only the hand 136. Therefore, the space of the casing 200 required to change the hand system of the robot 100 can be saved, and the access target can be placed in that space. As a result, a system with a high degree of freedom in the design of the casing can be realized.

[0270] Fig. 24 is an explanatory diagram for explaining another example of the operation of the robot 100 disposed in the housing 200. Here, differences from Figs. 22 and 23 will be mainly described.

[0271] The robot 100 changes the end effector system within an opening for accessing the cassette 220, which is provided in the front wall 210, for example. The opening for accessing the cassette 220 is defined by a distance θ Hd This may be an example of a part for changing the

[0272] By changing the hand system of the robot 100 within the opening for accessing the cassette 220, the robot 100 can change the hand system even in the housing 200 that does not have the portion 212 or the portion 214. This can further save space in the housing 200, and as a result, a system with a higher degree of freedom in the design of the housing can be realized.

[0273] 25 shows an example of a schematic functional configuration of the robot 100. The robot 100 includes an acquisition unit 151, a control unit 152, an information storage unit 154, a collaborative operation selection unit 156, a condition storage unit 158, and a condition selection unit 160. Note that it is not essential that the robot 100 includes all of these components.

[0274] The acquisition unit 151 acquires various information. For example, the acquisition unit 151 acquires various information by receiving various information from an external device. The acquisition unit 151 may acquire various information by accepting input from a user of the robot 100 via an input unit included in the robot 100. The user of the robot 100 is, for example, an administrator of the system 10.

[0275] The acquisition unit 151 acquires, for example, access processing information indicating an access processing for making the hand 136 access an access target. The access processing information includes, for example, access target information indicating the access target. The access processing information includes, for example, access target position information indicating the position of the access target.

[0276] The control unit 152 controls a control target, for example, the robot 100.

[0277] The control unit 152 controls the control target by, for example, transmitting a control signal to the control target. The control unit 152 transmits the control signal to the control target, for example, via a network. The control unit 152 transmits the control signal to the control target, for example, via a wired network. For example, if the control target of the control unit 152 is the robot 100, the control unit 152 transmits the control signal to the robot 100 via the cable and connector unit 1148. The control unit 152 transmits the control signal to the control target, for example, via a wireless network. The control unit 152 transmits the control signal to the control target, for example, via a wireless network that complies with a short-range wireless communication method such as Wi-Fi (registered trademark), Bluetooth (registered trademark), and Zigbee (registered trademark). The control unit 152 may transmit the control signal to the control target via the Internet.

[0278] The control unit 152 is, for example, externally attached to the robot 100. The control unit 152 may be built into the robot 100. The control unit 152 is, for example, built into the first side surface portion 112. The control unit 152 is built into the second side surface portion 114. The control unit 152 may be built into any other part of the robot 100.

[0279] The control unit 152 controls, for example, the robot arm. The control unit 152 controls, for example, the robot arm to extend the robot arm. The control unit 152 may control the robot arm to bend the robot arm.

[0280] The control unit 152 controls, for example, the first movable unit 120. The control unit 152 controls, for example, the second movable unit 130. The control unit 152 controls, for example, the first movable unit 120 and the second movable unit 130.

[0281] The control unit 152 controls the first movable unit 120, for example, by controlling a motor that rotates the first rotating shaft 101. The control unit 152 controls a motor that rotates the first rotating shaft 101, for example, to drive the motor that rotates the first rotating shaft 101. For example, when the motor that rotates the first rotating shaft 101 is a servo motor, the control unit 152 further controls a speed reduction mechanism in addition to the servo motor. The control unit 152 controls the first movable unit 120, for example, by controlling a motor that rotates the second rotating shaft 103. For example, the control unit 152 controls a motor that rotates the second rotating shaft 103, for example, to drive the motor that rotates the second rotating shaft 103. For example, when the motor that rotates the second rotating shaft 103 is a servo motor, the control unit 152 further controls a speed reduction mechanism in addition to the servo motor.

[0282] The control unit 152 controls the second movable unit 130, for example, by controlling a motor that rotates the third rotating shaft 105. The control unit 152 controls the motor that rotates the third rotating shaft 105, for example, to drive the motor that rotates the third rotating shaft 105. For example, when the motor that rotates the third rotating shaft 105 is a servo motor, the control unit 152 further controls a reduction mechanism in addition to the servo motor. The control unit 152 controls the second movable unit 130, for example, by controlling a motor that rotates the fourth rotating shaft 107. The control unit 152 controls the motor that rotates the fourth rotating shaft 107, for example, to drive the motor that rotates the fourth rotating shaft 107. The control unit 152 controls the second movable unit 130, for example, by controlling a motor that rotates the fifth rotating shaft 109. The control unit 152 controls the motor that rotates the fifth rotating shaft 109, for example, to drive the motor that rotates the fifth rotating shaft 109.

[0283] The control unit 152 controls, for example, the posture of the robot 100. The control unit 152 controls, for example, the operation of the robot 100.

[0284] The control unit 152 controls the robot 100 to access the access target, for example. The control unit 152 controls the robot 100 to access the access target, for example, based on the access processing information acquired by the acquisition unit 151.

[0285] The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, to access one or more openings in the housing 200. The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, to cause the hand 136 to access one or more openings in the housing 200 while the hand 136 is parallel to a horizontal plane.

[0286] The control unit 152, for example, B1 The control unit 152 controls the first movable unit 120 and the second movable unit 130 so as to allow the hand 136 to access the access target while maintaining a state in which θ satisfies a predetermined angle condition. 12 The control unit 152 controls the first movable unit 120 and the second movable unit 130 so as to allow the hand 136 to access the access target while maintaining a state in which θ satisfies a predetermined angle condition. 2B The control unit 152 controls the first movable unit 120 and the second movable unit 130 so as to allow the hand 136 to access the access target while maintaining a state in which θ satisfies a predetermined angle condition. 3H The control unit 152 controls the first movable unit 120 and the second movable unit 130 so as to allow the hand 136 to access the access target while maintaining a state in which θ satisfies a predetermined angle condition. 3d The control unit 152 controls the first movable unit 120 and the second movable unit 130 so as to allow the hand 136 to access the access target while maintaining a state in which θ satisfies a predetermined angle condition.Hd The control unit 152 controls the first movable unit 120 and the second movable unit 130 so as to allow the hand 136 to access the access target while maintaining a state in which θ satisfies a predetermined angle condition. B1 , θ 12 , θ 2B , θ 3H , θ 3d and θ Hd The first movable part 120 and the second movable part 130 are controlled so that the hand 136 can access the access target while maintaining a state in which two or more angles among θ satisfy the angle condition. B1 The angle condition of θ 12 The angle condition of θ is sometimes referred to as the elbow angle condition. 2B The angle condition of θ is sometimes referred to as the wrist system angle condition. 3H The angle condition of θ is sometimes referred to as the hand angle condition. 3d The angle condition of θ is sometimes referred to as the hand system angle condition. Hd The above angle condition may be referred to as the hand-based angle condition.

[0287] The control unit 152 controls the robot 100, for example, to take out the wafer 50, which is an example of a moving target, from the access target. The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, to take out the wafer 50 from the access target while the hand 136 is parallel to a horizontal plane.

[0288] The control unit 152 controls the robot 100, for example, to hold the wafer 50. The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, to hold the wafer 50 in a state in which the hand 136 is parallel to a horizontal plane.

[0289] The control unit 152 controls the robot 100, for example, to transport the wafer 50 held by the hand 136. The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, to transport the wafer 50 in a state in which the wafer 50 held by the hand 136 is accommodated within the operation area 250. The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, to transport the wafer 50 in a state in which the wafer 50 held by the hand 136 is accommodated within the operation area 250, and to allow the hand 136 to access an opening in the housing 200 in a state in which the hand 136 is parallel to a horizontal plane.

[0290] The control unit 152 controls the second movable unit so that, for example, the width of the trajectory of the second movable unit 130 in a direction perpendicular to the vertical plane when the wafer 50 is transported falls within the width of the trajectory of the transported wafer 50 in a direction perpendicular to the vertical plane. The control unit 152 controls the second movable unit so that, for example, the width of the trajectories of the third arm 134 and the hand 136 in a direction perpendicular to the vertical plane when the wafer 50 is transported falls within the width of the trajectory of the transported wafer 50 in a direction perpendicular to the vertical plane. This makes it possible to realize a robot capable of transporting the wafer 50 in a space with a narrower width of the operating region 250. As a result, it is possible to realize a robot that can contribute to making the housing thinner.

[0291] The control unit 152, for example, determines whether the wafer 50 held by the hand 136 is within the operation area 250 and whether the wafer 50 is in the c w G mc The control unit 152 controls the first movable unit 120 and the second movable unit 130 so as to transport the wafer 50 while maintaining the wafer 50 in a state in which the wafer 50 is positioned above the wafer 50. w G mc The first movable part 120 and the second movable part 130 are controlled so as to translate the wafer 50 while maintaining the wafer 50 in an upright position.

[0292] The control unit 152 determines whether the wafer 50 held by the hand 136 is within the operation area 250 and whether the wafer 50 is within the operation area 250. 3d The control unit 152 controls the first movable unit 120 and the second movable unit 130 so as to transport the wafer 50 while maintaining a state in which the wafer 50 held by the hand 136 is within the operation area 250 and the wafer 50 is moved relative to the operation area 250 at an offset angle θ Hd The control unit 152 controls the first movable unit 120 and the second movable unit 130 so as to transport the wafer 50 while maintaining a state in which the wafer 50 is at a predetermined angle. 3d is the offset angle, and θ Hd The first movable part 120 and the second movable part 130 are controlled so as to transport the wafer 50 while maintaining the state in which the angle between the movable part 120 and the wafer 50 is set at a predetermined angle.

[0293] The robot 100 is 3d is the offset angle, or θ Hd By controlling the first movable part 120 and the second movable part 130 so as to transport the wafer 50 while maintaining a state in which the third arm 134 and the hand 136 are at a predetermined angle, the wafer 50 can be transported within the operating area 250 with the third arm 134 and the hand 136 at an angle to the direction in which the wafer 50 is transported. This makes it possible to realize a robot that can transport the wafer 50 in a space with a narrower width of the operating area 250. As a result, it is possible to realize a robot that can contribute to making the housing thinner.

[0294] The control unit 152 controls the robot 100, for example, to load the wafer 50 into the access target. The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, to load the wafer 50 into the access target with the hand 136 parallel to the horizontal plane.

[0295] The information storage unit 154 stores various information. The information storage unit 154 stores, for example, cooperative action related information in which the position of an access target is associated with a type of cooperative action of the robot 100 when accessing the position of the access target. The cooperative action related information, for example, associates each position of one or more openings in the front wall 210 and each position of one or more openings in the rear wall 230 with a type of cooperative action of the robot 100 when the hand 136 accesses each position of one or more openings in the front wall 210 and each position of one or more openings in the rear wall 230. The acquisition unit 151 may acquire the cooperative action related information and store the acquired cooperative action related information in the information storage unit 154.

[0296] The cooperative motion of the robot 100 includes, for example, cooperative motion of only the third arm 134 and the hand 136. The cooperative motion of the robot 100 includes, for example, cooperative motion of the third arm 134, the hand 136, and the first movable part 120. The cooperative motion of the robot 100 includes cooperative motion of the hand 136 and the first movable part 120.

[0297] The cooperative action selection unit 156 selects a cooperative action of the robot 100 when the robot 100 accesses an access target.

[0298] The cooperative operation selection unit 156 selects a cooperative operation of the robot 100 based on, for example, the position of the access target of the access by the hand 136 indicated by the access processing information acquired by the acquisition unit 151 and the cooperative operation related information stored in the information storage unit 154. The cooperative operation selection unit 156 selects, for example, whether to allow the hand 136 to access the access target by the cooperative operation of only the third arm 134 and the hand 136, or to allow the hand 136 to access the access target by the cooperative operation of the third arm 134, the hand 136, and the first movable unit 120. The control unit 152 may control the first movable unit 120 and the second movable unit 130 so that the cooperative operation of the robot 100 selected by the cooperative operation selection unit 156 allows the hand 136 to access the access target in a state in which the hand 136 is parallel to a horizontal plane.

[0299] When the hand 136 can access the access target by the cooperative operation of only the third arm 134 and the hand 136, which is a cooperative operation that can access the access target in a short time, the robot 100 selects the cooperative operation of only the third arm 134 and the hand 136 to access the access target. On the other hand, when the hand 136 cannot access the access target by the cooperative operation of only the third arm 134 and the hand 136, the robot 100 selects the cooperative operation of the third arm 134, the hand 136, and the first movable part 120 to access the access target. As a result, a robot that can achieve both high throughput and a wide accessible area can be realized. As a result, a robot that can contribute to the realization of a system that can manufacture more semiconductors per unit time can be realized.

[0300] Furthermore, since the third arm 134 and the hand 136 are components of the tip portion of the robot 100 compared to the first movable part 120, the cooperative operation of only the third arm 134 and the hand 136 gives less vibration to the robot 100 compared to the cooperative operation of the third arm 134, the hand 136, and the first movable part 120. Therefore, when the hand 136 can access the access target by the cooperative operation of only the third arm 134 and the hand 136, the cooperative operation of only the third arm 134 and the hand 136 is selected to access the access target, and when the hand 136 cannot access the access target by the cooperative operation of only the third arm 134 and the hand 136, the cooperative operation of the third arm 134, the hand 136, and the first movable part 120 is selected to access the access target, thereby realizing a robot that can achieve both safe access to the access target and a wide accessible area as a whole. As a result, a robot that can contribute to realizing a system with a high yield in semiconductor manufacturing can be realized.

[0301] Furthermore, when a motor capable of controlling the position with high precision, such as a DD motor, is used to control the third arm 134 and the hand 136, the cooperative operation of only the third arm 134 and the hand 136 is selected to access the access target when the hand 136 can access the access target through the cooperative operation of only the third arm 134 and the hand 136, and the cooperative operation of the third arm 134, the hand 136, and the first movable part 120 is selected to access the access target when the hand 136 cannot access the access target through the cooperative operation of only the third arm 134 and the hand 136, thereby realizing a robot that, as a whole, achieves both highly accurate access to the access target and a wide accessible area. As a result, a robot that can contribute to realizing a system capable of manufacturing higher quality semiconductors can be realized.

[0302] For example, when the hand 136 is to access each of a plurality of openings in the front wall 210, the cooperative operation selection unit 156 selects to have the hand 136 access the access target by cooperative operations of only the third arm 134 and the hand 136. For example, when the hand 136 is to access one opening of one or a plurality of openings in the rear wall 230, the cooperative operation selection unit 156 selects to have the hand 136 access the access target by cooperative operations of the third arm 134, the hand 136, and the first movable unit 120. For example, when the hand 136 is to access another opening of one or a plurality of openings in the rear wall 230, the cooperative operation selection unit 156 selects to have the hand 136 access the access target by cooperative operations of only the third arm 134 and the hand 136.

[0303] The condition storage unit 158 ​​stores the angle conditions. The condition storage unit 158 ​​stores angle conditions including, for example, a first candidate condition that the angle is included in a first angle range and a second candidate condition that the angle is included in a second angle range. The acquisition unit 151 may acquire the angle conditions and store the acquired angle conditions in the condition storage unit 158.

[0304] The condition storage unit 158 ​​stores, for example, arm system angle conditions. B1 is included in the first arm system angle range, and B1 and a second arm system candidate condition that is a condition that the arm system angle range is included in the second arm system angle range.

[0305] The condition storage unit 158 ​​stores, for example, elbow system angle conditions. The condition storage unit 158 ​​stores, for example, θ 12 The first elbow system candidate condition is that the first elbow system angle range is included in the first elbow system angle range, and θ 12 is included in the second elbow system angle range.

[0306] The condition storage unit 158 ​​stores, for example, wrist system angle conditions. The condition storage unit 158 ​​stores, for example, θ 2B is included in the first wrist system angle range, and 2B is included in the second wrist system angle range.

[0307] The condition storage unit 158 ​​stores, for example, hand system angle conditions. For example, θ 3H The first hand system candidate condition is that θ is included in the first hand system angle range. 3H is included in the second hand system angle range.

[0308] The condition storage unit 158 ​​stores, for example, the hand-held system angle condition. For example, θ 3d A first hand system candidate condition that is included in the first hand system angle range, and θ 3d and a second hand system candidate condition that is set so that the condition is that the second hand system angle range is included in the second hand system angle range.

[0309] The condition storage unit 158 ​​stores, for example, the hand system angle condition. For example, θHd A candidate condition for the first end-effect system is that the first end-effect system angle range is satisfied, and θ Hd is included in the second hand system angle range, and a second hand system candidate condition that satisfies the condition is stored.

[0310] The condition storage unit 158 ​​may store a PA access condition that must be satisfied when the hand 136 is allowed to access the PA 300. The PA access condition is, for example, when the hand 136 is allowed to access the PA 300, B1 The PA access condition includes an arm-based PA access condition that must be satisfied when the hand 136 is allowed to access the PA 300. 12 The PA access condition includes an elbow-based PA access condition that must be satisfied when the hand 136 is allowed to access the PA 300. 2B The PA access condition includes a wrist-based PA access condition that must be satisfied when the hand 136 is allowed to access the PA 300. 3H The PA access condition includes a hand-based PA access condition that must be satisfied when the hand 136 is allowed to access the PA 300. 3d The PA access condition includes a hand-based PA access condition that must be satisfied when the hand 136 is allowed to access the PA 300. Hd The PA access conditions include hand-based PA access conditions that must be satisfied. The PA access conditions include, for example, two or more of an arm-based PA access condition, an elbow-based PA access condition, a wrist-based PA access condition, a hand-based PA access condition, a hand-based PA access condition, and a hand-based PA access condition. The PA access conditions may be an example of an angle condition.

[0311] The most frequent opening is, for example, θ when the hand 136 is allowed to access the most frequent opening. B1 is located at a position that satisfies the arm system PA access condition. The most frequent opening is, for example, θ 12is located at a position that satisfies the elbow PA access condition. The most frequent opening is, for example, θ 2B is located at a position that satisfies the wrist system PA access condition. The most frequent opening is, for example, θ 3H is located at a position that satisfies the hand PA access condition. The most frequent opening is, for example, θ 3d is located at a position that satisfies the hand-side PA access condition. The most frequent opening is, for example, θ Hd is located at a position that satisfies the hand system PA access condition. This allows the hand 136 to access the most frequent opening and the PA 300 continuously without changing the angle condition, making it possible to realize a robot with high throughput. As a result, it is possible to realize a robot that can contribute to the realization of a system that can manufacture more semiconductors per unit time.

[0312] The most frequent opening is, for example, an opening in the front wall 210. The most frequent opening may be an opening in the rear wall 230.

[0313] The condition selection unit 160 selects an angle condition for the access process. For example, the condition selection unit 160 selects an angle condition for the access process indicated by the access process information acquired by the acquisition unit 151 from the first candidate condition and the second candidate condition included in the angle conditions stored in the condition storage unit 158, based on the position of the access target of the access by the hand 136 indicated by the access process information acquired by the acquisition unit 151. The control unit 152 controls the first movable unit 120 and the second movable unit 130 so as to allow the hand 136 to access the access target while maintaining a state in which the angle condition selected by the condition selection unit 160 is satisfied.

[0314] The condition selection unit 160 selects an arm system angle condition for the access process from, for example, the first arm system candidate condition and the second arm system candidate condition included in the arm system angle condition stored in the condition storage unit 158. The condition selection unit 160 selects an elbow system angle condition for the access process from, for example, the first elbow system candidate condition and the second elbow system candidate condition included in the elbow system angle condition stored in the condition storage unit 158. The condition selection unit 160 selects a wrist system angle condition for the access process from, for example, the first wrist system candidate condition and the second wrist system candidate condition included in the wrist system angle condition stored in the condition storage unit 158. The condition selection unit 160 selects a hand system angle condition for the access process from, for example, the first hand system candidate condition and the second hand system candidate condition included in the hand system angle condition stored in the condition storage unit 158. The condition selection unit 160 selects a hand system angle condition for the access process from, for example, the first hand system candidate condition and the second hand system candidate condition included in the hand system angle condition stored in the condition storage unit 158. The condition selection unit 160 selects a hand system angle condition for access processing from, for example, the first hand system candidate condition and the second hand system candidate condition included in the hand system angle condition stored in the condition storage unit 158. The condition selection unit 160 selects, for example, as the angle condition for access processing, two or more of an arm system angle condition for access processing, an elbow system angle condition for access processing, a wrist system angle condition for access processing, a hand system angle condition for access processing, a hand system angle condition for access processing, and a hand system angle condition for access processing.

[0315] The condition selection unit 160 selects, for example, a position where the access target is located on the side wall side of the housing 200 and the angle θ B1 is included in the first arm system angle range, the first arm system candidate condition is selected as the arm system angle condition for the access process.

[0316] The condition selection unit 160 selects, for example, a position where the access target is located on the side wall side of the housing 200 and the angle θ 12 is included in the first elbow system angle range, the first elbow system candidate condition is selected as the elbow system angle condition for the access process.

[0317] The condition selection unit 160 selects, for example, a position where the access target is located on the side wall side of the housing 200 and the angle θ 2B is included in the first wrist system angle range, the first wrist system candidate condition is selected as the wrist system angle condition for the access process.

[0318] The condition selection unit 160 selects, for example, a position where the access target is located on the side wall side of the housing 200 and the angle θ 3H is included in the first hand-system angle range, the first hand-system candidate condition is selected as the hand-system angle condition for the access process.

[0319] The condition selection unit 160 selects, for example, a position where the access target is located on the side wall side of the housing 200 and the angle θ 3d is included in the first hand-system angle range, the first hand-system candidate condition is selected as the hand-system angle condition for the access process.

[0320] The condition selection unit 160 selects, for example, a position where the access target is located on the side wall side of the housing 200 and the angle θ Hd is included in the first hand system angle range, the first hand system candidate condition is selected as the hand system angle condition for the access process.

[0321] For example, when the condition selecting unit 160 selects the first arm system candidate condition as the arm system angle condition for the first access process, θ B1 is included in the first arm system angle range, the hand 136 is able to access the access target of the second access process which is the access process following the first access process, the first arm system candidate condition is selected as the arm system angle condition of the second access process, and θ B1is included in the first arm system angle range and the hand 136 cannot access the access target of the second access process. When the condition selection unit 160 selects the second arm system candidate condition as the arm system angle condition of the second access process, the control unit 152 selects the second arm system candidate condition as the arm system angle condition of the second access process. B1 The control unit 152 may control the first movable unit 120 and the second movable unit 130 so as to change θ from the first arm system angle range to the second arm system angle range. For example, the control unit 152 may change θ B1 By changing θ from an angle greater than 0° to an angle less than 0°, B1 The first movable unit 120 and the second movable unit 130 are controlled so as to change the angle range of the arm system from the first arm system angle range to the second arm system angle range.

[0322] The condition selection unit 160 selects, for example, θ B1 is included in the first arm system angle range, the hand 136 is able to access the access target of the third access process, which is the access process following the second access process. The condition selection unit 160 selects the first arm system candidate condition as the arm system angle condition for the third access process. B1 is included in the second arm system angle range and the hand 136 is accessible to the access target of the third access process, the second arm system candidate condition is selected as the arm system angle condition for the third access process.

[0323] For example, when the condition selection unit 160 selects the first elbow system candidate condition as the elbow system angle condition for the first access process, θ 12 is included in the first elbow system angle range, the hand 136 is able to access the access target of the second access process, which is the access process following the first access process, the first elbow system candidate condition is selected as the elbow system angle condition of the second access process, and θ 12When the hand 136 cannot access the access target of the second access process in a state where θ is included in the first elbow system angle range, the control unit 152 selects the second elbow system candidate condition as the elbow system angle condition of the second access process when the condition selection unit 160 selects the second elbow system candidate condition as the elbow system angle condition of the second access process. 12 The control unit 152 may control the first movable unit 120 and the second movable unit 130 to change θ from the first elbow system angle range to the second elbow system angle range. For example, in the space inside the housing 200 where the first movable unit 120 can be extended to the maximum extent without interference between the third arm 134 or the hand 136 and objects around the robot 100 such as the housing 200, the control unit 152 changes the first movable unit 120 from a state in which the first movable unit 120 is extended in a positive rotation direction to a state in which the first movable unit 120 is extended in a negative rotation direction, thereby changing θ 12 The first movable unit 120 and the second movable unit 130 are controlled so as to change the angle range of the arm system from the first arm system angle range to the second arm system angle range.

[0324] The condition selection unit 160 selects, for example, θ 12 is included in the first elbow system angle range, the hand 136 can access the access target of the third access process, which is the access process following the second access process. The condition selection unit 160 selects the first elbow system candidate condition as the elbow system angle condition for the third access process. 12 When the hand 136 is able to access the access target of the third access process while being included in the second elbow system angle range, the second elbow system candidate condition is selected as the elbow system angle condition for the third access process.

[0325] For example, when the condition selection unit 160 selects the first wrist system candidate condition as the wrist system angle condition of the first access process, θ 2B is included in the first wrist system angle range, the hand 136 is able to access the access target of the second access process that is the next access process after the first access process, the first wrist system candidate condition is selected as the wrist system angle condition of the second access process, and θ 2BWhen the hand 136 cannot access the access target of the second access process in a state where θ is included in the first wrist system angle range, the control unit 152 selects the second wrist system candidate condition as the wrist system angle condition of the second access process when the condition selection unit 160 selects the second wrist system candidate condition as the wrist system angle condition of the second access process. 2B The control unit 152 may control the first movable unit 120 and the second movable unit 130 so as to change the angle range of the third arm 134 or the hand 136 from the first wrist system angle range to the second wrist system angle range. For example, the control unit 152 may control the third arm 134 or the hand 136 so as to change the angle range of the third arm 134 or the hand 136 from the first wrist system angle range to the second wrist system angle range without causing interference between the third arm 134 or the hand 136 and objects around the robot 100, such as the housing 200. 23 The direction of the vector parallel to l 4p The rotation direction of the second base 132 is changed from a state in which the second base 132 is rotated in a positive direction to a state in which the second base 132 is rotated in a negative direction, so that the rotation direction of the second base 132 is changed from a state in which the second base 132 is rotated in a positive direction to a state in which the second base 132 is rotated in a negative direction. 2B The first movable part 120 and the second movable part 130 are controlled so as to change the angle range from the first wrist system angle range to the second wrist system angle range.

[0326] The condition selection unit 160 selects, for example, θ 2B is included in the first wrist system angle range, the hand 136 can access the access target of the third access process, which is the access process following the second access process. The condition selection unit 160 selects the first wrist system candidate condition as the wrist system angle condition for the third access process. 2B is included in the second wrist system angle range and the hand 136 is accessible to the access target of the third access process, the second wrist system candidate condition is selected as the wrist system angle condition for the third access process.

[0327] For example, when the condition selection unit 160 selects the first-hand-system candidate condition as the first-hand-system angle condition for the first access process, θ 3H is included in the first hand-system angle range, the hand 136 is able to access the access target of the second access process that is the next access process after the first access process, the first hand-system candidate condition is selected as the hand-system angle condition of the second access process, and θ 3His included in the first hand-system angle range and the hand 136 cannot access the access target of the second access process. When the condition selection unit 160 selects the second hand-system candidate condition as the hand-system angle condition of the second access process, the control unit 152 selects the second hand-system candidate condition as the hand-system angle condition of the second access process. 3H from the first hand-system angle range to the second hand-system angle range.

[0328] For example, when the housing 200 has the portion 212, the control unit 152 rotates only the hand 136 to rotate the portion 212 at an angle θ 3H from the first hand-system angle range to the second hand-system angle range. For example, in the case where the housing 200 has the portion 214, the control unit 152 controls the hand 136 and the first movable unit 120 to cooperate with each other to change θ at the portion 214. 3H The control unit 152 controls the hand 136 and the first movable unit 120 to change θ at the opening for access to the cassette 220 by cooperatively operating the hand 136 and the first movable unit 120. 3H may be controlled to change the angle range from the first hand-system angle range to the second hand-system angle range.

[0329] The control unit 152 is configured to adjust the angle θ 3H from the first hand-system angle range to the second hand-system angle range. The control unit 152 may control the third arm 134, the hand 136, and the first movable unit 120 to, for example, extend the robot arm within the operating area 250 toward the side wall of the housing 200 by cooperatively operating the third arm 134, the hand 136, and the first movable unit 120, and then bend the extended robot arm within the operating area 250 to change θ 3H Change from the first hand system angle range to the second hand system angle range.

[0330] The condition selection unit 160 selects, for example, θ 3His included in the first hand-system angle range, the hand 136 can access the access target of the third access process, which is the access process following the second access process. The condition selection unit 160 selects the first hand-system candidate condition as the hand-system angle condition for the third access process. 3H is included in the second angle range and the hand 136 is able to access the access target of the third access process, the second hand system candidate condition is selected as the hand system angle condition for the third access process.

[0331] For example, when the condition selection unit 160 selects the first hand-held angle condition as the hand-held angle condition for the first access process, the condition selection unit 160 selects θ 3d is included in the first hand-system angle range, the hand 136 is able to access the access target of the second access process, which is the access process following the first access process, the first hand-system candidate condition is selected as the hand-system angle condition of the second access process, and θ 3d is included in the first hand-held angle range and the hand 136 cannot access the access target of the second access process. When the control unit 152 selects the second hand-held angle candidate condition as the hand-held angle condition of the second access process, the control unit 152 selects the θ 3d The part for changing θ 3d The first movable part 120 and the second movable part 130 are controlled so as to change the angle range of the hand-held system from the first angle range of the hand-held system to the second angle range of the hand-held system.

[0332] For example, when the housing 200 has the portion 212, the control unit 152 rotates only the third arm 134 to rotate the portion 212 by θ 3d The control unit 152 controls the third arm 134 so as to change θ 3d By changing θ from 0° to -180° 3dThe control unit 152 controls the third arm 134 so as to change the angle range of θ at the part 214 by cooperatively operating the third arm 134 and the first movable unit 120, for example, when the housing 200 has the part 214. 3d The control unit 152 controls the third arm 134 and the first movable unit 120 so as to change the angle θ at the opening for accessing the cassette 220 from the first hand-held system angle range to the second hand-held system angle range. 3d The third arm 134 and the first movable part 120 may be controlled so as to change the angle range from the first hand-held system angle range to the second hand-held system angle range.

[0333] The condition selection unit 160 selects, for example, θ 3d is included in the first hand-system angle range, the hand 136 can access the access target of the third access process, which is the access process following the second access process. In this state, the condition selection unit 160 selects the first hand-system candidate condition as the hand-system angle condition for the third access process. 3d is included in the second hand-system angle range and the hand 136 is able to access the access target of the third access process, the second hand-system candidate condition is selected as the hand-system angle condition for the third access process.

[0334] For example, when the condition selection unit 160 selects the first hand end system candidate condition as the hand end system angle condition of the first access process, θ Hd is included in the first hand end system angle range, the hand 136 is able to access the access target of the second access process, which is the access process following the first access process, select the first hand end system candidate condition as the hand end system angle condition of the second access process, and Hd is included in the first hand system angle range and the hand 136 cannot access the access target of the second access process. When the control unit 152 selects the second hand system candidate condition as the hand system angle condition of the second access process, the control unit 152 selects the θ HdThe part for changing θ Hd from the first endoscope system angle range to the second endoscope system angle range.

[0335] For example, when the housing 200 has the portion 212, the control unit 152 rotates only the hand 136 to rotate the portion 212 at an angle θ Hd from the first hand system angle range to the second hand system angle range. For example, in the case where the housing 200 has the portion 214, the control unit 152 controls the hand 136 and the first movable unit 120 to cooperate with each other to change θ at the portion 214. Hd The control unit 152 controls the hand 136 and the first movable unit 120 to change the angle θ at the opening for accessing the cassette 220 by cooperatively operating the hand 136 and the first movable unit 120. Hd may be controlled to change the angle range of the hand 136 and the first movable section 120 from the first endoscope angle range to the second endoscope angle range.

[0336] The condition selection unit 160 selects, for example, θ Hd is included in the first hand system angle range, the hand 136 can access the access target of the third access process, which is the access process following the second access process. In this state, the condition selection unit 160 selects the first hand system candidate condition as the hand system angle condition for the third access process. Hd is included in the second hand system angle range and the hand 136 is able to access the access target of the third access process, the second hand system candidate condition is selected as the hand system angle condition of the third access process.

[0337] When the robot 100 can access the access target of the second access process without changing the angle condition of the first access process, it accesses the access target of the second access process without changing the angle condition in order to access the access target of the second access process in a short time, and when the robot 100 cannot access the access target of the second access process without changing the angle condition of the first access process, it accesses the access target of the second access process after changing the angle condition. As a result, a robot that achieves both high throughput and a wide accessible area can be realized overall.

[0338] Then, when the robot 100 accesses the access target of the second access process after changing the angle condition, if the robot 100 can access the access target of the third access process under the angle condition before the change, the robot 100 accesses the access target of the third access process after returning the angle condition before the change. This allows the robot 100 to access the access target by giving higher priority to accessing the access target as much as possible under the angle condition that is the reference for accessing the access target. In particular, by positioning a plurality of openings with high access frequency, such as the most frequent opening, at a position that allows access under the reference angle condition, a robot that can contribute to realizing a system with high throughput as a whole can be realized.

[0339] Furthermore, when the robot 100 accesses the access target of the second access process after changing the angle condition, if the robot 100 can access the access target of the third access process under the changed angle condition, the robot 100 accesses the access target of the third access process under the changed angle condition. This allows the robot 100 to access the access target by giving priority to not changing the angle condition as much as possible. In particular, by positioning an opening with a high access frequency, such as the most frequent opening, at a position that allows access regardless of the angle condition, a robot that can contribute to realizing a system with high throughput as a whole can be realized.

[0340] The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, so that the first movable unit 120 passes through a space between the inner surface 1121 of the first side surface unit 112 and the inner surface 1141 of the second side surface unit 114. For example, the control unit 152 controls the third rotating shaft 105 and the second movable unit 130 to move in a direction perpendicular to the axis of rotation of the second rotating shaft 103, when the altitude of the second rotating shaft 103 is lower than the altitude of the first rotating shaft 101. B1 The second rotation axis 103 does not pass through p B1 The first movable part 120 and the second movable part 130 are controlled so as to pass through.

[0341] The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, to allow the hand 136 to access the PA 300. The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, to allow the hand 136 to access the PA 300 while the hand 136 is parallel to a horizontal plane. The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, to allow the hand 136 to access the PA 300 while the wafer 50 held by the hand 136 is within the operating area 250 and while the hand 136 is parallel to a horizontal plane.

[0342] The control unit 152 may have a function of controlling the entire system 10. The control unit 152 controls, for example, a cassette opener. The control unit 152 controls, for example, the opening and closing of the cassette opener.

[0343] The control unit 152 controls, for example, the load lock chamber 240. The control unit 152 controls the load lock chamber 240 by controlling, for example, a gate valve included in the load lock chamber 240.

[0344] For example, in a state where both the gate valve on the EFEM side and the gate valve on the processing chamber side are sealed, the control unit 152 controls the gate valve on the EFEM side to open the gate valve on the EFEM side in order to move the wafer 50 between the EFEM and the load lock chamber 240. Thereafter, in response to the wafer 50 being loaded from the EFEM into the load lock chamber 240 or the wafer 50 being removed from the load lock chamber 240, the control unit 152 may control the gate valve on the EFEM side to close the open gate valve on the EFEM side.

[0345] For example, in a state where both the gate valve on the EFEM side and the gate valve on the processing chamber side are sealed, the control unit 152 controls the gate valve on the processing chamber side to open the gate valve on the processing chamber side in order to move the wafer 50 between the load lock chamber 240 and the processing chamber. After that, in response to the wafer 50 being loaded from the processing chamber into the load lock chamber 240 or the wafer 50 being removed from the load lock chamber 240, the control unit 152 may control the gate valve on the processing chamber side to close the open gate valve on the processing chamber side.

[0346] The control unit 152 controls the load lock chamber 240, for example, by controlling the pressure inside the load lock chamber 240. The control unit 152 controls the pressure state inside the load lock chamber 240 to atmospheric pressure, for example. The control unit 152 controls the pressure state inside the load lock chamber 240 to reduced pressure, for example.

[0347] The control unit 152 may control the PA 300. The control unit 152 controls, for example, a rotation table of the PA 300. The control unit 152 controls, for example, the rotation table of the PA 300 so as to rotate the wafer 50 in a desired orientation.

[0348] 26 is an explanatory diagram for explaining an example of the flow of processing by the robot 100. Here, the description will be given assuming that the robot 100 is in a start state in which it has not yet acquired access processing information.

[0349] In step (step may be abbreviated as S) 102, the acquisition unit 151 acquires access processing information. In S104, the cooperative action selection unit 156 selects a cooperative action of the robot 100 based on the access processing information acquired by the acquisition unit 151 in S102 and the cooperative action related information stored in the information storage unit 154. Here, the explanation will be continued assuming that the access target indicated by the access processing information is an opening of the housing 200.

[0350] In S106, the control unit 152 determines whether or not the cooperative motion of the robot 100 selected by the cooperative motion selection unit 156 in S104 is a cooperative motion of only the third arm 134 and the hand 136. If the control unit 152 determines that it is a cooperative motion of only the third arm 134 and the hand 136, the process proceeds to S108. If the control unit 152 determines that it is not a cooperative motion of only the third arm 134 and the hand 136, the process proceeds to S110.

[0351] In S108, the control unit 152 controls the first movable unit 120 and the second movable unit 130 so that the hand 136 can access the access target in a state where the hand 136 is parallel to the horizontal plane by cooperative operation of only the third arm 134 and the hand 136. Thereafter, the processing of the robot 100 ends.

[0352] In S110, the control unit 152 controls the first movable unit 120 and the second movable unit 130 so that the third arm 134, the hand 136, and the first movable unit 120 cooperate to make the hand 136 access the access target while the hand 136 is parallel to the horizontal plane. Then, the processing of the robot 100 ends.

[0353] 27 shows a schematic diagram of an example of a hardware configuration of a computer 1200 functioning as the robot 100. A program installed in the computer 1200 can cause the computer 1200 to function as one or more "parts" of the apparatus according to the above embodiment, or cause the computer 1200 to execute operations or one or more "parts" associated with the apparatus according to the above embodiment, and / or cause the computer 1200 to execute a process or steps of the process according to the above embodiment. Such a program can be executed by the CPU 1212 to cause the computer 1200 to execute specific operations associated with some or all of the blocks of the flowcharts and block diagrams described herein.

[0354] The computer 1200 according to this embodiment includes a CPU 1212, a RAM 1214, and a graphics controller 1216, which are connected to each other by a host controller 1210. The computer 1200 also includes input / output units such as a communication interface 1222, a storage device 1224, a DVD drive, and an IC card drive, which are connected to the host controller 1210 via an input / output controller 1220. The DVD drive may be a DVD-ROM drive, a DVD-RAM drive, etc. The storage device 1224 may be a hard disk drive, a solid state drive, etc. The computer 1200 also includes a legacy input / output unit such as a ROM 1230 and a keyboard, which are connected to the input / output controller 1220 via an input / output chip 1240.

[0355] The CPU 1212 operates according to a program stored in the ROM 1230 and the RAM 1214, thereby controlling each unit. The graphic controller 1216 acquires image data generated by the CPU 1212 into a frame buffer or the like provided in the RAM 1214 or into itself, and causes the image data to be displayed on the display device 1218.

[0356] The communication interface 1222 communicates with other electronic devices via a network. The storage device 1224 stores programs and data used by the CPU 1212 in the computer 1200. The DVD drive reads programs or data from a DVD-ROM or the like and provides them to the storage device 1224. The IC card drive reads programs and data from an IC card and / or writes programs and data to an IC card.

[0357] The ROM 1230 stores therein a boot program or the like that is executed by the computer 1200 upon activation, and / or a program that depends on the hardware of the computer 1200. The input / output chip 1240 may also connect various input / output units to the input / output controller 1220 via a USB port, a parallel port, a serial port, a keyboard port, a mouse port, and the like.

[0358] The programs are provided by a computer-readable storage medium such as a DVD-ROM or an IC card. The programs are read from the computer-readable storage medium, installed in the storage device 1224, the RAM 1214, or the ROM 1230, which are also examples of computer-readable storage media, and executed by the CPU 1212. Information processing described in these programs is read by the computer 1200, and brings about cooperation between the programs and the various types of hardware resources described above. An apparatus or method may be constructed by implementing operations or processing of information according to the use of the computer 1200.

[0359] For example, when communication is performed between the computer 1200 and an external device, the CPU 1212 may execute a communication program loaded in the RAM 1214 and instruct the communication interface 1222 to perform communication processing based on the processing described in the communication program. Under the control of the CPU 1212, the communication interface 1222 reads transmission data stored in a transmission buffer area provided in the RAM 1214, the storage device 1224, a DVD-ROM, or a recording medium such as an IC card, and transmits the read transmission data to the network, or writes reception data received from the network to a reception buffer area or the like provided on the recording medium.

[0360] Furthermore, the CPU 1212 may cause all or a necessary portion of a file or database stored in an external recording medium such as the storage device 1224, a DVD drive (DVD-ROM), an IC card, etc. to be read into the RAM 1214, and perform various types of processing on the data on the RAM 1214. The CPU 1212 may then write back the processed data to the external recording medium.

[0361] Various types of information, such as various types of programs, data, tables, and databases, may be stored in the recording medium and undergo information processing. The CPU 1212 may perform various types of processing on the data read from the RAM 1214, including various types of operations, information processing, conditional judgment, conditional branching, unconditional branching, information search / replacement, etc., as described throughout this disclosure and specified by the instruction sequence of the program, and write back the results to the RAM 1214. The CPU 1212 may also search for information in a file, database, etc. in the recording medium. For example, when a plurality of entries each having an attribute value of a first attribute associated with an attribute value of a second attribute are stored in the recording medium, the CPU 1212 may search for an entry whose attribute value of the first attribute matches a specified condition from among the plurality of entries, read the attribute value of the second attribute stored in the entry, and thereby obtain the attribute value of the second attribute associated with the first attribute that satisfies a predetermined condition.

[0362] The above-described programs or software modules may be stored in a computer-readable storage medium on the computer 1200 or in the vicinity of the computer 1200. In addition, a recording medium such as a hard disk or a RAM provided in a server system connected to a dedicated communication network or the Internet can be used as a computer-readable storage medium, thereby providing the programs to the computer 1200 via the network.

[0363] The blocks in the flowcharts and block diagrams in the present embodiment may represent stages of a process in which an operation is performed or "parts" of an apparatus responsible for performing the operation. Particular stages and "parts" may be implemented by dedicated circuitry, programmable circuitry provided with computer-readable instructions stored on a computer-readable storage medium, and / or a processor provided with computer-readable instructions stored on a computer-readable storage medium. The dedicated circuitry may include digital and / or analog hardware circuits, and may include integrated circuits (ICs) and / or discrete circuits. The programmable circuitry may include reconfigurable hardware circuits, such as, for example, field programmable gate arrays (FPGAs), programmable logic arrays (PLAs), and the like, including AND, OR, XOR, NAND, NOR, and other logical operations, flip-flops, registers, and memory elements.

[0364] A computer-readable storage medium may include any tangible device capable of storing instructions that are executed by a suitable device, such that a computer-readable storage medium having instructions stored thereon comprises an article of manufacture that includes instructions that can be executed to create means for performing the operations specified in the flowcharts or block diagrams. Examples of computer-readable storage media may include electronic storage media, magnetic storage media, optical storage media, electromagnetic storage media, semiconductor storage media, and the like. More specific examples of computer-readable storage media may include floppy disks, diskettes, hard disks, random access memories (RAMs), read-only memories (ROMs), erasable programmable read-only memories (EPROMs or flash memories), electrically erasable programmable read-only memories (EEPROMs), static random access memories (SRAMs), compact disk read-only memories (CD-ROMs), digital versatile disks (DVDs), Blu-ray disks, memory sticks, integrated circuit cards, and the like.

[0365] The computer readable instructions may include either assembler instructions, instruction set architecture (ISA) instructions, machine instructions, machine-dependent instructions, microcode, firmware instructions, state setting data, or source or object code written in any combination of one or more programming languages, including object-oriented programming languages ​​such as Smalltalk®, JAVA®, C++, etc., and conventional procedural programming languages ​​such as the “C” programming language or similar programming languages.

[0366] Computer readable instructions may be provided to a processor of a general purpose computer, special purpose computer, or other programmable data processing apparatus, or to a programmable circuit, either locally or over a local area network (LAN), a wide area network (WAN), such as the Internet, etc., to cause the processor of the general purpose computer, special purpose computer, or other programmable data processing apparatus, or to a programmable circuit, to execute the computer readable instructions to generate means for performing the operations specified in the flowcharts or block diagrams. Examples of processors include computer processors, processing units, microprocessors, digital signal processors, controllers, microcontrollers, etc.

[0367] Although the present invention has been described above using the embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It is clear to those skilled in the art that various modifications and improvements can be made to the above embodiments. It is clear from the description of the claims that such modifications and improvements can also be included in the technical scope of the present invention.

[0368] It should be noted that the order of execution of each process, such as operations, procedures, steps, and stages, in the devices, systems, programs, and methods shown in the claims, specifications, and drawings is not specifically stated as "before" or "prior to," and that the process may be performed in any order unless the output of a previous process is used in a later process. Even if the operational flow in the claims, specifications, and drawings is described using "first," "next," etc. for convenience, it does not mean that the process must be performed in this order. [Explanation of symbols]

[0369] 10 system, 50 wafer, 100 robot, 101 first rotation axis, 103 second rotation axis, 105 third rotation axis, 107 fourth rotation axis, 109 fifth rotation axis, 110 first base, 112 first side portion, 113 cavity, 114 second side portion, 116 bottom portion, 120 first movable portion, 122 first arm, 123 gap, 124 second arm, 125 gap, 130 second movable portion, 132 second base, 134 third arm, 136 hand, 140 first movable portion, 142 first arm, 143 gap, 144 second arm, 151 acquisition unit, 152 control unit, 154 information storage unit, 156 collaborative operation selection unit, 158 condition storage unit, 160 condition selection unit, 200 housing, 210 front wall, 212 part, 214 part, 220 cassette, 221 cassette, 222 cassette, 223 cassette, 224 cassette, 225 cassette, 227 opening / closing area, 230 rear wall, 240 load lock chamber, 241 load lock chamber, 242 load lock chamber, 243 load lock chamber, 250 operating area, 261 area, 263 area, 265 area, 267 area, 269 area, 270 first side wall, 284 area, 290 second side wall, 300 PA, 1121 inner surface, 1123 outer surface, 1141 inner surface, 1143 outer surface, 1147 second side, 1148 connector part, 1160 center part, 1162 first protrusion, 1164 second protrusion, 1166 Hole, 1200 computer, 1210 host controller, 1212 CPU, 1214 RAM, 1216 graphic controller, 1218 display device, 1220 input / output controller, 1222 communication interface, 1224 storage device, 1230 ROM, 1240 input / output chip, 2210 opening, 2220 opening, 2230 opening, 2240 opening, 2250 opening, 2410 opening, 2420 opening, 2430 opening, 2850 opening

Claims

1. A robot disposed in a housing having a front wall having a plurality of openings for accessing a cassette storing wafers, and a rear wall facing the front wall and having openings, The first base; a first movable section including a first arm, the base end of which is connected to the first base so as to be rotatable about a first rotation axis within a vertical plane, and a second arm, the base end of which is connected to a tip end of the first arm so as to be rotatable about a second rotation axis within a vertical plane; a second movable section including a second base, the base end of which is connected to the tip side of the second arm so as to be rotatable within a vertical plane about a third rotation axis, a third arm, the base end of which is connected to the tip side of the second base so as to be rotatable about a fourth rotation axis, and a hand, the base end of which is connected to the tip side of the third arm so as to be rotatable about a fifth rotation axis, and which holds the wafer; an information storage unit that stores cooperative action related information in which each position of the plurality of openings in the front wall and each position of the opening in the rear wall are associated with a type of cooperative action of the robot when the hand accesses each position of the plurality of openings in the front wall and each position of the opening in the rear wall; a cooperative action selection unit that selects whether to cause the hand to access the access target by cooperative action of the third arm and the hand, or to cause the hand to access the access target by cooperative action of the third arm, the hand, and the first movable part, based on a position of an access target of the access by the hand and the cooperative action related information stored in the information storage unit; a control unit that controls the first movable unit and the second movable unit so that the hand accesses the access target in a state parallel to a horizontal plane by the cooperative action of the robot selected by the cooperative action selection unit; A robot equipped with the above.

2. 2. The robot according to claim 1, wherein the cooperative operation selection unit, when causing the hand to access each of the plurality of openings in the front wall, selects causing the hand to access the access target by cooperative operation of the third arm and the hand.

3. 3. The robot according to claim 2, wherein, when causing the hand to access the opening in the rear wall, the cooperative operation selection unit selects causing the hand to access the access target by cooperative operation of the third arm, the hand, and the first movable part.

4. 2. The robot according to claim 1, wherein the control unit controls the first movable unit and the second movable unit to cause the hand to access the access target while maintaining a state in which a first angle between a vector parallel to a line that passes through the fourth rotation axis and the fifth rotation axis and is perpendicular to the fourth rotation axis and the fifth rotation axis, and a vector parallel to a center line of the hand that is perpendicular to the fifth rotation axis and passes through the fifth rotation axis, satisfies a predetermined first angle condition.

5. a condition storage unit that stores the first angle conditions including a first candidate condition that the first angle is included in a first angle range and a second candidate condition that the first angle is included in a second angle range; a condition selection unit that selects the first angle condition of an access process for allowing the hand to access the access target from the first candidate condition and the second candidate condition based on a position of the access target; Further equipped with the control unit controls the first movable unit and the second movable unit so as to cause the hand to access the access target while maintaining a state in which the first angle condition selected by the condition selection unit is satisfied. The robot according to claim 4.

6. 6. The robot according to claim 5, wherein the condition selection unit selects the first candidate condition as the first angle condition for the access processing when the access target is located on a side wall side of the housing and the hand can access the access target only when the first angle is included in the first angle range.

7. The robot according to claim 6, wherein the condition selection unit selects the first candidate condition as the first angle condition for the access process when the access target is a PA (Pre-Aligner).

8. The robot described in claim 5, wherein the condition selection unit, when selecting the first candidate condition as the first angle condition of a first access process, selects the first candidate condition as the first angle condition of the second access process if the hand is capable of accessing the access target of a second access process that is the next access process after the first access process when the first angle is included in the first angle range, and selects the second candidate condition as the first angle condition of the second access process if the hand is not capable of accessing the access target of the second access process when the first angle is included in the first angle range.

9. The robot according to claim 8, wherein the control unit controls the first movable unit and the second movable unit so as to change the first angle from the first angle range to the second angle range when the condition selection unit selects the second candidate condition as the first angle condition for the second access process.

10. The robot according to claim 9, wherein the condition selection unit selects the first candidate condition as the first angle condition for the third access process when the hand is capable of accessing an access target for a third access process which is the next access process after the second access process with the first angle included in the first angle range.

11. The robot according to claim 9, wherein the condition selection unit selects the second candidate condition as the first angle condition for the third access process when the hand is capable of accessing an access target for a third access process which is the next access process after the second access process with the first angle included in the second angle range.

12. The robot of claim 5 , wherein the first angle range is from 0° to 180°, and the second angle range is from −180° to 0°.

13. 5. The robot according to claim 4, wherein the control unit controls the first movable unit and the second movable unit to cause the hand to access the access target while maintaining a state in which a second angle between a vector parallel to a direction in which the wafer is transported and a vector perpendicular to the fifth rotation axis and parallel to a center line of the hand passing through the fifth rotation axis further satisfies a predetermined second angle condition within an operating area defined in a space between the front wall and the rear wall so as not to overlap with an opening and closing area for opening and closing the cassette by cassette openers provided at positions corresponding to each of the multiple openings in the front wall.

14. a condition storage unit that stores the second angle conditions including a third candidate condition that the second angle is included in a third angle range and a fourth candidate condition that the second angle is included in a fourth angle range; a condition selection unit that selects the second angle condition of an access process for allowing the hand to access the access target from the third candidate condition and the fourth candidate condition based on a position of the access target; Further equipped with the control unit controls the first movable unit and the second movable unit so as to cause the hand to access the access target while maintaining a state in which the second angle condition selected by the condition selection unit is satisfied. The robot according to claim 13.

15. 15. The robot of claim 14, wherein the third angular range corresponds to a state in which a tip side of the hand is located to the right of the base side of the hand, and the fourth angular range corresponds to a state in which the tip side of the hand is located to the left of the base side of the hand.

16. A robot according to any one of claims 1 to 15; The housing and A system comprising:

17. The robot is disposed in a housing having a front wall having a plurality of openings for accessing a cassette storing wafers, and a rear wall facing the front wall and having an opening, the robot comprising a first movable section having a first base, a first arm having a base end connected to the first base so as to be rotatable in a vertical plane about a first rotation axis, and a second arm having a base end connected to a tip end side of the first arm so as to be rotatable in the vertical plane about a second rotation axis, a second base having a base end connected to a tip end side of the second arm so as to be rotatable in the vertical plane about a third rotation axis, and a second arm having a base end connected to a tip end side of the second base so as to be rotatable in the vertical plane about a third rotation axis. a second movable section having a third arm connected to a tip side of the third arm so as to be rotatable about a fourth rotation axis, and a hand connected to a tip side of the third arm so as to be rotatable about a fifth rotation axis and holding the wafer, and an information storage section storing cooperative operation-related information in which each position of the plurality of openings in the front wall and each position of the opening in the rear wall are associated with a type of cooperative operation of the robot when the hand accesses each position of the plurality of openings in the front wall and each position of the opening in the rear wall, the method comprising: a cooperative action selection step of selecting whether to cause the hand to access the access target by a cooperative action of the third arm and the hand, or to cause the hand to access the access target by a cooperative action of the third arm, the hand, and the first movable part, based on a position of an access target to be accessed by the hand and the cooperative action related information stored in the information storage unit; a control step of controlling the first movable unit and the second movable unit so that the hand accesses the access target in a state parallel to a horizontal plane by the cooperative action of the robot selected in the cooperative action selection step; A control method comprising:

18. A program for causing a computer to execute the control method according to claim 17.

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