Heat processing apparatus

Abstract

To provide an induction heating apparatus capable of preventing observation or the like from becoming difficult due to generation of dew condensation on transparent windows provided for observation or the like of the inside of a chamber with a simple structure.SOLUTION: A heat processing apparatus 1 includes: a chamber 11 that heats a workpiece W with atmosphere; and cylinders (12, 13, 14) provided in the chamber 11 and allowing passing of light between the inside and the outside of the chamber 11. The cylinders (12, 13, 14) are provided to extend to the inside of the chamber 11, and the cylinders (12, 13, 14) are provided with transparent members (15, 16, 17) that block passage of atmosphere between the inside and the outside of the chamber 11. at end parts of the inside of the chamber 11.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a heat treatment apparatus having a chamber for heating a workpiece by an atmosphere and a transparent window for observing the inside of the chamber. [Background technology]

[0002] For example, Patent Document 1 discloses a high-temperature furnace interior observation device 1 for observing a workpiece 3 placed inside the device body 2 through a peephole 6 provided in the device body 2. A quartz window 34 is provided in each of the peepholes 6, the oblique slit hole 21, and the slit hole 31 to airtightly seal them while allowing observation.

[0003] Furthermore, to prevent these quartz windows 34 from fogging up, an inlet 35 is formed inside the apparatus body 2 at the peephole 6, the oblique slit hole 21, and the slit hole 31 to introduce the process gas into the furnace via a pipe 42 and a valve 43. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2000-266471 Summary of the Invention [Problem to be solved by the invention]

[0005] The high-temperature furnace interior observation device 1 of Patent Document 1 requires a gas introduction facility to prevent the quartz window 34 from fogging up, which leads to a complex structure.

[0006] An object of the present invention is to prevent, with a simple structure, condensation on a transparent window provided for observing the inside of a room, which makes observation difficult. [Means for solving the problem]

[0007] (1) In order to solve the above problem, the heat treatment apparatus of the present invention comprises a chamber for heating a workpiece by an atmosphere, and a tube provided in the chamber for allowing light to pass between the inside and outside of the chamber, the tube being provided so as to extend into the chamber, and the tube being provided at its end inside the chamber with a transparent member for blocking the passage of the atmosphere between the inside and outside of the chamber.

[0008] (2) The inner diameter of the end of the tube outside the chamber is larger than the inner diameter of the end of the tube inside the chamber.

[0009] (3) The transparent member is a first transparent member provided at the end of the tube inside the chamber, and a second transparent member is provided at the end of the tube outside the chamber, and a space is defined between the first transparent member and the second transparent member.

[0010] (4) The tube is provided on a detachable member in the chamber.

[0011] (5) The contact area between the tube and the transparent member at the end of the tube inside the chamber is larger than the cross-sectional area of ​​the portion of the tube extending inside the chamber. [Effects of the Invention]

[0012] According to the present invention, it is possible to prevent, with a simple structure, the occurrence of condensation on a transparent window provided for observing the inside of a room, which makes observation difficult. [Brief explanation of the drawings]

[0013] [Figure 1] 1 is a diagram schematically illustrating a heat treatment apparatus according to an embodiment of the present invention. [Figure 2] FIG. 1 is a perspective view of a heat treatment apparatus. [Figure 3] 3 is an enlarged view of a part of the heat treatment apparatus shown in FIG. 2. FIG. [Figure 4]4A and 4B are cross-sectional views of a door in a heating chamber of a heat treatment apparatus, where FIG. 4A is a cross-sectional view perpendicular to the up-down direction, and FIG. 4B is a cross-sectional view perpendicular to the left-right direction. [Figure 5] FIG. 2 is a cross-sectional view of a tube for observing the inside of a heating chamber in a heat treatment apparatus. [Figure 6] FIG. 2 is a cross-sectional view of an illumination tube in the heat treatment device. [Figure 7] 10A and 10B are diagrams illustrating the relationship between the contact area of ​​the tube with the transparent member and the cross-sectional area of ​​the tube. [Figure 8] 10 is a diagram for explaining the state in which the inside of the heating chamber is observed with a camera through a tube and a transparent member for observing the inside of the heating chamber. FIG. [Figure 9] 10A and 10B are diagrams for explaining a form in which a cylinder is attached to a door of a heating chamber. [Figure 10] 1 is a time chart showing a processing flow in a heat treatment apparatus. DETAILED DESCRIPTION OF THE INVENTION

[0014] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The present invention relates to a heat treatment apparatus having a chamber for heating a workpiece using an atmosphere and a transparent window for observing the interior of the chamber. In the following description, the up-down direction X1, the front-back direction X2, and the left-right direction X3 of the heat treatment apparatus are defined as shown by double-ended arrows X1, X2, and X3 in Figures 1, 2, 4, and 9. The up-down direction X1 is defined based on the vertical direction. The front-back direction X2 is a direction extending horizontally, perpendicular to the up-down direction X1, and is defined, for example, as the direction in which a workpiece is loaded and unloaded from the heat treatment apparatus. The left-right direction X3 is defined as a direction perpendicular to both the up-down direction X1 and the front-back direction X2.

[0015] [Heat treatment equipment] FIG. 1 is a diagram schematically illustrating the overall configuration of a heat treatment apparatus 1 according to an embodiment of the present invention. FIG. 2 is a perspective view of the heat treatment apparatus 1. FIG. 3 is an enlarged view of a portion of the heat treatment apparatus 1 shown in FIG. 2. Referring to FIGS. 1 to 3, the heat treatment apparatus 1 includes a heating chamber 11 in which a workpiece W is heated by an atmosphere, cylinders (12, 13, 14) provided in the heating chamber 11, first transparent members (15, 16, 17) and second transparent members (18, 19) provided in the cylinders (12, 13, 14), and the like. The heat treatment apparatus 1 according to this embodiment also includes a nitrogen tank 21, a superheated steam generator 22, a heater 23, a fan 24, a controller 25, and the like. The workpiece W to be heat-treated in the heat treatment apparatus 1 is an electronic component, such as a capacitor.

[0016] The heating chamber 11 constitutes the chamber of this embodiment, and is configured so that the workpiece W is carried inside and heated by the atmosphere inside the heating chamber 11. The heating chamber 11 is configured as a rectangular parallelepiped chamber and includes chamber walls that enclose both sides in the up-down direction X1, both sides in the front-rear direction X2, and both sides in the left-right direction X3. Note that FIG. 1 shows the heating chamber 11 schematically as a cross section along the horizontal direction. A door 26 that can be opened and closed is provided on the front side (one side in the front-rear direction X2) of the heating chamber 11. The door 26 is attached to the main body of the heating chamber 11 via a hinge and is configured as a swing door. The door 26 is provided as a detachable member in the heating chamber 11 and is detachably attached to the main body of the heating chamber 11 via a hinge. Note that the main body of the heating chamber 11 is configured as a structure with chamber walls that enclose both sides in the up-down direction X1, both sides in the rear side (the other side in the front-rear direction X2), and both sides in the left-right direction X3 of the heating chamber 11. The door 26 also constitutes a chamber wall on the front side of the heating chamber 11.

[0017] The heating chamber 11 is connected to a nitrogen tank 21, which is a nitrogen gas supply source, via a nitrogen gas supply system 21a. The nitrogen gas supply system 21a is in communication with the interior of the heating chamber 11 via a nitrogen gas supply port (not shown) provided in the wall of the heating chamber 11. In the heat treatment apparatus 1, nitrogen gas is supplied from the nitrogen tank 21 via the nitrogen gas supply system 21a to the interior of the heating chamber 11. The supply of nitrogen gas from the nitrogen tank 21 to the heating chamber 11 via the nitrogen gas supply system 21a is controlled by a controller 25. The controller 25 controls the supply of nitrogen gas by controlling the operation of a valve (not shown) provided on the path from the nitrogen tank 21 to the nitrogen gas supply system.

[0018] The heating chamber 11 is connected to a superheated steam generator 22, which is a supply source of superheated steam, via a superheated steam supply system 22a. The superheated steam generator 22 is equipped with a boiler and a superheater (not shown), and generates superheated steam based on commands from a controller 25 and heats the superheated steam to a predetermined set temperature. The superheated steam supply system 22a communicates with the interior of the heating chamber 11 via a superheated steam supply port (not shown) provided in the wall of the heating chamber 11. In the heat treatment device 1, superheated steam is supplied from the superheated steam generator 22 to the interior of the heating chamber 11 via the superheated steam supply system 22a. The supply of superheated steam from the superheated steam generator 22 to the heating chamber 11 via the superheated steam supply system 22a is controlled by the controller 25. The controller 25 controls the supply of superheated steam by controlling the operation of a valve (not shown) provided on the path from the superheated steam generator 22 to the superheated steam supply system 22a.

[0019] An exhaust system 27 is connected to the heating chamber 11 for discharging gas within the heating chamber 11 to the outside. The exhaust system 27 is in communication with the interior of the heating chamber 11 via an exhaust port (not shown) provided in the wall of the heating chamber 11. Discharge of gas within the heating chamber 11 to the outside via the exhaust system 27 is controlled by a controller 25. The controller 25 controls the discharge of gas within the heating chamber 11 by controlling the operation of a valve (not shown) provided in the exhaust system 27. When nitrogen gas is supplied from the nitrogen tank 21 into the heating chamber 11 and when superheated steam is supplied from the superheated steam generator 22 into the heating chamber 11, the gas within the heating chamber 11 is discharged from the exhaust system 27 to prevent an excessive increase in pressure within the heating chamber 11.

[0020] Adjusting plates (28a to 28d) are installed within the heating chamber 11 to adjust the flow direction of the atmospheric gas within the heating chamber 11. The adjusting plates (28a to 28d) are arranged within the heating chamber 11 on both sides in the front-to-rear direction X2 and on both sides in the left-to-right direction X3, and are arranged horizontally with gaps between them and the chamber wall of the heating chamber 11. Adjusting plates 28a and 28c are made of punched metal with many through-holes, and are arranged on both sides in the left-to-right direction X3. Adjusting plates 28b and 28d are configured as flat plates without through-holes. The atmospheric gas within the heating chamber 11 flows along flat adjusting plates 28b and 28d without passing through them, and passes through adjusting plates 28a and 28c made of punched metal.

[0021] Heater 23 is provided as a heating element that generates and outputs heat when energized and heats the atmospheric gas flowing within heating chamber 11. Heater 23 is disposed within heating chamber 11 between the rear chamber wall and adjustment plate 28b, and is provided so as to heat the gas flowing between the rear chamber wall and adjustment plate 28b. Heater 23 is also connected to a power source (not shown), and the power supplied to heater 23 is configured to be controlled by controller 25.

[0022] Fan 24 is provided to circulate the atmospheric gas within heating chamber 11 and is installed within heating chamber 11. Fan 24 is disposed within heating chamber 11 between the rear chamber wall and adjustment plate 28b, and is provided to create a gas flow. Fan 24 is configured to be rotationally driven by drive motor 24a, and the rotation of drive motor 24a is configured to be controlled by controller 25.

[0023] 1 and 2, the workpieces W are placed on setters 100, which are flat, plate-like members for supporting the workpieces W, and are then transported and placed in the heating chamber 11. The setters 100 on which the workpieces W are placed are disposed in the heating chamber 11 in an area inside the adjustment plates (28a to 28d). With the workpieces W placed on the setters 100 in the heating chamber 11, the door 26 is closed, and the workpieces W are heat-treated by the heat treatment device 1. The setters 100 are arranged in the heating chamber 11, for example, stacked in multiple tiers at predetermined distances in the vertical direction X1. That is, adjacent setters 100 stacked in multiple tiers in the vertical direction X1 are arranged adjacent to each other at a predetermined distance. FIG. 2 illustrates an example in which the workpieces W are placed in the heating chamber 11 with the workpieces W placed on each of the setters 100 stacked in three tiers in the vertical direction X1. The setters 100 on which the workpieces W are placed do not have to be stacked in multiple stages, and may be placed in the heating chamber 11 in only one stage.

[0024] During heat treatment of the workpiece W in the heat treatment apparatus 1, an ambient gas such as nitrogen gas or superheated steam is supplied into the heating chamber 11. The ambient gas supplied into the heating chamber 11 flows due to a flow formed by the operation of the fan 24. Note that in FIG. 1, the flow path of the ambient gas within the heating chamber 11 is schematically shown by multiple dashed arrows. The gas flowing due to the operation of the fan 24 flows along the adjustment plate 28b and is heated by the output of the heater 23. The gas heated by the heater 23 passes through the adjustment plate 28c formed of punched metal and flows toward the workpiece W placed on the setter 100. As the heated ambient gas passes through the workpiece W on the setter 100, the workpiece W is heated by the ambient gas. The ambient gas that has passed through the workpiece W flows through the adjustment plate 28a formed of punched metal and flows toward the fan 24, again forming a flow that circulates within the heating chamber 11.

[0025] [Cylinder and transparent parts] Next, the configurations of the tubes (12, 13, 14), first transparent members (15, 16, 17), and second transparent members (18, 19), which are characteristic components of this embodiment, will be described. FIG. 4 is a cross-sectional view of the door 26 in the heating chamber 11 of the heat treatment device 1, where FIG. 4(A) is a cross-sectional view perpendicular to the up-down direction X1, and FIG. 4(B) is a cross-sectional view perpendicular to the left-right direction X3. FIG. 5 is a cross-sectional view of the tube 12 used to observe the inside of the heating chamber 11 in the heat treatment device 1. FIG. 6 is a cross-sectional view of the illumination tube 13 in the heat treatment device 1, where FIG. 6(A) shows a cross-section of one end of the tube 13, and FIG. 6(B) shows a cross-section of the other end of the tube 13. Note that FIG. 4 schematically shows one of the workpieces W arranged inside the heating chamber 11. Also, FIGS. 5 and 6 are cross-sectional views of the tube 12 and the tube 13 perpendicular to the up-down direction X1.

[0026] 1 to 6, cylinder 12, cylinder 13, and cylinder 14 are all configured as structures that extend with a hollow cross section, and are provided in heating chamber 11 to allow light to pass between the inside and outside of heating chamber 11. The inside and outside of heating chamber 11 are defined as the inner and outer regions based on the inner wall surface of the chamber wall of heating chamber 11. In other words, based on the inner wall surface of the chamber wall of heating chamber 11, the inside is defined as the inside, and the outside, including the chamber wall, is defined as the outside.

[0027] In this embodiment, the tubes 12, 13, and 14 are hollow structures having cylindrical portions. The tubes 12, 13, and 14 are formed of a metal material such as steel. While the tubes (12, 13, and 14) are hollow structures having cylindrical portions in this embodiment, this is not essential. The tubes (12, 13, and 14) may be hollow structures having an elliptical or polygonal cross-sectional shape. Furthermore, the tubes (12, 13, and 14) do not need to have a cross-sectional shape that expands concentrically, but may have a cross-sectional shape that expands significantly in a predetermined direction. As described below, the tubes (12, 13, and 14) are used for observation by the camera 50 or illumination by the light 51. However, the tubes may expand in a direction that expands the range that can be captured by the camera 50 or the range that can be illuminated by the light 51.

[0028] Cylinders 12, 13, and 14 are provided on the chamber wall of heating chamber 11, and in this embodiment, are provided on door 26, which serves as the chamber wall of heating chamber 11. Therefore, cylinders 12, 13, and 14 are provided on door 26, which is a detachable member in heating chamber 11. Cylinders 12, 13, and 14, which are provided on door 26, which serves as the chamber wall of heating chamber 11, are all provided so as to extend into the interior of heating chamber 11. In this embodiment, cylinders 12, 13, and 14 are attached to door 26 in a state where they pass through door 26, and are provided so as to extend from door 26 into the interior of heating chamber 11.

[0029] 3, 5, and 6, the tubes (12, 13, 14) are provided at their ends inside the heating chamber 11 with first transparent members (15, 16, 17) that are transparent members that block passage of the atmosphere between the inside and outside of the heating chamber 11. The tubes (12, 13, 14) are also provided at their ends outside the heating chamber 11 with second transparent members (18, 19). That is, the first transparent member 15 is provided at the end of the tube 12 inside the heating chamber 11, and the second transparent member 18 is provided at the end of the tube 12 outside the heating chamber 11. The first transparent member 16 is provided at the end of the tube 13 inside the heating chamber 11, and the second transparent member 19 is provided at the end of the tube 13 outside the heating chamber 11. The first transparent member 17 is provided at the end of the tube 14 inside the heating chamber 11, and the second transparent member 19 (not shown) is provided at the end of the tube 14 outside the heating chamber 11.

[0030] The first transparent members (15, 16, 17) are made of transparent, disc-shaped quartz glass and form transparent windows. The second transparent members (18, 19) are also made of transparent, disc-shaped quartz glass and form transparent windows. The first transparent members (15, 16, 17) and the second transparent members (18, 19) may be made of any heat-resistant, transparent material other than quartz glass. For example, the first transparent members (15, 16, 17) and the second transparent members (18, 19) may be made of a heat-resistant, plate-shaped, transparent resin material.

[0031] Here, the configuration of each of the tubes 12, 13, and 14 will be described in more detail, along with the configuration of the first transparent members (15, 16, 17) and second transparent members (18, 19) provided thereon.

[0032] 1 to 5, the tube 12 and the first transparent member 15 and second transparent member 18 provided on the tube 12 are provided for observing the interior of the heating chamber 11. The interior of the heating chamber 11 is observed by a camera 50 disposed outside the heating chamber 11 through the tube 12, the first transparent member 15, and the second transparent member 18. The tube 12 is attached to the door 26, for example, in a state in which it extends along the front-to-rear direction X2 and extends at an angle in the up-down direction X1 (see FIG. 4). The camera 50 can observe the workpiece W disposed inside the heating chamber 11 from outside the heating chamber 11 via the tube 12 that extends into the interior of the heating chamber 11 along the front-to-rear direction X2 and at an angle in the up-down direction X1.

[0033] 1, 4, and 5, the tube 12 has a small-diameter tube portion 29 formed as a small-diameter cylindrical portion extending from the door 26 to the inside of the heating chamber 11, and a large-diameter tube portion 30 formed as a cylindrical portion with a larger diameter than the small-diameter tube portion 29 and disposed outside the heating chamber 11. The small-diameter tube portion 29 and the large-diameter tube portion 30 are integrally formed and continuous, and the portion continuing from the small-diameter tube portion 29 to the large-diameter tube portion 30 is formed so as to expand in a stepped manner. Referring to FIG. 5, the inner diameter R2 of the large-diameter tube portion 30 is set larger than the inner diameter R1 of the small-diameter tube portion 29. The inner diameter R1 of the small-diameter tube portion 29 constitutes the inner diameter R1 of the end of the tube 12 inside the heating chamber 11, and the inner diameter R2 of the large-diameter tube portion 30 constitutes the inner diameter R2 of the end of the tube 12 outside the heating chamber 11. For this reason, the inner diameter R2 of the end of the cylinder 12 outside the heating chamber 11 is set to be larger than the inner diameter R1 of the end of the cylinder 12 inside the heating chamber 11.

[0034] 1 and 3 to 5, a flange portion 31 is provided at the end of the tube 12 inside the heating chamber 11, i.e., at the end of the portion of the small-diameter tube portion 29 that extends inside the heating chamber 11. The first transparent member 15 is attached to the tube 12 at the flange portion 31 provided at the end of the tube 12 inside the heating chamber 11. The flange portion 31 is formed to be wider in the radial direction than the diameter of the small-diameter tube portion 29, and as shown in FIG. 5, the first transparent member 15 is fitted around the inner periphery of the flange portion 31. A ring-shaped lid member 32 is attached to the end face of the flange portion 31. The first transparent member 15 is attached to the end of the tube 12 inside the heating chamber 11, sandwiched between the flange portion 31 and the lid member 32. A ring-shaped gasket 33 made of a heat-resistant resin material is disposed between the end face of the flange portion 31 and the lid member 32, sealing the gap between the flange portion 31 and the lid member 32. Furthermore, flange portion 31 and lid member 32 are joined by fastening members 34 configured with bolts and nuts. Note that first transparent member 15 may be attached to flange portion 31 by bonding an end face of flange portion 31, which sandwiches and holds first transparent member 15, to lid member 32 with an adhesive. In this case, the gap between flange portion 31 and lid member 32 is sealed by a layer of adhesive.

[0035] FIG. 7 is a diagram illustrating the relationship between the contact area T between the tube 12 and the first transparent member 15 and the cross-sectional area S of the tube 12. FIG. 7 is an enlarged cross-sectional view of the end of the tube 12 inside the heating chamber 11 and its vicinity. The first transparent member 15 is attached to a flange portion 31 provided at the end of the tube 12 inside the heating chamber 11, and is in contact with the inner surface of the flange portion 31 over the entire circumferential direction. In FIG. 7, the region corresponding to the contact area T between the first transparent member 15 and the inner surface of the flange portion 31 is schematically indicated by a thick line T. In FIG. 7, the region corresponding to the cross-sectional area S of the portion of the tube 12 extending inside the heating chamber 11 is also schematically indicated by a thick line S. The cross-sectional area S is the area of ​​the region between the outer and inner circumferences of the portion of the small-diameter tube portion 29 of the tube 12 extending inside the heating chamber 11. Flange portion 31, with which first transparent member 15 is in contact over the entire circumferential direction, is provided with a larger diameter than small-diameter cylindrical portion 29, and contact area T is set larger than cross-sectional area S of small-diameter cylindrical portion 29. In other words, contact area T with first transparent member 15 at the end of tube 12 inside heating chamber 11 is set larger than cross-sectional area S of the portion of tube 12 extending inside heating chamber 11.

[0036] 1, 4, and 5, a flange portion 35 is provided at the end of the tube 12 outside the heating chamber 11, i.e., at the end of the large-diameter tube portion 30 located outside the heating chamber 11. The second transparent member 18 is attached to the tube 12 at the flange portion 35 provided at the end outside the heating chamber 11. The flange portion 35 is formed to be wider in the radial direction than the diameter of the large-diameter tube portion 30, and as shown in FIG. 5, the second transparent member 18 is fitted around the inner periphery of the flange portion 35. A ring-shaped lid member 36 is attached to the end face of the flange portion 35. The second transparent member 18 is attached to the end of the tube 12 outside the heating chamber 11, sandwiched between the flange portion 35 and the lid member 36. A ring-shaped gasket 37 made of a heat-resistant resin material is disposed between the end face of the flange portion 35 and the lid member 36. The flange portion 35 and the cover member 36 are joined together by a fastening member 38 that includes a bolt and a nut.

[0037] A first transparent member 15 is provided at the end of tube 12 inside heating chamber 11, and a second transparent member 18 is provided at the end of tube 12 outside heating chamber 11. Therefore, in tube 12, a space 39 is defined between first transparent member 15 and second transparent member 18 (see FIG. 5). Space 39 between first transparent member 15 and second transparent member 18 is a space that extends from small diameter tube portion 29 to large diameter tube portion 30 inside tube 12.

[0038] FIG. 8 is a diagram illustrating the state in which the interior of the heating chamber 11 is observed with the camera 50 through the tube 12 for observing the interior of the heating chamber 11, the first transparent member 15, and the second transparent member 18. FIG. 8 is a cross-sectional view showing the tube 12 and the area of ​​the door 26 near the tube 12, taken along a cross section perpendicular to the left-right direction X3, and is a schematic diagram showing the workpiece W disposed inside the heating chamber 11 and the camera 50 disposed outside the heating chamber 11. When the workpiece W inside the heating chamber 11 is observed with the camera 50, as shown in FIG. 8, the camera 50 is positioned at an angle that faces the workpiece W inside the heating chamber 11 through the tube 12. The tube 12 has a large-diameter cylindrical portion 30 on the exterior side of the heating chamber 11. When observing the workpiece W inside the heating chamber 11 through the tube 12 from the exterior side of the heating chamber 11, the angular position of the camera 50 can be changed significantly, as shown in FIG. Furthermore, since the angular position of the camera 50 can be changed widely, it is possible to increase the angular range of the workpiece W that can be observed from outside the heating chamber 11. Therefore, the camera 50 can observe the workpiece W that is placed at a plurality of different positions in the height direction X1 within the heating chamber 11.

[0039] 1 to 4 and 6, the tube 13 and the first transparent member 16 and second transparent member 19 provided on the tube 13 are provided for illumination to irradiate the workpiece W inside the heating chamber 11 with light. Light emitted from a light source 51 arranged outside the heating chamber 11 is irradiated into the interior of the heating chamber 11 through the tube 13, the first transparent member 16, and the second transparent member 19. The light from the light 51 is irradiated into the interior of the heating chamber 11 through the tube 13, thereby illuminating the workpiece W arranged inside the heating chamber 11 with the light. The workpiece W illuminated by the light from the light 51 via the tube 13 is observed by the camera 50 through the tube 12. The tube 13 is provided to illuminate the workpiece W inside the heating chamber 11 from the side, and is provided on the door 26 while extending horizontally (see FIGS. 1 and 4(A)).

[0040] 1 to 4 and 6, the tube 13 is formed in a cylindrical shape. The cylindrical tube 13 extends from the outside to the inside of the heating chamber 11, and is provided so as to extend into the heating chamber 11. A flange portion 40 is provided at the end of the tube 13 inside the heating chamber 11. The first transparent member 16 is attached to the tube 13 at the flange portion 40 provided at the end of the tube 13 inside the heating chamber 11. The flange portion 40 is formed to expand in the radial direction relative to the cylindrically extending portion of the tube 13, and as shown in FIG. 6(A), the first transparent member 16 is fitted around the inner periphery of the flange portion 40. A ring-shaped lid member 32 is attached to the end face of the flange portion 40 via a packing 33, and the first transparent member 16 is attached to the end of the tube 13 inside the heating chamber 11 in a state where it is sandwiched between the flange portion 40 and the lid member 32. The flange portion 40 and the lid member 32 are connected by a fastening member 34.

[0041] First transparent member 16 is attached to flange portion 40 provided at the end of tube 13 inside heating chamber 11, and is in contact with the inner surface of flange portion 40 over the entire circumferential direction. Flange portion 40, with which first transparent member 16 is in contact over the entire circumferential direction, is provided with a larger diameter than the cylindrical portion of tube 13 that extends inside heating chamber 11. Therefore, the contact area T between first transparent member 16 and the inner surface of flange portion 40 is set larger than the cross-sectional area S of the cylindrical portion of tube 13 that extends inside heating chamber 11 (note that the contact area T and cross-sectional area S are not shown). In other words, the contact area T between first transparent member 16 and the end of tube 13 inside heating chamber 11 is set larger than the cross-sectional area S of the portion of tube 13 that extends inside heating chamber 11.

[0042] 1, 4, and 6, a flange portion 41 is provided at the end of tube 13 outside heating chamber 11. Second transparent member 19 is attached to tube 13 at flange portion 41 provided at the end outside heating chamber 11. Flange portion 41 is formed to expand radially relative to the cylindrically extending portion of tube 13, and as shown in FIG. 6(B), second transparent member 19 is fitted onto the inner periphery of flange portion 41. A ring-shaped lid member 32 is attached to the end face of flange portion 41 via packing 33, and second transparent member 19 is attached to the end of tube 13 outside heating chamber 11 in a state where it is sandwiched between flange portion 41 and lid member 32. Flange portion 41 and lid member 32 are connected by fastening member 34.

[0043] A first transparent member 16 is provided at the end of tube 13 inside heating chamber 11, and a second transparent member 19 is provided at the end of tube 13 outside heating chamber 11. Therefore, in tube 13, a space 42 is defined between first transparent member 16 and second transparent member 19 (see FIG. 6).

[0044] 1 to 4, the cylinder 14 and the first transparent member 17 and second transparent member 19 (the second transparent member 19 is not shown) provided on the cylinder 14 are provided for illumination to irradiate the workpiece W inside the heating chamber 11 with light. Light emitted from a light source 51 outside the heating chamber 11 is irradiated into the interior of the heating chamber 11 through the cylinder 14, the first transparent member 17, and the second transparent member 19, and the workpiece W placed inside the heating chamber 11 is illuminated by the light. The cylinder 14 is provided to illuminate the workpiece W inside the heating chamber 11 from above, and is provided on the door 26 in a state in which it extends along the front-to-rear direction X2 and extends at an angle in the up-down direction X1 (see FIG. 4(B)).

[0045] The tube 14 and the first transparent member 17 and second transparent member 19 provided thereon are configured similarly to the tube 13 and the first transparent member 16 and second transparent member 19 provided thereon. A flange portion 40 is provided at the end of the tube 14 inside the heating chamber 11, and the first transparent member 17 is attached to the flange portion 40. The contact area T between the first transparent member 17 and the inner surface of the flange portion 40 is set larger than the cross-sectional area S of the cylindrical portion of the tube 14 extending inside the heating chamber 11 (note that the contact area T and the cross-sectional area S are not shown). In other words, the contact area T between the first transparent member 17 and the end of the tube 14 inside the heating chamber 11 is set larger than the cross-sectional area S of the portion of the tube 14 extending inside the heating chamber 11. Furthermore, a flange portion 41 is provided at the end of the tube 14 outside the heating chamber 11, and the second transparent member 19 is attached to the flange portion 41. In tube 14, similar to tube 13, a space 42 is defined between first transparent member 17 and second transparent member 19 (space 42 is not shown).

[0046] [Cylinder installation form] Here, the installation of the tubes (12, 13, 14) on the door 26 of the heating chamber 11 will be described. Fig. 9 is a diagram for explaining a form of attaching the tubes (12, 13, 14) to the door 26 of the heating chamber 11. Note that Figs. 9(A), 9(B), and 9(C) show cross-sectional views of the door 26 taken along a plane perpendicular to the left-right direction X3. The installation of the tubes (12, 13, 14) on the door 26 is performed simultaneously with the formation of the door 26.

[0047] Referring to FIG. 9(A), when the door 26 is formed, the tubes 12, 13, and 14 are attached to a frame 43 that forms the basic outer shape of the door 26. The frame 43 is formed of a stainless steel plate. A space 43a is provided inside the frame 43, into which a heat insulating material 44 (described later) is filled. The tubes (12, 13, 14) are provided with ribs 45, which are welded to the inner wall surface of the frame 43, thereby fixing the tubes (12, 13, 14) to the frame 43. The tubes (12, 13, 14) are disposed in the frame 43 while passing through the frame 43, and are fixed to the frame 43 by welding the ribs 45 to the frame 43. The tubes (12, 13, 14) are attached to the frame 43 so as to protrude and extend into the heating chamber 11. Although the illustration of the tube 14 is omitted in FIG. 9, the tube 14 is also attached to the frame body 43 in the same manner as the tubes 12 and 13.

[0048] Referring to FIG. 9(B), when the tubes (12, 13, 14) are attached to the frame 43, the space 43a inside the frame 43 is filled with insulating material 44, tightly packed with no gaps. The insulating material 44 that is laid inside the frame 43 may be, for example, a cotton-like or felt-like insulating material roll made of alumina fiber. Once the space 43a inside the frame 43 is filled with insulating material 44, a stainless steel plate 46 that covers the front surface of the door 26 is attached to the frame 43, as shown in FIG. 9(C). The steel plate 46 and the frame 43 are welded and fixed to each other, completing the formation of the door 26 and the attachment of the tubes (12, 13, 14) to the door 26.

[0049] [Operation of heat treatment device] Next, the operation of the heat treatment apparatus 1 will be described. FIG. 10 is a time chart showing the processing flow in the heat treatment apparatus 1. Note that FIGS. 10(A)-(E) are time charts after processing in the heat treatment apparatus 1 is started. FIG. 10(A) shows the change in the temperature of the atmosphere in the heating chamber 11. FIG. 10(B) shows the change in the output of the heater 23. FIG. 10(C) shows the supply state of superheated steam from the superheated steam generator 22 to the heating chamber 11. FIG. 10(D) shows the temperature of the superheated steam generated by the superheated steam generator 22 and supplied to the heating chamber 11. FIG. 10(E) shows the supply state of nitrogen gas from the nitrogen tank 21 to the heating chamber 11. Note that in FIGS. 10(C) and 10(E), the supply of superheated steam or nitrogen gas to the heating chamber 11 is shown in the "ON" state.

[0050] Referring to FIG. 1, when processing in the heat treatment device 1 is started, the wafer W placed on the setter 100 is carried into and positioned in the heating chamber 11. At time T1 when processing in the heat treatment device 1 is started, nitrogen gas is supplied to the heating chamber 11 from the nitrogen tank 21 as the atmospheric gas for the heating chamber 11 (see FIG. 10(E)). Concurrently with the start of supply of nitrogen gas to the heating chamber 11, the superheated steam generator 22 starts generating superheated steam, and the temperature of the superheated steam is raised to a predetermined set temperature (see FIG. 10(D)). Note that once the temperature of the superheated steam reaches the predetermined set temperature, the state at the set temperature is maintained. Furthermore, concurrently, the heater 23 provided in the heating chamber 11 starts outputting power, and heating of the atmospheric gas by the output of the heater 23 begins (see FIG. 10(B)), and the temperature of the atmosphere in the heating chamber 11 begins to rise (see FIG. 10(A)).

[0051] When the temperature of the atmosphere inside the heating chamber 11 rises, the temperature of the first transparent members (15, 16, 17) provided at the ends of the tubes (12, 13, 14) inside the heating chamber 11 also rises along with the rise in the temperature of the atmosphere inside the heating chamber 11. In FIG. 10(A), the two-dot chain line shows the change in the temperature rise of the first transparent members (15, 16, 17) when the first transparent members (15, 16, 17) are provided outside the heating chamber 11 in a position where they are in contact with the wall of the heating chamber 11. When the first transparent members (15, 16, 17) are provided in a position where they are in contact with the wall of the heating chamber 11, the temperature rise of the first transparent members (15, 16, 17) is also delayed due to the influence of the wall of the heating chamber 11, which has a delayed temperature rise compared to the atmosphere inside the heating chamber 11. However, in this embodiment, the first transparent members (15, 16, 17) are provided at the end of the tube (12, 13, 14) inside the heating chamber 11, and the temperature of the first transparent members (15, 16, 17) also rises almost immediately as the temperature of the atmosphere in the heating chamber 11 rises.

[0052] FIG. 10(A) shows a state in which the temperature of the atmosphere in the heating chamber 11 reaches the same temperature as the set temperature of the superheated steam at time T2. When the temperature of the atmosphere in the heating chamber 11 reaches the same temperature as the set temperature of the superheated steam, the supply of nitrogen gas to the heating chamber 11 is stopped (see FIG. 10(E)), and instead, superheated steam at the set temperature is supplied to the heating chamber 11 (see FIG. 10(C)). At the same time, the output of the heater 23 is changed to an output suitable for heat treatment of the workpiece W (see FIG. 10(B)). The temperature of the superheated steam atmosphere in the heating chamber 11 continues to rise due to the output from the heater 23 (see FIG. 10(A)), and heat treatment of the workpiece W is performed. Thereafter, at time T3 when heat treatment of the workpiece W has been sufficiently performed, the output of the heater 23 in the heating chamber 11 is stopped (see FIG. 10(B)). Then, the supply of superheated steam to the heating chamber 11 is stopped (see FIG. 10(C)), and instead, nitrogen gas is supplied to the heating chamber 11 (see FIG. 10(E)). After that, at time T4 when the temperature of the atmosphere in the heating chamber 11 has sufficiently dropped, the supply of nitrogen gas to the heating chamber 11 is stopped (see FIG. 10(E)), and the workpiece C is removed from the heating chamber 11.

[0053] [Actions and Effects of This Embodiment] During the period from when the atmosphere in the heating chamber 11 starts to be heated at time T1 as a preparation stage for the heat treatment of the workpiece W in the heat treatment apparatus 1 to time T3 when the heat treatment of the workpiece W is completed, the temperature of the first transparent members (15, 16, 17) rises along with the rise in temperature of the atmosphere in the heating chamber 11. At this time, if the first transparent members (15, 16, 17), which are transparent windows for observation, etc., are provided in a position in contact with the wall of the heating chamber 11, the rise in temperature of the first transparent members (15, 16, 17) is delayed due to the influence of the wall of the heating chamber 11, whose temperature rise is delayed compared to the atmosphere in the heating chamber 11. As a result, the atmosphere inside the heating chamber 11 near the first transparent members (15, 16, 17) is cooled by the first transparent members (15, 16, 17), which have a temperature difference due to the delayed rise in temperature, and condensation occurs. However, according to the present embodiment, the temperature rise of the first transparent members (15, 16, 17) is accelerated by the heat from the atmosphere being transferred from the surfaces of the tubes (12, 13, 14) extending into the heating chamber 11. This reduces the delay in the temperature rise of the first transparent members (15, 16, 17), and suppresses condensation on the first transparent members (15, 16, 17) that serve as transparent windows. Furthermore, according to the present embodiment, it is possible to suppress condensation on the first transparent members (15, 16, 17) that serve as transparent windows with a simple structure, without requiring a complex structure such as gas introduction equipment for preventing condensation as in Patent Document 1.

[0054] When multiple workpieces W are placed in the heating chamber 11, it may be impossible to observe multiple workpieces W using a single camera 50 mounted at only one camera position. In such cases, it may be possible to change the mounting position of the camera 50 each time a heat treatment is performed and observe from multiple locations, or to mount multiple cameras 50 at different locations during a single heat treatment. In either case, observing from multiple locations through the same first transparent member 15 as a transparent window requires a larger inner diameter for the tube 12. However, increasing the inner diameter of the tube 12 in which the first transparent member 15 as a transparent window is provided makes it easier for heat to escape from the interior of the heating chamber 11 through the tube 12. In this embodiment, the inner diameter R2 of the tube 12 at the exterior side of the heating chamber 11 is set larger than the inner diameter R1 of the tube 12 at the interior side of the heating chamber 11 so that observation can be performed from multiple locations using the same first transparent member 15 as a transparent window. Therefore, when observing the workpiece W in the heating chamber 11 from the outside of the heating chamber 11 through the tube 12, the angle range observable from the outside of the heating chamber 11 can be increased, and the range of the area in the heating chamber 11 in which the workpiece W can be observed can be widened. Also, because the inner diameter R1 of the end of the tube 12 inside the heating chamber 11 is set small, it is possible to prevent heat from escaping from the inside of the heating chamber 11 through the tube 12. In other words, it is possible to both increase the angle range observable from the outside of the heating chamber 11 to widen the range of the area in the heating chamber 11 that can be observed from the outside of the heating chamber 11, and reduce the diameter of the tube 12 to prevent heat from escaping from the inside of the heating chamber 11 through the tube 12.

[0055] Furthermore, the portions of tube 12 that come into contact with the atmosphere inside heating chamber 11 are the portion of tube 12 that extends inside heating chamber 11 and first transparent member 15, and heat transferred therefrom escapes to the outside of heating chamber 11 through tube 12. In contrast, when inner diameter R2 of the portion of tube 12 facing the outside of heating chamber 11 is large, as in the present embodiment, the inner diameter R1 of the portion of tube 12 facing the inside of heating chamber 11 is small compared to when inner diameter R1 of the portion of tube 12 facing the inside of heating chamber 11 is large, and therefore the area of ​​the insulating material that forms the chamber wall of heating chamber 11 where tube 12 is provided is larger inside heating chamber 11. In other words, because inner diameter R1 of the portion of tube 12 facing the inside of heating chamber 11 is small, the area of ​​the insulating material surrounding tube 12 is larger in the area around the portion of tube 12 facing the inside of heating chamber 11. As a result, the insulating properties are improved in the portion of tube 12 facing the inside of heating chamber 11 where inner diameter R1 is small, making it more difficult for heat to be transferred to the outside. Furthermore, since the insulation properties of the side of the tube 12 closest to the atmosphere inside the heating chamber 11 can be increased to reduce heat transfer, when the inner diameter R2 of the part on the outside of the heating chamber 11 is large, the heat inside the heating chamber 11 can be prevented from escaping to the outside compared to when the inner diameter R1 of the part on the inside of the heating chamber 11 of the tube 12 is large.

[0056] Furthermore, the tubes (12, 13, 14) are sealed with the first transparent members (15, 16, 17) and the second transparent members (18, 19) to define spaces (39, 42), thereby improving the thermal insulation of those portions. This reduces the amount of heat that escapes from the heated, temperature-raised first transparent members (15, 16, 17) to the outside of the heating chamber 11, making it easier for the first transparent members (15, 16, 17) to further increase in temperature, and further suppressing the formation of condensation on the first transparent members (15, 16, 17).

[0057] The tubes (12, 13, 14), first transparent members (15, 16, 17), and second transparent members (18, 19), which are components for observation, such as transparent windows, provided for observing the interior of the heating chamber 11, and the associated components, such as the camera 50 and light 51, are used during the test process before the heat treatment conditions for the workpieces W are determined in the mass production process. Therefore, they are not necessary in the mass production process once the heat treatment conditions have been finalized. Furthermore, if the components for observation, etc., remain installed in the mass production process, the airtight seals of each component may deteriorate, or the quartz glass of the first transparent members (15, 16, 17) and other components may crack due to thermal fatigue or vibration, potentially causing production delays due to damage to components not required for the mass production process. In this embodiment, after the test process is completed, the door 26, which is a removable component equipped with the components for observation, etc., is removed and replaced with a normal door, which is a component without the components for observation, thereby preventing damage to unnecessary components from affecting production.

[0058] Furthermore, when installing the tubes (12, 13, 14), first transparent members (15, 16, 17), and second transparent members (18, 19), which are components for observation, etc., in the heating chamber 11, the components for observation, etc. can be assembled to the door 26, which is a detachable member, with the door 26 being removed from the main body of the heating chamber 11, making the assembly work easier. Furthermore, since more space is available, maintenance work on the components for observation, etc. can also be facilitated. Note that the detachable members in the heating chamber 11 are not limited to the door 26 of this embodiment, which is opened and closed when carrying the workpiece W into and out of the heating chamber 11, but may be an inspection lid provided for inspection of the inside of the heating chamber 11 or a dedicated lid, as long as they are detachable.

[0059] At the end of the tubes (12, 13, 14) inside the heating chamber 11, the contact area T, which is the area of ​​the contact region with the first transparent members (15, 16, 17), is set to be larger than the cross-sectional area S of the tubes (12, 13, 14).Therefore, when the temperature of the atmosphere inside the heating chamber 11 rises, heat from the part of the tubes (12, 13, 14) that extends inside the heating chamber 11 is easily transferred to the first transparent members (15, 16, 17), making it easier for the temperature of the first transparent members (15, 16, 17) to rise, and further suppressing the occurrence of condensation on the first transparent members (15, 16, 17).

[0060] [Variations] Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the claims. For example, the following modifications may be made.

[0061] In the above embodiment, the heat treatment apparatus 1 heats the workpiece W using superheated steam, but this need not be the only example, and the workpiece W may be heated using an atmosphere other than superheated steam. For example, moist air may be generated by bubbling a gas such as an inert gas or oxygen gas through water in a tank, and the moist air may be supplied as atmospheric gas into the heating chamber 11 and heated, thereby heating the workpiece W in the atmosphere.

[0062] Furthermore, in the above-described embodiment, an example was given in which the tubes (12, 13, 14) are provided in the heating chamber 11 in a state in which they penetrate the chamber wall of the heating chamber 11, but this is not necessarily the case. The tubes (12, 13, 14) may be attached to the inner wall surface of the chamber wall of the heating chamber 11 and provided so as to extend into the heating chamber 11. In this case, through holes that penetrate the inside and outside of the heating chamber 11 are provided in the chamber wall of the heating chamber 11 corresponding to the positions at which the tubes (12, 13, 14) are attached.

[0063] In addition, in the above-described embodiment, the tubes (12, 13, 14) are provided so as to extend from the flat inner wall surface of the chamber wall of the heating chamber 11 into the interior of the heating chamber 11, but this is not necessarily the case. A recessed area may be provided on the inner wall surface of the chamber wall of the heating chamber 11, and the tubes (12, 13, 14) may be provided so as to extend into the interior of the heating chamber 11 in the recessed area.

[0064] In addition, in the above-described embodiment, the tubes (12, 13, 14) are formed from a metal material, but this is not necessarily the case. Part or all of the tubes (12, 13, 14) may be formed from a transparent material such as transparent quartz glass or a heat-resistant transparent resin material, instead of a metal material. In this case, the transparent material in the tubes (12, 13, 14) may be formed integrally with the first transparent member (15, 16, 17), or may be formed separately and then joined. [Industrial Applicability]

[0065] The present invention can be widely applied as a heat treatment apparatus having a chamber for heating a workpiece by an atmosphere and a transparent window provided for observing the inside of the chamber. [Explanation of symbols]

[0066] 1: heat treatment device, 11: heating chamber (chamber), 12, 13, 14: cylinder, 15, 16, 17: first transparent member (transparent member), 18, 19: second transparent member, W: workpiece

Claims

1. A chamber for heating the workpiece by atmosphere; a tube disposed in the chamber and allowing light to pass between the inside and the outside of the chamber; Equipped with The tube is disposed to extend into the chamber, The cylinder is provided with a transparent member at an end portion inside the chamber, the transparent member blocking passage of atmosphere between the inside and the outside of the chamber. A heat treatment apparatus comprising:

2. The heat treatment device according to claim 1 , The inner diameter of the tube at an end portion outside the chamber is larger than the inner diameter of the tube at an end portion inside the chamber. A heat treatment apparatus comprising:

3. The heat treatment device according to claim 1 or 2, a first transparent member provided at an end of the tube inside the chamber, and a second transparent member provided at an end of the tube outside the chamber, A space is defined between the first transparent member and the second transparent member. A heat treatment apparatus comprising:

4. The heat treatment device according to claim 1 or 2, The cylinder is provided on a removable member in the chamber. A heat treatment apparatus comprising:

5. The heat treatment device according to claim 1 or 2, a contact area between the tube and the transparent member at an end of the tube inside the chamber is larger than a cross-sectional area of ​​a portion of the tube extending inside the chamber; A heat treatment apparatus comprising:

Images