Gyro vibration meter, electronic stethoscope, and electronic apparatus

Abstract

To improve detection sensitivity of a gyro vibration meter.SOLUTION: A gyro vibration meter (1) comprises: a support body (10); a film (20) having an edge (21), which is disposed on the support body; a sensor board (30) which comprises a fixed part (31) disposed on the support body side of the film and partially fixed to the film and a swing part (32) obtained by disconnecting from the film a portion different from the fixed part; and a gyro sensor (40) disposed on the swing part.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present disclosure relates to a gyroscopic vibrometer, an electronic stethoscope, and an electronic device. [Background technology]

[0002] 2. Description of the Related Art Vibrometers that detect vibrations as physical quantities are known in the art. These types of vibrometers include, for example, a gyro sensor, and detect the physical quantity of the vibrations based on the angular velocity detected by the gyro sensor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2023 / 276803 Brochure Summary of the Invention [Problem to be solved by the invention]

[0004] The conventional techniques have room for improvement in terms of vibration detection sensitivity. One aspect of the present disclosure is to improve the detection sensitivity of a gyro vibrometer. [Means for solving the problem]

[0005] A gyroscopic vibrometer according to one aspect of the present disclosure comprises a support, a membrane having an edge portion with the edge portion disposed on the support, a fixed portion disposed on the support side of the membrane and a oscillating portion having a portion different from the fixed portion that is released from the membrane, and a sensor substrate including the fixed portion, and a gyroscopic sensor disposed on the oscillating portion.

[0006] An electronic stethoscope according to one aspect of the present disclosure comprises an auscultation unit equipped with the gyroscopic vibrometer and detecting biological sounds by contacting the membrane with a biological surface, a housing unit to which the auscultation unit is detachably attached, and a main body including a holding unit connected to the housing unit and held by a user, and the auscultation unit is capable of detecting the biological sounds even when separated from the main body.

[0007] An electronic device according to an aspect of the present disclosure includes the gyro vibrometer and a sound output unit that outputs sound data generated based on a detection signal of the gyro sensor. Effect of the Invention

[0008] According to one aspect of the present disclosure, the detection sensitivity of a gyro vibrometer can be improved. [Brief description of the drawings]

[0009] [Figure 1] 1 is a schematic view of a gyro vibrometer according to a first embodiment of the present invention. [Diagram 2] FIG. 1 is a top view of a gyro vibrometer according to a first embodiment. [Diagram 3] 3 is a cross-sectional view of the gyro vibrometer according to the first embodiment taken along line II-II in FIG. 2. [Figure 4] 3. FIG. 4 is a cross-sectional view of the gyro vibrometer according to the first embodiment taken along line III-III in FIG. [Diagram 5] FIG. 4 is an enlarged view of a portion surrounded by a dashed line in FIG. 3, showing the configuration of a sensor substrate and a gyro sensor formed on a film. [Figure 6] 5 is an enlarged view of a portion surrounded by a dashed line in FIG. 4, and shows the configuration of a gyro sensor and the like of the gyro vibrometer. FIG. [Figure 7] 1 is a diagram illustrating an example of the relationship between the relative position on the membrane of a gyro vibrometer and the displacement of the membrane per unit time. [Figure 8] FIG. 11 is a block diagram showing a configuration of a gyro vibrometer according to a second embodiment. [Figure 9]11 is a diagram showing the configuration of a membrane of a gyro vibrometer according to a second embodiment, viewed from the negative Z-axis direction. FIG. [Figure 10] 10 is a graph showing the relationship between the S / N ratio (dB) and frequency (Hz) in the gyro vibrometer including the first sensor unit and the second sensor unit according to the second embodiment. [Figure 11] 10 is a graph showing an example of the relationship between the output and frequency of a detection signal in the gyro vibrometer according to the second embodiment. [Figure 12] 10 is a schematic diagram showing the configuration of a base unit, a sensor substrate, and a gyro sensor included in a gyro vibrometer according to a third embodiment. FIG. [Figure 13] 13 is a schematic diagram for explaining a method in which an oscillating part transmits vibration of a membrane to a gyro sensor in the gyro vibrometer according to the third embodiment. FIG. [Figure 14] FIG. 11 is a schematic diagram showing an overview of an electronic stethoscope according to a fourth embodiment, in a state in which the auscultation unit is attached to the housing unit. [Figure 15] FIG. 11 is a schematic diagram showing an overview of the electronic stethoscope according to embodiment 4 in a state where the auscultation unit is removed from the housing unit. [Figure 16] FIG. 11 is a schematic diagram showing a state in which an electronic stethoscope according to a fourth embodiment is placed on a flat surface with the membrane facing upward. [Figure 17] FIG. 11 is a schematic diagram of an electronic system including an electronic device according to a fifth embodiment. [Figure 18] FIG. 1 is a block diagram showing an example of the configuration of an electronic stethoscope equipped with a sound generating device. [Figure 19] 1 is a graph showing the relationship between time (seconds) and output value (V) in detection using a gyro vibrometer. [Figure 20] 1 is a graph showing the relationship between time (seconds) and output value (V) in detection using a gyro vibrometer equipped with a base portion. [Figure 21] 13 is a graph showing the relationship between time (seconds) and output value (V) in detection using a gyro vibrometer as a comparative example that does not have a base portion. [Figure 22] 1 is a graph showing the relationship between frequency (Hz) and SN ratio (dB). DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] [Embodiment 1] The gyro vibrometer 1 according to the first embodiment of the present disclosure will be described below with appropriate reference to the drawings.

[0011] 1 to 4 show an outline of the gyro vibrometer 1 according to the first embodiment. FIG. 1 is a general view of the gyro vibrometer 1 according to the present embodiment, showing the outer shape of the gyro vibrometer 1 as viewed from the Y-axis negative direction side (side side). FIG. 2 is a top view of the gyro vibrometer 1 according to the present embodiment, showing the outer shape of the gyro vibrometer 1 as viewed from the Z-axis positive direction (cover 22) side. FIG. 3 is a cross-sectional view of the gyro vibrometer 1 taken along line II-II in FIG. 2, showing the internal structure of the gyro vibrometer 1. FIG. 4 is a cross-sectional view of the gyro vibrometer 1 according to the present embodiment taken along line III-III in FIG. 3, showing the configuration of the membrane 20 of the gyro vibrometer 1 as viewed from the Z-axis negative direction side.

[0012] The gyro vibrometer 1 includes a support 10, a membrane 20 disposed on the support 10, a sensor substrate 30, and a gyro sensor 40. Specifically, the membrane 20 has an edge 21, which is disposed on the support 10. The sensor substrate 30 is disposed on the support 10 side of the membrane 20, and includes a fixed portion 31 fixed to the membrane 20 and a swinging portion 32 that swings relative to the fixed portion 31. The gyro sensor 40 is disposed on the swinging portion 32 of the sensor substrate 30, and can detect vibrations of the membrane 20.

[0013] The gyro vibrometer 1 has the above-mentioned configuration and is a vibrometer that can be brought into contact with an object to detect vibrations of the object. When the object is a patient's body, the gyro vibrometer 1 may be used by being brought into contact with the patient's chest, back, wrist, neck, abdomen, etc. The gyro vibrometer 1 may be configured to receive vibrations of the object by a membrane 20 (described later) and detect vibrations generated in the membrane 20. The gyro vibrometer 1 transmits a detection signal corresponding to the detected vibrations.

[0014] <Support 10> The support 10 can function as a part to be held by the user when used. The support 10 can support the membrane 20. In particular, the support 10 can support the membrane 20 on the upper surface of the support 10 with a predetermined tension applied to the membrane 20. The support 10 may support the membrane 20 so as to bend it toward the opposite side of the support 10 (positive direction of the Z axis) as shown in FIG. 3. As a result, when the gyro vibrometer 1 detects the vibration of the object, the adhesion between the membrane 20 and the object can be improved. The support 10 and the membrane 20 may be connected to each other by fitting or the like so as to be easily removable so that the membrane 20 can be replaced when it becomes dirty or damaged. The support 10 and the membrane 20 may be fixed to each other by an adhesive or the like. Examples of the adhesive include a resin material such as an epoxy resin, and a metal material such as a solder.

[0015] In this embodiment, the support 10 has a recess 11 having an opening 12 as shown in FIG. 3. In this embodiment, the film 20 is arranged so as to cover the opening 12. The support 10 may have a bottom 13 and a wall 14. The depth of the recess 11 is not particularly limited, but may be deep enough that the film 20 does not come into contact with the inner surface of the recess 11 when the film 20 vibrates. The recess 11 may be connected to the outside through a hole or the like provided in the bottom 13 or the wall 14, or a gap between the bottom 13 and the wall 14. The support 10 is not limited to a shape having the recess 11 and the opening 12, and may be, for example, a cylindrical shape or a truncated cone shape. In addition, when the support 10 has a cylindrical shape, the shape on the positive side of the Z axis may be a broken line shape or a wavy line shape with alternating concaves and cones.

[0016] In this embodiment, the outer shape of the support 10 when viewed from above in the Z-axis direction is circular. The outer shape of the support 10 when viewed from above in the Z-axis direction is not limited to a circle, and may be a square, a rectangle, or an ellipse. In addition, the outer shape of the support 10 when viewed from above in the Z-axis direction may be the same as the outer shape of the film 20 when viewed from above in the Z-axis direction. In particular, in consideration of the impact resistance of the support 10, the outer shape when viewed from above in the Z-axis direction may be circular.

[0017] The support 10 may be made of, for example, resin, metal, ceramic, etc. Also, the support 10 may be covered with a material that can easily deform in response to an external shock so that the support 10 does not vibrate due to an external shock, etc. Examples of the material that can easily deform include silicone rubber and urethane rubber.

[0018] In the present embodiment, the support 10 is formed such that the bottom 13 and the wall 14 are integrally formed. Here, integrally means that a plurality of members are not joined together and are formed as one member. The support 10 may be formed by manufacturing the bottom 13 and the wall 14 as separate members and then combining them with an adhesive or the like. For example, a resin material such as epoxy resin or a metal material such as solder may be used as the adhesive or the like. In addition, the support 10 may be formed such that a part of the outer surface of the wall 14 is formed in a concave or convex shape so that the user can easily hold it. In addition, the bottom 13 or the wall 14 of the support 10 may be formed with a hole connecting the recess 11 to the outside. When the support 10 has a hole connecting the recess 11 to the outside, the user can check for a malfunction of the internal configuration (for example, a break in the conductors 61a and 61b) without disassembling the gyro vibrometer 1.

[0019] <Membrane 20> The membrane 20 has an edge 21, and the edge 21 is disposed on the support 10. The membrane 20 receives vibrations from an object and can deform in response to the received vibrations so as to be displaced mainly in the up-down direction (in this embodiment, this refers to the Z-axis direction). Here, the downward direction refers to the direction in which the support 10 is disposed relative to the membrane 20, and the upward direction refers to the direction in which the support 10 is not disposed relative to the membrane 20. The membrane 20 can also transmit vibrations from the object to the gyro sensor 40.

[0020] In this embodiment, as shown in Fig. 3, the film 20 is disposed so as to cover the entire opening 12. In addition, a sensor substrate 30 and a gyro sensor 40 are disposed on the surface of the film 20 facing the support 10. In this embodiment, as shown in Fig. 3, the sensor substrate 30 and the gyro sensor 40 are disposed in the center of the film 20.

[0021] FIG. 5 is an enlarged view of the portion surrounded by the dashed line in FIG. 3, and shows the configuration of the sensor substrate 30 and the gyro sensor 40 formed on the film 20. As shown in FIG.

[0022] As shown in FIG. 5, the gyro vibrometer 1 may further include a base 23 formed integrally with the film 20 in order to fix the sensor substrate 30. As shown in FIG. 5, the base 23 may be disposed near the center of the surface of the film 20 on the support 10 side, or may be disposed at a position away from the center (a position not overlapping with the center). The fixing portion 31 of the sensor substrate 30 may be fixed to the base 23. By providing the base 23 in the gyro vibrometer 1, the fixing portion 31 of the sensor substrate 30 is fixed to the film 20 via the base 23. This widens the gap between the film 20 and the oscillating portion 32 of the sensor substrate 30, making it difficult for the oscillating portion 32 to come into contact with the film 20 during oscillation. In addition, since the film 20 and the base 23 are formed integrally, the vibration of the film 20 can be appropriately transmitted to the sensor substrate 30 via the base 23.

[0023] 5, the thickness of the base portion 23 in the thickness direction of the film 20 (length indicated by reference numeral 501 in FIG. 5) may be equal to or less than half the thickness of the film 20 at the portion where the base portion 23 is disposed (length indicated by reference numeral 502 in FIG. 5). By making the thickness of the base portion 23 thinner relative to the film 20, the vibration of the film 20 can be easily transmitted to the sensor substrate 30, thereby improving the detection sensitivity of the gyro vibrometer 1.

[0024] 2, in this embodiment, the outer shape of the film 20 when viewed from above in the Z-axis direction is circular. The outer shape of the film 20 when viewed from above in the Z-axis direction is not limited to a circle, and may be a square, a rectangle, or an ellipse. In addition, the outer shape of the film 20 when viewed from above in the Z-axis direction may be the same as the outer shape of the support 10 when viewed from above in the Z-axis direction.

[0025] The shape of the membrane 20 when viewed from the cross section of the gyro vibrometer 1 shown in FIG. 3 may be, for example, a curved surface that is convex on one side. In particular, in this embodiment, the shape is convex with respect to the object whose vibration is to be detected, in other words, concave with respect to the bottom surface of the support 10. In the case of a curved surface that is convex on one side, for example, the membrane 20 may be formed of a material having a rigidity sufficient to maintain a concave shape, and may be formed into a curved surface that is convex on one side when the membrane 20 is formed. As another example of forming the membrane 20 into a curved surface that is convex on one side, the membrane 20 may be formed into a plate shape and fixed to the support 10 so as to be bent. The support 10 according to this embodiment has a recess 11, but as long as the membrane 20 has a curved surface that is convex on one side and a space that allows the membrane 20 to vibrate is secured, the support 10 does not necessarily have to have a recess 11. The membrane 20 may be flat. That is, the membrane 20 may be a planar shape that follows the opening 12.

[0026] The thickness of the film 20 may be, for example, 10 to 5000 μm. In particular, from the viewpoint of receiving vibrations with good sensitivity, the thickness may be 20 to 2000 μm, or may be 50 to 1000 μm. The thickness of the film 20 may be uniform throughout the film 20, or may vary depending on the part of the film 20.

[0027] The Young's modulus of the film 20 may be, for example, 0.1 MPa to 1000 GPa. In particular, from the viewpoint of receiving vibrations with good sensitivity, it may be 0.5 to 500 GPa, or may be 1 MPa to 400 GPa. Here, the method for measuring the Young's modulus of the film 20 is not particularly limited, but it is measured, for example, by a three-point bending test.

[0028] The density of the film 20 is, for example, 100 to 5000 kg / m 3 In particular, from the viewpoint of receiving vibration with good sensitivity, it is 500 to 4000 kg / m 3 and 800 to 2000 kg / m 3 may be also possible.

[0029] The vibration reception sensitivity of the film 20 can be evaluated by the sound speed (m / s) of vibration that the film 20 can receive. It can be said that the higher the sound speed of vibration that the film 20 can receive, the higher the vibration reception sensitivity of the film 20. Since the sound speed is calculated by dividing the Young's modulus value by the density value, it can be said that the higher the Young's modulus of the film 20 is and the lower the density is, the higher the sound speed, i.e., the higher the sensitivity is. For example, the sound speed of vibration that the film 20 can receive may be 10 to 20,000 m / s. In particular, from the viewpoint of receiving vibration with good sensitivity, the sound speed of vibration that the film 20 can receive may be 100 to 15,000 m / s, or may be 1,000 to 15,000 m / s.

[0030] The material of the film 20 is not particularly limited, but may be, for example, silicone, glass epoxy, ABS (acrylonitrile butadiene styrene), CFRP (carbon fiber reinforced plastic), urethane, epoxy, etc. In particular, from the viewpoint of receiving vibrations with good sensitivity, silicone, glass epoxy, and CFRP may be used.

[0031] The film 20 may have different physical properties depending on the frequency of the vibration to be detected. When detecting high-frequency vibration, for example, a hard material, i.e., a material with a high Young's modulus, or a material with a large film thickness may be selected as the film 20. When detecting low-frequency vibration, a soft material, i.e., a material with a low Young's modulus, or a material with a small film thickness may be selected as the film 20. When an electronic device has a plurality of gyro vibrometers 1, for example, each gyro vibrometer 1 may have a film 20 with different physical properties.

[0032] As described above, the film 20 has an edge 21. The edge 21 is a portion of the film 20 that overlaps with the support 10 in the vertical direction. In this embodiment, the edge 21 corresponds to the outer edge of the film 20 and is a portion that is disposed on the support 10. In this embodiment, as shown in FIG. 3, the edge 21 is disposed on the surface of the wall 14 of the support 10 on the positive side of the Z axis. The edge 21 may have the same shape as the fixing surface with the support 10 so that the film 20 is more reliably fixed to the support 10. In this embodiment, the film 20 is formed so that the shape of the edge 21 is the same as the outer shape of the support 10 when viewed from above in the Z axis direction.

[0033] Moreover, the edge portion 21 may be fixed to the support 10 by an adhesive or the like. For example, a resin material such as an epoxy resin or a metal material such as a solder can be used as the adhesive or the like. In particular, the adhesive or the like may be a resin material or the like from the viewpoint of reducing the transmission of vibration of the membrane 20 to the support 10. Moreover, in this embodiment, the entire edge portion 21 of the membrane 20 is fixed onto the support 10 by an adhesive. Only a part of the edge portion 21 may be fixed onto the support 10. The edge portion 21 may be made of the same material as the membrane 20, or may be made of a different material.

[0034] Moreover, the gyro vibrometer 1 of this embodiment further includes a cover 22 that covers the upper surface of the membrane 20 (the surface on the positive side of the Z axis in FIGS. 2 and 3). The gyro vibrometer 1 having the cover 22 prevents the membrane 20 from directly touching the object, and can reduce deterioration of the membrane 20.

[0035] In this embodiment, the cover 22 is disposed on the support 10 so as to cover the entire opening 12 of the support 10. The cover 22 and the support 10 may be fixed with an adhesive or the like, similar to the fixing of the membrane 20 and the support 10. In this embodiment, the cover 22 is disposed between the membrane 20 and the object when the gyro vibrometer 1 detects vibration of the object. From the viewpoint of transmitting vibration to the membrane 20 by the cover 22, the cover 22 and the membrane 20 may be in contact with each other.

[0036] Furthermore, the cover 22 may be made of the same material as the membrane 20, or a different material. The cover 22 may be made of, for example, a waterproof material. This allows the part of the gyro vibrometer 1 that comes into contact with the target object to be washed with tap water or the like, and the gyro vibrometer 1 can be kept hygienic.

[0037] <Sensor board 30> The sensor board 30 is a board on which the gyro sensor 40 is mounted. The sensor board 30 is, for example, a flexible board, and is configured to transmit the vibration of the membrane 20 to the gyro sensor 40. The sensor board 30 is also connected to the control board 60 via a conductor 61a, and transmits a signal output based on the vibration detected by the gyro sensor 40 to the control board 60. As shown in Fig. 3 and Fig. 5, the sensor board 30 includes a fixed portion 31 and a swinging portion 32, and is disposed on the support 10 side of the membrane 20.

[0038] 5, at least a portion of the fixed portion 31 is fixed to the membrane 20, and is adapted to vibrate in accordance with the vibration of the membrane 20. For example, the fixed portion 31 may be disposed on a base portion 23 that is integrally formed with the membrane 20.

[0039] 5, the oscillating part 32 is a member that oscillates relative to the fixed part 31, and a portion different from the fixed part 31 is released from the membrane 20. In other words, the tip part 503 of the oscillating part 32 located on the opposite side to the fixed part 31 is not fixed, and the oscillating part 32 is capable of oscillating and rocking relative to the fixed part 31 in response to the vibration of the fixed part 31. The oscillating part 32 may be provided so as to extend from the fixed part 31 toward the center of the membrane 20.

[0040] 5, the sensor substrate 30 may include a flexible joint portion 33 between the fixed portion 31 and the oscillating portion 32. The joint portion 33 is more flexible than the fixed portion 31 and the oscillating portion 32. Therefore, when the membrane 20 vibrates, the joint portion 33 bends, and the oscillating portion 32 can be oscillated relative to the fixed portion 31.

[0041] For example, when the membrane 20 vibrates, the fixed part 31 vibrates in accordance with the vibration of the membrane 20. The joint part 33 flexes in accordance with the vibration of the fixed part 31, causing the oscillating part 32 to oscillate relative to the fixed part 31. In other words, the joint part 33 functions as a rotation axis, causing the oscillating part 32 to oscillate relative to the fixed part 31.

[0042] In the sensor substrate 30, the fixed portion 31, the joint portion 33, and the swinging portion 32 may have different layer structures or materials. For example, the fixed portion 31 may be made of polyimide, the joint portion 33 may also be made of polyimide, and the swinging portion 32 may have a laminated structure of polyimide and a copper plate. By designing the fixed portion 31, the joint portion 33, and the swinging portion 32 in this way, the sensor substrate 30 has improved sensitivity to sounds mainly in the 50 to 500 Hz band. In addition, the fixed portion 31 may have a laminated structure of polyimide and a copper plate, and the joint portion 33 and the swinging portion 32 may also have a laminated structure of polyimide and a copper plate. By designing the fixed portion 31, the joint portion 33, and the swinging portion 32 in this way, the sensor substrate 30 has improved sensitivity to sounds mainly in the 500 to 1100 Hz band. As described above, by partially varying the layer structure or material, including the thickness, of the sensor substrate 30 for the fixed portion 31, the joint portion 33, and the oscillating portion 32, the natural frequency of the sensor substrate 30 can be changed, thereby adjusting the sensitivity band of the gyro sensor 40.

[0043] <Gyro sensor 40> The gyro sensor 40 is a sensor for detecting vibrations generated by an object as angular velocity. The gyro sensor 40 detects vibrations of the membrane 20 associated with vibrations generated by the object. The gyro sensor 40 may be any sensor capable of detecting vibrations as angular velocity, and may be a gyro sensor using quartz as in the present embodiment, a gyro sensor using ceramics, or a gyro sensor using silicon.

[0044] The gyro sensor 40 is disposed on the support 10 side of the film 20. In particular, in this embodiment, the gyro sensor 40 is disposed on the oscillating portion 32 of the sensor substrate 30 disposed in the central portion of the film 20. The gyro sensor 40 may be disposed in a portion of the film 20 other than the central portion.

[0045] The angle (angular velocity) of the gyro sensor 40 changes with the oscillation of the oscillating portion 32. Since the oscillating portion 32 oscillates with the vibration of the membrane 20, when an object touched by the membrane 20 vibrates, the gyro sensor 40 oscillates in response to the vibration and can output a detection signal in response to the vibration. For example, when the object is a living organism, the gyro sensor 40 can detect the vibration emitted by the living organism and output a detection signal in response to the vibration.

[0046] Here, the external shape and the like of the gyro sensor 40 in this embodiment will be described with reference to Fig. 4 and Fig. 6. Fig. 6 is an enlarged view of a portion surrounded by a dashed line in Fig. 4, and is a view showing the configuration of the gyro sensor 40 and the like of the gyro vibrometer 1. In this embodiment of the gyro sensor 40, the external shape of the gyro sensor 40 is, for example, rectangular. The external shape of the gyro sensor 40 is not limited to a rectangle, and may be a square, a circle, a trapezoid, or the like.

[0047] In the present embodiment, the gyro sensor 40 includes a drive arm that excites the bending vibration, a detection arm that detects the bending vibration, and electrodes that convert the vibration of each arm into an electrical signal. The gyro sensor 40 may be a quartz crystal resonator made of quartz crystal.

[0048] A mechanism for the gyro sensor 40 to detect the vibration of the membrane 20 will be described. As shown in FIG. 6, the gyro sensor 40 is composed of drive arms 401 and 402, a detection arm 403, and a base 404. Although not shown, the gyro sensor 40 may include an electrode for converting the vibration of the drive arms 401 and 402 into an electric signal, and an electrode for converting the vibration of the detection arm 403 into an electric signal. The drive arms 401 and 402 and the detection arm 403 have a longitudinal direction in the X-axis direction. The drive arms 401 and 402 excite bending vibration in the Y-axis direction. When an angular velocity around the X-axis is applied in a state in which the drive arms 401 and 402 excite bending vibration, the detection arm 403 detects the bending vibration to detect the angular velocity around the X-axis. As a result, the gyro sensor 40 can detect the oscillation of the oscillating part 32 accompanying the vibration of the membrane 20 as an angular velocity.

[0049] From the standpoint of detecting vibrations with high sensitivity, the gyro sensor 40 may be arranged so that a virtual straight line L1 connecting the center c1 of the fixed part 31 and the center c2 of the oscillating part 32 intersects with a rotation axis R1 of the angular velocity that the gyro sensor 40 can detect.

[0050] The gyro sensor 40 may be disposed at a position where the displacement per unit time of the membrane 20 is maximum when the membrane 20 receives the vibration of the object and is deformed. When the membrane 20 receives the vibration of the object and is deformed, the membrane 20 has an "abdomen a" where the amplitude is maximum and the displacement is maximum, but the inclination is zero, and a "node b" where the amplitude is zero and the inclination is maximum. The position where the displacement of the membrane 20 is maximum is the position of the abdomen a. Furthermore, the abdomen a and the node b appear at different positions depending on the frequency of the vibration. As an example, in the case of a third-order vibration, the abdomen a and the node b appear in a positional relationship as shown in FIG. 7. Here, FIG. 7 is a graph illustrating the relationship between the relative position on the membrane of the gyro vibrometer 1 and the displacement of the membrane per unit time. In FIG. 7, the vertical axis shows the displacement of the membrane 20 per unit time, and the horizontal axis shows the relative position on the membrane 20.

[0051] As described above, the fixed portion 31 of the sensor substrate 30 is disposed on the membrane 20, and one end of the oscillating portion 32 is fixed to the fixed portion 31 (joint portion 33), and the other end opposite the fixed portion 31, that is, the tip portion 503, is open. In addition, the gyro sensor 40 is disposed on the oscillating portion 32. Therefore, when the membrane 20 vibrates, the angle (tilt) of the gyro sensor 40 changes in accordance with the oscillation of the oscillating portion 32. Therefore, the gyro sensor 40 can detect the vibration of the membrane 20 as an angular velocity.

[0052] As described above, in the gyro vibrometer 1 of this embodiment, the gyro sensor 40 is fixed on the oscillating part 32 of the sensor substrate 30, which has an open tip 503 side farther from the fixed part 31 of the gyro sensor 40. Therefore, when the membrane 20 receives vibrations from an object and deforms in response to the received vibrations, the oscillating part 32 oscillates relative to the fixed part 31 in accordance with the deformation of the membrane 20. As a result, vibrations are generated in the gyro sensor 40, and the gyro vibrometer 1 can detect the vibrations of the object by detecting the angular velocity of the vibrations around the Y axis.

[0053] <Control board 60> The gyro vibrometer 1 of this embodiment is provided with a control board 60 that is disposed on the support 10 and controls the gyro sensor 40. In this embodiment, the control board 60 is a board that can convert an electric signal based on the angular velocity of the vibration input from the gyro sensor 40 into an electric signal of vibration or sound. The support 10 can support the control board 60. In other words, the control board 60 may be provided on the support 10. The support 10 and the control board 60 may be fixed together with an adhesive or the like. Examples of the adhesive include a resin material such as an epoxy resin, or a metal material such as a solder.

[0054] In this embodiment, as shown in FIG. 2, the control board 60 is disposed on the bottom 13 of the support 10. In this embodiment, the control board 60 and the gyro sensor 40 are connected via a conductor 61a. In this embodiment, the conductor 61a is formed and included in the second fixing portion 50. The conductor 61a and the second fixing portion 50 may be formed separately. In this case, the conductor 61a may be formed by printing on the surface covering the opening 12 of the film 20 or on the inner surface of the wall portion 14 of the support 10. In addition, the control board 60 may be configured to transmit a detection signal of the gyro sensor 40 to an external device.

[0055] An electronic board such as a printed circuit board can be used as the control board 60. As described above, the conductor 61a may be made of a conductive material such as copper, silver, or gold, and may be made of rubber, carbon fiber reinforced plastics (CFRP), glass fiber reinforced plastics (GFRP), or the like to protect the conductive portion.

[0056] The gyro vibrometer 1 may also include a battery 62 for supplying electricity to the control board 60. In this embodiment, the battery 62 and the control board 60 are connected via a conductor 61b. Providing the gyro vibrometer 1 with the battery 62 has the advantage that the gyro vibrometer 1 is easy to carry and the place where the gyro vibrometer 1 can be used is not limited. The gyro vibrometer 1 may include a battery instead of the battery 62, or may be configured to be connected to an external power source.

[0057] As described above, the gyro vibrometer 1 according to one embodiment of the present disclosure comprises a support 10, a membrane 20 having an edge 21 with the edge 21 arranged on the support 10, a fixed portion 31 arranged on the support 10 side of the membrane 20 and a portion fixed to the membrane 20, and a sensor substrate 30 including an oscillating portion 32 having a portion (tip portion 503) different from the fixed portion 31 released from the membrane 20, and a gyro sensor 40 arranged on the oscillating portion 32.

[0058] In the above configuration, since the tip 503 of the oscillating part 32 is not fixed, the gyro sensor 40 disposed on the oscillating part 32 can be oscillated in response to the vibration of the membrane 20. In addition, since the transmission of unnecessary vibration from the tip 503 is suppressed, noise can be reduced. Therefore, according to the above configuration, the detection sensitivity of the gyro vibration meter 1 can be improved.

[0059] [Embodiment 2] Other embodiments of the present disclosure will be described below. For ease of explanation, the same reference numerals are used for members having the same functions as those described in the above embodiments, and the explanations thereof will not be repeated. Fig. 8 is a block diagram showing the configuration of a gyro vibrometer 1A according to a second embodiment. Fig. 9 shows the configuration of the membrane 20 of the gyro vibrometer 1A from the negative Z-axis direction side.

[0060] As shown in FIGS. 8 and 9, a gyro vibrometer 1A according to the second embodiment includes a first sensor unit 70A including a sensor substrate 30A and a gyro sensor 40A, and a second sensor unit 70B including a sensor substrate 30B and a gyro sensor 40B.

[0061] In the gyro vibrometer 1A, the first sensor unit 70A and the second sensor unit 70B have different frequency bands that the gyro sensors 40A and 40B detect. For example, the gyro sensor 40A of the first sensor unit 70A detects sounds in a lower frequency band than the gyro sensor 40B of the second sensor unit 70B. In other words, the gyro sensor 40B of the second sensor unit 70B detects sounds in a higher frequency band than the gyro sensor 40A of the first sensor unit 70A.

[0062] Fig. 10 is a graph showing the relationship between the signal-to-noise ratio (dB) and frequency (Hz) in the gyro vibrometer 1A including the first sensor unit 70A and the second sensor unit 70B. In Fig. 10, the graph indicated by reference numeral 1001 shows the output value from the first sensor unit 70A, and the graph indicated by reference numeral 1002 shows the output value from the second sensor unit 70B. As shown in Fig. 10, the gyro sensor 40A of the first sensor unit 70A may be capable of detecting sounds in a frequency band of 100 to 600 Hz with high sensitivity, and the gyro sensor 40B of the second sensor unit 70B may be capable of detecting sounds in a frequency band of 600 to 1000 Hz with high sensitivity.

[0063] 10, the graph indicated by reference numeral 1003 indicates a composite value of the output value from the first sensor unit 70A and the output value from the second sensor unit 70B. As shown in the graph indicated by reference numeral 1003 in FIG. 10, the gyro vibrometer 1A has a flatter S / N ratio by including multiple sensor units than a vibrometer having a single sensor unit. In this way, the gyro vibrometer 1A detects different frequency bands for each of the sensor units 70A and 70B, and therefore can improve detection sensitivity in a wider range of frequency bands than a vibrometer having only one sensor unit.

[0064] The first sensor unit 70A and the second sensor unit 70B may differ in at least one of the thickness, length, layer structure, and material of the sensor substrates 30A and 30B. For example, the sensor substrate 30A of the first sensor unit 70A may be formed of a relatively soft and flexible material or structure. By configuring the sensor substrate 30A in this way, the detection sensitivity of the low frequency band in the first sensor unit 70A can be improved. In addition, the sensor substrate 30B of the second sensor unit 70B may be formed of a relatively hard material or structure. In the high frequency band of the detection band, the vibration corresponding to the sound becomes faster than the low frequency band of the detection band. Here, by configuring the sensor substrate 30B in this way, high-speed vibration can be detected more accurately, so that the detection sensitivity of the low frequency band in the second sensor unit 70B can be improved. As described above, by making the characteristics of the sensor substrates 30A and 30B different for each sensor unit, the sensitivity band can be made different for each sensor unit.

[0065] In the first sensor unit 70A, the gyro sensor 40A has a driving unit 41A and a detection unit 42A. Similarly, in the second sensor unit 70B, the gyro sensor 40B has a driving unit 41B and a detection unit 42B. The "driving unit" corresponds to the "driving arm" in the example shown in FIG. 6, and the "detection unit" corresponds to the "detection arm" in the example shown in FIG. 6. In the gyro sensors 40A and 40B, a difference occurs between the driving frequency at which the driving units 41A and 41B vibrate and the detection frequency at which the detection units 42A and 42B vibrate. This frequency difference is called a detuning frequency.

[0066] Furthermore, at least one of the first sensor unit 70A and the second sensor unit 70B may have a cutoff filter 43. As shown in Fig. 8, the first sensor unit 70A and the second sensor unit 70B may include cutoff filters 43A and 43B, respectively. The cutoff filters 43A and 43B are filters that attenuate signals of detuning frequencies included in the detection bands of the gyro sensors 40A and 40B.

[0067] Since the signal of the detuned frequency also has large noise in sound detection, the influence of noise contained in the output signal can be reduced by attenuating the signal of the detuned frequency using the cutoff filters 43A and 43B.

[0068] Fig. 11 is a graph showing an example of the relationship between the output of the detection signal and the frequency in the gyro vibrometer 1A. In Fig. 11, the graph indicated by reference numeral 1101 shows the output value of the detection signal by the gyro sensor 40A of the first sensor unit 70A, and the graph indicated by reference numeral 1103 shows the noise signal included in the detection signal of the gyro sensor 40A. The graph indicated by reference numeral 1102 shows the output value of the detection signal by the gyro sensor 40B of the second sensor unit 70B, and the graph indicated by reference numeral 1104 shows the noise signal included in the detection signal of the gyro sensor 40B.

[0069] As shown in Fig. 11, the detection bands (reference numeral 1105 in Fig. 11) of the first sensor unit 70A and the second sensor unit 70B include a frequency band of detuning frequencies where noise is partially large, and the effects of these noises are reflected in the detection signals of the gyro sensor 40A and the gyro sensor 40B. Specifically, in the example shown in Fig. 11, the output value (reference numeral 1106) of the gyro sensor 40A in a frequency band around about 500 Hz and the output value (reference numeral 1107) of the gyro sensor 40B in a frequency band around about 1000 Hz are affected by noise.

[0070] The sensor substrate 30A can be set, for example, so that its natural frequency is lower than about 500 Hz, at which it is susceptible to noise. More specifically, the sensor substrate 30A can be set, for example, so that its natural frequency is 200 to 350 Hz. The sensor substrate 30B can be set, for example, so that its natural frequency is lower than about 1000 Hz, at which it is susceptible to noise. More specifically, the sensor substrate 30B can be set, for example, so that its natural frequency is 600 to 750 Hz.

[0071] Here, in the gyro vibrometer 1A, at least one of the gyro sensor 40A of the first sensor unit 70A and the gyro sensor 40B of the second sensor unit 70B has a cutoff filter 43A or 43B. This allows at least one of the gyro sensor 40A and the gyro sensor 40B to attenuate a signal of a detuned frequency that becomes noise and output a signal with reduced effects of noise.

[0072] As described above, in the gyro vibrometer 1A, at least one of the gyro sensor 40A and the gyro sensor 40B has the cutoff filter 43A or 43B, which can reduce the influence of noise due to signals of detuned frequencies and improve detection accuracy.

[0073] Furthermore, each of the first sensor unit 70A and the second sensor unit 70B may include a cutoff filter 43 and a bandpass filter 44 that is a filter that passes a predetermined frequency band. For example, the gyro sensor 40A of the first sensor unit 70A may include a cutoff filter 43A and a bandpass filter 44A, and the gyro sensor 40B of the second sensor unit 70B may include a cutoff filter 43B and a bandpass filter 44B.

[0074] The cutoff filter 43A is required to attenuate signals having a detuned frequency of the gyro sensor 40A, and the cutoff filter 43B is required to attenuate signals having a detuned frequency of the gyro sensor 40B. In other words, the cutoff filter 43A and the cutoff filter 43B may attenuate different signals having a detuned frequency.

[0075] The frequency bands that the bandpass filters 44A and 44B pass may be set appropriately depending on the corresponding gyro sensors. For example, the bandpass filter 44A provided in the first sensor unit 70A that detects low-frequency sounds may be a filter that passes a frequency band of 20 to 600 Hz. The bandpass filter 44B provided in the second sensor unit 70B that detects high-frequency sounds may be a filter that passes a frequency band of 500 to 1000 Hz.

[0076] In each of the first sensor unit 70A and the second sensor unit 70B, the combined order of the cutoff filter 43A and the bandpass filter 44A and the combined order of the cutoff filter 43B and the bandpass filter 44B may be the same. The order indicates the number of times that filtering is performed on the signal detected in the sensor unit. The order of the cutoff filter 43A and the order of the cutoff filter 43B may be the same or different.

[0077] In the sensor units, a certain amount of delay occurs when a signal is filtered. If the number of times that filtering is performed in the first sensor unit 70A differs from the number of times that filtering is performed in the second sensor unit 70B, there is a possibility that the timing at which the signal that has finally been filtered is output may differ.

[0078] Here, by making the combined orders of the cutoff filters 43A, 43B and the bandpass filters 44A, 44B the same between the sensor units, the synchronization of the gyro sensors 40A, 40B can be ensured, and a synchronization processing circuit for performing synchronization processing is not required. This makes it possible to suppress processing delays caused by incorporating a synchronization processing circuit, such as delays in hearing a delay between chest movement and the sounds detected by the gyro sensors 40A, 40B when the gyro vibrometer 1A is used as a stethoscope. Furthermore, by omitting the synchronization processing circuit, the device can be made smaller.

[0079] The cutoff filters 43A and 43B and the bandpass filters 44A and 44B may be mounted on the gyro sensors 40A and 40B, or on the sensor substrates 30A and 30B.

[0080] [Embodiment 3] Further another embodiment of the present disclosure will be described below. Fig. 12 is a schematic diagram showing the configuration of a base 23, a sensor substrate 30C, and a gyro sensor 40 included in a gyro vibrometer 1B according to embodiment 3. The gyro vibrometer 1B according to this embodiment includes a sensor substrate 30C instead of the sensor substrate 30. The sensor substrate 30C includes a swaying portion 32C instead of the swaying portion 32.

[0081] 12, the swinging part 32C includes a first part 321 that swings relative to the fixed part 31, and a second part 323 that is pivotally supported on the side of the first part 321 opposite to the fixed part 31 and rotates with the swing of the first part 321. Also, as shown in FIG. 12, the gyro sensor 40 is disposed in the second part 323.

[0082] The first part 321 oscillates in association with the vibration of the membrane 20. As shown in FIG. 12, the first part 321 includes a first rotation shaft 322. Therefore, the first part 321 oscillates in association with the vibration of the membrane 20 and at the same time rotates around the first rotation shaft 322. The second part 323 is a member that amplifies the rotational motion of the first part 321. As shown in FIG. 12, the second part 323 includes a second rotation shaft 324 and is rotatable around the second rotation shaft 324.

[0083] FIG. 13 is a schematic diagram for explaining a method in which the oscillating part 32C transmits the vibration of the film 20 to the gyro sensor 40. When the film 20 vibrates as shown by reference numeral 1301 in FIG. 13, the first part 321 oscillates with the vibration of the film 20 and rotates around the first rotation shaft 322. With the oscillation and rotational motion of the first part 321, the second part 323 rotates around the second rotation shaft 324 as shown by reference numeral 1302 in FIG. 13. In this way, the rotational motion of the second part 323 is added to the oscillation and rotational motion of the first part 321, thereby amplifying the rotation angle (oscillation angle) of the gyro sensor 40, and the gyro sensor 40 can be oscillated more greatly. That is, the second part 323 functions as an angle amplification mechanism that amplifies the rotational angle (oscillation angle) of the gyro sensor 40 by amplifying the oscillation angle of the first part 321. Therefore, the gyro sensor 40 can output a larger output value corresponding to the vibration of the membrane 20 .

[0084] As described above, in the gyro vibrometer 1B, the first portion 321 swings in response to the vibration of the membrane 20, and the second portion 323 rotates in response to the swing and rotation of the first portion 321. Therefore, by disposing the gyro sensor 40 in the second portion 323, the rotation angle (swing angle) of the gyro sensor 40 can be amplified, and the gyro sensor 40 can be swung more greatly. Therefore, according to the above configuration, the gyro sensor 40 can detect vibrations with higher sensitivity.

[0085] [Embodiment 4] Further embodiments of the present disclosure will be described below. Fig. 14 is a schematic diagram showing an overview of the electronic stethoscope 100 in a state where the auscultation unit 80 is attached to the housing unit 91. Fig. 15 is a schematic diagram showing an overview of the electronic stethoscope 100 in a state where the auscultation unit 80 is detached from the housing unit 91.

[0086] 14 and 15, the electronic stethoscope 100 includes an auscultation unit 80 for detecting biological sounds, a housing unit 91 to which the auscultation unit 80 is detachably attached, and a main body 90 including a gripping unit 92 connected to the housing unit 91 and held by a user. The auscultation unit 80 is also capable of detecting biological sounds even in a detached state in which it is detached from the main body 90. According to the above configuration, a user of the electronic stethoscope 100 can use the electronic stethoscope 100 in either a detached state in which the auscultation unit 80 is detached from the main body 90, or a combined state in which the auscultation unit 80 is attached to the main body 90, and therefore can switch the mode of use according to the purpose.

[0087] In addition, the electronic stethoscope 100 detects the distance between the auscultation unit 80 and the main body 90, and notifies the user based on the distance. For example, when the auscultation unit 80 is removed from the main body 90, the main body 90 may detect the distance between the auscultation unit 80 and the main body 90. The distance between the auscultation unit 80 and the main body 90 may be determined based on the communication sensitivity between the auscultation unit 80 and the main body 90. For example, the communication sensitivity may be reception power (reception sensitivity) or transmission power. For example, when the reception power (reception sensitivity) or transmission power between the auscultation unit 80 and the main body 90 becomes equal to or lower than a predetermined threshold, it may be determined that the auscultation unit 80 and the main body 90 have moved away from each other by a predetermined distance. In this way, when the auscultation unit 80 and the main body 90 move away from each other by a predetermined distance, the main body 90 may output a sound from a notification unit (not shown) capable of outputting sound, and notify the user that the main body 90 and the auscultation unit 80 have moved away from each other. The user may be notified in stages according to the communication sensitivity between the auscultation unit 80 and the main body 90. The user may be notified when (for example, immediately after) the auscultation unit 80 and the main body 90 are separated. Furthermore, the notification to the user may be used as a search function.

[0088] According to the above configuration, for example, when the distance between the auscultation unit 80 and the main body 90 becomes equal to or greater than a threshold value, the user is notified by sound or the like, thereby reducing the possibility of misplacing or losing the device.

[0089] Furthermore, when the main body 90 is detached from the auscultation unit 80, the electronic stethoscope 100 may automatically pair the auscultation unit 80 and the main body 90 so as to enable wireless communication. According to the above configuration, the auscultation unit 80 can be used immediately after being detached from the main body 90, improving the usability of the electronic stethoscope 100.

[0090] <Auscultation Section 80> The auscultation unit 80 is equipped with any one of the gyro vibrometers 1, 1A, and 1B described in the first to third embodiments, and is capable of detecting biological sounds by bringing the membrane 20 of the gyro vibrometer 1 into contact with a biological surface. The biological surface means the surface of the object on which sound is to be detected, and may be, for example, the epidermis of a patient. The auscultation unit 80 is capable of detecting biological sounds by itself when it is detached from the main body 90.

[0091] Furthermore, the power supply of the auscultation unit 80 may be controlled according to whether it is attached to or detached from the main body 90. This allows for control such as automatically turning on the power supply of the auscultation unit 80 when the auscultation unit 80 is detached from the main body 90, for example.

[0092] <Main body 90> The main body 90 includes a housing portion 91 to which the auscultation portion 80 is detachably attached, and a grip portion 92 that is connected to the housing portion 91 and is to be gripped by a user.

[0093] FIG. 16 is a schematic diagram showing a state where the electronic stethoscope 100 is placed on a flat surface 1601 with the membrane 20 facing upward. As shown in FIG. 16, the electronic stethoscope 100 is placed on the flat surface 1601 with the membrane 20 facing upward, and the gripping portion 92 is connected to the housing portion 91 at an angle (angle indicated by reference numeral 1603) so that at least a part of the tip side of the gripping portion 92 is in contact with the flat surface 1601. In the example shown in FIG. 16, the tip side of the gripping portion 92 refers to the end side (reference numeral 1602 side) opposite to the side connected to the housing portion 91. According to the above configuration, the electronic stethoscope 100 can be stably placed with the membrane 20 facing upward.

[0094] 16, the gripping portion 92 may have a flat surface (reference numeral 1604 in FIG. 16) that comes into contact with the plane 1601. According to this configuration, the electronic stethoscope 100 can be placed more stably.

[0095] 16, the electronic stethoscope 100 may be configured so that the rear surface of the housing portion 91 (reference numeral 1605 in FIG. 16) and the flat surface of the grip portion 92 (reference numeral 1604 in FIG. 16) are positioned on the same plane. With this configuration, the electronic stethoscope 100 can be placed even more stably.

[0096] [Embodiment 5] Further embodiments of the present disclosure will be described below. In this embodiment, an electronic device 201 for detecting vibration of an object and outputting a sound corresponding to a frequency band of a component contained in the detected vibration will be described. Here, the vibration of the object may be a vibration of a solid, liquid, or gas. The frequency band of the component contained in the vibration may be, for example, a frequency band corresponding to an audible sound or a frequency band corresponding to an ultrasonic wave. The electronic device 201 according to the present disclosure can be applied to, for example, a stethoscope, non-destructive testing, and confirmation of the internal operation of a precision machine.

[0097] In this embodiment, the electronic device 201 is applied to a stethoscope as an example. The electronic device 201 detects vibrations originating from, for example, breathing, heartbeat, blood flow in blood vessels, and digestive tract movement (for example, peristalsis) of a subject (for example, a patient), and generates a sound corresponding to the frequency band of a component contained in the detected vibration.

[0098] An electronic device 201 according to an embodiment of the present disclosure will be described with reference to Fig. 17. Fig. 17 is a schematic diagram of an electronic system 200 including the electronic device 201 according to an embodiment of the present disclosure. As shown in Fig. 17, the electronic system 200 includes the electronic device 201 and a sound generating device 202.

[0099] <Sound generation device 202> The sound generating device 202 generates a sound corresponding to the detection signal received from the gyro vibrometer 1 included in the electronic device 201. In other words, the sound generating device 202 converts an electric signal, which is the detection signal, into sound data. The sound generating device 202 is, for example, a computer. The sound generating device 202 transmits the generated sound data to the sound output unit 203 of the electronic device 201. When the gyro vibrometer 1 detects vibrations of a plurality of different frequencies, the sound generating device 202 may generate a sound by integrating the detected vibrations of the different frequencies when generating the sound data.

[0100] <Electronic equipment 201> 17, the electronic device 201 includes a gyro vibrometer 1 and a sound output unit 203 that outputs sound data generated based on a detection signal of a gyro sensor 40 included in the gyro vibrometer 1. The electronic device 201 may include a gyro vibrometer 1A or 1B instead of the gyro vibrometer 1. The electronic device 201 may also include an electronic stethoscope 100 equipped with any of the gyro vibrometers 1, 1A, or 1B instead of the gyro vibrometer 1.

[0101] 17 shows a configuration in which the electronic device 201 includes one gyro vibrometer 1 and one sound output unit 203, but the present invention is not limited to this. For example, the electronic device 201 may include a plurality of sound output units 203 for one gyro vibrometer 1. This allows a plurality of users (e.g., medical personnel) to hear a sound corresponding to the vibration detected by the gyro vibrometer 1 at the same time.

[0102] The gyro vibrometer 1 and the sound output unit 203 may be connected wirelessly. In the case of a wireless connection, the connection may be made using, for example, Bluetooth (registered trademark), Wifi (registered trademark), or the like. This makes it possible to output a sound corresponding to a detection signal even if the gyro vibrometer 1 and the sound output unit 203 are located apart from each other.

[0103] 17 shows a configuration in which the gyro vibrometer 1 and the sound output unit 203 are connected wirelessly, but the present invention is not limited to this. The gyro vibrometer 1 and the sound output unit 203 may be connected by wire.

[0104] 17 shows a configuration in which the gyro vibrometer 1 and the sound output unit 203 are connected wirelessly, but the present invention is not limited to this. The gyro vibrometer 1 and the sound output unit 203 may be connected by wire.

[0105] 17 shows a configuration in which electronic device 201 does not include sound generating device 202, but electronic device 201 may include sound generating device 202. When electronic device 201 has sound generating device 202, the function thereof may be mounted on control board 60, for example. In this case, sound data may be wirelessly output from control board 60 to sound output unit 203.

[0106] The sound output unit 203 outputs sound data generated based on the detection signal of the gyro sensor 40. The sound data output by the sound output unit 203 may be, for example, sound data generated by the sound generation device 202 based on the detection signal of the gyro sensor 40. In FIG. 17, the sound output unit 203 is an earphone, but is not limited thereto and may be, for example, a speaker. The sound generation device 202 and the sound output unit 203 may be connected by wire or wirelessly. From the viewpoint of portability of the sound output unit 203, the sound generation device 202 and the sound output unit 203 may be connected wirelessly, and examples of wireless connection include Bluetooth (registered trademark) and WiFi (registered trademark). The sound output unit 203 may further include a display device. The display device may display a waveform of vibration corresponding to the sound, a spectrogram showing the vibration, a time waveform of the vibration, a value of the frequency of the vibration, and the like. Examples of the display device include a display.

[0107] As described above, the electronic device 201 according to this embodiment includes the gyro vibrometer 1 and the sound output unit 203. According to the above configuration, it is possible to realize the electronic device 201 in which the detection sensitivity of the gyro vibrometer 1 is improved.

[0108] Fig. 18 is a block diagram showing a configuration example of an electronic stethoscope 100 equipped with a sound generating device 202. Fig. 18 shows a configuration example in which a sound generating device (sound generating unit) 202 is mounted on a main body 90 of the electronic stethoscope 100.

[0109] As shown in Figure 18, in this electronic stethoscope 100, when the gyro sensor 40 of the auscultation unit 80 detects vibrations of a living body (living body sounds), a detection signal (electrical signal) corresponding to the vibration is wirelessly transmitted from the auscultation unit 80 to the main body 90 using, for example, Bluetooth (registered trademark).

[0110] The detection signal transmitted from the auscultation unit 80 is converted by the sound generating device 202 of the main body 90 into sound data corresponding to the vibration of the living body, that is, the living body sound. The sound data generated by the sound generating device 202 is output from the main body 90 to the sound output unit 203, so that the user can hear the living body sound. For example, the main body 90 may be provided with an earphone jack or the like, and the living body sound may be heard by connecting an earphone or a speaker to the earphone jack. In addition, the sound data generated by the sound generating device 202 may be output to an external device equipped with a memory or the like. This allows the sound data corresponding to the living body sound to be stored in the external device.

[0111] The sound generating device 202 may be mounted on the auscultation unit 80 of the electronic stethoscope 100. In this case, sound data may be output from the auscultation unit 80 to the main body 90 or the sound output unit 203, or sound data may be output from the auscultation unit 80 to both the main body 90 and the sound output unit 203.

[0112] The present disclosure is not limited to the above-described embodiments, and various modifications are possible within the scope of the claims. Embodiments obtained by appropriately combining the technical means disclosed in different embodiments are also included in the technical scope of the present disclosure.

[0113] For example, the sensor substrates 30A, 30B of each sensor unit of the gyro vibrometer 1A having a plurality of sensor units according to the second embodiment may have a first portion 321 and a second portion 323 like the gyro vibrometer 1B according to the third embodiment.

[0114] The gyro sensor 40 of the gyro vibrometers 1 and 1B according to the first and third embodiments may include a cutoff filter 43A and a bandpass filter 44A, like the gyro sensor 40A according to the second embodiment.

[0115] 〔summary〕 A gyroscopic vibrometer according to a first aspect of the present disclosure includes a support, a membrane having an edge portion with the edge portion disposed on the support, a fixed portion disposed on the support side of the membrane and a oscillating portion having a portion different from the fixed portion that is released from the membrane, and a sensor substrate including the fixed portion, and a gyroscopic sensor disposed on the oscillating portion.

[0116] The gyro vibrometer according to a second aspect of the present disclosure is the gyro vibrometer of the first aspect, further comprising a base portion formed integrally with the membrane, and the fixed portion may be fixed to the base portion.

[0117] A gyro vibrometer according to a third aspect of the present disclosure is based on the first or second aspect, and the sensor board may include a flexible joint between the fixed portion and the oscillating portion.

[0118] A gyro vibrometer according to a fourth aspect of the present disclosure may be configured in such a manner that, in the second aspect, the thickness of the base portion in the film thickness direction of the film is less than half the film thickness of the film at the portion where the base portion is disposed.

[0119] A gyro vibrometer according to a fifth aspect of the present disclosure is based on the third aspect, and in the sensor substrate, the fixed portion, the joint portion, and the oscillating portion may have layer structures or materials different from one another.

[0120] A gyro vibrometer according to a sixth aspect of the present disclosure is any one of the first to fifth aspects, and includes a first sensor unit and a second sensor unit each including the sensor substrate and the gyro sensor, and the first and second sensor units may have different frequency bands detected by the gyro sensor.

[0121] A gyro vibrometer according to a seventh aspect of the present disclosure is the same as in the sixth aspect, wherein the first and second sensor units are different in at least one of thickness, length, layer structure, and material of the sensor substrate.

[0122] A gyro vibrometer according to aspect 8 of the present disclosure is, in aspect 6 or 7, the gyro sensor has a driving unit and a detection unit, and at least one of the first and second sensor units may have a detuning frequency within the detection band of the gyro sensor, which is the difference between a driving frequency at which the driving unit vibrates and a detection frequency at which the detection unit vibrates, and may have a cutoff filter that attenuates signals of the detuning frequency.

[0123] A gyro vibrometer according to a ninth aspect of the present disclosure is such that, in the eighth aspect, each of the first and second sensor units has a gyro sensor including the cutoff filter and a bandpass filter that passes a predetermined frequency band, and the combined order of the cutoff filter and the bandpass filter is the same.

[0124] A gyro vibrometer according to aspect 10 of the present disclosure is any one of aspects 1 to 9, wherein the oscillating portion includes a first portion that oscillates relative to the fixed portion and a second portion that is supported on the opposite side of the first portion from the fixed portion and rotates in association with the oscillation of the first portion, and the gyro sensor is disposed in the second portion.

[0125] The electronic stethoscope according to aspect 11 of the present disclosure includes an auscultation unit equipped with a gyroscopic vibrometer described in any one of aspects 1 to 10, and detecting biological sounds by contacting the membrane with a biological surface, and a main body including a housing to which the auscultation unit is detachably attached, and a gripping portion connected to the housing and held by a user, and the auscultation unit is capable of detecting the biological sounds even when detached from the main body.

[0126] An electronic stethoscope according to aspect 12 of the present disclosure is the same as aspect 11, in which the power supply of the auscultation unit may be controlled depending on whether it is attached or detached from the main body.

[0127] An electronic stethoscope according to aspect 13 of the present disclosure is the electronic stethoscope of aspect 11 or 12, wherein, in a state in which the membrane is placed facing upwards on a flat surface, the gripping portion is connected at an angle to the housing portion so that the tip side of the gripping portion is in contact with the flat surface.

[0128] An electronic stethoscope according to a fourteenth aspect of the present disclosure is, in the thirteenth aspect, such that the surface of the grip portion that comes into contact with the plane may be a flat surface.

[0129] An electronic stethoscope according to a fifteenth aspect of the present disclosure may be such that, in the fourteenth aspect, the rear surface of the housing portion and the flat surface of the gripping portion are located on the same plane.

[0130] The electronic stethoscope according to aspect 16 of the present disclosure, in any one of aspects 11 to 15, may detect the distance between the auscultation unit and the main body, and notify the user based on the distance.

[0131] In an electronic stethoscope according to aspect 17 of the present disclosure, in any of aspects 11 to 16, when the main body is detached from the auscultation unit, the auscultation unit and the main body may be automatically paired so as to enable wireless communication.

[0132] An electronic device according to an eighteenth aspect of the present disclosure includes a gyro vibrometer according to any one of the first to tenth aspects, and a sound output unit that outputs sound data generated based on a detection signal of the gyro sensor. EXAMPLES

[0133] An example of the present disclosure will be described below. In this example, a gyro vibrometer 1 according to the present disclosure was brought into contact with the epidermis of a person, and respiratory sounds and heart sounds were detected. The results are shown in Fig. 19. Fig. 19 is a graph showing the relationship between time (seconds) and output value (V) in detection using the gyro vibrometer 1.

[0134] In the results shown in Fig. 19, the peaks indicated by the arrows indicate three heart sounds, and the area surrounded by the dashed line indicates sounds from two breaths. As shown in Fig. 19, by using the gyro vibrometer 1 according to the present disclosure, data indicating sounds from breathing and heart sounds can be accurately detected. EXAMPLES

[0135] Another embodiment of the present disclosure will be described below. In this embodiment, a gyro vibrometer 1 with a base 23 and a gyro vibrometer 1 without a base 23 were brought into contact with the epidermis of a person to detect respiratory sounds. The results are shown in Fig. 20 and Fig. 21. Fig. 20 is a graph showing the relationship between time (seconds) and output value (V) in detection using the gyro vibrometer 1 with the base 23. Fig. 21 is a graph showing the relationship between time (seconds) and output value (V) in detection using the gyro vibrometer 1 without the base 23.

[0136] 20 and 21, the amplitude of the peak (indicated by the arrow in FIG. 20) of the gyro vibrometer 1 with the base portion 23 was greater than the amplitude of the peak (indicated by the arrow in FIG. 21) of the gyro vibrometer 1 serving as a comparative example without the base portion 23. Therefore, as shown in FIG. 20 and 21, it was found that the gyro vibrometer 1 according to the present disclosure, being provided with the base portion 23, has improved sensitivity compared to the conventional gyro vibrometer without the base portion 23. EXAMPLES

[0137] Further another embodiment of the present disclosure will be described below. In this embodiment, a gyro vibrometer 1 including a sensor substrate 30 including a fixed portion 31 and a oscillating portion 32 according to the present disclosure was brought into contact with an SN evaluation measuring device, and the S / N ratio was measured. As a comparative example, a gyro vibrometer not including a sensor substrate 30 including a fixed portion 31 and a oscillating portion 32 was brought into contact with an SN evaluation measuring device, and the S / N ratio was measured.

[0138] The results are shown in Fig. 22. Fig. 22 is a graph showing the relationship between frequency (Hz) and SNR (dB) as the results for Example 3. The graph indicated by reference numeral 2201 in Fig. 22 shows the results when the gyro vibrometer 1 according to the present disclosure was used, and the graph indicated by reference numeral 2202 shows the results when a conventional gyro vibrometer was used as a comparative example.

[0139] 22, the results using the gyro vibrometer 1 according to the present disclosure show an improved S / N ratio and smaller differences in S / N ratio for each frequency than the results using the conventional gyro vibrometer. In other words, it was found that the gyro vibrometer 1 according to the present disclosure shows an improved S / N ratio and flatter S / N ratio than the conventional gyro vibrometer. [Explanation of symbols]

[0140] 1, 1A, 1B Gyro Vibration Meter 10 Support 20 membrane 21 Edge 23 Base 30, 30A, 30B, 30C Sensor board 31 Fixed part 32, 32C Swinging Part 33 Joints 40, 40A, 40B Gyro sensor 41A, 41B Drive unit 42A, 42B Detector 43A, 43B Cutoff Filter 44A, 44B Bandpass Filters 70A First Sensor Unit 70B Second sensor unit 80 Stethoscope 90 Main Body 91 Storage unit 92 Gripping part 321 Part 1 323 Part 2 100 Electronic stethoscope 201 Electronic equipment 203 Sound output section

Claims

1. A support; a membrane having an edge, the edge being disposed on the support; a sensor substrate including a fixed part disposed on the support side of the membrane, a part of which is fixed to the membrane, and a swinging part having a part different from the fixed part and released from the membrane; A gyro sensor disposed on the swinging portion; A gyro vibration meter comprising:

2. Further comprising a base portion integrally formed with the membrane, The gyro vibrometer according to claim 1 , wherein the fixed portion is fixed to the base portion.

3. 3. The gyro vibrometer according to claim 1, wherein the sensor substrate includes a flexible joint portion between the fixed portion and the oscillating portion.

4. 3. The gyro vibrometer according to claim 2, wherein the thickness of the base in a thickness direction of the film is equal to or less than half the thickness of the film at a portion where the base is disposed.

5. 4. The gyro vibrometer according to claim 3, wherein the fixed portion, the joint portion, and the oscillating portion of the sensor substrate have layer structures or materials different from one another.

6. a first sensor unit and a second sensor unit each including the sensor substrate and the gyro sensor; 3. The gyro vibrometer according to claim 1, wherein the first and second sensor units have gyro sensors that detect different frequency bands.

7. 7. The gyro vibrometer according to claim 6, wherein the first and second sensor units are different from each other in at least one of the thickness, length, layer structure, and material of the sensor substrate.

8. The gyro sensor has a drive unit and a detection unit, At least one of the first and second sensor units is The gyro sensor includes a detuning frequency, which is a difference between a drive frequency at which the drive unit vibrates and a detection frequency at which the detection unit vibrates, within a detection band, and 7. The gyro vibrometer according to claim 6, further comprising a cutoff filter for attenuating signals of the detuned frequency.

9. Each of the first and second sensor units comprises: the gyro sensor includes the cutoff filter and a bandpass filter that passes a predetermined frequency band; 9. The gyro vibrometer according to claim 8, wherein the cutoff filter and the bandpass filter have the same combined order.

10. the swinging portion includes a first portion that swings relative to the fixed portion, and a second portion that is pivotally supported on a side of the first portion opposite the fixed portion and that rotates in association with the swinging of the first portion, The gyro vibrometer according to claim 1 , wherein the gyro sensor is disposed in the second portion.

11. an auscultation unit that includes the gyro vibrometer according to claim 1 or 2 and detects biological sounds by bringing the membrane into contact with a biological surface; a housing portion to which the auscultation unit is detachably attached, and a main body including a grip portion connected to the housing portion and gripped by a user; The electronic stethoscope, wherein the auscultation unit is capable of detecting the vital sounds even when detached from the main body.

12. The electronic stethoscope according to claim 11, wherein a power supply of the auscultation unit is controlled depending on whether the auscultation unit is attached to or detached from the main body.

13. The electronic stethoscope according to claim 11, wherein the gripping portion is connected to the housing portion at an angle such that a tip side of the gripping portion is in contact with the plane when the membrane is placed on a plane with the membrane facing upward.

14. The electronic stethoscope according to claim 13, wherein the grip portion has a flat surface that comes into contact with the plane.

15. The electronic stethoscope of claim 14 , wherein the rear surface of the housing and the flat surface of the gripping portion are flush with each other.

16. The electronic stethoscope according to claim 11, further comprising: a detecting unit configured to detect a distance between the auscultation unit and the main body; and a user is notified based on the detected distance.

17. The electronic stethoscope according to claim 11, wherein when the main body is detached from the auscultation unit, the auscultation unit and the main body are automatically paired so as to be capable of wireless communication.

18. A gyro vibrometer according to claim 1 or 2; a sound output unit that outputs sound data generated based on a detection signal of the gyro sensor.

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