Conveyance unit, conveyance method and processing device

Abstract

To provide novel constitution of a conveyance unit that eliminates troublesomeness of adjusting work.SOLUTION: According to one embodiment of a conveyance unit 10, a conveyance unit 10 has a pair of belts 20A, 20B which are arranged in parallel so as to be mounted with and convey a conveyance object 4 from one side to the other side, and a drive mechanism 30 which winds and drives the respective belts 20A, 20B, and the conveyance unit 10 is provided with a pair of end pulleys 37, 38 opposite each other to be wound with the respective belts on one side and the other side of the drive mechanism, wherein the distances H7, H8 between the belts at positions of the end pulleys 37, 38 are narrower than the distance H0 between the belts 20A, 20B at the other position.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a transport unit that automatically transports workpieces between devices. [Background technology]

[0002] 2. Description of the Related Art Conventionally, as disclosed in Patent Document 1, for example, in a semiconductor chip manufacturing process, it is known to arrange processing devices that perform different processing steps side by side and move a workpiece between the devices.

[0003] Patent Document 1 discloses a configuration in which a plurality of arms are provided for transporting a workpiece from a first device to a transport unit for transporting the workpiece from a first device to a second device, and the internal space of the first device can be accessed from the internal space of the second device by rotating each arm with respect to each other. As processing devices, a grinding device and a plasma etching device are arranged in parallel. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2021-180243 A Summary of the Invention [Problem to be solved by the invention]

[0005] Instead of a conveying unit using an arm, a so-called belt conveyor type conveying unit that places the workpiece on a belt and conveys it is being considered. When assuming that the workpiece is conveyed on the belt, if the belt track is configured to straddle between the devices, a problem of alignment (positioning) between the two devices occurs. In other words, if a misalignment occurs between the devices, it is expected that the belt track will become unstable, causing problems in conveying the workpiece.

[0006] Therefore, a configuration has been considered in which each device is provided with a belt-type transport unit, and the transfer between the two transport units is performed, but even in this case, problems with aligning the transport units with each other are expected to occur, and it is anticipated that detailed adjustment work will be required. Therefore, the challenge is to realize a configuration in which adjustment work is not troublesome.

[0007] In view of the above problems, the present invention proposes a new transport unit configuration that does not require bothersome adjustment work. [Means for solving the problem]

[0008] The problem to be solved by the present invention has been described above, and the means for solving this problem will now be described.

[0009] According to one aspect of the present invention, a conveying unit includes a pair of belts arranged in parallel to carry an object to be conveyed from one side to the other, and a drive mechanism for winding and driving each of the belts, wherein a pair of end pulleys for winding each of the belts are provided opposite each other on one and the other side of the drive mechanism, and the distance between the belts at the positions of the end pulleys is narrower than the distance between the belts at other positions.

[0010] According to one aspect of the present invention, each of the belts is configured to be able to contact a guided portion provided at the bottom of the transported object to guide the transported object, and is configured such that a gap is formed between each of the belts and the guided portion at the end pulley.

[0011] According to one aspect of the present invention, an auxiliary roller capable of supporting the transported object from below is provided between the pair of end pulleys.

[0012] According to another aspect of the present invention, the drive mechanism is configured to be able to drive each of the belts in a forward direction and a reverse direction.

[0013] According to another aspect of the present invention, a conveying method using conveying units is provided in which a conveying unit is provided in each processing device, the conveying units are arranged side by side in the conveying direction of the belt, and the conveyed objects are delivered by each conveying unit.

[0014] According to one aspect of the present invention, a conveying method using a conveying unit is provided in each processing device, the conveying units are arranged in a line in the conveying direction of the belt, and the conveyed objects are transferred between the conveying units, and the drive mechanism is configured to be able to drive each of the belts in both forward and reverse directions.

[0015] According to another aspect of the present invention, a processing apparatus includes a transport unit.

[0016] According to another aspect of the present invention, there is provided a processing apparatus including a transport unit, wherein the drive mechanism is configured to be able to drive each of the belts in a forward direction and a reverse direction. Effect of the Invention

[0017] The present invention provides the following advantages. That is, according to one aspect of the present invention, strict alignment between adjacent transport units and strict positioning of each unit are not required, and troublesome adjustment work is not required when setting up the device. In addition, it is possible to eliminate the need for strict alignment between adjacent processing devices and strict positioning of each unit. [Brief description of the drawings]

[0018] [Figure 1] FIG. 1 is a diagram showing an example in which two processing apparatuses each including a transport unit according to an embodiment of the present invention are arranged side by side. [Diagram 2] FIG. [Diagram 3] FIG. 4 is a side view showing an overview of the transport unit. [Figure 4] FIG. 2 is a plan view showing an overview of a transport unit. [Diagram 5] FIG. 4 is a diagram for explaining delivery of a transported article. [Figure 6] 1A is a diagram for explaining a state in which the transport units are misaligned in the Y direction, and FIG. 1B is a diagram for explaining a state in which the transport units are misaligned in the Y direction. [Figure 7] FIG. 1A is a diagram for explaining auxiliary rollers, etc. FIG. 1B is a diagram for explaining the transfer of transported objects. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0019] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. 1 is a diagram showing an example in which two processing apparatuses 2A, 2B each equipped with a transport unit 10 according to an embodiment of the present invention are arranged side by side. The transport unit 10 may be configured as a versatile single unit that can be installed in each processing apparatus, or may be configured as a dedicated device for each processing apparatus.

[0020] The two processing devices 2A and 2B each perform a necessary step in the semiconductor manufacturing process, for example, the processing device 2A serves as a cutting device to perform cutting processing of the workpiece, and the processing device 2B serves as a pick-up device to pick up the divided chips, etc. Each transport unit 10 is automatically controlled by a control device (not shown) and automatically transports the transported object 4 between the devices.

[0021] 2 shows an example of a workpiece, which is a wafer W on whose surface devices D are arranged in a regular pattern, with planned dividing lines in a grid pattern set between each of the devices D. The wafer W is attached to an adhesive tape T, and an annular frame F is attached to the adhesive tape T so as to surround the wafer W, forming a wafer unit U by integrating the wafer W and the annular frame F.

[0022] As shown in Fig. 2, the wafer unit U is housed in a transport case 4M and transported as the transported object 4. The transport case 4M in this embodiment is configured in a box shape having a base plate 4a on which the wafer unit U is placed, and is configured as a capsule-shaped case that houses the wafer unit U therein. The transport case 4M may also be configured as a tray-like case having only the base plate 4a. The workpiece is not particularly limited.

[0023] The surface of the base plate 4a is configured as a mounting surface on which the wafer unit U is placed. Guided portions 4g, 4g are provided at four locations on the underside of the base plate 4a to be guided by a belt, which will be described in detail later. In this embodiment, four cylindrical guided portions 4g, 4g are disposed near the four corners of the square base plate 4a, respectively, and protrude downward from the base plate 4a. The guided portions 4g, 4g are provided, for example, on the same radius with the center of the rectangular base plate 4a as a reference.

[0024] Each of the two processing devices 2A, 2B shown in FIG. 1 is equipped with a device that picks up the transported object 4 and removes the wafer unit therein, and handles the removed wafer unit to perform the necessary processes.

[0025] Figures 3 and 4 show one embodiment of the conveying unit 10, which is configured to include a pair of belts 20A, 20B arranged in parallel to carry the object 4 and convey it from one side to the other, and a drive mechanism 30 for winding and driving each of the belts 20A, 20B.

[0026] Each of the belts 20A and 20B has a cross section that is, for example, circular (circular belt), V-shaped (V-belt), flat (flat belt), or the like, and is configured as an endless belt.

[0027] The drive mechanism 30 is composed of a motor (not shown), a drive pulley 32 connected to the output shaft of the motor, a snap pulley 34, a tension pulley 35, a number of pulleys 36 that support the belt from below at an intermediate position and rotate freely, and end pulleys 37, 38 arranged at the ends.

[0028] In Fig. 4, the conveying direction is the X direction, and the direction perpendicular to the conveying direction in a horizontal plane is the Y direction. Each pulley is provided in a pair facing each other in the Y direction, and belts 20A, 20B are wound around each pulley, so that the two belts 20A, 20B are arranged in parallel. These two rows of belts 20A, 20B form a conveying surface on which the conveyed object 4 (the lower surface of the base plate) is placed, and the two rows of belts 20A, 20B form a belt conveyor.

[0029] As shown in FIG. 5, the distance H0 between belts 20A, 20B in the Y direction perpendicular to the conveying direction in a horizontal plane is configured to be narrower than the distance H4 between guided portions 4g, 4g of the conveyed object 4 (transport case 4M), and belts 20A, 20B are configured to be positioned between guided portions 4g, 4g.

[0030] As a result, when the transported object 4 attempts to shift in the Y direction perpendicular to the transport direction, the guided portions 4g, 4g abut against the outer sides of the belts 20A, 20B, restricting the movement and preventing the transported object 4 from falling off the belts 20A, 20B.

[0031] As shown in FIG. 4, a pair of end pulleys 37, 38 for winding each of the belts 20A, 20B are provided facing each other on one side and the other side of the drive mechanism 30, and as shown in FIG. 5, the distances H7, H8 between the belts 20A, 20B at the positions of the end pulleys 37, 38 are configured to be narrower than the distance H0 between the belts 20A, 20B at other positions.

[0032] As a result, the width between the belts becomes narrower at both ends in the conveying direction of the belts 20A and 20B, forming a generally V-shaped configuration in a plan view.

[0033] 5, such belts 20A, 20B form a gap M between each belt 20A, 20B and the guided portions 4g, 4g at the end pulleys 37, 38. By forming this gap M, when the transported object 4 is transferred from one transport unit 10 to the other transport unit 10, the belts 20A, 20B of the other transport unit 10 are positioned between the guided portions 4g, 4g, enabling smooth transfer and realizing stable operation.

[0034] Note that "between the guided portions 4g, 4g" means "between the guided portions 4g, 4g facing each other in the Y direction perpendicular to the conveying direction," and Fig. 5 shows that the distance H4 between the guided portions 4g, 4g is wider than the distances H7, H8 between the belts 20A, 20B. In other words, it is shown that the distance H7, H8 between the belts 20A, 20B is narrower than the distance H4 between the guided portions 4g, 4g.

[0035] As shown in Figure 5, when an object 4 is handed over from one conveying unit 10 to the other conveying unit 10, the belts 20A, 20B of both conveying units 10 are driven at the same speed, and the object 4 conveyed from the left side to the right side by one conveying unit 10 comes onto the belts 20A, 20B of the other conveying unit 10, thereby achieving the handover.

[0036] At this time, because there is a gap M, the guided portions 4g, 4g of the transported object 4 are positioned outside the belts 20A, 20B of the other transport unit 10, and the transfer is completed.As the object further reaches a position where the distance between the belts 20A, 20B is H0, the gap between the guided portions 4g, 4g and the belts 20A, 20B disappears, and the object is transported so that the center position 10C of the transport unit 10 and the center position of the transported object 4 (the position midway between the guided portions 4g, 4g) coincide with each other.

[0037] In addition, at the time of transfer, belts 20A, 20B are positioned between guided portions 4g, 4g of the transported object 4, so that the transported object 4 does not rotate in the horizontal plane, and the transfer can be performed while maintaining the orientation of the transported object 4.

[0038] In the above configuration, even if there is a deviation of width Hz in the center position 10C of adjacent conveying units 10 as shown in Figures 6(A) and 6(B), the distance H7, H8 between the belts 20A, 20B is narrower than the distance H4 between the guided portions 4g, 4g, so the deviation corresponding to the difference between the distance H4 and the distances H7, H8 can be absorbed. Specifically, if the deviation width Hz is smaller than half the value of the difference between the distance H4 and the distance H0, smooth delivery is possible and stable operation is achieved even if there is a deviation in the center position 10C.

[0039] As a result, there is no need for strict alignment between adjacent conveying units 10 in the Y direction perpendicular to the conveying direction, or for strict positioning of each unit, and troublesome adjustment work is not required when setting up the device. This also eliminates the need for strict alignment between adjacent processing devices, or for strict positioning of each unit.

[0040] Also, as shown in Figures 7(A) and (B), auxiliary rollers 37h, 38h that can support the transported object 4 from below are provided between a pair of end pulleys 37, 37 and end pulleys 38, 38 that face each other in the Y direction perpendicular to the transport direction.

[0041] The auxiliary rollers 37h and 38h can be configured, for example, as resin rollers rotatably supported by support pins at the tips of the L-shaped brackets 37b and 38b.

[0042] When the transported object 4 is handed over between adjacent transport units 10, the auxiliary rollers 37h, 38h come into contact with the bottom of the base plate 4a to support it from below, thereby preventing the transported object 4 from falling off and achieving stable transport.

[0043] The auxiliary rollers 37h, 38h of adjacent conveying units 10, 10 can be arranged closer to each other than the end pulleys 37, 38. Since belts are wound around the end pulleys 37, 38, it is necessary to ensure a sufficient gap in consideration of interference between the belts, but the auxiliary rollers 37h, 38h can be designed to be as close as possible to each other.

[0044] As a result, there is no need for precise alignment between adjacent transport units 10 in the transport direction, i.e., the X direction, or precise positioning of each unit individually, and thus no need for troublesome adjustment work when setting up the device.

[0045] Furthermore, even if there is a misalignment in the vertical Z direction between adjacent conveying units 10, the auxiliary rollers 37h, 38h support the transported item 4 from below, preventing the transported item 4 from falling off, thereby enabling stable transport.

[0046] Therefore, there is no need to precisely align adjacent transport units 10 in the vertical direction, or to precisely position each of them individually, eliminating the need for troublesome adjustment work when setting up the apparatus.

[0047] 7(B), the drive mechanism is configured to be capable of driving each of the belts 20A, 20A in a forward direction R and a reverse direction L. Specifically, the drive mechanism is configured to be capable of rotating the motor of the drive mechanism in a forward direction and a reverse direction by a control device (not shown).

[0048] This allows adjacent conveying units 10 to convey the conveyed object 4 to each other, and for example, in Fig. 1, after processing is performed by processing device 2A, it is possible to convey the conveyed object 4 from processing device 2A to processing device 2B, and then convey the conveyed object 4 from processing device 2B to processing device 2A, where it is subjected to another processing. [Explanation of symbols]

[0049] 2A processing equipment 2B Processing equipment 4. Transported goods 4M Transport Case 4a Base plate 4g Guided part 10 Transport unit 10C Center position 20A Belt 20B Belt 30 Drive mechanism 32 Drive pulley 34 Snap Pulley 35 Tension pulley 36 Pulley 37 End pulley 38 End pulley 37h Auxiliary roller 38 End pulley 38h Auxiliary roller D Device F Annular frame M Gap U Wafer Unit W wafer

Claims

1. A pair of belts arranged in parallel to carry an object from one side to the other; a drive mechanism for winding and driving each of the belts; having A pair of end pulleys for winding each of the belts are provided facing each other on one side and the other side of the drive mechanism, A conveying unit configured such that the distance between the belts at the end pulley positions is narrower than the distance between the belts at other positions.

2. Each of the belts is configured to be capable of contacting a guided portion provided under the transported object, and guides the transported object; A gap is formed between each belt and the guided portion at the end pulley.

2. The transport unit according to claim 1.

3. Between the pair of end pulleys, An auxiliary roller capable of supporting the transported object from below is provided.

3. The transport unit according to claim 2.

4. The drive mechanism is configured to be able to drive each of the belts in a forward direction and a reverse direction.

4. The transport unit according to claim 1, wherein the first and second electrodes are arranged in a first direction.

5. The conveying unit according to any one of claims 1 to 3 is installed in each processing device, The conveying units are arranged in a line in the conveying direction of the belt, A transport method using transport units in which each transport unit receives and delivers transported items.

6. The conveying unit according to any one of claims 1 to 3 is installed in each processing device, The conveying units are arranged in a line in the conveying direction of the belt, A conveying method using a conveying unit in which each conveying unit delivers and receives a conveyed object, The drive mechanism is configured to be able to drive each of the belts in a forward direction and a reverse direction. A transport method using a transport unit.

7. A processing apparatus comprising the transport unit according to any one of claims 1 to 3.

8. A processing apparatus including the transport unit according to any one of claims 1 to 3, The drive mechanism is configured to be able to drive each of the belts in a forward direction and a reverse direction.

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