Sheet contactor

Abstract

To provide a sheet contactor capable of coping with speedup of an inspection object.SOLUTION: A sheet contactor comprises an insulating sheet, a conductive first contact protrusion arranged on a main surface of the insulating sheet, a conductive second contact protrusion arranged on a surface opposite to the main surface of the insulating sheet, and a through-conductor part penetrating the insulating sheet to connect the first contact protrusion and the second contact protrusion. The insulating sheet has flexibility. A positional deviation exists between the position of the first contact projection and the position of the second contact projection in the surface direction of the insulating sheet.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a sheet contactor. [Background technology]

[0002] When testing the electrical characteristics of devices such as semiconductor integrated circuits, contactors are used to electrically connect the device under test to the test board. In recent years, the increasing speed of devices has created a need for short contactors. However, it is difficult to shorten pogo pins that have built-in springs, and there are problems with positioning and ensuring stroke when using MEMS (micro electro mechanical system) probes such as micro cantilevers. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2017-194322 A Summary of the Invention [Problem to be solved by the invention]

[0004] An example of an object of the present invention is to provide a sheet contactor capable of handling high speeds of objects to be inspected. Other objects of the present invention will become apparent from the description of this specification. [Means for solving the problem]

[0005] One aspect of the present invention is a sheet contactor, An insulating sheet; a first conductive contact protrusion disposed on a main surface of the insulating sheet; a conductive second contact protrusion disposed on a surface opposite to the main surface of the insulating sheet; a through conductor portion that penetrates the insulating sheet to connect the first contact protrusion and the second contact protrusion, The insulating sheet is flexible, There is a positional deviation between the position of the first contact protrusion and the position of the second contact protrusion in the surface direction of the insulating sheet.

[0006] According to the above aspects of the present invention, a sheet contactor capable of handling high speed inspection objects can be realized. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a plan view of a sheet contactor 1 according to an embodiment of the present invention. [Diagram 2] 2 is an enlarged plan view of one connecting conductor 10 in the sheet contactor 1 and its vicinity. [Diagram 3] FIG. [Figure 4] FIG. [Diagram 5] FIG. [Figure 6] 3 is a cross-sectional view taken along line AA in FIG. 2. [Figure 7] FIG. 2 is an enlarged perspective view of a connecting conductor portion 10 and its vicinity. [Figure 8] FIG. 11 is an enlarged front sectional view of a state in which no load is applied when inspecting a device that is an object to be inspected. [Figure 9] FIG. 11 is an enlarged front sectional view of a state in which a load is applied when inspecting a device that is an object to be inspected. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] A sheet contactor 1 according to an embodiment of the present invention will be described with reference to Figures 1 to 7. The sheet contactor 1 is a contactor used for electrical connection, and has a plurality of connection conductors 10 arranged on a flexible insulating sheet 5. The insulating sheet 5 is a resin sheet made of polyimide or the like.

[0009] Each of the connection conductors 10 includes a through conductor 11 embedded in the through hole 6 of the insulating sheet 5, a conductive first base 12 arranged on the upper surface (main surface) of the insulating sheet 5, a conductive first contact protrusion 13 arranged on the first base 12, a conductive second base 22 arranged on the lower surface (opposite surface) of the insulating sheet 5, and a conductive second contact protrusion 23 arranged on the second base 22. The through conductor 11, the first base 12, and the second base 22 are made of conductive metal such as copper or copper alloy, and the through conductor 11 connects the first base 12 and the second base 22. The first contact protrusion 13 and the second contact protrusion 23 are made of nickel-based wear-resistant conductive metal, and are connected to the first base 12 and the second base 22, respectively. The first base portion 12, the first contact protrusion 13, the second base portion 22 and the second contact protrusion 23 are integrally laminated on the insulating sheet 5 by a technique such as photolithography.

[0010] As shown in FIG. 2 to FIG. 6, the first base portion 12 and the second base portion 22 are each oval and are formed on the insulating sheet 5 with a thickness larger than that of the insulating sheet 5. As a result, the portion in which the first base portion 12 and the second base portion 22 are formed has a required rigidity. The oval first base portion 12 and the second base portion 22 overlap each other in the surface direction of the insulating sheet 5 in the region where the through conductor portion 11 is located, but the surface direction positions are shifted in the longitudinal direction of the oval. That is, as shown in FIG. 6, the first base portion 12 is longer on the right side of the through conductor portion 11, and the second base portion 22 is longer on the left side of the through conductor portion 11. A cylindrical first contact protrusion portion 13 is formed on the side of the first base portion 12 away from the through conductor portion 11, and a cylindrical second contact protrusion portion 23 is formed on the side of the second base portion 22 away from the through conductor portion 11. 4, the center position P1 of the first contact protrusion 13 on the upper surface (main surface) of the insulating sheet 5 does not overlap with the center position P2 of the second contact protrusion 23 on the lower surface of the insulating sheet 5, and a positional deviation L exists between P1 and P2. The direction of the positional deviation L is along the longitudinal direction of the oval first base portion 12 and second base portion 22 (approximately parallel to the longitudinal direction).

[0011] Since the sheet contactor 1 in FIG. 1 has a plurality of connecting conductors 10, the deflection of the insulating sheet 5 caused by one connecting conductor 10 may affect the surrounding connecting conductors 10. To prevent this, the slits 30 are provided in the insulating sheet 5 near each connecting conductor 10. The slits 30 have a component perpendicular to the direction of the positional deviation L and a component parallel to the direction. Specifically, the slits 30 have a shape having an approximately semicircular arc portion 30a that partially surrounds the first base portion 12 and the first contact protrusion 13, and a portion 30b that further extends along the longitudinal direction of the first base portion 12. By forming the slits 30, the region of the insulating sheet 5 that is partially surrounded by the slits 30 in each connecting conductor 10 can deflect with the slits 30 as a boundary. Therefore, the effect on the adjacent connecting conductors 10 can be minimized.

[0012] Inspection of a device under test 40 using the sheet contactor 1 will be described with reference to Figures 8 and 9. However, for simplicity of explanation, only one connecting conductor 10 will be described. First, as shown in Figure 8, the sheet contactor 1 is placed between the device under test 40 and a board for testing 50. Figure 8 shows the state before a load is applied to the device under test 40, in which the first contact protrusion 13 can contact the bump 41, which is an electrode of the device under test 40, and the second contact protrusion 23 can contact the electrode pad 51 of the board for testing 50.

[0013] As shown in FIG. 9, when a load is applied from above to the device under test 40, the portion of the insulating sheet 5 surrounded by the slits 30 bends downward, and as a result, a reaction force F is generated that causes the first contact protrusion 13 to abut against the bump 41. Therefore, the variation in height of the bump 41 of the device under test 40 is absorbed, and sufficient contact pressure can be ensured between the first contact protrusion 13 and the bump 41, and between the second contact protrusion 23 and the electrode pad 51. The bump 41 of the device under test 40 is electrically connected to the electrode pad 51 of the inspection board 50 through the path of the first contact protrusion 13-the first base portion 12-the through conductor portion 11-the second base portion 22-the second contact protrusion 23. It is preferable that the first base portion 12 and the second base portion 22 have a required thickness and rigidity, and by doing so, the reaction force caused by the bending of the insulating sheet 5 when a load is applied can be increased.

[0014] According to this embodiment, the following effects can be obtained.

[0015] (1) The sheet contactor 1 has a configuration in which a plurality of connection conductors 10 are arranged on an insulating sheet 5, but the insulating sheet 5 is flexible, and a positional deviation L exists in the surface direction of the insulating sheet 5 between the first contact protrusion 13 on the main surface side of the insulating sheet 5 and the second contact protrusion 23 on the opposite side of the main surface. Therefore, when a load is applied to the device under test 40 during testing, the insulating sheet 5 bends, absorbing the variation in bump height of the device under test 40 and generating the required contact pressure between the first contact protrusion 13 and the device under test 40 and between the second contact protrusion 23 and the testing board 50. In addition, since the electrical connection path from the first contact protrusion 13 to the second contact protrusion 23 is extremely short, it is possible to perform measurement at high frequencies and increase the current capacity.

[0016] (2) Insulating sheet 5 has slits 30 that partially surround first contact protrusions 13 of individual connecting conductors 10, and slits 30 have a component perpendicular to the direction of misalignment L and a component parallel to it, so that the region of insulating sheet 5 in which connecting conductors 10 (i.e., first contact protrusions 13 and second contact protrusions 23) are arranged can be effectively deflected with slits 30 as a boundary. Therefore, even when multiple connecting conductors 10 are arranged on insulating sheet 5, the deflection of insulating sheet 5 does not affect adjacent connecting conductors 10.

[0017] (3) The conductive first base portion 12 connected to the through conductor portion 11 is disposed on the main surface of the insulating sheet 5, the conductive second base portion 22 connected to the through conductor portion 11 is disposed on the opposite surface of the main surface, the first contact protrusion portion 13 is disposed on the first base portion 12, and the second contact protrusion portion 23 is disposed on the second base portion 22, so that the adhesion of the first contact protrusion portion 13 and the second contact protrusion portion 23 to the insulating sheet 5 can be improved. In addition, since the first base portion 12 and the second base portion 22 have a required thickness and rigidity, the insulating sheet 5 is bent into a plate shape at the portion where the first base portion 12 and the second base portion 22 are formed, so that the reaction force F (FIG. 9) caused by the bending of the insulating sheet 5 can be secured large, and the contact pressure between the first contact protrusion portion 13 and the device under test 40 and between the second contact protrusion portion 23 and the testing board 50 can be increased.

[0018] (4) The longitudinal direction of the first base portion 12 and the second base portion 22 is approximately parallel to the direction of the positional shift L between the position of the first contact protrusion 13 and the position of the second contact protrusion 23 in the surface direction of the insulating sheet 5, and the positional shift L can be increased by utilizing the shape of the first base portion 12 and the second base portion 22.

[0019] (5) The first contact protrusion 13 and the second contact protrusion 23 are made of a nickel-based wear-resistant metal, ensuring durability.

[0020] Although the embodiments of the present invention have been described above with reference to the drawings, these are merely examples of the present invention, and various configurations other than those described above can also be adopted.

[0021] Although an oval shape has been exemplified for the first base portion and the second base portion, they may be rectangular, a rectangle with rounded or chamfered edges, an ellipse, or may be circular.

[0022] The first contact protrusion and the second contact protrusion formed on the first base portion and the second base portion, respectively, can be made thin like a needle or thick like a rod to correspond to the device under test. The slits partially surrounding the first contact protrusion of each connection conductor are not limited to the shape shown in the embodiment, but only need to have a portion parallel to the direction of the positional shift L of the first contact protrusion and the second contact protrusion, located on both sides of the first contact protrusion, and a portion perpendicular to the direction of the positional shift L connecting these two side portions.

[0023] According to the present specification, there is provided a sheet contactor having the following configuration.

[0024] (Aspect 1) Aspect 1 is a sheet contactor, An insulating sheet; a first conductive contact protrusion disposed on a main surface of the insulating sheet; a conductive second contact protrusion disposed on a surface opposite to the main surface of the insulating sheet; a through conductor portion that penetrates the insulating sheet to connect the first contact protrusion and the second contact protrusion, The insulating sheet is flexible, There is a positional deviation between the position of the first contact protrusion and the position of the second contact protrusion in the surface direction of the insulating sheet.

[0025] According to the above-mentioned aspect 1, when a load is applied to the device under test during testing, the insulating sheet bends, so that a required contact pressure can be generated between the first contact protrusion and the device under test and between the second contact protrusion and the testing board, and a reliable electrical connection can be achieved. In addition, since the electrical connection path from the first contact protrusion to the second contact protrusion is extremely short, it is possible to perform measurements at high frequencies and the current capacity can be increased.

[0026] (Aspect 2) A slit is formed in the insulating sheet partially surrounding the first contact protrusion, the slit having a component perpendicular to the misalignment direction and a component parallel to the misalignment direction.

[0027] According to the above-mentioned second aspect, the presence of the slits makes the insulating sheet more flexible.

[0028] (Aspect 3) The region of the insulating sheet in which the first contact protrusion and the second contact protrusion are arranged and which is partially surrounded by the slit is capable of bending with the slit as a boundary.

[0029] According to the above-mentioned third aspect, the slits become boundaries for the bending of the insulating sheet, so that the bending of the insulating sheet does not affect adjacent connection conductors.

[0030] (Aspect 4) a conductive first base portion connected to the through conductor portion is disposed on a main surface of the insulating sheet, and a conductive second base portion connected to the through conductor portion is disposed on a surface opposite to the main surface, The first contact protrusion is disposed on the first base portion, and the second contact protrusion is disposed on the second base portion.

[0031] According to the above-mentioned fourth aspect, the adhesive strength of the first contact protrusion and the second contact protrusion to the insulating sheet can be improved.

[0032] (Aspect 5) The first base portion and the second base portion are rigid.

[0033] According to the above-mentioned aspect 5, since the first base portion and the second base portion have rigidity, the insulating sheet bends into a plate shape at the forming portion of the first base portion and the second base portion, so that a large reaction force caused by the bending of the insulating sheet can be secured and the contact pressure between the first contact protrusion and the device under test and between the second contact protrusion and the testing board can be increased.

[0034] (Aspect 6) The longitudinal direction of the first base portion and the second base portion is approximately parallel to a positional deviation direction between the position of the first contact protrusion and the position of the second contact protrusion.

[0035] According to the above-mentioned sixth aspect, the positional deviation between the first contact protrusion and the second contact protrusion can be set to be large by utilizing the shapes of the first base portion and the second base portion.

[0036] (Aspect 7) The first contact protrusion and the second contact protrusion are made of a wear-resistant metal.

[0037] According to the above-mentioned seventh aspect, it is possible to improve the durability and enable the sheet contactor to be used repeatedly. [Explanation of symbols]

[0038] 1 Seat Contactor 5. Insulating sheet 10. Conductor for connection 11 Conductor through hole 12 First base part 13 First contact protrusion 22 Second base part 23 Second contact protrusion 30 Slit 40 Device under test 50 Test board F Reaction force L Position Misalignment

Claims

1. An insulating sheet; a first conductive contact protrusion disposed on a main surface of the insulating sheet; a conductive second contact protrusion disposed on a surface opposite to the main surface of the insulating sheet; a through conductor portion that penetrates the insulating sheet to connect the first contact protrusion and the second contact protrusion, The insulating sheet is flexible, A sheet contactor, wherein there is a positional deviation between the position of the first contact protrusion and the position of the second contact protrusion in a surface direction of the insulating sheet.

2. 2. The sheet contactor of claim 1, wherein a slit is formed in the insulating sheet partially surrounding the first contact protrusion, the slit having a component perpendicular to the misalignment direction and a component parallel to the misalignment direction.

3. 3. The sheet contactor according to claim 2, wherein the region of the insulating sheet in which the first contact protrusion and the second contact protrusion are arranged and which is partially surrounded by the slit is capable of bending with the slit as a boundary.

4. a conductive first base portion connected to the through conductor portion is disposed on a main surface of the insulating sheet, and a conductive second base portion connected to the through conductor portion is disposed on a surface opposite to the main surface, 4. The sheet contactor according to claim 1, wherein the first contact protrusion is disposed on the first base portion, and the second contact protrusion is disposed on the second base portion.

5. The sheet contactor of claim 4 , wherein the first base portion and the second base portion are rigid.

6. The sheet contactor according to claim 4 , wherein a longitudinal direction of the first base portion and the second base portion is approximately parallel to a positional deviation direction between a position of the first contact protrusion and a position of the second contact protrusion.

7. 4. The sheet contactor according to claim 1, wherein the first contact protrusion and the second contact protrusion are made of a wear-resistant metal.

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