Transport device

Abstract

To provide a technique of suppressing increase in size of a transport device in a height direction by arrangement of an angle detector.SOLUTION: A transport device 10 includes a motor arranged in a housing link, the motor rotating a driven link (for example, a second motor 3B arranged inside a first arm 11 and rotating a first hand 13a), a rotation transmission mechanism that transmits the rotation of the motor to the driven link, and an angle detector 7 that detects a rotation angle of the motor. A turning range of the housing link is limited. The angle detector 7 is arranged inside the housing link, at a side of the motor, and outside of a turning range of a belt that rotates together with the housing link in a plan view.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a transport device. [Background technology]

[0002] In manufacturing processes for semiconductors and liquid crystals, a transport device (transport robot) for transporting substrates is required. For example, the transport device described in Patent Document 1 positions the workpiece by using a motor to rotate a mounting table on which an arm that holds the workpiece to be transported is mounted. In this case, an outer rotor type motor, in which the rotor is located outside the stator, is used as the motor for rotating the mounting table.

[0003] In order for the conveying device to perform a specified conveying operation, the rotation angle of the motor needs to be controlled with sufficient precision. For this reason, an angle detector is often provided to detect the rotation angle of the motor. In the case of an outer rotor type motor, the angle detector is often disposed on one side of the stator in the axial direction of the motor (below the stator in the case of the conveying device described in Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 6507483 Summary of the Invention [Problem to be solved by the invention]

[0005] In many cases, there is a strong demand for miniaturization of conveying devices from the viewpoint of space efficiency, etc. However, when an angle detector is disposed below the stator, as in the conveying device described in Patent Document 1, for example, the height dimension of the conveying device increases by the amount of the space required for the angle detector.

[0006] The present invention has been made to solve the above-mentioned problems, and aims to provide a technology that can prevent the conveying device from becoming larger in height due to the placement of an angle detector. [Means for solving the problem]

[0007] In order to achieve the above object, the present invention takes the following measures.

[0008] That is, the present invention is a conveying device comprising: an arm unit having a plurality of links that can be horizontally swiveled around a rotation axis; a motor that is a drive source arranged within a storage link that is one of the plurality of links and rotates a driven link that is one of the plurality of links and different from the storage link, the drive source including a support shaft arranged coaxially with the rotation axis of the storage link, a stator supported by the support shaft, and a rotor provided on the outer periphery of the stator; a rotation transmission mechanism including a first pulley connected to the rotor, a second pulley arranged on the tip side of the storage link, and a belt wound between the first pulley and the second pulley within the storage link; and an angle detector that detects a rotation angle of the motor, wherein the rotation range of the storage link is limited, and the angle detector is arranged within the storage link, to the side of the motor, and outside the rotation range of the belt that rotates together with the storage link in a planar view.

[0009] According to this configuration, since the angle detector is disposed to the side of the motor to be detected, the height dimension of the module including the angle detector and the motor to be detected can be kept small compared to when the angle detector is disposed below or above the motor to be detected, and therefore the conveying device is less likely to become large in the height direction.

[0010] Preferably, the transport device includes a plurality of the motors, the plurality of motors being stacked vertically to form a motor stack.

[0011] According to this configuration, the device structure is simplified compared to the case where multiple motors are arranged in a dispersed manner. Meanwhile, in this case, a first pulley is connected to a rotor of each of the multiple motors stacked vertically, and a belt is wound around the first pulley. Therefore, an angle detector arranged on the side of any of the motors, or a wiring drawn vertically from the angle detector, may be arranged in a position overlapping one of the belts in a side view. However, in this case, since the angle detector is arranged outside the rotation range of the belt in a plan view, even if the angle detector or the wiring drawn vertically from the angle detector is arranged in a position overlapping one of the belts in a side view, no interference with the belt occurs.

[0012] Preferably, the conveying device is characterized in that a connected hollow portion is provided on the inner side of the motor stack, penetrating the motor stack in the vertical direction, and the wiring of the angle detector is pulled out in the vertical direction and inserted into the connected hollow portion from one end side of the connected hollow portion.

[0013] According to this configuration, the wiring of the angle detector can be routed along a simple path. As described above, the angle detector is disposed outside the rotation range of the belt in a plan view, so that even if the wiring drawn out in the vertical direction from the angle detector crosses one of the belts in a side view, it does not interfere with the belt.

[0014] Preferably, in the transport device, the pivot axis of the storage link is defined, in a plan view, at a position offset toward the first side wall from the center line of opposing first and second side walls in the transport chamber in which the arm unit is stored.

[0015] According to this configuration, by defining the pivot axis of the storage link at a position offset from the center line, it is possible to extend the length of the storage link by a dimension equivalent to the offset amount, compared to a case where such an offset is not provided, thereby widening the accessible range of the arm unit.

[0016] Preferably, in the conveying device, the angle detector is disposed at a position deviated from a normal line of the first side wall passing through a rotation axis of the storage link in a plan view. It is characterized by:

[0017] According to this configuration, the distance between the angle detector and the first axis along the normal line of the first side wall that passes through the rotation axis of the storage link can be made small. Effect of the Invention

[0018] According to the present invention, it is possible to suppress an increase in size of the conveying device in the height direction due to the arrangement of the angle detector. [Brief description of the drawings]

[0019] [Figure 1] FIG. 2 is a side view of the transport device according to the embodiment. [Diagram 2] FIG. [Diagram 3] FIG. 4 is a diagram for explaining an accessible range of an arm unit. [Figure 4] FIG. [Diagram 5] FIG. 4 is an enlarged cross-sectional side view showing a portion where a motor is installed. [Figure 6] FIG. 4 is a plan view for explaining the arrangement position of an angle detector. [Figure 7] FIG. 4 is a plan view illustrating an example of an arrangement position of an angle detector. [Figure 8] FIG. 11 is a side cross-sectional view of a transport device according to a modified example. [Figure 9] FIG. 4 is a plan view for explaining the arrangement position of an angle detector. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0021] <1. Overall configuration of the transport device> The overall configuration of a conveying device 10 according to an embodiment will be described with reference to Fig. 1. Fig. 1 is a side view of the conveying device 10.

[0022] The transfer device 10 is a vacuum transfer device (vacuum transfer robot) that transfers a transfer object within a transfer chamber 20, which is a vacuum chamber. The transfer chamber 20 separates these two spaces so that gas does not flow from the external space to the internal space. For example, a pump or the like is connected to the transfer chamber 20, and the pump exhausts gas from the internal space of the transfer chamber 20, thereby reducing the pressure of the internal space to a vacuum atmosphere (pressure value equal to or lower than a predetermined value) Q1. In other words, the inside of the transfer chamber 20 is maintained in a vacuum atmosphere Q1, and the outside of the transfer chamber 20 is an atmosphere (here, air atmosphere) Q2 with a pressure value higher than the vacuum atmosphere Q1.

[0023] The transfer device 10 includes an arm unit 1 and a body 2. The arm unit 1 is disposed inside a transfer chamber 20, and the body 2 is disposed outside the transfer chamber 20. That is, the arm unit 1 is disposed in a vacuum atmosphere Q1, and the body 2 is disposed in an atmospheric atmosphere Q2. The arm unit 1 is supported by the body 2. Specifically, for example, a lower end portion of the arm unit 1 is inserted through an opening 20a provided in a bottom wall of the transfer chamber 20, and is supported by a support base 21 provided in the body 2 attached to the bottom wall of the transfer chamber 20.

[0024] A lifting mechanism 22 is connected to the support base 21 that supports the arm unit 1. The lifting mechanism 22 includes, for example, a motor as a drive source, and a transmission mechanism (e.g., a gear mechanism, a ball screw mechanism, etc.) that transmits the driving force provided by the motor to the support base 21 to lift and lower it. When the lifting mechanism 22 lifts and lowers the support base 21, the arm unit 1 supported by the support base 21 lifts and lowers in the transfer chamber 20. A bellows 23 that can deform in response to the lifting and lowering of the support base 21 is provided between the opening 20a and the support base 21. The bellows 23 is airtightly connected to the periphery of the opening 20a at one end, and airtightly connected to the support base 21 at the other end. This allows the space between the opening 20a and the support base 21 to be airtightly sealed.

[0025] The transfer device 10 is a horizontally articulated robot. Specifically, the arm unit 1 includes a plurality of links (specifically, for example, a first arm 11, a second arm 12, and one or more (here, two) hands 13a, 13b) that are horizontally rotatable about a rotation axis.

[0026] The first arm 11 is a long member extending in a substantially horizontal position, and its base end is connected to the body 2 so as to be rotatable about a rotation axis (first axis) L1. The extension direction of the first axis L1 is the vertical direction, and the first arm 11 rotates within a horizontal plane.

[0027] Second arm 12 is a long member extending in a substantially horizontal position, and its base end is connected to the tip end of first arm 11 so as to be rotatable about a rotation axis (second axis) L2. The extension direction of second axis L2 is the vertical direction, and second arm 12 rotates within a horizontal plane.

[0028] The first hand 13a and the second hand 13b are both long members extending in a substantially horizontal position, and their base ends are connected to the tip of the second arm 12 so as to be rotatable about a rotation axis (third axis) L3. The third axis L3 extends vertically, and both the first hand 13a and the second hand 13b rotate within a horizontal plane. The first hand 13a and the second hand 13b hold the object to be transported at their tips (so-called end effectors). As an example, each of the hands 13a and 13b has a fork-like tip that branches into two branches.

[0029] The object to be transferred by the transfer device 10 is, for example, a substrate. That is, various modules 30 (for example, an Equipment Front End Module (EFEM) which is an interface for transferring the substrate to and from a storage vessel storing the substrate, a processing module for performing various processing on the substrate, etc.) are connected to the transfer chamber 20 directly or via a load lock chamber. The transfer device 10 transfers the substrate between the modules 30 connected to the transfer chamber 20. The transfer device 10, the transfer chamber 20, and the modules 30 constitute a substrate processing apparatus 100.

[0030] <2. Arm unit installation position and length of each link> The installation position of the arm unit 1 in the transfer chamber 20 and the accessible range of the arm unit 1 will be described with reference to Fig. 2 and Fig. 3 in addition to Fig. 1. Fig. 2 is a plan view of the transfer device 10. Fig. 3 is a diagram for explaining the accessible range of the arm unit 1.

[0031] The transfer chamber 20 has a rectangular parallelepiped shape and includes a floor wall 201, a ceiling wall 202, and four side walls 203a, 203b, 203c, and 203d. The transfer chamber 20 has a flat rectangular shape in a plan view (viewed in the up-down direction). Hereinafter, one of the pair of side walls 203a and 203b forming the long sides (i.e., the pair of side walls 203a and 203b facing each other in the extending direction of the short sides) is referred to as the "first side wall 203a" and the other is referred to as the "second side wall 203b." In addition, the posture of the arm unit 1 shown in FIG. 2 (i.e., the posture in which the first arm 11 extends in the normal direction of the side wall 203a, the second arm 12 overlaps the first arm 11 and extends parallel to it, and each hand 13a and 13b overlaps the second arm 12 and extends parallel to it) is referred to as the "origin posture."

[0032] The body 2 (and thus the base end of the arm unit 1 supported by the body 2) is disposed at a position closer to the first side wall 203a in plan view. As a result, the rotation axis (first axis) L1 of the first arm 11 defined at the base end of the arm unit 1 is defined at a position offset by a predetermined offset amount ΔY toward the first side wall 203a from the center line CL of the first side wall 203a and the second side wall 203b in plan view. It is preferable that the offset amount ΔY is large. In other words, it is preferable that the base end of the arm unit 1 is disposed at a position closest to the first side wall 203a within the range possible in terms of design.

[0033] The length of the first arm 11 is set to a dimension equivalent to the distance between the rotation axis (first axis) L1 of the first arm 11 and the second side wall 203b. That is, the first arm 11 is set to a dimension as long as possible without interfering with the second side wall 203b. Specifically, for example, the length of the first arm 11 is determined so that the tip of the first arm 11 is closest to the second side wall 203b within the designable range when the arm unit 1 is arranged in the original position. The second arm 12 is set to, for example, substantially the same dimension as the first arm 11. Specifically, for example, the length of the second arm 12 is determined so that the third axis L3 defined at the tip of the second arm 12 overlaps with the first axis L1 defined at the base end of the first arm 11 when the arm unit 1 is arranged in the original position. Each hand 13a, 13b is set to, for example, substantially the same dimension as the second arm 12. Specifically, for example, when the arm unit 1 is positioned in the original posture, the length of each hand 13a, 13b is specified so that the tip of each hand 13a, 13b is positioned near the base end of the second arm 12 in a planar view.

[0034] By defining the first axis L1 at a position offset from the center line CL toward the first side wall 203a, the length of the first arm 11 can be extended by a dimension corresponding to the offset amount ΔY, compared to the case where such an offset is not performed. In other words, if the offset is not performed, the length of the first arm 11 is a dimension corresponding to the separation distance Yo between the second side wall 203b and the center line CL. However, by performing the offset, the length of the first arm 11 can be made larger than the dimension corresponding to the separation distance Yo by the dimension corresponding to the offset amount ΔY. If the length of the first arm 11 is extended, the lengths of the second arm 12 and the hands 13a and 13b can also be extended. Therefore, as shown in FIG. 3, the accessible range of the arm unit 1 (i.e., the range in which the substrate W can be transported) is wider than the accessible range of the comparative arm unit 9 (two-dot chain line) without the offset. In other words, the arm unit 1 allows the hands 13a and 13b to access positions that cannot be accessed by the comparative arm unit 9.

[0035] However, when the first axis L1 is set at a position offset from the center line CL toward the first side wall 203a and the length of the first arm 11 is set to a dimension equivalent to the distance between the second side wall 203b and the first axis L1, the length of the first arm 11 is longer than the distance from the first axis L1 to the first side wall 203a. Therefore, the rotation range of the first arm 11 is limited on the side of the first side wall 203a. That is, the angular range in which the first arm 11 can rotate is limited to an angular range smaller than ±180° from the original posture. Therefore, a dead space that the first arm 11 does not reach is created on the side of the first side wall 203a around the first axis L1 (area indicated by hatching).

[0036] <3. Arm unit drive configuration> The configuration relating to the drive of the arm unit 1 will be described with reference to Figures 4 and 5. Figure 4 is a side cross-sectional view of the transport device 10. Figure 5 is a side cross-sectional view showing an enlarged view of a portion where the motor 3 is installed.

[0037] (a) Motor role and layout The transfer device 10 includes multiple (four in this example) motors 3A, 3B, 3C, and 3D that are drive sources for the arm unit 1. The first motor 3A provides a drive force for rotating the first arm 11 around the first axis L1. The second motor 3B provides a drive force for rotating the first hand 13a around the third axis L3. The third motor 3C provides a drive force for rotating the second hand 13b around the third axis L3. The fourth motor 3D provides a drive force for rotating the second arm 12 around the second axis L2.

[0038] The first motor 3A, the second motor 3B, the third motor 3C, and the fourth motor 3D are arranged in a vertically stacked manner. Specifically, the first motor 3A, the second motor 3B, the third motor 3C, and the fourth motor 3D are arranged coaxially with the first axis L1, and are provided in a vertically stacked manner. As an example, the support shaft 31 (described later) of the first motor 3A is arranged coaxially with the first axis L1 while being supported at the lower end by the support base 21. The support shaft 31 of the second motor 3B is arranged coaxially with the first axis L1, and is stacked on the support shaft 31 of the first motor 3A. The support shaft 31 of the third motor 3C is arranged coaxially with the first axis L1, and is stacked on the support shaft 31 of the second motor 3B. The support shaft 31 of the fourth motor 3D is arranged coaxially with the first axis L1, and is stacked on the support shaft 31 of the third motor 3C. The support shafts 31 adjacent to each other in the axial direction (vertical direction) may be connected via a connecting member such as a bolt, or may be formed integrally.

[0039] At least one of the four motors 3A, 3B, 3C, 3D arranged coaxially with the first axis L1 and stacked vertically is arranged in the arm unit 1. As an example, the top three motors (the fourth motor 3D, the third motor 3C, and the second motor 3B) are arranged (housed) in the first arm 11 (specifically, in the housing 11m). In other words, the motor stack 300 is formed by stacking the multiple motors (the fourth motor 3D, the third motor 3C, and the second motor 3B) housed in the first arm 11 in the vertical direction. The remaining motor (the first motor 3A) is arranged, for example, in a space surrounded by the bellows 23 and the support base 21 in the internal space of the body 2.

[0040] (b) Motor configuration The first motor 3A, the second motor 3B, the third motor 3C, and the fourth motor 3D have the same basic configuration. In the following, when the first motor 3A, the second motor 3B, the third motor 3C, and the fourth motor 3D are not distinguished from one another, they will be simply referred to as "motors 3."

[0041] 5, the motor 3 includes a support shaft 31, a stator 32, a rotor 33, and a partition wall 34. An angle detector 7 for detecting the rotation angle of the motor 3 is provided near the motor 3, which will be described later.

[0042] The support shaft 31 is a rod-shaped shaft body extending in the axial direction. A hollow portion 31h extending in the axial direction is provided on the inner side (axial center side) of the support shaft 31. Here, the hollow portion 31h penetrates the support shaft 31 in the axial direction. In other words, the support shaft 31 is cylindrical.

[0043] The stator 32 is cylindrical, arranged coaxially with the support shaft 31, and supported on the outer circumferential side of the support shaft 31. Specifically, for example, the support shaft 31 is provided with flange portions 311 that protrude in the radial direction at one end side and the other end side in the axial direction, and the stator 32 is supported between the pair of flange portions 311, 311. That is, the stator 32 is accommodated in a space (stator accommodation space) surrounded by the outer circumferential surface of the support shaft 31 and the pair of flange portions 311, 311, and is supported by the support shaft 31. The stator 32 includes, for example, a stator core and a coil wound around it. The stator 32 (specifically, the coil) is connected to a power supply unit (not shown) via a lead wire (not shown). The lead wire is, for example, inserted through a hollow portion 31h of the support shaft 31 and arranged between the stator 32 and the power supply unit.

[0044] The rotor 33 is provided on the outer periphery of the stator 32. As an example, the rotor 33 is cylindrical with an inner diameter larger than the outer diameter of the stator 32, and is arranged coaxially with the stator 32 so as to surround the stator 32 from the outside. In other words, the motor 3 is a so-called outer rotor type motor in which the rotor 33 is arranged outside (outer periphery) of the stator 32. When power is supplied from a power supply unit to the stator 32 (specifically, a coil) through a lead wire, the rotor 33 rotates around the stator 32, generating a driving force (rotational driving force). Here, since the rotor 33 is arranged outside the stator 32, as will be apparent later, it is possible to transmit the rotation of the rotor 33 to a driven object without passing through a shaft. This allows the axial dimension to be kept small.

[0045] The partition wall 34 is provided between the stator 32 and the rotor 33, and separates (isolates) these two spaces so that gas does not flow between the space on the stator 32 side and the space on the rotor 33 side. Specifically, the partition wall 34 is, for example, thin-walled and tubular, and is disposed coaxially with the stator 32 and the rotor 33, provided in the gap between the stator 32 and the rotor 33, and each end in the axial direction is airtightly connected to each flange portion 311 of the support shaft 31.

[0046] As shown in FIG. 1, the space outside the partition 34 (on the rotor 33 side) is a vacuum atmosphere Q1. That is, as described above, here, three of the four motors 3 are arranged inside the arm unit 1 (inside the housing 11m of the first arm 11), and the remaining one is arranged inside the body 2 (a space surrounded by the bellows 23 and the support base 21 in the internal space of the body 2). The internal space of the arm unit 1 (specifically, the internal space of the housing 11m of the first arm 11 and the internal space of the housing 12m of the second arm 12) and the space surrounded by the bellows 23 and the support base 21 in the internal space of the body 2 communicate with the internal space of the transfer chamber 20. Therefore, these spaces are maintained in the vacuum atmosphere Q1, except for the space inside the partition 34 of each motor 3 (on the stator 32 side).

[0047] On the other hand, the space inside the partition wall 34 (on the stator 32 side) is the air atmosphere Q2. That is, as described above, here, the four motors 3 are arranged coaxially with the first axis L1 and stacked in the axial direction. Also, a hollow portion 31h is provided on the inner side of the motor 3 (specifically, the support shaft 31) penetrating it in the up-down direction. Therefore, in a state in which the four motors 3 (specifically, each support shaft 31 of the four motors 3) are arranged coaxially with the first axis L1 and stacked in the axial direction, the hollow portions 31h of the support shafts 31 adjacent in the axial direction are communicated with each other. That is, by connecting the four hollow portions 31h, a hollow portion (connected hollow portion) 310h penetrating the structure (connected shaft) 310 including the four support shafts 31 is formed on the inner side (axial side) of the structure (connected shaft) 310. The lower opening of the connected hollow portion 310h communicates with the space below the support base 21 (i.e., the space communicating with the external space of the body 2, the space of the atmospheric atmosphere Q2) through an opening 211 provided in the support base 21. That is, by communicating with the external space through the opening 211, the space inside the partition wall 34 of each motor 3 becomes the atmospheric atmosphere Q2. From another perspective, the atmospheric atmosphere Q2 is sealed by the partition wall 34 of each motor 3, so that the space inside the partition wall 34 is maintained in the atmospheric atmosphere Q2. That is, the partition wall 34 serves as a vacuum partition wall (vacuum barrier) that separates the stator 32 from the vacuum atmosphere Q1.

[0048] (c) Driving mode (Driving of the first arm 11 by the first motor 3A) The first motor 3A is a direct drive motor that is directly connected to a load. That is, the rotor 33 of the first motor 3A is connected to the first arm 11 on the outer periphery side. Therefore, when the rotor 33 of the first motor 3A rotates about the first axis L1 by supplying power to the stator 32 of the first motor 3A, the first arm 11 rotates about the first axis L1. That is, the first arm 11 rotates about the first axis L1 by the driving force provided by the first motor 3A.

[0049] (Driving of the first hand 13a by the second motor 3B) A first rotation transmission mechanism 4a and a second rotation transmission mechanism 5a are provided between the second motor 3B and the first hand 13a.

[0050] The first rotation transmission mechanism 4a includes a first pulley 41a, a second pulley 42a, and a belt 43a. The first pulley 41a is disposed on the base end side of the first arm 11 (specifically, at a position coaxial with the first axis L1 defined at the base end of the first arm 11) in the housing 11m of the first arm 11, and is connected at its inner periphery to the outer periphery of the rotor 33 of the second motor 3B. The second pulley 42a is disposed on the tip side of the first arm 11 (specifically, at a position coaxial with the second axis L2 defined at the tip of the first arm 11) in the housing 11m of the first arm 11, and is connected to the first hand 13a via the second rotation transmission mechanism 5a. The belt 43a is wound around the first pulley 41a and the second pulley 42a in the housing 11m of the first arm 11.

[0051] The second rotation transmission mechanism 5a includes a third pulley 51a, a fourth pulley 52a, and a belt 53a. The third pulley 51a is disposed on the base end side of the second arm 12 (specifically, at a position coaxial with the second axis L2 defined at the base end of the second arm 12) in the housing 12m of the second arm 12, and is connected to the second pulley 42a via the shaft body 44a. The fourth pulley 52a is disposed on the tip side of the second arm 12 (specifically, at a position coaxial with the third axis L3 defined at the tip end of the second arm 12) in the housing 12m of the second arm 12, and is connected to the first hand 13a via the shaft body 54a. The belt 53a is wound around the third pulley 51a and the fourth pulley 52a in the housing 12m of the second arm 12.

[0052] In this configuration, when the rotor 33 of the second motor 3B rotates around the first axis L1 by supplying power to the stator 32 of the second motor 3B, the first pulley 41a rotates, and the driving force is transmitted through the belt 43a to rotate the second pulley 42a and the third pulley 51a. When the third pulley 51a rotates, the driving force is transmitted through the belt 53a to rotate the fourth pulley 52a, and the first hand 13a rotates around the third axis L3. That is, the first hand 13a rotates around the third axis L3 by the driving force provided by the second motor 3B.

[0053] (Driving of the second hand 13b by the third motor 3C) A first rotation transmission mechanism 4b and a second rotation transmission mechanism 5b are provided between the third motor 3C and the second hand 13b.

[0054] The first rotation transmission mechanism 4b includes a first pulley 41b, a second pulley 42b, and a belt 43b. The first pulley 41b is disposed on the base end side of the first arm 11 (specifically, at a position coaxial with the first axis L1 defined at the base end of the first arm 11) in the housing 11m of the first arm 11, and is connected at its inner periphery to the outer periphery of the rotor 33 of the third motor 3C. The second pulley 42b is disposed on the tip side of the first arm 11 (specifically, at a position coaxial with the second axis L2 defined at the tip of the first arm 11) in the housing 11m of the first arm 11, and is connected to the second hand 13b via the second rotation transmission mechanism 5b. The belt 43b is wound around the first pulley 41b and the second pulley 42b in the housing 11m of the first arm 11.

[0055] The second rotation transmission mechanism 5b includes a third pulley 51b, a fourth pulley 52b, and a belt 53b. The third pulley 51b is disposed on the base end side of the second arm 12 (specifically, at a position coaxial with the second axis L2 defined at the base end of the second arm 12) in the housing 12m of the second arm 12, and is connected to the second pulley 42b via the shaft body 44b. The fourth pulley 52b is disposed on the tip side of the second arm 12 (specifically, at a position coaxial with the third axis L3 defined at the tip end of the second arm 12) in the housing 12m of the second arm 12, and is connected to the second hand 13b via the shaft body 54b. The belt 53b is wound around the third pulley 51b and the fourth pulley 52b in the housing 12m of the second arm 12.

[0056] In this configuration, when the rotor 33 of the third motor 3C rotates around the first axis L1 by supplying power to the stator 32 of the third motor 3C, the first pulley 41b rotates, and the driving force is transmitted through the belt 43b to rotate the second pulley 42b and the third pulley 51b. When the third pulley 51b rotates, the driving force is transmitted through the belt 53b to rotate the fourth pulley 52b, and the second hand 13b rotates around the third axis L3. That is, the second hand 13b rotates around the third axis L3 by the driving force provided by the third motor 3C.

[0057] (Driving of the second arm 12 by the fourth motor 3D) A rotation transmission mechanism 6 is provided between the fourth motor 3D and the second arm 12. The rotation transmission mechanism 6 includes a first pulley 61, a second pulley 62, and a belt 63. The first pulley 61 is disposed on the base end side of the first arm 11 (specifically, at a position coaxial with the first axis L1 defined at the base end of the first arm 11) in the housing 11m of the first arm 11, and is connected to the outer periphery side of the rotor 33 of the fourth motor 3D on the inner periphery side. The second pulley 62 is disposed on the tip side of the first arm 11 (specifically, at a position coaxial with the second axis L2 defined at the tip end of the first arm 11) in the housing 11m of the first arm 11, and is connected to the second arm 12 on the inner periphery side. The belt 63 is wound around the first pulley 61 and the second pulley 62 in the housing 11m of the first arm 11.

[0058] In this configuration, when power is supplied to the stator 32 of the fourth motor 3D, the rotor 33 of the fourth motor 3D rotates around the first axis L1, causing the first pulley 61 to rotate, and the driving force is transmitted through the belt 63 to rotate the second pulley 62. When the second pulley 62 rotates, the second arm 12 rotates around the second axis L2. That is, the second arm 12 rotates around the second axis L2 due to the driving force provided by the fourth motor 3D.

[0059] <4. Angle detector> The angle detector 7 will be described with reference to Fig. 6 in addition to Fig. 4 and Fig. 5. Fig. 6 is a diagram for explaining the arrangement position of the angle detector 7 in a plan view, and diagrammatically shows the first arm 11 that rotates around the first axis L1, the belts 43a, 43b, 63 housed therein, and the angle detector 7.

[0060] As described above, the second motor 3B, the third motor 3C, and the fourth motor 3D are housed in the first arm 11. An angle detector 7 for detecting the rotation angle of the motors 3B, 3C, and 3D is provided near each of the second motor 3B, the third motor 3C, and the fourth motor 3D. Each angle detector 7 is housed in the first arm 11 together with the motors (target motors) 3B, 3C, and 3D that it is intended to detect. Note that an angle detector for detecting the rotation angle of the first motor 3A is also provided near the first motor 3A, but this angle detector can be provided in any suitable position and therefore will not be illustrated or described.

[0061] The angle detector 7 is supported on the support shaft 31 via, for example, a support frame 8. As an example, the support frame 8 includes a horizontal frame portion 81 connected to the support shaft 31 and extending in the radial direction of the motor 3, and a vertical frame portion 82 connected to the horizontal frame portion 81 and extending in the up-down direction. The angle detector 7 is attached to an appropriate position midway along the extension of the vertical frame portion 82, so that it is disposed on the side (radially outward) of the target motor 3. However, "disposed on the side of the motor 3" here means that it is disposed at a position at which it at least partially overlaps with the motor 3 in a side view. That is, the angle detector 7 is disposed at a position where the lower end is the same as or lower than the upper end of the target motor 3 (specifically, for example, the upper end of the support shaft 31 of the target motor 3) and the upper end is the same as or higher than the lower end of the target motor 3 (specifically, for example, the lower end of the support shaft 31 of the target motor 3).

[0062] The angle detector 7 detects the rotation angle of the rotor 33 (i.e., the rotational displacement around the axis of the rotor 33) by, for example, optically detecting a detection object (scale) 70 that rotates together with the rotor 33 of the target motor 3 (so-called optical encoder). As an example, the detection object 70 is indirectly attached to the rotor 33 by being attached to the outer periphery of the first pulleys 41a, 41b, 61 connected to the rotor 33. The angle detector 7 is provided, for example, facing the detection object 70 in the radial direction of the target motor 3. That is, the angle detector 7 is disposed radially outward of the corresponding detection object 70 (i.e., the detection object 70 attached to the rotor 33 of the target motor 3). It is preferable that the angle detector 7 is disposed sufficiently close to the corresponding detection object 70.

[0063] One end of a wiring 71 is connected to the angle detector 7. The other end of the wiring 71 is connected to, for example, a control unit (for example, a control unit including a control processor, a memory, etc.). Through the wiring 71, for example, power is supplied from the control unit to the angle detector 7, and a signal is transmitted from the angle detector 7 to the control unit.

[0064] As described above, the motor stack 300 is formed by stacking the multiple motors (the second motor 3B, the third motor 3C, and the fourth motor 3D) housed in the first arm 11 in the vertical direction, and the connected hollow portion 310h is provided on the inner side (axis side) of the motor stack 300, penetrating it in the vertical direction. Here, the wiring 71 of the angle detector 7 that detects the rotation angles of each of the second motor 3B, the third motor 3C, and the fourth motor 3D is all drawn out in the vertical direction (upward in this case) from the angle detector 7 and inserted into the connected hollow portion 310h from an opening on one end side (upper side in this case) of the connected hollow portion 310h. A lid 301 that closes the upper opening of the connected hollow portion 310h is provided, and the wiring 71 is inserted through the lid 301 via, for example, a hermetic seal 302, and led to the inside of the connected hollow portion 310h.

[0065] As described above, the first arm 11 rotates around the first axis L1 by the driving force provided by the first motor 3A. As shown in Fig. 6, when the first arm 11 rotates around the first axis L1, the second pulleys 42a, 42b, 62 disposed on the tip side of the first arm 11 in the first arm 11 move on an arc centered on the first axis L1. Therefore, the belts 43a, 43b, 63 wound around the first pulleys 41a, 41b, 61 and the second pulleys 42a, 42b, 62 rotate around the first axis L1 together with the first arm 11 (so-called co-rotation).

[0066] On the other hand, among the elements housed in the first arm 11, the support shaft 31 and the elements supported thereby (the stator 32, the angle detector 7, etc.) do not rotate together with the first arm 11 even when the first arm 11 rotates about the first axis L1, but remain stationary. Therefore, when the first arm 11 rotates about the first axis L1, the positions of the belts 43a, 43b, 63 relative to the angle detector 7 change.

[0067] As described above, here, the rotation range of the first arm 11 is limited by the first side wall 203a. Therefore, the rotation range of the belts 43a, 43b, 63 that rotate together with the first arm 11 is also limited by the first side wall 203a. That is, the angle range in which the belts 43a, 43b, 63 rotate is limited to an angle range smaller than ±180° from the original posture. Therefore, a dead space where the belts 43a, 43b, 63 do not reach is generated on the side of the first side wall 203a around the first axis L1. The angle detector 7 is disposed in the first arm 11, outside the rotation range of the belts 43a, 43b, 63 that rotate together with the first arm 11 in a plan view (a region indicated by hatching, hereinafter also referred to as a "belt non-reach region") D.

[0068] When the angle detector 7 is disposed at such a position, even if at least a part of the angle detector 7 is disposed at a position overlapping any one of the belts 43a, 43b, 63 in a side view (viewed along the horizontal direction), the angle detector 7 does not interfere with the belts 43a, 43b, 63. Therefore, it is permissible to dispose the angle detector 7 at such a position. Furthermore, even if at least a part of the wiring 71 drawn out in the vertical direction from the angle detector 7 is disposed at a position overlapping any one of the belts 43a, 43b, 63 in a side view, the wiring 71 does not interfere with the belts 43a, 43b, 63. Therefore, it is permissible to dispose the wiring 71 drawn out in the vertical direction from the angle detector 7 at such a position.

[0069] For example, in the example of FIG. 5, the portion of the wiring 71 of the angle detector 7 of the third motor 3C drawn upward crosses the belt 63 of the rotation transmission mechanism 6 (i.e., the rotation transmission mechanism 6 for transmitting the rotation of the fourth motor 3D stacked on the third motor 3C to the second arm 12) in a side view. However, since the angle detector 7 is disposed in the belt non-reach area D of the belt 63 in a plan view, even if the first arm 11 rotates, the wiring 71 does not interfere with the belt 63, and there is no risk of disconnection. Similarly, the portion of the wiring 71 of the angle detector 7 of the second motor 3B drawn upward crosses the belt 43b of the rotation transmission mechanism 4b (i.e., the first rotation transmission mechanism 4b for transmitting the rotation of the third motor 3C stacked on the second motor 3B to the second hand 13b) and the belt 63 of the rotation transmission mechanism 6 in a side view. However, since the angle detector 7 is disposed in the belt non-reaching area D of the belts 63, 43b, even if the first arm 11 rotates, the wiring 71 does not interfere with the belts 43b, 63, and there is no risk of disconnection.

[0070] <5. Effects> The conveying device 10 according to the above embodiment includes motors (a second motor 3B, a third motor 3C, and a fourth motor 3D) disposed within a first arm 11 as a storage link. The second motor 3B rotates the first hand 13a as a drive target link. The third motor 3C rotates the second hand 13b as a drive target link. The fourth motor 3D rotates the second arm 12 as a drive target link. The conveying device 10 also includes an angle detector 7 that detects the rotation angles of the second motor 3B, the third motor 3C, and the fourth motor 3D. Here, the rotation range of the first arm 11 is limited, and the angle detector 7 is disposed within the first arm 11, to the side of the target motors 3B, 3C, and 3D, and outside the rotation range (belt non-reaching area) D of the belts 43a, 43b, and 63 that rotate together with the first arm 11 in a plan view. According to this configuration, since the angle detector 7 is disposed to the side of the target motors 3B, 3C, and 3D, the height dimension of the module (motor module) including the angle detector 7 and the target motors 3B, 3C, and 3D can be kept small compared to the case where the angle detector 7 is disposed below or above the target motors 3B, 3C, and 3D. Therefore, the conveying device 10 is unlikely to become large in the height direction.

[0071] In the above embodiment, the motor stack 300 is formed by stacking the motors (the second motor 3B, the third motor 3C, and the fourth motor 3D) in the first arm 11 vertically. This configuration simplifies the device structure compared to the case where the motors 3B, 3C, and 3D are distributed. The motor stack 300 is arranged coaxially with the rotation axis (first axis) L1 of the first arm 11, so that the center of gravity of the arm unit 1 can be stabilized. Meanwhile, the first pulleys 41a, 41b, and 61 are connected to the rotors 33 of the motors (the second motor 3B, the third motor 3C, and the fourth motor 3D) stacked vertically, and the belts 43a, 43b, and 63 are wound around the first pulleys 41a, 41b, and 61. Therefore, the angle detector 7 disposed to the side of the second motor 3B, the third motor 3C, or the fourth motor 3D, or the wiring 71 drawn vertically therefrom, may be disposed in a position overlapping any of the belts 43a, 43b, 63 in a side view. However, here, the angle detector 7 is disposed outside the turning range (belt non-reach area) D of the belts 43a, 43b, 63 in a plan view, so that even if the angle detector 7 or the wiring 71 drawn vertically therefrom is disposed in a position overlapping any of the belts 43a, 43b, 63 in a side view, no interference with the belts 43a, 43b, 63 occurs.

[0072] In the above embodiment, the motor laminate 300 is provided with a continuous hollow portion 310h penetrating the motor laminate 300 in the vertical direction, and the wiring 71 of the angle detector 7 is drawn out in the vertical direction and inserted into the continuous hollow portion 310h from one end side of the continuous hollow portion 310h. With this configuration, the wiring 71 of the angle detector 7 can be routed along a simple path. As described above, the angle detector 7 is disposed outside the rotation range (belt non-reach area) D of the belts 43a, 43b, and 63 in a plan view, so that even if the wiring 71 drawn out in the vertical direction from the angle detector 7 crosses any of the belts 43a, 43b, and 63 in a side view, no interference occurs with the belts 43a, 43b, and 63.

[0073] In the above embodiment, the pivot axis (first axis) L1 of the first arm 11 is defined at a position offset from the center line CL of the first side wall 203a and the second side wall 203b toward the first side wall 203a in a plan view. With this configuration, by defining the first axis L1 at a position offset from the center line CL, it is possible to extend the length of the first arm 11 by a dimension equivalent to the offset amount ΔY, for example, compared to a case where such an offset is not provided. This makes it possible to widen the accessible range of the arm unit 1.

[0074] In the above embodiment, the first axis L1 is set at a position offset from the center line CL toward the first side wall 203a in a plan view, and the length of the first arm 11 corresponds to the distance between the second side wall 203b and the first axis L1. With this configuration, the rotation range of the first arm 11 is limited on the side of the first side wall 203a, and the rotation range of the belts 43a, 43b, and 63 that rotate together with the first arm 11 is also limited by the restriction of the rotation range of the first arm 11, and the area outside the rotation range can be effectively used for arranging the angle detector 7.

[0075] Furthermore, if the angle detector is disposed radially inward of the target motor 3 (for example, in the hollow portion 31h), the target motor 3 itself must be enlarged in order to ensure the necessary inner diameter of the hollow portion 31h of the support shaft 31 (the inner diameter required to insert the lead wires, wiring 71, etc.). In this case, the object to be detected for transmitting the rotation of the rotor 33 to the angle detector must be provided so as to straddle the stator 32, which complicates the structure. In contrast, if the angle detector 7 is disposed radially outward of the target motor 3, the necessary inner diameter of the hollow portion 31h of the support shaft 31 (the inner diameter required to insert the lead wires, wiring 71, etc.) can be ensured without increasing the diameter of the target motor 3. Furthermore, the structure does not become complicated.

[0076] In addition, when the angle detector 7 is disposed outside the target motor 3 in the radial direction, the separation distance between the angle detector 7 and the stator 32 can be made larger than when the angle detector is disposed inside the target motor 3 in the radial direction. Therefore, it is difficult for the angle detector 7 to be heated by the heat from the stator 32. For this reason, the angle detector 7 is less likely to suffer thermal damage and less likely to have a shortened lifespan. In particular, when a partition wall 34 is provided between the stator 32 and the rotor 33, since the angle detector 7 is disposed in the space on the side opposite to the stator 32 with the partition wall 34 interposed therebetween, the temperature rise of the angle detector 7 is sufficiently suppressed.

[0077] <6. Modification Example> The conveying device 10 according to the above-described embodiment can be appropriately modified. Hereinafter, a modification example of the conveying device 10 will be described. In the following, the points different from the above-described embodiment will be described, and elements not different from the above-described embodiment will be denoted by the same reference numerals and the description thereof will be omitted.

[0078] (Modification Example 1) In the above-described embodiment, the angle detector 7 may be disposed at any position within the belt non-reachable region D. For example, as shown in FIG. 7(a), the angle detector 7 may be disposed on the normal line NL of the first side wall 203a passing through the turning axis (first axis) L1 of the first arm 11 in a plan view. Alternatively, as shown in FIG. 7(b), the angle detector 7 may be disposed at a position deviated from this normal line NL in a plan view. Assuming that the separation distance between the angle detector 7 and the first axis L1 is the same, the separation distance K2 between the angle detector 7 and the first axis L1 along the normal line NL when the angle detector 7 is disposed at a position deviated from the normal line NL is smaller than the separation distance K1 between the angle detector 7 and the first axis L1 along the normal line NL when the angle detector 7 is disposed on the normal line NL (K2 < K1). For example, when the offset amount ΔY of the first axis L1 is restricted by this separation distance, the offset amount ΔY of the first axis L1 can be increased (that is, the accessible range of the arm unit 1 can be widened) by reducing this separation distance.

[0079] (Variation 2) In the above embodiment, the positions of the motors 3A, 3B, 3C, and 3D may be changed as appropriate. Fig. 8 shows a side cross-sectional view of a conveying device 10a in which the positions of the motors 3A, 3B, 3C, and 3D are changed.

[0080] In the conveying device 10a, the second motor 3B (i.e., the second motor 3B providing a driving force for rotating the first hand 13a around the third axis L3) and the third motor 3C (i.e., the third motor 3C providing a driving force for rotating the second hand 13b around the third axis L3) are arranged coaxially with the second axis L2, stacked in the axial direction, and housed in the second arm 12. Also, the fourth motor 3D (i.e., the fourth motor 3D providing a driving force for rotating the second arm 12 around the second axis L2) is arranged coaxially with the first axis L1, stacked on the first motor 3A in the axial direction, and housed in the first arm 11.

[0081] In the conveying device 10a, the first rotation transmission mechanism 4a is omitted, and only the second rotation transmission mechanism 5a is provided between the second motor 3B and the first hand 13a. The third pulley 51a of the second rotation transmission mechanism 5a is disposed on the base end side of the second arm 12 (specifically, at a position coaxial with the second axis L2 defined at the base end of the second arm 12) in the housing 12m of the second arm 12, and is connected to the outer periphery side of the rotor 33 of the second motor 3B on the inner periphery side. The fourth pulley 52a is disposed on the tip side of the second arm 12 (specifically, at a position coaxial with the third axis L3 defined at the tip end of the second arm 12) in the housing 12m of the second arm 12, and is connected to the first hand 13a via the shaft body 54a. The belt 53a is wound around the third pulley 51a and the fourth pulley 52a in the housing 12m of the second arm 12.

[0082] Similarly, in the conveying device 10a, the first rotation transmission mechanism 4b is also omitted, and only the second rotation transmission mechanism 5b is provided between the third motor 3C and the second hand 13b. The third pulley 51b of the second rotation transmission mechanism 5b is disposed on the base end side of the second arm 12 (specifically, at a position coaxial with the second axis L2 defined at the base end of the second arm 12) in the housing 12m of the second arm 12, and is connected on the inner periphery side to the outer periphery side of the rotor 33 of the third motor 3C. The fourth pulley 52b is disposed on the tip side of the second arm 12 (specifically, at a position coaxial with the third axis L3 defined at the tip end of the second arm 12) in the housing 12m of the second arm 12, and is connected to the second hand 13b via the shaft body 54b. The belt 53b is wound around the third pulley 51b and the fourth pulley 52b in the housing 12m of the second arm 12.

[0083] An angle detector 7 for detecting the rotation angle of the second motor 3B, the third motor 3C, and the fourth motor 3D is provided near each of the motors 3B, 3C, and 3D. The angle detector 7 for detecting the rotation angle of the second motor 3B is housed in the second arm 12 together with the second motor 3B and is disposed to the side of the second motor 3B. The angle detector 7 for detecting the rotation angle of the third motor 3C is housed in the second arm 12 together with the third motor 3C and is disposed to the side of the third motor 3C. The angle detector 7 for detecting the rotation angle of the fourth motor 3D is housed in the first arm 11 together with the fourth motor 3D and is disposed to the side of the fourth motor 3D. Each angle detector 7 is disposed to the side of the target motors 3B, 3C, and 3D by, for example, being attached to a support frame 8.

[0084] Here, a plurality of motors (second motor 3B and third motor 3C) housed in second arm 12 are stacked vertically to form motor stack 300a, and a connected hollow portion 310h is provided on the inner side of motor stack 300a, vertically penetrating it. Wiring (not shown) of angle detector 7 that detects the rotation angles of second motor 3B and third motor 3C is both drawn upward from angle detector 7 and inserted into connected hollow portion 310h from the upper opening of connected hollow portion 310h. In addition, the wiring (not shown) of the angle detector 7 that detects the rotation angle of the fourth motor 3D housed in the first arm 11 is pulled upward from the angle detector 7 and inserted into the connected hollow portion 310h from the upper opening thereof (the connected hollow portion 310h that vertically penetrates the fourth motor 3D and the first motor 3A stacked vertically).

[0085] The angle detector 7 for detecting the rotation angle of the second motor 3B and the angle detector 7 for detecting the rotation angle of the third motor 3C are both disposed within the second arm 12, and in a plan view, outside the rotation range (belt non-reach area) Da of the belts 53a and 53b that rotate together with the second arm 12 (see FIG. 9). Therefore, even if the angle detector 7 or the wiring 71 drawn out in the vertical direction therefrom is disposed in a position overlapping with either of the belts 53a and 53b in a side view, no interference with the belts 53a and 53b occurs. Moreover, the angle detector 7 for detecting the rotation angle of the fourth motor 3D is disposed within the first arm 11, and in a plan view, outside the rotation range (belt non-reach area) D of the belt 63 that rotates together with the first arm 11 (see FIG. 6). Therefore, even if the angle detector 7 or the wiring 71 drawn out in the vertical direction therefrom is disposed in a position overlapping with the belt 63 in a side view, no interference with the belt 63 occurs.

[0086] There are various reasons why the rotation range of the first arm 11, the second arm 12, or the hands 13a and 13b is limited. For example, as in the above embodiment, the rotation range of the first arm 11, the second arm 12, or the hands 13a and 13b may be limited depending on the positional relationship with the side walls 203a, 203b, 203c, and 203d of the transfer chamber 20. Furthermore, for example, when the belts 43a, 43b, 53a, 53b, 63 of the rotation transmission mechanisms 4a, 4b, 5a, 5b, 6 are configured to include an open belt (for example, when they are configured to include two open belts (for example, steel belts) that are wound around pulleys in opposite directions and stretched between a pair of pulleys), the angular range in which the driven link (the second arm 12, the first hand 13a, or the second hand 13b) driven through the rotation transmission mechanisms 4a, 4b, 5a, 5b, 6 can rotate may be limited to an angular range smaller than 360° (i.e., the rotation range may be limited). Furthermore, for example, in order to keep the twisting of various wirings inserted inside the first arm 11, the second arm 12, or the hands 13a and 13b within an allowable range, the rotation range of the first arm 11, the second arm 12, or the hands 13a and 13b may be limited. In this way, the rotation range of the first arm 11, the second arm 12, or the hands 13a and 13b may be limited for various reasons. When the rotation range of the first arm 11, the second arm 12, or the hands 13a and 13b is limited, the rotation range of the belts 43a, 43b, 53a, 53b, and 63 that rotate together with the first arm 11, the second arm 12, or the hands 13a and 13b is also limited, and the area outside the rotation range can be effectively used for arranging the angle detector 7.

[0087] (Other variations) In the above embodiment, the positional relationship between the angle detector 7 and the detection object 70 may be any. For example, the angle detector 7 may be provided facing the detection object 70 in the axial direction of the target motor 3. In other words, the angle detector 7 may be disposed below or above the corresponding detection object 70 (i.e., the detection object 70 attached to the rotor 33 of the target motor 3).

[0088] The detection object 70 according to the above embodiment may be any object as long as it can rotate together with the rotor 33 and transmit the rotation to the angle detector 7. That is, the detection object 70 may have any specific configuration, and the detection object 70 may be attached to the rotor 33 in any manner. For example, the detection object 70 does not necessarily have to be attached to the first pulleys 41a, 41b, and 61, and may be attached to the rotor 33 directly or via a support member or the like. Also, a part of the first pulleys 41a, 41b, and 61 connected to the rotor 33 may function as the detection object 70.

[0089] In the above embodiment, the angle detector 7 and the object to be detected 70 may be supported integrally via a bearing or the like (i.e., in a state in which they are relatively rotatable with respect to each other). That is, the object to be detected 70 and the angle detector 7 may be unitized. Of course, the angle detector 7 and the object to be detected 70 may be supported separately (separately).

[0090] In the above embodiment, the angle detector 7 does not necessarily have to be realized by an optical encoder. For example, the angle detector 7 may be realized by a mechanical encoder, a magnetic encoder, an electromagnetic induction encoder, a capacitive encoder, or the like. Alternatively, the angle detector 7 may be realized by a resolver.

[0091] In the above embodiment, the rotation axis (first axis) L1 of the first arm 11 is set at a position offset from the center line CL toward the first side wall 203a in a plan view, but this is not essential. That is, the first axis L1 may be set on the center line CL in a plan view. As described above, even with such a configuration, the rotation range of the first arm 11 may be limited for various reasons.

[0092] In the above embodiment, the number of motors 3 included in the transport device 10 is not limited to four, and may be three or less, or may be five or more.

[0093] In the above embodiment, the first motor 3A, the second motor 3B, the third motor 3C, and the fourth motor 3D are stacked in this order from the bottom up, but the stacking order is not limited to this and can be changed as appropriate. Also, the number of stacked motors 3 is not limited to four, but may be three or less, or five or more. Alternatively, the motors 3 do not necessarily have to be stacked.

[0094] In the above-described embodiments, the motor 3 may be, for example, a servo motor (eg, a brushless DC servo motor, an AC servo motor, etc.) or a stepping motor.

[0095] In the above embodiment, the conveying device 10 may be provided with bearings for rotatably supporting the rotating members, seals for airtightly sealing between the members, and the like at appropriate positions.

[0096] Although the transport device 10 according to the above embodiment includes two hands (first hand 13a and second hand 13b), the number of hands included in the transport device 10 may be one or three or more. Furthermore, although the transport device 10 includes two arms (first arm 11 and second arm 12), the number of arms included in the transport device 10 may be one or three or more. The number of motors 3 mounted on the transport device 10 may be appropriately changed depending on the number of hands and arms, the drive type thereof, and the like.

[0097] In the above embodiment, the housing of the arm unit 1 (specifically, the housing 11m of the first arm 11 and the housing 12m of the second arm 12) may serve as a vacuum partition (vacuum barrier). In this case, the outside of the housing of the arm unit 1 becomes a vacuum atmosphere Q1, and the inside of the housing of the arm unit 1 becomes an air atmosphere Q2. In this case, the partition 34 of each motor 3 may be omitted.

[0098] In the above embodiment, the transfer chamber 20 may be disposed in a processing chamber maintained in a predetermined gas atmosphere. In other words, the external space of the transfer chamber 20 may be the air atmosphere Q2 or a predetermined gas atmosphere.

[0099] In the above embodiment, the transfer chamber 20 does not necessarily have to be a vacuum chamber. That is, the internal space of the transfer chamber 20 does not necessarily have to be a vacuum atmosphere Q1. That is, the transfer device 10 does not necessarily have to be a vacuum transfer robot, and may be an atmospheric transfer robot that transfers the transfer object under atmospheric atmosphere.

[0100] In the above embodiment, the substrate to be transported by the transport device 10 may be a wafer, a glass substrate, a wafer held in a tape frame (tape frame wafer), etc. The shape of the substrate may be circular or a shape other than circular (e.g., elliptical, rectangular, etc.). However, the object to be transported by the transport device 10 is not limited to a substrate, and may be, for example, various electronic components.

[0101] Other configurations can also be modified in various ways without departing from the spirit of the present invention. [Explanation of symbols]

[0102] 1 Arm unit 11 First Arm 12 Second Arm 13a 1st hand 13b 2nd hand 2. Torso 3 Motor 3A 1st motor 3B Second motor 3C 3rd motor 3D 4th motor 31 Support shaft 31h Hollow part of support shaft 32 Stator 33 Rotor 34 Bulkhead 300,300a motor stack 4a, 4b, 5a, 5b, 6 Rotation transmission mechanism 41a, 41b, 51a, 51b, 61 First pulley 42a, 42b, 52a, 52b, 62 Second pulley 43a, 43b, 53a, 53b, 63 Belt 7 Angle detector 71 Wiring 70 Object to be detected 10, 10a Conveyor device 20. Transfer chamber D, Da Belt non-reach area

Claims

1. an arm unit including a plurality of links that are horizontally rotatable around a rotation axis; a motor that is disposed within a storage link that is one of the plurality of links and that rotates a drive target link that is one of the plurality of links and different from the storage link, the drive source including a support shaft that is disposed coaxially with a rotation axis of the storage link, a stator that is supported by the support shaft, and a rotor that is provided on an outer circumferential side of the stator; a rotation transmission mechanism including a first pulley connected to the rotor, a second pulley disposed on a tip side of the containing link, and a belt wound between the first pulley and the second pulley within the containing link; an angle detector for detecting a rotation angle of the motor; Equipped with The rotation range of the storage link is limited, The angle detector is disposed in the storage link, to the side of the motor, and outside a rotation range of the belt that rotates together with the storage link in a plan view. A conveying device comprising:

2. 2. The conveying device according to claim 1, A plurality of the motors are provided, The plurality of motors are vertically stacked to form a motor stack. A conveying device comprising:

3. The conveying device according to claim 2, A continuous hollow portion is provided on an inner side of the motor laminate, the continuous hollow portion penetrating the motor laminate in a vertical direction, The wiring of the angle detector is pulled out in the vertical direction and inserted into the connecting hollow portion from one end side of the connecting hollow portion. A conveying device comprising:

4. A conveying device according to any one of claims 1 to 3, a pivot axis of the storage link is defined at a position offset toward the first side wall from a center line of a first side wall and a second side wall facing each other in a transport chamber in which the arm unit is stored, in a plan view; A conveying device comprising:

5. The conveying device according to claim 4, The angle detector is disposed at a position deviated from a normal line of the first side wall passing through a pivot axis of the storage link in a plan view. A conveying device comprising:

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