Moving route generation method of robot and moving route generation device of robot

Abstract

To provide a moving route generation method of a robot and a moving route generation device of a robot in which a user can examine size of a gap between at least one of a robot and a work-piece on a generated moving route in an arrangement area of the robot and the arrangement area.SOLUTION: A moving route generation method of a substrate transfer robot 10 displays size of a gap G between at least one of a robot 10 and a work-piece W on a moving route OP and an arrangement area 20 in integrated data ID on a display part 220, based on the integrated data ID where robot CAD data CD1, arrangement area CAD data CD2, and work-piece CAD data CD3 are integrated, which is used for generate a moving route OP of the substrate transfer robot 10 in the arrangement area 20 where the substrate transfer robot 10 and the work-piece W are arranged.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present disclosure relates to a robot movement path generating method and a robot movement path generating device. [Background technology]

[0002] Conventionally, there is known a robot trajectory generation method that derives a robot's motion path based on a predetermined condition. For example, Patent Document 1 discloses a robot trajectory generation method that derives a robot's motion path so that the robot arm does not interfere with other robot arms or obstacles. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2019-193975 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the robot trajectory generation method described in the above Patent Document 1, although a robot motion path is derived so that the robot arm does not interfere with other robot arms or obstacles, the user cannot recognize the size of the gap between the robot and obstacles on the derived robot motion path. Therefore, the user cannot consider the size of the gap on the derived motion path in the robot placement area. For this reason, there is a demand for a robot motion path generation method and a robot motion path generation device that allow the user to consider the size of the gap between at least one of the robot and the work on the derived motion path in the robot placement area and the placement area.

[0005] This disclosure has been made to solve the problems described above, and one objective of this disclosure is to provide a robot movement path generation method and a robot movement path generation device that enable a user to consider the size of the gap between the derived robot placement area and at least one of the robot and work on the movement path in the placement area. [Means for solving the problem]

[0006] In order to achieve the above object, a method for generating a robot movement path according to a first aspect of this disclosure includes simulating and deriving a movement path of a robot including an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed, based on predetermined conditions; and displaying a virtual image including the robot, the placement area, and the workpiece on a display unit based on integrated data that integrates robot CAD data, which is computer-aided design data of the robot, placement area CAD data, which is computer-aided design data of the placement area, and workpiece CAD data, which is computer-aided design data of the workpiece, which are used to derive the movement path, and displaying on the display unit the size of the gap between at least one of the robot and the workpiece on the movement path in the integrated data and the placement area.

[0007] The robot motion path generation method according to the first aspect of the disclosure, as described above, displays on the display unit the size of a gap between at least one of the robot and the workpiece on the motion path in the integrated data and the placement area, based on integrated data obtained by integrating the robot CAD data, which is computer-aided design data of the robot, the placement area CAD data, which is computer-aided design data of the placement area, and the workpiece CAD data, which is computer-aided design data of the workpiece, used to derive the motion path of the robot in the placement area where the robot and the workpiece are placed. This allows the user to recognize the size of the gap by looking at the size of the gap between at least one of the robot and the workpiece on the motion path displayed on the display unit and the placement area. As a result, the user can consider the size of the gap between at least one of the robot and the workpiece on the derived motion path in the placement area of ​​the robot. In addition, in the robot motion path generation method according to the first aspect, as described above, displays on the display unit a virtual image including the robot, the placement area, and the workpiece, based on integrated data obtained by integrating the robot CAD data, the placement area CAD data, and the workpiece CAD data. This allows the user to easily consider specified conditions for deriving the robot's movement path in the robot placement area by viewing a virtual image including the robot, placement area, and workpiece displayed on the display unit.

[0008] In addition, in order to achieve the above-mentioned object, a robot movement path generation device according to a second aspect of this disclosure includes a display unit, an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, and a control unit that simulates and derives a movement path of a robot in a placement area in which the robot and the workpiece are placed based on predetermined conditions, and displays a virtual image including the robot, the placement area, and the workpiece on the display unit based on integrated data that integrates robot CAD data, which is computer-aided design data of the robot, placement area CAD data, which is computer-aided design data of the placement area, and workpiece CAD data, which is computer-aided design data of the workpiece, which are used to derive the movement path, and displays on the display unit the size of the gap between at least one of the robot and the workpiece on the movement path in the integrated data and the placement area.

[0009] The robot motion path generating device according to the second aspect of the disclosure includes a control unit that displays on a display unit the size of a gap between at least one of the robot and the workpiece on the motion path in the integrated data, which is obtained by integrating the robot CAD data, which is computer-aided design data of the robot, the placement area CAD data, which is computer-aided design data of the placement area, and the workpiece CAD data, which is computer-aided design data of the workpiece, used to derive the motion path of the robot in the placement area where the robot and the workpiece are placed, as described above. As a result, similar to the robot motion path generating method according to the first aspect, a user can recognize the size of the gap by looking at the size of the gap between at least one of the robot and the workpiece on the motion path displayed on the display unit and the placement area. As a result, similar to the robot motion path generating method according to the first aspect, a robot motion path generating device can be provided that allows a user to consider the size of the gap between at least one of the robot and the workpiece on the derived motion path in the placement area of ​​the robot and the placement area. In the robot motion path generation method according to the first aspect, as described above, the control unit causes the display unit to display a virtual image including the robot, the placement area, and the workpiece based on integrated data obtained by integrating the robot CAD data, the placement area CAD data, and the workpiece CAD data. As a result, similar to the robot motion path generation method according to the first aspect, the user can easily consider predetermined conditions for deriving the motion path in the placement area of ​​the robot by viewing the virtual image including the robot, the placement area, and the workpiece displayed on the display unit. Effect of the Invention

[0010] According to the present disclosure, as described above, it is possible to provide a robot movement path generation method and a robot movement path generation device that enable a user to consider the size of the gap between the placement area and at least one of the robot and work on the movement path in the derived robot placement area. [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 is a plan view illustrating a substrate transport system according to an embodiment of the present disclosure. [Diagram 2] 1 is a block diagram showing a configuration of a motion path generating device for a substrate transport robot according to an embodiment of the present disclosure. [Diagram 3] FIG. 13 is a flow diagram illustrating a motion path generation flow for a substrate transport robot according to an embodiment of the present disclosure. [Figure 4] 11 is a diagram showing a virtual image displayed on a display unit according to an embodiment of the present disclosure. FIG. [Diagram 5] 13 is a diagram showing a state in which the size of a gap between a substrate transport robot and a placement area according to an embodiment of the present disclosure is displayed on a display unit. FIG. [Figure 6] 11A and 11B are diagrams for explaining placement of a virtual obstacle based on a minimum threshold value of a gap between a substrate transport robot and a placement area according to an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Hereinafter, specific embodiments of the present disclosure will be described with reference to the drawings.

[0013] [Motion path generation device for substrate transport robot] 1 and 2, a motion path generating device 200 for a substrate transport robot 10 according to an embodiment of the present disclosure will be described. The motion path generating device 200 for the substrate transport robot 10 is a device that generates a motion path OP for the substrate transport robot 10 in the substrate transport system 100. The substrate transport robot 10 is an example of a robot.

[0014] (Substrate transport system) 1, the substrate transfer system 100 includes a substrate transfer robot 10 and a placement area 20. A substrate W is an example of a workpiece.

[0015] The substrate transport robot 10 includes a hand 11 that holds the substrate W, a horizontal articulated robot arm 12 to which the hand 11 is attached and to which a plurality of links 12a are connected to one another, and a base 13 that supports the robot arm 12. The hand 11 holds the substrate W when the substrate W is transported by the substrate transport robot 10. The hand 11 is attached to the tip of the robot arm 12. The substrate W is, for example, a silicon wafer having a disk shape. The substrate W and the hand 11 are examples of a workpiece and an end effector, respectively.

[0016] The placement area 20 includes a substrate transfer chamber 21 and a substrate placement portion 22 .

[0017] The substrate transfer robot 10 is disposed in the substrate transfer chamber 21. The substrate transfer chamber 21 is a space in which the substrate W is transferred by the substrate transfer robot 10. The interior of the substrate transfer chamber 21 is maintained at atmospheric pressure.

[0018] The substrate placement part 22 is connected to the substrate transfer chamber 21. The substrate W is placed on the substrate placement part 22. The substrate placement part 22 includes a plurality of load ports 22a, a plurality of load locks 22b, and an aligner 22c.

[0019] Each of the multiple load ports 22a includes a front opening unify pod (FOUP), which is a container capable of accommodating multiple substrates W.

[0020] Each of the plurality of load locks 22b is connected to the substrate transfer chamber 21 at a position different from each of the plurality of load ports 22a. Each of the plurality of load locks 22b is connected to the substrate transfer chamber VC maintained in a vacuum atmosphere.

[0021] The substrate transfer chamber VC is connected to a substrate processing chamber in which processes such as resist coating and etching are performed on the substrate W at a position different from each of the multiple load locks 22b. In other words, the substrate transfer system 100 is an EFEM (Equipment Front End Module) that transfers the substrate W between each FOUP of the multiple load ports 22a and the substrate transfer chamber VC connected to the substrate processing chamber.

[0022] The aligner 22c is a device for performing alignment of the substrate W and correcting eccentricity.

[0023] (Configuration of the motion path generation device for the substrate transport robot) 2, the movement path generating device 200 for the substrate transport robot 10 includes an input unit 210, a display unit 220, a storage unit 230, and a control unit 240. The movement path generating device 200 for the substrate transport robot 10 is, for example, a PC (personal computer) or a tablet.

[0024] The input unit 210 accepts an input operation from a user. When the input unit 210 accepts an input operation from a user, the input unit 210 outputs an input signal corresponding to the input operation to the control unit 240. For example, the input unit 210 is a keyboard or a mouse. The input unit 210 is used when setting or changing a predetermined condition for deriving an operation path OP in the arrangement area 20 of the substrate transport robot 10.

[0025] The display unit 220 displays a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W, and a derived movement path OP of the substrate transport robot 10 in the placement area 20. The display unit 220 is, for example, a liquid crystal display or an organic EL display.

[0026] The storage unit 230 is a computer-readable storage medium that stores various programs and various data. The storage unit 230 stores a motion path generation program MP for the control unit 240 to execute a motion path generation method for the substrate transport robot 10. The storage unit 230 is formed, for example, by a magnetic disk such as a hard disk, an optical disk such as a CD-ROM or DVD, or a semiconductor memory.

[0027] The control unit 240 performs a simulation based on predetermined conditions to derive an operation path OP of the substrate transport robot 10 in the arrangement area 20. The control unit 240 includes, for example, a processor such as a CPU (Central Processing Unit) and semiconductor memories such as a RAM (Random Access Memory) and a ROM (Read Only Memory).

[0028] The control unit 240 reads CAD data CD used to derive the operation path OP. The CAD data CD includes transport robot CAD data CD1 which is computer-aided design data of the substrate transport robot 10, placement area CAD data CD2 which is computer-aided design data of the placement area 20, and substrate CAD data CD3 which is computer-aided design data of the substrate W. The transport robot CAD data CD1, placement area CAD data CD2, and substrate CAD data CD3 to be read by the control unit 240 can be arbitrarily selected by the user. The transport robot CAD data CD1 and substrate CAD data CD3 are examples of robot CAD data and work CAD data, respectively.

[0029] The control unit 240 causes the display unit 220 to display a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W based on the integrated data ID that integrates the loaded transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3.

[0030] [Method for generating motion path for substrate transport robot] A method for generating a movement path for the substrate transport robot 10 according to an embodiment of the present disclosure will be described with reference to FIGS.

[0031] 3, in step S1, the control unit 240 reads the transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3 used to derive the operation path OP. The placement area CAD data CD2 includes an obstacle 30 shown in FIG. 4 that becomes an obstacle when the substrate transport robot 10 operates. In FIG. 4, a columnar object placed in the substrate transport chamber 21 is shown as an example of the obstacle 30.

[0032] 3, in step S2, the control unit 240 causes the display unit 220 to display a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W, based on an integrated data ID that integrates the loaded transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3. Note that the control unit 240 also causes the display unit 220 to display the virtual image VI in steps S3, S4, and S5, which will be described later.

[0033] As shown in Fig. 4, the control unit 240 causes at least one of a two-dimensional virtual image VIa and a three-dimensional virtual image VIb to be displayed on the display unit 220. Fig. 4 shows an example in which the control unit 240 causes both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb to be displayed on the display unit 220. The control unit 240 switches between a state in which both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side by side on the display unit 220, a state in which the two-dimensional virtual image VIa is displayed on the display unit 220, and a state in which the three-dimensional virtual image VIb is displayed on the display unit 220, based on an input operation by the user on the input unit 210.

[0034] When one of the three-dimensional data IDb in the integrated data ID is changed based on the user's operation, the control unit 240 displays at least one of the two-dimensional virtual image VIa corresponding to the two-dimensional data IDa and the three-dimensional virtual image VIb corresponding to the three-dimensional data IDb on the display unit 220 while reflecting the other of the two-dimensional data IDa and the three-dimensional data IDb. For example, when one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on the user's operation, the control unit 240 displays both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb side by side on the display unit 220 while reflecting the other of the two-dimensional data IDa and the three-dimensional data IDb. That is, when the user performs an input operation on the input unit 210 to change the two-dimensional data IDa or the three-dimensional data IDb in step S3 described later while both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed on the display unit 220, both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb change in a linked manner.

[0035] 3, in step S3, the control unit 240 sets a predetermined condition for deriving the movement path OP in response to a user's input operation on the input unit 210 for setting a predetermined condition for deriving the movement path OP. The predetermined condition includes the start point and end point of the movement path OP, the upper limit values ​​of the speed and acceleration of the hand 11, the upper limit values ​​of the speed and acceleration of the robot arm 12, whether the hand 11 holds the substrate W, a minimum threshold Ga of the gap G described later, the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, the position of the components of the placement area 20, and the like. That is, the control unit 240 changes at least one of the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 in the integrated data ID based on the user's operation. Furthermore, when at least one of the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the attitude of the substrate transport robot 10, the size of the components of the placement area 20, and the position of the components of the placement area 20 in one of the two-dimensional data IDa and the three-dimensional data IDb is changed based on the user's operation, the control unit 240 displays at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220 while reflecting the change in the other of the two-dimensional data IDa and the three-dimensional data IDb. The change in the size and position of the components of the substrate transport robot 10 in the integrated data ID includes the change in the length and position of at least one of the link 12a and the hand 11 as the components of the substrate transport robot 10 in the integrated data ID. The change in the size and position of the components of the placement area 20 in the integrated data ID includes at least one of the change in the position, addition, and deletion of the substrate placement unit 22 as the components of the placement area 20, and at least one of the change in the position and size of the obstacle 30 as the components of the placement area 20.

[0036] As shown in Fig. 3, in step S4, the control unit 240 simulates and derives an operation path OP in the placement area 20 of the substrate transport robot 10 based on a predetermined condition. As shown in Fig. 5, the control unit 240 derives a plurality of operation paths OP. In Fig. 5, for simplification, only two operation paths OP are shown. Note that, as shown in Fig. 6, the control unit 240 simulates and derives the operation path OP in a state in which the outline of the placement area 20 is shifted by a minimum threshold value Ga of a gap G, which will be described later, by placing a virtual obstacle 30a in the virtual image VI displayed on the display unit 220.

[0037] As shown in FIG. 3, in step S5, the control unit 240 causes the display unit 220 to display the derived operation path OP. As shown in FIG. 5, the control unit 240 causes the display unit 220 to display the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operation path OP in the integrated data ID and the obstacle 30 as a component of the placement area 20, together with the derived operation path OP. Specifically, the control unit 240 causes the display unit 220 to display the size of the smallest gap G on each of the multiple operation paths OP in the integrated data ID. That is, the size of the smallest gap G on each of the multiple derived operation paths OP is simultaneously displayed on the display unit 220. In addition, the control unit 240 causes the display unit 220 to display the size of the smallest gap G on each of the multiple operation paths OP in the integrated data ID in a manner according to the size of the gap G. For example, the control unit 240 causes the display unit 220 to display the size of the smallest gap G on each of the multiple operation paths OP in a color according to the size of the gap G.

[0038] After step S4 or step S5, if the user performs an input operation on the input unit 210 to change the predetermined conditions when deriving the operation path OP, the process returns to step S3. If the user does not perform an input operation on the input unit 210 to change the predetermined conditions when deriving the operation path OP after step S5, the generation of the operation path for the substrate transport robot 10 ends.

[0039] [Effects of the embodiment] In this embodiment, the following effects can be obtained.

[0040] (Effect of the method for generating the motion path of the substrate transport robot) In this embodiment, based on integrated data ID obtained by integrating the transport robot CAD data CD1, which is computer-aided design data of the substrate transport robot 10, the placement area CAD data CD2, which is computer-aided design data of the placement area 20 in which the substrate transport robot 10 and the substrate W are placed, and the substrate CAD data CD3, which is computer-aided design data of the substrate W, used to derive the operation path OP in the placement area 20 of the substrate transport robot 10, the display unit 220 displays the size of the gap G between at least one of the substrate transport robot 10 and the placement area 20 on the operation path OP in the integrated data ID. This allows the user to recognize the size of the gap G by looking at the size of the gap G between at least one of the substrate transport robot 10 and the placement area 20 on the operation path OP displayed on the display unit 220. As a result, the user can consider the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the derived operation path OP in the placement area 20 of the substrate transport robot 10 and the placement area 20. Furthermore, in this embodiment, based on the integrated data ID that integrates the transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3, a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W is displayed on the display unit 220. This allows the user to easily consider predetermined conditions for deriving the operation path OP of the substrate transport robot 10 in the placement area 20 by viewing the virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W displayed on the display unit 220.

[0041] Furthermore, in this embodiment, displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on the movement path OP in the integrated data ID on the display unit 220. This allows the user to effectively recognize the size of the gap G by looking at the size of the smallest gap G on the movement path OP displayed on the display unit 220.

[0042] In the present embodiment, deriving the movement path OP based on a predetermined condition includes deriving a plurality of movement paths OP based on the predetermined condition. Displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on each of the plurality of movement paths OP in the integrated data ID on the display unit 220. This allows the user to more effectively recognize the size of the gap G by looking at the size of the smallest gap G on each of the plurality of movement paths OP in the virtual image VI displayed on the display unit 220.

[0043] Furthermore, in this embodiment, displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on each of the multiple movement paths OP in the integrated data ID on the display unit 220 in a manner corresponding to the size of the gap G. This allows the user to easily compare the size of the smallest gap G on each of the multiple movement paths OP by looking at the size of the smallest gap G on each of the multiple movement paths OP in the virtual image VI displayed on the display unit 220 in a manner corresponding to the size of the gap G.

[0044] In this embodiment, the placement area 20 includes an obstacle 30 that impedes the operation of the substrate transport robot 10. Displaying the size of the gap G on the display unit 220 includes displaying the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operation path OP in the integrated data ID and the obstacle 30 as a component of the placement area 20 on the display unit 220. This allows the user to recognize the size of the gap G between at least one of the substrate transport robot 10 and the substrate W and the obstacle 30 as a component of the placement area 20 by viewing the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the multiple operation paths OP in the virtual image VI displayed on the display unit 220 and the obstacle 30 as a component of the placement area 20.

[0045] Furthermore, in this embodiment, the method for generating a movement path for the substrate transport robot 10 includes setting a minimum threshold value Ga of the gap G as a predetermined condition. Then, deriving the movement path OP based on the predetermined condition includes deriving the movement path OP by simulating the movement path OP in a state in which the outline of the placement area 20 is shifted by the set minimum threshold value Ga of the gap G by placing a virtual obstacle 30a in the virtual image VI displayed on the display unit 220. This makes it possible to easily derive the movement path OP by simulation in a state in which the set minimum threshold value Ga of the gap G is taken into consideration.

[0046] Furthermore, in this embodiment, the method for generating an operation path for the substrate transport robot 10 includes setting, as a predetermined condition, whether or not the hand 11 holds the substrate W. Then, deriving the operation path OP based on the predetermined condition includes deriving the operation path OP by simulating the operation path OP based on the set whether or not the hand 11 holds the substrate W. This makes it possible to derive the operation path OP by simulation, taking into account whether or not the hand 11 holds the substrate W.

[0047] (Effects of the motion path generation device for substrate transport robots) In this embodiment, the operation path generating device 200 for the substrate transport robot 10 includes a control unit 240 that displays on the display unit 220 the size of the gap G between the placement area 20 and at least one of the substrate transport robot 10 and the substrate W on the operation path OP in the integrated data ID, based on the integrated data ID that integrates the transport robot CAD data CD1, which is computer-aided design data of the substrate transport robot 10, the placement area CAD data CD2, which is computer-aided design data of the placement area 20, and the substrate CAD data CD3, which is computer-aided design data of the substrate W, used to derive the operation path OP in the placement area 20 of the substrate transport robot 10. Thereby, similarly to the above-mentioned operation path generating method for the substrate transport robot 10, the user can recognize the size of the gap G by looking at the size of the gap G between the placement area 20 and at least one of the substrate transport robot 10 and the substrate W on the operation path OP displayed on the display unit 220. As a result, similarly to the above-mentioned method for generating a motion path for the substrate transport robot 10, a motion path generating device 200 for the substrate transport robot 10 can be provided that allows a user to consider the size of the gap G between at least one of the substrate transport robot 10 and the placement area 20 on the derived motion path OP in the placement area 20 of the substrate transport robot 10. In addition, in this embodiment, the control unit 240 displays a virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W on the display unit 220 based on integrated data ID obtained by integrating the transport robot CAD data CD1, the placement area CAD data CD2, and the substrate CAD data CD3. As a result, similarly to the above-mentioned method for generating a motion path for the substrate transport robot 10, a user can easily consider a predetermined condition when deriving the motion path OP in the placement area 20 of the substrate transport robot 10 by viewing the virtual image VI including the substrate transport robot 10, the placement area 20, and the substrate W displayed on the display unit 220.

[0048] [Variations] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present disclosure is indicated by the claims, not by the description of the embodiments described above, and further includes all modifications (variations) within the meaning and scope equivalent to the claims.

[0049] For example, in the above embodiment, an example has been shown in which deriving the movement path OP based on a predetermined condition includes deriving the movement path OP by simulating it based on whether or not the substrate W is held by the set hand 11, but the present disclosure is not limited to this. In the present disclosure, deriving the movement path based on a predetermined condition does not have to include deriving the movement path OP by simulating it based on whether or not the substrate W is held by the set hand 11.

[0050] In the above embodiment, an example was shown in which deriving the movement path OP based on a predetermined condition includes simulating and deriving the movement path OP in a state in which the outline of the placement area 20 is shifted by the minimum threshold Ga of the set gap G by placing a virtual obstacle 30a in the virtual image VI displayed on the display unit 220, but the present disclosure is not limited to this. In the present disclosure, deriving the movement path OP based on a predetermined condition does not have to include simulating and deriving the movement path OP in a state in which the outline of the placement area 20 is shifted by the minimum threshold Ga of the set gap G by placing a virtual obstacle 30a in the virtual image VI displayed on the display unit 220.

[0051] Furthermore, in the above embodiment, an example was shown in which displaying the size of the gap G on the display unit 220 includes displaying on the display unit 220 the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operation path OP in the integrated data ID and the obstacle 30 as a component of the placement area 20, but the present disclosure is not limited to this. In the present disclosure, displaying the size of the gap G on the display unit 220 does not have to include displaying on the display unit 220 the size of the gap G between at least one of the substrate transport robot 10 and the substrate W on the operation path OP in the integrated data ID and the obstacle 30 as a component of the placement area 20.

[0052] Also, in the above embodiment, an example has been shown in which displaying the size of the gap G on the display unit 220 includes displaying on the display unit 220 the size of the smallest gap G on each of the multiple movement paths OP in the integrated data ID in a manner corresponding to the size of the gap G, but the present disclosure is not limited to this. In the present disclosure, displaying the size of the gap G on the display unit 220 does not have to include displaying on the display unit 220 the size of the smallest gap G on each of the multiple movement paths OP in the integrated data ID in a manner corresponding to the size of the gap G.

[0053] In the above embodiment, an example has been shown in which displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on each of the multiple movement paths OP in the integrated data ID on the display unit 220, but the present disclosure is not limited to this. In the present disclosure, displaying the size of the gap G on the display unit 220 does not have to include displaying the size of the smallest gap G on each of the multiple movement paths OP in the integrated data ID on the display unit 220.

[0054] In the above embodiment, an example has been shown in which displaying the size of the gap G on the display unit 220 includes displaying the size of the smallest gap G on the movement path OP in the integrated data ID on the display unit 220, but the present disclosure is not limited to this. In the present disclosure, displaying the size of the gap G on the display unit 220 does not have to include displaying the size of the smallest gap G on the movement path OP in the integrated data ID on the display unit 220.

[0055] In the above embodiment, an example has been shown in which the workpiece is the substrate W, the end effector is the hand 11, and the robot arm 12 is a horizontally articulated robot arm, but the present disclosure is not limited to this. In the present disclosure, the workpiece may be something other than the substrate W, the end effector may be something other than the hand 11, and the robot arm 12 may be something other than a horizontally articulated robot arm.

[0056] In the above embodiment, an example has been shown in which the placement area 20 includes the substrate transport chamber 21 to which the substrate W is transported, and the substrate mounting portion 22 adjacent to the substrate transport chamber 21 and on which the substrate W is mounted, but the present disclosure is not limited to this. The placement area 20 may include the substrate transport chamber 21 to which the substrate W is transported, but may not include the substrate mounting portion 22 adjacent to the substrate transport chamber 21 and on which the substrate W is mounted.

[0057] The functions of the elements disclosed herein can be performed using circuits or processing circuits, including general purpose processors, special purpose processors, integrated circuits, Application Specific Integrated Circuits (ASICs), conventional circuits, and / or combinations thereof, configured or programmed to perform the disclosed functions. Processors are considered processing circuits or circuits because they include transistors and other circuits. In this disclosure, a circuit, unit, or means is hardware that performs the recited functions or hardware that is programmed to perform the recited functions. The hardware may be hardware disclosed herein or other known hardware that is programmed or configured to perform the recited functions. Where the hardware is a processor, which is considered a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used to configure the hardware and / or the processor.

[0058] [Aspects] It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0059] (Item 1) deriving, by simulating based on predetermined conditions, an operation path of a robot including an end effector that holds a workpiece and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed; a virtual image including the robot, the placement area, and the workpiece based on integrated data obtained by integrating robot CAD data, which is computer-aided design data of the robot, placement area CAD data, which is computer-aided design data of the placement area, and workpiece CAD data, which is computer-aided design data of the workpiece, used to derive the movement path, and displaying on the display unit a size of a gap between the placement area and at least one of the robot and the workpiece on the movement path in the integrated data.

[0060] (Item 2) 2. The robot movement path generation method according to claim 1, wherein displaying the size of the gap on the display unit includes displaying the size of the smallest gap on the movement path in the integrated data on the display unit.

[0061] (Item 3) Deriving the movement path based on the predetermined condition includes deriving a plurality of the movement paths based on the predetermined condition; 3. The robot movement path generation method according to item 2, wherein displaying the size of the gap on the display unit causes the display unit to display the smallest size of the gap on each of the plurality of movement paths in the integrated data.

[0062] (Item 4) 4. A robot movement path generation method according to item 3, wherein displaying the size of the gap on the display unit includes displaying the size of the smallest gap on each of the plurality of movement paths in the integrated data on the display unit in a manner according to the size of the gap.

[0063] (Item 5) the placement area includes an obstacle that impedes the operation of the robot; 5. The robot movement path generation method according to any one of items 1 to 4, wherein displaying the size of the gap on the display unit includes displaying on the display unit the size of a gap between at least one of the robot and the work on the movement path in the integrated data and the obstacle as a component of the placement area.

[0064] (Item 6) setting a minimum threshold value of the gap as the predetermined condition; 6. The robot movement path generation method according to any one of items 1 to 5, wherein deriving the movement path based on the predetermined condition includes simulating and deriving the movement path in a state in which a contour of the placement area is shifted by the minimum threshold of the gap set by the gap threshold setting unit by placing a virtual obstacle in the virtual image displayed on the display unit.

[0065] (Item 7) and setting whether or not the end effector holds the workpiece as the predetermined condition, 7. The robot movement path generation method according to any one of items 1 to 6, wherein deriving the movement path based on the predetermined condition includes deriving the movement path by simulating the movement path based on whether or not the workpiece is held by the set end effector.

[0066] (Item 8) The workpiece is a substrate, the end effector is a hand, the robot arm is a horizontal articulated robot, 8. The robot motion path generation method according to any one of claims 1 to 7, wherein the placement area includes a substrate transport chamber in which the substrate is transported, and a substrate placement section connected to the substrate transport chamber and on which the substrate is placed.

[0067] (Item 9) A display unit; a control unit that simulates and derives an operation path of a robot in a placement area in which the robot and the workpiece are placed based on predetermined conditions, the robot including an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, and causes a virtual image including the robot, the placement area, and the workpiece to be displayed on the display unit based on integrated data that is an integrated data set of robot CAD data that is computer-aided design data of the robot, placement area CAD data that is computer-aided design data of the placement area, and workpiece CAD data that is computer-aided design data of the workpiece, the integrated data being used to derive the operation path, and causes the display unit to display a size of a gap between the placement area and at least one of the robot and the workpiece on the operation path in the integrated data. [Explanation of symbols]

[0068] 10 Substrate transport robot (robot) 11 Hand (end effector) 12 Robot Arm 12a Link 20 Placement area 21 Substrate transfer chamber 22 Substrate placement section (work placement section) 30 Obstacles 30a Virtual Obstacles 200 Substrate transport robot motion path generation device (robot motion path generation device) 220 Display section 240 Control Unit CD1 Transport robot CAD data (robot CAD data) CD2 Placement area CAD data CD3 Board CAD data (Work CAD data) G Gap Ga (Gap) Minimum Threshold OP Operation Path Identity Integration Data VI Virtual Image W substrate (work)

Claims

1. deriving, by simulating based on predetermined conditions, an operation path of a robot including an end effector that holds a workpiece and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, in a placement area in which the robot and the workpiece are placed; A method for generating a robot movement path comprising: displaying a virtual image including the robot, the placement area, and the work on a display unit based on integrated data obtained by integrating robot CAD data, which is computer-aided design data of the robot, placement area CAD data, which is computer-aided design data of the placement area, and work CAD data, which is computer-aided design data of the work, which are used to derive the movement path; and displaying on the display unit a size of a gap between the placement area and at least one of the robot and the work on the movement path in the integrated data.

2. 2. The robot movement path generating method according to claim 1, wherein displaying the size of the gap on the display unit includes displaying the size of the smallest gap on the movement path in the integrated data on the display unit.

3. Deriving the movement path based on the predetermined condition includes deriving a plurality of the movement paths based on the predetermined condition; 3. The robot movement path generation method according to claim 2, wherein displaying the size of the gap on the display unit includes displaying the smallest size of the gap on each of the plurality of movement paths in the integrated data on the display unit.

4. 4. The robot movement path generation method of claim 3, wherein displaying the size of the gap on the display unit includes displaying the size of the smallest gap on each of the multiple movement paths in the integrated data on the display unit in a manner corresponding to the size of the gap.

5. the placement area includes an obstacle that impedes the operation of the robot; 2. The robot movement path generation method of claim 1, wherein displaying the size of the gap on the display unit includes displaying on the display unit the size of the gap between at least one of the robot and the work on the movement path in the integrated data and the obstacle as a component of the placement area.

6. setting a minimum threshold value of the gap as the predetermined condition; 2. The robot movement path generating method of claim 1, wherein deriving the movement path based on the specified conditions includes simulating and deriving the movement path in a state in which a contour of the placement area is shifted by the minimum threshold amount of the set gap by placing a virtual obstacle in the virtual image displayed on the display unit.

7. and setting whether or not the end effector holds the workpiece as the predetermined condition, 2. The robot movement path generating method according to claim 1, wherein deriving the movement path based on the specified conditions includes simulating and deriving the movement path based on whether or not the set end effector is holding the workpiece.

8. The workpiece is a substrate, the end effector is a hand, the robot arm is a horizontal articulated robot, The robot motion path generating method according to claim 1 , wherein the placement area includes a substrate transfer chamber into which the substrate is transferred, and a substrate placement part connected to the substrate transfer chamber and on which the substrate is placed.

9. A display unit; a control unit that simulates and derives an operation path of a robot in a placement area in which the robot and the workpiece are placed based on predetermined conditions, the robot including an end effector that holds a workpiece, and a robot arm to which the end effector is attached and to which a plurality of links are connected to each other, and causes a virtual image including the robot, the placement area, and the workpiece to be displayed on the display unit based on integrated data that integrates transport robot CAD data, which is computer-aided design data of the robot, placement area CAD data, which is computer-aided design data of the placement area, and workpiece CAD data, which is computer-aided design data of the workpiece, used to derive the operation path, and causes the display unit to display a size of a gap between the placement area and at least one of the robot and the workpiece on the operation path in the integrated data.

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