Transport robot teaching system and transport robot teaching method

Abstract

To provide a teaching system for a transport robot suitable for efficiently carrying out teaching work.SOLUTION: A teaching system for a transport robot includes a vertical multi-joint vertical arm mechanism, a rotating member that rotates around an axis extending in the x direction, a horizontal multi-joint horizontal arm mechanism supported by the rotating member, a hand unit 4 supported by the horizontal arm mechanism and equipped with a detection sensor 5, and a control device that detects a target 93 with the detection sensor 5 and teaches the position of the hand unit 4 using the detection result, the target 93 has an edge 931 located at the end on the y direction y1 side and the z direction z1 side, and an edge 932 located at the end on the y direction y2 side and the z direction z1 side and a distance L1 away from the edge 931, and the control device adjusts the angle about the central axis Cx, the y direction position and the z direction position of the hand unit 4 on the basis of the distance L1 and the rotation angle until at least one of the edges 931, 932 is detected by rotating the hand unit 4 around the central axis Cx.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present disclosure relates to a teaching system for a transport robot and a teaching method for a transport robot. [Background technology]

[0002] In the manufacturing process of semiconductor substrates, liquid crystal substrates, etc., a plurality of substrates are stored in a substrate transport container called a cassette in multiple stages, and the cassette is transported to a process device or an inspection device, where the substrates in the cassette are processed or inspected. In the process device or the inspection device, a transport robot is used as an industrial robot that stores the substrates in the transported cassette and removes the substrates from the cassette. The operator must teach the transport robot the operations for storing the substrates in the cassette and removing the substrates from the cassette in advance through a teaching operation.

[0003] There is a problem that this teaching work takes a very long time. The slots for storing each substrate in the cassette are very narrow, with not much extra space. Also, the inside of the cassette may not be visible from anywhere other than the opening, and in this case, the transport robot is positioned in front of the opening, making it very difficult to see inside the cassette. The operator must manually teach the transport robot how to insert and remove substrates from this narrow slot, relying on his or her own eyes and intuition.

[0004] Patent Document 1 discloses a configuration in which an object detection sensor provided on a hand detects a protrusion provided on a jig, and teaching is performed based on the detection result. With such a configuration, manual teaching by an operator is not required, and the time required for teaching can be reduced. However, depending on the configuration of the transport robot, it is difficult to efficiently perform teaching using the teaching method described in Patent Document 1. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2015-153809 A Summary of the Invention [Problem to be solved by the invention]

[0006] The present disclosure has been made under these circumstances, and has as its main object to provide a teaching system for a transport robot that is suitable for efficiently carrying out teaching work. [Means for solving the problem]

[0007] In order to solve the above problems, the present disclosure employs the following technical solutions.

[0008] A teaching system for a transport robot provided by a first aspect of the present disclosure includes a vertical arm mechanism of a vertical articulated type that moves along an in-plane direction perpendicular to a horizontal first direction, a first rotating member supported rotatably about a first rotating axis extending in the first direction relative to the vertical arm mechanism, a horizontal arm mechanism of a horizontal articulated type that is supported by the first rotating member, a hand unit supported by the horizontal arm mechanism and provided with an object detection sensor, and a control device that detects a detection target with the object detection sensor while moving the hand unit and teaches a position of the hand unit using the detection result, the teaching system for a transport robot including: The output target has a first edge located on one side of a horizontal second direction perpendicular to the first direction and at one end of a third direction perpendicular to the first direction and the second direction, and a second edge located on the other side of the second direction and at one end of the third direction, a first distance away from the first edge, and the control device adjusts the angle of the hand unit about the central axis, the position of the hand unit in the second direction, and the position of the hand unit in the third direction based on the first distance and a rotation angle until at least one of the first edge and the second edge is detected by rotating the hand unit about a central axis extending in the first direction.

[0009] In a preferred embodiment, the control device moves the hand unit to the other side in the third direction until the first edge is detected, records this as a first position, rotates the hand unit around the central axis from the first position to record a first rotation angle until the second edge is detected, moves the hand unit a second distance from the first position to the other side in the second direction, rotates the hand unit around the central axis to record a second rotation angle until the second edge is detected, and adjusts the angle of the hand unit about the central axis, the position of the hand unit in the second direction, and the position of the hand unit in the third direction from the first distance, the second distance, the first rotation angle, and the second rotation angle.

[0010] In another preferred embodiment, the control device moves the hand unit to the other side in the third direction until the first edge is detected, moves the hand unit a third distance to one side in the third direction and records this as a second position, rotates the hand unit around the central axis from the second position to record a third rotation angle until the first edge is detected, rotates the hand unit around the central axis from the second position to record a fourth rotation angle until the second edge is detected, and adjusts the angle of the hand unit about the central axis, the position of the hand unit in the second direction, and the position of the hand unit in the third direction from the first distance, the third distance, the third rotation angle, and the fourth rotation angle.

[0011] In a preferred embodiment, the detection target has a rectangular parallelepiped shape.

[0012] A teaching method for a transport robot provided by a second aspect of the present disclosure includes a vertical arm mechanism of a vertical multi-joint type that moves along an in-plane direction perpendicular to a horizontal first direction, a first rotating member supported rotatably about a first rotating axis extending in the first direction relative to the vertical arm mechanism, a horizontal multi-joint type horizontal arm mechanism supported by the first rotating member, and a hand unit supported by the horizontal arm mechanism and provided with an object detection sensor, the teaching method detecting a detection target with the object detection sensor while moving the hand unit, and teaching a position of the hand unit using the detection result, wherein the detection target has a first end edge located at an end on one side of a horizontal second direction perpendicular to the first direction and on one side of a third direction perpendicular to the first direction and the second direction, and a second end edge located at an end on the other side of the second direction and in the third direction. the hand unit has a second edge located at one end of one side in the third direction and a first distance away from the first edge, and the method includes the steps of: moving the hand unit to the other side in the third direction until the first edge is detected and recording the first position; rotating the hand unit from the first position about a central axis extending in the first direction and recording a first rotation angle until the second edge is detected; moving the hand unit a second distance from the first position to the other side in the second direction; rotating the hand unit about the central axis and recording a second rotation angle until the second edge is detected; and adjusting the angle of the hand unit about the central axis, the position of the hand unit in the second direction, and the position of the hand unit in the third direction from the first distance, the second distance, the first rotation angle, and the second rotation angle.

[0013] A teaching method for a transport robot provided by a third aspect of the present disclosure includes a vertical arm mechanism of a vertical multi-joint type that moves along an in-plane direction perpendicular to a horizontal first direction, a first rotating member supported rotatably about a first rotating axis extending in the first direction relative to the vertical arm mechanism, a horizontal arm mechanism of a horizontal multi-joint type that is supported by the first rotating member, and a hand unit supported by the horizontal arm mechanism and provided with an object detection sensor, the teaching method detecting a detection target with the object detection sensor while moving the hand unit, and teaching a position of the hand unit using the detection result, wherein the detection target has a first end edge located at an end on one side of a horizontal second direction perpendicular to the first direction and on one side of a third direction perpendicular to the first direction and the second direction, and a second end edge located at an end on the other side of the second direction and on the other side of the third direction. the hand unit has a second edge located at an end on one side of the third direction and a first distance away from the first edge, and the method includes the steps of: moving the hand unit to the other side in the third direction until the first edge is detected; moving the hand unit a third distance to one side in the third direction and recording this as a second position; rotating the hand unit from the second position about a central axis extending in the first direction to record a third rotation angle until the first edge is detected; rotating the hand unit from the second position about the central axis to record a fourth rotation angle until the second edge is detected; and adjusting the angle of the hand unit about the central axis, the position of the hand unit in the second direction, and the position of the hand unit in the third direction from the first distance, the third distance, the third rotation angle, and the fourth rotation angle. Effect of the Invention

[0014] According to the teaching system for a transport robot disclosed herein, in a transport robot configured with a vertical arm mechanism, a first rotating member, and a horizontal arm mechanism, it is possible to efficiently adjust the rotational directions of the hand unit around axes along the second direction, the third direction, and the first direction within a plane including the second direction and the third direction.

[0015] Other features and advantages of the present disclosure will become more apparent from the following detailed description taken in conjunction with the accompanying drawings. [Brief description of the drawings]

[0016] [Figure 1] 1 is a schematic front view showing an example of a transport robot constituting a teaching system for a transport robot according to the present disclosure. [Diagram 2] FIG. 2 is a perspective view of the transport robot shown in FIG. [Diagram 3] FIG. 2 is a perspective view showing an example of an arrangement of detection targets. [Figure 4] 4 is a perspective view showing the positional relationship between a detection target and a hand unit. FIG. [Diagram 5] FIG. 4 is a block diagram showing control of the transport robot. [Figure 6] 13 is a flowchart illustrating a teaching process. [Figure 7] 13A to 13C are diagrams for explaining a first example of the yz direction and x-axis rotation direction adjustment process. [Figure 8] 13 is a flowchart showing a first example of a yz direction and x-axis rotation direction adjustment process. [Figure 9] 11A to 11C are diagrams for explaining a procedure for calculating the amount of deviation in the yz directions and the angle of deviation in the x-axis rotation direction. [Figure 10] 11A to 11C are diagrams for explaining a procedure for calculating the amount of deviation in the yz directions and the angle of deviation in the x-axis rotation direction. [Figure 11] 11A to 11C are diagrams for explaining a procedure for calculating the amount of deviation in the yz directions and the angle of deviation in the x-axis rotation direction. [Figure 12] 13A and 13B are diagrams for explaining an example of an x-direction and z-axis rotation direction adjustment process. [Figure 13] 13A to 13C are diagrams for explaining a second example of the yz direction and x-axis rotation direction adjustment process. [Figure 14] 13 is a flowchart showing a second example of the yz direction and x-axis rotation direction adjustment process. [Figure 15]11A to 11C are diagrams for explaining a procedure for calculating the amount of deviation in the yz directions and the angle of deviation in the x-axis rotation direction. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the drawings.

[0018] The terms "first," "second," and the like in this disclosure are used merely as labels and are not necessarily intended to dictate any ordering of their objects.

[0019] Fig. 1 is a schematic front view showing an example of a transfer robot constituting a transfer robot teaching system according to the present disclosure. The transfer robot A1 shown in Fig. 1 performs operations such as taking out substrates stored in multiple stages in a cassette 8 (see Fig. 3) arranged on a load port, and transferring the substrates to a load lock chamber arranged on the opposite side of the cassette 8, and discharging substrates that have been processed in a processing chamber via the load lock chamber and returning the substrates to the cassette 8.

[0020] The transfer robot A 1 includes a vertical arm mechanism 1 , a first rotating member 2 , a horizontal arm mechanism 3 , a hand unit 4 , a control device 6 , a drive mechanism 71 , and an input unit 72 .

[0021] In the example illustrated in this embodiment, the x direction corresponds to the "first direction" of the present disclosure, and the y direction corresponds to the "second direction" of the present disclosure. The x direction and the y direction are mutually orthogonal, and both are directions along a horizontal surface. The z direction is a direction orthogonal to the x direction and the y direction, and corresponds to the vertical direction when the transport robot A1 is placed in a predetermined transport chamber (not shown), etc., and corresponds to the "third direction" of the present disclosure. In the following description, the upper side of the z direction is appropriately referred to as the "z1 side of the z direction," and the lower side of the z direction is appropriately referred to as the "z2 side of the z direction." The z1 side of the z direction corresponds to the "one side of the third direction" of the present disclosure, and the z2 side of the z direction corresponds to the "other side of the third direction" of the present disclosure. In addition, one side of the x direction is appropriately referred to as the "x1 side of the x direction," and the other side of the x direction is appropriately referred to as the "x2 side of the x direction." One side in the y direction is appropriately referred to as the "y1 side in the y direction," and the other side in the y direction is appropriately referred to as the "y2 side in the y direction." The y1 side in the y direction corresponds to the "one side in the second direction" in this disclosure, and the y2 side in the y direction corresponds to the "other side in the second direction" in this disclosure.

[0022] The vertical arm mechanism 1 is a vertical articulated arm mechanism that moves along a plane perpendicular to the horizontal x direction, and is composed of, for example, a plurality of arms that are rotatably connected. In the illustrated example, the vertical arm mechanism 1 includes a first vertical arm 11 and a second vertical arm 12. The first vertical arm 11 extends in a plane formed by the y direction and the z direction, and is supported by a fixed base 10. Specifically, the base end of the first vertical arm 11 is supported rotatably around a first horizontal axis O1 extending in the x direction relative to the fixed base 10. The second vertical arm 12 extends in a plane formed by the y direction and the z direction, and is supported by the first vertical arm 11. Specifically, the base end of the second vertical arm 12 is supported rotatably around a second horizontal axis O2 extending in the x direction at the tip of the first vertical arm 11. The configuration of the vertical arm mechanism 1 is not limited to the illustrated example.

[0023] The first rotating member 2 is supported by a second vertical arm 12 (vertical arm mechanism 1). Specifically, the first rotating member 2 is supported at the tip of the second vertical arm 12 so as to be rotatable about a first horizontal axis O1 extending in the x-direction.

[0024] Although detailed illustration is omitted, the first vertical arm 11 and the second vertical arm 12 are rotated around the first horizontal axis O1 and the second horizontal axis O2 by using, for example, a motor as a drive source and a power transmission means (drive mechanism) such as a belt mechanism or a reducer. Then, by controlling the drive of the motor, the horizontal arm mechanism 3 supported by the vertical arm mechanism 1 via the first rotating member 2 can be moved to the front of the cassette or the load lock chamber. Also, the first rotating member 2 is appropriately rotated around the first rotating axis Ox by a drive mechanism (not shown). As a result, the horizontal arm mechanism 3 (first horizontal arm 31 and second horizontal arm 32 described later) supported by the first rotating member 2 can maintain a horizontal posture.

[0025] The horizontal arm mechanism 3 is a horizontal multi-joint arm mechanism that is supported by the first rotating member 2 and moves along a horizontal plane perpendicular to the z direction (vertical direction). The horizontal arm mechanism 3 is, for example, composed of a plurality of arms that are rotatably connected. In the illustrated example, the horizontal arm mechanism 3 includes a first horizontal arm 31 and a second horizontal arm 32. The first horizontal arm 31 has a base end portion supported rotatably around a first vertical axis V1 extending in the z direction relative to the first rotating member 2. The second horizontal arm 32 has a base end portion supported rotatably around a second vertical axis V2 extending in the z direction at the tip end of the first horizontal arm 31. In this embodiment, the second horizontal arm 32 includes two second horizontal arms 32A and 32B arranged in two stages, one above the other. The configuration of the horizontal arm mechanism 3 is not limited to the illustrated example.

[0026] Although detailed illustrations will be omitted, the first horizontal arm 31 and the second horizontal arm 32 are rotated about the first vertical axis V1 and the second vertical axis V2, for example, by using a motor as a drive source and a power transmission means (drive mechanism) such as a belt mechanism or a reducer. By controlling the drive of the motor, the hand unit 4 (hand units 4A, 4B) described below supported by the second horizontal arm 32 (second horizontal arms 32A, 32B) can be moved linearly along the horizontal x direction.

[0027] The hand unit 4 is supported by a second horizontal arm 32 (horizontal arm mechanism 3). Specifically, the hand unit 4 is attached to the second horizontal arm 32. In this embodiment, the hand unit 4 includes two hand units 4A, 4B arranged in two stages, one above the other, and these hand units 4A, 4B are attached to the two second horizontal arms 32A, 32B, respectively.

[0028] The hand unit 4 (hand units 4A and 4B) is a generally U-shaped plate member having a base unit 41 connected to the second horizontal arm 32 (second horizontal arms 32A and 32B) and two elongated holding units 42 extending from the base unit 41. A thin plate-like substrate (not shown) is supported by the hand unit 4. The configuration of the hand unit 4 is not limited to the example shown in the figures.

[0029] The transport robot A1 supports a substrate by holding the hand unit 4 horizontally, and in this state raises and lowers the hand unit 4, rotates and moves it in the xy plane, etc., to place the substrate in a slot 81 in a cassette 8 (storing the substrate in the cassette 8), or receives the substrate placed in the slot 81 with the hand unit 4 and removes it from the cassette 8 (removing the substrate from the cassette 8).

[0030] An object detection sensor 5 is provided at the tip of the holding portion 42 of the hand unit 4. Details of the object detection sensor 5 will be described later.

[0031] The cassette 8 is a rectangular box, and at least the side facing the transport robot A1 is open as a surface for inserting and removing substrates. A plurality of slots 81 for storing substrates in multiple tiers are protruded inward on both sides of the inside of the cassette 8. A substrate is placed on the upper surface of a pair of slots 81 at the same height position, and is stored in the tier at that height position. The distance of the gap between a pair of opposing slots 81 in the cassette 8 is set longer than the horizontal length of the hand unit 4 (the width of the hand unit 4) so ​​that the hand unit 4 can move up and down inside the cassette 8 without interfering with the slots 81.

[0032] The object detection sensor 5 may be, for example, a fiber sensor, which is a type of optical sensor. The fiber sensor is equipped with a light-emitting unit and a light-receiving unit, and detects whether or not there is something between the light-emitting unit and the light-receiving unit based on whether or not the light-receiving unit receives light from the light-emitting unit. Of course, the object detection sensor 5 is not limited to a fiber sensor, and may be any sensor that can detect the presence or absence of an object. In the following description, the object detection sensor 5 is described as being a fiber sensor. As shown in FIG. 4, the light-emitting unit of the object detection sensor 5 is provided at the tip of one holding unit 42 of the hand unit 4, and the light-receiving unit of the object detection sensor 5 is provided at the tip of the other holding unit 42.

[0033] The object detection sensor 5 is provided to detect in which slot 81 of the cassette 8 the substrate is placed. Specifically, the transport robot A1 moves the hand unit 4 in the vertical direction (z direction shown in FIG. 4) while emitting light from the light-projecting unit of the object detection sensor 5 toward the light-receiving unit. At this time, the hand unit 4 is moved so that the edge of the substrate can block the optical axis of the object detection sensor 5 and the hand unit 4 does not come into contact with the substrate. When the substrate is not placed in the slot 81, the light-receiving unit receives the light from the light-projecting unit, and when the substrate is placed in the slot 81, the light emitted by the light-projecting unit is blocked by the substrate and is not received by the light-receiving unit. Therefore, it is possible to detect in which slot 81 the substrate is placed based on the detection result of the object detection sensor 5.

[0034] The control device 6 controls the operation of the vertical arm mechanism 1, the first rotating member 2, and the horizontal arm mechanism 3, and teaches the position of the hand unit 4. As shown in FIG. 5, the control device 6 includes a control unit 61 and a storage unit 62. The control unit 61 controls the driving of the drive mechanism 71 based on the teaching information stored in the storage unit 62. The drive mechanism 71 provides a predetermined operation to the vertical arm mechanism 1, the first rotating member 2, and the horizontal arm mechanism 3. The control unit 61 also controls the driving of the drive mechanism 71 based on information input from an input unit 72. The input unit 72 is a device (for example, a teach pendant) through which an operator performs teaching work or manual operation. Furthermore, the control unit 61 assists in the teaching work based on a teaching process described later, and automatically performs the teaching work. The teaching process will be described later. The storage unit 62 stores teaching information for indicating the trajectory of the movement of the hand unit 4. Information acquired in advance by the teaching process is recorded in the storage unit 62 and used as teaching information.

[0035] 3 and 4, in this embodiment, a teaching operation is performed automatically using an object detection sensor 5 provided in the hand unit 4 and a jig 9 placed on the upper surface of a pair of slots 81 of a cassette 8. In this automatic teaching operation, the position of the hand unit 4 is taught so that the hand unit 4 is adjusted to a predetermined position.

[0036] The jig 9 is, for example, a thin plate-like dummy substrate similar to the substrate actually stored in the cassette 8. The material of the jig 9 is not particularly limited, and may be the same material as the actual substrate, or may be a different material. The jig 9 is placed in a slot 81 of the cassette 8 for use (see FIG. 3). In this embodiment, the shape of the jig 9 is a rectangle that substantially matches the shape of the inner surface of the cassette 8 so that the placement position of the jig 9 in the cassette 8 (position on the xy plane) does not change. That is, the length of the jig 9 in the width direction (y direction in FIG. 3) is set to be approximately the same as the length of the width direction of the inner surface of the cassette 8, but slightly smaller, so that the jig 9 can be placed in the slot 81, and the placement position of the jig 9 in the cassette 8 does not shift in the width direction (y direction). In addition, the jig 9 is placed at the very back of the slot 81, so that the placement position of the jig 9 in the cassette 8 does not shift in the depth direction (x direction). This allows the position of a detection target 93 (described later) on the xy plane to be a specific position. Note that the shape of the jig 9 is not limited to this, and it is sufficient if the position of the detection target 93 on the xy plane can be specified.

[0037] The jig 9 has two notches 91 and 92 at an end that is the opening side of the cassette 8 (x1 side in the x direction shown in FIG. 3) when placed in the slot 81 of the cassette 8. The notches 91 and 92 are provided to prevent the holding part 42 of the hand part 4 from contacting the jig 9. Therefore, the shape of the notches 91 and 92 is not limited as long as it satisfies this purpose. In addition, a detection target 93 is provided on the upper surface of the part between the notches 91 and 92 of the jig 9. In the illustrated example, the detection target 93 has a rectangular parallelepiped shape. As shown in FIG. 4, each of the six faces of the detection target 93 faces one of the x1 side in the x direction, the x2 side in the x direction, the y1 side in the y direction, the y2 side in the y direction, the z1 side in the z direction, and the z2 side in the z direction.

[0038] The detection target 93 has a first edge 931 and a second edge 932. The first edge 931 is located at the end on the y1 side in the y direction and the z1 side in the z direction. In this embodiment, the first edge 931 is the corner formed by the side surface facing the y1 side in the y direction and the upper surface facing the z1 side in the z direction. The second edge 932 is located at the end on the y2 side in the y direction and the z1 side in the z direction. In this embodiment, the second edge 932 is the corner formed by the side surface facing the y2 side in the y direction and the upper surface facing the z1 side in the z direction. The second edge 932 is separated from the first edge 931 by a predetermined first distance L1. Note that the shape of the detection target 93 is not limited to a rectangular parallelepiped shape, and it is sufficient if the first edge 931 and the second edge 932 can be specified.

[0039] Next, the teaching process for automatically performing the teaching operation in this embodiment will be described.

[0040] FIG. 6 is a flowchart for explaining the teaching process performed by the control device 6. The control device 6 (control unit 61) starts the teaching process, for example, when an operator instructs to perform the teaching process from the input unit 72. In the teaching operation, the positions in each of the x direction, y direction, and z direction, and the adjustments in the x-axis rotation direction and z-axis rotation direction are performed. The teaching process includes a yz direction and x-axis rotation direction adjustment process (S1) and an x direction and z-axis rotation direction adjustment process (S2).

[0041] <yz direction and x-axis rotation direction adjustment process - First example> FIG. 7 is a diagram for explaining a first example of the yz direction and x-axis rotation direction adjustment process, and is a schematic diagram showing the positional relationship between the object detection sensor 5 provided on the hand unit 4 and the detection target 93 when viewed along the x direction from the x1 side in the x direction to the x2 side in the x direction. FIG. 8 is a flowchart showing an example of the yz direction and x-axis rotation direction adjustment process.

[0042] In the yz direction and x-axis rotation direction adjustment process, first, the hand unit 4 is positioned on the z1 side in the z direction with respect to the detection target 93 (see FIG. 7(a) and step S11 in FIG. 8). Next, the hand unit 4 is moved to the z2 side in the z direction while performing detection by the object detection sensor 5. Here, the hand unit 4 is moved to the z2 side in the z direction until the first edge 931 of the detection target 93 is detected (see FIG. 7(b)). At this time, the optical axis Op of the object detection sensor 5 is blocked by the first edge 931, and this position of the hand unit 4 is recorded as the first position (step S12 in FIG. 8).

[0043] Next, it is determined whether the detection target 93 is inclined in the clockwise direction or counterclockwise direction of the x-axis rotation direction relative to the hand unit 4 (step S13 in FIG. 8). In the example shown in FIG. 7, the detection target 93 is inclined in the clockwise direction of the x-axis rotation direction relative to the hand unit 4. In determining the inclination direction of the detection target 93, the hand unit 4 is rotated around the central axis Cx while performing detection by the object detection sensor 5. The central axis Cx extends along the x direction and intersects with the optical axis Op connecting the pair of object detection sensors 5 at the center position of the optical axis Op. The operation of rotating the hand unit 4 around the central axis Cx is performed by appropriately driving the vertical arm mechanism 1 and the first rotating member 2 by the driving mechanism 71. Here, the inclination direction of the detection target 93 is determined by rotating the hand unit 4 both clockwise and counterclockwise from the state shown in FIG. 7(b). When the hand unit 4 is rotated from the state shown in FIG. 7(b) in a clockwise direction (in a direction in which the angle between the upper surface of the detection target 93 facing the z1 side in the z direction and the optical axis Op becomes smaller), the optical axis Op of the object detection sensor 5 is once no longer blocked by the detection target 93, and then the optical axis Op is blocked by the second edge 932 of the detection target 93. If the detection of the detection target 93 is "off" when the optical axis Op of the object detection sensor 5 is not blocked by the detection target 93 and the detection of the detection target 93 is "on" when the optical axis Op is blocked (the same applies to the following explanations), when the hand unit 4 is rotated from the state shown in FIG. 7(b) in a clockwise direction, the detection of the detection target 93 by the object detection sensor 5 is switched from on to off to on in sequence. On the other hand, when the hand unit 4 is rotated from the state shown in FIG. 7(b) in a counterclockwise direction, the optical axis Op of the object detection sensor 5 remains blocked by the detection target 93. 7(b), the detection of the detection target 93 by the object detection sensor 5 remains on. The detection result (on or off) by the object detection sensor 5 makes it possible to determine the tilt direction of the detection target 93 in the x-axis rotation direction relative to the hand unit 4. Then, the determination result (the tilt direction of the detection target 93 in the x-axis rotation direction relative to the hand unit 4) is recorded in the memory unit 62.The tilt direction of the detection target 93 determines the rotation direction (either clockwise or counterclockwise) around the central axis Cx in the processing in Fig. 7(c) and subsequent steps described below, and the direction (either clockwise or counterclockwise) of the deviation angle Δθx around the central axis Cx, described below. For the procedures in Fig. 7(c) and subsequent steps described below, a case in which the detection target 93 is tilted clockwise relative to the hand unit 4 as shown in Fig. 7 will be described. Conversely, the processing in which the detection target 93 is tilted counterclockwise relative to the hand unit 4 is inverted from the left to right state to that in Fig. 7, and the rotation direction (clockwise and counterclockwise) around the central axis Cx of the hand unit 4 is also reversed.

[0044] Next, while performing detection by the object detection sensor 5, the hand unit 4 is rotated from the first position around the central axis Cx (see FIG. 7(c)). Here, the hand unit 4 is rotated around the central axis Cx until the second edge 932 of the detection target 93 is detected, and the rotation angle at this time is recorded in the storage unit 62 as the first rotation angle θ1 (step S14 in FIG. 8). Note that the unit of angle is degrees, and the same applies to the following description. Next, the hand unit 4 is moved from the first position (the position shown in FIG. 7(b)) by a predetermined second distance L2 toward the y2 side in the y direction (see FIG. 7(d), step S15 in FIG. 8). Here, the second distance L2 is a preset dimension, and is set to, for example, about 1 / 2 of the first distance L1. However, the value of the second distance L2 is not particularly limited.

[0045] Next, while performing detection by the object detection sensor 5, the hand unit 4 is rotated about the central axis Cx (see FIG. 7(e)). Here, the hand unit 4 is rotated about the central axis Cx until the second edge 932 of the detection target 93 is detected, and the rotation angle at this time is recorded in the memory unit 62 as the second rotation angle θ2 (step S16 in FIG. 8).

[0046] Next, based on the first distance L1, the second distance L2, the first rotation angle θ1, and the second rotation angle θ2, the deviation amount in the yz directions of the hand unit 4 relative to the reference position Tx of the detection target 93, and the deviation angle in the x-axis rotation direction of the hand unit 4 relative to the detection target 93 are calculated. Fig. 9 to Fig. 11 are diagrams for explaining the procedure for calculating the deviation amount in the y direction (Δy), the deviation amount in the z direction (Δz), and the deviation angle in the x-axis rotation direction (Δθx). The reference position Tx of the detection target 93 is the upper surface of the detection target 93, and is the center position between the first edge 931 and the second edge 932.

[0047] 9 shows the detection target 93, the central axis Cx of the hand unit 4 shown in FIG. 7, the first distance L1 (the distance from the first edge 931 to the second edge 932), the second distance L2, the first rotation angle θ1, and the second rotation angle θ2, and further shows auxiliary lines and dimension lines as appropriate. Focusing on the dashed triangle in FIG. 9, the relationship between the following formulas 1 and 2 holds for the angle θ11 and the distance L11.

[0048]

number

[0049]

number

[0050] Next, looking at the dashed triangle in FIG. 10, the relationship of the following equation 3 holds for the deviation angle Δθx in the x-axis rotation direction, and the relationship of the following equation 4 holds for the angle θ12.

[0051]

number

[0052]

number

[0053] Next, regarding the angle θ12 and the distance L12 shown in FIG. 11, the following relationship of Equation 5 holds from the law of cosines.

[0054]

Equation

[0055] Using the already calculated deviation angle Δθx in the x-axis rotation direction and the distance L12, the deviation amounts Δy and Δz in the y-direction and z-direction with respect to the reference position Tx of the detection target 93 can be calculated as follows in Equation 6.

[0056]

Equation

[0057] Then, as described above, based on the deviation angle Δθx in the x-axis rotation direction, the deviation amount Δy in the y-direction, and the deviation amount Δz in the z-direction calculated from the first distance L1, the second distance L2, the first rotation angle θ1, and the second rotation angle θ2, the angle (x-axis rotation direction) around the central axis Cx extending in the x-direction of the hand part 4, the position of the hand part 4 in the y-direction (second direction), and the position (yz-direction) of the hand part 4 in the z-direction (third direction) are adjusted (step S17 in FIG. 8). As a result, the yz-direction and x-axis rotation direction adjustment processes shown in the flowchart of FIG. 8 are completed.

[0058] <x-direction and z-axis rotation direction adjustment process> FIG. 12 is a diagram for explaining an example of the x-direction and z-axis rotation direction adjustment process, and is a schematic diagram showing the positional relationship between the optical axis Op of the object detection sensor 5 provided in the hand part 4 and the detection target 93 when viewed along the z-direction from the z1 side in the z-direction toward the z2 side in the z-direction.

[0059] In the x-direction and z-axis rotation direction adjustment process, the hand unit 4 is moved to the x2 side in the x direction while performing detection by the object detection sensor 5. In this process, the height position (position in the z direction) of the hand unit 4 is set so that the detection target 93 can be detected when the hand unit 4 is moved in the x direction. Here, the hand unit 4 is disposed so that the optical axis Op of the object detection sensor 5 is located on the x1 side in the x direction with respect to the detection target 93. Then, the hand unit 4 is moved to the x2 side in the x direction until the object detection sensor 5 detects the detection target 93 and then the object detection sensor 5 no longer detects the detection target 93. In FIG. 12, the position of the optical axis Op at the start of detection of the detection target 93 is the optical axis Op1, and the position of the optical axis Op at the end of detection of the detection target 93 is the optical axis Op2. The positions (x coordinates) of the optical axes Op1 and Op2 in the x direction are recorded, and the deviation angle (Δθz) of the hand unit 4 in the z-axis rotation direction with respect to the detection target 93 is calculated based on the distance x' in the x direction between the optical axes Op1 and Op2. Here, the detection target 93 is a square with one side having a first distance L1 when viewed in the z direction, and if there is no deviation in the z-axis rotation direction, the distance x' becomes the first distance L1. In contrast, if there is a deviation angle Δθz in the z-axis rotation direction as shown in FIG. 12, the distance x' can be expressed as x'=L1sinΔθz+L1cosΔθz using the first distance L1 and the deviation angle Δθz, and Δθz can be calculated as shown in the following equation 7.

[0060] In the example shown in FIG. 12, the detection target 93 is inclined clockwise in the z-axis rotation direction. The inclination direction of the detection target 93 in the z-axis rotation direction can be determined, for example, by the following procedure. The hand unit 4 is rotated both clockwise and counterclockwise in the z-axis rotation direction from the position of the optical axis Op (optical axis Op1) at the start of detection of the detection target 93. When the hand unit 4 is rotated clockwise in the z-axis rotation direction, the optical axis Op of the object detection sensor 5 is no longer blocked by the detection target 93. Therefore, the detection of the detection target 93 by the object detection sensor 5 is turned off. On the other hand, when the hand unit 4 is rotated counterclockwise in the z-axis rotation direction, the optical axis Op of the object detection sensor 5 remains blocked by the detection target 93. Therefore, the detection of the detection target 93 by the object detection sensor 5 is turned on. The detection result (on or off) of the object detection sensor 5 makes it possible to determine the inclination direction of the detection target 93 in the z-axis rotation direction relative to the hand unit 4. Then, the determination result (the tilt direction of the detection target 93 in the z-axis rotation direction with respect to the hand unit 4) is recorded in the storage unit 62.

[0061]

number

[0062] The angle of the hand unit 4 in the z-axis rotation direction can be adjusted by the deviation angle Δθz in the z-axis rotation direction calculated from the first distance L1 and the distance x' as described above. Regarding the alignment of the hand unit 4 in the x-axis direction, the x-coordinate of the center position Cp of the detection target 93 is calculated based on the recorded optical axis Op1 and distance x', and the position of the hand unit 4 in the x-axis direction can be aligned based on this center position Cp. The center position Cp of the detection target 93 is located at a distance x' / 2 away from the optical axis Op1 on the x2 side in the x direction.

[0063] Next, the operation of this embodiment will be described.

[0064] According to this embodiment, the teaching work is automatically performed by the teaching process performed by the control device 6. In the teaching process, the steps that the operator must manually perform are very few and only simple. Therefore, the time required for the teaching work can be significantly reduced. In addition, since an object detection sensor provided on the hand of a general transport robot is used, there is no need to provide other equipment on the transport robot.

[0065] The transport robot A1 includes a vertical arm mechanism 1, a first rotating member 2, and a horizontal arm mechanism 3. An object detection sensor 5 is provided on a hand unit 4 supported by the horizontal arm mechanism 3. While moving the hand unit 4, a detection target 93 is detected by the object detection sensor 5, and the position of the hand unit 4 is taught by the control device 6 using the detection result. The detection target 93 has a first edge 931 located at an end on the y1 side in the y direction and the z1 side in the z direction, and a second edge 932 located at an end on the y2 side in the y direction and the z2 side in the z direction and separated from the first edge 931 by a first distance L1. The control device 6 adjusts the angle around the central axis Cx of the hand unit 4, the position of the hand unit 4 in the y direction, and the position of the hand unit 4 in the z direction based on the first distance L1 and the rotation angle until at least one of the first edge 931 and the second edge 932 is detected by rotating the hand unit 4 around the central axis Cx extending in the x direction. According to this configuration, the detection target 93 is detected while the hand unit 4 is moved appropriately within the yz plane, and the detection results can be used to efficiently adjust the hand unit 4 in the y direction, z direction, and x-axis rotation direction within the yz plane.

[0066] In the yz-direction and x-axis rotation direction adjustment process in the teaching process of this embodiment, the control device 6 first moves the hand part 4 to the z2 side in the z direction until the first edge 931 of the detection target 93 is detected, records it as the first position, and then rotates the hand part 4 around the central axis Cx and records the first rotation angle θ1 until the second edge 932 is detected. Next, the hand part 4 is moved by a second distance L2 from the first position to the y2 side in the y direction, and then the hand part 4 is rotated around the central axis Cx and the second rotation angle θ2 until the second edge 932 is detected is recorded. Then, based on the first distance L1, the second distance L2, the first rotation angle θ1, and the second rotation angle θ2, the angle around the central axis Cx of the hand part 4, the position of the hand part 4 in the y direction, and the position of the hand part 4 in the z direction are adjusted. In this way, by appropriately moving the hand part 4 in the yz plane while detecting the detection target 93 and using the detection result, the adjustment of the hand part 4 in the y direction, z direction, and x-axis rotation direction in the yz plane can be efficiently performed. Note that the operations of moving the hand part 4 in the z direction, moving it in the y direction, and rotating it around the central axis Cx in the yz plane are realized by the cooperation of the vertical arm mechanism 1 and the first rotating member 2.

[0067] In this embodiment, the detection target 93 has a rectangular parallelepiped shape. According to such a configuration, the configuration of the detection target 93 is simplified, and it is possible to appropriately detect the first edge 931 and the second edge 932 in the teaching process (yz-direction and x-axis rotation direction adjustment process).

[0068] <yz-direction and x-axis rotation direction adjustment process - Second example> FIG. 13 is a diagram for explaining a second example of the yz-direction and x-axis rotation direction adjustment process, and is a schematic diagram showing the positional relationship between the optical axis Op of the object detection sensor 5 provided on the hand part 4 and the detection target 93 when viewed along the x direction from the x1 side in the x direction to the x2 side in the x direction. FIG. 14 is a flowchart showing an example of the yz-direction and x-axis rotation direction adjustment process.

[0069] In the yz direction and x-axis rotation direction adjustment process of this example, first, the hand unit 4 is placed on the z1 side in the z direction with respect to the detection target 93 (step S21 in FIG. 14). Next, the hand unit 4 is moved to the z2 side in the z direction while performing detection by the object detection sensor 5. Here, the hand unit 4 is moved to the z2 side in the z direction until the first edge 931 of the detection target 93 is detected (see FIG. 13(a), step S22 in FIG. 14). At this time, the optical axis Op of the object detection sensor 5 is blocked by the first edge 931.

[0070] Next, it is determined whether the detection target 93 is inclined in the clockwise direction or counterclockwise direction of the x-axis rotation direction relative to the hand unit 4 (step S23 in FIG. 14). In the example shown in FIG. 13, the detection target 93 is inclined in the clockwise direction of the x-axis rotation direction relative to the hand unit 4. In determining the inclination direction of the detection target 93, the hand unit 4 is rotated around the central axis Cx while performing detection by the object detection sensor 5. Here, the inclination direction of the detection target 93 is determined by rotating the hand unit 4 both clockwise and counterclockwise from the state shown in FIG. 13(a). When the hand unit 4 is rotated in the clockwise direction (the direction in which the angle between the upper surface of the detection target 93 facing the z1 side in the z direction and the optical axis Op becomes smaller) from the state shown in FIG. 13(a), the optical axis Op of the object detection sensor 5 is once no longer blocked by the detection target 93, and then the optical axis Op is blocked by the second end edge 932 of the detection target 93. When the hand unit 4 is rotated clockwise from the state shown in FIG. 13(a), the detection of the detection target 93 by the object detection sensor 5 is switched from ON to OFF to ON in sequence. On the other hand, when the hand unit 4 is rotated counterclockwise from the state shown in FIG. 13(a), the optical axis Op of the object detection sensor 5 remains blocked by the detection target 93. Therefore, when the hand unit 4 is rotated counterclockwise from the state shown in FIG. 13(a), the detection of the detection target 93 by the object detection sensor 5 remains ON. The detection result (ON or OFF) by the object detection sensor 5 can determine the tilt direction of the detection target 93 in the x-axis rotation direction relative to the hand unit 4. Then, the determination result (the tilt direction of the detection target 93 in the x-axis rotation direction relative to the hand unit 4) is recorded in the storage unit 62. The tilt direction of the detection target 93 described above determines the rotation direction (either clockwise or counterclockwise) about the central axis Cx in the processing in Fig. 13(b) and subsequent steps described below, and the direction (either clockwise or counterclockwise) of the deviation angle Δθx about the central axis Cx described below. For the procedures in Fig. 13(b) and subsequent steps described below, a case will be described in which the detection target 93 is tilted clockwise with respect to the hand unit 4 as shown in Fig. 13.Conversely, when the detection target 93 is tilted counterclockwise relative to the hand unit 4, the processing is reversed from that shown in Figure 13, and the direction of rotation around the central axis Cx of the hand unit 4 (clockwise and counterclockwise) is also reversed.

[0071] Next, the hand unit 4 is moved a predetermined third distance L3 toward the z1 side in the z direction (see FIG. 13(b)). Here, the third distance L3 is a preset dimension. The position of the hand unit 4 at this time is recorded as the second position (step S24 in FIG. 14). Next, the hand unit 4 is rotated from the second position around the central axis Cx while performing detection by the object detection sensor 5 (see FIG. 13(c)). Here, the hand unit 4 is rotated around the central axis Cx until the first edge 931 of the detection target 93 is detected, and the rotation angle at this time is recorded in the memory unit 62 as the third rotation angle θ3 (step S25 in FIG. 14).

[0072] Next, while performing detection by the object detection sensor 5, the hand unit 4 is rotated from the second position around the central axis Cx (see FIG. 13(d)). Here, the hand unit 4 is rotated around the central axis Cx until the second edge 932 of the detection target 93 is detected, and the rotation angle at this time is recorded in the memory unit 62 as a fourth rotation angle θ4 (step S26 in FIG. 14).

[0073] Next, based on the first distance L1, the third distance L3, the third rotation angle θ3, and the fourth rotation angle θ4, the deviation amount in the yz directions of the hand unit 4 relative to the reference position Tx of the detection target 93 and the deviation angle in the x-axis rotation direction of the hand unit 4 relative to the detection target 93 are calculated. Fig. 15 is a diagram for explaining the procedure for calculating the deviation amount in the y direction (Δy), the deviation amount in the z direction (Δz), and the deviation angle in the x-axis rotation direction (Δθx). The reference position Tx of the detection target 93 is the upper surface of the detection target 93, and is the center position between the first edge 931 and the second edge 932.

[0074] Figure 15(a) shows the detection target 93, the central axis Cx of the hand unit 4 shown with reference to Figure 13, the first distance L1 (the distance from the first edge 931 to the second edge 932), the third distance L3, the third rotation angle θ3, and the fourth rotation angle θ4, and further includes auxiliary lines and dimension lines as appropriate.

[0075] 15(b), the relationship of the following formula 8 holds. Also, the relationship of the following formula 9 holds for the third rotation angle θ3, the fourth rotation angle θ4, and the angle θ21.

[0076]

number

[0077]

number

[0078] Next, regarding the angle θ21 and the distance L21, and the angle θ22 and the first distance L1 shown in FIG. 15(b), the relationship of the following formula 10 holds based on the sine theorem.

[0079]

number

[0080] Moreover, angles θ23 and θ24 can be expressed as the following equation 11 using angles θ21 and θ22. Moreover, for the deviation angle Δθx in the x-axis rotation direction, the relationship of equation 11 holds between angle θ23 and the third rotation angle θ3.

[0081]

number

[0082] The deviation angle Δθx in the x-axis rotation direction can be expressed as the following equation 12 using equations 9 to 11.

[0083]

number

[0084] Next, the distance L22 shown in FIG. 15(c) is expressed as the following equation 13 from the distance L21 and the third rotation angle θ3.

[0085]

number

[0086] 15(c), the position coordinates (y coordinate, z coordinate) of the central axis Cx are (Y1, Z1), the position coordinates of the first edge 931 are (Y2, Z2), and the position coordinates of the reference position Tx are (Y3, Z3). In this example, the deviation amount Δy in the y direction and the deviation amount Δz in the z direction of the hand unit 4 relative to the reference position Tx of the detection target 93 can be calculated by taking the differences between the y coordinate and the z coordinate of the central axis Cx of the hand unit 4 and the reference position Tx of the detection target 93. That is, the deviation amount in the y direction is calculated as Δy=Y3-Y1, and the deviation amount in the z direction is calculated as Δz=Z3-Z1.

[0087] Here, the relationship between the position coordinates (Y1, Z1) of the central axis Cx and the position coordinates (Y2, Z2) of the first edge 931 is expressed by the following equation 14, and the relationship between the position coordinates (Y2, Z2) of the first edge 931 and the position coordinates (Y3, Z3) of the reference position Tx is expressed by the following equation 15.

[0088]

number

[0089]

number

[0090] Next, the amount of deviation Δy in the y direction can be calculated as shown in the following equation 16 using the above equations 14, 15, and 13.

[0091]

number

[0092] Moreover, the deviation amount Δz in the z direction can be calculated from the above-mentioned equations 14 and 15 as shown in the following equation 17.

[0093]

number

[0094] Then, as described above, the angle of the hand unit 4 about the central axis Cx extending in the x direction (x-axis rotation direction), the position of the hand unit 4 in the y direction (second direction), and the position of the hand unit 4 in the z direction (third direction) (yz direction) are adjusted based on the deviation angle Δθx in the x-axis rotation direction, the deviation amount Δy in the y direction, and the deviation amount Δz in the z direction calculated from the first distance L1, the third distance L3, the third rotation angle θ3, and the fourth rotation angle θ4 (step S27 in FIG. 14). This completes the yz direction and x-axis rotation direction adjustment process shown in the flowchart in FIG. 14.

[0095] In the yz direction and x axis rotation direction adjustment process in the teaching process of this example, the control device 6 first moves the hand unit 4 to the z2 side in the z direction until the first edge 931 of the detection target 93 is detected, and then moves the hand unit 4 to the z1 side in the z direction by a third distance L3 and records the position as the second position. Next, the hand unit 4 is rotated around the central axis Cx to record a third rotation angle θ3 until the first edge 931 is detected. Next, the hand unit 4 is rotated from the second position around the central axis Cx to record a fourth rotation angle θ4 until the second edge 932 is detected. Then, the angle around the central axis Cx of the hand unit 4, the position in the y direction of the hand unit 4, and the position in the z direction of the hand unit 4 are adjusted from the first distance L1, the third distance L3, the third rotation angle θ3, and the fourth rotation angle θ4. In this way, the detection target 93 is detected while the hand unit 4 is moved appropriately within the yz plane, and the detection results can be used to efficiently adjust the y direction, z direction, and x-axis rotation direction of the hand unit 4 within the yz plane.

[0096] The teaching system for a transport robot and the teaching method for a transport robot according to the present disclosure are not limited to the above-mentioned embodiment. The specific configuration of the teaching system for a transport robot and the teaching method for a transport robot according to the present disclosure can be freely designed in various ways. In the above-mentioned embodiment, the teaching work was performed using the detection target 93 arranged on the cassette 8 side, but the present disclosure is not limited to this, and for example, the teaching work may be performed using the detection target 93 arranged on the load lock chamber side. [Explanation of symbols]

[0097] A1: transport robot, 1: vertical arm mechanism, 2: first rotating member, 3: horizontal arm mechanism, 4, 4A, 4B: hand unit, 5: object detection sensor, 6: control device, 93: detection target, 931: first edge, 932: second edge, Ox: first rotation axis, Cx: central axis, L1: first distance, L2: second distance, L3: third distance, θ1: first rotation angle, θ2: second rotation angle, θ3: third rotation angle, θ4: fourth rotation angle

Claims

1. a vertical articulated vertical arm mechanism that moves along an in-plane direction perpendicular to a horizontal first direction; a first rotation member supported rotatably about a first rotation axis extending in the first direction relative to the vertical arm mechanism; a horizontal multi-joint type horizontal arm mechanism supported by the first rotating member; a hand unit supported by the horizontal arm mechanism and provided with an object detection sensor; a control device that detects a detection target by the object detection sensor while moving the hand unit and teaches a position of the hand unit using the detection result, the detection target has a first edge located at an end on one side in a horizontal second direction perpendicular to the first direction and at one side in a third direction perpendicular to the first direction and the second direction, and a second edge located at the other side in the second direction and at an end on one side in the third direction, the second edge being a first distance away from the first edge; The control device adjusts the angle of the hand unit about the central axis, the position of the hand unit in the second direction, and the position of the hand unit in the third direction based on at least the first distance and a rotation angle by rotating the hand unit about a central axis extending in the first direction until at least one of the first edge and the second edge is detected.

2. the control device moves the hand unit to the other side in the third direction until the first edge is detected and records the detected position as a first position; rotating the hand unit from the first position about the central axis and recording a first rotation angle until the second edge is detected; moving the hand unit a second distance from the first position to the other side in the second direction; rotating the hand unit about the central axis and recording a second rotation angle until the second edge is detected; 2. The teaching system for a transport robot according to claim 1, further comprising: adjusting an angle of the hand unit about the central axis, a position of the hand unit in the second direction, and a position of the hand unit in the third direction from the first distance, the second distance, the first rotation angle, and the second rotation angle.

3. the control device moves the hand unit in the other direction of the third direction until the first edge is detected, The hand unit is moved a third distance to one side in the third direction and recorded as a second position; rotating the hand unit from the second position about the central axis until the first edge is detected, and recording a third rotation angle; rotating the hand unit from the second position around the central axis until the second edge is detected, and recording a fourth rotation angle; 2. The teaching system for a transport robot according to claim 1, wherein an angle of the hand unit about the central axis, a position of the hand unit in the second direction, and a position of the hand unit in the third direction are adjusted from the first distance, the third distance, the third rotation angle, and the fourth rotation angle.

4. 4. The teaching system for a transfer robot according to claim 1, wherein the detection target has a rectangular parallelepiped shape.

5. a vertical articulated vertical arm mechanism that moves along an in-plane direction perpendicular to a horizontal first direction; a first rotation member supported rotatably about a first rotation axis extending in the first direction relative to the vertical arm mechanism; a horizontal multi-joint type horizontal arm mechanism supported by the first rotating member; a hand unit supported by the horizontal arm mechanism and provided with an object detection sensor, the method detecting a detection target with the object detection sensor while moving the hand unit, and teaching a position of the hand unit using the detection result, comprising: the detection target has a first edge located at an end on one side in a horizontal second direction perpendicular to the first direction and at one side in a third direction perpendicular to the first direction and the second direction, and a second edge located at the other side in the second direction and at an end on one side in the third direction, the second edge being a first distance away from the first edge; moving the hand unit in the third direction to the other side until the first edge is detected and recording the position as a first position; rotating the hand unit from the first position about a central axis extending in the first direction and recording a first rotation angle until the second edge is detected; moving the hand unit a second distance from the first position to the other side in the second direction; rotating the hand unit about the central axis and recording a second rotation angle until the second edge is detected; and adjusting an angle of the hand unit about the central axis, a position of the hand unit in the second direction, and a position of the hand unit in the third direction from the first distance, the second distance, the first rotation angle, and the second rotation angle.

6. a vertical articulated vertical arm mechanism that moves along an in-plane direction perpendicular to a horizontal first direction; a first rotation member supported rotatably about a first rotation axis extending in the first direction relative to the vertical arm mechanism; a horizontal multi-joint type horizontal arm mechanism supported by the first rotating member; a hand unit supported by the horizontal arm mechanism and provided with an object detection sensor, the method detecting a detection target with the object detection sensor while moving the hand unit, and teaching a position of the hand unit using the detection result, comprising: the detection target has a first edge located at an end on one side in a horizontal second direction perpendicular to the first direction and at one side in a third direction perpendicular to the first direction and the second direction, and a second edge located at the other side in the second direction and at an end on one side in the third direction, the second edge being a first distance away from the first edge; moving the hand unit to the other side in the third direction until the first edge is detected; moving the hand unit a third distance to one side in the third direction and recording the third position as a second position; rotating the hand unit from the second position about a central axis extending in the first direction and recording a third rotation angle until the first edge is detected; rotating the hand unit from the second position about the central axis and recording a fourth rotation angle until the second edge is detected; and adjusting the angle of the hand unit about the central axis, the position of the hand unit in the second direction, and the position of the hand unit in the third direction from the first distance, the third distance, the third rotation angle, and the fourth rotation angle.

Images