Information processing system and information processing method

Abstract

To provide a novel information processing system that is excellent in convenience, usefulness, or reliability.SOLUTION: An information processing system includes three information processing devices. A first information processing device receives an instruction sentence, generates a processing result, and transmits a result including an intermediate code. A second information processing device receives document, the processing result, and model data and generates and transmits an instruction sentence. The instruction sentence includes commands regarding analysis of the document, extraction of a process, and conversion into the intermediate code. The second information processing device extracts the intermediate code from the processing result and transmits the intermediate code. The third information processing device receives the intermediate code, reproduces the process on the basis of the intermediate code in a simulating manner, and generates and transmits the model data.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] One aspect of the present invention relates to an information processing system and an information processing method.

[0002] Note that one embodiment of the present invention is not limited to the above technical field. The technical field of one embodiment of the invention disclosed in this specification relates to an object, a method, or a manufacturing method. Alternatively, one embodiment of the present invention relates to a process, a machine, a manufacture, or a composition of matter. Therefore, more specifically, examples of the technical field of one embodiment of the present invention disclosed in this specification include a semiconductor device, a display device, a light-emitting device, a power storage device, a memory device, a driving method thereof, or a manufacturing method thereof. [Background technology]

[0003] In recent years, the development of language models using neural networks has been actively carried out, and large-scale language models (LLMs) in particular have attracted attention. A large-scale language model is a natural language processing model trained using a large amount of data. The large-scale language model can realize a dialogue model that responds to user instructions, for example. Non-Patent Document 1 discloses GPT-4 (Generative Pre-trained Transformer 4) as a large-scale language model, and ChatGPT as a dialogue model.

[0004] The capabilities of natural language processing models have increased dramatically through the use of large-scale language models. However, due to the size of language models, it is difficult to incorporate and operate language models on one's own in terms of equipment and costs. Therefore, one way of using language models is to use external services that provide language models. [Prior art documents] [Non-patent literature]

[0005] [Non-Patent Document 1] Summary of ChatGPT / GPT-4 Research and Perspective Towards the Future of Large Language Models, Yiheng Liu et al. (Submitted on 4 Apr 2023, [online], Internet<URL:https: / / arxiv.org / abs / 2304.01852> Summary of the Invention [Problem to be solved by the invention]

[0006] An object of one embodiment of the present invention is to provide a novel information processing system with excellent convenience, usefulness, or reliability.An object of one embodiment of the present invention is to provide a novel information processing method with excellent convenience, usefulness, or reliability.Another object of the present invention is to provide a novel information processing system, a novel information processing method, or a novel semiconductor device.

[0007] Note that the description of these problems does not preclude the existence of other problems. Note that one embodiment of the present invention does not necessarily solve all of these problems. Note that problems other than these will become apparent from the description of the specification, drawings, claims, etc., and it is possible to extract problems other than these from the description of the specification, drawings, claims, etc. [Means for solving the problem]

[0008] (1) One aspect of the present invention is an information processing system including a first information processing device, a second information processing device, and a third information processing device.

[0009] The first information processing device has a function of receiving a directive, the first information processing device has a function of generating a processing result according to the directive, the processing result including an intermediate code, and the first information processing device has a function of transmitting the processing result to the second information processing device.

[0010] The second information processing device has a function of receiving a document, a processing result, and model data, and the document includes information related to a processing step. The second information processing device also has a function of generating an instruction sentence, and the second information processing device has a function of transmitting the instruction sentence to the first information processing device. The instruction sentence includes a conversion rule and a document, and the instruction sentence includes an instruction to analyze the document and extract a processing step, and an instruction to convert the processing step into an intermediate code according to the conversion rule.

[0011] In addition, the second information processing device has a function of extracting intermediate code from the processing result, the second information processing device has a function of transmitting the intermediate code to the third information processing device, and the second information processing device has a function of transmitting model data to the information terminal.

[0012] The third information processing device has a function of receiving the intermediate code, the third information processing device has a function of simulating a processing process based on the intermediate code and generating model data, and the third information processing device has a function of transmitting the model data to the second information processing device.

[0013] This makes it possible to extract processing steps by analyzing documents written in natural language. It is also possible to convert the processing steps extracted from the documents into intermediate code. It is also possible to simulate the processing steps extracted from the documents. It is also possible to generate model data by simulating the processing steps extracted from the documents. It is also possible to use natural language to operate a design tool designed for users with advanced specialized knowledge. As a result, it is possible to provide a novel information processing system that is highly convenient, useful, and reliable.

[0014] (2) Another aspect of the present invention is an information processing system including a first information processing device, a second information processing device, and a third information processing device.

[0015] The first information processing device has a function of receiving a directive, the first information processing device has a function of generating a processing result according to the directive, the processing result including an intermediate code, and the first information processing device has a function of transmitting the processing result to the second information processing device.

[0016] The second information processing device has a function of receiving a document, a processing result, and model data, and the document includes information related to a processing step. The second information processing device also has a function of generating an instruction sentence, and the second information processing device has a function of transmitting the instruction sentence to the first information processing device. The instruction sentence includes a conversion rule and a document, and the instruction sentence includes an instruction to analyze the document and extract a processing step, and an instruction to convert the processing step into an intermediate code according to the conversion rule.

[0017] The second information processing device also has a function of extracting an intermediate code from the processing result, a function of generating a script file and a setting file based on the intermediate code, a function of transmitting the script file and the setting file to the third information processing device, and a function of transmitting model data to the information terminal.

[0018] The third information processing device has a function of receiving a script file and a setting file, the third information processing device has a function of simulating a processing process based on the script file and the setting file and generating model data, and the third information processing device has a function of transmitting the model data to the second information processing device.

[0019] This makes it possible to analyze a document written in a natural language and extract processing steps. Also, the processing steps extracted from the document can be converted into intermediate code. Also, script files and setting files in various formats can be generated based on the intermediate code. Also, script files and setting files in a predetermined format can be generated in accordance with a design tool operated by the third information processing device. Also, the processing steps extracted from the document can be simulated. Also, the processing steps extracted from the document can be simulated to generate model data. Also, a design tool designed for users with advanced specialized knowledge can be operated using natural language. As a result, a novel information processing system excellent in convenience, usefulness, and reliability can be provided.

[0020] (3) Moreover, one aspect of the present invention is the information processing system described above, wherein the second information processing device includes a database.

[0021] The database stores the recipe, and the second information processing device has a function of verifying the intermediate code by using the recipe.

[0022] This makes it possible to verify intermediate code generated from a document written in natural language and to point out errors. In addition, design tools designed for users with advanced specialized knowledge can be operated using natural language. As a result, a novel information processing system that is highly convenient, useful, and reliable can be provided.

[0023] (4) Another aspect of the present invention is an information processing method including the following first to sixteenth steps.

[0024] In a first step, the information terminal accepts a document and transmits it to a first information processing device. The document includes information related to a processing step. In a second step, the first information processing device receives the document and stores it.

[0025] In a third step, the first information processing device generates an instruction statement and transmits it to the second information processing device. The instruction statement includes a conversion rule and a document, and the instruction statement includes an instruction to analyze the document and extract a processing step, and an instruction to convert the processing step into an intermediate code according to the conversion rule. In a fourth step, the second information processing device receives and stores the instruction statement.

[0026] In a fifth step, the second information processing device generates a processing result according to the instruction text and transmits the processing result to the first information processing device. The processing result includes the intermediate code. In a sixth step, the first information processing device receives and stores the processing result.

[0027] In the seventh step, the first information processing device extracts an intermediate code from the processing result and verifies it using the recipe. If no error is found in the intermediate code in the eighth step, the process proceeds to the ninth step, and if an error is found in the intermediate code, the process proceeds to the sixteenth step.

[0028] In a ninth step, the first information processing device transmits the intermediate code to the third information processing device, and in a tenth step, the third information processing device receives and stores the intermediate code.

[0029] In an eleventh step, the third information processing device simulates the machining process based on the intermediate code to generate model data.

[0030] In a twelfth step, the third information processing device transmits the model data to the first information processing device, and in a thirteenth step, the first information processing device receives and stores the model data.

[0031] In a fourteenth step, the first information processing device transmits the model data to the information terminal, and in a fifteenth step, the information terminal receives and displays the model data.

[0032] In the sixteenth step, the first information processing device notifies the information terminal of the occurrence of the error.

[0033] This allows design tools designed for users with advanced expertise to be operated using natural language, providing a novel information processing method that is highly convenient, useful, and reliable.

[0034] In the drawings accompanying this specification, components are classified by function and shown in block diagrams as independent blocks; however, in actuality, it is difficult to completely separate components by function, and one component may be involved in multiple functions. Effect of the Invention

[0035] According to one aspect of the present invention, a novel information processing system having excellent convenience, usefulness, or reliability can be provided. Also, one aspect of the present invention can provide a novel information processing method having excellent convenience, usefulness, or reliability. Also, a novel information processing system can be provided. Also, a novel information processing method can be provided.

[0036] Note that the description of these effects does not preclude the existence of other effects. Note that one embodiment of the present invention does not necessarily have all of these effects. Note that effects other than these will become apparent from the description in the specification, drawings, claims, etc., and it is possible to extract effects other than these from the description in the specification, drawings, claims, etc. [Brief description of the drawings]

[0037] [Figure 1] FIG. 1 is a diagram illustrating a configuration of an information processing system according to an embodiment. [Diagram 2] FIG. 2 is a diagram illustrating a structure of a document according to an embodiment. [Diagram 3] FIG. 3 is a diagram illustrating the configuration of a directive and a processing result according to the embodiment. [Figure 4] FIG. 4 is a diagram illustrating the structure of a laminated film that can be produced by applying the processing steps according to the embodiment. [Diagram 5] 5(A) to 5(F) are diagrams for explaining a model generated by the information processing system according to the embodiment. [Figure 6] 6A to 6E are diagrams illustrating a model generated by the information processing system according to the embodiment. [Figure 7] FIG. 7 is a diagram illustrating a configuration of an information processing system according to an embodiment. [Figure 8] FIG. 8 is a diagram illustrating a configuration of an information processing device according to an embodiment. [Figure 9] FIG. 9 is a diagram illustrating an information processing method according to an embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0038] An information processing system according to an embodiment of the present invention includes a first information processing device, a second information processing device, and a third information processing device. The first information processing device has a function of receiving an instruction sentence, and the first information processing device has a function of generating a processing result according to the instruction sentence. The processing result includes intermediate code. The first information processing device also has a function of transmitting the processing result. The second information processing device has a function of receiving a document, the processing result, and model data. The document includes information related to a processing step. The second information processing device also has a function of generating an instruction sentence, and the second information processing device has a function of transmitting the instruction sentence. The instruction sentence includes a conversion rule and a document, and the instruction sentence includes an instruction to analyze the document and extract a processing step, and an instruction to convert the processing step into an intermediate code according to the conversion rule. The second information processing device also has a function of extracting an intermediate code from the processing result, the second information processing device has a function of transmitting the intermediate code, and the second information processing device has a function of transmitting the model data. The third information processing device has a function of receiving the intermediate code, the third information processing device has a function of simulating a processing process based on the intermediate code and generating model data, and the third information processing device has a function of transmitting the model data.

[0039] As a result, it is possible to provide a novel information processing system that is highly convenient, useful, and reliable.

[0040] The embodiments will be described in detail with reference to the drawings. However, the present invention is not limited to the following description, and it is easily understood by those skilled in the art that the form and details of the present invention can be modified in various ways without departing from the spirit and scope of the present invention. Therefore, the present invention is not interpreted as being limited to the description of the embodiments shown below. In the configuration of the invention described below, the same reference numerals are used in common between different drawings for the same parts or parts having similar functions, and repeated explanations are omitted.

[0041] (Embodiment 1) In this embodiment, an information processing system of one embodiment of the present invention will be described with reference to FIGS.

[0042] FIG. 1 is a diagram illustrating a configuration of an information processing system according to an embodiment of the present invention.

[0043] FIG. 2 is a diagram illustrating the structure of a document that can be handled by the information processing system according to one embodiment of the present invention.

[0044] FIG. 3 is a diagram illustrating the configuration of instructions and processing results transmitted and received within an information processing system according to an embodiment of the present invention.

[0045] FIG. 4 is a perspective view illustrating a structure of a laminated film that can be manufactured by applying a processing step that is simulated to an information processing system according to one embodiment of the present invention.

[0046] 5A to 5F are cross-sectional views illustrating a model that can be generated by the information processing system of one embodiment of the present invention.

[0047] 6A to 6E are cross-sectional views illustrating a model that can be generated by the information processing system of one embodiment of the present invention.

[0048] FIG. 7 is a diagram illustrating a configuration of an information processing system according to an embodiment of the present invention.

[0049] FIG. 8 is a block diagram illustrating a configuration of an information processing device that can be used in the information processing system of one embodiment of the present invention.

[0050] <Information processing system configuration example 1> The information processing system according to an embodiment of the present invention described in this embodiment has an information processing device 10, an information processing device 20, and an information processing device 21 (see FIG. 1). One or two information processing devices can have the functions of the information processing device 10, the functions of the information processing device 20, and the functions of the information processing device 21. Alternatively, four or more information processing devices can have the functions of the information processing device 10, the functions of the information processing device 20, and the functions of the information processing device 21. Reducing the number of information processing devices constituting the information processing system may reduce the initial cost. In addition, increasing the number of information processing devices constituting the information processing system may enable information to be distributed and processed. In other words, the information processing system according to an embodiment of the present invention has a first functional module, a second functional module, and a third functional module, and in this embodiment, a case will be described in which the information processing device 10 has the first functional module, the information processing device 20 has the second functional module, and the information processing device 21 has the third functional module.

[0051] Configuration example 1 of information processing device 10 The information processing device 10 has a function of receiving a directive PT. The information processing device 10 also has a function of generating a processing result RES according to the directive PT. The processing result RES includes intermediate code IntC (see FIG. 3). Data in which items and values ​​corresponding to the items are stored can be used for the intermediate code IntC. Any data format can be used as long as it is a format in which keys and values ​​can be stored. For example, data written in JavaScript Object Notation (abbreviated as JSON) format can be used for the intermediate code IntC.

[0052] The information processing device 10 also has a function of transmitting the processing result RES to the information processing device 20 via a network 50, for example (see FIG. 1).

[0053] Configuration example 1 of information processing device 20 The information processing device 20 has a function of receiving the document DOC, the processing result RES, and the model data MdD (see FIG. 1).

[0054] [Example of document DOC] The document DOC includes information related to the processing steps Prc (see FIG. 2). For example, expressions using natural language can be used for the information related to the processing steps Prc. Specifically, information related to processing steps related to the manufacture of semiconductor devices, memory devices, display devices, or secondary batteries can be used. For example, expressions explaining the contents of processing, such as "Material X is deposited to a thickness of Y nm," "Pattern using mask X," "Pattern with negative resist using mask X," "Material X is etched to a depth of Y nm," "All material X is etched," or "Remove the resist," can be used for the information related to the processing steps Prc. In addition, expressions explaining the order of processing can be added to the processing steps Prc. Note that a user of the information processing system according to one embodiment of the present invention can transmit the document DOC to the information processing device 20, for example, from the information terminal 30 via the network 50.

[0055] For example, the following sentence can be used in a document DOC: "Deposit SiOx to a thickness of 10 nm. Deposit ITSO to a thickness of 25 nm. Deposit W to a thickness of 20 nm. Pattern with a negative resist using an ISLAND mask. Etch W to a depth of 25 nm. Remove the resist. Then deposit SPACER to a thickness of 20 nm. Deposit IGZO to a thickness of 10 nm. Pattern with an ISLAND mask. Etch all of the IGZO. Remove the resist."

[0056] The document DOC includes 11 sentences, each of which corresponds to one processing step. In other words, the document DOC includes information related to the processing step Prc, which is made up of 11 processing steps. By applying the processing steps, for example, a laminated film shown in FIG. 4 can be produced.

[0057] In addition, SiOx represents, for example, a layer containing silicon oxide, ITSO represents, for example, a layer containing an oxide containing indium-tin-silicon, W represents, for example, a layer containing tungsten, SPACER represents, for example, a layer for providing a space between layers, IGZO represents, for example, a layer containing an oxide containing indium-gallium-zinc, and ISLAND represents, for example, a mask for irradiating light in an island pattern.

[0058] [Example of instruction PT] The information processing device 20 has a function of generating a command text PT. The information processing device 20 also has a function of transmitting the command text PT. For example, the command text PT can be transmitted to the information processing device 10 via a network 50 (see FIG. 1).

[0059] The instruction text PT includes a conversion rule CnvR and a document DOC (see FIG. 3). The information processing device 20 may have a function of proofreading the document DOC. For example, if the document DOC includes a typographical error or omission, the information processing device 20 can correct the typographical error or omission.

[0060] For example, a rule for converting a processing step expressed in natural language, such as “Deposit a film of material X to a thickness of Y nm,” into an intermediate code, such as “{”kind”: ”depo”, ”property”: {”material”: X, ”thickness”: Y, ”mode”: ”Conformal”}},” can be used in the conversion rule CnvR.

[0061] In addition, for example, a rule for converting a processing step expressed in natural language, such as “Pattern using mask X,” into an intermediate code, such as “{”kind”: ”litho”, ”property”: {”mask”: X, ”reverse”: false}},” can be used in the conversion rule CnvR.

[0062] In addition, for example, a rule for converting a processing step expressed in natural language, such as "Pattern with negative resist using mask X," into an intermediate code, such as "{"kind": "litho", "property": {"mask": X, "reverse": true}}," can be used in the conversion rule CnvR.

[0063] In addition, for example, a rule for converting a processing step expressed in natural language, such as “etch material X by Y nm,” into an intermediate code, such as “{”kind”: ”etch_rect”, ”property”: {”material”: X, ”height”: Y, ”mode”: ”Max”, ”angle”: 90}},” can be used in the conversion rule CnvR.

[0064] In addition, for example, a rule for converting a processing step expressed in natural language, such as “Etch all of material X,” into an intermediate code, such as “{”kind”: ”etch_rect”, ”property”: {”material”: X, ”height”: 0, ”mode”: ”All”, ”angle”: 90}},” can be used in the conversion rule CnvR.

[0065] Also, for example, a rule for converting a processing step expressed in natural language, "Remove the resist," into an intermediate code, "{"kind": "strip", "property": {}}," can be used in the conversion rule CnvR.

[0066] The directive PT includes a command to analyze the document DOC and extract the processing steps Prc, and a command to convert the processing steps Prc into intermediate code IntC according to the conversion rule CnvR. Note that Cnv(Ana()) shown in Fig. 3 represents a command to convert the processing steps obtained by analyzing a specified document into intermediate code.

[0067] You can also specify the output format of the processing results in the directive. Specifically, you can specify JSON format as the output format and give keys as item names.

[0068] Specifically, the following directives can be used in the directive PT:

[0069] The conversion rules for converting one sentence into one intermediate code are as follows. Note that the characters X and Y are filled with values ​​according to the original document. Rule 1: Deposit material X to a thickness of Y nm. ->{”kind”: ”depo”, ”property”: {”material”: X, ”thickness”: Y, ”mode”: ”Conformal”}}. Rule 2: Pattern using mask X. ->{"kind": "litho", "property": {"mask": X, "reverse": false}}. Rule 3: Pattern with negative resist using mask X. ->{”kind”: ”litho”, ”property”: {”mask”: X, ”reverse”: true}}. Rule 4: Etch material X by Y nm. ->{"kind": "etch_rect", "property": {"material": X, "height": Y, "mode": "Max", "angle": 90}}. Rule 5: Etch all of material X. ->{"kind": "etch_rect", "property": {"material": X, "height": 0, "mode": "All", "angle": 90}}. Rule 6: Strip the resist. -> {”kind”: ”strip”, ”property”: {}}. Analyze the following "input document" and write the input document in JSON format to the intermediate code column according to the conversion rules above. Input document: "Document DOC".

[0070] In addition, the instruction PT above states, "Analyze the following 'input document' and write the input document in JSON format into a column of intermediate code according to the above conversion rules." includes an instruction to analyze the document DOC and extract the processing steps Prc, and an instruction to convert the processing steps Prc into intermediate code IntC according to the conversion rules CnvR. Also, the "input document" in the instruction PT above is a heading, and the text written in the document DOC is written into the "document DOC" following the heading.

[0071] Configuration example 2 of information processing device 20 The information processing device 20 has a function of extracting the intermediate code IntC from the processing result RES. The information processing device 20 also has a function of transmitting the intermediate code IntC. For example, the intermediate code IntC can be transmitted to the information processing device 21 via a network 51 (see FIG. 1).

[0072] The information processing device 20 also has a function of transmitting the model data MdD. For example, the model data MdD can be transmitted to the information terminal 30 via a network 51 (see FIG. 1).

[0073] Configuration example 1 of information processing device 21 The information processing device 21 has a function of receiving the intermediate code IntC (see FIG. 1).

[0074] The information processing device 21 has a function of simulating the machining process Prc based on the intermediate code IntC and generating model data MdD.

[0075] The model data MdD is data expressing a model obtained by simulating the processing step Prc. For example, the information processing device 21 can simulate the processing step of stacking a film on an XY plane and generate a model of a laminated film obtained through the processing step. The information processing device 21 can also cut the model of the laminated film formed simulated on the XY plane with an XZ plane intersecting the XY plane to generate data related to the cross section. For example, the model of the laminated film can be generated using an XYZ coordinate system or the like.

[0076] [Example of intermediate code IntC] Specifically, the information processing device 21 can generate a model of a laminated film according to the following intermediate code IntC. Note that the following intermediate code corresponds to the processing steps Prc consisting of 11 processing steps included in the above document DOC.

[0077] " [ {”kind”: “depo”, “property”: {”material”: “SiOx”, “thickness”: 10, “mode”: “Conformal”}}, {”kind”: “depo”, “property”: {”material”: “ITSO”, “thickness”: 25, “mode”: “Conformal”}}, {”kind”: “depo”, “property”: {”material”: “W”, “thickness”: 20, “mode”: “Conformal”}}, {”kind”: “litho”, “property”: {”mask”: “ISLAND”, “reverse”: true}}, {”kind”: “etch_rect”, “property”: {”material”: “W”, “height”: 25, “mode”: “Max”, “angle”: 90}}, {”kind”: “strip”, “property”: {}}, {”kind”: “depo”, “property”: {”material”: “SPACER”, “thickness”: 20, “mode”: “Conformal”}}, {”kind”: “depo”, “property”: {”material”: “IGZO”, “thickness”: 10, “mode”: “Conformal”}}, {”kind”: “litho”, “property”: {”mask”: “ISLAND”, “reverse”: false}}, {”kind”: “etch_rect”, “property”: {”material”: “IGZO”, “height”: 0, “mode”: “All”, “angle”: 90}}, {”kind”: “strip”, “property”: {}} ]".

[0078] The "{"kind": "depo", "property": {"material": "SiOx", "thickness": 10, "mode": "Conformal"}}" in the above intermediate code IntC corresponds to the process of "forming a SiOx film with a thickness of 10 nm." The information processing device 21 can generate a model having a cross section shown in FIG. 5(A), for example, by simulating the process. The generated model has a layer SiOx. The position of the model in the X-axis direction is shown horizontally in the drawing, and the thickness of the model in the Z-axis direction is shown vertically in the drawing.

[0079] The "{"kind": "depo", "property": {"material": "ITSO", "thickness": 25, "mode": "Conformal"}}" in the intermediate code IntC corresponds to the process of "forming ITSO to a thickness of 25 nm." The information processing device 21 can generate a model having a cross section shown in FIG. 5B, for example, by simulating the process. The generated model includes a layer SiOx and a layer ITSO.

[0080] The "{"kind": "depo", "property": {"material": "W", "thickness": 20, "mode": "Conformal"}}" in the intermediate code IntC corresponds to the process of "forming a film of W to a thickness of 20 nm." The information processing device 21 can generate a model having a cross section shown in FIG. 5(C), for example, by simulating the process. The generated model includes a layer SiOx, a layer ITSO, and a layer W.

[0081] The "{"kind": "litho", "property": {"mask": "ISLAND", "reverse": true}}" in the intermediate code IntC corresponds to the process of "patterning with a negative resist using a mask of ISLAND." The information processing device 21 can generate a model having a cross section shown in FIG. 5(D) by simulating the process. The generated model includes a layer SiOx, a layer ITSO, a layer W, and a resist RES_IM_N. In addition, a region having thickness and a region having no thickness are formed in the X-axis direction of the resist RES_IM_N. Information regarding the thickness of the resist is recorded in the mask, and the thickness of a predetermined region of the resist can be controlled using the mask. In addition, the information recorded in the mask can be reversed by specifying ""reverse": true" or ""reverse": false" in the intermediate code IntC. Specifically, it is possible to specify whether the resist thickness should be a specified thickness at a specified position and zero at other positions, or whether the resist thickness should be zero at the specified position and a specified thickness at other positions.

[0082] The "{"kind": "etch_rect", "property": {"material": "W", "height": 25, "mode": "Max", "angle": 90}}" in the intermediate code IntC corresponds to the process of "etching W to a depth of 25 nm." The information processing device 21 can generate a model having a cross section shown in FIG. 5(E), for example, by simulating the process.

[0083] The "{"kind": "strip", "property": {}}" in the above intermediate code IntC corresponds to the process of "removing the resist." Note that the information processing device 21 can generate a model having a cross section shown in FIG. 5(F), for example, by simulating and reproducing the process.

[0084] The "{"kind": "depo", "property": {"material": "SPACER", "thickness": 20, "mode": "Conformal"}}" in the intermediate code IntC corresponds to the process of "forming a film of SPACER with a thickness of 20 nm." The information processing device 21 can generate a model having a cross section shown in FIG. 6(A), for example, by simulating the process. The generated model includes a layer SiOx, a layer ITSO, a layer W, and a layer SPACER.

[0085] The "{"kind": "depo", "property": {"material": "IGZO", "thickness": 10, "mode": "Conformal"}}" in the intermediate code IntC corresponds to the process of "forming an IGZO film to a thickness of 10 nm." The information processing device 21 can generate a model having a cross section shown in FIG. 6B, for example, by simulating the process. The generated model includes a layer SiOx, a layer ITSO, a layer W, a layer SPACER, and a layer IGZO.

[0086] The "{"kind": "litho", "property": {"mask": "ISLAND", "reverse": false}}" in the intermediate code IntC corresponds to the process of "patterning using the mask of ISLAND." The information processing device 21 can generate a model having a cross section shown in FIG. 6C, for example, by simulating the process. The generated model includes a layer SiOx, a layer ITSO, a layer W, a layer SPACER, a layer IGZO, and a resist RES_IM_P.

[0087] The "{"kind": "etch_rect", "property": {"material": "IGZO", "height": 0, "mode": "All", "angle": 90}}" in the intermediate code IntC corresponds to the process of "etching all of the IGZO." The information processing device 21 can generate a model having a cross section shown in FIG. 6(D), for example, by simulating the process.

[0088] The "{"kind": "strip", "property": {}}" in the above intermediate code IntC corresponds to the process of "removing the resist." Note that the information processing device 21 can generate a model having a cross section shown in FIG. 6(E), for example, by simulating and reproducing the process.

[0089] The information processing device 21 also has a function of transmitting the model data MdD. For example, the model data MdD can be transmitted to the information processing device 20 via a network 51 (see FIG. 1).

[0090] This makes it possible to analyze a document DOC written in a natural language and extract a processing step Prc. Also, the processing step Prc extracted from the document DOC can be converted into intermediate code IntC. Also, the processing step Prc extracted from the document DOC can be simulated and reproduced. Also, the processing step Prc extracted from the document DOC can be simulated and model data MdD can be generated. Also, a design tool designed for users with advanced specialized knowledge can be operated using natural language. As a result, a novel information processing system that is highly convenient, useful, and reliable can be provided.

[0091] <Configuration example 2 of information processing system> The information processing system according to one embodiment of the present invention described in this embodiment includes an information processing device 10, an information processing device 20, and an information processing device 21 (see FIG. 7).

[0092] Note that the information processing system of one embodiment of the present invention described with reference to Fig. 7 differs from the information processing device described with reference to Fig. 1 in that the information processing device 20 has a function for generating a script file SF and a setting file CONF based on the intermediate code IntC and a function for transmitting the files, and the information processing device 21 has a function for receiving the script file SF and the setting file CONF and for generating model data MdD by simulating the processing step Prc based on the files. Here, the different parts will be described in detail, and the above description will be used for parts having the same configuration.

[0093] Third Configuration Example of Information Processing Device 20 The information processing device 20 has a function of extracting the intermediate code IntC from the processing result RES. The information processing device 20 also has a function of generating a script file SF and a setting file CONF based on the intermediate code IntC. Note that the information processing device 20 can generate a file in which the script and the setting are recorded, without recording the script and the setting in separate files.

[0094] The information processing device 20 also has a function of transmitting the script file SF and the configuration file CONF to the information processing device 21 via the network 51, for example (see FIG. 7).

[0095] The information processing device 20 also has a function of transmitting the model data MdD. For example, the model data MdD can be transmitted to the information terminal 30 via a network 51 (see FIG. 7).

[0096] <<Configuration Example 2 of Information Processing Device 21>> The information processing device 21 has a function of receiving a script file SF and a configuration file CONF (see FIG. 7).

[0097] The information processing device 21 has a function of simulating the machining process Prc based on the script file SF and the setting file CONF, and generating the model data MdD.

[0098] Also, for example, an information processing device on which a Technology Computer Aided Design (TCAD), an Electronic Design Automation (EDA) tool, or the like runs can be used as the information processing device 21. Specifically, an information processing device on which a TCAD (product name: Sentaurus Process Explorer) sold by Nihon Synopsys, LLC or a TCAD (product name: Clever) sold by Silvaco Japan, Inc. runs can be used as the information processing device 21.

[0099] The information processing device 21 has a function of transmitting the model data MdD. For example, the model data MdD can be transmitted to the information processing device 20 via a network 51 (see FIG. 7).

[0100] This makes it possible to analyze the document DOC described using a natural language and extract the processing steps Prc. Also, the processing steps Prc extracted from the document DOC can be converted into intermediate code IntC. Also, based on the intermediate code IntC, script files SF and setting files CONF of various formats can be generated. Also, script files SF and setting files CONF of a predetermined format can be generated according to a design tool operated by the information processing device 21. Also, the processing steps Prc extracted from the document DOC can be simulated. Also, the processing steps Prc extracted from the document DOC can be simulated to generate model data MdD. Also, a design tool designed for a user with advanced specialized knowledge can be operated using natural language. As a result, a novel information processing system excellent in convenience, usefulness, and reliability can be provided.

[0101] <<Configuration Example 4 of Information Processing Device 20>> The information processing device 20 includes a database DB. The database DB stores a recipe RCP. The recipe RCP includes, for example, processing details, materials to which the processing details can be applied, and parameter ranges to which the processing details can be applied.

[0102] The information processing device 20 has a function of verifying the intermediate code IntC by using the recipe RCP. For example, it can verify whether the processing content described in the intermediate code IntC is registered in the recipe RCP. Or, it can verify whether the processing content described in the intermediate code IntC is within a limited range registered in the recipe RCP.

[0103] Furthermore, the information processing device 20 has a function of notifying the occurrence of an error when the verification result is negative. For example, the information processing device 20 can transmit a message notifying the occurrence of an error to the information terminal 30 via the network 51, and display the message on the information terminal 30.

[0104] This makes it possible to verify intermediate code IntC generated from a document DOC written in natural language and to point out errors. In addition, design tools designed for users with advanced specialized knowledge can be operated using natural language. As a result, a novel information processing system with excellent convenience, usefulness, and reliability can be provided.

[0105] <Configuration example 3 of information processing system> The information processing system according to an embodiment of the present invention described in this embodiment includes an information processing device 10, an information processing device 20, and an information processing device 21 (see FIG. 1). The information processing system according to an embodiment of the present invention also includes an information terminal 30. The number of information terminals 30 is not particularly limited. For example, while four information terminals 30 are shown in FIG. 1, the number of information terminals can be one, two, three, or five or more.

[0106] <<Configuration Example 5 of Information Processing Device 20>> The information processing device 20 can transmit data received from the information terminal 30 to the information processing device 10. Furthermore, the information processing device 20 can transmit data received from the information processing device 10 to the information terminal 30. Furthermore, the information processing device 20 can transmit data received from the information processing device 21 to the information terminal 30.

[0107] The information processing device 20 can process the received data and transmit the result of the processing. For example, the information processing device 20 can execute a process using an information processing method according to an aspect of the present invention.

[0108] Furthermore, the information processing device 20 can transmit data generated based on data received from the information terminal 30 to the information processing device 10. Furthermore, the information processing device 20 can transmit data generated based on data received from the information processing device 10 to the information terminal 30. Furthermore, the information processing device 20 can transmit data generated based on data received from the information processing device 21 to the information terminal 30.

[0109] An organization such as a company that provides a service using an information processing method according to an embodiment of the present invention (hereinafter, also referred to as a service provider) can use the information processing device 20 to provide the service to a user.

[0110] For example, the information processing device 20 may be a large computer such as a server computer or a supercomputer.

[0111] Furthermore, a computer having a function as a parallel computer can be used for the information processing device 20. This makes it possible to perform large-scale calculations required for learning and inference of artificial intelligence (AI), for example. Also, processing using a natural language processing model using AI can be performed.

[0112] Configuration example 2 of information processing device 10 The information processing device 10 can process the received data and transmit the processing result. For example, the information processing device 10 can perform processing such as calculation using the data received from the information processing device 20. Furthermore, the information processing device 10 can transmit the processing result to the information processing device 20. This can reduce the calculation load on the information processing device 20.

[0113] The information processing device 10 can perform processing using a natural language processing model using AI. For example, the information processing device 10 can execute processing using a natural language processing model using AI, such as BERT (Bidirectional Encoder Representations from Transformers) and T5 (Text-to-Text Transfer Transformer).

[0114] In addition, the information processing device 10 can perform processing using a model that utilizes a large-scale language model (such as a sentence generation model or a dialogue model). For example, processing can be performed using a large-scale language model such as GPT-3, GPT-3.5, GPT-4, LaMDA (Language Model for Dialogue Applications), PaLM (Pathways Language Model), and Llama2. In particular, it is preferable to use GPT-4.

[0115] For example, the information processing device 10 can convert a document written in a natural language into intermediate code written in an intermediate language. The information processing device 10 can also convert a document written in a natural language into intermediate code written in an intermediate language according to a given instruction statement. The information processing device 10 can also include a conversion rule in the instruction statement. This makes it possible to control the degree of freedom of conversion by giving the conversion rule.

[0116] Furthermore, the information processing device 10 can execute processing using a general-purpose language processing model capable of performing various natural language processing tasks.

[0117] The information processing device 10 is a large-scale computer such as a server computer or a supercomputer. In addition, it is preferable that the information processing device 10 has a function as a parallel computer. By using the information processing device 10 as a parallel computer, it is possible to perform large-scale calculations necessary for AI learning and inference, for example.

[0118] The information processing device 10 is a computer with a higher processing capacity than the information processing device 20. For example, when both the information processing device 20 and the information processing device 10 have a function as a parallel computer, the information processing device 10 has a higher processing capacity than the information processing device 20 and can perform large-scale calculations. Also, for example, when both the information processing device 20 and the information processing device 10 can perform processing using a model that uses a large-scale language model, the information processing device 10 can execute processing using a large-scale AI model compared to the information processing device 20.

[0119] It should be noted that the service provider does not necessarily need to own the information processing device 10. For example, the service provider can use part of the service provided by another business operator or the like using the information processing device 10.

[0120] Example of configuration of information terminal 30 The information terminal 30 can receive data input by a user of the information processing system according to an embodiment of the present invention. The information terminal 30 can also provide the user with data output by the information processing system according to an embodiment of the present invention.

[0121] Furthermore, the information terminal 30 can transmit data received from a user to the information processing device 20. Furthermore, the information terminal 30 can provide data received from the information processing device 20 to the user.

[0122] Furthermore, the information terminal 30 can transmit data generated based on data received from a user to the information processing device 20. Furthermore, the information terminal 30 can provide data generated based on data received from the information processing device 20 to the user.

[0123] For example, dedicated application software or a web browser is installed on the information terminal 30. A user can access the information processing device 20 via either of them. This allows the user to enjoy services using the information processing system according to one embodiment of the present invention, for example, using a computer with lower processing power than the information processing device 20.

[0124] The information terminal 30 may also be called a client computer, etc. Each of the information terminals 30 is an information terminal device used by a user of the information processing system according to one aspect of the present invention.

[0125] For example, a desktop computer 30a, a notebook computer 30b, a smartphone 30c, and a tablet computer 30d can be used as the information terminal 30. The tablet computer 30d can also be used as a notebook computer by connecting it to a housing 31 having a keyboard.

[0126] Example of network 50 configuration The network 50 connects the information processing device 20 and the information processing device 10. This enables input data and processed data to be transmitted and received between the two. In addition, the load related to information processing can be distributed.

[0127] In this embodiment, the network 50 is mainly a computer network that is larger than the network 51. For example, a global network can be used for the network 50. Specifically, the Internet, which is the foundation of the World Wide Web (WWW), can be used.

[0128] Example of network 51 configuration The network 51 connects a plurality of information terminals 30, information processing device 20, and information processing device 21. This enables data transmission and reception between the two. Also, the load related to information processing can be distributed. Also, a service provider can provide a user with a service using an information processing method according to one aspect of the present invention via the network 51, for example.

[0129] For example, a local network can be used for the network 51. Also, an intranet or an extranet can be used for the network 51. Also, a personal area network (PAN), a local area network (LAN), a campus area network (CAN), a metropolitan area network (MAN), a wide area network (WAN), a global area network (GAN), or the like can be used for the network 51.

[0130] When a provider of a service using an information processing method according to an embodiment of the present invention and a user who receives the service belong to the same organization such as a company, data transmission between the information terminal 30 and the information processing device 20 is preferably performed using, for example, a network 51 constructed within the organization. This allows data to be transmitted and received between the information terminal 30 and the information processing device 10 more securely than when data is transmitted via the Internet. In addition, it is possible to prevent confidential information within the organization from leaking to the outside.

[0131] When performing wireless communication, communication standards such as the fourth generation mobile communication system (4G), the fifth generation mobile communication system (5G), and the sixth generation mobile communication system (6G), or specifications standardized by IEEE such as Wi-Fi (registered trademark) and Bluetooth (registered trademark), can be used as communication protocols or communication technologies.

[0132] <<Configuration Example 6 of Information Processing Device 20>> The information processing device 20 includes an input unit 110, a storage unit 120, a processing unit 130, an output unit 140, and a transmission path 150 (see FIG. 8).

[0133] In the drawings attached to this specification, the components are classified by function and shown as independent blocks in the block diagram, but in reality, it is difficult to completely separate the components by function, and one component may be involved in multiple functions. For example, a part of the processing unit 130 may function as the input unit 110. Also, one function may be involved in multiple components. For example, the processing performed by the processing unit 130 may be executed by different information processing devices depending on the processing.

[0134] [Input section 110] The input unit 110 can receive data from outside the information processing device 20. For example, the input unit 110 receives data from the network 50 or the network 51.

[0135] The input unit 110 supplies the received data to one or both of the storage unit 120 and the processing unit 130 via a transmission path 150 .

[0136] [Storage section 120] The storage unit 120 has a function of storing a program executed by the processing unit 130. The storage unit 120 can also have a function of storing data generated by the processing unit 130 (e.g., calculation results, analysis results, inference results), data accepted by the input unit 110, and the like.

[0137] The storage unit 120 can have a database. Furthermore, the information processing device 20 can have a database separate from the storage unit 120. The information processing device 20 can have a function of retrieving data from a database that exists outside the storage unit 120, outside the information processing device 20, or outside the information processing system. Furthermore, the information processing device 20 can have a function of retrieving data from both its own database and an external database.

[0138] Either or both of a storage and a file server can be used for the memory unit 120. Also, a database in which paths of files stored in a file server are recorded can be used for the memory unit 120.

[0139] The storage unit 120 has at least one of a volatile memory and a non-volatile memory. Examples of the volatile memory include a dynamic random access memory (DRAM) and a static random access memory (SRAM). Examples of the non-volatile memory include a resistive random access memory (ReRAM), a phase change random access memory (PRAM), a ferroelectric random access memory (FeRAM), a magnetoresistive random access memory (MRAM), and a flash memory. The storage unit 120 can have at least one of a NOSRAM (registered trademark) and a DOSRAM (registered trademark). The storage unit 120 can have a recording media drive. Examples of the recording media drive include a hard disk drive (HDD) and a solid state drive (SSD).

[0140] NOSRAM is an abbreviation of "Nonvolatile Oxide Semiconductor Random Access Memory (RAM)". NOSRAM is a memory in which the memory cell is a two-transistor type (2T) or three-transistor type (3T) gain cell, and the transistor is a transistor (also called OS transistor) that uses a metal oxide in the channel formation region. The current that flows between the source and drain in the off state, that is, the leakage current, is extremely small. NOSRAM can be used as a nonvolatile memory by retaining a charge according to data in the memory cell using the characteristic of extremely small leakage current. In particular, NOSRAM is suitable for arithmetic processing in which only data read operations are repeated in large quantities because it is possible to read the retained data without destroying it (nondestructive read). NOSRAM can increase the data capacity by stacking it, so it can be used as a large-scale cache memory, main memory, or storage memory to improve the performance of semiconductor devices.

[0141] DOSRAM is an abbreviation for "Dynamic Oxide Semiconductor RAM" and refers to RAM with 1T (transistor) 1C (capacitance) type memory cells. DOSRAM is a DRAM formed using OS transistors, and is a memory that temporarily stores information sent from the outside. DOSRAM is a memory that takes advantage of the small off-current of OS transistors.

[0142] In this specification and the like, the term "metal oxide" refers to an oxide of a metal in a broad sense. Metal oxides are classified into oxide insulators, oxide conductors (including transparent oxide conductors), oxide semiconductors (also referred to as oxide semiconductors or simply OS), and the like. For example, when a metal oxide is used for a semiconductor layer of a transistor, the metal oxide may be referred to as an oxide semiconductor.

[0143] The metal oxide in the channel formation region preferably contains indium (In). When the metal oxide in the channel formation region contains indium, the carrier mobility (electron mobility) of the OS transistor is increased. The metal oxide in the channel formation region is preferably an oxide semiconductor containing an element M. The element M is preferably at least one of aluminum (Al), gallium (Ga), and tin (Sn). Other elements applicable to the element M include boron (B), silicon (Si), titanium (Ti), iron (Fe), nickel (Ni), germanium (Ge), yttrium (Y), zirconium (Zr), molybdenum (Mo), lanthanum (La), cerium (Ce), neodymium (Nd), hafnium (Hf), tantalum (Ta), and tungsten (W). However, the element M may be a combination of a plurality of the above elements. The element M is, for example, an element having a high bond energy with oxygen. For example, it is an element that has a higher bond energy with oxygen than indium. In addition, the metal oxide in the channel formation region is preferably a metal oxide containing zinc (Zn). Metal oxides containing zinc may be easily crystallized.

[0144] The metal oxide contained in the channel formation region is not limited to a metal oxide containing indium. The metal oxide contained in the channel formation region may be, for example, a metal oxide containing zinc but not indium, such as zinc tin oxide or gallium tin oxide, a metal oxide containing gallium, or a metal oxide containing tin.

[0145] [Processing section 130] The processing unit 130 has a function of performing processes such as calculation, analysis, and inference using data supplied from one or both of the input unit 110 and the storage unit 120. The processing unit 130 can supply generated data (e.g., calculation results, analysis results, inference results) to one or both of the storage unit 120 and the output unit 140.

[0146] The processing unit 130 has a function of acquiring data from the storage unit 120. The processing unit 130 also has a function of recording or registering data in the storage unit 120.

[0147] The processing unit 130 may include, for example, an arithmetic circuit. The processing unit 130 may include, for example, a central processing unit (CPU). The processing unit 130 may also include a graphics processing unit (GPU). The processing unit 130 may also include a neural processing unit / neural network processing unit (NPU).

[0148] The processing unit 130 may have a microprocessor such as a DSP (Digital Signal Processor). The microprocessor may be realized by a PLD (Programmable Logic Device) such as an FPGA (Field Programmable Gate Array) or an FPAA (Field Programmable Analog Array). The processing unit 130 may also have a quantum processor. The processing unit 130 may perform various data processing and program control by interpreting and executing instructions from various programs using the processor. Programs that can be executed by the processor are stored in at least one of the memory area of ​​the processor and the storage unit 120.

[0149] The processing unit 130 may include a main memory. The main memory may include at least one of a volatile memory such as a random access memory (RAM) and a non-volatile memory such as a read only memory (ROM). The main memory may include at least one of the above-mentioned NOSRAM and DOSRAM.

[0150] The RAM may be, for example, a DRAM or an SRAM, and a memory space is virtually allocated and used as a working space for the processing unit 130. The operating system, application programs, program modules, program data, lookup tables, and the like stored in the storage unit 120 are loaded into the RAM for execution. These data, programs, and program modules loaded into the RAM are each directly accessed and operated by the processing unit 130.

[0151] ROM can store BIOS (Basic Input / Output System) and firmware that do not require rewriting. Examples of ROM include mask ROM, OTPROM (One Time Programmable Read Only Memory), EPROM (Erasable Programmable Read Only Memory), etc. Examples of EPROM include UV-EPROM (Ultra-Violet Erasable Programmable Read Only Memory), which allows the erasure of stored data by exposure to ultraviolet light, EEPROM (Electrically Erasable Programmable Read Only Memory), flash memory, etc.

[0152] The processing unit 130 can have one or both of an OS transistor and a transistor having silicon in a channel formation region (Si transistor).

[0153] The processing unit 130 preferably includes an OS transistor. Since the off-current of the OS transistor is extremely small, by using the OS transistor as a switch for holding the charge (data) flowing into a capacitive element functioning as a memory element, the data can be held for a long period of time. By using this characteristic in at least one of the register and the cache memory of the processing unit, the processing unit can be operated only when necessary, and in other cases, the processing unit can be turned off by saving the information of the immediately preceding processing in the memory element. In other words, normally-off computing is possible, and the power consumption of the information processing system can be reduced.

[0154] It is preferable that the information processing device 20 uses AI for at least a part of the processing.

[0155] In particular, it is preferable that the information processing device 20 uses an artificial neural network (ANN, hereinafter also simply referred to as a neural network). The neural network is realized by a circuit (hardware) or a program (software).

[0156] In this specification, the term "neural network" refers to a general model that imitates the neural circuit network of a living organism, determines the connection strength between neurons through learning, and has a problem-solving ability. A neural network has an input layer, an intermediate layer (hidden layer), and an output layer.

[0157] In this specification and the like, when discussing neural networks, determining the connection strengths (also called weighting coefficients) between neurons from existing information may be referred to as "learning".

[0158] In this specification and the like, the process of constructing a neural network using connection weights obtained by learning and deriving a new conclusion therefrom may be referred to as "inference."

[0159] [Output section 140] The output unit 140 can output at least one of the calculation result, the analysis result, and the inference result in the processing unit 130 to the outside of the information processing device 20. For example, the output unit 140 can transmit data to the network 50 or the network 51.

[0160] [Transmission Line 150] The transmission path 150 has a function of transmitting data. Data can be transmitted and received between the input unit 110, the storage unit 120, the processing unit 130, and the output unit 140 via the transmission path 150.

[0161] Third Configuration Example of Information Processing Device 21 For example, the information processing device 21 may have the same configuration as the information processing device described with reference to FIG.

[0162] Note that this embodiment mode can be appropriately combined with other embodiment modes described in this specification.

[0163] (Embodiment 2) In this embodiment, an information processing method according to one embodiment of the present invention will be described with reference to FIGS.

[0164] FIG. 9 is a diagram illustrating an information processing method according to an embodiment of the present invention.

[0165] <Examples of information processing methods> The information processing method described in this embodiment includes the following steps S1 to S16 (see FIG. 9).

[0166] Steps S1 and S2 are processes for causing the information processing device 20 to store the document DOC received by the information terminal 30.

[0167] Steps S3 and S4 are processes in which the information processing device 20 generates a directive text PT from the document DOC and stores it in the information processing device 10.

[0168] Steps S5 and S6 are processes in which the information processing device 10 generates a processing result in accordance with the directive text PT and causes the information processing device 20 to store the processing result.

[0169] Steps S7 and S8 are processes in which the information processing device 20 extracts an intermediate code from the processing result and verifies the intermediate code. If there is no error in the intermediate code, the process proceeds to step S9, and if there is an error, the process proceeds to step S16.

[0170] Steps S9 and S10 are processes in which the information processing device 20 transmits the intermediate code and causes the information processing device 21 to store it.

[0171] Step S11 is a process in which the information processing device 21 generates model data based on the intermediate code.

[0172] Steps S12 and S13 are processes in which the information processing device 21 transmits model data and causes the information processing device 20 to store it.

[0173] Steps S14 and S15 are processes in which the information processing device 20 transmits the model data and causes the information terminal 30 to display the model data.

[0174] Step S16 is a process in which the information processing device 20 notifies the occurrence of an error.

[0175] [Step S1] In step S1, the information terminal 30 accepts and transmits the document DOC (see FIG. 9). The document DOC includes information related to the processing step Prc. For example, the document DOC can be transmitted to the information processing device 20 via the network 51 (see FIG. 1).

[0176] [Step S2] In step S2, the information processing device 20 receives and stores the document DOC (see FIG. 9).

[0177] [Step S3] In step S3, the information processing device 20 generates and transmits a command text PT (see FIG. 9). For example, the command text PT can be transmitted to the information processing device 10 via the network 50 (see FIG. 1).

[0178] The directive PT includes the conversion rule CnvR and the document DOC. The directive PT also includes an instruction to analyze the document DOC and extract the processing step Prc, and an instruction to convert the processing step Prc into the intermediate code IntC according to the conversion rule CnvR.

[0179] [Step S4] In step S4, the information processing device 10 receives and stores the instruction text PT (see FIG. 9).

[0180] [Step S5] In step S5, the information processing device 10 generates and transmits a processing result RES according to the directive PT (see FIG. 9). For example, the processing result RES can be transmitted to the information processing device 20 via the network 50 (see FIG. 1). The processing result RES includes the intermediate code IntC.

[0181] [Step S6] In step S6, the information processing device 20 receives and stores the processing result RES (see FIG. 9).

[0182] [Step S7] In step S7, the information processing device 20 extracts the intermediate code IntC from the processing result RES and verifies it using the recipe RCP (see FIG. 9).

[0183] [Step S8] In step S8, if no error is found in the intermediate code IntC, the process proceeds to step S9, and if an error is found in the intermediate code IntC, the process proceeds to step S16 (see FIG. 9).

[0184] [Step S9] In step S9, the information processing device 20 transmits the intermediate code IntC (see FIG. 9). For example, the intermediate code IntC can be transmitted to the information processing device 21 via the network 51 (see FIG. 1).

[0185] [Step S10] In step S10, the information processing device 21 receives and stores the intermediate code IntC (see FIG. 9).

[0186] [Step S11] In step S11, the information processing device 21 simulates the machining process Prc based on the intermediate code IntC to generate model data MdD (see FIG. 9).

[0187] [Step S12] In step S12, the information processing device 21 transmits the model data MdD (see FIG. 9). For example, the model data MdD can be transmitted to the information processing device 20 via the network 51 (see FIG. 1).

[0188] [Step S13] In step S13, the information processing device 20 receives and stores the model data MdD (see FIG. 9).

[0189] [Step S14] In step S14, the information processing device 20 transmits the model data MdD (see FIG. 9). For example, the model data MdD can be transmitted to the information terminal 30 via the network 51 (see FIG. 1).

[0190] [Step S15] In step S15, the information terminal 30 receives and displays the model data MdD (see FIG. 9).

[0191] [Step S16] In step S16, the information processing device 20 notifies the occurrence of an error (see FIG. 9). For example, a message notifying the occurrence of an error may be transmitted to the information terminal 30 via the network 51, and the message may be displayed on the information terminal 30.

[0192] This allows design tools designed for users with advanced expertise to be operated using natural language, providing a novel information processing method that is highly convenient, useful, and reliable.

[0193] Note that this embodiment mode can be appropriately combined with other embodiment modes described in this specification. [Explanation of symbols]

[0194] CnvR Conversion Rules CONF configuration file DB Database DOC Document IntC intermediate code ITSO layer MdD Model Data Prc machining process PT directive RCP Recipe RES Processing Result SF Script File SiOx layer SPACER layer 10. Information processing device 20 Information processing device 21 Information processing equipment 30 Information terminal 30a Computer 30b Computer 30c Smartphone 30d Computer 31 Case 50 Network 51 Network 110 Input section 120 Storage section 130 Processing section 140 Output section

Claims

1. A first information processing device; A second information processing device; A third information processing device, The first information processing device has a function of receiving an instruction text, the first information processing device has a function of generating a processing result in accordance with the instruction statement; the processing result includes an intermediate code; the first information processing device has a function of transmitting the processing result to the second information processing device; the second information processing device has a function of receiving a document, the processing result, and model data; The document includes information related to a processing step, the second information processing device has a function of generating the instruction sentence; the second information processing device has a function of transmitting the instruction text to the first information processing device; the directive includes a transformation rule and the document; the instruction statement includes an instruction to analyze the document and extract the processing step, and an instruction to convert the processing step into the intermediate code in accordance with the conversion rule, the second information processing device has a function of extracting the intermediate code from the processing result; the second information processing device has a function of transmitting the intermediate code to the third information processing device; the second information processing device has a function of transmitting the model data to an information terminal; the third information processing device has a function of receiving the intermediate code; the third information processing device has a function of simulating the machining process based on the intermediate code to generate the model data; An information processing system, wherein the third information processing device has a function of transmitting the model data to the second information processing device.

2. A first information processing device; A second information processing device; A third information processing device, the first information processing device has a function of receiving an instruction text; the first information processing device has a function of generating a processing result in accordance with the instruction statement; the processing result includes an intermediate code; the first information processing device has a function of transmitting the processing result to the second information processing device; the second information processing device has a function of receiving a document, the processing result, and model data; The document includes information related to a processing step, the second information processing device has a function of generating the instruction sentence; the second information processing device has a function of transmitting the instruction text to the first information processing device; the directive includes a transformation rule and the document; the instruction statement includes an instruction to analyze the document and extract the processing step, and an instruction to convert the processing step into the intermediate code in accordance with the conversion rule, the second information processing device has a function of extracting the intermediate code from the processing result; the second information processing device has a function of generating a script file and a setting file based on the intermediate code; the second information processing device has a function of transmitting the script file and the setting file to the third information processing device; the second information processing device has a function of transmitting the model data to an information terminal; the third information processing device has a function of receiving the script file and the setting file; the third information processing device has a function of simulating the machining process based on the script file and the setting file to generate the model data; An information processing system, wherein the third information processing device has a function of transmitting the model data to the second information processing device.

3. The second information processing device includes a database, The database stores recipes; 3. The information processing system according to claim 1, wherein the second information processing device has a function of verifying the intermediate code by using the recipe.

4. An information processing method having first to sixteenth steps, In the first step, the information terminal accepts a document and transmits it to the first information processing device; The document includes information related to a processing step, In the second step, the first information processing device receives and stores the document; In the third step, the first information processing device generates an instruction statement and transmits it to the second information processing device; the directive includes a transformation rule and the document; the instruction statement includes an instruction to analyze the document and extract the processing steps, and an instruction to convert the processing steps into an intermediate code in accordance with the conversion rule, In the fourth step, the second information processing device receives and stores the instruction text; In the fifth step, the second information processing device generates a processing result in accordance with the instruction text and transmits the processing result to the first information processing device; the processing result includes the intermediate code, In the sixth step, the first information processing device receives and stores the processing result; In the seventh step, the first information processing apparatus extracts the intermediate code from the processing result and verifies the intermediate code using a recipe; In the eighth step, if no error is found in the intermediate code, the process proceeds to the ninth step, and if an error is found in the intermediate code, the process proceeds to the sixteenth step; In the ninth step, the first information processing device transmits the intermediate code to a third information processing device; In the tenth step, the third information processing device receives and stores the intermediate code; In the eleventh step, the third information processing device simulates the machining process based on the intermediate code to generate model data; In the twelfth step, the third information processing apparatus transmits the model data to the first information processing apparatus; In the thirteenth step, the first information processing device receives and stores the model data; In the fourteenth step, the first information processing device transmits the model data to the information terminal; In the fifteenth step, the information terminal receives and displays the model data; In the sixteenth step, the first information processing device notifies the information terminal of the occurrence of an error.

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