Multi-degree-of-freedom force / torque sensor and robot

Abstract

To address the need to improve 6 degree of freedom force / torque sensors.SOLUTION: A multi-degree-of-freedom force / torque sensor (100) is provided. This multi-degree-of-freedom force / torque sensor includes a first rigid plate (10), a second rigid plate (20), a plurality of elastic members (30) connected between the first rigid plate and the second rigid plate, and signal pairs provided between the first rigid plate and the second rigid plate. The signal pairs are arranged to detect relative displacement of the first rigid plate and the second rigid plate in multiple directions.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to the field of force and torque sensors, and more specifically to multi-degree-of-freedom force and torque sensors and robots. [Background technology]

[0002] Most of the conventional force-torque sensors use contact-based strain gauges to convert the strain of local structures due to global forces and / or torques into electrical signals that are subsequently amplified. Strain gauges are usually bonded to such local structures, and corresponding electrical signals are obtained by detecting the deformations caused by the strain gauges, and finally the forces and torques applied to the force-torque sensor are determined. For example, a Chinese invention with invention number 201210589784.7 discloses such a 6-dimensional force-torque sensor with strain components bonded to a mechanical structure. However, each strain gauge is only sensitive to its own deformation pattern and not to other deformations. This prevents these strain gauges from being widely used in robotics, automation industries, and laboratories.

[0003] Recently, there are some products and researches focusing on non-contact sensing methods, for example, capacitance, inductance, and optical solutions. For example, the Korean invention with publication number KR10201130126082A and the US patent with patent number US10260970B2 disclose such kinds of force-torque sensors, respectively. Unlike locating the conversion member (e.g., strain gauge) that converts deformation into an electric signal in the local structure where the most severe deformation is likely to occur, in such a solution, the conversion member is located in the position where the displacement is the largest to convert the sensed displacement into an electric signal. Since different application scenarios may require different total ranges of three orthogonal forces and three orthogonal torques, the required mechanical structure is designed to have the ability to balance these forces and torques. However, there are not many prior arts that can prove that the design has such ability. In practice, the deformation of the structure due to different forces and torques is seriously coupled, so it is difficult to independently adjust the detection ability of the sensor corresponding to a single force and torque without affecting the other forces and torques.

[0004] Therefore, there is a need to improve six-degree-of-freedom force-torque sensors. Summary of the Invention [Problem to be solved by the invention]

[0005] The following is a simplified summary to provide a basic understanding of various aspects of the present invention. This disclosure is not an extensive overview of all contemplated aspects, and is not intended to identify requirements or key elements of all aspects or to delineate the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form as a prelude to the more detailed description that is presented later. [Means for solving the problem]

[0006] According to one aspect of the present invention, there is provided a multi-degree-of-freedom force / torque sensor. The multi-degree-of-freedom force / torque sensor may include a first rigid plate, a second rigid plate, a plurality of elastic members connected between the first rigid plate and the second rigid plate, and a plurality of signal pairs arranged between the first rigid plate and the second rigid plate and arranged to detect relative displacements between the first rigid plate and the second rigid plate in a plurality of directions. Each of the plurality of elastic members may include a first pillar and a second pillar, a first end of the first pillar connected to the first rigid plate, a first end of the second pillar connected to the second rigid plate, and the first pillar and the second pillar each extending substantially in an axial direction of the multi-degree-of-freedom force / torque sensor. Each of the plurality of elastic members may further include a connecting portion for connecting the first pillar and the second pillar. The connecting portion is connected to a second end of the first pillar and a second end of the second pillar, and at least a portion of the connecting portion extends substantially in a direction perpendicular to the axial direction of the multi-degree-of-freedom force / torque sensor.

[0007] According to another aspect of the present invention, there is provided a multi-degree-of-freedom force-torque sensor. The multi-degree-of-freedom force-torque sensor includes a first rigid plate, a second rigid plate, a plurality of elastic members connected between the first rigid plate and the second rigid plate, and a plurality of signal pairs arranged between the first rigid plate and the second rigid plate to detect relative displacements between the first rigid plate and the second rigid plate in a plurality of directions, the plurality of elastic members being arranged at edges of the first rigid plate and the second rigid plate. Each of the plurality of elastic members may include a first pillar and a second pillar, a first end of the first pillar being connected to the first rigid plate, a first end of the second pillar being connected to the second rigid plate, and the first pillar and the second pillar each extending substantially in an axial direction of the multi-degree-of-freedom force-torque sensor. Each of the plurality of elastic members may further include a connecting portion for connecting the first pillar and the second pillar. The connecting portion is shaped such that a first length is greater than a height of the multi-degree-of-freedom force-torque sensor in the axial direction. This first length is the length of the projection of this connecting portion on a plane perpendicular to the axial direction of the multi-degree-of-freedom force-torque sensor.

[0008] According to another aspect of the present invention, there is provided a robot including a plurality of links and an end effector connected in series, the end effector including any one of the multi-degree-of-freedom force-torque sensors described above. [Brief description of the drawings]

[0009] In the following, embodiments of the present invention will be described in detail with reference to the accompanying drawings, in which the present invention can be better understood.

[0010] [Figure 1] FIG. 1 is a schematic diagram of a multi-degree-of-freedom force-torque sensor according to one embodiment of the present invention. [Diagram 2] FIG. 2 is a cross-sectional schematic diagram of an exemplary elastic member that can be applied to the multi-degree-of-freedom force-torque sensor shown in FIG. [Diagram 3]FIG. 3 is a schematic cross-sectional view of a semi-annular connector. [Figure 4] FIG. 4 is a schematic cross-sectional view of a connecting portion according to one example of the present invention. [Diagram 5] FIG. 5 is a schematic cross-sectional view of a connecting portion according to another example of the present invention. [Figure 6] FIG. 6 is a schematic cross-sectional view of a beam-shaped connecting portion according to another example of the present invention. [Figure 7] FIG. 7 is a schematic diagram of another elastic member used in the multi-degree-of-freedom force-torque sensor according to the embodiment of the present invention. [Figure 8] FIG. 8 is a schematic cross-sectional view of the connecting portion 803 shown in FIG. [Figure 9] FIG. 9 is a perspective view of a multi-degree-of-freedom force-torque sensor 200 according to one embodiment of the present invention. [Figure 10] FIG. 10 illustrates an exemplary robot 900 including a multi-degree-of-freedom force-torque sensor in accordance with an embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] The following, in conjunction with the detailed description of the accompanying drawings, describes a variety of different configurations, which are not intended to represent the only configurations in which the concepts described herein may be practiced. The detailed description includes specific details to provide a thorough understanding of the various concepts. However, it will be apparent to one skilled in the art that these concepts may be practiced without these specific details.

[0012] FIG. 1 is a schematic diagram of a multi-degree-of-freedom force / torque sensor 100 according to an embodiment of the present invention. As shown in the figure, the multi-degree-of-freedom force / torque sensor 100 includes a first rigid plate 10, a second rigid plate 20, a plurality of elastic members 30, and a plurality of signal pairs (not shown). The plurality of elastic members 30 are provided between the first rigid plate 10 and the second rigid plate 20. Specifically, each of the plurality of elastic members 30 is connected to the first rigid plate 10 via one end thereof, for example, and connected to the second rigid plate 20 via the other end thereof. The plurality of signal pairs are disposed on the first rigid plate 10 and the second rigid plate 20 to detect the relative displacement of the two plates.

[0013] In one example, when an external force acts on the multi-degree-of-freedom force-torque sensor 100, the first rigid plate 10 and the second rigid plate 20 maintain their shape almost unchanged due to their high rigidity. In addition, the elastic member 30 may bend or deform in the horizontal and / or vertical directions, which causes the first rigid plate 10 and the second rigid plate 20 to move relative to each other. The material of the elastic member 30 is generally a metal material, such as stainless steel, but in some embodiments, other materials such as plastic or rubber may be used. The arranged signal pair can detect the relative movement between the first rigid plate 10 and the second rigid plate 20.

[0014] FIG. 2 is a cross-sectional schematic diagram of an exemplary elastic member applicable to the multi-degree-of-freedom force-torque sensor 100 shown in FIG. 1. As shown in FIG. 2, the elastic member 30 includes a first pillar 301, a second pillar 302, and a connecting portion 303. The first pillar 301 is connected to the first rigid plate 10 via its first end 301a, and the second pillar 302 is connected to the second rigid plate 20 via its first end 302a. The first pillar 301 is connected to the connecting portion 303 via its second end 301b, and the second pillar 302 is connected to the connecting portion 303 via its second end 302b. As shown in the figure, the first pillar 301 and the second pillar 302 are disposed to extend substantially in the axial direction of the multi-degree-of-freedom force-torque sensor 100. For ease of explanation, FIG. 2 illustrates a coordinate system including X and Z axes associated with the sensor 100, with the Z axis parallel to the axial direction of the multi-degree-of-freedom force-torque sensor 100. The Y-axis (not shown) is perpendicular to the plane formed by the X-axis and Z-axis. Hereinafter, the X-axis, Y-axis, and Z-axis are also referred to as the X, Y, and Z directions, and the plane perpendicular to the Z-axis is also referred to as the XY plane.

[0015] It should be understood that the expression "extending substantially in the axial direction of the multi-degree-of-freedom force-torque sensor 100" means that the first pillar 301 and the second pillar 302 do not have to extend strictly in the axial direction of the multi-degree-of-freedom force-torque sensor 100. In addition, in this specification, the term "pillar" refers to a member disposed between the plate and the connecting part. A columnar shape is one of the possible shapes, but is not limited thereto. For example, the pillars 301 and 302 may be in the shape of a spiral extending in the axial direction of the multi-degree-of-freedom force-torque sensor 100. According to this example, at least a portion of the connecting part 303 extends in a direction substantially perpendicular to the axial direction of the multi-degree-of-freedom force-torque sensor 100.

[0016] In some embodiments, the connector has an annular shape. The connector shown in FIG. 2 has an annular shape. As shown in FIG. 2, the outer surface of the connector 303 is connected to the second end 301b of the first pillar 301 at one side and to the second end 302b of the second pillar 302 at the other side. FIG. 3 is a schematic diagram showing a cross-sectional view of a semi-annular connector 403. As shown in the figure, the semi-annular connector 403 is connected to the second end 301b of the first pillar 301 at one end and to the second end 302b of the second pillar 302 at the other end.

[0017] In some examples, the coupling portion may include a first portion and a second portion, and the first portion extends in a direction substantially perpendicular to the axial direction of the multi-degree-of-freedom force-torque sensor. FIG. 4 is a schematic cross-sectional view of a coupling portion 503 according to this example. As shown in FIG. 4, the first portion 501 extends in a direction substantially perpendicular to the axial direction of the multi-degree-of-freedom force-torque sensor, i.e., in the XY plane of the coordinate system in the figure, and the second portions 502a and 502b each extend from the first portion 501 to the second end 302b of the second pillar 302. For example, the second portions 502a and 502b each extend from both ends of the first portion 501 to the second end 302b of the second pillar 302. The first pillar 301 is connected to the middle of the first portion 501. FIG. 5 is a schematic cross-sectional view of another coupling portion 603 according to this example. As shown in FIG. 5, the first portion includes a first sub-portion 601a and a second sub-portion 601b, where the first sub-portion 601a is connected to the second end 301b of the first pillar 301, and the second sub-portion 601b is connected to the second end 302b of the second pillar 302. Each of the first sub-portion and the second sub-portion 601a, 601b extends in a direction substantially perpendicular to the axial direction of the multi-degree-of-freedom force-torque sensor 100, i.e., in the XY plane of the coordinate system in the figure. The second portion 602 is connected between the first sub-portion 601a and the second sub-portion 601b. In the example shown in FIG. 5, the second portion 602 is connected to an end of the first sub-portion 601a and an end of the second sub-portion 601b, and the two ends are in different extension directions of the two sub-portions. In actual use, the second portion 602 may be connected to the first and second sub-portions at other locations, and the second portion 602 may be configured as any suitable shape required.

[0018] 6 is a schematic cross-sectional view that can replace an example of a connecting portion, in which the connecting portion is in a beam shape. As shown in FIG. 6, the connecting portion 703 is a beam that is substantially perpendicular to the axial direction of the multi-degree-of-freedom force-torque sensor 100, i.e., a beam that is located on the XY plane of the coordinate system in the figure. One side of the connecting portion 703 is connected to the first pillar 301, and the other side is connected to the second pillar 302.

[0019] The connections shown in Figures 3, 4, 5 and 6 are only used to illustrate generally different variations of this connection and are not to be considered as the exact shape and scale of this connection.

[0020] According to some examples of the present invention, the elastic members are disposed on the edges of the first rigid plate 10 and the second rigid plate 20. Meanwhile, in some other embodiments of the present invention, the elastic members may be disposed at positions close to the centers of the first rigid plate 10 and the second rigid plate 20. When the elastic members are disposed close to the centers of the rigid plates 10 and 20, the multi-degree-of-freedom force / torque sensor 100 has a small torque sensing capability, and when the elastic members are disposed on the edges of the rigid plates 10 and 20, the multi-degree-of-freedom force / torque sensor 100 has a large torque sensing capability. By adjusting the radial positions of the elastic members in the multi-degree-of-freedom force / torque sensor 100, the force / torque sensing capability of the multi-degree-of-freedom force / torque sensor 100 can be adjusted in an appropriate proportion.

[0021] 1, a plurality of elastic members 30 are disposed on the edges of a first rigid plate 10 and a second rigid plate 20 of a multi-degree-of-freedom force / torque sensor 100. Each of the plurality of elastic members 30 includes a first pillar 301 and a second pillar 302 that extend substantially in an axial direction of the multi-degree-of-freedom force / torque sensor 100, and a connecting portion 303 that extends substantially in a direction perpendicular to the axial direction of the multi-degree-of-freedom force / torque sensor 100.

[0022] When a force is applied to the multi-degree-of-freedom force / torque sensor 100, the elastic member 30 deforms in the Z, X or y direction (see Figs. 2 to 6). The deformation in the X and Y directions allows the signal pair provided in the multi-degree-of-freedom force / torque sensor 100 to sense forces in the X and Y directions and torque around the Z axis. The deformation in the Z direction allows the signal pair of the multi-degree-of-freedom force / torque sensor 100 to sense torque around the X and Y axes and force along the Z direction. When a different force / torque sensing range is required for the multi-degree-of-freedom force / torque sensor 100, this requirement can be met by adjusting the height in the Z axis, the length in the XY plane, etc. of the two pillars and the connecting portion 303.

[0023] According to some other embodiments of the present invention, the connecting portion is shaped such that a first length L of the connecting portion is greater than a height H of the connecting portion in the axial direction of the multi-degree-of-freedom force-torque sensor, and the first length L is a length of a projection of the connecting portion on a plane perpendicular to the axial direction of the multi-degree-of-freedom force-torque sensor. With reference to Figs. 1 and 7, the multi-degree-of-freedom force-torque sensor includes a first rigid plate 10, a second rigid plate 20, and a plurality of elastic members 30, and the elastic members 30 are connected between the first rigid plate 10 and the second rigid plate 20. Each of the plurality of elastic members 30 includes a first pillar 301 and a second pillar 302. The first pillar 301 has a first end 301a connected to the first rigid plate 10. The second pillar 302 has a first end 302a connected to the second rigid plate 20. Each of the first pillar 301 and the second pillar 302 extends substantially in the axial direction of the multi-degree-of-freedom force-torque sensor 100, i.e., in the XY plane of the coordinate system in the figure. The connecting portion 803 is connected to the second end 301b of the first pillar 301 and the second end 302b of the second pillar 302. According to this embodiment, due to the shape of the connecting portion 803, the first length L of the connecting portion 803 is larger than the height H in the axial direction of the multi-degree-of-freedom force-torque sensor 100, and the first length L is the length of the projection of the connecting portion 803 on a plane perpendicular to the axial direction of the multi-degree-of-freedom force-torque sensor 100 (i.e., the XY plane of the coordinate system in FIG. 7). A plurality of signal pairs (not shown) provided between the first rigid plate 10 and the second rigid plate 20 are arranged to detect the relative displacement of the first rigid plate 10 and the second rigid plate 20 in a plurality of directions. According to the present invention, the shapes of the connecting parts described above in conjunction with Figures 2 to 6 can also be applied to the multi-degree-of-freedom force / torque sensor described in conjunction with Figures 1 and 7. As long as it is possible to ensure that the first length L is greater than the height H, the modified examples of the connecting parts will not be described further.

[0024] Fig. 8 is a schematic cross-sectional view of the coupling portion 803 shown in Fig. 7. As shown in Fig. 8, contact end 3036 is provided on one side of the outer surface of coupling portion 303, and the other contact end 3038 is provided on the other side of the outer surface of coupling portion 303. Second end 301b of first pillar 301 is connected to coupling portion 303 via contact end 3036. Second end 302b of second pillar 302 is connected to coupling portion 303 via contact end 3038.

[0025] The reason why the connecting portion 303 has a relatively long first length L and a relatively short height H is that a majority of the connecting portion 303 extends in a direction perpendicular to the axial direction of the multi-degree-of-freedom force-torque sensor 100, and a minor portion extends in the axial direction of the multi-degree-of-freedom force-torque sensor 100. Thus, the connecting portion 303 contributes to the deflection in the Z direction due to the beam bending effect caused by its majority extending in the XY plane. The thinner and longer the majority of the connecting portion 303, the lower the stiffness in the Z direction. As shown in FIG. 7, for deflection in the X direction, the connecting portion 803 rotates mainly in the XY plane, and the stiffness of the connection between the connecting portion 803 and the pillar determines the resistance to the rotation. Specifically, for deflection in the Y direction, the connecting portion can (i) twist around the X axis and (ii) bend around the Z axis. Take the annular connecting portion shown in FIG. 7 as an example below. In this example, the annular connector includes a long annular section that contributes to beam deflection in the Y direction. The thicker the annular shape is in the Z direction and the thinner it is in the Y direction (i.e., the more the annular shape resembles a belt in the XZ plane), the more likely it is that the beam will bend in the Y direction (which corresponds to case (i) above). The thicker the annular shape is in the Y direction and the thinner it is in the Z direction (i.e., the more the annular shape resembles a belt in the XY plane), the more likely it is that the connector will twist or buckle around the Y direction and deflect (which corresponds to case (ii) above).

[0026] In addition, in each of the above examples, elastic members may be provided on the edges of the first and second rigid plates. This contributes to reducing the resistance to torque from the sensor and increasing the sensing range for torque. In simple terms, the position of the elastic member may affect the stiffness and sensing range of the multi-degree-of-freedom force-torque sensor. If the elastic member is placed toward the center position of the multi-degree-of-freedom force-torque sensor, the stiffness and sensing range in the Z axis will not be affected, but the torque performance around the X and Y axes will be reduced due to the shortening of the torque arm. This principle also applies to forces in the X and Y directions and torque around the Z axis.

[0027] It can be seen that the external forces and torques applied to the multi-degree-of-freedom force-torque sensor can be converted into local vertical and horizontal forces in the elastic member, and therefore the geometry of the first pillar, second pillar and linkage, as well as the interconnections between them, can be adjusted to accommodate those local forces.

[0028] In the above embodiments and examples, the signal pair may be arranged between the first rigid plate 10 and the second rigid plate 20, for example, and parallel to the elastic member 30. Each of the signal pairs includes a signal transmitter and a signal receiver. As an example, when six signal channels are installed, three of them may be arranged to sense the relative horizontal displacement of the elastic member 30, and the other three channels may be arranged to sense the relative vertical displacement of the elastic member 30. Thus, the forces applied to the sensor in the X, Y, and Z directions, and the torques around the X, Y, and Z axes can be calculated from the sensed information. It can be understood that the method of attaching the signal pair to the sensor can be determined by those skilled in the art based on the actual structure of the sensor, as long as the above-mentioned functions can be realized. The method and position of attaching the signal pair to the sensor are not limited to the disclosure of this specification.

[0029] FIG. 9 is a perspective view of a multi-degree-of-freedom force-torque sensor 200 according to an embodiment of the present invention. As shown in the figure, the sensor 200 includes a first rigid plate 11, a second rigid plate 22, and six elastic members 33. The six elastic members 33 are located between the first rigid plate 11 and the second rigid plate 22. Specifically, the six elastic members 33 are located on the outer edges of the first rigid plate 11 and the second rigid plate 22, and at the same time, the elastic members 33 are connected to the first rigid plate 11 and the second rigid plate 22, respectively. The elastic members 33 may be any of the elastic members described above with reference to the drawings. For brevity, the shape of the elastic members will not be described further. According to the example shown in FIG. 9, a signal pair is provided between the first rigid plate 11 and the second rigid plate 22, and a part of the signal pair is used to sense the local horizontal displacement of the elastic member 33, and another part of the signal pair is used to sense the local vertical displacement of the elastic member 33. The number of elastic members 33 is not limited to six. In practice, more or less than six elastic members may be used.

[0030] FIG. 10 is a diagram showing an exemplary robot 900 including a multi-degree-of-freedom force-torque sensor according to an embodiment of the present invention. As shown in FIG. 10, a plurality of links 901 and an end effector 902 are connected in series. The end effector 902 includes a multi-degree-of-freedom force-torque sensor for detecting an external force and torque applied to the end effector 902. Here, as the multi-degree-of-freedom force-torque sensor, the multi-degree-of-freedom force-torque sensor described above in conjunction with each example, for example, the multi-degree-of-freedom force-torque sensor 100 or 200, can be adopted. In some other embodiments, the multi-degree-of-freedom force-torque sensor can also be installed on other members of the robot 900. For example, the multi-degree-of-freedom force-torque sensor can be installed on a joint actuator (not labeled) of the robot 900.

[0031] The above examples only show some embodiments of the present invention, and the description is specific and detailed, but it should not be understood as limiting the patent scope of the invention. It should be noted that those skilled in the art can make some modifications and improvements without departing from the concept of the present invention, all of which are within the scope of protection of the present invention. Therefore, the scope of protection of the patent of the present invention should be based on the scope of the attached claims. [Explanation of symbols]

[0032] 10, 11 First rigid plate 20, 22 Second rigid plate 30, 33 Elastic member 100, 200 Force and torque sensor 301 First Pillar 301a 1st end 301b 2nd end 302 Second Pillar 302a 1st end 302b 2nd end 303 Connection 403 Connection section 501 Part 1 502a Part 2 502b Part 2 503 Connection part 601a First subpart 601b Second subpart 602 Part 2 603, 703, 803 connection part 900 Robot 901 Link 902 End Effector 3036, 3038 contact end

Claims

1. A multi-degree-of-freedom force / torque sensor, A first rigid plate; A second rigid plate; a plurality of resilient members connected between the first rigid plate and the second rigid plate, each of the resilient members comprising: a first pillar and a second pillar, a first end of the first pillar connected to the first rigid plate and a first end of the second pillar connected to the second rigid plate, the first pillar and the second pillar respectively extending substantially in an axial direction of the multi-degree-of-freedom force-torque sensor; a plurality of elastic members each including a coupling portion arranged to connect the first pillar and the second pillar, at least a portion of the coupling portion extending substantially in a direction perpendicular to an axial direction of the multi-degree-of-freedom force / torque sensor; a plurality of signal pairs disposed between the first rigid plate and the second rigid plate and configured to detect relative displacement between the first rigid plate and the second rigid plate in a plurality of directions; At least a portion of the coupling portion is higher than a second end of the first pillar in an axial direction of the multi-degree-of-freedom force-torque sensor, and / or at least a portion of the coupling portion is lower than a second portion of the second pillar in an axial direction of the multi-degree-of-freedom force-torque sensor. A multi-degree-of-freedom force / torque sensor characterized by:

2. The connection portion includes a pair of upper arms extending obliquely upward from opposing side surfaces of the connection portion, and a pair of lower arms extending obliquely downward from opposing side surfaces of the connection portion.

2. The multi-degree-of-freedom force / torque sensor according to claim 1.

3. The connecting portion has an annular shape, and an outer surface of the connecting portion is connected to the second end of the first pillar at one side and to the second end of the second pillar at the other side.

2. The multi-degree-of-freedom force / torque sensor according to claim 1.

4. the coupling portion has a semi-annular shape, one end of the coupling portion is connected to the second end of the first pillar and the other end of the coupling portion is connected to the second end of the second pillar.

2. The multi-degree-of-freedom force / torque sensor according to claim 1.

5. the connecting portion is shaped so that a first length thereof is greater than a height of the connecting portion in an axial direction of the multi-degree-of-freedom force-torque sensor, the first length being a length of a projection of the connecting portion on a plane perpendicular to the axial direction of the multi-degree-of-freedom force-torque sensor; 2. The multi-degree-of-freedom force / torque sensor according to claim 1.

6. Each of the plurality of signal pairs includes a signal transmitter and a signal receiver.

2. The multi-degree-of-freedom force / torque sensor according to claim 1.

7. the plurality of elastic members are disposed on edges of the first rigid plate and the second rigid plate in a circumferential direction of the multi-degree-of-freedom force / torque sensor; 2. The multi-degree-of-freedom force / torque sensor according to claim 1.

8. a contact end is provided on the one side of an outer surface of the connecting portion, and a second contact end is provided on the opposite side of the outer surface of the connecting portion, and the second end of the first pillar and the second end of the second pillar are connected to the contact end and the other contact end, respectively.

2. The multi-degree-of-freedom force / torque sensor according to claim 1.

9. A robot including a plurality of links connected in series and an end effector, the end effector including a multi-degree-of-freedom force / torque sensor according to any one of claims 1 to 8. A robot characterized by:

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