Flow path joint structure

Abstract

To provide a flow path joint structure for preventing the slide between a seal member and one or both of a first flange and a second flange.SOLUTION: A flow path joint structure 10 includes a cylindrical fastening member (a clamp 13) connecting a first flange 113 of a first joint 11 and a second flange 123 of a second joint 12, and a cylindrical seal member (a gasket 14) mounted across a first flow path hole 114 of the first flange 113 and a second flow path hole 124 of the second flange 123. The flow path joint structure 10 has a whirl stop part 30 for preventing the relative rotation of the first flange 113 and the second flange 123.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The invention of the present disclosure relates to a flow path joint structure. [Background technology]

[0002] Manufacturing equipment for semiconductors, liquid crystal panels, organic EL panels, and the like has piping paths through which fluids such as chemicals or ultrapure water flow. Fluid devices such as pumps, valves, filters, sensors, joints, or flow path blocks exist in part of the piping paths. In order to connect multiple fluid devices to each other in the piping paths, a flow path joint structure including a gasket is used (see Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2010-216507 A Summary of the Invention [Problem to be solved by the invention]

[0004] 14 is a perspective view showing a conventional flow path joint structure 90, which connects two fluid devices. The fluid device shown in FIG. 14 is a joint for connecting a tube 95. In other words, the flow path joint structure 90 connects a first joint 91 and a second joint 92. The flow path joint structure 90 has a clamp (fastening member) 93 and a gasket (sealing member) 94.

[0005] The clamp 93 connects a first flange 96 of the first joint 91 and a second flange 98 of the second joint 92 by sandwiching them in the axial direction. The gasket 94 is attached across a first flow passage hole 97 of the first flange 96 and a second flow passage hole 99 of the second flange 98. The gasket 94 is attached to the first flange 96 and the second flange 98 by press fitting, and provides a seal between the first flange 96 and the second flange 98.

[0006] The first joint 91 has a joint body 911 and a nut 912. The tube 95 is connected to the first joint 91 by tightening the nut 912 to a male thread portion 911a provided on the outer circumferential surface of the joint body 911. The tube 95 is connected in a state in which the gasket 94 is mounted between the first flange 96 and the second flange 98 and the first joint 91 and the second joint 92 are connected by the clamp 93.

[0007] When the nut 912 is rotated to connect the tube 95 , a rotational force in the same direction as the nut 912 is generated in the joint body 911 , and eventually the joint body 911 tries to rotate together with the nut 912 . The second joint 92 may be connected to, for example, another fluid device and may be immobile. For this reason, when the joint body 911 rotates with the rotation of the nut 912, slippage occurs between the gasket 94 and one or both of the first flange 96 and the second flange 98.

[0008] This slippage can damage the gasket 94 and generate wear debris. If the gasket 94 is damaged, the sealing performance will decrease. The wear debris becomes particles, which can adversely affect the quality of semiconductors, for example, in the case of semiconductor manufacturing. Therefore, an object of the present disclosure is to provide a flow path joint structure in which slippage does not occur between a seal member and one or both of a first flange and a second flange. [Means for solving the problem]

[0009] The flow path fitting structure of the present disclosure includes a cylindrical fastening member that connects a first flange of a first fluid device and a second flange of a second fluid device, and a cylindrical sealing member that is attached across a first flow path hole of the first flange and a second flow path hole of the second flange, and has an anti-rotation portion that prevents relative rotation between the first flange and the second flange. Effect of the Invention

[0010] According to the flow path joint structure of the present disclosure, it is possible to prevent slippage between the seal member and one or both of the first flange and the second flange, thereby preventing the seal member from being damaged by slippage and preventing the generation of wear powder due to slippage. [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 is a perspective view showing an example of a flow path joint structure. [Diagram 2] FIG. 2 is an exploded perspective view of the fluid coupling structure shown in FIG. [Diagram 3] FIG. 3 is a cross-sectional view showing a connection portion between a first joint and a second joint by a clamp. [Figure 4] FIG. 4 is a perspective view of a first joint, a clamp, and a gasket in a connected state with a second joint. [Diagram 5] FIG. 5 is a perspective view illustrating a second embodiment of the flow path joint structure. [Figure 6] FIG. 6 is a perspective view illustrating a second embodiment of the flow path joint structure. [Figure 7] FIG. 7 is a perspective view showing a modified example of the gasket. [Figure 8] FIG. 8 is a perspective view illustrating a third embodiment of the flow path joint structure. [Figure 9] FIG. 9 is a perspective view illustrating a third embodiment of the flow path joint structure. [Figure 10] FIG. 10 is an explanatory diagram of the clamp. [Figure 11] FIG. 11 is an explanatory diagram of the clamp. [Figure 12] FIG. 12 is an explanatory diagram of the clamp. [Figure 13] FIG. 13 is an explanatory diagram of a flow path joint structure to which a fluid device other than a joint is to be connected. [Figure 14] FIG. 14 is a perspective view showing a conventional flow path joint structure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] <Summary of the embodiment of the present disclosure> Below, an overview of the embodiments of the present disclosure will be listed and described. (1) The flow path fitting structure of the present disclosure includes a cylindrical fastening member that connects a first flange of a first fluid device and a second flange of a second fluid device, and a cylindrical sealing member that is attached across a first flow path hole of the first flange and a second flow path hole of the second flange, and has an anti-rotation portion that prevents relative rotation between the first flange and the second flange.

[0013] According to the flow path joint structure having the above configuration, even if a rotational force is applied to the first flange, the first flange does not rotate relative to the second flange due to the anti-rotation portion, and therefore the seal member does not slip between the first flange and / or the second flange.

[0014] (2) Preferably, the anti-rotation portion has a contact surface that comes into contact with a portion of the first flange and a portion of the second flange in a circumferential direction. With the above configuration, the contact surface of the anti-rotation portion contacts a portion of the first flange and a portion of the second flange from the circumferential direction, so that even if a rotational force is applied to the first flange, the first flange will not rotate relative to the second flange.

[0015] (3) In the fluid coupling structure of (1) or (2), preferably, the first flange and the second flange each have an outer uneven portion, and the fastening member has an inner uneven portion that fits into the outer uneven portion as the anti-rotation portion. According to the above-mentioned configuration, even if a rotational force is applied to the first flange, the rotational force is transmitted to the second flange through the fastening member, and relative rotation between the first flange and the second flange is prevented, so that slippage does not occur in the seal member between the first flange and the second flange.

[0016] (4) In the flow path fitting structure of (3), preferably, the outer uneven portion is provided on an outer peripheral surface of the first flange and an outer peripheral surface of the second flange, and the inner uneven portion is provided on an inner peripheral surface of the fastening member. According to the above configuration, by attaching the fastening member from the outer circumferential sides of the first flange and the second flange, a configuration is obtained in which the inner concave-convex portion and the outer concave-convex portion fit together.

[0017] (5) In the flow path joint structure of (3) or (4) above, the inner concave-convex portion is preferably not in contact with the seal member. According to the above-described configuration, when a rotational force is applied to the first flange, the rotational force is transmitted to the second flange through the fastening member, but is not easily transmitted to the seal member. In other words, no load is applied to the seal member.

[0018] (6) In the flow path fitting structure of (1) or (2), preferably, each of the first flange and the second flange has an end face uneven portion on a flange mating surface, and the sealing member has a lateral uneven portion that fits into the end face uneven portion as the anti-rotation portion. According to the above-mentioned configuration, even if a rotational force is applied to the first flange, the rotational force is transmitted to the second flange through the seal member, and relative rotation between the first flange and the second flange is prevented, so that slippage does not occur in the seal member between the first flange and the second flange.

[0019] (7) In the flow path joint structure of (6) above, preferably, the first flange and the second flange are not in contact with each other at the flange mating surfaces. According to the above configuration, it is possible to prevent poor connection caused by unnecessary interference between the first flange and the second flange.

[0020] (8) In the flow path joint structure of (1) or (2), preferably, the first flange has a first recess on an outer periphery, the second flange has a second recess on an outer periphery, and the flow path joint structure has a connecting member that fits into both the first recess and the second recess as the anti-rotation portion. According to the above-mentioned configuration, even if a rotational force is applied to the first flange, the rotational force is transmitted to the second flange through the connecting member, which is separate from the fastening member and the sealing member, and relative rotation between the first flange and the second flange is prevented, so that slippage does not occur in the sealing member between the first flange and the second flange.

[0021] (9) In the flow path joint structure of (8) above, the connecting member is preferably not in contact with the sealing member. According to the above-described configuration, when a rotational force is applied to the first flange, the rotational force is transmitted to the second flange through the connecting member, but is not easily transmitted to the sealing member, that is, no load is applied to the sealing member.

[0022] (10) In the flow path joint structures of (1) to (9), the sealing member has a cylindrical portion having a communicating hole connecting the first flow path hole and the second flow path hole, and a circular portion extending radially outward from the cylindrical portion, the fastening member has a semicircular first member and a semicircular second member that can be separated and joined to the first member, the first member has a first groove on an inner peripheral side thereof into which a part of the circular portion fits, and the second member has a second groove on an inner peripheral side thereof into which the other part of the circular portion fits.

[0023] According to the above configuration, the fastening member can function as a jig for removing the seal member from the first flange or the second flange. In other words, when the fastening member is removed to separate the first flange and the second flange, the seal member may be left behind on one of the first flange and the second flange. The seal member can be removed by fitting the first groove and the second groove of the fastening member into the annular portion of the seal member and pulling the fastening member.

[0024] <Details of the embodiment of the present disclosure> Hereinafter, the details of the embodiments of the present disclosure will be described with reference to the drawings. Note that at least some of the embodiments described below may be combined in any combination.

[0025] [Overall configuration of fluid coupling structure] Fig. 1 is a perspective view showing an example of a fluid joint structure. Fig. 2 is an exploded perspective view of the fluid joint structure shown in Fig. 1. The fluid joint structure 10 connects two fluid devices. The fluid device shown in Figs. 1 and 2 is a joint for connecting a tube 7. The fluid joint structure 10 connects a first joint 11 and a second joint 12.

[0026] The flow path joint structure 10 connects the first joint 11 and the second joint 12, and also seals (hermetically seals) between the first joint 11 and the second joint 12. To this end, the flow path joint structure 10 has a clamp 13 as a fastening member and a gasket 14 as a sealing member. The first joint 11 and the second joint 12 are connected by the clamp 13. The gasket 14 seals between the first joint 11 and the second joint 12. Specific configurations of the clamp 13 and the gasket 14 will be described later.

[0027] [First joint 11 and second joint 12] The first joint 11 has a first joint body 111 and a first nut 112. The first nut 112 is fastened to a male thread portion 111a provided on the outer circumferential surface of the first joint body 111. As a result, the first tube 7 on the left in FIG. 1 is connected to the first joint 11 in a state where it is inserted into the first joint body 111. The first joint body 111 has a first flange 113 at its end (see FIG. 3). FIG. 3 is a cross-sectional view showing a connection portion between the first joint 11 and the second joint 12 by the clamp 13. The first joint body 111 has a first passage hole 114 therein. The first flange 113 has a passage hole 113a therein. The passage hole 113a is a part of the first passage hole 114.

[0028] The first joint 11 shown in Figures 1 and 2 is a T-joint. The first joint 11 has a first branched portion 115 that intersects with the first joint body 111, and a first branched nut 116. The first branched nut 116 is fastened to a male threaded portion 115a provided on the outer circumferential surface of the first branched portion 115. As a result, the first branched tube 8 at the upper left in Figure 1 is connected to the first joint 11 in a state where it is inserted into the first branched portion 115.

[0029] The second joint 12 has a second joint body 121 and a second nut 122. The second nut 122 is fastened to a male thread portion 121a provided on the outer circumferential surface of the second joint body 121. As a result, the second tube 7 on the right in FIG. 1 is connected to the second joint 12 in a state where it is inserted into the second joint body 121. The second joint body 121 has a second flange 123 at its end (see FIG. 3). The second joint body 121 has a second passage hole 124 therein. The second flange 123 has a passage hole 123a therein, and the passage hole 123a is a part of the second passage hole 124.

[0030] The second joint 12 shown in Figures 1 and 2 is a T-joint. The second joint 12 has a second branched portion 125 that intersects with the second joint body 121, and a second branched nut 126. The second branched nut 126 is fastened to a male threaded portion 125a provided on the outer circumferential surface of the second branched portion 125. As a result, the second branched tube 8 at the upper right in Figure 1 is connected to the second joint 12 in a state where it is inserted into the second branched portion 125.

[0031] The connection work between the first fitting 11 and the first tube 7 may be performed with the gasket 14 installed between the first flange 113 and the second flange 123, and the first fitting 11 and the second fitting 12 connected by the clamp 13. The operation of connecting the second joint 12 to the second tube 7 and the operation of connecting each of the second branch tubes 8 may be performed before or after the operation of connecting the first joint 11 to the first tube 7.

[0032] Here, the directions of the flow path joint structure 10 of the present disclosure will be defined. The first flow passage hole 114 and the second flow passage hole 124 are each a straight hole. As shown in Fig. 3, when the first joint 11 and the second joint 12 are connected to each other, the central axis of the first flow passage hole 114 and the central axis of the second flow passage hole 124 coincide with a common central axis C. The direction along the central axis C is defined as the "axial direction" of the flow passage joint structure 10. This axial direction includes a direction parallel to the central axis C. The direction perpendicular to the central axis C is defined as the "radial direction" of the flow passage joint structure 10. The direction along a circle centered on the central axis C is defined as the "circumferential direction" of the flow passage joint structure 10. The first joint 11 and the second joint 12 are positioned coaxially and aligned in the axial direction (see FIG. 1).

[0033] The first flange 113 (see FIG. 3) is an annular portion extending radially outward from an axial end of the first joint body 111. The end face of the first flange 113 on the second flange 123 side is a mating surface 113b provided along a plane perpendicular to the central axis C. The mating surface 113b is also called a flange mating surface.

[0034] The first flange 113 has a primary seal groove 171 and a secondary seal groove 172. The primary seal groove 171 is located at the axial end of the first flow path hole 114, and has an inclined shape that increases in diameter toward the second flange 123. The secondary seal groove 172 is an annular groove that is recessed from the mating surface 113b of the first flange 113 in the axial direction.

[0035] The second flange 123 is an annular portion extending radially outward from an axial end of the second joint body 121. The end face of the second flange 123 on the first flange 113 side is a mating surface 123b provided along a plane perpendicular to the central axis C. The mating surface 123b is also called a flange mating surface.

[0036] The second flange 123 has a primary seal groove 171 and a secondary seal groove 172. The primary seal groove 171 is located at the axial end of the second flow passage hole 124, and has an inclined shape that increases in diameter toward the first flange 113. The secondary seal groove 172 is an annular groove that is recessed in the axial direction from the mating surface 123b of the second flange 123. In this embodiment, the first flange 113 and the second flange 123 have the same shape.

[0037] [Gasket 14] The gasket 14 has a cylindrical portion 15 and an annular portion 17. The cylindrical portion 15 has a cylindrical communication hole 16 on its inner circumference, which connects the first flow passage hole 114 and the second flow passage hole 124. The annular portion 17 is a portion extending radially outward from the cylindrical portion 15. The annular portion 17 is interposed between a mating surface 113b of the first flange 113 and a mating surface 123b of the second flange 123.

[0038] The cylindrical portion 15 has a primary seal portion 18 on each side in the axial direction. The primary seal portion 18 protrudes toward the axial ends of the cylindrical portion 15 and has an overall annular shape. In a cross section including the central axis C as shown in Fig. 3, the primary seal portion 18 has a shape that tapers toward the axial end. The outer peripheral surface 181 of the primary seal portion 18 has a shape that matches the shape of the primary seal groove 171, and has an inclined shape that gradually reduces in diameter toward the axial end.

[0039] The gasket 14 shown in Fig. 3 has a secondary seal portion 19. The secondary seal portion 19 is a cylindrical portion extending from a part 15a of the cylindrical portion 15 on both sides in the axial direction. The gasket 14 is attached to the first flange 113 and the second flange 123 by press-fitting the primary seal portion 18 into the primary seal groove 171 and the secondary seal portion 19 into the secondary seal groove 172. The primary seal portions 18 on both axial sides are in close contact with the primary seal grooves 171 on both axial sides. One secondary seal portion 19 fits into one secondary seal groove 172, and the other secondary seal portion 19 fits into the other secondary seal groove 172.

[0040] As described above, the gasket 14 is a cylindrical sealing member, and is attached across the first flow path hole 114 in the first flange 113 and the second flow path hole 124 in the second flange 123. The gasket 14 is attached to the first flange 113 and the second flange 123 by press fitting, and provides a seal between the first flange 113 and the second flange 123.

[0041] [Clamp 13] The clamp 13 covers the first flange 113 and the second flange 123 from the outer periphery and pinches them in the axial direction, connecting the first joint 11 and the second joint 12. The clamp 13 has a main body 131 that is cylindrical in an engaged state described below, and a protrusion 132 that is annular. The protrusion 132 protrudes radially inward from both axial sides of the main body 131. The main body 131 covers the first flange 113 and the second flange 123 from the radial outside. The pair of protrusions 132 pinch and tighten the first flange 113 and the second flange 123 in the axial direction. The clamp 13 makes the first flange 113 and the second flange 123 inseparable in the radial and axial directions.

[0042] The clamp 13 of this embodiment (see FIG. 2) has a semicircular first member 21 and a semicircular second member 22. The first member 21 and the second member 22 are separable and connectable. The first member 21 and the second member 22 are connected by a hinge 23, and an end 211 of the first member 21 and an end 221 of the second member 22 are separable. The end 211 of the first member 21 has a first engagement portion 212, and the end 221 of the second member 22 has a second engagement portion 222 that engages with the first engagement portion 212. In a state in which the first engagement portion 212 and the second engagement portion 222 are engaged with each other (hereinafter referred to as an "engaged state"; see FIG. 1), the end 211 of the first member 21 and the end 221 of the second member 22 are inseparable, and the clamp 13 forms a cylindrical shape.

[0043] When the first engagement portion 212 and the second engagement portion 222 are disengaged (hereinafter referred to as the "disengaged state"; see FIG. 2), the end portion 211 of the first member 21 and the end portion 221 of the second member 22 can be separated. In the disengaged state, the clamp 13 is attached to the first flange 113 and the second flange 123 with the gasket 14 interposed therebetween. When the clamp 13 is in the engaged state, the first flange 113 and the second flange 123 are connected (see FIG. 1) and cannot be separated in the radial or axial directions. This state will be referred to as the "connected state" below.

[0044] In this manner, clamp 13 can be tubular, and connects first flange 113 of first joint 11 and second flange 123 of second joint 12. Clamp 13 of the present embodiment is a fastening member that clamps and fastens first flange 113 and second flange 123 in the axial direction.

[0045] [Rotation prevention portion 30] The flow path joint structure 10 has a rotation prevention portion 30 that prevents relative rotation between the first flange 113 and the second flange 123 in the connected state (see FIG. 4). FIG. 4 is a perspective view of the first joint 11, the clamp 13, and the gasket 14 in the connected state with the second joint 12. FIG. 4 shows the clamp 13 in cross section, showing the first joint 11 side.

[0046] As shown in FIG. 2, the first flange 113 has an outer uneven portion 41, and the second flange 123 has an outer uneven portion 41. 2 (first embodiment), the outer uneven portion 41 of the first flange 113 is configured with a groove 411 provided in the outer circumferential surface 113c thereof. The groove longitudinal direction of the groove 411 is the axial direction, and the groove 411 penetrates the outer circumferential portion of the first flange 113 in the axial direction. The outer uneven portion 41 of the second flange 123 is formed of a groove 411 provided in the outer circumferential surface 123c thereof. The groove longitudinal direction of the groove 411 is the axial direction, and the groove 411 penetrates the outer circumferential portion of the second flange 123 in the axial direction.

[0047] A plurality of recessed grooves 411 are provided along the circumferential direction in each of the first flange 113 and the second flange 123. In the case of this embodiment, a plurality of (four) recessed grooves 411 are provided at equal intervals.

[0048] The clamp 13 has an inner uneven portion 42 that fits into the concave groove 411 (outer uneven portion 41) as the anti-rotation portion 30. In the case of the embodiment shown in Figs. 2 and 4, the inner uneven portion 42 is constituted by a ridge 421 provided on the inner peripheral surface 13c of the clamp 13. The ridge 421 (see Fig. 2) is provided on the inner peripheral surface 13c of the cylindrical main body portion 131, and is located between two protrusions 132. A plurality of ridges 421 are provided along the circumferential direction. In the present embodiment, the number of ridges 421 and concave grooves 411 is the same. The plurality (four) of ridges 421 are provided at equal intervals in the circumferential direction.

[0049] The number of ridges 421 and the number of recessed grooves 411 may be the same, or the number of recessed grooves 411 may be greater than the number of ridges 421. For example, there may be one ridge 421 and multiple (four) recessed grooves 411. In this configuration, or when the number of ridges 421 and the recessed grooves 411 are the same and arranged in the same manner, the ridge 421 can fit into the recessed groove 411 even if the circumferential positions of the first joint 11 and the second joint 12 are changed by, for example, 90 degrees.

[0050] Due to the anti-rotation portion 30 having the above-described configuration, in the connected state, the ridge 421 is positioned across and fitted into the recessed groove 411 of the first flange 113 and the recessed groove 411 of the second flange 123. A gap may be provided between the ridge 421 and the recessed groove 411. When a rotational force in the circumferential direction is applied to the first flange 113 with respect to the second flange 123 which is in a state where it cannot rotate in the circumferential direction, the rotational force is transmitted to the second flange 123 through the clamp 13 having the ridge 421. This prevents the first flange 113 and the second flange 123 from rotating relative to each other. As a result, the gasket 14 between the first flange 113 and the second flange 123 does not slip.

[0051] In this embodiment, the convex rib 421 has a rectangular parallelepiped shape, and the concave groove 411 has a rectangular cross section. The convex rib 421 has contact surfaces 31 on both sides in the circumferential direction. The contact surfaces 31 come into contact with the groove side surface 32 of the concave groove 411, which is a part of the first flange 113, and the groove side surface 32 of the concave groove 411, which is a part of the second flange 123, from the circumferential direction. The convex rib 421 having such contact surfaces 31 can provide a configuration in which the first flange 113 does not rotate relative to the second flange 123 even if a rotational force is applied to the first flange 113. Conversely, when a rotational force is applied to second flange 123 , ridge 421 having contact surface 31 prevents second flange 123 from rotating relative to first flange 113 . In other words, the protruding strip 421 prevents the first joint 11 and the second joint 12 from rotating relative to each other.

[0052] 4, in the connected state, the ridges 421 (inner uneven portion 42) of the clamp 13 are located radially outward of the gasket 14. Therefore, the ridges 421 are not in contact with the gasket 14. As described above, when a rotational force is applied to first flange 113, the rotational force is transmitted to second flange 123 through clamp 13. However, since ridge 421 is not in contact with gasket 14, the rotational force is not easily transmitted to gasket 14. In other words, no load is applied to gasket 14.

[0053] 2, clamp 13 can be attached from the outer circumferential sides of first flange 113 and second flange 123. When clamp 13 is attached from the outer circumferential sides of first flange 113 and second flange 123, convex rib 421 and concave groove 411 can fit together.

[0054] The arrangement of the ridges 421 and the grooves 411 may be reversed. That is, although not shown, each of the first flange 113 and the second flange 123 may have a ridge as the outer uneven portion 41, and the clamp 13 may have a groove as the inner uneven portion 42 into which the ridges fit.

[0055] [Second form] 5 and 6 are perspective views for explaining a second embodiment of the flow path joint structure 10. Fig. 5 shows a state in which the gasket 14 has been removed from the first joint 11. Fig. 6 shows a state in which the gasket 14 is attached to the first joint 11, but the clamp 13 has been removed. In Figs. 5 and 6, the second joint 12 connected to the first joint 11 is omitted in order to explain the anti-rotation portion 30.

[0056] As shown in Fig. 6, the clamp 13 has a semicircular first member 21 and a semicircular second member 22. The first member 21 and the second member 22 can be separated and joined by a hinge 23. The clamp 13 can be tubular, and connects a first flange 113 of the first joint 11 and a second flange 123 of the second joint 12 (not shown). The clamp 13 is a fastening member that clamps the first flange 113 and the second flange 123 in the axial direction and fastens them together. In this respect, the clamp 13 of the second embodiment is the same as the clamp 13 of the first embodiment shown in Figs. 1 to 4.

[0057] The clamp 13 of the second form differs from the clamp 13 of the first form (see FIG. 2) in that it does not have a protruding rib 421. Otherwise, the configuration of the second form is the same as the configuration of the first form. Since the clamp 13 of the second form does not have a protruding rib 421, its inner peripheral surface 13c is a smooth surface.

[0058] The first flange 113 of the second embodiment differs from the first flange 113 of the first embodiment in that it has an end face uneven portion 51 on a mating surface 113b instead of the outer uneven portion 41. In other respects, the configuration of the second embodiment is the same as the configuration of the first embodiment. 5 and 6, the end surface uneven portion 51 of the first flange 113 is configured with a groove 511 provided in the mating surface 113b. The groove longitudinal direction of the groove 511 is the radial direction, and the groove 511 penetrates the annular end portion 113e including the mating surface 113b in the radial direction.

[0059] In the second embodiment, the configuration of the first flange 113 is the same as the configuration of the second flange 123. That is, although not shown, the second flange 123 has an end surface uneven portion 51 on its mating surface 123b. As with the first flange 113, although not shown, the end surface uneven portion 51 of the second flange 123 is formed by a groove provided on the mating surface. A plurality of recessed grooves 511 are provided along the circumferential direction in each of the first flange 113 and the second flange 123. In the case of this embodiment, a plurality of (four) recessed grooves 511 are provided at equal intervals.

[0060] The gasket 14 in the second embodiment is different from the gasket 14 in the first embodiment (see FIG. 2) in that the annular portion 17 is different. In other respects, the configuration of the second embodiment is the same as that of the first embodiment. The specific configuration of gasket 14 will be explained with reference to Figure 3. The second form of gasket 14 is a cylindrical sealing member that is attached across first flow path hole 114 in first flange 113 and second flow path hole 124 in second flange 123.

[0061] In the second embodiment, the gasket 14 has a lateral uneven portion 52 that fits into the recessed groove 511 (end surface uneven portion 51) as the anti-rotation portion 30. In the embodiment shown in Fig. 5 and Fig. 6, the lateral uneven portion 52 is formed by a protrusion (protrusion piece) 521 that protrudes radially outward from the outer circumferential surface 15b of the cylindrical portion 15 of the gasket 14. A plurality of protrusions 521 are provided along the circumferential direction. In the present embodiment, the number of protrusions 521 is the same as the number of recessed grooves 511. The plurality (four) of protrusions 521 are provided at equal intervals in the circumferential direction.

[0062] In the case of the second embodiment shown in FIG. 5, the horizontal uneven portion 52 formed by the protrusions 521 can be said to correspond to a configuration in which the annular portion 17 shown in FIG. 2 is intermittent in the circumferential direction. 5, the multiple protrusions 521 are positioned apart in the circumferential direction and are independent of each other. However, although not shown, the multiple protrusions 521 may be partially connected. In this case, however, the recessed groove 511 has a shape that matches the shape of the protrusions 521.

[0063] As a modified example of the lateral uneven portion 52 of the gasket 14 that serves as the anti-rotation portion 30, as shown in Fig. 7, a protrusion 521 may be provided on the annular side surface 173 of the annular portion 17 facing in the axial direction so as to protrude in the axial direction. This protrusion 521 fits into the recessed groove 511 (see Fig. 5). The protrusion 521 may be provided so as to protrude in the axial direction from the annular side surface 173 of the annular portion 17, and the lateral uneven portion 52 may be constituted by the protrusion 521.

[0064] 5 to 7, the first flange 113 has an end surface uneven portion 51 (groove 511) on its mating surface 113b, and the second flange 123 has an end surface uneven portion 51 (groove 511) on its mating surface 123b. The gasket 14 has a lateral uneven portion 52 (protrusion 521) as the anti-rotation portion 30. The lateral uneven portion 52 (protrusion 521) fits into the end surface uneven portions 51 (groove 511) of both the first flange 113 and the second flange 123. A gap may be provided between the protrusion 521 and the groove 511.

[0065] When a rotational force is applied to the first flange 113 with respect to the second flange 123, which is unable to rotate in the circumferential direction in the connected state, due to the anti-rotation portion 30 having the above-described configuration, the rotational force is transmitted to the second flange 123 through the gasket 14 having the protrusion 521. As a result, relative rotation between the first flange 113 and the second flange 123 is prevented. Therefore, slippage does not occur in the gasket 14 between the first flange 113 and the second flange 123.

[0066] The protrusion 521 has contact surfaces 31 on both circumferential sides thereof. The contact surfaces 31 come into contact with a groove side surface 512 of the recessed groove 511 that is a part of the first flange 113 and a groove side surface 512 of the recessed groove 511 that is a part of the second flange 123 from the circumferential direction. By virtue of the protrusion 521 having such contact surfaces 31, a configuration is obtained in which the first flange 113 does not rotate relative to the second flange 123 even if a rotational force is applied to the first flange 113. Conversely, when a rotational force is applied to second flange 123 , protrusion 521 having contact surface 31 prevents second flange 123 from rotating relative to first flange 113 . In other words, the protrusion 521 prevents the first joint 11 and the second joint 12 from rotating relative to each other.

[0067] In the second embodiment, similarly to the first embodiment shown in Fig. 3, the first flange 113 and the second flange 123 are in a non-contact state over the entire circumference at the mating surfaces 113b and 123b. The first flange 113 and the second flange 123 are also in a non-contact state between two protrusions 521 adjacent in the circumferential direction (see Figs. 5 and 6). With this configuration, it is possible to prevent the first flange 113 and the second flange 123 from interfering with each other unnecessarily and causing poor connection by the clamp 13.

[0068] When gasket 14 has an annular portion 17 (see FIG. 7) and protrusions 521 are provided on annular portion 17 as horizontal uneven portion 52, the arrangement of protrusions 521 and recessed grooves 511 on first flange 113 and second flange 123 sides may be reversed. In other words, first flange 113 and second flange 123 may each have a protrusion as end face uneven portion 51, and gasket 14 (annular portion 17 in the case of the embodiment in FIG. 7) may have, as horizontal uneven portion 52, a recessed groove into which the protrusion fits.

[0069] [Third form] 8 and 9 are perspective views illustrating a third embodiment of the flow path joint structure 10. Fig. 8 is an exploded perspective view, and Fig. 9 shows a state in which the gasket 14 is installed between the first flange 113 and the second flange 123, but the clamp 13 is removed. The clamp 13 in the third embodiment is the same as the clamp 13 in the second embodiment shown in Fig. 6. The same components in the clamp 13 shown in Fig. 8 and the clamp 13 shown in Fig. 6 are denoted by the same reference numerals. The description of the clamp 13 will be omitted here.

[0070] As shown in Fig. 8, the first flange 113 has a first recess 61 on its outer periphery, and the second flange 123 has a second recess 62 on its outer periphery. In the third embodiment, the first recess 61 is formed by a groove provided on the outer periphery surface 113c of the first flange 113. The groove longitudinal direction of the groove is the axial direction, and the groove penetrates the outer periphery of the first flange 113 in the axial direction. The second recess 62 is formed by a groove provided on the outer periphery surface 123c of the second flange 123. The groove longitudinal direction of the groove is the axial direction, and the groove penetrates the outer periphery of the second flange 123 in the axial direction. The configurations of the first flange 113 and the second flange 123 are the same as the configurations of the first flange 113 and the second flange 123 of the first embodiment shown in FIG.

[0071] In the third embodiment, the flow path joint structure 10 has a connecting member 63 that fits into both the first recess 61 and the second recess 62 as the anti-rotation portion 30. The flow path joint structure 10 has the connecting member 63 that is separate from the clamp 13 and the gasket 14. The connecting member 63 is a columnar member, and in the third embodiment shown in Fig. 8, has a rectangular parallelepiped shape. The number of connecting members 63 is the same as the number of first recesses 61, but may be less than the number of first recesses 61.

[0072] Due to the anti-rotation portion 30 having the above-described configuration, in the connected state, the connecting member 63 is positioned across and fitted between the first recess 61 of the first flange 113 and the second recess 62 of the second flange 123. A gap may be provided between the connecting member 63 and the first recess 61 and between the connecting member 63 and the second recess 62. The connecting member 63 is covered from both radial and axial sides by the clamp 13 and will not fall off.

[0073] When a rotational force in the circumferential direction is applied to the first flange 113 with respect to the second flange 123 which is in a state where it cannot rotate in the circumferential direction, the rotational force is transmitted to the second flange 123 through the connecting member 63. Therefore, relative rotation between the first flange 113 and the second flange 123 is prevented. Therefore, slippage does not occur in the gasket 14 between the first flange 113 and the second flange 123.

[0074] The connecting member 63 has contact surfaces 31 on both circumferential sides thereof. The contact surfaces 31 come into contact with the groove side surface 32 of the first recess 61, which is a part of the first flange 113, and the groove side surface 32 of the second recess 62, which is a part of the second flange 123, from the circumferential direction. By using the connecting member 63 having such contact surfaces 31, a configuration is obtained in which the first flange 113 does not rotate relative to the second flange 123 even if a rotational force is applied to the first flange 113. Conversely, when a rotational force is applied to the second flange 123 , the second flange 123 does not rotate relative to the first flange 113 due to the connecting member 63 having the contact surface 31 . In other words, the connecting member 63 prevents the first joint 11 and the second joint 12 from rotating relative to each other.

[0075] In the connected state, the connecting member 63 is located radially outward of the gasket 14. Therefore, the connecting member 63 is not in contact with the gasket 14. As described above, when a rotational force is applied to first flange 113, the rotational force is transmitted to second flange 123 through connecting member 63. However, since connecting member 63 is not in contact with gasket 14, the rotational force is not easily transmitted to gasket 14. In other words, no load is applied to gasket 14.

[0076] [Removing gasket 14] As described above (see FIGS. 2, 6, and 8), each of the above-described forms of clamp 13 has first member 21 and second member 22, which can be separated and joined to each other. With this configuration, clamp 13 functions as a jig for removing gasket 14 from first flange 113 or second flange 123. To this end, as shown in Fig. 10, the first member 21 has a first groove 21r on its inner circumferential side, and the second member 22 has a second groove 22r on its inner circumferential side. As shown in Fig. 11, a part of the annular portion 17 of the gasket 14 can be fitted into the first groove 21r, and the other part of the annular portion 17 can be fitted into the second groove 22r.

[0077] Each of the first member 21 and the second member 22 has semicircular arc-shaped protrusions 132 on both axial sides. A first groove 21r is provided in each of the pair of protrusions 132 of the first member 21, and a second groove 22r is provided in each of the pair of protrusions 132 of the second member 22. However, as shown in Fig. 11, the groove used for removing the gasket 14 is one of the two first grooves 21r and one of the two second grooves 22r.

[0078] The first groove 21r and the second groove 22r do not have to be grooves that are continuous in the circumferential direction. The first groove 21r is provided partially in an end portion 211 of the first member 21 that becomes a mating surface with the second member 22. The second groove 22r is provided partially in an end portion 221 of the second member 22 that becomes a mating surface with the first member 21.

[0079] A description will now be given of the function of the clamp 13 as the jig. There are cases where the flow path joint structure 10, the first joint 11, or the second joint 12 need to be disassembled for, for example, maintenance. For disassembly, the clamp 13 is removed from the connected state (see FIG. 1) to separate the first flange 113 and the second flange 123. Then, the gasket 14 may be left on one of the first flange 113 and the second flange 123. FIG. 10 shows the state in which the gasket 14 is left on the second flange 123.

[0080] The first member 21 and the second member 22 are connected by a hinge 23, and the distance between the end 211 of the first member 21 and the end 221 of the second member 22 is freely changeable. The first groove 21r and the second groove 22r of the removed clamp 13 are fitted into the annular portion 17 of the gasket 14 (see FIG. 11). The gasket 14 can be removed from the second joint 12 (second flange 123) by pulling the clamp 13 with an axial component while pushing the first member 21 and the second member 22 in a direction in which they contract in diameter (see FIG. 12).

[0081] At this time, of the side surface of clamp 13, a portion 24 located on the hinge 23 side comes into contact with mating surface 123b of second flange 123. The position of contact (portion 24) serves as a fulcrum, enabling clamp 13 to easily pull out gasket 14 from second flange 123.

[0082] As described above, the configuration in which clamp 13 functions as a jig for removing gasket 14 from first flange 113 or second flange 123 does not necessarily require anti-rotation portion 30 described in the first to third embodiments. In other words, the flow path joint structure 10 according to the invention disclosed for reference (reference invention) that does not have anti-rotation portion 30 is as follows.

[0083] In other words, the flow path joint structure 10 according to the reference invention comprises a cylindrical fastening member (clamp 13) that connects a first flange 113 of a first fluid device and a second flange 123 of a second fluid device, and a cylindrical sealing member (gasket 14) that is attached across a first flow path hole 114 of the first flange 113 and a second flow path hole 124 of the second flange 123, The sealing member (gasket 14) has a cylindrical portion 15 having a communication hole 16 connecting the first flow passage hole 114 and the second flow passage hole 124, and an annular portion 17 extending radially outward from the cylindrical portion 15, The fastening member (clamp 13) has a semicircular first member 21 and a semicircular second member 22 that can be detachably connected to the first member 21. The first member 21 has a first groove 21r on the inner circumferential side of the first member 21 into which a part of the annular portion 17 fits. The second member 22 has a second groove 22r on the inner circumferential side thereof, into which the other part of the annular portion 17 fits.

[0084] [Another form of flow path joint structure 10] In the first, second and third embodiments, the fluid device to be connected by the flow path joint structure 10 is a joint (first joint 11, second joint 12). The fluid device to be connected may be something other than a joint, and may be a pump, a valve, a filter, a sensor, a flow path block or the like. FIG. 13 is an explanatory diagram of the flow path joint structure 10 to which a fluid device other than a joint is to be connected. The fluid device shown in FIG. 13 is a valve, and the flow path joint structure 10 connects a first valve 81 and a second valve 82.

[0085] The first valve 81 has a first flange 113 that is the same as the configuration shown in Fig. 3, and the second valve has a second flange 123 that is the same as the configuration shown in Fig. 3. The first flange 113 and the second flange 123 are connected by a flow path joint structure 10 that has a gasket 14, a clamp 13, and an anti-rotation portion 30. The anti-rotation portion 30 prevents relative rotation between the first flange 113 and the second flange 123. Even in this case, the gasket 14, the clamp 13, and the anti-rotation portion 30 have the configurations of the first configuration, the second configuration, or the third configuration.

[0086] [Various forms of flow path joint structure 10] As described above, the flow passage joint structure 10 of each of the above-mentioned embodiments includes the clamp 13, the gasket 14, and the anti-rotation portion 30. The clamp 13 is a cylindrical fastening member that connects a first flange 113 of a first fluid device (first fitting 11 or first valve 81) and a second flange 123 of a second fluid device (second fitting 12 or second valve 82). The gasket 14 is a cylindrical sealing member that is attached across a first flow passage hole 114 of the first flange 113 and a second flow passage hole 124 of the second flange 123 . The anti-rotation portion 30 prevents the first flange 113 and the second flange 123 from rotating relative to each other.

[0087] According to the flow path joint structure 10 having the above configuration, even if a rotational force is applied to the first flange 113, the first flange 113 does not rotate relative to the second flange 123 due to the anti-rotation portion 30. Therefore, the gasket 14 does not slip between one or both of the first flange 113 and the second flange 123. Therefore, the gasket 14 is not damaged by slippage, and the generation of wear powder due to slippage is prevented.

[0088] 〔others〕 2, the first flange 113 has the outer uneven portion 41 on the outer peripheral surface 113c, and the second flange 123 has the outer uneven portion 41 on the outer peripheral surface 123c. Although not shown, the outer uneven portion 41 may be provided on the side surface 113f opposite the mating surface 113b instead of the outer peripheral surface 113c, or may be provided on the side surface 123f opposite the mating surface 123b instead of the outer peripheral surface 123c. In this case, the clamp 13 has the inner uneven portion 42 on each of the side surfaces of the protrusions 132 on both sides, instead of the inner peripheral surface 13c of the main body portion 131.

[0089] In each of the above embodiments, the fastening member connecting the first flange 113 and the second flange 123 is the clamp 13 having the semicircular first member 21 and the semicircular second member 22 that can be separably connected to the first member 21. However, the fastening member may be in another form. The first member 21 and the second member 22 are connected at one part by a hinge 23 and are separable at the other part, but the clamp 13 may have a configuration other than that shown in the drawings.

[0090] In each of the above embodiments, the sealing member attached across the first flow path hole 114 of the first flange 113 and the second flow path hole 124 of the second flange 123 is described as being a gasket 14 having a tubular portion 15 and an annular portion 17, but the sealing member may be in other forms.

[0091] The above-described embodiment is illustrative in all respects and is not restrictive. The scope of the present invention is indicated by the claims rather than the above-described embodiment, and includes all modifications within the scope equivalent to the configurations described in the claims. [Explanation of symbols]

[0092] 10 Flow path joint structure 11 First joint 12 Second joint 13 Clamp (fastening member) 13c Inner surface 14 Gasket (sealing material) 15 Cylindrical section 16 Communication hole 17 Circular Ring 21 First member 21r First groove 22 Second member 22r second groove 30 Anti-rotation part 31 Contact surface 41 Outer uneven part 42 Inner uneven part 51 End face unevenness 52 Horizontal uneven part 61 First recess 62 Second recess 63 Connecting members 113 First flange 113b Mating surface (flange mating surface) 113c Outer surface 114 First channel hole 123 Second flange 123b Mating surface (flange mating surface) 123c Outer surface 124 Second channel hole

Claims

1. a cylindrical fastening member that connects a first flange of the first fluid device and a second flange of the second fluid device; a cylindrical seal member attached across a first flow passage hole of the first flange and a second flow passage hole of the second flange; having A rotation prevention portion that prevents relative rotation between the first flange and the second flange, A flow path joint structure having the above structure.

2. The flow passage joint structure according to claim 1 , wherein the anti-rotation portion has a contact surface that comes into contact with a part of the first flange and a part of the second flange in a circumferential direction.

3. Each of the first flange and the second flange has an outer uneven portion, The flow passage joint structure according to claim 1 or 2, wherein the fastening member has, as the anti-rotation portion, an inner uneven portion that fits into the outer uneven portion.

4. The outer uneven portion is provided on an outer circumferential surface of the first flange and an outer circumferential surface of the second flange, The inner uneven portion is provided on an inner circumferential surface of the fastening member. The flow path joint structure according to claim 3 .

5. The inner uneven portion is not in contact with the seal member. The flow path joint structure according to claim 3 .

6. Each of the first flange and the second flange has an end surface uneven portion on a flange mating surface, The seal member has a horizontal uneven portion as the anti-rotation portion, the horizontal uneven portion being fitted into the end surface uneven portion. The flow path joint structure according to claim 1 or 2.

7. The first flange and the second flange are in a non-contact state at the flange mating surfaces. The flow path joint structure according to claim 6.

8. the first flange has a first recess on an outer periphery, and the second flange has a second recess on an outer periphery; The anti-rotation portion includes a connecting member that fits into both the first recess and the second recess. The flow path joint structure according to claim 1 or 2.

9. The connecting member is not in contact with the sealing member. The flow path joint structure according to claim 8.

10. The seal member includes a cylindrical portion having a communication hole connecting the first flow passage hole and the second flow passage hole, and an annular portion extending radially outward from the cylindrical portion, The fastening member has a semicircular first member and a semicircular second member that is separably connectable to the first member, the first member has a first groove on an inner circumferential side of the first member into which a part of the annular portion fits, The second member has a second groove on an inner circumferential side of the second member into which the other portion of the annular portion fits. The flow path joint structure according to claim 1 or 2.

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