Decontamination system and decontamination method

Abstract

To provide a decontamination system capable of generating a decontamination gas after completing sealing operation.SOLUTION: A decontamination system 1 decontaminates a decontamination target space by generating a decontamination gas through the supply of a liquid agent to a reagent or a reaction position. The decontamination system 1 includes an operation device and a liquid agent supply portion (a liquid agent pump and a liquid agent tube 18). The operation device is disposed in the external space exterior to the decontamination target space and receives the liquid agent supply operation of an operator. The liquid agent supply portion is at least partially disposed in the decontamination target space, and by the liquid agent supply operation performed on the operation device, the liquid agent is supplied to the reagent or the reaction position arranged in the decontamination target space to generate the decontamination gas.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention mainly relates to a decontamination system that decontaminates a space to be decontaminated by using a decontamination gas. [Background technology]

[0002] Patent Document 1 discloses a generator that generates chlorine dioxide gas as a decontamination gas. The generator is placed in a space to be decontaminated. The generator includes a heater, a container placed on the heater, a tank, and a pinch nozzle. Pellet-shaped sodium chlorite is supplied to the container. An acidic liquid is stored in the tank. When an operator opens the pinch nozzle, the acidic liquid is supplied from the tank to the container. As a result, the acidic liquid is heated by the heater, promoting the reaction between the acidic liquid and sodium chlorite, and chlorine dioxide gas is generated. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 5944760 Summary of the Invention [Problem to be solved by the invention]

[0004] Here, when decontamination is performed, it is necessary to perform a sealing operation to seal the space to be decontaminated in order to prevent the decontamination gas from leaking outside the space to be decontaminated. Therefore, when using the generator of Patent Document 1, the sealing operation is completed after operating the heater of the generator placed in the space to be decontaminated and the pinch nozzle. In this case, since a reaction starts after the pinch nozzle operation, there is a possibility that the decontamination gas will be generated during the sealing operation. Therefore, measures against this are required.

[0005] The present invention has been made in view of the above circumstances, and a main object of the present invention is to provide a decontamination system capable of generating a decontamination gas after completing a sealing operation.

[0006] The problem to be solved by the present invention has been described above. Next, the means for solving this problem and the effects thereof will be described.

[0007] According to a first aspect of the present invention, there is provided a decontamination system having the following configuration. That is, the decontamination system generates a decontamination gas by supplying a liquid agent to a reactant or a reaction position, and decontaminates a space to be decontaminated. The decontamination system includes an operation device and a liquid agent supply unit. The operation device is disposed in an external space outside the space to be decontaminated, and receives a liquid agent supply operation by an operator. At least a portion of the liquid agent supply unit is disposed in the space to be decontaminated, and when the liquid agent supply operation is performed on the operation device, the liquid agent is supplied to the reactant or reaction position disposed in the space to be decontaminated, thereby generating the decontamination gas.

[0008] As a result, after the sealing work of the space to be decontaminated is completed, the operator simply supplies the liquid from the outside space, and the decontamination gas is generated. Therefore, there is no need to take measures against the occurrence of a situation in which decontamination gas is generated during the sealing work.

[0009] The decontamination system is preferably configured as follows: That is, the liquid supply unit is a liquid pump and a liquid tube. When the liquid supply operation is performed, the liquid pump delivers the liquid, and the liquid is supplied to the reactant or the reaction position via the liquid tube.

[0010] This makes it possible to supply the liquid agent to the reactant or reaction site from outside with a simple configuration.

[0011] The decontamination system is preferably configured as follows. That is, the decontamination system includes a fan filter unit arranged in the space to be decontaminated. The fan filter unit includes a main housing, a filter, a filter housing, a fan, and a fan housing. The main housing covers a space in which the reactant or reaction position is located. The filter removes unwanted materials contained in the decontamination gas. The filter housing covers the filter. The fan draws in gas from the space to be decontaminated and generates a flow that exhausts the drawn in gas and the decontamination gas into the space to be decontaminated. The fan housing covers the fan. The main housing, the filter housing, and the fan housing are connected so as not to move relative to each other.

[0012] This allows the generation of a flow of decontamination gas, making it possible to efficiently perform decontamination using the decontamination gas and remove unwanted substances contained in the decontamination gas. In addition, because the three housings are connected so that they cannot move relative to one another, it is unlikely that any of the housings will fall.

[0013] The decontamination system is preferably configured as follows: the main housing is formed with a gas inlet, the fan housing is formed with a gas outlet, the filter includes a pre-filter and a main filter, and the main housing, the pre-filter, the main filter, and the fan are arranged in this order.

[0014] As a result, the decontamination gas passes through the fan after passing through the pre-filter and the main filter, thereby reducing deterioration of the fan caused by the decontamination gas.

[0015] The decontamination system is preferably configured as follows: the decontamination system includes a connection panel disposed at the boundary between the space to be decontaminated and the external space, the connection panel being provided with a gas connection portion into which a gas tube for circulating gas in the space to be decontaminated is inserted or attached.

[0016] This makes it easy to arrange the gas tube, which needs to be arranged so as to pass through the boundary between the space to be decontaminated and the outside space.

[0017] The decontamination system is preferably configured as follows. That is, the decontamination system includes a connection panel arranged at the boundary between the space to be decontaminated and the external space. The connection panel is provided with a liquid connection section, a power connection section, and a gas connection section. A liquid tube for supplying the liquid is inserted into or attached to the liquid connection section. A cable for supplying power to an electrical device arranged in the space to be decontaminated is inserted into or attached to the power connection section. A gas tube for circulating gas in the space to be decontaminated is inserted into or attached to the gas connection section.

[0018] This makes it easy to arrange tubes and cables that need to pass through the boundary between the space to be decontaminated and the outside space, and reduces the effort required to seal the space to be decontaminated.

[0019] The decontamination system is preferably configured as follows: That is, the liquid connection part is a liquid connector that connects the liquid tube in the external space with the liquid tube in the space to be decontaminated. The power connection part is a power connector that connects the cable in the external space with the cable in the space to be decontaminated. The gas connection part is a gas connector to which the gas tube in the external space is connected. The boundary between the liquid connector and the connection panel, the boundary between the power connector and the connection panel, and the boundary between the gas connector and the connection panel are sealed.

[0020] This allows the connection to be completed simply by connecting the liquid tube, the cable, and the gas tube to the corresponding connectors, and further eliminates the need to seal the boundaries between the liquid tube, the cable, and the gas tube and the connection panel.

[0021] The decontamination system is preferably configured as follows. That is, a humidifier, a fan filter unit that generates a flow that diffuses the decontamination gas, and an adsorption / decomposition device that adsorbs the decontamination gas after decontamination are arranged in the space to be decontaminated. The operation device is provided with a first switch, a second switch, and a third switch. The first switch switches whether or not to supply power to the humidifier. The second switch switches whether or not to supply power to the fan filter unit. The third switch switches whether or not to supply power to the adsorption / decomposition device.

[0022] This allows four types of operations, including the supply of liquid, to be performed with a single operating device, simplifying operator operations.

[0023] In the decontamination system, it is preferable that a single multi-core cable is connected to the operating device, the multi-core cable spans the external space and the space to be decontaminated, and the multi-core cable branches out in the space to be decontaminated and is connected to the humidifier, the fan filter unit, and the adsorption and decomposition device, respectively.

[0024] This reduces the effort required for sealing the space to be decontaminated by using a multi-core cable that is arranged to span both the external space and the space to be decontaminated.

[0025] According to a second aspect of the present invention, the following decontamination method is provided. That is, a space to be decontaminated is decontaminated by generating a decontamination gas by supplying a liquid agent to a reactant or a reaction position. The decontamination method includes an operation step and a generation step. In the operation step, a liquid agent supply operation is performed on an operation device disposed in an external space outside the space to be decontaminated. In the generation step, the liquid agent is supplied to a reactant or a reaction position disposed in the space to be decontaminated by the operation step, thereby generating the decontamination gas.

[0026] As a result, after the sealing work of the space to be decontaminated is completed, the operator simply supplies the liquid from the outside space, and the decontamination gas is generated. Therefore, there is no need to take measures against the occurrence of a situation in which decontamination gas is generated during the sealing work. [Brief description of the drawings]

[0027] [Figure 1] FIG. 1 is a perspective view showing a state in which a safety cabinet is decontaminated using a decontamination system according to an embodiment of the present invention. [Diagram 2] Schematic diagram of the decontamination system. [Diagram 3] FIG. 2 is a perspective view of an operating device, a liquid pump, a liquid container, and a power supply box. [Figure 4] FIG. [Diagram 5] FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0028] Next, an embodiment of the present invention will be described with reference to the drawings.

[0029] First, a brief explanation of decontamination will be given. In this specification, decontamination is a process for reducing specific microorganisms. There are various types of specific microorganisms, but it refers to microorganisms with high resistance, such as Bacillus bacteria. In addition, microorganisms are a general term for bacteria, fungi, viruses, etc.

[0030] In the decontamination in this specification, a decontamination gas is used. A decontamination gas is a gas or fine particles for decontamination, and is a substance that can float and diffuse in the air. Therefore, even substances that are not strictly gaseous, such as smoke, or substances that are difficult to classify into three states, are included in the decontamination gas if they have the decontamination ability. In addition, since the decontamination gas has the property of reducing microorganisms with high resistance, it is basically harmful to the human body.

[0031] The space in which decontamination is performed is referred to as the "space to be decontaminated." The space to be decontaminated is, for example, a space in which microorganisms are handled, a space in which equipment for handling microorganisms is installed, or the space inside this type of equipment. Because the decontamination gas is harmful, the space to be decontaminated is clearly distinguished from other spaces. In this specification, the space outside the space to be decontaminated is referred to as the "external space." The space to be decontaminated and the external space are distinguished by a material that is impermeable to gas.

[0032] The space to be decontaminated in this embodiment is a space formed inside the safety cabinet 100 shown in FIG. 1. The device to be decontaminated is not limited to the safety cabinet 100, but may be a clean bench or other device that handles microorganisms. In addition, since the safety cabinet 100 includes openings, these openings are closed when decontamination is performed. In this embodiment, the openings of the safety cabinet 100 are closed by fitting the film 101 to the opening and fixing the film 101 with the tape 102. This makes it possible to seal the space to be decontaminated. In the following, the work of sealing the space to be decontaminated by attaching the film 101 or the like to the boundary between the space to be decontaminated and the outside space is referred to as a "sealing work".

[0033] Next, an overview of the decontamination system 1 will be described with reference to Figures 1 and 2. As shown in Figures 1 and 2, the decontamination system 1 includes various devices. These devices can be divided into devices to be placed in the space to be decontaminated and devices to be placed in the external space.

[0034] The devices arranged in the space to be decontaminated include a humidifier 2, a fan filter unit 3, an adsorption decomposition device 4, and a power supply box 5. The humidifier 2 humidifies the space to be decontaminated. The fan filter unit 3 generates a decontamination gas, removes unnecessary materials using a filter, and then sends out the decontamination gas using a fan. The decontamination gas used in this embodiment is chlorine dioxide gas. A method for generating chlorine dioxide gas will be described later. The adsorption decomposition device 4 adsorbs the decontamination gas after the decontamination is completed, and purifies the space to be decontaminated. In addition, the humidifier 2 humidifies the space to be decontaminated, thereby enhancing the decontamination effect of the decontamination gas. Note that the humidifier 2 is operated before the generation of the decontamination gas, and the operation of the humidifier 2 is stopped after the humidity reaches a predetermined level, thereby achieving the effect of enhancing the decontamination gas from the start of decontamination. The power supply box 5 supplies power to the humidifier 2, the fan filter unit 3, and the adsorption decomposition device 4.

[0035] The devices arranged in the external space include an operating device 12, a liquid pump 13, and a gas pump 21. The operating device 12 switches between operating and not operating the humidifier 2, the fan filter unit 3, and the adsorption / decomposition device 4 in response to an operator's operation. The liquid pump 13 supplies the liquid to the fan filter unit 3. When the liquid is supplied to the fan filter unit 3, a decontamination gas is generated according to a principle described below. The gas pump 21 circulates gas within the space to be decontaminated, thereby creating a flow of the decontamination gas and making the concentration and humidity of the decontamination gas uniform within the space to be decontaminated.

[0036] A connection panel 6 and an auxiliary panel 7 are arranged at the boundary between the space to be decontaminated and the external space. The connection panel 6 and the auxiliary panel 7 are components for reducing the effort of the sealing work. If the connection panel 6 and the auxiliary panel 7 were not present, it would be necessary to open holes in the film 101 and pass the tubes and cables through them. However, in order to prevent the decontamination gas from leaking from the gap between the film 101 and the tubes, etc., this gap needs to be tightly sealed. However, since the tubes and cables are flexible, the sealing work requires effort. Furthermore, if multiple tubes and cables are installed, it will require even more effort.

[0037] In this respect, by using the connection panel 6 of this embodiment, the sealing operation becomes easier. That is, the connection panel 6 is provided with a plurality of connectors. The gap between these connectors and the connection panel 6 is sealed. In addition, when a tube or cable is connected to the connector, the gap between the connector and the tube or the like is also sealed. Therefore, by forming an opening in the film 101 that is the same as the outline of the connection panel 6 or slightly smaller than the outline, and matching and sealing the opening of the film 101 with the connection panel 6, it becomes possible to seal a plurality of tubes or cables together. In addition, even if there is only one connector as in the auxiliary panel 7, the connector does not easily deform, so that the sealing operation is easier than sealing a flexible tube or cable.

[0038] In this embodiment, the humidifier 2, the fan filter unit 3, and the adsorption / decomposition device 4 can be controlled from the outside space using the operation device 12, so that decontamination can be started after the sealing work is completed. Therefore, no decontamination gas is generated during the sealing work, and therefore no countermeasures are required.

[0039] Next, each device will be described in detail. First, the supply box 11 will be described with reference to Figs.

[0040] As shown in Fig. 3, the supply box 11 is configured such that the operating device 12 and the liquid pump 13 are attached to a common housing 30 and integrated into one unit. As shown in Fig. 2, the supply box 11 is connected to a power source 104 via an input cable 14. This supplies power to the operating device 12 and the liquid pump 13. The power source 104 may be a power source provided in the facility or may be a portable power source.

[0041] The operating device 12 includes a first switch 31, a second switch 32, a third switch 33, and a pump switch 34. The first switch 31 is an operator that switches whether or not to supply power to the humidifier 2. The second switch 32 is an operator that switches whether or not to supply power to the fan filter unit 3. The third switch 33 is an operator that switches whether or not to supply power to the adsorption / decomposition device 4. The pump switch 34 is an operator that switches between operating and stopping the liquid agent pump 13.

[0042] A multi-core cable 15 is connected to the operating device 12. The multi-core cable 15 has three built-in electric wires corresponding to the humidifier 2, the fan filter unit 3, and the adsorption / decomposition device 4. The multi-core cable 15 is connected to a power connector 27 provided on the connection panel 6. The power connector 27 has a number of pins corresponding to the number of electric wires in the multi-core cable 15. The multi-core cable 15 is also provided in the space to be decontaminated, and this multi-core cable 15 connects the power connector 27 and the power supply box 5. Therefore, the multi-core cable 15 is provided across the external space and the space to be decontaminated. By using the multi-core cable 15, the number of members provided across the external space and the space to be decontaminated can be reduced. The multi-core cable 15 is also branched into three separate electric wires inside the power supply box 5, and each is connected to a first plug portion 41, a second plug portion 42, and a third plug portion 43.

[0043] An electric wire plug of the humidifier 2 is inserted into the first insertion portion 41. An electric wire plug of the fan filter unit 3 is inserted into the second insertion portion 42. An electric wire plug of the adsorption / decomposition device 4 is inserted into the third insertion portion 43. The operation device 12 and the power supply box 5 are connected via three individual electric wires built into the multi-core cable 15. Then, by operating the first switch 31, it is possible to switch whether or not to supply power to the first insertion portion 41 (in other words, whether to operate or stop the humidifier 2). By operating the second switch 32, it is possible to switch whether or not to supply power to the second insertion portion 42 (in other words, whether to operate or stop the fan filter unit 3). By operating the third switch 33, it is possible to switch whether or not to supply power to the third insertion portion 43 (in other words, whether to operate or stop the adsorption / decomposition device 4).

[0044] As described above, the operator can switch between operating and stopping the humidifier 2, the fan filter unit 3, and the adsorption / decomposition device 4 by operating each switch of the operation device 12. In other words, even after the sealing operation is completed, the above switching can be performed while maintaining the sealed state.

[0045] The liquid pump 13 is connected to the liquid container 17 via a liquid tube 18. Furthermore, the liquid pump 13 is connected to a liquid connector 28 provided on the connection panel 6 via the liquid tube 18. The liquid tube 18 is also provided in the space to be decontaminated, and connects the liquid connector 28 and the fan filter unit 3.

[0046] As described above, the operator can supply the liquid agent to the fan filter unit 3 by operating the pump switch 34. In other words, even after the sealing operation is completed, the liquid agent can be supplied to the fan filter unit 3 while maintaining the sealed state, to generate decontamination gas. In this embodiment, the liquid agent is supplied by the liquid agent pump 13 and the liquid agent tube 18, and therefore the combination of the liquid agent pump 13 and the liquid agent tube 18 corresponds to the "liquid agent supply section."

[0047] Next, the gas pump 21 will be described. The gas pump 21 is connected to a gas connector 26 provided on the connection panel 6 via a gas tube 22. A gas connector 7a is provided on the auxiliary panel 7 arranged at the opening at the top of the safety cabinet 100. One end of the gas tube 22 is connected to the gas connector 7a, and the other end of the gas tube 22 is connected to the gas pump 21. As described above, even if the gas (including the decontamination gas) in the space to be decontaminated flows upward and is discharged through the auxiliary panel 7, it is returned to the space to be decontaminated by the gas pump 21. This allows a gas flow flowing from bottom to top in the space to be decontaminated to be generated.

[0048] Next, the fan filter unit 3 will be described in detail mainly with reference to FIG.

[0049] As shown in FIG. 4, the fan filter unit 3 includes, from the bottom, a main housing 51, a filter housing 52, and a fan housing 53. These three housings are made of resin that is resistant to corrosion by decontamination gas. These three housings are integrally molded or fixed with bolts or the like. Therefore, these three housings are connected so that they cannot move relative to each other. In addition, openings are formed at the boundaries between these three housings, allowing gas to move between the housings.

[0050] The main housing 51 covers the space in which the decontamination gas is generated. Incidentally, "covering" means covering at least a part of the object, and does not necessarily mean covering the entire object. A first reaction vessel 61 is disposed inside the main housing 51. The first reaction vessel 61 is a bag-shaped vessel, and the entire upper end is open. A second reaction vessel 62 is disposed inside the first reaction vessel 61. Holes are formed at the upper and lower ends of the second reaction vessel 62. A reactant 63 is disposed inside the second reaction vessel 62. Incidentally, an opening and closing door may be provided on the main housing 51 in order to facilitate replacement of the first reaction vessel 61, etc.

[0051] Further, the main housing 51 is formed with an attachment port 51a for attaching the liquid tube 18. Inside the main housing 51, the tip of the liquid tube 18 faces downward. Specifically, the tip of the liquid tube 18 is inserted into the first reaction container 61 and faces a position avoiding the second reaction container 62. As a result, the liquid is not directly dripped into the second reaction container 62, but is supplied from a hole at the bottom end of the second reaction container 62 via the first reaction container 61.

[0052] By supplying the liquid agent to the reactant 63, a decontamination gas is generated. For example, the reactant is a solid agent obtained by mixing a low hygroscopic acidic agent, a halogen-based oxidizing agent, and a chlorite. The liquid agent is water. By supplying water to the reactant, the acidic agent dissolves in the water to create an acidic condition, and the chlorite reacts with the halogen-based oxidizing agent under this acidic condition to generate chlorine dioxide gas. The reactant may further contain a heat generating material such as quicklime. This allows the heat generating material to react with water and generate heat, accelerating the generation of chlorine dioxide gas.

[0053] The above-mentioned method of generating decontamination gas is an example. For example, the liquid agent may be an aqueous solution of an organic acid (carboxylic acid), and the reactant may be changed to sodium chlorite. The decontamination gas is not limited to chlorine dioxide gas, and may be other gases. For example, it may be formaldehyde gas or hydrogen peroxide gas. In this way, the decontamination system 1 of the present embodiment is applicable to various examples in which a liquid agent is supplied to a reactant to generate a decontamination gas. In addition, the liquid agent is a liquid, but the reactant is not limited to a solid, and may be, for example, a liquid. In addition, the reactant may be omitted. In this case, the position where the liquid agent is supplied is called a reaction position. The liquid agent is supplied to the reaction position to generate a decontamination gas. For example, the reaction position is a part maintained at a high temperature, and hydrogen peroxide water is supplied to this portion to vaporize hydrogen peroxide, thereby generating hydrogen peroxide gas (decontamination gas).

[0054] The decontamination gas generated in the second reaction vessel 62 flows upward from a hole at the top end of the second reaction vessel 62, and further flows upward through an opening at the top end of the first reaction vessel 61. A gas intake port 51b is formed at the bottom of the main housing 51. Gas in the space to be decontaminated is sucked in by a fan 55, which will be described later, and taken in through the gas intake port 51b. The taken-in air flows upward together with the generated decontamination gas.

[0055] The filter housing 52 is located above the main housing 51. A filter 54 is disposed in the filter housing 52. The filter 54 includes a pre-filter 54a and a main filter 54b. The pre-filter 54a collects unwanted matter (impurities, particles) such as dirt or dust contained in the gas. The main filter 54b is, for example, a HEPA filter, and collects even smaller unwanted matter contained in the gas. The unwanted matter contained in the gas is removed by the gas passing through the pre-filter 54a and the main filter 54b in this order.

[0056] The fan housing 53 is located above the filter housing 52. A fan 55 is disposed in the fan housing 53. The fan 55 is operated before and after the start of decontamination and is stopped after the completion of decontamination. The decontamination gas generated inside the main housing 51 reaches the fan 55 after passing through the filter 54. Therefore, dirt, dust, corrosive substances, etc. are unlikely to reach the fan 55, so that deterioration of the fan 55 can be reduced. The fan 55 generates an upward gas flow. As a result, the gas taken in from the gas inlet 51b and the generated decontamination gas are discharged from the gas outlet 53a formed at the upper end of the fan housing 53.

[0057] As described above, by using the fan filter unit 3, it is possible to generate decontamination gas and deliver the decontamination gas to decontaminate the space to be decontaminated.

[0058] Next, the adsorptive decomposition device 4 will be described in detail with reference mainly to FIG.

[0059] As shown in FIG. 5, the adsorption / decomposition apparatus 4 includes, in order from the bottom, a fan housing 71, an adsorbent housing 72, and a filter housing 73. These three housings are made of resin that is resistant to corrosion caused by decontamination gas. These three housings are integrally molded or fixed with bolts or the like. Therefore, these three housings are connected so that they cannot move relative to each other. In addition, openings are formed at the boundaries between these three housings, allowing gas to move between the housings.

[0060] A fan 74 is disposed in the fan housing 71. The fan 74 generates an upward gas flow. A gas inlet 71a is formed at the lower end of the fan housing 71. Therefore, the fan 74 sucks in gas through the gas inlet 71a. The sucked gas flows upward through the fan 74. The fan 74 is operated after the completion of decontamination and is stopped after the decontamination gas is decomposed.

[0061] The adsorbent housing 72 is located above the fan housing 71. A perforated metal 75 is disposed in the opening at the boundary between the fan housing 71 and the adsorbent housing 72. An adsorbent 76 is disposed in the perforated metal 75. The adsorbent 76 is a material for adsorbing the decontamination gas. The adsorbent 76 is, for example, activated carbon, but may be a different material.

[0062] The filter housing 73 is located above the adsorbent housing 72. A filter 77 is disposed in the filter housing 73. The filter 77 collects unwanted substances contained in the gas. The gas that has passed through the filter 77 is discharged from a gas discharge port 73a formed at the upper end of the filter housing 73. Note that the filter housing 73 may be provided with two or more filters.

[0063] As described above, by using the adsorptive decomposition device 4, the decontamination gas can be adsorbed.

[0064] Next, the flow of the decontamination method, particularly the flow of operations performed by the operator, will be briefly described.

[0065] The operator first places the humidifier 2, fan filter unit 3, adsorption decomposition device 4, and power supply box 5 in the space to be decontaminated, and places the supply box 11, liquid container 17, and gas pump 21 in the external space. In addition, the operator places the connection panel 6 and auxiliary panel 7 before and after the arrangement of the equipment, and connects the input cable 14, multi-core cable 15, liquid tube 18, and gas tube 22 to the connectors and each device.

[0066] Next, the operator performs a sealing operation using the film 101 and the tape 102. After completing the sealing operation, the operator operates the gas pump 21, and then operates the operation device 12 to operate the humidifier 2. The operator stops the humidifier 2 after a predetermined humidity is achieved and before the decontamination gas is generated. In addition, it is preferable to operate the gas pump 21 before the decontamination gas is generated.

[0067] Next, the operator performs a liquid supply operation (presses the pump switch 34) on the operating device 12 (operation step). This causes the liquid pump 13 to operate, and the liquid in the liquid container is supplied to the first reaction container 61 of the fan filter unit 3, generating a decontamination gas (generation step). This starts decontamination using the decontamination gas.

[0068] After a predetermined time has elapsed and decontamination is completed, the operator operates the operation device 12 to stop the fan filter unit 3. Next, the operator operates the operation device 12 to operate the adsorption and decomposition device 4. This starts adsorption of the decontamination gas. After another predetermined time has elapsed and adsorption of the decontamination gas is completed, the operator operates the operation device 12 to stop the adsorption and decomposition device 4. This completes decontamination and adsorption.

[0069] In this way, by using the decontamination system 1 of this embodiment, decontamination is started (generation of decontamination gas starts) after the sealing work is completed, so that the decontamination gas is unlikely to leak into the external space. Also, the operator can complete the decontamination and adsorption simply by operating the supply box 11, which is simple and requires little effort.

[0070] As described above, the decontamination system 1 generates a decontamination gas by supplying a liquid to the reactant 63 or a reaction position, thereby decontaminating the space to be decontaminated. The decontamination system 1 includes an operation device 12 and a liquid supply unit (liquid pump 13 and liquid tube 18). The operation device 12 is disposed in an external space outside the space to be decontaminated, and receives a liquid supply operation (pressing the pump switch 34) by an operator. At least a portion of the liquid supply unit (specifically, a part of the liquid tube 18) is disposed in the space to be decontaminated, and when the operation device 12 performs a liquid supply operation (when an operation step is performed), the liquid supply unit supplies a liquid to the reactant 63 or the reaction position disposed in the space to be decontaminated, thereby generating a decontamination gas (generation step).

[0071] As a result, after the sealing work of the space to be decontaminated is completed, the operator simply supplies the liquid from the outside space, and the decontamination gas is generated. Therefore, there is no need to take measures against the occurrence of a situation in which decontamination gas is generated during the sealing work.

[0072] In the decontamination system 1 of this embodiment, the liquid agent supply unit is the liquid agent pump 13 and the liquid agent tube 18. When a liquid agent supply operation is performed, the liquid agent pump 13 delivers the liquid agent, and the liquid agent is supplied to the reactant 63 or the reaction position via the liquid agent tube 18.

[0073] This makes it possible to supply the liquid agent to the reactant 63 or the reaction position from outside with a simple configuration.

[0074] The decontamination system 1 of this embodiment includes a fan filter unit 3 arranged in a space to be decontaminated. The fan filter unit 3 includes a main housing 51, a filter 54, a filter housing 52, a fan 55, and a fan housing 53. The main housing 51 covers a space in which a reactant 63 or a reaction position is located. The filter 54 removes unwanted substances contained in the decontamination gas. The filter housing 52 covers the filter 54. The fan 55 draws in gas from the space to be decontaminated and generates a flow that discharges the drawn-in gas and decontamination gas into the space to be decontaminated. The fan housing 53 covers the fan 55. The main housing 51, the filter housing 52, and the fan housing 53 are connected so as not to move relative to each other.

[0075] This allows the generation of a flow of decontamination gas, making it possible to efficiently perform decontamination using the decontamination gas and remove unwanted substances contained in the decontamination gas. In addition, because the three housings are connected so that they cannot move relative to one another, it is unlikely that any of the housings will fall.

[0076] In the decontamination system 1 of this embodiment, a gas inlet 51b is formed in the main housing 51. A gas outlet 53a is formed in the fan housing 53. The filter 54 includes a pre-filter 54a and a main filter 54b. The main housing 51, the pre-filter 54a, the main filter 54b, and the fan 55 are arranged in this order.

[0077] As a result, the decontamination gas passes through the fan 55 after passing through the pre-filter 54a and the main filter 54b, so that deterioration of the fan 55 due to the decontamination gas can be reduced.

[0078] The decontamination system 1 of this embodiment includes a connection panel 6 disposed at the boundary between the space to be decontaminated and the outside space. The connection panel 6 is provided with a gas connection part into which a gas tube 22 for circulating gas in the space to be decontaminated is inserted or attached.

[0079] This makes it easy to arrange the gas tube 22, which needs to be arranged so as to pass through the boundary between the space to be decontaminated and the outside space.

[0080] The decontamination system 1 of this embodiment includes a connection panel 6 disposed at the boundary between the space to be decontaminated and an external space. The connection panel 6 is provided with a liquid connection section, a power connection section, and a gas connection section. A liquid tube 18 for supplying a liquid is inserted into or attached to the liquid connection section. A cable for supplying power to an electrical device disposed in the space to be decontaminated is inserted into or attached to the power connection section. A gas tube 22 for circulating gas in the space to be decontaminated is inserted into or attached to the gas connection section.

[0081] This makes it easy to arrange tubes and cables that need to pass through the boundary between the space to be decontaminated and the outside space, and reduces the effort required to seal the space to be decontaminated.

[0082] In the decontamination system 1 of this embodiment, the liquid connection part is a liquid connector 28 that connects the liquid tube 18 in the external space with the liquid tube 18 in the space to be decontaminated. The power connection part is a power connector 27 that connects the multi-core cable 15 in the external space with the multi-core cable 15 in the space to be decontaminated. The gas connection part is a gas connector 26 to which the gas tube 22 in the external space is connected. The boundary between the liquid connector 28 and the connection panel 6, the boundary between the power connector 27 and the connection panel 6, and the boundary between the gas connector 26 and the connection panel 6 are sealed.

[0083] As a result, the connection can be completed simply by connecting the liquid tube 18, the multi-core cable 15, and the gas tube 22 to the corresponding connectors. Furthermore, the task of sealing the boundaries between the liquid tube 18, the multi-core cable 15, and the gas tube 22 and the connection panel 6 is not required.

[0084] In the decontamination system 1 of this embodiment, a humidifier 2, a fan filter unit 3 that generates a flow for diffusing the decontamination gas, and an adsorption / decomposition device 4 for adsorbing the decontamination gas after decontamination are arranged in the space to be decontaminated. The operation device 12 is provided with a first switch 31, a second switch 32, and a third switch 33. The first switch 31 switches whether or not to supply power to the humidifier 2. The second switch 32 switches whether or not to supply power to the fan filter unit 3. The third switch 33 switches whether or not to supply power to the adsorption / decomposition device 4.

[0085] This allows four types of operations, including supply of the liquid agent, to be realized by a single operating device 12, thereby simplifying the operation of the operator.

[0086] In the decontamination system 1 of this embodiment, a single multi-core cable 15 is connected to the operating device 12, and the multi-core cable 15 spans the external space and the space to be decontaminated, and in the space to be decontaminated, the multi-core cable 15 branches out and is connected to the humidifier 2, the fan filter unit 3, and the adsorption and decomposition device 4, respectively.

[0087] As a result, by using the multi-core cable 15 arranged to straddle the external space and the space to be decontaminated, the effort required for sealing the space to be decontaminated can be reduced.

[0088] Although the preferred embodiment of the present invention has been described above, the above configuration can be modified, for example, as follows.

[0089] The humidifier 2 and the power supply box 5 are not essential components and may be omitted. For example, depending on the type of decontamination gas, humidification may not contribute to improving the decontamination effect of the decontamination gas, in which case there is no need to provide a humidifier 2. Also, without providing a power supply box 5, the operation device 12 and the fan filter unit 3 may be connected by separate cables (the same applies to the adsorption / decomposition device 4 and the humidifier 2).

[0090] The fan filter unit 3 is not limited to a configuration in which gas flows from bottom to top, and may be configured so that gas flows from one side to the other in the horizontal direction. The pre-filter 54a may be omitted. The first reaction vessel 61, the filter 54, and the fan 55 constituting the fan filter unit 3 may be arranged separately without being unitized.

[0091] The adsorption / decomposition device 4 is not limited to a configuration in which gas flows from bottom to top, and may be configured so that gas flows from one side to the other in a horizontal direction. In addition, the order in which the fan 74, the adsorbent 76, and the filter 77 are arranged is merely an example, and may be different from that in this embodiment.

[0092] The connection panel 6 and the auxiliary panel 7 are not essential components and can be omitted. Instead of providing three types of connectors on the connection panel 6, only one or two types of connectors may be provided. For example, only the gas connector 26 may be provided on the connection panel 6, or the gas connector 26 and the power connector 27, or the gas connector 26 and the liquid connector 28 may be provided on the connection panel 6. Alternatively, one connector may be added to the connection panel 6 to provide four types of connectors, and humidification may be performed from the outside of the space to be decontaminated through the added connector. Instead of a connector, the connection panel 6 may be provided with an insertion part for inserting and connecting a tube or cable. In this case, the insertion part is preferably made of rubber to maintain sealing and is cylindrical with a diameter smaller than that of the tube or cable. The connector and the insertion part are collectively referred to as a "connection part" such as a gas connection part.

[0093] It is not essential that the operation device 12 and the liquid pump 13 are integrated together, and they may be separate. In addition, only the pump switch 34 of the operation device 12 may be integrated with the liquid pump 13, and the first switch 31 to the third switch 33 may be provided as separate units. In addition, as long as the pump switch 34 is disposed in the external space, the liquid pump 13 may be disposed in the space to be decontaminated.

[0094] The method of supplying the liquid is not limited to the pump. For example, a liquid container with a shutter may be placed above the first reaction container 61, and the shutter may be opened by remote control to supply the liquid to the first reaction container 61. In this case, the remote control may include wireless communication, signal transmission by an electric wire, transmission of a pressing force by a wire, and the like. [Explanation of symbols]

[0095] 1. Decontamination system 2 Humidifier 3 Fan Filter Unit 4 Adsorption and decomposition equipment 5 Power Box 6 Connection Panel 7 Auxiliary Panel 11 Supply Box 12 Operating device 13 Liquid pump

Claims

1. A decontamination system that generates a decontamination gas by supplying a reactant or a liquid agent to a reaction position to decontaminate a space to be decontaminated, An operation device that is disposed in an external space outside the space to be decontaminated and receives a liquid supply operation from an operator; a liquid agent supply unit at least a part of which is disposed in the space to be decontaminated, and which supplies the liquid agent to a reactant or a reaction position disposed in the space to be decontaminated or generates the decontamination gas by performing the liquid agent supply operation on the operation device; A decontamination system comprising:

2. 2. The decontamination system of claim 1, the liquid supply unit includes a liquid pump and a liquid tube; A decontamination system characterized in that, when the liquid supply operation is performed, the liquid pump delivers the liquid, and the liquid is supplied to the reactant or reaction position via the liquid tube.

3. 2. The decontamination system of claim 1, A fan filter unit is provided in the space to be decontaminated, The fan filter unit includes: A main housing that covers a space in which the reactant or reaction site is located; a filter for removing unwanted substances contained in the decontamination gas; a filter housing that covers the filter; A fan that draws in gas from the space to be decontaminated and generates a flow that exhausts the drawn gas and the decontamination gas into the space to be decontaminated; a fan housing that covers the fan; Equipped with A decontamination system, characterized in that the main housing, the filter housing, and the fan housing are connected to each other so as not to move relative to each other.

4. 4. The decontamination system of claim 3, The main housing is formed with a gas intake port, The fan housing is formed with a gas exhaust port, The filter includes a pre-filter and a main filter, A decontamination system comprising: the main housing, the pre-filter, the main filter, and the fan arranged in that order.

5. 2. The decontamination system of claim 1, A connection panel is provided at a boundary between the space to be decontaminated and the external space, A decontamination system characterized in that the connection panel is provided with a gas connection portion into which a gas tube for circulating gas in the space to be decontaminated is inserted or attached.

6. 2. The decontamination system of claim 1, A connection panel is provided at a boundary between the space to be decontaminated and the external space, The connection panel includes: a liquid connection portion into which a liquid tube for supplying the liquid is inserted or attached; A power connection portion into which a cable for supplying power to an electrical device disposed in the space to be decontaminated is inserted or attached; a gas connection portion into which a gas tube for circulating gas in the space to be decontaminated is inserted or attached; A decontamination system comprising:

7. 7. The decontamination system of claim 6, the liquid connection portion is a liquid connector that connects the liquid tube in the external space and the liquid tube in the space to be decontaminated, the power connection portion is a power connector that connects the cable in the external space and the cable in the space to be decontaminated, the gas connection portion is a gas connector to which the gas tube in the external space is connected, A decontamination system characterized in that the boundary between the liquid connector and the connection panel, the boundary between the power connector and the connection panel, and the boundary between the gas connector and the connection panel are sealed.

8. 2. The decontamination system of claim 1, A humidifier, a fan filter unit that generates a flow that diffuses the decontamination gas, and an adsorption / decomposition device that adsorbs the decontamination gas after decontamination are arranged in the space to be decontaminated; The operating device includes: A first switch that switches between supplying and not supplying power to the humidifier; a second switch for switching whether or not power is supplied to the fan filter unit; a third switch that switches between supplying and not supplying power to the adsorption and decomposition device; A decontamination system comprising:

9. 9. The decontamination system of claim 8, A decontamination system characterized in that a single multi-core cable is connected to the operating device, the multi-core cable spanning the external space and the space to be decontaminated, and the multi-core cable is split in the space to be decontaminated and connected to the humidifier, the fan filter unit, and the adsorption and decomposition device, respectively.

10. A decontamination method for decontaminating a space to be decontaminated by generating a decontamination gas by supplying a reactant or a liquid agent to a reaction position, An operation step of performing a liquid supply operation on an operation device disposed in an external space outside the space to be decontaminated; A generating step in which the liquid agent is supplied to a reactant or a reaction position disposed in the space to be decontaminated by the operating step, thereby generating the decontamination gas; A decontamination method comprising:

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