Flange mechanism, cutting device and cutting blade

Abstract

To facilitate attachment / detachment of a cutting blade.SOLUTION: A flange mechanism 24 comprises: a boss part 281 that is inserted into a central hole 251 of a cutting blade 21 from one end side 288; and a flange part 282 protruding outwardly in the radial direction from the other end side 289 of the boss part 281. The boss part 281 has a diameter enlarged portion 286 formed on it, which is enlarged in a diameter from one end 288 toward the other end 289, and further includes a flange body 28 that is fixed to the tip 231 of a spindle 23 to be freely attachable / detachable, and an elastic cylindrical body 29 that is aligned to surround the diameter enlarged portion 286 of the boss part 281 and is interposed between the boss part 281 and the inner periphery of the central hole 251 of the cutting blade 21 where the boss part 281 is inserted. The elastic cylindrical body 29 is positioned at a cutting blade attachment / detachment position where it is reduced in the diameter as a result of being positioned on one end side 288 of the diameter enlarged portion 286, or at a cutting blade fixture position where it is enlarged in the diameter as the result of being positioned at the other end side 289 of the diameter enlarged portion 286.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a flange mechanism, a cutting device, and a cutting blade. [Background technology]

[0002] In the manufacturing process of semiconductor devices, cutting machines having cutting blades for cutting semiconductor wafers are widely used. The cutting blades are attached to a spindle by using a flange mechanism (for example, see Patent Document 1).

[0003] The flange mechanism described in Patent Document 1 etc. has a flange body (fixed flange) that includes a boss portion that is inserted into the central hole of the cutting blade and is fixed to the spindle. The flange mechanism described in Patent Document 1 etc. fixes the cutting blade to the tip of the spindle in a state where the cutting blade is sandwiched between a fixing device consisting of a detachable flange and a nut in the case of a washer blade, and between a fixing device consisting of a nut and the flange body in the case of a hub blade.

[0004] Conventionally, when attaching or detaching a cutting blade to or from a flange mechanism, a fastener must be attached or detached, and improvement thereto is eagerly desired. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2013-110355 A Summary of the Invention [Problem to be solved by the invention]

[0006] The flange mechanism described in Patent Document 1 and the like requires the attachment and detachment of a fastener when attaching or detaching the cutting blade to or from the flange mechanism, and improvement thereto is eagerly desired.

[0007] An object of the present invention is to provide a flange mechanism, a cutting device, and a cutting blade that can easily attach and detach a cutting blade. [Means for solving the problem]

[0008] In order to solve the above problems and achieve the object, the flange mechanism of the present invention is a flange mechanism for mounting a cutting blade having a central hole formed in the center and a cutting edge on an outer periphery to a spindle, the flange mechanism including a boss portion inserted from one end side into the central hole of the cutting blade, and a flange portion having an abutment portion protruding radially outward from the other end of the boss portion and abutting against the cutting blade, the boss portion is formed with an enlarged diameter portion that is enlarged in diameter from the one end toward the other end side, the flange main body is removably fixed to the tip of the spindle, and a flange portion is provided around the enlarged diameter portion of the boss portion. the cutting blade is provided with an elastic cylindrical body disposed between the boss portion and the inner periphery of the central hole of the cutting blade into which the boss portion is inserted, and the elastic cylindrical body is configured to be freely moved between the one end side and the other end side so as to be positioned at a cutting blade attachment / detachment position where the diameter is reduced by being positioned at the one end side of the enlarged diameter portion, thereby forming a gap between the inner periphery of the central hole of the cutting blade and the outer periphery of the elastic cylindrical body, and at a cutting blade fixing position where the diameter is increased by being positioned at the other end side of the enlarged diameter portion, thereby abutting the inner periphery of the central hole of the cutting blade and the outer periphery of the elastic cylindrical body.

[0009] The flange mechanism may further include a moving member for moving the elastic cylindrical body between the one end side and the other end side.

[0010] The cutting device of the present invention is a cutting device comprising: a cutting unit having a holding unit for holding a workpiece; a spindle to which a cutting blade having a cutting edge on its outer periphery for cutting the workpiece held by the holding unit and a central hole formed in the center is attached; and a flange mechanism for attaching the cutting blade to the spindle, the flange mechanism including a boss portion inserted from one end side into the central hole of the cutting blade, and a flange portion having an abutment portion protruding radially outward from the other end of the boss portion and abutting against the cutting blade, the boss portion having an enlarged diameter portion that is enlarged in diameter from the one end toward the other end side, and a flange mechanism for attaching the flange mechanism to the tip of the spindle. the flange body is fixed to the boss portion and an elastic cylindrical body is arranged to surround the expanded diameter portion of the boss portion and is interposed between the boss portion and the inner periphery of the central hole of the cutting blade into which the boss portion is inserted, and the elastic cylindrical body is configured to be freely moved between the one end side and the other end side so as to be positioned at a cutting blade attachment / detachment position where it is positioned at one end side of the expanded diameter portion to reduce its diameter and a gap is formed between the inner periphery of the central hole of the cutting blade and the outer periphery of the elastic cylindrical body, and a cutting blade fixing position where it is positioned at the other end side of the expanded diameter portion to increase its diameter and the inner periphery of the central hole of the cutting blade and the outer periphery of the elastic cylindrical body abut.

[0011] In the cutting device, the flange mechanism may further include a moving member that moves the elastic cylindrical body between the one end side and the other end side.

[0012] The cutting blade of the present invention is a cutting blade attached to the spindle, and is characterized in that it comprises an annular base, a cutting blade consisting of an annular grinding wheel having an outer diameter larger than the outer diameter of the annular base, and a joining member having a holding portion that removably holds the inner side of the cutting blade and an engaging portion that engages with the annular base. Effect of the Invention

[0013] The present invention has an advantage that the cutting blade can be easily attached and detached. [Brief description of the drawings]

[0014] [Figure 1] FIG. 1 is a perspective view showing a configuration example of a cutting device according to the first embodiment. [Diagram 2] FIG. 2 is a cross-sectional view of a cutting unit of the cutting device shown in FIG. [Diagram 3] FIG. 3 is an exploded perspective view showing a main part of the cutting unit shown in FIG. [Figure 4] 4 is a cross-sectional view of a cutting blade attached to the flange mechanism of the cutting unit shown in FIG. 2. FIG. [Diagram 5] FIG. 5 is an exploded cross-sectional view of the cutting blade shown in FIG. [Figure 6] FIG. 6 is a cross-sectional view showing a state in which the joining member holding the cutting edge of the cutting blade shown in FIG. 5 is attached to an annular base. [Figure 7] 7 is a cross-sectional view of the flange mechanism of the cutting unit shown in FIG. [Figure 8] 8 is a perspective view of the elastic cylindrical body of the flange mechanism shown in FIG. [Figure 9] FIG. 9 is a cross-sectional view showing a state in which the elastic cylindrical body of the flange mechanism shown in FIG. 2 is positioned at a cutting blade attachment / detachment position. [Figure 10] FIG. 10 is a cross-sectional view showing the flange assembly shown in FIG. 9 with a used cutting blade removed. [Figure 11] FIG. 11 is a cross-sectional view showing a state in which a replacement cutting blade is attached to the flange mechanism shown in FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0016] [Embodiment 1] A flange mechanism, a cutting device, and a cutting blade according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing an example of the configuration of the cutting device according to the first embodiment.

[0017] (cutting equipment) 1 according to the first embodiment is a processing device that cuts a workpiece 200. In the first embodiment, the workpiece 200 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, whose base material is silicon, gallium arsenide, SiC (silicon carbide), sapphire, or the like. The workpiece 200 has a surface 201 partitioned by a plurality of planned division lines 202 formed in a lattice pattern, and devices 203 are formed in each of the plurality of regions.

[0018] The workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer having a thin central portion and a thick portion formed on the outer periphery, or may be a rectangular resin package substrate having a plurality of devices sealed with resin, a ceramic substrate, a ferrite substrate, a substrate containing at least one of nickel and iron, a glass substrate, etc. In the first embodiment, the back surface 204 of the workpiece 200 is attached to a tape 206 having an annular frame 205 attached to its outer periphery, and the workpiece 200 is supported by the annular frame 205.

[0019] 1 is a processing device that holds a workpiece 200 with a holding unit 10 and performs cutting (corresponding to processing) with a cutting blade 21 along a planned division line 202. As shown in FIG. 1, the cutting device 1 includes the holding unit 10 that suction-holds the workpiece 200 with a holding surface 11, the cutting unit 20 that cuts the workpiece 200 held by the holding unit 10 with the cutting blade 21, an imaging unit 50 that captures an image of the workpiece 200 held by the holding unit 10, and a control unit 100.

[0020] 1, the cutting device 1 includes a moving unit 40 that moves the holding unit 10 and the cutting unit 20 relatively. The moving unit 40 includes at least an X-axis moving unit 41, which is a processing feed unit that processes and feeds the holding unit 10 in the X-axis direction parallel to the horizontal direction, a Y-axis moving unit 42, which is an indexing feed unit that indexes and feeds the cutting unit 20 in the Y-axis direction parallel to the horizontal direction and perpendicular to the X-axis direction, a Z-axis moving unit 43, which is a cutting feed unit that cuts and feeds the cutting unit 20 in the Z-axis direction parallel to the vertical direction perpendicular to both the X-axis and Y-axis directions, and a rotational moving unit 44 that rotates the holding unit 10 around an axis parallel to the Z-axis direction.

[0021] The X-axis moving unit 41 is installed on the device body 2, and moves the holding unit 10 together with the rotation moving unit 44 in the X-axis direction, which is the processing feed direction, to relatively feed the holding unit 10 and the cutting unit 20 along the X-axis direction. The Y-axis moving unit 42 is installed on a gate-shaped support frame 3 standing on the device body 2, and moves the cutting unit 20 in the Y-axis direction, which is the indexing feed direction, to relatively index-feed the holding unit 10 and the cutting unit 20 along the Y-axis direction. The Z-axis moving unit 43 is installed on a moving frame 4 that is moved in the Y-axis direction by the Y-axis moving unit 42, and moves the cutting unit 20 in the Z-axis direction, which is the cutting feed direction, to relatively feed the holding unit 10 and the cutting unit 20 along the Z-axis direction.

[0022] The X-axis moving unit 41, the Y-axis moving unit 42 and the Z-axis moving unit 43 are equipped with a well-known ball screw that is rotatable around its axis, a well-known motor that rotates the ball screw around its axis, and a well-known guide rail that supports the holding unit 10 or the cutting unit 20 so that it can move freely in the X-axis, Y-axis or Z-axis direction.

[0023] The holding unit 10 is disk-shaped, and a holding surface 11 for holding the workpiece 200 is formed from porous ceramics or the like. The holding unit 10 is provided so as to be movable in the X-axis direction together with the rotational movement unit 44 by the X-axis movement unit 41 across a processing area below the cutting unit 20 and a carry-in / out area spaced from below the cutting unit 20 for carrying in and out the workpiece 200, and is provided so as to be rotatable around an axis parallel to the Z-axis direction by the rotational movement unit 44.

[0024] The holding unit 10 is connected to a vacuum suction source (not shown), and is sucked by the vacuum suction source to suck and hold the workpiece 200 placed on the holding surface 11. In the first embodiment, the holding unit 10 sucks and holds the back surface 204 side of the workpiece 200 via a tape 206. In addition, a plurality of clamping parts 12 that clamp an annular frame 205 are provided around the holding unit 10, as shown in FIG.

[0025] The cutting unit 20 is a cutting means having a cutting blade 21 detachably attached thereto for cutting the workpiece 200 held by the holding unit 10. The cutting unit 20 is attached to a second moving frame 5 movable in the Z-axis direction by a Z-axis moving unit 43, and is provided so as to be movable in the Y-axis direction by a Y-axis moving unit 42 with respect to the workpiece 200 held by the holding unit 10, and is also provided so as to be movable in the Z-axis direction by the Z-axis moving unit 43. The cutting unit 20 can position the cutting blade 21 at any position on the holding surface 11 of the holding unit 10 by the Y-axis moving unit 42 and the Z-axis moving unit 43. The configuration of the cutting unit 20 will be described later.

[0026] The imaging unit 50 is fixed to the cutting unit 20 so as to move integrally with the cutting unit 20. The imaging unit 50 includes an imaging element that captures an image of an area to be divided of the workpiece 200 held by the holding unit 10 before cutting. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element. The imaging unit 50 captures the workpiece 200 held by the holding unit 10 to obtain an image for performing alignment between the workpiece 200 and the cutting blade 21, and outputs the obtained image to the control unit 100.

[0027] The cutting device 1 also includes an X-axis position detection unit (not shown) for detecting the position of the holding unit 10 in the X-axis direction, a Y-axis position detection unit (not shown) for detecting the position of the cutting unit 20 in the Y-axis direction, and a Z-axis position detection unit for detecting the position of the cutting unit 20 in the Z-axis direction. The X-axis position detection unit and the Y-axis position detection unit can be configured with a linear scale parallel to the X-axis direction or the Y-axis direction, and a read head.

[0028] The Z-axis position detection unit detects the position of the cutting unit 20 in the Z-axis direction by motor pulses. The X-axis position detection unit, the Y-axis position detection unit, and the Z-axis position detection unit output the position of the holding unit 10 in the X-axis direction, and the position of the cutting unit 20 in the Y-axis direction or the Z-axis direction to the control unit 100. In the first embodiment, the positions of the components of the cutting device 1 in the X-axis direction, the Y-axis direction, and the Z-axis direction are determined based on a predetermined reference position (not shown).

[0029] The control unit 100 also controls each of the components of the cutting device 1, causing the cutting device 1 to perform a machining operation on the workpiece 200. The control unit 100 is a computer having an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and an input / output interface device. The arithmetic processing device of the control unit 100 performs arithmetic processing according to a computer program stored in the storage device, and outputs control signals for controlling the cutting device 1 to each of the components of the cutting device 1 via the input / output interface device.

[0030] The control unit 100 is connected to a display unit (not shown) configured with a liquid crystal display device or the like for displaying the status and images of the machining operation, and an input unit used by an operator to register machining content information, etc. The input unit is configured with at least one of a touch panel provided on the display unit and an external input device such as a keyboard.

[0031] (Cutting unit) Next, the cutting unit 20 will be described with reference to the drawings. Fig. 2 is a cross-sectional view of the cutting unit of the cutting device shown in Fig. 1. Fig. 3 is a perspective view showing an exploded view of the main part of the cutting unit shown in Fig. 2. As shown in Figs. 2 and 3, the cutting unit 20 includes a spindle 23 to which the cutting blade 21 is attached, a spindle housing 22, the spindle 23 provided in the spindle housing 22 so as to be rotatable about its axis, a flange mechanism 24, and a cutting fluid nozzle (not shown) that supplies cutting fluid to the cutting blade 21 during cutting.

[0032] (Cutting blade) Next, the cutting blade 21 will be described. Fig. 4 is a cross-sectional view of the cutting blade attached to the flange mechanism of the cutting unit shown in Fig. 2. Fig. 5 is an exploded cross-sectional view of the cutting blade shown in Fig. 4. Fig. 6 is a cross-sectional view showing a state in which a joining member holding the cutting edge of the cutting blade shown in Fig. 5 is attached to an annular base.

[0033] The cutting blade 21 has a cutting edge 26 on its outer periphery for cutting the workpiece 200 held by the holding unit 10, a central hole 251 is formed in the center, and is attached to the spindle 23. As shown in Figures 2, 4, 5, and 6, the cutting blade 21 includes an annular base 25, the cutting edge 26, and a joining member 27.

[0034] In the first embodiment, the annular base 25 is made of a metal such as a titanium alloy, and is formed in a circular ring shape with an outer diameter that gradually changes along the axis. The annular base 25 has an inner diameter that increases stepwise as the outer diameter gradually increases along the axis. The annular base 25 has an inner peripheral surface on the small diameter side that is the above-mentioned central hole 251. The annular base 25 has an inner peripheral surface on the large diameter side that is formed with a screw groove 252 extending in the circumferential direction. The annular base has an end surface 253 on the large diameter side that is flat in a direction perpendicular to the axis and is a blade contact surface that contacts the cutting blade 26.

[0035] The cutting blade 26 is an annular grindstone having an outer diameter larger than the outer diameter of the large diameter side of the annular base 25. In the first embodiment, the cutting blade 26 is made of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bond material such as metal or resin, and is formed to a predetermined thickness. The inner diameter of the cutting blade 26 is larger than the inner diameter of the large diameter side of the annular base 25.

[0036] In the first embodiment, the joining member 27 is made of a metal such as a titanium alloy, and is formed into a circular ring shape with an outer diameter that changes stepwise along the axis and a constant inner diameter. The joining member 27 includes a holding portion 271 that is provided in the center in the axial direction and detachably holds the inner peripheral side of the cutting blade 26, a thread groove 272 that is provided on the outer peripheral surface of the small diameter end and serves as an engagement portion, and a pressing portion 273 that is provided on the large diameter end.

[0037] The holding portion 271 has an outer diameter that is equal to the inner diameter of the cutting blade 26 and an axial length that is equal to the thickness of the cutting blade 26. The holding portion 271 enters the inner peripheral side of the cutting blade 26 and detachably holds the inner peripheral side of the cutting blade 26. The screw groove 272 has an outer diameter that is smaller than the outer diameter of the holding portion 271 and is engaged with the screw groove 252 of the annular base 25. The pressing portion 273 has an outer diameter that is larger than the outer diameter of the holding portion 271.

[0038] The cutting blade 21 is assembled as follows. As shown in Fig. 6, in a state where the annular base 25 and the joint member 27 are separated, the cutting blade 21 inserts the joint member 27 from the small diameter side into the cutting blade 26, and the inner peripheral surface of the cutting blade 26 is held by the holding portion 271. The joint member 27 is inserted into the large diameter of the annular base 25 from the small diameter side, and the screw groove 272 is screwed into the screw groove 252, and the joint member 27 is attached to the annular base 25. Then, as shown in Figs. 2 and 4, the cutting blade 21 holds the cutting blade 26 between the end face 253, which is the blade abutment surface, and the pressing portion 273, and fixes the cutting blade 26 to the annular base 25 and the joint member 27.

[0039] The spindle housing 22 is attached to the lower end of the second moving frame 5, supported by the Z-axis moving unit 43 for movement in the Z-axis direction, and supported by the Y-axis moving unit 42 for movement in the Y-axis direction via the Z-axis moving unit 43. The spindle housing 22 accommodates a portion of the spindle 23 excluding the tip portion 231, a spindle motor (not shown) that rotates the spindle 23 about its axis, and the like, and supports the spindle 23 for rotation about its axis.

[0040] The spindle 23 is rotated by a spindle motor (not shown), and as shown in Fig. 2, a tip portion 231 protrudes from the tip surface of the spindle housing 22. The tip portion 231 of the spindle 23 is formed into a tapered cylinder that gradually becomes thinner toward the tip surface 232, which is the tip of the spindle 23. The spindle 23 is provided with a screw hole 233 that opens into the tip surface 232.

[0041] (Flange mechanism) Next, the flange mechanism 24 will be described. Fig. 7 is a cross-sectional view of the flange mechanism of the cutting unit shown in Fig. 2. Fig. 8 is a perspective view of the elastic cylinder of the flange mechanism shown in Fig. 7. The flange mechanism 24 is fixed to the spindle 23, and serves to mount the cutting blade 21 having the cutting edge 26 to the tip 231 of the spindle 23. As shown in Figs. 2 and 7, the flange mechanism 24 includes a flange main body 28, an elastic cylinder 29, and a moving member 30.

[0042] The flange body 28 includes a cylindrical boss portion 281 that is inserted into the central hole 251 of the cutting blade 21 from one end 288, and a flange portion 282 that protrudes radially outward from the other end 289 (which is also the center) in the axial direction of the boss portion 281. The other end 289 of the boss portion 281 is attached and fixed to the tip portion 231 of the spindle 23.

[0043] The boss portion 281 has an outer diameter smaller than the inner diameter of the central hole 251 of the cutting blade 21 and the inner diameter of the joining member 27, and is provided with a step portion 283 and a tapered portion 284 on its inner circumferential surface. The step portion 283 is provided closer to one end 288 than the flange portion 282, and the inner diameter of the boss portion 281 is gradually reduced from the tip portion away from the spindle housing 22 toward the base end side closer to the spindle housing 22. The surface of the step portion 283 is formed flat along a direction perpendicular to the axis of the boss portion 281, i.e., the flange main body 28.

[0044] The tapered portion 284 is formed from the center of the boss portion 281 in the axial direction to the other end 289, and the inner diameter of the boss portion 281 is gradually enlarged from the center in the axial direction toward the other end 289. The flange body 28 is attached to the tip portion 231 of the spindle 23 by inserting the tip portion 231 of the spindle 23 into the other end 289 side of the boss portion 281, and the threaded portion 312 of the fixing bolt 31, the head portion 311 of which is overlapped on the surface of the stepped portion 283, is screwed into the screw hole 233 provided in the tip surface 232 of the spindle 23, and the flange body 28 is attached to the tip portion 231 of the spindle 23 and fixed. When the flange body 28 is attached to the tip portion 231 of the spindle 23 and fixed, the tapered portion 284 comes into close contact with the tip portion 231 of the spindle 23.

[0045] In this way, the flange body 28 is detachably fixed to the tip 231 of the spindle 23 by the fixing bolt 31. When the flange body 28 is fixed to the tip 231 of the spindle 23, a screw groove 285 is formed on the inner peripheral surface of the one end 288 side of the boss portion 281 away from the spindle 23. Also, the boss portion 281 has an expanded diameter portion 286 formed on the outer peripheral surface of the one end 288 side, the outer diameter of which gradually expands (i.e., expands in diameter) from the one end 288 toward the other end 289. The outer diameter of the one end 288 of the boss portion 281 is smaller than the inner diameter of the central hole 251 of the cutting blade 21, and the outer diameter of the central portion of the boss portion 281 is equal to the inner diameter of the joining member 27 of the cutting blade 21.

[0046] The flange portion 282 is formed in an annular shape protruding radially outward from the other end 289 side of the boss portion 281 closer to the spindle 23 when the flange body 28 is fixed to the tip portion 231 of the spindle 23. The outer diameter of the flange portion 282 is larger than the inner diameter of the cutting edge 26 of the cutting blade 21 and smaller than the outer diameter of the cutting edge 26. The flange portion 282 has an abutment portion 287 at its outer edge that abuts against and supports the cutting edge 26 of the cutting blade 21. The flange portion 282 supports the cutting blade 21 by bringing the cutting blade 21 into close contact with the abutment portion 287.

[0047] The elastic cylindrical body 29 is disposed so as to surround the enlarged diameter portion 286 on the one end 288 side of the boss portion 281, and is interposed between the boss portion 281 and the inner circumference of the central hole 251 of the cutting blade 21 into which the boss portion 281 is inserted. In the embodiment, the elastic cylindrical body 29 is made of a metal such as a titanium alloy and formed into a cylindrical shape. In addition, as shown in FIG. 8, the elastic cylindrical body 29 has a plurality of slits 291 formed at intervals in the circumferential direction. In the first embodiment, the slits 291 extend through the elastic cylindrical body 29 in the axial direction of the elastic cylindrical body 29, one end of which opens at the end of the axial direction of the elastic cylindrical body 29, and the slits adjacent to each other in the circumferential direction open at the ends of the elastic cylindrical body 29 opposite to each other in the axial direction.

[0048] The elastic cylinder 29 has a pair of tapered portions 292 on its inner circumferential surface. The tapered portions 292 are provided from the center to the ends in the axial direction of the elastic cylinder 29, and the inner diameter of the elastic cylinder 29 gradually increases from the center to the ends. The elastic cylinder 29 is interposed between the boss 281 and the inner periphery of the central hole 251 of the cutting blade 21 into which the boss 281 is inserted, with one end 288 of the boss 281 inserted into the inside of the elastic cylinder 29. When the one end 288 of the boss 281 is inserted into the inside of the elastic cylinder 29, the tapered portions 292 come into close contact with the enlarged diameter portion 286 of the one end 288 of the boss 281.

[0049] Elastic cylindrical body 29 is elastically deformable in the direction of reducing or expanding its inner and outer diameters by forming multiple slits 291. That is, elastic deformation of elastic cylindrical body 29 reduces or expands its inner and outer diameters. In addition, in a neutral state where elastic cylindrical body 29 is not elastically deformed, the outer diameter is smaller than the inner diameter of central hole 251. In the present invention, it is preferable that the angle of tapered portion 292 of elastic cylindrical body 29 is appropriately set depending on the material of elastic cylindrical body 29 and its ease of deformation.

[0050] The moving member 30 is a bolt whose screw portion 302 screws into the screw groove 285. The moving member 30 has a head 301 formed in a disk shape that can be inserted into the elastic cylindrical body 29, and a reduced diameter portion 303 is provided on the outer circumferential surface of the head 301. The reduced diameter portion 303 gradually reduces the outer diameter of the head 301 toward the screw portion 302. The moving member 30 is inserted into the elastic cylindrical body 29 into which one end 288 of the boss portion 281 has been inserted. When the moving member 30 is inserted into the elastic cylindrical body 29 into which one end 288 of the boss portion 281 has been inserted, the reduced diameter portion 303 comes into close contact with the tapered portion 292.

[0051] 7, in a state in which the screw portion 302 is screwed into one end 288 of the screw groove 285, the movable member 30 maintains the elastic cylindrical body 29 in a neutral state or a state close to the neutral state, and positions the elastic cylindrical body 29 at a cutting blade attachment / detachment position where the outer diameter of the elastic cylindrical body 29 is smaller than the inner diameter of the central hole 251. In the cutting blade attachment / detachment position, the movable member 30 positions the elastic cylindrical body 29 on one end 288 of the enlarged diameter portion 286 to reduce its diameter, and a gap is formed between the inner circumference of the central hole 251 of the cutting blade 21 and the outer circumferential surface of the elastic cylindrical body 29.

[0052] Furthermore, when the threaded portion 302 of the moving member 30 is screwed into the other end 289 of the thread groove 285 from the cutting blade attachment / detachment position, the reduced diameter portion 303 of the head 301 presses the elastic cylindrical body 29 in the outer circumferential direction and toward the flange main body 28. Then, since the expanded diameter portion 286, the tapered portion 292, and the reduced diameter portion 303 are formed as described above, the elastic cylindrical body 29 is moved toward the other end 289 of the boss portion 281 and the elastic cylindrical body 29 is expanded in diameter, causing the elastic cylindrical body 29 to press the central hole 251 of the cutting blade 21 in the outer circumferential direction. In this way, when the screw portion 302 of the movable member 30 is screwed into the other end 289 of the screw groove 285 closer to the cutting blade attachment / detachment position, as shown in Figure 2, the elastic cylindrical body 29 is positioned on the other end 289 side of the enlarged diameter portion 286 closer to the cutting blade attachment / detachment position, and by positioning it on the other end 289 side, the elastic cylindrical body 29 is enlarged in diameter and positioned at the cutting blade fixing position where the outer diameter of the elastic cylindrical body 29 is equal to the inner diameter of the central hole 251.

[0053] In the cutting blade fixed position, the elastic cylindrical body 29 abuts its outer surface against the inner surface of the central hole 251 of the cutting blade 21, and the elastic cylindrical body 29 presses the inner surface of the central hole 251 of the cutting blade 21 in the outer circumferential direction, thereby fixing the cutting blade 21 to the boss portion 281.

[0054] In this manner, the elastic cylinder 29 is configured to be freely movable between one end 288 side and the other end 289 side of the boss portion 281 so that it can be positioned by the moving member 30 at the cutting blade attachment / detachment position shown in Fig. 7 and at the cutting blade fixing position shown in Fig. 2. In addition, the moving member 30 moves the elastic cylinder 29 between one end 288 side and the other end 289 side of the boss portion 281.

[0055] In the cutting unit 20 configured in this manner, the flange body 28 passes the tip 231 of the spindle 23 inside the other end 289 side of the boss portion 281, and the cutting unit 20 is attached and fixed to the tip 231 of the spindle 23 by the fixing bolt 31. In the cutting unit 20, the enlarged diameter portion 286 is inserted into the elastic cylindrical body 29 from one end 288 side of the boss portion 281 of the flange body 28, the moving member 30 is inserted into the elastic cylindrical body 29, and the threaded portion 302 of the moving member 30 is screwed into the thread groove 285, thereby positioning the elastic cylindrical body 29 at the cutting blade attachment / detachment position.

[0056] With the elastic cylindrical body 29 positioned at the cutting blade attachment / detachment position, the cutting unit 20 inserts the elastic cylindrical body 29 into the central hole 251 of the cutting blade 21, supports the joining member 27 of the cutting blade 21 on the outer periphery of the center of the boss portion 281, and abuts the cutting edge 26 against the abutment portion 287 of the flange portion 282 to support the cutting blade 21 on the outer periphery of the boss portion 281. The cutting unit 20 screws the threaded portion 302 of the moving member 30 into the back of the thread groove 285 to position the elastic cylindrical body 29 at the cutting blade fixing position and fixes the cutting blade 21 to the tip portion 231 of the spindle 23.

[0057] The axes of the spindle 23, flange body 28, cutting blade 21, elastic cylinder 29 and moving member 30 of the cutting unit 20 are set parallel to the Y-axis direction. When the cutting edge 26 of the cutting blade 21 of the cutting unit 20 becomes worn, or when the type of the workpiece 200 is changed, the cutting blade 21 is replaced.

[0058] In the cutting unit 20, with the cutting blade 21 attached to the tip 231 of the spindle 23 by the flange mechanism 24, the cutting blade 21 is rotated about its axis by the spindle 23 while supplying cutting fluid to the cutting blade 21 from a cutting fluid supply nozzle. The cutting unit 20 cuts the cutting edge 26 of the cutting blade 21 rotating about its axis into the division lines 202 until it reaches the tape 206, and cuts the division lines 202 with the cutting blade 21, thereby dividing the workpiece 200 into individual devices 203.

[0059] (How to replace the cutting blade) Next, a method for replacing the cutting blade 21 will be described. Fig. 9 is a cross-sectional view showing a state where the elastic cylinder of the flange mechanism shown in Fig. 2 is positioned at the cutting blade attachment / detachment position. Fig. 10 is a cross-sectional view showing a state where a used cutting blade has been removed from the flange mechanism shown in Fig. 9. Fig. 11 is a cross-sectional view showing a state where a replacement cutting blade is attached to the flange mechanism shown in Fig. 10.

[0060] When replacing the cutting blade 21, the cutting unit 20 stops the rotation of the spindle 23 about its axis and restricts the rotation of the spindle 23 with a locking mechanism (not shown) to stop the supply of cutting fluid from the cutting fluid supply nozzle. In the cutting unit 20, the screw engagement of the screw portion 302 of the moving member 30 with the screw groove 285 is loosened, and the elastic cylindrical body 29 is positioned at the cutting blade attachment / detachment position as shown in FIG.

[0061] As shown in Fig. 10, in the cutting unit 20, the used cutting blade 21-1 is removed from the flange mechanism 24, i.e., the tip 231 of the spindle 23. As shown in Fig. 11, in the cutting unit 20, the elastic cylindrical body 29 is inserted into the central hole 251 of the replacement cutting blade 21-2, and the replacement cutting blade 21-2 is attached to the flange mechanism 24, i.e., the tip 231 of the spindle 23. In the cutting unit 20, the threaded portion 302 of the moving member 30 is screwed into the back of the thread groove 285, and the elastic cylindrical body 29 is positioned at the cutting blade fixing position, and the replacement cutting blade 21-2 is fixed to the flange mechanism 24, i.e., the spindle 23. In this way, the cutting blades 21-1 and 21-2 in the cutting unit 20 are replaced.

[0062] The replacement cutting blade 21-2 may be a new or used item. In this way, the flange mechanism 24 is not basically removed, since the elastic cylindrical body 29 and the moving member 30 continue to be attached to the flange main body 28 even when the cutting blades 21-1, 21-2 are replaced. The flange mechanism 24 is removed when the elastic cylindrical body 29 and the moving member 30 are removed from the tip portion 231 of the spindle 23.

[0063] As described above, the flange mechanism 24 and the cutting device 1 of embodiment 1 have an expanded diameter portion 286 extending from one end 288 toward the other end 289 formed in the boss portion 281, and are provided with a cylindrical elastic body 29 that is elastically deformable and surrounds the expanded diameter portion 286.

[0064] In addition, the flange mechanism 24 and the cutting device 1 of embodiment 1 are configured to be freely movable between one end side and the other end side so that they can be positioned at a cutting blade attachment / detachment position where the elastic cylindrical body 29 is positioned on one end 288 side of the enlarged diameter portion 286 to reduce its diameter and form a gap between the inner periphery of the central hole 251 of the cutting blade 21 and the outer periphery of the elastic cylindrical body 29, and at a cutting blade fixing position where the elastic cylindrical body 29 is positioned on the other end 289 side of the enlarged diameter portion 286 to increase its diameter and cause the inner periphery of the central hole 251 of the cutting blade 21 to abut against the outer periphery of the elastic cylindrical body 29.

[0065] Therefore, the flange mechanism 24 and the cutting device 1 according to the first embodiment can attach and detach the cutting blade 21 to and from the flange mechanism 24 by moving the elastic cylindrical body 29 between the cutting blade attachment / detachment position and the cutting blade fixing position.

[0066] As a result, the flange mechanism 24 and the cutting device 1 according to the first embodiment have the advantage that the cutting blade 21 can be easily attached and detached.

[0067] In addition, the flange mechanism 24 and the cutting device 1 of embodiment 1 are provided with a movable member 30 that moves the elastic cylindrical body 29 between the cutting blade attachment / detachment position and the cutting blade fixing position, so that the elastic cylindrical body 29 can be easily moved between the cutting blade attachment / detachment position and the cutting blade fixing position.

[0068] The cutting blade 21 according to the first embodiment includes an annular base 25, a cutting blade 26 made of an annular grindstone having an outer diameter larger than that of the annular base 25, and a joint member 27 having a holding portion 271 that detachably holds the inner periphery of the cutting blade 26 and a thread groove 272 that screws into the thread groove 252 of the annular base 25. As a result, the cutting blade 21 according to the first embodiment is a so-called washer blade that is composed only of the cutting blade 26, but by fixing the joint member 27 that holds the cutting blade 26 to the holding portion 271 on the annular base 25, it can be handled in the same way as a so-called hub blade and can be replaced in the same way as a hub blade.

[0069] The present invention is not limited to the above embodiment. In other words, various modifications can be made without departing from the gist of the present invention. In the present invention, the cutting device 1 may include a blade replacement unit for replacing the cutting blade 21. In this case, the blade replacement unit can be made smaller and simpler as long as it includes a mechanism for rotating the moving member 30. In the present invention, the cutting blade 21 may be a so-called hub blade in which a cutting blade is provided on the outer edge of a circular base. [Explanation of symbols]

[0070] 1 Cutting equipment 10 Holding Unit 20 Cutting unit 21, 21-1, 21-2 Cutting blade 23 Spindle 24 Flange mechanism 25 Circular Foundation 26 Cutting blade 27 Joining materials 28 Flange body 29 Elastic cylinder 30 Moving parts 200 Workpiece 231 Tip (tip) 251 Central hole 271 Holding part 272 Thread groove (engagement part) 281 Boss 282 Flange 286 Expanded diameter part 287 Contact part 288 one end 289 Other end

Claims

1. A flange mechanism for mounting a cutting blade having a central hole formed in the center and a cutting edge on an outer periphery to a spindle, a flange body including a boss portion inserted from one end side into the central hole of the cutting blade, and a flange portion having an abutment portion protruding radially outward from the other end of the boss portion and abutting against the cutting blade, the boss portion having an enlarged diameter portion that enlarges in diameter from the one end toward the other end side, the flange body being detachably fixed to the tip of the spindle; an elastic cylindrical body disposed so as to surround the enlarged diameter portion of the boss portion and interposed between the boss portion and an inner periphery of the central hole of the cutting blade into which the boss portion is inserted; The elastic cylindrical body is configured to be freely movable between one end side and the other end side so that it can be positioned at a cutting blade attachment / detachment position where it is positioned at one end side of the enlarged diameter portion to reduce its diameter and form a gap between the inner periphery of the central hole of the cutting blade and the outer periphery of the elastic cylindrical body, and at a cutting blade fixing position where it is positioned at the other end side of the enlarged diameter portion to increase its diameter and cause the inner periphery of the central hole of the cutting blade to abut against the outer periphery of the elastic cylindrical body, a flange mechanism.

2. 2. The flange mechanism according to claim 1, further comprising a moving member for moving the elastic cylindrical body between the one end side and the other end side.

3. A cutting device comprising: A holding unit for holding the workpiece; a cutting unit including a spindle to which a cutting blade having a cutting edge on an outer periphery for cutting a workpiece held by the holding unit and a central hole formed in the center is attached, and a flange mechanism for attaching the cutting blade to the spindle; The flange mechanism includes a boss portion inserted into the central hole of the cutting blade from one end side, and a flange portion having a contact portion protruding radially outward from the other end of the boss portion and contacting the cutting blade, and an enlarged diameter portion is formed in the boss portion, the diameter of which is enlarged from the one end toward the other end side, and a flange main body removably fixed to the tip of the spindle; an elastic cylindrical body disposed so as to surround the enlarged diameter portion of the boss portion and interposed between the boss portion and an inner periphery of the central hole of the cutting blade into which the boss portion is inserted; The elastic cylindrical body is configured to be freely moved between one end side and the other end side so that it can be positioned at a cutting blade attachment / detachment position where it is positioned at one end side of the enlarged diameter portion to reduce its diameter and form a gap between the inner periphery of the central hole of the cutting blade and the outer periphery of the elastic cylindrical body, and at a cutting blade fixing position where it is positioned at the other end side of the enlarged diameter portion to increase its diameter and cause the inner periphery of the central hole of the cutting blade to abut against the outer periphery of the elastic cylindrical body, in a cutting device.

4. 4. The cutting device according to claim 3, wherein said flange mechanism further comprises a moving member for moving said elastic cylindrical body between said one end side and said other end side.

5. A cutting blade mounted on the spindle according to any one of claims 1 to 4, A circular base; a cutting blade formed of an annular grindstone having an outer diameter larger than an outer diameter of the annular base; A cutting blade comprising: a joining member having a holding portion that detachably holds the inner peripheral side of the cutting blade, and an engaging portion that engages with the annular base.

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