Conveyance device and electron beam irradiation system

Abstract

To provide a conveyance device and an electron beam irradiation system capable of reducing a sag or the like in a conveyed object while eliminating the need for performing complex control for switching when rotating a pulley relative to rotation of a rotating shaft.SOLUTION: A conveyance device 4 includes a pair of rotating shafts 41 that are rotated by power from a drive unit 42 and are disposed at an interval, and a pair of winding sections 5 that is rotatably supported by each of the pair of rotating shafts 41 and around which a long conveyed object W1 is wound. At least one winding section 5 of the pair of winding sections 5 has multiple pulleys 51 lined up along the rotating shafts 41. Each of the multiple pulleys 51 includes an inner cylinder section 512 through which the rotating shafts 41 are passed while being made of a conductor. By interposing a bearing 7 between the multiple pulleys 51 and the rotating shafts 41, each of the multiple pulleys 51 can be rotated independently. In the rotating shafts 41, a magnetic field generation section 53 for generating a magnetic field is disposed in a part that opposes the inner cylinder section 512.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a transport device and an electron beam irradiation system. [Background technology]

[0002] A conventional conveying device is described in Patent Document 1. The conveying device described in Patent Document 1 includes a pair of pulley groups arranged at an interval. Each pulley included in the pulley group is rotatably supported on a rotating shaft via a bearing, and the multiple pulleys are configured to be independently rotatable.

[0003] A long transported object such as a coated electric wire is wound around the pair of pulleys. The transport device is installed so that the electron beam irradiation area of ​​the electron beam irradiation device is located above the transported object. As the pair of pulleys rotate around the rotation axis, the transported object travels back and forth through the electron beam irradiation area many times. This allows the transported object to be irradiated with an electron beam.

[0004] The conveying device is provided with a brake mechanism that can be switched between a relative rotation lock state, which stops the rotation of the pulley with respect to the rotating shaft, and a relative rotation allowance state, which releases the relative rotation lock state. When power from the driving device is to be transmitted to the pulley, the power from the driving device can be transmitted to the pulley through the rotating shaft by switching the brake mechanism to the relative rotation lock state.

[0005] On the other hand, when a long object is wound around a pair of pulleys and the pair of pulleys rotates, a difference may occur between the rotation speed of the pulleys and the rotation speed of the rotating shaft, especially during acceleration and deceleration. Therefore, by switching the brake mechanism to a relative rotation allowing state, the pulleys can rotate independently, and the difference in rotation speed between the pulleys can be absorbed. This reduces loosening or coming off of the object (hereinafter referred to as loosening, etc.). [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Patent Publication No. 2022-36595 Summary of the Invention [Problem to be solved by the invention]

[0007] In this way, the brake mechanism of the above-mentioned Patent Document 1 is controlled by a control device to switch to a relative rotation lock state during the acceleration / deceleration period of the pulley group, and to switch to a relative rotation permitted state during the constant speed period. However, there is a problem in that the control to switch the brake mechanism according to the acceleration of the pulley group is relatively complicated.

[0008] The object of the present invention has been made in consideration of the above circumstances, and is to provide a conveying device and an electron beam irradiation system that can reduce slackness of the conveyed object relative to a pulley without switching control between relative rotation and relative stop of the pulley with respect to the rotating shaft. [Means for solving the problem]

[0009] A conveying device according to one aspect of the present invention includes a pair of rotating shafts arranged at a distance from each other and rotated by power from a drive device, and a pair of winding parts rotatably supported by each of the pair of rotating shafts and around which a long object to be conveyed is wound. At least one of the pair of winding parts has a plurality of pulleys arranged along the rotating shaft. Each of the plurality of pulleys includes an inner cylindrical part through which the rotating shaft passes and which is made of a conductor. Each of the plurality of pulleys is configured to be independently rotatable by a bearing interposed between the inner cylindrical part and the rotating shaft. A magnetic field generating part that generates a magnetic field is arranged on the rotating shaft at a portion facing the inner cylindrical part.

[0010] An electron beam irradiation system according to one aspect of the present invention includes the above-described conveying device, and an electron beam irradiation device that irradiates an electron beam onto the object wrapped around the conveying device. Effect of the Invention

[0011] The conveying device and electron beam irradiation system of the above-mentioned aspects of the present invention have the advantage that slackness of the transported object relative to the pulley can be reduced without switching control between relative rotation and relative stop of the pulley with respect to the rotating shaft. [Brief description of the drawings]

[0012] [Figure 1] 1 is a schematic front view of an electron beam irradiation system according to an embodiment of the present invention; [Diagram 2] FIG. 2 is a schematic perspective view of the electron beam irradiation system according to the embodiment. [Diagram 3] FIG. 2 is a schematic cross-sectional view of a rotating shaft and a pulley according to the embodiment. [Figure 4] (A) is a cross-sectional view taken along the line AA in Fig. 3. (B) is a modified example of Fig. 4(A). [Diagram 5] FIG. 11 is a schematic cross-sectional view showing a modified example of the magnetic field generating unit. [Figure 6] 13 is a schematic cross-sectional view showing a further modified example of the magnetic field generating unit. FIG. [Figure 7] FIG. 11 is a schematic cross-sectional view showing a modified example of a pulley. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] <Embodiment> The electron beam irradiation system 1 according to this embodiment includes an electron beam irradiation device 2 that generates and emits an electron beam, a conveying device 4 around which a long transported object W1 is wound, an external feed device 3 that supplies and collects the transported object W1 to the conveying device 4, and a control device 6 that controls the conveying device 4 and the external feed device 3. The electron beam irradiation device 2 can irradiate the transported object W1 wound around the conveying device 4 with an electron beam.

[0014] As shown in Figs. 1 and 2, the conveying device 4 includes a pair of rotating shafts 41 that rotate by power from a driving device 42, and a pair of winding parts 5 rotatably supported by each rotating shaft 41. At least one of the pair of winding parts 5 has a plurality of pulleys 51 arranged along the rotating shaft 41. Each pulley 51 includes an inner cylinder part 512 through which the rotating shaft 41 passes and which is made of a conductor. As shown in Fig. 3, the pulley 51 has a bearing 7 between the inner cylinder part 512 and the rotating shaft 41, and can rotate with respect to the rotating shaft 41 (sometimes referred to as "relative rotation"). As a result, the plurality of pulleys 51 are configured to be independently rotatable. The rotating shaft 41 has a magnetic field generating part 53 that generates a magnetic field. The magnetic field generating part 53 is disposed in a portion facing the inner cylinder part 512.

[0015] With this configuration, when the winding part 5 accelerates, the driving device 42 rotates the rotating shaft 41, and when a difference occurs between the rotation speed of the pulley 51 and the rotating shaft 41, an eddy current is generated in the inner cylinder 512 by the movement of the magnetic field generating part 53. Then, a rotational force in the same direction as the rotating shaft 41 is generated in the pulley 51, so that the pulley 51 rotates in accordance with the movement of the rotating shaft 41. Also, when the winding part 5 decelerates, while the rotational speed of the rotating shaft 41 is decelerated, a rotational force due to inertia is applied to the pulley 51 by the force from the conveyed object W1, and when a speed difference occurs between the pulley 51 and the rotating shaft 41, an eddy current is generated in the inner cylinder 512 of the pulley 51 by the movement of the magnetic field generating part 53. Then, a rotational force in the same direction as the rotating shaft 41 is generated in the pulley 51, so that the pulley 51 can be decelerated in accordance with the movement of the rotating shaft 41.

[0016] Furthermore, when the transported object W1 is stretched or stretched due to high temperature during acceleration or deceleration of the winding portion 5, eddy currents are unlikely to be generated in the inner cylinder portion 512 of the pulley 51 since the speed difference between the rotation speed of the pulley 51 and the rotation shaft 41 is small. Therefore, each pulley 51 can rotate relative to the rotation shaft 41.

[0017] As a result, according to the conveying device 4 of this embodiment, slackness of the conveyed object W1 with respect to the pulley 51 can be reduced without switching control between relative rotation and relative stop of the pulley 51 with respect to the rotating shaft 41.

[0018] The transported object W1 in this specification means an object to be transported that is wound around the transport device 4. The transported object W1 is a long object, and examples thereof include wires such as coated electric wires, wires, optical cables, rubber hoses, and tubes.

[0019] The electron beam irradiation system 1 and the transport device 4 according to this embodiment will be described in more detail below. In this specification, "parallel" refers not only to the case where two straight lines, surfaces, etc. (hereinafter, "straight lines, etc.") do not intersect even when extended, but also to the case where the angle between the two straight lines, etc. is within a range of 10°. Furthermore, "orthogonal" refers to the case where two straight lines, etc. intersect within a range of 90°±10°. However, even if two straight lines, etc. do not intersect directly, if they intersect when extended, they are included in "orthogonal."

[0020] (Electron beam irradiation device 2) In the electron beam irradiation device 2, the open surface below the scan tube is covered with an electron beam irradiation window foil 21. As shown in FIG. 2, below the electron beam irradiation window foil 21 is an electron beam irradiation area D1 (electron beam irradiation region), and the electron beam irradiation area D1 is located between a pair of winding parts 5. The electron beam irradiation device 2 can emit electron beams toward the electron beam irradiation area D1. Therefore, by irradiating the transported object W1 wrapped around the pair of winding parts 5 with an electron beam while moving it, the electron beam can be irradiated over the entire length of the transported object W1.

[0021] (External feeding device 3) The external feed device 3 supplies the transported object W1 to the conveying device 4. The external feed device 3 can also collect the transported object W1 wound around the conveying device 4 after it has been irradiated by the electron beam irradiation device 2. The external feed device 3 includes a pulley (not shown) for sending out the transported object W1 and a pulley (not shown) for collecting the transported object W1. The rotational speed of each pulley is controlled by a control device 6 described below so as to match the rotational speed of a winding portion 5 of the conveying device.

[0022] (Transportation device 4) The conveying device 4 can convey an object W1 wound around a pair of winding parts 5. In the electron beam irradiation system 1 according to this embodiment, the object W1 is irradiated with an electron beam from the electron beam irradiation device 2 during conveyance. As shown in FIG. 1 , the conveying device 4 includes a pair of rotating shafts 41, a plurality of support columns 43 that rotatably support each rotating shaft 41, a plurality of driving devices 42 that drive each rotating shaft 41, and a pair of winding parts 5.

[0023] The rotating shaft 41 is the rotating shaft of the winding part 5. The pair of rotating shafts 41 are arranged at an interval in a direction perpendicular to the rotating shaft 41 and are parallel to each other. Both ends in the longitudinal direction of the rotating shaft 41 are rotatably supported by a support 43. As shown in FIG. 3, a driven pulley 411 is fixed to one end in the longitudinal direction of the rotating shaft 41. As shown in FIG. 1, the driven pulley 411 is connected to a driving pulley 421 fixed to the output shaft of the driving device 42 via a power transmission body 422 so that power can be transmitted thereto. That is, the driven pulley 411 rotates by the power from the driving device 42. As a result, the rotating shaft 41 can rotate by the power from the driving device 42.

[0024] The power transmission body 422 is a component for transmitting a rotational force from the driving device 42. The power transmission body 422 is preferably endless. Examples of the power transmission body 422 include a drive belt, a drive chain, a wire, a belt, and a drive shaft.

[0025] The pillars 43 are columns that protrude upward from the base 44. One rotating shaft 41 is hung between a pair of pillars 43. The transport device 4 according to this embodiment has two sets of pairs of pillars 43. As shown in FIG. 3, the pillars 43 have a bearing portion 431 provided at the upper end. The pillars 43 support the rotating shaft 41 via the bearing portion 431, thereby enabling the rotating shaft 41 to be rotatably supported.

[0026] The driving device 42 is a driving source that rotates the rotating shaft 41. An example of the driving device 42 is a motor. An example of the motor is an electric motor, a hydraulic motor, a pneumatic motor, or the like. In this embodiment, as shown in FIG. 1, the multiple driving devices 42 correspond one-to-one to the multiple rotating shafts 41. In this embodiment, the multiple driving devices 42 are installed on a base 44. Note that the number of driving devices 42 does not need to be multiple, and for example, multiple rotating shafts 41 may be rotated by one driving device 42.

[0027] The operation of the drive devices 42 is controlled by the control device 6. The control device 6 controls the pair of drive devices 42 so that the rotational speeds (angular velocities) of the pair of winding parts 5 are the same. The control device 6 can also control the drive devices 42 so that the rotational speed of the winding parts 5 is the same as the supply speed and recovery speed of the transported object W1 by the external feed device 3. The control of the rotational speed of the drive devices 42 by the control device 6 can be achieved by, for example, inverter control.

[0028] (Wrapping part 5) The winding parts 5 are rotatably supported by the respective rotating shafts 41. As shown in FIG. 1, a long transported object W1 is wound around the pair of winding parts 5. In this embodiment, the transported object W1 is wound around the pair of winding parts 5 in a so-called cross-wrapping manner, in which the transported object W1 is wound from the upper end of one winding part 5 to the lower end of the other winding part 5, and then from the upper end of the other winding part 5 to the lower end of the one winding part 5. However, the transported object W1 may be wound around the pair of winding parts 5 in a so-called circumferential manner, in which the transported object W1 is wound from the upper end of one winding part 5 to the upper end of the other winding part 5, and then from the lower end of the other winding part 5 to the lower end of the one winding part 5.

[0029] 3, each winding portion 5 is composed of a plurality of pulleys 51 arranged along the rotating shaft 41. There are no particular limitations on the material of the plurality of pulleys 51 as long as it is made of a conductor, and examples of the material include stainless steel, aluminum, steel, iron, chromium, and copper.

[0030] Each pulley 51 includes a disk-shaped pulley body 511, an inner cylinder portion 512 disposed at the center of the pulley body 511 and through which the rotating shaft 41 passes, and a plurality of grooves 513 formed on the outer periphery of the pulley body 511. The plurality of grooves 513 open toward the outside in the radial direction of the rotating shaft 41. Each groove 513 accommodates one transported article W1.

[0031] The inner cylinder portion 512 is disposed so as to be concentric with the rotating shaft 41. A bearing 7 is interposed between the inner cylinder portion 512 and the rotating shaft 41. This allows each pulley 51 to rotate relative to the rotating shaft 41. In other words, each of the multiple pulleys 51 can rotate independently.

[0032] The bearing 7 may be, for example, either a rolling bearing or a sliding bearing. In this embodiment, a ball bearing in which a plurality of balls are arranged between an inner ring and an outer ring is used as the rolling bearing. In the conveyor device 4 according to this embodiment, two bearings 7 are used for one pulley 51. The two bearings 7 are spaced apart in the axial direction of the rotating shaft 41 with a gap between them.

[0033] The rotating shaft 41 is provided with a magnetic field generating unit 53 that generates a magnetic field. As shown in Fig. 3, the magnetic field generating unit 53 is disposed in a portion facing the pulley 51. Here, a portion of the pulley 51 facing the magnetic field generating unit 53 is referred to as a "facing portion 52." The facing portion 52 according to this embodiment refers to a portion of the inner cylinder portion 512 (a portion between the two bearings 7).

[0034] The direction of the magnetic field generated by the magnetic field generating unit 53 intersects with the rotation axis 41. In this embodiment, the magnetic field generating unit 53 is a permanent magnet. However, the magnetic field generating unit 53 may be, for example, an electromagnet. In this embodiment, the magnetic field generating unit 53 is spaced apart in the diameter direction of the rotation axis 41. The magnetic field generating unit 53 has a first magnetic pole 531 at one end in the diameter direction and a second magnetic pole 532 at the other end. The first magnetic pole 531 is, for example, a positive pole (N pole), and the second magnetic pole 532 is a negative pole (S pole). However, the first magnetic pole may be a negative pole and the second magnetic pole may be a positive pole.

[0035] In the magnetic field generating unit 53, it is preferable that the first magnetic pole 531 and the second magnetic pole 532 are repeatedly arranged along the diameter of the rotation shaft 41. For example, when two magnetic field generating units 53 are arranged with a gap in the diameter direction, the surface facing outward in the radial direction of one magnetic field generating unit 53 is the first magnetic pole 531, and the surface facing outward of the other magnetic field generating unit 53 is the second magnetic pole 532. This makes it easier for the direction of the magnetic field to intersect with the rotation shaft 41.

[0036] It is preferable that the outer surface of the magnetic field generating unit 53 in the radial direction of the rotating shaft 41 is exposed from the rotating shaft 41. It is preferable that the surface of the magnetic field generating unit 53 and the outer peripheral surface of the rotating shaft 41 are flush with each other. However, as long as the rotating shaft 41 can be fitted into the bearing 7, it is not necessary that the outer surface of the magnetic field generating unit 53 and the outer peripheral surface of the rotating shaft 41 are flush with each other. In addition, the magnetic field generating unit 53 does not have to be exposed from the surface of the rotating shaft 41, and may be entirely embedded in the rotating shaft 41.

[0037] The magnetic field generating unit 53 faces the facing unit 52. The magnetic field generating unit 53 according to the present embodiment faces the facing unit 52 via a gap, but other members may be interposed between the magnetic field generating unit 53 and the facing unit 52 as long as the magnetic field from the magnetic field generating unit 53 reaches the facing unit 52.

[0038] The multiple magnetic field generating units 53 are preferably arranged at intervals along the axial direction of the rotating shaft 41 and are arranged in portions facing all of the pulleys 51. However, some of all the pulleys 51 may include pulleys 51 that do not face the magnetic field generating units 53 (pulleys 51 that do not have facing portions 52). The number of pulleys 51 facing the magnetic field generating units 53 is preferably 60% or more of all the pulleys 51, more preferably 80% or more, and even more preferably 90% or more.

[0039] As shown in Fig. 4(A), the multiple magnetic field generating units 53 are preferably arranged at regular intervals in the rotation direction of the rotating shaft 41. By arranging the multiple magnetic field generating units 53 at regular intervals, the rotation speed of the rotating shaft 41 is less likely to become uneven, and the rotation speed is likely to be stable. In this embodiment, the multiple magnetic field generating units 53 are arranged so that the central angle of a line connecting each magnetic field generating unit 53 and the center of the rotating shaft 41 is 90°. However, there are no particular limitations on the multiple magnetic field generating units 53 as long as the magnetic field generating units 53 adjacent to each other in the rotation direction are separated from each other, and the central angle may be, for example, 60°, 45°, or 30°.

[0040] 4B, the magnetic field generating units 53 may be connected in the radial direction. The magnetic field generating units 53 adjacent to each other in the radial direction of the rotating shaft 41 are each composed of, for example, one magnet. In this case, the magnetic field generating units 53 are also arranged at regular intervals, but the central angle between them is 180°.

[0041] In the conveying device 4 configured as above, when the winding part 5 accelerates, the rotating shaft 41 is rotated by the driving device 42, and when a difference occurs between the rotation speed of the pulley 51 and the rotating shaft 41, an eddy current is generated in the opposing part 52 of the pulley 51 due to the movement of the magnetic field generating part 53. Then, a rotational force in the same direction as the rotating shaft 41 is generated in the pulley 51, so that the pulley 51 can rotate in accordance with the movement of the rotating shaft 41.

[0042] Furthermore, when the winding part 5 is decelerating, the rotational speed of the rotating shaft 41 is decelerated, while a rotational force due to inertia is applied to the pulley 51 due to the force from the conveyed object W1, and when a speed difference occurs between the pulley 51 and the rotating shaft 41, an eddy current is generated in the opposing part 52 of the pulley 51 due to the movement of the magnetic field generating part 53. Then, a rotational force in the same direction as the rotating shaft 41 is generated in the pulley 51, so that the pulley 51 can be decelerated in accordance with the movement of the rotating shaft 41.

[0043] Furthermore, when the winding portion 5 is accelerated or decelerated, even if the transported object W1 stretches or stretches due to the transported object W1 becoming hot, the speed difference between the rotation speed of the pulley 51 and the rotation speed of the rotating shaft 41 is small, so that eddy currents are unlikely to be generated in the opposing portion 52 of the pulley 51. Therefore, each pulley 51 can rotate relative to the rotating shaft 41.

[0044] Therefore, while the pulley 51 is rotated by the rotation of the rotating shaft 41 to move the transported object W1, loosening or coming off of the transported object W1 from the pulley 51 is reduced. As a result, according to the transport device 4 of this embodiment, loosening of the transported object W1 from the pulley 51 can be reduced without switching control between relative rotation and relative stop of the pulley 51 with respect to the rotating shaft 41.

[0045] In the electron beam irradiation system 1 according to the present embodiment, the electron beam irradiation device 2 is configured to have a large area of ​​the electron beam irradiation area D1, which reduces the density of the electron beam. However, the transport device 4 can reciprocate the transported object W1 using multiple pulleys 51, so that even if the density of the electron beam irradiated from the electron beam irradiation device 2 is relatively low, an appropriate amount of electron beam can be irradiated onto the transported object W1.

[0046] In this way, by repeatedly moving the transported object W1 back and forth using the multiple pulleys 51, an appropriate amount of electron beam can be applied to the transported object, but on the other hand, the transported object W1 is likely to become hot, and depending on the transported object W1, it is likely to stretch due to thermal expansion. However, according to the transport device 4 of this embodiment, the multiple pulleys 51 of the winding part 5 are configured to be independently rotatable, so that even if the transported object W1 stretches due to thermal expansion, the stretch can be absorbed.

[0047] <Modification> The above embodiment is merely one of various embodiments of the present invention. The embodiment can be modified in various ways depending on the design, etc., as long as the object of the present invention can be achieved. Modifications of the embodiment are listed below. The modifications described below can be applied in appropriate combination.

[0048] In the above embodiment, all of the pulleys 51 of the pair of winding portions 5 have a magnetic field generating portion 53, but for example, only the pulleys 51 of one of the pair of winding portions 5 may have a magnetic field generating portion 53.

[0049] In the above embodiment, the multiple magnetic field generating units 53 are arranged at regular intervals in the axial direction of the rotating shaft 41, but as shown in Fig. 5, they may be continuous in the axial direction of the rotating shaft 41. Each magnetic field generating unit 53 has a first magnetic pole 531 on the outer side of the center in the radial direction of the rotating shaft 41, and a second magnetic pole 532 on the inner side.

[0050] In the above embodiment, the facing portion 52 of the pulley 51 faces the magnetic field generating unit 53 in the radial direction of the rotating shaft 41, but as shown in FIG. 6, the facing portion 52 of the pulley 51 may face the magnetic field generating unit 53 in the axial direction of the rotating shaft 41. The facing portion 52 is formed in a flange shape at the end of the inner cylindrical portion 512 in the axial direction. The facing portion 52 is a part of the inner cylindrical portion 512. The magnetic field generating unit 53 has a first magnetic pole 531 on one side surface side and a second magnetic pole 532 on the other side surface side in the axial direction of the rotating shaft 41.

[0051] In the above embodiment, the entire pulley 51 is made of a conductor, but as shown in FIG. 7, for example, at least the inner cylinder 512 may be made of a conductor. In the pulley 51 according to the modified example, only the inner cylinder 512 is made of a conductor, and the pulley body 511 is made of an insulator (non-conductor). Examples of materials for the pulley body 511 include ceramics, synthetic resin, FRP, and glass. The inner cylinder 512 is fitted into a through hole in the center of the pulley body 511 and fixed to the pulley body 511. A bearing 7 is interposed between the inner cylinder 512 and the rotating shaft 41.

[0052] In the above embodiment, the pulley body 511, the inner cylinder portion 512 and the groove 513 are integral, and in the modified example of Figure 7, the pulley body 511 and the inner cylinder portion 512 are separate, but each of the pulley body 511, the inner cylinder portion 512 and the groove 513 may be integral or separate.

[0053] <Summary> As described above, the conveying device 4 according to the first embodiment includes a pair of rotating shafts 41 that rotate by the power from the driving device 42 and are arranged at an interval, and a pair of winding parts 5 that are rotatably supported by each of the pair of rotating shafts 41 and around which the long transported object W1 is wound. At least one of the pair of winding parts 5 has a plurality of pulleys 51 arranged along the rotating shaft 41. Each of the plurality of pulleys 51 includes an inner cylindrical part 512 through which the rotating shaft 41 passes and which is made of a conductor. Each of the plurality of pulleys 51 is configured to be independently rotatable by interposing a bearing 7 between the inner cylindrical part 512 and the rotating shaft 41. The magnetic field generating part 53 that generates a magnetic field is arranged on the rotating shaft 41 at a portion facing the inner cylindrical part 512 of the plurality of pulleys 51.

[0054] According to this embodiment, when the winding part 5 accelerates, the driving device 42 rotates the rotating shaft 41, and when a difference occurs between the rotation speed of the pulley 51 and the rotating shaft 41, an eddy current is generated in the inner cylinder part 512 due to the movement of the magnetic field generating part 53. Then, a rotational force in the same direction as that of the rotating shaft 41 is generated in the pulley 51, so that the pulley 51 rotates in accordance with the movement of the rotating shaft 41. Also, when the winding part 5 decelerates, while the rotational speed of the rotating shaft 41 is decelerated, a rotational force due to inertia is applied to the pulley 51 due to the force from the conveyed object W1, and when a speed difference occurs between the pulley 51 and the rotating shaft 41, an eddy current is generated in the inner cylinder part 512 due to the movement of the magnetic field generating part 53. Then, a rotational force in the same direction as that of the rotating shaft 41 is generated in the pulley 51, so that the pulley 51 decelerates in accordance with the movement of the rotating shaft 41. Furthermore, when the transported object W1 is stretched during acceleration or deceleration of the winding portion 5, or when the transported object W1 is stretched due to its high temperature, the speed difference between the rotation speed of the pulley 51 and the rotation speed of the rotating shaft 41 is small, so eddy currents are unlikely to be generated in the opposing portion 52 of the pulley 51. Therefore, each pulley 51 can rotate relative to the rotating shaft 41. As a result, according to the transport device 4 of this embodiment, it is possible to reduce slackness of the transported object W1 relative to the pulley 51 without switching between relative rotation and relative stop of the pulley 51 with respect to the rotating shaft 41.

[0055] The conveying device 4 according to the second aspect has a plurality of magnetic field generating units 53 in the first aspect, and the plurality of magnetic field generating units 53 are arranged at intervals along the axial direction of the rotating shaft 41 and are arranged in portions facing the inner cylinder portions 512 of the respective pulleys 51. According to this aspect, a rotational force from the rotating shaft 41 can be applied to all the pulleys 51.

[0056] The conveyance device 4 according to the third aspect has a plurality of magnetic field generating units 53 in the first or second aspect, and the plurality of magnetic field generating units 53 are arranged at regular intervals in the rotation direction of the rotating shaft 41. According to this aspect, the rotation speed of the pulley 51 is stabilized.

[0057] In the transport device 4 according to the fourth aspect, in any one of the first to third aspects, the magnetic field generating section 53 is a permanent magnet. According to this aspect, a stable magnetic field can be obtained.

[0058] An electron beam irradiation system 1 according to a fifth aspect includes the conveying device 4 according to any one of the first to fourth aspects, and an electron beam irradiation device 2 that irradiates an electron beam to a conveyed object W1 wound around the conveying device 4. According to this aspect, even if the conveyed object W1 is heated by the electron beam from the electron beam irradiation device 2 and expands due to the heat, the occurrence of loosening or the like can be reduced. [Explanation of symbols]

[0059] 1. Electron beam irradiation system 2 Electron beam irradiation device 4. Conveyor 41 Rotation axis 42 Drive unit 5 Winding section 51 Pulley 512 Inner cylinder 52 Opposing part 53 Magnetic field generating unit W1 Transported item 7. Bearings

Claims

1. A pair of rotating shafts that are rotated by power from a drive device and are arranged at a distance from each other; a pair of winding sections that are rotatably supported by the pair of rotating shafts, respectively, and around which a long transported object is wound; Equipped with At least one of the pair of winding parts has a plurality of pulleys arranged along the rotation shaft, Each of the plurality of pulleys includes an inner cylindrical portion through which the rotating shaft passes and which is made of a conductor, Each of the plurality of pulleys is configured to be independently rotatable by a bearing interposed between the inner cylinder portion and the rotating shaft, A magnetic field generating unit that generates a magnetic field is disposed on the rotating shaft at a portion facing the inner cylindrical portion. Conveying device.

2. The magnetic field generating unit includes a plurality of the magnetic field generating units, The magnetic field generating units are arranged at intervals along the axial direction of the rotation shaft and are arranged in portions of the pulleys facing the inner cylinder portions. The conveying device according to claim 1 .

3. The magnetic field generating unit includes a plurality of the magnetic field generating units, The magnetic field generating units are arranged at regular intervals in the rotation direction of the rotation shaft. The conveying device according to claim 1 .

4. The magnetic field generating unit is a permanent magnet. The conveying device according to any one of claims 1 to 3.

5. A conveying device according to any one of claims 1 to 3; an electron beam irradiation device that irradiates the transported object wound around the transport device with an electron beam; An electron beam irradiation system comprising:

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