Measurement device

Abstract

To provide a measurement device that allows easy maintenance such as position adjustment of measurement sensors for measuring a measurement target.SOLUTION: A measurement device 1 comprises: a holding section 31 configured to hold a measurement target W; a measurement section 5 (a first measurement section 51, a second measurement section 52) which is provided at a position facing the holding section 31 and includes sensors 511, 521 configured to perform measurement processing on the measurement target W; a frame body 4 whose position relative to the holding section 31 is fixed; and a plurality of arms 6 connecting the frame body 4 and the measurement section 5.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a measuring apparatus for measuring the shape of a workpiece. [Background technology]

[0002] 2. Description of the Related Art Conventionally, as a measuring device for measuring the shape of a measurement object, a measuring device in which a measurement sensor is held on a frame is known (see, for example, Patent Document 1). The measuring device described in Patent Document 1 has a first distance sensor supported by a support disposed above a movable stage on which an object to be measured is placed. Also, a second distance sensor supported by a support disposed below the movable stage. In this measuring device, the thickness of the object to be measured is calculated based on the distance to the top surface of the object measured by the first distance sensor and the distance to the bottom surface of the object measured by the second distance sensor, to determine the shape of the object to be measured. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2016-70691 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the measuring device described in Patent Document 1, measuring sensors (first distance sensor and second distance sensor) are fixed to a frame-shaped support. However, depending on the installation environment of the measuring device, etc., maintenance of the measuring sensors on the stage may be required. In the measuring device described in Patent Document 1, the measuring sensors are directly fixed to the support, which poses a problem that it is difficult to perform such maintenance.

[0005] In particular, in the manufacture of wafers such as WLO (wafer level optics) mounted on small devices such as mobile phones, it is necessary to precisely measure the front and back surfaces of the wafer, which is the object to be measured. In this case, in order to simultaneously measure the shape of the front surface and the shape of the back surface at a predetermined position of the wafer, it is necessary to accurately align the measurement sensor for the front surface and the measurement sensor for the back surface. In this case, in a configuration such as that of Patent Document 1 in which two measurement sensors (a first distance sensor and a second distance sensor) are fixed to a frame-shaped support, the distance between the frame and the measurement sensors becomes narrow, making it more difficult to access the measurement sensors.

[0006] An object of the present invention is to provide a measuring device that facilitates maintenance such as adjusting the position of a measurement sensor that measures an object to be measured. [Means for solving the problem]

[0007] A measuring device according to a first aspect of the present disclosure comprises a holding section for holding an object to be measured, a measuring section provided opposite the holding section and equipped with a sensor for performing a measurement process on the object to be measured, a frame body, and a plurality of arms connecting the frame body and the measuring section.

[0008] As a result, even if it is desired to fine-tune the position or attitude of the measurement unit relative to the frame body of the measuring device, the position or attitude of the measurement unit can be easily adjusted by fine-tuning the angle, length, etc. of the arm. In addition, the presence of the arm means that the measurement unit is spaced apart from the frame body, making it easy to access the measurement unit through the gap between the frame body and the measurement unit, and facilitating maintenance.

[0009] In the measuring device of this aspect, it is preferable that a direction from the measuring unit toward the object to be measured is defined as a Z direction, a direction perpendicular to the Z direction is defined as an X direction, and a direction perpendicular to the X direction and the Z direction is defined as a Y direction from the frame body toward the measuring unit, and that the multiple arms include a multiple Z support arms arranged along the Z direction and a multiple X support arms arranged along the X direction.

[0010] This makes it possible to suppress changes in the posture of the measurement part using the Z support arm and the X support arm.

[0011] In the measuring device of this embodiment, the measuring unit comprises a first measuring unit arranged at a position facing a first surface of the object to be measured held in the holding unit, and a second measuring unit arranged at a position facing a second surface opposite the first surface of the object to be measured held in the holding unit, and it is preferable that each of the first measuring unit and the second measuring unit is connected to the frame body by a plurality of the arms. This makes it possible to simultaneously measure the surface shapes of the first and second surfaces of the object to be measured.

[0012] In the measuring device of this embodiment, the multiple Z support arms include a multiple first Z support arms that support the first measurement unit and a multiple second Z support arms that support the second measurement unit, and in a projected view from the X direction, the multiple first Z support arms and the multiple second Z support arms are each arranged at a position that is symmetrical with respect to a reference line that includes the midpoint between the first measurement unit and the second measurement unit and is parallel to the Y direction, and the fixed position of the first Z support arm to the frame body and the fixed position of the second Z support arm to the frame body that is symmetrical to the first Z support arm with respect to the reference line are aligned on a first virtual line parallel to the Z direction, and the fixed position of the first Z support arm to the first measurement unit and the fixed position of the second Z support arm to the second measurement unit that is symmetrical to the first Z support arm with respect to the reference line are aligned on a second virtual line parallel to the Z direction.

[0013] This allows the first Z support arm and the second Z support arm to absorb dimensional variations such as distortion of the frame body caused by temperature changes, thereby suppressing shifts in the positional relationship between the first and second measuring parts due to dimensional variations in the frame body, and the resulting occurrence of measurement errors.

[0014] In the measurement device of this embodiment, It is preferable that the multiple X support arms include a multiple of first X support arms supporting the first measurement unit and a multiple of second X support arms supporting the second measurement unit, the multiple first X support arms and the multiple second X support arms are each disposed at positions symmetrical with respect to a reference plane that includes a midpoint between the first measurement unit and the second measurement unit in the Z direction and is parallel to the XY plane, a fixing position of the first X support arm to the frame main body and a fixing position of the second X support arm to the frame main body that is symmetrical to the first X support arm with respect to the reference plane are aligned on a third virtual line parallel to the X direction, and a fixing position of the first X support arm to the first measurement unit and a fixing position of the second X support arm to the second measurement unit that is symmetrical to the first X support arm with respect to the reference plane are aligned on a fourth virtual line parallel to the X direction.

[0015] As a result, similarly to the above-described embodiment, dimensional fluctuations such as distortion of the frame main body caused by temperature changes can be absorbed by the first X-ray support arm and the second X-ray support arm, and deviations in the positional relationship between the first and second measurement units caused by dimensional fluctuations of the frame main body and resulting measurement errors can be suppressed.

[0016] In the measurement device of this aspect, it is preferable that each of the multiple arms is configured so that the length of the arm in the longitudinal direction is extendable and contractable. This makes it possible to easily adjust the position and orientation of the measurement part relative to the frame body by extending and contracting the arm.

[0017] In the measuring device of this aspect, the arm preferably comprises a longitudinal arm body, and an arm fixing mechanism provided on at least one of the longitudinal ends of the arm body on the frame side and the measuring unit side, and the arm fixing mechanism preferably comprises a fixed piece fixed to the frame body or the measuring unit, an arm support part which rotatably supports the arm body, and an adjustment part which connects the fixed piece and the arm support part and moves the position of the arm support part relative to the fixed piece forward and backward along the longitudinal direction of the arm body. By operating the adjustment portion, the arm support portion can be advanced or retreated relative to the fixed piece, and the longitudinal length of the arm can be easily adjusted. [Brief description of the drawings]

[0018] [Figure 1] FIG. 1 is a perspective view showing a measuring device according to an embodiment of the present invention. [Diagram 2] FIG. 4 is a side view of the measuring device of the present embodiment as viewed from the -X side. [Diagram 3] FIG. 2 is a plan view of the measurement device of the present embodiment as viewed from the +Z side. [Figure 4] 5A and 5B are diagrams showing an arm fixing mechanism of the arm of the present embodiment, in which (A) is a plan view of a part of the arm arranged on the -X side as viewed from the -X side, and (B) is a cross-sectional view taken along line BB in (A). [Diagram 5] 11 is a cross-sectional view of a part of the arm of the embodiment, cut along a plane passing through a middle position in the thickness direction. FIG. [Figure 6] FIG. 4 is a schematic perspective view showing the positional relationship of an X support arm in the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0019] Hereinafter, one embodiment of the present invention will be described. FIG. 1 is a perspective view showing a measuring device 1 according to the present embodiment. The measuring device 1 of this embodiment is a measuring device that measures the shape of WLO (wafer level optics). As shown in Fig. 1, the measuring device 1 includes a table 3 fixed to a base 2, a frame body 4, and a measuring unit 5 (a first measuring unit 51, a second measuring unit 52) ​​connected to the frame body 4 via an arm 6.

[0020] [Table 3 Configuration] The table 3 is provided with a holding unit 31 that holds a measured object W (WLO in this embodiment) and a moving mechanism 32 that moves the holding unit 31 in a horizontal direction (XY direction). In this embodiment, the shape of the +Z side surface (first surface) of the measured object W held by the holding unit 31 is measured by a first measuring unit 51, and the shape of the -Z side surface (second surface) of the measured object W is measured by a second measuring unit 52. Therefore, the holding unit 31 is provided with a hole that penetrates in the Z direction, and the measured object W held by, for example, a holder 311 is placed on the holding unit 31.

[0021] The movement mechanism 32 includes an X movement mechanism 321 that moves the holder 31 in the X direction, and a Y movement mechanism 322 that moves the holder 31 in the Y direction. The configurations of the X movement mechanism 321 and the Y movement mechanism 322 are not particularly limited, and any mechanism may be used as long as it moves the holder 31 in the X and Y directions. For example, the X movement mechanism 321 may include an X rail that is provided on a support base fixed to the base 2 and parallel to the X direction, an X slider that can move in the X direction along the X rail, and an X actuator that moves the X slider in the X direction. The Y movement mechanism 322 may include an Y rail that is provided on the X slider and parallel to the Y direction, a Y slider that can move in the Y direction along the Y rail, and a Y actuator that moves the Y slider in the Y direction.

[0022] These moving mechanisms 32 can be controlled by a controller (not shown), and based on the control of the controller, the object W held by the holder 31 is moved in the X direction and Y direction between the first measurement unit 51 and the second measurement unit 52. This makes it possible to move the measurement position of the object W measured by the first measurement unit 51 and the second measurement unit 52.

[0023] [Configuration of measurement unit 5] The measurement unit 5 includes a first measurement unit 51 and a second measurement unit 52 . The first measurement unit 51 is disposed on the +Z side (upper side) of the table 3 , and includes a first measurement sensor 511 and a first plate 512 . In this embodiment, the first measurement sensor 511 is a SIM (Structured Illumination Microscope) sensor suitable for measuring WLO. Such a SIM sensor can easily perform highly accurate measurement of the object W having low reflectance (translucency) such as WLO. The measurement axis of the first measurement sensor 511 is parallel to the Z direction, and the measurement direction is directed to the -Z side. Therefore, when the object W is held by the holder 31 of the table 3, the first measurement sensor 511 can perform shape measurement of the upper surface (+Z side surface) of the object W. The first plate 512 is a fixed plate to which the first measurement sensor 511 is fixed, and is disposed on the -Y side (rear side) of the first measurement sensor 511, that is, at a position facing the frame body 4. Although details will be described later, the first plate 512 is connected to the frame body 4 via a plurality of arms 6. Note that the first plate 512 may be provided integrally with the first measurement sensor 511.

[0024] The second measurement unit 52 is disposed on the −Z side (below) of the table 3 , and includes a second measurement sensor 521 and a second plate 522 . In this embodiment, the second measurement sensor 521 is a SIM sensor, similar to the first measurement sensor 511. The measurement axis of the second measurement sensor 521 is parallel to the Z direction, and the measurement direction is directed to the +Z side. Therefore, when the object W is held by the holder 31 of the table 3, the second measurement sensor 521 can measure the shape of the lower surface (-Z side surface) of the object W. The second plate 522 is a fixed plate to which the second measurement sensor 521 is fixed, and is disposed on the -Y side (rear side) of the second measurement sensor 521, that is, at a position facing the frame body 4. The second plate 522 is connected to the frame body 4 via a plurality of arms 6, similar to the first plate 512. The second plate 522 may be provided integrally with the second measurement sensor 521.

[0025] [Frame body 4 configuration] The frame main body 4 is fixed to the base 2. Here, the frame main body 4 may be fixed to the base 2 directly, or may be fixed via another member such as a table 3. The frame main body 4 is preferably formed from a robust material such as metal. In this frame body 4, for example, a controller (not shown) that controls the operation of the measurement device 1 may be stored. The measuring device 1 is also provided with a position measuring unit that faces the holding unit 31 of the table 3 and measures the position of the holding unit 31. The position measuring unit may have any configuration that can measure the position of the holding unit 31 (i.e., the position of the object W held by the holding unit 31). For example, in this embodiment, as shown in FIG. 1, a laser length measuring device 41 is provided in the frame body 4 as a position measuring unit. For example, the laser length measuring device 41 splits light from a laser light source into reference light and measurement light, irradiates the reference light onto a retroreflector (not shown) provided on the holding unit 31, and measures the distance from the laser length measuring device to the holding unit 31 provided with the retroreflector based on the interference light between the measurement light reflected by the retroreflector and the reference light. This makes it possible to measure the position of the holding unit 31 in the Y direction. Although not shown in FIG. 1, the measuring device 1 is also provided with a laser length measuring device that measures the position of the holding unit in the X direction. The above-mentioned laser length measuring device 41 is an example of a position measuring unit, and other configurations may be used in which the position of holding unit 31 is measured by an encoder provided on the drive shaft of X-movement mechanism 321 and Y-movement mechanism 322, or the position of holding unit 31 is measured by a scale and a detector that detects the scale graduations.

[0026] In this embodiment, a plurality of arms 6 are fixed to the frame body 4, and the measurement unit 5 (first measurement unit 51 and second measurement unit 52) ​​is supported via the arms 6. For this reason, the frame body 4 is provided with arm fixing parts 42 (see FIG. 5) for fixing the arms 6, and fixing pieces 62 constituting the arms 6 are fixed to the arm fixing parts 42.

[0027] [Arm 6 Configuration] (Outline of Arm 6) Fig. 2 is a side view of the measuring device 1 of this embodiment as viewed from the -X side, and Fig. 3 is a plan view of the measuring device 1 of this embodiment as viewed from the +Z side. In this embodiment, the arms 6 disposed on the sides (±X side edges) of the first measurement unit 51 and the second measurement unit 52 are Z support arms of the present disclosure. Of these Z support arms, the arms 6 provided on the sides (±X side edges) of the first measurement unit 51 are first Z support arms 6A1, 6A2 of the present disclosure. Moreover, the arms 6 provided on the sides of the second measurement unit 52 are second Z support arms 6B1, 6B2. On the other hand, the arms 6 provided above (+Z side) the first measurement unit 51 and below (-Z side) the second measurement unit 52 are X support arms of the present disclosure. Of these X support arms, the arms 6 provided above the first measurement unit 51 are first X support arms 6C1, 6C2, and the arms 6 provided below the second measurement unit 52 are second X support arms 6D1, 6D2.

[0028] As shown in Figure 2, when the measuring device 1 is viewed from the -X side, of the two first Z support arms 6A1, 6A2 connected to the -X side of the first plate 512 of the first measuring section 51, the first Z support arm 6A1 on the +Z side is arranged parallel to the Y direction, and the first Z support arm 6A2 on the -Z side is arranged at an incline with respect to the Y direction (inclined toward the +Z side as it approaches the +Y side). Of the two second Z support arms 6B1, 6B2 connected to the -X side of the second plate 522 of the second measurement unit 52, the second Z support arm 6B1 on the -Z side is arranged parallel to the Y direction, and the second Z support arm 6B2 on the +Z side is arranged inclined with respect to the Y direction (inclined toward the -Z side toward the +Y side). As shown in FIG. 3, the second Z support arms 6B1, 6B2 connected to the -X side of the second measurement unit 52 are arranged on the -X side by a predetermined dimension from the two first Z support arms 6A1, 6A2 connected to the side edge of the -X side of the first measurement unit 51. Therefore, the -X side edge of the second plate 522 of the second measurement unit 52 protrudes to the -X side further than the -X side edge of the first plate 512.

[0029] The first Z support arms 6A1, 6A2 arranged on the +X side edge of the first measurement unit 51 are substantially similar to the first Z support arms 6A1, 6A2 arranged on the -X side edge of the first measurement unit 51. That is, of the first Z support arms 6A1, 6A2 on the +X side of the first measurement unit 51, the first Z support arm 6A1 arranged on the +Z side is arranged parallel to the Y direction, and the first Z support arm 6A2 arranged on the -Z side is arranged at an angle with respect to the Y direction. The second Z support arms 6B1, 6B2 on the +X side of the second measurement unit 52 are similar to the second Z support arms 6B1, 6B2 arranged on the -X side of the second measurement unit 52, and the second Z support arm 6B1 on the -Z side is arranged parallel to the Y direction, and the second Z support arm 6B2 on the +Z side is arranged at an angle with respect to the Y direction. As shown in FIG. 3, the two first Z support arms 6A1, 6A2 connected to the +X side edge of the first measurement unit 51 are arranged on the +X side by a predetermined dimension from the two second Z support arms 6B1, 6B2 connected to the +X side edge of the second measurement unit 52. Therefore, the +X side edge of the first plate 512 of the first measurement unit 51 protrudes to the +X side more than the +X side edge of the second plate 522.

[0030] 3, of the two first X support arms 6C1, 6C2 connected to the side edge on the +Z side of the first measurement unit 51, the first X support arm 6C1 on the -X side is arranged parallel to the Y direction, and the first X support arm 6C2 on the +X side is arranged inclined with respect to the Y direction (inclined toward the -X side as it approaches the +Y side). The same is true for the two second X support arms 6D1, 6D2 connected to the side edge on the -Z side of the second measurement unit 52, the second X support arm 6D1 on the -X side is arranged parallel to the Y direction, and the second X support arm 6D2 on the +X side (see FIG. 6) is arranged inclined with respect to the Y direction (inclined toward the -X side as it approaches the +Y side). First X support arms 6C1 and 6C2 and second X support arms 6D1 and 6D2 are disposed at positions symmetrical with respect to an XY plane passing through the centers of first measurement unit 51 and second measurement unit 52.

[0031] (Detailed configuration of each arm 6) Each of these arms 6 includes an arm body 61, a fixed piece 62, an arm support portion 63, and an adjustment screw 64. The fixed piece 62, the arm support portion 63, and the adjustment screw 64 configure the arm fixing mechanism of the present disclosure.

[0032] (Configuration of arm body 61) The arm body 61 is, for example, an elongated flat plate member made of a material with a small thermal expansion coefficient, such as Invar. Here, the arm bodies 61 of the first Z support arms 6A1, 6A2 and the second Z support arms 6B1, 6B2 arranged on the sides (±X sides) of the measurement unit 5 are arranged so that the planar direction of the flat plate is along the ZY plane. This makes it possible to suppress bending of the arm body 61 in the Z direction due to the gravity of the measurement unit 5. Also, the first X support arms 6C1, 6C2 and the second X support arms 6D1, 6D2 arranged on the +Z side of the first measurement unit 51 are arranged so that the planar direction of the flat plate is along the XY plane. This makes it possible to suppress shifting of the first measurement unit 51 and the second measurement unit 52 in the X direction.

[0033] In this embodiment, the planar shape (shape viewed from the thickness direction) of the arm body 61 in the first Z support arm 6A1, the second Z support arm 6B1, and the X support arm (first X support arm 6C1, 6C2, second X support arm 6D1, 6D2) is linear. On the other hand, the planar shape (shape viewed from the thickness direction) of the arm body 61 in the first Z support arm 6A2 and the second Z support arm 6B2 is curved. The arm body 61 having a linear planar shape is hereinafter referred to as a straight arm body 61A, and the arm body 61 having a curved shape is hereinafter referred to as a curved arm body 61B.

[0034] As shown in Figure 2, the straight arm main body 61A comprises a straight section 611 having a pair of parallel straight edges along the longitudinal direction, a frame side arm end 612 having an arc-shaped edge on the frame main body 4 side of the straight section 611, and a measurement unit side arm end 613 on the measurement unit 5 side of the straight section 611. The frame side arm end portion 612 is rotatably supported by the arm support portion 63 at a frame side rotation shaft 612A. Furthermore, the measurement unit side arm end portion 613 is rotatably connected to the first plate 512 or the second plate 522 of the measurement unit 5 at the measurement unit side rotation shaft 613A.

[0035] On the other hand, the bent arm main body 61B has a frame side arm end 612, a first bent portion 614, a second bent portion 615, and a measurement unit side arm end 613, as shown in FIG. The frame side arm end portion 612 is similar to the straight arm main body 61A, and for example, the edge on the frame main body 4 side is semicircular. The measurement unit side arm end 613 is similar to the straight arm body 61A, and for example, the edge on the measurement unit 5 side is semicircular and is rotatably connected to the first plate 512 or the second plate 522 of the measurement unit 5. The bent arm body 61B extends in the longitudinal direction from the frame side arm end 612 and is bent in approximately the Z direction at the first bent part 614. The longitudinal direction of the arm body 61 is the direction from the frame side rotation shaft 612A toward the measurement unit side rotation shaft 613A, and may hereinafter be referred to as the Xarm direction (see Figs. 4 and 5). The width direction of the arm body 61 perpendicular to the Xarm direction (the direction perpendicular to the Xarm direction in the planar direction of the flat plate-like arm body 61) may be referred to as the Yarm direction (see Figs. 4 and 5), and the thickness direction of the flat plate-like arm body 61 may be referred to as the Zarm direction (see Figs. 4 and 5). The bent arm main body 61B bends from the frame side arm end 612 toward the measurement unit side arm end 613, from the Xarm direction to the Z direction at a first bent portion 614, then bends toward the +Xarm side at a second bent portion 615, and further extends from the second bent portion 615 along the Xarm direction, so that its tip becomes the measurement unit side arm end 613. The second bent portion 615 has a large Z direction width on the first bent portion 614 side, and the Z direction width gradually decreases toward the measurement unit side arm end 613. This increases the Z direction width dimension at the first bent portion 614 and the second bent portion 615, and further suppresses bending of the bent arm main body 61B in the Z direction.

[0036] (Configuration of fixed piece 62) Fig. 4 shows the arm fixing mechanism of the arm 6, Fig. 4(A) is a plan view of a part of the arm 6 arranged on the -X side when viewed from the -X side, and Fig. 4(B) is a cross-sectional view taken along line BB in (A). Fig. 5 is a cross-sectional view of a part of the arm 6 cut along the Xarm-Yarm plane passing through the middle position in the thickness direction (Zarm direction). Although Fig. 4 and Fig. 5 show an example of the configuration of the arm 6 having the bent arm main body 61B, the same configuration is also applicable to the arm 6 having the straight arm main body 61A. As described above, the fixing piece 62 is fixed to the arm fixing portion 42 (see FIG. 5) of the frame main body 4. The fixing piece 62 is a plate-like member made of, for example, metal, and is fixed to the frame main body 4 by a predetermined fixing member. In this embodiment, as shown in FIG. 4 and other figures, the fixing piece 62 is fixed to the frame main body 4 by screwing. Note that the fixing method of the fixing piece 62 is not limited to this, and it may be fixed by adhesive, or may be both adhesive and screwing, or may be another fixing method. The fixed piece 62 is also formed with an adjustment hole through which an adjustment screw 64 passes.

[0037] (Configuration of arm support portion 63) 4 and 5, the arm support part 63 is attached to the fixed piece 62 via an adjustment screw 64. Specifically, the arm support part 63 includes a support adjustment part 631 and a rotation support part 632 arranged substantially along the longitudinal direction (Xarm direction) of the arm main body 61. The support adjustment portion 631 is formed with a screw hole 633 (see FIG. 5) into which the adjustment screw 64 is screwed. Further, a biasing portion 634 is provided between the support adjustment portion 631 and the fixed piece 62. As the biasing portion 634, for example, a spring or the like can be exemplified, and biases the arm support portion 63 in a direction away from the fixed piece 62. Note that, although a spring is exemplified as the biasing portion 634 in this embodiment, other biasing members such as elastic rubber may be used. Furthermore, although a configuration example in which two springs are provided on either side of the screw hole 633 is shown in this embodiment, for example, a configuration in which a single spring is provided with the screw hole 633 and the adjustment screw 64 screwed into the screw hole 633 as a central axis, or a configuration in which three or more springs are arranged may be used.

[0038] In this embodiment, by turning the adjustment screw 64, the arm support part 63 supporting the arm main body 61 can be advanced or retreated relative to the fixed piece 62, thereby enabling the arm 6 to be extended or retracted. This allows fine adjustment of the length of each arm, and fine adjustment of the position and attitude of the measurement part 5 relative to the frame main body 4.

[0039] 4A, a positioning hole 638 is provided on the surface on the +Zarm side of the arm support portion 63. The positioning hole 638 is a screw hole into which the fixing bolt 43 is screwed. The cover surface of the frame main body 4 is disposed on the +Zarm side of the arm support part 63, and the fixing bolt 43 is inserted through a hole provided in the cover surface and screwed into the positioning hole 638. By tightening the fixing bolt 43, the head part 431 of the fixing bolt 43 is pressed against the cover surface of the frame main body 4, and the position of the arm support part 63 relative to the frame main body 4 is firmly fixed.

[0040] The rotation support part 632 of the arm support part 63 rotatably supports the frame side arm end part 612 of the arm main body 61. This rotation support part 632 is provided with a groove part 635 of a predetermined depth from the +Zarm side to the -Zarm side in a plan view seen from the Zarm direction, as shown in Figures 4 and 5. This groove part 635 is formed in a substantially U-shape with an end part (+Xarm side) on the arm main body 61 side opening, and the frame side arm end part 612 is disposed so that the arm main body 61 extends from the opening part to the +Xarm side.

[0041] (Support structure of arm body 61) Next, the support structure of the arm body 61 on the arm support portion 63 will be specifically described. 4(B), a shaft press-fit hole 635A is provided at the bottom of the groove 635, and a press-fit shaft portion 636B of the shaft support portion 636 is fitted into the shaft press-fit hole 635A. The shaft support portion 636 is provided with a shaft hole portion 636A having an axis parallel to the Zarm direction.

[0042] On the other hand, as shown in FIG. 4B, the frame side arm end 612 of the arm body 61 is provided with a shaft hole 616A penetrating in the Zarm direction, and a fitting member 616B is fitted into the shaft hole 616A. The fitting member 616B is provided with a shaft insertion hole 616C penetrating in the Zarm direction, and the frame side rotating shaft 612A is inserted into the shaft insertion hole 616C. The shaft diameter (diameter dimension perpendicular to the Zarm direction) of the frame side rotating shaft 612A is slightly smaller than the hole diameter (diameter dimension perpendicular to the Zarm direction) of the shaft insertion hole 616C. A head 612A1 is provided at the end on the +Zarm side of the frame side rotating shaft 612A. The dimension perpendicular to the Zarm direction of the head 612A1 is larger than the hole diameter of the shaft insertion hole 616C, and a spring 616D is arranged between the head 612A1 and the fitting member 616B. Furthermore, a screw portion 612A2 that is inserted into the shaft hole portion 636A is provided on the end portion on the -Zarm side of the frame side rotation shaft 612A.

[0043] The arm body 61 is axially supported by the arm support portion 63 so as to be freely rotatable. For example, in this embodiment, a concave cone-side tapered surface (support-side tapered surface 637) centered on the axis of the shaft hole portion 636A is formed on the surface on the +Zarm side of the shaft support portion 636. Furthermore, a convex cone-shaped tapered surface (arm body-side tapered surface 616E) is formed on the surface on the -Zarm side of the fitting member 616B. The press-fit shaft portion 636B of the shaft support portion 636 is press-fitted into the shaft press-fit hole 635A, whereby the frame side rotating shaft 612A is fixed to the arm support portion 63. In addition, the spring 616D urges the fitting member 616B toward the -Zarm side, whereby the shaft support side tapered surface 637 is fitted into the arm main body side tapered surface 616E. In this embodiment, with the above-mentioned configuration, the arm body 61 is rotatably supported by the arm support portion 63.

[0044] 4(B), in this embodiment, a gap S is formed between the U-shaped side wall 639 forming the groove 635 of the arm support part 63 and the side wall 617 of the arm main body 61. This allows the arm main body 61 to rotate relative to the arm support part 63 by the amount of the gap S, and can absorb dimensional fluctuations due to, for example, thermal expansion of the frame main body 4.

[0045] (Connection of arm body 61 to measuring unit 5) The connection structure of the measurement unit side arm end portion 613 of the arm body 61 to the measurement unit 5 can be, for example, the same as the structure of the frame side rotation shaft 612A described above. That is, a second shaft hole (not shown) penetrating in the Zarm direction is provided in the measurement unit side arm end 613 of the arm body 61, and a measurement unit side rotating shaft 613A having the same configuration as the frame side rotating shaft 612A is inserted into the second shaft hole. In addition, a support part having the same configuration as the support part 636 of the arm support part 63 is fixed to the plate parts (first plate 512, second plate 522) of the measuring part 5, and the press-in shaft part of the frame side rotating shaft 612A is press-fitted into the shaft press-fit hole of the support part.

[0046] [Position of fixed point of arm 6 in measuring device 1] In this embodiment, in a projection view seen from the X direction as shown in Fig. 2, the first Z support arms 6A1, 6A2 connected to the ±X side edges of the first measurement unit 51 and the second Z support arms 6B1, 6B2 connected to the ±X side edges of the second measurement unit 52 are symmetrical with respect to a reference line L0 parallel to the Y direction passing through the midpoint between the first measurement unit 51 and the second measurement unit 52. Here, the first Z support arm 6A1 arranged on the +Z side of the first Z support arms 6A1, 6A2 and the second Z support arm 6B1 arranged on the -Z side of the second Z support arms 6B1, 6B2 form a pair with each other, and the first Z support arm 6A2 and the second Z support arm 6B2 form a pair with each other and are symmetrical with respect to the reference line L0. In this embodiment, the Y coordinates of the fixed positions of the paired first Z support arm 6A1 and second Z support arm 6B1 to the frame body 4 are the same. Similarly, the Y coordinates of the fixed positions of the paired first Z support arm 6A2 and second Z support arm 6B2 to the frame body 4 are the same. Here, the fixed position to the frame body 4 is the contact point between the fixed piece 62 fixed to the frame body 4 and the adjustment screw 64. 2, the fixing positions of the first Z support arm 6A1 and the second Z support arm 6B1 to the frame main body 4 are arranged side by side on a virtual line L1 (first virtual line) parallel to the Y direction. Similarly, the fixing positions of the first Z support arm 6A2 and the second Z support arm 6B2 to the frame main body 4 are arranged side by side on a virtual line L2 (first virtual line) parallel to the Y direction.

[0047] In the first Z support arms 6A1, 6A2 and the second Z support arms 6B1, 6B2, the measurement unit side rotation shaft 613A of each arm body 61 is rotatably connected to the first plate 512 or the second plate 522 of the measurement unit 5. In other words, the measurement unit side rotation shaft 613A becomes a fixed position to the measurement unit 5 of the first Z support arms 6A1, 6A2 and the second Z support arms 6B1, 6B2. Here, the Y coordinates of the fixed position of the first Z support arm 6A1 to the first measurement unit 51 and the fixed position of the second Z support arm 6B1 to the second measurement unit 52, which are paired with each other, are the same. Similarly, the Y coordinates of the fixed position of the first Z support arm 6A2 to the first measurement unit 51 and the fixed position of the second Z support arm 6B2 to the second measurement unit 52, which are paired with each other, are the same. In this embodiment, the Y coordinates of the fixed positions of the four arms 6, the first Z support arms 6A1, 6A2 and the second Z support arms 6B1, 6B2, to the measurement unit 5 are the same position, that is, in a projected view seen from the X direction, they are arranged side by side on a virtual straight line L3 (second virtual line) parallel to the Y direction.

[0048] FIG. 6 is a schematic perspective view showing the positional relationship between the first X support arms 6C1 and 6C2 and the second X support arms 6D1 and 6D2. First X support arms 6C1, 6C2 connected to the +Z side edge of first measurement unit 51, and second X support arms 6D1, 6D2 connected to the -Z side edge of second measurement unit 52 are disposed symmetrically with respect to an XY plane (reference plane) passing through the midpoint between first measurement unit 51 and second measurement unit 52. In the first X support arms 6C1, 6C2 and second X support arms 6D1, 6D2 that are symmetrical with respect to the reference plane, the first X support arm 6C1 and the second X support arm 6D1 form a pair with each other, and the first X support arm 6C2 and the second X support arm 6D2 form a pair with each other.

[0049] The X coordinate (and Y coordinate) of the fixed position of the paired first X support arm 6C1 and second X support arm 6D1 to the frame body 4 is the same. Similarly, the X coordinate (and Y coordinate) of the fixed position (measurement unit side rotation shaft 613A) of the paired first X support arm 6C2 and second X support arm 6D2 to the frame body 4 is the same. As above, the fixed position to the frame body 4 is the contact point between the fixed piece 62 fixed to the frame body 4 and the adjustment screw 64.

[0050] Furthermore, the X coordinate (and Y coordinate) of the fixed position of first X support arm 6C1, which is paired with second X support arm 6D1, to first measurement unit 51 and the fixed position of second X support arm 6D1, which is paired with first X support arm 6C2, to second measurement unit 52, are the same. Similarly, the X coordinate (and Y coordinate) of the fixed position of first X support arm 6C2, which is paired with second X support arm 6D2, to second measurement unit 52 are the same.

[0051] With the above-mentioned configuration, even if dimensional variations occur due to temperature changes in the frame body 4, the errors can be absorbed. That is, since the arm body 61 of this embodiment is formed of a material such as Invar, which has an extremely small thermal expansion coefficient, the dimensional change of each arm 6 due to temperature change can be sufficiently ignored. On the other hand, the frame body 4 may have a slight dimensional change due to temperature change. However, with the above-mentioned configuration, the amount of change in the posture of the first measuring part 51 relative to the frame body 4 and the amount of change in the posture of the second measuring part 52 relative to the frame body 4 due to the dimensional change of the frame body 4 become the same, and as a result, the positional relationship between the first measuring part 51 and the second measuring part 52 is maintained. Therefore, the relative position of the second measuring part 52 with respect to the first measuring part 51 is not affected by the dimensional change of the frame body 4 due to temperature change, and the inconvenience of the positional change of the first measuring part 51 and the second measuring part 52 relative to the reference line L0 caused by this can be suppressed.

[0052] [Effects of this embodiment] The measuring device 1 of this embodiment comprises a holding section 31 that holds the object to be measured W, a measuring section 5 (first measuring section 51, second measuring section 52) that is provided at a position opposite the holding section 31 and has measurement sensors 511, 521 that perform measurement processing on the object to be measured W, a frame main body 4, and a plurality of arms 6 that connect the frame main body 4 and the measuring section 5.

[0053] In such a measuring device 1, the maintenance of the measuring unit 5 can be performed more easily. That is, in a conventional measuring device in which a measuring sensor is directly fixed to a frame body, an operation on the frame body is required, and access to the measuring sensor is poor, making maintenance difficult. For example, in order to adjust the position of the measuring sensor, it is necessary to directly adjust the fixing structure of the measuring sensor fixed to the frame body, and an operation such as disassembling the frame body to expose the measuring sensor is required. In contrast, in this embodiment, even if it is desired to finely adjust the position and attitude of the measuring unit 5 relative to the frame body 4 before using the measuring device 1, the position and attitude of the measuring unit 5 can be easily adjusted by finely adjusting the length of the arm 6. In addition, the arm 6 separates the frame body 4 from the measuring unit 5, and a gap is generated between the frame body 4 and the measuring unit 5, which makes it easy to access the measuring unit 5 from the gap, and also makes it easy to adjust the arm 6. In addition, in the measuring device 1 of this embodiment, if the arm body 61 is made of a material such as Invar having a small thermal expansion coefficient, the influence of temperature changes can be reduced. That is, in the case of a configuration in which the measuring sensor is fixed directly to the frame body as in the conventional measuring device, in order to suppress the shift of the measuring sensor due to temperature changes, it is necessary to suppress the influence of temperature changes by forming the entire frame body from a material having a small thermal expansion coefficient, which increases the cost. In contrast, in the measuring device 1 of this embodiment, only the arm body 61 needs to be formed from a material having a small thermal expansion coefficient, and it is not necessary to form the entire frame body 4 from a material having a small thermal expansion coefficient, and any material may be used. Therefore, it is possible to reduce the cost of the measuring device 1.

[0054] In the measuring device 1 of this embodiment, the multiple arms 6 include multiple Z support arms (first Z support arms 6A1, 6A2, second Z support arms 6B1, 6B2) arranged along the Z direction, and multiple X support arms (first X support arms 6C1, 6C2, second X support arms 6D1, 6D2) arranged along the X direction. In this configuration, the Z support arm can suppress movement of the measurement unit 5 in the Z direction, and the X support arm can regulate movement of the measurement unit 5 in the X direction. Furthermore, since the Z support arm and the X support arm determine the position of the measurement unit 5 in the Y direction, movement in the Y direction can also be regulated. Therefore, the position of the measurement unit 5 relative to the frame body 4 can be fixed at any position.

[0055] In the measuring device 1 of this embodiment, the measuring unit 5 includes a first measuring unit 51 arranged at a position facing the +Z side (first surface) of the object to be measured W held by the holding unit 31, and a second measuring unit 52 arranged at a position facing the -Z side (second surface) of the object to be measured W, and each of the first measuring unit 51 and the second measuring unit 52 is connected to the frame body 4 by a plurality of arms 6. This makes it possible to simultaneously measure the surface shapes of the +Z side surface and the -Z side surface of the object W to be measured. In particular, when a translucent WLO is used as the object W to be measured by the SIM sensor, the measurement axes of the first measurement unit 51 and the second measurement unit 52 are aligned to measure the front surface shape and the back surface shape at the same point. In this embodiment, the positions and attitudes of the first measurement unit 51 and the second measurement unit 52 can be easily adjusted, and the measurement axes of the first measurement unit 51 and the second measurement unit 52 can be properly aligned.

[0056] In this embodiment, the first Z support arms 6A1, 6A2 and the second Z support arms 6B1, 6B2 are disposed at positions symmetrical to the reference line L0 in a projection view seen from the X direction, and the fixing positions of the first Z support arm 6A1 and the second Z support arm 6B1, which are paired with each other, to the frame body 4 are aligned on the virtual straight line L1, which is the first virtual line. Similarly, the fixing positions of the first Z support arm 6A2 and the second Z support arm 6B2, which are paired with each other, to the frame body 4 are aligned on the virtual straight line L1, which is the first virtual line. Furthermore, the fixing position of the first Z support arm 6A1 to the first measurement unit 51 and the fixing position of the second Z support arm 6B1 to the second measurement unit 52 are aligned on the virtual straight line L3, which is the second virtual line. Similarly, the fixing position of the first Z support arm 6A2 to the first measurement unit 51 and the fixing position of the second Z support arm 6B2 to the second measurement unit 52 are aligned on the virtual straight line L3.

[0057] This allows dimensional variations such as distortion of the frame body 4 caused by temperature changes to be controlled by the first Z support arms 6A1, 6A2 and the second Z support arms 6B1, 6B2, thereby suppressing deviations in the positional relationship between the first measuring unit 51 and the second measuring unit 52 caused by dimensional variations in the frame body, and the resulting occurrence of measurement errors.

[0058] In the measuring device of this embodiment, first X support arms 6C1, C2 and second X support arms 6D1, D2 are respectively arranged at positions symmetrical with respect to a reference plane, and the X coordinates of fixed positions of paired first X support arm 6C1 and second X support arm 6D1 to frame main body 4 are the same. Similarly, the X coordinates of fixed positions of paired first X support arm 6C2 and second X support arm 6D2 to frame main body 4 are the same. Furthermore, the X coordinate of the fixed position of the first X support arm 6C1 to the first measurement unit 51 and the fixed position of the second X support arm 6D1 to the second measurement unit 52 are the same, and similarly, the X coordinate of the fixed position of the first X support arm 6C2 to the first measurement unit 51 and the fixed position of the second X support arm 6D2 to the second measurement unit 52 are the same. Thereby, similarly to the above, dimensional fluctuations such as distortion of the frame body 4 caused by temperature changes can be controlled by the first X support arms 6C1, 6C2 and the second X support arms 6D1, 6D2, and it is possible to suppress deviations in the positional relationship between the first measuring unit 51 and the second measuring unit 52 caused by dimensional fluctuations of the frame body and the resulting measurement errors.

[0059] In the measurement device 1 of this embodiment, the multiple arms 6 are each configured so that the length of the arm 6 in the longitudinal direction can be extended or contracted. This makes it possible to easily adjust the position and attitude of the measurement unit 5 relative to the frame body 4 by extending and contracting the arm 6.

[0060] Specifically, the arm 6 comprises a longitudinal arm body 61 and an arm fixing mechanism provided at the longitudinal end of the arm body 61 on the frame side, and the arm fixing mechanism comprises a fixed piece 62 fixed to the frame body 4, an arm support part 63 which rotatably supports the arm body 61, and an adjustment screw 64 which connects the fixed piece 62 and the arm support part 63 and moves the position of the arm support part 63 relative to the fixed piece 62 back and forth along the longitudinal direction of the arm body 61. Thereby, by rotating the adjustment screw 64, the arm support portion 63 can be advanced or retreated relative to the fixed piece 62, and the length of the arm 6 in the longitudinal direction (Xarm direction) can be easily adjusted.

[0061] [Variations] The present invention is not limited to the above-described embodiment, but includes the following modifications within the scope of the invention.

[0062] [Variation 1] In the above embodiment, the first measurement unit 51 is illustrated as being supported by six arms 6, namely, two arms 6 on the +X side, two arms 6 on the -X side, and two arms 6 on the +Z side, but it may be supported by seven or more arms 6. For example, it may be supported by three or more arms 6 on each of the ±X sides, and may be supported by three or more arms 6 on the +Z side. The same applies to the second measurement unit 52.

[0063] In addition, the arm 6 on the +Z side of the first measuring unit 51 (±X side) is parallel to the Y direction, and the arm 6 on the -Z side is inclined to the +Z side as it approaches the Y direction, but this is not limited to this. For example, the arm 6 on the +Z side of the first measuring unit 51 may be inclined with respect to the Y direction, and the arm on the -Z side may be parallel to the Y direction. Furthermore, both arms 6 may be parallel to the Y direction, or both arms 6 may be inclined in the Y direction. The same applies to the arm 6 disposed on the +Z side of the first measurement unit 51 and each arm 6 supporting the second measurement unit 52.

[0064] [Variation 2] In the above embodiment, the arm 6 is configured to have the fixing piece 62, the arm support part 63, and the adjustment screw 64, which are the arm fixing mechanism, on the frame body 4 side of the arm 6, but a similar arm fixing mechanism may be provided on the measurement part 5 side of the arm 6. A similar arm fixing mechanism may be provided on both ends of the arm 6.

[0065] [Variation 3] In the above embodiment, an example was shown in which the measurement unit 5 includes a first measurement unit 51 and a second measurement unit 52, but only the first measurement unit 51 may be provided, or a configuration in which three or more measurement units are provided may be provided.

[0066] [Variation 4] In the above embodiment, as a configuration for changing the length of the arm 6, an arm fixing mechanism provided on one end side of the arm main body 61 is exemplified, in which the distance between the fixed piece 62 and the arm support portion 63 is adjusted by an adjustment screw 64, but this is not limited to this. For example, a configuration for extending and contracting the arm body 61 may be disposed at an intermediate position of the arm body 61. A specific example is that the arm body is divided into a plurality of small arm members. For example, the arm body is composed of a first member and a second member, and the second member is configured to be movable along the longitudinal direction relative to the first member. Then, the first member and the second member may be fixed by a screw or the like at a position where a desired length is obtained, thereby adjusting the length of the entire arm body. [Industrial Applicability]

[0067] The present invention can be applied to various measuring devices that perform measurements on an object W to be measured. [Explanation of symbols]

[0068] 1...measuring device, 2...base, 3...table, 4...frame body, 5...measuring section, 6...arm, 6A1, 6A2...first Z support arm, 6B1, 6B2...second Z support arm, 6C1, 6C2...first X support arm, 6D1, 6D2...second X support arm, 31...holding section, 51...first measuring section, 52...second measuring section, 61...arm body, 62...fixed piece, 63...arm support section, 64...adjustment screw, 511...first measurement sensor, 512...first plate, 521...second measurement sensor, 522...second plate, 612...frame side arm end, 612A...frame side pivot axis, 631...support adjustment section, 632...rotating arm support section, 634...urging section.

Claims

1. a holder for holding the object to be measured; a measurement unit provided at a position opposite to the holding unit and including a sensor for performing a measurement process on the object to be measured; The frame body, A plurality of arms connecting the frame body and the measurement unit; A measuring device comprising:

2. A direction from the measurement unit toward the object to be measured is defined as a Z direction, a direction perpendicular to the Z direction is defined as an X direction, and a direction perpendicular to the X direction and the Z direction from the frame main body toward the measurement unit is defined as a Y direction. The plurality of arms includes a plurality of Z support arms arranged along the Z direction and a plurality of X support arms arranged along the X direction.

2. The measuring device of claim 1.

3. the measurement unit includes a first measurement unit arranged at a position facing a first surface of the object to be measured held in the holding unit, and a second measurement unit arranged at a position facing a second surface of the object to be measured held in the holding unit on an opposite side to the first surface, Each of the first measurement unit and the second measurement unit is connected to the frame body by a plurality of the arms.

3. The measuring device according to claim 2.

4. The plurality of Z support arms include a plurality of first Z support arms supporting the first measurement unit and a plurality of second Z support arms supporting the second measurement unit, When viewed from the X direction, the first Z support arms and the second Z support arms are arranged at positions symmetrical with respect to a reference line that includes a midpoint between the first measurement unit and the second measurement unit and is parallel to the Y direction, A fixed position of the first Z support arm to the frame body and a fixed position of the second Z support arm to the frame body, which is symmetrical to the first Z support arm with respect to the reference line, are aligned on a first virtual line parallel to the Z direction, A fixed position of the first Z support arm to the first measurement unit and a fixed position of the second Z support arm to the second measurement unit, which is symmetrical to the first Z support arm with respect to the reference line, are aligned on a second virtual line parallel to the Z direction.

4. The measuring device according to claim 3.

5. the plurality of X support arms include a plurality of first X support arms supporting the first measurement unit and a plurality of second X support arms supporting the second measurement unit; the first X-support arms and the second X-support arms are disposed at positions symmetrical with respect to a reference plane that includes a midpoint between the first measurement unit and the second measurement unit in the Z direction and is parallel to an XY plane; a coordinate in the X direction of a fixed position of the first X support arm to the frame main body and a coordinate of a fixed position of the second X support arm to the frame main body that is symmetrical to the first X support arm with respect to the reference plane are the same, a fixed position of the first X support arm to the first measurement unit and a fixed position of the second X support arm to the second measurement unit that is symmetrical to the first X support arm with respect to the reference plane have the same X-direction coordinate; 4. The measuring device according to claim 3.

6. Each of the arms is configured to be extendable and retractable in the longitudinal direction.

2. The measuring device of claim 1.

7. the arm includes a longitudinal arm body and an arm fixing mechanism provided on at least one of an end of the arm body on the frame side and an end of the arm body on the measurement unit side in a longitudinal direction, The arm fixing mechanism includes: A fixing piece fixed to the frame body or the measuring section; an arm support portion that rotatably supports the arm body; an adjustment unit that connects the fixed piece and the arm support unit and moves a position of the arm support unit relative to the fixed piece along a longitudinal direction of the arm body; Equipped with 7. The measuring device according to claim 6.

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