Seal for microelectronic assembly

Abstract

To provide a microelectronic assembly and a method of forming the same that satisfy the demand for more compact physical arrangement of microelectronic elements such as integrated chips and dies.SOLUTION: In a microelectronic device 100, a metallic seal ring 302 can be formed surrounding a bonded joint of a cavity wafer 102 and a MEMS wafer 104, and can also be extended to seal a logic device 206 to the MEMS wafer 104. The metallic seal ring creates a hermetic seal around a periphery of microelectronic components (e.g., 102, 104, and 206), fully sealing joints between the components. The metallic seal ring can be located to seal any or all of the joints between the microelectronic components (e.g., 102, 104, and 206), as desired.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] (CROSS REFERENCE TO PRIORITY CLAIM AND RELATED APPLICATIONS) This application claims priority to and the benefit of U.S. patent application Ser. No. 15 / 920,759, filed Mar. 14, 2018, entitled “Encapsulating a Microelectronic Assembly,” and the benefit under 35 U.S.C. § 119(e)(1) of U.S. Provisional Patent Application Ser. No. 62 / 474,478, filed Mar. 21, 2017, entitled “Encapsulating a Microelectronic Assembly,” each of which is incorporated herein by reference in its entirety.

[0002] FIELD OF THEINVENTION The following description relates to integrated circuit ("IC") processing. More specifically, the following description relates to devices and techniques for processing IC dies and assemblies. [Background technology]

[0003] The demand for more compact physical arrangements of microelectronic elements such as integrated chips and dies is further driven by the rapid advancement of portable electronic devices, the expansion of the Internet of Things, nanoscale integration, sub-wavelength optical integration, and the like. As merely an example, devices commonly referred to as "smartphones" integrate the functionality of a mobile phone with high-resolution displays and associated image processing chips, as well as high-performance data processors, memory, and accessory devices such as global positioning system receivers, electronic cameras, various sensors, and local area network connections. Such devices can provide full Internet connectivity, entertainment including full resolution video, navigation, electronic banking, and other capabilities, all within a pocket-sized device. Composite mobile devices require the packing of a large number of chips and dies into a small space.

[0004] Microelectronic elements comprise thin slabs of semiconductor material, such as silicon or gallium arsenide. Chips and dies are typically provided as individual prepackaged units. In some unit designs, the die is mounted to a substrate or chip carrier, which is in turn mounted on a circuit panel, such as a printed circuit board (PCB). The die may be provided in a package that facilitates handling of the die during manufacturing and mounting the die on an external substrate. For example, many die are provided in packages suitable for surface mounting.

[0005] Numerous packages of this general type have been proposed for a variety of applications. Most commonly, such packages include a dielectric element, commonly referred to as a "chip carrier," with terminals formed as plated or etched metal structures on the dielectric. These terminals are typically connected to the contacts (e.g., bond pads) of the die by conductive features such as thin traces that extend along the die carrier, and by thin leads or wires that extend between the die contacts and the terminals or traces. In a surface mount operation, the package may be placed on a circuit board such that each terminal on the package aligns with a corresponding contact pad on the circuit board. Solder or other bonding material is typically provided between the terminals and the contact pads. The package may be permanently bonded in place by heating the assembly to melt or "reflow" the solder or otherwise activate the bonding material.

[0006] Many packages include solder masses, typically in the form of solder balls about 0.02 mm to about 0.8 mm (5 to 30 mils) in diameter, attached to the terminals of the package. A package having an array of solder balls protruding from its bottom surface (e.g., the surface opposite the front face of the die) is commonly referred to as a ball grid array or "BGA" package. Other packages, commonly referred to as land grid array or "LGA" packages, are secured to the substrate by thin layers or lands formed from solder. This type of package can be extremely compact. Certain packages, commonly referred to as "chip scale packages," occupy an area of ​​the circuit board equal to or only slightly larger than the area of ​​the device incorporated within the package. This scale is advantageous in reducing the overall size of the assembly and permitting the use of short interconnects between the various devices on the substrate, which in turn limits signal propagation times between the devices and thus facilitates high speed operation of the assembly.

[0007] Semiconductor dies may also be provided in a "stacked" arrangement, for example, where one die is provided on a carrier and another die is mounted on top of the first die. These arrangements may allow many different dies to be mounted within a single footprint on a circuit board, and may further facilitate high speed operation by providing short interconnects between the dies. In many cases, this interconnect distance may be only slightly longer than the thickness of the die itself. Interconnect structures for mechanical and electrical connections may be provided on both sides (e.g., on the surface) of each die package (except perhaps the topmost package) for the interconnects to be achieved within the stack of die packages. This may be done, for example, by providing conductor pads or lands on both sides of the substrate on which the dies are mounted, with the pads being connected through the substrate by conductive vias or the like. Examples of stacked chip arrangements and interconnect structures are provided in U.S. Patent Application Publication No. 2010 / 0232129, the disclosure of which is incorporated herein by reference. In other examples, Through Silicon Vias (TSVs) are used for the interconnects to be achieved within the stack of die packages. In some cases, the dies or wafers may be bonded in a stacked configuration using a variety of bonding techniques, including direct dielectric bonding, non-adhesive technologies such as ZiBond®, or hybrid bonding technologies such as DBI®, both available from Invensas Bonding Technologies, Inc. (formerly Ziptronix, Inc.), an Xperi company (see, e.g., U.S. Pat. Nos. 6,864,585 and 7,485,968, which are incorporated herein in their entireties).

[0008] Stacked die and wafer arrangements, including bonded arrangements, can also be used to form assembled components of microelectromechanical systems (MEMS), sensors, and the like. See, for example, U.S. Pat. No. 7,109,092, which is incorporated herein in its entirety. In many of these arrangements, it is desirable for the stacked die and wafers to be sealed at their bonded surfaces, for example to form a sensor cavity. In some cases, making such seals reliable and long-lasting can be problematic, especially at the chip scale. [Brief description of the drawings]

[0009] The detailed description will be set forth with reference to the accompanying drawings, in which the leftmost digit(s) of a reference number identifies the figure in which the reference number first appears, and the use of the same reference number in different drawings indicates similar or identical items.

[0010] In this description, the devices and systems illustrated in the figures are shown as having a number of components. Various implementations of the devices and / or systems as described herein may include fewer components and remain within the scope of the present disclosure. Alternatively, other implementations of the devices and / or systems may include additional components or various combinations of the described components and remain within the scope of the present disclosure.

[0011] [Figure 1] (A) shows a cavity wafer bonded to a MEMS wafer using Zibond technology, and (B) shows a cavity wafer bonded to a MEMS wafer using Zibond technology together with DBI technology.

[0012] [Diagram 2] FIG. 1 is a graphical flow diagram illustrating an exemplary processing sequence for forming a stacked microelectronic device.

[0013] [Diagram 3](A) shows a plan view of an exemplary encapsulated microelectronic device according to one embodiment, (B) shows a top view of an exemplary encapsulated microelectronic device according to the present embodiment, and (C) shows an encapsulated multi-stack microelectronic configuration.

[0014] [Figure 4] 1 illustrates an exemplary encapsulated microelectronic device according to another embodiment, in which two distinct configurations of an exemplary encapsulation are illustrated.

[0015] [Diagram 5] 1 is a graphical flow diagram illustrating an exemplary processing sequence for forming an encapsulated microelectronic device, according to one embodiment.

[0016] [Figure 6] 1 illustrates an exemplary embodiment of an encapsulation and an encapsulated microelectronic device, according to various embodiments.

[0017] [Figure 7] 1 illustrates an exemplary embodiment of an encapsulation and an encapsulated microelectronic device according to a further embodiment;

[0018] [Figure 8] FIG. 1 is a graphical flow diagram illustrating an exemplary processing sequence for forming an encapsulated microelectronic device according to another embodiment.

[0019] [Figure 9] 1 illustrates an exemplary embodiment of an encapsulated microelectronic device, according to various embodiments.

[0020] [Figure 10] FIG. 11 is a graphical flow diagram illustrating an exemplary processing sequence for forming an encapsulated microelectronic device according to a further embodiment.

[0021] [Figure 11] 1 illustrates an exemplary embodiment of an encapsulated microelectronic device, according to various embodiments.

[0022] [Figure 12] FIG. 11 is a graphical flow diagram illustrating an exemplary processing sequence for forming an encapsulated microelectronic device according to an additional embodiment.

[0023] [Figure 13] 1 illustrates an exemplary embodiment of an encapsulated microelectronic device, according to various embodiments. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0024] overview

[0025] Various embodiments of techniques and devices for forming encapsulants and encapsulated microelectronic devices are disclosed. The encapsulant is disposed on a mated (e.g., bonded, joined, etc.) surface to seal (e.g., hermetically seal) the mated surfaces. The mated surfaces may be sealed to form a sensor cavity, etc., as part of a microelectronic device. For example, when a die having a recessed surface is bonded to another die having a flat or recessed surface, a cavity may be formed between the two dies. In some applications, it may be desirable for this cavity to be hermetically sealed to maintain a particular vacuum level within the cavity and to maintain a predetermined leak rate.

[0026] The leak rate of a sealed cavity can be examined as a function of the cavity's volume. For example, if the cavity volume is 0.01 cc or less, generally the leak rate should be less than 5E-8 atm-cc / sec of air to consider the cavity hermetically sealed. If the cavity volume is in the range of 0.01-0.4 cc, the leak rate should be less than 1E-7, and if the volume is greater than 0.4 cc, the leak rate should be less than 1E-6 for a hermetically sealed cavity (per MIL-STD-883 Method 1014, MIL-STD-750 Method 1071).

[0027] The integrity of the seal around the periphery of the die stack can be important to maintain a certain hermeticity and low leakage rate of the package. Metals, ceramics, and glasses are typical materials used to form the seal and prevent water vapor or other gases (such as oxygen) from accessing the components inside the package. A properly made hermetic seal with a sufficiently low leakage rate can keep the interior of the package dry and moisture-free for many years.

[0028] The techniques disclosed herein include forming a seal of one or more metallic materials (for example) at the bond of at least two surfaces (e.g., at a bond line, seam, etc.) to seal the bonded surfaces at the bond. In various implementations, the metallic material may be deposited using electroless plating or the like. In some embodiments, the metallic material may be deposited directly on the bonded surfaces at or around the bond. In other embodiments, one or more non-metallic materials may be deposited on the bonded surfaces, and the metallic material may be deposited on the non-metallic material(s) to seal the bond. The seal may include a continuous seal ring formed completely around the bonded die or wafer (e.g., around the periphery of the device), or one or more partial seals, as desired.

[0029] In various embodiments, the disclosed technology can seal the stacked and bonded dies and wafers using the "ZIBOND" technology, which can provide added sealing benefits. For example, in FIG. 1A, a cavity wafer 102 is bonded to a microelectromechanical system (MEMS) wafer 104 (or any other wafer) using, for example, the ZIBOND technology to form a microelectronic device 100, such as a MEMS sensor device. The cavity wafer 102 (or die) may have one or more cavities or recesses of the same or different sizes. The particularly flat surfaces of the two wafers (102 and 104) are bonded together using low-temperature covalent bonding between two corresponding semiconductor and / or insulating layers. Although the bond may be good, the seal may not be sufficient as a hermetic seal and the leakage rate may not be as low as desired for the application. Furthermore, the width (P1) of the bond line may not be optimal, because a relatively long bond line may unnecessarily increase the die size and reduce the number of dies manufactured per wafer.

[0030] In another example, as shown in FIG. 1B, Direct Bond Interconnect (DBI®) technology can be used to improve sealing by forming one or more metal-to-metal interconnects along the bond seam. Metal lines 106 are deposited along each of the surfaces to be bonded so that they align with each other and form a metal-to-metal bond when set together using temperature and / or pressure. In some cases, the DBI lines 106 can help reduce the bond line width (P2) while improving the hermeticity of the bond. However, the bond line width (P1) required to utilize the ZiBond method may not be sufficient for the application (e.g., a bond line width of 100 microns using Zibond can be reduced to tens of microns or even less than tens of microns using DBI, for example). Furthermore, such DBI bonds are not easy to achieve and may increase the complexity and cost of the assembly.

[0031] FIG. 2 is a graphical flow diagram illustrating an exemplary processing sequence 200 for forming a stacked microelectronic device 100. The process 200 and stacked microelectronic device 100 form the background for discussing various sealing techniques and devices. In various embodiments, the process 200 described with reference to FIG. 2 may be modified to include techniques and devices for hermetically sealing joined components at the bond joint. FIG. 2 illustrates a three-die stack process that creates a hermetically sealed cavity 202 between the top (and middle) and (middle and) bottom die. However, as depicted in FIG. 1, the stack can also include only two dies with a cavity 202 between them.

[0032] In block 1, a recessed cavity wafer 102 is formed. Although one cavity 202 is shown in the illustration in block 1, several such recessed cavities 202 are effectively formed on the wafer (or die) 102, so that one or more cavities 202 of similar or different dimensions may be formed per die position. In block 2, the cavity wafer 102 is bonded to a MEMS wafer 104 (or any other wafer or die) that closes the cavities 202 internally. The cavity wafer 102 can be bonded to the MEMS wafer 104 using an intimate surface bonding technique, for example ZIBOND® technology, and an insulating surface (e.g., SiOx-SiOx, etc.) is bonded. In block 3, the MEMS wafer 104 can be thinned and patterned to form standoffs. In block 4, metallization 204 can be added to the patterned surface of the MEMS wafer 104, including pads, contacts, traces, etc. In an alternative embodiment, no metallization 204 is added to the surface of the MEMS wafer 104. In this embodiment, the microelectronic device 100 can be attached to another device, such as a logic device wafer, using, for example, Zibond technology (e.g., SiOx to SiOx bonding) on ​​the bonding surfaces, or other bonding techniques for dielectrics (polymeric materials, such as die attach films or pastes) on one or both of the bonded surfaces.

[0033] In block 5, openings are formed in the MEMS wafer 104 that access the cavities 202 to define the characteristics of the microelectronic device 100 based on the application. In block 6, the microelectronic device 100 can be attached to a logic device wafer (or die) 206 to provide logic / control (for example) for the microelectronic device 100. The metallization layer 204 contact pads of the microelectronic device 100 are coupled to contacts 208 on the surface of the logic device 206. In block 7, portions of the microelectronic device 100 (such as portions of the cavity wafer 102) are removed (e.g., etched, etc.) to provide access to other contact pads of the logic device wafer 206, etc. In some cases, the Zibond or DBI interface between the cavity wafer 102 and the MEMS wafer 104 may provide sufficient resistance to the flow of fluids, such as gases and / or liquids. In other embodiments, one or more of the bond lines or interlocking joints of the microelectronic device 100 may be sealed for hermeticity (e.g., a predetermined resistance to flow of fluids such as gases and / or liquids, and sufficiently low water vapor transmission rate, oxygen transmission rate, etc.), as discussed below. Example embodiment

[0034] To ensure a strong and hermetically sealed bond, the techniques disclosed herein involve bonding the insulator surfaces of the wafers (e.g., 102 and 104) and then adding a metal seal at the bond line to improve hermeticity, as discussed further below.

[0035] FIG. 3 illustrates an exemplary embodiment for sealing a microelectronic device 100, such as the microelectronic device 100 formed with reference to FIG. 2. As illustrated by the side view of the microelectronic device 100 in FIG. 3A and the top view in FIG. 3B, a metal sealing ring 302 can be formed to surround the bonded joint of the cavity wafer 102 and the MEMS wafer 104, and can also extend to seal the logic device 206 to the MEMS wafer 104. The sealing ring 302 creates a hermetic seal around the periphery of the microelectronic components (e.g., 102, 104, and 206) completely sealing the joints between the components. The sealing ring 302 can be positioned to seal any or all of the joints between the microelectronic components (e.g., 102, 104, and 206) as desired.

[0036] In various embodiments, the sealing ring 302 is composed of a metallic material (i.e., a metal such as copper, e.g., an alloy, or a metallic composition). In some embodiments, two or more metallic materials may be used in layers (or other combinations) to form the sealing ring 302. In various embodiments, the sealing ring 302 is deposited using electroless plating, electrodeposition, mechanical printing, various combinations thereof, or the like.

[0037] 3C, multiple sealing rings 302 may be used to seal between multiple components (e.g., 102, 104, 206, and 304) at different stacking levels in stacked microelectronic arrangement 300. Sealing rings 302 may be used at any or all of the levels of stacked arrangement 300 as desired. Although complete sealing rings 302 are discussed and illustrated, partial sealing rings 302 may be used where desired to form bonded joints or seals between components (e.g., 102, 104, 206, and 304) of a microelectronic device (e.g., 100, 300) or assembly.

[0038] FIG. 4 illustrates an exemplary sealed microelectronic device 100 using internal seals (e.g., 402 and 404) according to another embodiment. Instead of or in addition to the external seal ring 302 shown in FIG. 3, the internal seals (e.g., 402 and 404) are formed after drilling, etching, or otherwise forming (fully or partially) a channel 406 around the internal periphery of the mating components (e.g., 102, 104, and 206). Two separate configurations of exemplary seals are illustrated in FIG. 4: a filled seal 402 and a conformal seal 404. As discussed further below, both configurations are formed in the channel 406, perforated portion, etc. The filled seal ring 402 mostly or completely fills the channel 406 or perforated cavity with one or more metal materials to form a hermetic seal at the mating joint. The conformal seal ring 404 plates the walls of the channel 406 or cavity with one or more metal materials to form a hermetic seal. In various implementations, either a filled seal 404 or a conformal seal 406 may be used to hermetically seal two or more components (e.g., 102, 104, and 206) as desired. In various examples, multiple concentric sealing rings (e.g., 302, 402, and 404) may be used to seal two (or more) components (e.g., 102, 104, and 206). The channel 406 may extend through component 104 to the interface with component 102, or may extend into component 102 as shown.

[0039] 5 is a graphical flow diagram illustrating an exemplary processing sequence 500 for forming an encapsulated microelectronic device 100 according to one embodiment using internal encapsulations (e.g., 402 and 404). In various embodiments, the process 500 described with reference to FIG. 5 can be used to modify other assembly processes (e.g., process 200 referred to in FIG. 2) involving bonding microelectronic components (e.g., 102, 104, 206, etc.) to include techniques and devices for hermetically sealing the bonded microelectronic components (e.g., 102, 104, 206, etc.) at the bonded joints, if desired.

[0040] In block 1, a recessed cavity wafer 102 is formed. A channel 406 (or a "cavity ring" that partially or completely surrounds the cavity 202) is formed on the cavity side surface of the wafer 102. The channel 406 may be formed by etching, drilling, or otherwise removing material from the surface of the wafer 102.

[0041] In block 2, the cavity wafer 102 is bonded to the MEMS wafer 104 which internally closes the cavities 202. The cavity wafer 102 can be bonded to the MEMS wafer 104 using an intimate surface bonding technique such as, for example, ZIBOND® technology, where an insulating surface (e.g., SiOx-SiOx, etc.) is bonded. In another example, the cavity wafer 102 can be bonded to the MEMS wafer 104 using another dielectric bonding technique (e.g., a die attach film or paste, a polymeric material such as silicon or epoxy, etc., that may not provide a hermetic seal and may not improve or modify the hermetic seal).

[0042] In block 3, the MEMS wafer 104 may be thinned and patterned to form standoffs. In other cases, the standoffs are optional and may not be formed on the MEMS wafer 104. In such cases, the standoffs may be formed on the logic wafer 206 or may be created by any other material (e.g., die attach film or paste, etc.). In block 4, openings are formed in the MEMS wafer 104 that access the cavities 202 to define the characteristics of the microelectronic device 100 based on the application. Also, channels 406 are formed in the MEMS wafer 104 (and in some examples, in the cavity wafer 102) to form an internal seal (e.g., 402 and 404) to seal the bonded joint between the cavity wafer 102 and the MEMS wafer 104. In some cases, the MEMS wafer 104 may be drilled to open areas in the MEMS wafer 104 that are aligned with the cavity ring channels 406 pre-formed in the cavity wafer 102. In an alternative case, the MEMS wafer 104 and the cavity wafer 102 can be drilled together to form the cavity ring channels 406 (e.g., the channels 406 in the cavity wafer 102 are formed in this step while drilling the MEMS wafer 104, rather than being pre-formed before bonding the cavity wafer 102 to the MEMS wafer 104).

[0043] In block 5, metallization 204 is added to the patterned surface of the MEMS wafer 104, including pads, contacts, traces, etc. The cavity ring channel 406 may also be metallized at this point. The channel 406 may be partially or completely filled / plated to form a filled sealing ring 402, or the walls of the channel 406 may be metallized / plated to form a conformal sealing ring 404. Either the filled sealing ring 402 or the conformal sealing ring 404 (whichever may be used) hermetically seals the bonded joint between the cavity wafer 102 and the MEMS wafer 104.

[0044] In another example, after bonding, the MEMS wafer 104 and the cavity wafer 102 can be drilled together to form the cavity ring channel 406, which can be metallized, after which the opening to the cavity 202 is formed in the MEMS wafer 104.

[0045] In block 6, microelectronic device 100 may be attached to a logic device 206 to provide logic / control (for example) for microelectronic device 100. Contact pads of metallization layer 204 of microelectronic device 100 may be coupled to contacts 208 on the surface of logic device 206. In block 7, portions of microelectronic device 100 may be removed (e.g., etched, etc.) to provide access to other contact pads of logic device 206, etc.

[0046] Figures 6A-6E illustrate exemplary embodiments of seals 302, 402, and 404 and an encapsulated microelectronic device 100, according to various embodiments. The first embodiment, illustrated in Figure 6A, shows an exterior seal 302 implemented as described above with reference to Figures 3 and 4. Each seal 302 forms a bead that covers one or more joints or interlocking bonds between microelectronic components 102, 104, and 206 to hermetically seal the joint. The seals 302 can be constructed from metallic materials such as metals, alloys, or metal composites, e.g., combinations of two or more metals, metal glass composites, metal ceramic composites, and the like.

[0047] 6B shows a seal having a layered approach, where a polymer seal 602 is first applied to the exterior of the joint and a metallic material seal 604 is deposited on top of the polymer seal 602 forming a hermetic seal. In alternative implementations, multiple polymer materials forming one or more polymer seals 602 and / or multiple metal layers forming one or more metallic seals 604 may also be used to form the sealing ring.

[0048] A third embodiment, shown in Figure 6C, shows an alternative outer sealing ring 606 made of a sinterable conductive paste, frit glass composite, etc. The metal or glass component in the deposited seal 606 material provides the desired hermetic seal.

[0049] A fourth embodiment, illustrated in Figure 6D, shows internal seals 402 and 404 as described above with reference to Figures 5 and 6. A channel 406 is formed in the cavity wafer 102 through the MEMS wafer 104, and the channel 406 is plated with a metal material from the MEMS wafer 104 side either completely (e.g., 402), partially (not shown) or conformally (e.g., 404) on the walls of the channel 406.

[0050] The fifth embodiment, shown in FIG. 6E, illustrates an example of forming a sealing ring (e.g., 404) through multiple components (e.g., 102, 104, and 206). In this example, logic wafer 206 (or the like) can be thinned and drilled, similar to MEMS wafer 104. For example, logic wafer 206, MEMS wafer 104, and cavity wafer 102 may be bonded in a process and then drilled together or in separate steps to align. The drilled channels 406 are plated or filled from the logic wafer 206 side to form a sealing ring (e.g., 404) that extends from logic wafer 206 through MEMS wafer 104 and into cavity wafer 102, hermetically sealing each of the bonded joints and the spaces between the components (e.g., 102, 104, and 206). Alternatively, the seals (e.g., 404) may extend through only a portion of the layers / components, as desired. In various embodiments, the metallization of the encapsulation (e.g., 402, 404) may be electrically continuous with or coupled to one or more device pads (e.g., ball terminal 608 on the package) for grounding, etc. Although multiple types of metallization (conformal, non-conformal) are shown in Figures 6D, 6E and elsewhere in this disclosure, only a single type of metallization may be used at a time to form continuous or discontinuous shapes to impede fluid flow and thus improve hermeticity.

[0051] 7A-7D illustrate exemplary embodiments of encapsulations 402 and 404 and encapsulated microelectronic device 100 according to further embodiments. In one embodiment, illustrated in FIG. 7A, an embedded metal ring 702 is partially or completely embedded within cavity wafer 102 (and / or MEMS wafer 104) and partially or completely surrounds cavity 202. Embedded metal ring 702 may be disposed at or near the bond line and may aid in sealing the bonded joint between cavity wafer 102 and MEMS wafer 104. Vias (not shown for simplicity) may extend through cavity wafer 102 and contact metal ring 702. In another embodiment, illustrated in FIG. 7B, microelectronic device 100 includes an embedded metal ring 702 partially or completely surrounding cavity 202 and one or more internal encapsulations 402 and / or 404, as described above with reference to FIGS. 5 and 6. A channel 406 is formed through the MEMS wafer 104 and within the cavity wafer 102 to the embedded metal ring 702, and the channel 406 is plated with a metal material from the MEMS wafer 104 side either completely (e.g., 402), partially (not shown) or conformally (e.g., 404) onto the walls of the channel 406.

[0052] As shown in FIG. 7B, the inner seals 402 and / or 404 land on (e.g., in contact with) the embedded metal ring 702. FIGS. 7C and 7D show close detailed views of two (of many) possible embodiments of this arrangement. For example, in FIG. 7C, the channel 406 has a relatively rectangular cross-section, while in FIG. 7D, the channel has a polygonal or other shaped cross-section (e.g., partially or completely elliptical, irregular, etc.). In various embodiments, the cross-sectional width of the channel 406 and seals (402 and / or 404) where the seals (402 and / or 404) contact the embedded metal ring 702 is smaller (e.g., 60% or less) than the cross-sectional width of the embedded metal ring 702. The metal filling of the seals 404 may completely (as seen in FIG. 7C) or partially (as seen in FIG. 7D) line the inner wall of the channel 406 while contacting (landing) the embedded metal ring 702. In various embodiments, the shape of the channel 406 may be predetermined, or may be a product of the drilling technique employed to form the channel 406 .

[0053] 8 is a graphical flow diagram illustrating an exemplary processing sequence 800 for forming an encapsulated microelectronic device 100 according to another embodiment using an internal encapsulation (e.g., 806). In various embodiments, the process 800 described with reference to FIG. 8 can be used to modify other assembly processes (e.g., process 200 referred to in FIG. 2) involving bonding of microelectronic components (e.g., 102, 104, 206, etc.) to include techniques and devices for hermetically sealing the joined microelectronic components (e.g., 102, 104, 206, etc.) at a bonding joint, if desired.

[0054] In block 1, a recessed cavity wafer 102 is formed and prepared for bonding to a second wafer 104. In various embodiments, the bonding surface of the second wafer 104 may include additional layers 802, such as an insulating layer, a dielectric layer, a semiconductor layer, a metal layer, etc.

[0055] In block 2, the cavity wafer 102 is bonded to the second wafer 104, closing the cavity 202 internally. The cavity wafer 102 can be bonded to the second wafer 104 (and layer 802) using an intimate surface bonding technique, such as ZIBOND® technology, where an insulating surface (e.g., SiOx-SiOx, etc.) is bonded. In another example, the cavity wafer 102 can be bonded to the second wafer 104 using another dielectric bonding technique (e.g., a die attach film or paste, a polymeric material such as silicon or epoxy, etc., that may not provide a hermetic seal and may not improve or modify the hermetic seal).

[0056] In block 3, the cavity wafer 102 and / or the second wafer 104 may be thinned based on the intended application. In block 4, a coating or layer 804, such as a dielectric layer, may be applied to the exposed surface of the cavity wafer 102. In block 5, one or more channels 406 (or a "cavity ring" that partially or completely surrounds the cavity 202) may be formed through portions of the cavity wafer 102, portions of the second wafer 104, and through one or both of the layers 802 and 804. The channels 406 may be formed by etching, drilling, or otherwise removing material from the wafers 102 and 104, and may open to an outer surface of the cavity wafer 102 or the second wafer 104.

[0057] In block 6, the cavity ring channel 406 can be partially or completely filled / plated with a metallic material (e.g., copper) to form a filled sealing ring 806. The filled sealing ring 806 hermetically seals the bonded joint between the cavity wafer 102 and the second wafer 104 and seals the cavity 202. In one implementation, the top exposed portion of the metallic sealing ring 806 includes a redistribution layer (RDL).

[0058] 9A-9C, several embodiments of an encapsulated microelectronic device 100 are illustrated by way of example. Figure 9A shows an encapsulated microelectronic device 100 in which the bottom of one or more filled sealing rings 806 are disposed within a layer 802 (which may be, for example, a dielectric layer) and may or may not penetrate into the second wafer 104. The opposite ends of the filled sealing rings 806 are exposed (e.g., at the top of the cavity wafer 102) and may contact, for example, a metal layer for electrical (and / or heat dissipation) functions of the microelectronic device 100.

[0059] FIG. 9B illustrates another encapsulated microelectronic device 100 in which the bottom of the filled seal ring 806 is disposed within the layer 802 (which may be, for example, a dielectric layer) and may or may not penetrate into the second wafer 104. The top of the filled seal ring 806 forms a redistribution layer (RDL) over a portion of the exposed surface of the cavity wafer 102. In an embodiment, the dielectric layer 804 is patterned such that the dielectric layer 804 does not overlie one or more cavities 202. FIG. 9C illustrates a further encapsulated microelectronic device 100 in which the bottom of the filled seal ring 806 is disposed within the layer 802 (which may be, for example, a dielectric layer) and may or may not penetrate into the second wafer 104. The top of the filled seal ring 806 forms a redistribution layer (RDL) over a portion of the exposed surface of the cavity wafer 102. In an embodiment, the dielectric layer 804 is patterned such that the dielectric layer 804 overlies one or more cavities 202, while a different layer 902 is disposed over the cavities 202. In various embodiments, the different layer 902 may include a substrate, a glass panel, a metal layer, etc.

[0060] 10 is a graphical flow diagram illustrating an exemplary processing sequence 1000 for forming an encapsulated microelectronic device 100 according to another embodiment using an internal encapsulation (e.g., 806). In various embodiments, the process 1000 described with reference to FIG. 10 can be used to modify other assembly processes (e.g., process 200 referred to in FIG. 2) involving bonding of microelectronic components (e.g., 102, 104, 206, etc.) to include techniques and devices for hermetically sealing the joined microelectronic components (e.g., 102, 104, 206, etc.) at a bonding joint, if desired.

[0061] In block 1, a recessed cavity wafer 102 is formed and prepared for bonding to a second wafer 104. In various embodiments, the bonding surface of the second wafer 104 may include additional layers 802, such as an insulating layer, a dielectric layer, a semiconductor layer, a metal layer, etc.

[0062] In block 2, the cavity wafer 102 is bonded to the second wafer 104, closing the cavity 202 internally. The cavity wafer 102 can be bonded to the second wafer 104 (and layer 802) using an intimate surface bonding technique, such as ZIBOND® technology, where an insulating surface (e.g., SiOx-SiOx, etc.) is bonded. In another example, the cavity wafer 102 can be bonded to the second wafer 104 using another dielectric bonding technique (e.g., a die attach film or paste, a polymeric material such as silicon or epoxy, etc., that may not provide a hermetic seal and may not improve or modify the hermetic seal).

[0063] In block 3, the cavity wafer 102 and / or the second wafer 104 may be thinned based on the intended application. Furthermore, an assembly featuring the cavity wafer 102 and the second wafer 104 may be flipped over for processing from the second wafer 104 side. In block 4, a coating or layer 804, such as a dielectric layer, may be applied to the exposed surface of the second wafer 104. In block 5, one or more channels 406 (or "cavity rings" that partially or completely surround the cavity 202) may be formed through portions of the second wafer 104, portions of the cavity wafer 102, and through one or both of the layers 802 and 804. The channels 406 may be formed by etching, drilling, or otherwise removing material from the wafers 102 and 104, and may open to an outer surface of the second wafer 104 or the cavity wafer 102. As mentioned above, the channel may extend only to the interface between the wafers (or dies) 102 and 104, or it may extend to one or more metal features, such as pads or vias, on or within the wafer 104.

[0064] In block 6, the cavity ring channel 406 can be partially or completely filled / plated with a metallic material (e.g., copper) to form a filled sealing ring 806. The filled sealing ring 806 hermetically seals the bonded joint between the second wafer 104 and the cavity wafer 102 and seals the cavity 202. In one implementation, the top exposed portion of the metallic sealing ring 806 may include a redistribution layer (RDL).

[0065] 11A-11B, an embodiment of an encapsulated microelectronic device 100 is illustrated by way of example. FIGS. 11A and 11B show an encapsulated microelectronic device 100 in which a bottom of a filled sealing ring 806 is disposed within a layer 802 (which may be, for example, a dielectric layer) that may or may not penetrate into the cavity wafer 102. An opposite end of the filled sealing ring 806 (e.g., at the top of the second wafer 104) is exposed and may, for example, contact a metal layer for electrical function of the microelectronic device 100. In an embodiment, the dielectric layer 804 is patterned such that the dielectric layer 804 does not overlie one or more cavities 202, but a different layer 902 is disposed to overlie the cavities 202. In various embodiments, the different layer 902 may include a substrate, a glass panel, a metal layer, etc.

[0066] In various embodiments, as shown in Figures 11A and 11B, one or more cavities 202 extend into the second wafer 104 as well as the cavity wafer 102. A filled sealing ring 806 hermetically seals the bonded joint between the second wafer 104 and the cavity wafer 102 and seals the cavities 202. In addition, as shown in Figure 11B, a metal barrier layer 1102 may be applied into one or more of the cavities 202 to further seal the one or more cavity portions 202. The metal barrier 1102 may be disposed on the sidewalls, or on the side, top, and bottom walls, partially or completely covering the inner surface of the cavity 202, as shown in Figure 11B. In one implementation, the metal barrier 1102 may be applied to the inner surface of the cavity 202 before bonding the cavity wafer 102 to the second wafer 104. The bonding process may include metal-to-metal bonding (e.g., DBI, etc.), with or without heat annealing, to bond a metal barrier 1102 disposed on an inner surface of the cavity wafer 102 to a metal barrier 1102 disposed on an inner surface of the second wafer 104, forming a continuous metal sealing barrier 1102.

[0067] 12 is a graphical flow diagram illustrating an exemplary processing sequence 1200 for forming an encapsulated microelectronic device 100 according to another embodiment using an internal encapsulation (e.g., 1202). In various embodiments, the process 1200 described with reference to FIG. 12 can be used to modify other assembly processes (e.g., process 200 referred to in FIG. 2) involving bonding of microelectronic components (e.g., 102, 104, 206, etc.) to include techniques and devices for hermetically sealing the joined microelectronic components (e.g., 102, 104, 206, etc.) at a bonding joint, if desired.

[0068] In block 1, a recessed cavity wafer 102 is formed and prepared for bonding to a second wafer 104 (e.g., which may or may not be a MEMS wafer). In various embodiments, the bonding surface of the second wafer 104 may include additional layers 802, such as an insulating layer, a dielectric layer, a semiconductor layer, a metal layer, etc.

[0069] In block 2, the cavity wafer 102 is bonded to the second wafer 104, closing the cavity 202 internally. The cavity wafer 102 can be bonded to the second wafer 104 (and layer 802) using an intimate surface bonding technique, such as ZIBOND® technology, where an insulating surface (e.g., SiOx-SiOx, etc.) is bonded. In another example, the cavity wafer 102 can be bonded to the second wafer 104 using another dielectric bonding technique (e.g., a die attach film or paste, a polymeric material such as silicon or epoxy, etc., that may not provide a hermetic seal and may not improve or modify the hermetic seal).

[0070] In block 3, the cavity wafer 102 and / or the second wafer 104 may be thinned based on the intended application. In block 4, a coating or layer 804, such as a dielectric layer, may be applied to the exposed surface of the cavity wafer 102. In block 5, one or more channels 406 (or a "cavity ring" that partially or completely surrounds the cavity 202) may be formed through portions of the cavity wafer 102, portions of the second wafer 104, and through one or both of the layers 802 and 804. The channels 406 may be formed by etching, drilling, or otherwise removing material from the wafers 102 and 104, and may open to an outer surface of the cavity wafer 102 or the second wafer 104.

[0071] In block 6, the cavity ring channel 406 may be partially filled / plated with a metallic material (e.g., copper) to form a conformal sealing ring 1202. The sealing ring 1202 hermetically seals the bonded joint between the cavity wafer 102 and the second wafer 104 and seals the cavity 202. In various embodiments, the channel 406 may be filled / plated to form the conformal sealing ring 1202, and a metallic layer 1204 is deposited on at least a portion of the exposed surface of the cavity wafer 102. Thus, in various embodiments, the channel 406 is filled in the same or a separate process as the deposition of the metallic layer 1204.

[0072] With reference to Figures 13A-13C, several embodiments of an encapsulated microelectronic device 100 are illustrated by way of example. Figures 13A-13C show an encapsulated microelectronic device 100 in which a sealing ring 1202 is formed through the cavity layer 102, and the bottom of the sealing ring 1202 is disposed through a layer 802 (which may be, for example, a dielectric layer) and also penetrates into the second wafer 104. Figures 13A and 13B show a partially filled sealing ring 1202 (e.g., vacuum plated), and the embodiment shown in Figure 13B has more metal in the partially filled sealing ring 1202 than the embodiment shown in Figure 13A. Annealing the substrates (bonded wafers 102 and 104) in a partially filled state at a temperature of 80-250C can enlarge the grain size of the plated metal (e.g., 1202 and / or 1204). The process of producing the enlarged grain size can reduce impurities in the sealing ring 1202 and / or the metal layer of the metal layer 1204. In one implementation, the grains have an approximate (e.g., average) diameter that is greater than 10% of the width dimension of the channel 406.

[0073] FIG. 13C shows the sealing ring 1202 completely filled in the channel 406. In some embodiments, the annealed metal of the partially filled sealing ring 1202, as shown in FIGS. 13A and 13B, can be added to or coated with an additional metal layer to form a completely filled sealing ring 1202. In one embodiment, the sealed microelectronic device 100 may be annealed again after deposition of the additional metal layer. In some cases, CMP may be used before or after the final anneal to form a desired surface for the filled sealing ring 1202. One or more additional materials may be provided to the unfilled portion of the sealing ring 1202, as needed, for reliability, robustness, performance, etc.

[0074] The top (e.g., exposed) edge of the filled sealing ring 1202 (e.g., at the top surface of the cavity wafer 102) may be exposed and in contact with a metal layer, for electrical function of the microelectronic device 100, e.g., when bonded to another device.

[0075] The quantities of sealing rings 302, 402, 404, 806, and 1202 shown in the illustrations of Figures 1-13 are for example and discussion purposes. In various embodiments, an encapsulated microelectronic device 100 or similar assembly may include fewer or greater quantities of sealing rings 302, 402, 404, 806, and 1202 and remain within the scope of the present disclosure. Additionally, the various implementations described herein may be combined to further improve upon conventional techniques for manufacturing MEMS devices. For example, while the sealing rings are shown extending from one side of the component to one surface, the sealing rings may be formed from both sides and may contact each other to form a metal structure that extends completely through the encapsulated microelectronic device 100. conclusion

[0076] Although implementations of the present disclosure have been described in language specific to structural features and / or methodological acts, it is to be understood that the implementations are not necessarily limited to the particular features or acts described. Rather, the particular features and acts are disclosed as representative forms of implementing example devices and techniques.

[0077] Each claim herein constitutes a separate embodiment, and embodiments that combine different claims and / or different embodiments are within the scope of this disclosure and will be apparent to those of skill in the art upon reviewing this disclosure.

Claims

1. 1. A method of forming a microelectronic assembly, comprising: bonding a first insulating surface of a first microelectronic component to a second insulating surface of a second microelectronic component, the first insulating surface and the second insulating surface forming a bond where the first insulating surface and the second insulating surface meet; forming an encapsulation over the bonded joint, the encapsulation covering the bonded joint, the encapsulation comprising a metallic material and sealing the bonded joint between the first microelectronic component and the second microelectronic component.

2. The method of claim 1 , further comprising forming the seal by depositing the metallic material over the bonded joint via electroless plating or printing.

3. The method of claim 1 , further comprising forming the encapsulation continuously around a perimeter of at least one of the first microelectronic component and the second microelectronic component.

4. The bonded joint includes a first bonded joint and the sealing portion includes a first sealing portion, and the method includes bonding at least one of the first insulating surface and the second insulating surface to a third insulating surface, forming at least a second bonded joint, where the third insulating surface contacts the first insulating surface or the second insulating surface; 10. The method of claim 1, further comprising forming a second sealing portion over the second bonded joint, the second sealing portion covering the second bonded joint, the second sealing portion comprising a metallic material and sealing the second bonded joint.

5. 5. The method of claim 4, wherein the second sealing portion includes a portion of the first sealing portion, the method further including forming the first sealing portion over the first and second bonded joints, the first sealing portion covering and sealing the first and second bonded joints.

6. The method of claim 1 , wherein the first insulating surface is bonded to the second insulating surface using an adhesive-free, room temperature, covalent bonding technique.

7. 10. The method of claim 1, wherein the first insulating surface is bonded to the second insulating surface using a die attach film or paste via a polymer bonding technique.

8. The seal is at least 1×10 per second at the bonded joint. -6 The method of claim 1 , including a hermetic seal configured to prevent fluid leakage in excess of atm-cm 3 .

9. 1. A method of forming a microelectronic assembly, comprising: bonding a first insulating surface of a first microelectronic component to a second insulating surface of a second microelectronic component, the first insulating surface and the second insulating surface forming a bond where the first insulating surface and the second insulating surface meet; forming a first channel in the first insulating surface; forming a second channel through the second microelectronic component, the second channel aligned with the first channel, and the first channel and the second channel intersect at the mating bond; forming a seal in the first channel and the second channel, the seal being continuous from the first channel to the second channel, the seal comprising a metallic material and sealing the interface bond between the first microelectronic component and the second microelectronic component.

10. The method of claim 9 , further comprising forming the seal by depositing the metallic material at the bond joint via electroless plating.

11. The method of claim 9 , further comprising conforming the metallic material to a plurality of surfaces of the first channel and the second channel.

12. 10. The method of claim 9, further comprising forming the encapsulation to be continuous within a perimeter of at least one of the first microelectronic component and the second microelectronic component.

13. The method of claim 9 , further comprising reducing fluid flow across the interface bond by forming the seal in the first channel and the second channel.

14. The seal is at least 1×10 per second at the bonded joint. -6 The method of claim 9 including a hermetic seal configured to prevent fluid leakage in excess of atm-cm3.

15. 1. A microelectronic assembly comprising: a first microelectronic component bonded at a first insulating surface to a second insulating surface of a second microelectronic component, the first insulating surface and the second insulating surface forming a bond where the first insulating surface and the second insulating surface meet; a seal disposed over the bonded joint, the seal comprising a metallic material and sealing the bonded joint between the first microelectronic component and the second microelectronic component.

16. 16. The microelectronic assembly of claim 15, wherein the encapsulation is continuous around a perimeter of at least one of the first microelectronic component and the second microelectronic component.

17. 16. The microelectronic assembly of claim 15, wherein the encapsulation is continuous within a perimeter of at least one of the first microelectronic component and the second microelectronic component.

18. 16. The microelectronic assembly of claim 15, wherein the first insulating surface is bonded to the second insulating surface using an adhesive-free, room temperature, covalent bonding technique.

19. 16. The microelectronic assembly of claim 15, wherein the first insulating surface is bonded to the second insulating surface using a die attach film or paste via polymer bonding technology.

20. 16. The microelectronic assembly of claim 15, further comprising a cavity disposed at the interface bond between the first microelectronic component and the second microelectronic component, the cavity being formed by a portion of the first microelectronic component and a portion of the second microelectronic component, and the encapsulation is continuous within a periphery of at least one of the first microelectronic component and the second microelectronic component, and the encapsulation is continuous around a periphery of the cavity.

21. The seal is at least 1×10 per second at the bonded joint. -6 16. The microelectronic assembly of claim 15 including a hermetic seal configured to prevent fluid leakage in excess of atm-cm3.

22. The microelectronic assembly of claim 15 , wherein the microelectronic assembly comprises a microelectromechanical systems (MEMS) device.

23. 1. A microelectronic assembly comprising: a first microelectronic component bonded at a first insulating surface to a second insulating surface of a second microelectronic component, the first insulating surface and the second insulating surface forming a bond where the first insulating surface and the second insulating surface meet; a first channel in the first insulating surface; a second channel through the second microelectronic component, the second channel aligned with the first channel, the first channel and the second channel intersecting the mating bond; and a encapsulation portion disposed within the first channel and the second channel and continuous from the first channel to the second channel, the encapsulation portion comprising a metallic material and encapsulating the interface bond between the first microelectronic component and the second microelectronic component.

24. 24. The microelectronic assembly of claim 23, further comprising one or more additional channels in the first insulating surface and one or more corresponding channels through the second microelectronic component, the one or more corresponding channels align with the one or more additional channels, the one or more additional channels and the one or more corresponding channels intersect the mating joint, and one or more additional encapsulations are disposed within the one or more additional channels and the one or more corresponding channels, respectively, and encapsulate the mating joint between the first microelectronic component and the second microelectronic component.

25. 24. The microelectronic assembly of claim 23, wherein the encapsulation is conformal to the first channel and the second channel.

26. 24. The microelectronic assembly of claim 23, wherein the metallic material substantially fills the first channel and the second channel.

27. 24. The microelectronic assembly of claim 23, wherein the encapsulation is continuous within a perimeter of at least one of the first microelectronic component and the second microelectronic component.

28. 24. The microelectronic assembly of claim 23, further comprising a cavity disposed at the interface bond between the first microelectronic component and the second microelectronic component, the cavity being formed by at least one of a portion of the first microelectronic component and a portion of the second microelectronic component, and the encapsulation is continuous within a periphery of at least one of the first microelectronic component and the second microelectronic component, and the encapsulation is continuous around a periphery of the cavity.

29. The seal is at least 1×10 per second at the bonded joint. -6 24. The microelectronic assembly of claim 23 including a hermetic seal configured to prevent fluid leakage in excess of atm-cm3.

30. 24. The microelectronic assembly of claim 23, wherein the metallic material includes grains having a typical diameter greater than 10 percent of a width of the first channel or the second channel.

31. 24. The microelectronic assembly of claim 23, further comprising a metal ring embedded within at least one of the first microelectronic component and the second microelectronic component, the metal ring disposed within a periphery of at least one of the first microelectronic component and the second microelectronic component, and the encapsulation contacting the metal ring.

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