Microwave reactor and adjusting mechanism

Abstract

To provide a more excellent microwave reactor which can easily adjust an antenna to an optimum position.SOLUTION: The microwave reactor includes: a hollow resonator 20 having a conductor wall 32 defining a hollow; a coaxial antenna 22 having a cylindrical external conductor 42 and a bar-like inner conductor 44 and radiating microwaves into the hollow, the inner conductor being contained in the external conductor 42 and being non-displaceable to the external conductor 42; and an adjusting mechanism 24 for supporting the coaxial antenna 22 to be relatively movable in a direction with respect to the hollow resonator 20.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a microwave reactor and a regulation mechanism. [Background technology]

[0002] There is known a technique for irradiating a heated object with microwaves to heat the heated object. For example, Patent Document 1 discloses a microwave processing device (also called a microwave reaction device) and a microwave processing method. This microwave processing device includes a cavity resonator that accommodates the heated object, a microwave generator that outputs microwaves, and an antenna that supplies the microwaves output from the microwave generator to the inside of the cavity resonator. The microwave generator may include a matching device for impedance matching. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2020-80298 A Summary of the Invention [Problem to be solved by the invention]

[0004] A better microwave reactor is needed.

[0005] The present invention aims to solve the above-mentioned problems. [Means for solving the problem]

[0006] The microwave reaction device of the first disclosure includes a cavity resonator having a conductor wall that defines a cavity, a cylindrical outer conductor, and a rod-shaped inner conductor that is housed in the outer conductor and cannot be displaced relative to the outer conductor, and includes a coaxial antenna that radiates microwaves into the cavity, and an adjustment mechanism that supports the coaxial antenna so that it can move relatively in either direction with respect to the cavity resonator.

[0007] The adjustment mechanism of the second disclosure is an adjustment mechanism that adjusts the position of a coaxial antenna provided in a cavity resonator of a microwave reaction device, and the coaxial antenna has a cylindrical outer conductor and a rod-shaped inner conductor that is housed in the outer conductor and cannot be displaced relative to the outer conductor, and supports the coaxial antenna so that it can move relatively in either direction with respect to the cavity resonator. Effect of the Invention

[0008] According to the present invention, a better microwave reaction apparatus can be provided. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a diagram showing the configuration of a microwave reaction apparatus. [Diagram 2] FIG. 2 is a schematic diagram of the cavity resonator unit of the first embodiment. [Diagram 3] FIG. 3 is a cross-sectional view of the coaxial antenna and its surroundings of the cavity resonator unit of the first embodiment. [Figure 4] FIG. 4 is a table showing an example of the size of the coaxial antenna portion of the cavity resonator unit of FIG. [Diagram 5] FIG. 5 is a graph showing the values ​​in the table of FIG. [Figure 6] FIG. 6 is a cross-sectional view of a coaxial antenna and its surroundings of a cavity resonator unit according to the second embodiment. [Figure 7] FIG. 7 is an exploded perspective view of the adjustment mechanism. [Figure 8] FIG. 8 is a schematic diagram of a cavity resonator unit according to the third embodiment. [Figure 9] FIG. 9 is a cross-sectional view of a coaxial antenna and its surroundings of a cavity resonator unit according to the third embodiment. [Figure 10] FIG. 10 is a cross-sectional view of a coaxial antenna and its surrounding area of ​​a cavity resonator unit according to a modified example of the third embodiment. [Figure 11] FIG. 11 is a schematic diagram of a cavity resonator unit according to the fourth embodiment. [Figure 12] FIG. 12 is a schematic diagram of a cavity resonator unit according to the fifth embodiment. [Figure 13] FIG. 13 is a schematic diagram of a cavity resonator unit according to the sixth embodiment. [Figure 14] FIG. 14 is an exploded perspective view of the cavity resonator unit according to the sixth embodiment. [Figure 15] FIG. 15 is a schematic diagram of a cavity resonator unit according to the seventh embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] [Configuration of microwave reaction device 10] 1 is a configuration diagram of a microwave reaction apparatus 10. The microwave reaction apparatus 10 includes a microwave oscillator 12, a control device 14, a coaxial cable 16, and a cavity resonator unit 18. The cavity resonator unit 18 includes a cavity resonator 20, a coaxial antenna 22, and an adjustment mechanism 24.

[0011] The microwave oscillator 12 includes at least a power supply and an oscillation circuit. The microwave oscillator 12 oscillates microwaves of a desired oscillation frequency (for example, 2.4 GHz to 2.5 GHz) and a desired output power (for example, 100 W). The microwaves are output to the outside from an output terminal 26. The output impedance of the microwave oscillator 12 is about 50Ω.

[0012] The control device 14 controls the oscillation frequency and output power of the microwave oscillator 12. As the control device 14, for example, a computer (a personal computer, a tablet terminal, a smartphone, etc.) can be used.

[0013] The coaxial cable 16 is a microwave transmission line. The coaxial cable 16 transmits microwaves generated by the microwave oscillator 12 to the coaxial antenna 22. A first connector 28 is provided at one end of the coaxial cable 16, and a second connector 30 is provided at the other end of the coaxial cable 16. The first connector 28 is connected to the output terminal 26 of the microwave oscillator 12. The second connector 30 is connected to an antenna connector 40 of the coaxial antenna 22. The characteristic impedance of the coaxial cable 16 is approximately 50 Ω.

[0014] The cavity resonator 20 includes a conductor wall 32 that defines a hollow space. In this specification, the hollow space defined by the conductor wall 32 is referred to as a cavity. The shape of the cavity is, for example, cylindrical or rectangular prism. In this specification, the cavity resonator 20 having a cylindrical cavity is also referred to as a "cylindrical resonator 20c" (FIG. 2, etc.), and the cavity resonator 20 having a rectangular prism-shaped cavity is also referred to as a "box-shaped resonator 20b" (FIG. 11, etc.). The conductor wall 32 is made of, for example, a metal. An insertion port 34 is formed in the conductor wall 32. The insertion port 34 communicates the outside and the inside (cavity) of the cavity resonator 20. The object to be heated HO is placed in a quartz tube T or the like and inserted into the cavity through the insertion port 34. The object to be heated HO inserted into the cavity is held at a predetermined position in the cavity. The cavity resonator 20 may have a structure in which the object to be heated HO passes through the cavity. In this case, the cavity resonator 20 may include a tube that crosses the cavity.

[0015] The coaxial antenna 22 is attached to the cavity resonator 20. The base end of the coaxial antenna 22 is disposed outside the cavity resonator 20. The tip end of the coaxial antenna 22 is disposed within the cavity of the cavity resonator 20. The coaxial antenna 22 radiates microwaves transmitted through the coaxial cable 16 into the cavity of the cavity resonator 20. The position at which the microwave energy is concentrated within the cavity of the cavity resonator 20 is determined according to the TEM (Transverse Electro Magnetic) mode. That is, the position at which the microwave energy is concentrated within the cavity of the cavity resonator 20 is determined according to the propagation mode. In this specification, this position is referred to as the energy concentration position. The heated object HO inserted into the cavity is held at the energy concentration position.

[0016] In order to increase the energy at the energy concentration position, it is necessary to suppress the reflected wave. In order to suppress the reflected wave, it is necessary to match the impedance of the load of the microwave oscillator 12. For example, if an impedance matching device is provided in the coaxial cable 16, it is possible to suppress the reflected wave, but this does not contribute to the demand for low cost.

[0017] On the other hand, it is also possible to match the impedance of the load of the microwave oscillator 12 by arranging the coaxial antenna 22 at an optimal position with respect to the energy concentration position. This method does not require an impedance matching device, which can contribute to the demand for cost reduction. The optimal position of the coaxial antenna 22 is determined based on the results of a simulation or the like. However, there may be a discrepancy between the optimal position determined based on the simulation and the optimal position in the actual microwave reaction device 10. Therefore, in this embodiment, the adjustment mechanism 24 (24A, 24B) is provided with an adjustment mechanism 24 that can support the coaxial antenna 22 so that it can move relatively in either direction with respect to the cavity resonator 20. As will be described later, according to this embodiment, the coaxial antenna 22 can be easily aligned to the optimal position by using the adjustment mechanism 24 (24A, 24B).

[0018] [Specific embodiment of the cavity resonator unit 18] There are several possible specific embodiments of the cavity resonator unit 18. Below, several embodiments of the cavity resonator unit 18 are illustrated. The cavity resonator units 18 of first to fifth embodiments shown in Figs. 2 to 12 include an adjustment mechanism 24A that supports the coaxial antenna 22 so as to be movable relative to the cavity resonator 20 in the longitudinal direction of the coaxial antenna 22. The cavity resonator units 18 of sixth and seventh embodiments shown in Figs. 13 to 15 include an adjustment mechanism 24B that supports the coaxial antenna 22 so as to be movable relative to the cavity resonator 20 in a direction intersecting (orthogonal to) the longitudinal direction of the coaxial antenna 22.

[0019] [First embodiment] Fig. 2 is a schematic diagram of the cavity resonator unit 18 of the first embodiment. Fig. 3 is a cross-sectional view of the coaxial antenna 22 of the cavity resonator unit 18 of the first embodiment and its surroundings. The cavity resonator unit 18 of the first embodiment includes a cylindrical resonator 20c and an electric field type coaxial antenna 22A (22). The TEM mode of the cavity resonator unit 18 shown in Fig. 2 is the TE110 mode.

[0020] As shown in Fig. 2, an insertion opening 34 is formed in the conductor wall 32 forming the end face of the cylindrical resonator 20c. For example, the insertion opening 34 is disposed at the center of the conductor wall 32 forming the end face. When the TEM mode of the cavity resonator unit 18 is the TE110 mode, the energy of the microwave is concentrated at the center of the cavity of the cylindrical resonator 20c. For this reason, the object to be heated HO inserted into the cavity from the insertion opening 34 is preferably disposed at the center of the cavity.

[0021] When the coaxial antenna 22 is an electric field type, as shown in Fig. 3, an antenna insertion hole 36 is formed in the conductor wall 32 forming the end face of the cylindrical resonator 20c. The coaxial antenna 22A is inserted into the antenna insertion hole 36. The position of the antenna insertion hole 36 is determined, for example, by simulation so that the coaxial antenna 22A can be placed in an optimal position.

[0022] As shown in Fig. 3, the coaxial antenna 22A includes an outer conductor 42 and an inner conductor 44. The outer conductor 42 is made of a cylindrical metal member. The outer conductor 42 surrounds the inner conductor 44. The inner conductor 44 is made of a rod-shaped metal member. The inner conductor 44 is housed inside the outer conductor 42. The longitudinal length of the inner conductor 44 is approximately ¼ of the wavelength of the microwave oscillated by the microwave oscillator 12.

[0023] An antenna connector 40 is provided at the base end of the coaxial antenna 22A. A hole 38 is formed in the antenna connector 40, penetrating from one side to the other. A spacer 41 and a center electrode 39 are housed in the hole 38. The spacer 41 is made of an annular insulating member. The center electrode 39 is inserted inside the spacer 41. The center electrode 39 is held at the axial center position of the hole 38 by the spacer 41. The antenna connector 40 is connected to the second connector 30 of the coaxial cable 16.

[0024] The outer conductor 42 includes a first outer portion 42-1 and an outer tapered portion 42-2. The first outer portion 42-1 includes a base end of the outer conductor 42. The inner diameter of the first outer portion 42-1 is constant along the longitudinal direction of the outer conductor 42. The outer tapered portion 42-2 includes a tip end of the outer conductor 42. The inner diameter of the outer tapered portion 42-2 gradually increases toward the tip end of the outer conductor 42. By providing the outer tapered portion 42-2, the inner diameter of the member facing the outer peripheral surface 44o of the inner conductor 44 can be gradually increased from the inner peripheral surface 42i of the outer conductor 42 toward the inner peripheral surface 36i of the antenna insertion hole 36.

[0025] The inner conductor 44 includes a first inner portion 44-1, a second inner portion 44-2, and an inner tapered portion 44-3. The first inner portion 44-1 includes a base end of the inner conductor 44. The outer diameter of the first inner portion 44-1 is constant along the length of the inner conductor 44. The second inner portion 44-2 includes a tip end of the inner conductor 44. The outer diameter of the second inner portion 44-2 is constant along the length of the inner conductor 44. The outer diameter of the second inner portion 44-2 is larger than the outer diameter of the first inner portion 44-1. The inner tapered portion 44-3 is located between the first inner portion 44-1 and the second inner portion 44-2. The outer diameter of the inner tapered portion 44-3 gradually increases from the first inner portion 44-1 toward the second inner portion 44-2.

[0026] A base end of the first outer portion 42-1 of the outer conductor 42 is connected to the antenna connector 40. A base end of the first inner portion 44-1 of the inner conductor 44 is connected to the center electrode 39 housed in the antenna connector 40. As a result, the inner conductor 44 is held at the axial center of the outer conductor 42 and cannot be displaced relative to the outer conductor 42. A space concentric with the outer conductor 42 and the inner conductor 44 is formed between the inner circumferential surface 42i of the outer conductor 42 and the outer circumferential surface 44o of the inner conductor 44. In addition, the outer conductor 42 is connected to the outer conductor (not shown) of the coaxial cable 16, and the inner conductor 44 is connected to the inner conductor (not shown) of the coaxial cable 16.

[0027] The inner peripheral surface 42i of the first outer portion 42-1 of the outer conductor 42 and the outer peripheral surface 44o of the first inner portion 44-1 of the inner conductor 44 face each other. The inner peripheral surface 36i of the antenna insertion hole 36 formed in the conductor wall 32 and the outer peripheral surface 44o of the second inner portion 44-2 of the inner conductor 44 face each other. The inner peripheral surface 42i of the outer tapered portion 42-2 of the outer conductor 42 and the outer peripheral surface 44o of the inner tapered portion 44-3 of the inner conductor 44 face each other. The inclination of the inner peripheral surface 42i of the outer tapered portion 42-2 with respect to the axis of the outer conductor 42 is steeper than the inclination of the outer peripheral surface 44o of the inner tapered portion 44-3 with respect to the axis of the inner conductor 44. The inclination of the inner peripheral surface 42i of the outer tapered portion 42-2 relative to the axis of the outer conductor 42 and the inclination of the outer peripheral surface 44o of the inner tapered portion 44-3 relative to the axis of the inner conductor 44 are both constant.

[0028] A distance D2 between the inner peripheral surface 36i of the antenna insertion hole 36 and the outer peripheral surface 44o of the second inner portion 44-2 is greater than a distance D1 between the inner peripheral surface 42i of the first outer portion 42-1 and the outer peripheral surface 44o of the first inner portion 44-1.

[0029] Fig. 4 is a table showing an example of the size of the coaxial antenna part of the cavity resonator unit 18 of Fig. 3. Fig. 4 shows the radius of the outer peripheral surface 44o of the inner conductor 44, the radius of the inner peripheral surface 36i of the antenna insertion hole 36, and the radius of the inner peripheral surface 42i of the outer conductor 42 at multiple positions away from the antenna connector 40 (distance from the antenna connector 40). Fig. 5 is a graph showing the values ​​in Table 1. Figs. 4 and 5 show an example for setting the impedance of the coaxial antenna 22A to 50 Ω.

[0030] By configuring the outer conductor 42, the inner conductor 44, and the antenna insertion hole 36 as described above, the impedance of the coaxial antenna 22A can be set to a predetermined value (50 Ω) regardless of the amount of protrusion of the second inner portion 44-2 of the inner conductor 44 into the cavity of the cylindrical resonator 20c.

[0031] The adjustment mechanism 24A includes a fixing member 50 and a screw member 52 (fastening member). The fixing member 50 is a member in which a boss 54 and a flange 56 are integrated. A hole 58 is formed in the fixing member 50. The coaxial antenna 22A is inserted into the hole 58. The flange 56 is attached to the outer surface of the conductor wall 32. The fixing member 50 supports the coaxial antenna 22A so as to be movable along the longitudinal direction of the coaxial antenna 22A. The fixing member 50 can also fix the coaxial antenna 22A to the conductor wall 32. The hole 58 in the fixing member 50 communicates with the antenna insertion hole 36 formed in the conductor wall 32. The boss 54 is formed with a screw hole 60 that penetrates from the side surface of the boss 54 to the hole 58. The screw member 52 is screwed into the screw hole 60. When the screw member 52 rotates in the tightening direction, the tip of the screw member 52 moves toward the center of the hole 58 in the fixing member 50.

[0032] The coaxial antenna 22A is inserted into a hole 58 formed in the fixing member 50 and an antenna insertion hole 36 formed in the conductor wall 32. In this state, the longitudinal direction of the coaxial antenna 22A is parallel to the axial direction of the cylindrical resonator 20c. A part of the second inner portion 44-2 of the inner conductor 44 protrudes from the antenna insertion hole 36 into the internal cavity of the cylindrical resonator 20c.

[0033] The coaxial antenna 22A can move in the longitudinal direction when the screw member 52 is not fastened to the fixing member 50. That is, the coaxial antenna 22A can move in the longitudinal direction when the tip of the screw member 52 is not protruding into the hole 58. By moving the coaxial antenna 22A in the longitudinal direction, the second internal portion 44-2 of the internal conductor 44 can be moved in the longitudinal direction of the coaxial antenna 22A in the cavity of the cylindrical resonator 20c. That is, the protrusion amount of the second internal portion 44-2 into the cavity of the cylindrical resonator 20c can be adjusted.

[0034] When the screw member 52 is tightened, the tip of the screw member 52 protrudes into the hole 58. The tip of the screw member 52 abuts against the outer peripheral surface 42o of the outer conductor 42. When the screw member 52 is tightened further, the tip of the screw member 52 presses a part of the outer peripheral surface 42o of the outer conductor 42 against a part of the inner peripheral surface 50i of the fixing member 50. When the pressing force of the outer peripheral surface 42o of the outer conductor 42 against the inner peripheral surface 50i of the fixing member 50 reaches or exceeds a certain value, the coaxial antenna 22A becomes unable to be displaced inside the fixing member 50. In this manner, the screw member 52 fastens the coaxial antenna 22A to the fixing member 50.

[0035] [Second embodiment] FIG. 6 is a cross-sectional view of the coaxial antenna 22 and its surroundings of the cavity resonator unit 18 of the second embodiment. FIG. 7 is an exploded perspective view of an adjustment mechanism 24A. The cavity resonator unit 18 of the second embodiment includes a cylindrical resonator 20c and an electric field type coaxial antenna 22A, similar to the cavity resonator unit 18 of the first embodiment. The cylindrical resonator 20c and the coaxial antenna 22A of the second embodiment are the same as the cylindrical resonator 20c and the coaxial antenna 22A of the first embodiment. On the other hand, the adjustment mechanism 24A of the second embodiment is different from the adjustment mechanism 24A of the first embodiment. Regarding the second embodiment, the parts different from the first embodiment will be described, and the description of the parts the same as the first embodiment will be omitted.

[0036] As shown in FIG. 7, the adjustment mechanism 24A includes a fixing member 50 and a nut member 62 (fastening member). The fixing member 50 is a member in which a boss 54 and a flange 56 are integrated. The boss 54 is formed with a plurality of slits 64 that are parallel to the axis of the fixing member 50. A screw thread is formed on an outer peripheral surface 54o of the boss 54. A nut member 62 is screwed into the screw thread on the outer peripheral surface 54o of the boss 54. When the nut member 62 rotates in the tightening direction, the nut member 62 moves toward the flange 56. When the nut member 62 moves toward the flange 56, the interval between the slits 64 becomes narrower, and the inner diameter of the hole 58 becomes smaller.

[0037] The coaxial antenna 22A can move in the longitudinal direction when the nut member 62 is not fastened to the fixing member 50. That is, the coaxial antenna 22A can move in the longitudinal direction when the nut member 62 is not narrowing the interval of the slit 64. By moving the coaxial antenna 22A in the longitudinal direction, the second internal portion 44-2 of the internal conductor 44 can be moved in the longitudinal direction in the cavity of the cylindrical resonator 20c. That is, the amount of protrusion of the second internal portion 44-2 into the cylindrical resonator 20c can be adjusted.

[0038] When the nut member 62 is tightened, the nut member 62 gradually approaches the flange 56. Then, the interval of the slit 64 gradually narrows, and the inner diameter of the hole 58 gradually decreases. When the nut member 62 is tightened in a state in which the outer peripheral surface 42o of the outer conductor 42 and the inner peripheral surface 50i of the fixing member 50 are in contact with each other, the pressing force of the inner peripheral surface 50i of the fixing member 50 against the outer peripheral surface 42o of the outer conductor 42 gradually increases. When the pressing force of the inner peripheral surface 50i of the fixing member 50 against the outer peripheral surface 42o of the outer conductor 42 reaches a certain value or more, the coaxial antenna 22A cannot be displaced inside the fixing member 50. In this manner, the nut member 62 fastens the coaxial antenna 22A to the fixing member 50.

[0039] [Third embodiment] FIG. 8 is a schematic diagram of the cavity resonator unit 18 of the third embodiment. FIG. 9 is a cross-sectional view of the coaxial antenna 22 of the cavity resonator unit 18 of the third embodiment and its surroundings. The cavity resonator unit 18 of the third embodiment includes a cylindrical resonator 20c and a magnetic field type coaxial antenna 22B (22). The TEM mode of the cavity resonator unit 18 shown in FIG. 8 is the TM010 mode. The cylindrical resonator 20c and the adjustment mechanism 24A of the third embodiment are the same as the cylindrical resonator 20c and the adjustment mechanism 24A of the first or second embodiment. On the other hand, the coaxial antenna 22B of the third embodiment is different from the coaxial antenna 22A of the first embodiment and the coaxial antenna 22A of the second embodiment. Regarding the third embodiment, the parts different from the first and second embodiments will be described, and the description of the parts the same as the first or second embodiment will be omitted.

[0040] As shown in Fig. 8, an insertion opening 34 is formed in the conductor wall 32 forming the end face of the cylindrical resonator 20c. When the coaxial antenna 22B is a magnetic field type, an antenna insertion hole 36 is formed in the conductor wall 32 forming the end face of the cylindrical resonator 20c as shown in Fig. 9. The coaxial antenna 22B is inserted into the antenna insertion hole 36. The position of the antenna insertion hole 36 is determined, for example, by simulation, so that the coaxial antenna 22B can be placed in an optimal position.

[0041] As shown in FIG. 9, the coaxial antenna 22B includes an outer conductor 42, an inner conductor 44, and a connecting member 66. The connecting member 66 is made of a bent metal member. The connecting member 66 is screwed to the tip of the outer conductor 42 and the tip of the inner conductor 44. A first portion 66a of the connecting member 66 extends from the tip of the outer conductor 42 along the longitudinal direction of the outer conductor 42. A second portion 66b of the connecting member 66 extends from the tip of the inner conductor 44 along the longitudinal direction of the inner conductor 44. The first portion 66a of the connecting member 66 and the second portion 66b of the connecting member 66 are connected by a third portion 66c of the connecting member 66. The third portion 66c is parallel to the axial direction of the cylindrical resonator 20c. The inner conductor 44, the connecting member 66, and the outer conductor 42 function as a loop antenna. The impedance of the loop antenna in a matched state is a predetermined value (50Ω).

[0042] 10, the connection member 66 may be a plate-shaped metal member. In this case, the connection member 66 is parallel to the axial direction of the cylindrical resonator 20c.

[0043] [Fourth embodiment] FIG. 11 is a schematic diagram of a cavity resonator unit 18 of the fourth embodiment. The cavity resonator unit 18 of the fourth embodiment includes a box-shaped resonator 20b and an electric field type coaxial antenna 22A. The TEM mode of the cavity resonator unit 18 shown in FIG. 11 is the TE102 mode. Two positions of high energy are formed in the cavity of the box-shaped resonator 20b. As in the cavity resonator unit 18 shown in FIG. 11, a box-shaped resonator 20b may be used instead of the cylindrical resonator 20c of the first embodiment shown in FIG. 2 and the like. The box-shaped resonator 20b corresponds to a rectangular waveguide with both ends in the longitudinal direction closed. The coaxial antenna 22A and the adjustment mechanism 24A are arranged on a conductor wall 32 parallel to the longitudinal direction of the box-shaped resonator 20b.

[0044] [Fifth embodiment] FIG. 12 is a schematic diagram of a cavity resonator unit 18 of the fifth embodiment. The cavity resonator unit 18 of the fifth embodiment includes a box-shaped resonator 20b and a magnetic field type coaxial antenna 22B. The TEM mode of the cavity resonator unit 18 shown in FIG. 12 is the TM102 mode. Two positions of high energy are formed in the cavity of the box-shaped resonator 20b. As in the cavity resonator unit 18 shown in FIG. 12, the box-shaped resonator 20b may be used instead of the cylindrical resonator 20c of the third embodiment shown in FIG. 8 and the like. As in the fourth embodiment, the box-shaped resonator 20b corresponds to a rectangular waveguide with both ends in the longitudinal direction closed. The coaxial antenna 22B and the adjustment mechanism 24A are arranged on a conductor wall 32 perpendicular to the longitudinal direction of the box-shaped resonator 20b.

[0045] [Sixth embodiment] FIG. 13 is a schematic diagram of the cavity resonator unit 18 of the sixth embodiment. FIG. 13 shows the cavity resonator unit 18 seen from the end face direction. FIG. 14 is an exploded perspective view of the cavity resonator unit 18 of the sixth embodiment. The cavity resonator unit 18 of the sixth embodiment includes a cylindrical resonator 20c and an electric field type coaxial antenna 22A. The TEM mode of the cavity resonator unit 18 shown in FIG. 13 and FIG. 14 is the TE110 mode. The coaxial antenna 22A used in the sixth embodiment is the same as the coaxial antenna 22A used in the first embodiment and the like. In the sixth embodiment, the adjustment mechanism 24B supports the coaxial antenna 22A rotatably about an axis along the longitudinal direction of the coaxial antenna 22A.

[0046] As shown in FIG. 14, an insertion opening 34 is formed in the conductor wall 32 forming the end face of the cylindrical resonator 20c. An antenna insertion hole 70 is formed in the conductor wall 32 forming the end face of the cylindrical resonator 20c. The coaxial antenna 22A is inserted into the antenna insertion hole 70. The inner diameter of the antenna insertion hole 70 is sufficiently larger than the outer diameter of the coaxial antenna 22A. Therefore, the coaxial antenna 22A inserted into the antenna insertion hole 70 can move in the direction perpendicular to the longitudinal direction of the coaxial antenna 22A inside the antenna insertion hole 70. The antenna insertion hole 70 is formed between the center and the periphery of the conductor wall 32 forming the end face of the cylindrical resonator 20c. A plurality of screw holes 74 are formed in a portion (inner edge portion 72) of the conductor wall 32 positioned around the antenna insertion hole 70.

[0047] The adjustment mechanism 24B (24) includes a fixed member 76 and a rotating table 78. The fixed member 76 is fixed to the rotating table 78. The fixed member 76 is disposed between the center of the rotating table 78 and the outer edge of the rotating table 78. By making the antenna insertion hole 70 as large as possible between the center of the conductor wall 32 and the outer edge of the conductor wall 32 and by bringing the fixed member 76 as close as possible to the outer edge of the rotating table 78, the movable range of the coaxial antenna 22A can be widened.

[0048] The rotating base 78 is a disc-shaped conductive member (e.g., a metal member) larger than the antenna insertion hole 70. A hole (not shown) is formed in the rotating base 78, which communicates the hole 80 of the fixing member 76 with the cavity of the cylindrical resonator 20c. A plurality of elongated holes 82 are formed in the outer edge of the rotating base 78. The elongated holes 82 are formed at positions corresponding to the screw holes 74 of the inner edge portion 72 of the cylindrical resonator 20c. The elongated holes 82 are formed along the circumferential direction of the rotating base 78. The rotating base 78 closes the antenna insertion hole 70. In this state, a screw 84 is inserted into the elongated hole 82. The screw 84 is screwed into the screw hole 74. As a result, the rotating base 78 is attached to the conductive wall 32 that forms the end face of the cylindrical resonator 20c. Furthermore, the rotating base 78 can rotate in the circumferential direction of the rotating base 78 by the length of the elongated hole 82.

[0049] The coaxial antenna 22A is inserted into a hole 80 formed in the fixing member 76 and a hole (not shown) formed in the rotating base 78. In this state, the longitudinal direction of the coaxial antenna 22A is parallel to the axial direction of the cylindrical resonator 20c. As in the first embodiment shown in FIG. 3, a part of the second inner portion 44-2 of the internal conductor 44 protrudes into the internal cavity of the cylindrical resonator 20c. With each screw 84 loosened, the rotating base 78 can rotate in the circumferential direction of the rotating base 78. By rotating the rotating base 78 in the circumferential direction, the coaxial antenna 22A can be moved in an arc shape. That is, within the cavity of the cavity resonator 20, the internal conductor 44 can be moved along a direction intersecting (perpendicular to) the longitudinal direction of the internal conductor 44. When each screw 84 is tightened, the rotating base 78 and the coaxial antenna 22A cannot rotate.

[0050] [Seventh embodiment] FIG. 15 is a schematic diagram of the cavity resonator unit 18 of the seventh embodiment. FIG. 15 shows the cavity resonator unit 18 viewed from the end face direction. The cavity resonator unit 18 of the seventh embodiment includes a box-shaped resonator 20b and an electric field type coaxial antenna 22A (FIG. 14). The TEM mode of the cavity resonator unit 18 shown in FIG. 15 is the TE101 mode. As in the cavity resonator unit 18 shown in FIG. 15, a box-shaped resonator 20b of the TE101 mode may be used instead of the cylindrical resonator 20c of the TE110 mode of the sixth embodiment shown in FIG. 14 and the like. The configuration of the seventh embodiment is the same as that of the sixth embodiment except for the box-shaped resonator 20b.

[0051] [Other embodiments] In the sixth and seventh embodiments, the case where the electric field type coaxial antenna 22A is moved in a direction intersecting the longitudinal direction of the coaxial antenna 22A relative to the cavity resonator 20 has been described as an example, but the present invention is not limited thereto. The adjustment mechanism 24B can also move the magnetic field type coaxial antenna 22B in a direction intersecting the longitudinal direction of the coaxial antenna 22B relative to the cavity resonator 20. In this case, for example, the box-type resonator 20b of the fifth embodiment shown in FIG. 12 is used as the cavity resonator 20. The magnetic field type coaxial antenna 22B and the adjustment mechanism 24B are disposed on a conductor wall 32 perpendicular to the longitudinal direction of the box-type resonator 20b.

[0052] In the sixth and seventh embodiments, the case where the coaxial antenna 22 is rotated around the axis of the rotating table 78 has been described as an example, but the present invention is not limited to this. The adjustment mechanism 24B may move the coaxial antenna 22 along a straight line. In this case, the adjustment mechanism 24B may include a linear slide mechanism.

[0053] It is also possible to combine the adjustment mechanism 24A of the first to fifth embodiments with the adjustment mechanism 24B of the sixth and seventh embodiments. For example, by attaching the adjustment mechanism 24A of the first to fifth embodiments to the rotating table 78 of the sixth and seventh embodiments, the coaxial antenna 22 becomes movable in the longitudinal direction of the coaxial antenna 22 and in a direction intersecting the longitudinal direction of the coaxial antenna 22. For example, the coaxial antenna 22 can be roughly aligned by moving the coaxial antenna 22 in the longitudinal direction of the coaxial antenna 22, and the position of the coaxial antenna 22 can be finely adjusted by moving the coaxial antenna 22 in a direction intersecting the longitudinal direction.

[0054] It should be noted that the cavity resonator unit 18 in each embodiment is not limited to the TEM mode. Also, a waveguide may be connected to the conductor wall 32, and the coaxial antenna 22 and the adjustment mechanism 24 may be attached to the waveguide.

[0055] The cavity resonator 20 (cylindrical resonator 20c, box-type resonator 20b) of each embodiment, the coaxial antenna 22 (electric field type coaxial antenna 22A, magnetic field type coaxial antenna 22B) of each embodiment, and the adjustment mechanism 24 (24A, 24B) of each embodiment may be appropriately combined.

[0056] [Effects of each embodiment] According to each embodiment, it is possible to provide a better microwave reaction device 10. That is, according to each embodiment, the impedance of the microwave reaction device 10 can be matched by making the coaxial antenna 22 relatively movable in either direction with respect to the cavity resonator 20. That is, according to each embodiment, it is possible to suppress reflected waves in the microwave reaction device 10, so that it is possible to increase the energy at the energy concentration position of the cavity resonator 20.

[0057] According to each embodiment, impedance matching can be performed by adjusting the position of the coaxial antenna 22, so there is no need for an impedance matching device between the microwave oscillator 12 and the coaxial antenna 22. Therefore, the microwave reaction device 10 can be made smaller.

[0058] [Note] The following supplementary notes are further disclosed regarding the above embodiment and modified examples.

[0059] (Appendix 1) The microwave reaction device (10) of the present disclosure comprises a cavity resonator (20) having a conductor wall (32) that defines a cavity, a cylindrical outer conductor (42), and a rod-shaped inner conductor (44) that is housed in the outer conductor and cannot be displaced relative to the outer conductor, a coaxial antenna (22, 22A, 22B) that radiates microwaves into the cavity, and an adjustment mechanism (24, 24A, 24B) that supports the coaxial antenna so that it can move relatively in either direction with respect to the cavity resonator.

[0060] (Appendix 2) In the microwave reaction apparatus described in Supplementary Note 1, the adjustment mechanism may support the coaxial antenna so as to be movable in a longitudinal direction of the coaxial antenna.

[0061] (Appendix 3) In the microwave reaction device described in Appendix 2, the adjustment mechanism may comprise a fixing member (50) capable of fixing the coaxial antenna to the conductive wall, and fastening members (52, 62) for fastening the coaxial antenna to the fixing member, thereby fixing the coaxial antenna to the conductive wall.

[0062] (Appendix 4) In the microwave reaction apparatus described in Supplementary Note 2, the outer conductor comprises a first outer portion (42-1) including a base end of the outer conductor and having a constant inner diameter, and an outer tapered portion (42-2) including a tip end of the outer conductor and having a gradually increasing inner diameter toward the tip end of the outer conductor, and the inner conductor comprises a first inner portion (44-1) including a base end of the inner conductor and having a constant outer diameter, a second inner portion (44-2) including the tip end of the inner conductor and having a constant outer diameter, and an inner tapered portion (44-3) located between the first inner portion and the second inner portion and having a gradually increasing outer diameter from the first inner portion toward the second inner portion, and an inner peripheral surface (42i) of the outer tapered portion of the outer conductor and an outer peripheral surface (44o) of the inner tapered portion of the inner conductor face each other.

[0063] (Appendix 5) In the microwave reaction apparatus described in Appendix 4, a hole (36) is formed in the conductor wall, into which the second internal portion of the internal conductor is inserted, an inner circumferential surface of the first external portion of the external conductor and an outer circumferential surface of the first internal portion of the internal conductor face each other, an inner circumferential surface (36i) of the hole and an outer circumferential surface of the second internal portion of the internal conductor face each other, and a distance (D2) between the inner circumferential surface of the hole and the outer circumferential surface of the second internal portion may be greater than a distance (D1) between the inner circumferential surface of the first external portion and the outer circumferential surface of the first internal portion.

[0064] (Appendix 6) In the microwave reaction apparatus according to any one of Supplementary Notes 1 to 5, the adjustment mechanism may support the coaxial antenna movably in a direction intersecting with a longitudinal direction of the coaxial antenna.

[0065] (Appendix 7) In the microwave reaction apparatus described in Supplementary Note 6, the adjustment mechanism may support the coaxial antenna rotatably about an axis along a longitudinal direction of the coaxial antenna.

[0066] (Appendix 8) In the microwave reaction apparatus described in Supplementary Note 7, the adjustment mechanism may include a rotation table (78) rotatable about the axis.

[0067] (Appendix 9) The adjustment mechanism of the present disclosure is an adjustment mechanism that adjusts the position of a coaxial antenna provided in a cavity resonator of a microwave reaction device, and the coaxial antenna has a cylindrical outer conductor and a rod-shaped inner conductor that is housed in the outer conductor and cannot be displaced relative to the outer conductor, and supports the coaxial antenna so that it can move relatively in either direction with respect to the cavity resonator.

[0068] The present invention is not limited to the above disclosure, and various configurations can be adopted without departing from the gist of the present invention. [Explanation of symbols]

[0069] 10...Microwave reaction device 20...Cavity resonator 22, 22A, 22B... Coaxial antenna 24, 24A, 24B... Adjustment mechanism 32... Conductive wall 36... Antenna insertion hole (hole) 42...Outer conductor 42i...Inner surface 42-1: First outer portion 42-2: Outer tapered portion 44...Inner conductor 44o...Outer surface 44-1...First internal part 44-2...Second internal part 44-3…Internal tapered portion 50…Fixing member 52...Screw member (fastening member) 62...Nut member (fastening member) 78...Turntable

Claims

1. a cavity resonator including conductive walls defining a cavity; a coaxial antenna having a cylindrical outer conductor and a rod-shaped inner conductor that is accommodated in the outer conductor and cannot be displaced relative to the outer conductor, the coaxial antenna radiating microwaves into the cavity; an adjustment mechanism that supports the coaxial antenna so as to be movable in any direction relative to the cavity resonator; A microwave reaction apparatus comprising:

2. 2. The microwave reaction apparatus according to claim 1, The adjustment mechanism supports the coaxial antenna so as to be movable in a longitudinal direction of the coaxial antenna.

3. The microwave reaction apparatus according to claim 2, The adjustment mechanism includes: a fixing member capable of fixing the coaxial antenna to the conductor wall; a fastening member for fastening the coaxial antenna to the fixing member to fix the coaxial antenna to the conductor wall; A microwave reaction apparatus comprising:

4. The microwave reaction apparatus according to claim 2, The outer conductor is a first outer portion including a proximal end of the outer conductor and having a constant inner diameter; an outer tapered portion including a tip of the outer conductor and having an inner diameter gradually increasing toward the tip of the outer conductor; Equipped with The inner conductor is a first inner portion including a base end of the inner conductor and having a constant outer diameter; a second inner portion including a tip of the inner conductor and having a constant outer diameter; an internal tapered portion located between the first internal portion and the second internal portion, the internal tapered portion having an outer diameter gradually increasing from the first internal portion toward the second internal portion; Equipped with An inner circumferential surface of the outer tapered portion of the outer conductor and an outer circumferential surface of the inner tapered portion of the inner conductor face each other.

5. The microwave reaction apparatus according to claim 4, a hole into which the second inner portion of the inner conductor is inserted is formed in the conductor wall; an inner circumferential surface of the first outer portion of the outer conductor and an outer circumferential surface of the first inner portion of the inner conductor face each other; an inner circumferential surface of the hole and an outer circumferential surface of the second inner portion of the inner conductor face each other; A microwave reaction device, wherein a distance between an inner periphery of the hole and an outer periphery of the second inner portion is greater than a distance between an inner periphery of the first outer portion and an outer periphery of the first inner portion.

6. The microwave reaction apparatus according to any one of claims 1 to 5, The adjustment mechanism supports the coaxial antenna so as to be movable in a direction intersecting a longitudinal direction of the coaxial antenna.

7. 7. The microwave reaction apparatus according to claim 6, The adjustment mechanism supports the coaxial antenna so as to be rotatable about an axis along a longitudinal direction of the coaxial antenna.

8. The microwave reaction apparatus according to claim 7, The adjustment mechanism comprises a rotating platform rotatable about the axis.

9. An adjustment mechanism for adjusting the position of a coaxial antenna provided in a cavity resonator of a microwave reaction device, The coaxial antenna has a cylindrical outer conductor and a rod-shaped inner conductor that is accommodated in the outer conductor and cannot be displaced relative to the outer conductor, An adjustment mechanism that supports the coaxial antenna so as to be movable in any direction relative to the cavity resonator.

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