Panel housing container

The panel storage container addresses the issue of securely holding the sealing member by incorporating a groove with a protruding sealing member that interferes with the groove's side wall, and optionally a second protrusion on the opposing side wall, effectively preventing removal and maintaining sealing integrity.

JP2025072101APending Publication Date: 2025-05-09SHIN ETSU POLYMER CO LTD
View PDF 5 Cites 0 Cited by

Patent Information

Application Number
JP2023182627
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-10-24
Publication Date
2025-05-09

AI Technical Summary

Technical Problem

Existing panel storage containers face challenges in securely holding the sealing member, which can lead to its easy removal from the groove, compromising the container's sealing effectiveness.

Method used

The panel storage container design incorporates a groove on the lid's surface with a first space connected to it, featuring a first protrusion of the sealing member that interferes with the groove's side wall, making it difficult to remove the sealing member. Additionally, the container may include a second space and protrusion on the opposing side wall for enhanced security.

Benefits of technology

This design ensures the sealing member is held more firmly, preventing accidental removal and maintaining the container's sealing integrity.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure 2025072101000001_ABST
    Figure 2025072101000001_ABST
Patent Text Reader

Abstract

To provide a panel housing container which can hold a sealing member further rigidly.SOLUTION: A panel housing container comprises a container main body having an opening, for housing a plurality of panels, and a lid body for closing the opening. The lid body comprises: a lid main body which has a first face which faces the plurality of panels housed in the container main body in a first direction and a second face opposite to the first face, with the lid body closing the opening; and a sealing member which is provided in the first face, and seals space between the lid main body and the container main body. In the first face, a groove part which becomes hollow in the first direction, and holds the sealing member is provided. The groove part is defined by a first side wall and a second side wall which face each other in a second direction intersecting the first direction, and a bottom wall which connects the first side wall and the second side wall. On the first side wall, a first space continued to the groove part is provided. The sealing member includes a first projection part provided in the first space.SELECTED DRAWING: Figure 4
Need to check novelty before this filing date? Find Prior Art

Description

[Technical field]

[0001] The present disclosure relates to a panel enclosure. [Background technology]

[0002] There is known a panel storage container for storing a plurality of panels. For example, Patent Document 1 describes a storage container including a container body for storing a plurality of wafers and a lid for closing an opening of the container body. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2017-37945 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the storage container described in Patent Document 1, the lid body and the container body are sealed with a seal member (sealing member). The sealing member that seals the lid body and the container body may be attached to the lid body by fitting the sealing member into a groove provided in the lid body. In such a configuration, a structure that makes it difficult for the sealing member to come out of the groove is desired.

[0005] The present disclosure describes a panel housing that can more securely hold a sealing member. [Means for solving the problem]

[0006] A panel storage container according to one aspect of the present disclosure includes a container body having an opening for storing a plurality of panels, and a lid for closing the opening. The lid includes a lid body having a first surface facing the plurality of panels stored in the container body in a first direction and a second surface opposite to the first surface when the lid closes the opening, and a sealing member provided on the first surface to seal between the lid body and the container body. The first surface is provided with a groove portion that is recessed in the first direction and holds the sealing member. The groove portion is defined by a first side wall and a second side wall that face each other in a second direction intersecting the first direction, and a bottom wall that connects the first side wall and the second side wall. The first side wall is provided with a first space that is continuous with the groove portion. The sealing member includes a first protrusion provided in the first space.

[0007] In this panel storage container, the sealing member is held in a groove. A first space communicating with the groove is provided in a first side wall that defines the groove, and a first protrusion of the sealing member is provided in the first space. As a result, even if a force is applied to the sealing member in a direction in which the sealing member is removed from the groove, the first protrusion provided in the first space interferes with the first side wall, making it difficult for the sealing member to be removed from the groove. As a result, it is possible to hold the sealing member more firmly.

[0008] The first space may be a through hole. In this case, even if a force is applied to the sealing member in a direction in which the sealing member comes out of the groove, the first protrusion provided in the through hole interferes with the first side wall, making it difficult for the sealing member to come out of the groove.

[0009] The first space may be a recess. In this case, even if a force is applied to the sealing member in a direction in which the sealing member comes out of the groove, the first protrusion provided in the recess interferes with the first side wall, making it difficult for the sealing member to come out of the groove.

[0010] The second side wall may have a second space connected to the groove. The sealing member may include a second protrusion provided in the second space. With this configuration, when a force is applied to the sealing member in a direction in which the sealing member is removed from the groove, not only does the first protrusion provided in the first space interfere with the first side wall, but the second protrusion provided in the second space interfere with the second side wall, making it even more difficult for the sealing member to come off from the groove. As a result, it is possible to hold the sealing member more firmly.

[0011] The second space may be a through hole. In this case, even if a force is applied to the sealing member in a direction in which the sealing member comes out of the groove, the second protrusion provided in the through hole interferes with the second side wall, making it difficult for the sealing member to come out of the groove.

[0012] The second space may be a recess. In this case, even if a force is applied to the sealing member in a direction in which the sealing member comes out of the groove, the second protrusion provided in the recess interferes with the second side wall, making it difficult for the sealing member to come out of the groove.

[0013] The bottom wall may be provided with a removal hole penetrating the lid body in the first direction. With this configuration, by inserting a rod-shaped member into the removal hole, a force can be applied to the sealing member in a direction in which the sealing member is removed from the groove. Therefore, the sealing member can be easily removed. Effect of the Invention

[0014] According to the present disclosure, the sealing member can be held more firmly. [Brief description of the drawings]

[0015] [Figure 1] FIG. 1 is an exploded perspective view of a panel storage container according to one embodiment. [Diagram 2] FIG. 2 is a cross-sectional view taken along line II-II in FIG. [Diagram 3] FIG. 3 is a perspective view of the cover shown in FIG. 1 as seen from the rear side. [Figure 4] FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. [Diagram 5] FIG. 5 is a cross-sectional view taken along line VV in FIG. [Figure 6] Fig. 6(a) is a diagram showing a modified example of the lid body, Fig. 6(b) is a diagram showing another modified example of the lid body, and Fig. 6(c) is a diagram showing yet another modified example of the lid body. [Figure 7] FIG. 7 is a diagram showing still another modified example of the lid. [Figure 8] FIG. 8 is a diagram showing still another modified example of the lid. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0016] Hereinafter, an embodiment of the present disclosure will be described in detail with reference to the drawings. In the description of the drawings, the same elements are given the same reference numerals, and duplicated descriptions are omitted. Each drawing shows an XYZ coordinate system. The Y-axis direction (first direction) is a direction that intersects (here, perpendicular to) the X-axis direction (second direction) and the Z-axis direction. The Z-axis direction is a direction that intersects (here, perpendicular to) the X-axis direction and the Y-axis direction. As an example, the X-axis direction is the left-right direction (width direction), the Y-axis direction is the front-back direction (depth direction), and the Z-axis direction is the up-down direction (height direction).

[0017] A panel storage container according to an embodiment will be described with reference to FIG. 1. FIG. 1 is an exploded perspective view of a panel storage container according to an embodiment. The panel storage container 1 shown in FIG. 1 is a container for storing a plurality of panels. The panel storage container 1 complies with, for example, the SEMI (Semiconductor Equipment and Materials International) standard. Examples of the panels include glass substrates for liquid crystal panels and panels equipped with electronic components. The panels have a rectangular shape. Examples of the panel sizes include 510 mm×515 mm and 600 mm×600 mm. The number of panels that can be stored in the panel storage container 1 is determined arbitrarily, and may be, for example, 6, 12, 16, or 24.

[0018] The panel storage container 1 is used, for example, in a manufacturing device that manufactures electronic component assemblies. Electronic component assemblies are manufactured through a process of mounting a large number of electronic components on a large carrier panel such as a glass plate or a stainless steel plate, a process of sealing these electronic components with epoxy resin or the like, a process of peeling the sealed electronic components from the carrier panel in panel form, and a process of cutting out the panel-form electronic components individually. The panel storage container 1 is used to transport panels between these processes.

[0019] The panel storage container 1 includes a container body 2 and a lid body 3.

[0020] The container body 2 is a rectangular parallelepiped container with an open front (front face). In other words, the container body 2 is a front-open box-type container with an opening 2a on the front face. The container body 2 stores a plurality of panels. Specifically, the container body 2 stores a plurality of panels stacked at intervals in the vertical direction. The panels are inserted into and removed from the container body 2 via the opening 2a. The container body 2 will be described in detail later.

[0021] The lid 3 is a member for closing the opening 2a of the container body 2. The lid 3 is detachably attached to a flange 25 that defines the opening 2a. The lid 3 will be described in detail later.

[0022] The container body 2 and the lid 3 are constructed by combining a plurality of parts molded from metal materials or resin materials. Examples of resins contained in the molding material of the resin material include thermoplastic resins. Examples of thermoplastic resins include polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, liquid crystal polymer, acrylic resins such as polymethyl methacrylate, and acrylonitrile butadiene styrene copolymer. Alloys of these resins may be used as the resins contained in the molding material of the resin material.

[0023] Conductive materials and various antistatic agents may be added to these resins. The conductive materials may be, for example, carbon fibers, carbon powder, carbon nanotubes, or conductive polymers. As the antistatic agent, anionic, cationic, and nonionic antistatic agents may be used. Benzotriazole, salicylate, cyanoacrylate, oxalic acid anilide, and hindered amine ultraviolet absorbers may be added. Glass fibers or carbon fibers that improve rigidity may also be selectively added.

[0024] Next, a detailed description will be given of the container body 2. The container body 2 includes a top plate 21, a bottom plate 22, a pair of side walls 23, a rear wall 24, a flange 25, and a frame body 26.

[0025] The top plate 21, the bottom plate 22, the side walls 23, and the rear wall 24 are rectangular plate materials. The top plate 21 and the bottom plate 22 face each other in the up-down direction and are arranged substantially parallel to each other. The pair of side walls 23 face each other in the left-right direction and are arranged substantially parallel to each other. The rear wall 24 connects the rear end of the top plate 21 to the rear end of the bottom plate 22, and also connects the rear ends of the pair of side walls 23. The top plate 21, the bottom plate 22, the pair of side walls 23, and the rear wall 24 define the storage space 20.

[0026] The top plate 21, the bottom plate 22, and the side walls 23 are made of, for example, a metal material such as aluminum or stainless steel. The rear wall 24 is made of, for example, a transparent resin material that allows the storage space 20 to be visually observed from the outside of the container body 2. A part of the rear wall 24 may be made of a transparent resin material. Examples of transparent resin materials include acrylic resin, polycarbonate, vinyl chloride resin, and cycloolefin polymer.

[0027] The flange 25 is a rectangular frame body, and is provided across the front end of the top plate 21, the front end of the bottom plate 22, and the front ends of the pair of side walls 23. The flange 25 defines the opening 2a. The flange 25 is made of, for example, the above-mentioned resin material or a metal material such as aluminum or stainless steel. The upper and lower frame parts of the flange 25 are each provided with two locking holes 25h arranged at a distance in the left-right direction. The locking holes 25h in the upper frame part and the locking holes 25h in the lower frame part are provided in positions facing each other in the up-down direction.

[0028] The frame body 26 is used to fix the top plate 21, the bottom plate 22, the pair of side walls 23, and the rear wall 24. The frame body 26 is made of a metal material such as aluminum or stainless steel. The frame body 26 is provided on the front surface of the rear wall 24. The frame body 26 has a frame portion 26a (see FIG. 2), a support pillar 26b (see FIG. 2), and a pair of support pillars 26c (see FIG. 2). The frame portion 26a is a rectangular member and is provided along the periphery of the rear wall 24.

[0029] The support pillar 26b and the pair of support pillars 26c are columnar members extending in the up-down direction. The one support pillar 26c, the support pillar 26b, and the other support pillar 26c are arranged in that order in the left-right direction and are disposed substantially parallel to each other. The support pillar 26b and the pair of support pillars 26c extend from the upper frame portion to the lower frame portion of the frame portion 26a. The support pillar 26b is provided at the center of the frame body 26 in the left-right direction, and the pair of support pillars 26c are provided near both ends of the frame body 26 in the left-right direction. The support pillar 26b is provided with a plurality of fitting holes for attaching a shaft 61a described later. The support pillar 26c is provided with a plurality of fitting holes for attaching a shaft 62a described later.

[0030] At the corners of the container body 2, cover members for preventing particles from entering the accommodation space 20 are provided.

[0031] Next, the internal structure of the container body 2 will be described with reference to Fig. 2. Fig. 2 is a cross-sectional view taken along line II-II in Fig. 1. As shown in Fig. 2, the panel storage container 1 includes a plurality of support members 61, a plurality of support members 62, a plurality of side plates 63, and a plurality of holders 64.

[0032] Each support member 61 is a portion for supporting the center portion of the panel in the left-right direction. Each support member 61 includes a shaft 61a and a plurality of elastic bodies 61b. The shaft 61a is a columnar (e.g., cylindrical) member extending in the front-rear direction. The rear end of the shaft 61a is fixed to a support 26b provided on the inner surface of the rear wall 24. The shaft 61a is made of, for example, a material with high bending rigidity. Examples of materials for the shaft 61a include metals such as stainless steel and aluminum, and carbon fiber reinforced plastic.

[0033] Each elastic body 61b is an annular (e.g., circular) member provided on the outer circumferential surface of the shaft 61a around the axis of the shaft 61a. Each elastic body 61b is provided to suppress slippage of the panel and improve the positioning accuracy of the panel. Each elastic body 61b is made of, for example, a rubber material. Examples of rubber materials include EPDM (ethylene propylene diene rubber), silicone rubber, and fluororubber. The multiple elastic bodies 61b are arranged at regular intervals in the extension direction of the shaft 61a.

[0034] Each support member 62 is a portion for supporting an end portion in the left-right direction of the panel. Each support member 62 includes a shaft 62a, a plurality of elastic bodies 62b, a stopper 62c, and a stopper 62d. The shaft 62a is a columnar (e.g., cylindrical) member extending in the front-rear direction. The rear end portion of the shaft 62a is fixed to a support 26c provided on the inner surface of the rear wall 24. The shaft 62a is made of, for example, a material with high bending rigidity. Examples of materials for the shaft 62a include metals such as stainless steel and aluminum, and carbon fiber reinforced plastic. The length of the shaft 62a in the front-rear direction is slightly longer than the length of the panel in the front-rear direction and longer than the length of the shaft 61a in the front-rear direction.

[0035] Each elastic body 62b is an annular (e.g., annular) member provided on the outer circumferential surface of the shaft 62a around the axis of the shaft 62a. Each elastic body 62b is provided to suppress panel slippage and improve the positioning accuracy of the panel. The constituent material and arrangement of each elastic body 62b are similar to those of the elastic body 61b, and therefore detailed description thereof will be omitted.

[0036] The stopper 62c is a member for preventing the panel from popping out and for determining the position of the front end of the panel. The stopper 62c is made of, for example, the above-mentioned resin material. The stopper 62c is provided at the front end of the shaft 62a. The stopper 62d is a member for determining the position of the rear end of the panel. The stopper 62d is made of, for example, the above-mentioned resin material. The stopper 62d is provided at the rear end of the shaft 62a. The stopper 62d has a block shape. The stopper 62d is provided with an insertion hole for inserting the shaft 62a in the front-rear direction.

[0037] The number of support members 61 and support members 62 varies depending on the number of panels that can be stored in the panel storage container 1. In this embodiment, the panel storage container 1 includes one support member 61 and two support members 62 per panel. In other words, one support member 61 and two support members 62 form a storage stage that stores one panel. One support member 61 and two support members 62 are arranged in the left-right direction. One support member 61 is disposed between the two support members 62.

[0038] Each side plate 63 is a member for attaching the holder 64. Each side plate 63 is a plate-shaped member extending in the vertical direction. Each side plate 63 is made of a metal material such as aluminum or stainless steel. Each side plate 63 is provided on the outer surface of the side wall 23. In this embodiment, two side plates 63 are provided on each side wall 23. The two side plates 63 are arranged in the front-rear direction and are disposed substantially parallel to each other. One side plate 63 is provided near the center of the side wall 23 in the front-rear direction, and the other side plate 63 is provided near the front end of the side wall 23 in the front-rear direction.

[0039] Each holder 64 is a member for holding (supporting) the shaft 62a and supporting the left-right end of the panel. An insertion hole penetrating the holder 64 in the front-rear direction is provided at the tip of the holder 64, and the shaft 62a is inserted through the insertion hole.

[0040] The base end portion of the holder 64 abuts against the inner surface of the side wall 23, and the side plate 63, side wall 23, and holder 64 are positioned by a knock pin (not shown). In this state, a screw is inserted from the outside of the side plate 63 into an insertion hole provided in the side plate 63, and the screw is screwed into a screw hole provided in the base end portion of the holder 64. As a result, the holder 64 is fixed to the side plate 63 with the side wall 23 sandwiched between the holder 64 and the side plate 63.

[0041] Next, the lid 3 will be described in detail with reference to Fig. 1 and Fig. 3 to Fig. 5. Fig. 3 is a perspective view of the lid shown in Fig. 1 as seen from the back. Fig. 4 is a cross-sectional view taken along line IV-IV in Fig. 3. Fig. 5 is a cross-sectional view taken along line VV in Fig. 3. As shown in Fig. 1 and Fig. 3 to Fig. 5, the lid 3 includes a lid main body 31, a cover member 32, a locking mechanism 33, and a sealing member 34.

[0042] The lid body 31 is the main body of the lid body 3. The lid body 31 is a rectangular plate material. The lid body 31 is made of a metal material such as aluminum and magnesium alloy. The lid body 31 may be made of a thermoplastic resin such as polycarbonate resin. The lid body 31 has a front surface 31a (second surface) and a back surface 31b (first surface). The back surface 31b is a surface that faces the multiple panels in the front-rear direction when the lid body 3 closes the opening 2a. The front surface 31a is a surface opposite to the back surface 31b in the front-rear direction.

[0043] The back surface 31b is provided with a groove portion 35 for holding the sealing member 34. In this embodiment, the groove portion 35 is provided in an annular shape along the periphery of the back surface 31b, and is recessed from the back surface 31b toward the front surface 31a. The groove portion 35 has a dovetail (undercut groove) structure. The groove portion 35 is defined by a side wall 51 (first side wall), a side wall 52 (second side wall), and a bottom wall 53. The side wall 51 and the side wall 52 (a pair of side walls) face each other in a direction intersecting with the front-rear direction. The bottom wall 53 connects the side wall 51 and the side wall 52.

[0044] In other words, the bottom wall 53 is provided in an annular shape along the periphery of the back surface 31b, and the side walls 51 and 52 extend from both ends of the bottom wall 53 toward the back surface 31b. The side walls 51 and 52 have an annular shape along the periphery of the back surface 31b and face each other with a certain gap between them. The tip portion 51a of the side wall 51 and the tip portion 52a of the side wall 52 protrude toward each other with the groove portion 35 in between.

[0045] The side wall 51 is provided with a plurality of through holes 51b (first spaces). Each through hole 51b is a space connected to the groove portion 35. Each through hole 51b has an elongated hole shape that penetrates the side wall 51 and extends along the periphery of the back surface 31b. Each through hole 51b is provided near the center of the length (height) in the front-rear direction of the side wall 51. The plurality of through holes 51b are arranged in an annular shape at regular intervals along the periphery of the back surface 31b. That is, the annular side wall 51 has a plurality of through holes 51b in each of the upper part, the lower part, the left part, and the right part. The through holes 51b may be provided in a corner connecting the upper part and the left part, a corner connecting the upper part and the right part, a corner connecting the lower part and the left part, and a corner connecting the lower part and the right part.

[0046] The cover member 32 is a member that covers the front surface 31a of the lid main body 31. The cover member 32 is a rectangular plate material. The cover member 32 is made of a resin material such as polycarbonate. The cover member 32 is provided with a keyhole 32h. A key (not shown) is inserted into the keyhole 32h.

[0047] The locking mechanism 33 locks or unlocks the lid 3 by operating a key inserted in the keyhole 32h. The locking mechanism 33 includes a latch (not shown). With the lid 3 attached to the flange 25, the latch is inserted into the locking hole 25h provided in the flange 25 by operating the key, thereby locking the lid 3. With the lid 3 locked, the latch is pulled out of the locking hole 25h by operating the key, thereby unlocking the lid 3.

[0048] The sealing member 34 is a member that seals between the container body 2 and the lid body 31. The sealing member 34 is a string-like elastic member. In this embodiment, the sealing member 34 is arranged in a rectangular ring shape. The sealing member 34 is made of an elastically deformable resin. Examples of such resin include fluororubber, EPDM, silicone, and urethane. In this embodiment, a rubber sponge is used as the sealing member 34.

[0049] The sealing member 34 is provided on the back surface 31b of the lid main body 31. Specifically, the sealing member 34 is fitted into the groove portion 35. The sealing member 34 has a volume larger than the volume of the groove portion 35. The sealing member 34 includes a protruding portion 34a and a protruding portion 34b (first protruding portion).

[0050] The protruding portion 34a is a portion that protrudes from between the tip portion 51a and the tip portion 52a to the outside of the groove portion 35. The tip surface of the protruding portion 34a functions as a sealing surface. Specifically, the tip surface of the protruding portion 34a is pressed against the step surface 25a of the flange 25, thereby airtightly closing the opening 2a of the container body 2. The protruding portion 34b is a portion that enters the through hole 51b. The protruding portion 34b enters the through hole 51b, thereby airtightly closing the through hole 51b. Therefore, the cleanliness of the accommodation space 20 is maintained.

[0051] In the manufacturing process of the panel storage container 1, the sealing member 34 is fitted into the groove portion 35. As described above, the volume of the sealing member 34 is larger than the capacity of the groove portion 35, and the sealing member 34 is elastically deformable. Therefore, when the sealing member 34 is fitted into the groove portion 35, due to the elastic force (restoring force) of the sealing member 34, a portion of the sealing member 34 protrudes from between the tip portion 51a and the tip portion 52a to form the protruding portion 34a, and another portion of the sealing member 34 enters the through hole 51b to form the protruding portion 34b.

[0052] In the panel storage container 1 described above, the sealing member 34 is held in the groove 35. A through hole 51b connected to the groove 35 is provided in the side wall 51 of the groove 35, and the protrusion 34b of the sealing member 34 is provided in the through hole 51b. The through hole 51b extends in a direction intersecting with the direction in which the groove 35 is recessed from the back surface 31b (front direction). Therefore, even if a force is applied to the sealing member 34 in a direction in which the sealing member 34 comes out of the groove 35 (rear direction), the protrusion 34b provided in the through hole 51b interferes with the side wall 51, so that the sealing member 34 is unlikely to come out of the groove 35. As a result, the sealing member 34 can be held more firmly.

[0053] In the manufacturing process of the panel storage container 1, the through holes 51b are formed in the side walls 51 from the outer peripheral surface of the side walls 51 toward the groove portions 35. Therefore, compared to the case where a recess is formed in the inner peripheral surface of the side walls 51, the through holes 51b can be formed more easily.

[0054] The panel storage container according to the present disclosure is not limited to the above embodiment.

[0055] The method of connecting the members of the container body 2 may be different from that in the above embodiment. In the above embodiment, the container body 2 is configured by combining a plurality of parts, but it may be an integrally molded product.

[0056] The number, size, and arrangement of the through holes 51b provided in the side wall 51 can be determined arbitrarily. The number of the through holes 51b provided in the side wall 51 may be one, or two or more.

[0057] As shown in FIG. 6(a), the side wall 51 may be provided with a plurality of recesses 51c (first spaces) instead of the plurality of through holes 51b. Each recess 51c is a space connected to the groove portion 35. Each recess 51c is recessed in a direction away from the side wall 52. The number, size, and arrangement of the recesses 51c provided in the side wall 51 are similar to those of the through holes 51b, and therefore a description thereof will be omitted. Alternatively, one annular recess 51c may be provided around the entire circumference of the side wall 51.

[0058] In this modification, a recess 51c continuing to the groove 35 is provided on the side wall 51 of the groove 35, and the protrusion 34b of the sealing member 34 is provided in the recess 51c. The recess 51c extends in a direction intersecting with the direction in which the groove 35 is recessed from the back surface 31b (front direction). Therefore, even if a force is applied to the sealing member 34 in a direction in which the sealing member 34 comes out of the groove 35 (rear direction), the protrusion 34b provided in the recess 51c interferes with the side wall 51, so that the sealing member 34 is unlikely to come out of the groove 35. As a result, the sealing member 34 can be held more firmly.

[0059] As shown in FIG. 6B, a plurality of recesses 52b (second spaces) may be provided in the side wall 52. Each recess 52b is a space connected to the groove portion 35. Each recess 52b is recessed in a direction away from the side wall 51. Each recess 52b is provided near the center of the length (height) in the front-rear direction of the side wall 52. The plurality of recesses 52b are arranged in an annular shape at regular intervals along the periphery of the back surface 31b. That is, a plurality of recesses 52b are provided in each of the upper portion, the lower portion, the left portion, and the right portion of the annular side wall 52. The recesses 52b may be provided in a corner connecting the upper portion and the left portion, a corner connecting the upper portion and the right portion, a corner connecting the lower portion and the left portion, and a corner connecting the lower portion and the right portion.

[0060] The recess 52b may be provided at a position facing the through hole 51b, or at a position different from the position facing the through hole 51b. The number, size, and arrangement of the recesses 52b provided in the side wall 52 may be determined arbitrarily. The number of recesses 52b provided in the side wall 52 may be one, or two or more. One annular recess 52b may be provided around the entire circumference of the side wall 52.

[0061] In this modification, the sealing member 34 further includes a protrusion 34c (second protrusion). The protrusion 34c is a portion that fits into the recess 52b.

[0062] In the manufacturing process of the panel storage container 1 including the lid body 3 of this modified example, when the sealing member 34 is fitted into the groove portion 35, due to the elastic force (restoring force) of the sealing member 34, a portion of the sealing member 34 protrudes from between the tip portion 51a and the tip portion 52a to form the protrusion portion 34a, another portion of the sealing member 34 enters the through hole 51b to form the protrusion portion 34b, and yet another portion of the sealing member 34 enters the recess 52b to form the protrusion portion 34c.

[0063] In this modification, a through hole 51b connected to the groove 35 is provided in the side wall 51, and a recess 52b connected to the groove 35 is provided in the side wall 52. A protrusion 34b of the sealing member 34 is provided in the through hole 51b, and a protrusion 34c of the sealing member 34 is provided in the recess 52b. The through hole 51b and the recess 52b extend in a direction intersecting with a direction (front direction) in which the groove 35 is recessed from the back surface 31b. Therefore, even if a force is applied to the sealing member 34 in a direction (rear direction) in which the sealing member 34 is removed from the groove 35, the protrusion 34b provided in the through hole 51b interferes with the side wall 51, and the protrusion 34c provided in the recess 52b interferes with the side wall 52, so that the sealing member 34 is more unlikely to come off the groove 35. As a result, the sealing member 34 can be held more firmly.

[0064] When the recess 52b is provided at a position facing the through hole 51b, the through hole 51b is formed in the side wall 51 from the outer circumferential surface of the side wall 51 toward the groove portion 35, and the recess 52b is formed in the side wall 52. Therefore, the through hole 51b and the recess 52b can be easily formed.

[0065] As shown in Fig. 6(c), in the modified example shown in Fig. 6(a), a plurality of recesses 52b (second spaces) may be provided in the side wall 52. In this case as well, the sealing member 34 includes a protrusion 34c that fits into the recesses 52b.

[0066] 7, a plurality of through holes 52c (second spaces) may be provided in the side wall 52. Each through hole 52c is a space connected to the groove portion 35. Each through hole 52c penetrates the side wall 52. The number, size, and arrangement of the through holes 52c are similar to those of the recessed portion 52b, and therefore a description thereof will be omitted. In this modification, the sealing member 34 further includes a protrusion 34c that fits into the through hole 52c.

[0067] In this modification, a through hole 51b connected to the groove 35 is provided in the side wall 51, and a through hole 52c connected to the groove 35 is provided in the side wall 52. A protrusion 34b of the sealing member 34 is provided in the through hole 51b, and a protrusion 34c of the sealing member 34 is provided in the through hole 52c. The through holes 51b and 52c extend in a direction intersecting with a direction (front direction) in which the groove 35 is recessed from the back surface 31b. Therefore, even if a force is applied to the sealing member 34 in a direction (rear direction) in which the sealing member 34 is removed from the groove 35, the protrusion 34b provided in the through hole 51b interferes with the side wall 51, and the protrusion 34c provided in the through hole 52c interferes with the side wall 52, so that the sealing member 34 is more difficult to remove from the groove 35. As a result, the sealing member 34 can be held more firmly.

[0068] Neither the through hole 51b nor the recess 51c may be provided in the side wall 51, and the recess 52b (first space) or the through hole 52c (first space) may be provided in the side wall 52 (first side wall). In other words, it is sufficient that at least one of the side wall 51 and the side wall 52 has a through hole or a recess.

[0069] 8, the bottom wall 53 may be provided with a removal hole 53h penetrating the side wall 51 (bottom wall 53) in the front-rear direction. According to this configuration, by inserting a rod-shaped member into the removal hole 53h, a force can be applied to the sealing member 34 in a direction in which the sealing member 34 is removed from the groove portion 35. Therefore, the sealing member 34 can be easily removed.

[0070] (Additional Note) [Clause 1] a container body having an opening for storing a plurality of panels; A cover for closing the opening; Equipped with The lid body is a lid body having a first surface facing the plurality of panels housed in the container body in a first direction when the lid body is closing the opening, and a second surface opposite to the first surface; a sealing member provided on the first surface to seal between the lid body and the container body; Equipped with a groove portion recessed in the first direction and configured to hold the sealing member is provided on the first surface; the groove portion is defined by a first side wall and a second side wall facing each other in a second direction intersecting the first direction, and a bottom wall connecting the first side wall and the second side wall, The first side wall is provided with a first space communicating with the groove portion, The sealing member includes a first protrusion provided in the first space.

[0071] (Clause 2) 2. The panel housing of claim 1, wherein the first space is a through hole.

[0072] (Clause 3) 2. The panel enclosure of claim 1, wherein the first space is a recess.

[0073] (Clause 4) The second side wall is provided with a second space communicating with the groove portion, The panel storage container according to any one of claims 1 to 3, wherein the sealing member includes a second protrusion provided in the second space.

[0074] (Clause 5) Item 5. The panel housing of item 4, wherein the second space is a through hole.

[0075] (Clause 6) Item 5. The panel enclosure of item 4, wherein the second space is a recess.

[0076] (Clause 7) The panel storage container according to any one of clauses 1 to 6, wherein the bottom wall is provided with a removal hole penetrating the lid main body in the first direction. [Explanation of symbols]

[0077] 1...panel storage container, 2...container body, 2a...opening, 3...lid body, 31...lid body, 31a...front surface (second surface), 31b...back surface (first surface), 34...sealing member, 34b...protrusion (first protrusion), 34c...protrusion (second protrusion), 35...groove, 51...side wall (first side wall), 51b...through hole (first space), 51c...recess (first space), 52...side wall (second side wall), 52b...recess (second space), 52c...through hole (second space), 53...bottom wall, 53h...removal hole.

Claims

1. a container body having an opening for storing a plurality of panels; A cover for closing the opening; Equipped with The lid body is a lid body having a first surface facing the plurality of panels housed in the container body in a first direction when the lid body is closing the opening, and a second surface opposite to the first surface; a sealing member provided on the first surface and configured to seal between the lid body and the container body; Equipped with The first surface is provided with a groove portion that is recessed in the first direction and that holds the sealing member, the groove portion is defined by a first side wall and a second side wall facing each other in a second direction intersecting the first direction, and a bottom wall connecting the first side wall and the second side wall, The first side wall is provided with a first space communicating with the groove portion, The sealing member includes a first protrusion provided in the first space.

2. The panel housing container according to claim 1 , wherein the first space is a through hole.

3. The panel housing container according to claim 1 , wherein the first space is a recess.

4. The second side wall is provided with a second space communicating with the groove portion, The panel storage container according to any one of claims 1 to 3, wherein the sealing member includes a second protrusion provided in the second space.

5. The panel housing container according to claim 4 , wherein the second space is a through hole.

6. The panel housing container according to claim 4 , wherein the second space is a recess.

7. The panel storage container according to any one of claims 1 to 3, wherein the bottom wall is provided with a removal hole penetrating the lid body in the first direction.

Citation Information

Patent Citations

  • JP1986089553U

  • ELECTRONIC DEVICE MANUFACTURING LOAD PORT EQUIPMENT, SYSTEMS, AND METHODS

    JP2019533909A

  • Panel storage container

    JP2023045870A

  • Seal for wafer containers

    US6354601B1

  • Lid body of storage container and storage container

    JP2017037945A