Actuator

Abstract

To provide an actuator capable of greatly tilting a driven member.SOLUTION: An actuator 100 includes a case member 1, movable members MB, an upper support member 2U, and a lower support member 2D. The upper support member 2U includes: an upper fixation-side portion 2U3 that is connected to the upper end of the case member 1; an upper movable-side portion 2U1 that is connected to respective upper ends of four movable members MB in a rotatable manner; and an upper intermediate portion 2U2 connecting the upper fixation-side portion 2U3 and the upper movable-side portion 2U1. The lower support member 2D includes: a lower fixation-side portion 2D3 that is connected to the lower end of the case member 1; a lower movable-side portion 2D1 that is connected to respective lower ends of the four movable members MB in a rotatable manner; and a lower intermediate portion 2D2 connecting the lower fixation-side portion 2D3 and the lower movable-side portion 2D1. The actuator 100 moves, in a driving direction, at least one of the four movable members MB to tilt an optical element OE which is fixed to the upper movable-side portion 2U1.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to an actuator. [Background technology]

[0002] Conventionally, there is known a device that tilts an optical element by utilizing the Lorentz force generated between four magnets connected to a movable member including a mirror and four coils connected to a fixed member (see Patent Document 1). Also, there is known a device that tilts a mirror by utilizing the Lorentz force generated between four coils connected to a movable member including a mirror and eight magnets connected to a fixed member (see Patent Document 2). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Special Publication No. 2017-534075 [Patent Document 2] Re-tabled publication No. 2011-007628 Summary of the Invention [Problem to be solved by the invention]

[0004] In the above-mentioned device, the mirror can be tilted in a desired direction. However, in the above-mentioned device, if the mirror is tilted too far, there is a risk that the magnet and the coil may interfere with each other.

[0005] It is therefore desirable to provide an actuator that can greatly tilt a driven member, such as a mirror. [Means for solving the problem]

[0006] An actuator according to an embodiment of the present invention is an actuator having a fixed member, a plurality of movable members, a drive device that moves each of the plurality of movable members in a predetermined drive direction relative to the fixed member, and a first support member and a second support member that support each of the plurality of movable members movably in the drive direction relative to the fixed member, wherein the first support member includes a first fixed side portion connected to one end of the fixed member in the drive direction, a first movable side portion rotatably connected to one end of each of the plurality of movable members in the drive direction, and a first intermediate portion elastically connecting between the first fixed side portion and the first movable side portion, The second support member includes a second fixed side portion connected to the other end of the fixed member in the driving direction, a second movable side portion rotatably connected to the other end of each of the multiple movable members in the driving direction, and a second intermediate portion elastically connecting between the second fixed side portion and the second movable side portion, and the drive device is configured to drive a driven member fixed to the first movable side portion by moving at least one of the multiple movable members in the driving direction, the fixed member has a through hole penetrating in the driving direction, and each of the multiple movable members is connected to the first support member and the second support member through the through hole. Effect of the Invention

[0007] The actuator described above is capable of tilting the driven member by a large amount. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a perspective view of an actuator according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a perspective view of the actuator in a state where some members are not shown. [Diagram 3] FIG. 2 is a top view of an upper support member with an optical element attached thereto. [Figure 4] FIG. 2 is an exploded perspective view of a movable member and a supporting member. [Diagram 5] FIG. 2 is an exploded perspective view of the coil assembly. [Figure 6] FIG. 4 is a perspective view of a coil holding member. [Figure 7] FIG. [Figure 8] 4A and 4B are top and bottom views of a fixing member. [Figure 9] FIG. [Figure 10] FIG. [Figure 11] FIG. [Figure 12] FIG. [Figure 13] FIG. 4 is a perspective view of a first upper elastic member. [Figure 14] FIG. 4 is a top view of a first upper elastic member. [Figure 15] FIG. [Figure 16] FIG. [Figure 17] FIG. 17 is an enlarged view of the area surrounded by the dashed line in FIG. 16. [Figure 18] FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, an actuator 100 according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of the actuator 100. FIG. 2 is a perspective view of the actuator 100 with some members (a case member 1 and a fastening member 3) omitted from illustration. In FIG. 1, X1 represents one direction of the X axis constituting a three-dimensional orthogonal coordinate system, and X2 represents the other direction of the X axis. Furthermore, Y1 represents one direction of the Y axis constituting the three-dimensional orthogonal coordinate system, and Y2 represents the other direction of the Y axis. Similarly, Z1 represents one direction of the Z axis constituting the three-dimensional orthogonal coordinate system, and Z2 represents the other direction of the Z axis. In this embodiment, the X1 side of the actuator 100 corresponds to the front side (front side) of the actuator 100, and the X2 side of the actuator 100 corresponds to the rear side (rear side) of the actuator 100. Furthermore, the Y1 side of the actuator 100 corresponds to the left side of the actuator 100, and the Y2 side of the actuator 100 corresponds to the right side of the actuator 100. The Z1 side of the actuator 100 corresponds to the upper side of the actuator 100, and the Z2 side of the actuator 100 corresponds to the lower side of the actuator 100. The same applies to the other figures. The same applies to the members that constitute the actuator 100.

[0010] In the illustrated example, the actuator 100 is configured to be able to move the optical element OE as a driven member. Specifically, the actuator 100 is configured to translate the optical element OE along a central axis CX of the actuator 100 extending parallel to the Z-axis direction, and to rotate the optical element OE around a rotation axis AX in a plane perpendicular to the central axis CX. More specifically, the rotation axis AX includes a first rotation axis AX1 parallel to the X-axis and a second rotation axis AX2 parallel to the Y-axis. The central axis CX, the first rotation axis AX1, and the second rotation axis AX2 are perpendicular to each other and are orthogonal to each other at a center point CP of the optical element OE. The center point CP of the optical element OE may be a point on the upper surface (surface on the Z1 side) of the optical element OE, a point on the lower surface (surface on the Z2 side) of the optical element OE, or a point on a virtual plane located midway between the upper and lower surfaces of the optical element OE. In the illustrated example, the center point CP of the optical element OE is a point on the upper surface (the surface on the Z1 side) of the optical element OE. In this case, the actuator 100 can tilt the optical element OE without changing the position of the intersection between the central axis CX and the upper surface of the optical element OE.

[0011] Specifically, as shown in FIG. 1, the actuator 100 includes a case member 1 as a fixed member FB, movable members MB (first movable member MB1 to fourth movable member MB4), a support member 2 that movably supports the movable member MB relative to the case member 1, and a fastening member 3 for fastening the support member 2 to the case member 1.

[0012] The case member 1 is a member that constitutes the main body of the actuator 100. In the illustrated example, the case member 1 is formed of a magnetic material that constitutes a part of a magnetic circuit described later. However, the case member 1 may be formed of a non-magnetic material. In this case, a part of the magnetic circuit described later may be embedded in the case member 1 as a separate member from the case member 1, or may be fixed to the case member 1. Specifically, the case member 1 may be formed of a synthetic resin, may be formed of a metal, or may be formed of ceramics, rubber, glass, or the like. Alternatively, the case member 1 may be formed of two or more materials. For example, the case member 1 may include a part formed of a synthetic resin and a part formed of a metal. In this case, the case member 1 may be formed by insert molding.

[0013] The movable member MB is a member that is movable relative to the fixed member FB. In the illustrated example, the movable member MB is configured to be movable in a drive direction that is a direction parallel to the Z-axis direction by a drive unit DM (see Figs. 11, 12, and 15). Specifically, the movable member MB includes a first movable member MB1 to a fourth movable member MB4, and the drive unit DM includes a first drive unit DM1 to a fourth drive unit DM4. The first movable member MB1 to the fourth movable member MB4 are configured to be movable independently of one another by the first drive unit DM1 to the fourth drive unit DM4. More specifically, the first movable member MB1 is configured to be movable in the drive direction by the first drive unit DM1 (see FIG. 11), the second movable member MB2 is configured to be movable in the drive direction by the second drive unit DM2 (see FIG. 11), the third movable member MB3 is configured to be movable in the drive direction by the third drive unit DM3 (see FIG. 12), and the fourth movable member MB4 is configured to be movable in the drive direction by the fourth drive unit DM4 (see FIG. 15). The first movable member MB1 and the second movable member MB2 are arranged to be line-symmetrical about the second rotation axis AX2 in a top view, and the third movable member MB3 and the fourth movable member MB4 are arranged to be line-symmetrical about the second rotation axis AX2 in a top view. In addition, the first movable member MB1 and the fourth movable member MB4 are arranged so as to be linearly symmetrical about the first rotation axis AX1 when viewed from above, and the second movable member MB2 and the third movable member MB3 are arranged so as to be linearly symmetrical about the first rotation axis AX1 when viewed from above.

[0014] The support member 2 includes an upper support member 2U fixed to an upper end portion (an end portion on the Z1 side) of the case member 1, and a lower support member 2D fixed to a lower end portion (an end portion on the Z2 side) of the case member 1. In the illustrated example, the upper support member 2U and the lower support member 2D are identical parts formed of leaf springs and have the same shape and size.

[0015] Specifically, as shown in FIG. 3, the upper support member 2U includes an upper movable side portion 2U1 located on the innermost side, an upper fixed side portion 2U3 located on the outermost side, and an upper intermediate portion 2U2 located between the upper movable side portion 2U1 and the upper fixed side portion 2U3.

[0016] Fig. 3 is a top view of the upper support member 2U to which the optical element OE is attached. For clarity, in Fig. 3, a coarse dot pattern is applied to the upper movable portion 2U1 and the upper fixed portion 2U3, and a fine dot pattern is applied to the upper middle portion 2U2.

[0017] In the illustrated example, the optical element OE is adhesively fixed to the center of the upper movable part 2U1 of the upper support member 2U. However, the optical element OE may be fitted into a through hole formed in the center of the upper movable part 2U1. In the illustrated example, the optical element OE is configured to have a rectangular shape when viewed from above, but may be configured to have other shapes such as a circle, an ellipse, or a polygon when viewed from above. In the illustrated example, the optical element OE is configured to have a flat plate shape, but may be configured to have a three-dimensional shape such as a sphere, a truncated cone, a truncated pyramid, a cylinder, an elliptical cylinder, or a polygonal cylinder.

[0018] Specifically, the upper support member 2U includes an upper fixed side portion 2U3 connected to the upper end portion of the case member 1, an upper movable side portion 2U1 rotatably connected to the upper ends of each of the four movable members MB (first movable member MB1 to fourth movable member MB4), and an upper intermediate portion 2U2 elastically connecting the upper fixed side portion 2U3 and the upper movable side portion 2U1.

[0019] The fact that the upper movable portion 2U1 is rotatable with respect to the upper end portion of the first movable member MB1 means that, for example, a virtual plane including the upper surface of the upper movable portion 2U1 can be tilted in any direction at an inclination angle within a predetermined angle range with respect to the center line (line parallel to the Z axis) of the first movable member MB1 extending in the driving direction of the first movable member MB1. In the illustrated example, the predetermined angle range is from -20 degrees to +20 degrees.

[0020] The upper middle portion 2U2 includes a shaft portion 2S and an annular portion 2M. The shaft portion 2S includes a rear shaft portion 2SB, a front shaft portion 2SF, a left shaft portion 2SL, and a right shaft portion 2SR. The rear shaft portion 2SB and the front shaft portion 2SF, which are a pair of shaft portions, form a first rotating axis AX1, and the left shaft portion 2SL and the right shaft portion 2SR, which are another pair of shaft portions, form a second rotating axis AX2.

[0021] Specifically, the left shaft portion 2SL and the right shaft portion 2SR are configured to elastically connect the annular portion 2M and the upper movable portion 2U1, and the rear shaft portion 2SB and the front shaft portion 2SF are configured to elastically connect the annular portion 2M and the upper fixed portion 2U3. The annular portion 2M is configured not to elastically deform. This is to ensure that the shaft portion 2S can elastically deform when the movable member MB moves. However, the annular portion 2M may be configured to elastically deform slightly.

[0022] In the illustrated example, the upper fixed side portion 2U3 has a rear side portion 2U3B, a front side portion 2U3F, a left side portion 2U3L, and a right side portion 2U3R. The rear shaft portion 2SB is configured to elastically connect the annular portion 2M to the rear side portion 2U3B of the upper fixed side portion 2U3, and the front shaft portion 2SF is configured to elastically connect the annular portion 2M to the front side portion 2U3F of the upper fixed side portion 2U3. The left shaft portion 2SL is configured to elastically connect the annular portion 2M to the left side portion of the upper movable side portion 2U1, and the right shaft portion 2SR is configured to elastically connect the annular portion 2M to the right side portion of the upper movable side portion 2U1. However, the left shaft portion 2SL may be configured to elastically connect the annular portion 2M to the left side portion 2U3L of the upper fixed-side portion 2U3, and the right shaft portion 2SR may be configured to elastically connect the annular portion 2M to the right side portion 2U3R of the upper fixed-side portion 2U3. In this case, the rear shaft portion 2SB may be configured to elastically connect the annular portion 2M to the rear side portion of the upper movable-side portion 2U1, and the front shaft portion 2SF may be configured to elastically connect the annular portion 2M to the front side portion of the upper movable-side portion 2U1.

[0023] In the illustrated example, the four shafts 2S are arranged so that the first rotation axis AX1 and the second rotation axis AX2 are perpendicular to each other, but the first rotation axis AX1 and the second rotation axis AX2 may be arranged so that they intersect at an angle other than a right angle. Also, the four shafts 2S may be arranged so that the first rotation axis AX1 extends along one of the two diagonals of the rectangular optical element OE and the second rotation axis AX2 extends along the other of the two diagonals.

[0024] Also, the upper movable side portion 2U1 and the upper fixed side portion 2U3 may be elastically connected by four shaft portions 2S (the rear shaft portion 2SB, the front shaft portion 2SF, the left shaft portion 2SL, and the right shaft portion 2SR). That is, the upper intermediate portion 2U2 may be configured by the rear shaft portion 2SB, the front shaft portion 2SF, the left shaft portion 2SL, and the right shaft portion 2SR, and the annular portion 2M may be omitted. In this case, the upper movable side portion 2U1 and the upper fixed side portion 2U3 may be elastically connected by two or three shaft portions, or may be elastically connected by five or more shaft portions.

[0025] In the illustrated example, each of the four shafts 2S is configured to have a meandering shape. This is to suppress damage to the rear shaft 2SB and the front shaft 2SF when the upper movable portion 2U1 rotates around the first rotation axis AX1 and torsional stress acts on the rear shaft 2SB and the front shaft 2SF. This is also to suppress damage to the left shaft 2SL and the right shaft 2SR when the upper movable portion 2U1 rotates around the second rotation axis AX2 and torsional stress acts on the left shaft 2SL and the right shaft 2SR. However, the shaft 2S may have a shape other than the meandering shape, such as a linear shape.

[0026] The lower support member 2D is configured similarly to the upper support member 2U, except that the optical element OE is attached to the lower support member 2D. That is, as shown in FIG. 4, the lower support member 2D includes a lower fixed part 2D3 connected to the lower end of the case member 1, a lower movable part 2D1 rotatably connected to the lower end of each of the four movable members MB (first movable member MB1 to fourth movable member MB4), and a lower intermediate part 2D2 elastically connecting the lower fixed part 2D3 and the lower movable part 2D1. The lower movable part 2D1 is configured to be able to translate along the central axis CX and to rotate around a rotation axis BX in a plane perpendicular to the central axis CX. Specifically, the rotation axis BX includes a first rotation axis BX1 parallel to the X-axis and a second rotation axis BX2 parallel to the Y-axis, as shown in FIG. 2. The central axis CX, the first rotation axis BX1, and the second rotation axis BX2 are perpendicular to each other and are orthogonal to each other on the central axis CX. Further, the first rotation axis AX1 and the first rotation axis BX1 are parallel to each other, and the second rotation axis AX2 and the second rotation axis BX2 are parallel to each other.

[0027] The fastening members 3 are configured to fasten the support member 2 to the case member 1. In the illustrated example, the fastening members 3 are bolts, and include six upper fastening members 3U for fastening the upper support member 2U to the upper end of the case member 1, and six lower fastening members 3D for fastening the lower support member 2D to the lower end of the case member 1. In FIG. 1, the rear three of the six lower fastening members 3D are hidden behind the case member 1 and are not visible. As shown in FIG. 3, the upper fixed portion 2U3 of the upper support member 2U has a through hole 2H through which the upper fastening member 3U is inserted. The same is true for the lower fixed portion 2D3.

[0028] Next, the movable member MB will be described in detail with reference to Fig. 4. Fig. 4 is an exploded perspective view of the movable member MB and the support member 2.

[0029] As shown in FIG. 4, the movable member MB includes a fixed member 4, an elastic member 5, and a coil assembly CA.

[0030] The fixing member 4 is a member for fixing the elastic member 5 to the support member 2. The elastic member 5 is an example of a coupling member for coupling an end of the movable member MB (coil assembly CA) to the support member 2 so that the end of the movable member MB (coil assembly CA) in the driving direction is rotatable relative to the support member 2. The coupling member provides a function of converting the linear motion of the movable member MB (coil assembly CA) into the rotational motion of the driven member (optical element OE).

[0031] In the illustrated example, the fixing member 4 is made of synthetic resin, and the elastic member 5 is made of rubber. The fixing member 4 includes an upper fixing member 4U and a lower fixing member 4D, and the elastic member 5 includes an upper elastic member 5U and a lower elastic member 5D. The fixing member 4 may be configured to have elasticity. For example, the fixing member 4 may be made of a thermosetting elastomer or a thermoplastic elastomer.

[0032] Specifically, the upper elastic member 5U is configured so that the upper end of the movable member MB (coil assembly CA) can be connected to the upper movable part 2U1 of the upper support member 2U so that the upper end of the movable member MB (coil assembly CA) can rotate relative to the upper movable part 2U1 of the upper support member 2U. Similarly, the lower elastic member 5D is configured so that the lower end of the movable member MB (coil assembly CA) can be connected to the lower movable part 2D1 of the lower support member 2D so that the lower end of the movable member MB (coil assembly CA) can rotate relative to the lower movable part 2D1 of the lower support member 2D.

[0033] The upper fixing member 4U is configured so as to be able to fix the upper elastic member 5U to the upper movable part 2U1 of the upper support member 2U, and the lower fixing member 4D is configured so as to be able to fix the lower elastic member 5D to the lower movable part 2D1 of the lower support member 2D.

[0034] More specifically, the upper fixing member 4U includes a first upper fixing member 4U1 to a fourth upper fixing member 4U4, and the lower fixing member 4D includes a first lower fixing member 4D1 to a fourth lower fixing member 4D4. The upper elastic member 5U includes a first upper elastic member 5U1 to a fourth upper elastic member 5U4, and the lower elastic member 5D includes a first lower elastic member 5D1 to a fourth lower elastic member 5D4. The coil assembly CA includes a first coil assembly CA1 to a fourth coil assembly CA4.

[0035] The first movable member MB1 is composed of the first upper fixed member 4U1, the first upper elastic member 5U1, the first coil assembly CA1, the first lower fixed member 4D1, and the first lower elastic member 5D1. The second movable member MB2 is composed of the second upper fixed member 4U2, the second upper elastic member 5U2, the second coil assembly CA2, the second lower fixed member 4D2, and the second lower elastic member 5D2. The third movable member MB3 is composed of the third upper fixed member 4U3, the third upper elastic member 5U3, the third coil assembly CA3, the third lower fixed member 4D3, and the third lower elastic member 5D3. The fourth movable member MB4 is composed of the fourth upper fixed member 4U4, the fourth upper elastic member 5U4, the fourth coil assembly CA4, the fourth lower fixed member 4D4, and the fourth lower elastic member 5D4.

[0036] As for the first movable member MB1, the first upper elastic member 5U1 has a cylindrical central annular portion MR (see Figs. 13 and 14) fitted into a through hole 2T (first through hole 2T1, see Fig. 3) formed in the upper movable portion 2U1 of the upper support member 2U. The first upper fixing member 4U1 is adhesively fixed to the upper support member 2U and the first upper elastic member 5U1 by an adhesive agent in a state in which the upper movable portion 2U1 of the upper support member 2U is sandwiched between the first upper fixing member 4U1 and the first upper elastic member 5U1. Similarly, the first lower elastic member 5D1 has a cylindrical central annular portion MR (not shown) fitted into a through hole 2T (first through hole 2T1, not shown) formed in the lower movable portion 2D1 of the lower support member 2D. The first lower fixing member 4D1 is adhesively fixed to the lower support member 2D and the first lower elastic member 5D1 with an adhesive, with the lower movable portion 2D1 of the lower support member 2D being sandwiched between the first lower fixing member 4D1 and the first lower elastic member 5D1. The same is true for the second movable member MB2 to the fourth movable member MB4.

[0037] In the illustrated example, the movable member MB is configured such that the upper fixed member 4U is disposed above the upper support member 2U and the upper elastic member 5U is disposed below the upper support member 2U, but the upper elastic member 5U may be disposed upside down above the upper support member 2U and the upper fixed member 4U may be disposed upside down below the upper support member 2U. In the illustrated example, the movable member MB is configured such that the lower fixed member 4D is disposed above the lower support member 2D and the lower elastic member 5D is disposed below the lower support member 2D, but the lower elastic member 5D may be disposed upside down above the lower support member 2D and the lower fixed member 4D may be disposed upside down below the lower support member 2D.

[0038] Next, the coil assembly CA will be described with reference to Fig. 5. Fig. 5 is an exploded perspective view of the coil assembly CA.

[0039] As shown in FIG. 5, the coil assembly CA includes a coil 6, a coil holding member 7, a substrate 8, a lower plate member 9, and a lower cylindrical member 10.

[0040] The coil 6 is a component of the drive device DM. In the illustrated example, the coil 6 is a wound coil formed by winding a conductive wire whose surface is covered with an insulating material, and is fixed to a coil holding member 7. For clarity, FIG. 5 omits the detailed winding state of the conductive wire. This is the same in other figures that illustrate the coil 6.

[0041] The coil holding member 7 is a member for holding the coil 6. In the illustrated example, the coil holding member 7 is made of synthetic resin.

[0042] The substrate 8 is a member for realizing the connection between the coil 6 and a control unit (not shown) arranged outside the movable member MB. In the illustrated example, the substrate 8 is an insulating substrate fixed to the coil holding member 7. Both ends of the conductive wire constituting the coil 6 are connected to terminals provided on the substrate 8.

[0043] The control unit is a device including an electronic circuit and a non-volatile storage device, and is configured to be able to control the direction and magnitude of the current flowing through the coil 6. The control unit may be configured to control the direction and magnitude of the current flowing through the coil 6 in response to a control command from an external device such as a computer, or may be configured to control the direction and magnitude of the current flowing through the coil 6 without receiving a control command from an external device. In the illustrated example, the control unit is installed outside the case member 1, but it may be installed inside the case member 1.

[0044] The lower plate member 9 is a member that is attached to the lower end of the coil holding member 7. In the illustrated example, the lower plate member 9 is a disk-shaped member that extends along a plane parallel to the XY plane, and is made of synthetic resin.

[0045] The lower cylinder member 10 is a member that is attached to the lower side of the lower plate member 9. In the illustrated example, the lower cylinder member 10 is a two-stage cylindrical member that extends in the drive direction (Z-axis direction) and is made of synthetic resin.

[0046] In the illustrated example, the coil 6 includes a first coil 6A to a fourth coil 6D, the coil holding member 7 includes a first coil holding member 7A to a fourth coil holding member 7D, and the substrate 8 includes a first substrate 8A to a fourth substrate 8D. Furthermore, the lower plate member 9 includes a first lower plate member 9A to a fourth lower plate member 9D, and the lower cylindrical member 10 includes a first lower cylindrical member 10A to a fourth lower cylindrical member 10D.

[0047] The first coil assembly CA1 is composed of a first coil 6A, a first coil holding member 7A, a first substrate 8A, a first lower plate member 9A, and a first lower cylindrical member 10A, the second coil assembly CA2 is composed of a second coil 6B, a second coil holding member 7B, a second substrate 8B, a second lower plate member 9B, and a second lower cylindrical member 10B, the third coil assembly CA3 is composed of a third coil 6C, a third coil holding member 7C, a third substrate 8C, a third lower plate member 9C, and a third lower cylindrical member 10C, and the fourth coil assembly CA4 is composed of a fourth coil 6D, a fourth coil holding member 7D, a fourth substrate 8D, a fourth lower plate member 9D, and a fourth lower cylindrical member 10D.

[0048] Next, coil holding member 7 will be described with reference to Fig. 6. Fig. 6 is a perspective view of coil holding member 7. Specifically, Fig. 6 is a perspective view of first coil holding member 7A. The following description with reference to Fig. 6 relates to first coil holding member 7A, but also applies similarly to each of second coil holding member 7B to fourth coil holding member 7D.

[0049] As shown in FIG. 6, the first coil holding member 7A includes a first upper cylinder portion 7AT, a first upper plate portion 7AU, a first central cylinder portion 7AS, a first substrate holding portion 7AF, and a first leg portion 7AL.

[0050] The first upper cylinder portion 7AT is a cylindrical portion extending in the driving direction (Z-axis direction) and corresponds to the first lower cylinder member 10A.

[0051] The first upper plate portion 7AU is a disk-shaped portion extending along a plane parallel to the XY plane, and corresponds to the first lower plate member 9A. In the illustrated example, the first upper plate portion 7AU constitutes an upper cover of the first central cylinder portion 7AS.

[0052] The first central cylinder portion 7AS is a portion to which the first coil 6A is fixed. In the illustrated example, the first central cylinder portion 7AS has a cylindrical shape. The first central cylinder portion 7AS is configured to define a space therein for accommodating the first magnetic member 11A and the first magnet 12A (see FIG. 7) that constitute the first driving device DM1.

[0053] The first substrate holding portion 7AF is a portion to which the first substrate 8A is attached. In the illustrated example, the first substrate holding portion 7AF is configured to protrude to the left (Y1 side) from the lower end portion of the first central cylinder portion 7AS.

[0054] The first leg 7AL is a portion that connects the first central cylinder portion 7AS of the first coil holding member 7A and the first lower plate member 9A. In the illustrated example, the first leg 7AL has three extending portions (first extending portion 7AL1 to third extending portion 7AL3) that extend in the driving direction (Z-axis direction). The first lower plate member 9A is configured so that the lower ends of these three extending portions (first extending portion 7AL1 to third extending portion 7AL3) can be connected to each other.

[0055] Next, the fixed member FB will be described with reference to Figs. 7 to 9. Fig. 7 is an exploded perspective view of the fixed member FB. The upper view of Fig. 8 is a top view of the fixed member FB, and the lower view of Fig. 8 is a bottom view of the fixed member FB. Fig. 9 is a cross-sectional view of the fixed member FB. Specifically, Fig. 9 is a view of the cross section of the actuator 100 in a plane parallel to the XZ plane including the cutting line (dashed line IX-IX) shown in Fig. 8, as viewed from the Y2 side. In Figs. 8 and 9, a dot pattern is applied to the case member 1 for clarity. Also, in the upper view of Fig. 8, a cross pattern is applied to the magnetic member 11 for clarity.

[0056] The fixing member FB includes a case member 1, a magnetic member 11, and a magnet 12, as shown in FIG.

[0057] The case member 1 is a magnetic body that constitutes the main body of the actuator 100. In the illustrated example, the case member 1 has a rectangular column-shaped upper recess 1P (see the upper diagram in FIG. 8) and a rectangular column-shaped lower recess 1Q (see the lower diagram in FIG. 8).

[0058] In the upper recess 1P, as shown in the upper diagram of FIG. 8, a cylindrical recess 1V for accommodating the upper part of the movable member MB, and a prismatic recess 1R for accommodating the substrate 8 are formed.

[0059] The cylindrical recess 1V has a circular bottom 1K as shown in the lower diagram of Fig. 8. Three through holes 1H (see the upper diagram of Fig. 8) and three bridge portions 1J (see the lower diagram of Fig. 8) are formed around the bottom 1K.

[0060] Specifically, the cylindrical recess 1V includes a first cylindrical recess 1VA for accommodating an upper portion of the first movable member MB1, a second cylindrical recess 1VB for accommodating an upper portion of the second movable member MB2, a third cylindrical recess 1VC for accommodating an upper portion of the third movable member MB3, and a fourth cylindrical recess 1VD for accommodating an upper portion of the fourth movable member MB4.

[0061] The first cylindrical recess 1VA is formed with a first bottom 1KA, and around the first bottom 1KA, three first through holes 1HA (the first hole 1HA1 to the third hole 1HA3) and three first bridge portions 1JA (the first crosspiece 1JA1 to the third crosspiece 1JA3) are formed. The same is true for the second cylindrical recess 1VB to the fourth cylindrical recess 1VD.

[0062] In addition, the prismatic recess 1R includes a first prismatic recess 1RA for accommodating the first substrate 8A, a second prismatic recess 1RB for accommodating the second substrate 8B, a third prismatic recess 1RC for accommodating the third substrate 8C, and a fourth prismatic recess 1RD for accommodating the fourth substrate 8D.

[0063] As shown in the lower diagram of FIG. 8, the lower recess 1Q is formed with a prismatic recess 1W for accommodating the lower part of the movable member MB.

[0064] The magnetic member 11 is a component of the driving device DM. In the illustrated example, the magnetic member 11 is a cylindrical magnetic body (soft iron) fixed to the upper end of the magnet 12, and functions as a yoke that increases the density of the magnetic flux generated by the magnet 12.

[0065] The magnet 12 is a component of the drive device DM. In the illustrated example, the magnet 12 is a permanent magnet that is bipolarly magnetized in the vertical direction (Z-axis direction) and is fixed to the upper surface of the bottom 1K of the cylindrical recess 1V of the case member 1. In FIG. 9, for clarity, a coarse cross pattern is applied to the S-pole portion of the magnet 12, and a fine dot pattern is applied to the N-pole portion of the magnet 12 and the magnetic member 11 fixed to the N-pole portion. Also, the dotted line in FIG. 9 represents a part of the magnetic flux generated by the magnet 12. In other words, the dotted line in FIG. 9 represents that a magnetic circuit is formed by the case member 1, the magnetic member 11, and the magnet 12.

[0066] Specifically, the magnetic member 11 includes a first magnetic member 11A to a fourth magnetic member 11D, and the magnet 12 includes a first magnet 12A to a fourth magnet 12D.

[0067] The first cylindrical recess 1VA accommodates the first magnetic member 11A and the first magnet 12A, the second cylindrical recess 1VB accommodates the second magnetic member 11B and the second magnet 12B, the third cylindrical recess 1VC accommodates the third magnetic member 11C and the third magnet 12C, and the fourth cylindrical recess 1VD accommodates the fourth magnetic member 11D and the fourth magnet 12D.

[0068] The first coil 6A, the first magnetic member 11A, and the first magnet 12A housed in the first cylindrical recess 1VA constitute a first driving device DM1, the second coil 6B, the second magnetic member 11B, and the second magnet 12B housed in the second cylindrical recess 1VB constitute a second driving device DM2, the third coil 6C, the third magnetic member 11C, and the third magnet 12C housed in the third cylindrical recess 1VC constitute a third driving device DM3, and the fourth coil 6D, the fourth magnetic member 11D, and the fourth magnet 12D housed in the fourth cylindrical recess 1VD constitute a fourth driving device DM4.

[0069] Moreover, the three first through holes 1HA (first hole 1HA1 to third hole 1HA3) formed around the first bottom 1KA of the first cylindrical recess 1VA are configured to correspond to the three extension parts (first extension part 7AL1 to third extension part 7AL3) constituting the first leg part 7AL (see FIG. 6) of the first coil holding member 7A. Specifically, the first hole 1HA1 is arranged to receive the first extension part 7AL1, the second hole 1HA2 is arranged to receive the second extension part 7AL2, and the third hole 1HA3 is arranged to receive the third extension part 7AL3. The same is true for the second coil holding member 7B to the fourth coil holding member 7D.

[0070] Next, the driving device DM will be described with reference to Figs. 10 to 12. Fig. 10 is a top view of the actuator 100. Figs. 11 and 12 are cross-sectional views of the actuator 100. Specifically, Fig. 11 is a cross-sectional view of the actuator 100 taken along a plane parallel to the XZ plane including a cutting line (dashed line XI-XI) shown in Fig. 10, as viewed from the Y2 side. Fig. 12 is a cross-sectional view of the actuator 100 taken along a plane parallel to the YZ plane including a cutting line (dashed line XII-XII) shown in Fig. 10, as viewed from the X1 side. Note that in Figs. 10 to 12, a dot pattern is applied to the case member 1 for clarity.

[0071] The driving device DM is composed of a coil 6, a magnetic member 11, and a magnet 12. Specifically, the driving device DM is configured to reciprocate the movable member MB in the driving direction (Z-axis direction) by utilizing the Lorentz force acting on a current (charged particles) flowing through the coil 6 in a magnetic field generated by the magnet 12. The magnet 12 is configured such that its magnetic flux density is increased by the magnetic member 11 functioning as a yoke, and the magnetic flux perpendicularly crosses the conductive wire that constitutes the coil 6.

[0072] Specifically, as shown in Fig. 11, the first driving device DM1 is composed of a first coil 6A held by a first coil holding member 7A, a first magnet 12A fixed to the upper surface of the first bottom portion 1KA of the case member 1, and a first magnetic member 11A fixed to the upper surface of the first magnet 12A. The first driving device DM1 is configured to reciprocate the first movable member MB1 along the driving direction (Z-axis direction) as shown by the double-headed arrow AR1. The first movable member MB1 has an upper end rotatably connected to the upper movable part 2U1 of the upper support member 2U via the first upper fixed member 4U1 and the first upper elastic member 5U1, and a lower end rotatably connected to the lower movable part 2D1 of the lower support member 2D via the first lower fixed member 4D1 and the first lower elastic member 5D1.

[0073] 11, the second driving device DM2 is composed of a second coil 6B held by a second coil holding member 7B, a second magnet 12B fixed to the upper surface of the second bottom portion 1KB of the case member 1, and a second magnetic member 11B fixed to the upper surface of the second magnet 12B. The second driving device DM2 is configured to reciprocate the second movable member MB2 along the driving direction (Z-axis direction) as shown by the double-headed arrow AR2. The second movable member MB2 has an upper end rotatably connected to the upper movable part 2U1 of the upper support member 2U via the second upper fixed member 4U2 and the second upper elastic member 5U2, and a lower end rotatably connected to the lower movable part 2D1 of the lower support member 2D via the second lower fixed member 4D2 and the second lower elastic member 5D2.

[0074] 12, the third driving device DM3 is composed of a third coil 6C held by a third coil holding member 7C, a third magnet 12C fixed to the upper surface of the third bottom portion 1KC of the case member 1, and a third magnetic member 11C fixed to the upper surface of the third magnet 12C. The third driving device DM3 is configured to reciprocate the third movable member MB3 along the driving direction (Z-axis direction) as shown by the double-headed arrow AR3. The third movable member MB3 has an upper end rotatably connected to the upper movable part 2U1 of the upper support member 2U via the third upper fixed member 4U3 and the third upper elastic member 5U3, and a lower end rotatably connected to the lower movable part 2D1 of the lower support member 2D via the third lower fixed member 4D3 and the third lower elastic member 5D3.

[0075] Similarly, as shown in Fig. 15, the fourth driving device DM4 is composed of a fourth coil 6D held by a fourth coil holding member 7D, a fourth magnet 12D fixed to the upper surface of the fourth bottom portion 1KD of the case member 1, and a fourth magnetic member 11D fixed to the upper surface of the fourth magnet 12D. The fourth driving device DM4 is configured to reciprocate the fourth movable member MB4 along the driving direction (Z-axis direction). The fourth movable member MB4 has an upper end rotatably connected to the upper movable part 2U1 of the upper support member 2U via a fourth upper fixed member 4U4 and a fourth upper elastic member 5U4, and a lower end rotatably connected to the lower movable part 2D1 of the lower support member 2D via a fourth lower fixed member 4D4 and a fourth lower elastic member 5D4.

[0076] The control unit can move each of the first movable member MB1 to the fourth movable member MB4 up and down separately along the drive direction (Z-axis direction) by separately operating each of the first drive device DM1 to the fourth drive device DM4. Therefore, the control unit can realize the rotation about the first rotation axis AX1, the rotation about the second rotation axis AX2, and the translation along the central axis CX of the upper movable side part 2U1 of the upper support member 2U to which the upper ends of each of the first movable member MB1 to the fourth movable member MB4 are connected. In addition, the control unit can realize the rotation about the first rotation axis BX1, the rotation about the second rotation axis BX2, and the translation along the central axis CX of the lower movable side part 2D1 of the lower support member 2D to which the lower ends of each of the first movable member MB1 to the fourth movable member MB4 are connected.

[0077] Next, the elastic member 5 will be described in detail with reference to Fig. 13 and Fig. 14. Fig. 13 is a perspective view of the first upper elastic member 5U1, and Fig. 14 is a top view of the first upper elastic member 5U1. The following description with reference to Fig. 13 and Fig. 14 relates to the first upper elastic member 5U1, but is also applicable to each of the second upper elastic member 5U2 to the fourth upper elastic member 5U4 and the first lower elastic member 5D1 to the fourth lower elastic member 5D4, which have the same size and shape.

[0078] The first upper elastic member 5U1 is a member (rubber bushing) made of an elastically deformable material such as synthetic rubber. In the illustrated example, the first upper elastic member 5U1 includes a connecting portion SP, an inner annular portion IR, a central annular portion MR, and an outer annular portion OR.

[0079] The connecting portion SP is a portion that connects the inner annular portion IR and the central annular portion MR. In the illustrated example, the connecting portion SP includes six spoke portions (first spoke portion SP1 to sixth spoke portion SP6) that extend radially from the outer peripheral surface of the inner annular portion IR in a top view and are connected to the inner peripheral surface of the central annular portion MR. However, the connecting portion SP may be composed of five or less spoke portions, or seven or more spoke portions. In the illustrated example, the connecting portion SP is composed of six straight-lined spoke portions, but may be composed of multiple spoke portions that extend in a spiral shape, or multiple spoke portions having other shapes. Alternatively, the connecting portion may be composed of an annular thin film portion that spreads in the entire circumferential direction in a top view from the outer peripheral surface of the inner annular portion IR and is connected to the inner peripheral surface of the central annular portion MR. In this case, the thin film portion may be flat, or may be dome-shaped with a convex shape on the upper side, or may be dome-shaped with a convex shape on the lower side.

[0080] The inner annular portion IR is a portion that is fixed to an upper end portion of a first upper cylindrical portion 7AT (see FIG. 6) of the first coil holding member 7A. In the illustrated example, the inner annular portion IR is fastened to the first upper cylindrical portion 7AT by a bolt BT and a nut NT (see FIG. 17 described later).

[0081] The central annular portion MR is a portion fixed to the inner circumferential surface of the first upper fixing member 4U1. In the illustrated example, as shown in Fig. 17 described later, the central annular portion MR is formed so as to protrude upward from the upper surface of the outer annular portion OR and is formed so as to protrude upward from the upper surface of the upper movable portion 2U1 when the upper surface of the outer annular portion OR is in contact with the lower surface of the upper movable portion 2U1 of the upper support member 2U.

[0082] The outer annular portion OR is a portion fixed to the lower surface of the upper movable portion 2U1 of the upper support member 2U. In the example shown in Fig. 17, the upper surface and outer peripheral surface of the central annular portion MR and the ceiling surface and inner peripheral surface of the first upper fixing member 4U1 are bonded and fixed with an adhesive in a state in which the upper movable portion 2U1 is sandwiched between the lower surface of the first upper fixing member 4U1 and the upper surface of the outer annular portion OR.

[0083] Next, the state of each member when the optical element OE is moved will be described with reference to Fig. 15 to Fig. 18. Specifically, Fig. 15 to Fig. 18 show the state of each member when the first movable member MB1 and the fourth movable member MB4 are moved downward by the same distance, and the second movable member MB2 and the third movable member MB3 are moved upward by the same distance.

[0084] More specifically, Fig. 15 is a right side view of the movable member MB and the support member 2. Fig. 16 is a cross-sectional view of the actuator 100 seen from the right side (Y2 side), and the position of the cutting line corresponds to the position of the cutting line in Fig. 11. Fig. 17 is an enlarged view of an area R1 surrounded by a dashed line in Fig. 16. Fig. 18 is a perspective view of an upper support member 2U.

[0085] The control unit can move the optical element OE attached to the upper support member 2U by driving the driving device DM. In the example shown in Fig. 15 and Fig. 16, the control unit drives the first driving device DM1 and the fourth driving device DM4 to move the first movable member MB1 and the fourth movable member MB4 downward by a distance HT1 (see Fig. 16), and drives the second driving device DM2 and the third driving device DM3 to move the second movable member MB2 and the third movable member MB3 upward by a distance HT2 (see Fig. 16). As a result, as shown in Fig. 15, the control unit rotates the optical element OE around the second rotation axis AX2 in the counterclockwise direction by an inclination angle θ1. In the illustrated example, the distance HT1 and the distance HT2 are the same size. However, the distance HT1 and the distance HT2 may be different sizes from each other.

[0086] A first plane PL1 represented by a dashed line in Fig. 15 is an imaginary plane that is parallel to the upper movable part 2U1 of the upper support member 2U and includes the second rotation axis AX2. A second plane PL2 represented by a dashed line in Fig. 15 is an imaginary plane that is parallel to the lower movable part 2D1 of the lower support member 2D and includes the second rotation axis BX2.

[0087] 15, the lower movable portion 2D1 of the lower support member 2D is configured to rotate in the same manner as the upper movable portion 2U1 of the upper support member 2U. Specifically, the lower movable portion 2D1 of the lower support member 2D and the upper movable portion 2U1 of the upper support member 2U are configured to move in conjunction with each other so that the angle (tilt angle θ1) formed between the second plane PL2 and the XY plane is equal to the angle (tilt angle θ2) formed between the first plane PL1 and the XY plane.

[0088] As shown in FIG. 16, the driving device DM is configured to move the movable member MB up and down while maintaining the distance between the coil 6 and the inner circumferential surface of a cylindrical recess 1V formed in the case member 1.

[0089] In the illustrated example, the control unit controls the second driving device DM2 so that a current of a predetermined magnitude is supplied to the second coil 6B via a lead wire (not shown), and the second movable member MB2 is raised by a distance HT2. Similarly, the control unit controls the third driving device DM3 so that a current of a predetermined magnitude is supplied to the third coil 6C via a lead wire (not shown), and the third movable member MB3 is raised by a distance HT2. On the other hand, the control unit controls the first driving device DM1 so that a current of a predetermined magnitude is supplied to the first coil 6A via a lead wire (not shown), and the first movable member MB1 is lowered by a distance HT1. Similarly, the control unit controls the fourth driving device DM4 so that a current of a predetermined magnitude is supplied to the fourth coil 6D via a lead wire (not shown), and the fourth movable member MB4 is lowered by a distance HT1.

[0090] In the illustrated example, the first movable member MB1 and the case member 1 are configured so that the distance GP1 (see Figure 16) in the X-axis direction between the inner surface of the first cylindrical recess 1VA formed in the case member 1 and the first coil 6A falls within a predetermined range whether the first movable member MB1 is in the initial state or in the driven state.

[0091] The initial state of the first movable member MB1 means the state of the first movable member MB1 when no current is supplied to the first coil 6A. In the initial state, the first movable member MB1 is supported by the upper support member 2U and the lower support member 2D so that the first movable member MB1 and the case member 1 are not in contact with each other. Specifically, the first movable member MB1 is supported by the upper support member 2U and the lower support member 2D so that the distance (height) in the Z-axis direction between the lower end of the first central cylinder portion 7AS of the first coil holding member 7A and the upper surface of the first bottom portion 1KA of the case member 1 is height ST (see FIG. 11).

[0092] The driving state of the first movable member MB1 refers to the state of the first movable member MB1 when a current is supplied to the first coil 6A. In the driving state, the first movable member MB1 is driven so that the distance (height) between the lower end of the first central cylinder portion 7AS and the upper surface of the first bottom portion 1KA is different from the height ST.

[0093] When the supply of current to the first coil 6A of the first movable member MB1 in the driven state is stopped, the first movable member MB1 returns to its initial state. Specifically, the first movable member MB1 is returned to its initial position by the restoring force of the elastically deformed support member 2 (leaf spring).

[0094] Similarly, the second movable member MB2 and the case member 1 are configured such that the distance GP2 (see FIG. 16) in the X-axis direction between the inner circumferential surface of the second cylindrical recess 1VB formed in the case member 1 and the second coil 6B falls within a predetermined range, whether the second movable member MB2 is in the initial state or in the driven state. The third movable member MB3 and the case member 1 are configured such that the distance GP3 (not shown) in the X-axis direction between the inner circumferential surface of the third cylindrical recess 1VC formed in the case member 1 and the third coil 6C falls within a predetermined range, whether the third movable member MB3 is in the initial state or in the driven state. The fourth movable member MB4 and the case member 1 are configured such that the distance GP4 (not shown) in the X-axis direction between the inner circumferential surface of the fourth cylindrical recess 1VD formed in the case member 1 and the fourth coil 6D falls within a predetermined range, whether the fourth movable member MB4 is in the initial state or in the driven state.

[0095] In the illustrated example, the actuator 100 is configured so that the distances GP1 to GP4 are each within the same range. However, the actuator 100 may be configured so that the distances GP1 to GP4 are each within a range of different sizes. Typically, the distance GP1 is a minimum value when the amount of movement of the first movable member MB1 is maximum, and is a maximum value when the first movable member MB1 is in an initial state. The same is true for the distances GP2 to GP4. The actuator 100 is also configured so that the maximum values ​​of the distances GP1 to GP4 are as small as possible as long as the movable member MB and the case member 1 do not come into contact with each other. This is to maximize the density of the magnetic flux passing through the coil 6 by minimizing the distance between the case member 1 and the magnetic member 11 as a magnetic body. That is, this is to efficiently utilize the driving force of the driving device DM. This is also to reduce the size of the actuator 100.

[0096] When the upper movable portion 2U1 of the upper support member 2U is tilted with respect to the XY plane as shown in Figures 15 and 16, the connecting portion SP of the first upper elastic member 5U1 is elastically deformed as shown in Figure 17. Figure 17 shows the state in which the first spoke portion SP1 and the fourth spoke portion SP4 of the six connecting portions SP are elastically deformed. However, in reality, the second spoke portion SP2, the third spoke portion SP3, the fifth spoke portion SP5, and the sixth spoke portion SP6, which are not visible in Figure 17, are also elastically deformed in the same way. The same is true for the connecting portions SP of each of the second upper elastic member 5U2 to the fourth upper elastic member 5U4.

[0097] Furthermore, when the upper movable portion 2U1 of the upper support member 2U is tilted with respect to the XY plane, the lower movable portion 2D1 of the lower support member 2D is also tilted with respect to the XY plane, and therefore the connecting portion SP of the first lower elastic member 5D1 is elastically deformed in the same manner as the connecting portion SP of the first upper elastic member 5U1 shown in Fig. 17. The same applies to the connecting portions SP of each of the second lower elastic member 5D2 to the fourth lower elastic member 5D4.

[0098] With this configuration, each of the first movable member MB1 to the fourth movable member MB4 can move parallel to the driving direction (Z-axis direction) without tilting relative to the center line extending along the driving direction, even if the upper movable portion 2U1 of the upper support member 2U is tilted relative to the XY plane.

[0099] In the example shown in Figs. 15 to 18, the control unit rotates the optical element OE counterclockwise around the second rotation axis AX2 in the right side view by simultaneously lowering the first movable member MB1 and the fourth movable member MB4 and simultaneously raising the second movable member MB2 and the third movable member MB3. However, the control unit may tilt the optical element OE in any direction by raising or lowering at least one of the first movable member MB1 to the fourth movable member MB4. That is, the control unit can orient the normal vector NL (see Figs. 15 and 18) perpendicular to the surface of the optical element OE in any direction. The control unit may also move the optical element OE upward in parallel by raising all of the first movable member MB1 to the fourth movable member MB4 by the same distance in the Z-axis direction, or may move the optical element OE downward in parallel by lowering all of the first movable member MB1 to the fourth movable member MB4 by the same distance in the Z-axis direction.

[0100] For example, the control unit can rotate the optical element OE in a clockwise direction when viewed from the right side around the second rotation axis AX2 by simultaneously raising the first movable member MB1 and the fourth movable member MB4 and simultaneously lowering the second movable member MB2 and the third movable member MB3.

[0101] In addition, the control unit can rotate the optical element OE in a counterclockwise direction when viewed from the front around the first rotation axis AX1 by simultaneously lowering the first movable member MB1 and the second movable member MB2 and simultaneously raising the third movable member MB3 and the fourth movable member MB4.

[0102] In addition, the control unit can rotate the optical element OE in a clockwise direction when viewed from the front around the first rotation axis AX1 by simultaneously raising the third movable member MB3 and the fourth movable member MB4 and simultaneously lowering the first movable member MB1 and the second movable member MB2.

[0103] Furthermore, the control unit can rotate the optical element OE around a third rotation axis AX3 (see FIG. 3) by raising the first movable member MB1 and lowering the third movable member MB3, or by lowering the first movable member MB1 and raising the third movable member MB3, without moving the second movable member MB2 and the fourth movable member MB4. The third rotation axis AX3 is a rotation axis that extends along one of the two diagonals of the rectangular optical element OE.

[0104] Furthermore, the control unit can rotate the optical element OE around a fourth rotation axis AX4 (see FIG. 3) by raising the second movable member MB2 and lowering the fourth movable member MB4, or by lowering the second movable member MB2 and raising the fourth movable member MB4, without moving the first movable member MB1 and the third movable member MB3. The fourth rotation axis AX4 is a rotation axis that extends along the other of the two diagonals of the rectangular optical element OE.

[0105] In addition, the control unit can rotate the optical element OE counterclockwise when viewed from the right side around a rotation axis parallel to the Y axis by simultaneously raising the second movable member MB2 and the third movable member MB3 without moving the first movable member MB1 and the fourth movable member MB4.

[0106] In addition, the control unit can rotate the optical element OE clockwise when viewed from the right side around a rotation axis parallel to the Y axis by simultaneously lowering the second movable member MB2 and the third movable member MB3 without moving the first movable member MB1 and the fourth movable member MB4.

[0107] In addition, the control unit can rotate the optical element OE clockwise when viewed from the right side around a rotation axis parallel to the Y axis by simultaneously raising the first movable member MB1 and the fourth movable member MB4 without moving the second movable member MB2 and the third movable member MB3.

[0108] In addition, the control unit can rotate the optical element OE counterclockwise when viewed from the right side around a rotation axis parallel to the Y axis by simultaneously lowering the first movable member MB1 and the fourth movable member MB4 without moving the second movable member MB2 and the third movable member MB3.

[0109] In addition, the control unit can rotate the optical element OE counterclockwise in a front view around a rotation axis parallel to the X-axis by simultaneously raising the third movable member MB3 and the fourth movable member MB4 without moving the first movable member MB1 and the second movable member MB2.

[0110] In addition, the control unit can rotate the optical element OE clockwise in a front view around a rotation axis parallel to the X-axis by simultaneously lowering the third movable member MB3 and the fourth movable member MB4 without moving the first movable member MB1 and the second movable member MB2.

[0111] In addition, the control unit can rotate the optical element OE in a clockwise direction when viewed from the front around a rotation axis parallel to the X-axis by simultaneously raising the first movable member MB1 and the second movable member MB2 without moving the third movable member MB3 and the fourth movable member MB4.

[0112] In addition, the control unit can rotate the optical element OE counterclockwise in a front view around a rotation axis parallel to the X-axis by simultaneously lowering the first movable member MB1 and the second movable member MB2 without moving the third movable member MB3 and the fourth movable member MB4.

[0113] In addition, the control unit may simultaneously perform at least two of the following by separately operating each of the first driving device DM1 to the fourth driving device DM4: rotation of the optical element OE around a rotation axis parallel to the Y axis, rotation of the optical element OE around a rotation axis parallel to the X axis, and translation of the optical element OE in the Z axis direction.

[0114] As described above, the actuator 100 according to an embodiment of the present invention comprises a fixed member FB (case member 1), a plurality of movable members MB, a drive device DM that moves each of the plurality of movable members MB in a predetermined drive direction (Z-axis direction) relative to the fixed member FB (case member 1), and a first support member (upper support member 2U) and a second support member (lower support member 2D) that support each of the plurality of movable members MB movably in the drive direction (Z-axis direction) relative to the fixed member FB (case member 1). The first support member (upper support member 2U) includes a first fixed side portion (upper fixed side portion 2U3) connected to one end portion in the drive direction (Z-axis direction) of the fixed member FB (case member 1), a first movable side portion (upper movable side portion 2U1) rotatably connected to one end portion in the drive direction of each of the multiple movable members MB, and a first intermediate portion (upper intermediate portion 2U2) elastically connecting between the first fixed side portion (upper fixed side portion 2U3) and the first movable side portion (upper movable side portion 2U1). The second support member (lower support member 2D) includes a second fixed side portion (lower fixed side portion 2D3) connected to the other end of the fixed member FB (case member 1) in the driving direction, a second movable side portion (lower movable side portion 2D1) rotatably connected to the other end of each of the multiple movable members MB in the driving direction, and a second intermediate portion (lower intermediate portion 2D2) elastically connecting between the second fixed side portion (lower fixed side portion 2D3) and the second movable side portion (lower movable side portion 2D1). The drive device DM is configured to drive a driven member (optical element OE) fixed to the first movable side portion (upper movable side portion 2U1) by moving at least one of the multiple movable members MB in the driving direction.

[0115] This configuration provides the effect that the driven member can be tilted greatly. In the illustrated example, the actuator 100 provides the effect that the optical element OE can be tilted at a tilt angle of 20 degrees or more. This is because the actuator 100 is configured so that the members constituting the actuator 100 do not interfere with each other even when the optical element OE is tilted greatly at a tilt angle of 20 degrees or more. In addition, the actuator 100 can tilt the driven member while moving each of the multiple movable members MB in the driving direction without tilting them, or can move the driven member parallel to the driving direction. Therefore, the actuator 100 can move the driven member while avoiding contact between the movable member MB and the fixed member FB.

[0116] One end of each of the movable members MB in the driving direction may be rotatably connected to the first movable side part (upper movable side part 2U1) via a connecting member which is an elastic member (upper elastic member 5U) or a ball joint. The other end of each of the movable members MB in the driving direction may be rotatably connected to the second movable side part (lower movable side part 2D1) via another connecting member which is an elastic member (lower elastic member 5D) or a ball joint. The connecting member may be integrated with the leaf spring which constitutes the support member 2. That is, the connecting member may be a part of the leaf spring. In this case, the connecting member which is a part of the leaf spring may be formed to have a spiral shape, may be formed to have a radial shape, or may be formed to have a shape other than the spiral shape and the radial shape.

[0117] This configuration provides the advantage that the linear motion of each of the plurality of movable members MB can be easily converted into the rotational motion of the driven member.

[0118] The fixed member FB may be a case member 1 made of a magnetic material having a plurality of recesses (cylindrical recesses 1V) corresponding to the plurality of movable members MB. Each of the plurality of movable members MB may be accommodated in a non-contact state inside a corresponding one of the plurality of recesses (cylindrical recesses 1V).

[0119] This configuration has the effect of preventing each of the multiple movable members MB from being excessively tilted with respect to the drive axis (axis parallel to the Z axis) because the inner wall of the recess (cylindrical recess 1V) can function as a stopper. This configuration also has the effect of increasing the driving force of the drive unit DM because the distance between the case member 1 and the magnetic member 11 that configure the magnetic circuit can be reduced.

[0120] The driven member may be an optical element OE. The optical element OE may be, for example, a mirror, a prism, or an imaging element such as a CCD or a CMOS. Alternatively, the driven member may be a light source (laser irradiation device) constituting a LIDAR, a light source constituting a lighting device, or a light source constituting a projector.

[0121] This configuration has the effect that, for example, the actuator 100 can orient the axis (optical axis) of the optical element OE in any direction, or the actuator 100 can orient the optical axis of a light source, such as a LIDAR, an illumination device, or a projection device, in any direction.

[0122] The first intermediate portion (upper intermediate portion 2U2) may include a pair of shaft portions 2S that form the rotation axis AX. The second intermediate portion (lower intermediate portion 2D2) may include another pair of shaft portions 2S that form another rotation axis BX parallel to the rotation axis AX. The drive device DM may rotate the first support member (upper support member 2U) around the rotation axis AX and rotate the second support member (lower support member 2D) around the rotation axis BX by moving at least one of the multiple movable members MB in the drive direction.

[0123] This configuration has the effect that the driven member (optical element OE) attached to the upper movable portion 2U1 of the upper support member 2U becomes rotatable about the rotation axis AX.

[0124] The first intermediate portion (upper intermediate portion 2U2) may include a pair of first shaft portions (rear shaft portion 2SB and front shaft portion 2SF of upper intermediate portion 2U2) constituting the first rotation axis AX1 and a pair of second shaft portions (left shaft portion 2SL and right shaft portion 2SR of upper intermediate portion 2U2) constituting the second rotation axis AX2. The second intermediate portion (lower intermediate portion 2D2) may include a pair of third shaft portions (rear shaft portion 2SB and front shaft portion 2SF of lower intermediate portion 2D2) constituting a third rotation axis (first rotation axis BX1) parallel to the first rotation axis AX1 and a pair of fourth shaft portions (left shaft portion 2SL and right shaft portion 2SR of lower intermediate portion 2D2) constituting a fourth rotation axis (second rotation axis BX2) parallel to the second rotation axis AX2. In this case, the drive unit DM may rotate the first support member (upper support member 2U) around at least one of the first rotation axis AX1 and the second rotation axis AX2, and rotate the second support member (lower support member 2D) around at least one of the first rotation axis BX1 and the second rotation axis BX2, by moving at least one of the multiple movable members MB in the drive direction.

[0125] This configuration brings about the effect that the driven member (optical element OE) attached to the upper movable portion 2U1 of the upper support member 2U becomes rotatable about each of the first rotation axis AX1 and the second rotation axis AX2.

[0126] The preferred embodiments of the present invention have been described above in detail. However, the present invention is not limited to the above-described embodiments. Various modifications or substitutions may be applied to the above-described embodiments without departing from the scope of the present invention. Furthermore, each of the features described with reference to the above-described embodiments may be appropriately combined as long as there is no technical contradiction.

[0127] For example, in the above embodiment, the movable member MB is connected to the support member 2 via the elastic member 5, which is a connecting member made of synthetic rubber, but it may be directly connected to the support member 2. That is, the connecting member may be a part of the support member 2. In this case, the elastic member 5 may be omitted.

[0128] In the above embodiment, the elastic member 5 is fixed to the support member 2 by using the fixing member 4, but it may be fixed to the support member 2 by insert molding. In this case, the fixing member 4 may be omitted.

[0129] Furthermore, in the above-described embodiment, the drive device DM is a device that utilizes a moving coil type voice coil motor constituted by a coil 6 as the movable member MB and a magnetic member 11 and a magnet 12 as the fixed member FB, but it may also be a device that utilizes a moving magnet type voice coil motor.

[0130] In addition, in the above-described embodiment, the drive device DM is a device that uses a voice coil motor, but it may also be a device that uses a piezoelectric element, a device that uses a shape memory alloy wire, or a device that uses a solenoid, etc. [Explanation of symbols]

[0131] 1···Case member 1H···Through hole 1HA···First through hole 1HB···Second through hole 1HC···Third through hole 1HD···Fourth through hole 1HA1, 1HB1, 1HC1, 1HD1···First hole 1HA2, 1HB2, 1HC2, 1HD2···Second hole 1HA3, 1HB3, 1HC3, 1HD3···Third hole 1J···Bridge portion 1JA···First bridge portion 1JB···Second bridge portion 1JC···Third bridge portion 1JD···Fourth bridge portion 1JA1, 1JB1, 1JC1, 1JD1···First cross section 1JA2, 1JB2, 1JC2, 1JD2···Second cross section 1JA3, 1JB3, 1JC3, 1JD3···Third cross section 1K···Bottom 1KA···First bottom 1KB···Second bottom 1KC···Third bottom 1KD···Fourth bottom 1P···Upper recess 1Q···Lower recess 1R···Primal recess 1RA···First rectangular recess 1RB···Second rectangular recess 1RC···Third rectangular recess 1RD···Fourth rectangular recess 1V···Cylindrical recess 1VA···First cylindrical recess 1VB···Second cylindrical recess 1VC···Third cylindrical recess 1VD···Fourth cylindrical recess 1W···Primal recess 2···Support member 2D···Lower support member 2D1···Lower movable part 2D2···Lower middle part 2D3···Lower fixed part 2H...Through hole 2M...Annular portion 2S...Shaft portion 2SB...Rear shaft portion 2SF...Front shaft portion 2SL...Left side shaft portion 2SR...Right side shaft portion 2T...Round through hole 2T1...First round through hole 2T2...Second round through hole 2T3...Third round through hole 2T4...Fourth round through hole 2U...Upper support member 2U1...Upper movable side portion 2U2...Upper middle portion 2U3...Upper fixed side portion 2U3B...Rear side edge portion 2U3F...Front side edge portion 2U3L...Left side edge portion 2U3R...Right side edge portion 3...Fastening member 3D...Lower fastening member 3U...Upper fastening member 4...Fixed member 4D...Lower fixing member 4D1...First lower fixing member 4D2...Second lower fixing member 4D3...Third lower fixing member 4D4...Fourth lower fixing member 4U...Upper fixing member 4U1...First upper fixing member 4U2...Second upper fixing member 4U3...Third upper fixing member 4U4...Fourth upper fixing member 5...Elastic member 5D...Lower elastic member5D1...First lower elastic member 5D2...Second lower elastic member 5D3...Third lower elastic member 5D4...Fourth lower elastic member 5U...Upper elastic member 5U1...First upper elastic member 5U2...Second upper elastic member 5U3...Third upper elastic member 5U4...Fourth upper elastic member 6...Coil 6A...First coil 6B...Second coil 6C...Third coil 6D...Fourth coil 7...Coil holding member 7A...First coil holding member 7AF...First board holding portion 7AL...First leg portion 7AL1...First extension portion 7AL2...Second extension portion 7AL3...Third extension portion 7AS...First central cylinder portion

[0033] 7AT...first upper cylindrical portion 7AU...first upper plate portion 7B...second coil holding member 7C...third coil holding member 7D...fourth coil holding member 8...substrate 8A...first substrate 8B...second substrate 8C...third substrate 8D...fourth substrate 9...lower plate member 9A...first lower plate member 9B...second lower plate member 9C...third lower plate member 9D...fourth lower plate member 10...lower cylindrical member 10A...first lower cylindrical member 10B...second lower cylindrical member 10C...third lower cylindrical member 10D...fourth lower cylindrical member 11...magnetic member 11A...first magnetic member 11B...Second magnetic member 11C...Third magnetic member 11D...Fourth magnetic member 12...Magnet 12A...First magnet 12B...Second magnet 12C...Third magnet 12D...Fourth magnet 100...Actuator AX...Rotating axis AX1...First rotating axis AX2...Second rotating axis AX3...Third rotating axis AX4...Fourth rotating axis BX...Rotating axis BX1...First rotating axis BX2...Second rotating axis CA...Coil assembly CA1...First coil assembly CA2...Second coil assembly CA3...Third coil assembly CA4...Fourth coil assembly CP...Center point CX...Central axis DM...Driver DM1...First drive unit DM2...Second drive unit DM3...Third drive unit DM4...Fourth drive unit FB...Fixed part GP1, GP2, HT1, HT2...Distance IR...Inner annular part MB...Movable part MB1...First movable part MB2...Second movable partMB3...Third moving part MB4...Fourth moving part MR...Central annular part NL...Normal vector OE...Optical element OR...Outer annular part SP...Connecting part SP1...1st spoke part SP2...2nd spoke part SP3...3rd spoke part SP4...4th spoke part SP5...5th spoke part SP6...6th spoke part ST...Height

Claims

1. A fixing member; A plurality of movable members; a drive device that moves each of the plurality of movable members in a predetermined drive direction relative to the fixed member; a first support member and a second support member that support each of the plurality of movable members movably in the driving direction relative to the fixed member, the first support member includes a first fixed-side portion connected to one end of the fixed member in the driving direction, a first movable-side portion rotatably connected to one end of each of the plurality of movable members in the driving direction, and a first intermediate portion elastically connecting between the first fixed-side portion and the first movable-side portion, the second support member includes a second fixed-side portion connected to the other end of the fixed member in the driving direction, a second movable-side portion rotatably connected to the other end of each of the plurality of movable members in the driving direction, and a second intermediate portion elastically connecting between the second fixed-side portion and the second movable-side portion, the driving device is configured to drive a driven member fixed to the first movable-side portion by moving at least one of the plurality of movable members in the driving direction, the fixed member has a through hole penetrating in the driving direction, Each of the plurality of movable members is connected to the first support member and the second support member through the through hole. Actuator.

2. One end of each of the plurality of movable members in the driving direction is rotatably connected to the first movable-side portion via a connecting member that is an elastic member or a ball joint, The other end of each of the plurality of movable members in the driving direction is rotatably connected to the second movable-side portion via another connecting member which is an elastic member or a ball joint. The actuator of claim 1 .

3. the fixed member is a case member made of a magnetic material and having a plurality of recesses corresponding to the plurality of movable members; Each of the plurality of movable members is accommodated in a corresponding one of the plurality of recesses in a non-contact state. The actuator according to claim 1 or 2.

4. The driven member is an optical element. The actuator according to any one of claims 1 to 3.

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