Vacuum equipment

Abstract

To provide vacuum equipment with multiple modules which have connection portions that are as simple and inexpensive as possible, where uniform logical communication is enabled between all of the modules.SOLUTION: Vacuum equipment comprises a plurality of modules. Each of the modules includes: a functional unit that performs a predetermined function during operation of the vacuum equipment; and at least one communication unit configured to receive an input data set from another module and to transmit it to the functional unit, and configured to receive an output data set from the functional unit and to transmit it to another module. At least one of the modules comprises two communication units. Each of the two communication units is configured to transmit the input data set to the respective other communication unit of the same module.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The invention relates to a vacuum installation having a number of modules, each of which comprises a functional unit for performing a predefined function and at least one communication unit for receiving an input data set for this functional unit. [Background technology]

[0002] Typically, vacuum installations of relatively complex construction, including for example vacuum pumps, pump stands, mass spectrometers or leak detectors, have a number of internal electronic modules that are communicatively connected to one another. In many cases, the communication connections between the modules of such vacuum installations are configured as CAN connections (CAN: Controller Area Network), because such CAN connections are relatively fast, reliable and available in commercially available microcontrollers.

[0003] In the case of a CAN connection between several modules of a vacuum installation, it is often necessary to provide several potential or voltage areas that are separated from one another, since a separation between the modules is necessary, for example, in view of possible noise in sensitive analog measurements or in view of dangerous and safe touch voltages. Only one CAN bus is required for each potential or voltage area, since a separation between the potential or voltage areas can only be carried out between one CAN controller and one CAN driver of one module of the vacuum installation, which is not easily possible on a constant CAN potential.

[0004] If each of these CAN buses is connected, for example, to a central module or central logic unit by which several modules of the vacuum installation are controlled and then coordinated in succession, a relatively large number of connections is required at the central logic unit, since each potential area or each corresponding CAN bus requires only one connection to the central logic unit, which increases the number of connections at such a central logic unit and increases the cost of these connections, which increase the number of pins required in the connector and the number of cables.

[0005] Furthermore, it may be necessary to apply several different potential regions to a connection, which is formed, for example, as a connector. As a result, on the other hand, the physically necessary distance must be ensured in such a connection or in a corresponding connector. This may in turn make the connection or connector larger, more expensive and more complex. Moreover, it may happen that the solution for such a connection or for such a connector is commercially unfeasible.

[0006] Furthermore, when using multiple CAN buses connected to only one central logic unit, certain modules of the vacuum installation often do not communicate or have a uniform logical connection between them, in other words, such a logical connection or communication is often only established between modules attached to the same CAN bus, but not between modules that reside on different CAN buses. Summary of the Invention [Problem to be solved by the invention]

[0007] The object of the present invention is to provide a vacuum installation, the modules of which have as simple and cost-effective connections as possible and in which uniform logical communication is made available between all modules. [Means for solving the problem]

[0008] This problem is solved by a vacuum installation having the features of claim 1. Advantageous further configurations of the invention are set out in the dependent claims, the description and the drawings.

[0009] The vacuum equipment has a plurality of modules, each of which includes a functional unit that performs a predefined function during operation of the vacuum equipment, and at least one communication unit configured to receive an input data set by another module and transmit it to the functional unit, and to receive an output data set by the functional unit and transmit it to the other module.

[0010] At least one module of the plurality of modules has two communication units, both of which are configured to transmit the input data set to a respective further communication unit of the same module, in other words, if a module of the vacuum installation has more than one communication unit, each of the plurality of communication units of this module can transmit or is configured to transmit the input data set to a respective further communication unit or to a plurality of further communication units of the same module.

[0011] Such a vacuum installation can be configured, for example, as a vacuum pump, as a complete pump stand consisting of one or more vacuum pumps and a vessel, as a mass spectrometer or as a leak detector. Each of the modules of such a vacuum installation can thus perform a specific function or application depending on the respective intended use of the vacuum installation. The module from which the input data sets are received can, for example, be the central logic unit of the vacuum installation. The input data sets can be constructed for controlling the functional units so that the functional units can perform predefined or desired functions during operation of the vacuum installation.

[0012] At least one of the modules has two communication units, which can transmit input data sets to the respective further communication units of the module, so that a uniform logical communication is possible via this module and the further modules. The module having two communication units thus has a gateway function that allows simple linking of the modules via the multiple modules of the vacuum installation. The connection of the multiple modules can therefore be made in a simple topology that is connected with low costs.

[0013] Furthermore, this allows a simple structure for a bus, for example a CAN bus (CAN: Controller Area Network in English). The modules are respectively connected by said bus. Furthermore, a uniform logical communication of all modules can be performed by a gateway function of one or more modules with two communication units. It can thus be ensured that the input data sets are visible or available to other modules or to all modules of the vacuum installation. In other words, a uniform logical communication regarding the input data sets can be achieved between the modules of the vacuum installation. On the other hand, said uniform logical communication can simplify the maintenance of all modules, for example by a central logical unit.

[0014] Furthermore, the gateway function or the connection between the communication units of one module allows a connection structure between the modules in which only one voltage or potential area occurs between the modules, so that when connecting multiple modules to each other, it is not necessary to take into account the distance to another potential area.

[0015] In summary, the connection of two communication units in one module makes it possible to build a transparent bus connection between all modules of the vacuum installation, which in turn allows a uniform lateral communication between the modules and a synchronization of these modules. In summary, therefore, in the vacuum installation of the invention, a simple and low-cost connection and a uniform communication between several modules can be implemented.

[0016] According to one embodiment, multiple modules of the vacuum installation can be arranged serially in succession on a logic bus, such a logic bus can be, for example, a CAN bus, which allows for a simple and low-cost bus structure, for example with commercially available controllers.

[0017] According to another embodiment, each of the modules of the vacuum installation may have two communication units each connected to one communication unit of one further module, in which case each of the two communication units of each module is connected to a different module of the vacuum installation.

[0018] If each module of the plurality of modules has two communication units, a ring structure of the modules can be formed via the respective communication units of the modules. In this ring structure, one first or central module can be connected to another module, which in turn connects to yet another module via its second communication unit. This can be repeated until the last module also connects to the first or central module via its second communication unit. Such a ring structure or ring topology of the modules and their connections via their respective communication units can generate redundant connections between the modules, because each module can connect to all other modules via its two communication units, so to speak, via two routes or paths.

[0019] Alternatively, at least two modules of the vacuum installation may have only one communication unit. If exactly two modules of the vacuum installation, for example the first and the last module, have only one communication unit, a simple and low-cost bus structure can be provided to connect the communication units as a serial link. If more than two modules of the vacuum installation have only one communication unit, a tree structure can be constructed, in which case the central module or unit and the respective end module or final module of one branch of the tree structure each have only one communication unit. In such a tree structure, these modules can be grouped with respect to their respective functions. In this case, the modules of each branch of the tree structure can perform similar functions or applications.

[0020] According to another embodiment, each of the two communication units of the at least one module having two communication units can be connected to one communication unit of two other modules different from each other, such that one of the two communication units of the at least one module of the plurality of modules can be connected to a communication unit of a first other module, while the other of the two communication units of the at least one module of the plurality of modules can be connected to a communication unit of a second other module different from the first other module.

[0021] Furthermore, at least one communication unit of each module of the plurality of modules can be connected to only one communication unit of one further module of the vacuum installation, in the case of this embodiment only one connection between each two modules of the vacuum installation is required, since this communication unit of each module of the plurality of modules is not connected to multiple communication units of these modules.

[0022] This results in a smaller number of connections between modules of the vacuum installation compared to a vacuum installation in which multiple communication units are connected to one central logic unit or one central module. Thus, the number of pins required, for example of one connector, on the central logic unit can be reduced when connecting two modules. As a result, the connections between the modules can be constructed relatively simply and therefore can have small dimensions. This results in a reduction in the overall costs for the vacuum installation.

[0023] According to another embodiment, the communication unit can check whether the input data set is addressed to a functional unit of the respective module and transmits the input data set to the functional unit only if the input data set is addressed to the functional unit of the respective module. If not, the communication unit can transmit the input data set, for example, to a second communication unit of the same module and via this to another module. Thus, the input data set can be conditionally forwarded to the functional unit. As a result, the input data set is received by this functional unit only if it is destined for this functional unit.

[0024] Conversely, the functional unit may be configured to transmit the output data set to all communication units of the module, which in turn can transmit the output data set to another module, so that the output data set is visible or available to all modules of the vacuum installation. Thus, if one module has two communication units for connecting to two other modules, the functional unit can transmit the output data set to both communication units.

[0025] Furthermore, multiple communication units of the modules of the vacuum installation can be connected to each other such that input and output data sets can be transmitted to all modules of the vacuum installation, thus establishing a uniform and complete logical communication and transparency between the modules of the vacuum installation.

[0026] According to another embodiment, at least two connections between the communication units of the modules of the vacuum installation may have different transmission parameters. The different transmission parameters may for example comprise different communication speeds and / or different bus levels for the at least two connections between the communication units. Thus, each connection between the communication units of two modules may be flexibly adapted to the properties of the respective module. Furthermore, completely different media, such as CAN bus, UART (Universal Asynchronous Receiver Transmitter), SPI (Serial Peripheral Interface) or Ethernet, may be provided for establishing each connection between the communication units of the two modules.

[0027] According to another embodiment, the communication unit can be configured as a CAN controller, which can be true for the communication units of all modules of the vacuum installation, i.e. for both communication units of each module, if one module has two communication units.

[0028] Since CAN controllers are commercially available, the connections between the respective modules or between the communication units of these modules can be built at low cost. Furthermore, when connecting two communication units, a respective CAN driver associated with a respective CAN controller can be provided. Furthermore, an electrical isolation can be provided between the CAN controller and the CAN driver of the respective module in order to isolate the communication potential domains or voltage domains from each other when connecting the modules of the vacuum installation.

[0029] Each module may have at most one electrical separation when connected to another module. In other words, even if one module has two communication units or CAN controllers, two electrical separations are not provided for the communication units or CAN controllers of only one module. For example, a central logic unit of a conventional vacuum installation may be provided with two electrical separations. In contrast, if only one electrical separation is provided for each module of a vacuum installation, the connection between the communication units of the modules may be constructed relatively simply. In this case, it is not necessary to separate the different potential areas from each other with connectors, for example to ensure spacing with such connectors. Therefore, when connecting each module of the multiple modules to one other module, i.e. when connecting two communication units of any two modules, only one potential area may be used. Conversely, it may be avoided that, for example, each of the two communication units of one module transitions to two different potential areas via two different electrical separations.

[0030] However, it is also possible, instead, that one electrical separator is attached to each of the two communication units of one module when connected to the respective further module, so that two electrical separators can be present in one module. Nevertheless, due to the internal connection of two communication units of the same module, a simple topology of the bus structure can be achieved. For example, several communication units of the same module can be connected to different modules. In any case, this requires several individual connections. Thus, even when one electrical separator is attached to each of the two communication units, a cumbersome connection can be avoided by the simple bus topology, for example without having to ensure spacing on the connectors. If several modules of the vacuum installation are arranged on a bus, for example as a serial link, several electrical separators can be arranged flexibly on this link.

[0031] According to another embodiment, one of the modules of the vacuum installation may be configured as a central logic unit which generates the input data set. A number of communication connections may be formed between the central logic unit and the further modules for transmitting the input data set to all modules of the vacuum installation. Thus, the input data set is visible or available to all modules of the vacuum installation. As a result, transparency regarding the input data set is achieved on the bus which connects the different modules of the vacuum installation to each other.

[0032] The central logic unit may have only one terminal connection to one further module. In this case, the central logic unit may have only one communication unit or one CAN controller which is connected to only one further module. The central logic unit can therefore be connected simply and cost-effectively to the other modules of the vacuum installation, for example, by means of only one connector.

[0033] According to another embodiment, the accessory element is connectable to at least one communication unit of one of the modules of the vacuum installation. Since always only two modules of the vacuum installation are connected to each other via the respective communication units, thereby achieving a uniform logical communication of the modules of the vacuum installation, the accessory element can be connected simply and cost-effectively to one or more communication units of the modules of the vacuum installation, and the data required for operating the accessory element can be appropriately received, for example from a central logical unit.

[0034] Furthermore, a uniform logical communication between the modules of the vacuum installation makes it possible to assign several modules to several different housing parts or housings of the vacuum installation, for example.

[0035] The present invention will now be described by way of example only with reference to the accompanying drawings, in which: FIG. [Brief description of the drawings]

[0036] [Figure 1] 1 shows a module of a vacuum installation according to the prior art; [Diagram 2] 1 shows a module of the vacuum installation of the present invention. [Diagram 3] 1 shows in detail several units of a module of a vacuum installation and the data transmission between these units. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0037] 1 shows a schematic representation of a prior art vacuum installation 100. The vacuum installation 100 may be configured as one of a complex of vacuum technology products, for example as a vacuum pump, a vacuum pump stand with a number of vacuum pumps (at least one of which is connected to a vacuum chamber), a mass spectrometer or a leak detector.

[0038] One module of the multiple modules 110 of the vacuum installation 100 is configured as a central logic unit 115 and includes two communication units 120, indicated by CAN1 and CAN2, as two CAN controllers (CAN: in English Controller Area Network). The central logic unit 115 controls the multiple further modules 110 of the vacuum installation 100 by means of the two CAN controllers 120. In this example, each of these further modules 110 has only one communication unit 120 or only one CAN controller 120. However, the further modules 110 of the vacuum installation may have further communication units or CAN controllers that may be connected to units other than the central logic unit 115.

[0039] Each of these modules 110 further comprises a functional unit 130 which executes a predefined function or application during operation of the vacuum installation 100. The functional unit 130 of each module 110 is communicatively connected to one or two communication units 120 or CAN controllers 120 for receiving an input data set 310 (see FIG. 3 ) by the respective communication unit 120 and for transmitting an output data set 320 (see FIG. 3 ) to the respective communication unit 120.

[0040] Further, a CAN driver 140 is assigned to each CAN controller 120 for establishing CAN bus connections between the central logic unit 115 and the further modules 110 and between these further modules 110 by corresponding cables.

[0041] In order to separate the potential of the central logic unit 115 from the potentials of the two further modules 110, i.e. modules 116 and 117, and from the other potentials of the two modules 118, a respective electrical separation 150 is provided between the communication unit or CAN controller 120 of the central logic unit 115 and the corresponding CAN driver 140. Since it is not possible to separate modules at a given CAN potential, each of the electrical separations 50 can only be performed between the CAN controller 120 and the CAN driver 140. Separation of different potential areas in the vacuum installation 100 is necessary, for example, to separate dangerous contact voltages from non-hazardous contact voltages or to separate potentials to avoid noise in sensitive analog measurements.

[0042] 1 has three different potential domains: a first potential domain extends to the central logic unit 115 up to the electrical isolation 150, while a second potential domain extends to the CAN driver 140 and modules 116 and 117 attached to the communication unit or CAN controller 120, and a third potential domain extends to the CAN driver 140 and module 118 attached to the CAN controller CAN1 of the central logic unit 115.

[0043] Therefore, a respective terminal connection 160 between the central logic unit 115 and each pair of modules 110 associated with the same potential domain is required for the second and third potential domains. In the example of Fig. 1, the terminal connection 160 between the central logic unit 115 and both modules 116, 117 is therefore separate from the terminal connection 160 between the central logic unit 115 and the further module 118.

[0044] 1, two or more terminal connections 160 are therefore required between the central logic unit 115 and the further modules 116, 117, 118. In general, each potential area of ​​the further modules 116, 117 or 118 and possibly the further modules 110 requires a separate terminal connection 160 to the central logic unit 115 and a separate electrical isolation 150 and a separate CAN controller 120 of the central logic unit 115. If the terminal connections 160 are constituted by connectors, this results in a large number of pins and cables being required at such connectors of the central logic unit 115. The central logic unit 115 therefore requires a relatively large and expensive terminal connection 160 to connect to the further modules 110.

[0045] If the terminal connections 160 are formed to the central logic unit 115 by connectors, furthermore, the different potential areas must be maintained at such connectors. Therefore, the physically necessary distances for separating the potentials must be ensured at such connectors. This in turn makes the terminal connections 160 larger, more expensive and more costly. Furthermore, in some cases, a solution for the terminal connections 160 using connectors is commercially unfeasible.

[0046] Furthermore, in the case of the vacuum installation 100 shown in Fig. 1, there is no uniform logical connection or communication between the modules 116 and 117 on the one hand and the module 118, which is attached to a different potential domain on the other hand. For example, the communication between the central logic unit 115 and both modules 116 or 117 is invisible or inaccessible to the other module 110, because the other module 118 is controlled by a separate CAN controller CAN1, which is in a separate potential domain and has no direct communication connection to the separate CAN controller CAN2, which controls the other modules 116, 117. This makes the maintenance of the communication between the modules 110 of the vacuum installation 100 very laborious and does not allow for reliable communication techniques, for example between the modules 116 and 118, easily.

[0047] To solve the above problems, a vacuum installation 200 according to the invention is proposed, which is shown diagrammatically in Fig. 2 and which also comprises a number of modules 210. The components or units of the vacuum installation 200, which are designated by the same reference numerals as in Fig. 1, are identical to or at least very similar to the above-mentioned units and components, and therefore will not be described again in full below.

[0048] The vacuum installation 200 differs from the vacuum installation 100 shown in FIG. 1 in that the central logic unit 215 and the further modules 216, 217, 218 are implemented or configured in a different way and in that the connections between the modules are arranged in a different way.

[0049] In particular, each communication unit 120 of each module 210 is connected to only one communication unit 120 of one other module 210 of the vacuum installation 200. In contrast, in the case of the prior art vacuum installation 100, the communication unit 120 or the CAN controller CAN2 is connected to the communication units 120 of both modules 116, 117.

[0050] Furthermore, each of the modules 216, 217 comprises two communication units or CAN controllers 120 communicatively connected to each other within the respective module 216, 217 (i.e. connected to each other in addition to the respective connections to the functional units or applications 130). In contrast, according to this embodiment, the central logic unit 215 comprises only one communication unit or only one CAN controller 120 and is connected to one of both communication units or CAN controllers 120 of the module 216 via an electrical isolation 150, a CAN driver 140 and a terminal connection 160. However, the central logic unit 215 may further comprise another communication unit or CAN controller used for purposes other than communication with the other modules 210 and the functional units or applications 130 of the other modules 210.

[0051] Similarly, module 216 is connected to a first communication unit 120, also designated CAN2, of an adjacent module 217 via a second communication unit 120 of this module 216, which is connected to CAN1, or to a communication unit 120, also designated CAN1. As a result, within the vacuum installation 200, the individual modules 210 are serially connected to each other by communication or bus connection. In other words, the modules 210 of the vacuum installation 200 are serially arranged on a logical CAN bus.

[0052] In this example, the last module 218 of the communication chain has only one communication unit or CAN controller 120 and is in a different potential domain than the two further modules 216, 217. Therefore, one electrical isolation 150 is provided between the second communication unit 120, represented by CAN2 of the module 217, and the CAN driver associated with this communication unit 120. Another electrical isolation 150 is present in the central logic unit 215. Thus, in the example of Fig. 2, at most one electrical isolation 150 is associated with each module 210 of the multiple modules 210, i.e. one electrical isolation 150 is associated with each module 210 of the multiple modules 210, or no electrical isolation 150 is associated with each module 210 of the multiple modules 210, so that only one potential domain exists between the modules 210 respectively. However, due to the serial architecture of the connections between the modules 210, the electrical isolation section 150 can be flexibly placed between any one CAN controller 120 and each CAN driver 140 associated with that CAN controller 120 without complex terminals or connectors having to be used between the modules 210.

[0053] Due to the serial arrangement of the modules 210 of the vacuum installation 200 on one logical CAN bus with a connection between every two different modules 210, it is possible to connect the modules 210 easily and at low cost. This is especially true for the terminal connection 160 connecting the central logic unit 215 to the first further module 216. Furthermore, if this terminal connection 160 is produced, for example, by a connector, no spacing to other potential areas has to be ensured for this terminal connection 160. Furthermore, in the case of such a connector, the number of pins required is reduced. The cost and size of this connector are therefore reduced in comparison with the connector required for the terminal connection 160 of the central logic unit 115 of the vacuum installation 100 according to the prior art. The serial and uniform connection between the communication units 120 of the modules 210 of the vacuum installation 200 allows for easy maintenance of the CAN bus connections in the central logic unit 215. Furthermore, all bus communications, i.e., data sets exchanged within and between modules, are transparent, i.e., visible and available, to all modules 210. This simplifies communication between modules 210, allows uniform lateral communication between modules, e.g., between modules 216 and 218, and allows synchronization of multiple modules 210. Furthermore, so-called broadcast communication is possible between modules.

[0054] Fig. 3 shows a schematic diagram of the transfer of data sets within and between one of the modules 210 of a vacuum installation 200 of the invention. In Fig. 3, a first module 216 of the vacuum installation 200 of Fig. 2 is illustrated. First, an input data set 310 arrives via the communication unit 120, indicated by CAN1 of the module 216. In particular, the input data set 310 is received by a receiver part rx of the communication unit 120. The input data set 310 may also be referred to as a CAN telegram.

[0055] The communication unit 120 then checks whether the input data set is addressed or constructed for a functional unit or application 130 of the module 216. This check is performed by means of a CAN handle in the input data set 310. If the input data set 310 or a CAN telegram is addressed to the functional unit 130, the first communication unit 120, indicated by CAN1, transfers the input data set 310 to the functional unit 130 as an application data set 311. This transfer corresponds to the conventional procedure used in the vacuum installation 100 according to the prior art.

[0056] However, if the input data set 310 is not addressed to a functional unit 130 of the module 216, the input data set 310 is not forwarded to the functional unit 130 but instead to the second communication unit 120, which is indicated by CAN2 of the module 216. In other words, in this case the input data set 310 is forwarded as an internal data set 312 to the second communication unit 120 or to the transmission part tx of this second communication unit. Thus, if the input data set 310 is not addressed to a functional unit or application 130 of the module 216, the transmission part tx of the second communication unit 120 forwards the input data set 310 unchanged to the neighboring module 217 (see FIG. 2). In this case the input data set 310 is not loaded into the functional unit or application 130 of the module 216.

[0057] During operation of the vacuum installation 200, the functional units or applications 130 generate output data sets 320 which are stored for example for communication or response with the central logic unit 215 during control of the functional units or applications 130. In the case of the inventive vacuum installation 200, the output data sets 320 are transmitted to both communication units of the module 216 or to both transmission parts tx of the CAN controller 120. Subsequently, the respective transmission parts tx of the communication units 120 forward the output data sets 320 as respective transmission data sets 321 or 322 to the further modules 210, i.e. in this case the central logic unit 215 and the further modules 217.

[0058] Thus, all data sets, i.e. the input data sets 310 and the output data sets 320, are visible and available to all modules 210 of the vacuum installation 200. Furthermore, as shown on the left side of Fig. 3, in the case of the transmission of the input data sets 310 within a module 216, if the data sets 310 are not structured for the functional units or applications 130 of the module 216, only a minimal delay is required for the transmission of the data sets 310. This delay corresponds approximately to the duration of the data sets 310 or the length of a CAN telegram. As a result, this delay is negligible in practice. [Explanation of symbols]

[0059] 100 Vacuum equipment using conventional technology 110 Module 115 Central Logic Unit 116, 117, 118 Another module 120 Communication unit or CAN controller 130 Functional Unit or Application 140 CAN Driver 150 Electrical isolation section 160 Terminal connection part 200 Vacuum equipment of the present invention 210 Module 215 Central Logic Unit 216, 217, 218 Another module 310 Input Dataset 311 Application Data Sets 312 Internal Data Set 320 Output Data Sets 321, 322 Transmission Data Set rx Receiver TX Transmission section

Claims

1. A vacuum installation (200) having a plurality of modules (210), Each module (210) of the plurality of modules (210) comprises: one functional unit (130) performing a predefined function during operation of the vacuum installation (200); at least one communication unit (120) configured to receive an input data set (310) from another module (210) and communicate it to said functional unit (130) and to receive an output data set (320) from said functional unit (130) and communicate it to another module (210); The vacuum equipment (200), wherein at least one module (210) of the plurality of modules (210) has two communication units (120) configured to transmit the input data set (310) to respective separate communication units (120) of the same module (210).

2. 2. The vacuum equipment (200) of claim 1, wherein a plurality of modules (210) of the vacuum equipment (200) are arranged serially in succession on a logical bus.

3. The vacuum equipment (200) of claim 1 or 2, wherein each module (210) of the plurality of modules (210) has two communication units (120) each connected to one communication unit (120) of one other module (210).

4. 3. The vacuum installation (200) according to claim 1 or 2, wherein at least two modules (210) of the vacuum installation (200) have only one communication unit (120).

5. The vacuum installation (200) according to any one of claims 1 to 4, wherein each of the two communication units (120) of at least one of the modules (210) having two communication units (120) is connected to one communication unit (120) of two other modules (210) different from each other.

6. The vacuum equipment (200) according to any one of claims 1 to 5, wherein at least one communication unit (120) of each module (210) of the plurality of modules (210) is connected to only one communication unit (120) of one other module (210) of the vacuum equipment (200).

7. The vacuum installation (200) of any one of claims 1 to 6, wherein the communication unit (120) checks whether the input data set (310) is addressed to a functional unit (130) of the respective module (210) and transmits the input data set (310) to the functional unit (130) only if the input data set (310) is addressed to the functional unit (130) of the respective module (210).

8. The vacuum installation (200) according to any one of the preceding claims, wherein the functional unit (130) is adapted to transmit the output data set (320) to all communication units (120) of the modules (210).

9. 9. The vacuum equipment (200) of claim 8, wherein the communication units (120) of the modules (210) of the vacuum equipment (200) are connected to each other such that the input data set (310) and the output data set (320) can be communicated to all modules (210) of the vacuum equipment (200).

10. The vacuum installation (200) according to any one of the preceding claims, wherein at least two connections between communication units (120) of the plurality of modules (210) of the vacuum installation (200) have different transmission parameters.

11. The vacuum installation (200) according to any one of the preceding claims, wherein the communication unit (120) is configured as a CAN controller.

12. The vacuum installation (200) according to any one of the preceding claims, wherein each module (210) has at most one electrical isolation (150) when connected to another module (210).

13. a module (210) of the plurality of modules (210) of the vacuum facility (200) configured as a central logic unit (215) for generating the input data set (310), A vacuum installation (200) according to any one of claims 1 to 12, wherein a plurality of communication connections are formed between the central logic unit (215) and the further modules (210, 216, 217, 218) for transmitting the input data set to all modules (210) of the vacuum installation (200).

14. 14. The vacuum installation (200) of claim 13, wherein the central logic unit (215) has only one terminal connection (160) to one further module (210).

15. A vacuum installation (200) according to any one of the preceding claims, wherein an accessory element is connectable to at least one communication unit (120) of one of a plurality of modules (210) of the vacuum installation (200).

Images