Inspection system and inspection method

Abstract

To provide an inspection system capable of making it easy to handle object data on a workpiece even when the workpiece is inspected by a plurality of robots.SOLUTION: An inspection system 100 comprises: a plurality of robots 10; inspection units 20 which are arranged at a plurality of robots 10 respectively and inspect workpieces 200; a processing unit 41 which performs processing to move inspection units 20 arranged at the plurality of robots 10 relatively to the workpieces 200 to inspect the workpieces 200; a processing unit 51 which performs processing to acquire inspection images 21 of a plurality of workpieces 200 from respective inspection units 20 and processing to detect objects of the workpieces 200 in the plurality of inspection images 21; and a processing unit 61 which performs processing to integrate, as data 62a, positions of the object 201 detected from the plurality of inspection images 21.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] This disclosure relates to an inspection system and an inspection method.

Background Art

[0002] Conventionally, inspection systems are known. For example, Patent Document 1 discloses a defect marking device for a vehicle painting surface, which includes two robots, imaging devices arranged on the two robots, an image processing device, and a plotter. In this defect marking device for a vehicle painting surface, the upper surface of the vehicle is imaged by an imaging device arranged on one of the two robots, and the side surface of the vehicle is imaged by an imaging device arranged on the other of the two robots. The image processing device detects defects of the vehicle based on the captured images. Then, the image processing device projects the defects detected on the upper surface of the vehicle onto a horizontal two-dimensional projection plane and stores them in the storage unit as two-dimensional positions. Also, the image processing device projects the defects detected on the side surface of the vehicle onto a vertical two-dimensional projection plane and stores them in the storage unit as two-dimensional positions. The plotter irradiates the upper surface of the vehicle with laser light based on the data of the two-dimensional positions of the defects projected on the horizontal two-dimensional projection plane stored in the storage unit. Also, the plotter irradiates the side surface of the vehicle with laser light based on the data of the two-dimensional positions of the defects projected on the vertical two-dimensional projection plane stored in the storage unit. Thereby, the defect positions of the vehicle are indicated by the laser light.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the defect marking device for vehicle painted surfaces described in Patent Document 1, the data of the two-dimensional positions of the defects on the upper surface of the vehicle and the data of the two-dimensional positions of the defects on the side surface of the vehicle are separately stored in the storage unit as the data of the positions projected onto the horizontal two-dimensional projection plane and the data of the positions projected onto the vertical two-dimensional projection plane, respectively. For this reason, when referring to the defect data of the vehicle stored in the storage unit from, for example, another computer, it is necessary to refer to each of the data of the two-dimensional positions of the defects on the upper surface of the vehicle and the data of the two-dimensional positions of the defects on the side surface of the vehicle. Therefore, there is a problem that the handling of the defect data of the work as the target becomes complicated.

[0005] This disclosure has been made to solve the above-described problems, and one object of this disclosure is to provide an inspection system and an inspection method that can facilitate the handling of the data of the target of the work even when the work is inspected by a plurality of robots.

Means for Solving the Problems

[0006] An inspection system according to a first aspect of this disclosure includes a plurality of robots, an inspection unit disposed on each of the plurality of robots for inspecting a work, and a process of relatively moving the inspection unit disposed on each of the plurality of robots with respect to the work to inspect the work, thereby acquiring inspection images of a plurality of works from each inspection unit, a process of detecting a target of the work in the plurality of inspection images, and a process of integrating the positions of the detected targets from the plurality of inspection images as data, and a processing unit.

[0007] As described above, the inspection system according to the first aspect of this disclosure includes a processing unit that performs a process of integrating, as data, the positions of objects detected from a plurality of inspection images acquired from inspection units arranged on each of a plurality of robots. As a result, since the positions of the objects of the work inspected by the plurality of robots are integrated as data, for example, by referring to this integrated data only once from another computer or the like, it is possible to refer to the positions of all the objects of the work. As a result, even when a work is inspected by a plurality of robots, it is possible to easily handle the data of the objects of the work.

[0008] The inspection method according to the second aspect of this disclosure includes acquiring inspection images of a plurality of works from each inspection unit by relatively moving the inspection units arranged on each of a plurality of robots with respect to the work to inspect the work, detecting the objects of the work in the plurality of inspection images, and integrating, as data, the positions of the objects detected from the plurality of inspection images.

[0009] As described above, the inspection method according to the second aspect of this disclosure includes integrating, as data, the positions of objects detected from a plurality of inspection images acquired from inspection units arranged on each of a plurality of robots. As a result, since the positions of the objects of the work inspected by the plurality of robots are integrated as data, for example, by referring to this integrated data only once from another computer or the like, it is possible to refer to the positions of all the objects of the work. As a result, even when a work is inspected by a plurality of robots, it is possible to provide an inspection method capable of easily handling the data of the objects of the work.

Advantages of the Invention

[0010] As described above, the inspection system and inspection method of the present disclosure can easily handle the data of the objects of the work even when the work is inspected by a plurality of robots.

Brief Description of the Drawings

[0011]

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Best Mode for Carrying Out the Invention

[0012] Hereinafter, embodiments embodying the present disclosure will be described with reference to the drawings.

[0013] (Configuration of Inspection System) The overall configuration of an inspection system 100 according to an embodiment will be described.

[0014] As shown in FIG. 1, the inspection system 100 is an appearance inspection system for inspecting the appearance of a workpiece 200. The workpiece 200 is, for example, a product or part related to an automobile, agricultural machinery, pottery, or household electrical appliances. The workpiece 200 is not particularly limited. In the present embodiment, as an example, the workpiece 200 includes a first surface 200a, a second surface 200b intersecting the first surface 200a, and a third surface 200c intersecting the first surface 200a and facing the second surface 200b.

[0015] The inspection system 100 includes a robot 10, an inspection unit 20, an instruction unit 30, a robot controller 40, an image processing device 50, a result display device 60, and a turntable 210 shown in FIG. 2. Note that the turntable 210 is an example of a workpiece transfer device.

[0016] In this embodiment, as shown in FIG. 2, a plurality of robots 10 are arranged. For example, three robots 10 are arranged, and the three robots 10 are referred to as robot 10a, robot 10b, and robot 10c below. The three robots 10 have the same configuration, so one robot 10 will be described below. As shown in FIG. 1, the robot 10 moves the inspection unit 20 relative to the workpiece 200. The robot 10 is a vertical articulated robot. The robot 10 includes a base unit 11 and an arm unit 12 connected to the base unit 11. The base unit 11 is fixed to an installation surface such as a floor, a wall, or a ceiling. The base unit 11 may be attached to a movable cart. The arm unit 12 has a plurality of joints. Each of the plurality of joints has a servo motor as a driving source. In addition, the tip of the arm unit 12 holds the inspection unit 20 and the instruction unit 30. The robot 10 moves the inspection unit 20 and the instruction unit 30 held at the tip of the arm unit 12 relative to a fixed workpiece 200 by driving multiple joints of the arm unit 12. The robots 10a, 10b, and 10c are examples of a first robot, a second robot, and a third robot, respectively.

[0017] The inspection unit 20 is disposed on each of the multiple robots 10 and inspects the workpiece 200. The inspection unit 20 is an imaging unit and captures an image of the workpiece 200. Specifically, the inspection unit 20 is a line-type camera and is moved along the surface of the workpiece 200 by the robot 10 to scan and capture an image of the surface of the workpiece 200.

[0018] The instruction unit 30 is disposed on each of the multiple robots 10, and indicates the position of an object 201 (described later) acquired by inspection to the workpiece 200. The instruction unit 30 is a laser irradiation unit, and indicates the position of the object 201 to the workpiece 200 by irradiating with laser light.

[0019] The robot controller 40 controls the operation of the robot 10. As shown in FIG. 3, the robot controller 40 includes a processing unit 41 and a storage unit 42. The processing unit 41 includes a processor and performs various processes related to the operation of the robot 10. The storage unit 42 includes a non-volatile memory and stores coordinate conversion information 71 and 72, which will be described later, and the like. A robot controller 40 is provided for each of the multiple robots 10, for example. Note that one common robot controller 40 may be provided for the multiple robots 10.

[0020] One image processing device 50 is provided in common for the multiple robots 10. Note that an image processing device 50 may be provided for each of the multiple robots 10. The image processing device 50 performs image processing on the image captured by the inspection unit 20. The image processing device 50 controls the timing of imaging by the inspection unit 20. The image processing device 50 includes a processing unit 51 and a storage unit 52. The processing unit 51 includes a processor, and performs various processes related to the image captured by the inspection unit 20 and the timing of imaging by the inspection unit 20. The storage unit 52 includes a non-volatile memory, and stores the inspection image 21 described below, etc.

[0021] The result display device 60 displays the inspection results of the workpiece 200. The result display device 60 includes a processing unit 61, a storage unit 62, a display unit 63, and an operation unit 64. The processing unit 61 includes a processor and performs various processes related to the display of the inspection results of the workpiece 200. The storage unit 62 includes a non-volatile memory and stores coordinate conversion information 72, a three-dimensional image of the workpiece 200, and the like. The display unit 63 includes a monitor such as a liquid crystal monitor and displays a screen of the inspection results of the workpiece 200, and the like. The operation unit 64 includes input devices such as a mouse and a keyboard, and accepts input operations by the user. The display unit 63 and the operation unit 64 may be integrated. That is, the display unit 63 and the operation unit 64 may be configured by an operation unit / display unit such as a touch panel.

[0022] In this embodiment, as shown in FIG. 2, a plurality of workpieces 200 are placed on the turntable 210, and the turntable 210 rotates the placed workpieces 200. Specifically, the turntable 210 includes a rotating part 211, a driving part 212 shown in FIG. 3, and a workpiece placing part 213. The rotating part 211 has a disk shape and rotates around an axis perpendicular to the floor surface on which the robot 10 is placed. Also, the driving part 212 rotates the turntable 210. The driving part 212 is, for example, a motor. The workpiece placing part 213 is arranged on the rotating part 211 and rotates together with the rotating part 211. For example, three workpiece placing parts 213 are arranged. The workpiece placing part 213 has, for example, an L shape, and the workpiece 200 is leaned against it. Note that the driving part 212 is controlled by, for example, the processing part 41 of the robot controller 40. Also, an upper control part for controlling the robot controller 40 may be arranged, and the driving part 212 may be controlled by the upper control part.

[0023] Also, in this embodiment, the plurality of robots 10 inspect different surfaces of the workpiece 200. Specifically, in this embodiment, the robot 10a inspects the first surface 200a of the workpiece 200. Also, the robot 10b inspects the second surface 200b of the workpiece 200. Also, the robot 10c inspects the third surface 200c of the workpiece 200. For example, the first surface 200a, the second surface 200b, and the third surface 200c are the outer surfaces of the workpiece 200.

[0024] (Control Processing of Inspection System) The control processing of the inspection system 100 will be described.

[0025] In step S1 shown in FIG. 4, as shown in FIG. 5, the processing unit 41 of the robot controller 40 performs a process of generating the movement path 13 of the robot 10 when the inspection unit 20 is relatively moved with respect to the workpiece 200 by the robot 10 and the workpiece 200 is inspected by the inspection unit 20. The movement path 13 is a path for operating the arm unit 12 of the robot 10, and a plurality of movement paths 13 are generated for inspecting the workpiece 200. Further, the movement path 13 is generated for each of the first surface 200a, the second surface 200b, and the third surface 200c of the workpiece 200.

[0026] For example, the processing unit 41 of each of the robots 10a, 10b, and 10c receives the instruction of the operation of the arm unit 12 by the user, and performs a process of generating the movement path 13 of the robots 10a, 10b, and 10c based on the received instruction. Further, for example, the processing unit 41 of each of the robots 10a, 10b, and 10c performs a process of automatically generating the movement path 13 regardless of the instruction of the operation of the arm unit 12 by the user. Further, the processing unit 41 performs a process of generating the movement path 13 along the surface of the workpiece 200 such as a curved surface.

[0027] In step S2 shown in FIG. 4, the processing unit 41 of each of the robots 10a, 10b, and 10c performs a process of generating the coordinate conversion information 71 and 72 based on the generated movement path 13. The coordinate conversion information 71 and 72 are information for converting the coordinate values in the inspection coordinate system of the inspection image 21, which will be described later, obtained by inspecting the workpiece 200 by the inspection unit 20, into the coordinate values in the robot coordinate system, which is a three-dimensional coordinate system, and the coordinate values in the workpiece coordinate system. The inspection coordinate system is a two-axis orthogonal coordinate system orthogonal to each other, and the three-dimensional coordinate system is a three-axis orthogonal coordinate system orthogonal to each other. The details of the coordinate conversion using the coordinate conversion information 71 and 72 will be described later.

[0028] As shown in FIG. 6, each processing unit 41 of the robot 10a, the robot 10b, and the robot 10c performs a process of acquiring coordinate values in a three-dimensional coordinate system at each first distance interval D1 along the movement path 13 and generating coordinate conversion information 71 and 72. At this time, the processing unit 41 actually moves the inspection unit 20 along the movement path 13 with respect to the workpiece 200 by the robot 10 and performs a process of acquiring coordinate values in the three-dimensional coordinate system at each first distance interval D1. Further, the first distance interval D1 is the distance interval of the control point 14a. The processing unit 41 performs a process of acquiring the coordinate values of the control point 14a in the three-dimensional coordinate system at each first distance interval D1. When the inspection unit 20 is an imaging unit, the control point 14a is set at the imaging focus position of the inspection unit 20. Further, the imaging focus position of the inspection unit 20 is set near the surface of the workpiece 200. The control point 14a is provided to perform a process of acquiring the coordinate values in the three-dimensional coordinate system.

[0029] For the sake of convenience, in FIG. 6, only one movement path 13 is illustrated, but the processing unit 41 performs a process of acquiring coordinate values in a three-dimensional coordinate system for all the movement paths 13 and generating the coordinate conversion information 71 and 72.

[0030] As shown in FIGS. 7 and 8, the coordinate conversion information 71 and 72 is a coordinate conversion table that associates the movement amount of the robot 10 in the direction along the movement path 13 with the coordinate values in the three-dimensional coordinate system. In FIGS. 7 and 8, the path number represents the number of the movement path 13, the position number represents the number of the control point 14, the movement amount represents the movement amount of the control point 14a of the robot 10 along the movement path 13, and the coordinate value represents the coordinate value of the control point 14a in the three-dimensional coordinate system. That is, in the coordinate conversion information 71 and 72, for each movement path 13, the movement amount of the robot 10 for each control point 14a is associated with the coordinate value of the control point 14a in the three-dimensional coordinate system.

[0031] As shown in FIG. 7, in the coordinate conversion information 71, the three-dimensional coordinate system is a robot coordinate system related to the robot 10. The robot coordinate system is a coordinate system based on the base unit 11. The coordinate conversion information 71 is a coordinate conversion table that associates the movement amount of the robot 10 with the coordinate values of the robot coordinate system. In the coordinate conversion information 71, as the coordinate values, the coordinate values indicating the position and orientation of the control point 14a in the robot coordinate system are used.

[0032] As shown in FIG. 8, in the coordinate conversion information 72, the three-dimensional coordinate system is a work coordinate system related to the work 200. The work coordinate system is a coordinate system based on the work 200. The coordinate conversion information 72 is a coordinate conversion table that associates the movement amount of the robot 10 with the coordinate values of the work coordinate system. In the coordinate conversion information 72, as the coordinate values, the coordinate values indicating the position of the control point 14a in the work coordinate system are used.

[0033] For example, the processing unit 41 acquires the coordinate values of the robot coordinate system, generates the coordinate conversion information 71, and generates the coordinate conversion information 72 based on the generated coordinate conversion information 71. Also, for example, the processing unit 41 generates the coordinate conversion information 72 from the coordinate conversion information 71 by converting the coordinate values of the robot coordinate system in the coordinate conversion information 71 into the coordinate values of the work coordinate system using conversion information such as a conversion matrix.

[0034] In addition, the processing unit 41 performs a process of storing the coordinate conversion information 71 and 72 in the storage unit 42, and performs a process of outputting the coordinate conversion information 72 to the processing unit 61 of the result display device 60. The processing unit 61 performs a process of storing the coordinate conversion information 72 in the storage unit 62.

[0035] In step S3, as shown in FIG. 9, the processing unit 41 of each of the robot controllers 40 of the robots 10a, 10b, and 10c operates the robots 10a, 10b, and 10c based on the movement path 13 to perform a process of inspecting the workpiece 200 by the inspection unit 20. Then, the processing unit 51 of the image processing apparatus 50 performs a process of acquiring a plurality of inspection images 21 based on the output results of each inspection unit 20. The inspection image 21 is an imaging image of the surface of the workpiece 200 captured by the inspection unit 20.

[0036] As shown in FIG. 10, the processing unit 51 operates the inspection unit 20 to inspect the workpiece 200 at every second distance interval D2 along the movement path 13 to perform a process of acquiring the inspection image 21. Specifically, the processing unit 51 operates the inspection unit 20 to image the workpiece 200 at every second distance interval D2 to perform a scanning imaging of the workpiece 200. More specifically, the processing unit 41 performs a process of outputting a pulse signal to the processing unit 51 at every second distance interval D2. The processing unit 51 performs a process of outputting a trigger signal to the inspection unit 20 at every second distance interval D2 based on the pulse signal from the processing unit 41. The inspection unit 20 images the workpiece 200 at every second distance interval D2 based on the trigger signal. Note that the second distance interval D2 is the distance interval of the control point 14b. When the inspection unit 20 is an imaging unit, the control point 14b is set at the imaging focus position of the inspection unit 20. Also, the imaging focus position of the inspection unit 20 is set in the vicinity of the surface of the workpiece 200. The control point 14b is provided for the inspection unit 20 to perform a process of imaging the workpiece 200.

[0037] For convenience, in FIG. 10, only one movement path 13 is illustrated, but the processing unit 41 performs a process of inspecting the workpiece 200 by the inspection unit 20 for all the movement paths 13. Also, the processing unit 51 performs a process of acquiring the inspection image 21 for all the movement paths 13.

[0038] Also, as shown in FIG. 11, in each of the robots 10a, 10b, and 10c, the inspection range 22 of the inspection unit 20 is set such that a part thereof overlaps between the adjacent movement paths 13. That is, the inspection range 22 of the inspection unit 20 for a certain movement path 13 and the inspection range 22 of the inspection unit 20 for a movement path 13 adjacent to a certain movement path 13 partially overlap. Thereby, it is possible to suppress the occurrence of inspection omission. Note that the inspection range 22 is an imaging range when scanning and imaging along the movement path 13.

[0039] Also, in the present embodiment, as shown in FIG. 12, the inspection ranges of the inspection unit 20 arranged in each of the robots 10a, 10b, and 10c with respect to the workpiece 200 overlap with each other. Specifically, the inspection range A of the robot 10a for inspecting the first surface 200a of the workpiece 200 and the inspection range B of the robot 10b for inspecting the second surface 200b overlap with each other. Also, the overlapping inspection ranges are in the vicinity of the boundary between the first surface 200a and the second surface 200b. Similarly, the inspection range A of the robot 10a for inspecting the first surface 200a of the workpiece 200 and the inspection range C of the robot 10c for inspecting the third surface 200c overlap with each other. Also, the overlapping inspection ranges are in the vicinity of the boundary between the first surface 200a and the third surface 200c. Note that in FIG. 12, for simplicity of explanation, the first surface 200a, the second surface 200b, and the third surface 200c are shown as planes.

[0040] Also, as shown in FIG. 2, workpieces 200A, 200B, and 200C are placed on the turntable 210. The workpieces 200A, 200B, and 200C are the same workpiece. In this embodiment, one of the plurality of robots 10 inspects one surface of one workpiece 200 placed on the turntable 210, and another one of the plurality of robots 10 inspects another surface different from the one surface of the other workpiece 200 placed on the turntable 210. Specifically, the robot 10a inspects the first surface 200a of the workpiece 200A placed on the turntable 210. The robots 10b and 10c inspect the second surface 200b and the third surface 200c of the workpiece 200B placed on the turntable 210, respectively. When the turntable 210 is rotated so that the workpiece 200A is disposed in front of the robot 10a and the workpiece 200B is disposed in front of the robots 10b and 10c, the robots 10a, 10b, and 10c start the inspection. And, for example, if the inspection by the robot 10a ends first, the robot 10a waits until the inspections by the robots 10b and 10c end.

[0041] And, in this embodiment, after the inspection of the workpiece 200A by the robot 10a and the inspection of the workpiece 200B by the robots 10b and 10c are completed, the processing unit 41 of the robot controller 40 performs a process of rotating the turntable 210. Thereby, the workpiece 200B is disposed in front of the robot 10a, and the workpiece 200C that has not been inspected is disposed in front of the robots 10b and 10c. Then, the robots 10b and 10c inspect the second surface 200b and the third surface 200c of the workpiece 200C that has not been inspected, respectively. Also, the robot 10a inspects the first surface 200a of the workpiece 200B for which the inspections by the robots 10b and 10c have ended.

[0042] In step S4 shown in FIG. 4, as shown in FIG. 13, the processing unit 51 of the image processing apparatus 50 performs a process of detecting the target 201 of the workpiece 200 in the plurality of inspection images 21 acquired by the inspection units 20 of the plurality of robots 10. Further, the processing unit 51 performs a process of detecting the target 201 in all the inspection images 21 acquired by the inspection units 20 of the robot 10a, the robot 10b, and the robot 10c. Further, the processing unit 51 performs a process of detecting the target 201 in the inspection image 21 by performing predetermined image processing on the inspection image 21. In the present embodiment, the target 201 is, for example, a defect such as a scratch, a foreign object, or a dent.

[0043] As shown in FIG. 13, the inspection coordinate system of the inspection image 21 is a two-dimensional coordinate system in which the direction along the movement path 13 is the Y-axis direction and the direction orthogonal to the movement path 13 is the X-axis direction. The processing unit 51 performs a process of acquiring the coordinate values of the inspection coordinate system of the target 201. That is, the processing unit 51 performs a process of acquiring the coordinate values of the X-axis and the Y-axis of the inspection coordinate system of the target 201. Further, the processing unit 51 performs a process of acquiring the coordinate values of the inspection coordinate system of the target 201 for all the inspection images 21 in which the target 201 is detected. Further, the processing unit 51 performs a process of storing the inspection image 21, the number of the movement path 13 corresponding to the inspection image 21, and the coordinate values of the inspection coordinate system of the target 201 in the storage unit 52. Further, the processing unit 51 performs a process of outputting the number of the movement path 13 corresponding to the inspection image 21 and the coordinate values of the inspection coordinate system of the target 201 to the processing unit 41 of the robot controller 40 and the processing unit 61 of the result display device 60.

[0044] In step S5 shown in FIG. 4, as shown in FIG. 14, the processing unit 41 of the robot controller 40 performs a process of converting the coordinate value in the inspection coordinate system of the object 201 into the coordinate value in the robot coordinate system based on the coordinate conversion information 71. Also, in step S5, the processing unit 61 of the result display device 60 performs a process of converting the coordinate value in the inspection coordinate system of the object 201 into the coordinate value in the work coordinate system based on the coordinate conversion information 72. First, the process of the processing unit 41 will be described. The following process of the processing unit 41 is performed by the processing unit 41 of each of the robot controllers 40 of the robots 10a, 10b, and 10c.

[0045] As shown in FIG. 14, the processing unit 41 performs a process of specifying the number of the movement path 13 in the coordinate conversion information 71 based on the number of the movement path 13 corresponding to the inspection image 21. Then, the processing unit 41 performs a process of acquiring the movement amount of the robot 10 in the coordinate conversion information 71 corresponding to the coordinate value in the inspection coordinate system in the Y-axis direction along the movement path 13 of the object 201 at the specified number of the movement path 13. At this time, the processing unit 41 performs a process of acquiring, as the movement amount of the corresponding robot 10, the movement amount of the robot 10 closest to the coordinate value in the inspection coordinate system in the Y-axis direction of the object 201. Then, the processing unit 41 performs a process of acquiring the coordinate value in the robot coordinate system of the coordinate conversion information 71 corresponding to the acquired movement amount of the robot 10 in the coordinate conversion information 71. Thus, the coordinate value in the robot coordinate system corresponding to the coordinate value in the inspection coordinate system in the Y-axis direction of the object 201 is acquired.

[0046] On the one hand, the coordinate values in the robot coordinate system of the obtained coordinate conversion information 71 do not reflect the coordinate values in the inspection coordinate system in the X-axis direction of the target 201 and include a deviation corresponding thereto. Therefore, the processing unit 41 performs processing to correct the coordinate values in the robot coordinate system of the obtained coordinate conversion information 71 based on the coordinate values in the inspection coordinate system in the X-axis direction orthogonal to the movement path 13 of the target 201. At this time, the processing unit 41 performs processing to add the coordinate values in the inspection coordinate system in the X-axis direction of the target 201 and correct the coordinate values in the robot coordinate system of the coordinate conversion information 71. Thereby, the processing unit 41 performs processing to obtain the coordinate values in the robot coordinate system of the target 201. Further, the processing unit 41 performs processing to convert the coordinate values for all the targets 201 and obtain the coordinate values in the robot coordinate system.

[0047] For example, in the example shown in FIG. 14, the number of the movement path 13 corresponding to the inspection image 21 is 2, the coordinate value in the X-axis direction of the target 201 is 5.5, and the coordinate value in the Y-axis direction of the target 201 is 15.2. In this case, the processing unit 41 performs processing to specify 2 as the number of the movement path 13. Then, the processing unit 41 performs processing to obtain 15 as the movement amount of the robot 10 closest to the coordinate value 15.2 in the Y-axis direction of the target 201 at the specified number 2. Then, the processing unit 41 performs processing to obtain (xr, yr, zr, or, ar, tr) as the coordinate values in the robot coordinate system corresponding to the movement amount 15 of the robot 10. Then, the processing unit 41 performs processing to add the coordinate value 5.5 in the X-axis direction of the target 201 to the coordinate values (xr, yr, zr, or, ar, tr) in the robot coordinate system and obtain the coordinate values in the robot coordinate system of the target 201.

[0048] The processing of the processing unit 41 of the robot controller 40 has been described above. Except for the use of the coordinate conversion information 72, the processing of the processing unit 61 of the result display device 60 is the same. Also, the following processing of the processing unit 61 of the result display device 60 is executed for a plurality of inspection images 21 acquired by the inspection units 20 of each of the robots 10a, 10b, and 10c. Specifically, the processing unit 61 performs a process of specifying the number of the movement path 13 in the coordinate conversion information 72 based on the number of the movement path 13 corresponding to the inspection image 21. Then, the processing unit 61 performs a process of acquiring the movement amount of the robot 10 in the coordinate conversion information 72 corresponding to the coordinate value in the inspection coordinate system in the Y-axis direction along the movement path 13 of the object 201 at the specified number of the movement path 13. At this time, the processing unit 61 performs a process of acquiring, as the movement amount of the corresponding robot 10, the movement amount of the robot 10 closest to the coordinate value in the inspection coordinate system in the Y-axis direction of the object 201. Then, the processing unit 61 performs a process of acquiring the coordinate value in the work coordinate system of the coordinate conversion information 72 corresponding to the acquired movement amount of the robot 10. Thus, the coordinate value in the work coordinate system corresponding to the coordinate value in the inspection coordinate system in the Y-axis direction of the object 201 is acquired.

[0049] On the other hand, the coordinate value in the work coordinate system of the acquired coordinate conversion information 72 does not reflect the coordinate value in the inspection coordinate system in the X-axis direction of the object 201 and includes a deviation corresponding thereto. Therefore, the processing unit 61 performs a process of correcting the coordinate value in the work coordinate system of the acquired coordinate conversion information 72 based on the coordinate value in the inspection coordinate system in the X-axis direction orthogonal to the movement path 13 of the object 201. At this time, the processing unit 61 performs a process of adding the coordinate value in the inspection coordinate system in the X-axis direction of the object 201 to correct the coordinate value in the work coordinate system of the coordinate conversion information 72. Thus, the processing unit 61 performs a process of acquiring the coordinate value in the work coordinate system of the object 201. Also, the processing unit 61 performs a process of converting the coordinate values for all the objects 201 to acquire the coordinate values in the work coordinate system.

[0050] In step S6 shown in FIG. 4, in the present embodiment, the processing unit 61 of the result display device 60 integrates the positions of the objects 201 detected from the plurality of inspection images 21 acquired by the inspection units 20 of the robot 10a, the robot 10b, and the robot 10c as the data 62a shown in FIG. 3. Specifically, the processing unit 61 integrates the coordinate values of the objects 201 in the workpiece coordinate system acquired from the plurality of inspection images 21 acquired by the inspection units 20 of the robot 10a, the robot 10b, and the robot 10c into one three-dimensional data 62a. The integrated data 62a is stored, for example, in one file. Further, the storage unit 62 of the result display device 60 stores the integrated data 62a.

[0051] Also, in the present embodiment, when the positions of the objects 201 detected from the plurality of inspection images 21 acquired by the inspection units 20 of the robot 10a, the robot 10b, and the robot 10c are the same, the processing unit 61 of the result display device 60 performs a process of treating the objects 201 with the same position as the same object 201. As described above, the inspection range A of the robot 10a and the inspection range B of the robot 10b overlap each other. For this reason, the same object 201 may be detected by both the inspection unit 20 of the robot 10a and the inspection unit 20 of the robot 10b. In this case, since the coordinate values of the object 201 in the workpiece coordinate system detected by the inspection unit 20 of the robot 10a and the coordinate values of the object 201 in the workpiece coordinate system detected by the inspection unit 20 of the robot 10b are the same, the processing unit 61 of the result display device 60 treats the objects 201 with the same coordinate values in the workpiece coordinate system as the same object 201. In practical use, even if the coordinate values of the plurality of objects 201 in the workpiece coordinate system are different from each other, if the difference in the coordinate values is equal to or less than a predetermined threshold value, the processing unit 61 treats them as the same object 201. Then, the coordinate values of the workpiece coordinate system of one object 201 treated as the same object 201 are stored in the storage unit 62.

[0052] In step S7 shown in FIG. 4, as shown in FIG. 15, the processing unit 61 of the result display device 60 performs processing to display the object 201 detected from the plurality of inspection images 21 acquired by each of the inspection units 20 of the robots 10a, 10b, and 10c on the three-dimensional image of the workpiece 200. Specifically, the processing unit 61 of the result display device 60 performs processing to indicate the position of the object 201 on the three-dimensional image of the workpiece 200 based on the coordinate values of the object 201 converted into the coordinate values in the workpiece coordinate system. That is, the processing unit 61 performs processing to superimpose an image indicating the position of the object 201 on the three-dimensional image of the workpiece 200. Then, the processing unit 61 performs processing to display on the display unit 63 the three-dimensional image of the workpiece 200 with the image indicating the position of the object 201 superimposed thereon. Note that the three-dimensional image of the workpiece 200 with the image indicating the position of the object 201 superimposed thereon can be enlarged, reduced, or rotated based on a user operation using the operation unit 64.

[0053] In step S8 shown in FIG. 4, as shown in FIG. 16, the processing unit 41 of the robot controller 40 performs processing to indicate the position of the object 201 on the actual workpiece 200 based on the coordinate values of the converted three-dimensional coordinate system of the object 201. Specifically, the processing unit 41 operates the robot 10 based on the coordinate values of the object 201 converted into the coordinate values in the robot coordinate system, and performs processing to indicate the position of the object 201 on the actual workpiece 200 by the indicating unit 30. That is, the processing unit 41 operates the robot 10 and performs processing to move the indicating unit 30 to a predetermined position where the position of the object 201 can be indicated. Then, with the indicating unit 30 arranged at the predetermined position, the processing unit 41 irradiates laser light from the indicating unit 30 and performs processing to indicate the position of the object 201 on the actual workpiece 200. Note that in FIG. 16, a state where laser light is irradiated on the third surface 200c of the workpiece 200 by one robot 10c is shown, but the robots 10a and 10b can similarly irradiate laser light on the workpiece 200.

[0054] (Effect of this embodiment) The inspection system 100 includes a processing unit 61 that performs a process of integrating, as data 62a, the positions of the objects 201 detected from a plurality of inspection images 21 acquired from the inspection units 20 disposed in each of the plurality of robots 10. As a result, since the positions of the objects 201 of the workpiece 200 inspected by the plurality of robots 10 are integrated as the data 62a, for example, by referring to this integrated data 62a once from another computer or the like, the positions of all the objects 201 of the workpiece 200 can be referred to. Consequently, even when the workpiece 200 is inspected by the plurality of robots 10, the handling of the data 62a of the objects 201 of the workpiece 200 can be facilitated.

[0055] The object 201 includes a defect of the workpiece 200. As a result, since the positions of the defects of the workpiece 200 inspected by the plurality of robots 10 are integrated as the data 62a, the handling of the data 62a of the defects of the workpiece 200 can be facilitated.

[0056] The inspection ranges of the inspection units 20 disposed in each of the plurality of robots 10 with respect to the workpiece 200 overlap each other. As a result, since the occurrence of regions that do not become inspection ranges on the surface of the workpiece 200 is suppressed, the occurrence of inspection omissions can be suppressed.

[0057] When the positions of the objects 201 detected from the plurality of inspection images 21 are the same, the processing unit 51 performs a process of handling the objects 201 with the same position as the same object 201. As a result, it is possible to suppress the objects 201 from being dataized as different objects 201 despite being the same object 201.

[0058] The plurality of robots 10 inspect different surfaces of the workpiece 200. As a result, since a relatively large range of the workpiece 200 is inspected by the plurality of robots 10, even when the workpiece 200 is relatively large, the workpiece 200 can be easily inspected.

[0059] The inspection system 100 includes a turntable 210 on which a plurality of workpieces 200 are placed and which rotates the placed workpieces 200. One of the plurality of robots 10 inspects one surface of one workpiece 200 placed on the turntable 210, and another one of the plurality of robots 10 inspects another surface different from the one surface of another workpiece 200 placed on the turntable 210. Thus, by moving the workpiece 200 by the turntable 210 without moving the robot 10, the same workpiece 200 can be inspected by a plurality of robots 10. Also, since the workpiece 200 is rotated by the turntable 210, the arrangement area of the system for moving the workpiece 200 can be made smaller than in the case where the workpiece 200 is moved linearly by a conveyor or the like.

[0060] The workpiece 200 placed on the turntable 210 includes a first surface 200a, a second surface 200b intersecting the first surface 200a, and a third surface 200c intersecting the first surface 200a and facing the second surface 200b. The plurality of robots 10 include a robot 10a for inspecting the first surface 200a, a robot 10b for inspecting the second surface 200b, and a robot 10c for inspecting the third surface 200c. Thus, the time required for inspection can be shortened as compared with the case where all of the first surface 200a, the second surface 200b, and the third surface 200c are inspected by one robot 10.

[0061] After the inspection of the workpiece 200 by the robots 10a, 10b, and 10c is completed, the processing unit 41 of the robot controller 40 performs a process of rotating the turntable 210. The robots 10b and 10c respectively inspect the second surface 200b and the third surface 200c of the workpiece 200 that has not been inspected, and the robot 10a inspects the first surface 200a of the workpiece 200 for which the inspection by the robots 10b and 10c has been completed. Thus, since the inspection of the workpiece 200 is performed by a flow operation by the robots 10a, 10b, and 10c, the time required for inspecting the workpiece 200 can be further shortened.

[0062] The processing unit 61 performs processing to display the object 201 detected from the plurality of inspection images 21 on the image of the workpiece 200. Thereby, the user can easily confirm the position of the object 201 by visually recognizing the image of the workpiece 200.

[0063] The inspection system 100 includes a storage unit 62 that stores data 62a in which the positions of the objects 201 detected from the plurality of inspection images 21 are integrated. Thereby, even when a period has elapsed after the inspection of the workpiece 200 is completed, the position of the object 201 can be confirmed by referring to the data 62a stored in the storage unit 62. Further, the data 62a stored in the storage unit 62 can be referred to from a server or the like separate from the inspection system 100.

[0064] The processing unit 61 performs processing to integrate the positions of the objects 201 detected from the plurality of inspection images 21 as three-dimensional data 62a. Thereby, when the workpiece 200 is three-dimensional, the positions of the objects 201 can be easily integrated. Further, unlike the case where the detected position of the object 201 is projected onto a two-dimensional plane and the position of the object 201 is obtained as a position on the two-dimensional plane, the position of the object 201 can be obtained more accurately in the three-dimensional workpiece 200.

[0065] (Modification example) It should be considered that the embodiments disclosed this time are illustrative in all respects and not restrictive. The scope of the present disclosure is shown not by the description of the above-described embodiments but by the scope of the claims, and further includes all changes (modification examples) within the meaning and scope equivalent to the scope of the claims.

[0066] For example, in the above embodiment, an example where the inspection system is a visual inspection system for inspecting the appearance of a workpiece is shown, but the present disclosure is not limited thereto. In the present disclosure, the inspection system may be an inspection system for inspecting the inside of a workpiece. In this case, the inspection unit may be an ultrasonic flaw detection unit that inspects the workpiece by transmitting ultrasonic waves into the workpiece and receiving the ultrasonic waves reflected inside the workpiece. By using the ultrasonic flaw detection unit, it is possible to detect objects such as defects inside the workpiece.

[0067] Also, in the above embodiment, an example where the robot is a vertically articulated robot is shown, but the present disclosure is not limited thereto. In the present disclosure, the robot may be an industrial robot other than a vertically articulated robot.

[0068] Also, in the above embodiment, an example where the robot moves the imaging unit to relatively move the inspection unit with respect to the workpiece is shown, but the present disclosure is not limited thereto. In the present disclosure, the robot may relatively move the inspection unit with respect to the workpiece by moving the workpiece.

[0069] Also, in the above embodiment, an example where the processing unit of the robot controller, the processing unit of the image processing apparatus, and the processing unit of the result display apparatus share and perform various processes is shown, but the present disclosure is not limited thereto. In the present disclosure, the number and configuration of the processing units are not particularly limited. One processing unit may perform various processes of the above embodiment, or a plurality of processing units may perform various processes of the above embodiment. Also, the configuration of the storage unit is not limited. Also, the configurations of the robot controller, the image processing apparatus, and the result display apparatus are not limited. The robot controller, the image processing apparatus, and the result display apparatus may have an integrated configuration, or may have separate configurations as in the above embodiment. Also, the robot controller, the image processing apparatus, and the result display apparatus may have an even more separated configuration. For example, an operating device for operating the result display apparatus may be provided separately from the result display apparatus.

[0070] In the above-described embodiment, an example where the target is a defect of the workpiece is shown, but the present disclosure is not limited thereto. For example, the target may be other than a defect of the workpiece. For example, the target may be a teaching point of the operation of the robot, an inspection path along which the inspection unit moves, an inspectable area of the inspection unit, or the like.

[0071] In the above-described embodiment, an example where the inspection ranges of the inspection units arranged on each of the plurality of robots with respect to the workpiece overlap with each other is shown, but the present disclosure is not limited thereto. For example, the inspection ranges of the inspection units arranged on each of the plurality of robots with respect to the workpiece may not overlap with each other. Thereby, it is possible to suppress different inspection units from redundantly detecting the same target.

[0072] In the above-described embodiment, an example where the processing unit performs processing of treating targets having the same position as the same target when the positions of the targets detected from a plurality of inspection images are the same is shown, but the present disclosure is not limited thereto. For example, even if the positions of the targets are the same, the processing unit may treat them as separate targets. Then, when the processing unit displays the positions of the targets on the display unit, the processing unit may display that the positions of these targets are the same. Thereby, it is possible to suppress the situation where targets that are not the same but have substantially the same position are treated as the same target.

[0073] In the above-described embodiment, an example where three robots each inspect surfaces that intersect each other is shown, but the present disclosure is not limited thereto. For example, a plurality of robots may share the inspection of a relatively large flat surface or a relatively large curved surface along a horizontal plane.

[0074] In the above embodiment, an example where a plurality of workpieces are placed on a turntable was shown, but the present disclosure is not limited to this. For example, a plurality of workpieces may be placed on a workpiece transfer device such as a conveyor. In this case, a plurality of robots are arranged along the conveyor. Also, in the above embodiment, for example, when the inspection by robot 10a is completed first, an example where robot 10a waits until the inspections by robots 10b and 10c are completed was shown. However, when a plurality of workpieces are arranged on a conveyor, robot 10a may start inspecting the next workpiece 200 without waiting for the inspections by robots 10b and 10c to end.

[0075] Also, in the above embodiment, an example where three robots are arranged for inspecting workpieces was shown, but the present disclosure is not limited to this. For example, a plurality of robots other than three may be arranged for inspecting workpieces.

[0076] Also, in the above embodiment, an example where the processing unit performs processing of superimposing and displaying the object detected from a plurality of inspection images on the image of the workpiece displayed on the display unit was shown, but the present disclosure is not limited to this. For example, the object detected by the processing unit may be superimposed on the image of the workpiece and printed out on a paper medium.

[0077] Also, in the above embodiment, an example where both the process of indicating the position of the object on the actual workpiece and the process of indicating the position of the object on the three-dimensional image of the workpiece are performed was shown, but the present disclosure is not limited to this. In the present disclosure, only one of the process of indicating the position of the object on the actual workpiece and the process of indicating the position of the object on the three-dimensional image of the workpiece may be performed.

[0078] Also, in the above embodiment, an example where the processing unit performs processing of displaying the object on the three-dimensional image of the workpiece was shown, but the present disclosure is not limited to this. For example, the processing unit may perform processing of displaying on the display unit information about which robot detected the object together with the object.

[0079] In the above-described embodiment, an example in which the positions of the objects detected from a plurality of inspection images are integrated as data has been shown. However, the present disclosure is not limited to this. For example, when a process such as painting is performed on a workpiece by a plurality of robots, information regarding which robot processed the region where the detected object exists may be linked to the position of the object and integrated as data.

[0080] In the above-described embodiment, an example in which the processing unit performs processing to integrate the positions of the objects detected from a plurality of inspection images as three-dimensional data has been shown. However, the present disclosure is not limited to this. For example, when inspecting the surface of a flat workpiece by a plurality of robots, the positions of the detected objects are integrated as two-dimensional data.

[0081] In the above-described embodiment, an example in which the workpieces 200A, 200B, and 200C are the same workpiece has been shown. However, the present disclosure is not limited to this. For example, the workpieces 200A, 200B, and 200C may be different from each other. Also, the workpieces 200A, 200B, and 200C may be of the same variety, or may be of different varieties from each other.

[0082] In the above-described embodiment, as shown in FIG. 16, an example in which a laser beam is irradiated onto the position of the object 201 of the actual workpiece 200 by the robot 10c that inspected the workpiece 200 has been shown. However, the present disclosure is not limited to this. For example, a laser beam may be irradiated onto the position of the object 201 of the workpiece 200 by a robot used in a process after the inspection process of the workpiece 200.

[0083] In the above-described embodiment, an example in which one of the plurality of robots 10 inspects one surface of one workpiece 200 placed on the turntable 210, and another robot 10 among the plurality of robots 10 inspects another surface different from the one surface of another workpiece 200 placed on the turntable 210 has been shown. However, the present disclosure is not limited to this. For example, the same surface of the workpiece 200 may be inspected by the plurality of robots 10.

[0084] The functions of the elements disclosed in this specification can be executed using a circuit or processing circuit including a general-purpose processor, a dedicated processor, an integrated circuit, an ASIC (Application Specific Integrated Circuits), a conventional circuit, and / or a combination thereof that is configured or programmed to execute the disclosed functions. Since a processor includes transistors and other circuits, it is regarded as a processing circuit or a circuit. In the present disclosure, a circuit, a unit, or a means is either hardware that executes the recited functions or hardware that is programmed to execute the recited functions. The hardware may be the hardware disclosed in this specification or other known hardware that is programmed or configured to execute the recited functions. When the hardware is a processor considered to be a type of circuit, the circuit, means, or unit is a combination of hardware and software, and the software is used for configuring the hardware and / or the processor.

[0085] [Aspect] The above-described embodiments are specific examples of the following aspects.

[0086] (Aspect 1) A plurality of robots, An inspection unit disposed on each of the plurality of robots for inspecting a workpiece, A process of obtaining inspection images of a plurality of the workpieces from each of the inspection units by relatively moving the inspection unit disposed on each of the plurality of robots with respect to the workpiece to inspect the workpiece, A process of detecting an object of the workpiece in a plurality of the inspection images, A processing unit that performs a process of integrating the positions of the detected objects from a plurality of the inspection images as data, and an inspection system.

[0087] (Aspect 2) The inspection system according to Aspect 1, wherein the object includes a defect of the workpiece.

[0088] (Aspect 3) The inspection range of the inspection unit disposed on each of the plurality of robots with respect to the workpiece overlaps with each other. The inspection system according to Aspect 1 or Aspect 2.

[0089] (Aspect 4) When the positions of the objects detected from the plurality of inspection images are the same, the processing unit performs processing to handle the objects with the same position as the same object. The inspection system according to any one of Aspects 1 to 3.

[0090] (Aspect 5) The plurality of robots inspect different surfaces of the workpiece. The inspection system according to any one of Aspects 1 to 4.

[0091] (Aspect 6) Comprising a workpiece transfer device on which a plurality of the workpieces are placed and which transfers the placed workpieces. One of the plurality of robots inspects one surface of one workpiece placed on the workpiece transfer device. Another one of the plurality of robots inspects another surface different from the one surface of another workpiece placed on the workpiece transfer device. The inspection system according to Aspect 5.

[0092] (Aspect 7) The workpiece transfer device includes a turntable that rotates the placed workpiece. The inspection system according to Aspect 6.

[0093] (Aspect 8) The workpiece placed on the turntable has a first surface, a second surface intersecting the first surface, and a third surface intersecting the first surface and facing the second surface. The plurality of robots include a first robot that inspects the first surface, A second robot for inspecting the second surface, A third robot for inspecting the third surface, and the inspection system according to aspect 7.

[0094] (Aspect 9) The processing unit After the inspection of the workpiece is completed by the first robot, the second robot, and the third robot, performs a process of rotating the turntable. The second robot and the third robot each inspect the second surface and the third surface of a workpiece on which inspection has not been performed. The first robot inspects the first surface of the workpiece on which the inspection by the second robot and the third robot has been completed. The inspection system according to aspect 8.

[0095] (Aspect 10) The processing unit performs a process of displaying the object detected from the plurality of inspection images on the image of the workpiece. The inspection system according to any one of aspects 1 to 9.

[0096] (Aspect 11) The inspection system according to any one of aspects 1 to 10, comprising a storage unit that stores the data in which the positions of the objects detected from the plurality of inspection images are integrated.

[0097] (Aspect 12) The processing unit performs a process of integrating the positions of the objects detected from the plurality of inspection images as three-dimensional data. The inspection system according to any one of aspects 1 to 11.

[0098] (Aspect 13) By relatively moving inspection units respectively arranged on each of a plurality of robots with respect to a workpiece to inspect the workpiece, obtaining inspection images of the plurality of workpieces from each of the inspection units, Detecting an object of the workpiece in the plurality of inspection images, An inspection method comprising integrating, as data, the positions of the object detected from the plurality of inspection images.

Explanation of Signs

[0099] 10 Robot 10a Robot (First Robot) 10b Robot (Second Robot) 10c Robot (Third Robot) 20 Inspection Unit 21 Inspection Image 41 Processing Unit 51 Processing Unit 61 Processing Unit 62 Storage Unit 100 Inspection System 200 Workpiece 200a First Surface 200b Second Surface 200c Third Surface 210 Turntable (Workpiece Transfer Device) A, B, C Inspection Ranges

Claims

1. A plurality of robots, An inspection unit disposed on each of the plurality of robots for inspecting a workpiece, A process of obtaining inspection images of a plurality of the workpieces from each of the inspection units by relatively moving the inspection unit disposed on each of the plurality of robots with respect to the workpiece to inspect the workpiece, A process of detecting an object of the workpiece in a plurality of the inspection images, A process of integrating, as data, the positions of the objects detected from a plurality of the inspection images, and a processing unit for performing the processes, an inspection system.

2. The inspection system according to claim 1, wherein the object includes a defect of the workpiece.

3. The inspection system according to claim 1, wherein inspection ranges of the inspection units disposed on each of the plurality of robots with respect to the workpiece overlap with each other.

4. The inspection system according to claim 1, wherein the processing unit performs a process of treating objects having the same position as the same object when the positions of the objects detected from a plurality of the inspection images are the same.

5. The inspection system according to claim 1, wherein the plurality of robots inspect different surfaces of the workpiece.

6. A workpiece transfer device on which a plurality of the workpieces are placed and which transfers the placed workpieces, One of the plurality of robots inspects one surface of one workpiece placed on the workpiece transfer device, The inspection system according to claim 5, wherein another one of the plurality of robots inspects another surface different from the one surface of another workpiece placed on the workpiece transfer device.

7. The inspection system according to claim 6, wherein the workpiece transfer device includes a turntable that rotates the placed workpiece.

8. The workpiece placed on the turntable has A first surface, A second surface intersecting the first surface, A third surface intersecting the first surface and facing the second surface, and the plurality of robots include A first robot for inspecting the first surface, A second robot for inspecting the second surface, A third robot for inspecting the third surface, the inspection system according to claim 7.

9. After the inspection of the workpiece is completed by the first robot, the second robot, and the third robot, the processing unit performs a process of rotating the turntable. ​ ​ The second robot and the third robot each inspect the second surface and the third surface of the workpiece that has not been inspected. The inspection system according to claim 8, wherein the first robot inspects the first surface of the workpiece for which the inspection by the second robot and the third robot has been completed.

10. The inspection system according to claim 1, wherein the processing unit performs processing to display the object detected from the plurality of inspection images on the image of the workpiece.

11. The inspection system according to claim 1, further comprising a storage unit that stores the data in which the positions of the objects detected from the plurality of inspection images are integrated.

12. The inspection system according to claim 1, wherein the processing unit performs processing to integrate the positions of the objects detected from the plurality of inspection images as three-dimensional data.

13. By relatively moving inspection units respectively arranged on each of a plurality of robots with respect to a workpiece to inspect the workpiece, acquiring a plurality of inspection images of the workpiece from each of the inspection units; detecting an object of the workpiece in the plurality of inspection images; and integrating the positions of the objects detected from the plurality of inspection images as data, the inspection method comprising:

Images