Optical device and processing apparatus
The optical device addresses the challenge of precise light beam control in processing devices by using swingable reflecting surfaces in the optical device, allowing for independent control of light beam angle and position, thereby improving processing accuracy and efficiency.
JP2025081768APending Publication Date: 2025-05-27NIKON CORP
Patent Information
- Application Number
- JP2025034916
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2025-03-05
- Publication Date
- 2025-05-27
Smart Images
Figure 2025081768000001_ABST
Abstract
To provide an optical device capable of easily controlling the incident angle of a laser beam onto a processing object.SOLUTION: An optical device 1 includes: a first optical system 11 that guides light in a first region on first surfaces P1a, P1b to second surfaces P2a, P2b, with the second surfaces serving as pupil surfaces relative to the first surfaces; a second optical system 12 that is disposed between the second surfaces and a third surface P3, with the second surfaces serving as pupil surfaces relative to the third surface; a first reflective member 14 that is disposed on a first optical path on the incident side of the first optical system, and has a first reflective surface that is provided in a swingable manner; and a second reflective member 16 that is disposed on a second optical path between the first optical system and the second optical system, and has a second reflective surface that is provided in a swingable manner.SELECTED DRAWING: Figure 1
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Citation Information
Patent Citations
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