Component mounting machine and component mounting method

Abstract

To use a single fixed focus camera to execute correction of inclination caused by the vertical drive of a head block holding a plurality of mounting heads and vertical drive of the mounting head.SOLUTION: Measurement data (Fig. 8B) is acquired showing a relation between a combination of a drive amount Dz and a drive amount Dhz and a positional deviation amount (dX, dY) about a plurality of different combinations by measuring the positional deviation amount (dX, dY) of a jig nozzle in a horizontal direction (an X direction, a Y direction) when the drive amount Dz and the drive amount Dhz are adjusted so that the jig nozzle coincides with a focus of a component recognition camera 60 based on results of imaging of the jig nozzle attached to a lower end of a mounting head 43 from a lower side by the component recognition camera 60 (a fixed focus camera).SELECTED DRAWING: Figure 7

Description

Technical Field

[0001] This invention relates to a component mounting technology for mounting components on a substrate.

Background Art

[0002] Component mounters having a mounting head movable in the vertical direction and adsorbing components by a nozzle attached to the lower end of the mounting head and mounting them on a substrate are widely used. In such a component mounter, if the mounting head is tilted with respect to the vertical direction, the position where the component is mounted on the substrate shifts horizontally according to the driving amount of the mounting head in the vertical direction. Technologies for dealing with such problems have been proposed in Patent Documents 1 and 2. That is, in Patent Document 1, the focal length of an image sensor that images the nozzle from below is configured to be variable, and based on the horizontal position of the nozzle obtained from the result of imaging nozzles positioned at each of a plurality of different focal points, the position where the component is mounted is corrected horizontally. In Patent Document 2, two cameras that recognize the nozzle at different recognition heights are used, and the eccentricity of the nozzle is corrected based on the result of recognizing the tip of the nozzle at different recognition heights.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0004] In Patent Document 1, it is necessary to configure the focal length of the camera to be variable, and in Patent Document 2, it is necessary to use a plurality of cameras. Therefore, there has been a problem that the camera mechanism required to correct the mounting position according to the inclination of the mounting head becomes complicated and costly. Further, in a component mounter including a head block that movably holds a plurality of mounting heads in the vertical direction, the height of the nozzle at the lower end of the mounting head is controlled by driving the head block in the vertical direction and driving the mounting heads individually in the vertical direction. Therefore, both the inclination of the drive of the head block and the inclination of the drive of the mounting head become factors in the horizontal displacement of the nozzle. Therefore, it is necessary to consider such factors in order to accurately correct the horizontal position of the nozzle.

[0005] The present invention has been made in view of the above problems, and an object thereof is to enable correction for the respective inclinations of the vertical drive of a head block that holds a plurality of mounting heads each having a nozzle attached to the lower end and the vertical drive of the mounting heads using a single fixed-focus camera.

Means for Solving the Problems

[0006] The component mounter according to the present invention includes: a plurality of mounting heads to which one of a nozzle for sucking a component and a jig nozzle is attached to each lower end; a head block that movably holds each of the plurality of mounting heads in the vertical direction; an individual vertical drive unit that individually drives the mounting head in the vertical direction; a collective vertical drive unit that collectively drives the plurality of mounting heads in the vertical direction by driving the head block in the vertical direction; a horizontal drive unit that drives the mounting head in the horizontal direction; a fixed-focus camera having a fixed focus that images the jig nozzle attached to the lower end of the mounting head from below; an individual vertical drive amount that is the drive amount of the mounting head by the individual vertical drive unit, a collective vertical drive amount that is the drive amount of the head block by the collective vertical drive unit, and a horizontal drive amount that is the drive amount of the mounting head by the horizontal drive unit, for executing a mounting operation of mounting the component sucked by the nozzle on the substrate; a measurement execution unit that acquires measurement data indicating the relationship between the combination of the individual vertical drive amount and the collective vertical drive amount and the positional deviation by measuring the positional deviation in the horizontal direction when the individual vertical drive amount and the collective vertical drive amount are adjusted so that the jig nozzle coincides with the focus of the fixed-focus camera based on the result of the fixed-focus camera imaging the jig nozzle; and a correction data calculation unit that calculates correction data for correcting the positional deviation in the horizontal direction according to the individual vertical drive amount and the collective vertical drive amount based on the measurement data. The mounting control unit controls the horizontal drive amount for the mounting operation based on the individual vertical drive amount, the collective vertical drive amount, and the correction data for the mounting operation.

[0007] The component mounting method according to the present invention is a component mounting method for mounting a component adsorbed by a nozzle attached to the lower end of a mounting head on a substrate while driving a head block that movably supports each of a plurality of mounting heads vertically by a batch vertical drive amount in the vertical direction to drive the plurality of mounting heads together in the vertical direction and driving the mounting head vertically by an individual vertical drive amount. Based on the result of imaging a jig nozzle attached to the lower end of the mounting head from below with a fixed-focus camera, the positional deviation of the jig nozzle in the horizontal direction when adjusting the individual vertical drive amount and the batch vertical drive amount so that the jig nozzle coincides with the focus of the fixed-focus camera is measured, and measurement data indicating the relationship between the combination of the individual vertical drive amount and the batch vertical drive amount and the positional deviation is obtained for a plurality of different combinations. A step of calculating correction data for correcting the positional deviation in the horizontal direction based on the measurement data according to the individual vertical drive amount and the batch vertical drive amount, and based on the individual vertical drive amount, the batch vertical drive amount, and the correction data for the mounting operation of mounting the component adsorbed by the nozzle by the mounting head on the substrate, a step of controlling the horizontal drive amount for driving the mounting head in the horizontal direction for the mounting operation.

[0008] In the present invention (component mounter and component mounting method) configured as described above, while driving a head block that vertically movably supports each of a plurality of mounting heads vertically by a single vertical driving amount to drive the plurality of mounting heads vertically in a batch, the mounting head is driven vertically by an individual vertical driving amount, and a component adsorbed to a nozzle attached to the lower end of the mounting head is mounted on a substrate. Further, prior to mounting the component on the substrate, measurement data reflecting the inclination of each of the driving of the head block and the driving of the mounting head is acquired, and correction data for correcting the positional deviation is calculated based on this measurement data. Specifically, based on the result of imaging a jig nozzle attached to the lower end of the mounting head from below by a fixed-focus camera, the positional deviation of the jig nozzle in the horizontal direction when adjusting the individual vertical driving amount and the batch vertical driving amount so that the jig nozzle coincides with the focus of the fixed-focus camera is measured, and measurement data indicating the relationship between the combination of the individual vertical driving amount and the batch vertical driving amount and the positional deviation is acquired for a plurality of different combinations. Subsequently, correction data for correcting the positional deviation in the horizontal direction is calculated according to the individual vertical driving amount and the batch vertical driving amount. Then, based on the individual vertical driving amount, the batch vertical driving amount, and the correction data for the mounting operation in which the mounting head mounts the component adsorbed by the nozzle on the substrate, the horizontal driving amount for driving the mounting head in the horizontal direction for the mounting operation is controlled. In this way, it is possible to perform correction for the inclination of each of the vertical driving of the head block holding the plurality of mounting heads each having a nozzle attached to its lower end and the vertical driving of the mounting head using a single fixed-focus camera.

[0009] In addition, the mounting control unit positions the head block at a block height at which the mounting head does not interfere with the already-mounted components based on the height of the components already mounted on the substrate, and sets a batch vertical drive amount for this purpose. The mounting head that sucks the component to be mounted during the mounting operation is lowered from the head block at the block height to mount the component on the substrate, and an individual vertical drive amount is set. Based on the set individual vertical drive amount, batch vertical drive amount, and correction data, the component mounter may be configured to control the horizontal drive amount for the mounting operation. In such a configuration, the batch vertical drive amount and the individual vertical drive amount corresponding to the thickness of the already-mounted components and the components to be mounted are set respectively, and based on the correction data corresponding to these, the horizontal drive amount for the mounting operation can be controlled with high precision.

[0010] In addition, the individual vertical drive unit has a plurality of vertical drive locations, drives the mounting head individually in the vertical direction at each of the plurality of vertical drive locations, the measurement execution unit acquires measurement data for each of the plurality of vertical drive locations, the correction data calculation unit calculates correction data for each of the plurality of vertical drive locations, and the mounting control unit, based on the individual vertical drive amount and batch vertical drive amount of the mounting head at one vertical drive location where the mounting head is driven in the vertical direction during the mounting operation among the plurality of vertical drive locations, and the correction data calculated for the one vertical drive location, may configure the component mounter to control the horizontal drive amount for the mounting operation. In such a configuration, in a configuration where the mounting head can be individually driven at each of the plurality of vertical drive locations, the horizontal drive amount can be controlled with high precision regardless of the vertical drive location used for driving the mounting head during the mounting operation.

[0011] Note that various specific contents of the correction data can be assumed. For example, the correction data may be a relational expression for calculating the correction amount of the horizontal drive amount from the individual vertical drive amount and the batch vertical drive amount. Alternatively, the correction data may be a table showing the relationship between the individual vertical drive amount, the batch vertical drive amount, and the correction amount of the horizontal drive amount.

Advantages of the Invention

[0012] As described above, according to the present invention, it is possible to perform correction for each inclination of the vertical drive of the head block that holds a plurality of mounting heads each having a nozzle attached to the lower end thereof and the vertical drive of the mounting head using a single fixed-focus camera.

Brief Description of the Drawings

[0013]

Fig. 1

Fig. 2

Fig. 3

Fig. 4

Fig. 5

Fig. 6

Fig. 7

Fig. 8A

Fig. 8B

Fig. 8C

Fig. 9

Fig. 10

Embodiments for Carrying Out the Invention

[0014] FIG. 1 is a partial plan view schematically showing a component mounter according to the present invention, and FIG. 2 is a block diagram showing the electrical configuration of the component mounter shown in FIG. 1. Hereinafter, the X direction which is the horizontal direction, the Y direction which is the horizontal direction orthogonal to the X direction, and the Z direction which is the vertical direction will be appropriately shown. As shown in FIG. 2, the component mounter 1 includes a controller 100 that comprehensively controls the entire apparatus. The controller 100 has an arithmetic processing unit 110 which is a processor composed of a CPU (Central Processing Unit) and a RAM (Random Access Memory), and a storage unit 120 composed of an SSD (Solid State Drive) or an HDD (Hard Disk Drive). Further, the controller 100 has a drive control unit 130 that controls the drive system of the component mounter 1, and an imaging control unit 140 that controls the imaging system of the component mounter 1.

[0015] As shown in FIG. 1, the component mounter 1 includes a pair of conveyors 12, 12 provided on a base 11. Then, the component mounter 1 mounts components on a substrate B carried into a mounting process position (the position of the substrate B in FIG. 1) from the upstream side in the X direction (substrate conveyance direction) by the conveyor 12, and conveys the substrate B on which the component mounting has been completed from the mounting process position to the downstream side in the X direction by the conveyor 12.

[0016] In the component mounting machine 1, a pair of Y-axis rails 21, 21 extending in the Y direction, a Y-axis ball screw 22 extending in the Y direction, and a Y-axis motor My for rotationally driving the Y-axis ball screw 22 are provided. An X-axis rail 23 extending in the X direction is fixed to the nut of the Y-axis ball screw 22 while being supported by the pair of Y-axis rails 21, 21 so as to be movable in the Y direction. An X-axis ball screw 24 extending in the X direction and an X-axis motor Mx for rotationally driving the X-axis ball screw 24 are attached to the X-axis rail 23. The head unit 4 is fixed to the nut of the X-axis ball screw 24 while being supported by the X-axis rail 23 so as to be movable in the X direction. Therefore, the drive control unit 130 can rotate the Y-axis ball screw 22 by the Y-axis motor My to move the head unit 4 in the Y direction, or rotate the X-axis ball screw 24 by the X-axis motor Mx to move the head unit 4 in the X direction.

[0017] On both sides in the Y direction of the pair of conveyors 12, 12, two component supply units 28 are arranged side by side in the X direction. For each component supply unit 28, a plurality of tape feeders 281 are arranged side by side at an array pitch La in the X direction and are detachably mounted. A reel around which a tape storing chip-shaped components (chip electronic components) such as integrated circuits, transistors, and capacitors at predetermined intervals is wound is arranged on each tape feeder 281. Then, the tape feeder 281 supplies the components in the tape by intermittently feeding the tape toward the head unit 4 side.

[0018] Then, the head unit 4 mounts the components supplied by the tape feeder 281 onto the substrate B, thereby mounting the components on the substrate B. The component mounter 1 is equipped with a component recognition camera 60 installed facing upward. This component recognition camera 60 is a fixed focus camera with a fixed focal length. In contrast, the head unit 4 moves the component picked up from the tape feeder 281 into the field of view of the component recognition camera 60, and the imaging control unit 140 recognizes the position and orientation of the component based on the image captured by the component recognition camera 60 of the component (component recognition). Then, based on the result of the component recognition by the imaging control unit 140, the drive control unit 130 adjusts the position and angle of the component adsorbed by the nozzle 40 while mounting the component on the substrate B.

[0019] FIG. 3 is a partial front view schematically showing the vicinity of the lower end of an example of the mounting head, and FIG. 4 is a partial plan view schematically showing the bottom of the mounting head of FIG. 3. As shown in FIGS. 3 and 4, the head unit 4 is a rotary head unit in which a plurality of nozzles 40 are arranged in a circumferential shape. Subsequently, the configuration of the head unit 4 will be described while using FIGS. 3 and 4 in combination.

[0020] The head unit 4 has a main shaft 41 extending in the Z direction (vertical direction) and a head holder 42 supported at the lower end of the main shaft 41. The head unit 4 supports the main shaft 41 so as to be movable in the Z direction. The main shaft 41 moves up and down in the Z direction in response to the drive of an HZ-axis motor Mhz (FIG. 2) built in the head unit 4, and the head holder 42 moves up and down in the Z direction along with the main shaft 41. Further, the head holder 42 is supported by the main shaft 41 so as to be rotatable in the rotational direction N about a rotation axis Cn (virtual axis) parallel to the Z direction, and rotates by receiving the driving force of an N-axis motor Mn (FIG. 2) built in the head unit 4. This rotation axis Cn coincides with the center line of the main shaft 41.

[0021] In the examples shown in FIGS. 3 and 4, the head holder 42 supports a plurality (eight) of mounting heads 43 arranged at equal angles in a circumferential manner around the rotation axis Cn. Note that the number of mounting heads 43 is not limited to eight, and may be any appropriate number of two or more (for example, 18). Each mounting head 43 is supported so as to be movable in the Z direction with respect to the head holder 42, and is biased upward by a biasing member (not shown). When the drive control unit 130 outputs a rotation command to the N-axis motor Mn, the plurality of mounting heads 43 rotate integrally about the rotation axis Cn along with the head holder 42 that rotates upon receiving the driving force from the N-axis motor Mn. Further, a nozzle 40 is detachably attached to the lower end of each mounting head 43. That is, the head holder 42 supports a plurality (eight) of nozzles 40 arranged at equal angles in a circumferential manner around the rotation axis Cn, and these plurality of nozzles 40 rotate along a circumferential orbit O about the rotation axis Cn along with the head holder 42.

[0022] In addition, each mounting head 43 is supported so as to be rotatable in a rotation direction R about a rotation axis Cr (virtual axis) parallel to the Z direction with respect to the head holder 42, and rotates upon receiving the driving force of an R-axis motor Mr (FIG. 2) built in the head unit 4. This rotation axis Cr coincides with the center line of the mounting head 43.

[0023] Further, the main shaft 41 supports the nozzle lifting mechanism 44 above the plurality of mounting heads 43, and this nozzle lifting mechanism 44 moves up and down in the Z direction along with the main shaft 41. The nozzle lifting mechanism 44 has two pressing members 441 arranged at an angle of 180 degrees about the rotation axis Cn. Each pressing member 441 moves up and down independently of each other under the driving force of the Z-axis motor Mz (Fig. 2) built into the nozzle lifting mechanism 44. Therefore, when the drive control unit 130 outputs a lowering command to the Z-axis motor Mz, the pressing member 441 descends under the driving force from the Z-axis motor Mz. As a result, the pressing member 441 lowers one mounting head 43 located directly below among the plurality of mounting heads 43 against the biasing force acting on the mounting head 43, and lowers the nozzle 40 to the lowering position Zd where the component is adsorbed or mounted. On the other hand, when the drive control unit 130 outputs a raising command to the Z-axis motor Mz, the pressing member 441 rises under the driving force from the Z-axis motor Mz. As a result, one mounting head 43 pressed by the pressing member 441 rises along with the nozzle 40 according to the biasing force, and the nozzle 40 rises to the raising position Zu.

[0024] In such a head unit 4, directly below the pressing member 441 are the working positions PA and PB where the component is adsorbed and mounted by the nozzle 40. That is, corresponding to the arrangement of the two pressing members 441 described above, in the head unit 4, two working positions PA and PB are provided at an angle of 180 degrees about the rotation axis Cn. On the other hand, as shown in Fig. 4, in the head holder 4, four pairs of two nozzles 40 (two nozzles 40 located on opposite sides across the rotation axis Cn) arranged at intervals of 180 degrees about the rotation axis Cn are provided, and 2×4 (=8) nozzles 40 are arranged along the circumferential orbit O. In this way, the two nozzles 40 forming a pair satisfy the arrangement relationship such that when one nozzle 40 is located at the working position PA, the other nozzle 40 can be located at the working position PB at the same time.

[0025] Therefore, the drive control unit 130 adjusts the rotation angle of the plurality of nozzles 40 in the rotation direction N by the N-axis motor Mn, positions each of the two nozzles 40 that form any one of the four nozzle pairs at the working positions PA and PB, and can be used for sucking and mounting components.

[0026] For example, when sucking a component at the working position PA, the mounting head 43 is moved above the component supply unit 28 to position the working position PA directly above the tape feeder 281. In this state, while stopping the nozzle 40 that does not suck the component at the working position PA in the rotation direction N, it is lowered from the upper position Zu to the lower position Zd in the Z direction. Then, when the nozzle 40 contacts the component supplied by the tape feeder 281, negative pressure is applied to the nozzle 40 to suck the component from the tape feeder 281 to the nozzle 40. Subsequently, the nozzle 40 that has sucked the component is raised from the lower position Zd to the upper position Zu in the Z direction. The same applies when sucking a component at the working position PB. In particular, the two working positions PA and PB are provided linearly side by side in the X direction, and the center-to-center distance Lb between the two nozzles 40 that form a pair is equal to three times the arrangement pitch La in the X direction of the tape feeder 281 (Figure 1). Therefore, the two nozzles 40 located at the working positions PA and PB can simultaneously suck components from the two tape feeders 281 arranged with the two tape feeders 281 in between.

[0027] When mounting components at the working position PA, the operation shown in Fig. 5 is executed. Fig. 5 is a diagram schematically showing the operation of the head unit when mounting components. Note that the components are omitted in the notation of Fig. 5. In step S11, the drive control unit 130 controls the N-axis motor Mn to drive the head holder 42 in the rotational direction N, thereby positioning the mounting head 43 that adsorbs the component to be mounted with the nozzle 40 at the working position PA. Also, the drive control unit 130 controls the X-axis motor Mx and the Y-axis motor My to drive the head unit 4 in the X direction and the Y direction, thereby opposing the mounting head 43 at the working position PA to the mounting target position on the substrate B from above. At this time, the drive control unit 130 controls the Z-axis motor Mz to retract the pressing member 441 corresponding to each of the working positions PA and PB upward from the upper end of the mounting head 43. Therefore, all the mounting heads 43 are positioned at the ascending position Zu according to the above biasing force. Further, the drive control unit 130 controls the R-axis motor Mr to drive the mounting head 43 at the working position PA in the rotational direction R, thereby aligning the angle of the component adsorbed by the mounting head 43 with the nozzle 40 with the angle of the mounting target location.

[0028] In step S12, the drive control unit 130 controls the HZ-axis motor Mhz to drive the main shaft 41 in the Z direction, thereby lowering the head holder 42 by the driving amount Dhz. Along with the lowering of this head holder 42, the mounting head 43 and the nozzle lifting mechanism 44 held by the head holder 42 also lower by the driving amount Dhz. For example, the driving amount Dhz is set by the drive control unit 130 such that the lower ends of the nozzles 40 of all the mounting heads 43 lowered by the driving amount Dhz are positioned at a height that is a predetermined margin above the height of the components already mounted on the substrate B.

[0029] In step S13, the drive control unit 130 controls the Z-axis motor Mz to drive the mounting head 43 at the working position PA in the Z direction by the pressing member 441, thereby lowering the mounting head 43 by the drive amount Dz. As a result, the nozzle 40 of the mounting head 43 descends from the ascending position Zu to the descending position Zd. This drive amount Dz is set based on the distance from the nozzle 40 at the lower end of the mounting head 43 at the ascending position Zu held by the head holder 42, which has been lowered by the drive amount Dhz in step S12, to the substrate B, minus the thickness of the target component adsorbed by the nozzle 40.

[0030] Then, when the target component contacts the substrate B, the head unit 4 applies atmospheric pressure or positive pressure to the nozzle 40 to mount the target component from the nozzle 40 onto the substrate B. Subsequently, the nozzle 40 from which the target component has detached is raised in the Z direction from the descending position Zd to the ascending position Zu. The same applies when mounting the target component at the working position PB.

[0031] As described above, in the head unit 4, the HZ-axis motor Mhz lowers the head holder 42 along with the main shaft 41, and the Z-axis motor Mz lowers the mounting head 43, thereby lowering the nozzle 40 at the lower end of the mounting head 43 toward the substrate B. At this time, due to the inclination of the main shaft 41 in the Z direction, if the drive direction (HZ axis) of the head holder 42 by the HZ-axis motor Mhz is inclined with respect to the Z direction, the position of the nozzle 40 is displaced in the horizontal direction (X direction and Y direction) as the head holder 42 is driven by the HZ-axis motor Mhz. Similarly, due to the inclination of the mounting head 43 in the Z direction, if the drive direction (Z axis) of the mounting head 43 by the drive of the Z-axis motor Mz is inclined with respect to the Z direction, the position of the nozzle 40 is displaced in the horizontal direction (X direction and Y direction) as the mounting head 43 is driven by the Z-axis motor Mz.

[0032] FIG. 6 is a diagram schematically showing the influence of the HZ axis and the Z axis on the position in the X direction. Here, the displacement in the X direction is described as the horizontal direction, but the same applies to the Y direction. FIG. 6 shows an example in which the nozzle 40 located at the initial position Li is moved toward the target position Lt on the substrate B facing from below in the Z direction from the initial position Li.

[0033] In the column of "First driving example" in FIG. 6, the nozzle 40 is lowered by the driving amount Dhz(1) along the HZ axis inclined in the Z direction from the initial position Li, and then the nozzle 40 is further lowered by the driving amount Dz(1) along the Z axis inclined in the Z direction. At this time, since the HZ axis and the Z axis are inclined, the reached position Lr(1) actually reached by the nozzle 40 is displaced by the displacement amount dX(1) in the X direction from the target position Lt. Although there is also a displacement in the Z direction between the target position Lt and the reached position Lr(1), the influence on the component mounting is relatively small, so it is ignored here.

[0034] In the column of "Second driving example" in FIG. 6, the nozzle 40 is lowered by the driving amount Dhz(2) (different from the driving amount Dhz(1)) along the HZ axis inclined in the Z direction from the initial position Li, and then the nozzle 40 is further lowered by the driving amount Dz(2) (different from the driving amount Dh(1)) along the Z axis inclined in the Z direction. At this time, since the HZ axis and the Z axis are inclined, the reached position Lr(2) actually reached by the nozzle 40 is displaced by the displacement amount dX(2) in the X direction from the target position Lt.

[0035] In the first and second driving examples, since the combinations of the driving amount Dhz and the driving amount Dz are different, the displacement amounts dX(1) and dX(2) of the reached positions Lr(1) and Lr(2) from the target position Lt are also different. That is, the displacement amount of the position of the component mounted on the substrate B differs according to the combination of the driving amount Dhz and the driving amount Dz. Therefore, the arithmetic processing unit 110 executes a displacement measurement process for measuring the displacement amounts with respect to the combinations of the driving amount Dhz and the driving amount Dz for a plurality of different combinations.

[0036] FIG. 7 is a flowchart showing an example of displacement measurement processing. The flowchart of FIG. 7 is executed under the control of the arithmetic processing unit 110, while gradually changing the driving amount Dhz to driving amounts Dhz(1), Dhz(2),..., Dhz(n),... and adjusting the driving amount Dz so that the jig nozzle is positioned at the focus of the component recognition camera 60 at the driving amount Dhz(n), the displacement amount of the jig nozzle in the horizontal direction (X direction, Y direction) is measured. In this way, the displacement amounts (dX(n), dY(n)) with respect to the combination of the driving amount Dhz(n) and the driving amount Dz(n) are acquired (n = 1, 2, 3,...). The jig nozzle is precisely processed so that its position can be accurately recognized by the component recognition camera 60, and is different from the nozzle 40 for sucking components.

[0037] In step S101, a jig nozzle is attached to the lower end of each of the plurality of mounting heads 43 of the head unit 4. The attachment of this jig nozzle can be executed, for example, using a nozzle stocker for stocking the nozzle 40. That is, the jig nozzle is stocked in the nozzle stocker in advance, the mounting head 43 is moved to the nozzle stocker, and the jig nozzle stocked in the nozzle stocker is attached to the mounting head 43.

[0038] In step S102, the drive control unit 130 drives the head unit 4 in the X direction and the Y direction by the X-axis motor Mx and the Y-axis motor My to move the jig nozzle into the visual field of the component recognition camera 60. In step S103, the drive control unit 130 moves the head holder 42 and the mounting head 43 within a range in which the head holder 42 is movable in the rotational direction N and the mounting head 43 is movable in the rotational direction R. That is, for the purpose of prohibiting inadvertent rotation in the rotational direction N and the rotational direction R during component mounting on the substrate B, when each of the head holder 42 and the mounting head 43 is positioned at a height lower than a predetermined respective movable range, these rotations are mechanically restricted. Therefore, the drive control unit 130 moves each of the head holder 42 and the mounting head 43 to a predetermined respective movable range. As a result, the head holder 42 is positioned at the holder initial height, and the mounting head 43 is positioned at the head initial height.

[0039] In step S104, the drive control unit 130 controls the N-axis motor Mn to rotate the head holder 42 in the rotation direction N, so that the target jig nozzle, specifically the jig nozzle mounted on the mounting head 43 located at the working position PA, faces the component recognition camera 60 from above in the Z direction. In step S105, the drive control unit 130 adjusts the angle of the mounting head 43 in the rotation direction R to a predetermined measurement angle by the R-axis motor Mr. That is, in the position deviation measurement process of FIG. 7, data is acquired for each of the cases where the angle in the rotation direction R is 0 degrees, 90 degrees, 180 degrees, and 270 degrees. Therefore, the angle of the mounting head 43 is adjusted to one of the unmeasured angles among these four angles.

[0040] In step S106, the drive control unit 130 drives the head holder 42 downward by the drive amount Dhz(n) from the holder initial height by the HZ-axis motor Mhz (drive on the HZ axis). In step S107, the arithmetic processing unit 110 controls the Z-axis motor Mz by the drive control unit 130 to drive the mounting head 43 at the working position PA in the Z direction (drive on the Z axis), so that the jig nozzle mounted on the mounting head 43 is positioned at the focal height of the component recognition camera 60. The focal height of the component recognition camera 60 is obtained in advance and stored in the storage unit 120. The arithmetic processing unit 110 controls the Z-axis motor Mz by the drive control unit 130 so that the jig nozzle is positioned at the focal height read from the storage unit 120. As a result, a combination of the drive amount Dhz(n) and the drive amount Dz(n) for positioning the jig nozzle at the focal height of the component recognition camera 60 is acquired.

[0041] As described with reference to FIG. 6, due to the inclination of the HZ axis and the Z axis, the jig nozzle located at the focal height of the component recognition camera 60 is displaced in the horizontal direction (X direction and Y direction). Therefore, the arithmetic processing unit 110 measures the amount of displacement in the horizontal direction (dX(n), dY(n)) of the jig nozzle imaged by the component recognition camera 60 (step S108). Specifically, before starting steps S106 and S107, that is, in a state where the head holder 42 is located at the holder initial height and the mounting head 43 is located at the head initial height, the initial position (XY coordinates) in the horizontal direction of the jig nozzle is stored in the storage unit 120 in advance. The arithmetic processing unit 110 measures the amount of displacement by comparing the position (XY coordinates) of the jig nozzle indicated by the image of the focused jig nozzle with the initial position.

[0042] In this way, one piece of displacement data indicating the amount of displacement (dX(n), dY(n)) with respect to the combination of the driving amount Dhz(n) and the driving amount Dz(n) is acquired and stored in the storage unit 120. Also, for the same driving amount Dhz(n), four pieces of displacement data with the angle in the rotation direction R changed in four ways are acquired. That is, the arithmetic processing unit 110 changes the angle in the rotation direction R among these four angles (0 degrees, 90 degrees, 180 degrees, and 270 degrees) and executes steps S102 to S108 until displacement data is acquired for all of the above four angles in the rotation direction R (until it becomes "YES" in step S109).

[0043] Also, the arithmetic processing unit 110 changes the driving amount Dhz(n) and executes steps S102 to S109 until displacement data is acquired for all of the plurality of driving amounts Dhz(n) that are the acquisition targets of the displacement data (until it becomes "YES" in step S110).

[0044] Further, until the arithmetic processing unit 110 acquires the displacement data for all the mounting heads 43 (until "YES" in step S111), the arithmetic processing unit 110 executes steps S102 to S110 while changing the mounting head 43 located at the working position PA. Further, when the arithmetic processing unit 110 completes steps S102 to S111 for the working position PA, the arithmetic processing unit 110 executes steps S102 to S111 for the working position PB (step S112).

[0045] In this way, measurement data indicating the relationship between the combination of the driving amounts Dhz(n) and Dz(n) and the displacement amounts (dX(n), dY(n)) is acquired for a plurality of different combinations. Subsequently, the arithmetic processing unit 110 creates correction data from this measurement data.

[0046] FIG. 8A is a flowchart showing an example of creating correction data, which is executed by the arithmetic operation of the arithmetic processing unit 110. FIGS. 8B and 8C are diagrams showing the arithmetic operations executed according to the flowchart of FIG. 8A. In step S201, for the displacement amounts (dX(n), dY(n)) of the measurement data with the same driving amount Dhz(n), the average values for the above-described four angles (0 degrees, 90 degrees, 180 degrees, and 270 degrees) in the rotation direction R are respectively calculated. Thereby, the influence of the eccentricity of the mounting head 43 in the rotation direction R can be removed. In the following arithmetic operations in this flowchart, the average value is used as the displacement amount (dX(n), dY(n)).

[0047] In the subsequent steps S202 to S205, assuming the following linear relationship, dX = dX0+Aa×Dhz+Ab×Dz dY = dY0+Ac×Dhz+Ad×Dz the relational expressions of the displacement amounts (dX, dY) with respect to the driving amount Dhz and the driving amount Dz are obtained.

[0048] In step S202, the changes in the displacement amounts (dX(n), dY(n)) with respect to the driving amount Dhz(n) indicated by the measurement data are averaged for all mounting heads 43. That is, explaining in terms of the X direction, as shown in FIG. 8B, the measurement data shows the changes in the displacement amount dX(n) with respect to the driving amount Dhz(n) for each of the all mounting heads 43 (n = 1, 2, 3,...). Here, since it can be assumed that the influence of the driving amount Dhz on the displacement amount dX is common for the mounting head 43, by averaging the changes in the displacement amount dX(n) with respect to the driving amount Dhz(n) indicated by the measurement data for all mounting heads 43, the relationship between the driving amount Dhz(n) and the displacement amount dX(n) can be extracted (FIG. 8B). And in step S203, the slope of the regression line of the relationship shown in FIG. 8B is calculated as the coefficient Ab in the above formula. The coefficient Ad is calculated in the same manner for the Y direction.

[0049] In this way, when the coefficients Ab and Ad are obtained, the influence of the driving amount Dhz on the displacement amounts (dX, dY) can be calculated. Therefore, in step S204, the displacement amounts (dXh, dYh) caused by the driving amount Dhz are removed from the measurement data shown in FIG. 8B to extract the relationship between the displacement amounts (dXz, dYz) with respect to the driving amount Dz. And in step S205, the slope of the regression line obtained for the relationship extracted in step S204 is calculated as the coefficients Aa and Ac in the above formula, and the respective intercepts dX0 and dY0 are calculated.

[0050] In this way, by executing the flowchart of FIG. 8A, correction data (that is, the above formula) indicating the correction amounts (dX, dY) of the positions in the X direction and the Y direction with respect to the driving amount Dhz and the driving amount Dz is created. Note that this correction data is created for each of the plurality of mounting heads 43, and is created for each of the cases where one mounting head 43 mounts at the working position PA and the case where it mounts at the working position PB. And in the substrate production for producing the substrate with components already mounted, using this correction data, the position of the nozzle 40 for mounting the components is corrected in the horizontal direction (X direction · Y direction).

[0051] FIG. 9 is a flowchart showing an example of substrate production executed while correcting the position of the nozzle in the horizontal direction based on correction data. The flowchart of FIG. 9 is executed under the control of the arithmetic processing unit 110.

[0052] In step S301, the mounting head 43 adsorbs the target component supplied by the tape feeder 281 with the nozzle 40. In step S302, the height of the component already mounted on the substrate B and the thickness of the target component are acquired from the data regarding the component stored in the storage unit 120. In step S303, the target component adsorbed by the mounting head 43 is moved into the field of view of the component recognition camera 60, and the component recognition camera 60 recognizes the target component. Thereby, the position (XY coordinates) and the angle of the target component are recognized.

[0053] In step S304, the driving amounts Dhz and Dz required to place the target component at the mounting target location on the substrate B are calculated based on the height of the already mounted component and the thickness of the target component. This calculation method is as described above with reference to FIG. 5. In step S305, based on the driving amounts Dhz and Dz calculated in step S304 and the correction data created in FIG. 8A, the correction amounts (dX, dY) in the horizontal direction are calculated. As this correction data, correction data created for one mounting head 43 that mounts the target component among the plurality of mounting heads 43 and regarding one working position where the one mounting head 43 performs mounting among the working positions PA and PB is used.

[0054] In step S306, the head unit 4 is moved in the X direction and the Y direction while correcting the driving amounts of the head unit 4 in the X direction and the Y direction based on this correction amount (dX, dY). In step S307, the main shaft 41 is lowered by the driving amount Dhz, and then the mounting head 43 is lowered by the driving amount Dz, thereby mounting the target component adsorbed by the mounting head 43 at the mounting target location on the substrate B.

[0055] When there is a component being adsorbed by the head unit 4 (when "YES" in step S308), steps S304 to S307 are executed with the said component as the target component. When there is no component being adsorbed by the head unit 4 (when "NO" in step S308), it is determined whether the mounting of components for all the mounting target locations on the substrate B has been completed (step S309). Then, when the mounting has not been completed (when "NO" in step S309), the process returns to step S301, and when the mounting has been completed (when "YES" in step S309), the flowchart in FIG. 9 is terminated.

[0056] In the embodiment described above, while driving a head holder 42 that movably supports each of a plurality of mounting heads 43 in the Z direction (vertical direction) by a driving amount Dhz (batch vertical driving amount) to drive the plurality of mounting heads 43 in the Z direction in a batch, the mounting head 43 is driven in the Z direction by a driving amount Dz (individual vertical driving amount), and a component adsorbed by a nozzle 40 attached to the lower end of the mounting head 43 is mounted on a substrate B (FIG. 5). Further, prior to mounting the component on the substrate B, measurement data (FIG. 8B) reflecting the inclination of each of the driving of the head holder 42 and the driving of the mounting head 43 is acquired (position deviation measurement process in FIG. 7), and correction data (relational expression) for correcting the position deviation is calculated based on this measurement data (correction data creation in FIG. 8A). Specifically, based on the result of imaging a jig nozzle attached to the lower end of the mounting head 43 from below by a component recognition camera 60 (fixed-focus camera), the amount of position deviation (dX, dY) of the jig nozzle in the horizontal direction (X direction, Y direction) when adjusting the driving amount Dz and the driving amount Dhz so that the jig nozzle coincides with the focus of the component recognition camera 60 is measured, and measurement data (FIG. 8B) showing the relationship between the combination of the driving amount Dz and the driving amount Dhz and the amount of position deviation (dX, dY) is acquired for a plurality of different combinations. Subsequently, correction data (relational expression) for correcting the position deviation in the horizontal direction (X direction, Y direction) is calculated according to the driving amount Dz and the driving amount Dhz (correction data creation in FIG. 8A). Then, based on the driving amount Dz and the driving amount Dhz for the mounting operation of mounting the component adsorbed by the mounting head 43 by the nozzle 40 on the substrate B and the correction data (relational expression), the horizontal driving amount for driving the mounting head 43 in the horizontal direction (X direction, Y direction) for the mounting operation is controlled (steps S304 to S306). In this way, it is possible to perform correction for the inclination of each of the driving of the head holder 42 holding the plurality of mounting heads 43 each having a nozzle 40 attached to the lower end in the Z direction and the driving of the mounting head 43 in the Z direction using a single component recognition camera 60.

[0057] Further, the mounting control unit positions the head holder 42 at a block height (the height in the column of step S12 in FIG. 5) where the mounting head 43 does not interfere with the components already mounted on the substrate B, based on the height of the components already mounted on the substrate B, and sets a driving amount Dhz (batch vertical driving amount) for positioning. Then, the mounting head 43 that sucks the component to be mounted in the mounting operation by the nozzle 40 is lowered from the head holder 42 at the block height to set a driving amount Dz (individual vertical driving amount) for mounting the component on the substrate B (step S304). Then, based on the set driving amount Dz, driving amount Dhz, and correction data (relational expression), the horizontal driving amount for the mounting operation is controlled (step S306). With such a configuration, the driving amounts Dhz and Dz corresponding to the thicknesses of the components already mounted and the components to be mounted can be set respectively, and based on the corresponding correction data (relational expression), the horizontal driving amount for the mounting operation can be controlled with high precision.

[0058] Also, the nozzle lifting mechanism 44 (individual vertical driving unit) has a plurality of working positions PA, PB (vertical driving locations), and individually drives the mounting head 43 in the Z direction at each of the plurality of working positions PA, PB. In contrast, the arithmetic processing unit 110 (measurement execution unit) acquires measurement data for each of the plurality of working positions PA, PB (step S112), and the arithmetic processing unit 110 (correction data calculation unit) calculates correction data for each of the plurality of working positions PA, PB (correction data creation in FIG. 8A). In contrast, the arithmetic processing unit 110 controls the horizontal driving amount for the mounting operation based on the driving amount Dz and driving amount Dhz of the mounting head 43 at one working position where the mounting head 43 is driven in the vertical direction in the mounting operation among the plurality of working positions PA, PB, and the correction data calculated for the one working position PA (steps S304 to S306). With such a configuration, in a configuration where the mounting head 43 can be individually driven at each of the plurality of working positions PA, PB, the horizontal driving amount can be controlled with high precision regardless of the working positions PA, PB used for driving the mounting head 43 in the mounting operation.

[0059] As described above, in this embodiment, the component mounter 1 corresponds to an example of the "component mounter" of the present invention, the arithmetic processing unit 110 corresponds to an example of the "mounting control unit" of the present invention, the arithmetic processing unit 110 corresponds to an example of the "measurement execution unit" of the present invention, the arithmetic processing unit 110 corresponds to an example of the "correction data calculation unit" of the present invention, the nozzle 40 corresponds to an example of the "nozzle" of the present invention, the head holder 42 corresponds to an example of the "head block" of the present invention, the mounting head 43 corresponds to an example of the "mounting head" of the present invention, the component recognition camera 60 corresponds to an example of the "fixed focus camera" of the present invention, the driving amount Dz corresponds to an example of the "individual vertical driving amount" of the present invention, the driving amount Dhz corresponds to an example of the "batch vertical driving amount" of the present invention, the X-axis motor Mx and the Y-axis motor My correspond to an example of the "horizontal driving unit" of the present invention, the Z-axis motor Mz and the nozzle lifting mechanism 44 correspond to an example of the "individual vertical driving unit" of the present invention, the HZ-axis motor Mhz corresponds to an example of the "batch vertical driving unit" of the present invention, the working positions PA and PB correspond to an example of the "vertical driving location" of the present invention, and the jig nozzle corresponds to an example of the "jig nozzle" of the present invention.

[0060] Note that the present invention is not limited to the above embodiment, and various changes can be made to the above-described matters without departing from the spirit thereof. For example, the specific form of the correction data is not limited to the above relational expression, and a table shown in FIG. 10 may be used. FIG. 10 is a diagram showing an example of correction data in a table format. This table shows the correspondence between the combination of the driving amount Dhz and the driving amount Dz and the correction amounts (dX, dY) of the driving amounts for driving the head unit 4 in the X and Y directions. For example, when the driving amount Dhz is equal to or greater than the driving amount Dhz1 and less than the driving amount Dhz2, and the driving amount Dz is equal to or greater than the driving amount Dz1 and less than the driving amount Dz2, the correction amounts are (dXa, dYa).

[0061] Further, the specific configuration of the head unit 4 is not limited to the rotary head unit, and an in-line head unit in which a plurality of mounting heads 43 are arranged in a row in the X direction may also be used.

Explanation of Reference Numerals

[0062] 1... Component mounter 110… Arithmetic processing unit 40… Nozzle 42… Head holder 43… Mounted head 44… Nozzle lifting mechanism 60… Component recognition camera Dhz… Driving amount Dz… Driving amount Mhz… Equivalent HZ-axis motor Mx… X-axis motor My… Y-axis motor Mz… Z-axis motor PA… Working position PB… Working position

Claims

1. A plurality of mounting heads, one of a nozzle for sucking a component and a jig nozzle being mounted on each lower end thereof; A head block that movably holds each of the plurality of mounting heads in the vertical direction; An individual vertical drive unit that individually drives the mounting head in the vertical direction; A batch vertical drive unit that drives the plurality of mounting heads in the vertical direction in a batch by driving the head block in the vertical direction; A horizontal drive unit that drives the mounting head in the horizontal direction; A fixed-focus camera having a fixed focus, which images the jig nozzle mounted on the lower end of the mounting head from below; An individual vertical drive amount, which is a drive amount of the mounting head by the individual vertical drive unit, a batch vertical drive amount, which is a drive amount of the head block by the batch vertical drive unit, and a horizontal drive amount, which is a drive amount of the mounting head by the horizontal drive unit, for performing a mounting operation of mounting a component sucked by the mounting head by the nozzle on a substrate. A mounting control unit that controls them; A measurement execution unit that acquires measurement data indicating the relationship between the combination of the individual vertical drive amount and the batch vertical drive amount and the positional deviation by measuring the positional deviation in the horizontal direction when adjusting the individual vertical drive amount and the batch vertical drive amount so that the jig nozzle coincides with the focus of the fixed-focus camera based on the result of imaging the jig nozzle by the fixed-focus camera; A correction data calculation unit that calculates correction data for correcting the positional deviation in the horizontal direction according to the individual vertical drive amount and the batch vertical drive amount based on the measurement data; Comprising; The mounting control unit is a component mounter that controls the horizontal drive amount for the mounting operation based on the individual vertical drive amount, the batch vertical drive amount, and the correction data for the mounting operation.

2. The mounting control unit positions the head block at a block height at which the mounting head does not interfere with the mounted components based on the height of the components already mounted on the substrate, and sets the batch vertical drive amount for this positioning. The mounting head that adsorbs the component to be mounted in the mounting operation is lowered from the head block at the block height to mount the component on the substrate, and the individual vertical drive amount for this operation is set. Based on the set individual vertical drive amount, the batch vertical drive amount, and the correction data, the horizontal drive amount for the mounting operation is controlled. The component mounter according to claim 1.

3. The individual vertical drive unit has a plurality of vertical drive points, and drives the mounting head individually in the vertical direction at each of the plurality of vertical drive points. The measurement execution unit acquires the measurement data for each of the plurality of vertical drive points. The correction data calculation unit calculates the correction data for each of the plurality of vertical drive points. The mounting control unit controls the horizontal drive amount for the mounting operation based on the individual vertical drive amount and the batch vertical drive amount of the mounting head at one vertical drive point among the plurality of vertical drive points where the mounting head is driven in the vertical direction during the mounting operation, and the correction data calculated for the one vertical drive point. The component mounter according to claim 1.

4. The correction data is a relational expression for calculating the correction amount of the horizontal drive amount from the individual vertical drive amount and the batch vertical drive amount. The component mounter according to any one of claims 1 to 3.

5. The correction data is a table showing the relationship between the individual vertical drive amount, the batch vertical drive amount, and the correction amount of the horizontal drive amount. The component mounter according to any one of claims 1 to 3.

6. A component mounting method in which a head block that movably supports each of a plurality of mounting heads in the vertical direction is driven in the vertical direction by a batch vertical drive amount to drive the plurality of mounting heads together in the vertical direction, and the mounting head is driven in the vertical direction by an individual vertical drive amount to mount a component adsorbed by a nozzle attached to the lower end of the mounting head on a substrate. Based on the result of imaging the jig nozzle attached to the lower end of the mounting head from below with a fixed-focus camera, the positional deviation of the jig nozzle in the horizontal direction when adjusting the individual vertical driving amount and the batch vertical driving amount so that the jig nozzle coincides with the focus of the fixed-focus camera is measured, thereby obtaining measurement data indicating the relationship between the combination of the individual vertical driving amount and the batch vertical driving amount and the positional deviation for a plurality of different combinations; calculating correction data for correcting the positional deviation in the horizontal direction according to the individual vertical driving amount and the batch vertical driving amount based on the measurement data; controlling a horizontal driving amount for driving the mounting head in the horizontal direction for the mounting operation of mounting the component adsorbed by the nozzle by the mounting head on the substrate based on the individual vertical driving amount, the batch vertical driving amount, and the correction data for the mounting operation A component mounting method comprising the above steps.

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