Grinding tool and manufacturing method of grinding tool

Abstract

To enable suppression of entry of an adhesive into a grind stone by suppressing resistance due to the adhesive when the grind stone is inserted into a groove, so that productivity is improved.SOLUTION: A grinding tool (1) that grinds a workpiece includes: a base (10); a groove (17) that is formed on a free end surface (12) of the base; a grind stone (20) that grinds the workpiece, a part of which is inserted into the groove to grind the workpiece by a portion exposed from the groove; and an adhesive (30) that is arranged in the groove and bonds the base and the grind stone. The adhesive includes an ultraviolet curable anaerobic resin (31) and glass beads (32).SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to a grinding tool and a method for manufacturing the grinding tool.

Background Art

[0002] Patent Document 1 discloses a grinding apparatus for grinding a wafer with a grindstone. In the grinding apparatus, a grinding wheel having a grindstone arranged annularly is rotated and pressed against the wafer held on a chuck table for grinding. Such a grinding wheel includes a ring-shaped base, and the grindstone is arranged in a ring-shaped groove formed on the free end surface of the base, and the grindstone is fixed to the base with an adhesive.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Regarding the above-described adhesive, if the viscosity is high, it becomes a resistance when inserting the grindstone into the groove, and it becomes difficult to insert the grindstone. On the other hand, if the viscosity of the adhesive is low, it becomes easy to insert the grindstone into the groove, but the adhesive penetrates into the pores in the grindstone, and further, due to capillary action by pores or the like, the grindstone is filled with the adhesive, resulting in a problem of deteriorating the grinding performance of the grindstone.

[0005] In addition, since a thermosetting adhesive that is heat-cured is used, there is a problem that a heating time and a cooling time are required, resulting in a decrease in productivity.

[0006] In view of this point, the present invention has been made, and an object of the present invention is to provide a grinding tool and a method for manufacturing the grinding tool that can suppress the resistance caused by the adhesive when inserting the grindstone into the groove, suppress the intrusion of the adhesive into the grindstone, and improve productivity.

Means for Solving the Problem

[0007] A grinding tool according to an aspect of the present invention is a grinding tool for grinding a workpiece, comprising a base, a groove formed on a free end surface of the base, a grinding wheel that inserts a part into the groove and grinds the workpiece with a part exposed from the groove, and an adhesive disposed in the groove for bonding the base and the grinding wheel. The adhesive includes an ultraviolet curable anaerobic resin and glass beads.

[0008] A method for manufacturing a grinding tool for manufacturing a grinding tool according to an aspect of the present invention includes an application step of applying the adhesive to at least one of the groove and the grinding wheel, inserting the grinding wheel into the groove and pressing the bottom surface of the groove and the insertion surface of the grinding wheel against each other, and bonding the bottom surface of the groove and the insertion surface of the grinding wheel facing the bottom surface by the anaerobic property of the adhesive. The first bonding step, and a second bonding step of irradiating ultraviolet rays from the free end surface side to cure and bond the adhesive between the side surface of the groove and the grinding wheel by ultraviolet curability.

Advantages of the Invention

[0009] According to the present invention, an adhesive with adjusted viscosity can be obtained by mixing glass beads, and the resistance when inserting the grinding wheel into the groove can be reduced. Further, the intrusion of the adhesive into the grinding wheel can be suppressed by mixing the glass beads, and it is possible to prevent the grinding performance of the grinding wheel from deteriorating. Furthermore, since the grinding wheel can be bonded by the ultraviolet curability and anaerobic property of the adhesive, compared with a thermosetting adhesive, the time required for bonding can be shortened by eliminating the heating and cooling times, and the productivity can be increased.

Brief Description of the Drawings

[0010]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Embodiments for Carrying Out the Invention

[0011] Hereinafter, with reference to the accompanying drawings, a grinding tool according to an embodiment will be described. Note that the grinding tool according to the embodiment is not limited to the configuration shown below and can be changed as appropriate.

[0012] FIG. 1 is a schematic perspective view of a grinding tool according to an embodiment. The grinding tool 1 shown in FIG. 1 may also be referred to as a grinding wheel, constitutes a part of a grinding device (not shown), is provided so as to be capable of high-speed rotation, and is provided so as to be capable of grinding a disk-shaped workpiece such as a wafer. The grinding tool 1 includes an annular base 10 and a plurality of grinding wheels (grinding abrasive wheels) 20 fixed to the base 10 for grinding a workpiece. The base 10 is made of a metal such as stainless steel or aluminum, or resin. Note that in FIG. 1, the grinding tool 1 is shown in a posture opposite to the posture when it is used for grinding.

[0013] FIG. 2 is a partial schematic cross-sectional view of the grinding tool according to the embodiment. As also shown in FIG. 2, the base 10 includes a mounting surface 11 and a free end surface 12 that are generally parallel to each other, and an outer peripheral surface (side surface) 13 that connects the mounting surface 11 and the free end surface 12. Through the mounting surface 11, the grinding tool 1 is mounted on the tip side of the spindle of the grinding device via a mount (both not shown).

[0014] A circular opening 15 that penetrates the base 10 from the mounting surface 11 to the free end surface 12 is formed at the center of the base 10. An inclined surface 16 that inclines at a predetermined angle is formed inside the base 10.

[0015] An annular groove (recess) 17 is formed along the outer peripheral surface 13 on the free end surface 12 of the base 10. The groove 17 includes inner side surfaces (side surfaces) 171 and 172 that face each other inside the groove 17, and a bottom surface 173 that connects the inner side surfaces 171 and 172.

[0016] Each grinding stone 20 is generally formed in a rectangular parallelepiped shape and is arranged at substantially equal intervals along the circumferential direction of the base 10 in a state of being inserted into the groove 17. The grinding stone 20 is formed, for example, by solidifying abrasive grains such as alumina-based abrasive grains, silicon carbide-based abrasive grains, or abrasive grains such as CBN (cubic boron nitride) and diamond with a binder such as a resin bond or a vitrified bond. With such a configuration, the grinding stone 20 is formed to have a large number of fine pores inside.

[0017] The grinding stone 20 has a surface facing the bottom surface 173 of the groove 17 as the insertion surface 21, and the surface on the opposite side of the insertion surface 21 is the grinding surface 22 that comes into contact with the workpiece during grinding and performs grinding. In the insertion direction of the grinding stone 20 into the groove 17, generally about half of the region (a part) on the insertion surface 21 side becomes the part inserted into the groove 17, and generally about half of the region (the other part) on the grinding surface 22 side becomes the part exposed from the groove 17. In the grinding stone 20, the insertion surface 21 and the grinding surface 22 are connected by a pair of outer surfaces 23 and 24.

[0018] The grinding stone 20 is adhered to the base 10 by an adhesive 30 disposed in the groove 17. The adhesive 30 includes an ultraviolet curable anaerobic resin 31 and glass beads 32. The ultraviolet curable anaerobic resin 31 may also be referred to as an anaerobic curable ultraviolet curable resin. The ultraviolet curable anaerobic resin 31 has, as two main properties, the property of curing by reacting with ultraviolet rays and the property of curing starting from a reaction initiator in a state where air (oxygen) is blocked. The ultraviolet curable anaerobic resin 31 can be exemplified by having acrylic as the main component. For example, Aronix (registered trademark) of Toagosei Co., Ltd. or 3065E of Three Bond Co., Ltd. is used.

[0019] The glass beads 32 are mixed with the ultraviolet curable anaerobic resin 31 and dispersed in the ultraviolet curable anaerobic resin 31 so that the viscosity of the adhesive 30 can be adjusted. There is no limitation on the method of dispersing the glass beads 32 in the ultraviolet curable anaerobic resin 31. For example, a rotation-revolution type stirring device (planetary stirring device) is used to perform defoaming while stirring the liquid ultraviolet curable anaerobic resin 31 and the glass beads 32.

[0020] The diameter (average particle size) of the glass beads 32 can be exemplified as being 5 μm or more and 200 μm or less. The content rate of the glass beads 32 in the adhesive 30 can be exemplified as being 5 wt% or more and 33 wt% or less. Note that the above content rate corresponds to the ratio of the mass of the glass beads 32 to the total mass of the adhesive 30 containing the glass beads 32 (the sum of the mass of the ultraviolet curable anaerobic resin 31 and the mass of the glass beads 32). When setting the conditions of the above glass beads 32, the grinding wheel 20 can be exemplified as having an average particle size of 2 μm or more and 100 μm or less, and the pore size can be exemplified as being 20 μm or more and 200 μm or less.

[0021] Subsequently, in addition to FIG. 2, with reference to FIGS. 3 to 5, a method for manufacturing the grinding tool 1 will be described. The method for manufacturing the grinding tool 1 in the present embodiment is carried out in the order of a coating step, a first adhesion step, and a second adhesion step.

[0022] [Coating step] In the method for manufacturing the grinding tool 1 of the present embodiment, first, as shown in FIG. 3, a coating step is carried out. FIG. 3 is a cross-sectional view similar to FIG. 2 for explaining the coating step. In the coating step, an adhesive 30 is manufactured by mixing the ultraviolet curable anaerobic resin 31 and the glass beads 32 and adjusting the viscosity to a predetermined value. Then, in the coating step, after arranging the free end face 12 on the base 10 upward, the adhesive 30 is applied to the groove 17.

[0023] Applying the adhesive 30 to the groove 17 in the coating step means arranging the uncured adhesive 30 inside the groove 17. As a method for applying the adhesive 30, the adhesive 30 may be poured into the inside of the groove 17 from a container 40 that houses the adhesive 30, or may be injected into the inside of the groove 17 from a supply device of the adhesive 30 via a nozzle (not shown) or the like.

[0024] Also, in the coating step of the present embodiment, the adhesive 30 may be applied to at least one of the groove 17 and the grinding wheel 20. Therefore, the inner side surfaces 171 and 172 and the bottom surface 173 of the groove 17, the insertion surface 21 of the grinding wheel 20, and the outer side surfaces 23 and 24 on the insertion surface 21 side may be applied by stretching with a dispenser, printing, a brush, a blade, etc., or various means such as spraying with a spray may be applied.

[0025] [First Adhesion Step] After the coating step is performed, as shown in FIG. 4, the first adhesion step is performed. FIG. 4 is a cross-sectional view similar to FIG. 2 for explaining the first adhesion step. As shown in FIG. 4, in the first adhesion step, the grinding wheel 20 is inserted from above the groove 17. Then, as shown by the arrow of the two-dot chain line in FIG. 2, a downward force in the drawing is applied to the grinding wheel 20 to press the bottom surface 173 of the groove 17 against the insertion surface 21 of the grinding wheel 20. As a result, the air (oxygen) between the bottom surface 173 of the groove 17 and the insertion surface 21 of the grinding wheel 20 is blocked. By such blocking of the air, due to the anaerobic property of the ultraviolet curable anaerobic resin 31 of the adhesive 30, the bottom surface 173 of the groove 17 and the insertion surface 21 of the grinding wheel 20 facing the bottom surface 173 are adhered.

[0026] In the first adhesion step, the adhesive 30 between the inner side surfaces 171 and 172 of the groove 17 and the outer side surfaces 23 and 24 of the grinding wheel 20 is not cured because it is in a state where it is in contact with air and the air is not blocked at the opening side of the groove 17.

[0027] [Second Adhesion Step] After the first adhesion step is performed, as shown in FIG. 5, the second adhesion step is performed. FIG. 5 is a cross-sectional view similar to FIG. 2 for explaining the second adhesion step. As shown in FIG. 5, in the second adhesion step, ultraviolet rays are irradiated from the free end surface 12 side of the base 10 by the ultraviolet irradiation device 41. As a result, the adhesive 30 between the inner side surfaces 171 and 172 of the groove 17 and the outer side surfaces 23 and 24 of the grinding wheel 20 is irradiated with ultraviolet rays. By such ultraviolet irradiation, due to the ultraviolet curable property of the ultraviolet curable anaerobic resin 31 of the adhesive 30, the adhesive 30 between the inner side surfaces 171 and 172 of the groove 17 and the outer side surfaces 23 and 24 of the grinding wheel 20 is cured, and the grinding wheel 20 is adhered to the groove 17.

[0028] In this way, by performing the first adhesion step and the second adhesion step, the three surfaces of the inner surfaces 171 and 172 and the bottom surface 173 that form the groove 17 and the three surfaces of the insertion surface 21 and the outer surfaces 23 and 24 that form the grinding stone 20 are adhered by the adhesive 30. By such adhesion, a plurality of grinding stones 20 are fixed to the base 10.

[0029] According to the above embodiment, the viscosity can be adjusted by mixing the glass beads 32 with the adhesive 30. By adjusting such viscosity, it is possible to avoid an increase in the resistance when inserting the grinding stone 20 into the groove 17 in the first adhesion step, and it is possible to improve the productivity in the first adhesion step. Moreover, since the adhesive 30 contains the glass beads 32, it is possible to suppress the adhesive 30 from entering the pores in the grinding stone 20. Thereby, it is possible to avoid the adhesive 30 from entering up to the grinding surface 22 side of the grinding stone 20 and inhibiting the grinding process, and it is possible to maintain the grinding performance of the grinding tool 1 well.

[0030] Furthermore, since the grinding stone 20 is adhered by both the ultraviolet curability and anaerobic properties of the ultraviolet curable anaerobic resin 31, the heating time and the cooling time can be eliminated as compared with the case of using a conventional thermosetting adhesive. Thereby, the time required for adhering the grinding stone 20 can be shortened, and the productivity of the grinding tool 1 can be improved including the ease of inserting the grinding stone 20 into the groove 17 in the first adhesion step.

[0031] Note that the present invention is not limited to the above embodiments, and various modifications can be made and implemented. In the above embodiments, the sizes, shapes, etc. illustrated in the attached drawings are not limited thereto, and can be appropriately changed within the range where the effects of the present invention are exhibited. In addition, various modifications can be made and implemented as long as the scope of the object of the present invention is not deviated from.

[0032] In the above-described embodiment, the base 10 is formed in an annular shape, but the present invention is not limited to such a configuration. The base 10 may be modified as long as it has a groove 17 into which the grinding wheel 20 can be inserted. For example, it may be formed in a block shape that holds one grinding wheel 20.

[0033] Also, even when the base 10 is formed in an annular shape, the formation of the groove 17 can be variously modified. A plurality of rectangular parallelepiped-shaped grooves 17 may be arranged annularly along the circumferential direction of the base 10, and at least one grinding wheel 20 may be inserted into each of the plurality of grooves 17.

Industrial Applicability

[0034] As described above, the present invention has an effect that it can suppress the resistance of the adhesive when inserting the grinding wheel into the groove in the grinding tool, can suppress the intrusion of the adhesive into the grinding wheel, and can improve productivity.

Explanation of Reference Numerals

[0035] 1: Grinding tool 10: Base 12: Free end face 17: Groove 171: Inner surface (side surface) 172: Inner surface (side surface) 173: Bottom surface 20: Grinding wheel 21: Insertion surface 30: Adhesive 31: UV-curable anaerobic resin 32: Glass beads

Claims

1. A grinding tool for grinding a workpiece, comprising: a base; a groove formed in a free end face of the base; a grinding wheel that inserts a part thereof into the groove and grinds the workpiece with a part exposed from the groove; and an adhesive disposed in the groove for bonding the base and the grinding wheel. The adhesive contains an ultraviolet curable anaerobic resin and glass beads. The grinding tool.

2. The grinding wheel has pores. The grinding tool according to claim 1.

3. A method for manufacturing a grinding tool for manufacturing the grinding tool according to claim 1, comprising: an application step of applying the adhesive to at least one of the groove and the grinding wheel; a first bonding step of inserting the grinding wheel into the groove and pressing a bottom surface of the groove and an insertion surface of the grinding wheel, and bonding the bottom surface of the groove and the insertion surface of the grinding wheel facing the bottom surface by the anaerobic property of the adhesive; a second bonding step of irradiating ultraviolet rays from the free end face side to cure and bond the adhesive between the side surface of the groove and the grinding wheel by ultraviolet curability. The method for manufacturing a grinding tool, comprising the above steps.

4. The grinding wheel has pores. The method for manufacturing a grinding tool according to claim 3.

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