Displacement information output device, displacement measurement device, and motion information output device

Abstract

To provide a highly accurate displacement information output device.SOLUTION: A displacement information output device includes: a light source; a light guide member that includes a light incident part and a light emitting part, guides light incident from the light incident part after the light is emitted from the light source to an object and at least one of reflection and scattering is performed on the object, and emits the light from the light emitting part; and a light receiver that receives the emitted light from the light emitting part and outputs information regarding three dimensional displacement of the object obtained based on the emitted light.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a displacement information output device, a displacement measuring device, and a motion information output device. [Background technology]

[0002] 2. Description of the Related Art There is known a displacement information output device that outputs information about the displacement of an object based on at least one of reflected light and scattered light of irradiated light by the object.

[0003] For example, Patent Document 1 discloses a displacement information output device that outputs information regarding the three-dimensional displacement of an object by comparing multiple speckle images with an image obtained by scaling these multiple speckle images. Summary of the Invention [Problem to be solved by the invention]

[0004] However, the device of Patent Document 1 leaves room for improvement in terms of the accuracy of information relating to the three-dimensional displacement of the object.

[0005] An object of the present invention is to provide a highly accurate displacement information output device. [Means for solving the problem]

[0006] A displacement information output device according to one aspect of the present invention includes a light source, a light entrance section and a light exit section, and has a light guiding member that guides the light that is incident from the light source onto an object and is at least one of reflected and scattered by the object, and emits the light from the light exit section, and a light receiver that receives the light exiting from the light exit section and outputs information regarding the three-dimensional displacement of the object obtained based on the exit light. Effect of the Invention

[0007] According to the present invention, a highly accurate displacement information output device can be provided. [Brief description of the drawings]

[0008] [Figure 1] 1 is a schematic top view of a displacement measuring device according to a first embodiment of the present invention. FIG. [Diagram 2] FIG. 2 is a schematic cross-sectional view taken along line II-II in FIG. [Diagram 3] 1 is a schematic perspective view of a displacement measuring device according to a first embodiment of the present invention. [Figure 4] FIG. 4 is a schematic perspective view of a displacement measuring device according to a second embodiment of the present invention. [Diagram 5] FIG. 11 is a schematic perspective view of a displacement measuring device according to a third embodiment of the present invention. [Figure 6] FIG. 13 is a schematic perspective view of a displacement measuring device according to a fourth embodiment of the present invention. [Figure 7] FIG. 13 is a schematic perspective view of a motion information output device according to a fifth embodiment of the present invention. [Figure 8] FIG. 13 is a schematic perspective view of a motion information output device according to a sixth embodiment of the present invention. [Figure 9] FIG. 13 is a schematic perspective view of a motion information output device according to a seventh embodiment of the present invention. [Figure 10] FIG. 13 is a schematic cross-sectional view of a displacement measuring device according to an eighth embodiment of the present invention. [Figure 11] 1A and 1B are diagrams showing a first example of ray trajectories and a speckle image by simulation. [Figure 12] 13A and 13B are diagrams showing a second example of ray trajectories and a speckle image by simulation. [Figure 13] FIG. 13 is a schematic top view of a light guide member according to a first modified example. [Figure 14] FIG. 11 is a schematic top view of a light guide member according to a second modified example. [Figure 15] FIG. 13 is a schematic top view of a light guide member according to a third modified example. [Figure 16] FIG. 13 is a schematic top view of a light guide member according to a fourth modified example. [Figure 17] FIG. 13 is a schematic exploded perspective view showing a light guide member according to a fifth modified example. [Figure 18]FIG. 13 is a schematic exploded perspective view showing a light guide member according to a sixth modified example. [Figure 19] FIG. 13 is a schematic top view of a light guide member according to a seventh modified example. [Figure 20] FIG. 13 is a schematic top view of a light-guiding member according to an eighth modified example. [Figure 21] FIG. 13 is a schematic top view of a light-guiding member according to a ninth modified example. [Figure 22] FIG. 13 is a schematic top view of a light-guiding member according to a tenth modified example. [Diagram 23] FIG. 23 is a schematic top view of a light-guiding member according to an eleventh modified example. [Figure 24] FIG. 23 is a schematic top view of a light-guiding member according to a twelfth modified example. [Diagram 25] FIG. 23 is a schematic top view of a light-guiding member according to a thirteenth modified example. [Figure 26] 26 is a schematic cross-sectional view taken along line XXVI-XXVI in FIG. 25. [Figure 27] FIG. 23 is a schematic top view of a light-guiding member according to a fourteenth modified example. [Figure 28] 28 is a schematic cross-sectional view taken along line XXVIII-XXIIVI in FIG. 27. [Figure 29] FIG. 23 is a schematic top view of a light-guiding member according to a fifteenth modified example. [Diagram 30] 30 is a schematic cross-sectional view taken along line XXX-XXX in FIG. 29. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] A displacement information output device, a displacement measuring device, and a motion information output device according to an embodiment of the present invention will be described in detail with reference to the drawings. However, the following embodiments are merely examples of a displacement information output device, a displacement measuring device, and a motion information output device for embodying the technical ideas of the embodiments of the present invention, and are not limited to the following.

[0010] Furthermore, unless otherwise specified, the dimensions, materials, shapes, relative arrangements, etc. of the components described in the embodiments of the present invention are merely illustrative examples and are not intended to limit the scope of the embodiments of the present invention. Note that the sizes, positional relationships, etc. of components shown in each drawing may be exaggerated to clarify the explanation. In the following explanation, the same names and symbols indicate the same or similar components, and detailed explanations will be omitted as appropriate.

[0011] In the following, for ease of understanding, the arrangement and configuration of each part will be described using an XYZ orthogonal coordinate system. The X-axis, Y-axis, and Z-axis are mutually orthogonal. The direction in which the X-axis extends is the "X direction", the direction in which the Y-axis extends is the "Y direction", and the direction in which the Z-axis extends is the "Z direction". The direction in which the arrow indicating the X-axis points is written as the +X direction or +X side, and the opposite direction to the +X direction is written as the -X direction or -X side. The direction in which the arrow indicating the Y-axis points is written as the +Y direction or +Y side, and the opposite direction to the +Y direction is written as the -Y direction or -Y side. The direction in which the arrow indicating the Z-axis points is written as the +Z direction or +Z side, and the opposite direction to the +Z direction is written as the -Z direction or -Z side. In this specification, as an example, it is assumed that the object is located on the +Z side of the light guiding member provided in the displacement information output device according to the embodiment of the present invention. In addition, in this specification, the +Z direction is called "up" and the -Z direction is called "down". However, these merely describe the relationships of relative positions, orientations, directions, etc., and do not necessarily correspond to the relationships during use. Furthermore, these directions are unrelated to the direction of gravity.

[0012] [First embodiment] <Configuration of the displacement measuring device according to the first embodiment of the present invention> (Overall composition) A displacement measuring device according to a first embodiment of the present invention will be described with reference to Fig. 1 to Fig. 3. Fig. 1 is a schematic top view showing an example of a displacement measuring device 200 according to the first embodiment of the present invention. Fig. 2 is a schematic cross-sectional view taken along line II-II in Fig. 1. Fig. 3 is a schematic perspective view showing an example of the displacement measuring device 200 according to the first embodiment of the present invention.

[0013] As shown in FIG. 1 to FIG. 3, the displacement measuring device 200 includes a displacement information output device 100 and a processor 150 that outputs a measurement result P2 of the three-dimensional displacement of the object S obtained based on information P1 related to the three-dimensional displacement input from the displacement information output device 100. The object S is an object to be measured by the displacement measuring device 200 from the viewpoint of measuring the three-dimensional displacement. The displacement information output device 100 includes a light source 10. The displacement information output device 100 also includes a light guide member 20 that includes a light input section 21 and a light output section 22, and guides the light L1 input from the light input section 21 after the light L1 is irradiated from the light source 10 to the object S and is at least one of reflected and scattered by the object S, and outputs the light L1 from the light output section 22. The displacement information output device 100 also includes a light receiver 30 that receives the output light L2 from the light output section 22 and outputs information related to the three-dimensional displacement of the object S obtained based on the output light L2. 1 and 2, the displacement information output device 100 has a substrate 40 on which the light source 10 and the light receiver 30 are arranged, and a support 50 that supports the light-guiding member 20. Note that in Fig. 2 and Fig. 3, a part of each of the light L0, the light L1, and the emitted light L2 is represented by an arrow.

[0014] 1 to 3, the emitted light L2 from the light emitting unit 22 includes speckles generated due to at least one of reflection and scattering on the object S. The light receiver 30 outputs information related to the three-dimensional displacement of the object S obtained based on the speckles.

[0015] In the example shown in FIG. 1 to FIG. 3, the light source 10 is disposed on the opposite side of the light guide member 20 from the side where the object S is located. The light L0 emitted from the light source 10 is incident on the inside of the light guide member 20 through the light source side opening 23. The light L0 incident on the inside of the light guide member 20 passes through the inside of the light guide member 20, and is then emitted from the light guide member 20 through the light incident portion 21 and irradiated on the object S. The object S is, for example, a part of a living body such as a finger of a user who uses the displacement information output device 100. The object S reflects and scatters the light L0 from the light source 10 that is irradiated through the light guide member 20. The reflection by the object S includes regular reflection and diffuse reflection. Since the light L0 from the light source 10 is a coherent light with high coherence, the light L5 that is at least one of reflected and scattered in the area of ​​the object S irradiated with the light L0 interferes with each other, and a speckle that is a random bright and dark spot pattern is generated.

[0016] A part of the light including speckles generated due to the light L5 reflected and / or scattered by the object S is incident into the light guiding member 20 through the light incident portion 21 of the light guiding member 20. The light L1 incident into the light guiding member 20 is guided inside the light guiding member 20 while being reflected by each surface constituting the light guiding member 20. Of the light L1 guided inside the light guiding member 20, the light L1 that reaches the light exit portion 22 of the light guiding member 20 is emitted through the light exit portion 22. The emitted light L2 emitted from the light exit portion 22 includes speckles generated due to the light L5 reflected and / or scattered by the object S. The light receiver 30 can receive at least a part of the emitted light L2.

[0017] The speckle state, such as the position and shape of the spot pattern, changes according to the three-dimensional displacement of the object S. The photoreceiver 30 receives the emitted light L2 including the speckles, and can output information P1 relating to the three-dimensional displacement of the object S based on the speckles.

[0018] The processor 150 receives information P1 relating to the three-dimensional displacement of the object S output from the optical receiver 30. The processor 150 acquires a measurement result P2 of the three-dimensional displacement of the object S by calculation based on the information P1 relating to the three-dimensional displacement of the object S input from the optical receiver 30, and outputs the measurement result P2 to an external device. The external device to which the displacement measuring device 200 outputs the measurement result P2 is an information processing device such as a PC (Personal Computer), a display device such as a liquid crystal display, a storage device such as a HDD (Hard Disk Drive), etc.

[0019] Here, in FIG. 2, when the object S is displaced in-plane in a plane substantially perpendicular to the normal N of the area of ​​the object S irradiated with the light L0, for example, in a plane along the XY plane in FIG. 1 to FIG. 3, the position of the speckle mainly changes according to the in-plane displacement. The displacement information output device can acquire information about the in-plane displacement of the object S according to the change in the position of the speckle. On the other hand, when the object S is displaced out-of-plane in a direction along the normal N of the area of ​​the object S, for example, in a direction along the Z direction in FIG. 1 to FIG. 3, the change in shape, such as the size of the speckle, becomes dominant over the change in the position of the speckle. When the change in the shape of the speckle becomes dominant, the amount of change in the state of the speckle according to the out-of-plane displacement may be smaller than the amount of change in the state of the speckle according to the in-plane displacement. In other words, the sensitivity of the information about the out-of-plane displacement of the object S according to the change in the state of the speckle becomes low. Due to the low sensitivity, the displacement information output device may not be able to acquire information about the three-dimensional displacement of the object S, including the in-plane displacement and the out-of-plane displacement, with high accuracy.

[0020] In this embodiment, the light L1 including speckles is guided inside the light guide member 20, so that the light L1 can propagate a longer distance than when the light guide member 20 is not used. The light L1 propagates a longer distance, so that the amount of change in the state of the speckles included in the output light L2 from the light output unit 22 increases. The amount of change in the state of the speckles increases, so that the sensitivity of the information P1 regarding the three-dimensional displacement of the object S according to the change in the state of the speckles increases. The sensitivity of the information P1 regarding the three-dimensional displacement of the object S increases, so that the displacement information output device 100 can output the information P1 regarding the three-dimensional displacement of the object S with high accuracy. In other words, in this embodiment, a highly accurate displacement information output device 100 can be provided. In addition, the displacement measuring device 200 can obtain the measurement result P2 of the three-dimensional displacement of the object S with high accuracy by calculating the information P1 regarding the three-dimensional displacement of the object S with high accuracy input from the displacement information output device 100, and output the measurement result P2 to an external device.

[0021] The emitted light L2 does not need to include speckles caused by at least one of reflection and scattering at the object S, so long as the emitted light L2 is light that has been reflected and / or scattered by the object S and is guided by the light-guiding member 20. Even when the emitted light L2 does not include speckles, the displacement information output device 100 can acquire and output information related to the three-dimensional displacement of the object S with high accuracy, compared to the case where the light-guiding member 20 is used.

[0022] In the displacement information output device 100 shown in FIGS. 1 to 3, as described above, the light source 10 is disposed on the opposite side to the side on which the object S is located, with the light guiding member 20 as a reference. The light L0 emitted from the light source 10 passes through the light guiding member 20 and is irradiated onto the object S. By disposing the light source 10 on the opposite side of the object S with the light guiding member 20 as a reference, the light source 10 and the object S can be opposed to each other via the light guiding member 20. This makes it possible to reduce the size of the displacement information output device 100, reduce the number of parts constituting the displacement information output device 100, and simplify the configuration of the displacement information output device 100.

[0023] The configurations of the displacement information output device 100 and the displacement measuring device 200 will be described in detail below.

[0024] (light source 10) When the displacement information output device 100 uses speckles, the light source 10 can emit light L0 with high coherence. In this specification, the light with high coherence means light with higher coherence than light emitted from a white light source or an LED (Light Emitting Diode). From another perspective, the light with high coherence means light with a longer coherence length than light emitted from a white light source or an LED.

[0025] Examples of light sources that emit light with higher coherence than light emitted from a white light source or an LED include laser light sources. The displacement information output device 100 has the light source 10 that emits highly coherent light L0, and thus can suitably generate speckles derived from light L5 that is at least one of reflected and scattered by the object S. This allows the displacement information output device 100 to suitably obtain information P1 related to the three-dimensional displacement of the object S by using the speckles. Note that, in cases where the displacement information output device 100 does not use speckles, the light source 10 does not necessarily have to emit highly coherent light L0.

[0026] From the viewpoint of miniaturizing the displacement information output device 100 and the displacement measuring device 200, it is preferable to use a semiconductor laser (LD: Laser diode) as the laser light source of the light source 10. Also, a vertical cavity surface emitting laser (VCSEL: Vertical Cavity Surface Emitting Laser) can be used as the semiconductor laser. When a VCSEL is used as the light source 10, it is preferable to use a packaged product in which a light source chip is mounted in a package member from the viewpoint of easy handling. However, the laser light source of the light source 10 is not limited to a VCSEL, and may be an edge-emitting semiconductor laser. The light source 10 including a semiconductor laser emits light L0 in response to a current applied from a driving circuit or the like. The light L0 is a light with high coherence, and is therefore mainly monochromatic light.

[0027] (Light guiding member 20) The light guide member 20 is configured such that the light guide portion includes a light-transmitting glass material, a resin material, or a gap. When the light guide portion is a gap, it is preferable to form a reflecting surface and to configure the outer periphery of the light guide member to have a flat plate structure in order to make the light guide member self-supporting. The light transmittance of the light guide member 20 is preferably 60% or more for the peak wavelength of the light emitted from the light source 10.

[0028] The light guide member 20 shown in FIGS. 1 to 3 includes a light reflecting member 26 that covers the surface of the light guide member 20. The light entrance portion 21 is a first opening provided in the light reflecting member 26, and the light exit portion 22 is a second opening provided in the light reflecting member 26. The light reflecting member 26 is provided on the entire surface of the light guide member 20 except for the light entrance portion 21, the light exit portion 22, and the light source side opening 23. From another perspective, the light entrance portion 21, the light exit portion 22, and the light source side opening 23 are each a portion on the surface of the light guide member 20 where the light reflecting member 26 is not provided. Alternatively, they are through-hole portions provided in a flat plate structure. The light reflecting member 26 is, for example, a metal film such as aluminum. By including the light reflecting member 26, the light guide member 20 can confine the light L1 incident through the light entrance portion 21 inside the light guide member 20. The light guide member 20 can guide the light L 1 trapped inside by reflecting it with the light reflective member 26 , and can emit the light from the light emitting portion 22 .

[0029] However, the light guide member 20 does not necessarily include the light reflecting member 26. For example, the light guide member 20 can guide the light L1 from the light incident portion 21 by total reflection inside the light guide member 20. In the light guide member 20, light is reflected in various directions at the portions having curvature at both ends, resulting in light that does not satisfy the total reflection condition. The displacement information output device 100 can extract a part of the leaked light from the portions having curvature at both ends from the light guide member 20. When the displacement information output device 100 guides the light L1 by total reflection, it is not necessary to provide the light reflecting member 26 on the surface of the light guide member 20, and therefore the configuration of the light guide member 20 can be simplified and the light guide member 20 can be easily manufactured.

[0030] The light-guiding member 20 shown in FIGS. 1 to 3 is a member that is elongated in a predetermined longitudinal direction. A curved surface 24 is provided at each end on both sides of the light-guiding member 20 in the longitudinal direction. A linear portion 25 extending in the longitudinal direction is provided between the curved surfaces 24 on both sides of the light-guiding member 20 in the longitudinal direction when the light-guiding member 20 is viewed from a direction perpendicular to the longitudinal direction. The light-guiding member 20 has the curved surface 24 and the linear portion 25, so that the light-guiding member 20 can impart nonlinearity to the distribution of the optical path length of the light L1 guided inside the light-guiding member 20. In the displacement information output device 100, the sensitivity of the information P1 related to the three-dimensional displacement of the object S can be increased by imparting nonlinearity to the distribution of the optical path length of the light L1.

[0031] In the example shown in FIG. 1 to FIG. 3, the longitudinal direction is the X direction. The light guide member 20 is a member elongated in the X direction. The curved surface 24 is a semicircular or semicylindrical curved surface in a top view. The linear portions 25 are provided on both sides of the light guide member 20 in a direction perpendicular to the longitudinal direction, for example, the Y direction, in a top view. The light guide member 20 has a so-called oval shape, or a stadium shape in another view, in a top view. As described in the non-patent document "Optics, Vol. 37, No. 3 (2008), pp. 142-155", in a light guide member having an oval shape, the trajectory of a light ray guided inside the light guide member shows nonlinearity (chaos). The displacement information output device 100 can acquire information P1 on the three-dimensional displacement of the object S with high sensitivity by utilizing the nonlinearity of the trajectory of the light ray. As described in the above non-patent literature, irregular sparseness and density appear in the trajectory of the light ray guided inside the light guide member. This irregular sparseness and density means that the optical path length of the guided light ray is widely distributed from long to short. The trajectory of the guided light ray can be analyzed using a diagram called a Poincaré transverse diagram.

[0032] In the displacement information output device 100, the configuration of the light-guiding member 20 is determined so that a closed curve structure does not appear in the Poincaré transverse diagram. This makes it possible to eliminate a characteristic mode in the trajectory of the light L1 guided by the light-guiding member 20. By eliminating the characteristic mode, the propagation distance of the light L1 inside the light-guiding member 20 is increased, and the light L1 can reach the light exit portion 22 of the light-guiding member 20 with a high probability. As a result, in the displacement information output device 100, information P1 on the three-dimensional displacement of the object S can be obtained with high sensitivity to the displacement of the object S in the out-of-plane direction.

[0033] 1 is a plate-shaped member. Since the light-guiding member 20 is a plate-shaped member, the displacement information output device 100 can be made thinner. Note that making the displacement information output device 100 thinner means shortening the length of the displacement information output device 100 in the thickness direction of the light-guiding member 20, which is a plate-shaped member.

[0034] The light guide member 20 may include a laser medium that amplifies the light L1 guided inside the light guide member 20. Examples of the laser medium included in the light guide member 20 include gallium arsenide (GaAs), indium gallium arsenide (InGaAs), and gallium nitride (GaN). When the light guide member 20 includes a laser medium, the light L1 guided inside the light guide member 20 can be amplified by the amplification function of the laser medium. By amplifying the light L1, it is possible to increase the SNR (Signal to Noise Ratio) of the information P1 related to the three-dimensional displacement of the object S, which is obtained by receiving the output light L2 from the light guide member 20 by the light receiver 30. In addition, the amplification function also has the effect of further extending the optical path length. In the displacement information output device 100, by increasing the SNR of the information P1 related to the three-dimensional displacement of the object S, it is possible to acquire the information P1 related to the three-dimensional displacement of the object S with high accuracy.

[0035] The shape of the light source side opening 23 is preferably substantially circular in accordance with the cross-sectional shape substantially perpendicular to the central axis of the light L0 (light beam) emitted from the light source 10. However, the shape of the light source side opening 23 is not limited to a substantially circular shape, and may be substantially rectangular, substantially elliptical, substantially polygonal, or the like. From the viewpoint of allowing as much light L0 from the light source 10 to enter as possible and reducing loss due to diffraction at the opening, the diameter of the light source side opening 23 is preferably 1.5 to 2.0 times the diameter of the light L0 emitted from the light source 10. Alternatively, the opening area of ​​the light source side opening 23 is preferably an opening area corresponding to 1.5 to 2.0 times the diameter of the light L0 emitted from the light source 10.

[0036] The shape of the first opening, which is the light entrance portion 21, is preferably substantially circular in accordance with the cross-sectional shape substantially perpendicular to the central axis of the light L0 emitted from the light source 10. However, the shape of the first opening is not limited to being substantially circular, and may be substantially rectangular, substantially elliptical, substantially polygonal, or the like. From the viewpoint of allowing as much of the light L5 that is reflected and / or scattered by the object S as possible to enter and propagate in an oblique direction, the opening area of ​​the first opening is preferably two to three times the area of ​​the irradiation region of the light L0 on the object S.

[0037] The shape of the second opening, which is the light emitting portion 22, is preferably substantially rectangular in accordance with the shape of the light receiving surface included in the light receiver 30. However, the shape of the second opening is not limited to being substantially rectangular, and may be substantially circular, substantially elliptical, substantially polygonal, or the like. The opening area of ​​the second opening may be approximately the same as the area of ​​the light receiving surface included in the light receiver 30.

[0038] (Receiver 30) An image sensor that is a two-dimensional imaging element can be used for the light receiver 30. In order to increase the speed of measurement by the displacement measuring device 200, a high-speed camera capable of high-speed imaging may be used for the light receiver 30.

[0039] The receiver 30 may include a plurality of pixels, detect a change in luminance of each of the plurality of pixels, and output information related to the changed luminance in combination with coordinate information and time information. Such a receiver is called an event-based vision sensor (registered trademark). A signal output from the receiver 30, which is an event-based vision sensor, is an example of information P1 related to the three-dimensional displacement of the object S. When an event-based vision sensor is used for the receiver 30, information P1 related to the three-dimensional displacement of the object S is output only when an event such as a change in luminance occurs. This reduces the amount of information output from the receiver 30, and reduces the processing load of the processor 150 for calculating the measurement result P2 of the three-dimensional displacement of the object S. By reducing the amount of information output from the receiver 30 and reducing the processing load of the processor 150, the measurement by the displacement measuring device 200 can be performed at a high speed. For example, the displacement information output device 100 can perform high-speed measurement corresponding to 500 to 800 fps (frames per second) by using an event-based vision sensor for the receiver 30.

[0040] (Substrate 40) The substrate 40 is a mounting substrate on which at least the light source 10 and the light receiver 30 are disposed. For the substrate 40, a printed circuit board or the like in which conductive wiring is disposed on or inside a plate-like member configured to include an insulator can be used. Electronic components other than the light source 10 and the light receiver 30 may be disposed on the substrate 40. For example, a processor 150, a memory used in processing by the processor 150, and the like may be disposed on the substrate 40. From the viewpoint of making it difficult to see inside the displacement information output device 100 and reducing noise due to external light, the substrate 40 is preferably configured from a material that is light-shielding or light-absorbing with respect to the wavelength of external light.

[0041] (Support 50) 1 and 2, the support 50 is disposed on the surface of the substrate 40 on which the light source 10 and the light receiver 30 are disposed. However, the support 50 may be disposed on the surface of the substrate 40 opposite to the surface on which the light source 10 and the light receiver 30 are disposed. The light guide member 20 is fixed to the support 50 by an adhesive member or the like. The support 50 can be configured to include a resin material, a metal material, or the like.

[0042] (Processor 150) As described above, the processor 150 can output a measurement result P2 of the three-dimensional displacement of the object S obtained based on information P1 related to the three-dimensional displacement input from the displacement information output device 100. The processor 150 includes, for example, a CPU (Central Processing Unit). The functions of the processor 150 are realized by the processor 150 executing processes defined in a program stored in a non-volatile memory such as a ROM. Some of the functions realized by the processor 150 may be realized by an ASIC (Application Specific Integrated Circuit), a DSP (digital signal processor), an FPGA (Field Programmable Gate Array), or the like.

[0043] The processing by the processor 150 will be described. As described above, in the displacement information output device 100, by having the light guide member 20, nonlinearity can be imparted to the distribution of the optical path length of the light L1 guided inside the light guide member 20. By imparting this nonlinearity, the relationship between the in-plane movement of the speckle and the in-plane displacement of the target object S in the conventional measurement method using the speckle is no longer established. Therefore, a new analysis method corresponding to the nonlinearity in the distribution of the optical path length of the light L1 is required. For the analysis method corresponding to this nonlinearity, a displacement amount estimation method using machine learning by a computer can be used. In addition, a method called physical reservoir computing, which uses the nonlinear response characteristic of the device itself as an estimation engine, can also be used. The processor 150 can execute an analysis operation corresponding to such nonlinearity. However, at least a part of the analysis operation corresponding to the nonlinearity may be performed by an external information processing device other than the processor 150.

[0044] [Second embodiment] Next, a displacement measuring device according to a second embodiment of the present invention will be described. Note that the same names and symbols as those in the already described embodiments indicate the same or similar members or configurations, and detailed descriptions will be omitted as appropriate. This also applies to the following embodiments.

[0045] FIG. 4 is a schematic perspective view showing an example of a displacement measuring device 200a according to the second embodiment of the present invention.

[0046] As shown in Fig. 4, the displacement measuring device 200a has a displacement information output device 100a. In the displacement information output device 100a, the light source 10 is disposed on the side where the object S is located with respect to the light guiding member 20. The light L0 emitted from the light source 10 is irradiated to the object S without passing through the light guiding member 20. These points are mainly different from the displacement information output device 100 according to the first embodiment of the present invention. Note that in Fig. 4, a part of each of the light L0, the light L1, and the emitted light L2 is indicated by an arrow.

[0047] In the example shown in FIG. 4, both the object S and the light source 10 are disposed above the light guide member 20. The light source 10 can be disposed on a substrate other than the substrate 40 shown in FIG. 2. The light L0 emitted from the light source 10 is irradiated onto the object S without passing through the light guide member 20. A part of the light L5, which is at least one of the light L0 reflected and scattered by the object S, passes through the light entrance portion 21 and enters the inside of the light guide member 20. The light L1 incident on the light guide member 20 is guided inside the light guide member 20 and then exits through the light exit portion 22. The light receiver 30 receives the exit light L2 from the light exit portion 22 and outputs information P1 related to the three-dimensional displacement of the object S obtained based on the speckles contained in the exit light L2.

[0048] In the displacement information output device 100a, the light source 10 can be arranged on the side where the target object S is located with respect to the light guiding member 20, so that the degree of freedom in arranging the members constituting the displacement information output device 100a can be increased. Similarly, in the displacement measuring device 200a, the degree of freedom in arranging the members constituting the displacement measuring device 200a can be increased. Other effects than these are the same as those of the first embodiment of the present invention.

[0049] [Third embodiment] Next, a displacement measuring device according to a third embodiment of the present invention will be described below. Fig. 5 is a schematic perspective view showing an example of a displacement measuring device 200b according to the third embodiment of the present invention.

[0050] As shown in FIG. 5, the displacement measuring device 200b includes a displacement information output device 100b. The displacement information output device 100b includes a light deflection member 60 disposed between the object S and the light guide member 20. The light L0 emitted from the light source 10 is incident on the light deflection member 60. The light deflection member 60 irradiates the light L0 incident from the light source 10 toward the object S. The light guide member 20 guides the light L1 incident from the light incident section 21 after the light L3 irradiated from the light deflection member 60 is at least one of reflected and scattered by the object S. These points are mainly different from the displacement information output device 100 according to the first embodiment of the present invention. In FIG. 5, the light L0, the light L1, the emitted light L2, and the light L3 are partially indicated by arrows.

[0051] In the example shown in FIG. 5, the object S, the light source 10, and the light deflection member 60 are all disposed above the light guide member 20. The light deflection member 60 may be a beam splitter, a half mirror, or the like. The light L0 emitted from the light source 10 is incident on the light deflection member 60 and deflected toward the object S by the light deflection member 60. The light L3 deflected toward the object S is irradiated onto the object S without passing through the light guide member 20. A part of the light L5, which is at least one of the light L3 reflected and scattered by the object S, passes through the light deflection member 60 and the light entrance portion 21 and enters the inside of the light guide member 20. The light L1 incident on the light guide member 20 is guided inside the light guide member 20 and then exits through the light exit portion 22. The light receiver 30 receives the emitted light L2 from the light emitting section 22, and outputs information P1 relating to the three-dimensional displacement of the target object S obtained based on speckles contained in the emitted light L2.

[0052] For example, when the angle of the object S with respect to the light irradiated from the light source 10 changes depending on the type and state of the object S, the efficiency of incidence of the light L5 reflected and / or scattered by the object S into the light guiding member 20 may decrease. In the displacement information output device 100b, since the light deflection member 60 is provided between the object S and the light guiding member 20, the irradiation angle of the light L3 irradiated from the light deflection member 60 to the object S can be changed by changing the deflection angle of the light deflection member 60. As a result, in the displacement information output device 100b, by adjusting the irradiation angle of the light L3 onto the object S depending on the type and state of the object S, the decrease in the efficiency of incidence of the light L5 reflected and / or scattered by the object S into the light guiding member 20 can be reduced, and the information P1 regarding the three-dimensional displacement of the object S can be acquired with high accuracy.

[0053] In addition, in the displacement information output device 100b, the light source 10 and the light deflection member 60 are arranged along the longitudinal direction of the light guide member 20, so that the optical path from the light source 10 to the light deflection member 60 can be lengthened. This makes it possible to secure space for arranging various optical members such as lenses, bandpass filters, and polarizing filters in the optical path from the light source 10 to the light deflection member 60. By controlling the wavefront state of the light L0 irradiated to the object S using various optical members arranged in the optical path from the light source 10 to the light deflection member 60, the light L0 suited to the type and state of the object S can be irradiated to the object S. This reduces the decrease in the incidence efficiency of the light L5 reflected and / or scattered by the object S into the light guide member 20, and the information P1 related to the three-dimensional displacement of the object S can be acquired with high accuracy.

[0054] Similarly to the displacement information output device 100b, the displacement measuring device 200b can also obtain the measurement result P2 of the three-dimensional displacement of the object S with high accuracy.

[0055] Effects other than those described above are similar to those of the first embodiment of the present invention.

[0056] [Fourth embodiment] Next, a displacement measuring device according to a fourth embodiment of the present invention will be described below. Fig. 6 is a schematic perspective view showing an example of a displacement measuring device 200c according to the fourth embodiment of the present invention.

[0057] As shown in Fig. 6, the displacement measuring device 200c includes a displacement information output device 100c. In the displacement information output device 100c, the light-guiding member 20 is a member that is elongated in a predetermined longitudinal direction, and is a rotationally symmetric body with the central axis C0 of the light-guiding member 20 along the longitudinal direction as the axis of rotation. Note that in Fig. 6, a part of each of the light L0, the light L1, and the emitted light L2 is indicated by an arrow.

[0058] In the example shown in FIG. 6, the light guide member 20 is a member that is long in the longitudinal direction, for example, in the X direction. The light guide member 20 is a rotationally symmetric body with the central axis C0 of the light guide member 20 along the longitudinal direction as the axis of rotation. When the light guide member 20 is viewed from any direction around the central axis C0 perpendicular to the longitudinal direction of the light guide member 20, curved surfaces 24 are provided at both ends of the light guide member 20 in the longitudinal direction. When the light guide member 20 is viewed from any direction around the central axis C0 perpendicular to the longitudinal direction of the light guide member 20, linear portions 25 extending in the longitudinal direction are provided between the curved surfaces 24 on both sides of the light guide member 20 in the longitudinal direction. When the light guide member 20 is viewed from any direction around the central axis C0 perpendicular to the longitudinal direction of the light guide member 20, the light guide member 20 has an oval shape. From another perspective, the light guide member 20 has a so-called capsule shape.

[0059] Since the light-guiding member 20 has a capsule-shaped shape, the displacement information output device 100c can impart nonlinearity to the distribution of the optical path length of the light L1 guided inside the light-guiding member 20 in any direction around the central axis C0 of the light-guiding member 20. By imparting nonlinearity to the distribution of the optical path length of the light L1, the displacement information output device 100c can increase the sensitivity of the information P1 on the three-dimensional displacement of the object S to the displacement in the out-of-plane direction of the object S. As a result, the displacement information output device 100c can obtain the information P1 on the three-dimensional displacement of the object S with high accuracy. Similarly, the displacement measuring device 200c can obtain the measurement result P2 of the three-dimensional displacement of the object S with high accuracy. Other effects are the same as those of the first embodiment of the present invention.

[0060] The light guide member 20 is not limited to a solid member such as the plate-like member shown in the first embodiment or the capsule-shaped member shown in this embodiment, but may be a hollow member having a hollow portion inside. The light guide member 20 can guide light by reflecting light on the inner surface of the hollow member. A reflective film made of a metal material such as gold, aluminum, or cobalt may be provided on the inner surface of the hollow member.

[0061] [Fifth embodiment] Next, a motion information output device according to a fifth embodiment of the present invention will be described below. Fig. 7 is a schematic perspective view showing an example of a motion information output device 300 according to the fifth embodiment of the present invention.

[0062] As shown in Fig. 7, the motion information output device 300 has a displacement measuring device 200. Moreover, the displacement measuring device 200 has a displacement information output device 100. Note that in Fig. 7, in order to indicate that the motion information output device 300 has the displacement measuring device 200, the reference numerals of the motion information output device 300 and the displacement measuring device 200 are written together.

[0063] The motion information output device 300 can output motion information P3 of the object S obtained based on the measurement result P2 of the three-dimensional displacement of the object S input from the displacement measuring device 200. The motion information P3 of the object S is information related to the three-dimensional movement of the object S. For example, when the object S is a user's finger, the motion information output device 300 can obtain and output the motion information P3 as information related to the three-dimensional movement of the finger. The motion information P3 output from the motion information output device 300 can be used for an operation input interface using a finger.

[0064] 7, the motion information output device 300 is a handheld device. The housing 70 houses the displacement information output device 100, the board 40, a processor, etc. The housing 70 can be made of a material including a resin material or a metal material. From the viewpoint of making the inside of the displacement information output device 100 difficult to see and reducing noise caused by external light, the housing 70 is preferably made of a material that is light-shielding or light-absorbing with respect to the wavelength of external light.

[0065] In the example shown in FIG. 7, the object S is positioned opposite the light incidence portion 21 of the light guide member 20 in the displacement information output device 100. The user can perform operation input by moving the thumb or index finger near the light incidence portion 21. The motion information output device 300 is connected wirelessly or wired to an information processing device such as a PC or a smartphone, and motion information P3 is passed from the motion information output device 300 to the information processing device. The board 40 includes a wireless or wired communication device, a power supply circuit, a recognition processing circuit, and the like. The motion information output device 300 can be naturally held in the palm of the user's hand like a writing implement. By using the motion information output device 300, it is possible to realize a natural operation input without restricting the user's movement in an operation in a VR (Virtual Reality) space or an operation while wearing AR (Augmented Reality) glasses.

[0066] [Sixth embodiment] Next, a motion information output device according to a sixth embodiment of the present invention will be described below. Fig. 8 is a schematic perspective view showing an example of a motion information output device 1100 according to the sixth embodiment of the present invention.

[0067] 8, the motion information output device 1100 includes a housing 1101, an imaging plate 1103, and an optical window 1104. The motion information output device 1100 also includes a displacement measuring device 200 inside the housing 1101.

[0068] In the motion information output device 1100, the displacement measuring device 200 irradiates coherent light as a sheet light toward the upper and front of the housing 1101 (near the virtual image formed by the imaging plate 1103). When the object S crosses the sheet light in accordance with a non-contact operation of the object S, such as a user's finger, on the virtual image, the reflected light or scattered light of the sheet light by the object S is incident as an interference image on the light receiver 30 included in the displacement measuring device 200 via the optical window 1104 and the light guiding member 20 included in the displacement measuring device 200. This allows the processor 150 included in the displacement measuring device 200 to obtain a measurement result of the three-dimensional displacement of the object S and output it to a non-contact input identification means included in the motion information output device 1100.

[0069] The non-contact input identification means can detect non-contact operations (e.g., finger pressing, handwriting, swiping, etc.) by the object S with high accuracy based on the measurement results of the three-dimensional displacement of the object S input from the displacement measuring device 200, and output the detection results to the operated device or provide feedback to the user.

[0070] In order to improve operability, the motion information output device 1100 can form a virtual image from image or video information using an imaging plate 1103 and display the virtual image above and in front of the housing 1101. The imaging plate 1103 is a member having light transmission and deflection properties, and can be realized by a laminated reflection structure.

[0071] The motion information output device 1100 is equipped with the displacement measuring device 200, which can remove internal scattered light contained in the reflected light from the object S (user's finger). Therefore, the displacement measuring device 200 can quickly and reliably capture minute movements of non-contact operation of the object S, thereby enabling the non-contact operation of the object S to be detected with high accuracy.

[0072] [Seventh embodiment] Next, a motion information output device according to a seventh embodiment of the present invention will be described below. Fig. 9 is a schematic perspective view showing an example of a motion information output device 1200 according to the seventh embodiment of the present invention.

[0073] 9, the motion information output device 1200 includes a housing 1201, an optical window 1204, a support stand 1205, and a display device 1206. The motion information output device 1200 also includes a displacement measuring device 200 inside the housing 1201.

[0074] The motion information output device 1200 shown in Fig. 9 is a device capable of detecting small vibrations (e.g., tremors) of a living body that is a target object S. Tremors are involuntary movements that occur when muscles are repeatedly contracted and relaxed, and hand tremors are a typical example. Tremors can be caused by, for example, stress, anxiety, fatigue, hyperthyroidism, alcohol withdrawal symptoms, and the like. In addition, resting tremors are considered to be one of the main symptoms of Parkinson's disease.

[0075] Tremor has been conventionally measured using myoelectric potential measurement or an acceleration sensor. The motion information output device 1200 is equipped with the displacement measuring device 200, which can remove the internally scattered light contained in the reflected light from the object S. Therefore, the displacement measuring device 200 can quickly and reliably capture the microvibrations of the object S at the micrometer level, and therefore the tremor can be measured with high accuracy in a non-contact environment.

[0076] 9, tremor is measured by the motion information output device 1200 with the angle from the elbow to the forearm being 45° with respect to a horizontal support stand 1205. The motion information output device 1200 irradiates the back of the hand with coherent light from the displacement measuring device 200, and the coherent light reflected by the back of the hand passes through the optical window 1204 and the light guiding member 20 of the displacement measuring device 200 and is incident as an interference image on the light receiver 30 of the displacement measuring device 200.

[0077] As a result, the processor 150 included in the displacement measuring device 200 can quickly and reliably detect the minute displacement of the object S, that is, can measure the tremor of the object S with high accuracy. The tremor data measured by the displacement measuring device 200 can be used to understand the user's condition or as medical data by performing frequency analysis or the like.

[0078] The displacement measuring device 200 is not limited to application to the motion information output device 1100 and the motion information output device 1200, but can also be applied to other devices that measure the amount of displacement of the target object S.

[0079] For example, the displacement measuring device 200 can be applied to an input device (e.g., a mouse) that includes the displacement measuring device 200 and a transmission means for transmitting to an external controlled device the displacement amount of the target object S estimated by the measured object displacement amount estimation means included in the displacement measuring device 200. This makes it possible to realize a miniaturized input device and highly accurate detection of a minute displacement amount of the target object S by the input device, thereby realizing, for example, a small and portable input device.

[0080] Furthermore, for example, the displacement measuring device 200 can be applied to a vibration monitoring device in which a display means visualizes and displays the time variation of the displacement amount of the object S. This makes it possible to realize a vibration monitoring device that is compact and enables the vibration monitoring device to detect minute displacement amounts of the object S with high accuracy, thereby realizing, for example, a small and portable (or wearable) vibration monitoring device.

[0081] Although the preferred embodiments have been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications and substitutions can be made to the above-described embodiments of the present invention without departing from the scope of the claims.

[0082] For example, the arrangement of the light source 10, the light guide member 20, and the object S can be modified in various ways in addition to the arrangement of the light source 10, the light guide member 20, and the object S shown in the first to fourth embodiments. For example, the light source 10 can be arranged above the object S, and the light guide member 20 can be arranged below the object S. The light guide member 20 can receive a part of the scattered light L5 emitted from the light source 10 through the light input unit 21, guide the light inside, and then output the light through the light output unit 22. In addition, the displacement information output device according to the embodiment can include various members such as lenses and mirrors, or various electronic components, depending on the object from which information about three-dimensional displacement is acquired, in addition to the light source 10, the light guide member 20, and the light receiver 30. In addition, the object S is not limited to a user's finger, and may be various movable objects.

[0083] [Eighth embodiment] 10 is a schematic cross-sectional view of a displacement measuring device 200d according to an eighth embodiment of the present invention, taken along line II-II in FIG.

[0084] In this embodiment, the light guide member 20 is different from the displacement measuring device 200 according to the first embodiment in that it has a shielding portion 82 that intersects with an imaginary plane including a line segment U2 connecting the light entrance portion 21 and the light exit portion 22 and a line segment indicating the optical axis direction U1 of the light L3 incident from the light entrance portion 21. In the example shown in Fig. 10, the imaginary plane including the line segment U2 and the line segment indicating the optical axis direction U1 is an imaginary plane along the XZ plane. The line segment U2 connecting the light entrance portion 21 and the light exit portion 22 is, for example, a line segment connecting the center of the light entrance portion 21 and the center of the light exit portion 22.

[0085] In the example shown in FIG. 10, the displacement measuring device 200d includes a displacement information output device 100d, a light branching member 80 that reflects a part of the light L0 from the light source 10 toward the object S and transmits the light L3 from the object S, and a lens 81 that focuses the light L3 that has transmitted through the light branching member 80. The displacement information output device 100d includes a light source 10, a light guide member 20, and a light receiver 30. The light branching member 80 transmits the light L3 that has been reflected by the light branching member 80 and reflected or scattered by the object S. The light L3 that is focused by the lens 81 passes through the light incident portion 21 and enters the inside of the light guide member 20. From another perspective, the light L3 is coupled to the light guide member 20 through the light incident portion 21.

[0086] The shielding portion 82 is a member having a light blocking property against the light L3. For example, the light blocking property of the shielding portion 82 is preferably such that the transmittance of the light L3 is 20% or less. The shielding portion 82 may be either a reflector or an absorber.

[0087] The lens 81 has a function of selectively coupling light scattered in the direction along the optical axis direction U1, out of the light L3 reflected or scattered by the object S, to the light guide member 20. This configuration reduces the influence of stray light due to interface reflection of the light branching member 80 and the light beam region in the shadow of the light entrance portion 21, and a speckle image having a wide range of isotropic spatial distribution is obtained in the light receiver 30. In this embodiment, by improving the spatial distribution of the speckle image, the speckle shift accompanying the movement of the object S is quantified with high accuracy, and the measurement accuracy of the displacement measuring device 200d is improved.

[0088] In this embodiment, by disposing the shielding portion 82, the amount of direct light reflected by the upper surface 20A and the lower surface 20B of the internal space of the light-guiding member 20 without being reflected by the side wall surfaces (surfaces along the Z direction) of the internal space of the light-guiding member 20 is reduced, out of the light traveling from the light incident portion 21 to the light emitting portion 22. This makes it easier to form a speckle image having an isotropic shape.

[0089] <Simulation results of light ray trajectories and speckle images inside the light-guiding member 20> In FIG. 10, light L3 coupled to the light-guiding member 20 through the light incident portion 21 is repeatedly reflected by the upper surface 20A and the lower surface 20B of the light-guiding member 20 and the straight and curved portions of the side wall surface when viewed from above, and reaches the light exit portion 22.

[0090] Fig. 11 is a diagram showing a first example of a light ray trajectory and a speckle image by simulation, and Fig. 12 is a diagram showing a second example of a light ray trajectory and a speckle image by simulation.

[0091] 11 and 12, the thick solid lines and the thin solid lines represent light rays. The light rays shown by the thick solid lines are a group of light rays that have been reflected by the curved sidewall surface of the light-guiding member 20. It is known that the light rays in the group of light rays exhibit nonlinearity (chaos) by repeatedly reflecting off the curved and straight parts of the sidewall surface of the light-guiding member 20. Nonlinearity means that the light rays do not converge to a specific light ray trajectory, but trace a light ray trajectory that fills the reflective light-guiding member, and have a long propagation path.

[0092] Two types of thin solid lines indicate a light ray that reaches light exit portion 22 from light entrance portion 21 without being reflected by the side wall surface, and a light ray that reaches light exit portion 22 via reflection only at the straight portion of the side wall surface in top view. Since these light rays do not exhibit nonlinearity, when estimating the amount of displacement of object S from the change in the speckle image, they become a factor that reduces the estimation accuracy of the amount of displacement.

[0093] Fig. 11 shows ray trajectories and speckle images in a light-guiding member 20 in which the length D of a straight line portion extending in the X direction is 15 mm. Fig. 12 shows ray trajectories and speckle images in a light-guiding member 20 in which the length D of a straight line portion extending in the X direction is 5 mm. In Fig. 11 and Fig. 12, the upper parts show ray trajectories, and the lower parts show speckle images calculated based on the optical path length distribution of light rays.

[0094] Between the examples shown in FIGS. 11 and 12, it can be seen that in FIG. 12, the proportion of light rays that have been reflected at the curved portion of the side wall surface in top view is higher, and a speckle image having an isotropic shape is formed.

[0095] [Variations] Various modified examples of the light guide member 20 will be described below.

[0096] (First to fourth modified examples) Fig. 13 is a schematic top view of a light guiding member 20a according to a first modified example. Fig. 14 is a schematic top view of a light guiding member 20b according to a second modified example. Fig. 15 is a schematic top view of a light guiding member 20c according to a third modified example. Fig. 16 is a schematic top view of a light guiding member 20d according to a fourth modified example. The light guiding member 20a, the light guiding member 20b, the light guiding member 20c, and the light guiding member 20d each have a light entrance portion 21 and a light exit portion 22.

[0097] The light-guiding member 20a shown in Fig. 13 has a stadium-shaped shape in top view. The light guided by the light-guiding member 20a includes light reflected by linear portions of the side wall surfaces in top view, the upper surface 20A, and the lower surface 20B, in addition to light reflected by curved portions of the side wall surfaces in top view as described in Figs. 11 and 12.

[0098] 14 includes a substantially rectangular shielding portion 82 in the center when viewed from above. The light guiding member 20b includes the shielding portion 82, so that more light that is not reflected at the curved portion of the side wall surface when viewed from above is blocked by the light guiding member 20a.

[0099] 15 includes a substantially rectangular shielding portion 82 in top view. However, the shielding portion 82 of the light guiding member 20c is positioned toward the -Y side compared to the light guiding member 20b. In the light guiding member 20c, a part of the outer periphery of the light guiding member 20c and a part of the shielding portion 82 are common to each other. Since a part of the outer periphery of the light guiding member 20c and a part of the shielding portion 82 are common to each other, the manufacturing difficulty of the light guiding member 20c is reduced.

[0100] 16 includes a shielding portion 82 having a stadium shape in the center when viewed from above. The light-guiding member 20d blocks direct light by the shielding portion 82. The shielding portion 82 of the light-guiding member 20d includes a curved portion in its outer shape when viewed from above. The shielding portion 82 includes a curved portion when viewed from above, thereby reducing the amount of light that returns to the light incident portion 21. In addition, the curved portion of the shielding portion 82 functions as a side wall surface. As a result, the light-guiding member 20d can enhance the light diffusion effect due to nonlinearity.

[0101] (Fifth and Sixth Modifications) Fig. 17 is a schematic exploded perspective view showing a light guide member 20e according to a fifth modified example, and Fig. 18 is a schematic exploded perspective view showing a light guide member 20f according to a sixth modified example.

[0102] The light-guiding member 20e and the light-guiding member 20f differ from the light-guiding member 20 included in the displacement information output device 100 according to the first embodiment in that the inner wall forming the internal space includes a portion having a curvature. By including a portion having a curvature in the inner wall forming the internal space, as described below, the amount of light reflected by the portion having a curvature among the light traveling from the light entrance portion 21 to the light exit portion 22 is increased, making it easier to form a speckle image having an isotropic shape.

[0103] 17, the light guide member 20e has a first substrate 20e-1 including a light incident portion 21, and a second substrate 20e-2 including a light emitting portion 22, a shielding portion 82, and a recess 83. The first substrate 20e-1 and the second substrate 20e-2 have mirror-finished non-contact surfaces. The first substrate 20e-1 and the second substrate 20e-2 are joined together without any gaps by a substrate joining method such as adhesion or anodic bonding, or a screw fixing method.

[0104] The light emitting portion 22 is a through hole formed in the recess 83. The shielding portion 82 is a protrusion formed in the recess 83. By combining the first substrate 20e-1 and the second substrate 20e-2, the recess 83 becomes an internal space formed inside the light guide member 20e. The light incident from the light incident portion 21 into the light guide member 20e is confined in the internal space and is guided by being totally reflected by the inner wall surface that defines the internal space. The light guide member 20e in which the first substrate 20e-1 and the second substrate 20a-2 are combined can efficiently confine light in the light guide member 20e because there is no gap between the first substrate 20e-1 and the second substrate 20e-2.

[0105] In FIG. 18, the light-guiding member 20f has a first substrate 20f-1 including a light incident portion 21, a second substrate 20f-2 including a light emitting portion 22, and a third substrate 20f-3 arranged between the first substrate 20f-1 and the second substrate 20f-2 and including a shielding portion 82.

[0106] The third substrate 20f-3 includes an outer peripheral portion 84 that supports the shielding portion 82. The outer peripheral portion 84 is disposed around the shielding portion 82, and a portion of the outer peripheral portion 84 supports the shielding portion 82 by connecting to the shielding portion 82. The inner side of the outer peripheral portion 84 in a top view penetrates from the upper surface 841 to the lower surface 842 of the third substrate 20f-3, except for the portion where the shielding portion 82 is present. This penetration structure makes it easy to arrange and drive a mirror processing tool such as a polishing tool when mirror processing is performed on the first substrate 20f-1, the second substrate 20f-2, and the third substrate 20f-3. As a result, the light guide member 20f with high surface accuracy can be easily manufactured.

[0107] The first substrate 20f-1 and the second substrate 20f-2 also have mirror-finished surfaces that define the internal space of the light-guiding member 20f. Since the surfaces that define the internal space of the light-guiding member 20f in the first substrate 20f-1 and the second substrate 20f-2 are flat, it is easy to arrange and drive a mirror-finishing tool such as a polishing tool. This makes it easy to manufacture the light-guiding member 20f with high surface accuracy. The first substrate 20f-1, the second substrate 20f-2, and the third substrate 20f-3 can be joined together by a substrate joining method such as adhesion or anodic bonding, or a screw fixing method.

[0108] (Seventh to Ninth Modifications) Fig. 19 is a schematic top view of a light guide member 20g according to a seventh modified example, Fig. 20 is a schematic top view of a light guide member 20h according to an eighth modified example, and Fig. 21 is a schematic top view of a light guide member 20i according to a ninth modified example.

[0109] The light guiding member 20g, the light guiding member 20h, and the light guiding member 20i have a structure inverted from the stadium type in top view, that is, a structure including a straight portion on the outer peripheral wall 85 and a curved portion on the inner peripheral wall 86. Such a structure is called a Sinai type structure. The Sinai type structure is known to exhibit nonlinearity (chaos).

[0110] 19 to 21, the light guiding member 20g, the light guiding member 20h, and the light guiding member 20i having the Sinai-type structure have a light entrance portion 21 and a light exit portion 22. The inner peripheral wall 86 of the light guiding member 20g, the light guiding member 20h, and the light guiding member 20i has a substantially circular shape in a top view. In the light guiding member 20g, the light guiding member 20h, and the light guiding member 20i, the number of light rays reflected by the inner peripheral wall 86 can be increased, and the component reflected only by the outer peripheral wall 85 can be reduced.

[0111] 19 has a substantially rectangular outer shape in top view. The light entrance portion 21 and the light exit portion 22 are arranged side by side in the X direction along which the sides of the outer shape of the light guiding member 20g extend. In the light guiding member 20g, the distance between the light entrance portion 21 and the light exit portion 22 is short, which is preferable from the viewpoint of miniaturizing the light guiding member 20g and miniaturizing a displacement measuring device having the light guiding member 20g.

[0112] The light guide member 20h shown in FIG. 20 has a substantially rectangular outer shape in top view. The light entrance portion 21 and the light exit portion 22 are arranged diagonally in the outer shape of the light guide member 20g. The light guide member 20h has a large space in which the light entrance portion 21 and the light exit portion 22 can be arranged. This makes it easy to manufacture the light guide member 20h. In addition, since the size of the inner circumferential wall 86 is large, the light beams reflected by the inner circumferential wall 86 can be more efficiently guided to the light exit portion 22.

[0113] The light guide member 20i shown in Fig. 21 has an outer shape including curved portions at the corners and the center of the sides of a substantially rectangular outer shape in a top view. In the example shown in Fig. 21, the curvature of the curved portions at the corners is different from that of the curved portions at the center of the sides. However, the curvature of the curved portions at the corners may be equal to that of the curved portions at the center of the sides. In the light guide member 20i, the width of the optical path through which the light is guided is narrow, and the number of reflections in the optical path from the light entrance portion 21 to the light exit portion 22 is large. The large number of reflections allows the light to be mixed and the optical path length to be diversified.

[0114] (Tenth to Twelfth Modifications) Fig. 22 is a schematic top view of a light guide member 20j according to a tenth modified example, Fig. 23 is a schematic top view of a light guide member 20k according to an eleventh modified example, and Fig. 24 is a schematic top view of a light guide member 20m according to a twelfth modified example.

[0115] The light guiding member 20j, the light guiding member 20k, and the light guiding member 20m include straight portions and curved portions in a top view. In the light guiding member 20j, the light guiding member 20k, and the light guiding member 20m, the light incident through the light incident portion 21 is reflected by the outer peripheral wall corresponding to the curved portion in a top view, and then reaches the light emitting portion 22.

[0116] 22 has a substantially D-shape in top view. A shielding portion 82 having a substantially rectangular shape in top view is included between the light entrance portion 21 and the light exit portion 22. The light entrance portion 20j includes the shielding portion 82, which prevents light that is not reflected by the outer circumferential wall corresponding to the curved portion in top view from reaching the light exit portion 22. In addition, by arranging the light entrance portion 21 on the outer circumferential wall side corresponding to the curved portion on the upper surface, most of the incident light is reflected, that is, the light can be guided to the light exit portion 22 as light having nonlinearity.

[0117] The light-guiding member 20k shown in FIG. 23 has a generally sector-shaped shape with a central angle of approximately 90 degrees in top view. The light entrance portion 21 is located in a region protruding from the sector near the center of the generally sector in top view. The light exit portion 22 is located near an arc of the generally sector. The light entrance portion 21 is located in a region protruding from the sector near the center of the generally sector, thereby reducing direct light incidence. Light that reaches the light exit portion 22 passes through reflection at least once on the outer peripheral wall. In the light-guiding member 20k, the outer peripheral wall has a function similar to that of the shielding portion 82 in the light-guiding member 20j and the like. The outer peripheral wall has a function similar to that of the shielding portion 82, which makes it easier to manufacture the light-guiding member 20k than the light-guiding member 20j and the like.

[0118] The light guide member 20m shown in FIG. 24 has an approximately L-shaped shape including a portion bent at 90 degrees in top view. The light guide member 20m includes a curved portion at each of two end portions of the approximately L-shaped shape in top view. The light entrance portion 21 is disposed at one of the two end portions of the approximately L-shaped shape in top view. The light exit portion 22 is disposed at the other end portion of the two end portions of the approximately L-shaped shape in top view. Since the light guide member 20m has an approximately L-shaped shape in top view, the light incident from the light entrance portion 21 always reaches the light exit portion 22 after being reflected by the outer peripheral wall. By adjusting the width of the region where the straight portion of the approximately L-shaped shape extends in top view, the number of reflections of light, that is, the distribution of the optical path length, can be adjusted. In top view, the curved portion where the light entrance portion 21 is disposed constitutes a part of a circle. The light entrance portion 21 is disposed at a position deviated from the center of the circle. This reduces the probability that light incident through light incident part 21 will be reflected by the outer peripheral wall corresponding to the curved portion in top view, return to light incident part 21, and be emitted to the outside through light incident part 21, compared to when light incident part 21 is placed at a position overlapping the center of the circle. As a result, the light utilization efficiency is increased.

[0119] (Thirteenth to fifteenth modified examples) Fig. 25 is a schematic top view of a light guiding member 20n according to a thirteenth modified example. Fig. 26 is a schematic cross-sectional view taken along line XXVI-XXVI in Fig. 25. Fig. 27 is a schematic top view of a light guiding member 20p according to a fourteenth modified example. Fig. 28 is a schematic cross-sectional view taken along line XXVIII-XXIIVI in Fig. 27. Fig. 29 is a schematic top view of a light guiding member 20q according to a fifteenth modified example. Fig. 30 is a schematic cross-sectional view taken along line XXX-XXX in Fig. 29.

[0120] The light guiding member 20n, the light guiding member 20p, and the light guiding member 20q differ from the light guiding member 20 of the displacement information output device 100 according to the first embodiment in that the light guiding member 20n, the light guiding member 20p, and the light guiding member 20q each have a recess on at least one of the upper surface and the lower surface. As a result, as described below, the light guiding member 20n, the light guiding member 20p, and the light guiding member 20q can enhance the stirring of the light path in the light guiding member 20n, the light guiding member 20p, and the light guiding member 20q, respectively.

[0121] The light guide member 20n shown in FIG. 25 has a stadium shape in top view. As shown in FIG. 26, the light guide member 20n includes a first recess 27n on the lower surface 20B. In the example shown in FIG. 26, the first recess 27n is a hemispherical recess. The first recess 27n is located directly below the light entrance portion 21. Since the light guide member 20n has the first recess 27n, the light coupled to the light guide member 20n through the light entrance portion 21 is reflected in various directions by the first recess 27n. The light reaching the light exit portion 22 is diffused by nonlinearity and then exits from the light exit portion 22. As a result, the diffusion effect of the light exiting from the light exit portion 22 is increased. In addition, since the light guide member 20n includes the hemispherical first recess 27n, the light guide member 20n can be manufactured more easily than when the recess includes a pointed portion, for example.

[0122] The light guide member 20p shown in FIG. 27 has a stadium shape in top view. As shown in FIG. 28, the light guide member 20p includes a second recess 27p on the lower surface 20B. In the example shown in FIG. 28, the second recess 27p includes a pointed portion. The second recess 27p is located directly below the light incident portion 21. Since the light guide member 20p has the second recess 27p, the light coupled from the light incident portion 21 to the light guide member 20p is reflected in various directions by the second recess 27p. The light reaching the light output portion 22 is diffused by nonlinearity and then output from the light output portion 22. As a result, the diffusion effect of the light output from the light output portion 22 is increased. In addition, since the second recess 27p includes a pointed portion in the light guide member 20p, the light coupling efficiency in the light guide member 20p is increased compared to the case where the recess is hemispherical, for example.

[0123] The light guide member 20q shown in FIG. 29 has a substantially rectangular shape in a top view. In the light guide member 20q, both the light entrance portion 21 and the light exit portion 22 are disposed on the upper surface 20A. As shown in FIG. 30, the light guide member 20q includes a third recess 27q1 and a fourth recess 27q2 on the lower surface 20B. The light guide member 20q also includes a fifth recess 28, a sixth recess 29q1, and a seventh recess 29q2 on the upper surface 20A. In the example shown in FIG. 30, the third recess 27q1, the fourth recess 27q2, and the fifth recess 28 each include a hemispherical portion. The third recess 27q1 is located directly below the light exit portion 22. The fourth recess 27q2 is located directly below the light entrance portion 21. The fifth recess 28 is located between the light entrance portion 21 and the light exit portion 22. The sixth recess 29q1 is located outside the light exit portion 22 in top view. The seventh recess 29q2 is located outside the light entrance portion 21 in top view. The light guide member 20q has the third recess 27q1 and the fourth recess 27q2, so that the light that passes through the light entrance portion 21 and is coupled to the light guide member 20p is mixed more. As a result, the light emitted from the light exit portion 22 is more diffused. The third recess 27q1, the fourth recess 27q2, the fifth recess 28, the sixth recess 29q1, and the seventh recess 29q2 have partially different curvatures. However, the curvatures of the third recess 27q1, the fourth recess 27q2, the fifth recess 28, the sixth recess 29q1, and the seventh recess 29q2 may be different from each other, or may all be the same.

[0124] The ordinal numbers, quantities, and other numbers used in the description of the embodiments of the present invention are all examples given to specifically explain the technology of the present invention, and the present invention is not limited to the exemplified numbers. Furthermore, the connection relationships between the components are examples given to specifically explain the technology of the present invention, and do not limit the connection relationships that realize the functions of the present invention.

[0125] The displacement information output device, displacement measuring device, and motion information output device according to the present invention can acquire and output highly accurate displacement information and can therefore be used for a variety of purposes.

[0126] For example, the present invention can be suitably used in a motion capture device mounted on a controller for controlling a displacement electronic device, an operation device in a VR space, an operation device used while wearing AR glasses, an operation device for a game machine, etc. By using the displacement information output device, displacement measurement device, and motion information output device according to the present invention, it is possible to realize a non-contact and natural operation input without restricting the user's movements.

[0127] The displacement information output device, displacement measuring device, and motion information output device of the present invention can acquire and output highly accurate displacement information, and therefore can be suitably used as detection devices capable of detecting various objects such as vibrations and tremors.

[0128] For example, aspects of the present invention are as follows. <1> The displacement information output device includes a light source, a light entrance section and a light exit section, and has a light guiding member that guides the light that is incident from the light source onto an object and is at least one of reflected and scattered by the object, and emits the light from the light exit section, and a light receiver that receives the light exiting from the light exit section and outputs information regarding the three-dimensional displacement of the object obtained based on the light exiting from the light exit section. <2> the light guide member has a shielding portion that intersects with an imaginary plane that includes a line segment that connects the light incident portion and the light exit portion and a line segment that indicates the direction of an optical axis of light incident from the light incident portion; <1> 2 is a displacement information output device according to the first embodiment. <3> The light guide member includes an inner wall that defines an internal space and has a curvature. <1> or the above <2> 2 is a displacement information output device according to the first embodiment. <4> The light guide member has a shape including a straight portion on an outer peripheral wall and a curved portion on an inner peripheral wall when viewed from above. <1> From the above <3> 1 is a displacement information output device according to any one of the above items. <5> The light guide member has a rectangular outer shape or an outer shape including curved portions at corners and central portions of sides of the rectangular outer shape when viewed from above. <4> 2 is a displacement information output device according to the first embodiment. <6> The light guide member has an outer shape selected from the group consisting of a D-shape, a sector shape with a central angle of 90 degrees, and an L-shape including a portion bent at 90 degrees, as viewed from above. <1> From the above <3> 1 is a displacement information output device according to any one of the above items. <7> The light guide member has a recess on at least one of an upper surface and a lower surface of the light guide member. <1> From the above <6> 1 is a displacement information output device according to any one of the above items. <8> The light emitted from the light emitting unit includes speckles generated due to at least one of reflection and scattering on the object, and the light receiver outputs information regarding a three-dimensional displacement of the object obtained based on the speckles. <1> From the above <7> 1 is a displacement information output device according to any one of the above items. <9> The light guiding member is an elongated member in a predetermined longitudinal direction, and curved surfaces are provided at both ends of the light guiding member in the longitudinal direction, and a linear portion extending in the longitudinal direction is provided between the curved surfaces on both sides of the light guiding member in the longitudinal direction when the light guiding member is viewed from a direction perpendicular to the longitudinal direction. <1> From the above <8> 1 is a displacement information output device according to any one of the above items. <10> The light source is disposed on the opposite side of the light guide member from the side on which the object is located, and light emitted from the light source passes through the light guide member and is irradiated onto the object. <1> From the above <9> 1 is a displacement information output device according to any one of the above items. <11> The light source is disposed on a side where the object is located with respect to the light guide member, and light emitted from the light source is irradiated onto the object without passing through the light guide member. <1> From the above <10> 1 is a displacement information output device according to any one of the above items. <12> a light deflecting member disposed between the object and the light guiding member, the light emitted from the light source is incident on the light deflecting member, the light deflecting member irradiates the light incident from the light source onto the object, and the light guiding member guides the light incident from the light incident portion after the light irradiated from the light deflecting member is scattered by the object; <1> From the above <11> 1 is a displacement information output device according to any one of the above items. <13> the light guide member includes a light reflecting member covering a surface of the light guide member, the light input portion is a first opening provided in the light reflecting member, and the light output portion is a second opening provided in the light reflecting member; <1> From the above <12> 1 is a displacement information output device according to any one of the above items. <14> The light guide member guides the light incident from the light incident portion by total reflection inside the light guide member. <1> From the above <12> 1 is a displacement information output device according to any one of the above items. <15> The light guide member includes a laser medium that amplifies light guided inside the light guide member. <1> From the above <14> 1 is a displacement information output device according to any one of the above items. <16> the light receiver includes a plurality of pixels, detects a change in luminance of each of the plurality of pixels, and outputs information about the changed luminance in combination with coordinate information and time information; <1> From the above <15> 1 is a displacement information output device according to any one of the above items. <17> The light guide member is a plate-shaped member. <1> From the above <16> 1 is a displacement information output device according to any one of the above items. <18> The light guide member is an elongated member in a predetermined longitudinal direction and is a rotationally symmetric body with a central axis of the light guide member along the longitudinal direction as a rotation axis. <1> From the above <16> 1 is a displacement information output device according to any one of the above items. <19> The light guide member is a hollow member. <1> From the above <16> 1 is a displacement information output device according to any one of the above items. <20> The above <1> From the above <19> and a processor that outputs a measurement result of the three-dimensional displacement of the object obtained based on information regarding the three-dimensional displacement input from the displacement information output device. <21> The above <20> and a motion information output device that outputs motion information of the object obtained based on a measurement result of the three-dimensional displacement of the object input from the displacement measuring device. [Explanation of symbols]

[0129] 10 light source 20, 20a, 20b, 20c, 20d, 20e, 20f, 20g, 20h, 20i, 20j, 20k, 20m, 20n, 20p, 20q Light guide member 20e-1, 20f-1 First board 20e-2, 20f-2 Second board 20f-3 3rd board 20A top 20B Bottom 21 Light incidence part 22 Light emitting part 23 Light source side aperture 24 Curved surface 25 Linear Parts 26 Light-reflective materials 27n First recess 27p 2nd recess 27q1 3rd recess 27q2 4th recess 28 5th recess 29q1 6th recess 29q2 7th recess 30 Receiver 40 Substrate 50 Support 60 Light deflection member 70 Case 80 Optical branching component 81 Lens 82 Shielding part 83 Recess 84 Outer periphery 841 Top surface 842 Bottom surface 85 Peripheral wall 86 Inner wall 100, 100a, 100b, 100c, 100d Displacement information output device 121 first off-axis reflecting means 122 second off-axis reflecting means 123 First light collecting means 124 Second light collecting means 125 Micro opening 126 Optical Branching Element 150 processors 200, 200a, 200b, 200c, 200d Displacement measuring device 300, 1100, 1200 Motion information output device 1101 Case 1103 Imaging plate 1104 Optical window 1201 Case 1204 Optical window 1205 Support stand 1206 Display Device L0, L1, L3 light L2 output light N Normal P1 Information on three-dimensional displacement P2 Measurement results of three-dimensional displacement P3 Motion Information S Object U1 Optical axis direction U2 line [Prior art documents] [Patent documents]

[0130] [Patent Document 1] U.S. Patent No. 10,152,798

Claims

1. A light source for irradiating an object; a light guide member including a light incident portion and a light exit portion, which guides the light incident from the light incident portion after at least one of the light reflected and scattered by the object and emits the light from the light exit portion; a light receiver that receives the light emitted from the light emitting portion and outputs information regarding the three-dimensional displacement of the object obtained based on the light emitted from the light emitting portion.

2. The displacement information output device according to claim 1 , wherein the light-guiding member has a shielding portion that intersects with an imaginary plane that includes a line segment connecting the light incident portion and the light exit portion and a line segment indicating the optical axis direction of the light incident from the light incident portion.

3. The displacement information output device according to claim 1 , wherein the light guide member includes a portion having a curvature on an inner wall that defines an internal space.

4. The displacement information output device according to claim 1 , wherein the light guide member has a shape including a straight portion on an outer circumferential wall and a curved portion on an inner circumferential wall when viewed from above.

5. The displacement information output device according to claim 4 , wherein the light guide member has a rectangular outer shape in a top view or an outer shape including curved portions at corners and center portions of sides of the rectangular outer shape.

6. The displacement information output device according to claim 1 , wherein the light-guiding member has an outer shape selected from the group consisting of a D-shape, a sector shape with a central angle of 90 degrees, and an L-shape including a portion bent at 90 degrees, when viewed from above.

7. The displacement information output device according to claim 1 , wherein the light guide member has a recess on at least one of an upper surface and a lower surface of the light guide member.

8. the light emitted from the light emitting unit includes speckles generated due to at least one of reflection and scattering on the object, The displacement information output device according to claim 1 , wherein the light receiver outputs information relating to a three-dimensional displacement of the object obtained based on the speckle.

9. The light guide member is an elongated member in a predetermined longitudinal direction, a curved surface is provided at each of the end portions on both sides of the light guide member in the longitudinal direction, The displacement information output device of claim 1, wherein a linear portion extending in the longitudinal direction is provided between the curved surfaces on both sides of the light-guiding member in the longitudinal direction when the light-guiding member is viewed from a direction perpendicular to the longitudinal direction.

10. the light source is disposed on an opposite side to a side on which the object is located with respect to the light guide member; The displacement information output device according to claim 1 , wherein the light emitted from the light source is irradiated onto the target object through the light guiding member.

11. the light source is disposed on a side on which the object is located with respect to the light guiding member; The displacement information output device according to claim 1 , wherein the light emitted from the light source is irradiated onto the object without passing through the light guiding member.

12. a light deflection member disposed between the object and the light guide member; The light emitted from the light source is incident on the light deflection member, The light deflection member irradiates the object with light incident from the light source, The displacement information output device according to claim 1 , wherein the light guide member guides the light incident from the light incident portion after the light irradiated from the light deflection member is scattered by the object.

13. the light guide member includes a light reflecting member covering a surface of the light guide member, the light incident portion is a first opening provided in the light reflective member, The light exit portion is a second opening provided in the light reflective member. The displacement information output device according to claim 1 .

14. The displacement information output device according to claim 1 , wherein the light guide member guides the light incident from the light incident portion by total reflection inside the light guide member.

15. 2. The displacement information output device according to claim 1, wherein the light guiding member includes a laser medium that amplifies the light guided inside the light guiding member.

16. 2. The displacement information output device according to claim 1, wherein the light receiver includes a plurality of pixels, detects a change in luminance of each of the plurality of pixels, and outputs information relating to the changed luminance together with coordinate information and time information.

17. The displacement information output device according to claim 1 , wherein the light guide member is a plate-like member.

18. 2 . The displacement information output device according to claim 1 , wherein the light guide member is an elongated member in a predetermined longitudinal direction and is a rotationally symmetric body with a central axis of the light guide member along the longitudinal direction as a rotation axis.

19. The displacement information output device according to claim 1 , wherein the light guide member is a hollow member.

20. A displacement information output device according to any one of claims 1 to 19, a processor that outputs a measurement result of the three-dimensional displacement of the object obtained based on the information regarding the three-dimensional displacement input from the displacement information output device.

21. A displacement measuring device according to claim 20, A motion information output device that outputs motion information of the object obtained based on the measurement results of the three-dimensional displacement of the object input from the displacement measuring device.

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