Substrate transfer device, substrate processing apparatus, and inspection method

Abstract

To provide a substrate transfer device that can automatically sense a period when a maintenance is required, and which can be easily maintained.SOLUTION: A substrate transfer device comprises: an acquisition hand 11a that contains a guide member 32a that is provided onto an upper surface of a base member, and to which a peripheral edge of a substrate W is contacted, a sensor 22a that inspects the substrate W to be contacted to the guide member 32a, a guide member 34a that is provided onto the upper surface of a base member 31, and a sensor 26a that inspects the substrate W contacted to the guide member 34a; and a comparison part 41 that determines an inclination state of the acquisition hand 11a to the substrate W on the basis of a difference between a timing for inspecting the substrate W by the sensor 22a and a timing for inspecting the substrate W by the sensor 26a.SELECTED DRAWING: Figure 9

Description

Technical Field

[0001] The present invention relates to a substrate transfer device for transferring various substrates such as semiconductor substrates, substrates for flat panel displays (FPDs) such as liquid crystal displays and organic electroluminescence (EL) display devices, glass substrates for photomasks, and substrates for optical discs, and a substrate processing device including the same.

Background Art

[0002] Conventionally, as a substrate transfer device for realizing substrate transfer required for substrate processing, there is one having a hand body portion with a plurality of tactile sensors. When the substrate is placed on the plurality of tactile sensors, the tactile sensors detect the force in the Z-axis direction. In this way, it can be recognized that the substrate is normally placed on the hand body portion. In addition, the tactile sensors can also detect the angular deviation of the hand body portion in the Z-axis direction.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, the conventional substrate transfer device equipped with tactile sensors is not configured to fully utilize the tactile sensors. For example, according to the configuration of Patent Document 1, it only detects abnormalities in substrate transfer using tactile sensors.

[0005] Currently, there is a demand for a substrate transfer device that is easy to maintain. To facilitate maintenance, it is only necessary to automatically detect the timing when maintenance is required. Although tactile sensors are considered to be able to detect the deviation of the positional relationship between the substrate and the hand body portion, the specific configuration for realizing this has not been studied.

[0006] The present invention has been made in view of such circumstances, and an object thereof is to provide a substrate transfer device and a substrate processing device that automatically detect the timing when maintenance is required and facilitate maintenance. Another object of the present invention is to provide an inspection method for inspecting the timing when maintenance of the substrate transfer device is required.

Means for Solving the Problems

[0007] The present invention is configured as follows in order to solve the above problems. That is, the present invention is a substrate transfer device having a hand capable of transferring a substrate in a horizontal posture, The hand is a base member, a plurality of guides provided on the upper surface of the base member and in contact with the periphery of the substrate, a plurality of sensors for individually detecting the substrates in contact with the respective guides, and is provided with a determination unit that determines the inclination state of the hand with respect to the substrate based on the time difference at each timing when each sensor individually detects the substrate. A substrate transfer device characterized by the above.

[0008] [Operation and Effect] According to the above configuration, a hand including a plurality of guides provided on the upper surface of the base member and in contact with the periphery of the substrate, and a plurality of sensors for individually detecting the substrates in contact with the respective guides, and a determination unit that determines the inclination state of the hand with respect to the substrate based on the time difference at each timing when each sensor individually detects the substrate are provided. With this configuration, a substrate transfer device capable of continuously detecting changes in the hand over time can be provided. There is a predetermined relationship between the timing at which one sensor detects the substrate and the timing at which the other sensor detects the substrate. If the predetermined relationship is broken while measuring the timing for each substrate held by the hand, it can be determined that a positional deviation of the hand with respect to the substrate has occurred. Therefore, according to the present invention, a substrate transfer device that automatically detects the timing when maintenance is required and facilitates maintenance can be provided.

[0009] Also, in the above-described substrate transfer device, the first guide provided at the tip of the base member, the second guide provided at the base end of the base member, the first sensor that detects a substrate in contact with the first guide, the second sensor that detects a substrate in contact with the second guide, are provided, when the direction connecting the base end of the base member and the tip of the base member is defined as the front-rear direction, it is preferable that the determination unit determines the inclination state of the hand in the front-rear direction based on the time difference between the timing when the first sensor detects a substrate and the timing when the second sensor detects a substrate.

[0010] [Function and Effect] According to the above-described configuration, the first guide is provided at the tip of the base member, and the second guide is provided at the base end of the base member. And the first guide is provided with the first sensor for detecting a substrate, and the second guide is provided with the second sensor for detecting a substrate. And the determination unit determines the inclination state of the hand in the front-rear direction based on the time difference between the timing when the first sensor detects a substrate and the timing when the second sensor detects a substrate. When operating the substrate transfer device, there may be a change over time of the hand in which the inclination state of the tip changes with respect to the base end. According to the above-described configuration, since the first guide is provided at the tip of the base member and the second guide is provided at the base end of the base member, such a change over time can be easily detected.

[0011] Also, in the above-described substrate transfer device, when the direction connecting the base end of the base member and the tip of the base member is defined as the front-rear direction and the direction orthogonal to the front-rear direction in the horizontal plane is defined as the left-right direction, the first guide provided on one end side in the left-right direction at the tip of the base member, the second guide provided on the other end side in the left-right direction at the tip of the base member, the first sensor that detects a substrate in contact with the first guide, a second sensor configured to detect a substrate that has come into contact with the second guide Preferably, the determination unit determines the inclination state of the hand in the left - right direction based on the time difference between the timing at which the first sensor detects the substrate and the timing at which the second sensor detects the substrate.

[0012] [Function and Effect] According to the above - described configuration, the first guide is provided on one end side in the left - right direction at the tip of the base member, the second guide is provided on the other end side in the left - right direction at the tip of the base member, and the determination unit determines the inclination state of the hand in the left - right direction based on the time difference between the timing at which the first sensor detects the substrate and the timing at which the second sensor detects the substrate. When the substrate transfer device is in operation, there may be a change over time in the hand such that one end of the tip portion is displaced downward relative to the other end of the tip portion. According to the above - described configuration, since the first guide is provided at one end of the tip of the base member and the second guide is provided at the other end of the tip of the base member, such a change over time can be easily detected.

[0013] Also, in the above - described substrate transfer device, the hand is provided at the base end of the base member and includes at least one third guide with which the periphery of the substrate comes into contact, and a third sensor configured to detect a substrate that has come into contact with the third guide. The determination unit determines the inclination state of the hand in the front - rear direction based on the time difference between the timing at which the first sensor detects the substrate and the timing at which the third sensor detects the substrate, and preferably determines the inclination state of the hand in the left - right direction based on the time difference between the timing at which the first sensor detects the substrate and the timing at which the second sensor detects the substrate.

[0014] [Function and Effect] According to the above configuration, the hand includes a third guide provided at the proximal end of the base member and in contact with the peripheral edge of the substrate, and a third sensor for detecting the substrate in contact with the third guide. Then, the determination unit determines the inclination state of the hand in the front-rear direction based on the time difference between the timing when the first sensor detects the substrate and the timing when the third sensor detects the substrate. Further, the determination unit determines the inclination state of the hand in the left-right direction based on the time difference between the timing when the first sensor detects the substrate and the timing when the second sensor detects the substrate. With such a configuration, it is possible to detect the inclination due to the change over time of the hand in two directions orthogonal to each other, so that the maintenance of the substrate transfer device becomes easy.

[0015] Also, in the above-described substrate transfer device, it is preferable to include a notification unit that notifies that an index value indicating the time difference is greater than a predetermined value.

[0016] [Function and Effect] According to the above configuration, the notification unit notifies that an index value indicating the time difference in the substrate detection timing by the sensor is greater than a predetermined value. Thereby, the maintenance of the substrate transfer device becomes easy.

[0017] Also, in the above-described substrate transfer device, a lifting mechanism for lifting and lowering the hand, and a lifting control unit for controlling the lifting mechanism are provided, and the lifting control unit preferably raises the hand located below the substrate in a stationary state and brings the substrate into contact with the plurality of guides.

[0018] [Function and Effect] According to the above configuration, a lifting mechanism for lifting and lowering the hand and a lifting control unit for controlling the lifting mechanism are provided. Then, the lifting control unit raises the hand located below the substrate in a stationary state and brings the substrate into contact with the plurality of guides. With such a configuration, the substrate can be brought into contact with the plurality of guides simultaneously. Therefore, according to the above configuration, the object of the present invention can be more easily achieved.

[0019] Further, in the above-described substrate transfer device, it is preferable that the determination unit determines the inclination state of the hand with respect to the substrate based on the time difference between the two most separated timings over time among the timings at which each sensor individually detects the substrate.

[0020] [Operation and Effect] According to the above-described configuration, the inclination state of the hand with respect to the substrate is determined based on the time difference between the two most separated timings over time among the timings at which each sensor individually detects the substrate. With this configuration, the change of the hand over time can be detected more sensitively. Therefore, according to the above-described configuration, the object of the present invention can be more easily achieved.

[0021] Further, in the above-described substrate transfer device, each of the sensors is a tactile sensor, and it is preferable that the sensors are respectively provided between the base member and each of the guides.

[0022] [Operation and Effect] According to the above-described configuration, each of the sensors is a tactile sensor and is respectively provided between the base member and each of the guides. With this configuration, each tactile sensor can more directly and reliably detect the substrate placed on the base member.

[0023] Further, in the above-described substrate transfer device, each of the guides preferably includes a support portion that contacts the lower portion of the substrate and a wall portion that contacts the outer peripheral surface of the substrate.

[0024] [Operation and Effect] According to the above-described configuration, each of the guides includes a support portion that contacts the lower portion of the substrate and a wall portion that contacts the outer peripheral surface of the substrate. With this configuration, when gripping the substrate, the contact portion between the substrate and the guide is minimized as much as possible. Moreover, when the outer peripheral surface of the substrate abuts against the wall portion, the displacement of the substrate that occurs when gripping the substrate is appropriately prohibited. Therefore, according to the above-described configuration, a substrate transfer device suitable for transferring the substrate can be provided.

[0025] Further, in the above-described substrate transfer device, It is preferable that the base member includes a plurality of recesses in which the respective sensors are embedded.

[0026] [Function and Effect] According to the above configuration, the base member includes a plurality of recesses in which the respective sensors are embedded. With this configuration, it is possible to suppress the thickness in the height direction of the hand, and thus it is possible to provide a substrate transfer device in which the hand does not collide with the substrate during substrate transfer.

[0027] Further, in the above-described substrate transfer device, It is preferable that each of the sensors detects whether or not the substrate has come into contact with the corresponding guide.

[0028] [Function and Effect] According to the above configuration, each of the sensors detects whether or not the substrate has come into contact with the corresponding guide. With this configuration, the present invention can be realized by relatively inexpensive sensors.

[0029] Further, in a substrate processing apparatus including the above-described substrate transfer device, a carrier mounting shelf on which a carrier for stacking and storing substrates in a horizontal posture in the vertical direction can be mounted, it is preferable that the substrate transfer device carry in and out substrates with respect to the carrier.

[0030] [Function and Effect] According to the above configuration, a carrier mounting shelf on which a carrier for stacking and storing substrates in a horizontal posture in the vertical direction can be mounted is provided. Therefore, according to the above configuration, it is possible to detect a change over time of the hand with respect to the carrier.

[0031] Further, in the above-described substrate transfer device, It is preferable that the determination unit determines the inclination state of the carrier with respect to the hand based on the time difference at each timing when the respective sensors individually detect the substrate.

[0032] [Operation and Effect] According to the above configuration, when the determination unit stores the substrate conveyed by the hand in the carrier, it determines the inclination state of the carrier with respect to the hand based on the time difference at each timing when each sensor individually detects the substrate. Therefore, according to the above configuration, it is possible to know whether the carrier is maintaining a horizontal state.

[0033] Also, in a substrate processing apparatus including the above-described substrate transfer apparatus, it is preferable to include a single-wafer processing unit that processes the substrates conveyed by the substrate transfer apparatus one by one.

[0034] [Operation and Effect] According to the above configuration, a single-wafer processing unit that performs predetermined processing on the substrates conveyed by the substrate transfer apparatus one by one is provided. According to the above configuration, a substrate processing apparatus that is easy to maintain and can perform desired substrate processing can be provided.

[0035] This specification also discloses the following inventions. In an inspection method for a substrate transfer apparatus having a hand including a base member, a plurality of guides provided on the upper surface of the base member and in contact with the peripheral edges of the substrates individually, and a plurality of sensors for individually detecting the substrates in contact with the respective guides, an acquisition process of causing the hand to acquire the substrate, and a determination process of determining the inclination state of the hand with respect to the substrate based on the time difference at each timing when each sensor individually detects the substrate. An inspection method for a substrate transfer apparatus, characterized by the above.

[0036] [Operation and Effect] According to the above configuration, an acquisition process of causing the hand to acquire the substrate and a determination process of determining the inclination state of the hand with respect to the substrate based on the time difference at each timing when each sensor individually detects the substrate are provided. With this configuration, it is possible to provide an inspection method that can surely inspect the change over time of the hand.

Effect of the Invention

[0037] According to the present invention as described above, it is possible to provide a substrate transfer device and a substrate processing device that can automatically detect the timing when maintenance is required and facilitate maintenance. Further, according to the present invention, it is possible to provide an inspection method for inspecting the timing when maintenance of the substrate transfer device is required.

Brief Description of the Drawings

[0038]

Figure 1

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Figure 18

Embodiments for Carrying Out the Invention

[0039] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The following embodiments are substrate processing apparatuses equipped with the substrate transfer device of the present invention. The substrate transfer device of the present invention corresponds to the index block in the substrate processing apparatus of the embodiment. The index block has an index robot equipped with a hand for transferring substrates.

Example

[0040] 1. Overall Configuration As shown in FIG. 1, the substrate processing apparatus 1 of this example has a load port 10, an index block 3, and a processing block 5. The substrate processing apparatus 1 of this example relates to single-wafer substrate processing, and is configured to acquire a substrate W in a horizontal posture one by one from a carrier C, perform substrate processing, and then return the substrate W to the carrier one by one.

[0041] In this specification, for convenience, the direction in which the index block 3 and the processing block 5 are arranged in the substrate processing apparatus 1 is referred to as the "front-rear direction X". The front-rear direction X extends horizontally. Among the front-rear direction X, the direction from the processing block 5 to the index block 3 in the substrate processing apparatus 1 is referred to as "front". The direction opposite to the front is referred to as "rear". The horizontal direction extending perpendicular to the front-rear direction X is referred to as the "width direction Y". One direction of the "width direction Y" is referred to as "right" for convenience, and the other direction is referred to as "left" for convenience. The direction (height direction) perpendicular to the front-rear direction X and the width direction Y is referred to as the "vertical direction Z" for convenience. In each figure, front, rear, right, left, up, and down are appropriately shown for reference.

[0042] The load port 10 corresponds to the carrier placement shelf of the present invention. The load port 10 is a carrier placement shelf for placing the carrier C. A plurality of load ports 10 are arranged in the width direction Y and can each place one carrier C. The load port 10 can place the carrier C that stores the substrates in a horizontal posture by stacking them in the vertical direction.

[0043] That is, the carrier C stores a plurality of substrates W in a horizontal posture with a predetermined interval in the vertical direction Z. Further, an opening for taking in and out the substrate is provided on one side surface of the carrier C. A plurality of substrates W (for example, 25 sheets) are stacked and stored in one carrier C in a horizontal posture with a certain interval. FIG. 2 is a cross-sectional view for explaining the configuration of the carrier C. In the carrier C, comb-shaped members 7 having a plurality of protrusions for placing the substrate W are provided at both ends of the carrier housing. The protrusions of the comb-shaped member 7 are configured to place the ends of the substrate W. The protrusions extend in the front-rear direction X. The protrusions are arranged at intervals of 1 cm. As the carrier C, for example, there is a sealed FOUP (Front Opening Unify Pod). In the present invention, an open container may be adopted as the carrier C.

[0044] The index block 3 corresponds to the substrate transfer device of the present invention. The index block 3 has a rectangular shape extending in the width direction Y. The index block 3 is provided with an index robot IR having pickup hands 11a and return hands 11b capable of transferring substrates in a horizontal posture. The index robot IR is horizontally movable in the width direction Y. The index robot IR has hands capable of holding and transferring the substrate W. The hands are supported by an articulated arm configured to be capable of rotational movement, vertical movement, and forward and backward movement. The index robot IR can access the carrier C on the load port 10 and the path 24 provided in front of the processing block 5. The index robot IR can perform two operations: an operation of picking up substrates W in a horizontal posture one by one from the carrier C and placing them on the path 24, and an operation of picking up substrates W in a horizontal posture placed on the path 24 one by one and returning them to the carrier C. The unprocessed substrate W held by the carrier C is transported to the path 24 by the index robot IR. Then, the processed substrate W is placed on the path 24 and returned to the carrier C by the index robot IR. The index block 3 is configured to carry out and carry in the substrate W with respect to the carrier C.

[0045] The processing block 5 is configured to perform predetermined processing on the substrate W. The processing block 5 has a plurality of single-wafer processing chambers 5a arranged therein. The single-wafer processing chamber 5a corresponds to the single-wafer processing unit of the present invention. The single-wafer processing chamber 5a is configured to process the substrates W transferred by the index block 3 one by one.

[0046] The arrangement of the single-wafer processing chambers 5a in the processing block 5 will be described. That is, in the processing block 5 of the present invention, three single-wafer processing chambers 5a are arranged in each of the middle layer region, the upper layer region, and the lower layer region to form a stacked body. Two stacked bodies are arranged in front and rear on the right side of the processing block 5. Similarly, two stacked bodies are arranged in front and rear on the left side of the processing block 5. Therefore, twelve single-wafer processing chambers 5a are mounted on the processing block 5.

[0047] In the central part of the processing block 5, a substrate transfer area extending in the front-rear direction X is provided. The center robot CR can reciprocate in the substrate transfer area, and can pick up the substrates W in the horizontal posture one by one from the path 24 and transfer them to any of the single-wafer processing chambers 5a. Then, the center robot CR can pick up the substrates W in the horizontal posture held by the single-wafer processing chamber 5a one by one and return them to the path 24. In this way, the center robot CR can access each of the single-wafer processing chambers 5a and the path 24.

[0048] Examples of the substrate processing performed by the single-wafer processing chamber 5a include, for example, substrate cleaning processing. The substrate processing apparatus 1 in this example may be configured to perform various substrate processes using chemical solutions in addition to the substrate cleaning process.

[0049] 2. Configuration of the index robot FIG. 3 schematically shows the tip portion related to substrate holding in the index robot IR. The index robot IR includes an acquisition hand 11a and a return hand 11b. The return hand 11b and the acquisition hand 11a are held by the arm 12 in a state of being stacked in the vertical direction Z. The arm 12 can move the return hand 11b and the acquisition hand 11a forward and backward in the front-rear direction X individually. In the configuration of FIG. 3, the return hand 11b and the acquisition hand 11a are arranged in this order from top to bottom, but the order in which each member is arranged can be changed as appropriate.

[0050] The acquisition hand 11a corresponds to the hand of the present invention. The acquisition hand 11a enters between the vertically adjacent substrates W, holds the unprocessed substrates W one by one from the carrier C, and transports them to the path 24.

[0051] The acquisition hand 11a has a flat base member 31 in the horizontal plane and guide members 32a and 34a. The base member 31 is shaped to be able to enter between the substrates. The direction connecting the proximal end and the distal end of the base member 31 is referred to as the front-rear direction P (see Fig. 4). Also, the direction orthogonal to the front-rear direction in the horizontal plane is referred to as the left-right direction Q (see Fig. 4). The guide member 32a corresponds to the first guide of the present invention. The guide member 34a corresponds to the second guide of the present invention.

[0052] The guide members 32a and 32b are at the distal end of the acquisition hand 11a and are configured to abut against the end of the substrate W. That is, the guide member 32a is a tab provided at the distal end of the base member 31 and is a member that contacts the substrate W. On the other hand, the guide member 34a is a tab provided at the proximal end of the base member 31 and is a member that contacts the substrate W. The guide members 32a and 34a are provided on the upper surface of the base member 31. Therefore, the guide members 32a and 34a are configured to hold the upper substrate W from below.

[0053] The guide member 32a is provided on one end side in the left-right direction Q at the distal end of the base member 31. On the other hand, the guide member 32b is provided on the other end side in the left-right direction Q at the distal end of the base member 31.

[0054] The guide members 32a and 34a have a thick portion and a thin portion. Therefore, the guide members 32a and 34a are partially different in thickness in the height direction. The wall portion facing the proximal end of the acquisition hand 11a in the thick portion of the guide member 32a is such that the end (bevel portion) of the substrate W can come into contact. On the other hand, the wall portion facing the distal end of the acquisition hand 11a in the thick portion of the guide member 34a is such that the end (bevel portion) of the substrate W can come into contact.

[0055] The flat portions facing upward in the thin portions of the guide members 32a and 34a are such that the peripheral portions of the lower surface of the substrate can come into contact therewith. The guide members 32a and 34a correspond to a plurality of guides of the present invention. The guide members 32a and 34a are provided on the upper surface of the base member 31 and are configured such that the periphery of the substrate abuts thereon.

[0056] The guide members 32a and 32b provided at the tip of the base member 31 are tapered, and this will be described in this regard. As shown in FIG. 3, the upper surface of the thin portion of the guide members 32a and 32b is inclined. That is, the thin portion is configured such that the thickness in the height direction becomes smaller as it moves away from the thick portion. In this way, the guide members 32a and 32b include a support portion (tapered portion: thin portion) that contacts the lower portion of the substrate W and a wall portion (side surface of the thick portion) that contacts the outer peripheral surface of the substrate.

[0057] Similarly, the guide members 34a and 34b provided at the base end of the base member 31 are tapered as shown in FIG. 3. That is, the thin portion is configured such that the thickness in the height direction becomes smaller as it moves away from the thick portion. In this way, the guide members 34a and 34b include a support portion (tapered portion: thin portion) that contacts the lower portion of the substrate W and a wall portion (side surface of the thick portion) that contacts the outer peripheral surface of the substrate.

[0058] The return hand 11b has the same configuration as the above-described acquisition hand 11a. That is, the return hand 11b has a base member 31 and guide members 32a and 32b. In the return hand 11b, the configuration in which the guide members 32a and 32b are provided at the tip and the base of the base member 31, and the configuration in which the guide members 32a and 32b have a thick portion and a thin portion are the same as the configuration of the acquisition hand 11a. The return hand 11b of this example is provided for transporting the cleaned substrate W that has been subjected to the cleaning process. By using the hands separately for the forward and return paths in the reciprocating motion of the substrate W, it becomes unnecessary to hold the substrate W after the cleaning process with the hand that holds the substrate W before the cleaning process. Therefore, by providing the return hand 11b, the cleanliness of the substrate W that has been subjected to the cleaning process is maintained.

[0059] Also, the sensors 22a, second sensor 22b, sensors 26a, and sensors 26b described later are not necessarily required for the return hand 11b.

[0060] FIG. 4 is a plan view for explaining the acquisition hand 11a and the return hand 11b. The acquisition hand 11a and the return hand 11b include a connecting portion 36, a first blade 33a, and a second blade 33b that are formed by branching from the connecting portion 36. The connecting portion 36 is configured to connect the first blade 33a and the second blade 33b. The first blade 33a is a member that extends in the front-rear direction P for holding one end portion of the substrate W, and the second blade 33b is a member that extends in the front-rear direction P for holding the other end portion of the substrate W.

[0061] The guide member 32a is disposed on the first blade 33a. The guide member 32b is disposed on the second blade 33b. Also, the guide member 34a is disposed on the first blade 33a. The guide member 34b is disposed on the second blade 33b.

[0062] As shown in FIG. 5, the wall portions A of the guide members 32a, 32b, 34a, and 34b are arranged so as to belong to a virtual circle slightly larger than the substrate W. Thereby, the substrate W can be accommodated in the receiving region of the substrate W formed by the thin portions of the guide members 32a, 32b, 34a, and 34b.

[0063] The pusher 35 is provided at the tip of the connecting portion 36 and can push the substrate W held by the guide members 32a, 32b, 34a, and 34b forward. The pusher 35 can move backward to an open state and can move forward to a closed state. To grip the substrate W by the first blade 33a and the second blade 33b, first, the substrate W is held by the guide members 32a, 32b, 34a, and 34b with the pusher 35 in the open state (see FIG. 5). Then, the pusher 35 is closed and the substrate W is sandwiched between the guide members 32a, 32b and the pusher 35. FIG. 6 is a cross-sectional view for explaining this state. In this way, the substrate W is clamped. The pusher 35 is provided on the upper surface of the base member 31 and is displaceable between a retracted state retracted from the outer peripheral surface of the substrate and a contact state in contact with the outer peripheral surface of the substrate.

[0064] 3. Regarding the sensor FIG. 7 is an exploded perspective view for explaining the configuration of the acquisition hand 11a. In FIG. 7, since the guide members 32a, 32b, 34a, and 34b are omitted, the state in which the sensors 22a, 22b, 26a, and 26b are assembled in the acquisition hand 11a can be easily understood. That is, a first recess 37a for embedding the sensor 22a is provided at the tip of the first blade 33a. Similarly, a second recess 38a for embedding the sensor 26a is provided at the base end of the first blade 33a. In addition, a recess 37b for embedding the sensor 22b is provided at the tip of the second blade 33b. Similarly, a recess 38b for embedding the sensor 26b is provided at the base end of the second blade 33b. Thus, the base member 31 has a plurality of recesses in which the respective sensors are embedded. The sensor 22a corresponds to the first sensor of the present invention. The sensor 22b corresponds to the second sensor of the present invention.

[0065] FIG. 8 is an exploded perspective view for explaining the positional relationship between the sensor 22a and the guide member 32a. The guide member 32a and the sensor 22a are arranged in the Z direction. The sensor 22a is composed of a main body portion 221 and an elastomer 222 made of an elastic member. When the sensor 22a is attached to the first blade 33a, the main body portion 221 is embedded in the first recess 37a, so that the elastomer 222 protrudes from the upper surface of the first blade 33a. The guide member 32a is fixed to the elastomer 222. Therefore, the sensor 22a is provided between the base member 31 and the guide member 32a. When the substrate W is placed on the guide member 32a, the elastomer 222 is deformed. Based on this, the sensor 22a detects whether or not the substrate W has contacted the guide member 32a. That is, the sensor 22a is configured to detect the substrate W that has abutted against the guide member 32a.

[0066] More specifically, the sensor 22a is a tactile sensor that can detect the load input to the guide member 32a. Therefore, the sensor 22a outputs a signal indicating 0 mg when the guide member 32a is not placing the substrate W, and outputs a signal indicating the weight of the substrate when the guide member 32a places the substrate W. However, since the substrate W is supported by the guide members 32a, 32b, 34a, and 34b, the weight of the substrate W is distributed to each guide member. Therefore, the sensor 22a only outputs a signal indicating a weight that is at most smaller than the total weight of the substrate W.

[0067] The sensor 26a also has the same configuration as the sensor 22a. That is, the sensor 26a is configured to detect the substrate W in contact with the guide member 34a. In this way, the sensors 22a and 26a individually detect the substrate W in contact with the corresponding guide.

[0068] Also, the sensor 26a can detect the load input to the guide member 34a. This is the same as the configuration of the sensor 22a in this regard.

[0069] The sensors 22b and 26b also have the same configuration as the sensors 22a and 26a. The sensor 22b detects whether or not the substrate W has come into contact with the guide member 32b. The sensor 26b detects whether or not the substrate W has come into contact with the guide member 34b. Each sensor is a tactile sensor and is provided between the base member 31 and each guide.

[0070] Also, the sensor 22b can detect the load input to the guide member 32b. Similarly, the sensor 26a can detect the load input to the guide member 34a. Similarly, the sensor 26b can detect the load input to the guide member 34b. This is the same as the configuration of the sensor 22a in this regard.

[0071] As described later, sensors 22a, 22b, 26a, and 26b detect the timing when the substrate W abuts against the guide. Therefore, each sensor only needs to be able to detect whether the substrate W has come into contact with the corresponding guide member, and does not necessarily need to have a function of detecting the load input to each guide member.

[0072] 4. Method for Detecting Temporal Changes of Hand Using Sensors Hereinafter, with reference to FIGS. 9 to 14, a method for inspecting the acquisition hand 11a using sensors 22a and 26a will be described. According to this inspection method, temporal changes of the acquisition hand 11a can be detected. Specifically, this inspection method detects the drooping of the acquisition hand 11a. The index robot IR having the acquisition hand 11a is configured by fastening a plurality of members having rigidity with screws or the like. When the index robot IR is used for a long period of time, the fastening screws or the like become loose, and a phenomenon occurs in which the tip of the acquisition hand 11a droops. If this is left unattended, malfunction of the index robot IR will be caused. According to the configuration of this embodiment, it is configured to be able to quickly detect the drooping of the acquisition hand 11a while it is minor and prompt necessary maintenance.

[0073] Regarding the drooping of the return hand 11b, it can be inferred from the situation of the acquisition hand 11a. In this regard, when strictness is required, it is advisable to provide sensors 22a and 26a on the return hand 11b. In this way, the drooping of the return hand 11b can be detected based on the same principle as the following description. That is, the return hand 11b can perform each operation described in FIGS. 9 to 14 on the substrate W placed on the path 24.

[0074] Referring to FIG. 9, each component related to the inspection will be described. First, the comparison unit 41 will be described. The comparison unit 41 corresponds to the determination unit of the present invention. The comparison unit 41 determines the inclination state of the acquisition hand 11a with respect to the substrate W based on the time difference between the timing when the sensor 22a detects the substrate W and the timing when the sensor 26a detects the substrate. More generally, the comparison unit 41 determines the inclination state of the hand with respect to the substrate W based on the time difference of each timing when each sensor individually detects the substrate W. Specifically, the comparison unit 41 can determine whether the tip of the base member 31 is displaced downward with respect to the base end. When the substrate W is not placed, the sensors 22a and 26a do not detect the substrate W. At this time, the comparison unit 41 does not operate. The notification unit 101 does not perform notification based on the fact that no signal regarding notification is output from the comparison unit 41.

[0075] The notification unit 101 is configured to notify that the acquisition hand 11a is hanging down. The specific notification method of the notification unit 101 is not particularly limited, but notification by sound or light emission, transmission of a warning signal to the host computer of the plant, etc. can be considered. The notification unit 101 gives a warning about the hanging down of the acquisition hand 11a by notifying that the index value indicating the difference in detection timing is greater than a predetermined value.

[0076] The elevating mechanism 53 is configured to move the acquisition hand 11a up and down in the Z direction. The elevating control unit 52 is configured to control the elevating mechanism 53.

[0077] FIG. 10 describes the case of detecting the hanging down of the acquisition hand 11a using the substrate W stored in the carrier C. The substrate W used at this time may have a flat shape and may be a wafer for inspection. In this case, the inspection of the acquisition hand 11a is performed in accordance with when the substrate processing is stopped. Also, the hanging down of the acquisition hand 11a may be detected using the substrate W on which the substrate processing is actually performed. In this case, the necessity of maintenance of the acquisition hand 11a can be constantly monitored while performing the operation related to the substrate processing.

[0078] FIG. 10 shows a state where the acquisition hand 11a is positioned below the substrate W supported by the comb-shaped member 7 of the carrier C. At this time, both the guide member 32a and the guide member 34a are separated from the substrate W. Then, since neither the sensor 22a nor the sensor 26a detects the substrate W, the determination operation of the comparison unit 41 and the notification operation of the notification unit 101 are not executed.

[0079] FIG. 11 shows a state where the elevating mechanism 53 is activated from the state of FIG. 10 and the acquisition hand 11a has acquired the substrate W. The elevation control unit 52 is configured to raise the acquisition hand 11a located below the lower part of the substrate W in a stationary state in the carrier C and bring the substrate W into contact with a plurality of guides (guide member 32a, guide member 34a).

[0080] In the case of FIG. 11, since the acquisition hand 11a remains horizontal and does not hang down, the guide member 32a and the guide member 34a come into contact with the substrate W almost simultaneously. Then, the sensor 22a and the sensor 26a detect the substrate W at almost the same timing.

[0081] The sensor 22a sends a detection signal to the comparison unit 41 at the timing when the substrate W is detected. The comparison unit 41 recognizes the detection time of the substrate W based on the input of the detection signal. The detection time at this time is referred to as the first time t1. Similarly, the sensor 26a sends a detection signal to the comparison unit 41 at the timing when the substrate W is detected. The comparison unit 41 recognizes the detection time of the substrate W based on the input of the detection signal. The detection time at this time is referred to as the second time t2.

[0082] The comparison unit 41 calculates the difference between the first time t1 and the second time t2, and determines whether the difference falls within a predetermined range defined by a predetermined value. Specifically, the comparison unit 41 subtracts the second time t2 from the first time t1, and calculates an index value that is the absolute value of the result. Then, the comparison unit 41 compares the index value with the predetermined value, and if the index value is greater than the predetermined value, it sends a signal instructing the notification unit 101 to issue a notification. Also, if the index value is less than or equal to the predetermined value, the comparison unit 41 does not send a signal instructing the notification unit 101 to issue a notification. The predetermined value is determined based on the index value when the acquisition hand 11a hangs down and a difference occurs between the first time t1 and the second time t2. Therefore, if the index value is greater than the predetermined value, it can be determined that the hanging down of the acquisition hand 11a has progressed to the extent that maintenance is required. Also, if the index value is less than or equal to the predetermined value, it can be determined that the hanging down of the acquisition hand 11a is within the allowable range.

[0083] However, in the case of Fig. 11, since the acquisition hand 11a is not hanging down, the comparison unit 41 does not send a signal instructing the notification unit 101 to issue a notification. That is, in the case of Fig. 11, the comparison unit 41 determines that the index value is less than or equal to the predetermined value. As a result, the notification unit 101 does not issue a notification regarding the hanging down of the acquisition hand 11a.

[0084] On the other hand, Fig. 12 illustrates the case where the acquisition hand 11a is hanging down. That is, Fig. 12 shows a state when the acquisition hand 11a hanging down is positioned below the substrate W supported by the comb-shaped member 7 of the carrier C. At this time, both the guide member 32a and the guide member 34a are separated from the substrate W. Then, since neither the sensor 22a nor the sensor 26a detects the substrate W, the determination operation of the comparison unit 41 and the notification operation of the notification unit 101 are not executed.

[0085] Fig. 13 shows a state when the lifting mechanism 53 operates from the state of Fig. 12 and the acquisition hand 11a acquires the substrate W. The lift control unit 52 attempts to raise the acquisition hand 11a located below the lower part of the substrate W that is stationary in the carrier C and bring the substrate W into contact with the guide member 32a and the guide member 34a.

[0086] In the case of FIG. 13, since the acquisition hand 11a is inclined and hanging down, the guide member 34a contacts the substrate W earlier than the guide member 32a. Then, the sensor 26a detects the substrate W at a timing earlier than the sensor 22a.

[0087] When the lifting mechanism 53 further raises the acquisition hand 11a, as shown in FIG. 14, the guide member 32a contacts the substrate W behind the guide member 34a. Then, the sensor 22a detects the substrate at a timing later than the sensor 26a.

[0088] The comparison unit 41 calculates the difference between the first time t1 and the second time t2, and determines whether or not the difference falls within a predetermined range defined by a predetermined value. In the cases of FIGS. 12 to 14, since the acquisition hand 11a is hanging down, the comparison unit 41 sends out a signal instructing the notification unit 101 to give a notification. That is, in the case of FIG. 14, the comparison unit 41 determines that the index value is larger than the predetermined value. As a result, the notification unit 101 gives a notification regarding the hanging down of the acquisition hand 11a.

[0089] 5. Other configurations As shown in FIG. 1, the index block 3 includes a control unit 100 related to the control of the index robot IR. The control unit 100 is constituted by, for example, a CPU (Central Processing Unit). The specific configuration of the control unit 100 is not limited. For example, the control related to the comparison unit 41, the acquisition hand 11a, and the return hand 11b may be constituted by a single processor, or may be constituted by individual processors.

[0090] Examples of the control related to the control unit 100 include the forward and backward movements of the acquisition hand 11a, the forward and backward movements of the return hand 11b, the rotational movement of the acquisition hand 11a, the rotational movement of the return hand 11b, the lifting movement of the acquisition hand 11a, the lifting movement of the return hand 11b, and the control related to the control of the pusher.

[0091] The memory unit stores programs related to control and parameters such as predetermined values. The memory unit may be composed of a single device or may be composed of individual devices corresponding to each control. The indexable block 3 of the present invention has no particular limitation on the configuration of the device that realizes the memory unit.

[0092] 6. Flowchart of the inspection method Hereinafter, the actual inspection method of the substrate transfer device will be described using the flowchart shown in FIG. 15.

[0093] Step S11: Cause the acquisition hand 11a to acquire the substrate W stored in the carrier C.

[0094] Step S12: Based on the difference between the timing when the sensor 22a detects the substrate W and the timing when the sensor 26a detects the substrate, the inclination state of the acquisition hand 11a with respect to the substrate W is determined in the comparison unit 41.

[0095] Step S13: If it is determined that the acquisition hand 11a is inclined, the process proceeds to step S14; otherwise, the process ends.

[0096] Step S14: The comparison unit 41 sends a signal instructing notification to the notification unit 101, and the notification unit 101 executes a predetermined notification upon receiving this. Thereby, the process ends.

[0097] 7. Effects of the present invention According to the above configuration, a guide member 32a provided on the upper surface of the base member 31 against which the peripheral edge of the substrate W abuts, a sensor 22a for detecting the substrate W abutting against the guide member 32a, a guide member 34a provided on the upper surface of the base member 31 against which the peripheral edge of the substrate W abuts, and a sensor 26a for detecting the substrate W abutting against the guide member 34a, an acquisition hand 11a is provided. A comparison unit 41 is provided for determining the inclination state of the acquisition hand 11a with respect to the substrate W based on the time difference between the timing when the sensor 22a detects the substrate W and the timing when the sensor 26a detects the substrate W. With this configuration, an index block 3 that can continuously detect the change over time of the acquisition hand 11a can be provided. There is a predetermined relationship between the timing when the sensor 22a detects the substrate W and the timing when the sensor 26a detects the substrate W. If the predetermined relationship is broken while measuring the timing for each of the substrates W held by the acquisition hand 11a, it can be determined that a positional deviation of the acquisition hand 11a with respect to the substrate W has occurred. Therefore, according to the present invention, an index block 3 that can automatically detect the timing when maintenance is required and is easy to maintain can be provided.

[0098] According to the above configuration, the guide member 32a is provided at the tip of the base member 31, and the guide member 34a is provided at the base end of the base member 31. The guide member 32a is provided with a sensor 22a for detecting the substrate W, and the guide member 34a is provided with a sensor 26a for detecting the substrate W. The comparison unit 41 determines the inclination state of the acquisition hand 11a in the front-rear direction P based on the time difference between the timing when the sensor 22a detects the substrate W and the timing when the sensor 26a detects the substrate W. The comparison unit 41 determines whether the tip of the base member 31 is displaced downward with respect to the base end. When operating the index block 3, there may be a change over time of the acquisition hand 11a in which the tip is displaced downward with respect to the base end. According to the above configuration, since the guide member 32a is provided at the tip of the base member 31 and the guide member 34a is provided at the base end of the base member 31, such a change over time can be easily detected.

[0099] According to the above configuration, the notification unit 101 notifies that an index value indicating the time difference in the substrate detection timing by the sensor is greater than a predetermined value. Thereby, the maintenance of the index block 3 becomes easy.

[0100] According to the above configuration, it includes a lifting mechanism 53 that raises and lowers the acquisition hand 11a, and a lifting control unit 52 that controls the lifting mechanism 53. Then, the lifting control unit 52 raises the acquisition hand 11a located below the substrate W in a stationary state and brings the substrate W into contact with a plurality of guides (guide members 32a, guide members 34a). With this configuration, the substrate W can be brought into contact with the guide members 32a and 34a simultaneously. Therefore, according to the above configuration, the object of the present invention can be realized more easily.

[0101] According to the above configuration, each sensor (sensor 22a, sensor 22b, sensor 26a, sensor 26b) is a tactile sensor and is provided between the base member 31 and each guide (guide member 32a, guide member 32b, guide member 34a, guide member 43b). With this configuration, each sensor can detect the substrate W placed on the base member 31 more directly and reliably.

[0102] According to the above configuration, each guide (guide member 32a, guide member 32b, guide member 34a, guide member 34b) includes a support portion (taper portion B) that contacts the lower portion of the substrate W and a wall portion A that contacts the outer peripheral surface of the substrate W. With this configuration, the contact portion between the substrate W and the guide is minimized as much as possible. Moreover, when the outer peripheral surface of the substrate W abuts against the wall portion A, the displacement of the substrate W that occurs when gripping the substrate W is appropriately prohibited. Therefore, according to the above configuration, an index block 3 suitable for transporting the substrate W can be provided.

[0103] According to the above configuration, the base member 31 includes a plurality of recesses in which each sensor (sensor 22a, sensor 22b, sensor 26a, sensor 26b) is embedded. With this configuration, the thickness of the acquisition hand 11a in the height direction can be suppressed, so that an index block 3 can be provided in which the acquisition hand 11a does not collide with the substrate W during substrate conveyance.

[0104] According to the above configuration, each sensor (sensor 22a, sensor 22b, sensor 26a, sensor 26b) only needs to detect whether or not the substrate W has come into contact with the corresponding guide (guide member 32a, guide member 32b, guide member 34a, guide member 34b). With this configuration, the present invention can be realized with relatively inexpensive sensors.

[0105] According to the above configuration, a carrier placement shelf on which a carrier C for vertically stacking and storing substrates W in a horizontal posture can be placed is provided. Therefore, according to the above configuration, it is possible to detect the change over time of the acquisition hand 11a with respect to the carrier C.

[0106] According to the above configuration, a single-wafer processing unit that performs a predetermined process on each of the substrates W conveyed by the index block 3 is provided. According to the above configuration, a substrate processing apparatus that is easy to maintain and can perform a desired substrate process can be provided.

[0107] According to the above configuration, an acquisition process in which the acquisition hand 11a acquires the flat substrate W and a determination process for determining the inclination state of the acquisition hand 11a with respect to the substrate W based on the time difference at each timing when each sensor (sensor 22a, sensor 26) detects the substrate W are provided. With this configuration, an inspection method that can surely determine the inclination state of the acquisition hand 11a can be provided.

[0108] 8. Modification The present invention is not limited to the above configuration, and can be implemented with the following modifications.

[0109] <Modification 1> In the above-described embodiment, the sensor 22a was provided at the tip of the base member 31, and the sensor 26a was provided at the base end of the base member 31. However, the present invention is not limited to this configuration. The sensor 26a may be provided at the tip of the base member 31. In this case, the guide member 32a is provided at one end at the tip of the base member 31, and the guide member 34a is provided at the other end at the tip of the base member 31. Note that in the modification, it is not always necessary to provide a sensor at the base end of the base member 31.

[0110] Specifically, in Modification 1, the guide member 32a is provided at the tip of the first blade 33a, and the guide member 34a is provided at the tip of the second blade 33b. The comparison unit 41 of this modification operates in the same manner as in the above-described embodiment based on the outputs of the sensor 22a provided on the guide member 32a and the sensor 26a provided on the guide member 34a. That is, the comparison unit 41 determines whether the guide member 32a is displaced in the vertical direction with respect to the guide member 34a based on the detection results of the sensor 22a and the sensor 26a, that is, whether the base member 31 is inclined in the left-right direction Q.

[0111] According to the above-described configuration, the guide member 32a is provided on one end side in the left-right direction Q at the tip of the base member 31, the guide member 34a is provided on the other end side in the left-right direction Q at the tip of the base member 31, and the comparison unit 41 determines the inclination state of the acquisition hand 11a in the left-right direction Q based on the time difference between the timing when the sensor 22a detects the substrate and the timing when the sensor 26a detects the substrate W. It is determined whether the guide member 32a is displaced in the vertical direction with respect to the guide member 34a. When the index block 3 is operated, there may be a change over time of the acquisition hand 11a in which one end of the tip portion is displaced downward with respect to the other end of the tip portion. According to the above-described configuration, since the guide member 32a is provided at one end at the tip of the base member 31 and the guide member 34a is provided at the other end at the tip of the base member 31, such a change over time can be easily detected.

[0112] <Modification 2> Even if the guide member 32a is provided at one end of the proximal end portion of the base member 31 and the guide member 34a is provided at the other end of the proximal end portion of the base member 31, the same effects as those of the first modification can be obtained.

[0113] <Modification Example 3> As a further modified implementation of the first modification, a configuration can be adopted in which three sensors are used to simultaneously detect the hanging of the acquisition hand 11a and the inclination of the acquisition hand 11a in the left-right direction Q of the base member 31. For the operation of the comparison unit 41 regarding the hanging of the acquisition hand 11a, reference can be made to the embodiment. For the operation of the comparison unit 41 regarding the inclination of the acquisition hand 11a in the left-right direction Q, reference can be made to the first modification.

[0114] The acquisition hand 11a of this modification has a guide member 32a and a sensor 22a at the tip of the first blade 33a, and a guide member 34a and a sensor 26a at the proximal end of the first blade 33a. And the acquisition hand 11a of this modification is provided with a guide member 32b and a sensor 22b at the tip of the second blade 33b. To understand the respective positional relationships, reference can be made to FIGS. 5 and 7. The guide member 32a corresponds to the first guide of this modification, and the sensor 22a corresponds to the first sensor of the present invention. The guide member 34a corresponds to the third guide of this modification, and the sensor 26a corresponds to the third sensor of the present invention. The guide member 32b corresponds to the second guide of this modification, and the sensor 22b corresponds to the second sensor of the present invention.

[0115] The acquisition hand 11a of this modification example is provided at the base end of the base member 31, and includes a guide member 34a with which the peripheral edge of the substrate abuts, and a sensor 26a that detects the substrate W that has abutted against the guide member 34a. The comparison unit 41 of this modification example determines the inclination state of the acquisition hand 11a in the front-rear direction P based on the time difference between the timing when the sensor 22a detects the substrate W and the timing when the sensor 26a detects the substrate W. In particular, the comparison unit 41 can determine whether the tip of the base member 31 is displaced downward with respect to the base end. Then, the comparison unit 41 of this modification example determines the inclination state of the acquisition hand 11a in the left-right direction Q based on the time difference between the timing when the sensor 22a detects the substrate W and the timing when the sensor 26b detects the substrate. In particular, the comparison unit 41 determines whether the guide member 32a is displaced vertically with respect to the guide member 32b. With this configuration, it is possible to detect the inclination due to the change over time of the acquisition hand 11a in two directions orthogonal to each other, so the maintenance of the index block 3 becomes easy.

[0116] <Modification Example 4> In Modification Example 3, the first guide was configured as the guide member 32a, the second guide as the guide member 32b, and the third guide as the guide member 34a. However, the arrangement of the first guide, the second guide, and the third guide can be freely changed. For example, in a configuration where the first guide is the guide member 32a and the third guide is the guide member 34a, even if the second guide is set as the guide member 34b, the same effect as in Modification Example 3 can be obtained. Also, in a configuration where the first guide is the guide member 32a and the second guide is the guide member 32b, even if the third guide is set as the guide member 34b, the same effect as in Modification Example 3 can be obtained. Further, in a configuration where the third guide is the guide member 34a, even if the first guide is set as the guide member 32b and the second guide is set as the guide member 34b, the same effect as in Modification Example 3 can be obtained.

[0117] <Modification Example 5> As a modified example that operates using three or more sensors, the comparison unit 41 determines the inclination state of the acquisition hand 11a with respect to the substrate W based on two times that are most separated over time among the first time t1, the second time t2, and the third time t3. The first time t1 is the time indicating the timing when the first sensor (for example, sensor 26a) detects the substrate W, and the second time t2 is the time indicating the timing when the second sensor (for example, sensor 22a) detects the substrate W. Then, the third time t3 is the time indicating the timing when the third sensor (for example, sensor 26b) detects the substrate W.

[0118] FIG. 16 specifically illustrates this modified example. FIG. 16(a) is a plan view of the state of FIG. 13 in the embodiment. FIG. 16(a) shows a state when the substrate W abuts on the guide member 34a. The sensor 26a detects this abutment of the substrate W. The time when the sensor 26a detects the substrate W becomes the first time t1. FIG. 16(b) shows a state when the substrate W then abuts on the guide member 34b. The sensor 26b detects this abutment of the substrate W. The time when the sensor 26b detects the substrate W becomes the second time t2. FIG. 16(c) shows a state when the substrate W then abuts on the guide member 32a. The sensor 22a detects this abutment of the substrate W. The time when the sensor 22a detects the substrate W becomes the third time t3.

[0119] Therefore, in this case, there are three index values indicating the difference in detection timing. The first index value is the index value indicating the difference between the first time t1 and the second time t2, the second index value is the index value indicating the difference between the second time t2 and the third time t3, and the third index value is the index value indicating the difference between the first time t1 and the third time t3. The comparison unit 41 determines the inclination state of the acquisition hand 11a with respect to the substrate W based on the time difference between the two timings that are most separated over time among the timings at which each sensor individually detects the substrate W. That is, the comparison unit 41 determines whether to send a signal regarding the notification to the notification unit 101 by comparing the third index value with a predetermined value. This is because the first time t1 and the third time t3 are the most separated among the timings. With this configuration, the change over time of the acquisition hand 11a can be detected more sensitively. Therefore, according to the above configuration, the object of the present invention can be more easily achieved.

[0120] <Modification Example 6> When it is clear that the acquisition hand 11a is not inclined, it is also possible to detect how much the carrier C of the load port 10 is inclined with respect to the acquisition hand 11a. In this case, the comparison unit 41 determines the inclination state of the carrier C with respect to the acquisition hand 11a based on the time difference between the timings at which each sensor individually detects the substrate W. In particular, the comparison unit 41 can determine the inclination state of the carrier C in the front-rear direction P with respect to the acquisition hand 11a based on the time difference between the timing at which the sensor 22a detects the substrate W and the timing at which the sensor 26a detects the substrate W.

[0121] <Modification Example 7> In the configuration of the embodiment, the hanging state of the acquisition hand 11a was determined using the substrate W stored in the carrier C, but the present invention is not limited to this configuration. As shown in FIG. 17, a placement portion 25 on which a flat substrate W can be placed may be provided near the path 24 in the processing block 5. The placement portion 25 can place the substrate W in a horizontal posture and can be accessed by the indexer robot IR. Further, the placement portion 25 may be in the index block 3.

[0122] <Modification Example 8> In the above-described embodiment, the tactile sensor has detected that the substrate W is placed on the guide members 32a and 34a. However, the present invention is not limited to this configuration. As shown in FIG. 18, a configuration may be adopted in which distance measurement sensors 27a and 27b are provided on the first blade 33a. The distance measurement sensor 27a is provided at a position displaced from the guide member 32a toward the proximal end side of the base member 31. The distance measurement sensor 27b is provided at a position displaced from the guide member 34b toward the distal end side of the base member 31. By configuring in this way, the distance measurement sensors 27a and 27b will be covered by the substrate W held by the acquisition hand 11a, and the detection timing of the substrate W can be surely detected.

[0123] <Modification Example 9> The present invention is not limited to the index block 3, and can be generally applied to a substrate transfer device including a robot that transfers a substrate W in a horizontal posture.

Explanation of Reference Numerals

[0124] 1 Substrate processing apparatus 3 Index block 5 Processing block 5a Single-wafer processing chamber 7 Comb-shaped member 10 Load port 11a Acquisition hand 11b Return hand 12 Arm 22a Sensor 22b Sensor 24 Path 26a Sensor 26b Sensor 31 Base member 32a Guide member 32b Guide member 33a First blade 33b Second blade 34a Guide member 34b Guide member 35 Pusher 36 Connection part 37a First recess 37b Recess 38a Second recess 38b Recess 41 Comparison part 52 Lifting control part 53 Lifting mechanism 100 Control part 101 Notification part 221 Main body part 222 Elastomer A Wall part B Taper part C Carrier CR Center robot IR Indexer robot W Substrate Wd Substrate

Claims

1. A substrate transfer device having a hand capable of transferring a substrate in a horizontal posture, wherein the hand includes: a base member; a plurality of guides provided on the upper surface of the base member and in contact with the periphery of the substrate; a plurality of sensors for individually detecting the substrates in contact with the respective guides, and a determination unit for determining the inclination state of the hand with respect to the substrate based on the time difference at each timing when each sensor individually detects the substrate. A substrate transfer device characterized by the above.

2. In the substrate transfer device according to Claim 1, a first one of the guides provided at the tip of the base member; a second one of the guides provided at the base of the base member; a first one of the sensors for detecting the substrate in contact with the first guide; a second one of the sensors for detecting the substrate in contact with the second guide, and when the direction connecting the base end portion and the tip end portion of the base member is defined as the front-rear direction, the determination unit determines the inclination state of the hand in the front-rear direction based on the time difference between the timing at which the first sensor detects the substrate and the timing at which the second sensor detects the substrate. A substrate transfer device characterized by the above.

3. In the substrate transfer device according to Claim 1, when the direction connecting the base end portion and the tip end portion of the base member is defined as the front-rear direction and the direction orthogonal to the front-rear direction in the horizontal plane is defined as the left-right direction, a first one of the guides provided on one end side in the left-right direction at the tip of the base member; a second one of the guides provided on the other end side in the left-right direction at the tip of the base member; a first one of the sensors for detecting the substrate in contact with the first guide; a second one of the sensors for detecting the substrate in contact with the second guide, and the determination unit determines the inclination state of the hand in the left-right direction based on the time difference between the timing at which the first sensor detects the substrate and the timing at which the second sensor detects the substrate. A substrate transfer device characterized by the above.

4. In the substrate transfer device according to Claim 3, the hand includes: at least one third one of the guides provided at the base of the base member and in contact with the periphery of the substrate; a third sensor for detecting the substrate in contact with the third guide, and the determination unit determines the inclination state of the hand in the front-rear direction based on the time difference between the timing at which the first sensor detects the substrate and the timing at which the third sensor detects the substrate. Determine the inclination state of the hand in the left - right direction based on the time difference between the timing when the first sensor detects the substrate and the timing when the second sensor detects the substrate A substrate transfer device characterized by the above. **Claim 5** In the substrate transfer device according to claim 1, It is provided with a notification unit that notifies that an index value indicating the time difference is larger than a predetermined value A substrate transfer device characterized by the above. **Claim 6** In the substrate transfer device according to claim 1, It is provided with a lifting mechanism for lifting and lowering the hand, and a lifting control unit for controlling the lifting mechanism. The lifting control unit lifts the hand located below the substrate in a stationary state and brings the substrate into contact with the plurality of guides A substrate transfer device characterized by the above. **Claim 7** In the substrate transfer device according to claim 1, The determination unit determines the inclination state of the hand with respect to the substrate based on the time difference between the two timings that are most separated over time among the timings when each sensor individually detects the substrate A substrate transfer device characterized by the above. **Claim 8** In the substrate transfer device according to claim 1, Each of the sensors is a tactile sensor and is provided between the base member and each of the guides A substrate transfer device characterized by the above. **Claim 9** In the substrate transfer device according to claim 1, Each of the guides includes a support portion that contacts the lower part of the substrate and a wall portion that contacts the outer peripheral surface of the substrate A substrate transfer device characterized by the above. **Claim 10** In the substrate transfer device according to claim 1, The base member includes a plurality of recesses in which the respective sensors are embedded A substrate transfer device characterized by the above. **Claim 11** In the substrate transfer device according to claim 1, Each of the sensors detects whether or not the substrate has come into contact with the corresponding guide A substrate transfer device characterized by the above. **Claim 12** A substrate transfer device according to claim 1, and a carrier mounting shelf on which a carrier for stacking and storing substrates in a horizontal posture in the vertical direction can be mounted, and performs loading and unloading of substrates to and from the carrier by the substrate transfer device A substrate processing device characterized by the above. **Claim 13** In the substrate processing device according to claim 12, The determination unit determines the inclination state of the carrier with respect to the hand based on the time difference between the timings when each sensor individually detects the substrate A substrate processing device characterized by the above. **Claim 14** In the substrate processing device according to claim 12, ​ It is provided with a single-wafer processing unit that processes the wafers transported by the wafer transport device one by one. A wafer processing apparatus characterized by the above.

15. In an inspection method for a wafer transport device having a hand including a base member, a plurality of guides provided on the upper surface of the base member and in contact with the peripheral edges of the wafers individually, and a plurality of sensors for individually detecting the wafers in contact with the respective guides, An acquisition process of causing the hand to acquire the wafer, A determination process of determining the inclination state of the hand with respect to the wafer based on the time difference at each timing when each sensor individually detects the wafer, An inspection method for a wafer transport device characterized by the above.

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