Transmission line, processing apparatus, and quantum computer

Abstract

To provide a transmission line, a processing apparatus, and a quantum computer that can improve characteristics.SOLUTION: According to an embodiment, a transmission line includes first and second conductive wires, first and second conductive layers, and a first conductive member. The first conductive wire extends along a first direction. The second conductive wire is electrically connected to the first conductive wire. At least part of the second conductive wire extends along the first direction. The second conductive layer is electrically connected to the first conductive layer. The second conductive layer includes first to third subregions. The second conductive wire is between the first conductive layer and the third subregion in a second direction intersecting the first direction. The first conductive wire is between the second subregion and the first subregion in a third direction intersecting a plane including the first direction and the second direction. The first conductive member includes a first conductive region. At least part of the first conductive wire is between the first conductive layer and the first conductive region in the second direction. The first conductive member is electrically connected to the second conductive layer.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] Embodiments of the present invention relate to a transmission line, a processing device, and a quantum computer.

Background Art

[0002] For example, in a processing device such as a quantum computer, a plurality of circuits are coupled by a transmission line. Improvement in characteristics is desired in the transmission line.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Embodiments of the present invention provide a transmission line, a processing device, and a quantum computer capable of improving characteristics.

Means for Solving the Problems

[0005] According to an embodiment of the present invention, the transmission line includes a first conductive line, a second conductive line, a first conductive layer, a second conductive layer, and a first conductive member. At least a part of the first conductive line extends along a first direction. The second conductive line is electrically connected to the first conductive line. At least a part of the second conductive line extends along the first direction. The second conductive layer is electrically connected to the first conductive layer. The second conductive layer includes a first partial region, a second partial region, and a third partial region. The direction from the first partial region to the third partial region and the direction from the second partial region to the third partial region extend along the first direction. The second conductive line is located between the first conductive layer and the third partial region in a second direction intersecting the first direction. The first conductive line is located between the second partial region and the first partial region in a third direction intersecting a plane including the first direction and the second direction. The first conductive member includes a first conductive region. At least a part of the first conductive line is located between the first conductive layer and the first conductive region in the second direction. The first conductive member is electrically connected to the second conductive layer.

Brief Description of the Drawings

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DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the ratio of the sizes between parts, etc. are not necessarily the same as the actual ones. Even when representing the same part, there may be cases where their dimensions and ratios are represented differently in the drawings. In this specification and each figure, the same reference numerals are assigned to the same elements as those described above with respect to the previously presented figures, and detailed descriptions thereof are omitted as appropriate.

[0008] (First Embodiment) Figs. 1(a) to 1(d) are schematic plan views illustrating a transmission line according to the first embodiment. Figs. 2(a) to 2(c) are schematic cross-sectional views illustrating a transmission line according to the first embodiment. Fig. 2(a) is a cross-sectional view taken along the line Y1 - Y2 of Figs. 1(a) to 1(d). Fig. 2(b) is a cross-sectional view taken along the line Y3 - Y4 of Figs. 1(a) to 1(d). Fig. 2(c) is a cross-sectional view taken along the line Y5 - Y6 of Figs. 1(a) to 1(d). As shown in Figs. 1(a) to 1(d) and Figs. 2(a) to 2(c), the transmission line 110 according to the embodiment includes a first conductive line 21, a second conductive line 22, a first conductive layer 11, a second conductive layer 12, and a first conductive member 31.

[0009] At least a part of the first conductive line 21 extends along the first direction D1, and the second conductive line 22 is electrically connected to the first conductive line 21. At least a part of the second conductive line 22 extends along the first direction D1.

[0010] The first direction D1 is taken as the X-axis direction. One direction perpendicular to the X-axis direction is taken as the Z-axis direction. A direction perpendicular to the X-axis direction and the Z-axis direction is taken as the Y-axis direction.

[0011] The second conductive layer 12 is electrically connected to the first conductive layer 11. The second conductive layer 12 includes a first partial region 12a, a second partial region 12b, and a third partial region 12c. The directions from the first partial region 12a to the third partial region 12c and from the second partial region 12b to the third partial region 12c are along the first direction D1. In the first partial region 12a, the second partial region 12b, and the third partial region 12c, the boundaries between them may be clear or unclear.

[0012] As shown in FIG. 2(c), the second conductive line 22 is provided between the first conductive layer 11 and the third partial region 12c in a second direction D2 that intersects the first direction D1. The second direction D2 is, for example, the Z-axis direction.

[0013] As shown in FIG. 2(a), the first conductive line 21 is provided between the second partial region 12b and the first partial region 12a in a third direction D3. The third direction D3 intersects the plane including the first direction D1 and the second direction D2. The third direction D3 is, for example, the Y-axis direction.

[0014] The first conductive member 31 includes a first conductive region 31p. At least a part of the first conductive line 21 is provided between the first conductive layer 11 and the first conductive region 31p in the second direction D2. In one example, at least a part of the first conductive region 31p is along the X-Y plane.

[0015] The first conductive member 31 is electrically connected to the second conductive layer 12. For example, the potentials of the first conductive layer 11, the second conductive layer 12, and the first conductive member 31 may be fixed, for example. The first conductive layer 11, the second conductive layer 12, and the first conductive member 31 may be set to a ground potential, for example. For example, the first conductive layer 11 is separated from the first conductive line 21 and the second conductive line 22. The second conductive layer 12 is separated from the first conductive line 21 and the second conductive line 22.

[0016] In an embodiment, the first conductive line 21 and the second conductive line 22 function as signal lines in the transmission line 110, for example. A high-frequency signal is supplied to these conductive lines, for example. A high-frequency signal passes through these conductive lines, for example. At least a part of the first conductive line 21 is provided between the first conductive layer 11 and the first conductive member 31. At least a part of the second conductive line 22 is provided between the first conductive layer 11 and the third partial region 12c of the second conductive layer 12.

[0017] For example, the influence of external radio waves on these conductive wires is suppressed. For example, the leakage of radio waves from these conductive wires to the outside is suppressed. For example, the influence of the magnetic field is suppressed. For example, good isolation characteristics can be obtained between a plurality of wirings. For example, signals can be transmitted with low noise and high efficiency. According to the embodiment, a transmission path with improved characteristics can be provided.

[0018] As shown in FIGS. 1(a) and 2(a), in this example, the first conductive member 31 further includes a first conductive portion 31a and a second conductive portion 31b. The first conductive portion 31a electrically connects the first conductive region 31p to the first partial region 12a. The second conductive portion 31b electrically connects the first conductive region 31p to the second partial region 12b. The position of the first conductive wire 21 in the third direction D3 is between the position of the second conductive portion 31b in the third direction D3 and the position of the first conductive portion 31a in the third direction D3.

[0019] For example, the first conductive wire 21 is provided between the first partial region 12a and the second partial region 12b in the third direction D3. The first conductive wire 21 is provided between the first conductive layer 11 and the first conductive portion 31a in a direction inclined with respect to the X-Y plane. The first conductive wire 21 is provided between the first conductive layer 11 and the second conductive portion 31b in another direction inclined with respect to the X-Y plane. Better isolation can be obtained.

[0020] As shown in FIG. 2(a), a first gap g1 is provided between at least a part of the first conductive wire 21 and the first conductive region 31p. Thereby, for example, the influence of reflection by the first conductive member 31 is suppressed. Transmission with high efficiency can be obtained.

[0021] As shown in FIG. 2(a), let the distance along the second direction D2 between at least a part of the first conductive wire 21 and the first conductive region 31p be the first distance d1. Let the distance along the second direction D2 between the first conductive layer 11 and the first conductive wire 21 be the second distance d2. The first distance d1 is preferably longer than the second distance d2. Thereby, good isolation can be easily obtained.

[0022] For example, the first distance d1 may be five times or more the second distance d2. The first distance d1 may be 500 times or less the second distance d2. Good reflection characteristics are easily obtained.

[0023] Let the distance along the third direction D3 between the first partial region 12a and the first conductive line 21 be the third distance d3. It is preferable that the first distance d1 is longer than the third distance d3. Let the distance along the third direction D3 between the second partial region 12b and the first conductive line 21 be the fourth distance d4. It is preferable that the first distance d1 is longer than the fourth distance d4. Good isolation is easily obtained. The first distance d1 may be greater than or equal to the third distance d3. The first distance d1 may be greater than or equal to the fourth distance d4.

[0024] For example, the first distance d1 may be one time or more and ten times or less the third distance d3. For example, the first distance d1 may be one time or more and ten times or less the fourth distance d4.

[0025] As shown in FIG. 2(b), the position of the second conductive line 22 in the second direction D2 is between the position of the first conductive layer 11 in the second direction D2 and the position of the first conductive line 21 in the second direction D2. For example, the second conductive layer 12 and the first conductive line 21 are provided on one surface of the second insulating layer 12i. A compact transmission path is obtained.

[0026] As shown in FIG. 2(b), the transmission path 110 may further include a first conductive connection member 29a. The first conductive connection member 29a electrically connects the second conductive line 22 to the first conductive line 21. The first conductive connection member 29a extends, for example, along the second direction D2.

[0027] As shown in FIG. 2(b), the transmission path 110 may further include a first connection conductive layer 11La. In the X - Y plane, the first conductive layer 11 is provided around the first connection conductive layer 11La. The first connection conductive layer 11La is separated from the first conductive layer 11. The first connection conductive layer 11La is electrically connected to the first conductive connection member 29a.

[0028] As shown in FIG. 2(c), a connection member 35 may be provided. The connection member 35 electrically connects the second conductive layer 12 to the first conductive layer 11. The connection member 35 extends along the second direction D2. A plurality of connection members 35 may be provided.

[0029] The transmission line 110 may further include a first insulating layer 11i and a second insulating layer 12i. These insulating layers are dielectric layers. These insulating layers may be, for example, insulating substrates. The first insulating layer 11i is provided between the first conductive layer 11 and the second conductive line 22 in the second direction D2. The second insulating layer 12i is provided between the second conductive line 22 and the first conductive line 21 in the second direction D2.

[0030] The first insulating layer 11i and the second insulating layer 12i may include at least one selected from the group consisting of, for example, polyimide, liquid crystal polymer, glass cloth, fluororesin-based, and ceramic. Polyimide or liquid crystal polymer is used, for example, for a flexible substrate. Ceramic includes, for example, alumina and the like.

[0031] In an embodiment, the first conductive layer 11, the second conductive layer 12, the first conductive line 21, and the second conductive line 22 may include a metal. The metal may include at least one selected from the group consisting of, for example, gold and copper. The conductive layer and the conductive line may include at least one selected from the group consisting of aluminum, an alloy containing aluminum, an alloy containing niobium, an alloy containing niobium titanium, tantalum, and an alloy containing tantalum.

[0032] As shown in FIGS. 1(a) and 1(b), the first conductive line 21 includes a first region 21p and a second region 21q. The first region 21p overlaps with the first conductive region 31p in the second direction D2. The second region 21q does not overlap with the first conductive region 31p in the second direction D2. A part of the first region 21p is electrically connected to the first conductive connection member 29a. Let the length along the first direction D1 between the boundary 21r between the first region 21p and the second region 21q and the first conductive connection member 29a be the first length L1. The first length L1 may be, for example, substantially 1 / 4 of the wavelength λ of the signal propagating through the first conductive line 21. The first length L1 may be 0.8 times or more and 1.2 times or less of 1 / 4 of the wavelength λ. Thereby, good propagation characteristics can be obtained for this signal.

[0033] The first length L1 may also be 0.8 times or more and 1.2 times or less of an integer multiple of 1 / 4 of the wavelength λ. When the first length L1 is 0.8 times or more and 1.2 times or less of 1 / 4 of the wavelength λ, the length of the transmission line 110 can be shortened. Miniaturization becomes easy.

[0034] In one example, the length of the first conductive line 21 along the first direction D1 is, for example, 10 mm or more and 80 mm or less. The length of the second conductive line 22 along the first direction D1 is, for example, 8 mm or more and 50 mm or less. The length (width) of the first conductive line 21 along the third direction D3 is, for example, 0.05 mm or more and 2 mm or less. The length (width) of the second conductive line 22 along the third direction D3 is, for example, 0.01 mm or more and 1 mm or less.

[0035] The first distance d1 is, for example, 100 μm or more and 10000 μm or less. The second distance d2 is, for example, 10 μm or more and 1000 μm or less. The third distance d3 is, for example, 10 μm or more and 500 μm or less. The fourth distance d4 is, for example, 10 μm or more and 500 μm or less.

[0036] FIGS. 3(a) to 3(d) are schematic plan views illustrating a transmission line according to the first embodiment. FIGS. 4(a) to 4(c) are schematic cross-sectional views illustrating a transmission line according to the first embodiment. FIG. 4(a) is a cross-sectional view taken along the line Y1 - Y2 of FIGS. 3(a) to 3(d). FIG. 4(b) is a cross-sectional view taken along the line Y3 - Y4 of FIGS. 3(a) to 3(d). FIG. 4(c) is a cross-sectional view taken along the line Y5 - Y6 of FIGS. 3(a) to 3(d).

[0037] As shown in these figures, in addition to the above-described configuration of the transmission line 110, the transmission line 111 according to the embodiment includes a third conductive line 23, a fourth conductive line 24, and a second conductive member 32.

[0038] At least a part of the third conductive line 23 extends along the first direction D1. The fourth conductive line 24 is electrically connected to the third conductive line 23. At least a part of the fourth conductive line 24 extends along the first direction D1. The second conductive member 32 includes a second conductive region 32p. The direction from the third conductive line 23 to the first conductive line 21 is along the third direction D3. The direction from the fourth conductive line 24 to the second conductive line 22 is along the third direction D3.

[0039] As shown in FIG. 3(b), the second conductive layer 12 includes a fourth partial region 12d. The direction from the fourth partial region 12d to the third partial region 12c is along the first direction D1. As shown in FIG. 4(c), the fourth conductive line 24 is provided between the first conductive layer 11 and the third partial region 12c in the second direction D2.

[0040] As shown in FIG. 4(b), the third conductive line 23 is provided between the fourth partial region 12d and the second partial region 12b in the third direction D3. At least a part of the third conductive line 23 is provided between the first conductive layer 11 and the second conductive region 32p in the second direction D2. The second conductive member 32 is electrically connected to the second conductive layer 12. A second gap g2 is provided between at least a part of the third conductive line 23 and the second conductive region 32p.

[0041] For example, the influence of external radio waves on the third conductive wire 23 and the fourth conductive wire 24 is suppressed. For example, the leakage of radio waves from the third conductive wire 23 and the fourth conductive wire 24 to the outside is suppressed. For example, good isolation characteristics are obtained between the first conductive wire 21 and the third conductive wire 23. For example, good isolation characteristics are obtained between the second conductive wire 22 and the fourth conductive wire 24. For example, the influence of the magnetic field is suppressed. For example, signals can be transmitted with low noise and high efficiency. According to the embodiment, a transmission path whose characteristics can be improved can be provided.

[0042] As shown in FIG. 4(b), for example, the fourth conductive wire 24 is electrically connected to the third conductive wire 23 by the second conductive connection member 29b. The transmission path 111 may further include a second connection conductive layer 11Lb. In the X-Y plane, the first conductive layer 11 is provided around the second connection conductive layer 11Lb. The second connection conductive layer 11Lb is separated from the first conductive layer 11. The second connection conductive layer 11Lb is electrically connected to the second conductive connection member 29b.

[0043] The above-described configuration described with respect to the first conductive member 31 can be applied to the second conductive member 32. For example, a fifth distance d5 along the second direction D2 between the third conductive wire 23 and the second conductive region 32p is longer than a sixth distance d6 along the second direction D2 between the first conductive layer 11 and the third conductive wire 23. For example, the fifth distance may be 5 times or more and 500 times or less the sixth distance. The fifth distance d5 may be equal to or greater than a seventh distance d7 along the third direction D3 between the second partial region 12b and the third conductive wire 23. The fifth distance d5 may be longer than the seventh distance d7. For example, the fifth distance d5 may be 1 time or more and 10 times or less the seventh distance d7.

[0044] As shown in FIG. 3(a), the first conductive member 31 may further include a third conductive portion 31c. The third conductive portion 31c electrically connects the first conductive region 31p to the third partial region 12c. The third conductive portion 31c functions as, for example, a terminal portion.

[0045] As shown in FIG. 4(b), the second conductive member 32 may further include a fourth conductive portion 32d. The fourth conductive portion 32d electrically connects the second conductive region 32p to the fourth partial region 12d. The position of the third conductive line 23 in the third direction D3 is between the position of the fourth conductive portion 32d in the third direction D3 and the position of the second conductive portion 31b in the third direction D3.

[0046] The second conductive member 32 may further include a sixth conductive portion 32f. The sixth conductive portion 32f electrically connects the second conductive region 32p to the second partial region 12b. The position of the third conductive line 23 in the third direction D3 is between the position of the fourth conductive portion 32d in the third direction D3 and the position of the sixth conductive portion 32f in the third direction D3. The sixth conductive portion 32f may be continuous with the second conductive portion 31b. The sixth conductive portion 32f may be omitted, and the second conductive portion 31b may function as the sixth conductive portion 32f.

[0047] As shown in FIG. 3(a), the second conductive member 32 may further include a fifth conductive portion 32e. The fifth conductive portion 32e electrically connects the second conductive region 32p to the third partial region 12c. The fifth conductive portion 32e functions as a terminal portion, for example.

[0048] FIG. 5 is a graph illustrating the reflection characteristics of the transmission line. The horizontal axis of FIG. 5 is the first ratio r1. The first ratio r1 is the ratio (d1 / d2) of the first distance d1 to the second distance d2. The vertical axis is the reflection characteristic Rf1 (dB). When the reflection characteristic Rf1 is small, the influence of reflection is suppressed, and good propagation characteristics can be obtained. As shown in FIG. 5, when the first ratio r1 increases, the reflection characteristic Rf1 decreases. Practically, the first ratio r1 is preferably 5 or more. The first ratio r1 may be 10 or more. The first ratio r1 may be 20 or more. If the first ratio r1 is excessively high, the size of the transmission line becomes large.

[0049] FIG. 6 is a graph illustrating the reflection characteristics of the transmission line. The horizontal axis in FIG. 6 is the second ratio r2. The second ratio r2 is the ratio (d1 / d3) of the first distance d1 to the third distance d3. In this example, the fourth distance d4 is the same as the third distance d3. The vertical axis is the reflection characteristic Rf1 (dB). As shown in FIG. 6, as the second ratio r2 increases, the reflection characteristic Rf1 decreases. Practically, the second ratio r2 is preferably 1 or more. The second ratio r2 may be 3 or more. The second ratio r2 may be 5 or more. If the second ratio r2 is excessively high, the size of the transmission line becomes large.

[0050] FIG. 7 is a graph illustrating the isolation characteristic of the transmission line. The horizontal axis in FIG. 7 is the third ratio r3. The third ratio r3 is the ratio (L1 / λ) of the first length L1 to the wavelength λ of the propagating signal. The vertical axis is the isolation characteristic Is1 (dB) between lines when a plurality of transmission lines are provided (see FIG. 3(b)). When the isolation characteristic Is1 is small, isolation is obtained and good propagation characteristics are obtained. As shown in FIG. 7, a small isolation characteristic Is1 is obtained when the third ratio r3 is 0.25. Practically, the third ratio r3 is desirably 0.8 times or more and 1.2 times or less of 0.25.

[0051] FIGS. 8 to 10 are schematic plan views illustrating the transmission line according to the first embodiment. As shown in FIG. 8, in the transmission line 112 according to the embodiment, the first conductive member 31 may further include a third conductive portion 31c. The third conductive portion 31c electrically connects the first conductive region 31p to the third partial region 12c. The third conductive portion 31c functions as a terminal portion, for example. For example, the adverse effect on the transmission characteristic due to reflection is suppressed. The configuration of the transmission line 112 except this may be the same as the configuration of the transmission line 110.

[0052] As shown in FIG. 9, in the transmission line 113 according to the embodiment, the shape of the first conductive line 21 is different from the shape of the first conductive line 21 in the transmission line 112. The configuration of the transmission line 113 except this may be the same as the configuration of the transmission line 112.

[0053] In transmission line 113, the first conductive wire 21 includes a first linear portion 21e and a first connection portion 21c. The first linear portion 21e extends along the first direction D1. The first connection portion 21c is connected to the first conductive connection member 29a. The width w2 of the first connection portion in the third direction D3 is wider than the width w1 of the first linear portion 21e in the third direction D3. The first connection portion 21c is, for example, a patch portion. With such a configuration, a more stable connection can be obtained.

[0054] As shown in FIG. 10, in the transmission line 114 according to the embodiment, the shape of the second conductive layer 12 is different from the shape of the second conductive layer 12 in the transmission line 112. The configuration of the transmission line 114 except this may be the same as the configuration of the transmission line 112.

[0055] In the transmission line 114, the width of the first partial region 12a in the third direction D3 changes stepwise. The width along the third direction D3 of the second partial region 12b changes stepwise. For example, the distance in the third direction D3 between the first linear portion 21e along which the signal propagates in the first direction D1 and the first partial region 12a is longer than the distance in the third direction D3 between the first connection portion 21c and the first partial region 12a. For example, the distance in the third direction D3 between the first linear portion 21e and the second partial region 12b is longer than the distance in the third direction D3 between the first connection portion 21c and the first partial region 12a. For example, the amount of reflection is reduced. The influence of reflection is effectively suppressed.

[0056] When the third conductive portion 31c is provided, the first length L1 may be 0.8 times or more and 1.2 times or less of an odd multiple of 1 / 4 of the wavelength λ. When the first length L1 is 0.8 times or more and 1.2 times or less of 1 / 4 of the wavelength λ, the length of the transmission line 110 can be shortened. Miniaturization becomes easy.

[0057] In the transmission lines 112, 113, and 114 as well, a transmission line with improved characteristics can be provided.

[0058] FIGS. 11(a) to 11(c) are schematic plan views illustrating the transmission line according to the first embodiment. Figs. 12(a) to 12(c) are schematic cross-sectional views illustrating a transmission line according to the first embodiment. Fig. 12(a) is a cross-sectional view taken along the line Y1 - Y2 of Figs. 11(a) to 11(c). Fig. 12(b) is a cross-sectional view taken along the line Y3 - Y4 of Figs. 11(a) to 11(c). Fig. 12(c) is a cross-sectional view taken along the line Y5 - Y6 of Figs. 11(a) to 3(c).

[0059] As shown in these figures, the transmission line 115 according to the embodiment further includes a first connection member 41 and a second connection member 42.

[0060] As shown in Fig. 11(c), the first conductive layer 11 includes a first extending region 11e along the first direction D1 and a plurality of first intersection regions 11x. The plurality of first intersection regions 11x are arranged along the first direction D1. The plurality of first intersection regions 11x are connected to the first extending region 11e. The length of each of the plurality of first intersection regions 11x in the third direction D3 is longer than the length of the first extending region 11e in the third direction D3. Each of the plurality of first intersection regions 11x extends, for example, along the third direction D3.

[0061] As shown in Fig. 11(a), the second conductive layer 12 includes a second extending region 12e along the first direction D1 and a plurality of second intersection regions 12x. The plurality of second intersection regions 12x are arranged along the first direction D1. The plurality of second intersection regions 12x are connected to the second extending region 12e. The length of each of the plurality of second intersection regions 12x in the third direction D3 is longer than the length of the second extending region 12e in the third direction D3. Each of the plurality of second intersection regions 12x extends, for example, along the third direction D3.

[0062] As shown in FIG. 12(c), the first connection member 41 electrically connects a part of one of the plurality of second intersection regions 12x to a part of one of the plurality of first intersection regions 11x. The second connection member 42 electrically connects another part of one of the plurality of second intersection regions 12x to another part of one of the plurality of first intersection regions 11x. A part of the second conductive wire 22 is provided between the first connection member 41 and the second connection member 42 in the third direction D3. For example, that part of the second conductive wire 22 is provided between the first extending region 11e and the second extending region 12e in the second direction D2.

[0063] By being connected by the first connection member 41 and the second connection member 42, the potentials of the first extending region 11e and the second extending region 12e are stabilized. By the first extending region 11e and the second extending region 12e, isolation can be effectively obtained in the second conductive wire 22.

[0064] The pitch of the plurality of first intersection regions 11x may be 1 / 4 or less of the wavelength λ of the signal propagating through the second conductive wire 22. The pitch of the plurality of second intersection regions 12x may be 1 / 4 or less of the wavelength λ of the signal propagating through the second conductive wire 22.

[0065] Excluding the plurality of first intersection regions 11x, the first extending region 11e is thin. Excluding the plurality of second intersection regions 12x, the second extending region 12e is thin. For example, heat conduction can be effectively suppressed. For example, high-efficiency transmission is possible while suppressing heat conduction.

[0066] As shown in FIG. 11(c), the first conductive layer 11 may include a third extending region 13e along the first direction D1 and a plurality of third intersection regions 13x along the third direction D3. The plurality of third intersection regions 13x are arranged along the first direction D1. The plurality of third intersection regions 13x are connected to the third extending region 13e. The length of each of the plurality of third intersection regions 13x in the third direction D3 is longer than the length of the third extending region 13e in the third direction D3.

[0067] As shown in FIG. 11(a), the second conductive layer 12 includes a fourth extending region 14e along the first direction D1 and a plurality of fourth intersecting regions 14x along the third direction D3. The plurality of fourth intersecting regions 14x are arranged along the first direction D1. The plurality of fourth intersecting regions 14x are connected to the fourth extending region 14e. The length of each of the plurality of fourth intersecting regions 14x in the third direction D3 is longer than the length of the fourth extending region 14e in the third direction D3.

[0068] The transmission line 115 may further include a third connection member 43 and a fourth connection member 44. The third connection member 43 electrically connects a part of one of the plurality of fourth intersecting regions 14x to a part of one of the plurality of third intersecting regions 13x. The fourth connection member 44 electrically connects another part of one of the plurality of fourth intersecting regions 14x to another part of one of the plurality of third intersecting regions 13x. A part of the fourth conductive wire 24 is provided between the third connection member 43 and the fourth connection member 44 in the third direction D3. For example, that part of the fourth conductive wire 24 is provided between the third extending region 13e and the fourth extending region 14e in the second direction D2. For example, high-efficiency transmission is possible while suppressing heat conduction.

[0069] FIGS. 13(a) to 13(c), FIG. 14(a) and FIG. 14(b) are schematic plan views illustrating the transmission line according to the first embodiment. FIGS. 15 to 17 are schematic cross-sectional views illustrating the transmission line according to the first embodiment. FIG. 15 is a cross-sectional view taken along the line Y1 - Y2 of FIGS. 13(a) to 13(c), FIG. 14(a) and FIG. 14(b). FIG. 16 is a cross-sectional view taken along the line Y3 - Y4 of FIGS. 13(a) to 13(c), FIG. 14(a) and FIG. 14(b). FIG. 17 is a cross-sectional view taken along the line Y5 - Y6 of FIGS. 13(a) to 13(c), FIG. 14(a) and FIG. 14(b).

[0070] As shown in these figures, the transmission line 116 according to the embodiment includes a fifth conductive wire 25, a sixth conductive wire 26, a seventh conductive wire 27, an eighth conductive wire 28, a third conductive member 33, a fourth conductive member 34, and a third conductive layer 13. The configuration of the transmission line 116 excluding this may be the same as the configuration of the transmission line 111, for example.

[0071] The fifth conductive wire 25 and the seventh conductive wire 27 are along the first direction D1. The sixth conductive wire 26 is electrically connected to the fifth conductive wire 25. At least a part of the sixth conductive wire 26 is along the first direction D1. The eighth conductive wire 28 is electrically connected to the fifth conductive wire 25. At least a part of the sixth conductive wire 26 is along the first direction D1. The direction from the fifth conductive wire 25 to the first conductive wire 21 is along the third direction D3. The direction from the seventh conductive wire 27 to the first conductive wire 21 is along the third direction D3.

[0072] The third conductive member 33 and the fourth conductive member 34 are electrically connected to the second conductive layer 12. At least a part of the fifth conductive wire 25 is provided between the first conductive layer 11 and the third conductive member 33 in the second direction D2. At least a part of the seventh conductive wire 27 is provided between the first conductive layer 11 and the fourth conductive member 34 in the second direction D2.

[0073] In this example, the sixth conductive wire 26 is provided between the third conductive layer 13 and the first conductive layer 11 in the second direction D2. The eighth conductive wire 28 is provided between the third conductive layer 13 and the first conductive layer 11 in the second direction D2.

[0074] Good isolation characteristics can be obtained in the fifth conductive wire 25, the sixth conductive wire 26, the seventh conductive wire 27 and the eighth conductive wire 28.

[0075] In this example, the transmission path 116 includes the third insulating layer 13i. The third insulating layer 13i is provided between the third conductive layer 13 and the sixth conductive wire 26, and between the third conductive layer 13 and the eighth conductive wire 28 in the second direction D2. The transmission path 116 includes the fourth insulating layer 14i. The fourth insulating layer 14i is provided between the sixth conductive wire 26 and the first conductive layer 11, and between the eighth conductive wire 28 and the first conductive layer 11 in the second direction D2.

[0076] Figs. 18(a) to 18(c) are schematic cross-sectional views illustrating the transmission path according to the first embodiment. As shown in these figures, in the transmission line 117 according to the embodiment, the second conductive member 32 is continuous with the first conductive member 31. The configuration of the transmission line 117 other than this may be the same as that of the transmission line 111.

[0077] In the transmission line 117, the first conductive member 31 and the second conductive member 32 are electrically connected to the second conductive layer 12 by a connection member 38 for conductive members. The connection member 38 for conductive members may include, for example, a metal or the like.

[0078] Figs. 19(a) to 19(c) are schematic cross-sectional views illustrating the transmission line according to the first embodiment. As shown in these figures, the transmission line 118 according to the embodiment includes a third conductive line 23 and a fourth conductive line 24 in addition to the first conductive layer 11, the second conductive layer 12, and the first conductive member 31 described with respect to the transmission line 110. The transmission line 118 may be regarded as having a configuration in which the second conductive member 32 is continuous with the first conductive member 31.

[0079] At least a part of the third conductive line 23 extends along the first direction D1. The fourth conductive line 24 is electrically connected to the third conductive line 23. At least a part of the fourth conductive line 24 extends along the first direction D1. The direction from the third conductive line 23 to the first conductive line 21 extends along the third direction D3. The direction from the fourth conductive line 24 to the second conductive line 22 extends along the third direction D3.

[0080] As shown in Fig. 3(b), the second conductive layer 12 includes a fourth partial region 12d. The direction from the fourth partial region 12d to the third partial region 12c extends along the first direction D1. As shown in Fig. 4(c), the fourth conductive line 24 is provided between the first conductive layer 11 and the third partial region 12c in the second direction D2.

[0081] The first conductive member 31 includes a second conductive region 32p. The first conductive member 31 may further include a fourth conductive portion 32d.

[0082] The third conductive wire 23 is between the fourth partial region 12d and the second partial region 12b in the third direction D3. At least a part of the third conductive wire 23 is between the first conductive layer 11 and the second conductive region 32p in the second direction D2. There is a second gap g2 between at least a part of the third conductive wire 23 and the second conductive region 32p.

[0083] The fourth conductive part 32d electrically connects the second conductive region 32p to the fourth partial region 12d. The position of the third conductive wire 23 in the third direction D3 is between the position of the fourth conductive part 32d in the third direction D3 and the position of the second conductive part 31b in the third direction D3.

[0084] The first conductive member 31 may further include a fifth conductive part 32e (see FIG. 3(a)). The fifth conductive part 32e electrically connects the second conductive region 32p to the third partial region 12c. Also in the transmission line 118, a transmission line with improved characteristics can be provided.

[0085] (Second Embodiment) FIG. 20 is a schematic diagram illustrating a processing apparatus according to the second embodiment. As shown in FIG. 20, the processing apparatus 210 according to the embodiment includes a transmission line according to the first embodiment (in this example, the transmission line 111), a first signal processing circuit 51, and a second signal processing circuit 52. For example, one end of the first conductive wire 21 can be coupled to the first signal processing circuit 51. For example, the other end of the first conductive wire 21 can be coupled to the second signal processing circuit 52. The signal processing circuits included in the processing apparatus 210 can be coupled with low loss. The coupling between the conductive wire and the signal processing circuit may include a connection.

[0086] The first temperature of the first signal processing circuit 51 is different from the second temperature of the second signal processing circuit 52. Due to the high heat insulation of the transmission line 110, the temperatures of these signal processing circuits can be easily maintained in the desired state.

[0087] For example, the processing device 210 may be at least a part of the quantum computer 310. In the processing device 210, for example, even when wiring for controlling a large number of qubits is provided, efficient cooling is possible. For example, a quantum computer capable of multi-bit operation can be provided as compared with the conventional one. According to an embodiment, a processing device (for example, a quantum computer) capable of improving characteristics can be provided.

[0088] In this example, the processing device 210 may include the cooling device 55. The second signal processing circuit 52 is provided in the cooling device 55. The first signal processing circuit 51 may be provided in the cooling device 55. For example, the cooling device 55 includes a cooling unit 56. The second signal processing circuit 52 is provided in the cooling unit 56. The first signal processing circuit 51 is provided outside the cooling unit 56. By the operation of the cooling unit 56, the second temperature of the second signal processing circuit 52 becomes lower than the first temperature of the first signal processing circuit 51. In one example, the difference between the first temperature and the second temperature is 100 K or more. For example, in a low temperature environment of 77 K or less, the difference between the first temperature and the second temperature may be 10 K or more. In another example, for example, in an extremely low temperature environment of 1 K or less, the difference between the first temperature and the second temperature may be 0.1 K or more.

[0089] In this example, the second signal processing circuit 52 includes a second signal separation unit 52b, a processor 52a, and a second signal multiplexing unit 52c. For example, the first signal processing circuit 51 and the second signal separation unit 52b may be coupled by the first conductive wire 21. The first signal processing circuit 51 and the second signal multiplexing unit 52c may be coupled by the second conductive wire 22.

[0090] In this example, a third signal processing circuit 53 and a fourth signal processing circuit 54 are further provided. For example, the third signal processing circuit 53 includes a third signal multiplexing unit 53c. For example, the fourth signal processing circuit 54 includes a fourth signal separation unit 54b. The third signal processing circuit 53 can be coupled to the first signal processing circuit 51. The fourth signal processing circuit 54 can be coupled to the first signal processing circuit 51.

[0091] The embodiment may include the following configuration (for example, technical solution). (Technical Solution 1) A first conductive wire, at least a part of the first conductive wire extending along a first direction, the first conductive wire, and A second conductive wire electrically connected to the first conductive wire, at least a part of the second conductive wire extending along the first direction, the second conductive wire, and A first conductive layer, and A second conductive layer electrically connected to the first conductive layer, the second conductive layer including a first partial region, a second partial region, and a third partial region, the directions from the first partial region to the third partial region and from the second partial region to the third partial region extending along the first direction, the second conductive wire being located between the first conductive layer and the third partial region in a second direction intersecting the first direction, the first conductive wire being located between the second partial region and the first partial region in a third direction intersecting a plane including the first direction and the second direction, the second conductive layer, and A first conductive member including a first conductive region, at least a part of the first conductive wire being located between the first conductive layer and the first conductive region in the second direction, the first conductive member being electrically connected to the second conductive layer, the first conductive member, and A transmission line provided with the above.

[0092] (Technical Solution 2) The transmission line according to Technical Solution 1, wherein there is a first gap between at least a part of the first conductive wire and the first conductive region.

[0093] (Technical Solution 3) The transmission line according to Technical Solution 2, wherein a first distance along the second direction between at least a part of the first conductive wire and the first conductive region is longer than a second distance along the second direction between the first conductive layer and the first conductive wire.

[0094] (Technical Solution 4) The transmission line according to Technical Solution 3, wherein the first distance is 5 times or more the second distance.

[0095] (Technical Solution 5) The first distance along the second direction between at least a part of the first conductive line and the first conductive region is longer than the third distance along the third direction between the first partial region and the first conductive line, for the transmission line according to Technical Solution 2.

[0096] (Technical Solution 6) The first distance is one time or more of the third distance, for the transmission line according to Technical Solution 5.

[0097] (Technical Solution 7) The first conductive member further includes a first conductive part and a second conductive part. The first conductive part electrically connects the first conductive region to the first partial region. The second conductive part electrically connects the first conductive region to the second partial region. The position of the first conductive line in the third direction is between the position of the second conductive part in the third direction and the position of the first conductive part in the third direction, for the transmission line according to any one of Technical Solutions 1 to 6.

[0098] (Technical Solution 8) The first conductive member further includes a third conductive part. The third conductive part electrically connects the first conductive region to the third partial region, for the transmission line according to Technical Solution 7.

[0099] (Technical Solution 9) The position of the second conductive line in the second direction is between the position of the first conductive layer in the second direction and the position of the first conductive line in the second direction, for the transmission line according to any one of Technical Solutions 1 to 8.

[0100] (Technical Solution 10) A first insulating layer, A second insulating layer, further comprising, The first insulating layer is between the first conductive layer and the second conductive line in the second direction. The second insulating layer is a transmission line according to any one of Technical Solutions 1 to 9, which is between the second conductive line and the first conductive line in the second direction.

[0101] (Technical Solution 11) A transmission line according to any one of Technical Solutions 1 to 10, further comprising a first conductive connection member that electrically connects the second conductive line to the first conductive line.

[0102] (Technical Solution 12) The first conductive line includes a first region and a second region. The first region overlaps the first conductive region in the second direction. The second region does not overlap the first conductive region in the second direction. A part of the first region is electrically connected to the first conductive connection member. The first length along the first direction between the boundary between the first region and the second region and the first conductive connection member is 0.8 times or more and 1.2 times or less of 1 / 4 of the wavelength of the signal propagating through the first conductive line. The transmission line according to Technical Solution 11.

[0103] (Technical Solution 13) A third conductive line, at least a part of the third conductive line is along the first direction, the third conductive line and A fourth conductive line that is electrically connected to the third conductive line, at least a part of the fourth conductive line is along the first direction, the fourth conductive line and A second conductive member including a second conductive region and a fourth conductive portion, and further comprising The second conductive layer includes a fourth partial region. The direction from the fourth partial region to the third partial region is along the first direction. The fourth conductive line is between the first conductive layer and the third partial region in the second direction. The third conductive line is between the fourth partial region and the second partial region in the third direction. At least a part of the third conductive line is between the first conductive layer and the second conductive region in the second direction. There is a second gap between the at least a part of the third conductive line and the second conductive region. The fourth conductive part electrically connects the second conductive region to the fourth partial region. The position of the third conductive line in the third direction is between the position of the fourth conductive part in the third direction and the position of the second conductive part in the third direction, for the transmission path according to Technical Solution 7 or 8.

[0104] (Technical Solution 14) The second conductive member further includes a fifth conductive part. The fifth conductive part electrically connects the second conductive region to the third partial region, for the transmission path according to Technical Solution 13.

[0105] (Technical Solution 15) The second conductive member further includes a sixth conductive part. The sixth conductive part electrically connects the second conductive region to the second partial region. The position of the third conductive line in the third direction is between the position of the fourth conductive part in the third direction and the position of the sixth conductive part in the third direction, for the transmission path according to any one of Technical Solutions 13 or 14.

[0106] (Technical Solution 16) A third conductive line, at least a part of the third conductive line extends along the first direction, the third conductive line, A fourth conductive line electrically connected to the third conductive line, at least a part of the fourth conductive line extends along the first direction, the fourth conductive line, Further comprising The first conductive member further includes a second conductive region and a fourth conductive part. The second conductive layer includes a fourth partial region. The direction from the fourth partial region to the third partial region is along the first direction. The fourth conductive wire is between the first conductive layer and the third partial region in the second direction. The third conductive wire is between the fourth partial region and the second partial region in the third direction. At least a part of the third conductive wire is between the first conductive layer and the second conductive region in the second direction. There is a second gap between the at least a part of the third conductive wire and the second conductive region. The fourth conductive part electrically connects the second conductive region to the fourth partial region. The position of the third conductive wire in the third direction is between the position of the fourth conductive part in the third direction and the position of the second conductive part in the third direction, according to the transmission path described in Technical Solution 7 or 8.

[0107] (Technical Solution 17) The first conductive wire includes a first linear part extending along the first direction and a first connection part connected to the first conductive connection member. The width of the first connection part in the third direction is wider than the width of the first linear part in the third direction, according to the transmission path described in Technical Solution 11 or 12.

[0108] (Technical Solution 18) A first connection member A second connection member and further includes The first conductive layer includes a first extending region along the first direction and a plurality of first intersection regions. The plurality of first intersection regions are connected to the first extending region. The length of each of the plurality of first intersection regions in the third direction is longer than the length of the first extending region in the third direction. The second conductive layer includes a second extending region along the first direction and a plurality of second intersection regions. The plurality of second intersection regions are connected to the second extending region. The length of each of the plurality of second intersection regions in the third direction is longer than the length of the second extending region in the third direction. The first connection member electrically connects a part of one of the plurality of second intersection regions to a part of one of the plurality of first intersection regions. The second connection member electrically connects the other part of the one of the plurality of second intersection regions to the other part of the one of the plurality of first intersection regions. A part of the second conductive line is between the first connection member and the second connection member in the third direction. The part of the second conductive line is between the first extending region and the second extending region in the second direction. A transmission line according to any one of Technical Solutions 1 to 17.

[0109] (Technical Solution 19) A transmission line according to any one of Technical Solutions 1 to 18, a first signal processing circuit, a second signal processing circuit, and the first conductive line is configured to be coupled to the first signal processing circuit, the second conductive line is configured to be coupled to the second signal processing circuit. A processing device.

[0110] (Technical Solution 20) A transmission line according to any one of Technical Solutions 1 to 18, a first signal processing circuit, a second signal processing circuit, and the first conductive line is configured to be coupled to the first signal processing circuit, the second conductive line is configured to be coupled to the second signal processing circuit. A quantum computer.

[0111] According to the embodiment, a transmission line, a processing device, and a quantum computer capable of improving characteristics can be provided.

[0112] In the present specification, "vertical" and "parallel" include not only strict vertical and strict parallel, but also, for example, variations in the manufacturing process, etc., and it is sufficient that they are substantially vertical and substantially parallel.

[0113] The embodiments of the present invention have been described above with reference to examples. However, the present invention is not limited to these examples. For example, regarding the specific configurations of each element such as the conductive layer and conductive wires included in the transmission line, those skilled in the art can appropriately select from the known range to implement the present invention in the same manner, and as long as the same effects can be obtained, it is included in the scope of the present invention.

[0114] Combinations of any two or more elements of each example within the technically possible range are also included in the scope of the present invention as long as they include the gist of the present invention.

[0115] Based on the transmission line and processing device described above as embodiments of the present invention, all transmission lines and processing devices that those skilled in the art can appropriately design and modify and implement also belong to the scope of the present invention as long as they include the gist of the present invention.

[0116] Those skilled in the art can conceive of various modification examples and correction examples within the scope of the idea of the present invention, and it is understood that those modification examples and correction examples also belong to the scope of the present invention.

[0117] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the gist of the invention. These embodiments and their modifications are included in the scope and gist of the invention, and are also included in the scope of the invention described in the claims and its equivalents.

Explanation of Reference Numerals

[0118] 11~13: First conductive layer, 11La, 11Lb: First and second connection conductive layers, 11e~14e: First to fourth extending regions, 11i~14i: First to fourth insulating layers, 11x~14x: First to fourth intersection regions, 12a~12d: First to fourth partial regions, 21~28: First to eighth conductive lines, 21c: First connection portion, 21e: First linear portion, 21p: First region, 21q: Second region, 21r: Boundary, 29a, 29b: First and second conductive connection members, 31~34: First to fourth conductive members, 31a~31c: First to third conductive portions, 31p, 32p: First and second conductive regions, 32d~32f: Fourth to sixth conductive portions, 35: Connection member, 38: Connection member for conductive member, 41~44: First and fourth connection members, 51~54: First to fourth signal processing circuits, 52a: Processor, 52b: Second signal separation portion, 52c: Second signal multiplexing portion, 53c: Third signal multiplexing portion, 55: Cooling device, 56: Cooling portion, 110~118: Transmission paths, 210: Processing device, 310: Quantum computer, D1~D3: First to third directions, Is1: Isolation characteristic, L1: First length, Rf1: Reflection characteristic, d1~d7: First to seventh distances, g1, g2: First and second gaps, r1~r3: First to third ratios, w1, w2: Widths

Claims

1. A first conductive wire, at least a part of the first conductive wire extending along a first direction, the first conductive wire, and a second conductive wire electrically connected to the first conductive wire, at least a part of the second conductive wire extending along the first direction, the second conductive wire, and a first conductive layer, and a second conductive layer electrically connected to the first conductive layer, the second conductive layer including a first partial region, a second partial region, and a third partial region, the direction from the first partial region to the third partial region and the direction from the second partial region to the third partial region extending along the first direction, the second conductive wire being between the first conductive layer and the third partial region in a second direction intersecting the first direction, the first conductive wire being between the second partial region and the first partial region in a third direction intersecting a plane including the first direction and the second direction, the second conductive layer, and a first conductive member including a first conductive region, at least a part of the first conductive wire being between the first conductive layer and the first conductive region in the second direction, the first conductive member being electrically connected to the second conductive layer, the first conductive member, and a transmission line including the same.

2. The transmission line according to claim 1, wherein there is a first gap between at least a part of the first conductive wire and the first conductive region.

3. The transmission line according to claim 2, wherein a first distance along the second direction between at least a part of the first conductive wire and the first conductive region is longer than a second distance along the second direction between the first conductive layer and the first conductive wire.

4. The transmission line according to claim 3, wherein the first distance is 5 times or more the second distance.

5. The transmission line according to claim 2, wherein a first distance along the second direction between at least a part of the first conductive wire and the first conductive region is longer than a third distance along the third direction between the first partial region and the first conductive wire.

6. The transmission line according to claim 5, wherein the first distance is 1 time or more the third distance.

7. The first conductive member further includes a first conductive part and a second conductive part, the first conductive part electrically connecting the first conductive region to the first partial region, and the second conductive part electrically connecting the first conductive region to the second partial region. The position of the first conductive wire in the third direction is between the position of the second conductive portion in the third direction and the position of the first conductive portion in the third direction, for the transmission line according to any one of claims 1 to 6.

8. The first conductive member further includes a third conductive portion, The third conductive portion electrically connects the first conductive region to the third partial region, for the transmission line according to claim 7.

9. The position of the second conductive wire in the second direction is between the position of the first conductive layer in the second direction and the position of the first conductive wire in the second direction, for the transmission line according to any one of claims 1 to 6.

10. A first insulating layer, A second insulating layer, further comprising, The first insulating layer is between the first conductive layer and the second conductive wire in the second direction, The second insulating layer is between the second conductive wire and the first conductive wire in the second direction, for the transmission line according to any one of claims 1 to 6.

11. further comprising a first conductive connection member that electrically connects the second conductive wire to the first conductive wire, for the transmission line according to any one of claims 1 to 6.

12. The first conductive wire includes a first region and a second region, The first region overlaps the first conductive region in the second direction, The second region does not overlap the first conductive region in the second direction, The first length along the first direction between the boundary between the first region and the second region and the first conductive connection member is 0.8 times or more and 1.2 times or less of 1 / 4 of the wavelength of the signal propagating through the first conductive wire, for the transmission line according to claim 11.

13. A third conductive wire, at least a part of the third conductive wire extending along the first direction, the third conductive wire, A fourth conductive wire electrically connected to the third conductive wire, at least a part of the fourth conductive wire extending along the first direction, the fourth conductive wire, A second conductive member including a second conductive region and a fourth conductive portion, further comprising, The second conductive layer includes a fourth partial region, The direction from the fourth partial region to the third partial region is along the first direction, The fourth conductive wire is between the first conductive layer and the third partial region in the second direction, The third conductive wire is between the fourth partial region and the second partial region in the third direction, At least a part of the third conductive wire is between the first conductive layer and the second conductive region in the second direction, The second conductive member is electrically connected to the second conductive layer. There is a second gap between at least a part of the third conductive line and the second conductive region. The fourth conductive part electrically connects the second conductive region to the fourth partial region. The position of the third conductive line in the third direction is between the position of the fourth conductive part in the third direction and the position of the second conductive part in the third direction. The transmission line according to claim 7.

14. The second conductive member further includes a fifth conductive part. The fifth conductive part electrically connects the second conductive region to the third partial region. The transmission line according to claim 13.

15. The second conductive member further includes a sixth conductive part. The sixth conductive part electrically connects the second conductive region to the second partial region. The position of the third conductive line in the third direction is between the position of the fourth conductive part in the third direction and the position of the sixth conductive part in the third direction. The transmission line according to claim 13.

16. A third conductive line, at least a part of the third conductive line extends along the first direction, the third conductive line, A fourth conductive line electrically connected to the third conductive line, at least a part of the fourth conductive line extends along the first direction, the fourth conductive line, Further comprising The first conductive member further includes a second conductive region and a fourth conductive part. The second conductive layer includes a fourth partial region. The direction from the fourth partial region to the third partial region is along the first direction. The fourth conductive line is between the first conductive layer and the third partial region in the second direction. The third conductive line is between the fourth partial region and the second partial region in the third direction. At least a part of the third conductive line is between the first conductive layer and the second conductive region in the second direction. There is a second gap between at least a part of the third conductive line and the second conductive region. The fourth conductive part electrically connects the second conductive region to the fourth partial region. The position of the third conductive line in the third direction is between the position of the fourth conductive part in the third direction and the position of the second conductive part in the third direction. The transmission line according to claim 7.

17. The first conductive line includes a first linear part extending along the first direction and a first connection part connected to the first conductive connection member. The width of the first connection portion in the third direction is wider than the width of the first linear portion in the third direction. The transmission line according to claim 11.

18. A first connection member, A second connection member, Further comprising, The first conductive layer includes a first extending region along the first direction and a plurality of first intersection regions. The plurality of first intersection regions are connected to the first extending region. The length of each of the plurality of first intersection regions in the third direction is longer than the length of the first extending region in the third direction. The second conductive layer includes a second extending region along the first direction and a plurality of second intersection regions. The plurality of second intersection regions are connected to the second extending region. The length of each of the plurality of second intersection regions in the third direction is longer than the length of the second extending region in the third direction. The first connection member electrically connects a part of one of the plurality of second intersection regions to a part of one of the plurality of first intersection regions. The second connection member electrically connects the other part of the one of the plurality of second intersection regions to the other part of the one of the plurality of first intersection regions. A part of the second conductive line is between the first connection member and the second connection member in the third direction. The part of the second conductive line is between the first extending region and the second extending region in the second direction. The transmission line according to claim 1.

19. The transmission line according to claim 1, A first signal processing circuit, A second signal processing circuit, Comprising, The first conductive line is configured to be coupled to the first signal processing circuit. The second conductive line is configured to be coupled to the second signal processing circuit. A processing device.

20. The transmission line according to claim 1, A first signal processing circuit, A second signal processing circuit, Comprising, The first conductive line is configured to be coupled to the first signal processing circuit. The second conductive line is configured to be coupled to the second signal processing circuit. A quantum computer.

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