Depth measuring system, depth measuring method, and depth measuring program

Abstract

To provide a depth measuring system, capable of measuring the depth of an opening, a depth measuring method and a depth measuring program.SOLUTION: A depth measuring system is configured so as to, (i) when first transmission x-ray image information (first image) that is obtained by detecting X-rays that penetrate the member with the detector in the case where an X-ray source is in a first position relative to a member and second transmission x-ray image information (second image) that is obtained by detecting X-rays transmitted through the member with the detector when the X-ray source is slid to a second position relative to the member are superimposed, acquire the rate of change in brightness at the edge of an image of an opening recorded in the superimposed image; (ii) acquire the depth of the opening corresponding to the deviation between the reference position facing the member at the detector and the position at the detector where the opening is projected when acquiring the first transmission x-ray image information and the second transmission x-ray image information; and (iii) identify the depth of the opening corresponding to the vertices when approximated when the relationship between the rate of change in acquired luminance and the depth is approximated on the basis of an approximate formula.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure relates to a depth measurement device, a depth measurement method, and a depth measurement program.

Background Art

[0002] Conventionally, when a tomographic image in ultrasonic diagnosis of the human body includes a breast image, a pectoralis major muscle image, and a boundary image between them, the diagnostic device detects the boundary image and calculates an approximate straight line. Further, the diagnostic device calculates the inclination angle of the approximate straight line and displays a support image reflecting the inclination angle (see Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] As described above, the diagnostic device described in Patent Document 1 calculates an approximate straight line when performing ultrasonic diagnosis of the human body. However, with the diagnostic device described in Patent Document 1, for example, it is not possible to measure the depth of an opening inside a member constituting an industrial product or the like.

[0005] The present disclosure provides a depth measurement device, a depth measurement method, and a depth measurement program for measuring the depth of an opening.

Means for Solving the Problems

[0006] A depth measurement device according to one aspect includes an X-ray source control unit that controls an X-ray source to irradiate a member with X-rays while sliding the X-ray source in a direction intersecting the depth direction of an opening in the member; first transmission X-ray image information based on detecting, by a detection unit, X-rays transmitted through the member when the X-ray source is at a first position with respect to the member; a first acquisition unit that acquires second transmission X-ray image information based on detecting, by the detection unit, X-rays transmitted through the member when the X-ray source is at a second position different from the first position with respect to the member; a second acquisition unit that acquires a change rate of luminance at a peripheral edge of an image of the opening recorded in an image obtained by overlapping a first image based on the first transmission X-ray image information and a second image based on the second transmission X-ray image information; a reference position facing the member in the detection unit; a third acquisition unit that acquires the depth of the opening corresponding to a deviation amount between the reference position in the detection unit facing the member and the position in the detection unit where the opening is projected when each of the first transmission X-ray image information and the second transmission X-ray image information is acquired; and a specifying unit that approximates the relationship between the change rate of luminance acquired by the second acquisition unit and the depth acquired by the third acquisition unit based on an approximation formula and specifies the depth of the opening corresponding to the vertex when approximated.

Effect of the Invention

[0007] The depth measurement device, depth measurement method, and depth measurement program of the present disclosure can measure the depth of an opening in a member.

Brief Description of the Drawings

[0008]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Mode for Carrying Out the Invention

[0009] Hereinafter, an embodiment will be described.

[0010] [Outline of Depth Measurement Device 1] First, the outline of a depth measurement device 1 according to an embodiment will be described. FIG. 1 is a diagram for explaining a depth measurement device 1 according to an embodiment.

[0011] The depth measurement device 1 includes, for example, an X-ray source 2, an X-ray detection unit (detection unit) 3, and a processing unit 10.

[0012] The X-ray source 2 is an X-ray generating device that generates X-rays to irradiate the member 20. The X-ray source 2 includes, for example, a fixed anode X-ray tube. For example, metals such as tungsten and molybdenum are used as the target for the anode of the X-ray tube. The X-ray source 2 sets the amount of X-rays (energy amount) to be generated according to, for example, the thickness and material of the member 20 through which the X-rays are to be transmitted, based on the control of the processing unit 10 described later. For the X-ray source 2, for example, a known irradiation device for X-rays may be used. The member 20 may be a member made of various materials such as, for example, a metal member and a resin member.

[0013] The detection unit 3 detects, for example, the X-rays that have passed through the member 20 after being irradiated from the X-ray source 2. The detection unit 3 detects, for example, the intensity of the transmitted X-rays (as an example, the dose and the irradiation dose, etc.). For the detection unit 3, for example, a known detection device for X-rays may be used. The detection unit 3 may generate image information (transmitted X-ray image information) based on detecting the transmitted X-rays.

[0014] The processing unit 10 may transmit and receive information to and from, for example, the X-ray source 2 and the X-ray detection unit 3 respectively. The processing unit 10 may be, for example, a computer (information processing device) such as a server, a desktop, and a laptop.

[0015] As illustrated in FIG. 3, the processing unit 10 controls the X-ray source 2 to slide and move in a direction X (for example, an orthogonal direction (orthogonal direction)) that intersects the depth direction Y of the opening 230 in the member 20. The depth direction Y may be a direction from the X-ray source 2 toward the detection unit 3. The intersecting direction X may be a direction along the detection surface of the detection unit 3. One or more openings 230 may be formed, for example, inside the member 20.

[0016] Further, the processing unit 10 controls the X-ray source 2 to irradiate the member 20 while sliding and moving the X-ray source 2. For example, the processing unit 10 irradiates the member 20 with X-rays a plurality of times while moving the X-ray source 2 in multiple steps or continuously.

[0017] The processing unit 10 acquires a plurality of pieces of image information (for example, first transmitted X-ray image information and second transmitted X-ray image information, etc.) generated based on the fact that the X-rays irradiated from the X-ray source 2 pass through the member 20 and the transmitted X-rays are detected by the detection unit 3. The first transmitted X-ray image information is image information based on the detection by the detection unit 3 of the X-rays that have passed through the member 20 when the X-ray source 2 is at a first position with respect to the member 20. The image based on the first transmitted X-ray image information may be referred to as the first image in some cases. The second transmitted X-ray image information is image information based on the detection by the detection unit 3 of the X-rays that have passed through the member 20 when the X-ray source 2 is at a second position different from the first position with respect to the member 20. The image based on the second transmitted X-ray image information may be referred to as the second image in some cases.

[0018] As illustrated in FIG. 4, the processing unit 10 acquires the rate of change in luminance at the peripheral edge (contour portion 231) of the image of the opening 230 recorded in the image (overlapped image) when the first image and the second image are overlapped. Here, when overlapping a plurality of images (for example, the first image, the second image, etc.) in which an image of the opening 230 is recorded, based on irradiating X-rays while sliding and moving the X-ray source 2, when the apparent movement amount of the X-ray source 2 with respect to the opening 230 is small, it is considered that the contour portion 231 of the opening 230 in the overlapped plurality of images becomes clearer. Similarly, when the apparent movement amount of the X-ray source 2 with respect to the opening 230 is large, it is considered that the contour portion 231 of the opening 230 in the overlapped images becomes less clear. Since luminance information is recorded in the image information, the contour portion 231 of the opening 230 when a plurality of images are overlapped is represented by the luminance value, that is, the amount of change in luminance. When the contour portion 231 of the opening 230 becomes clearer, the amount of change in luminance, that is, the value of the luminance change rate, becomes relatively large. On the other hand, when the contour portion 231 of the opening 230 becomes less clear, the amount of change in luminance, that is, the value of the luminance change rate, becomes relatively small.

[0019] The processing unit 10 is the reference position L in the detection unit 3 1 to the position L where the image of the opening 230 is acquired 2 The image displacement amount L up to 12 is acquired (see FIG. 3). The reference position L 1 may be, for example, a position facing the member 20 in the detection unit 3. The position L 2 where the image of the opening 230 is acquired may be, for example, a position in the detection unit 3 where the opening 230 is projected when the first transmitted X-ray image information and the second transmitted X-ray image information are respectively acquired. The processing unit 10 acquires the depth of the opening 230 corresponding to the displacement amount L 12 . The displacement amount L 12 and the depth of the opening 230 have a corresponding relationship, and the displacement amount L 12 becomes the depth α from the position of the X-ray source 2 to the opening 230.

[0020] The processing unit 10 performs approximate calculation based on an approximate formula regarding the relationship between the luminance change rate and the depth of the opening 230 acquired as described above, and the depth α of the opening 230 corresponding to the vertex P at the time of approximation 1Identify (see FIG. 5). As an example, the processing unit 10 approximates the relationship between the change rate of luminance and the depth of the opening 230 with a quadratic approximation formula, and the depth α of the opening 230 corresponding to the vertex P (the value with the highest change rate of luminance) of the quadratic approximation curve (approximation curve C) obtained by the quadratic approximation formula 1 is identified.

[0021] [Details of the Depth Measuring Device 1] Next, the depth measuring device 1 according to an embodiment will be described in detail. Here, in particular, the processing unit 10 will be described in detail. FIG. 2 is a block diagram for explaining the depth measuring device 1 according to an embodiment. FIG. 3 is a schematic diagram for explaining an example of the X-ray source 2 and the detection unit 3. Note that since FIG. 3 is a schematic diagram, dimensions and the like may not be accurate. FIG. 4 is a diagram for explaining the contour portion 231 of the opening 230 related to the image information. FIG. 4(A) is the first diagram when a plurality of openings 230 are overlapped, FIG. 4(B) is the first diagram for explaining the transmission amount, FIG. 4(C) is the second diagram when a plurality of openings 230 are overlapped, and FIG. 4(D) is the second diagram for explaining the transmission amount.

[0022] As shown in FIG. 2, the depth measuring device 1 (processing unit 10) includes, for example, a communication unit 121, a storage unit 122, a display unit 123, a control unit 110, and the like. The communication unit 121, the storage unit 122, and the display unit 123 may be an embodiment of the output unit. The control unit 110 includes, for example, an X-ray source control unit 111, a first acquisition unit 112, a second acquisition unit 113, a third acquisition unit 114, a specifying unit 115, an output control unit 116, and the like. The control unit 110 may be configured by, for example, an arithmetic processing device of the depth measuring device 1. The control unit 110 (for example, an arithmetic processing device or the like) may realize the functions of each unit (for example, the X-ray source control unit 111, the first acquisition unit 112, the second acquisition unit 113, the third acquisition unit 114, the specifying unit 115, the output control unit 116, and the like) by appropriately reading and executing various programs and the like stored in the storage unit 122 and the like.

[0023] The communication unit 121 is a communication interface capable of transmitting and receiving various information to and from, for example, a device (external device) outside the depth measurement device 1. The communication unit 121 may communicate with, for example, the X-ray source 2 and the detection unit 3. Further, the communication unit 121 may communicate with, for example, a server and a user terminal (not shown). The user terminal may be, for example, a terminal used by the user of the depth measurement device 1, and may be a desktop, laptop, tablet, smartphone, or the like.

[0024] The storage unit 122 may store, for example, various information and programs. An example of the storage unit 122 may be a memory, a solid state drive, a hard disk drive, or the like. Note that the storage unit 122 may be, for example, a storage area and a server on the cloud.

[0025] The display unit 123 is, for example, a display capable of displaying various characters, symbols, images, and the like.

[0026] The X-ray source control unit 111 controls the X-ray source 2 to irradiate the member 20 with X-rays while sliding the X-ray source 2 in a direction intersecting the depth direction of the opening 230 in the member 20. That is, the X-ray source control unit 111 controls the X-ray source 2 via the communication unit 121. As an example, the X-ray source control unit 111 controls the X-ray source 2 to slide. As illustrated in FIG. 3, the sliding direction may be, for example, a direction (intersecting direction X) intersecting the depth direction Y of the opening 230 formed in the member 20, particularly an orthogonal direction or the like. Thereby, the X-ray source control unit 111 slides the X-ray source 2, that is, moves the X-ray source 2 in multiple steps or continuously in the intersecting direction X, and irradiates the member 20 with X-rays a plurality of times from the X-ray source 2. An opening 230 is formed inside the member 20. The opening 230 may be, for example, a hole penetrating the member 20, a hole having a bottom, or a void serving as a space.

[0027] The first acquisition unit 112 acquires, for example, image information (e.g., first transmitted X-ray image information, second transmitted X-ray image information, etc.) generated in response to detecting X-rays (transmitted X-rays) that have passed through the member 20 in the detection unit 3 via the communication unit 121. The first transmitted X-ray image information is image information based on detecting, by the detection unit 3, X-rays that have passed through the member 20 when the X-ray source 2 is at the first position P 1 with respect to the member 20. The image based on the first transmitted X-ray image information may be referred to as the first image. The second transmitted X-ray image information is image information based on detecting, by the detection unit 3, X-rays that have passed through the member 20 when the X-ray source 2 is at the second position P 1 different from the first position P 2 with respect to the member 20. The image based on the second transmitted X-ray image information may be referred to as the second image.

[0028] The second acquisition unit 113 acquires the rate of change in luminance at the peripheral edge (contour portion 231) of the image of the opening 230 recorded in the image (superimposed image) when the first image and the second image are superimposed. The second acquisition unit 113 superimposes the first image and the second image, and based on the difference in the X-ray transmission amount T at the contour portion 231 of the opening 230 in the superimposed image, acquires the rate of change in luminance of the contour portion 231 (peripheral edge of the image) of the opening 230. The second acquisition unit 113, based on a plurality of images acquired in response to the slide movement of the X-ray source 2, for each slide movement of the X-ray source 2, that is, for each deviation amount L 1 from the reference position L 12 of the position where the opening 230 is projected onto the detection unit 3, acquires the rate of change in luminance. The deviation amount L 12 is the distance between the reference position L 1 opposite the member 20 in the detection unit 3 and the position L 2 in the detection unit 3 where the opening 230 is projected when each of the plurality of images (e.g., images based on the first transmitted X-ray image information and the second transmitted X-ray image information respectively) is acquired.

[0029] When overlapping a plurality of images (e.g., the first image, the second image, etc.) in which an image of the opening 230 is recorded, based on irradiating X-rays while sliding the X-ray source 2, when the apparent movement amount of the X-ray source 2 with respect to the opening 230 is small, it is considered that the contour portion 231 of the opening 230 obtained by overlapping the plurality of images becomes clearer. Similarly, when the apparent movement amount of the X-ray source 2 with respect to the opening 230 is large, it is considered that the contour portion 231 of the opening 230 obtained by overlapping the images becomes less clear.

[0030] When the opening 230 is at a shallower position (a position closer to the X-ray source 2 side) with respect to the depth direction Y, when the X-ray source 2 moves from a position closer to the opening 230 (when the movement amount d illustrated in FIG. 3 is small), it is considered that the apparent movement amount of the X-ray source 2 with respect to the opening 230 (e.g., the movement amount in the -X direction (see FIG. 3) of the image of the opening 230 projected onto the detection unit 3) becomes larger. That is, in this case, it is considered that the contour portion 231 of the opening 230 obtained by overlapping a plurality of images (e.g., the first image, the second image, etc.) becomes less clear. Similarly, when the opening 230 is at a shallower position (a position closer to the X-ray source 2 side) with respect to the depth direction Y, when the X-ray source 2 moves from a position farther from the opening 230 (when the movement amount d illustrated in FIG. 3 is large), it is considered that the apparent movement amount of the X-ray source 2 with respect to the opening 230 (e.g., the movement amount in the -X direction of the image of the opening 230 projected onto the detection unit 3) becomes smaller. That is, in this case, it is considered that the contour portion 231 of the opening 230 obtained by overlapping the plurality of images becomes clearer.

[0031] Further, when the opening 230 is at a deeper position (a position closer to the detection unit 3 side) with respect to the depth direction Y, when the X-ray source 2 moves from a position closer to the opening 230 (when the movement amount d illustrated in FIG. 3 is small), it is considered that the apparent movement amount of the X-ray source 2 with respect to the opening 230 (e.g., the movement amount in the -X direction of the image of the opening 230 projected onto the detection unit 3) becomes smaller. That is, in this case, it is considered that the contour portion 231 of the opening 230 obtained by overlapping the images becomes clearer. Similarly, when the opening 230 is at a deeper position with respect to the depth direction Y (a position closer to the detection unit 3), when the X-ray source 2 moves to a position farther from the opening 230 (when the movement amount d illustrated in FIG. 3 is large), it is considered that the apparent movement amount of the X-ray source 2 with respect to the opening 230 (for example, the movement amount in the -X direction of the image of the opening 230 projected onto the detection unit 3) becomes larger. That is, in this case, it is considered that the contour portion 231 of the opening 230 where the images are superimposed becomes less clear.

[0032] The contour portion 231 of the opening 230 is specified, for example, according to the X-ray transmission amount. When the X-ray transmission amount is larger, it can be estimated that there is the opening 230, and when the X-ray transmission amount is smaller, it can be estimated that there is no opening 230. Therefore, when a plurality of images (for example, the first image, the second image, etc.) are superimposed, if the movement of the opening 230 is larger, the deviation of the images of the plurality of openings 230 becomes larger (see FIG. 4(A)), the contour portion 231 of the opening 230 becomes less clear, and the difference in the X-ray transmission amount T of the contour portion 231 of the opening 230 (the boundary between the inside and outside of the opening) becomes a gentler variation (see FIG. 4(B)). The contour portion 231 of the opening 230 corresponds to the peripheral portion of the image of the opening 230 described above. Here, when the transmitted X-ray amount T is large, the luminance value recorded in the transmitted X-ray image information becomes high, and when the transmitted X-ray amount T is small, the luminance value recorded in the transmitted X-ray image information becomes low. Therefore, when the difference in the X-ray transmission amount T varies more gently, the value of the change rate of luminance becomes relatively small. Similarly, when a plurality of transmitted X-ray images are superimposed, if the movement of the opening 230 is smaller, the deviation of the images of the plurality of openings 230 becomes smaller (see FIG. 4(C)), the contour portion 231 of the opening 230 becomes clearer, and the difference in the X-ray transmission amount T of the contour portion 231 of the opening 230 (the boundary between the inside and outside of the opening) becomes a more rapid variation (see FIG. 4(D)). Therefore, when the difference in the X-ray transmission amount T varies more rapidly, the value of the change rate of luminance becomes relatively high.

[0033] The third acquisition unit 114 is a reference position L facing the member 20 in the detection unit 3 1and the position L in the detection unit 3 where the opening 230 is projected when the first transmitted X-ray image information and the second transmitted X-ray image information are each obtained 2 ,… the deviation amount L 12 to obtain the depth α of the opening 230 corresponding to the reference position L 1 may be, for example, a position facing the member 20 in the detection unit 3. The position L where the image of the opening 230 is obtained 2 may be, for example, a position in the detection unit 3 where the opening 230 is projected when each of a plurality of images (for example, images (first image and second image) based on the first transmitted X-ray image information and the second transmitted X-ray image information, etc.) is obtained

[0034] The deviation amount L 12 and the depth α of the opening 230 have a corresponding relationship, and the deviation amount L 12 is the depth α from the position of the X-ray source 2 to the opening 230. That is, the third acquisition unit 114 sets the depth of the opening 230 to α and the deviation amount to L 12 Assuming that the slide movement amount of the X-ray source 2 is d, and the depth direction distance between the X-ray source 2 and the detection unit 3 is β, the depth α of the opening 230 is calculated by the following formula (1), and the deviation amount L 12 corresponding to may be obtained

[0035]

Equation

[0036] Since the slide movement amount d and the depth direction Y distance β between the X-ray source 2 and the detection unit 3 are known values, based on formula (1), the depth α of the opening 230 and the deviation amount L 12 have a corresponding relationship. In addition, by performing experiments or the like in advance, the corresponding relationship between the value of the depth α of the opening 230 and the value of the deviation amount L 12 may be obtained in advance

[0037] FIG. 5 is a diagram showing the relationship between the depth (depth) α of the opening 230 and the change rate of luminance In FIG. 5, the horizontal axis represents the depth α of the opening, and the vertical axis represents the change rate of luminance. In FIG. 5, the dots represent the change rate of luminance acquired by the second acquisition unit 113, and the solid line represents the approximate curve C obtained by approximating the change rates of a plurality of luminances.

[0038] The specifying unit 115 approximates the relationship between the change rate of luminance acquired by the second acquisition unit 113 and the depth α acquired by the third acquisition unit 114 based on an approximation formula, and determines the depth α of the opening 230 corresponding to the vertex P when the approximation is made. 1 As illustrated in FIG. 5, the specifying unit 115 creates a graph of the relationship between the change rate of luminance corresponding to the slide movement of the X-ray source 2 acquired by the second acquisition unit 113 and the depth α (depth) (shift amount L 12 ) of the opening 230 acquired by the third acquisition unit 114, and performs approximation calculation on the relationship using an approximation formula. The approximation formula may be a formula for calculating various approximation curves C such as quadratic curves and cubic curves.

[0039] As described above, in the contour portion 231 (peripheral portion of the image) of the opening 230, there are cases where the value of the change rate of luminance becomes relatively high and cases where the value of the change rate of luminance becomes relatively low, and the graph created by plotting the relationship between the change rate of luminance and the depth α of the opening 230 has a shape convex upward. Therefore, the approximate curve C also has a shape convex upward. The specifying unit 115 performs an approximation with a vertex P on the upper side based on the approximation formula, and may specify the depth α of the opening 230 corresponding to the vertex P. That is, the specifying unit 115 specifies (estimates) the depth α of the opening 230 corresponding to the vertex P (the maximum value of the change rate of luminance in the approximate curve C) that is convex upward in the approximate curve C. 1 The specifying unit 115 specifies the depth α of the opening 230 corresponding to the vertex P (the maximum value of the change rate of luminance in the approximate curve C) that is convex upward in the approximate curve C. 1 That is, the specifying unit 115 specifies (estimates) the depth α of the opening 230 corresponding to the vertex P (the maximum value of the change rate of luminance in the approximate curve C) that is convex upward in the approximate curve C.

[0040] The output control unit 116 may control the output unit to output the depth α of the opening 230 specified by the specifying unit 115. The output unit may be, for example, the communication unit 121, the storage unit 122, the display unit 123, or the like. 1 That is, the output control unit 116, for example, controls the output unit to output the depth α of the opening 230 specified by the specifying unit 115. That is, the output control unit 116, for example, controls the output unit to output the depth α of the opening 230 specified by the specifying unit 115. 1The communication unit 121 may be controlled to transmit information regarding [the subject] to an external device. The external device here may be, for example, a server and a user terminal (not shown), etc. The output control unit 116 may control the storage unit 122 to store information regarding, for example, the depth α of the opening 230 specified by the specifying unit 115. 1 The output control unit 116 may control the display unit 123 to display, for example, the depth α of the opening 230 specified by the specifying unit 115. 1

[0041] [Depth measurement method] Next, a depth measurement method according to an embodiment will be described. FIG. 6 is a flowchart for explaining a depth measurement method according to an embodiment.

[0042] In step ST101, the X-ray source control unit 111 controls the X-ray source 2 to irradiate the member 20 while sliding the X-ray source 2 in a direction intersecting the depth direction of the opening 230 in the member 20.

[0043] In step ST102, the first acquisition unit 112 acquires a plurality of pieces of image information (for example, first transmitted X-ray image information and second transmitted X-ray image information, etc.) generated in response to detecting the X-ray (transmitted X-ray) that has passed through the member 20 in the detection unit 3. The first transmitted X-ray image information is image information based on detecting, by the detection unit 3, the X-ray that has passed through the member 20 when the X-ray source 2 is at the first position P 1 with respect to the member 20. The image based on the first transmitted X-ray image information may be referred to as the first image. The second transmitted X-ray image information is image information based on detecting, by the detection unit 3, the X-ray that has passed through the member 20 when the X-ray source 2 is at the second position P 1 different from the first position P 2 with respect to the member 20. The image based on the second transmitted X-ray image information may be referred to as the second image.

[0044] In step ST103, the second acquisition unit 113 acquires the change rate of luminance at the peripheral edge (contour part 231) of the image of the opening 230 recorded in the image when the first image and the second image are superimposed.

[0045] In step ST104, the third acquisition unit 114 acquires the reference position L facing the member 20 in the detection unit 3 1 and the position L in the detection unit 3 where the opening 230 is projected when the first transmission X-ray image information and the second transmission X-ray image information are acquired respectively 2 , … and the displacement amount L 12 corresponding to the depth α of the opening 230. When the depth α of the opening 230 is calculated by the formula (1), the third acquisition unit 114 may acquire the depth α of the opening 230 corresponding to the displacement amount L 12 based on the formula (1).

[0046] In step ST105, the specifying unit 115 performs approximation based on an approximate formula regarding the relationship between the change rate of luminance acquired in step ST103 and the depth α acquired in step ST104, and specifies the depth α 1 of the opening 230 corresponding to the vertex P when approximated. The specifying unit 115 may perform approximation with the vertex P on the upper side based on the approximate formula (obtain the approximate curve C), and specify the depth α 1 of the opening 230 corresponding to the vertex P of the approximate curve C.

[0047] [Experimental results] Next, the experimental results when obtaining the depth (thickness) of the opening 230 using the method of the present embodiment will be described. FIG. 7 is a diagram showing the experimental results using the method of the present embodiment.

[0048] In this experiment, regarding the distance in the depth direction of the two openings 230 formed inside the member 20 (the correct depth (distance) is 8 mm), the case of using the method of the present embodiment and the case of using the measured values without using the approximate curve C were compared. When the method of this embodiment is used, the depths (depths) of the openings 230 corresponding to the vertices of the approximate curve C are 170.78 mm and 178.81 mm, and the difference between the two (the depth obtained by the method of this embodiment) is 8.03 mm. In this case, the error from the correct depth is +0.03 mm. On the other hand, when using the measured values, the depths (depths) of the openings 230 corresponding to the highest luminance change rates among the plurality of black dots (measured values) are 170.95 mm and 178.70 mm, and the difference between the two (the depth obtained based on pixels) is 7.75 mm. In this case, the error from the correct depth is -0.25 mm. From the above, it can be seen that when using the method of this embodiment, the accuracy in obtaining the depth is higher than when using the measured values.

[0049] [Modification Example] (Modification Example 1) In the above-described embodiment, an example in which the specific part 115 calculates the approximate curve C based on the approximate formula and specifies the depth α of the opening 230 corresponding to the vertex P that is convex upward on the approximate curve C 1 has been described. As a modification example in this case, the specific part 115 may use a linear equation as the approximate formula and perform approximation by the linear equation on each of the side where the plurality of luminance change rates increase and the side where the plurality of luminance change rates decrease in the graph plotting the relationship between the luminance change rate and the depth α of the opening 230. Further, the specific part 115 may obtain the intersection of the two approximated straight lines (approximate with a vertex on the upper side), and specify the opening 230 corresponding to the intersection (vertex) with the intersection as the vertex.

[0050] (Modification Example 2) In the above-described embodiment, an example of measuring the depth of the opening 230 has been described. As a modification, a lead member or the like may be arranged on the side surface of the member (the side surface along the X-axis (the surface along the detection surface of the detection unit)), and the depth to the lead member may be measured. In this case, in the opening used in the above-described embodiment, the transmission amount is as shown in FIG. 4, while in the modification, the member transmits electromagnetic waves such as X-rays, but the lead member shields electromagnetic waves such as X-rays, so the high and low of the transmission amount is opposite to the case shown in FIG. 4. Even in the case of this modification, the depth measurement device 1 can specify the depth of the lead member corresponding to the apex of the approximate curve that is convex downward by performing approximate calculation in the same manner as in the above-described embodiment. That is, the depth measurement device an X-ray source control unit that controls the X-ray source to irradiate the member while sliding the X-ray source in a direction intersecting the depth direction of a predetermined member (for example, a member that shields electromagnetic waves such as X-rays (for example, a lead member or the like)) arranged on the member; a first acquisition unit that acquires first transmitted X-ray image information based on detecting, by a detection unit, X-rays transmitted through the member when the X-ray source is at a first position with respect to the member, and second transmitted X-ray image information based on detecting, by the detection unit, X-rays transmitted through the member when the X-ray source is at a second position different from the first position with respect to the member; a second acquisition unit that acquires a change rate of luminance at the peripheral edge of an image of the predetermined member recorded in an image obtained by overlapping a first image based on the first transmitted X-ray image information and a second image based on the second transmitted X-ray image information, a reference position facing the member in the detection unit, and a depth of the predetermined member corresponding to a deviation amount between the position in the detection unit where the predetermined member is projected when each of the first transmitted X-ray image information and the second transmitted X-ray image information is acquired; and a specifying unit that performs approximation based on an approximate expression regarding the relationship between the change rate of luminance acquired by the second acquisition unit and the depth acquired by the third acquisition unit, and specifies the depth of the predetermined member corresponding to the apex when approximated. In this case, in the depth measurement device, the specifying unit may perform an approximation having an apex on the lower side based on the approximate expression and specify the depth of the predetermined member corresponding to the apex.

[0051] (Modification 3) In the above-described embodiment, an apparatus using X-rays has been described. However, in the depth measurement apparatus 1 and the like of the present disclosure, not only X-rays may be used, but also electromagnetic waves such as light and radiation having various wavelengths (wavelength ranges) may be used. In this case, the depth measurement apparatus 1 and the like may specify the depth of an opening in a member based on, for example, acquiring a transmission image using electromagnetic waves such as light and radiation including infrared light, visible light, and ultraviolet light. An example of a member when acquiring a transmission image using electromagnetic waves having various wavelengths (wavelength ranges) and specifying the depth may be a member made of various materials including metals, semiconductors, semiconductor substrate materials for semiconductor manufacturing, glass, and resin. In this case, the depth measurement apparatus an electromagnetic wave source control unit that controls the electromagnetic wave source to irradiate the member with electromagnetic waves while sliding the electromagnetic wave source (for example, a light source and a radiation source) in a direction intersecting the depth direction of the opening in the member; a first acquisition unit that acquires first transmission image information based on detecting, by a detection unit, the electromagnetic wave transmitted through the member when the electromagnetic wave source is at a first position with respect to the member, and second transmission image information based on detecting, by the detection unit, the electromagnetic wave transmitted through the member when the electromagnetic wave source is at a second position different from the first position with respect to the member; a second acquisition unit that acquires a change rate of luminance at the peripheral edge of the image of the opening recorded in the image when the first image based on the first transmission image information and the second image based on the second transmission image information are overlaid; a third acquisition unit that acquires the depth of the opening corresponding to the deviation amount between the reference position facing the member in the detection unit and the position in the detection unit where the opening is projected when the first transmission image information and the second transmission image information are respectively acquired; and a specifying unit that approximates the relationship between the change rate of luminance acquired by the second acquisition unit and the depth acquired by the third acquisition unit based on an approximation formula, and specifies the depth of the opening corresponding to the apex when approximated.

[0052] [Regarding Functions and Circuits] Next, the functions and circuits of the depth measurement device 1 described above will be explained. Each part of the depth measurement device 1 may be realized as a function of an arithmetic processing unit of a computer or the like. That is, the X-ray source control unit 111, the first acquisition unit 112, the second acquisition unit 113, the third acquisition unit 114, the specifying unit 115, and the output control unit 116 (control unit 110) of the depth measurement device 1 may be realized as an X-ray source control function, a first acquisition function, a second acquisition function, a third acquisition function, a specifying function, and an output control function (control function) by an arithmetic processing unit of a computer or the like, respectively. The depth measurement program can cause a computer to realize each of the functions described above. The depth measurement program may be recorded, for example, on a non-transitory computer-readable storage medium such as a memory, a solid state drive, a hard disk drive, or an optical disk. The storage medium may be, for example, rephrased as a non-transitory computer-readable medium that stores the depth measurement program. Also, as described above, each part of the depth measurement device 1 may be realized by an arithmetic processing unit of a computer or the like. The arithmetic processing unit or the like is constituted by, for example, an integrated circuit or the like. Therefore, each part of the depth measurement device 1 may be realized as a circuit that constitutes the arithmetic processing unit or the like. That is, the X-ray source control unit 111, the first acquisition unit 112, the second acquisition unit 113, the third acquisition unit 114, the specifying unit 115, and the output control unit 116 (control unit 110) of the depth measurement device 1 may be realized as an X-ray source control circuit, a first acquisition circuit, a second acquisition circuit, a third acquisition circuit, a specifying circuit, and an output control circuit (control circuit) that constitute an arithmetic processing unit of a computer or the like. In addition, the communication unit 121, the storage unit 122, and the display unit 123 (output unit) of the depth measurement device 1 may be realized as a communication function, a storage function, and a display function (output function) including functions such as an arithmetic processing unit, for example. Further, the communication unit 121, the storage unit 122, and the display unit 123 (output unit) of the depth measurement device 1 may be realized as a communication circuit, a storage circuit, and a display circuit (output circuit) by being configured by, for example, an integrated circuit or the like. Further, the communication unit 121, the storage unit 122, and the display unit 123 (output unit) of the depth measurement device 1 may be configured as a communication device, a storage device, and a display device (output device) by being configured by, for example, a plurality of devices.

[0053] The depth measurement device 1 can combine one or any plurality of the above-described plurality of units. In the present disclosure, the term "information" is used, but the term "information" can be replaced with "data", and the term "data" can be replaced with "information".

[0054] [Aspects and Effects of the Present Embodiment] Next, one aspect of the present embodiment and the effects achieved by each aspect will be described. Note that each aspect described below is an example at the time of filing, and the present embodiment is not limited to the aspects described below. That is, the present embodiment is not limited to the aspects described below, and may be realized by appropriately combining the above-described units. Also, a lower aspect may be cited in any of the higher aspects. In addition, the effects described below are examples, and the effects achieved by each aspect are not limited to those described below. Also, each aspect may achieve, for example, at least one of the effects described below.

[0055] (Aspect 1) A depth measurement device according to one aspect includes an X-ray source controller that controls an X-ray source to irradiate a member with X-rays while sliding the X-ray source in a direction intersecting the depth direction of an opening in the member; first transmission X-ray image information based on detecting, by a detection unit, X-rays transmitted through the member when the X-ray source is at a first position with respect to the member; a first acquisition unit that acquires second transmission X-ray image information based on detecting, by the detection unit, X-rays transmitted through the member when the X-ray source is at a second position different from the first position with respect to the member; a second acquisition unit that acquires a change rate of luminance at a peripheral portion of an image of the opening recorded in an image obtained by overlapping a first image based on the first transmission X-ray image information and a second image based on the second transmission X-ray image information; a reference position facing the member in the detection unit; a third acquisition unit that acquires the depth of the opening corresponding to a deviation amount between the reference position facing the member in the detection unit and the position in the detection unit where the opening is projected when each of the first transmission X-ray image information and the second transmission X-ray image information is acquired; and a specifying unit that approximates the relationship between the change rate of luminance acquired by the second acquisition unit and the depth acquired by the third acquisition unit based on an approximation formula and specifies the depth of the opening corresponding to the vertex when approximated. Thereby, the depth measurement device can specify, as the depth of the opening in the member, the depth of the opening corresponding to the vertex when approximated based on the approximation formula. The depth measurement device is specified based on a plurality of images acquired each time the X-ray source is slid, that is, compared with the depth of the opening specified corresponding to the maximum value of a plurality of stepwise (discrete) change rates of luminance. In the depth measurement device of the present embodiment, since the plurality of stepwise (discrete) change rates of luminance are approximated by an approximation formula, the maximum value of the change rate of luminance can be obtained even in an intermediate portion between multiple steps, and the accuracy of the depth of the opening can be further improved.

[0056] Also, the depth measurement device acquires the luminance recorded in the image information, but generates luminance information in units of pixels constituting the detection unit. Here, in the measured values shown in the above-described experimental results, since it is based on the luminance information generated in units of pixels, the depth of the opening cannot be acquired with higher accuracy (resolution) than the pixel size. In this regard, the depth measurement device of the present embodiment performs approximate calculation using an approximate formula for a plurality of luminance change rates, and specifies the depth of the opening corresponding to the vertex of the approximate curve obtained thereby, so that the depth of the opening can be obtained with higher accuracy than the resolution of the pixels.

[0057] (Aspect 2) In the depth measurement device of one aspect, the specifying unit may perform an approximation with a vertex on the upper side based on the approximate formula, and specify the depth of the opening corresponding to the vertex. Thereby, the depth measurement device can specify the depth of the opening using the vertex of the upwardly convex approximate curve based on the approximate formula, and can further improve the accuracy of the depth of the opening.

[0058] (Aspect 3) In the depth measurement device of one aspect, when the depth of the opening is α, the deviation amount is L 12 , the slide movement amount of the X-ray source is d, and the depth direction distance between the X-ray source and the detection unit is β, the depth α of the opening is calculated by the following formula (1), and the depth α of the opening corresponding to the deviation amount L 12 may be obtained based on formula (1). Thereby, the depth measurement device can specify that there is a correspondence relationship between the depth α of the opening and the deviation amount L 12 , and can obtain the depth α of the opening based on the deviation amount L 12 .

[0059] (Aspect 4) In a depth measurement method according to one aspect, an X-ray source control step is performed in which a computer controls an X-ray source to irradiate a member while sliding the X-ray source in a direction intersecting the depth direction of an opening in the member; a first transmitted X-ray image information based on detecting, by a detection unit, the X-rays transmitted through the member when the X-ray source is at a first position with respect to the member; a first acquisition step of acquiring a second transmitted X-ray image information based on detecting, by the detection unit, the X-rays transmitted through the member when the X-ray source is at a second position different from the first position with respect to the member; a second acquisition step of acquiring a change rate of luminance at a peripheral edge of an image of the opening recorded in an image obtained by overlapping a first image based on the first transmitted X-ray image information and a second image based on the second transmitted X-ray image information; a third acquisition step of acquiring a depth of the opening corresponding to a deviation amount between a reference position facing the member in the detection unit and a position in the detection unit where the opening is projected when each of the first transmitted X-ray image information and the second transmitted X-ray image information is acquired; and a specifying step of performing an approximation based on an approximate expression on the relationship between the change rate of luminance acquired in the second acquisition step and the depth acquired in the third acquisition step, and specifying the depth of the opening corresponding to a vertex when the approximation is performed. Accordingly, the depth measurement method can achieve the same effects as the depth measurement apparatus according to the one aspect described above.

[0060] (Aspect 5) A depth measurement program for one aspect causes a computer to control an X-ray source to irradiate a member with X-rays while sliding the X-ray source in a direction intersecting the depth direction of an opening in the member, an X-ray source control function; first transmitted X-ray image information based on detecting, by a detection unit, the X-rays transmitted through the member when the X-ray source is at a first position with respect to the member; a first acquisition function for acquiring second transmitted X-ray image information based on detecting, by the detection unit, the X-rays transmitted through the member when the X-ray source is at a second position different from the first position with respect to the member; a second acquisition function for acquiring a change rate of luminance at a peripheral edge of an image of the opening recorded in an image when a first image based on the first transmitted X-ray image information and a second image based on the second transmitted X-ray image information are superimposed; a third acquisition function for acquiring a depth of the opening corresponding to a deviation amount between a reference position facing the member in the detection unit and a position in the detection unit where the opening is projected when each of the first transmitted X-ray image information and the second transmitted X-ray image information is acquired; an approximation is performed based on an approximation formula for the relationship between the change rate of luminance acquired by the second acquisition function and the depth acquired by the third acquisition function, and a specifying function for specifying the depth of the opening corresponding to a vertex when approximated. Thereby, the depth measurement program can achieve the same effect as the depth measurement device of the above-described one aspect.

Explanation of Signs

[0061] 1 Depth measurement device 2 X-ray source 3 X-ray detection unit (detection unit) 10 Processing unit 110 Control unit 111 X-ray source control unit 112 First acquisition unit 113 Second acquisition unit 114 Third acquisition unit 115 Specifying unit 116 Output control unit 121 Communication unit 122 Storage unit 123 Display unit 20 Member 230 Opening 231 Contour portion

Claims

1. An X-ray source control unit that controls the X-ray source to irradiate the member with X-rays while sliding the X-ray source in a direction intersecting the depth direction of the opening in the member; A first acquisition unit that acquires first transmitted X-ray image information based on detecting, by a detection unit, X-rays transmitted through the member when the X-ray source is at a first position with respect to the member, and second transmitted X-ray image information based on detecting, by the detection unit, X-rays transmitted through the member when the X-ray source is at a second position different from the first position with respect to the member; A second acquisition unit that acquires a change rate of luminance at the peripheral edge of the image of the opening recorded in the image when the first image based on the first transmitted X-ray image information and the second image based on the second transmitted X-ray image information are overlaid; A third acquisition unit that acquires the depth of the opening corresponding to the amount of deviation between a reference position facing the member in the detection unit and the position in the detection unit where the opening is projected when each of the first transmitted X-ray image information and the second transmitted X-ray image information is acquired; A specifying unit that approximates the relationship between the change rate of luminance acquired by the second acquisition unit and the depth acquired by the third acquisition unit based on an approximation formula, and specifies the depth of the opening corresponding to the vertex at the time of approximation; A depth measurement device comprising the above.

2. The specifying unit performs an approximation with a vertex on the upper side based on an approximation formula, and specifies the depth of the opening corresponding to the vertex. The depth measurement device according to Claim 1.

3. The third acquisition unit sets the depth of the opening as α and the deviation amount as L １２ When the slide movement amount of the X-ray source is d and the distance in the depth direction between the X-ray source and the detection unit is β, the depth α of the opening is calculated by the following formula (1), and the depth of the opening corresponding to the deviation amount is acquired based on formula (1). 【Number 1】 The depth measurement device according to Claim 1.

4. A computer performs: An X-ray source control step of controlling the X-ray source to irradiate the member with X-rays while sliding the X-ray source in a direction intersecting the depth direction of the opening in the member; A first acquisition step of acquiring first transmitted X-ray image information based on detecting, by a detection unit, X-rays transmitted through the member when the X-ray source is at a first position with respect to the member, and second transmitted X-ray image information based on detecting, by the detection unit, X-rays transmitted through the member when the X-ray source is at a second position different from the first position with respect to the member; A second acquisition step of acquiring a change rate of luminance at the peripheral edge of the image of the opening recorded in the image when the first image based on the first transmitted X-ray image information and the second image based on the second transmitted X-ray image information are overlaid; A third acquisition step of acquiring the depth of the opening corresponding to the deviation amount between the reference position facing the member in the detection unit and the position in the detection unit where the opening is projected when acquiring the first transmission X-ray image information and the second transmission X-ray image information respectively; A specifying step of approximating based on an approximation formula the relationship between the change rate of luminance acquired in the second acquisition step and the depth acquired in the third acquisition step, and specifying the depth of the opening corresponding to the vertex when approximated; A depth measurement method for executing the above.

5. On a computer, An X-ray source control function for controlling the X-ray source to irradiate the member while sliding the X-ray source in a direction intersecting the depth direction of the opening in the member; A first acquisition function for acquiring first transmission X-ray image information based on detecting the X-ray transmitted through the member by the detection unit when the X-ray source is at a first position with respect to the member, and second transmission X-ray image information based on detecting the X-ray transmitted through the member by the detection unit when the X-ray source is at a second position different from the first position with respect to the member; A second acquisition function for acquiring the change rate of luminance at the peripheral edge of the image of the opening recorded in the image when the first image based on the first transmission X-ray image information and the second image based on the second transmission X-ray image information are overlapped; A third acquisition function for acquiring the depth of the opening corresponding to the deviation amount between the reference position facing the member in the detection unit and the position in the detection unit where the opening is projected when acquiring the first transmission X-ray image information and the second transmission X-ray image information respectively; A specifying function for approximating based on an approximation formula the relationship between the change rate of luminance acquired by the second acquisition function and the depth acquired by the third acquisition function, and specifying the depth of the opening corresponding to the vertex when approximated; A depth measurement program for realizing the above.

Images